201234155 六、發明說明： 、 【相關申請案】 本申請案主張於2010年7月9日提出申請之美國臨時專利申請 案第61/362,882號之優先權。 【發明所屬之技術領域】 本發明係關於流量控制器。更具體而言，本發明係關於一種具 有一恆定直徑流動路徑以及一可變閥門部之流量控制器，該恆定 直徑流動路徑位於一對感測器之間。 【先前技術】 流量控制器兼具流量量測及可變閥門計量之功能，以提供一所 欲之體積及/或質量流率（flow rate )。通常，流量係藉由一對壓力 感測器而量測，其中使流動導管於該二壓力感測器之間變窄，進 而界定一孔口（orifice);然後量測節流部（restriction)兩端之壓 降，並可由此計算出流率。對於許多應用，尤其是涉及均勻密度 流體之應用，此係為一極令人滿意之配置。 在涉及漿料之某些應用中，此種配置則並不理想。化學機械研 磨（chemical mechanical polishing ; CMP )設備係為一種用於半導 體裝置之平面化（planarization)製程之生產設備，其利用包含一 研磨劑之漿料以及與該漿料一起旋轉之一研磨墊而以化學及物理 方式研磨一半導體晶圓之一表面。 自一遞送模組將漿料分配至一化學機械研磨（CMP)工具之一 工作台（platen )通常係藉由使材料以一速率進行定時流動來控 201234155 制，一般假定該速率係為恆定的。使被遞送至裝置之漿料之流率' 保持受控且恆定頗為重要。隨時間而不均勻之流率可導致CMP漿 料被不精確地分配至工作台。通常，藉由利用一過高之流率以確 保有足夠之漿料存在於工作台上來解決此種問題。然而，CMP漿 料之過度供給會因消耗過量漿料而無謂地增加製程之成本。混合 漿料之較短壽命會使此種問題加劇，乃因混合漿料之較短壽命要 求漿料在自各個組件製備之後應被立即耗用。 為保持一受控之流率，多數CMP設備通常使用一流量計來將漿 料之流動控制於一預定速率。此種流量計使用節流孔口來為漿料 提供一預校準之壓降，或於流動路徑中使用直角彎管（right angle turn或elbow)。然而，此種節流孔口及彎管可對流動速度造成額 外之不可取變化，並形成其中可能會積聚漿料之流動停滯區域。 此可導致流動控制之不一致性及不精確性。 因此，期望提供一種可提供一穩定之預定漿料流率並同時最小 化上述問題之流量控制器。 【發明内容】 一種流量控制器包含一本體，該本體具有一入口端、一出口端、 一流量量測部、一可變閥門部以及一控制部，控制部用以根據流 量量測部之一輸出而控制閥門部。提供所欲之一流率予控制部。 流量量測部包含一對壓力感測器，以用於在流體流經一流動路徑 時量測該流動路徑兩端之壓降。流量控制部包含一撓性管道 (flexible tube)及具有一馬達驅動器（motor drive)之一柱塞 (plunger )。柱寨遞增地擠壓撓性管道。一直線怪定直徑孔延伸貫 201234155 穿殼體而尤其形成一流體流動通道或導管，以於流量量測感測器 之間為流經該流體流動通道之一流體提供一校準之壓降。流體流 動通道之一可更換部係由作為一壓管閥（pinch valve )之一部分之 彈性軟塑性管道（resilient soft plastic tubing)構成，壓管閥具有 非污染配件以達成可靠之裝置關閉。殼體可包含一可移除部，以 容許接近壓管閥及壓管閥配件，俾使其無需專門工具便可於現場 修復（field repairable)。 在某些實施例中，流量控制器主要係由一本體部構成，本體部 係由一大致直線狀含氟聚合物（例如PTFE)形成，本體部具有一 對凹槽、適於容置一可變閥門組件之部分、以及一導管，該對凹 槽向下延伸以供放置變換器單元並界定用於供量測之流體之空 腔，導管縱向延伸貫穿本體部且連接該等空腔。可變閥門組件可 包含一撓性管道段，撓性管道段可連結至一對接頭，其中之一接 頭於一導管處通向該對凹槽，另一接頭則通向一出口導管。該等 可變閥門組件可包含一具有一線性輸出之步進馬連（stepper motor )、用於管道之中央部之一支樓部、以及可變地擠壓管道之 一柱塞。 在一實施例中，一連續之恆定直徑孔延伸於該對壓力變換器之 間。在另一實施例中，通向一第一變換器之流動導管具有一第一 直徑，第一變換器與一第二變換器間之流動導管具有該第一直 徑，且第二變換器與可變閥門部間之流動導管具有該第一直徑。 本發明實施例之一特徵及優點係為具有平穩連續之流動速度。 直線狀恆定直徑流動路徑消除了先前技術之節流孔口及彎管，藉 201234155 此使漿料流經流量控制器尤其是壓力感測器中間時流動速度受到 不可取之擾動之機會最小化。 此外，消除節流孔口及/或彎管會最小化當漿料流經裝置時出現 漿料停滯及截留（entrapment)之可能性。 本發明實施例之另一特徵及優點係為一現場可修復之壓管閥。 殼體可包含一可移除部，進而容許直接接近壓管閥及壓管閥配 件，且該等閥配件可為非污染配件，進而容許清潔、修復、維護 及/或更換該閥而無需使用專門工具。 本發明實施例之另一特徵及優點係為能可靠地關閉流動路徑。 壓管閥能夠完全關閉流動路徑，俾使漿料無法沿流動路徑行進。 本發明實施例之一附加特徵及優點係為能達成高度精確之流率 控制。藉由最小化流動速度擾動以及漿料停滯及截留，本發明能 夠達成非常精確且預校準之流率控制。 本發明實施例之另一特徵及優點係為其容許現場校準，以適應 於具有一寬廣範圍之密度及黏度之各種漿料或其他流體。該裝置 可包含嵌式韌體（firmware)且亦可與一獨立式電腦計算工具一起 使用，獨立式電腦計算工具容許一使用者校準該裝置以為各種不 同之漿料混合物提供一所欲之流率。 【實施方式】 參照第1圖至第3圖，其繪示根據本發明一實施例之一流量控 制器100。流量控制器100包含一主體部102，主體部102位於一 底板104與一頂蓋106之間。流量控制器100大致包含一流量量 201234155 測部107、一具有一馬達總成丨1〇之可變向門部1〇8、以及一控制 部ill。該控制部可包含一連接至頂蓋106之電路板112，並且一 蓋密封件（cover seal) 114可鄰設於主體部1〇2。 主體部102可包含一延伸貫穿該主體部之流體流動通道116。在 一實施例中，流體流動通道116係為一貫穿主體部1〇2所界定之 孔。oil體流動通道116可具有一恒定直徑並可延伸貫穿一連接器 118，連接器118可於主體部1〇2之一端上用作一流體入口或出 口。一中間連接器120可將流體流動通道116連接至可變閥門部 108。可變閥門部1〇8則可包含另一連接器122，該另一連接器122 可係為定位於主體部102之一相對端處之一流體入口或出口，俾 使一流體接收裝置可連接至連接器1 i 8、122其中之一者、且一流 體源可連接至連接器118、122其中之另一者，進而提供一流經主 體部102之流體流量。 主體部102亦可包含延伸至流體流動通道116中之一對感測器 孔124。感測器孔係用以容納壓力感測器126，以用於感測一流經 流體流動通道116之流體之一壓降。在一實施例中，壓力感測器 126可係為具有藍寶石板之壓力變換器（pressure在 其他實施例中，亦可使用各種其他壓力感測器。並且，該流量量 測部可包含超音波感測器以及可用於確定一流體之流量之任何其 他類型之感測器。流體流動通道116及壓力感測器126界定流量 控制器100之流量量測部1〇7。主體部1〇2亦可包含一擠壓孔 (pinch aperture) 128 ’擠壓孔128延伸貫穿該本體之一部分，馬 達總成110之一部分可延伸貫穿擠壓孔128。主體部1〇2可更包含 201234155 一可移除部130。當流量控制器100運作時，可移除部i3〇可藉由 螺釘或其他扣件（fastener)而固定至主體1〇2。當需要維護咬更 換可變閥門部108時，可輕易地將可移除部13〇自主體部ι〇2分 離以便能夠接近可變閥門部108。 可變閥門部108可包含連接器122、一管道部132以及一對固定 螺母（retaining nut) 134、136。管道部132可包含貫穿該管道部 之一中空流動路徑133，並可藉由固定螺母134而連接至連接器 122上之一配件以及藉由固定螺母136而連接至連接器12〇，俾使 管道部132之流動路徑133與流體流動通道116流體連通。貫穿 管道部132之流動路徑133可具有與流體流動通道116相同之恆 定直徑。在一實施例中，管道部132包含一彈性體材料。連接器 122可包含一圓形部138，圓形部138具有複數個突起部 (projection) 140，突起部140與主體部1〇2之弓形部146、148 中以及可移除部130中之對應孔142、144相配合，以將連接器122 固持於主體部102與可移除部13〇之間。 馬達總成110可包含一馬達150、一墊片（spacer) 152以及一 柱塞154。在一實施例中’馬達15()可係為線性致動器步進馬達 (linear actuator stepper motor)，例如由 Haydon 開關及儀器公司 (Haydon Switch & Instrument Inc.，位於美國 Connecticut 州之 Waterbury)所提供且於美國專利第6,6〇3,229號中所揭露者。墊片 152可用於使馬達150及柱塞154於可變閥門部108上方位移一所 欲之距離。柱塞154延伸貫穿擠壓孔128，並可由馬達150帶動而 沿縱向上下移動。 201234155 可隻閥門β 108及馬達總成11〇可協同提供一壓管間，該壓管 闊用作流量㈣器⑽之控㈣。在正f運射，流體可 ^由地流經可變_部⑽之管道部132。為降低或流體流經 官道部132之能力，可使用—電子控制部啟動馬$㈣。於馬達 150啟動之後，柱S丨54沿縱向向下移動以抵靠可移除部⑽之砧 156而嗔合管道部132。穿過管道部π2《流動轉133可被柱塞 154完全關閉’以消除流經流動路徑133之全部流量，或可僅被局 部關閉而使流體可以—降低之速率流經流動路徑133。 在運作時，在任一類型之處理應用中皆在線（in_Hne)連接流量 控制器150’以為各種流體提供—經量狀流量㈣卜在―實施例 中，該處理應用係為基板之化學機械研磨並且流體係為研磨漿 料。一流體經由連接器118或連接器122進入流量控制器，並經 由該裝置而流出另一連接器118、122以進入製程之下一步驟。流 經該裝置之流體之壓降係由流動路徑U6中之壓力感測器I%量 測。在一實施例中，貫穿主體部ΐθ2之流動通道116、貫穿管道部 132之流動路徑、以及所有配件及連接器皆可具有相同之恆定直 徑。藉此，達成流體之平穩 '連續速度之流動，同時使流動停滯 及截留區域最小。在另一實施例中，流動通道116於該等壓力感 測器126間之直徑係為恆定的，但流動路徑116、133之直徑於其 他位置處可有所變化。根據來自壓力感測器丨26之回饋，可藉由 啟動馬達150以使管道部132嚙合於柱塞154與砧156之間而視 需要減小或停止流體之流動。 第4圖繪示根據本發明一實施例之一流量控制器ι〇1之另一實 201234155 施例之剖面圖，流量控制器101類似於第1圖至第3圖所示之流 量控制器100。在該實施例中，相較於主體部102及管道部132 之恆定直徑流動路徑116、133，流動通道116之一部分117具有 一較寬之直徑。在流量控制器101中，流動通道116與壓力感測 器126之間由感測器孔124所界定之量測介面或空腔亦更呈圓形 且並不完全延伸貫穿流動通道116。第4圖亦繪示用於將一流量控 制器之電子及控制系統與一外部源相連接之一連接器158及一軟 電線（cord ) 160。 現在參照第5圖，其繪示根據本發明另一實施例之一流量控制 器200。流量控制器200包含一殼體202以及一對壓力感測器（圖 未示出），殼體202具有延伸貫穿該殼體之一流動路握216，該對 壓力感測器係定位於感測器孔224中以用於量測一流經流動路徑 216之流體之一壓降。由一彈性體材料構成之一管道部232定位於 該等感測器孔224之間，並可藉由連接器234而連接至流動路徑 216。一穿過管道部232之流動路徑233所具有之直徑可相同於流 動路徑216之某一部分或全部。可藉由步進馬達250而控制流經 管道部之流體流量。當步進馬達250啟動時，柱塞254可沿縱向 向下移動以抵靠砧256而擠壓管道部232,進而限制或防止流體流 經管道部232。 第6圖繪示根據本發明一實施例之另一流量控制器300。流量控 制器300包含容納於單獨感測器殼體325内之壓力感測器326。在 本實施例中，並非由一貫穿一殼體之孔界定感測器326間之流動 路徑316,而是由管道315之一區段界定流動路徑316，該區段延 201234155 伸於感測器326之間且藉由連接器335而遂接至感測器殼體325。 管道315可係為撓性管道或非撓性管道。如本文所述之一壓管閥 總成及馬達總成可容納於殼體309内，用於可變地控制流經流量 控制器300之流體流量。 流量控制器可在啟動之前利用一軟體系統在現場予以校準，以 為將被容許流經該流量控制器之一流體提供一所欲之壓降。現場 校準所提供之優點在於，能夠針對具有一寬廣範圍之密度及黏度 之流體來調節流量控制器。第7圖及第8圖繪示此一軟體系統之 一實例之螢幕單幅（screenshot )。為校準該流量控制器，需針對一 給定之數值集合而收集流量資料並確定校準係數值。較佳地，流 量資料係於該流量控制器之本地環境中測得，俾使例如流體溫度 及管線壓力等條件將與現場條件一致。流量資料可以各種單位進 行收集，例如％FS、mA或VDC。如第7圖所示，可在10% FS與 100% FS之間每隔10%間隔來收集流量資料。對於每一間隔，皆 較佳收集流量資料達至少一分鐘，然後以例如ml/min為單位輸入 每一間隔之流量資料至第7圖所示之校準資料檔案中。在每一後 續資料收集間隔之前，皆應使該流量控制器歸零。隨著資料之收 集，如第7圖所示，可顯示一擬合品質（fit quality)曲線圖並且 藉由一内部公式來確定一組能提供所需壓降之係數。當對該資料 進行視覺檢查以確保不存在明顯之錯誤後，可複製該資料至一剪 貼板（clipboard)以供如第8圖所示之現場校準工具使用。 一旦獲得流率資料，便打開第8圖所示之現場校準工具並將該 流量控制器連接至一運作該軟體之裝置（例如一電腦或行動電201234155 VI. INSTRUCTIONS: [RELATED APPLICATIONS] This application claims priority to U.S. Provisional Patent Application No. 61/362,882, filed on Jul. 9, 2010. TECHNICAL FIELD OF THE INVENTION The present invention relates to flow controllers. More specifically, the present invention relates to a flow controller having a constant diameter flow path and a variable valve portion between a pair of sensors. [Prior Art] The flow controller combines flow measurement and variable valve metering to provide a desired volume and/or mass flow rate. Typically, the flow is measured by a pair of pressure sensors, wherein the flow conduit is narrowed between the two pressure sensors to define an orifice; and then the restriction is measured. The pressure drop across the ends and the flow rate can be calculated from this. This is a very desirable configuration for many applications, especially those involving uniform density fluids. In some applications involving slurries, this configuration is not ideal. A chemical mechanical polishing (CMP) apparatus is a production apparatus for a planarization process of a semiconductor device, which utilizes a slurry containing an abrasive and rotates one of the polishing pads together with the slurry. Polishing one surface of a semiconductor wafer chemically and physically. The distribution of slurry from a delivery module to a platen of a chemical mechanical polishing (CMP) tool is typically controlled by the timed flow of material at a rate, which is generally assumed to be constant. . It is important to keep the flow rate of the slurry delivered to the device constant and constant. A non-uniform flow rate over time can cause the CMP slurry to be inaccurately dispensed to the table. Typically, this problem is solved by using an excessive flow rate to ensure that sufficient slurry is present on the bench. However, excessive supply of CMP slurry can unnecessarily increase the cost of the process due to the consumption of excess slurry. The shorter life of the mixed slurry exacerbates this problem because the shorter life of the mixed slurry requires the slurry to be consumed immediately after preparation of the various components. To maintain a controlled flow rate, most CMP equipment typically uses a flow meter to control the flow of the slurry to a predetermined rate. Such flow meters use a throttling orifice to provide a pre-calibrated pressure drop to the slurry or a right angle turn or elbow in the flow path. However, such orifices and bends can cause additional undesirable changes to the flow rate and create a flow stagnation zone in which slurry may accumulate. This can lead to inconsistencies and inaccuracies in flow control. Accordingly, it is desirable to provide a flow controller that provides a stable predetermined slurry flow rate while minimizing the above problems. SUMMARY OF THE INVENTION A flow controller includes a body having an inlet end, an outlet end, a flow measuring portion, a variable valve portion, and a control portion, and the control portion is configured to be based on one of the flow measuring portions Output and control the valve section. Provide a desired flow rate to the control unit. The flow measurement portion includes a pair of pressure sensors for measuring the pressure drop across the flow path as the fluid flows through a flow path. The flow control unit includes a flexible tube and a plunger having a motor drive. The pillars incrementally squeeze the flexible pipe. A straight-lined diameter hole extends through the housing to form a fluid flow path or conduit, for example, to provide a calibrated pressure drop between the flow measurement sensors for fluid flowing through one of the fluid flow channels. One of the fluid flow passage replaceable portions is constructed of a resilient soft plastic tubing that is part of a pinch valve that has a non-contaminating fitting for a reliable device closure. The housing may include a removable portion to permit access to the pressure tube valve and the pressure tube valve assembly so that it can be field repairable without the need for special tools. In some embodiments, the flow controller is mainly composed of a body portion formed by a substantially linear fluoropolymer (for example, PTFE), and the body portion has a pair of grooves for accommodating A portion of the variable valve assembly, and a conduit extending downwardly for placement of the transducer unit and defining a cavity for the fluid to be measured, the conduit extending longitudinally through the body portion and connecting the cavities. The variable valve assembly can include a flexible pipe section that can be coupled to a pair of joints, one of which leads to the pair of grooves at one conduit and the other of which leads to an outlet conduit. The variable valve assemblies can include a stepper motor having a linear output, a fulcrum for a central portion of the conduit, and a plunger for variably squeezing the conduit. In one embodiment, a continuous constant diameter aperture extends between the pair of pressure transducers. In another embodiment, the flow conduit leading to a first transducer has a first diameter, the flow conduit between the first transducer and a second transducer has the first diameter, and the second transducer The flow conduit between the variable valve portions has the first diameter. One of the features and advantages of embodiments of the present invention is that it has a smooth continuous flow velocity. The linear constant diameter flow path eliminates the prior art orifice orifices and elbows, which minimizes the chance of flow velocity being undesirably disturbed by the flow of slurry through the flow controller, especially the pressure sensor. In addition, the elimination of orifices and/or bends minimizes the likelihood of slurry stagnation and entrapment as the slurry flows through the unit. Another feature and advantage of an embodiment of the invention is a field repairable pressure tube valve. The housing may include a removable portion to permit direct access to the pressure tube valve and the pressure tube valve fitting, and the valve fittings may be non-contaminating fittings, thereby allowing cleaning, repair, maintenance, and/or replacement of the valve without the use of Special tools. Another feature and advantage of embodiments of the present invention is the ability to reliably close the flow path. The pressure tube valve completely closes the flow path and prevents the slurry from traveling along the flow path. An additional feature and advantage of one of the embodiments of the present invention is that a highly accurate flow rate control can be achieved. By minimizing flow velocity disturbances and slurry stagnation and retention, the present invention enables very accurate and pre-calibrated flow rate control. Another feature and advantage of embodiments of the present invention is that it allows on-site calibration to accommodate a variety of slurries or other fluids having a wide range of densities and viscosities. The device can include embedded firmware and can also be used with a stand-alone computer computing tool that allows a user to calibrate the device to provide a desired flow rate for a variety of different slurry mixtures. . [Embodiment] Referring to Figures 1 to 3, a flow controller 100 according to an embodiment of the present invention is illustrated. The flow controller 100 includes a body portion 102 between a bottom plate 104 and a top cover 106. The flow controller 100 generally includes a flow rate 201234155 measuring unit 107, a variable door portion 1〇8 having a motor assembly 丨1〇, and a control unit ill. The control portion can include a circuit board 112 coupled to the top cover 106, and a cover seal 114 can be disposed adjacent to the body portion 1〇2. The body portion 102 can include a fluid flow passage 116 extending through the body portion. In one embodiment, the fluid flow passage 116 is a bore defined through the body portion 1〇2. The oil body flow passage 116 can have a constant diameter and can extend through a connector 118 that can serve as a fluid inlet or outlet on one end of the body portion 1〇2. An intermediate connector 120 can connect the fluid flow passage 116 to the variable valve portion 108. The variable valve portion 1 8 can include another connector 122 that can be positioned as a fluid inlet or outlet at one of the opposite ends of the body portion 102 to enable a fluid receiving device to be connected To one of the connectors 1 i 8, 122, and a fluid source can be coupled to the other of the connectors 118, 122, thereby providing fluid flow through the body portion 102. The body portion 102 can also include a pair of sensor apertures 124 that extend into the fluid flow path 116. The sensor aperture is adapted to receive a pressure sensor 126 for sensing a pressure drop of one of the fluids passing through the fluid flow passage 116. In an embodiment, the pressure sensor 126 can be a pressure transducer having a sapphire plate. In other embodiments, various other pressure sensors can also be used. Moreover, the flow measuring portion can include ultrasonic waves. The sensor and any other type of sensor that can be used to determine the flow of a fluid. The fluid flow channel 116 and the pressure sensor 126 define a flow measurement portion 1 〇 7 of the flow controller 100. The body portion 1 〇 2 A pinch aperture 128 can be included. The extrusion aperture 128 extends through a portion of the body. A portion of the motor assembly 110 can extend through the extrusion aperture 128. The body portion 1 2 can further include 201234155. When the flow controller 100 is in operation, the removable portion i3 can be fixed to the main body 1〇2 by screws or other fasteners. When the maintenance bite replacement variable valve portion 108 is required, it can be easily The removable portion 13 is separated from the main portion ι 2 so as to be able to access the variable valve portion 108. The variable valve portion 108 can include a connector 122, a duct portion 132, and a pair of retaining nuts 134, 136. Pipeline Department 132 may include a hollow flow path 133 extending through the conduit portion and may be coupled to one of the fittings on the connector 122 by a retaining nut 134 and to the connector 12A by a retaining nut 136 to cause the conduit portion 132 The flow path 133 is in fluid communication with the fluid flow channel 116. The flow path 133 through the conduit portion 132 can have the same constant diameter as the fluid flow channel 116. In one embodiment, the conduit portion 132 comprises an elastomeric material. A circular portion 138 can be included, the circular portion 138 having a plurality of projections 140, the projections 140 and the corresponding holes 142 in the arcuate portions 146, 148 of the main body portion 1 and 2, and the removable portion 130, The 144 is mated to hold the connector 122 between the main body portion 102 and the removable portion 13A. The motor assembly 110 can include a motor 150, a spacer 152, and a plunger 154. In the example 'motor 15() can be a linear actuator stepper motor, for example by Haydon Switch & Instrument Company (Waterbury, Connecticut) A gasket 152 can be used to displace the motor 150 and the plunger 154 over the variable valve portion 108 by a desired distance. The plunger 154 extends through the extrusion. The hole 128 is movable by the motor 150 to move up and down in the longitudinal direction. 201234155 Only the valve β 108 and the motor assembly 11〇 can cooperate to provide a pressure tube, which is widely used as the control of the flow (four) device (10). At positive f, the fluid can flow through the conduit portion 132 of the variable portion (10). To reduce or the ability of fluid to flow through the official department 132, the electronic control unit can be used to activate the horse (4). After the motor 150 is activated, the column S丨 54 is moved downward in the longitudinal direction to engage the pipe portion 132 against the anvil 156 of the removable portion (10). The flow through the conduit portion π2 "flow 133 can be fully closed by the plunger 154" to eliminate the entire flow through the flow path 133, or can be only partially closed so that the fluid can flow through the flow path 133 at a reduced rate. In operation, in any type of processing application, the flow controller 150' is connected in-line (in_Hne) to provide for various fluids - via volumetric flow (four). In an embodiment, the processing application is chemical mechanical polishing of the substrate and The flow system is a slurry. A fluid enters the flow controller via connector 118 or connector 122 and exits the other connector 118, 122 via the device to enter a process below the process. The pressure drop of the fluid flowing through the device is measured by a pressure sensor I% in flow path U6. In one embodiment, the flow passage 116 through the body portion ΐ θ2, the flow path through the conduit portion 132, and all of the fittings and connectors may have the same constant diameter. In this way, a smooth, continuous flow of fluid is achieved while minimizing flow stagnation and retention. In another embodiment, the diameter of the flow passage 116 between the pressure sensors 126 is constant, but the diameter of the flow paths 116, 133 may vary at other locations. Based on the feedback from the pressure sensor 丨 26, the flow of fluid can be reduced or stopped as needed by actuating the motor 150 to engage the conduit portion 132 between the plunger 154 and the anvil 156. 4 is a cross-sectional view showing another embodiment of the flow controller ι〇1 according to an embodiment of the present invention. The flow controller 101 is similar to the flow controller 100 shown in FIGS. 1 to 3. . In this embodiment, a portion 117 of the flow passage 116 has a wider diameter than the constant diameter flow paths 116, 133 of the body portion 102 and the conduit portion 132. In the flow controller 101, the measurement interface or cavity defined by the sensor aperture 124 between the flow channel 116 and the pressure sensor 126 is also more circular and does not extend completely through the flow channel 116. Figure 4 also shows a connector 158 and a cord 160 for connecting the electronic control system of a flow controller to an external source. Referring now to Figure 5, a flow controller 200 in accordance with another embodiment of the present invention is illustrated. The flow controller 200 includes a housing 202 and a pair of pressure sensors (not shown) having a flow path grip 216 extending through the housing, the pair of pressure sensors being positioned to sense The device bore 224 is used to measure the pressure drop of one of the fluids passing through the flow path 216. A conduit portion 232 formed of an elastomeric material is positioned between the sensor apertures 224 and is connectable to the flow path 216 by a connector 234. The flow path 233 through the conduit portion 232 can have a diameter that is the same as some or all of the flow path 216. The flow of fluid through the conduit portion can be controlled by the stepper motor 250. When the stepper motor 250 is activated, the plunger 254 can be moved downwardly in the longitudinal direction to squeeze the conduit portion 232 against the anvil 256, thereby restricting or preventing fluid flow through the conduit portion 232. FIG. 6 illustrates another flow controller 300 in accordance with an embodiment of the present invention. Flow controller 300 includes a pressure sensor 326 housed within a separate sensor housing 325. In this embodiment, rather than defining a flow path 316 between the sensors 326 by a hole extending through a housing, a flow path 316 is defined by a section of the conduit 315 that extends through the sensor at 201234155 Between the 326 and connected to the sensor housing 325 by the connector 335. The conduit 315 can be a flexible conduit or a non-flexible conduit. A pressure tube valve assembly and motor assembly as described herein can be received within housing 309 for variably controlling fluid flow through flow controller 300. The flow controller can be calibrated in the field with a software system prior to startup to provide a desired pressure drop for fluid to be allowed to flow through one of the flow controllers. The advantage of on-site calibration is that the flow controller can be adjusted for fluids with a wide range of densities and viscosities. Figures 7 and 8 illustrate a screen shot of an example of such a software system. To calibrate the flow controller, flow data is collected and a calibration coefficient value is determined for a given set of values. Preferably, the flow data is measured in the local environment of the flow controller such that conditions such as fluid temperature and line pressure will be consistent with field conditions. Flow data can be collected in a variety of units, such as %FS, mA or VDC. As shown in Figure 7, flow data can be collected at 10% intervals between 10% FS and 100% FS. For each interval, it is preferable to collect the flow data for at least one minute, and then input the flow data of each interval into the calibration data file shown in Fig. 7 in units of, for example, ml/min. The flow controller should be zeroed before each subsequent data collection interval. As the data is collected, as shown in Figure 7, a fit quality curve can be displayed and an internal formula can be used to determine a set of coefficients that provide the desired pressure drop. Once the data has been visually inspected to ensure that there are no significant errors, the material can be copied to a clipboard for use with the on-site calibration tool as shown in Figure 8. Once the flow rate data is obtained, the field calibration tool shown in Figure 8 is opened and the flow controller is connected to a device that operates the software (eg a computer or mobile phone)
S 201234155 "舌）。可使用設置選單項（setting menu item )來選擇連接至該流量 控制器之埠（port)’然後可以通訊方式連接該軟體系統與該流量 控制器。可於「模型字串（Model String)」表中驗證該軟體與該 -曰_ L里控制器間之正確通訊。該流量控制器中之當前校準值將顯示 Γ S, 虽刖值（Current Values )」表中以供參考。然後，可自剪貼板 入新校準值至該軟體中之「新值（New Values)」表申。然後， “由選擇「將現場校準寫入至裝置中（Write field calibration to deVlee)j按鈕，而以新校準值配置該裝置。此時，該流量控制器 便已經過校準，以提供所欲之流量輸出。 第9a圖及第9b圖繪示根據本發明另一實施例之一流量控制器 1〇〇B 〇 笛 η 弟9a圖及第9b圖所示之流量控制器100Β類似於前述流量 韦】器1 〇〇’但包含一前擔塊部件（positive stop feature )以防止 過度擠壓管道部132。前擋塊部件包含一柱塞154及一砧156，柱 塞〖54具有一 位於可移除部 凸緣 155 及一下推部（plunging portion) 161，石占 156 130中。如於第9b圖中可見，當柱塞154下降以擠 退°卩U2時，該凸緣之一朝外表面157將接觸砧156之一上 表面131 ’進而防止柱塞154之下推部161繼續進一步下移至管道 部 13 2 cf? T ° fe塞154、凸緣155及砧156之尺寸可被配置成使得當 使才主宾 土 54向下行進至最遠時，恰好足以停止流經管道部132之 /里或限制流經管道部132之流量至一所欲之下限值。此會確保 管道部1 1 〇 不會被過度擠壓，進而使管道部132具有一更長之使 士 ° 〇_P並防止出現過早失效（premature failure )。 本發明之設計亦能簡化流量控制器之製造、組裝及修復。主磨 13 201234155 部102可由一大致直線狀含氟聚合物（例如PTFE)形成，感測器 孔124、擠壓孔128、流動路徑116、整體式接頭及配件以及可移 除部130形成於主體部102中。其他組件則可如第2a圖及第2b 圖所示且如本文所述與主體部組裝於一起。可藉由移除可移除部 130而輕易地達成可變閥門部108之修復。 在不背離本發明任何基本屬性之精神之條件下，本發明可實施 為其他具體形式。因此，所示實施例應被視為在所有方面皆為例 示性而非限制性的，本發明之範圍係由隨附申請專利範圍而非前 述說明加以指示。 【圖式簡單說明】 第1圖係為根據本發明一實施例之一流量控制器之立體圖； 第2a圖係為第1圖所示流量控制器之分解圖； 第2b圖係為根據本發明一實施例之一流量控制器； 第3圖係為沿線3-3截取之第1圖所示流量控制器之剖面圖； 第4圖係為根據本發明一實施例之一流量控制器之剖面圖； 第5圖係為根據本發明一實施例之一流量控制器之剖面圖； 第6圖係為根據本發明一實施例之一流量控制器之立體圖； 第7圖係為可與根據本發明一實施例之一流量控制器一起使用 之一現場校準工具之螢幕單幅； 第8圖係為可與根據本發明一實施例之一流量控制器一起使用 之一現場校準工具之螢幕單幅；S 201234155 "tongue.) A setting menu item can be used to select a port connected to the flow controller and then the software system can be communicatively coupled to the flow controller. The correct communication between the software and the controller in the -曰_L can be verified in the "Model String" table. The current calibration value in the flow controller will display Γ S, although the Current Values table is for reference. A new calibration value can then be entered from the clipboard to the "New Values" form in the software. Then, “select the “Write field calibration to deVlee” j button and configure the device with the new calibration value. At this point, the flow controller has been calibrated to provide the desired 9a and 9b are diagrams showing a flow controller 1A and a flow controller 100 shown in FIG. 9b according to another embodiment of the present invention. The device 1 〇〇 'but includes a positive stop feature to prevent over-squeezing the pipe portion 132. The front stop member includes a plunger 154 and an anvil 156, and the plunger 〖54 has a movable position In addition to the flange 155 and the plunging portion 161, the stone occupies 156 130. As can be seen in Figure 9b, when the plunger 154 is lowered to squeeze back 卩U2, one of the flanges faces the outer surface 157 will contact one of the upper surfaces 131' of the anvil 156 to prevent the plunger 154 lower push portion 161 from continuing further down to the conduit portion 13 2 cf? T ° fe 154, flange 155 and anvil 156 may be sized to be configured So that when the leader of the guest is 54 down to the farthest, it happens to Stopping the flow through the pipe portion 132 or restricting the flow through the pipe portion 132 to a desired lower limit. This ensures that the pipe portion 1 1 〇 is not over-extruded, thereby causing the pipe portion 132 to have a The longer the ° 〇 P P and prevent premature failure. The design of the present invention also simplifies the manufacture, assembly and repair of the flow controller. The main mill 13 201234155 portion 102 can be a substantially linear fluorine-containing A polymer (e.g., PTFE) is formed, sensor holes 124, extrusion holes 128, flow paths 116, integral joints and fittings, and removable portion 130 are formed in body portion 102. Other components may be as shown in Figure 2a. Figure 2b is shown and assembled with the body portion as described herein. The repair of the variable valve portion 108 can be easily accomplished by removing the removable portion 130. Without departing from the spirit of any essential attributes of the present invention The present invention may be embodied in other specific forms. The present invention is to be considered in all respects as illustrative and not restrictive. Give instructions. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a flow controller according to an embodiment of the present invention; FIG. 2a is an exploded view of the flow controller shown in FIG. 1; FIG. 2b is a diagram according to the present invention. A flow controller of one embodiment; FIG. 3 is a cross-sectional view of the flow controller shown in FIG. 1 taken along line 3-3; and FIG. 4 is a cross section of the flow controller according to an embodiment of the present invention. Figure 5 is a cross-sectional view of a flow controller in accordance with one embodiment of the present invention; Figure 6 is a perspective view of a flow controller in accordance with an embodiment of the present invention; One embodiment of the inventive flow controller uses a screen single screen of a field calibration tool together; FIG. 8 is a screen single frame of a field calibration tool that can be used with a flow controller in accordance with an embodiment of the present invention. ;
14 S 201234155 ;以 第9a圖係為根據本發明一實施例之一流量控制器之剖面圖 及 第9b圖係為第9a圖所示流量控制器之局部剖面圖 【主要元件符號說明】 &體流動通道/流動路徑 連接器 100 :流量控制器 101 :流量控制器 104 ·底板 107 :流量量測部 110 .馬達總成 112 :電路板 116 ： 118 : 122 :連接器 126 :壓力感測器 130 :可移除部 132 :管道部 134 :固定螺母 138 :圓形部 142 :孔 146 :弓形部 150 :馬達 154 :柱塞 156 :砧 100B :流量控制器 102 :主體部 106 ‘·頂蓋 108 :可變閥門部 Hi :控制部 114:蓋密封件 117 :部分 120 :連接器 124 :感測器孔 128 =擠壓孔 131 .上表面 133 :流動路徑 136 :固定螺母 140 :突起部 144 :孔 14 8 .弓形部 152 :墊片 155 :凸緣 157 :朝外表面 15 201234155 158 ： 連接器 160 ： 軟電線 161 ： 下推部 200 ： 流量控制器 202 ： 殼體 216 ： 流動路徑 224 ： 感測器孔 232 ： 管道部 233 ： 流動路徑 234 ： 連接器 250 ： 步進馬達 254 ： 柱塞 256 ： 石占 300 ： 流量控制器 309 ： 殼體 315 ： 管道 316 ： 流動路徑 325 ： 感測器殼體 326 ： 壓力感測器 335 : 連接器 3-3 ： 線14 S 201234155; FIG. 9a is a cross-sectional view of a flow controller according to an embodiment of the present invention, and FIG. 9b is a partial cross-sectional view of the flow controller shown in FIG. 9a. [Main component symbol description] & Body Flow Channel/Flow Path Connector 100: Flow Controller 101: Flow Controller 104 • Base Plate 107: Flow Measurement Unit 110. Motor Assembly 112: Circuit Board 116: 118: 122: Connector 126: Pressure Sensor 130: removable portion 132: pipe portion 134: fixing nut 138: circular portion 142: hole 146: arcuate portion 150: motor 154: plunger 156: anvil 100B: flow controller 102: main body portion 106'· top cover 108: Variable valve portion Hi: Control portion 114: Cover seal 117: Portion 120: Connector 124: Sensor hole 128 = Extrusion hole 131. Upper surface 133: Flow path 136: Fixing nut 140: Projection portion 144 : Hole 14 8 . Bow 152 : Spacer 155 : Flange 157 : Facing outward surface 15 201234155 158 : Connector 160 : Flexible electric wire 161 : Push-down portion 200 : Flow controller 202 : Housing 216 : Flow path 224 : Sensor hole 232 : Pipe section 233 : Flow Path 234: Connector 250: Stepper Motor 254: Plunger 256: Stone Pack 300: Flow Controller 309: Housing 315: Pipe 316: Flow Path 325: Sensor Housing 326: Pressure Sensor 335: Connection 3-3: Line
16 S16 S