201222076 四、 指定代表圖： (一） 本案指定代表圖為：第（4b)圖。 (二） 本代表圖之元件符號簡單說明： 1 5 0〜上板； 3 7 5〜上部夾頭； 385〜下部夾頭； 404〜0型環； 407〜視覺檢查專用攝像頭。 200〜下板； 376〜上部失頭移動裝置 40卜真空室蓋； 405~上板移動裝置· 五、 本案若有化學式時，請揭示最能顯示發明特徵的化學式 穴、發明說明： 【發明所屬之技術領域】 本發明有關軟性液晶顯示器的製造裝 A ^ U U ^ 且7有關可 卷及片（Roll & Sheet)方式的真空枯合工藝 少工藝時間和不合格率的軟性液晶顯示器的製造裝置：’ 【先前技術】 軟性顯示器（·Μ 臂曲的基板上的平板辟 lsplay)是形成於塑膠等可 的同時，可折最器’其因在確保優秀的顯示特性 如# 且f或捲曲，因此，作為當前平板顯_ "市場的下-代技術廣受關注。 軟性顯示器是利用右$必丨目士 、，’°見有技術的顯示器的特性帶 201222076 來損失的同時，像紙一樣可在數釐乎 ^ ^俅J在歡发木乾園之内彎曲、折疊 或捲曲的薄而柔軟的基板上製造的顯 败上表把的顯不态，與現有技術的 使用玻璃基板的堅硬的顯示器不同，軟 1命个u 釈性顯示器輕薄，耐 衝擊性強，且可自由蠻曲的哭 4^,. 田考曲的顯不盗軟性顯示器根據其用 途及功能，可分為不易碎的（Rugged )顯示器、可彎曲的 (BeruUng)顯示器及可捲曲（R〇Uable)的顯示器。輕薄、 堅固且可捲曲的顯示器，可用於數位多媒體廣播（關、 wlBr〇、掌上電腦（PDA)等攜帶型高品位移動設備，而且， 今後將發展成捲曲型顯示器。 圖1為現有技術的液晶顯示器的製造工藝流程圖。 如圖1所示，為了用玻璃基板製造液晶顯示器，通常 分為薄膜場效應電晶體（TFT，Thin Film Transistor)基 板和滤色片（Color Filter)基板進行面板製造工藝。即， 在TFT基板上進行TFT陣列（Array)工藝（S2〇)以形成 作為液晶顯示器的切換及驅動元件的TFT，並在TFT基板 上塗布及研磨配向膜（S21 )，且經過清潔（S22 )及液晶 分配工藝（S23)。另外，在另一個玻璃基板上形成濾色片 (S10 )，並經過配向膜塗布及研磨（s丨丨）、清潔（s丨2)、 岔封（S13)、分配（S14)及間隔物散佈工藝（gig)。之 後’钻合（S30)兩個基板（上板和下板）之後，經通過密 封劑（Sealant)的硬化工藝（S31 )分離為多個液晶單元 的單元形成工藝（S32)並通過最終驗收之後，經過偏光板 附著工藝（S33)。 使用上述玻璃基板的液晶顯示器是通過片對片（sheet 3 201222076 et)方式製造液晶顯示器，現在，將現有技術的用 板替代破璃基板的研究，主要集中在sheet t。sheet 方式# ’在—個軟性板上形成TFT陣列，另-個板上形 成遽色片並點合卜七七& / 上这兩個板’但這將大大降低生產效益， 且不能發揮軟性材料的優點。 因此為了解決上述問題’本發明人在韓國專利申請 第009 90279號中，提出可大幅提高軟性液晶顯示器生產 效益的卷對卷（r〇1"〇r〇U)或Roll&Sheet方式的軟 性液晶顯示器的製造系，統及軟性顯示器的製造方法。在上 乂技術中Γο11 to rol 1方式是在上板和下板上都應用 U方式，雖然可以獲得高的生產效益但因為r〇 1 i生 產的特點而不能防止不合格基板的生產，因此，若在上板 或下板中的任何一個發生不合格，則將導致整個產品的不 合格，從而增加不合格發生率。另外，在真空裝配系統 (VAS，Vacuum Assembly System)中，夾持 網狀（Web)基板的方法複雜，而且，產生不合格面板時， 也難以去除。 另外’在韓國專利申請第2009-90279號中，除r〇ii t〇 〇11方式之外’還提出Roil & Sheet方式。圖2為用以 °兒明本發明的申請人在韓國專利申請第2〇〇9_g〇279號中 提出的Rol 1 & Sheet方式的軟性顯示器粘合方法的概念 圖。如圖2所示，在第一軟性基板100的一面（下部面） 依-人排列具備遽'色片、配向膜等的上板，但為了便於說明 只表示一個上板150。如上所述，上板150是指包括上板 4 201222076 工藝區域1002在内的與下板粘合的板，將依次排列包括上 述上板150在内的多個上板的第一軟性基板1〇〇和依次排 歹J夕個下板的第二敕性基板2〇〇搬入粘合裝置3〇〇，而第 -軟性基板1〇〇通過切割裝置35〇切割。在完成上述切割 之前或之後，在包括上板工藝區域1〇〇2在内的第一軟性基 板100的一面，通過機械式夾頭（Mechanical Chuck)或 真空夾頭（Vacuum Chuck) 360支撐直至固定上板15〇，而 且，為了在真空狀態下維持上板的吸附，由靜電夾頭 (Electrostatic Chuck) 37〇支撐上板15〇並移動以與下 板钻合。艮P ’靜電夾頭370在不包括上板工藝區域1〇〇2的 面’利用靜電引力附著上板15Q之後，並移動以使上板工 藝區域1G02面向下板25G的上部面之後，對齊並#合。下 板250可通過機械式夾頭或真空夹頭38〇支撐直至固定。 切割裝置350可位於粘合裝置3〇〇内部，也可位於粘 。裝置300的外部（左側），在第一軟性基板⑽搬入枯 合裝置300之前還可以進行切割。在R〇u 方式中， 因在枯合前切割包括上板（或下板）的第一軟軟性基板（或 第一軟14基板）’即使相鄰的上板的對準標記之間間隔和 相鄰的下板250和252的對準標記之間間隔相同也沒有問 題因此上述間隔可相同或不同。靜電夾頭37〇附著上 板150並移動至下板25()的上部面之上，對齊上板⑸和 下板250附著之後’從下板25〇解吸附。纟第二軟性基板 200的下。p面’具備機械式夾頭、真空夾頭或靜電夹頭_ 以支撐固定第 一軟J·生基板2〇〇至下板250。如上所述的 201222076 & Sheet方式的軟性顯示器的枯合方法，雖然比申請該專 利之前的技術進步很多，但有必要對如下問題進行改進： 第-，合裝置30…AS包括占設備的相當部分的驅 動部’因此’真空室的大小很大’而調整如此大的真空室 的真空條件消耗很長的時間’從而成為此項工藝的瓶頸； 第二，VAS製作成多級真空室以防止門（_部的 泡露（Leak)，因此，裝置的結構複雜，容易發生包含於 多級真空室的Η的分配（Dispensing)部的污染。 另外’韓國4利中請第2GG9,279號提出的Roll &201222076 IV. Designated representative map: (1) The representative representative of the case is: (4b). (b) The simple description of the symbol of the representative figure: 1 5 0~ upper plate; 3 7 5~ upper chuck; 385~ lower chuck; 404~0 type ring; 407~ visual inspection dedicated camera. 200~lower board; 376~upper head moving device 40 vacuum chamber cover; 405~upper board moving device·5. If there is a chemical formula in this case, please disclose the chemical formula point and invention description that can best display the characteristics of the invention: TECHNICAL FIELD The present invention relates to a manufacturing apparatus for a flexible liquid crystal display device A ^ UU ^ and 7 relates to a roll-and-sheet method of vacuum drying process with less process time and failure rate of a flexible liquid crystal display device :' [Prior Art] The flexible display (· 平板 ls ls ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls ls Therefore, as the current flat-panel _ " market's next-generation technology has received much attention. The soft display is made by using the right $ 丨 丨 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Unlike the rigid display using the glass substrate in the prior art, which is made of a thin or flexible substrate that is folded or curled, the soft display is light and thin, and has high impact resistance. And can be freely ridiculously crying 4^,. Tian Kao's non-stealing display can be divided into Rugged display, bendable (BeruUng) display and can be curled according to its use and function (R〇 Uable) display. Lightweight, rugged and rollable display for digital multimedia broadcasting (portable high-quality mobile devices such as off-the-shelf, wlBr〇, PDA), and will be developed into a crimped display in the future. Figure 1 is a prior art liquid crystal display. A manufacturing process flow chart of a display. As shown in FIG. 1 , in order to manufacture a liquid crystal display using a glass substrate, a thin film field effect transistor (TFT) substrate and a color filter substrate are generally used for panel manufacturing process. That is, a TFT array process (S2) is performed on the TFT substrate to form a TFT as a switching and driving element of the liquid crystal display, and the alignment film (S21) is applied and polished on the TFT substrate, and is cleaned (S22) And a liquid crystal dispensing process (S23). Further, a color filter (S10) is formed on the other glass substrate, and subjected to alignment film coating and polishing (s丨丨), cleaning (s丨2), and sealing (S13). , distribution (S14) and spacer dispersion process (gig). After 'drilling (S30) two substrates (upper and lower plates), after hardening process by sealant (Sealant) (S3 1) A cell forming process (S32) separated into a plurality of liquid crystal cells and passing through a final polarizing plate adhesion process (S33) after final acceptance. The liquid crystal display using the above glass substrate is manufactured by a sheet-to-sheet (sheet 3 201222076 et) method. Liquid crystal display, nowadays, the research on replacing the glass substrate with the prior art plate is mainly focused on the sheet t. sheet method #' forming a TFT array on one flexible board, and forming a coloring film on the other board and clicking卜七七& / these two boards' but this will greatly reduce the production efficiency, and can not take advantage of the soft material. Therefore, in order to solve the above problem, the inventor of the present invention proposed in Korean Patent Application No. 009 90279 A roll-to-roll (r〇1"〇r〇U) or Roll&Sheet-type flexible liquid crystal display manufacturing system for improving the productivity of a flexible liquid crystal display, and a manufacturing method for a flexible display. In the upper technology, Γο11 to rol 1 The method is to apply the U mode on both the upper and lower plates. Although high production efficiency can be obtained, the defective substrate cannot be prevented due to the characteristics of r〇1 i production. Production, therefore, if any of the upper or lower plates fails, it will lead to the failure of the entire product, thereby increasing the rate of failure. In addition, in the vacuum assembly system (VAS, Vacuum Assembly System) The method of holding a web substrate is complicated, and it is difficult to remove when a defective panel is produced. In addition, in the Korean Patent Application No. 2009-90279, except for the r〇ii t〇〇11 method. Also proposed the Roil & Sheet method. Fig. 2 is a conceptual diagram of a flexible display bonding method of the Rol 1 & Sheet method proposed by the applicant in the Korean Patent Application No. 2-9g. As shown in Fig. 2, one surface (lower surface) of the first flexible substrate 100 is provided with an upper plate such as a color plate or an alignment film, but only one upper plate 150 is shown for convenience of explanation. As described above, the upper plate 150 refers to a plate that is bonded to the lower plate including the upper plate 4 201222076 process region 1002, and the first flexible substrate 1 that sequentially arranges the plurality of upper plates including the upper plate 150 described above. The second and second substrate 2, which are sequentially arranged in the lower plate, are carried into the bonding device 3, and the first flexible substrate 1 is cut by the cutting device 35. Before or after the above cutting is completed, one side of the first flexible substrate 100 including the upper plate process area 1〇〇2 is supported by a mechanical chuck or a vacuum chuck 360 until it is fixed. The upper plate 15 is closed, and in order to maintain the adsorption of the upper plate in a vacuum state, the upper plate 15 is supported by an electrostatic chuck (37) and moved to be drilled with the lower plate.艮P 'electrostatic chuck 370 is attached to the upper plate 15Q by electrostatic attraction on the surface not including the upper plate process area 1〇〇2, and is moved so that the upper plate process area 1G02 faces the upper surface of the lower plate 25G, aligned and #合. The lower plate 250 can be supported by a mechanical chuck or vacuum chuck 38 to be fixed. The cutting device 350 can be located inside the bonding device 3 or can be positioned. The outside (left side) of the device 300 can be cut before the first flexible substrate (10) is carried into the drying device 300. In the R〇u mode, the first soft flexible substrate (or the first soft 14 substrate) including the upper plate (or the lower plate) is cut before the dead ends, even if the alignment marks between the adjacent upper plates are spaced apart and There is no problem in the spacing between the alignment marks of the adjacent lower plates 250 and 252. Therefore, the above intervals may be the same or different. The electrostatic chuck 37 is attached to the upper plate 150 and moved to the upper surface of the lower plate 25 (), and is detached from the lower plate 25 after the upper plate (5) and the lower plate 250 are attached. The lower side of the second flexible substrate 200. The p-face is provided with a mechanical chuck, a vacuum chuck or an electrostatic chuck _ to support the fixing of the first soft J·green substrate 2 to the lower plate 250. The method of drying the flexible display of the 201222076 & Sheet method as described above, although much more advanced than the prior art of applying for the patent, it is necessary to improve the following problems: -, the combination device 30...AS includes the equivalent of the device Part of the drive section 'so the size of the vacuum chamber is large' and adjusting the vacuum conditions of such a large vacuum chamber takes a long time' and thus becomes the bottleneck of this process. Second, VAS is made into a multi-stage vacuum chamber to prevent In the case of the door (the Leak) of the _ part, the structure of the device is complicated, and it is easy to cause contamination of the dispensing part of the sputum contained in the multi-stage vacuum chamber. Roll &
Sheet方式的軟性顯示器的點合方式，不能在vas中瞭解 不合格面板的產生’因& ’需在工藝的前一個步驟或後一 個步驟通過檢查來確定…卜，沒有提出在無劃損 (S_h)等不合格的情況下夾持“⑽㈣上板的方 法0 【發明内容】 待解決的問題 -本發明的目的在於克服現有技術而提供一種軟性液晶 』不盗的製&裝置’其減少完成基板枯合的真空室的體積 並簡化其結構’從而不僅快球& 1至内逆π成工藝，而且，防止不必 要的裝置部件的運；漸_ 1 & 、、 丁斤導致的對其他部件的污染，例如， 通過門（Gate )部的運行的對 λα - 丁刀配（Dispensing)部的巧· 染。 技術方案 201222076 本發明的軟性液晶顯示器的製造裝置，包括：上部夾 頭，用於固定利用第一軟性基板加工而成的具備第一寬度 的板狀上板；下部夾頭，用於固定由具備比上述第一寬度 更寬的第二寬度的網狀第二軟性基板形成的下板；真空室 蓋，與上述上部夾頭相結合以便與上述上部夾頭一起移 動，並以上述下板作為真空室底部，從而與上述下板一同 構成真空區域；上板移動裝置，移動上述真空室蓋及結合 於其上的上部夾頭，從而將固定於上述上部夹頭的上板粘 合於上述下板。 此時，較佳地，還包括上部夾頭移動裝置，以使上述 上部夾頭相對於上述真空室蓋獨立移動。 另外，較佳地，上述上部夹頭及下部夾頭分別為從真 空夾頭（Vacuum Chuck)、靜電夾頭（ESC，Electro StaticThe point-and-click method of the soft display of the Sheet mode cannot be used to understand the generation of the unqualified panel in the vas. 'The & ' needs to be determined by checking in the previous step or the next step of the process... Bu, no scratch is proposed ( S_h), etc. Method of clamping "(10) (four) upper plate in case of failure] [Explanation] Problem to be solved - The object of the present invention is to overcome the prior art and provide a soft liquid crystal system that does not steal Completing the volume of the vacuum chamber of the substrate and simplifying its structure' so that not only the fastball & 1 to the internal reverse π-forming process, but also the prevention of unnecessary device components; gradual _ 1 & Contamination of other components, for example, by the operation of the gate portion (Gate) portion of the λα-Dingsing device. Technical Solution 201222076 The device for manufacturing a flexible liquid crystal display of the present invention comprises: an upper chuck a plate-shaped upper plate having a first width processed by using the first flexible substrate; and a lower chuck for fixing the second width wider than the first width a lower plate formed by a second mesh-shaped flexible substrate; a vacuum chamber cover coupled with the upper chuck to move together with the upper chuck, and the lower plate as a bottom of the vacuum chamber, thereby forming together with the lower plate a vacuum region; an upper plate moving device that moves the vacuum chamber cover and the upper chuck coupled thereto to adhere the upper plate fixed to the upper chuck to the lower plate. At this time, preferably, further includes The upper chuck moves the device so that the upper chuck moves independently with respect to the vacuum chamber cover. Further, preferably, the upper chuck and the lower chuck are respectively from a vacuum chuck (cable chuck) and an electrostatic chuck ( ESC, Electro Static
ChUCk)、物理钻合夾頭（PSC，Physical Sticky Chuck)、 多孔陶究爽頭（P〇rous Ceramic Chuck)及渴流夾頭（v〇rtex Chuck )中選擇的至少一種作為單元夾頭而形成。 尤其是，還包括用於移動上述下板的下部夾頭移動裝 置。 還包括UVW平臺或ΧΥΘ平臺，以使上述上部夾頭及下 部夾頭中的至少一個能移動。 另外，還包括紫外線（UV)硬化裝置，用於上述上板 和下板的粘合工藝之後的部分硬化。 另外，較佳地，還包括攝像頭，用於在上述上板和下 板的粘合工藝中，以視覺方式檢查對齊狀態等。 7 201222076 另外，為準備具備比上述第二寬度窄的第一寬度的板 狀的第一軟性基板，使用本來就具備第一寬度的網狀物， 或按第-寬度切割具備比第一寬度寬的寬度的網狀物的兩 側，或用-曲裝置彎曲具備比第一寬度寬的寬度網狀物的 兩側之後用靜電夾頭ESC夾具固定。 另外，還包括空氣浮起裝置，以使上述下板不與上述 下部夾頭接觸，從而在上述下部夹頭的上部，無損傷地移 動由上述網狀的第二軟性基板構成的下板。 在此，較佳地’上述上部夾頭及下部夹頭分別由以網 格形狀排列的多個單元夾頭構成，且具備依次調節上述單 元夾頭的運行的單元央頭控制裝置。 另外，較佳地，還包括網狀切割裝置，將上述第一軟 性基板相對于其長度方向垂直切割’從而將上述軟性基板 加工成板狀的上板。 此時，較佳地，上述網狀物切割裝置，由刀片型、輪 (whee 1 )型或鐳射型構成。 . :外’此時’還包括由空氣吸入/排出部構成的微粒去 牙…置，以去除使用上述網狀物切割裝置時產生的微粒。 =卜：還可用電離器（I〇nizer)喷嘴（—Μ，通過靜 冤有效去除切割所產生的微粒。 另外，還包括搬運器，在使用上述網狀物切割袭 ’’、、網狀物的移動而失緊網狀物側部。 軟性I外’上述真空室蓋的下部周圍可由波紋管形式的柔 枓製作而成’或上述真空室蓋由剛性體構成，而在 8 201222076 上述真空室的下端部安裝〇型環。 另外，將上述上部夾頭及真空室蓋在上述網狀的第二 軟性基板上並排具備至少兩列’以同時進行兩處以上真空 有益效果 根據本發明，可在製造軟性顯示器時，大幅提高質量 及生產效益。 【實施方式】 下面，結合附圖對本發明的較佳實施例進行詳細說 明。下面的實施例旨在幫助理解本發明，而本領域技術人 員可在本發明的技術思想範圍之内進行各種變形。因此， 本發明的權利範圍不受這些實施例的限制。 的 Roll & Sheet 方 圖4為在使用本發 〇 圖3為用以說明使用本發明的裝置 式的軟性顯示器粘合方法的概念圖，而 明的裝置中形成真空室的過程的示意圖 如圖3所示，雖然盘圖？所 /、圆J所不類似，但最重要的差異 是粘合裝置不同，圖3中不佔用驅叙 用驅動部的相當大的部分， 而只在很小的㈣形成真空㈣3Q1。這通過At least one of ChUCk), Physical Sticky Chuck (PSC), P〇rous Ceramic Chuck, and v〇rtex Chuck is formed as a unit chuck. . In particular, a lower chuck moving device for moving the lower plate is also included. A UVW platform or helium platform is also included to enable movement of at least one of the upper and lower collets described above. Further, an ultraviolet (UV) hardening device for partial hardening after the bonding process of the above upper and lower plates is also included. Further, preferably, a camera is further included for visually checking the alignment state and the like in the bonding process of the above upper and lower plates. 7 201222076 Further, in order to prepare a plate-shaped first flexible substrate having a first width narrower than the second width, a mesh having a first width is used, or the first width is wider than the first width. The sides of the mesh of the width are either bent by a curved device having a width wider than the first width and then fixed with an electrostatic chuck ESC clamp. Further, the air floating device is further provided so that the lower plate does not contact the lower chuck, and the lower plate composed of the mesh-shaped second flexible substrate is moved without damage in the upper portion of the lower chuck. Here, it is preferable that the upper chuck and the lower chuck are each constituted by a plurality of unit chucks arranged in a mesh shape, and a unit head control device that sequentially adjusts the operation of the unit chuck. Further, preferably, the mesh cutting device further includes the first flexible substrate being vertically cut with respect to the longitudinal direction thereof to process the flexible substrate into a plate-shaped upper plate. In this case, preferably, the mesh cutting device is constituted by a blade type, a whee type or a laser type. The outer 'this time' further includes a particulate removing device composed of an air suction/discharge portion to remove particles generated when the above-described mesh cutting device is used. = Bu: You can also use the ionizer (I〇nizer) nozzle (-Μ, effectively remove the particles generated by cutting by static electricity. In addition, it also includes the carrier, using the above-mentioned mesh to cut the '', mesh The movement is not tight to the side of the mesh. Softness I is outside the lower part of the vacuum chamber cover can be made of a flexible bellows in the form of a bellows' or the vacuum chamber cover is composed of a rigid body, and in the above-mentioned vacuum chamber of 8 201222076 The lower end portion is provided with a 〇-shaped ring. Further, the upper chuck and the vacuum chamber are covered on the second flexible substrate, and at least two rows are arranged side by side to perform two or more vacuum benefits at the same time. According to the present invention, When manufacturing a flexible display, the quality and the production efficiency are greatly improved. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are intended to facilitate the understanding of the present invention, and those skilled in the art can Various modifications are possible within the scope of the technical idea of the present invention. Therefore, the scope of the present invention is not limited by these embodiments. Roll & Sheet 4 is a conceptual diagram for explaining a soft display bonding method using the device of the present invention, and a schematic diagram of a process of forming a vacuum chamber in the device shown in FIG. 3, although the disk pattern is used. ?, /, circle J is not similar, but the most important difference is that the bonding device is different, Figure 3 does not occupy a considerable part of the drive part of the drive, but only a small (four) vacuum (4) 3Q1.
顯示器的製造裝置具備如下結構實現。在固定由第-軟性 基板100加工而成的具備第一 I 上邱欢m 八備第寬度3的板狀的上板15〇的 上。p夾頭375上結合直介它宴j ^ 二盍4〇1 ’而真空室蓋401與上 部夾頭375 —起移動。真空 具至盍401可相對於上部夾頭375 固定’但也可通過上部夾頭移動 夏d76使上部夾頭375 201222076The manufacturing device of the display has the following structure. The plate-shaped upper plate 15A having the first I, the upper, and the third width is processed by the first flexible substrate 100. The p-clamp 375 is bonded to the upper chamber and the vacuum chamber cover 401 is moved together with the upper chuck 375. The vacuum tool 盍 401 can be fixed relative to the upper chuck 375' but can also be moved by the upper chuck. Summer d76 makes the upper chuck 375 201222076
相對于真空室蓋401獨立移動D 下板200由具備比第一寬度a更寬的第二寬度匕的網 狀的第二軟性基板構成，並被下部夾帛挪支撑。另外， 真空室蓋401結合於上部夾頭3?5以與上部夾頭375 一起 移動’而且，以下200為真空室底部，從而與下板2。。 一同構成真空㈣3G1。真空室i 4ϋ1及與其結合的上部 夾頭375通過上板移動裝置4〇5 一起移動，而在圖鈍中’ 上板150從上部擱置於上部央頭375固定之後上部夾頭 375通過上板移動裝置4〇5翻轉18〇度以使上板15〇與下 板200相對滯後，通過上板移動裝置4〇5向上部夾頭3乃 和真空室蓋401下方移動，從而形成真空區域並粘合上板 150和下板200。在圖4b中，因上板15〇在上部夾頭375 從下部固定，因此，與圖4a不同，無需18〇度的翻轉動作， 在通過真空室蓋401形成真空區域之後，上部夾頭375通 過上部夾頭移動裝置376相對于真空室蓋4〇1獨立移動。 上部夾頭移動裝置及下部夹頭移動裝置可使用uvw平臺或 XY 0平臺。 上部夾頭375及下部夾頭分別由真空夾頭（Vacuum 理粘合夾頭（PSC，Physical Sticky Chuck)、多孔陶瓷 夾頭（Porous Ceramic Chuck)及渴流夹頭（v〇rtex Chuck) 為單元夾頭，並組合上述夾頭排列成網格型等，其原因是， 在夾持薄的軟性基板時’可通過依次控制複合構成的單元 夾頭的運行順序防止基板的扭曲。在真空夾頭（Vacuum 10 201222076The lower plate 200 is independently moved with respect to the vacuum chamber cover 401. The lower plate 200 is composed of a mesh-shaped second flexible substrate having a second width 更 wider than the first width a, and is supported by the lower clamp. Further, the vacuum chamber cover 401 is coupled to the upper chuck 3 to 5 to move together with the upper chuck 375' and, hereinafter, 200 is the bottom of the vacuum chamber, and thus the lower plate 2. . Together form a vacuum (4) 3G1. The vacuum chamber i 4ϋ1 and the upper collet 375 coupled therewith are moved together by the upper plate moving device 4〇5, and in the figure blunt the upper plate 375 is moved by the upper plate after the upper plate 150 is placed from the upper portion to the upper end portion 375. The device 4〇5 is turned over 18 degrees to make the upper plate 15〇 and the lower plate 200 relatively lagging, and is moved by the upper plate moving device 4〇5 to the lower chuck 3 and the vacuum chamber cover 401, thereby forming a vacuum region and bonding. Upper plate 150 and lower plate 200. In Fig. 4b, since the upper plate 15 is fixed from the lower portion of the upper chuck 375, unlike the Fig. 4a, there is no need for an 18-inch turning operation, and after the vacuum region is formed by the vacuum chamber cover 401, the upper chuck 375 passes. The upper collet moving device 376 moves independently with respect to the vacuum chamber cover 4〇1. The upper chuck moving device and the lower chuck moving device can use the uvw platform or the XY 0 platform. The upper chuck 375 and the lower chuck are respectively made up of a vacuum chuck (PSC, Physical Sticky Chuck, Porous Ceramic Chuck, and a thirteen chuck (v〇rtex Chuck). The chuck is combined with the above-mentioned chucks in a grid type or the like because the chuck can be prevented from being twisted by sequentially controlling the operation order of the composite unit chucks when the thin flexible substrate is held. (Vacuum 10 201222076
Ch=k )的情況下，可真空吸入固定上板或下板，但也可兼 用。人風機（Air Bl〇wer),以使上板或下板相對於上部失 頭或下部夾頭空氣懸浮（Air F1〇ating) ^在本發明的装 =中，上板150的第一寬度a需比下板2〇〇的第二寬度匕 乍，其原因是，若第二寬度b比第一寬度a窄或相同，則 在利用真空室蓋401形成真空時，因不能完全密封 (ealing)而發生戌漏（Leakage)。 /、要能夠確實形成真空區域，真空室蓋4〇丨的結構和 ;斗~Γ以採用任何形式，而在如圖4a的情況下，真空室蓋 401的下部周圍由波紋管4〇3形狀的柔軟性材料製作而 成。在圖4b的情況下，真空室蓋4〇1由剛性體構成，而在 真空室的下端部安裝〇型環4〇4。另外，在下部夾頭 的下面，設置有攝像頭407以便在上板150和下板2〇〇的 粘合工藝中，視覺（Vision)檢查對齊（Align)狀態等， 從而在粘合之後預先挑選出不合袼面板。在利用上述裝置 在真空區域401完成上板150和下板2〇〇的粘合工藝之 後，在UV硬化裝置302中進行部分硬化工藝。 [上板的供應] 圖5為說明上板的供應以垂直於由網狀的第二軟性基 板構成的下板200的長度方向切割上板15〇、下板2〇〇、真 空室蓋401及上部夾頭375的示意圖。如上所述’上板15〇 的第-寬度a比下板200的第二寬度b窄，才能確保密封 的完整性，防止洩露。因此，上才反15〇可以如圖5所示的 方式供應。 11 201222076 一'若上板150的第一寬度a比下板200的第二寬 度b窄，則如圖5的左側所示，直接將其供應至丨即可。 第二、若上板150原來的寬度c與下板2 00的第二寬 度b相同或比其大，則如圖5的中間所示，利用設置於兩 側的切刀（Slitter) 501切割（Cutting)使上板15〇的 寬度d縮至第一寬度a，之後進行面板製造工藝 並清潔（Cleaning)。 第二、右上板150的原來寬度c與下板2〇〇的第二寬 度b相同或比其大，則如圖5的右側所示，利用網狀物下 部的彎曲裝置（未圖示）和ESC夾具（未圖示），使上板 的第一寬度a變得比下板的第二寬度b窄。 [下板的移送] 由網狀的第二軟性基板構成的下板在固定於下部夾頭 的狀態下與上板粘合。但是，在下板固定於下部失頭之前， 需在下部夾頭的上部向下部夾頭的長度方向移送，但若在 移送時下板的底面與下部夾頭接觸，則因發送劃損 (Scratch)而產生工藝不合格。另外，因下板的上部面塗 布有液晶、密封劑等’因此，不能接觸，而下壓式的壓送 輥（Nip Roll)只能使邊緣（Edge)部接觸，且導致網狀 物（Web)的扭曲。因此，如圖6所示，下板2〇〇在下部夾 頭385的上部’與下部夹頭385並排相隔的狀態下與下部 夾頭385並排移送。圖6為說明在本發明的裝置中通過輥 (Roll) 408移送下板200的過程的剖面圖。下部夾頭385 從真空夾頭（Vacuum 可在多個位置，例如在網格形狀位置以 201222076In the case of Ch = k ), the upper plate or the lower plate can be suctioned in a vacuum, but it can also be used in combination. Air Blower to air float the upper or lower plate relative to the upper or lower collet. In the installation of the present invention, the first width a of the upper plate 150 The second width 匕乍 of the lower plate 2〇〇 is required because the second width b is narrower or the same as the first width a. When the vacuum is formed by the vacuum chamber cover 401, the ealing cannot be completely completed. And Leakage occurs. /, to be able to form a vacuum region, the structure of the vacuum chamber cover 4; and the bucket to be in any form, and in the case of Fig. 4a, the lower portion of the vacuum chamber cover 401 is surrounded by the shape of the bellows 4〇3 Made of soft materials. In the case of Fig. 4b, the vacuum chamber cover 〇1 is composed of a rigid body, and a 〇-shaped ring 4〇4 is attached to the lower end portion of the vacuum chamber. Further, under the lower chuck, a camera 407 is provided to align the Align state or the like in the bonding process of the upper plate 150 and the lower plate 2, thereby pre-selecting after bonding. Does not fit the panel. After the bonding process of the upper plate 150 and the lower plate 2 is completed in the vacuum region 401 by the above apparatus, a partial hardening process is performed in the UV hardening device 302. [Supply of Upper Plate] FIG. 5 is a view showing that the supply of the upper plate cuts the upper plate 15 〇, the lower plate 2 〇〇, the vacuum chamber cover 401 and the length direction of the lower plate 200 which is formed perpendicularly to the second flexible substrate. A schematic view of the upper collet 375. As described above, the first width a of the upper plate 15 is narrower than the second width b of the lower plate 200 to ensure the integrity of the seal and prevent leakage. Therefore, the upper one can be supplied as shown in Fig. 5. 11 201222076 - If the first width a of the upper plate 150 is narrower than the second width b of the lower plate 200, it is directly supplied to the crucible as shown on the left side of FIG. Second, if the original width c of the upper plate 150 is the same as or larger than the second width b of the lower plate 200, as shown in the middle of FIG. 5, it is cut by a slitter 501 disposed on both sides ( Cutting) shrinks the width d of the upper plate 15〇 to the first width a, and then performs a panel manufacturing process and cleaning. Second, the original width c of the right upper plate 150 is equal to or larger than the second width b of the lower plate 2〇〇, and as shown on the right side of FIG. 5, the bending device (not shown) of the lower portion of the mesh is used. The ESC jig (not shown) makes the first width a of the upper plate narrower than the second width b of the lower plate. [Transfer of lower plate] The lower plate composed of the mesh-shaped second flexible substrate is bonded to the upper plate in a state of being fixed to the lower chuck. However, before the lower plate is fixed to the lower part of the head, it needs to be transported in the longitudinal direction of the lower part of the lower chuck, but if the bottom surface of the lower plate contacts the lower chuck during the transfer, the scratch is sent. The process was not qualified. In addition, since the upper surface of the lower plate is coated with a liquid crystal, a sealant, etc., "there is no contact, and the push-down type of the nip roll (Nip Roll) can only contact the edge portion and cause the web (Web). Distorted. Therefore, as shown in Fig. 6, the lower plate 2 is conveyed side by side with the lower chuck 385 in a state where the upper portion ' of the lower chuck 385 and the lower chuck 385 are spaced apart from each other. Figure 6 is a cross-sectional view showing the process of transferring the lower plate 200 by a roller 408 in the apparatus of the present invention. Lower chuck 385 from vacuum chuck (Vacuum can be in multiple positions, for example in grid shape position with 201222076
Chuck)、静電爽頭（ESC’ Electro Static Chuck)、物 理粘合夾頭（PSC，Physical Sticky Chuck)、多孔陶瓷 夾頭（Porous Ceramic Chuck)及渴流夾頭（vortex chuck) 中選擇的至少一種作為單元夾頭。此時’真空夾頭可利用 真空吸入固定下板200,但也可兼作空氣懸浮的吹風機（Air Blower )，以使下板200相對於下部夾頭385空氣懸浮（Air F1 oat 1 ng )。這樣的空氣懸浮概念，也可同樣適用於上板 和上部夾頭。較佳地，下板2 〇 〇通過空氣懸浮從下部夾頭 385相隔的距離f為i〇〇〜5〇〇//m。 [下板的夾持（chucking)] 圖7a至圖7e為說明下板失持於下部夾頭的過程的剖 面圖。如圖7a所不，以空氣懸浮的狀態移送的下板2〇〇下 降，以通過多孔陶瓷夾頭701和靜電夾頭702以網格形狀 排列的下部夾頭385夾持。此時，若下板急劇接觸下 邛夾頭385，則存在下板2〇〇扭曲或劃損的危險，因此， 單儿夾頭控制裝置7G3首先通過多孔陶究夾頭7Gi喷射空 氣’以使下板200空氣懸浮。 心部的多孔陶瓷夾頭7 的情況，也可在其他一 吸入依次進行。 接著，如圖7b所示，通過控制單元夾頭控制裝置7〇3, 通過:於下部夹頭385中心部的多孔陶竟夾頭7〇1首先形 成真空吸人。在本實施例中，通過位於下部夾頭挪的中 701首先形成真空吸入，但根據不同 ""側形成真空吸入。但是，需使真空 接著，如圖7c所示， 通過控制單元夾頭控制裝置703， 13 201222076 擴展通過多孔陶瓷夾頭701形成真空吸入的區域。 最後，通過控制單元夾頭控制裝置7〇3，通過整個多 孔陶瓷夾帛701形成真空吸入’以成為如冑7d所示的狀 態，則將成為下板200接觸於整個下部夾頭385的如圖化 所示的狀態。下板200與下部夾頭385接觸之後運行靜 電夾頭702。 之所以這樣從中央部或某一側部位開始依次形成真空 吸入，是為了防止由網狀的第二軟性基板構成的下板2〇〇 的扭曲。 在本實施例中，只說明了多孔陶瓷失頭7〇丨和靜電為 頭702,但也可使用真空夾頭、物理粘合夾頭及渦流夾頭 [上板的夾持（chucking)] 圖8為上板夾持於上部夾頭的過程的剖面圖。上板b丨 也因為厚度薄’若上部夾頭375加工成具有大氣孔的形 式，則因真空吸人壓力導致上板⑸變形而無法使用。因 此，與上述實施例的下部夾頭385 一樣，上部夹頭奶也 可由多孔陶宪夾頭701和靜電夾頭7G2構成。此時為將 上板150夾持於上部夾頭375,經過如下過程：若通過下 部夾頭385的多孔陶竟夾頭7〇1喷射空氣，則形成：氣縣 浮，而且’在上部夾頭375從其中央部或某—側開始依次 擴大正孔吸附區域。 [網狀物切割器的結構] 圖9a至圖9e為說明將網狀的第—軟性基板加工成板 狀上板的網狀物切割器的示意圖’而各圖為對網狀第一軟 14 201222076 性基板1 51的長度方向的剖面圖。 如圖^所示’由搬運請*緊網狀的第—軟性基板 ^並通過LM導引器903向右侧㈣，從而完成網 狀物供應（webFeedlng)。下部夹頭385通過作為 元夾頭的多孔陶瓷夾頭（未圖 ^丨J /、上。P —側噴射空氣， 從而通過空氣懸浮方式供應第-軟性基板151。在下部夹 頭385的兩側，設置相對于其長度方向垂直切割第一軟性 基板151的網狀物切割裝f 9〇2。上述網狀物切割裝置嫩 由刀片型、輪（-el)型或鐳射型構成。網狀物切割裝置 :〇2具備空氣吸入排出部9。4以向箭頭方向去除切割網狀 物時產生的微粒…利用靜電除塵，還可具備電離器 (low卜可用電離器喷嘴（N〇zzle)，通過靜電有效 去除切割所產生的微粒。接著，如圖9b所示，使上部夾頭 375與真空室盍4()1 一同下降，以從上部夾持第—軟性基 板⑸。接著’如圖9c所示，搬運器9〇ι復原至原始位置， 從而不會使搬運器901妨礙網狀物切割作業。接著，如圖 9d所示’網狀物切割裝置902從下面上升，以與上部夹頭 375的兩端部一起形成微粒去除用腔室並切割第一軟性基 板151。切割時所產生的微粒的防止方法為，在上部夾^ 375的兩端部吹入线並從網狀物切割裝4咖的空氣吸 入排出部904抽出。如圖9e所干，—出+ 圆ye所不兀成切割之後，網狀物 切割裝置902向下移動，而上部夾頭奶固定被切割的板 狀的上板I50並移動，從而準備與下板粘合。 如上所述的本發明的軟性液晶顯示器的製造裝置，在 15 201222076Chuck), ESC' Electro Static Chuck, Physical Sticky Chuck (PSC), Porous Ceramic Chuck, and at least one of the vortex chucks One is used as a unit chuck. At this time, the vacuum chuck can be used to fix the lower plate 200 by vacuum suction, but can also double as an air suspension (Air Blower) to allow the lower plate 200 to be air suspended relative to the lower chuck 385 (Air F1 oat 1 ng ). This concept of air suspension is equally applicable to the upper and upper collets. Preferably, the lower plate 2 〇 〇 is separated from the lower chuck 385 by air suspension by a distance f of i 〇〇 5 〇〇 / / m. [Catching of Lower Plate] Figs. 7a to 7e are cross-sectional views illustrating a process in which the lower plate is lost to the lower chuck. As shown in Fig. 7a, the lower plate 2, which is transferred in an air-suspended state, is lowered to be sandwiched by the lower chuck 385 which is arranged in a grid shape by the porous ceramic chuck 701 and the electrostatic chuck 702. At this time, if the lower plate abruptly contacts the lower jaw 385, there is a risk that the lower plate 2 is twisted or scratched. Therefore, the single chuck control device 7G3 first injects air through the porous ceramic chuck 7Gi. The lower plate 200 is air suspended. In the case of the porous ceramic chuck 7 of the heart, it can also be carried out sequentially in the other one. Next, as shown in Fig. 7b, by the control unit chuck control unit 7〇3, vacuum suction is first formed by the porous ceramic chuck 7〇1 at the center of the lower chuck 385. In the present embodiment, vacuum suction is first formed by the middle 701 located in the lower chuck, but vacuum suction is formed according to the different "" sides. However, it is necessary to make the vacuum. Next, as shown in Fig. 7c, the vacuum suction region is formed by the porous ceramic chuck 701 by the control unit chuck control device 703, 13 201222076. Finally, by the control unit collet control device 7〇3, a vacuum suction is formed through the entire porous ceramic jaw 701 to become a state as shown in FIG. 7d, which will become the lower plate 200 contacting the entire lower collet 385. The state shown. The static chuck 702 is operated after the lower plate 200 is in contact with the lower chuck 385. The reason why the vacuum suction is sequentially formed from the central portion or a certain side portion is to prevent the distortion of the lower plate 2A composed of the mesh-shaped second flexible substrate. In the present embodiment, only the porous ceramic head 7 静电 and the static electricity are the head 702, but a vacuum chuck, a physical bonding chuck, and a vortex chuck [chucking] can also be used. 8 is a cross-sectional view of the process of clamping the upper plate to the upper chuck. The upper plate b丨 is also thin because of the fact that if the upper chuck 375 is processed into a shape having an atmospheric hole, the upper plate (5) is deformed due to vacuum suction pressure and cannot be used. Therefore, like the lower chuck 385 of the above embodiment, the upper chuck milk can also be constituted by the porous ceramic chuck 701 and the electrostatic chuck 7G2. At this time, in order to clamp the upper plate 150 to the upper chuck 375, the following process is carried out: if the air is sprayed through the porous ceramic chuck 7 〇 1 of the lower chuck 385, it is formed: the gas county floats, and 'the upper chuck The 375 expands the positive hole adsorption region in order from the central portion or the side thereof. [Structure of Mesh Cutter] FIGS. 9a to 9e are schematic views for explaining a mesh cutter for processing a mesh-shaped first flexible substrate into a plate-like upper plate, and each of the figures is a mesh first soft 14 201222076 Cross-sectional view of the substrate 1 51 in the longitudinal direction. As shown in Fig. 2, the first flexible substrate is transported by a * mesh and passed to the right (4) by the LM guide 903, thereby completing the web supply (webFeedlng). The lower chuck 385 is supplied to the first flexible substrate 151 by air suspension by a porous ceramic chuck as a collet head (not shown), and the P-side is sprayed with air. On both sides of the lower chuck 385 And a mesh cutting device f 9〇2 for vertically cutting the first flexible substrate 151 with respect to the longitudinal direction thereof. The mesh cutting device is formed of a blade type, a wheel type (-el) type or a laser type. Cutting device: 〇2 is provided with an air suction and discharge portion 9. 4 particles which are generated when the cutting mesh is removed in the direction of the arrow... by means of electrostatic dust removal, an ionizer can be provided (lower ionizer nozzle (N〇zzle) can be passed through The static electricity effectively removes the particles generated by the cutting. Next, as shown in Fig. 9b, the upper chuck 375 is lowered together with the vacuum chamber 盍4()1 to sandwich the first flexible substrate (5) from the upper portion. Then, as shown in Fig. 9c It is shown that the carrier 9 is restored to the original position so that the carrier 901 does not interfere with the mesh cutting operation. Next, as shown in Fig. 9d, the 'mesh cutting device 902 rises from below to the upper chuck 375. The ends of the two together form particles The first flexible substrate 151 is cut except for the chamber, and the particles generated during the cutting are prevented by blowing a line at both end portions of the upper clamp 375 and cutting the air from the mesh to the discharge portion 904. After the extraction is completed as shown in Fig. 9e, the mesh cutting device 902 moves downward, and the upper collet milk fixes the cut plate-shaped upper plate I50 and moves, thereby preparing Bonding to the lower plate. The manufacturing apparatus of the flexible liquid crystal display of the present invention as described above, at 15 201222076
Roll & Sheet方式的真空粘合工藝中，可大幅減少工藝時 間和不合格率。另外，將上述上部夾頭375及真空室蓋4〇1 在上述網狀的第二軟性基板151上並排具備至少兩列，以 同時進行兩處以上真空粘合，從而大幅縮短工藝時間。 【圖式簡單說明】 圖1為現有技術的液晶顯示器的製造工藝流程圖； 圖2為用以說明本發明的申請人在韓國專利申靖 20 0 9-90279號中提出的R〇u 方式的軟性顯示器 粘合方法的概念圖； 圖3為用以說明使用本發明的裝置的Roll & Sheet方 式的軟性顯示器粘合方法的概念圖； 圖4a至圖4b為在使用本發明的裝置中形成真空室的 過程的示意圖； 圖5為說明上板的廡 + 供應以垂直於由網狀的第二軟性基 板構成的下板的長度方向切 。上扳下板、真空室蓋及上 邛夾頭的示意圖； 圖；圖6為說明在本發明的裝置中移送下板的過程的剖面 面圖圖7a至圖7e為說明τ板夾持打部夾頭的過程的剖 圓8為上板夾持於上部失頭的過程的剖面圖； 狀上：二至圖9e為說明將網狀的第-軟性基板加工成板 狀上板的網狀物切割器的示意圖。 201222076 【主要元件符號說明】 1 5 0 ~上板； 1 51 ~網狀的第一軟性基板 2 0 0 ~下板； 375〜上部夾頭； 376〜上部夾頭移動裝置； 385〜下部夾頭； 401〜真空室蓋； 407~視覺檢查專用攝像頭 901〜搬運器； 902〜網狀物切割裝置。In the vacuum bonding process of the Roll & Sheet method, the process time and the failure rate can be greatly reduced. Further, the upper chuck 375 and the vacuum chamber cover 4〇1 are arranged side by side on the mesh-shaped second flexible substrate 151 in at least two rows to simultaneously perform vacuum bonding at two or more places, thereby greatly shortening the process time. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flow chart showing a manufacturing process of a liquid crystal display of the prior art; FIG. 2 is a diagram showing the R〇u mode proposed by the applicant in the Korean Patent Application No. 20 09-90279. FIG. 3 is a conceptual diagram for explaining a method of bonding a flexible display of a Roll & Sheet method using the apparatus of the present invention; and FIGS. 4a to 4b are formed in the apparatus using the present invention. Schematic diagram of the process of the vacuum chamber; Fig. 5 is a view showing that the 庑+ supply of the upper plate is cut perpendicular to the length of the lower plate composed of the second flexible substrate. Schematic diagram of the upper plate, the vacuum chamber cover and the upper jaw; Fig. 6 is a cross-sectional view showing the process of transferring the lower plate in the device of the present invention. Figs. 7a to 7e are diagrams illustrating the clamping of the τ plate. The cross-section 8 of the process of the chuck is a cross-sectional view of the process of clamping the upper plate to the upper portion; FIG. 9e is a mesh for processing the mesh-shaped soft substrate into a plate-like upper plate. Schematic diagram of the cutter. 201222076 [Description of main component symbols] 1 5 0 ~ upper plate; 1 51 ~ mesh first flexible substrate 2 0 0 ~ lower plate; 375 ~ upper chuck; 376 ~ upper chuck moving device; 385 ~ lower chuck 401 ~ vacuum chamber cover; 407 ~ visual inspection dedicated camera 901 ~ carrier; 902 ~ mesh cutting device.