TW201245577A - Connection construction for a vacuum exhaust device and a vacuum exhaust system - Google Patents

Abstract

The invention provides a connection construction for a plurality of vacuum exhaust devices, each vacuum exhaust device having a casing in which at least one pump chamber is formed, and an inlet port and an outlet port provided in the casing to communicate with the pump chamber. The plurality of the vacuum exhaust devices are so arranged that their casings are directly connected to enable the pump chambers to communicate with each other. The connection construction has a connection path which allows at least one inlet port of the first vacuum exhaust device of the above said plurality of the vacuum exhaust devices to communicate with at least one of the first outlet port of the second vacuum exhaust device and allows the gas exhausted from the outlet port of the second vacuum exhaust device to flow into the pump chamber of the first vacuum exhaust device through the inlet chamber of the first vacuum exhaust device. The connection construction is also provided with a connection unit disposed outside of each casing of the plurality of the vacuum exhaust devices and connected to the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.

Description

201245577 VI. Description of the Invention: [Technical Field] The present invention relates to a connection structure and vacuum for connecting a plurality of vacuum exhausting devices for decompressing and decompressing a machine for exhausting a vacuum chamber or the like Exhaust system. The present application claims priority based on Japanese Patent Application No. 2010-257143, filed on Jan. [Prior Art] A vacuum exhaust device (vacuum pump) for decompressing and exhausting a gas-exhausted device such as a vacuum chamber is generally connected in series for a gas flow in response to the use of the gas. The vacuum exhaust device achieves the intended performance. For example, a mechanical booster pump is used as the main pump for exhausting the exhaust object to the operating pressure and maintaining the pressure, and an oil rotary pump and a dry pump are used as the vacuum for the vacuum pump. The system is vented from atmospheric pressure to a rough pump that can operate the main pump. By using these vacuum pumps in combination, a vacuum exhaust system that achieves the desired performance is constructed. The combination of the vacuum pump is not limited to this and is diversified, and there are also cases in which three or more vacuum pumps are combined. In the case where a plurality of vacuum pumps are combined as described above, it is common to connect the respective vacuum pumps to the JS when the position is connected by a connecting pipe or the like. For example, 'in general, it is to connect each straight space (-) (set table), by means of::: in the predetermined frame, the pumping of the pump, etc. For example, the non-patent document Q described below discloses a vacuum exhaust system that is connected to the exhaust port of the pump and the suction port of the lower pump by a pipe connection 323687 201245577. Further, in Non-Patent Document 2 below, a vacuum evacuation system in which a vacuum pump is provided in a frame and a vent hole and an intake port of a vacuum pump are connected by a pipe. Furthermore, the vacuum pump connected by the above method is mostly divided into a space formed in a single casing, and is made into a multi-segmented multi-stage structure by making it a plurality of pump chambers ( R〇〇ts) Vacuum pump. In general, in a multi-stage Lu-type vacuum pump, the pump chambers of the respective stages are connected in series (see Patent Document 1 below). (Prior Art Document) (Patent Document) Patent Document 1: Japanese Laid-Open Patent Publication No. 2002-364569 (Non-Patent Document) Non-Patent Document 1: "EDWARDS Vacuum Product Integration Catalog Revision 3" EDWARDS Co., Ltd., P54 Non-Patent Literature 2 : "ULVAC for Vacuum Technology and Next Generation Concept: Oil Rotary Pump Exhaust YM-VD/YM-VS Series (1580L/miri ~ 20000L/min)", [online], UL VAC Co., Ltd., [2010 Search for April 16th], URL <URL: <http://www.ulvac.co.jp/products/compo/F020006.html» [Summary of the Invention] However, as described above In the multi-stage Lu-type vacuum pump, the gas pressure is accompanied by gas compression and movement from the front pump chamber to the rear pump chamber to 323687 201245577 liters. Therefore, the exhaust capacity, that is, the volume of the pump room is the rear section of the pump ~ smaller than the front section of the pump room. That is to say, the volumetric system of a plurality of pumping chambers is limited to a configuration in which a vacuum pump is sequentially reduced. ... Therefore, even in the case of combining such multi-stage Lu vacuum pumps to construct a vacuum exhaust system, the combination of the external components of the plurality of pump rooms is also limited as described above. In the case of the most: the pump room is prioritized, the efficiency of the entire vacuum exhaust system (the anus 6) is often deteriorated. Furthermore, if the overall system space ^^6 is prioritized, it is difficult to construct the optimal pump chamber structure, and it is difficult to construct an efficient vacuum exhaust system. The present invention is developed by considering this problem. It is an object of the invention to provide a connection structure of a vacuum exhaust apparatus that can efficiently perform vacuum evacuation with a small space. (Means for Solving the Problem) In order to achieve the above object, the present invention provides the following means. The connection structure of the vacuum exhaust device of one aspect of the present invention is a connection structure of a plurality of vacuum exhaust devices each having: an outer casing forming at least one pump chamber; The outer casing is connected to the suction port and the exhaust port of the pump chamber. The aforementioned pump chambers of the plurality of vacuum exhausting devices are connected to each other. The foregoing outer casings are configured to be directly coupled to each other. The connection structure described above is provided with a connection unit having a connection path. The connection path is such that at least one intake σ of the first vacuum exhaust device of the plurality of vacuum exhaust devices is connected to the second vacuum exhaust device to a 323687 6 201245577 exhaust ports The gas that is exhausted from the port flows into the aforesaid intake connection unit of the first straight-through vacuum exhaust device via the exhaust port of the mine-type vacuum exhaust device. The outer casing and the outer casing connected to the first plurality of vacuum interrupting devices may be provided with the outer casing and the front connecting unit of the second exhausting device, and the piping member. a connecting member provided by the connecting member and the second connecting member has a first connecting path connected to the first vacuum venting device =:=τ in the connecting path, and 3 is connected to the second 苐-vacuum venting The aforementioned outer casing. The first connecting member has a second connecting path that communicates with the aforementioned connecting path of the aforementioned port of the second vacuum exhausting device, and is connected to the outer casing of the second vacuum exhausting device. The piping member has a piping path that communicates with the connecting path of the first connecting path and the second connecting path, and is connected to the first connecting member and the front second connecting member. At least one of the first connecting member, the second connecting member, and the piping member may be an integrally formed member. The second connecting member may also have a plurality of second connecting paths. And the “connecting structure” may further include: a plurality of valves respectively disposed on the plurality of second connecting paths; and a total exhaust port having a plurality of valves connected to the plurality of second connecting paths through the plurality of valves Between 7t (valve unit) 〇

S 323687 7 201245577 The first connecting member and the second connecting member may be a pedestal on which at least one of the plurality of vacuum exhausting devices is placed. A vacuum exhaust system according to one aspect of the present invention is provided with a plurality of vacuum exhausting devices and a connecting unit. The plurality of vacuum exhausting devices each have: an outer casing forming at least one pumping chamber; and an intake port and an exhaust port provided to the outer casing and communicating to the pump chamber. Further, in order to allow the pump chambers to communicate with each other, the outer casings are arranged to be directly coupled to each other. The aforementioned connecting unit has a connection path. The connecting path is configured to connect at least one intake port of the first vacuum exhaust device of the plurality of vacuum exhaust devices to at least one exhaust port of the second vacuum exhaust device, and to enable the second vacuum from the second vacuum exhaust device The exhaust gas of the exhaust port of the exhaust device flows into the pump chamber of the first vacuum exhaust device via the intake port of the first vacuum exhaust device. The connecting unit is disposed outside each of the plurality of vacuum exhausting devices and is coupled to the outer casing of the first vacuum exhausting device and the outer casing of the second vacuum exhausting device. The vacuum exhaust system may further include a cooling mechanism provided at least in the connecting unit. The aforementioned connecting unit may include a first connecting member, a second connecting member, and a piping member. The first connecting member has a first connecting path connected to the aforementioned connecting path of the suction port of the first vacuum exhausting device, and is connected

8 323687 B 201245577 Connected to the aforementioned outer casing of the aforementioned first vacuum exhaust. The second connecting member has a second connecting path that communicates with the aforementioned connecting port of the exhaust port of the second vacuum exhausting device, and is connected to the outer casing of the second vacuum exhausting device. The piping member has a piping path that communicates with the connecting path of the first connecting path and the second connecting path, and is connected to the first connecting member and the second connecting member. The cooling mechanism may be provided in at least one of the second connecting member and the piping member. In order to arrange the second vacuum exhausting device at a lower portion of the first vacuum exhausting device, the plurality of vacuum exhausting devices are disposed in a stacked manner, and the second connecting member may be disposed in the second vacuum exhausting device. The lower part of the gas device. In order to divide a plurality of pump chambers in the outer casing of the at least one vacuum exhausting device, at least one of the plurality of vacuum exhausting devices may have a partition wall formed in the outer casing. Further, the cooling device described above may be provided in the partition wall. (Effect of the Invention) According to the aspect of the present invention, since the degree of freedom in setting the pump chamber is increased, it is possible to construct a vacuum exhaust system which performs efficient vacuum evacuation with a small space. [Embodiment] Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. Fig. 1 is a perspective view showing the entire vacuum exhaust system 10 of the present embodiment in which the vacuum row s 9 323687 201245577 gas device ΙΑ, IB, 1C is connected through the connection unit 7 (multi-manifold). Fig. 2 is a cross-sectional view showing the overall configuration of the vacuum exhaust system 10. Fig. 3 is a side view of the vacuum exhaust system 10 as viewed from the direction indicated by the symbol A in Fig. 1. The vacuum exhaust system 10 compresses a gas sucked from an intake port 11 of an exhaust target machine such as a vacuum chamber (not shown) by three vacuum exhausting devices 1A to 1C, and A system in which the total exhaust port 12 is exhausted. Among the three vacuum exhaust systems 1A to 1C, the vacuum exhaust unit 1A is a mechanical pressure boosting pump having a single pump chamber 21A (refer to Fig. 2) in the casing. The vacuum exhaust unit 1A is connected to an exhaust apparatus such as a vacuum chamber (not shown). As shown in the cross-sectional view of Fig. 2, the vacuum exhausting devices 1B and 1C are multi-stage Lu vacuum pumps, each having a plurality of pump chambers. In the conventional multi-stage Lu vacuum pump, a plurality of pump chambers formed in the vacuum pump are connected in series, and a multi-stage Lu vacuum pump has no connection with the number of the pump room, and has an intake port. And the exhaust port. In this regard, the vacuum exhaust devices IB, 1C have a plurality of intake ports and exhaust ports for a plurality of pump chambers. That is, the plurality of pump chambers constituting the vacuum exhaust unit IB (1C) of the present embodiment are not connected to all of the pump chambers in series.

In other words, at least two of the plurality of pumping chambers in the plurality of pumping chambers are not connected to other pumping chambers formed in the same casing. Moreover, each of these pumping chambers has its own suction port and exhaust port. In order to connect the suction port and the exhaust port to the exhaust port and the suction port of the adjacent vacuum exhaust device, at least two pump chambers of the plurality of pump chambers and other vacuum exhaust devices 1C are formed. 10 323687 201245577 IB) The connection of the pump room. In order to achieve such a configuration, the vacuum exhaust gas 1C of the present embodiment can be arranged such that the outer casing of the vacuum exhausting device is connected directly to each other by direct connection of the vacuum exhausting devices. Connect and connect. 'To each other

The above configuration will be described with reference to Fig. 2. The vacuum exhausted pump chamber 21B is not connected to the other 1B 22B of the same vacuum exhaust device 1B, but through the pump chamber 21C that is directly connected to the pump chamber 2ib, the Pu to vacuum exhaust device 1C. connection. In addition, the 4lB gas unit 1Β and the vacuum exhaust unit i ic are not used for piping, and are not directly connected to the surface. The details of the mechanism for realizing such a structure will be described later. More advanced 'The vacuum exhaust system 10 is provided with a connection unit 7 (manifold) for complementing the connection of the vacuum exhaust gases to each other. The total IT 7 is divided into a first connecting member 71, a second connecting member 72, a matching & 743, and a valve unit (valve assembly) 74. By combining these with the vacuum exhausting devices 1A to 1C, the connection officer of the plurality of pumping chambers 1 to 1C of the connection 1 to 1C is completed.

The a-th member 71 is a member which is disposed in a block shape interposed between the vacuum exhausting device 1A and the vacuum exhausting device, w, and is integrally formed, for example, formed by casting. The first connecting member 71 is formed with a pumping chamber 21A connecting the pump chamber 21A with the two-row rolling device 1A and the vacuum exhausting device 1B.

S 甩 to 21Β path 75 (refer to Fig. 2), and the shape 11 323687 201245577 has the connection path 76 connected to the Kawasaki member 73 and the vacuum-welding device (refer to Figs. 2 and 3; The path 73 is connected to the side portion ' of the first pipe #1 connected to the pipe member 73. The first connecting path 76 is constituted by two paths connected to the connecting path 76. The first:: connector member 72 is configured to be connected to the vacuum exhaust gas bottom surface, and is connected to the vacuum exhaust system 1 and the valve unit 74. The second connecting member; 2: two structures: 73 (4) chamber of vacuum exhaust device 1C and piping of piping member 7/

78' and connected to the pump chamber of the vacuum exhaust device 1C and the _ element "C connection path 77 (refer to Fig. 3). Vacuum evacuation | Budging; 73 and the valve unit 74 are all connected to the second connecting member?! The first connecting member 72 is supported by the first member, and the second connecting path 77 of the exhausting system 1 is connected to the piping path 78 of the warning member. The two paths 77a and 77b (see FIG. 2) and the exhaust port 43C that communicates with the pump chamber 24C of the vacuum exhaust device 1C and the path 77c that the valve unit 74 is connected to have a total of three paths. Further, the second path The connecting member 72 is a member integrally formed. The piping member 73 is a member having a piping shape. The inside of the connecting portion piping portion 73 is formed with an exhaust port of the vacuum exhaust device ic and an intake of the vacuum exhausting device 1B. The pipe path 78 is connected to the port. The pipe path 78 is divided by two paths corresponding to the first connecting paths 76a and 76b of the first connecting member 71 (see the second 323687 12 201245577). The pipe member 73 is also The 77" face in the long-side direction is second-class. The body-formed member, for example, cast, is shaped as described above, and communicates with the second transfer path 77 76 and the pipe path 78 to form the transfer path from the element 7. The connection path is set in the connection list. Fig. 4 is the second connection member η: 5 is a cross-sectional view shown in Fig. 4. On the upper surface of the block = c = block 725, a pump connection portion of the outer casing connected to the vacuum valve is connected, and the pipe is connected to the pipe member 73. 723 ° Μ ^ ^ ^ 4 721, the joint connecting portion 722, and the circumferential groove of the circumferential joint of the early joint portion 723 are respectively fitted with an ankle ring (S4) sealing members 721d, 722d, and 723d. 5 721, three communication ports mlb, 721c are formed in an arrangement. The three communication cores (4) and ic are respectively connected to the exhaust port "nw" of the vacuum exhaust device Ic, and the connection portion 722 is connected. Two communication u 722a, 722b are formed, and the communication port 722a is connected to the pipe path 78 of the pipe member η. Further, at the valve unit connection portion, three connection ports 723a, 723b are formed in an array manner. 723c. The communication ports 721a, 722a ' 723a are all connected to the second connection path

The road control 77a in S 77 is connected. All of the communication ports 721b, 722b, and 723b communicate with the path 77b of the second connection path 77. The communication ports 721c, 13 323687 201245577 723c are all connected to the path 77c in the second connection path. These configurations are more easily understood by referring to Figure 3. The valve block 70 74 is coupled to the second connecting member 74 and has a total exhaust port 12 as an integral exhaust port of the system. As shown in the cross-sectional view of Fig. 4, the valve unit 74 is provided with a plurality of valves 79 (the check valve total exhaust ports 12 are connected to the paths 77a to 77c through the respective valves 79. Thereby, the vacuum can be constructed The pump chambers of the exhaust unit 1C are individually exhausted, that is, they can be individually exhausted from any of the pump chambers 21C, 22C, and 24c directly connected to the exhaust ports 41C, 42C, and 43C. The valve unit 74 is provided to prevent over-compression caused by the pump, and the loss of power transmission caused by the motor (m〇tor) 8 can be suppressed (1 〇 ss). The plurality of valves 79 can be spherical. It is possible to adjust the pressure to an individual value. When each valve 79 is a regulating valve that can be adjusted to an individual pressure, it is appropriate to set the pressure to expand the pressure range used by the user. The first connecting member 72 and the valve unit % are disposed at the lower portion of the vacuum exhausting device of the last stage, and are also printed at the lowermost portion of the vacuum exhaust system 1〇. Thereby, the vacuum exhaust system can be made as large as possible. The center of gravity is placed below, and the vacuum exhaust system formed by the upper and lower layers can be increased. The stability of the settings. The configuration of the plurality of pump chambers constituting each of the true gas exhausting devices of the present embodiment and the connection order of the pump chambers will be described with reference to Fig. 2 . The vacuum venting ia located at the top & is a supercharged pump with a pump room 14 323687 Ο 201245577 21A. The pump room 21A has an intake port 11 and an ammonia discharge port 41A. The vacuum exhaust unit 1B has three pump chambers 21B, 22B, and 23B. The three pump chambers 21B, 22B, and 23B are provided with three intake ports 31B, 32B, and 33B and exhaust ports 41B, 42B, and 43B, respectively. The vacuum exhaust unit 1C includes four pump chambers 21C, 22C, 23C, and 24C' and has three intake ports 31C, 32C, and 33C and three exhaust ports 41C, CC, and 43C. Two of the four pump chambers 23C and 24C of the vacuum exhaust unit 1C are directly connected to the inside of the casing constituting the vacuum exhaust unit 1C through the connection piping 29. The connecting unit 7 cooperates with the first connecting member 71, the second connecting member 72, and the piping member 73, and is configured to be connected to the exhaust port 41C of the vacuum exhausting device 1C and the intake port 32B of the vacuum exhausting device 1B. Similarly, the connection unit 7 is configured to be connected to the exhaust port 42C of the vacuum exhaust device 1C and the exhaust port 33B of the vacuum exhaust device 1B. Further, the connection unit 7 is configured to be connected to the exhaust port 43C of the vacuum exhaust device and the valve unit 74. Further, as shown in Fig. 3, the paths 77a and 77c of the second connecting path 77 are not only connected to the pumping chamber of the vacuum exhausting device 1c and the piping path 78' of the piping member 73 but also to the pump of the vacuum exhausting device 1C. Chamber and valve unit 74. Next, the flow of the actual gas will be described with reference to Fig. 2 . First, the gas system that has flowed into the vacuum exhaust unit 1A from the intake port 11 is compressed in the pump chamber 21A, and is exhausted from the exhaust port 41A. Next, the gas stream -5 323687 15 201245577 is introduced into the pump chamber 21B of the vacuum exhaust unit 1B and compressed. Next, the gas system flows into the pump chamber 21C of the vacuum exhaust unit 1C directly connected to the pump chamber 21B. The gas system that has been exhausted from the pump chamber 21C flows into the path 77a of the second connection path 77 formed inside the second connecting member 72. The flow of the above gas is as indicated by the arrow F1 in Fig. 2 . The gas that has flowed into the second connecting member 72 flows into the pump chamber 22B of the vacuum exhaust device 1B via the piping path 78 of the piping member 73 (and the first connecting path 76 of the first connecting member 71). Fig. 3 shows the flow of gas from the second connecting member 72 to the other pump chambers of the vacuum exhausting device 1B via the piping member 73 (arrow F4). The gas system flowing into the pump chamber 22B is compressed as shown by the arrow F2 of Fig. 2 to the path leading to the second connecting member 72. Next, the compressed gas in the path indicated by the arrow F3 in Fig. 2 is finally guided to the valve unit 74 and exhausted from the total exhaust port 12. Further, by operating a plurality of valves 79 provided in the valve unit 74, it is also possible to exhaust from the pump chamber 21C or 22C of the vacuum exhaust unit 1C. Hereinafter, the configuration of each vacuum exhaust device 1 will be described in detail. Fig. 6 is a perspective view of the vacuum exhausting device 1B viewed from above. Fig. 7 is a perspective view of the vacuum exhausting device 1B viewed from below. Fig. 8 is a cross-sectional view showing the overall configuration of the vacuum exhausting device 1B. Further, the vacuum exhausting apparatus 1 of the present embodiment includes vacuum exhausting devices 1A to 1C having different pump chamber configurations, but in the following description, a vacuum exhausting device 1B having three pumping chambers will be described. As shown in Fig. 1, the vacuum exhausting devices 1A to 1C are equipped with 16 323 687 201245577 having the outer casing 25 having the same outer shape as a constituent element. By making such an open shape, as shown in the figure, the vacuum exhaust apparatus can be directly stacked for the vacuum exhaust apparatus 1C. Further, by arranging the vacuum exhaust device 1B to be stacked with respect to the vacuum exhaust device 1C, it is possible to directly connect the exhaust port of the upper vacuum exhaust device 1B and the suction of the lower vacuum exhaust device 1C without the pipe. mouth. As shown in Fig. 8, the vacuum exhausting device 1B is a casing 25 having a member of a Lu vacuum pump, which is composed of an upper casing 25a and a lower casing 25b; two rotating shafts 81 and 81 (refer to 3)) 茧-type rotors 82a, 82b, 82c housed in three pump chambers 21B, 22B, 23B divided by the outer casing 25, and motors 8 for driving the rotary shafts 81, 81, respectively. The rotors 82a, 82b, and 82c are each composed of a pair of rotors. The two rotors are respectively arranged on the rotary shaft 81 and housed in the respective pump chambers 21B, 22B, and 23B. The pair of rotors are synchronously rotated in opposite directions by the drive gears 85 provided at the shaft ends of the rotary shafts 81, 81 of the respective rotors. The outer casing 25 will divide the three pump chambers 21B, MB, 23B and form a vacuum exhaust device 1B. Further, the rotating shafts 81, 81 are supported by bearings 83, 84. Each of the pump chambers 21B, MB, and 23B communicates with the suction ports 31, 32, and 33 formed in the upper portion of the casing 25, and communicates with the exhaust ports 41, 42 and 43 forming the lower portion of the casing 25. Next, the outer casing 25 constituting the vacuum exhausting device 1B will be described. 17 323687 201245577 The outer casing 25 has a structure in which the upper and lower divisions are divided into two, which will be described later, and the intake portion 3 having the intake ports 31, 32, and 33 is formed in the upper portion (one side), and the exhaust port is formed in the lower portion (the other side). The exhaust portion 4 of 41, 42, 43. Further, four pedestal portions 5 are formed on the upper portion of the outer casing 25. Four leg portions 6 are formed below the outer casing 25. The outer casing 25 has an elliptical cylindrical shape depending on the shape of the pump chambers 21 to 23. The intake unit 3, the exhaust unit 4, the pedestal unit 5, and the leg portion 6 are integrally formed with the outer casing 25. Specifically, it is preferable to integrally form by casting. The vacuum exhausting device 1B of the present embodiment is provided such that the longitudinal direction of the outer casing 25 (the axial direction of the rotating shaft 81) is horizontal, and the long axis of the elliptical cross section of the outer casing 25 is horizontal. Further, in the following description, the plane including the two rotating shafts 81, that is, the horizontal plane is referred to as a horizontal center plane (shown as D in Fig. 8). The outer casing 25 is equally divided into an upper casing 25a and a lower casing 25b. The upper casing 25a and the lower casing 25b are fixed by a fixing member such as a bolt or a nut, and the upper and lower casings 25a and 25b are combined to form a bearing housing 86 on the motor 8 side. The motor is opposite to the side bearing housing 87. Further, by combining the upper and lower casings 25a, 25b, the motor opposite side bearing 84 and the space 89 including the oil collecting plate 88 can be sealed. Further, in the present embodiment, the split surface is slightly aligned with the horizontal center plane D. The air suction portion 3 projects upward in the upper portion of the outer casing 25, and is integrally formed with the outer casing 25 (upper outer casing 25a). The suction portion 3 has an end surface 35 parallel to the horizontal center plane D of the above-mentioned 18 323687 g 201245577, and the end surface 35 has a rectangular shape having a length in the axial direction of the outer casing 25. Further, the intake unit 3 is provided with a plurality of intake ports 31 to 33, and the plurality of intake ports 31 to 33 are open to the end faces 35 and communicate with the pump chambers 21 to 23, respectively. . Further, a groove 36 is formed on the inner side of the end surface 35 of the intake portion 3 so as to be formed outside the end surface 35. The groove 36 is embedded in the cymbal ring 53. The exhaust portion 4 protrudes downward from the lower portion of the outer casing 25, and is formed integrally with the outer casing 25 (lower outer casing 25b), and has the same as the aforementioned suction portion 3, and has a parallel with the horizontal center plane D. End face 45. The exhaust unit 4 is provided with a plurality of exhaust ports 41 to 43. The plurality of exhaust ports 41 to 43 are opened to the aforementioned end faces 45 and communicated to the pump chambers 21B to 23B, respectively. The end surface 35 of the intake portion 3 and the end surface 45 of the exhaust portion have substantially the same shape in plan view. The pedestal portion 5 is a protrusion-shaped pedestal provided at an upper portion of the outer casing 25 (upper casing 25a) at the outermost four portions in a plan view. The pedestal portion 5 has a projection shape that protrudes in the upward direction of the vacuum exhaust device 1B. The four base portions 5 are respectively formed with a surface 51 (hereinafter referred to as an end surface 51) at the upper end thereof. The four end faces 51 are formed on the same surface. Further, the end surface 51 of the pedestal portion 5 is formed on the same surface as the end surface 35 of the air intake portion 3. However, the pedestal portion 5 is provided independently of the intake portion 3. That is, the end surface 51 of the pedestal portion 5 is formed to be spaced apart from the end surface 35 of the intake portion 3. 19 323687 201245577 The leg portion 6 is a projecting leg provided at the lowermost portion of the casing 25 (lower casing 25b) at the outermost portion in plan view. The leg portion 6 has a protruding shape that protrudes toward the lower side of the vacuum exhausting device 1B. Further, the position in a plan view is substantially the same as that of the pedestal portion 5. The four leg portions 6 are respectively formed with a surface 61 (hereinafter referred to as an end surface 61) at the lower end thereof. The four end faces 61 are formed on the same surface. Further, the end surface 61 of the leg portion 6 and the end surface 45 of the exhaust portion 4 are formed on the same surface. However, the leg portion 6 is provided independently of the exhaust port 4. That is, the end surface 61 of the leg portion 6 is formed to be spaced apart from the end surface 45 of the exhaust portion 4. Further, the pedestal portion 5 and the leg portion 6 are formed in a hollow shape with the side surface being an open surface. A fixing hole 54 is formed in each of the end faces 51 and 61. Further, as shown in Figs. 6 and 7, the projection portion 52 is provided in the pedestal portion 5. Corresponding to this, a positioning hole 62 is formed in the leg portion 6. According to the above embodiment, the vacuum exhausting devices IB, 1C can be arranged to be directly stacked in the vertical direction. Further, in order to bring the end surface 45 of the exhaust port 4 of the vacuum exhaust device 1B into contact and stack it on the end surface 35 of the suction portion 3 of the vacuum exhaust device 1C, vacuum exhaust gas may be placed directly above the vacuum exhaust device 1C. Device 1B. As described above, the end surface 35 of the intake unit 3 and the end surface 45 of the exhaust unit 4 are formed in substantially the same shape in a plan view. Therefore, the exhaust ports 41B to 43B of the vacuum exhaust device 1B are placed in the vertical direction. The intake ports 31C to 33C of the vacuum exhaust device 1C are fluidly connected. Thereby, it is not necessary to provide piping for connecting the vacuum exhausting devices 1 to each other, and the distance between the pumping chambers to be connected is shortened, so that the pressure loss can be suppressed. 20 323687; 201245577 Furthermore, since the outer casings 25 constituting the vacuum exhausting device 1 are connected to each other, the rigidity of the system constituted by the plurality of vacuum exhausting devices is increased, and the self-vacuum exhausting device can also be generated. Heat dispersion. Further, in the outer casing 25, by combining the upper and lower outer casings 25a and 25b, the bearing housings 86 and 87 are held and formed to form a motor-side space 89 (function of a cover). Thereby, the number of parts can be reduced, and the bearing housings 86, 87 are held by the outer casing 25 as a whole, so that the deformation of the vacuum exhausting apparatus 1 during the exhaust operation can be suppressed. Further, since the end surface 51 of the pedestal portion 5 and the end surface 61 of the leg portion 6 are formed at substantially the same position in plan view, the ventilating device 1B and the vacuum venting device 1C are disposed in the vertical direction, so that the pedestal can be made. The end surface 51 of the portion 5 is in contact with the end surface 61 of the leg portion 6 in a superposed manner. In this state, the vacuum venting device 1A and the vacuum venting device 1B can be reliably fixed by being fastened by the fixing member 91 such as a bolt/nut. By providing a sealing member such as an ankle ring in the groove 36 formed in the end surface 35 of the intake portion 3, the airtight state when the intake portion 3 is connected to the exhaust portion 4 can be improved. Further, the groove 36 may be provided on the side of the exhaust portion 4 without being provided on the side of the intake portion 3. When the vacuum exhausting device 1 is connected, the protruding portion 52 of the pedestal portion 5 and the positioning hole 62 of the leg portion 6 are fitted, whereby the positioning can be easily performed. The protrusion 52 and the positioning hole 62 are preferably provided in all of the leg portion 6 and the pedestal portion 5, but may be provided in at least two portions. In addition to the weir ring 53, the end surface 35 of the air intake portion 3 is also coated with a gasket (not shown). The gasket is a sealing member that blocks the adjacent suction 21 323687 201245577 ports 31, 32, 33 from each other. In the manufacture of the vacuum exhaust system 10, for example, after the end surface 35 of the suction portion 3 of the outer casing 25 of the vacuum exhausting device 1C is coated with a pad-like material, by the suction portion The end surface 35 abuts against the end surface 45 of the exhaust portion 4 of the outer casing 25 of the vacuum exhaust device 1B, and connects the end surface 35 and the end surface 45. For the material of the mat, a corrosion-resistant rubber such as a silicone or a fluorine-based rubber is used, but it is not limited thereto. By using a simple sealing member such as a coated pad or the like, cost reduction can be achieved and the suction ports 31, 32, 33 having a wide opening area can be secured as much as possible in the narrow suction portion 3. . By using such a simple sealing member, even if there is a leak of gas between adjacent suction ports, the degree of leakage is not a problem as long as the leakage speed is sufficiently small for the exhaust speed. The mating material described above is described by taking the end surface 35 applied to the suction portion 3 as an example, but it is of course also possible to apply it to the end surface 45 of the exhaust portion 4. For example, when the flatness of the end faces 35 and 45 is high, if the gas leakage speed is sufficiently small, the coated pad is not required. As described above, in the present embodiment, the pump chambers are connected not only to one of the vacuum exhausting devices but also to the pump chambers of the other vacuum exhausting devices, and to the connecting unit 7. In other words, the pump room can be configured in any way, so that the freedom of configuration of the pump room can be increased, so that a more efficient vacuum exhaust system can be constructed. (Second Embodiment) Fig. 9 is a cross-sectional view showing a vacuum exhaust system 22 323687 rg 201245577 according to a second embodiment of the present invention. The side solid view of the first part shows that one of the connecting units of the vacuum exhaust system is viewed in the vertical direction and is the rotation axis of the rotor with each vacuum exhaust system as described above. The vacuum exhaust system UO of the present embodiment differs from the vacuum exhaust system of the exhaust system and the system 10 in that the vacuum chamber has a cooling mechanism. The system is a cooling tube 15 that circulates cold coal, for example. The cooling pipe 15; the plurality of parts of the outer casing 25 of the imaginary exhaust system 110, the motor housing 8a of the horse, j, and the sound absorbing member 173 as shown in Fig. 1 . The cooling pipe 15 provided to the outer casings 25, 25, 25 is provided to be inserted, for example, in the vicinity of the bearing, the partition wall 16, and the like. The partition wall 16 is provided in the vacuum exhaust unit IB (1C), and divides into a plurality of pump chambers 21B to 23B (21C to 23B) in a casing 25, whereby the cooling mechanism is efficiently performed. The vacuum evacuation system is cooled. In particular, by providing the cooling pipe 15 by the partition wall 16, the inside of the casing 25 which is not easily cooled can be cooled. As shown in the figure H), the side of the Uesaki member 173 is connected and maintained. The g-holding box (_) of the part g 15 is formed in the U-shaped shape 1 in the holding box 173a, and the U-shaped shape is not limited to the U-shape, and the shape and length are The design department can be changed. Further, the cooling pipe 15 disposed at a plurality of locations as described above is configurable, and has one inlet and one outlet branch to be connected, that is, a single-system flow path. Alternatively, the cooling tube 15 may be formed by a plurality of channels of the system, that is, a plurality of tubes. 323687 23 201245577 (Third Embodiment) Fig. 11 is a cross-sectional view showing a structure of a part of a vacuum exhaust system for explaining a third embodiment of the present invention. This is a second connecting member 172 to which a cooling mechanism is added to the second connecting member 72 of the first embodiment. This cooling mechanism has, in addition to the cooling pipe 15, cooling fins 115 provided in the respective paths 177a, 177b, and 177c of the second connecting path. The cooling fins 115 are formed in the block of the second connecting member 172, for example, by integral molding. The cooling pipe 15 is disposed at a lower portion of the exhaust side paths 177a, 177b, and 177c, and is inserted through a block of the second connecting member 172. The vacuum exhaust system compresses the gas on the exhaust side, so that it is warmer than the exhaust side on the exhaust side. By providing a cooling mechanism as the second connecting member 172 on the exhaust side of the vacuum exhaust system, it is possible to efficiently cool the heat generated by the gas compression. In the present embodiment, the cooling fins 115 are provided as a cooling mechanism, but they may not be provided. The present technology is not limited to the embodiments described above, and various other embodiments can be implemented. The pump room can be made into only one pump room according to the specifications, and can also be divided into a plurality of pump rooms by setting a partition wall in the pump room 22. Furthermore, the vacuum exhausting device is not limited to the Lu type vacuum pump as described above, and if the vacuum port is integrally formed in the outer casing and the exhaust port, the vacuum pump can be used regardless of the vacuum pump. use. 24 323 687 201245577 In the above embodiments, the four pedestal portions 5 and the leg portions 6 are formed, but the pedestal portion 5 can reliably support the leg portion 6 regardless of the configuration. can. Further, when the pedestal portion 5 can reliably support the leg portion 6, the end surface 51 of the pedestal portion 5 is formed not to be spaced apart from the end surface 35 of the air intake portion 3, and can be integrally formed. Similarly, the end surface 61 of the leg portion 6 and the end surface 41 of the exhaust portion 4 may be integrally formed. In the above embodiment, the plurality of vacuum exhausting devices are arranged to be stacked in the longitudinal direction, but may be stacked in the lateral direction or in both the longitudinal direction and the lateral direction. The vacuum exhaust system of the above embodiment includes two or three vacuum exhausting means, but may have four or more vacuum exhausting devices that are arranged in the vertical direction and/or the lateral direction. In the case where three or more vacuum exhausting devices are provided as described above, when the outer piping such as the piping member 73 (173) is applied, in order to make the four or more vacuum exhausting devices adjacent The outer casings of the two vacuum exhausting devices are connected to each other, and the piping members having the external piping function can also be connected. Alternatively, in order to connect the outer casings of the two vacuum exhausting devices which are not adjacent to each of the four or more exhausting devices, a piping member having an external piping function may be connected. In the case where the vacuum exhaust system has four or more vacuum exhausting devices, a plurality of piping members having an external piping function such as the piping member 73 may be provided. The cooling mechanism shown in Fig. 11 is as shown in Fig. 2 or Fig. 9, and 25 323687 201245577 can be disposed between the vacuum exhausting device 1A as the foremost stage and the vacuum exhausting device 1A of the lower stage. The first connecting member 71. A cooling fin provided in the cooling mechanism shown in Fig. 11 may also be formed on the partition wall 16 described above. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a vacuum exhaust system using a connection structure of a vacuum exhaust device according to an embodiment of the present invention; and Fig. 2 is an overall view of the vacuum exhaust system of the embodiment. 3 is a side view of the vacuum exhaust system viewed from the direction of the first figure; FIG. 4 is a cross-sectional view of the second connecting member viewed from above; FIG. 4 is a cross-sectional view of the vacuum exhaust device viewed from above; FIG. 7 is a perspective view of the vacuum exhaust device viewed from below; FIG. FIG. 9 is a cross-sectional view showing a vacuum exhaust system according to a second embodiment of the present invention, and FIG. 10 is a view showing a connection unit constituting the vacuum exhaust system. Fig. 11 is an explanatory view of a cooling mechanism of a vacuum exhaust system according to a third embodiment of the present invention; [Description of main components] 26 323687 201245577 ΙΑ, IB, 1C Vacuum exhaust unit 3 Suction part 4 Exhaust part 5 pedestal part 6 Foot part 7 Connection unit 8 Motor 8a Motor casing 10 Vacuum exhaust system 11 Intake port 12 Exhaust port 15 Cooling pipe 16 Partition walls 21A, 21B, 22B, 23B Chambers 21C', 22C, 23C, 24C Pump chambers 25, 25a, 25b Housing 29 Connecting pipes 31, 32, 33 Suction port 35 End face 36 Ditch 31Β, 32B, 33B Suction ports 31C, 32C, 33C Suction port 41, 42, 43 exhaust port 41A exhaust port 41Β, 42B, 43B exhaust port 41C, 42C, 43C exhaust port 45 end face 51 end face 52 protrusion 53 0 ring 54 fixing hole 61 end face 62 positioning hole 71 first connecting member 72 second connecting member 73 piping member 74 valve unit 75 path 76 first connecting path 76a, 76b first connecting path 77 second connecting path 77a, 77b, 77c path 78 piping path 79 valve 81 rotating shaft 82a, 82b, 82c rotor 83 bearing 84 bearing

[Γ-T 27 323687 201245577 85 Drive gear 87 Bearing housing 89 Space 115 Cooling fin 173a Holding box 721 Pump connecting parts 721b, 722b, 723b Connecting ports 721d, 722d, 723d Sealing member 723 Valve unit connecting part A Symbol 86 Bearing Box 88 Oil deflector 91 Fastening member 173 Piping members 177a, 177b, 177c Exhaust side paths 721a, 722a, 723a Communication ports 721c, 723c Communication port 722 Piping connection portion 725 Blocks FI, F2, F3, F4 Arrow 28 323687

Claims (1)

201245577 VII. Patent application scope: 1. A connection structure, Sun is the connection structure of multiple vacuum exhaust devices, month! Each of the plurality of vacuum exhausting chambers has: at least one outer chamber formed with bran; and an air inlet and an exhaust port disposed in the outer casing and connected to the pump chamber; Directly connecting to each other, the aforementioned pumps of the plurality of vacuum exhausting devices are connected to each other; the connecting structure is provided with a connecting unit having a first vacuum exhausting device among the plurality of vacuum exhausting devices, An inhalation port, communicating with at least one exhaust port of the second vacuum exhaust device, and allowing the gas exhausted from the exhaust port of the second vacuum exhaust device to pass through the first vacuum exhaust The intake port is configured to flow into the connection path of the pump chamber of the first vacuum exhausting device, and is disposed outside the outer casing of the plurality of vacuum exhaust devices. And being connected to the aforementioned outer casing of the front first vacuum exhausting device and the aforementioned outer casing of the second vacuum exhausting device. 2. The connection structure according to claim 2, wherein the connection unit comprises: a first connection member having a short-circuit path in communication with the intake port of the first vacuum exhaust device; a first connecting path connected to the front outer casing of the first vacuum exhausting device; a connecting member having a connection path connecting the exhaust enthalpy of the second vacuum exhausting device a second connecting path connected to the foregoing outer casing of the vacuum exhausting device; and S 323687 1 201245577 and the piping member having a piping path in the connecting path connecting the first connecting path and the second connecting path And connected to the aforementioned first connecting member and second connecting member. 3. The connection structure according to claim 2, wherein at least one of the first connecting member, the second connecting member, and the piping member is an integrally formed member. 4. The connection structure according to Item 2 or 3, wherein the second connecting member has a plurality of second connecting paths; the connecting structure is provided with a valve unit having a setting a plurality of valves in the plurality of second connecting paths and a total exhaust port communicating to the plurality of second connecting paths via the plurality of valves. 5. The connection structure according to any one of claims 2 to 4, wherein the first connecting member and the second connecting member are configured to mount at least one of the plurality of vacuum exhausting devices The pedestal of the vacuum exhaust unit. 6. A vacuum exhaust system comprising: a plurality of vacuum exhausting devices each having an outer casing formed with at least one pumping chamber, and an intake port and a row disposed in the outer casing and communicating to the pumping chamber a port, wherein the outer casings are directly connected to each other, so that the pump chambers are connected to each other; 2 323687 201245577 'The connecting unit has: at least one suction of the first vacuum exhausting device among the plurality of vacuum exhausting devices a gas port communicating with at least one exhaust port of the second true and air exhaust device, and allowing the gas exhausted from the exhaust port of the second vacuum exhaust device to pass through the aforementioned suction of the first vacuum exhaust device a port that flows into the connection path of the pump chamber of the first vacuum exhaust device; and is disposed outside the respective casings of the plurality of vacuum exhaust devices, and the outer casing of the first vacuum exhaust device and the foregoing The aforementioned outer casing of the two vacuum exhausting device is connected. 7. The vacuum exhaust system according to claim 6, wherein the vacuum exhaust system is provided at least in a cooling mechanism of the connecting unit. 8. The vacuum exhaust system of claim 7, wherein the connecting unit comprises: a first connecting member having a first connection to the aforementioned suction port of the first vacuum exhausting device a second connecting member having a second connecting path connected to the exhaust port of the second vacuum exhausting device and connected to the second vacuum The outer casing of the exhaust device and the pipe member have a pipe path that communicates with the first connecting path and the second connecting path, and are connected to the first connecting member and the second connecting member. 9. The vacuum exhaust system according to claim 8, wherein the cooling mechanism is a vacuum exhaust system provided to at least one of the second connecting member and the at least one of the third connecting member: 3 323687 201245577 10. In the eighth or ninth aspect of the patent application, the second vacuum exhausting device is disposed at a lower portion than the first portion, and the vacuum milk discharging device is arranged in a stacked manner; The second connecting member is disposed below the second vacuum exhaust gas. The vacuum exhaust system of any one of the above-mentioned plurality of vacuum exhausting devices, wherein: at least one of the plurality of vacuum exhausting devices is: A plurality of pump chambers are defined in the outer casing of the at least one vacuum exhausting device to form a partition wall in the outer casing; 77 the cooling mechanism is disposed on the partition wall. 323687 4