[go: up one dir, main page]

TW201232174A - Colored photosensitive resin composition - Google Patents

Colored photosensitive resin composition Download PDF

Info

Publication number
TW201232174A
TW201232174A TW100134790A TW100134790A TW201232174A TW 201232174 A TW201232174 A TW 201232174A TW 100134790 A TW100134790 A TW 100134790A TW 100134790 A TW100134790 A TW 100134790A TW 201232174 A TW201232174 A TW 201232174A
Authority
TW
Taiwan
Prior art keywords
meth
acrylate
resin
copolymer
acid
Prior art date
Application number
TW100134790A
Other languages
Chinese (zh)
Other versions
TWI570509B (en
Inventor
Yoshiko Miya
Hiroyuki Miura
Masakazu Shirakawa
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of TW201232174A publication Critical patent/TW201232174A/en
Application granted granted Critical
Publication of TWI570509B publication Critical patent/TWI570509B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

A colored photo-sensitive resin composition, a pattern based on the composition, a color filter based on the composition, and a method for manufacturing the composition are provided to improve the solvent resistance characteristic of the composition although a high temperature-based baking process is omitted. A colored photo-sensitive resin composition includes a coloring agent, copolymer, resin, polymeric compound, polymerization initiator, and a solvent. Ethylenically unsaturated bond is arranged at the side chain of the resin. The copolymer includes structural units derived from at least one selected from unsaturated carboxylic acid and unsaturated carboxylic anhydride and derived from C2 to C4 cyclic ether and monomer with ethylenically unsaturated bond.

Description

201232174 六、發明說明: 【發明所屬之技術領域】 本發明係關於構成使用於液晶顯示元件或固體攝像元 件的彩色過濾器之著色影像的形成上較佳的著色感光性樹 脂組成物。 【先前技術】 使用於液晶顯示面板、電致發光面板、電發顯示面板 等顯示裝置的彩色過濾器爲使用著色感光性樹脂組成物而 製造。已知作爲如此著色感光性樹脂組成物,含有顔料、 樹脂、光聚合性化合物、光聚合啓始劑及溶劑,樹脂爲甲 基丙烯酸與具有環氧乙烷基的不飽和化合物之共聚物的組 成物(專利文獻1 )。 〔先行技術文獻〕 〔專利文獻〕 〔專利文獻1〕特開平20〇 7-3 3 3 847號公報 【發明內容】 發明所要解決的課題 使用前述著色感光性樹脂組成物形成圖型時,對於該 圖型的解像性並未達到令人十分滿意的程度。 解決發明的手段201232174 VI. [Technical Field] The present invention relates to a color-developing photosensitive resin composition which is preferable in forming a color image of a color filter used for a liquid crystal display element or a solid-state image sensor. [Prior Art] A color filter used for a display device such as a liquid crystal display panel, an electroluminescence panel, or an electric display panel is manufactured by using a colored photosensitive resin composition. It is known that the coloring photosensitive resin composition contains a pigment, a resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent, and the resin is a composition of a copolymer of methacrylic acid and an unsaturated compound having an oxiranyl group. (Patent Document 1). [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] JP-A No. 20-7-3 3 3 847 SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION When a pattern is formed using the colored photosensitive resin composition, The resolution of the pattern is not very satisfactory. Means to solve the invention

-5- 201232174 本發明爲提供以下〔1〕〜〔8〕者。 〔1〕一種含有(A) 、( Bl ) 、( B2 ) 、(C)、( D)及(E )之著色感光性樹脂組成物: (A)著色劑; (B1)含有來自選自不飽和羧酸及不飽和羧酸酐所成 群的至少1種的結構單位、與來自具有碳數2〜4的環狀 醚及乙烯性不飽和鍵之單體的結構單位之共聚物(但於側 鏈上未有乙烯性不飽和鍵); (B2 )於側鏈具有乙烯性不飽和鍵的樹脂;. (C) 聚合性化合物; (D) 聚合啓始劑; (E )溶劑。 〔2〕 ( B2 )係將由共聚合下述(a )與(c )所得之 共聚物進一步與(b )進行反應所得的樹脂之前述〔1〕記 載的著色感光性樹脂組成物: (a):選自不飽和羧酸及不飽和羧酸酐所成群之至 少1種; (b ):具有碳數2〜4的環狀醚及乙烯性不飽和鍵之 單體; (c ):具有可與(a)及(b)進行共聚合的不飽和 鍵之單體》 (2-2 ] ( B2 )係將由共聚合下述(a )與(c )所得 之共聚物進一步與與(b)進行反應所得之樹脂的前述〔1 〕記載之著色感光性樹脂組成物: -6- 201232174 (a) :選自不飽和羧酸及不飽和羧酸酐所成群的至 少1種; (b) :具有環氧乙烷基及乙烯性不飽和鍵的單體; (c ):具有可與(a)及(b)共聚合的不飽和鍵之 單體。 〔3〕 (B1)的含有量對於(B1)與(B2)之合計量 而言爲1 0質量%以上95質量%以下的前述〔1〕或〔2〕 記載之著色感光性樹脂組成物。 〔4〕由前述〔1〕〜〔3〕中任一所記載的著色感光 性樹脂組成物所形成的圖型。 〔5〕含有前述〔4〕記載之圖型的彩色過濾器。 〔6〕含有下述(1)〜(4)所示步驟的彩色過濾器 之製造方法: (1)藉由將前述〔1〕〜〔3〕中任一所記載的著色 感光性樹脂組成物塗佈於基板後得到塗佈膜之歩驟; (2 )藉由於塗佈膜介著光罩進行曝光後得到曝光後 塗佈膜之步驟; (3 )藉由將曝光後塗佈膜以鹼顯像液進行顯像後得 到圖型之步驟; (4 )藉由將圖型進行燒烤使其硬化後得到圖型之步 驟。 〔7〕步驟(4 )爲在2 5。(:以上1 20 °C以下的溫度下進 行燒烤之步驟的前述〔6〕記載之彩色過濾器的製造方法 201232174 〔8〕步驟(1)中之基板爲塑質基板的前述〔6〕或 〔7〕記載之彩色過濾器的製造方法。 〔發明的效果〕 所謂本發明的著色感光性樹脂組成物可得到解像性佳 的圖型。 實施發明的型態 本發明的著色感光性樹脂組成物爲含有著色劑(A ) 、樹脂(B )、聚合性化合物(C )、聚合啓始劑(D )及 溶劑(E),樹脂(B)爲含有(B1)來自選自不飽和羧 酸及不飽和羧酸酐所成群的至少1種的結構單位、與來自 具有碳數2〜4的環狀醚及乙烯性不飽和鍵之單體的結構 單位的共聚物(但於側鏈上未有乙烯性不飽和鍵。)(以 下有時稱爲「樹脂(B1)」)及(B2)於側鏈具有乙烯性 不飽和鍵的樹脂(以下有時稱爲「樹脂(B2)」)的樹脂 〇 本發明的著色感光性樹脂組成物含有著色劑(A )。 作爲著色劑(A)可舉出顏料及染料,但由耐熱性、耐光 性之觀點來看以含有顏料者爲佳。 作爲顏料可舉出有機顏料及無機顏料,可舉出以彩色 指數(The Society of Dyers and Col〇Urists 出版)分類色 素之化合物。 作爲有機顔料’具體例如可舉出C.I.色素黃色1、3、 201232174 12、13 1 ' 14、15、 16 、 17 、 20 、 24 '31、 53 ' 83 、94、 109、 110、 117、 125、 128 ' 13 7 ' 138 、 、148 、150、 153、 154、 166、 173 ' 194 > 214 等 » C. I.色素橘色 13、 31、 36 、 38 ' 40、 42 ' 43 、59、 61、 64、 65 、71、73等橘色 顔料; C .I.色素紅 9 、97 、 105 、 122 、123 、144 、 、168 、176、 177' 180、 192、 209 ' 215 、216 、254 、255 ' 264 、 265等紅色顏料 » C. ,I.色素藍 1 5 、15: 3 、 15: 4 '15: 6、6 0 料;C. I.色素紫1、 19 、 23 、 29 、 32 、 36 '38 等 1 C.I.色素綠7、 36 ' 58等綠色顏料; C. I.色素咖啡2 3、2 5等咖啡色 顔料; 及 C. I.色素黑1、 7等黑色顏料。 其 中亦以 C.I. 色素黃色1 3 8、 139、 150、 C 177 、 242 、 254 、 C .1.色素紅紫23、 C.I.色素藍 1 :6及 C.I.色素綠 7、3 6、5 8 爲佳 。這些顏料 可 合2種 以上使用。 _a-£- 刖 述顏料視必 要可施予使用導 入香松處理 鹼性基 之顔料衍生 物或顔料分散劑 等的表面處 理 分子化 合物等對顔 料表面之接枝處 理、藉由硫 酸 等的微 粒化處理或 欲除去雜質藉由 有機溶劑或 水 處理、 離子性雜質 藉由離子交換法 等的除去處 理 、8 6、9 3 139> 147 黃色顔料 ' 51> 55 149 ' 166 224 、 242 等藍色顔 紫色顔料 .I.色素紅 5 : 3 ' 15 單獨或混 酸性基或 、藉由高 微粒化法 等的洗淨 等爲佳。 -9- 201232174 又,顏料以粒徑均勻者爲佳。使其含有顏料分散劑進 散處理後可得到顏料可均勻分散於溶液中之狀態的顏 散液。 作爲前述顏料分散劑,可使用販賣的界面活性劑 爲界面活性劑,例如可舉出聚矽氧系、氟系、酯系、 子系、陰離子系 '非離子系、兩性、聚酯系、聚胺系 烯酸系的界面活性劑。作爲前述界面活性劑,除聚環 烷烷基醚類、聚環氧乙烷烷基苯基醚類、聚乙二醇二 、山梨醇酐脂肪酸酯類、脂肪酸變性聚酯類、3級胺 聚胺酯類、聚乙烯亞胺類等以外,可舉出商品名之 信越化學工業(股)製)、Floren (共榮公司化學( 製)、Solsperse ( Zeneca (股)’製)、EFKA ( CIBA 製)、Aj i sper ( Aj iη〇 m〇 t 〇 F i ne - Te chn 〇 Cο ·,Inc 製 Disperbyk ( BYK公司製)等》這些可各單獨或組合 以上使用。 使用顔料分散劑時,該使用量對於顏料重量而言 爲100質量%以下,更佳爲5〜50質量%。顏料分散 使用量若在前述範圍內時,有著可得到均勻分散狀態 料分散液的傾向。 著色劑(A )的含有量對於著色感光性樹脂組成 固體成分的量而言,較佳爲5〜60質量%,更佳爲5 質量°/。。著色劑(A)的含有量若在前述範圍內時, 到所望分光或色濃度。其中所謂本說明書中的固體成 係由著色感光性樹脂組成物除去溶劑之成分合計量而] 行分 料分 。作 陽離 及丙 氧乙 酯類 變性 KP ( 股) 公司 )' 2種 較佳 劑的 之顏 物之 〜45 可得 分, -10- 201232174 本發明的著色感光性樹脂組成物係爲含有含樹脂(B 1 )之樹脂(B) °樹脂(B1)爲含有來自選自不飽和殘酸 及不飽和羧酸酐所成群之至少1種(以下有時稱爲「(a )」)的結構單位、與來自具有碳數2〜4的環狀醚及乙 烯性不飽和鍵之單體(以下有時稱爲「(b)」)的結構 單位的共聚物(但於側鏈上未有乙烯性不飽和鍵)。 著色感光性樹脂組成物藉由樹脂(B 1 ),有著所得之 圖型的耐熱性、耐藥品性等信賴性成爲更良好之傾向。 作爲樹脂(B 1 ) ’例如可舉出 樹脂(B1-1):聚合(a)與(b)所成的共聚物、及 樹脂(B1-2):聚合(a) 、(b)與具有可共聚合( a)及(b)之不飽和鍵的單體(c)(以下有時稱爲「(c )」)所成的共聚物。 作爲樹脂(B 1 )以(B 1 -1 )爲佳。 作爲(a),具體可舉出丙烯酸、甲基丙烯酸、巴豆 酸、〇 -乙烯安息香酸、m -乙烯安息香酸、p -乙烯安息香酸 等不飽和單羧酸類; 馬來酸、富馬酸、甲基順丁烯二酸、中康酸、衣康酸 、3-乙烯酞酸、4-乙烯酞酸、3,4,5,6-四氫酞酸、1,2,3,6-四氫酞酸、二甲基四氫酞酸、1、4-環己烯二羧酸等不飽 和二羧酸類; 甲基-5-降莰烯-2,3-二羧酸、5-羧基聯環〔2.2.1〕庚-2-烯、5,6-二羧基聯環〔2.2.1〕庚-2-烯、5-羧基-5-甲基聯 環〔2.2.1〕庚-2-烯、5-羧基-5-乙基聯環〔2.2」〕庚-2·烯 201232174 、5-羧基:6-甲基聯環〔2.2.1〕庚-2-烯、5-羧基-6-乙基聯 環〔2.2.1〕庚-2-烯等含有羧基的聯環不飽和化合物類; 馬來酸酐、甲基順丁'燃二酸酐、衣康酸酐、3 -乙烯酞 酸酐、4-乙烯酞酸酐、3,4,5,6-四氫酞酸酐、1,2,3,6-四氫 酞酸酐、二甲基四氫酞酸酐、5,6-二羧基聯環〔2.2.1〕庚-2-烯無水物(降冰片烯二酸酐)等不飽和二羧酸類無水物 » 琥珀酸單〔2-(甲基)丙烯醯氧基乙基〕、酞酸單〔 2-(甲基)丙烯醯氧基乙基〕等2價以上的多元羧酸之不 飽和單〔(甲基)丙烯醯氧基烷基〕酯類; 如α-(羥基甲基)丙烯酸的於相同分子中含有羥基及 羧基之不飽和丙烯酸酯類等。 彼等中丙烯酸、甲基丙烯酸、馬來酸酐等由共聚合反 應性或鹼溶解性的觀點來看而適用。 其中,本說明書中所謂「(甲基)丙烯酸」表示選自 丙烯酸及甲基丙烯酸所成群之至少1種。「(甲基)丙烯 醯基」及「(甲基)丙烯酸酯」等表示者亦具有同樣意思 〇 作爲(b),例如可舉出具有環氧乙烷基及乙烯性不 飽和鍵的單體(b-Ι)(以下有時稱爲「(b-Ι)」)、具 有氧環丁烷基及乙烯性不飽和鍵之單體(b-2)(以下有 時稱爲「( b-2 )」)及具有四氫呋喃基及乙烯性不飽和 鍵的單體(b-3 )(以下有時稱爲「( b-3 )」)。 作爲(b-1 ),例如可舉出具有將鏈式烯烴經環氧基 -12- 201232174 的結構與乙烯性不飽和鍵的單體(b-1 1 )(以下有 「(b-11)」)及具有將環烯烴作爲環氧基的結構 性不飽和鍵之單體(b-12 )(以下有時稱爲「(b_ )° 作爲(b-Ι)以具有環氧乙烷基與(甲基)丙 氧基的單體爲佳,具有(甲基)丙烯醯基氧基的( 爲更佳。 作爲(b-ΙΙ),具體可舉出環氧丙基(甲基) 酯、β-甲基環氧丙基(甲基)丙烯酸酯、β-乙基環 (甲基)丙烯酸酯、環氧丙基乙烯醚、〇-乙烯苯甲 丙基醚、m-乙烯苯甲基環氧丙基醚、ρ-乙烯苯甲基 基醚、α-甲基-〇-乙烁苯甲基環氧丙基醚、α_甲基_ 苯甲基環氧丙基醚、α -甲基-ρ -乙烯苯甲基環氧丙 2,3-雙(環氧丙氧基甲基)苯乙烯、2,4-雙(環氧 甲基)苯乙烯、2,5-雙(環氧丙氧基甲基)苯乙傾 雙(環氧丙氧基甲基)苯乙烯、2,3,4-參(環氧丙 基)苯乙烯、2,3,5-參(環氧丙氧基甲基)苯乙烯, 參(環氧丙氧基甲基)苯乙烯、3,4,5-參(環氧丙 基)苯乙烯' 2,4,6-參(環氧丙氧基甲基)苯乙烯 平7-24 8625號公報所記載之化合物等。 作爲(b-12),可舉出乙烯環己烯單氧化物、 氧基-4-乙烯環己烷(例如celloxide 2000; Dicel 業(股)製)、3,4-環氧基環己基甲基丙烯酸酯 CyclomerA40〇 ; Dice 1 化學工業(股)製)、3,4- 時稱爲 與乙烯 .12)」 烯醯基 b-12) 丙烯酸 氧丙基 基環氧 環氧丙 m-乙稀 基醚、 丙氧基 ί ' 2,6- 氧基甲 • 2,3,6- 氧基甲 、特開 1,2-環 化學工 (例如 環氧基 -13- 201232174 環己基甲基甲基丙烯酸酯(例如CyclomerMlOO; Dicel化 學工業(股)製)、式(I )所示化合物、式(II )所示化 合物等。-5- 201232174 The present invention provides the following [1] to [8]. [1] A colored photosensitive resin composition containing (A), (B1), (B2), (C), (D) and (E): (A) a colorant; (B1) containing a color selected from a copolymer of at least one structural unit of a group of a saturated carboxylic acid and an unsaturated carboxylic anhydride, and a structural unit derived from a monomer having a cyclic ether having 2 to 4 carbon atoms and an ethylenically unsaturated bond (but on the side) There is no ethylenically unsaturated bond in the chain; (B2) a resin having an ethylenically unsaturated bond in the side chain; (C) a polymerizable compound; (D) a polymerization initiator; (E) a solvent. [2] (B2) is a colored photosensitive resin composition according to the above [1] which is obtained by copolymerizing the copolymer obtained in the following (a) and (c) with the resin obtained by the reaction of (b): (a) : at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides; (b): a monomer having a cyclic ether having 2 to 4 carbon atoms and an ethylenically unsaturated bond; (c): having The monomer of the unsaturated bond copolymerized with (a) and (b) (2-2) (B2) is further obtained by copolymerizing the copolymers obtained by the following (a) and (c) with (b) The coloring photosensitive resin composition of the above-mentioned [1] of the resin obtained by the reaction: -6-201232174 (a): at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides; (b): a monomer having an oxirane group and an ethylenically unsaturated bond; (c): a monomer having an unsaturated bond copolymerizable with (a) and (b). [3] The content of (B1) is (B1) The color-sensitive photosensitive resin composition of the above [1] or [2], which is 10% by mass or more and 95% by mass or less, in combination with (B2). [4] From the above [1]~ 3 A pattern formed by the colored photosensitive resin composition according to any one of the above [5], wherein the color filter of the pattern of the above [4] is contained. [6] contains the following (1) to (4). (1) A method of applying a colored photosensitive resin composition according to any one of the above [1] to [3] to a substrate to obtain a coating film; (2) a step of obtaining a film after exposure by exposure of a coating film through a mask; (3) a step of obtaining a pattern by developing the film after exposure with an alkali developing solution; (4) The step of obtaining a pattern by baking the pattern by baking. [7] The step (4) is the above [6] of the step of baking at a temperature of 1 20 ° C or lower. [Manufacturing method of the color filter described in the above [1]] The substrate in the step (1) is a method of producing the color filter according to the above [6] or [7] of the plastic substrate. [Effect of the Invention] A coloring photosensitive resin composition can obtain a pattern having excellent resolution. The coloring photosensitive resin composition of the invention contains a coloring agent (A), a resin (B), a polymerizable compound (C), a polymerization initiator (D), and a solvent (E), and the resin (B) contains (B1) a copolymer derived from at least one structural unit selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride, and a structural unit derived from a monomer having a cyclic ether having 2 to 4 carbon atoms and an ethylenically unsaturated bond (There is no ethylenic unsaturated bond in the side chain.) (hereinafter sometimes referred to as "resin (B1)") and (B2) a resin having an ethylenic unsaturated bond in the side chain (hereinafter sometimes referred to as " Resin of Resin (B2)") The colored photosensitive resin composition of the present invention contains a coloring agent (A). Although the pigment and the dye are mentioned as the coloring agent (A), it is preferable to contain a pigment from the viewpoint of heat resistance and light resistance. Examples of the pigment include organic pigments and inorganic pigments, and examples thereof include compounds classified by color index (published by The Society of Dyers and Col〇 Urists). Specific examples of the organic pigments include CI pigment yellow 1, 3, 201232174 12, 13 1 ' 14, 15, 16, 17, 20, 24 '31, 53 '83, 94, 109, 110, 117, 125, 128 ' 13 7 ' 138 , , 148 , 150 , 153 , 154 , 166 , 173 ' 194 > 214 etc . » CI pigment orange 13, 31, 36, 38 ' 40, 42 ' 43 , 59 , 61 , 64 , Orange pigments such as 65, 71, 73; C.I. Pigment red 9 , 97 , 105 , 122 , 123 , 144 , 168 , 176 , 177 ' 180 , 192 , 209 ' 215 , 216 , 254 , 255 ' 264 , 265 and other red pigments » C. , I. Pigment blue 1 5 , 15: 3 , 15: 4 '15: 6, 60 0; CI pigment purple 1, 19, 23, 29, 32, 36 '38, etc. 1 CI pigment green 7, 36 '58 and other green pigments; CI pigment coffee 2 3, 2 5 and other brown pigments; and CI pigment black 1, 7 and other black pigments. Among them, C.I. pigment yellows 138, 139, 150, C 177, 242, 254, C.1. Pigment red purple 23, C.I. pigment blue 1 : 6 and C.I. pigment green 7, 3 6 and 5 8 are preferred. These pigments can be used in combination of two or more kinds. _a-£- 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料 颜料Treatment or removal of impurities by organic solvent or water treatment, removal of ionic impurities by ion exchange method, etc., 8 6 , 9 3 139 > 147 yellow pigment ' 51 > 55 149 ' 166 224 , 242 , etc . Purple pigment. I. Pigment red 5 : 3 ' 15 Separate or mixed acidic groups, or by washing by a high-micronization method or the like is preferred. -9- 201232174 Further, it is preferred that the pigment has a uniform particle size. By dispersing the pigment dispersant, it is possible to obtain a dispersion in which the pigment is uniformly dispersed in the solution. As the pigment dispersant, a commercially available surfactant can be used as the surfactant, and examples thereof include polyfluorene-based, fluorine-based, ester-based, daughter-based, anionic-based nonionic, amphoteric, polyester, and poly. An amine olefinic surfactant. As the above surfactant, in addition to polycycloalkyl alkyl ethers, polyethylene oxide alkylphenyl ethers, polyethylene glycol di, sorbitan fatty acid esters, fatty acid modified polyesters, tertiary amine polyurethanes Other than the class, polyethyleneimine, etc., may be given by Shin-Etsu Chemical Co., Ltd., Floren (Kyoei Chemical Co., Ltd., Solsperse (Zeneca), EFKA (CIBA) Aj i sper (Aj iη〇m〇t 〇F i ne - Te chn 〇Cο ·, Inc., manufactured by Inc., etc.) may be used singly or in combination of two or more. When a pigment dispersant is used, the amount is used. The pigment weight is 100% by mass or less, and more preferably 5 to 50% by mass. When the amount of the pigment dispersion used is within the above range, the dispersion of the material in a uniformly dispersed state tends to be obtained. The amount of the solid content of the coloring photosensitive resin is preferably from 5 to 60% by mass, more preferably not more than 5% by mass. When the content of the coloring agent (A) is within the above range, the desired wavelength is obtained. Or color concentration. The solid phase is obtained by removing the components of the solvent from the coloring photosensitive resin composition.] The fraction is divided into cations and propoxyethylated denatured KP (shares) company's two preferred agents. ~45 can be scored, -10- 201232174 The colored photosensitive resin composition of the present invention is a resin containing a resin (B 1 ) (B). The resin (B1) is contained from an unsaturated acid selected from unsaturated and unsaturated. At least one type of carboxylic anhydride group (hereinafter sometimes referred to as "(a)")), a monomer derived from a cyclic ether having a carbon number of 2 to 4, and an ethylenically unsaturated bond (hereinafter sometimes a copolymer of a structural unit called "(b)") (but no ethylenic unsaturated bond in the side chain). The colored photosensitive resin composition has a heat resistance of the resulting pattern by the resin (B 1 ) For example, the resin (B 1 ) is a resin (B1-1): a copolymer obtained by polymerizing (a) and (b), and a resin (B1). -2): Polymerization of (a), (b) and monomer (c) having an unsaturated bond capable of copolymerizing (a) and (b) (below) The copolymer formed by the term "(c)") is preferably (B 1 -1 ) as the resin (B 1 ). Specific examples of (a) include acrylic acid, methacrylic acid, crotonic acid, and hydrazine. - unsaturated monocarboxylic acids such as ethylene benzoic acid, m-ethylene benzoic acid, p-ethylene benzoic acid; maleic acid, fumaric acid, methyl maleic acid, mesaconic acid, itaconic acid, 3-ethylene Tannic acid, 4-vinyl phthalic acid, 3,4,5,6-tetrahydrofurfuric acid, 1,2,3,6-tetrahydrofurfuric acid, dimethyltetrahydrofurfuric acid, 1, 4-cyclohexene Unsaturated dicarboxylic acids such as dicarboxylic acid; methyl-5-norbornene-2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxyl linkage Ring [2.2.1]hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2"]hept-2 - Alkene 201232174, 5-carboxyl group: 6-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-ethylbicyclo[2.2.1]hept-2-ene, etc. Cyclic unsaturated compounds; maleic anhydride, methyl cis-butanic anhydride, itaconic anhydride, 3-vinyl phthalic anhydride, 4-vinyl phthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1, 2,3,6-tetrahydrogen Unsaturated dicarboxylic acid anhydrates such as phthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene anhydrate (norbornene dianhydride) » succinic acid single Unsaturated mono[(meth)propene of a polyvalent carboxylic acid having two or more valences such as [2-(meth) propylene oxiranylethyl] or phthalic acid mono [2-(methyl) propylene methoxyethyl] a decyloxyalkyl ester; an unsaturated acrylate having a hydroxyl group and a carboxyl group in the same molecule, such as α-(hydroxymethyl)acrylic acid. Among them, acrylic acid, methacrylic acid, maleic anhydride, and the like are used from the viewpoint of copolymerization reactivity or alkali solubility. In the present specification, "(meth)acrylic acid" means at least one selected from the group consisting of acrylic acid and methacrylic acid. The meanings of "(meth)acryloyl group" and "(meth) acrylate" are also the same as (b), and examples thereof include monomers having an oxirane group and an ethylenically unsaturated bond. (b-Ι) (hereinafter sometimes referred to as "(b-Ι)"), a monomer having an oxycyclobutane group and an ethylenically unsaturated bond (b-2) (hereinafter sometimes referred to as "(b- 2)") and a monomer (b-3) having a tetrahydrofuranyl group and an ethylenically unsaturated bond (hereinafter sometimes referred to as "(b-3)"). (b-1), for example, a monomer (b-1 1 ) having a structure in which a chain olefin is bonded to an ethylenic group via an epoxy group-12-201232174 (hereinafter referred to as "(b-11)" And a monomer (b-12) having a structural unsaturated bond having a cyclic olefin as an epoxy group (hereinafter sometimes referred to as "(b_)° as (b-Ι) to have an oxirane group and A monomer having a (meth)propoxy group is preferred, and a (meth) propylene fluorenyloxy group is more preferred. (b-oxime), specifically, a glycidyl (meth) ester, --methylepoxypropyl (meth) acrylate, β-ethyl ring (meth) acrylate, propylene propylene vinyl ether, hydrazine-vinyl benzyl propyl ether, m-vinyl benzyl ring Oxypropyl propyl ether, ρ-vinylbenzyl ether, α-methyl-hydrazine-ethyl benzyl epoxypropyl ether, α-methyl benzyl epoxypropyl ether, α-methyl -ρ-vinylbenzyloxypropane 2,3-bis(glycidoxymethyl)styrene, 2,4-bis(epoxymethyl)styrene, 2,5-bis(epoxypropyl) Oxymethyl) phenylethyl bis(glycidoxymethyl)styrene, 2,3,4-cis (epoxypropyl) Ethylene, 2,3,5-glycol (glycidoxymethyl)styrene, ginseng (glycidoxymethyl)styrene, 3,4,5-glycol(epoxypropyl)styrene 2,4,6-glycol (glycidoxymethyl)styrene, a compound described in JP-A-7-248625, etc. Examples of (b-12) include ethylene cyclohexene monooxide and oxygen. 4-vinylcyclohexane (for example, celloxide 2000; manufactured by Dicel Co., Ltd.), 3,4-epoxycyclohexyl methacrylate Cyclomer A40®; Dice 1 Chemical Industry Co., Ltd., 3, 4 - when called with ethylene.12)" olefinic group b-12) oxypropyl acrylate epoxy propylene m-ethyl ether, propoxy ί ' 2,6- oxymethyl 2,3 , 6-oxymethyl, special 1,2-ring chemical (for example, epoxy-13-201232174 cyclohexylmethyl methacrylate (such as CyclomerM100; Dicel Chemical Industry Co., Ltd.), formula (I) The compound shown, the compound represented by the formula (II), and the like.

(I) (Π) 〔式(I)及式(II)中,R1及R2爲彼此獨立,表示 氫原子或碳數1〜4的烷基,含於該烷基之氫原子可由羥 基所取代。 X1及X2爲彼此獨立,表示單鍵、-R3-、*-R3-0-、、 R3-S- ' *-R3-NH- ο R3表示碳數1〜6的烷二基。 *表示與0之結合鍵〕。 作爲碳數1〜4的烷基’具體可舉出甲基、乙基' n-丙基、異丙基、η-丁基、第二丁基、第三丁基等。 作爲羥基烷基,可舉出羥基甲基、1-羥基乙基、2-羥 基乙基、1-羥基丙基、2-羥基丙基、3-羥基丙基、1-羥基-1-甲基乙基、2-羥基-1-甲基乙基、1-羥基丁基、2-羥基丁 基、3-羥基丁基、4-羥基丁基等。 作爲R1及R2,較佳可舉出氫原子、甲基、羥基甲基 、1-羥基乙基、2-羥基乙基,更佳可舉出氫原子、甲基。 作爲烷二基,可舉出伸甲基、伸乙基、丙烷-1,2-二基 、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5·二基、己烷-1,6·二基等。 -14- 201232174 作爲χ1及χ2,較佳可舉出單鍵、伸甲基、伸乙基、 *-CH2-0- ( *表示與〇之結合鍵)基、*-CH2CH2-0-基,更 佳可舉出單鍵、*-CH2CH2-0-基。 作爲式(I )所示化合物,可舉出式(1-1 )〜式(b 15)所示化合物等。較佳可舉出式(1-1)、式(Ι·3)、 式(1-5)、式(1-7)、式(1-9)、式(1-11)〜式(1_ 15)。更佳可舉出式(1-1)、式(1-7)、式(1_9)、式 H^C=CH 一b—0 —CH2 H2C=CH-C—O-C2H4 H2〇=CH-C—o-c2h4-〇 ch3o Η 2〇 C—Ο ch3 ο I II Η 2C =C C—O —"CH2(I) (Π) [In the formulae (I) and (II), R1 and R2 are independently of each other and represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and the hydrogen atom contained in the alkyl group may be substituted by a hydroxyl group. . X1 and X2 are independent of each other, and represent a single bond, -R3-, *-R3-0-, and R3-S-'*-R3-NH- ο R3 represents an alkanediyl group having 1 to 6 carbon atoms. * indicates a bond with 0]. Specific examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl 'n-propyl group, an isopropyl group, an η-butyl group, a second butyl group, and a third butyl group. Examples of the hydroxyalkyl group include a hydroxymethyl group, a 1-hydroxyethyl group, a 2-hydroxyethyl group, a 1-hydroxypropyl group, a 2-hydroxypropyl group, a 3-hydroxypropyl group, and a 1-hydroxy-1-methyl group. Ethyl, 2-hydroxy-1-methylethyl, 1-hydroxybutyl, 2-hydroxybutyl, 3-hydroxybutyl, 4-hydroxybutyl, and the like. The R1 and R2 are preferably a hydrogen atom, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group or a 2-hydroxyethyl group, and more preferably a hydrogen atom or a methyl group. Examples of the alkanediyl group include a methyl group, an ethyl group, a propane-1,2-diyl group, a propane-1,3-diyl group, a butane-1,4-diyl group, and a pentane-1,5 group. · Diyl, hexane-1,6.diyl and the like. -14- 201232174 As χ1 and χ2, a single bond, a methyl group, an ethyl group, a *-CH2-0- (* represents a bond to a ruthenium) group, and a *-CH2CH2-0- group are preferable. More preferably, a single bond, *-CH2CH2-0- group can be mentioned. The compound represented by the formula (I) may, for example, be a compound represented by the formula (1-1) to the formula (b 15). Preferably, the formula (1-1), the formula (Ι·3), the formula (1-5), the formula (1-7), the formula (1-9), the formula (1-11) to the formula (1_) 15). More preferably, it is a formula (1-1), a formula (1-7), a formula (1-9), a formula H^C=CH a b-0-CH2 H2C=CH-C-O-C2H4 H2〇=CH- C—o-c2h4-〇ch3o Η 2〇C—Ο ch3 ο I II Η 2C =CC—O —"CH2

h2c=ch )—C2H4 CH30 h2c ο —C-Ο—C2H4一sH2c=ch )—C2H4 CH30 h2c ο —C-Ο—C2H4—s

CH3〇 =c—c —〇—C2H4—N H2〇=CCH3〇 =c—c —〇—C2H4—N H2〇=C

(I-10) ^OH 〇 H2C=C-C—O o .II H2C=CH-C-0 -C2H4-N H CH30 I II Λ · HjC—C—Ο—O *—02^4—5(I-10) ^OH 〇 H2C=C-C—O o .II H2C=CH-C-0 -C2H4-N H CH30 I II Λ · HjC—C—Ο—O *—02^4—5

〇2Η4ΟΗ o I II h2c=c—c—o C—Ο—〇2Η4·^〇 (M3)〇2Η4ΟΗ o I II h2c=c—c—o C—Ο—〇2Η4·^〇 (M3)

(1-15)(1-15)

作爲式(II)所示化合物,可舉出式(II-l)〜式 11 -1 5 )所示化合物等。較佳可舉出式(11 -1 )、式(! J -15- 201232174 )、式(II-5)、式(II-7)、式(II-9)、式(11-11)〜 式(11-15 )。 更佳可舉出式(II-1)、式(II-7)、式(II-9)、式 (11-15)。The compound represented by the formula (II) may, for example, be a compound represented by the formula (II-1) to the formula 11 -1 5 ). Preferably, the formula (11-1), the formula (!J -15-201232174), the formula (II-5), the formula (II-7), the formula (II-9), and the formula (11-11) are exemplified. Formula (11-15). More preferably, it is a formula (II-1), a formula (II-7), a formula (II-9), and a formula (11-15).

,(ΙΓ-14) ch3〇 I: II C—O—CjH^O',(ΙΓ-14) ch3〇 I: II C—O—CjH^O'

式(I)所示化合物及式(II)所示化合物各可單獨使 用。又,這些可以任意比率進行混合。混合時,該混合比 率以莫耳比表示時,較佳爲式(I ):式(II )爲5 : 95〜 95: 5,較佳爲 10: 90 〜90: 10,更佳爲 20: 80 〜80: 20 〇 作爲(b-2),具有氧環丁烷基與(甲基)丙烯醯基 -16- 201232174 氧基之單體爲佳。作爲(b-2 ),例如可舉出3-甲基-3-( 甲基)丙烯醯氧基甲基氧環丁烷、3-乙基- 3-(甲基)丙烯 醯氧基甲基氧環丁烷、3-甲基- 3-(甲基)丙烯醯氧基乙基 氧環丁烷及3-乙基- 3-(甲基)丙烯醯氧基乙基氧環丁烷 〇 作爲(b-3),具有四氫呋喃基與(甲基)丙烯醯基 氧基的單體爲較佳。作爲(b-3),具體可舉出四氫糠基 丙烯酸酯(例如彼氏可特V# 1 50、大阪有機化學工業(股 )製)、四氫糠基甲基丙烯酸酯等。 作爲(c ),例如可舉出甲基(甲基)丙烯酸酯、乙 基(甲基)丙烯酸酯、η-丁基(甲基)丙烯酸酯、第二丁 基(甲基)丙烯酸酯、第三丁基(甲基)丙烯酸酯等(甲 基)丙烯酸烷基酯類; 環己基(甲基)丙烯酸酯、2-甲基環己基(甲基)丙 烯酸酯、三環〔5.2.1. 〇2,6〕癸烷-8-基(甲基)丙烯酸酯 (該技術領域中,作爲慣用名稱爲二環戊基(甲基)丙烯 酸酯)、二環戊氧基乙基(甲基)丙烯酸酯、異莰基(甲 基)丙烯酸酯等(甲基)丙烯酸環狀烷基酯類; 苯基(甲基)丙烯酸酯、苯甲基(甲基)丙烯酸酯等 (甲基)丙烯酸芳基或芳烷基酯類; 馬來酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等二羧 酸二酯; 2-羥基乙基(甲基)丙烯酸酯、2-羥基丙基(甲基) 丙烯酸酯等羥基烷基酯類; -17- 201232174 聯環〔2.2.1〕庚-2-烯、5-甲基聯環〔2.2.1〕庚-2-烯 、5-乙基聯環〔2.2.1〕庚-2-烯、5-羥基聯環〔2.2.1〕庚-2-烯、5-羥基甲基聯環〔2.2.1〕庚-2-烯、5- (2,-羥基乙 基)聯環〔2.2.1〕庚-2-烯、5-甲氧基聯環〔2.2.1〕庚-2-烯、5-乙氧基聯環〔2.2.1〕庚-2-烯、5,6-二羥基聯環〔 2.2.1〕庚-2-烯、5,6-二(羥基甲基)聯環〔2.2.1〕庚-2-烯、5,6-二(2,-羥基乙基)聯環〔2.2.1〕庚-2-烯、5,6-二 甲氧基聯環〔2.2.1〕庚-2-烯、5,6-二乙氧基聯環〔2.2.1 〕庚-2-烯、5-羥基-5-甲基聯環〔2.2.1〕庚-2_烯、5-羥基-5-乙基聯環〔2.2.1〕庚-2-烯、5-羥基甲基-5-甲基聯環〔 2.2.1〕庚-2·烯、5-第三丁氧基羰基聯_〔2.2.1〕庚-2-烯 、5-環己氧基羰基聯環〔2.2.1〕庚-2-烯、5-苯氧基羰基聯 環〔2.2.1〕庚-2-烯、5,6-雙(第三丁氧基羰基)聯環〔 2.2.1〕庚-2-烯、5,6-雙(環己氧基羰基)聯環〔2.2.1〕 庚-2-烯等聯環不飽和化合物類; N-苯基馬來亞醯胺、N-環己基馬來亞醯胺、N-苯甲基 馬來亞醯胺、N-琥珀醯亞胺-3-馬來亞醯胺苯甲酸酯、N-琥珀醯亞胺-4-馬來亞醯胺丁酸酯、N-琥珀醯亞胺-6-馬來 亞醯胺己酸酯、N-琥珀醯亞胺-3-馬來亞醯胺丙酸酯、N-(9-吖啶基)馬來亞醯胺等二羰基亞胺衍生物類; 苯乙烯、α-甲基苯乙烯、m-甲基苯乙烯、p-甲基苯乙 烯、乙烯甲苯、p-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、 氯化乙烯、氯化亞乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸 乙烯酯、1,3-丁二烯、異戊二烯及2,3-二甲基-1,3-丁二烯 -18- 201232174 等。 彼等中,苯乙烯、N_苯基馬來亞醯胺、N_環己基馬來 亞醯胺、N-苯甲基馬來亞醯胺、聯環〔2.2.1〕庚-2-烯等 由共聚合反應性及鹼溶解性的觀點來看爲佳。 樹脂(B1-1)中,來自各單體之結構單位的比率對於 構成樹脂(B1-1)的結構單位合計莫耳數而言,以以下範 圍者爲佳。 來自(a)的結構單位;5〜6〇莫耳%(更佳爲1〇〜5〇 莫耳% ) 來自(b)的結構單位;40〜95莫耳% (更佳爲50〜 9 0莫耳% ) 樹脂(B 1 -1 )的結構單位之比率若在上述範圍內時, 有著保存安定性、顯像性、耐溶劑性、耐熱性及機械強度 成爲良好之傾向。 作爲樹脂(B 1 -1 )以(b )爲(b-1 )之樹脂爲佳,以 (b -1 )爲(b -1 2 )之樹脂時爲更佳。 樹脂(B1-1)例如可參考文獻「高分子合成之實驗法 」(大津隆行著發行所(股)化學同人第1版第1刷 1972年3月1日發行)所記載之方法及該文獻所記載之引 用文獻而製造。 具體爲將(a )及(b )的所定量、聚合啓始劑及溶劑 等裝入反應容器中,藉由將氮由氧取代而脫氧,並進行攪 拌、加熱、保溫之方法已被例示。且,其中所使用的聚合 啓始劑及溶劑等並無特別限定,可使用該領域中一般使用 -19- 201232174 的任意者。作爲聚合啓始劑,例如可舉出偶氮化合物( 2,2’-偶氮二異丁腈、2,2’_偶氮雙(2,4_二甲基戊腈)等) 及有機過氧化物(苯甲醯基過氧化物等),作爲溶劑,若 可溶解各單體者即可,作爲著色感光性樹脂組成物之溶劑 ,可使用後述溶劑等。 且’所得之共聚物可直接使用反應後的溶液,或使用 經濃縮或稀釋的溶液,或亦可使用以再沈澱等方法以固體 (粉體)方式取出者。特別作爲該聚合時的溶劑,藉由使 用與後述溶劑(E )相同之溶劑時,可直接使用反應後的 溶液’進而簡略化製造步驟。 樹脂(B1-2)中,來自各單體的結構單位之比率對於 構成樹脂(B1-2)的全結構單位合計莫耳數而言爲以下範 圍內者爲佳。 來自(a)的結構單位;2〜40莫耳% (更佳爲5〜35 莫耳% ) 來自(b)的結構單位;2〜95莫耳% (更佳爲5〜80 莫耳% ) 來自(c )的結構單位;1〜65莫耳% (更佳爲i〜60 莫耳% ) 樹脂(B 1 - 2 )的結構單位之比率若在上述範圍內時, 有著保存安定性、顯像性、耐溶劑性、耐熱性及機械強度 成爲良好之傾向。 作爲樹脂(B 1 - 2 )以(b )爲(b -1 )之樹脂爲佳,以 (b )爲(b-12 )時的樹脂爲較佳。 -20- 201232174 樹脂(B1-2)可與樹脂(B1-1)之同樣方法製造。 樹脂(B1)的聚苯乙烯換算之重量平均分子量(Mw )較佳爲3,000〜100,0〇〇,更佳爲5,000〜50,000。樹脂 (B1)的重量平均分子量若爲前述範圍時,塗佈性有變良 好之傾向,又顯像時不容易產生減膜現象,且於顯像時有 著非畫素部分的脫去性良好之傾向。 樹脂(B1)的分子量分佈〔重量平均分子量(Mw) / 數平均分子量(Μη)〕較佳爲1.5〜6.0,更佳爲1.8〜4.0 。樹脂(Β1)的分子量分佈若在前述範圍內時,有著顯像 性優良的傾向。 樹脂(Β1)的酸價爲20〜150mg-KOH/g,較佳爲30 〜135mg-KOH/g,更佳爲40〜125mg-KOH/g。其中酸價爲 中和樹脂(B 1 ) 1 g時作爲氫氧化鉀必要量(mg )所測定 的値,可藉由使用氫氧化鉀水溶液進行滴定而求得。 樹脂(B1 )的含有量對於樹脂(B1 )及樹脂(B2 ) 的合計量而言,較佳爲10〜95質量%,更佳爲10〜85質 量% ’特佳爲1 0〜80質量%。樹脂(B 1 )的含有量在前述 範圍內時’顯像性、密著性、耐溶劑性、機械特性有變良 好之傾向。 本發明的著色感光性樹脂組成物所含之樹脂(B )進 一步含有樹脂(B2 )。樹脂(B2 )可舉出於側鏈具有乙烯 性不飽和鍵的樹脂、將共聚合(a )與(c )所得之共聚物 進一步與(b )進行反應所得知樹脂(B2-l )或將共聚合 (b )與(c )所得之共聚物進一步與(a )進行反應所得 -21 - 201232174 之樹脂(B2-2)等。其中作爲樹脂(B2)以樹脂(B2-1 ) 爲佳。 作爲構成樹脂(B2)之(a) 、(b)及(c),可舉 出與前述樹脂(B 1 )之同樣者,但作爲(c ),特別爲具 有選自由三環癸烷骨架及三環癸烯骨架所成的群之至少! 種骨架、與乙烯性不飽和鍵之化合物(c 1 )(以下有時稱 爲「(cl)」)爲佳。 (c)爲(cl)時,可抑制藉由顯像之圖型減膜β 其中本說明書中所謂「三環癸院骨架」及「三環癸嫌 骨架」爲各以下結構(各任意碳原子爲具有結合鍵)。 〇〇 0〇 三環癸烷骨架 三環癸烯骨架 作爲(cl),具體可舉出二環戊基(甲基)丙烯酸酯 、二環戊烯基(甲基)丙烯酸酯、二環戊氧基乙基(甲基 )丙烯酸酯、二環戊烯氧基乙基(甲基)丙烯酸酯。彼等 中可各單獨或組合2種以上使用。 樹脂(B2-1 )及樹脂(B2-2 )例如可經由二段階之步 驟而製造。此情況下,可參考上述文獻「高分子合成的實 驗法」(大津隆行著發行所(股)化學同人第1版第1 刷1 972年3月1日發行)所記載之方法、特開2〇〇1_ 89533號公報所記載之方法等製造。 樹脂(B 2 -1 )係由首先作爲第一段階,與上述樹脂( B 1 - 1 )的製造方法同樣地,得到(a )與(c )之共聚物。 此時與上述同樣地,所得之共聚物可直接使用反應後 -22- 201232174 溶液,或可使用經濃縮或稀釋的溶液’以再沈澱等方法以 固體(粉體)方式取出者。 (a)及來自(c)的結構單位的比率對於構成前述共 聚物之全結構單位的合計莫耳數而言,以以·下範圍爲佳。 來自(a )之結構單位;5〜5 0莫耳% (更佳爲1 〇〜4 5 莫耳% ) 來自(c )的結構單位;50〜95莫耳% (更佳爲55〜 9 0莫耳%) 其次,作爲第二段階,將來自所得之共聚物的(a ) 之羧酸及羧酸酐的一部份,與(b)的環狀醚進行反應。 環狀醚的反應性高,不容易殘存未反應的(b),故作爲 (b )以(b-Ι )爲佳,以(b-1 1 )爲更佳。 具體爲接續上述,將燒杯內環境由氮取代爲空氣,將 對於(a)的莫耳數爲5〜80莫耳%的(15)、羧基與環狀 醚的反應觸媒(例如參(二甲基胺基甲基)酚)對於(a )、(b)及(c)的合計量爲0.001〜5質量%、及將聚合 禁止劑(例如氫醌)對於(a ) 、 ( b )及(c )的合計量 爲0.001〜5質量%者放入燒杯內,在60〜130 °C進行1〜 1 〇小時反應’可得到樹脂(B 2 -1 )。且與聚合條件之同樣 下’考慮製造設備或聚合所引起的發熱量等,可適宜地調 整裝入方法或反應溫度。 又’此時場合(b)的莫耳數對於(a)的莫耳數,以 1 0〜7 5莫耳%爲佳,更佳爲丨5〜7 〇莫耳%。使(b )的莫 耳數在該範圍時,保存安定性、耐溶劑性及耐熱性之平衡 -23- 201232174 有變良好之傾向。 作爲樹脂(B2-1 )的具體例,(甲基)丙烯酸/二環 戊基(甲基)丙烯酸酯的共聚物中反應環氧丙基(甲基) 丙烯酸酯的樹脂、(甲基)丙烯酸/苯甲基(甲基)丙烯 酸酯的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂、 (甲基)丙烯酸/環己基(甲基)丙烯酸酯的共聚物中反 應環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙烯酸/ 苯乙烯的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂 、(甲基)丙烯酸/ (甲基)丙烯酸甲基的共聚物中反應 環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙烯酸/N-環己基馬來亞醯胺的共聚物中反應環氧丙基(甲基)丙烯 酸酯的樹脂、巴豆酸/二環戊基(甲基)丙烯酸酯的共聚 物中反應環氧丙基(甲基)丙烯酸酯的樹脂; 巴豆酸/苯甲基(甲基)丙烯酸酯的共聚物中反應環 氧丙基(甲基)丙烯酸酯的樹脂、巴豆酸/環己基(甲基 )丙烯酸酯的共聚物中反應環氧丙基(甲基)丙烯酸酯的 樹脂、巴豆酸/苯乙烯的共聚物中反應環氧丙基(甲基) 丙烯酸酯的樹脂、巴豆酸/巴豆酸甲基的共聚物中反應環 氧丙基(甲基)丙烯酸酯的樹脂、巴豆酸/N-環己基馬來 亞醯胺的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂 ♦ 馬來酸/二環戊基(甲基)丙烯酸酯的共聚物中反應 環氧丙基(甲基)丙烯酸酯的樹脂、馬來酸/苯甲基(甲 基)丙烯酸酯的共聚物中反應環氧丙基(甲基)丙烯酸酯 -24- 201232174 的樹脂、馬來酸/環己基(甲基)丙烯酸酯的共聚物中反 應環氧丙基(甲基)丙烯酸酯的樹脂、馬來酸/苯乙烯的 共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂、馬來酸 /馬來酸甲酯的共聚物中反應環氧丙基(甲基)丙烯酸酯 的樹脂、馬來酸/N-環己基馬來亞醯胺的共聚物中反應環 氧丙基(甲基)丙烯酸酯的樹脂; (甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯酸 酯的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂、( 甲基)丙烯酸/馬來酸酐/苯甲基(甲基)丙烯酸酯的共聚 物中反應環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙 烯酸/馬來酸酐/環己基(甲基)丙烯酸酯的共聚物中反應 環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙烯酸/馬 來酸酐/苯乙烯的共聚物中反應環氧丙基(甲基)丙烯酸 酯的樹脂、(甲基)丙烯酸/馬來酸酐/ (甲基)丙烯酸甲 酯的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂、( 甲基)丙烯酸/馬來酸酐/N-環己基馬來亞醯胺的共聚物中 反應環氧丙基(甲基)丙烯酸酯的樹脂; (甲基)丙烯酸/二環戊基(甲基)丙烯酸酯的共聚 物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、( 甲基)丙烯酸/苯甲基(甲基)丙烯酸酯的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙 烯酸/環己基(甲基)丙烯酸酯的共聚物中反應3,4-環氧 基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙烯酸/苯 乙烯的共聚物中反應3,4_環氧基環己基甲基甲基丙烯酸酯 -25- 201232174 的樹脂、(甲基)丙烯酸/ (甲基)丙烯酸甲醋的共聚物 中反應3,4-環氧基環己基甲基甲基丙烯酸醋的樹脂、(甲 基)丙烯酸/N-環己基馬來亞醯胺的共聚物中反應3,4-環 氧基環己基甲基甲基丙烯酸酯的樹脂; 巴豆酸/二環戊基(甲基)丙烯酸酯的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、巴豆酸/苯甲 基(甲基)丙烯酸酯的共聚物中反應3,4-環氧基環己基甲 基甲基丙烯酸酯的樹脂、巴豆酸/環己基(甲基)丙烯酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、巴豆酸/苯乙烯的共聚物中反應3,4 -環氧基環己基 甲基甲基丙烯酸酯的樹脂、巴豆酸/巴豆酸甲酯的共聚物 中反應3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、巴豆 酸/N_環己基馬來亞醯胺的共聚物中反應3,4-環氧基環己 基甲基甲基丙烯酸酯的樹脂; 馬來酸/二環戊基(甲基)丙烯酸酯的共聚物中反應 3,4 _環氧基環己基甲基甲基丙烯酸酯的樹脂、馬來酸/苯甲 基(甲基)丙烯酸酯的共聚物中反應3,4-環氧基環己基甲 基甲基丙烯酸酯的樹脂、馬來酸/環己基(甲基)丙烯酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、馬來酸/苯乙烯的共聚物中反應3,4-環氧基環己基 甲基甲基丙烯酸酯的樹脂、馬來酸/馬來酸甲基的共聚物 中反應3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、馬來 酸/N-環己基馬來亞醯胺的共聚物中反應3,4-環氧基環己 基甲基甲基丙烯酸酯的樹脂; -26- 201232174 (甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、(甲基)丙烯酸/馬來酸酐/苯甲基(甲基)丙儲酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、(甲基)丙烯酸/馬來酸酐/環己基(甲基)丙烯酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、(甲基)丙烯酸/馬來酸酐/苯乙烯的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙 烯酸/馬來酸酐/ (甲基)丙烯酸甲基的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙烯酸 /馬來酸酐/N-環己基馬來亞醯胺的共聚物中反應3,4-環氧 基環己基甲基甲基丙烯酸酯的樹脂等。 作爲樹脂(B2-1),共聚合除(a) 、 (cl)與(cl )以外的(c )所得之共聚物中,反應(b )所得之樹脂爲 佳。樹脂(B2-1 )若爲上述構成時,所得之圖型與基板之 密著性及耐溶劑性有優良的傾向。 (a)與(c)的共聚物係由除(a) 、 (cl)與(cl )以外之(c )所成時,(c 1 )及(c 1 )以外的來自(c ) 的結構單位之比率以1 0 : 9 0〜6 0 : 4 0爲佳,以1 0 : 9 0〜 40: 60爲較佳,10: 90〜30: 70爲更佳。 作爲共聚合除(a) 、 (cl)與(cl)以外的(c)所 得之共聚物中反應(b )所得之樹脂,具體·可舉出(甲基 )丙烯酸/二環戊基(甲基)丙烯酸酯/苯甲基(甲基)丙 烯酸酯的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂 -27- 201232174 、(甲基)丙烯酸/二環戊基(甲基)丙烯酸 甲基)丙烯酸酯的共聚物中反應環氧丙基(甲 酯的樹脂、(甲基)丙烯酸/二環戊基(甲基 苯乙烯的共聚物中反應環氧丙基(甲基)丙傾 、(甲基)丙烯酸/二環戊基(甲基)丙烯酸 丙烯酸甲基的共聚物中反應環氧丙基(甲基) 樹脂、(甲基)丙烯酸/二環戊基(甲基)丙, 己基馬來亞醯胺的共聚物中反應環氧丙基(甲 酯的樹脂; 巴豆酸/二環戊基(甲基)丙烯酸酯/苯甲 丙烯酸酯的共聚物中反應環氧丙基(甲基)丙 脂、巴豆酸/二環戊基(甲基)丙烯酸酯/環己 丙烯酸酯的共聚物中反應環氧丙基(甲基)丙 脂、巴豆酸/二環戊基(甲基)丙烯酸酯/苯乙 中反應環氧丙基(甲基)丙烯酸酯的樹脂、[ 戊基(甲基)丙烯酸酯/巴豆酸甲基的共聚物 丙基(甲基)丙烯酸酯的樹脂、巴豆酸/二環 )丙烯酸酯/N-環己基馬來亞醯胺的共聚物中 基(甲基)丙烯酸酯的樹脂; 馬來酸/二環戊基(甲基)丙烯酸酯/苯甲 丙烯酸酯的共聚物中反應環氧丙基(甲基)丙 脂' 馬來酸/二環戊基(甲基)丙烯酸酯/環己 丙烯酸酯的共聚物中反應環氧丙基(甲基)丙 脂、馬來酸/二環戊基(甲基)丙烯酸酯/苯乙 酯/環己基( I基)丙烯酸 )丙烯酸酯/ ί酸酯的樹脂 醋/ (甲基) 丙烯酸酯的 稀酸酯/Ν-環 基)丙烯酸 基(甲基) 烯酸酯的樹 基(甲基) 烯酸酯的樹 烯的共聚物 3豆酸/二環 中反應環氧 戊基(甲基 反應環氧丙 基(甲基) 烯酸酯的樹 基(甲基) 烯酸酯的樹 烯的共聚物 -28- 201232174 中反應環氧丙基(甲基)丙烯酸酯的樹脂、馬來酸/二環 戊基(甲基)丙烯酸酯/馬來酸甲基的共聚物中反應環氧 丙基(甲基)丙烯酸酯的樹脂、馬來酸/二環戊基(甲基 )丙烯酸酯/N-環己基馬來亞醯胺的共聚物中反應環氧丙 基(甲基)丙烯酸酯的樹脂; (甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯酸 酯/苯甲基(甲基)丙烯酸酯的共聚物中反應環氧丙基( 甲基)丙烯酸酯的樹脂、(甲基)丙烯酸/馬來酸酐/二環 戊基(甲基)丙烯酸酯/環己基(甲基)丙烯酸酯的共聚 物中反應環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙 烯酸/馬來酸酐/二環戊基(甲基)丙烯酸酯/苯乙烯的共聚 物中反應環氧丙基(甲基)丙烯酸酯的樹脂、(甲基)丙 烯酸/馬來酸酐/二環戊基(甲基)丙烯酸酯/ (甲基)丙烯 酸甲基的共聚物中反應環氧丙基(甲基)丙烯酸酯的樹脂 、(甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯酸酯 /N-環己基馬來亞醯胺的共聚物中反應環氧丙基(甲基) 丙烯酸酯的樹脂; (甲基)丙烯酸/二環戊基(甲基)丙烯酸酯/苯甲基 (甲基)丙烯酸酯的共聚物中反應3,4-環氧基環己基甲基 甲基丙烯酸酯的樹脂、(甲基)丙烯酸/二環戊基(甲基 )丙烯酸酯/環己基(甲基)丙烯酸酯的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙 烯酸/二環戊基(甲基)丙烯酸酯/苯乙烯的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙 -29- 201232174 烯酸/二環戊基(甲基)丙烯酸酯/ (甲基)丙烯酸甲酯的 共聚物中反應夂4-環氧基環己基甲基甲基丙烯酸酯的樹脂 、(甲基)丙烯酸/二環戊基,(甲基)丙烯酸酯/N-環己基 馬來亞醯胺的共聚物中反應3,4-環氧基環己基甲基甲基丙 烯酸酯的樹脂; 巴豆酸/二環戊基(甲基)丙烯酸酯/苯甲基(甲基) 丙烯酸酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯 酸酯的樹脂、巴豆酸/二環戊基(甲基)丙烯酸酯/環己基 (甲基)丙烯酸酯的共聚物中反應3,4-環氧基環己基甲基 甲基丙烯酸酯的樹脂、巴豆酸/二環戊基(甲基)丙烯酸 酯/苯乙烯的共聚物中反應3,4-環氧基環己基甲基甲基丙 烯酸酯的樹脂、巴豆酸/二環戊基(甲基)丙烯酸酯/巴豆 酸甲基的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸 酯的樹脂、巴豆酸/二環戊基(甲基)丙烯酸酯/N-環己基 馬來亞醯胺的共聚物中反應3,4_環氧基環己基甲基甲基丙 烯酸酯的樹脂; 馬來酸/二環戊基(甲基)丙烯酸酯/苯甲基(甲基) 丙烯酸酯的共聚物中反應3,4·環氧基環己基甲基甲基丙烯 酸酯的樹脂、馬來酸/二環戊基(甲基)丙烯酸酯/環己基 (甲基)丙烯酸酯的共聚物中反應3,4-環氧基環己基甲基 甲基丙嫌酸醋的樹脂、馬來酸/二環戊基(甲基)丙嫌酸 酯/苯乙烯的共聚物中反應3,4-環氧基環己基甲基甲基丙 烯酸酯的樹脂、、馬來酸/二環戊基(甲基)丙烯酸酯/馬來 酸甲酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸 -30- 201232174 酯的樹脂、馬來酸/二環戊基(甲基)丙烯酸酯/N-環己基 馬來亞醯胺的共聚物中反應3,4-環氧基環己基甲基甲基丙 烯酸酯的樹脂; (甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯酸 酯/苯甲基(甲基)丙烯酸酯的共聚物中反應3,4-環氧基 環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙烯酸/馬來 酸酐/二環戊基(甲基)丙烯酸酯/環己基(甲基)丙烯酸 酯的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸酯的 樹脂、(甲基)丙烯酸/馬來酸酐/二環戊基(甲基)丙烯 酸酯/苯乙烯的共聚物中反應3,4-環氧基環己基甲基甲基 丙烯酸酯的樹脂、(甲基)丙烯酸/馬來酸酐/二環戊基( 甲基)丙烯酸酯/ (甲基)丙烯酸甲基的共聚物中反應 3,4-環氧基環己基甲基甲基丙烯酸酯的樹脂、(甲基)丙 烯酸/馬來酸酐/二環戊基(甲基)丙烯酸酯/N-環己基馬來 亞醯胺的共聚物中反應3,4-環氧基環己基甲基甲基丙烯酸 酯的樹脂等。 樹脂(B2-2 )係由作爲第一段階,與上述樹脂(B1-1 )之製造方法同樣地,得到(b )與(c )之共聚物。 此時與上述同樣地,所得之共聚物可直接使用反應後 溶液,或可使用經濃縮或稀釋的溶液,以再沈澱等方法以 固體(粉體)方式取出者。 (b)及來自(c)的結構單位的比率對於構成前述共 聚物之全結構單位的合計莫耳數而言,以以下範圍爲佳。 來自(b)的結構單位;5〜95莫耳% (更佳爲1〇〜90 -31 - 201232174 莫耳%) 來自(c )的結構單位;5〜9 5莫耳% (更佳爲1 0〜9 Ο 莫耳% ) 且與樹脂(Β2-1 )的製造方法同樣地,可於來自(b )與(c)之共聚物中的(b)之環狀醚,反應具有(a) 之羧酸或羧酸酐而得。藉由環狀醚與羧酸或羧酸酐之反應 所產生的羥基可進一步與羧酸酐進行反應。 前述於共聚物進行反應之(a)的使用量對於(b)的 莫耳數以5〜80莫耳%爲佳。環狀醚的反應性高,未反應 的(b )難以殘存,故作爲(b )以(b-1 )爲佳,更佳爲 (b-11 )。 作爲樹脂(B2-2)的具體例,可舉出二環戊基(甲基 )丙烯酸酯/環氧丙基(甲基)丙烯酸酯的共聚物中反應 (甲基)丙烯酸的樹脂、苯甲基(甲基)丙烯酸酯/環氧 丙基(甲基)丙烯酸酯的共聚物中反應(甲基)丙烯酸的 樹脂、環己基(甲基)丙烯酸酯/環氧丙基(甲基)丙烯 酸酯的共聚物中反應(甲基)丙烯酸的樹脂、苯乙烯/環 氧丙基(甲基)丙烯酸酯的共聚物中反應(甲基)丙烯酸 的樹脂、(甲基)丙烯酸甲基/環氧丙基(甲基)丙烯酸 酯的共聚物中反應(甲基)丙烯酸的樹脂、N-環己基馬來 亞醯胺/環氧丙基(甲基)丙烯酸酯的共聚物中反應(甲 基)丙烯酸的樹脂、二環戊基(甲基)丙烯酸酯/苯甲基 (甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸酯的共聚物 中反應(甲基)丙烯酸的樹脂、二環戊基(甲基)丙烯酸 -32- 201232174 酯/環己基(甲基)丙烯酸酯/環氧丙基(甲 的共聚物中反應(甲基)丙烯酸的樹脂、二 )丙烯酸酯/苯乙烯/環氧丙基(甲基)丙烯 中反應(甲基)丙烯酸的樹脂、(二環戊基 .酸酯/ (甲基)丙烯酸甲基/環氧丙基(甲基 共聚物中反應(甲基)丙烯酸的樹脂、二環 丙烯酸酯/N_環己基馬來亞醯胺/環氧丙基( 酯的共聚物中反應(甲基)丙烯酸的樹脂; 二環戊基(甲基)丙烯酸酯/環氧丙基 酸酯的共聚物中反應巴豆酸的樹脂、苯甲基 酸酯/環氧丙基(甲基)丙烯酸酯的共聚物 的樹脂、環己基(甲基)丙烯酸酯/環氧丙 烯酸酯的共聚物中反應巴豆酸的樹脂、苯Z (甲基)丙烯酸酯的共聚物中反應巴豆酸的 甲基/環氧丙基(甲基)丙烯酸酯的共聚物 的樹脂、N-環己基馬來亞醯胺/環氧丙基( 酯的共聚物中反應巴豆酸的樹脂、二環戊基 酸酯/苯甲基(甲基)丙烯酸酯/環氧丙基( 酯的共聚物中反應巴豆酸的樹脂、二環戊基 酸酯/環己基(甲基)丙烯酸酯/環氧丙基( 酯的共聚物中反應巴豆酸的樹脂、二環戊基 酸酯/苯乙烯/環氧丙基(甲基)丙烯酸酯的 巴豆酸的樹脂、二環戊基(甲基)丙烯酸酯 環氧丙基(甲基)丙烯酸酯的共聚物中反應 基)丙烯酸酯 環戊基(甲基 酸酯的共聚物 (甲基)丙烯 )丙烯酸酯的 戊基(甲基) 甲基)丙烯酸 (甲基)丙烯 (甲基)丙烯 中反應巴豆酸 基(甲基)丙 烯/環氧丙基 樹脂、巴豆酸 中反應巴豆酸 甲基)丙烯酸 (甲基)丙烯 甲’基)丙烯酸 (甲基)丙烯 甲基)丙烯酸 (甲基)丙烯 共聚物中反應 /巴豆酸甲基/ 巴豆酸的樹脂 -33- 201232174 、二環戊基(甲基)丙烯酸酯/N_環己基馬來亞醯胺/環氧 丙基(甲基)丙烯酸酯的共聚物中反應巴豆酸的樹脂; 二環戊基(甲基)丙烯酸酯/環氧丙基(甲基)丙烯 酸酯的共聚物中反應馬來酸的樹脂、苯甲基(甲基)丙烯 酸酯/環氧丙基(甲基)丙烯酸酯的共聚物中反應馬來酸 的樹脂、環己基(甲基)丙烯酸酯/環氧丙基(甲基)丙 烯酸酯的共聚物中反應馬來酸的樹脂、苯乙烯/環氧丙基 (甲基)丙烯酸酯的共聚物中反應馬來酸的樹脂、馬來酸 甲基/環氧丙基(甲基)丙烯酸酯的共聚物中反應馬來酸 的樹脂' N-環己基馬來亞醯胺/環氧丙基(甲基)丙烯酸 酯的共聚物中反應馬來酸的樹脂 '二環戊基(甲基)丙烯 酸酯/苯甲基(甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸 酯的共聚物中反應馬來酸的樹脂、二環戊基(甲基)丙烯 酸酯/環己基(甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸 酯的共聚物中反應馬來酸的樹脂、二環戊基(甲基)丙烯 酸酯/苯乙烯/環氧丙基(甲基)丙烯酸酯的共聚物中反應 馬來酸的樹脂、二環戊基(甲基)丙烯酸酯/馬來酸甲基/ 環氧丙基(甲基)丙烯酸酯的共聚物中反應馬來酸的樹脂 二環戊基(甲基)丙烯酸酯/N_環己基馬來亞醯胺/環氧 丙基(甲基)丙烯酸酯的共聚物中反應馬來酸的樹脂; 一環戊基(甲基)丙烯酸酯/環氧丙基(甲基)丙稀 酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的樹脂、 苯甲基(甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸酯的 共聚物中反應(甲基)丙烯酸及馬來酸酐的樹脂、環己基 -34- 201232174 (甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸酯的共聚物 中反應(甲基)丙烯酸及馬來酸酐的樹脂、苯乙嫌/環氧 丙基(甲基)丙烯酸酯的共聚物中反應(甲基)丙烯酸及 馬來酸酐的樹脂、(甲基)丙烯酸甲基/環氧丙基(甲基 )丙烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的 樹脂、(N-環己基馬來亞醯胺/環氧丙基(甲基)丙烯酸 酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的樹脂、二 環戊基(甲基)丙烯酸酯/苯甲基(甲基)丙烯酸酯/環氧 丙基(甲基)丙烯酸酯的共聚物中反應(甲基)丙烯酸及 馬來酸酐的樹脂、二環戊基(甲基)丙烯酸酯/環己基( 甲基)丙烯酸酯/環氧丙基(甲基)丙烯酸酯的共聚物中 反應(甲基)丙烯酸及馬來酸酐的樹脂、二環戊基(甲基 )丙烯酸酯/苯乙烯/環氧丙基(甲基)丙烯酸酯的共聚物 中反應(甲基)丙烯酸及馬來酸酐的樹脂、二環戊基(甲 基)丙烯酸酯/ (甲基)丙烯酸甲基/環氧丙基(甲基)丙 烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的樹脂 、二環戊基(甲基)丙烯酸酯/N-環己基馬來亞醯胺/環氧 丙基(甲基)丙烯酸酯的共聚物中反應(甲基)丙烯酸及 馬來酸酐的樹脂; 二環戊基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應(甲基)丙烯酸的樹脂、苯甲 基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯 的共聚物中反應(甲基)丙烯酸的樹脂、環己基(甲基) 丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中 -35- 201232174 反應(甲基)丙烯酸的樹脂、苯乙烯/ 3,4 -環氧基環己基甲 基甲基丙烯酸酯的共聚物中反應(甲基)丙烯酸的樹脂、 (甲基)丙烯酸甲基/3,4-環氧基環己基甲基甲基丙烯酸酯 的共聚物中反應(甲基)丙烯酸的樹脂、N-環己基馬來亞 醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中反應 (甲基)丙烯酸的樹脂、二環戊基(甲基)丙烯酸酯/苯 甲基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸 酯的共聚物中反應(甲基)丙烯酸的樹脂、二環戊基(甲 基)丙烯酸酯/環己基(甲基)丙烯酸酯/ 3,4-環氧基環己 基甲基甲基丙烯酸酯的共聚物中反應(甲基)丙烯酸的樹 脂、二環戊基(甲基)丙烯酸酯/苯乙烯/3,4-環氧基環己 基甲基甲基丙烯酸酯的共聚物中反應(甲基)丙烯酸的樹 脂、二環戊基(甲基)丙烯酸酯/ (甲基)丙烯酸甲基 /3,4 -環氧基環己基甲基甲基丙烯酸酯的共聚物中反應(甲 基)丙烯酸的樹脂、二環戊基(甲基)丙烯酸酯/N-環己 基馬來亞醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚 物中反應(甲基)丙烯酸的樹脂: 二環戊基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應巴豆酸的樹脂、苯甲基(甲基 )丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物 中反應巴豆酸的樹脂、環己基(甲基)丙烯酸酯/3,4-環氧 基環己基甲基甲基丙烯酸酯的共聚物中反應巴豆酸的樹脂 、苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中 反應巴豆酸的樹脂、巴豆酸甲基/3,4-環氧基環己基甲基甲 -36- 201232174 基丙烯酸酯的共聚物中反應巴豆酸的樹脂、N -環己基馬來 亞醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中反 應巴豆酸的樹脂、二環戊基(甲基)丙烯酸酯/苯甲基( 甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共 聚物中反應巴豆酸的樹脂、二環戊基(甲基)丙烯酸酯/ 環己基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯 酸酯的共聚物中反應巴豆酸的樹脂、二環戊基(甲基)丙 烯酸酯/苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的共 聚物中反應巴豆酸的樹脂、二環戊基(甲基)丙烯酸酯/ 巴豆酸甲基/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物 中反應巴豆酸的樹脂、二環戊基(甲基)丙烯酸酯/N-環 己基馬來亞醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共 聚物中反應巴豆酸的樹脂; 二環戊基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應馬來酸的樹脂、苯甲基(甲基 )丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物 中反應馬來酸的樹脂、環己基(甲基)丙烯酸酯/3,4-環氧 基環己基甲基甲基丙烯酸酯的共聚物中反應馬來酸的樹脂 、苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中 反應馬來酸的樹脂、馬來酸甲基/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應馬來酸的樹脂、N-環己基馬來 亞醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中反 應馬來酸的樹脂 '二環戊基(甲基)丙烯酸酯/苯甲基( 甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共 -37- 201232174 聚物中反應馬來酸的樹脂、二環戊基(甲基)丙烯酸酯/ 環己基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲基丙烯 酸酯的共聚物中反應馬來酸的樹脂、二環戊基(甲基)丙 烯酸酯/苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的共 聚物中反應馬來酸的樹脂、二環戊基(甲基)丙烯酸酯/ 馬來酸甲基/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物 中反應馬來酸的樹脂、二環戊基(甲基)丙烯酸酯/N-環 己基馬來亞醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共 聚物中反應馬來酸的樹脂; 二環戊基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的 樹脂、苯甲基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的 樹脂、環己基(甲基)丙烯酸酯/3,4-環氧基環己基甲基甲 基丙烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐的 樹脂、苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚 物中反應(甲基)丙烯酸及馬來酸酐的樹脂、(甲基)丙 烯酸甲酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中 反應(甲基)丙烯酸及馬來酸酐的樹脂、N-環己基馬來亞 醯胺/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中反應 (甲基)丙烯酸及馬來酸酐的樹脂、二環戊基(甲基)丙 烯酸酯/苯甲基(甲基)丙烯酸酯/3,4-環氧基環己基甲基 甲基丙烯酸酯的共聚物中反應(甲基)丙烯酸及馬來酸酐 的樹脂、二環戊基(甲基)丙烯酸酯/環己基(甲基)丙 -38- 201232174 烯酸酯/3,4-環氧基環己基甲基甲基丙烯酸酯的共聚物中反 應(甲基)丙烯酸及馬來酸酐的樹脂、二環戊基(甲基) 丙烯酸酯/苯乙烯/3,4-環氧基環己基甲基甲基丙烯酸酯的 共聚物中反應(甲基)丙烯酸及馬來酸酐的樹脂、二環戊 基(甲基)丙烯酸酯/ (甲基)丙烯酸甲酯/3,4-環氧基環 己基甲基甲基丙烯酸酯的共聚物中反應(甲基)丙烯酸及 馬來酸酐的樹脂、二環戊基(甲基)丙烯酸酯/N·環己基 馬來亞醯胺/3,4_環氧基環己基甲基甲基丙烯酸酯的共聚物 中反應(甲基)丙烯酸及馬來酸酐的樹脂等。 樹脂(B2)的聚苯乙烯換算之重量平均分子量(Mw )較佳爲 3,000〜100,000,更佳爲 5,000〜50,000。樹脂 (B2)的重量平均分子量若在前述範圍時,塗佈性有變良 好之傾向,又顯像時難以產生減膜現象,且顯像時非畫素 部分的脫去性有著良好之傾向。 樹脂(B2)的分子量分佈〔重量平均分子量(Mw) / 數平均分子量(Μη)〕較佳爲1.5〜6.0,更佳爲1.8〜4.0 。樹脂(Β2)的分子量分佈若在前述範圍時,有著顯像性 優良之傾向。 樹脂(Β2)的酸價爲20〜150mg-KOH/g,較佳爲50 〜135mg-KOH/g,更佳爲65〜135mg-KOH/g。酸價爲欲中 和樹脂(B2 ) 1 g時氫氧化鉀的必要量(mg )所測定之値 ,可使用氫氧化鉀水溶液進行滴定而求得。 樹脂(B 2 )的含有量對於樹脂(B 1 )及樹脂(B2 ) 的合計量而言,較佳爲5〜90質量%,更佳爲15〜90質量The compound of the formula (I) and the compound of the formula (II) can each be used singly. Also, these can be mixed at any ratio. When mixing, when the mixing ratio is expressed by molar ratio, it is preferably Formula (I): Formula (II) is 5: 95 to 95: 5, preferably 10: 90 to 90: 10, more preferably 20: 80 to 80: 20 〇 As (b-2), a monomer having an oxycyclobutane group and a (meth) acrylonitrile-16-201232174 oxy group is preferred. Examples of (b-2) include 3-methyl-3-(methyl)propenyloxymethyloxycyclobutane and 3-ethyl-3-(methyl)propenyloxymethyl group. Oxycyclobutane, 3-methyl-3-(methyl)propenyloxyethyloxycyclobutane and 3-ethyl-3-(methyl)propenyloxyethyloxetane as (b-3), a monomer having a tetrahydrofuranyl group and a (meth)acrylenyloxy group is preferred. Specific examples of (b-3) include tetrahydrofurfuryl acrylate (e.g., Biskot V#150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofurfuryl methacrylate, and the like. Examples of (c) include methyl (meth) acrylate, ethyl (meth) acrylate, η-butyl (meth) acrylate, and second butyl (meth) acrylate. (meth)acrylic acid alkyl esters such as tributyl (meth) acrylate; cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo [5. 2. 1.  〇2,6]decane-8-yl(meth)acrylate (in the technical field, as a customary name is dicyclopentyl (meth) acrylate), dicyclopentyloxyethyl (methyl) (meth)acrylic acid cyclic alkyl esters such as acrylate and isodecyl (meth) acrylate; (meth) acrylate such as phenyl (meth) acrylate or benzyl (meth) acrylate Or arylalkyl esters; dicarboxylic acid diesters such as diethyl maleate, diethyl fumarate, diethyl itaconate; 2-hydroxyethyl (meth) acrylate, 2-hydroxyl Hydroxyalkyl esters such as propyl (meth) acrylate; -17- 201232174 联环 [2. 2. 1] Hept-2-ene, 5-methyl linked ring [2. 2. 1] Hept-2-ene, 5-ethylbicyclo[2. 2. 1] Hept-2-ene, 5-hydroxybicyclo[2. 2. 1] Hept-2-ene, 5-hydroxymethyl linked ring [2. 2. 1] Hept-2-ene, 5-(2,-hydroxyethyl)-linked ring [2. 2. 1] Hept-2-ene, 5-methoxy-linked ring [2. 2. 1] Hept-2-ene, 5-ethoxyl linkage [2. 2. 1] Hept-2-ene, 5,6-dihydroxybicyclo[2. 2. 1] Hept-2-ene, 5,6-di(hydroxymethyl)-linked ring [2. 2. 1] Hept-2-ene, 5,6-di(2,-hydroxyethyl) linked ring [2. 2. 1] Hept-2-ene, 5,6-dimethoxy linked ring [2. 2. 1] Hept-2-ene, 5,6-diethoxybicyclo [2. 2. 1] Hept-2-ene, 5-hydroxy-5-methyl linked ring [2. 2. 1] Geng-2_ene, 5-hydroxy-5-ethylbicyclo[2. 2. 1] Hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2. 2. 1] G-8-ene, 5-tributoxycarbonyl linkage _ [2. 2. 1] Hept-2-ene, 5-cyclohexyloxycarbonyl linked ring [2. 2. 1] Hept-2-ene, 5-phenoxycarbonyl ring [2. 2. 1] Hept-2-ene, 5,6-bis(t-butoxycarbonyl)-linked ring [2. 2. 1] Hept-2-ene, 5,6-bis(cyclohexyloxycarbonyl) linked ring [2. 2. 1] Heterocyclic unsaturated compounds such as hept-2-ene; N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-amber Imine-3-maleimide benzoate, N-succinimide-4-maleimide butyrate, N-succinimide-6-maleimide caproate a derivative of dicarbonylimine such as N-succinimide-3-maleimide propionate or N-(9-acridinyl)maleimide; styrene, α-methylbenzene Ethylene, m-methylstyrene, p-methylstyrene, vinyl toluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, ethylene chloride, vinylidene chloride, acrylamide, methyl Acrylamide, vinyl acetate, 1,3-butadiene, isoprene and 2,3-dimethyl-1,3-butadiene-18-201232174, and the like. Among them, styrene, N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, hydrazine [2. 2. 1] Hept-2-ene or the like is preferred from the viewpoints of copolymerization reactivity and alkali solubility. In the resin (B1-1), the ratio of the structural unit derived from each monomer to the total number of structural units constituting the resin (B1-1) is preferably in the following range. Structural unit from (a); 5 to 6 〇 mol% (more preferably 1 〇 to 5 〇 mol%) Structural unit from (b); 40 to 95 mol% (more preferably 50 to 9 0 When the ratio of the structural unit of the resin (B 1 -1 ) is within the above range, storage stability, developing property, solvent resistance, heat resistance, and mechanical strength tend to be good. The resin (B 1 -1 ) is preferably a resin of (b) (b-1), and more preferably (b-1) is a resin of (b-1 2 ). The resin (B1-1) can be referred to, for example, the method described in the "Experimental Method for Polymer Synthesis" (Otsuka Ryokan, Institute of Chemicals, 1st Edition, 1st Brush, March 1, 1972) and the literature. Manufactured from the cited references. Specifically, a method in which the quantitative amount, polymerization initiator, solvent, and the like of (a) and (b) are charged into a reaction vessel, deoxidized by replacing nitrogen with oxygen, and stirred, heated, and kept warm is exemplified. Further, the polymerization initiator, solvent and the like used therein are not particularly limited, and any of those generally used in the field of -19-201232174 can be used. Examples of the polymerization initiator include an azo compound (2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), etc.) and organic The oxide (such as benzhydryl peroxide) may be used as a solvent to dissolve the monomer. The solvent to be used as the coloring photosensitive resin composition may be a solvent or the like described later. Further, the obtained copolymer may be used as it is, or a concentrated or diluted solution may be used, or may be taken out as a solid (powder) by reprecipitation or the like. In particular, when a solvent similar to the solvent (E) described below is used as the solvent in the polymerization, the reaction solution can be directly used, and the production step can be simplified. In the resin (B1-2), the ratio of the structural unit derived from each monomer is preferably in the range of the total number of moles of the total structural unit constituting the resin (B1-2). Structural unit from (a); 2 to 40 mol% (more preferably 5 to 35 mol%) from (b) structural unit; 2 to 95 mol% (more preferably 5 to 80 mol%) The structural unit derived from (c); 1 to 65 mol% (more preferably i~60 mol%). If the ratio of the structural unit of the resin (B 1 - 2 ) is within the above range, it has preservation stability and Image, solvent resistance, heat resistance and mechanical strength tend to be good. The resin (B 1 - 2 ) is preferably a resin of (b) (b -1 ), and the resin (b) is (b-12). -20- 201232174 The resin (B1-2) can be produced in the same manner as the resin (B1-1). The polystyrene-equivalent weight average molecular weight (Mw) of the resin (B1) is preferably from 3,000 to 100,0 Torr, more preferably from 5,000 to 50,000. When the weight average molecular weight of the resin (B1) is in the above range, the coating property tends to be good, and the film-reducing phenomenon is unlikely to occur at the time of development, and the non-pixel portion is excellent in the release property at the time of development. tendency. The molecular weight distribution (weight average molecular weight (Mw) / number average molecular weight (?η)) of the resin (B1) is preferably 1. 5~6. 0, more preferably 1. 8~4. 0. When the molecular weight distribution of the resin (Β1) is within the above range, the image forming property tends to be excellent. The acid value of the resin (Β1) is from 20 to 150 mg-KOH/g, preferably from 30 to 135 mg-KOH/g, more preferably from 40 to 125 mg-KOH/g. The oxime measured as a necessary amount (mg) of potassium hydroxide when the acid value is 1 g of the neutralizing resin (B 1 ) can be determined by titration with an aqueous potassium hydroxide solution. The content of the resin (B1) is preferably from 10 to 95% by mass, more preferably from 10 to 85% by mass, based on the total amount of the resin (B1) and the resin (B2), particularly preferably from 10 to 80% by mass. . When the content of the resin (B 1 ) is within the above range, the developing property, the adhesion, the solvent resistance, and the mechanical properties tend to be good. The resin (B) contained in the colored photosensitive resin composition of the present invention further contains a resin (B2). The resin (B2) may be a resin having an ethylenically unsaturated bond in a side chain, and a copolymer obtained by copolymerizing (a) and (c) may be further reacted with (b) to obtain a resin (B2-l) or The copolymer obtained by copolymerizing (b) and (c) is further reacted with (a) to obtain a resin (B2-2) of 21 - 201232174, and the like. Among them, the resin (B2) is preferably a resin (B2-1). (a), (b), and (c) of the constituting resin (B2) are the same as those of the above-mentioned resin (B1), but (c) specifically has a skeleton selected from a tricyclodecane skeleton and At least the group formed by the tricyclic terpene skeleton! A compound (c 1 ) having a skeleton and an ethylenically unsaturated bond (hereinafter sometimes referred to as "(cl)") is preferred. (c) When (cl), it is possible to suppress the pattern-reduction film β by development. The so-called "three-ring brothel skeleton" and "three-ring scorpion skeleton" in the present specification are each of the following structures (each arbitrary carbon atom) To have a binding bond). 〇〇0〇 tricyclodecane skeleton tricyclic terpene skeleton as (cl), specifically dicyclopentyl (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentyloxy Ethyl ethyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate. These may be used alone or in combination of two or more. The resin (B2-1) and the resin (B2-2) can be produced, for example, by a two-stage step. In this case, please refer to the above-mentioned document "Experimental method for polymer synthesis" (the method described in the issue of the 1st edition of the 1st edition of the Otsuka Ryokan, Ltd.). Manufactured by the method described in Japanese Laid-Open Patent Publication No. Hei No. 89-533533. The resin (B 2 -1 ) is obtained as a first step, and a copolymer of (a) and (c) is obtained in the same manner as in the production method of the above resin (B 1 - 1 ). In this case, as in the above, the obtained copolymer may be directly used as a solution after the reaction, -22 to 201232174, or may be taken out as a solid (powder) by reprecipitation or the like using a concentrated or diluted solution. The ratio of (a) and the structural unit derived from (c) is preferably in the range of the total number of moles constituting the entire structural unit of the above-mentioned copolymer. Structural unit from (a); 5 to 5 0 mol% (more preferably 1 〇 ~ 4 5 mol %) Structural unit from (c); 50 to 95 mol% (more preferably 55 to 9 0 Mohr %) Next, as a second stage, a part of the carboxylic acid and the carboxylic anhydride of (a) from the obtained copolymer is reacted with the cyclic ether of (b). Since the cyclic ether has high reactivity and does not easily remain unreacted (b), it is preferable that (b) is (b-Ι), and (b-1 1 ) is more preferable. Specifically, in order to continue the above, the environment inside the beaker is replaced by nitrogen, and the reaction catalyst for the (15) molar number of (a) is 5 to 80 mol%, and the carboxyl group and the cyclic ether are reacted (for example, Methylaminomethyl phenol) is a total of 0 for (a), (b) and (c). 001 to 5 mass%, and the total amount of the polymerization inhibitor (for example, hydroquinone) for (a), (b), and (c) is 0. 001 to 5 mass% were placed in a beaker, and the reaction was carried out at 60 to 130 ° C for 1 to 1 hour, to obtain a resin (B 2 -1 ). Further, in the same manner as in the polymerization conditions, the charging method or the reaction temperature can be appropriately adjusted in consideration of the heat generation amount due to the production equipment or the polymerization. Further, the number of moles in the case (b) at this time is preferably from 10 to 7 mol%, more preferably from 5 to 7 mol%, to the number of moles of (a). When the number of motes of (b) is in this range, the balance between stability, solvent resistance and heat resistance is maintained. -23- 201232174 tends to be good. As a specific example of the resin (B2-1), a copolymer of (meth)acrylic acid/dicyclopentyl (meth)acrylate is reacted with a resin of a glycidyl (meth)acrylate, and (meth)acrylic acid / Benzyl (meth) acrylate copolymer in the reaction of epoxy propyl (meth) acrylate resin, (meth) acrylate / cyclohexyl (meth) acrylate copolymer in the reaction of propylene (meth)acrylate resin, (meth)acrylic acid/styrene copolymer in the reaction of epoxy propyl (meth) acrylate resin, (meth)acrylic acid / (meth)acrylic acid methyl group a resin for reacting a glycidyl (meth) acrylate in a copolymer of a copolymer of a reactive propylene group (meth) acrylate, a copolymer of (meth)acrylic acid/N-cyclohexylmaleimide; a resin reactive with epoxypropyl (meth) acrylate in a copolymer of crotonic acid/dicyclopentyl (meth) acrylate; a reactive epoxy in a copolymer of crotonic acid/benzyl (meth) acrylate Propyl (meth) acrylate resin, crotonic acid / cyclohexyl (Resin for reacting epoxy propyl (meth) acrylate in a copolymer of (meth) acrylate, a resin reactive with epoxy propyl (meth) acrylate in a copolymer of crotonic acid / styrene, crotonic acid / Reaction of epoxypropyl (meth) acrylate in a copolymer of reactive propyl propyl (meth) acrylate and a copolymer of crotonic acid / N-cyclohexyl maleimide in a copolymer of crotonic acid methyl Resin ♦ copolymer of maleic acid/dicyclopentyl (meth) acrylate copolymer of epoxy propyl (meth) acrylate, copolymer of maleic acid / benzyl (meth) acrylate Reaction of epoxy propyl (meth) acrylate-24- 201232174 resin, copolymer of maleic acid/cyclohexyl (meth) acrylate, reaction of epoxy propyl (meth) acrylate resin, horse a resin for reacting a glycidyl (meth) acrylate in a copolymer of a reactive propylene group (meth) acrylate and a copolymer of maleic acid / methyl maleate in a copolymer of acid/styrene; Reaction of epoxy propylene in copolymer of maleic acid/N-cyclohexylmaleimide (meth)acrylate resin; (meth)acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate copolymer in the reaction of epoxy propyl (meth) acrylate resin, (methyl) Resin reactive propyl (meth) acrylate resin, (meth) acrylate / maleic anhydride / cyclohexyl (meth) acrylate in a copolymer of acrylic acid / maleic anhydride / benzyl (meth) acrylate a resin for reacting a glycidyl (meth) acrylate in a copolymer of an ester, and a resin reactive with a propylene propyl (meth) acrylate in a copolymer of (meth)acrylic acid/maleic anhydride/styrene; (meth)acrylic acid/maleic anhydride/N-cyclohexylmalay reacted with a copolymer of methyl methacrylate/maleic anhydride/methyl (meth) acrylate in a copolymer of epoxy propyl (meth) acrylate a resin reactive with epoxypropyl (meth) acrylate in a copolymer of decylamine; a 3,4-epoxy ring in a copolymer of (meth)acrylic acid/dicyclopentyl (meth) acrylate Hexylmethyl methacrylate resin, (meth)acrylic acid / benzyl group In the copolymer of (meth) acrylate, the reaction of 3,4-epoxycyclohexylmethyl methacrylate resin and (meth)acrylic acid/cyclohexyl (meth) acrylate copolymer 3, Resin of 4-epoxycyclohexylmethyl methacrylate resin and (meth)acrylic acid/styrene copolymer 3,4-epoxycyclohexylmethyl methacrylate-25-201232174 a resin of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of (meth)acrylic acid / methyl methacrylate, (meth)acrylic acid / N-cyclohexylmala Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of decylamine; 3,4-epoxy group in a copolymer of crotonic acid/dicyclopentyl (meth) acrylate a resin for reacting 3,4-epoxycyclohexylmethyl methacrylate with a resin of cyclohexylmethyl methacrylate or a copolymer of crotonic acid/benzyl (meth) acrylate, crotonic acid/ring a tree for reacting 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of hexyl (meth) acrylate 3,4-epoxycyclohexyl group in a copolymer of crotonic acid/styrene in a copolymer of 3,4-epoxycyclohexylmethyl methacrylate and a copolymer of crotonic acid/methyl crotonate a resin for reacting 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of methyl methacrylate or a copolymer of crotonic acid/N-cyclohexylmaleimide; maleic acid/bicyclic ring Reaction of a copolymer of pentyl (meth) acrylate in a copolymer of 3,4 _epoxycyclohexylmethyl methacrylate and a copolymer of maleic acid/benzyl (meth) acrylate 3 , a copolymer of 4-epoxycyclohexylmethyl methacrylate, a copolymer of maleic acid/cyclohexyl (meth) acrylate, reacted with 3,4-epoxycyclohexylmethyl methacrylate 3,4-ring reaction in a copolymer of resin, maleic acid/styrene in a resin of 3,4-epoxycyclohexylmethyl methacrylate and a copolymer of maleic acid/maleic acid methyl Reaction of 3,4-epoxycyclohexylmethyl group in a copolymer of oxycyclohexylmethyl methacrylate and a copolymer of maleic acid/N-cyclohexylmaleimide Acrylate resin; -26- 201232174 Reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth) acrylate a resin for reacting 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of (meth)acrylic acid/maleic anhydride/benzyl (methyl)propionate, (methyl) Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of acrylic acid/maleic anhydride/cyclohexyl (meth) acrylate, (meth)acrylic acid/maleic anhydride/styrene a copolymer of 3,4-epoxycyclohexylmethyl methacrylate, a copolymer of (meth)acrylic acid/maleic anhydride/methyl (meth)acrylic acid in a copolymer, 3,4-ring 3,4-Epoxycyclohexylmethylmethyl group in a copolymer of oxycyclohexylmethyl methacrylate and a copolymer of (meth)acrylic acid/maleic anhydride/N-cyclohexylmaleimide Acrylate resin, etc. As the resin (B2-1), in the copolymer obtained by (c) other than (a), (cl) and (cl), the resin obtained in the reaction (b) is preferred. When the resin (B2-1) is in the above-described configuration, the resulting pattern and the substrate have a tendency to be excellent in adhesion and solvent resistance. (a) The copolymer of (c) is composed of (c) other than (a), (cl) and (cl), and the structure derived from (c) other than (c 1 ) and (c 1 ) The ratio of units is preferably 1 0 : 9 0 to 6 0 : 4 0 , preferably 1 0 : 9 0 to 40: 60, and 10: 90 to 30: 70 is better. The resin obtained by the reaction (b) in the copolymer obtained by copolymerizing (c) other than (a), (cl) and (cl), specifically (meth)acrylic acid / dicyclopentyl (A) Resin for the reaction of epoxypropyl (meth) acrylate in a copolymer of acrylate/benzyl (meth) acrylate -27- 201232174 , (meth)acrylic acid / dicyclopentyl (methyl) Reaction of epoxy propyl (molecular resin, (meth)acrylic acid / dicyclopentyl (reactive epoxypropyl (meth) propyl in copolymer of methyl styrene) Reaction of epoxy (meth) acrylate, (meth) acrylate / dicyclopentyl (methyl) acrylate in a copolymer of (meth)acrylic acid / dicyclopentyl (meth) acrylate methacrylate , a copolymer of hexylmalamine decylamine in the reaction of epoxy propyl (methyl ester resin; crotonic acid / dicyclopentyl (meth) acrylate / benzo acrylate copolymer in the reaction of epoxy propyl ( a copolymer of methyl) propyl ester, crotonic acid/dicyclopentyl (meth) acrylate/cyclohexyl acrylate Epoxypropyl (meth) propyl ester, crotonic acid / dicyclopentyl (meth) acrylate / phenyl ethyl epoxide reactive propyl propyl (meth) acrylate resin, [ pentyl (methyl) Acrylate/crotonic acid methyl copolymer propyl (meth) acrylate resin, crotonic acid / bicyclo) acrylate / N-cyclohexyl maleimide copolymer medium (meth) acrylate Resin; maleic acid / dicyclopentyl (meth) acrylate / benzo acrylate copolymer in the reaction of epoxy propyl (methyl) propyl ester 'maleic acid / dicyclopentyl (methyl) Reaction of epoxy acrylate (meth) propyl ester, maleic acid / dicyclopentyl (meth) acrylate / phenethyl ester / cyclohexyl (meth) acrylate in the copolymer of acrylate / cyclohexyl acrylate Acrylate / acrylate ester resin vinegar / (meth) acrylate diester / oxime - ring) acrylate (meth) enoate tree (meth) enoate copolymerization of alkene Compound 3 in the stucic acid/bicyclic reaction of epoxypentyl (methyl-reactive epoxypropyl (meth) enoate tree (meth) enoate tree Epene copolymer -28- 201232174 Reactive epoxy propylene (meth) acrylate resin, maleic acid / dicyclopentyl (meth) acrylate / maleic acid methyl copolymer copolymer epoxy Reaction of epoxypropyl (meth) acrylate in a copolymer of propyl (meth) acrylate, copolymer of maleic acid / dicyclopentyl (meth) acrylate / N-cyclohexylmaleimide Resin; (meth)acrylic acid / maleic anhydride / dicyclopentyl (meth) acrylate / benzyl (meth) acrylate copolymer in the reaction of epoxy propyl (meth) acrylate resin a resin for reacting epoxypropyl (meth) acrylate in a copolymer of (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth) acrylate/cyclohexyl (meth) acrylate, (a) (meth)acrylic acid/maleic anhydride/dimer in the copolymer of acrylic acid/maleic anhydride/dicyclopentyl (meth)acrylate/styrene in the copolymer of epoxypropyl (meth)acrylate Reaction of epoxy propyl group in a copolymer of cyclopentyl (meth) acrylate / methyl (meth) acrylate Reaction of a methyl acrylate resin, a copolymer of (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth) acrylate/N-cyclohexylmaleimide, a glycidyl group (methyl group) Acrylate resin; 3,4-epoxycyclohexylmethylmethyl group in a copolymer of (meth)acrylic acid/dicyclopentyl (meth) acrylate/benzyl (meth) acrylate Reaction of 3,4-epoxycyclohexylmethyl methacrylate in an acrylate resin, a copolymer of (meth)acrylic acid/dicyclopentyl (meth) acrylate/cyclohexyl (meth) acrylate Resin, (meth)acrylic acid / dicyclopentyl (meth) acrylate / styrene copolymer in the reaction of 3,4-epoxycyclohexylmethyl methacrylate resin, (meth) propyl -29- 201232174 Resin for the reaction of 夂4-epoxycyclohexylmethyl methacrylate in a copolymer of enoic acid/dicyclopentyl (meth) acrylate / methyl (meth) acrylate, (methyl Reaction of 3,4-ring in a copolymer of acrylic acid/dicyclopentyl, (meth) acrylate/N-cyclohexylmaleimide Resin of cyclohexylmethyl methacrylate; reaction of crotonic acid/dicyclopentyl (meth) acrylate/benzyl (meth) acrylate in 3,4-epoxycyclohexyl Reaction of 3,4-epoxycyclohexylmethyl methacrylate in a methacrylate resin, a copolymer of crotonic acid/dicyclopentyl (meth) acrylate/cyclohexyl (meth) acrylate Resin, a copolymer of crotonic acid/dicyclopentyl (meth) acrylate/styrene, a resin for reacting 3,4-epoxycyclohexylmethyl methacrylate, crotonic acid/dicyclopentyl ( Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of methyl acrylate/crotonate methyl, crotonic acid/dicyclopentyl (meth) acrylate/N-ring Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of hexylmalamine amide; maleic acid/dicyclopentyl (meth) acrylate/benzyl (methyl) Resin for the reaction of 3,4·epoxycyclohexylmethyl methacrylate in an acrylate copolymer, maleic acid/dicyclopentyl (A) a resin for reacting 3,4-epoxycyclohexylmethylmethyl citrate in a copolymer of acrylate/cyclohexyl (meth) acrylate, maleic acid/dicyclopentyl (methyl) propyl Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in copolymer of acrylate/styrene, maleic acid/dicyclopentyl (meth) acrylate/methyl maleate Resin 3,4-epoxycyclohexylmethyl methacrylate-30- 201232174 ester resin, maleic acid / dicyclopentyl (meth) acrylate / N-cyclohexylmalay yttrium Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of amine; (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth) acrylate/benzyl (a) Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of acrylate, (meth)acrylic acid/maleic anhydride/dicyclopentyl (meth) acrylate/cyclohexyl Resin (meth)acrylic acid/maleic anhydride/dicyclopentane which reacts 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of (meth) acrylate Resin for the reaction of 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of methacrylate/styrene, (meth)acrylic acid/maleic anhydride/dicyclopentyl (methyl) a resin for reacting 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of acrylate / methyl (meth) acrylate, (meth)acrylic acid / maleic anhydride / dicyclopentyl (A) A resin of 3,4-epoxycyclohexylmethyl methacrylate or the like is reacted in a copolymer of acrylate/N-cyclohexylmaleimide. The resin (B2-2) is obtained as a first stage, and a copolymer of (b) and (c) is obtained in the same manner as in the production method of the above resin (B1-1). At this time, as in the above, the obtained copolymer may be used as it is as a solid (powder) by directly using the solution after the reaction, or by using a concentrated or diluted solution by reprecipitation or the like. The ratio of (b) and the structural unit derived from (c) is preferably in the following range for the total number of moles constituting the entire structural unit of the above copolymer. Structural unit from (b); 5 to 95 mol% (more preferably 1〇~90 -31 - 201232174 mol%) Structural unit from (c); 5~9 5 mol% (better 1 In the same manner as in the production method of the resin (Β2-1), the cyclic ether of (b) from the copolymer of (b) and (c) has a reaction (a). The carboxylic acid or carboxylic anhydride obtained. The hydroxyl group produced by the reaction of a cyclic ether with a carboxylic acid or a carboxylic acid anhydride can be further reacted with a carboxylic acid anhydride. The amount of (a) used for the reaction of the copolymer described above is preferably from 5 to 80 mol% based on the number of moles of (b). The cyclic ether has high reactivity, and the unreacted (b) is hard to remain. Therefore, (b) is preferably (b-1), more preferably (b-11). Specific examples of the resin (B2-2) include a resin (meth)acrylic acid in which a copolymer of dicyclopentyl (meth)acrylate/epoxypropyl (meth)acrylate is reacted, and benzoic acid. Reactive (meth)acrylic resin, cyclohexyl (meth) acrylate / epoxy propyl (meth) acrylate in a copolymer of a base (meth) acrylate / epoxy propyl (meth) acrylate a copolymer of (meth)acrylic acid, a copolymer of styrene/epoxypropyl (meth)acrylate in a copolymer of (meth)acrylic acid, (meth)acrylic acid methyl/epoxypropyl Reaction of (meth)acrylic acid in a copolymer of (meth)acrylic acid, copolymer of N-cyclohexylmaleimide/epoxypropyl (meth)acrylate in a copolymer of a (meth) acrylate Resin, dicyclopentyl (meth) acrylate / benzyl (meth) acrylate / epoxy propyl (meth) acrylate copolymer (meth) acrylic resin, dicyclopentane (meth)acrylic acid-32- 201232174 ester / cyclohexyl (methyl) propyl Acid ester/epoxypropyl group (resin for reacting (meth)acrylic acid in copolymer of methyl, b) resin for reacting (meth)acrylic acid in acrylate/styrene/epoxypropyl (meth) propylene, ( Dicyclopentyl. Acid ester / methyl (meth)acrylate / epoxy propyl (reactive (meth)acrylic resin in methyl copolymer, bicycloacrylate / N_cyclohexylmaleimide / epoxy propyl ( a resin for reacting (meth)acrylic acid in an ester copolymer; a resin for reacting crotonic acid in a copolymer of dicyclopentyl (meth) acrylate/epoxypropyl acrylate, benzyl ester/epoxy propyl Reaction of croton in a copolymer of a copolymer of a (meth) acrylate, a copolymer of a cyclohexyl (meth) acrylate/epoxy acrylate in a copolymer of a crotonic acid, and a copolymer of a benzene Z (meth) acrylate Resin of copolymer of acid methyl/epoxypropyl (meth) acrylate, N-cyclohexylmaleimide/epoxypropyl (resin for the reaction of crotonic acid in the copolymer of ester, dicyclopentane Acid ester / benzyl (meth) acrylate / epoxy propyl (resin for the reaction of crotonic acid in the copolymer of ester, dicyclopentyrate / cyclohexyl (meth) acrylate / epoxy propyl (Resin for the reaction of crotonic acid in a copolymer of ester, dicyclopentyl acrylate/styrene/epoxypropyl (methyl) Resin of acrylated crotonic acid resin, copolymer of dicyclopentyl (meth) acrylate epoxypropyl (meth) acrylate) acrylate cyclopentyl (copolymer of methyl ester (A Reaction of crotonyl (meth) meth) methacrylate (meth) propylene (meth) propylene in the reaction of crotonic acid (meth) propylene / epoxy propyl resin, crotonic acid in the reaction of crotonic acid Methyl)acrylic (meth)acryloyl-(meth)acrylic (meth)acrylomethyl)acrylic acid (meth) propylene copolymer reaction / crotonic acid methyl / crotonic acid resin -33- 201232174, dicyclopentan a resin for reacting crotonic acid in a copolymer of a base (meth) acrylate/N_cyclohexylmaleimide/epoxypropyl (meth) acrylate; a dicyclopentyl (meth) acrylate/ring a resin for reacting maleic acid in a copolymer of maleic acid and a copolymer of benzyl (meth)acrylate/epoxypropyl (meth)acrylate in a copolymer of oxypropyl (meth)acrylate Cyclohexyl (meth) acrylate / epoxy propyl (A a copolymer of maleic acid, a copolymer of styrene/epoxypropyl (meth)acrylate in a copolymer of acrylate, a maleic acid-reactive resin, a maleic acid methyl/epoxypropyl group (a) a resin of maleic acid in a copolymer of acrylates, a copolymer of N-cyclohexylmaleamide/epoxypropyl (meth) acrylate, a resin of maleic acid, 'dicyclopentyl Resin of maleic acid, dicyclopentyl (meth) acrylate / ring in copolymer of (meth) acrylate / benzyl (meth) acrylate / epoxy propyl (meth) acrylate Resin for the reaction of maleic acid in a copolymer of hexyl (meth) acrylate/epoxypropyl (meth) acrylate, dicyclopentyl (meth) acrylate / styrene / epoxy propyl (methyl Reaction of maleic acid in a copolymer of maleic acid, copolymer of dicyclopentyl (meth) acrylate/maleic acid methyl/epoxypropyl (meth) acrylate in an acrylate copolymer Resin dicyclopentyl (meth) acrylate / N_cyclohexylmaleimide / epoxy propyl (methyl) propyl a resin for reacting maleic acid in a copolymer of an acid ester; a reaction of (meth)acrylic acid and maleic anhydride in a copolymer of a cyclopentyl (meth) acrylate/epoxypropyl (meth) acrylate Resin, benzyl (meth) acrylate / epoxy propyl (meth) acrylate copolymer (meth) acrylic acid and maleic anhydride resin, cyclohexyl-34- 201232174 (meth) acrylate Reaction of a copolymer of (meth)acrylic acid and maleic anhydride with a copolymer of styrene/epoxypropyl (meth) acrylate in a copolymer of ester/glycidyl (meth) acrylate (A Resin (meth)acrylic acid and maleic anhydride resin (N-cyclohexyl) in a copolymer of acrylic acid and maleic anhydride, or a copolymer of methyl (meth)acrylate/methyl acrylate (meth)acrylate Reaction of (meth)acrylic acid and maleic anhydride resin, dicyclopentyl (meth) acrylate / benzyl (methyl) in a copolymer of maleic amine / glycidyl (meth) acrylate Acrylate/epoxypropyl (meth) acrylate copolymer Reaction of (meth)acrylic acid and maleic anhydride resin, copolymer of dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate / epoxy propyl (meth) acrylate (A) Resin (meth)acrylic acid and maleic anhydride resin in a copolymer of acrylic acid and maleic anhydride, a copolymer of dicyclopentyl (meth) acrylate/styrene/epoxypropyl (meth) acrylate Resin (meth)acrylic acid and maleic anhydride resin, dicyclopentane in a copolymer of dicyclopentyl (meth) acrylate / methyl (meth) acrylate / epoxy propyl (meth) acrylate Resin (meth)acrylic acid and maleic anhydride resin in copolymer of (meth) acrylate/N-cyclohexylmaleimide/epoxypropyl (meth) acrylate; dicyclopentyl ( Reaction of (meth)acrylic resin, benzyl (meth) acrylate / 3, 4-epoxy in a copolymer of methyl acrylate / 3, 4-epoxycyclohexyl methyl methacrylate Resin (meth)acrylic resin in a copolymer of cyclohexylmethyl methacrylate , a copolymer of cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate -35 - 201232174 Reactive (meth)acrylic resin, styrene / 3,4 - ring a copolymer of (meth)acrylic acid, a copolymer of methyl (meth)acrylate/3,4-epoxycyclohexylmethyl methacrylate in a copolymer of oxycyclohexylmethyl methacrylate Reaction of (meth)acrylic resin, copolymer of N-cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate, reaction of (meth)acrylic acid resin, dicyclopentane Resin (meth)acrylic resin, dicyclopentyl group in a copolymer of a base (meth) acrylate / benzyl (meth) acrylate / 3, 4-epoxycyclohexyl methyl methacrylate Resin (meth)acrylic resin, dicyclopentyl (a) in a copolymer of (meth) acrylate/cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate Reaction in a copolymer of acrylate/styrene/3,4-epoxycyclohexylmethyl methacrylate Reaction of (meth)acrylic acid in a copolymer of acrylic acid, dicyclopentyl (meth) acrylate / methyl (meth) acrylate / 3, 4-epoxycyclohexyl methyl methacrylate Resin (meth)acrylic resin in a copolymer of dicyclopentyl (meth) acrylate/N-cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate : a resin for reacting crotonic acid in a copolymer of dicyclopentyl (meth) acrylate/3,4-epoxycyclohexylmethyl methacrylate, benzyl (meth) acrylate / 3, 4 - a copolymer of crotonic acid, a copolymer of cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of epoxy-cyclohexylmethyl methacrylate a resin for reacting crotonic acid, a copolymer of styrene/3,4-epoxycyclohexylmethyl methacrylate, a crotonic acid-reactive resin, a crotonic acid methyl/3,4-epoxycyclohexylmethyl group Resin for the reaction of crotonic acid in a copolymer of A-36-201232174 acrylate, N-cyclohexylmaleimide/3,4-epoxy ring Resin for the reaction of crotonic acid in a copolymer of methyl methacrylate, dicyclopentyl (meth) acrylate / benzyl (meth) acrylate / 3, 4-epoxycyclohexylmethyl Copolymerization of crotonic acid-reactive resin, dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of acrylate a resin for reacting crotonic acid, a copolymer of dicyclopentyl (meth) acrylate/styrene/3,4-epoxycyclohexylmethyl methacrylate, a resin for reacting crotonic acid, and dicyclopentane Resin for the reaction of crotonic acid, dicyclopentyl (meth) acrylate/N in a copolymer of a base (meth) acrylate / crotonic acid methyl / 3,4-epoxycyclohexylmethyl methacrylate a resin for reacting crotonic acid in a copolymer of cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate; dicyclopentyl (meth) acrylate/3,4-ring Maleic acid-reactive resin, benzyl (meth) acrylate / 3, 4- in a copolymer of oxycyclohexyl methyl methacrylate a copolymer of maleic acid, a copolymer of cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of epoxycyclohexylmethyl methacrylate Reaction of maleic acid resin, copolymer of styrene/3,4-epoxycyclohexylmethyl methacrylate, maleic acid resin, maleic acid methyl/3,4-epoxy ring Reaction of maleic acid resin, copolymer of N-cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate in copolymer of hexylmethyl methacrylate Reaction of acid resin 'dicyclopentyl (meth) acrylate / benzyl (meth) acrylate / 3, 4-epoxycyclohexyl methyl methacrylate - 37 - 201232174 Maleic acid in a copolymer of maleic acid, dicyclopentyl (meth) acrylate / cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate a resin of maleic acid in a copolymer of a resin, dicyclopentyl (meth) acrylate / styrene / 3,4-epoxycyclohexylmethyl methacrylate a resin of maleic acid, dicyclopentyl (A) in a copolymer of dicyclopentyl (meth) acrylate / maleic acid methyl / 3,4-epoxycyclohexylmethyl methacrylate Resin for the reaction of maleic acid in a copolymer of acrylate/N-cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate; dicyclopentyl (meth)acrylic acid Reaction of (meth)acrylic acid and maleic anhydride resin, benzyl (meth) acrylate / 3, 4- epoxy in copolymer of ester / 3,4-epoxycyclohexylmethyl methacrylate Resin (meth)acrylic acid and maleic anhydride resin, cyclohexyl (meth) acrylate / 3,4-epoxycyclohexylmethyl methacrylate in a copolymer of cyclohexylmethyl methacrylate (meth)acrylic acid and maleic anhydride in a copolymer of (meth)acrylic acid and maleic anhydride resin, styrene/3,4-epoxycyclohexylmethyl methacrylate Reaction of a resin, a copolymer of methyl (meth)acrylate/3,4-epoxycyclohexylmethyl methacrylate (methyl) Resin (meth)acrylic acid and maleic anhydride resin in copolymer of enoic acid and maleic anhydride, copolymer of N-cyclohexylmaleimide/3,4-epoxycyclohexylmethyl methacrylate (Meth)acrylic acid and Malay in a copolymer of dicyclopentyl (meth) acrylate / benzyl (meth) acrylate / 3, 4-epoxycyclohexyl methyl methacrylate Reaction of an anhydride resin, a copolymer of dicyclopentyl (meth) acrylate / cyclohexyl (methyl) propyl - 38 - 201232174 enoate / 3,4-epoxycyclohexylmethyl methacrylate Reaction of (meth)acrylic acid and maleic anhydride resin, copolymer of dicyclopentyl (meth) acrylate / styrene / 3,4-epoxycyclohexylmethyl methacrylate (methyl) Reaction of acrylic acid and maleic anhydride resin, copolymer of dicyclopentyl (meth) acrylate / methyl (meth) acrylate / 3, 4-epoxycyclohexyl methyl methacrylate (methyl Acrylic acid and maleic anhydride resin, dicyclopentyl (meth) acrylate / N · cyclohexyl maleimide / 3, 4 - epoxy Copolymers of methyl hexyl acrylate reaction (meth) acrylic acid and maleic anhydride resins. The polystyrene-equivalent weight average molecular weight (Mw) of the resin (B2) is preferably from 3,000 to 100,000, more preferably from 5,000 to 50,000. When the weight average molecular weight of the resin (B2) is in the above range, the coating property tends to be good, and it is difficult to cause a film-reducing phenomenon when developing, and the non-pixel portion has a good tendency to be removed during development. The molecular weight distribution (weight average molecular weight (Mw) / number average molecular weight (?n)) of the resin (B2) is preferably 1. 5~6. 0, more preferably 1. 8~4. 0. When the molecular weight distribution of the resin (Β2) is within the above range, it tends to be excellent in developability. The acid value of the resin (Β2) is from 20 to 150 mg-KOH/g, preferably from 50 to 135 mg-KOH/g, more preferably from 65 to 135 mg-KOH/g. The acid value is determined by measuring the amount (mg) of potassium hydroxide in the case of 1 g of the resin (B2), and can be determined by titration with an aqueous potassium hydroxide solution. The content of the resin (B 2 ) is preferably from 5 to 90% by mass, more preferably from 15 to 90% by mass based on the total amount of the resin (B 1 ) and the resin (B2 ).

C -39- 201232174 % ’特佳爲20〜90質量%。樹脂(B 1 )的含有量在前述範 圍內時’顯像性、密著性、耐溶劑性、機械特性有變良好 之傾向。 本發明的著色感光性樹脂組成物作爲樹脂(B )可含 有與樹脂(B1)及樹脂(B2)相異的樹脂(BX)。作爲 樹脂(BX ),例如可舉出(a )與(c )之共聚物。樹脂( BX)的含有量對於樹脂(B)之總質量而言以〇〜5〇質量 %爲佳,以0〜30質量%爲較佳。 含於本發明的著色感光性樹脂組成物之樹脂(B )的 總質量對於著色感光性樹脂組成物的固體成分量而言,以 20〜70質量%爲佳,以25〜50質量%爲較佳。 又,樹脂(B)的合計量對於樹脂(B)及聚合性化合 物(C )之合計量而言以20〜80質量%爲佳,以40〜60 質量%爲佳。 本發明的著色感光性樹脂組成物含有聚合性化合物( C)。 聚合性化合物(C )係爲藉由自聚合啓始劑(D )所產 生的活性自由基及酸等進行聚合而得之化合物,例如可舉 出具有乙烯性不飽和鍵之化合物,較佳爲可舉出(甲基) 丙烯酸酯化合物。 作爲具有1個乙烯性不飽和鍵之聚合性化合物(C ) ,可舉出作爲前述(a) 、(b)及(c)所舉的相同化合 物,其中以(甲基)丙烯酸酯類爲佳。 作爲具有2個乙烯性不飽和鍵之聚合性化合物(c ) -40 - 201232174 ’可舉出1,3-丁烷二醇二(甲基)丙烯酸酯、丨,3_ 丁烷二 醇(甲基)丙烯酸酯、1,6-己烷二醇二(甲基)丙烯酸酯 、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯 酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基 )丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二 丙烯酸酯、雙酚A之雙(丙烯醯氧基乙基)醚、乙氧基化 雙酚A二(甲基)丙烯酸酯、丙氧基化新戊二醇二(甲基 )丙烯酸酯、乙氧基化新戊二醇二(甲基)丙烯酸酯、3-甲基戊烷二醇二(甲基)丙烯酸酯等。 作爲具有3個以上的乙烯性不飽和鍵之聚合性化合物 (C),可舉出三羥甲基丙烷三(甲基)丙烯酸酯、季戊 四醇三(甲基)丙烯酸酯、參(2·羥基乙基)三聚異氰酸 酯三(甲基)丙烯酸酯、乙氧基化三羥甲基丙烷三(甲基 )丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙烯酸酯 、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基) 丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三季戊四醇 四(甲基)丙烯酸酯、三季戊四醇五(甲基)丙烯酸酯、 三季戊四醇六(甲基)丙烯酸酯、三季戊四醇七(甲基) 丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、季戊四醇三 C甲基)丙烯酸酯與酸酐之反應物、二季戊四醇五(甲基 )丙烯酸酯與酸酐之反應物、三季戊四醇七(甲基)丙烯 酸酯與酸酐己內酯變性三羥甲基丙烷三(甲基)丙稀酸醋 、己內酯變性季戊四醇三(甲基)丙烯酸酯、己內酯變性 參(2-羥基乙基)三聚異氰酸酯三(甲基)丙烯酸酯、己 -41 - 201232174 內醋變性季戊四醇四(甲基)丙烯酸酯 '己內酯變性二季 戊四醇五(甲基)丙烯酸酯、己內酯變性二季戊四醇六( 甲基)丙稀酸醋、己內酯變性三季戊四醇四(甲基)丙嫌 酸酯、己內酯變性三季戊四醇五(甲基)丙烯酸酯、己內 酯變性三季戊四醇六(甲基)丙烯酸酯、己內醋變性三季 戊四醇七(甲基)丙烁酸酯、己內醋變性三季戊四醇八( 甲基)丙烯酸酯、己內酯變性季戊四醇三(甲基)丙烯酸 酯與酸酐之反應物、己內酯變性二季戊四醇五(甲基)丙 烯酸酯與酸酐之反應物、己內酯變性三季戊四醇七(甲基 )丙烯酸酯與酸酐之反應物等。其中亦以3官能以上的單 體爲佳,以二季戊四醇六(甲基)丙烯酸酯爲較佳。 聚合性化合物(C)的含有量對於著色感光性樹脂組 成物之固體成分的量而言,以5〜50質量%爲佳,以10〜 4 5質量%爲較佳。又,對於樹脂(b )及聚合性化合物(c )的合計量,較佳爲20〜80質量%,更佳爲40〜60質量 %。聚合性化合物(C)的含有量在前述範圍時,感度、 圖型的強度或平滑性、信賴性有變良好之傾向。C -39- 201232174 % Exceptional is 20 to 90% by mass. When the content of the resin (B 1 ) is within the above range, the developing property, the adhesion, the solvent resistance, and the mechanical properties tend to be good. The colored photosensitive resin composition of the present invention may contain a resin (BX) different from the resin (B1) and the resin (B2) as the resin (B). Examples of the resin (BX) include copolymers of (a) and (c). The content of the resin (BX) is preferably 5% to 5% by mass based on the total mass of the resin (B), and preferably 0 to 30% by mass. The total mass of the resin (B) contained in the colored photosensitive resin composition of the present invention is preferably 20 to 70% by mass, and preferably 25 to 50% by mass, based on the solid content of the colored photosensitive resin composition. good. In addition, the total amount of the resin (B) is preferably 20 to 80% by mass, and preferably 40 to 60% by mass, based on the total amount of the resin (B) and the polymerizable compound (C). The colored photosensitive resin composition of the present invention contains a polymerizable compound (C). The polymerizable compound (C) is a compound obtained by polymerizing an active radical derived from a polymerization initiator (D), an acid or the like, and examples thereof include a compound having an ethylenically unsaturated bond, and preferably a compound. A (meth) acrylate compound is mentioned. The polymerizable compound (C) having one ethylenically unsaturated bond may, for example, be the same compound as mentioned in the above (a), (b) and (c), wherein (meth)acrylate is preferred. . The polymerizable compound (c) -40 - 201232174 having two ethylenically unsaturated bonds can be exemplified as 1,3-butanediol di(meth)acrylate, hydrazine, 3-butanediol (methyl) Acrylate, 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, neopentyl glycol di(a) Acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, polyethylene glycol diacrylate, bisphenol A bis(acryloxyethyl) Ether, ethoxylated bisphenol A di(meth) acrylate, propoxylated neopentyl glycol di(meth) acrylate, ethoxylated neopentyl glycol di(meth) acrylate, 3 -methylpentanediol di(meth)acrylate or the like. Examples of the polymerizable compound (C) having three or more ethylenically unsaturated bonds include trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, and bis(2·hydroxyl). Trimeric isocyanate tri(meth)acrylate, ethoxylated trimethylolpropane tri(meth)acrylate, propoxylated trimethylolpropane tri(meth)acrylate, pentaerythritol tetra ( Methyl) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tripentaerythritol tetra (meth) acrylate, tripentaerythritol penta (meth) acrylate, tripentaerythritol hexa a reaction of a methyl acrylate, a tripentaerythritol hepta (meth) acrylate, a tripentaerythritol octa (meth) acrylate, a pentaerythritol tri C meth acrylate with an acid anhydride, dipentaerythritol penta (meth) acrylate and Anhydride reactant, tripentaerythritol hepta (meth) acrylate and anhydride caprolactone denatured trimethylolpropane tri(methyl) acrylate vinegar, caprolactone denatured pentaerythritol (Meth) acrylate, caprolactone denatured ginseng (2-hydroxyethyl) trimer isocyanate tri(meth) acrylate, hexa-41 - 201232174 vinegar denatured pentaerythritol tetra(meth) acrylate 'caprolactone Denatured dipentaerythritol penta (meth) acrylate, caprolactone denatured dipentaerythritol hexa(methyl) acrylate vinegar, caprolactone denatured tripentaerythritol tetrakis(methyl) propionate, caprolactone denatured pentaerythritol (Meth) acrylate, caprolactone denatured tripentaerythritol hexa(meth) acrylate, caprolactone denatured tripentaerythritol hepta (methyl) propionate, caprolactone denatured tripentaerythritol octa (meth) acrylate a reaction of caprolactone-denatured pentaerythritol tri(meth)acrylate with an acid anhydride, a reaction of caprolactone-denatured dipentaerythritol penta(meth)acrylate with an acid anhydride, and caprolactone-denatured tripentaerythritol hepta(meth)acrylic acid a reactant of an ester and an acid anhydride, and the like. Among them, a trifunctional or higher monomer is preferred, and dipentaerythritol hexa(meth)acrylate is preferred. The content of the polymerizable compound (C) is preferably 5 to 50% by mass, and preferably 10 to 45% by mass, based on the amount of the solid content of the colored photosensitive resin composition. Further, the total amount of the resin (b) and the polymerizable compound (c) is preferably 20 to 80% by mass, more preferably 40 to 60% by mass. When the content of the polymerizable compound (C) is in the above range, the sensitivity, the strength, the smoothness, and the reliability of the pattern tend to be improved.

本發明的著色感光性樹脂組成物含有聚合啓始劑(D )° 作爲聚合啓始劑(D),藉由光作用產生活性自由基 及酸等,若爲啓始聚合性化合物(C )的聚合之化合物即 可並無特別限定,可使用公知聚合啓始劑。 作爲聚合啓始劑(D ),以使用二咪唑化合物〔烷基 苯酮化合物、三嗪化合物、醯基膦氧化物化合物、肟化合 -42- 201232174 物爲佳。又,可使用特開2008-1 8 1 087號公報所記載之光 陽離子聚合啓始劑(例如來自鎗陽離子與路易氏酸之陰離 子所構成者)。其中由感度之觀點來看以肟化合物爲佳。 作爲前述聯咪唑化合物,可舉出2,2’-雙(2-氯苯基 )-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’·四苯基聯咪唑(例如、特開平6-7 5 372號公報及 特開平6-75 3 73號公報參照。)、2,2’-雙(2-氯苯基)-4,4’,5,5’·四苯基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(二烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基 )-4,4’,5,5’-四(三烷氧基苯基)聯咪唑(例如、特公昭 48-3 8403號公報及特開昭62- 174204號公報參照。)、 4,4’5,5’-位的苯基由烷氧羰基所取代之咪唑化合物(例如 ,特開平7-10913號公報參照。)等。較佳爲2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2、3-二氯苯 基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2、4-二氯苯基 )-4,4’,5,5’-四苯基聯咪唑。 作爲前述的烷基苯酮化合物,可舉出二乙氧基苯乙酮 、2-甲基-2-嗎啉代-1-( 4-甲基磺醯基苯基)丙烷-1-酮、 2-二甲基胺基-1-(4-嗎啉代苯基)-2-苯甲基丁烷-1-酮、 2-二甲基胺基-1-(4-嗎啉代苯基)-2-(4-甲基苯基甲基) 丁烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、苯甲基二甲 基縮酮、2-羥基-2-甲基-1-〔4-( 2·羥基乙氧基)苯基〕丙 烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-( 4-異 -43- 201232174 丙烯基苯基)丙烷-ι·酮的寡聚物等,較佳ΐ 2-嗎啉代-1-(4-甲基磺醯基苯基)丙烷-n 基-1-(4-嗎啉代苯基)-2·苯甲基丁烷-1-酮 Irgacure 369、907 (以上、BASFJapan 公 5 〇 作爲前述三嗪化合物,可舉出2,4-雙( (4·甲氧基苯基)-1,3,5-三嗪、2,4-雙(三 4-甲氧基萘基)-1,3,5-三嗪、2,4-雙(三氯 基-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4 基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-( 喃-2-基)乙烯基〕-1,3,5-三嗪、2,4-雙(三 2-(呋喃-2-基)乙烯基〕·1,3,5-三嗪、2,4 )-6-〔 2· ( 4-二乙基胺基-2-甲基苯基)乙烬 嗪、2,4-雙(三氯甲基)-6-〔2-(3,4-二甲 烯基〕-1,3,5-三嗪等。 作爲前述醯基膦氧化物開始劑,可舉出 苯甲醯基二苯基膦氧化物等。可使用Irgacu Japan公司製)等販賣品。 作爲前述肟化合物,可舉出N -苯甲醯 基磺醯基苯基)丁烷-1-酮-2-亞胺、N-苯甲 苯基磺醯基苯基)辛烷-1-酮-2-亞胺、N-乙 基-6-(2-甲基苯甲醯基)-9H-咔唑基-3-基 、N -乙酸基-1-〔 9 -乙基-6- { 2 -甲基-4· ( 3, 二噁環戊基甲氧基)苯甲醯基} -9H-咔唑3 ϋ舉出2-甲基-寻、2 -二甲基胺 等。亦可使用 丨製)等販賣品 三氯甲基)-6-氯甲基)-6 -( 甲基)-6-胡椒 -甲氧基苯乙烯 2- ( 5-甲基呋 氯甲基)-6-〔 •雙(三氯甲基 ¥ 基〕-1,3,5-三 氧基苯基)乙 2,4,6-三甲基 re 819 ( Ciba. 氧基-1 - ( 4-苯 醯氧基-1 - ( 4- 酸基-1-〔 9-乙 〕乙烷-1 -亞胺 ,3-二甲基-2,4-S -3-基〕乙烷- -44 - 201232174 1-亞胺等。可使用 Irgacure OXE-Ol、ΟΧΕ-02 (以上、 BASFJapan公司製)、N-1919(ADEKA公司製)等販賣 品。 進一步作爲聚合啓始劑(D),可舉出苯偶因、苯偶 因甲基醚、苯偶因乙基醚、苯偶因異丙基醚、苯偶因異丁 基醚等苯偶因化合物;二苯甲酮、〇_苯甲醯基安息香酸甲 酯、4-苯基二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫化物 、3,3’,4,4’-四(第三丁基過氧化羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等二苯甲酮化合物;9,10 -菲醌、2 -乙基蒽 醌、樟腦醌等醌化合物;1 0 _ 丁基-2 -氯吖啶酮、苯甲基、 苯基乙醛酸酸甲酯、二茂鈦化合物等。這些可與後述聚合 啓始助劑(D 1 )(特別爲胺類)組合後使用爲佳。 且可含有聚合啓始助劑(D1)。聚合啓始助劑(D1 )可與聚合啓始劑(D )組合後使用,其爲使用於促進藉 由聚合啓始劑開始聚合的聚合性化合物之聚合的化合物或 增感劑。 作爲聚合啓始助劑(D1),可舉出胺化合物、噻唑咐 化合物、烷氧基蒽化合物、噻吨酮化合物、羧酸化合物等 〇 作爲胺化合物,可舉出三乙醇胺、甲基二乙醇胺、三 異丙醇胺、4-二甲基胺基安息香酸甲酯、4-二甲基胺基安 息香酸乙酯、4-二甲基胺基安息香酸異戊酯、安息香酸2-二甲基胺基乙基、4-二甲基胺基安息香酸2-乙基己基、 N,N-二甲基對苯胺、4,4’-雙(二甲基胺基)二苯甲酮、 -45- 201232174 4,4’-雙(二乙基胺基)二苯甲酮、4,4’-雙(乙基甲基胺基 )二苯甲酮等,其中亦以4,4’-雙(二乙基胺基)二苯甲 酮爲佳。亦可使用EAB-F (保土谷化學工業(股)製)等 販賣品。 作爲噻唑啉化合物,可舉出式(ΠΙ-1)〜式(III-3) 所示化合物等。The colored photosensitive resin composition of the present invention contains a polymerization initiator (D) ° as a polymerization initiator (D), which generates active radicals and acids by light action, and is a starting polymerizable compound (C). The compound to be polymerized is not particularly limited, and a known polymerization initiator can be used. As the polymerization initiator (D), a diimidazole compound [alkyl phenone compound, triazine compound, mercaptophosphine oxide compound, hydrazine compound -42-201232174 is preferably used. Further, a photocationic polymerization initiator (for example, a composition derived from a gun cation and an anion of Lewis acid) described in JP-A-2008-1 8 1 087 can be used. Among them, the ruthenium compound is preferred from the viewpoint of sensitivity. Examples of the biimidazole compound include 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, and 2,2'-bis(2,3- Dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole (for example, JP-A-6-7 5372 and JP-A-6-75 3 73), 2, 2 '-Bis(2-chlorophenyl)-4,4',5,5'·tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5' -tetrakis(alkoxyphenyl)biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(dialkoxyphenyl)biimidazole, 2, 2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(trialkoxyphenyl)biimidazole (for example, Japanese Patent Publication No. Sho 48-3 8403 and JP-A-62- Japanese Patent Publication No. 174204 refers to an imidazole compound in which a phenyl group at the 4,4'5,5'-position is substituted with an alkoxycarbonyl group (for example, JP-A-7-10913). Preferred is 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl)- 4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole. Examples of the alkylphenone compound include diethoxyacetophenone and 2-methyl-2-morpholino-1-(4-methylsulfonylphenyl)propan-1-one. 2-Dimethylamino-1-(4-morpholinophenyl)-2-benzylidenebutan-1-one, 2-dimethylamino-1-(4-morpholinophenyl) )-2-(4-methylphenylmethyl)butan-1-one, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethylketal, 2 -hydroxy-2-methyl-1-[4-(2.hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1- (4-iso-43-201232174 acryloylphenyl)propane-ι·ketone oligomer, etc., preferably ΐ 2-morpholino-1-(4-methylsulfonylphenyl)propane-n 1-(4-morpholinophenyl)-2-benzylbutan-1-one Irgacure 369, 907 (above, BASF Japan 5) As the triazine compound, 2,4-bis ( (4. methoxyphenyl)-1,3,5-triazine, 2,4-bis(tris4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis ( Trichloro-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-yl)-1,3,5-triazine, 2,4-bis(trichloromethane) -6-(an-2-yl) Vinyl]-1,3,5-triazine, 2,4-bis(tris-2-(furan-2-yl)vinyl]·1,3,5-triazine, 2,4 )-6-[ 2. (4-Diethylamino-2-methylphenyl) oxazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dienyl)- 1,3,5-triazine, etc. As the starting agent of the mercaptophosphine oxide, a benzamidine diphenylphosphine oxide or the like can be used. A commercially available product such as Irgacu Japan Co., Ltd. can be used. , which may be N-benzylidenesulfonylphenyl)butan-1-one-2-imine, N-phenyltolylsulfonylphenyl)octane-1-one-2-imine , N-ethyl-6-(2-methylbenzhydryl)-9H-carbazolyl-3-yl, N-acetoxy-1-[9-ethyl-6-{2-methyl- 4 (3, dioxocyclopentylmethoxy)benzimidyl}-9H-carbazole 3 2- 2-methyl-seeking, 2-dimethylamine, etc. Tractor trichloromethyl)-6-chloromethyl)-6-(methyl)-6-piperidine-methoxystyrene 2-(5-methylfurochloromethyl)-6-[ • double ( Trichloromethyl ketone-1,3,5-trimethoxyphenyl)ethyl 2,4,6-trimethyl re 819 (Ciba. oxy-1 - (4-benzoquinone) Base-1 - (4-acid-1-[9-ethane]ethane-1-imine, 3-dimethyl-2,4-S-3-yl]ethane--44 - 201232174 1- Imine and the like. Commercial products such as Irgacure OXE-Ol, ΟΧΕ-02 (above, manufactured by BASF Japan), and N-1919 (made by ADEKA) can be used. Further, as the polymerization initiator (D), benzoin such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether or benzoin isobutyl ether may be mentioned. a compound; benzophenone, methyl benzoyl benzoyl benzoate, 4-phenyl benzophenone, 4-benzylidene-4'-methyldiphenyl sulfide, 3,3', a benzophenone compound such as 4,4'-tetra(t-butylperoxycarbonyl)benzophenone or 2,4,6-trimethylbenzophenone; 9,10-phenanthrenequinone, 2-B Anthraquinone compounds such as guanidine and camphor; 10 _ butyl-2-chloroacridone, benzyl, methyl phenylglyoxylate, titanocene compound, and the like. These may be preferably used in combination with a polymerization initiation aid (D 1 ) (particularly an amine) described later. It may also contain a polymerization initiation aid (D1). The polymerization initiation aid (D1) can be used in combination with the polymerization initiator (D), which is a compound or a sensitizer used to promote polymerization of a polymerizable compound which starts polymerization by a polymerization initiator. Examples of the polymerization initiation assistant (D1) include an amine compound, a thiazolium compound, an alkoxyfluorene compound, a thioxanthone compound, and a carboxylic acid compound, and examples thereof include an amine compound, and triethanolamine and methyldiethanolamine are mentioned. , triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 2-dimethyl benzoate Aminoethyl, 4-dimethylaminobenzoic acid 2-ethylhexyl, N,N-dimethyl-p-aniline, 4,4'-bis(dimethylamino)benzophenone, - 45- 201232174 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(ethylmethylamino)benzophenone, etc., of which 4,4'-double (Diethylamino)benzophenone is preferred. It is also possible to use EAB-F (Buddha Valley Chemical Industry Co., Ltd.) and other sales items. The thiazoline compound may, for example, be a compound represented by the formula (ΠΙ-1) to the formula (III-3).

作爲烷氧基蒽化合物,可舉出9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、9,10-二丁氧基蒽、2-乙基-9,10-二丁氧基蒽 等。 作爲噻吨酮化合物,可舉出2 -異丙基噻吨酮、4 -異丙 基噻吨酮、2,4 -二乙基噻吨酮、2,4 -二氯噻吨酮、1-氯-4-丙氧基噻吨酮等。 作爲羧酸化合物,可舉出苯基磺醯基乙酸、甲基苯基 磺醯基乙酸、乙基苯基磺醯基乙酸、甲基乙基苯基磺醯基 -46 - 201232174 乙酸、二甲基苯基磺醯基乙酸、甲氧基苯基磺醯基乙酸、 二甲氧基苯基磺醯基乙酸、氯苯基磺醯基乙酸、二氯苯基 磺醯基乙酸、N-苯基甘胺酸、苯氧基乙酸、萘基硫代乙酸 、N-萘基甘胺酸、萘氧基乙酸等。 聚合啓始劑(D )的含有量對於樹脂(B )及聚合性化 合物(C)的合計量100質量份而言,較佳爲0.1〜40質 量份,更佳爲1〜30質量份。聚合啓始劑(D)的含有量 在該範圍時,可在高感度下形成圖型,圖型的耐藥品性、 機械強度、表面平滑性有變良好之傾向。 使用聚合啓始助劑(D1)時,該使用量對於樹脂(B )及聚合性化合物(C)的合計量1〇〇質量份而言,較佳 爲0.01〜50質量份,更佳爲0.1〜40質量份。又,每聚合 啓始劑(D) 1莫耳,較佳爲〇.〇1〜1〇莫耳,更佳爲0.01 〜5莫耳。聚合啓始助劑(D1)的量在該範圍時,可進一 步在高感度下形成圖型,圖型生產性有著提高的傾向。 又,本發明的著色感光性樹脂組成物亦可進一步含有 多官能硫醇化合物(T)。該多官能硫醇化合物(T )係爲 分子內具有2個以上磺醯基之化合物。且其中使用具有2 個以上鄰接於脂肪族烴基的磺醯基之化合物時,可在高感 度下形成圖型故較佳。 、3 二乙 醇彳乙基 硫雙、釀 二醇 } 磺 烷二酯3-己烷酸{ 出 丁乙參 舉、基烷 可苯醯丙 , > 磺基 }基3甲 T 醯 { 羥 {擴雙三 物基醇、 合甲二? 化C烷酯 醇雙丁酸 硫4-、乙 匕匕 , A目 1 N1/ 基 官、酯醯 多醇酸擴 爲硫丙3-作二基 { 烷醯雙 癸磺醇 -47- 201232174 酸酯)、丁烷二醇雙(3-磺醯基丙酸酯)、三羥甲基丙烷 參(3-磺醯基丙酸酯)、三羥甲基丙烷參(3-磺醯基乙酸 酯)、季戊四醇肆(3-磺醯基丙酸酯)、季戊四醇肆(3-磺醯基乙酸酯)、參羥基乙基參(3-磺醯基丙酸酯)、季 戊四醇肆(3-磺醯基丁酸酯)、1,4-雙(3-磺醯基丁氧基 )丁烷等。 多官能硫醇化合物(T)的含有量對於聚合啓始劑(D )100質量份而言,較佳爲0.5〜20質量份,更佳爲1〜 15質量份。多官能硫醇化合物(T)的含有量在該範圍時 ,感度會變高,且顯像性有變良好之傾向。 溶劑(E)並無特別限定,可使用在該領域中一般使 用的溶劑。例如可使用選自酯溶劑(分子內含有-COO-, 未含〇·的溶劑)、酯溶劑以外的醚溶劑(分子內含有-〇-,未含-COO·的溶劑)、醚酯溶劑(分子內含有-COO-與-〇 -之溶劑)、酯溶劑以外的酮溶劑(分子內含有- CO-,未 含有-coo-之溶劑)、醇溶劑、芳香族烴溶劑、醯胺溶劑 及二甲基亞楓中。這些溶劑可單獨亦可組合2種類以上後 使用。 作爲酯溶劑,可舉出乳酸甲酯、乳酸乙酯、乳酸丁酯 、2-羥基異丁烷酸甲酯、乙酸乙酯、乙酸正丁酯、乙酸異 丁酯、甲酸戊酯、乙酸異戊酯、丙酸丁酯、丁酸異丙酯、 丁酸乙酯、丁酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸 丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、環己醇乙酸酯、γ-丁內酯等。 -48- 201232174 作爲醚溶劑,可舉出乙二醇單甲基醚、乙二醇單乙基 醚、乙二醇單丙基醚、乙二醇單丁基醚、二乙二醇單甲基 醚、二乙二醇單乙基醚、二乙二醇單丁基醚、丙二醇單甲 基醚、丙二醇單乙基醚、丙二醇單丙基醚、丙二醇單丁基 醚、3-甲氧基-1-丁醇、3-甲氧基-3-甲基丁醇、四氫呋喃 、四氫吡喃、1,4-二噁烷、二乙二醇二甲基醚、二乙二醇 二乙醚、二乙二醇甲基乙基醚、二乙二醇二丙基醚、二乙 二醇二丁基醚、苯甲醚、苯乙醚、甲基苯甲醚等。 作爲醚酯溶劑,可舉出甲氧基乙酸甲酯、甲氧基乙酸 乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙 酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙 酸甲酯、3-乙氧基丙酸乙酯、2-甲氧基丙酸甲酯、2-甲氧 基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基 丁基乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙 酸酯、丙二醇單丙基醚乙酸酯、乙二醇單甲基醚乙酸酯、 乙二醇單乙基醚乙酸酯、二乙二醇單乙基醚乙酸酯、二乙 二醇單丁基醚乙酸酯等。 作爲酮溶劑’可舉出4 -羥基-4-甲基-2-戊酮' 丙酮、 2_ 丁酮、2-庚酮、3-庚酮、4-庚酮、4-甲基-2-戊酮、環戊 酮、環己酮、異佛爾酮等。 作爲醇溶劑,可舉出甲醇、乙醇、丙醇、丁醇、己醇 、環己醇、乙二醇、丙二醇、甘油等。 -49- 201232174 作爲芳香族烴溶劑,可舉出苯、甲苯、二甲苯、均三 甲苯等。 作爲醯胺溶劑,可舉出N,N-二甲基甲醯胺、N,N-二甲 基乙醯胺、N-甲基吡咯烷酮等。 上述溶劑中,由塗佈性、乾燥性之觀點來看,在1 atm 中之沸點爲12〇°C以上180°C以下之有機溶劑爲佳。其中亦 以丙二醇單甲基醚、丙二醇單甲基醚乙酸酯等爲佳。 溶劑(E )的含有量對於著色感光性樹脂組成物全量 而言,較佳爲60〜95質量%,更佳爲70〜90質量%。換 言之,著色感光性樹脂組成物之固體成分較佳爲5〜40質 量%,更佳爲1 〇〜3 0質量%。溶劑(E )的含有量在前述 範圍內時,塗佈時之平坦性有變良好之傾向。 本發明的著色感光性樹脂組成物含有界面活性劑(F )者爲佳。作爲界面活性劑,例如可舉出聚矽氧系界面活 性劑、氟系界面活性劑及具有氟原子之聚矽氧系界面活性 劑。含有界面活性劑時,塗佈時之平坦性有變良好之傾向 〇 作爲聚矽氧系界面活性劑,可舉出具有矽氧烷鍵之界 面活性劑。具體可舉出Toray聚矽氧DC3PA、同SH7PA、 同 DC11PA、同 SH21PA 、同 SH28PA、同 SH29PA、同 SH30PA、聚醚變性聚矽氧油 SH8400 (商品名:Toray . Dow Corning (股)製)、KP321、KP322、KP323、KP324 、KP326、KP340、KP341 (信越化學工業(股)製)、 TSF400 、 TSF401 、 TSF410 、 TSF4300 、 TSF4440 、 -50- 201232174 TSF4445、TSF-4446、TSF4452、TSF4460 ( Momentive Performance Materials’Japan 合同會公司製)等。 作爲氟系界面活性劑,可舉出具有氟碳鏈的界面活性 劑。具體可舉出Furorinato (註冊商標)FC430、同FC431 (住友3M (股)製)、megafac (註冊商標)F142D、同 F171 、同 F172、同 F173 、同 F177、同 F183、同 R30( DIC (股)製)、f-top (註冊商標)EF301、同 EF3 03、同 EF351、同 E F 3 5 2 ( M i t s u b i s h i Materials Corporation 電子 化成(股)製)、Surflon (註冊商標)S381、同 S382、 同 SC101、同 SC105(旭硝子(股)製)、E5 84 4((股 )Daikin Fine chemical 硏究所製)等。 作爲具有氟原子之聚矽氧系界面活性劑,可舉出具有 矽氧烷鍵及氟碳鏈之界面活性劑。具體可舉出megafac ( 註冊商標)R〇8、同 BL20、同 F475、同 F477、同 F443 ( DIC (股)製)等。較佳可舉出megafac (註冊商標) F475 ° 界面活性劑(F )對於本發明之著色感光性樹脂組成 物全量而言爲0.001質量%以上質量%以下’較佳爲 0.0 0 2質量%以上〇 · 1質量%以下,更佳爲0.0 1質量%以上 0.0 5質量%以下。將界面活性劑在該範圍內含有時,可使 塗膜的平坦性變的良好。 本發明的著色感光性樹脂組成物視必要亦可含有塡充 劑、其他高分子化合物、密著促進劑、抗氧化劑、紫外線 吸收劑、光安定劑、連鎖移動劑等種種添加劑。 -51 - 201232174 本發明的著色感光性樹脂組成物’例如可調製如以下 者。 首先將著色劑(A )的顏料與溶劑(E )進行混合,直 到顏料的平均粒子徑爲0 ·2 μm以下程度’使用珠磨機等使 其分散。此時,視必要可添加顏料分散劑、樹脂(B )的 一部份或全部。於所得之顏料分散液中’添加樹脂(B) 的殘留、聚合性化合物(C )及聚合啓始劑(D )、視必要 所使用的其他成分、進一步添加視必要的追加溶劑至所定 濃度,可得到目的之著色感光性樹脂組成物。 本發明的著色感光性樹脂組成物例如經過下述(1 ) 〜(4)所示步驟,於彩色過濾器進行加工。 (1)將本發明的著色感光性樹脂組成物塗佈於基板 後得到塗佈膜之步驟 (2 )於塗佈膜上介著光罩使其曝光後得到曝光後塗 佈膜之步驟 (3 )曝光後將塗佈膜在鹼顯像液中進行顯像後得到 圖型之步驟 (4 )將圖型藉由燒烤得到經硬化的圖型之步驟 作爲得到圖型之方法,可舉出光蝕刻法、噴射法、印 刷法等。其中中亦以光蝕刻法爲佳。光蝕刻法係將前述著 色感光性樹脂組成物塗佈於基板上,經乾燥後藉由光罩使 其曝光,藉由顯像而得到圖型之方法。 作爲前述基板,例如可舉出玻璃、金屬及塑質,可爲 板狀或薄膜狀。 -52- 201232174 作爲塑質’例如可舉出聚乙烯、聚丙烯、降莰烯系聚 合物等聚烯烴、聚乙烯醇、聚對苯二甲酸乙二酯、聚萘二 甲酸乙二酯、聚(甲基)丙烯酸酯、纖維素酯、聚碳酸酯 、聚颯、聚醚楓、聚醚酮、聚伸苯基硫化物及聚伸苯基氧 化物。其中所謂(甲基)丙烯酸爲選自丙烯酸及甲基丙烯 酸所成群的至少1種。於這些基板上可形成彩色過濾器、 各種絕緣或導電膜、驅動電路等結構體。 所謂本發明的著色感光性樹脂組成物,因可形成在較 低溫硬化的圖型,故於塑質基板上形成圖型時特別有用。 作爲對基板的塗佈方法,例如可舉出押出塗佈法、雙 輥筒塗佈法、反向式凹版印刷塗佈塗佈法、CAP塗佈法及 狹縫塗佈法。又,亦可使用含浸塗佈機、輥塗佈機、棒塗 佈機、旋轉塗佈機、隙縫&旋轉塗佈機、隙縫塗佈機(有 時稱爲狹縫塗佈機、淋幕塗佈機、轉動塗佈機)、噴射等 塗佈裝置進行塗佈。其中亦以使用隙縫塗佈、旋轉塗佈機 、輥塗佈等進行塗佈爲佳。 作爲塗佈於基板的膜乾燥方法,例如可舉出加熱乾燥 、自然乾燥、通風乾燥及減壓乾燥之方法。亦可組合複數 方法而進行。 作爲乾燥溫度,以〜120°C爲佳,以25〜100°C爲較 佳。又,作爲加熱時間,以1 〇秒〜60分鐘爲佳,以30秒 〜30分鐘爲較佳。 減壓乾燥爲50〜150Pa的壓力下’在20〜25 °C的溫度 範圍下進行爲佳。 -53- 201232174 乾燥後的塗佈膜之膜厚並無特別限定,可藉由 材料、用途等而做適宜調整,一般爲〇」〜20 μιη, 1 〜6 μηι 〇 乾燥後的塗佈膜介著使用於形成目的圖型的光 曝光。此時光罩上的圖型形狀並無特別限定,使用 爲目的之用途的圖型形狀。 作爲使用於曝光的光源,以產生2 5 0〜450nm 之光的光源爲佳。例如將未達3 5 0nm的光,使用可 波長區域的濾器進行阻斷,或亦可將436nm附近, 附近、3 65nm附近的光,使用可擷取彼等波長區域 濾波器進行選擇性擷取。具體可舉出水銀燈、發光 、金屬鹵素燈、及鹵素燈。 於曝光面全體均勻地照射平行光線,或欲可調 與基材之正確位置,於曝光時使用光罩對準曝光機 Aligner )、光刻機等裝置爲佳。 曝光後將塗佈膜與顯像液接觸,溶解所定部分 解未曝光部,藉由使其顯像可得到圖型。作爲顯像 可使用有機溶劑,塗佈膜的曝光部在顯像液中會溶 以膨潤,無法得到良好形狀之圖型,使用鹼性化合 溶液爲佳。 顯像方法爲攪鍊法(Puddling Process)、浸漬 霧法等任一皆可。且於顯像時將基板傾斜爲任意角 顯像後進行水洗爲佳。 使用的 較佳爲 罩進行 配合作 的波長 阻擋該 4 0 8 nm 的帶通 二極體 整光罩 (Mask 例如溶 液,雖 解或難 物的水 法、噴 度皆可 -54- 201232174 作爲前述鹼性化合物,可舉出氫氧化鈉、氫氧化鉀、 燐酸氫二鈉、燐酸二氫鈉、燐酸氫二銨、燐酸二氫銨、燐 酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉 、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等無機鹼性化合物;及 四甲基銨氫氧化物、2_羥基乙基三甲基銨氫氧化物、單甲 胺、二甲胺、三甲胺、單乙胺、二乙胺、三乙胺、單異丙 胺、二異丙胺、乙醇胺等有機鹼性化合物。作爲前述鹼性 化合物以氫氧化鉀、碳酸氫鈉及四甲基銨氫氧化物爲佳。 這些鹼性化合物的水溶液中濃度較佳爲0.01〜10質 量%,更佳爲0.0 3〜5質量%。 前述鹼性化合物的水溶液亦可含有界面活性劑。 作爲界面活性劑,可舉出聚環氧乙烷烷基醚、聚環氧 乙烷芳基醚、聚環氧乙烷烷基芳基醚、其他聚環氧乙烷衍 生物、氧基伸乙基/氧基伸丙基嵌合共聚物、山梨醇酐脂 肪酸酯、聚環氧乙烷山梨醇酐脂肪酸酯'聚環氧乙烷山梨 糖醇脂肪酸酯、甘油脂肪酸酯、聚環氧乙烷脂肪酸酯、聚 環氧乙烷烷胺等非離子系界面活性劑; 月桂基醇硫酸酯鈉、油基醇硫酸酯鈉、月桂基硫酸鈉 、月桂基硫酸銨、十二烷基苯磺酸鈉、十二烷基萘基磺酸 鈉等陰離子系界面活性劑;及硬脂醯基胺鹽酸鹽、月桂基 三甲基銨氯化物等陽離子系界面活性劑。 鹼性化合物的水溶液中之界面活性劑濃度較佳爲0.0 1 〜10質量%,更佳爲〇.〇5〜8質量%,特佳爲〇.1〜5質量 %。 -55- 201232174 將如上述所得之圖型進一步進行燒烤後,可得到經硬 化之圖型。作爲燒烤溫度爲2 5 °C以上2 3 0 °C以下,較佳爲 2 5 °C以上2 0 0 °C以下,更佳爲2 5 °C以上I 6 0 °C以下,更較佳 爲25°C以上120°C以下。作爲燒烤時間爲1〜300分鐘,較 佳爲1〜180分鐘,更佳爲1〜60分鐘。 由本發明的著色感光性樹脂組成物,適宜地重複藉由 上述方法的圖型調製,可製作彩色過濾器。所得之彩色過 濾器可作爲構成零件的一部份,而設置於顯示裝置上,例 如可在液晶顯示裝置、有機EL裝置、固體攝像裝置、電 子紙等與著色影像關連的機器上以公知方法利用。 【實施方式】 〔實施例〕 以下’藉由實施例更詳細說明本發明。例中的「% 及「份」若無特別標記,則表示質量%及質量份。 合成例1 於具備迴流冷卻器、滴定漏斗及攪拌機的燒杯內流入 適量氮氣成爲氮氣環境,放入丙二醇單甲基醚乙酸酯100 份’一邊攪拌一邊加熱至85 °c。其次,於該燒杯內滴入溶 解甲基丙烯酸19份、3,4-環氧基三環〔5.2.1. 02.6〕癸基丙 烯酸酯(將式(I -1 )所示化合物及式(Π -1 )所示化合物 以莫耳比50: 50進行混合者)171份於丙二醇單甲基醚乙 酸酯40份的溶液’其爲使用滴入幫浦經約5小時滴入。 -56- 201232174 另一方面,將溶解聚合啓始劑2,2’-偶氮雙(2,4-二甲基戊 腈)26份於丙二醇單甲基醚乙酸酯120份的溶液,使用另 一滴入幫浦經約5小時滴入燒杯內。聚合啓始劑的滴入終 了後,在同溫度下保持約3小時,其後冷卻至室溫,得到 固體成分43.5%,酸價53mgKOH/g (固體成分換算)之樹 脂溶液Ba。所得之樹脂Ba的重量平均分子量Mw爲8000 ,分子量分佈(Mw/Mn)爲1.98。 合成例2 於具備攪拌機、溫度計、迴流冷卻管、滴定漏斗及氮 導入管的燒杯中,導入丙二醇單甲基醚乙酸酯123g,將燒 杯內環境由空氣改爲氮氣後,升溫至100 °C後,將於苯甲 基甲基丙烯酸酯72.6g(0.41莫耳)、甲基丙烯酸42.〇g( 0.49莫耳)、三環癸烷骨架的單甲基丙烯酸酯(日立化成 (股)製FA-513M) 23.0g(0.10莫耳)及丙二醇單甲基 醚乙酸酯137g所成的混合物中添加偶氮二異丁腈3.6g的 溶液,由滴定漏斗經2小時滴入燒杯中,進一步在丨〇(Γ(: 繼續進行5小時攪拌。其次,將燒杯內環境由氮氣改爲空 氣,將環氧丙基甲基丙烯酸酯21.3g〔 0.15莫耳、(對於 使用於本反應之甲基丙烯酸的羧基爲31莫耳%)〕、參三 甲基胺基甲基酚0.9g及氫醌0_145g投入於燒杯內,在 Π 〇°C繼續反應 6小時,得到固體成分38.3%,@胃 120.1mgKOH/g (固體成分換算)的樹脂溶液Bb。藉由 GPC測定之聚苯乙烯換算的重量平均分子量爲1〇,5〇〇,分 -57- 201232174 子量分佈(Mw/Mn)爲2.1。 合成例3 於具備攪拌機、溫度計、迴流冷卻管、滴定漏斗及氮 導入管的燒杯內,導入丙二醇單甲基醚乙酸酯125.lg,將 燒杯內環境自空氣改爲氮氣後,升溫至100 °C後,將於苯 甲基甲基丙烯酸酯96.0g(0.55莫耳)、甲基丙烯酸30.6g (0.36莫耳)、三環癸烷骨架的單甲基丙烯酸酯(日立化 成(股)製FA-513M) 22.0g(0.10莫耳)及丙二醇單甲 基醚乙酸酯149g所成的混合物添加偶氮二異丁腈3.6g的 溶液由滴定漏斗經2小時滴入燒杯內,進一步在l〇(TC繼 續進行5小時攪拌。其次將燒杯內環境自氮氣改爲空氣, 將環氧丙基甲基丙烯酸酯21.3g〔 0.15莫耳、(對於使用 於本反應的甲基丙烯酸之羧基爲42莫耳%)〕、參二甲基 胺基甲基酚〇.9g及氫醌0.145g投入於燒杯內,在1 l〇°C繼 續反應6小時,得到固體成分37.8%,酸價67.7mgKOH/g (固體成分換算)的樹脂溶液Be。藉由GPC所測定之聚 苯乙烯換算的重量平均分子量爲9,400,分子量分佈( Mw/Mn )爲 2.0。 合成例4 於具備迴流冷卻器、滴定漏斗及攪拌機的燒杯內將氮 以0.02L/分鐘的流速成爲氮氣環境,放入3-甲氧基-1-丁 醇200份及3-甲氧基丁基乙酸酯100份,一邊攪拌,一邊 -58- 201232174 加熱至70 °C。其次’將甲基丙烯酸54份、3,4-環氧基三 環〔 5.2.1.02 6〕癸基丙烯酸酯(式_( 1-1)所示化合物及 式(II-1 )所示化合物以莫耳比爲50 : 50下混合者)180 份及N -環己基馬來亞醯胺67份溶解於3 -甲氧基·1-丁醇 140份調製出溶液,將該溶解液使用滴入幫浦,經4小時 滴入於保溫70 °C的燒杯內。另一方面,將聚合啓始劑 2,2’-偶氮雙(2,4-二甲基戊腈)20份溶解於3-甲氧基丁基 乙酸酯240份的溶液,使用另一滴入幫浦,經4小時滴入 燒杯內。聚合啓始劑的溶液滴入終了後4小時保持於70 °C ,之後冷卻至室溫,得到固體成分32.6%,溶液酸價 34.3mg-KOH/g的樹脂溶液Bd之溶液。所得之樹脂Bd的 重量平均分子量Mw爲9000,分子量分佈(Mw/Mn)爲The alkoxy ruthenium compound may, for example, be 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene or 2-ethyl- 9,10-diethoxyanthracene, 9,10-dibutoxyanthracene, 2-ethyl-9,10-dibutoxyanthracene, and the like. Examples of the thioxanthone compound include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, and 1- Chloro-4-propoxythioxanthone and the like. Examples of the carboxylic acid compound include phenylsulfonyl acetic acid, methylphenylsulfonyl acetic acid, ethyl phenylsulfonyl acetic acid, methyl ethyl phenylsulfonyl-46 - 201232174 acetic acid, and dimethyl Phenyl sulfonyl acetic acid, methoxyphenylsulfonyl acetic acid, dimethoxyphenylsulfonyl acetic acid, chlorophenylsulfonyl acetic acid, dichlorophenylsulfonyl acetic acid, N-phenyl Glycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine, naphthyloxyacetic acid, and the like. The content of the polymerization initiator (D) is preferably from 0.1 to 40 parts by mass, more preferably from 1 to 30 parts by mass, per 100 parts by mass of the total of the resin (B) and the polymerizable compound (C). When the content of the polymerization initiator (D) is within this range, the pattern can be formed with high sensitivity, and the chemical resistance, mechanical strength, and surface smoothness of the pattern tend to be improved. When the polymerization start-up aid (D1) is used, the amount of the resin (B) and the polymerizable compound (C) is preferably 0.01 to 50 parts by mass, more preferably 0.1 part by mass. ~40 parts by mass. Further, each polymerization initiator (D) is 1 mole, preferably 〇.〇1 to 1 〇mol, more preferably 0.01 to 5 moles. When the amount of the polymerization initiation aid (D1) is within this range, the pattern can be further formed under high sensitivity, and the pattern productivity tends to be improved. Further, the colored photosensitive resin composition of the present invention may further contain a polyfunctional thiol compound (T). The polyfunctional thiol compound (T) is a compound having two or more sulfonyl groups in the molecule. Further, when a compound having two or more sulfonyl groups adjacent to an aliphatic hydrocarbon group is used, a pattern can be formed with high sensitivity, which is preferable. , 3 diethanol oxime ethyl thio bis, styrene diol sulfonate diester 3- hexane acid { 丁 乙 参 、 基 基 基 基 基 基 基 基 基 & & & & & & & & & & & & & 羟 羟 羟 羟 羟 羟 羟 羟Expanded di-tribasic alcohol, methylenedi-C alkyl ester bis-butyric acid sulfur 4-, acetamidine, A mesh 1 N1/base, ester oxime polyol acid is expanded to thiopropyl 3- as a dibasic { Alkane bis- sulfonate-47- 201232174 acid ester), butanediol bis(3-sulfonylpropionate), trimethylolpropane ginseng (3-sulfonylpropionate), trishydroxyl Propane ginseng (3-sulfonyl acetate), pentaerythritol bismuth (3-sulfonyl propionate), pentaerythritol bismuth (3-sulfonyl acetate), hydroxyethyl ginseng (3-sulfonate) Propionate), pentaerythritol oxime (3-sulfonylbutyrate), 1,4-bis(3-sulfonylbutoxy)butane, and the like. The content of the polyfunctional thiol compound (T) is preferably from 0.5 to 20 parts by mass, more preferably from 1 to 15 parts by mass, per 100 parts by mass of the polymerization initiator (D). When the content of the polyfunctional thiol compound (T) is within this range, the sensitivity tends to be high, and the developability tends to be good. The solvent (E) is not particularly limited, and a solvent generally used in the field can be used. For example, an ether solvent (solvent containing -COO- in the molecule, a solvent not containing ruthenium), an ether solvent other than the ester solvent (a solvent containing -〇-, not containing -COO· in the molecule), or an ether ester solvent can be used ( a solvent containing -COO- and -〇- in the molecule), a ketone solvent other than an ester solvent (a solvent containing -CO- in the molecule, a solvent not containing -coo-), an alcohol solvent, an aromatic hydrocarbon solvent, a guanamine solvent, and Methyl Yafeng. These solvents may be used alone or in combination of two or more kinds. Examples of the ester solvent include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutanoate, ethyl acetate, n-butyl acetate, isobutyl acetate, amyl acetate, and isoamyl acetate. Ester, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetate, ethyl acetate, Cyclohexanol acetate, γ-butyrolactone, and the like. -48- 201232174 Examples of the ether solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, and diethylene glycol monomethyl. Ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy- 1-butanol, 3-methoxy-3-methylbutanol, tetrahydrofuran, tetrahydropyran, 1,4-dioxane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, two Ethylene glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenethyl ether, methyl anisole, and the like. Examples of the ether ester solvent include methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, and 3-methoxypropionic acid. Methyl ester, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-methoxypropionate, 2-methoxypropionic acid Ethyl ester, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-methoxy-2-methylpropionate, 2- Ethyl ethoxy-2-methylpropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol Monoethyl ether acetate, propylene glycol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate , diethylene glycol monobutyl ether acetate, and the like. Examples of the ketone solvent include 4-hydroxy-4-methyl-2-pentanone' acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, and 4-methyl-2-pentyl Ketone, cyclopentanone, cyclohexanone, isophorone and the like. Examples of the alcohol solvent include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin. -49- 201232174 Examples of the aromatic hydrocarbon solvent include benzene, toluene, xylene, and mesitylene. The guanamine solvent may, for example, be N,N-dimethylformamide, N,N-dimethylacetamide or N-methylpyrrolidone. Among the above solvents, from the viewpoint of coatability and drying properties, an organic solvent having a boiling point of from 1 m ° C to 180 ° C or less is preferred. Among them, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, and the like are preferred. The content of the solvent (E) is preferably from 60 to 95% by mass, more preferably from 70 to 90% by mass, based on the total amount of the photosensitive resin composition. In other words, the solid content of the colored photosensitive resin composition is preferably from 5 to 40% by mass, more preferably from 1 to 30% by mass. When the content of the solvent (E) is within the above range, the flatness at the time of coating tends to be good. The colored photosensitive resin composition of the present invention preferably contains a surfactant (F). The surfactant may, for example, be a polyfluorene-based surfactant, a fluorine-based surfactant, or a polyfluorene-based surfactant having a fluorine atom. When the surfactant is contained, the flatness at the time of coating tends to be good. 〇 As the polyoxynene surfactant, an interface having a decane bond can be mentioned. Specific examples thereof include Toray polyoxygen DC3PA, same SH7PA, same DC11PA, same SH21PA, same SH28PA, same SH29PA, same SH30PA, and polyether modified polyoxyxene SH8400 (trade name: Toray. Dow Corning). KP321, KP322, KP323, KP324, KP326, KP340, KP341 (Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, -50- 201232174 TSF4445, TSF-4446, TSF4452, TSF4460 (Momentive Performance Materials 'Japan contract company system) and so on. The fluorine-based surfactant is a surfactant having a fluorocarbon chain. Specifically, Furorina (registered trademark) FC430, FC431 (Sumitomo 3M (share) system), megafac (registered trademark) F142D, F171, F172, F173, F177, F183, R30 (DIC) )), f-top (registered trademark) EF301, EF3 03, EF351, EF 3 5 2 (Mitssubishi Materials Corporation), Surflon (registered trademark) S381, same as S382, same as SC101 It is the same as SC105 (Asahi Glass Co., Ltd.) and E5 84 4 (manufactured by Daikin Fine Chemical Research Institute). Examples of the polyfluorene-based surfactant having a fluorine atom include a surfactant having a siloxane chain and a fluorocarbon chain. Specific examples include megafac (registered trademark) R〇8, the same BL20, the same F475, the same F477, and the same F443 (DIC system). Preferably, the megafac (registered trademark) F475 ° surfactant (F) is 0.001% by mass or more and more preferably 0.02% by mass or more based on the total amount of the colored photosensitive resin composition of the present invention. · 1% by mass or less, more preferably 0.01% by mass or more and 0.05% by mass or less. When the surfactant is contained in this range, the flatness of the coating film can be improved. The colored photosensitive resin composition of the present invention may contain various additives such as a chelating agent, other polymer compound, adhesion promoter, antioxidant, ultraviolet absorber, light stabilizer, and chain shifting agent as necessary. -51 - 201232174 The colored photosensitive resin composition of the present invention ' can be prepared, for example, as follows. First, the pigment of the colorant (A) is mixed with the solvent (E) until the average particle diameter of the pigment is 0. 2 μm or less, and is dispersed by using a bead mill or the like. At this time, a part or all of the pigment dispersant and the resin (B) may be added as necessary. In the obtained pigment dispersion liquid, 'addition of the resin (B), the polymerizable compound (C), the polymerization initiator (D), and other components used as necessary, and further adding the necessary additional solvent to the predetermined concentration, A colored photosensitive resin composition for the purpose can be obtained. The colored photosensitive resin composition of the present invention is processed in a color filter by, for example, the steps shown in the following (1) to (4). (1) a step of applying a colored photosensitive resin composition of the present invention to a substrate to obtain a coating film (2) a step of exposing the coating film to a coating film after exposure to a coating film (3) After the exposure, the coating film is imaged in an alkali developing solution to obtain a pattern (4). The step of obtaining a hardened pattern by baking the pattern is used as a method for obtaining a pattern, and light can be cited. Etching method, spraying method, printing method, and the like. Among them, photolithography is also preferred. The photolithography method is a method in which the colored photosensitive resin composition is applied onto a substrate, dried, and exposed by a photomask to obtain a pattern by development. Examples of the substrate include glass, metal, and plastic, and may be in the form of a plate or a film. -52- 201232174 Examples of the plastic material include polyolefins such as polyethylene, polypropylene, and decene-based polymers, polyvinyl alcohol, polyethylene terephthalate, polyethylene naphthalate, and poly (Meth) acrylate, cellulose ester, polycarbonate, polyfluorene, polyether maple, polyether ketone, polyphenylene sulfide, and polyphenylene oxide. The (meth)acrylic acid is at least one selected from the group consisting of acrylic acid and methacrylic acid. A structure such as a color filter, various insulating or conductive films, and a driver circuit can be formed on these substrates. The colored photosensitive resin composition of the present invention is particularly useful in forming a pattern on a plastic substrate because it can be formed in a pattern which is hardened at a low temperature. Examples of the method of applying the substrate include an extrusion coating method, a twin roll coating method, a reverse gravure coating coating method, a CAP coating method, and a slit coating method. Further, an impregnation coater, a roll coater, a bar coater, a spin coater, a slit & spin coater, a slit coater (sometimes referred to as a slit coater, a shower curtain) may be used. Coating is performed by a coating device such as a coater or a spin coater or a spray. Among them, coating by a slit coating, a spin coater, roll coating or the like is also preferred. Examples of the film drying method applied to the substrate include a method of heat drying, natural drying, air drying, and reduced pressure drying. It can also be carried out by combining a plurality of methods. As the drying temperature, it is preferably -120 ° C or more preferably 25 to 100 ° C. Further, as the heating time, it is preferably from 1 sec to 60 minutes, and preferably from 30 seconds to 30 minutes. It is preferred to carry out the drying under reduced pressure to a pressure of 50 to 150 Pa at a temperature of 20 to 25 °C. -53- 201232174 The film thickness of the coating film after drying is not particularly limited, and can be appropriately adjusted by materials, applications, etc., and is generally 〇"~20 μιη, 1~6 μηι 〇 dried coating film Light exposure used to form the target pattern. At this time, the shape of the pattern on the photomask is not particularly limited, and a pattern shape for the purpose of use is used. As the light source used for the exposure, a light source that generates light of 250 to 450 nm is preferable. For example, light of less than 350 nm may be blocked by a filter of a wavelength region, or light of a vicinity of 436 nm, near 3 65 nm may be selectively extracted by using a wavelength filter. . Specific examples thereof include a mercury lamp, a light-emitting device, a metal halide lamp, and a halogen lamp. Preferably, the entire surface of the exposure surface is uniformly irradiated with parallel light, or the correct position of the substrate is to be adjusted, and a mask is used for exposure to expose the aligner, and a lithography machine or the like is preferred. After the exposure, the coating film is brought into contact with the developing solution to dissolve the predetermined portion of the unexposed portion, and a pattern can be obtained by developing the image. As the development, an organic solvent can be used, and the exposed portion of the coating film is swollen in the developing solution to swell, and a pattern having a good shape cannot be obtained, and an alkali compound solution is preferably used. The development method may be either a Pudling process or an immersion fog method. It is preferable to tilt the substrate to an arbitrary angle during development and then perform water washing. Preferably, the shield is used to cooperate with a wavelength blocking the 4 0 8 nm band-pass diode photomask (Mask, for example, a solution, although the water method or the spray of the difficult matter can be -54-201232174 as the alkali Examples of the compound include sodium hydroxide, potassium hydroxide, disodium hydrogen citrate, sodium dihydrogen citrate, diammonium hydrogen citrate, ammonium dihydrogen citrate, potassium dihydrogen citrate, sodium citrate, potassium citrate, sodium carbonate, An inorganic basic compound such as potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium borate, potassium borate or ammonia; and tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, An organic basic compound such as dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoisopropylamine, diisopropylamine or ethanolamine. The basic compound is potassium hydroxide, sodium hydrogencarbonate and tetramethyl. The concentration of the basic compound in the aqueous solution is preferably 0.01 to 10% by mass, more preferably 0.03 to 5% by mass. The aqueous solution of the basic compound may also contain a surfactant. Polyethylene oxide alkane Ether, polyethylene oxide aryl ether, polyethylene oxide alkyl aryl ether, other polyethylene oxide derivatives, oxy-ethyl/oxypropanyl chimeric copolymer, sorbitan fat Acid ester, polyethylene oxide sorbitan fatty acid ester 'polyethylene oxide sorbitol fatty acid ester, glycerin fatty acid ester, polyethylene oxide fatty acid ester, polyethylene oxide alkylamine, etc. Ionic surfactant; sodium lauryl sulfate, sodium oleyl sulfate, sodium lauryl sulfate, ammonium lauryl sulfate, sodium dodecylbenzenesulfonate, sodium dodecyl naphthylsulfonate, etc. a surfactant; and a cationic surfactant such as stearylamine hydrochloride or lauryl trimethylammonium chloride. The concentration of the surfactant in the aqueous solution of the basic compound is preferably 0.01 to 10% by mass. More preferably, it is 5 to 8 mass%, and particularly preferably 〇1 to 5 mass%. -55- 201232174 After further grilling the pattern obtained as described above, a hardened pattern can be obtained. The temperature is 2 5 ° C or more and 2 3 0 ° C or less, preferably 2 5 ° C or more and 200 ° C or less, more preferably 2 5 ° C or more I 60 ° C or less, more preferably 25 ° C or more and 120 ° C or less. The baking time is 1 to 300 minutes, preferably 1 to 180 minutes, more preferably 1 to 60 minutes. In the colored photosensitive resin composition of the invention, a color filter can be produced by repeating the pattern modulation by the above method. The obtained color filter can be provided as a part of the constituent parts on the display device, for example, The liquid crystal display device, the organic EL device, the solid-state imaging device, the electronic paper, and the like are connected to the color image by a known method. [Embodiment] [Embodiment] Hereinafter, the present invention will be described in more detail by way of examples. "%" and "parts" unless otherwise marked, mean % by mass and parts by mass. Synthesis Example 1 An appropriate amount of nitrogen gas was introduced into a beaker having a reflux condenser, a titration funnel, and a stirrer to form a nitrogen atmosphere, and 100 parts of propylene glycol monomethyl ether acetate was placed and heated to 85 °C while stirring. Next, 19 parts of dissolved methacrylic acid and 3,4-epoxytricyclo[5.2.1.02.6]decyl acrylate (the compound represented by the formula (I-1) and the formula (Π) were dropped into the beaker. -1) The compound shown in a molar ratio of 50:50 was mixed with 171 parts of a solution of 40 parts of propylene glycol monomethyl ether acetate, which was dropped over about 5 hours using a drip pump. -56- 201232174 On the other hand, a solution of 26 parts of 2,2'-azobis(2,4-dimethylvaleronitrile) 2 parts of propylene glycol monomethyl ether acetate dissolved in a polymerization initiator was used. Another drop into the pump was dropped into the beaker for about 5 hours. After the completion of the dropwise addition of the polymerization initiator, the mixture was kept at the same temperature for about 3 hours, and then cooled to room temperature to obtain a resin solution Ba having a solid content of 43.5% and an acid value of 53 mgKOH/g (in terms of solid content). The obtained resin Ba had a weight average molecular weight Mw of 8,000 and a molecular weight distribution (Mw/Mn) of 1.98. Synthesis Example 2 In a beaker equipped with a stirrer, a thermometer, a reflux cooling tube, a titration funnel, and a nitrogen introduction tube, 123 g of propylene glycol monomethyl ether acetate was introduced, and the atmosphere inside the beaker was changed from nitrogen to nitrogen, and then the temperature was raised to 100 ° C. After that, it will be 72.6 g (0.41 mol) of benzyl methacrylate, 42. g of methacrylic acid (0.49 mol), and a monomethacrylate of tricyclodecane skeleton (manufactured by Hitachi Chemical Co., Ltd.). FA-513M) A solution of 3.6 g of azobisisobutyronitrile was added to a mixture of 23.0 g (0.10 mol) and propylene glycol monomethyl ether acetate (137 g), and the mixture was dropped into a beaker for 2 hours from a titration funnel. In 丨〇 (Γ (: continue for 5 hours of stirring. Secondly, change the environment inside the beaker from nitrogen to air, epoxy methacrylate 21.3g [0.15 mol, (for the methyl group used in this reaction) The carboxyl group of acrylic acid was 31 mol%), 0.9 g of trimethylaminomethylphenol and 0_145 g of hydroquinone were placed in a beaker, and the reaction was continued at Π ° C for 6 hours to obtain a solid component of 38.3%, @胃120.1 MgKOH/g (solid content conversion) resin solution Bb. The weight average molecular weight in terms of ethylene was 1 〇, 5 〇〇, and the sub-57-201232174 sub-quantity distribution (Mw/Mn) was 2.1. Synthesis Example 3 was equipped with a stirrer, a thermometer, a reflux cooling tube, a titration funnel, and a nitrogen introduction tube. In the beaker, 125.lg of propylene glycol monomethyl ether acetate was introduced, and the atmosphere in the beaker was changed from nitrogen to nitrogen. After heating to 100 ° C, 96.0 g (0.55 m) of benzyl methacrylate was added. 30.6 g (0.36 mol) of methacrylic acid, monomethacrylate of tricyclodecane skeleton (FA-513M manufactured by Hitachi Chemical Co., Ltd.) 22.0 g (0.10 mol) and propylene glycol monomethyl ether acetate 149 g of the resulting mixture was added with a solution of 3.6 g of azobisisobutyronitrile, and the mixture was dropped into a beaker over 2 hours from the titration funnel, and further stirred at 5 °C for 5 hours. Next, the atmosphere in the beaker was changed from nitrogen to air. Epoxypropyl methacrylate 21.3 g [0.15 mol, (42 mol% for the carboxyl group of methacrylic acid used in the present reaction)], dimethylaminomethylphenol quinone. 9 g and hydrogen醌 0.145g was placed in a beaker, and the reaction was continued at 1 l ° C for 6 hours to obtain a solid. A resin solution Be of 37.8% and an acid value of 67.7 mgKOH/g (in terms of solid content). The polystyrene-equivalent weight average molecular weight measured by GPC was 9,400, and the molecular weight distribution (Mw/Mn) was 2.0. Nitrogen was introduced into a nitrogen atmosphere at a flow rate of 0.02 L/min in a beaker equipped with a reflux condenser, a titration funnel, and a stirrer, and 200 parts of 3-methoxy-1-butanol and 3-methoxybutylacetic acid were placed. 100 parts of the ester, while stirring, heated from -58 to 201232174 to 70 °C. Next, '54 parts of methacrylic acid, 3,4-epoxytricyclo [5.2.1.02 6] mercapto acrylate (the compound represented by the formula (1-1) and the compound represented by the formula (II-1)) 180 parts of molar ratio of 50:50) 180 parts and 67 parts of N-cyclohexylmaleimide dissolved in 140 parts of 3-methoxy-1-butanol to prepare a solution, and the solution was dropped into it. The pump was dropped into a beaker at 70 ° C for 4 hours. On the other hand, 20 parts of the polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) was dissolved in a solution of 240 parts of 3-methoxybutyl acetate, and another solution was used. Drop into the pump and drip into the beaker over 4 hours. The solution of the polymerization initiator was kept at 70 ° C for 4 hours after the completion of the dropwise addition, and then cooled to room temperature to obtain a solution of a resin component Bd having a solid content of 32.6% and a solution acid value of 34.3 mg-KOH/g. The obtained resin Bd had a weight average molecular weight Mw of 9000 and a molecular weight distribution (Mw/Mn) of

合成例5 於具備攪拌機、溫度計、迴流冷卻器、滴定漏斗及氣 體導入管的燒杯,導入丙二醇單甲基醚乙酸酯250份。其 後’將氮氣使用氣體導入管導入於燒杯內,燒杯內環境由 氮氣所取代。其後,將燒杯內的溶液升溫至1 00°C後,將 由苯甲基甲基丙烯酸酯152.6份、甲基丙烯酸41.7份、偶 氮二異丁腈1.5份及丙二醇單甲基醚乙酸酯150份所成的 混合物使用滴定漏斗經2小時滴入於燒杯內,滴入完了後 -59- 201232174 進一步在10(TC繼續進行2.5小時攪拌,得到重量平均分 子量Mw爲2·3χ104,固體成分34%,溶液酸價47mg-KOH/g 的樹脂溶液Be。 在合成例所得之樹脂的重量平均分子量(Mw)及數 平均分子量(Μη )之測定使用GPC法,以以下條件進行 裝置;Κ2479 ((股)島津製作所製)Synthesis Example 5 In a beaker equipped with a stirrer, a thermometer, a reflux condenser, a titration funnel, and a gas introduction tube, 250 parts of propylene glycol monomethyl ether acetate was introduced. Thereafter, nitrogen gas was introduced into the beaker using a gas introduction pipe, and the atmosphere inside the beaker was replaced by nitrogen gas. Thereafter, after raising the temperature in the beaker to 100 ° C, 152.6 parts of benzyl methacrylate, 41.7 parts of methacrylic acid, 1.5 parts of azobisisobutyronitrile, and propylene glycol monomethyl ether acetate were added. 150 parts of the resulting mixture was dropped into the beaker using a titration funnel over 2 hours, and after the completion of the dropwise addition, -59-201232174, further at 10 (TC was continued for 2.5 hours, and the weight average molecular weight Mw was 2·3χ104, and the solid content was 34. %, a resin solution of a solution acid value of 47 mg-KOH/g Be. The weight average molecular weight (Mw) and the number average molecular weight (?n) of the resin obtained in the synthesis example were measured by the GPC method under the following conditions; Κ 2479 (( Stock) Shimadzu Manufacturing Co., Ltd.)

管柱;SHIMADZU Shim-pack GPC-80MPipe string; SHIMADZU Shim-pack GPC-80M

管柱溫度;40°C 溶劑;THF (四氫呋喃) 流速;1 · OmL/min 檢測器;Ri 將上述所得之聚苯乙烯換算的重量平均分子量及數平 均分子量的比(Mw/Mn )作爲分子量分佈。 實施例1 〔著色感光性樹脂組成物1之調製〕 混 合 顔 料 ; C. I.色素紅1 7 7 49 份 聚 酯 系 顏 料分散劑 16 份 樹 脂 溶 液 Be 29 份 丙 二 醇 單 甲基醚乙酸酯 280份 ,使用珠磨機充分分散顏料之顔料分散液A, 混合 -60- 201232174 顏料:c_l.色素紅254 5.9份 丙烯酸系顏料分散劑 2.2份 樹脂溶液Be 4.9份 丙二醇單甲基醚乙酸酯 29份 ,使用珠磨機充分分散的顏料之顏料分散液B, 混合 樹脂(B1 ):樹脂溶液Ba 126份、 樹脂(B2 ):樹脂溶液Bb 72份、 聚合性化合物:二季戊四醇六丙烯酸酯 (KAYARAD DPHA ;日本化藥(股)製)63份、 聚合啓始劑:N-苯甲醯氧基-1-(4-苯基磺醯基苯基) 辛院-1-酮-2-亞胺(IrgacureOXE-Ol; BASFJapan 公司製 ) 9.4 份、 溶劑:丙二醇單甲基醚乙酸酯 313份、及 界面活性劑:聚醚變性聚矽氧油(Toray聚矽氧 SH8400 ; TorayDowCorning (股)製) 0.02 份 ,得到著色感光性樹脂組成物1。 實施例2 〔著色感光性樹脂組成物2之調製〕 混合 顏料:C.I.色素黃色139 18份 聚酯系顏料分散劑 7.2份 樹脂溶液Be 13份 -61 - 201232174 丙二醇單甲基醚乙酸酯 116份 ,使用珠磨機充分分散顏料之顏料分散液A, 混合 顏料:C.I.色素紅1 77 72份 聚酯系顔料分散劑 20份 樹脂溶液Be 61份 丙二醇單甲基醚乙酸酯 310份 ,使用珠磨機充分分散顏料之顏料分散液B, 混合 樹脂(B1 ):樹脂溶液Ba 90份、 樹脂(B2 ):樹脂溶液Be 78份、 聚合性化合物:二季戊四醇六丙烯酸酯 (KAYARAD DPHA ;日本化藥(股)製)40份、 聚合啓始劑:N-苯甲醯氧基-1-(4-苯基磺醯基苯基) 辛烷-1-酮-2-亞胺(IrgacureOXE-Ol ; BASFJapan 公司製 ) 8.1 份、 溶劑:丙二醇單甲基醚乙酸酯 165份、及 界面活性劑:聚醚變性聚矽氧油(Toray聚矽氧 SH8400; TorayDowCorning (股)製) 0.02 份 ,得到著色感光性樹脂組成物2。 實施例3 〔著色感光性樹脂組成物3之調製〕 混合 -62- 201232174 顏料:C.I.色素紅254 5 1份 聚酯系顏料分散劑 1 5份 丙二醇單甲基醚乙酸酯 287份 ,使用珠磨機充分分散顏料之顏料分散液後,混合 樹脂(B1 ):樹脂溶液Ba 184份 樹脂(B2 ):樹脂溶液Bb 50份 聚合性化合物:二季戊四醇六丙烯酸酯 (KAYARAD DPHA ;日本化藥(股)製)64份 聚合啓始劑:N-苯甲醯氧基-1-(4-苯基磺醯基苯基) 辛院-1-酮-2-亞胺(IrgacureOXE-Ol; BASFJapan 公司製 ) 13份 溶劑:丙二醇單甲基醚乙酸酯 336份 界面活性劑:聚醚變性聚矽氧油(Toray聚矽氧 SH8400; TorayDowCorning (股)製) 0.02 份 ,得到著色感光性樹脂組成物3。 實施例4 〔著色感光性樹脂組成物4之調製〕 混合 顏料:C.I.色素綠36 14份 聚酯系顏料分散劑 2.7份 樹脂溶液Be 4.0份 丙二醇單甲基醚乙酸酯 56份 ,使用珠磨機充分分散顏料之顏料分散液A, -63- 201232174 混合 顏料:C.I.色素黃色138 12份 聚酯系顔料分散劑 2.5份 樹脂溶液B e 1.9份 丙二醇單甲基醚乙酸酯 66份 使用珠磨機充分分散顏料之顏料分散液B, 混合 樹脂(B1):樹脂溶液Ba 142份、 樹脂(B 2 ):樹脂溶液B c 4 1份、 聚合性化合物:二季戊四醇六丙烯酸酯 (KAYARAD DPHA ;日本化藥(股)製)8〇份、 聚合啓始劑:N-苯甲醯氧基-1- ( 4-苯基磺醯基苯基) 辛烷-1 -酮-2-亞胺(IrgacureOXE-O 1 ; B ASFJapan 公司製 ) 9.6 份、 溶劑:丙二醇單甲基醚乙酸酯 5 70份、及 界面活性劑:聚醚變性聚砂氧油(Toray聚砂氧 SH8400; TorayDowCorning (股)製) 0.02 份 ’得到著色感光性樹脂組成物4。 實施例5 〔著色感光性樹脂組成物5之調製〕 混合 顏料:C.I.色素綠58 53份 丙烯酸系顏料分散劑 1 1份 -64- 201232174 樹脂溶液Be 62份 丙二醇單甲基醚乙酸酯 251份 ,使用珠磨機充分分散顏料之顏料分散液A, 混合 顔料:C.I·色素黃色1 3 8 30份 聚酯系顏料分散劑 4.4份 樹脂溶液B e 31份 丙二醇單甲基醚乙酸酯 136份 ,使用珠磨機充分分散顏料之顏料分散液B, 混合 樹脂(B1 ):樹脂溶液Ba 18份、 樹脂(B2):樹脂溶液Bb 147份、 聚合性化合物:二季戊四醇六丙烯酸酯 (KAYARAD DPHA ;日本化藥(股)製)64份、 聚合啓始劑:N-苯甲醯氧基-1-(4-苯基磺醯基苯基) 辛院-1-酮-2-亞胺(IrgacureOXE-Ol; BASFJapan 公司製 ) 13 份、 溶劑:丙二醇單甲基醚乙酸酯 181份、及 界面活性劑:聚醚變性聚矽氧油(Toray聚矽氧 SH8400; TorayDowCorning (股)製) 0.02 份 ,得到著色感光性樹脂組成物5。 實施例6 〔著色感光性樹脂組成物6之調製〕 -65- 201232174 混合 顏料:c.I.色素紅1 77 28份 顏料:C.I.色素紅254 86份 聚酯系顏料分散劑 1〇份 樹脂溶液Be 27份 丙二醇單甲基醚乙酸酯 403份 ,使用珠磨機充分分散顏料之顏料分散液後混合 樹脂(B1 ):樹脂溶液Bd 87份 樹脂(B2 ):樹脂溶液Bb 99份 聚合性化合物:二季戊四醇六丙烯酸酯 (曰本化藥(股)製) 3 3份 聚合啓始劑:2 -甲基-2 -嗎咐代-1-( 4 -甲基碌酿基苯 基)丙院-1-酮(Irgacure907; BASFJapan 公司製)13 份 聚合啓始助劑:4,4’-雙(二乙基胺基)二苯甲酮 (EAB-F ;保土谷化學工業(股)製) 7.6份 溶劑:丙二醇單甲基醚乙酸酯 294份 ’得到著色感光性樹脂組成物6。 比較例1 t著色感光性樹脂組成物7之調製〕 混合 顔料:C . I.色素紅1 7 7 2 8份 顔料:C · I ·色素紅2 5 4 8 6份 聚酯系顔料分散劑 1 〇份 -66- 201232174 樹脂溶液B e 2 7份 丙二醇單甲基醚乙酸酯 404份 ,使用珠磨機充分分散顏料之顏料分散液後混合 樹脂:樹脂溶液Bd 1 6 9份 聚合性化合物:二季戊四醇六丙烯酸酯 (曰本化藥(股)製) 32份 聚合啓始劑:2-甲基-2-嗎啉代-1- ( 4-甲基磺醯基苯 基)丙院-1-嗣(Irgacure907; BASFJapan 公司製)12 份 聚合啓始助劑:4,4’-雙(二乙基胺基)二苯甲酮 (EAB-F ;保土谷化學工業(股)製) 7.4份 溶劑:丙二醇單甲基醚乙酸酯 92份 3-甲氧基-1-丁醇 67份 3-甲氧基丁基乙酸酯 67份 ,得到著色感光性樹脂組成物7。 <圖型之製作> 於邊長2英吋的正方形玻璃板上貼合PET薄膜( Toray製LUMIRROR75-T60)製作成基板。於基板的PET 薄膜側上,將著色感光性樹脂組成物藉由轉動塗佈法進行 塗佈,加熱板上在60 °C下進行2分鐘預燒烤。冷卻後將塗 佈該著色感光性樹脂組成物之基板與石英玻璃製光罩之間 隔成 150μιη,使用曝光機(TME-150RSK ; T0PC0N (股) 製),在大氣環境下以150mJ/cm2的曝光量( 365nm基準 )進行光照射。且作爲光罩’使用形成10〜100 Km的線與 -67- 201232174 間隔圖型者。經光照射後,於含有非離子系界面活性劑 0.1 2 %與氫氧化鉀〇 · 0 4 %的水系顯像液中,在2 3 °c進行4 0 秒浸漬後顯像,以純水洗淨形成圖型。將所得之圖型膜厚 使用膜厚測定裝置(DEKTAK3 ;日本真空技術(股)製) 進行測定後得知爲2μιη。 將與上述同樣地所形成之圖型,進一步在50 °C進行5 分鐘加熱(後燒烤),得到經硬化之圖型。又,將與上述 同樣地所形成的圖型,進一步在100 °C進行5分鐘加熱( 後燒烤),得到經硬化之圖型。將所得之經硬化的圖型膜 厚與上述同樣地進行測定後皆爲2μηι。 <耐溶劑性評估> 於前述基板上所形成之圖型上,滴入lml的丙二醇單 甲基醚乙酸酯,靜止30秒後,使用旋轉塗佈機以轉數 1000 rpm進行10秒轉動,將圖型上的丙二醇單甲基醚乙 酸酯甩'去。 由在與丙二醇單甲基醚乙酸酯之接觸前後所測定之膜 厚値計以下述式計算出膜厚保持率。膜厚保持率越高硬化 性越良好,製作彩色過濾器時可預防混色。結果如表1所 示。 (膜厚保持率)(%)==(接觸後之膜厚)/(接觸前之膜厚) <解像度評估> -68- 201232174 將所得之圖型以雷射顕微鏡(Axio Imager MAT Carl Zeiss公司製)進行觀察,將解像之最小尺寸作爲解像度 。解像度越高,可製造出越高精細的彩色過濾器。結果如 表1所示。 【表1】 實施 例1 實施 例2 實施 例3 實施 例4· 實施 例5 實施 例6 比較 例 類烤 溫度 著色感光性 樹脂組成物 1 2 3 4 5 6 7 無 解像度("m) 10 2 0 2 0 2 0 2 0 3 0 4 0 膜厚保持率(%) 9 0 9 0 9 7 9 0 9 8 9 0 8 7 5 0¾ 解像度(“ m) 10 2 0 2 0 2 0 2 0 3 0 4〇 膜厚保持率(%) 9 2 9 1 9 7 9: 1 9 8 9 0 8 8 10 0¾ 解像度(/1 m) 10 2 0 2 0 2 0 2 0 3 0 4 0 膜厚保持率(%) 9 2 9 2 9 7 9 2 9 8 9 1 8 7 使用實施例的著色感光性樹脂組成物所形成之圖型被 確認具有優良解像性。又,即使不進行如超過200t高溫 下的燒烤步驟之情況下,亦被確認到具有優良耐溶劑性。 由此得知即使用耐熱性低的基板,亦可得到高精細且高品 質的彩色過濾器。 產業上可利用性 所謂本發明的著色感光性樹脂組成物,係可得到解像 性高之圖型及高品質彩色過濾器。 -69-Column temperature; 40 ° C solvent; THF (tetrahydrofuran) flow rate; 1 · OmL / min detector; Ri The polystyrene-converted ratio of weight average molecular weight and number average molecular weight (Mw / Mn) obtained above as molecular weight distribution . Example 1 [Preparation of coloring photosensitive resin composition 1] Mixed pigment; CI color red 1 7 7 49 parts of polyester-based pigment dispersant 16 parts of resin solution Be 29 parts of propylene glycol monomethyl ether acetate 280 parts, used Bead mill fully disperse pigment pigment dispersion A, mixed -60- 201232174 Pigment: c_l. Pigment red 254 5.9 parts acrylic pigment dispersant 2.2 parts resin solution Be 4.9 parts propylene glycol monomethyl ether acetate 29 parts, use Pigment dispersion liquid B of the pigment which is sufficiently dispersed in the bead mill, mixed resin (B1): 126 parts of resin solution Ba, resin (B2): 72 parts of resin solution Bb, polymerizable compound: dipentaerythritol hexaacrylate (KAYARAD DPHA; Japan Chemicals (stock) system 63 parts, polymerization initiator: N-benzylidene-1-(4-phenylsulfonylphenyl) xinyuan-1-one-2-imine (IrgacureOXE- Ol; BASFJapan Co., Ltd.) 9.4 parts, solvent: 313 parts of propylene glycol monomethyl ether acetate, and surfactant: polyether-denatured polysiloxane (Toray polyoxo SH8400; Toray Dow Corning Co., Ltd.) 0.02 parts, Coloring sensitivity 1 lipid composition. Example 2 [Preparation of coloring photosensitive resin composition 2] Mixed pigment: CI pigment yellow 139 18 parts of polyester-based pigment dispersant 7.2 parts of resin solution Be 13 parts - 61 - 201232174 Propylene glycol monomethyl ether acetate 116 parts , using a bead mill to fully disperse the pigment dispersion A of the pigment, mixed pigment: CI pigment red 1 77 72 parts polyester pigment dispersant 20 parts resin solution Be 61 parts propylene glycol monomethyl ether acetate 310 parts, using beads The pigment dispersion dispersion B of the pigment is sufficiently dispersed in the mill, the mixed resin (B1): resin solution Ba 90 parts, resin (B2): resin solution Be 78 parts, polymerizable compound: dipentaerythritol hexaacrylate (KAYARAD DPHA; Nippon Chemical (Stock) 40 parts, polymerization initiator: N-benzylideneoxy-1-(4-phenylsulfonylphenyl) octane-1-one-2-imine (Irgacure OXE-Ol; 8.1 parts, solvent: propylene glycol monomethyl ether acetate 165 parts, and surfactant: polyether modified polyoxylized oil (Toray polyoxyl SH8400; TorayDowCorning (manufactured by Toray) Co., Ltd.) 0.02 parts, coloring Photosensitive resin composition 2. Example 3 [Preparation of coloring photosensitive resin composition 3] Mixing -62 - 201232174 Pigment: CI coloring red 254 5 1 part of polyester-based pigment dispersing agent 1 part of propylene glycol monomethyl ether acetate 287 parts, using beads After the mill sufficiently disperses the pigment dispersion of the pigment, the resin (B1) is mixed: resin solution Ba 184 parts of resin (B2): resin solution Bb 50 parts of polymerizable compound: dipentaerythritol hexaacrylate (KAYARAD DPHA; Nippon Chemical Co., Ltd. ))) 64 parts of polymerization initiator: N-benzylideneoxy-1-(4-phenylsulfonylphenyl) xinyuan-1-one-2-imine (Irgacure OXE-Ol; manufactured by BASF Japan 13 parts of solvent: propylene glycol monomethyl ether acetate 336 parts of surfactant: polyether-denatured polysiloxane (Toray polyoxyl SH8400; manufactured by Toray Dow Corning Co., Ltd.) 0.02 parts to obtain a colored photosensitive resin composition 3 . Example 4 [Preparation of Colored Photosensitive Resin Composition 4] Mixed Pigment: CI Pigment Green 36 14 parts of polyester-based pigment dispersant 2.7 parts of resin solution Be 4.0 parts of propylene glycol monomethyl ether acetate 56 parts, using bead mill Machine to fully disperse pigment pigment dispersion A, -63- 201232174 Mixed pigment: CI pigment yellow 138 12 parts polyester pigment dispersant 2.5 parts resin solution B e 1.9 parts propylene glycol monomethyl ether acetate 66 parts using bead mill The pigment dispersion liquid B of the pigment is sufficiently dispersed, the mixed resin (B1): 142 parts of the resin solution Ba, the resin (B 2 ): the resin solution B c 4 1 part, the polymerizable compound: dipentaerythritol hexaacrylate (KAYARAD DPHA; Japan Chemical Co., Ltd.) 8 parts, polymerization initiator: N-benzylideneoxy-1-(4-phenylsulfonylphenyl)octane-1-one-2-imine (IrgacureOXE -O 1 ; B ASFJapan Co., Ltd.) 9.6 parts, solvent: propylene glycol monomethyl ether acetate 5 70 parts, and surfactant: polyether denatured polyoxynose oil (Toray polysilica SH8400; TorayDowCorning ) 0.02 parts of 'a colored photosensitive resin composition 4 was obtained. Example 5 [Preparation of coloring photosensitive resin composition 5] Mixed pigment: CI pigment green 58 53 parts Acrylic pigment dispersant 1 1 part - 64 - 201232174 Resin solution Be 62 parts of propylene glycol monomethyl ether acetate 251 parts , using a bead mill to fully disperse the pigment dispersion A of the pigment, mixed pigment: CI·pig yellow 1 3 8 30 parts polyester pigment dispersant 4.4 parts resin solution B e 31 parts propylene glycol monomethyl ether acetate 136 parts The pigment dispersion liquid B of the pigment was sufficiently dispersed using a bead mill, and the mixed resin (B1): resin solution Ba 18 parts, resin (B2): resin solution Bb 147 parts, polymerizable compound: dipentaerythritol hexaacrylate (KAYARAD DPHA; Nippon Chemical Co., Ltd.) 64 parts, polymerization initiator: N-benzylideneoxy-1-(4-phenylsulfonylphenyl) xinyuan-1-one-2-imine (IrgacureOXE -Ol; manufactured by BASF Japan) 13 parts, solvent: propylene glycol monomethyl ether acetate 181 parts, and surfactant: polyether modified polyoxyxide oil (Toray polyoxo SH8400; Toray Dow Corning Co., Ltd.) 0.02 parts The coloring photosensitive resin composition 5 was obtained. Example 6 [Preparation of coloring photosensitive resin composition 6] -65- 201232174 Mixed pigment: cI pigment red 1 77 28 parts of pigment: CI pigment red 254 86 parts of polyester-based pigment dispersant 1 part of resin solution Be 27 parts 403 parts of propylene glycol monomethyl ether acetate, and the pigment dispersion liquid of the pigment is sufficiently dispersed using a bead mill to mix the resin (B1): resin solution Bd 87 parts of resin (B2): resin solution Bb 99 parts of polymerizable compound: dipentaerythritol Hexaacrylate (manufactured by Sakamoto Chemical Co., Ltd.) 3 3 parts polymerization initiator: 2 -methyl-2 - 咐 -1--1-(4-methyl phenylphenyl) propyl -1- Ketone (Irgacure 907; manufactured by BASF Japan) 13 parts of polymerization initiation aid: 4,4'-bis(diethylamino)benzophenone (EAB-F; manufactured by Hodogaya Chemical Industry Co., Ltd.) 7.6 parts solvent : propylene glycol monomethyl ether acetate 294 parts 'to obtain a coloring photosensitive resin composition 6. Comparative Example 1 Preparation of t-colored photosensitive resin composition 7] Mixed pigment: C. I. Pigment red 1 7 7 2 8 parts of pigment: C · I · Pigment red 2 5 4 8 6 parts of polyester-based pigment dispersant 1 -份-66- 201232174 Resin solution B e 2 7 parts of propylene glycol monomethyl ether acetate 404 parts, fully dispersed pigment pigment dispersion using a bead mill, mixed resin: resin solution Bd 169 parts of polymerizable compound: Dipentaerythritol hexaacrylate (manufactured by Sakamoto Chemical Co., Ltd.) 32 parts polymerization initiator: 2-methyl-2-morpholino-1-(4-methylsulfonylphenyl) propyl hospital-1 - 嗣 (Irgacure 907; manufactured by BASF Japan) 12 parts of polymerization initiation aid: 4,4'-bis(diethylamino)benzophenone (EAB-F; manufactured by Hodogaya Chemical Industry Co., Ltd.) 7.4 parts Solvent: propylene glycol monomethyl ether acetate 92 parts of 3-methoxy-1-butanol 67 parts of 3-methoxybutyl acetate 67 parts, and the colored photosensitive resin composition 7 was obtained. <Production of Patterns> A PET film (LUMIRROR 75-T60 manufactured by Toray) was bonded to a square glass plate having a side length of 2 inches to prepare a substrate. The colored photosensitive resin composition was applied onto the PET film side of the substrate by a spin coating method, and preheated at 60 ° C for 2 minutes on a hot plate. After cooling, the substrate coated with the colored photosensitive resin composition was placed at a distance of 150 μm from the mask made of quartz glass, and exposed to 150 mJ/cm 2 in an atmosphere using an exposure machine (TME-150RSK; T0PC0N (manufactured by T0PCN)). The amount (365 nm reference) was irradiated with light. Also, as the photomask, a line of 10 to 100 Km and a pattern of -67 to 201232174 are used. After being irradiated with light, it was immersed in a water-based developing solution containing 0.12% of a nonionic surfactant and potassium hydroxide 〇·0.4% at 40 ° C for immersion, and then washed with pure water. Net formation pattern. The film thickness of the obtained pattern was measured by a film thickness measuring device (DEKTAK3; manufactured by Nippon Vacuum Technology Co., Ltd.) and found to be 2 μm. The pattern formed in the same manner as described above was further heated at 50 ° C for 5 minutes (post-grilling) to obtain a hardened pattern. Further, the pattern formed in the same manner as described above was further heated at 100 ° C for 5 minutes (post-grilling) to obtain a cured pattern. The film thickness of the obtained cured pattern was measured in the same manner as above, and was 2 μm. <Evaluation of Solvent Resistance> On the pattern formed on the substrate, 1 ml of propylene glycol monomethyl ether acetate was dropped, and after standing for 30 seconds, the spin coater was used for 10 seconds at 1000 rpm. Turn to remove the propylene glycol monomethyl ether acetate on the pattern. The film thickness retention ratio was calculated from the film thickness measured before and after the contact with propylene glycol monomethyl ether acetate by the following formula. The higher the film thickness retention rate, the better the hardenability, and the color mixing can be prevented when the color filter is produced. The results are shown in Table 1. (film thickness retention ratio) (%) == (film thickness after contact) / (film thickness before contact) <resolution evaluation> -68- 201232174 The resulting pattern is a laser micromirror (Axio Imager MAT Carl) Observed by Zeiss, the minimum size of the solution is taken as the resolution. The higher the resolution, the finer the color filter can be produced. The results are shown in Table 1. [Table 1] Example 1 Example 2 Example 3 Example 4· Example 5 Example 6 Comparative example baking temperature coloring photosensitive resin composition 1 2 3 4 5 6 7 No resolution ("m) 10 2 0 2 0 2 0 2 0 3 0 4 0 Film thickness retention (%) 9 0 9 0 9 7 9 0 9 8 9 0 8 7 5 03⁄4 Resolution (“ m) 10 2 0 2 0 2 0 2 0 3 0 4〇 Film thickness retention rate (%) 9 2 9 1 9 7 9: 1 9 8 9 0 8 8 10 03⁄4 Resolution (/1 m) 10 2 0 2 0 2 0 2 0 3 0 4 0 Film thickness retention rate ( %) 9 2 9 2 9 7 9 2 9 8 9 1 8 7 The pattern formed using the colored photosensitive resin composition of the example was confirmed to have excellent resolution. Further, even if it was not subjected to a high temperature of more than 200 t In the case of the baking step, it was confirmed that the solvent resistance was excellent. It was found that a high-definition and high-quality color filter can be obtained by using a substrate having low heat resistance. A coloring photosensitive resin composition is used to obtain a pattern with high resolution and a high-quality color filter. -69-

Claims (1)

201232174 七、申請專利範圍: 1 ·—種著色感光性樹脂組成物,其特徵爲含有(A ) 、(Bl ) 、 ( B2) 、 ( C ) 、 ( D)及(E),其中 (A )著色劑; (B1)含有來自選自不飽和羧酸及不飽和羧酸酐所成 群的至少1種的結構單位、來自具有碳數2〜4的環狀醚 及乙烯性不飽和鍵之單體的結構單位的共聚物(但於側鏈 上未有乙烯性不飽和鍵); (B2 )於側鏈具有乙烯性不飽和鍵的樹脂; (C)聚合性化合物; (D )聚合啓始劑; (E )溶劑。 2.如申請專利範圍第1項之著色感光性樹脂組成物, 其中(B2)係將共聚合下述(a)與(c)所得之共聚物再 進一步與(b)進行反應所得之樹脂,其中 (a) :選自不飽和羧酸及不飽和羧酸酐所成群的至 少1種; (b) :具有碳數2〜4的環狀醚及乙烯性不飽和鍵之 單體; (c ):具有可共聚合(a)及(b)之不飽和鍵的單 體。 3 .如申請專利範圍第1項或第2項之著色感光性樹脂 組成物,其中(B1)的含有量對於(B1)與(B2)之合 計量而言,其爲1 〇質量%以上95質量%以下。 -70- 201232174 4. 一種圖型’其特徵爲以如申請專利範圍第1項之著 色感光性樹脂組成物所形成者。 5_ —種彩色過濾器’其特徵爲含有如申請專利範圍第 4項之圖型。 6.—種彩色過濾器之製造方法,其特徵爲含有如下述 (1)〜(4)所示步驟者, (1 )藉由將如申請專利範圍第1項至第3項中任一 項之著色感光性樹脂組成物塗佈於基板上後得到塗佈膜之 步驟; (2) 藉由於塗佈膜介著光罩使其曝光而得到曝光後 塗佈膜之步驟; (3) 藉由將曝光後塗佈膜在鹼顯像液進行顯像而得 到圖型之步驟; (4 )將圖型藉由進行燒烤而得到經硬化的圖型之步 驟。 7·如申請專利範圍第6項之彩色過濾器之製造方法, 其中步驟(4 )爲在25°C以上1 20°C以下的溫度進行燒烤的 步驟。 8·如申請專利範圍第6項或第7項之彩色過濾器之製 造方法’其中步驟(1)中之基板爲塑質基板。 -71 - 201232174 四 指定代表圖: (一) 本案指定代表圖為:無 (二) 本代表圖之元件符號簡單說明:無 201232174 五 本案若有化學式時,請揭示最能顯示發明特徵的化學 式:無 -4-201232174 VII. Patent application scope: 1 · A coloring photosensitive resin composition characterized by containing (A), (Bl), (B2), (C), (D) and (E), wherein (A) (B1) containing at least one structural unit selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides, monomers derived from cyclic ethers having 2 to 4 carbon atoms, and ethylenically unsaturated bonds a copolymer of structural units (but no ethylenically unsaturated bonds in the side chain); (B2) a resin having an ethylenically unsaturated bond in the side chain; (C) a polymerizable compound; (D) a polymerization initiator (E) solvent. 2. The colored photosensitive resin composition of claim 1, wherein (B2) is a resin obtained by copolymerizing the copolymers obtained in the following (a) and (c) and further reacting with (b), Wherein (a): at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides; (b) : a monomer having a cyclic ether having 2 to 4 carbon atoms and an ethylenically unsaturated bond; ): a monomer having an unsaturated bond capable of copolymerizing (a) and (b). 3. The colored photosensitive resin composition according to item 1 or item 2 of the patent application, wherein the content of (B1) is 1% by mass or more based on the total amount of (B1) and (B2). Below mass%. -70-201232174 4. A pattern 'characterized by a colored photosensitive resin composition as in the first aspect of the patent application. A color filter </ RTI> is characterized by containing a pattern as in item 4 of the patent application. 6. A method of producing a color filter, comprising the steps of (1) to (4) below, (1) by any one of items 1 to 3 of the patent application scope a step of coating a photosensitive resin composition onto a substrate to obtain a coating film; (2) a step of obtaining a film after exposure by exposing the coating film to the mask; (3) a step of developing a post-exposure coating film on an alkali developing solution to obtain a pattern; (4) a step of obtaining a cured pattern by baking the pattern. 7. The method of producing a color filter according to claim 6, wherein the step (4) is a step of baking at a temperature of 25 ° C or more and 1 20 ° C or less. 8. The method of producing a color filter according to claim 6 or 7, wherein the substrate in the step (1) is a plastic substrate. -71 - 201232174 Four designated representatives: (1) The representative representative of the case is: No (2) The symbol of the representative figure is a simple description: No 201232174 If there is a chemical formula in the case, please disclose the chemical formula that best shows the characteristics of the invention: None -4-
TW100134790A 2010-10-05 2011-09-27 Coloring the photosensitive resin composition TWI570509B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010225498 2010-10-05

Publications (2)

Publication Number Publication Date
TW201232174A true TW201232174A (en) 2012-08-01
TWI570509B TWI570509B (en) 2017-02-11

Family

ID=46008460

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100134790A TWI570509B (en) 2010-10-05 2011-09-27 Coloring the photosensitive resin composition

Country Status (4)

Country Link
JP (1) JP5892760B2 (en)
KR (1) KR101777426B1 (en)
CN (1) CN102445844B (en)
TW (1) TWI570509B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5771944B2 (en) * 2010-10-18 2015-09-02 Jsr株式会社 Manufacturing method of color filter
KR102021619B1 (en) * 2012-08-09 2019-09-16 스미또모 가가꾸 가부시키가이샤 Curable resin composition
JP6123187B2 (en) * 2012-08-21 2017-05-10 住友化学株式会社 Photosensitive resin composition
KR101999803B1 (en) * 2012-11-02 2019-07-12 롬엔드하스전자재료코리아유한회사 Photosensitive resin composition and spacer prepared therefrom
KR102066283B1 (en) * 2013-03-07 2020-01-14 롬엔드하스전자재료코리아유한회사 Colored photosensitive resin composition
JP6303936B2 (en) * 2013-09-17 2018-04-04 Jsr株式会社 Colored composition, colored cured film, and display element
KR101784049B1 (en) * 2014-11-14 2017-10-10 롬엔드하스전자재료코리아유한회사 Colored photosensitive resin composition and light shielding spacer prepared therefrom
TWI704416B (en) * 2015-08-05 2020-09-11 日商住友化學股份有限公司 Photosensitive resin composition, pattern, partition wall for inkjet, and display device
TWI817068B (en) * 2020-12-29 2023-10-01 住華科技股份有限公司 Photoresist structure, color filter and display device using coloring resin composition

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10316721A (en) * 1997-05-15 1998-12-02 Nippon Steel Chem Co Ltd Alkali-soluble resin and image forming material using the same
CN1716094B (en) * 2004-06-30 2010-12-15 住友化学株式会社 Radiation sensitive resin composition
JP2007269887A (en) * 2006-03-30 2007-10-18 Fujifilm Corp Polymerizable composition and photosensitive lithographic printing plate using the same
JP4788485B2 (en) * 2006-06-13 2011-10-05 住友化学株式会社 Colored photosensitive resin composition
JP4949809B2 (en) * 2006-11-14 2012-06-13 東京応化工業株式会社 Colored photosensitive resin composition
JP2009300835A (en) * 2008-06-16 2009-12-24 Jsr Corp Radiation-sensitive composition, color filter and color liquid crystal display element
JP5417994B2 (en) * 2008-07-17 2014-02-19 Jsr株式会社 Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element

Also Published As

Publication number Publication date
KR101777426B1 (en) 2017-09-11
TWI570509B (en) 2017-02-11
JP5892760B2 (en) 2016-03-23
KR20120035868A (en) 2012-04-16
CN102445844A (en) 2012-05-09
JP2012098711A (en) 2012-05-24
CN102445844B (en) 2016-09-28

Similar Documents

Publication Publication Date Title
TWI617885B (en) Colored photosensitive resin composition
CN102207680B (en) Photosensitive polymer combination
KR20120023546A (en) Photosensitive resin composition
TWI570509B (en) Coloring the photosensitive resin composition
TWI614578B (en) Colored curable resin composition
CN102736416A (en) Colored photosensitive resin composition
TWI554827B (en) Coloring the fake composition
TWI570511B (en) Coloring the photosensitive resin composition
TWI613518B (en) Colored photosensitive resin composition
JP2012173549A (en) Colored photosensitive resin composition
CN102749807A (en) Photosensitive resin composition
CN103676480A (en) Photosensitive resin composition
TWI571456B (en) Photosensitive resin composition
JP2013064967A (en) Coloring photosensitive resin composition
JP5697965B2 (en) Photosensitive resin composition
JPWO2016021525A1 (en) Colored photosensitive resin composition
TWI754008B (en) Red colored composition
KR20120060150A (en) Colored photosensitive resin composition
CN102279527A (en) Photosensitive resin composition
KR20130097110A (en) Photosensitive resin composition
JP2014052401A (en) Photosensitive resin composition
JP2014048607A (en) Photosensitive resin composition
CN102336873B (en) Curable resin composition
JP2013003283A (en) Colored photosensitive resin composition
JP2014063012A (en) Photosensitive resin composition