TW201251099A - Method and apparatus for texturing a sheet wafer - Google Patents
Method and apparatus for texturing a sheet wafer Download PDFInfo
- Publication number
- TW201251099A TW201251099A TW101106818A TW101106818A TW201251099A TW 201251099 A TW201251099 A TW 201251099A TW 101106818 A TW101106818 A TW 101106818A TW 101106818 A TW101106818 A TW 101106818A TW 201251099 A TW201251099 A TW 201251099A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- sheet
- front side
- type
- fabricating
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000003746 surface roughness Effects 0.000 claims abstract description 12
- 235000012431 wafers Nutrition 0.000 claims description 154
- 239000004576 sand Substances 0.000 claims description 26
- 238000005422 blasting Methods 0.000 claims description 19
- 238000005488 sandblasting Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 230000007723 transport mechanism Effects 0.000 abstract 2
- 239000000463 material Substances 0.000 description 17
- 239000013078 crystal Substances 0.000 description 14
- 239000010410 layer Substances 0.000 description 10
- 239000006117 anti-reflective coating Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- -1 oxide) Chemical compound 0.000 description 2
- 238000009941 weaving Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- 241000237536 Mytilus edulis Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000009096 changqing Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 210000000003 hoof Anatomy 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 235000020638 mussel Nutrition 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000013404 process transfer Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
- 239000003826 tablet Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
Landscapes
- Photovoltaic Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Helmets And Other Head Coverings (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161447898P | 2011-03-01 | 2011-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201251099A true TW201251099A (en) | 2012-12-16 |
Family
ID=46758492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101106818A TW201251099A (en) | 2011-03-01 | 2012-03-01 | Method and apparatus for texturing a sheet wafer |
Country Status (4)
| Country | Link |
|---|---|
| CA (1) | CA2885922A1 (es) |
| MX (1) | MX2013010077A (es) |
| TW (1) | TW201251099A (es) |
| WO (1) | WO2012118960A2 (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111211184A (zh) * | 2019-12-30 | 2020-05-29 | 浙江爱旭太阳能科技有限公司 | 一种利用微喷砂技术增强单晶硅电池前表面陷光效果的方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017203977A1 (de) | 2017-03-10 | 2018-09-13 | Gebr. Schmid Gmbh | Verfahren zur Herstellung texturierter Wafer und Aufrausprühstrahlbehandlungsvorrichtung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3487223A (en) * | 1968-07-10 | 1969-12-30 | Us Air Force | Multiple internal reflection structure in a silicon detector which is obtained by sandblasting |
| US20100055398A1 (en) * | 2008-08-29 | 2010-03-04 | Evergreen Solar, Inc. | Single-Sided Textured Sheet Wafer |
-
2012
- 2012-03-01 TW TW101106818A patent/TW201251099A/zh unknown
- 2012-03-01 CA CA2885922A patent/CA2885922A1/en not_active Withdrawn
- 2012-03-01 WO PCT/US2012/027266 patent/WO2012118960A2/en not_active Ceased
- 2012-03-01 MX MX2013010077A patent/MX2013010077A/es not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111211184A (zh) * | 2019-12-30 | 2020-05-29 | 浙江爱旭太阳能科技有限公司 | 一种利用微喷砂技术增强单晶硅电池前表面陷光效果的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012118960A3 (en) | 2014-04-17 |
| CA2885922A1 (en) | 2012-09-07 |
| WO2012118960A2 (en) | 2012-09-07 |
| MX2013010077A (es) | 2014-02-27 |
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