201226847 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種角度量測系 合式角度量測系統。 貝]系統，特別是指-種組 【先前技術】 工作物在施工的過程中是否有因為外力或 震動而產生偏轉，對於工作物施 乍的 a义古、,τ 施工的精密度有顯著影響， 二有以下三種方式可以量測工作物在運作前後的角度變 上的不便。 +易克服的缺點’而造成使用 、則系祕彎：。第WO480號「_種繞射式六自由度光電量 +系，、先」專利案：本專利案是以繞射式干涉法進行量測， ^專利案所使用的量測儀器價格昂貴，且難以達成連續 方疋轉量測。 旦2·台灣公告第132〇478號「一種二維光電式高精度角度 里測、統」專利案：本專利案是以多重反射法的原理進行 角度量測，但是本專利案具有架構精度要求高，不易設置 等缺點。 (3·台灣公告第Μ362062號「放電加工機的工作台」專 1案本專利案是α光學κ量測法進行量測，4旦本專利案 在實際使用時的量測精度不足。 所以，如何改善以上所述的缺點，一直是本技術領威 者持續努力的重要目標。 201226847 【發明内容】 因Γ、’本發明之㈣，即在提供—種能夠改變設置方 統 式並能量測多個角度變化量的組合式角度量測系 於是，本發明組合式角度量測系統，用以量到一工作 件對應將空間以-第—方向、—第二方向， 向定義時，該工作件沿該第一、二、二 —万向為軸心偏轉的 角度變化量’該工作件具有一沿平行該第三方向設置的作 動桿’該組合式角度量測系統包含一光源裝置、一干涉產 生裝置、一光轉向裝置，以及一接收裝置。 該光源裝置能產生朝該第一方向行進的光束。該干涉 產生裝置包括-直線型的光路’以及分別設置於該光路相 反兩端的-分光鏡組與-反射鏡組。該光轉向裝置是可拆 ㈣連接找干涉產生裝置上。該接收裝置能接收該光源 裝置產生的光束在通過該干涉裝置後的光現象。 以所述光路平行於該第三方向地將該干涉產生裝置設 置於該作動桿上時為-第_量測位置，且在該第—量測位 置時，言亥《源裝置產生的光束直接進入該干涉產生裝置 -第-量測狀態，該光源裝置產生的光束經該光轉向裝置 後進入該干涉產生裝置為一第二量測狀態，在該第一量測 狀態時’該光源裝置產生的光束通過該分光鏡組後配合該 反射鏡組而對應該工作件的作動產生沿該第二方向為軸心 的干涉現象，在該第二量測狀態時，該光源裝置產生的光 束進入該光轉向裝置時被轉向而沿該第二方向進入該光干 涉產生裝置，並在通過該分光鏡組後配合該反射鏡組而對 201226847 應該工作件的作動產生沿該第一方向為軸心的干涉現象。 本發明的功效在於：在該光源裝置、工作件的設置空 間受限時’藉由該光轉向裝置使該光束轉向而能量測該方 向的角度變化量，而且該光轉向裝置是可拆地設置於該干 涉產生裝置上，因此能夠提供多種組合方式而能量測多個 角度變化量。 【實施方式】201226847 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an angle measuring coupling angle measuring system. ]] system, especially refers to the group [previous technique] Whether the work object has deflection due to external force or vibration during the construction process, which has a significant influence on the precision of the construction of the work and the precision of the τ construction. Second, there are three ways to measure the inconvenience of the work object before and after the operation. + The shortcomings that are easy to overcome, and the use of it, the secret is: No. WO480 "_ kind of diffraction type six-degree-of-freedom photoelectric quantity + system, first" patent case: This patent case is measured by diffraction interferometry, and the measuring instrument used in the patent case is expensive, and It is difficult to achieve continuous measurement. Dan 2·Taiwan Bulletin No. 132〇478 “A two-dimensional photoelectric high-precision angle measurement, system” patent case: This patent case is based on the principle of multiple reflection method for angular measurement, but this patent case has architectural accuracy requirements. High, difficult to set up and other shortcomings. (3. Taiwan Announcement No. 362062 "Working Table of Electric Discharge Machining Machine" Specialized Case This patent case is measured by the α-optical κ measurement method, and the measurement accuracy of the patent case in actual use is insufficient. How to improve the above-mentioned shortcomings has always been an important goal of the continuous efforts of the technology leader. 201226847 [Summary of the Invention] Because of the "fourth of the present invention, that is, providing a kind of ability to change the setting method and energy measurement The combined angle measurement system of the plurality of angular change amounts is, wherein the combined angle measuring system of the present invention is used to measure the work when the work piece corresponds to the space in the -first direction and the second direction. The angular change amount of the piece along the first, second, and second directions is 'the working piece has an actuating rod disposed along the third direction. The combined angle measuring system comprises a light source device, An interference generating device, a light steering device, and a receiving device. The light source device is capable of generating a light beam traveling in the first direction. The interference generating device includes a linear optical path and is respectively disposed on the light beam The opposite ends of the optical path - the beam splitter group and the - mirror group. The light steering device is a detachable (four) connection looking interference generating device. The receiving device can receive the light phenomenon of the light beam generated by the light source device after passing through the interference device. When the optical path is parallel to the third direction, the interference generating device is disposed on the actuating rod as a -th measuring position, and in the first measuring position, the light source generated by the source device is directly Entering the interference generating device-the first measuring state, the light beam generated by the light source device enters the interference generating device after the light steering device is in a second measuring state, and in the first measuring state, the light source device generates The light beam passing through the beam splitter group cooperates with the mirror group to act on the working member to generate an interference phenomenon along the second direction. In the second measurement state, the light beam generated by the light source device enters the The light steering device is turned to enter the optical interference generating device in the second direction, and the movable portion of the 201226847 should be actuated by the mirror group after passing through the beam splitter group. An interference phenomenon of the axis along the first direction. The effect of the present invention is that when the light source device and the installation space of the workpiece are limited, the beam is deflected by the light steering device to measure the angle of the direction. The amount of change, and the light steering device is detachably disposed on the interference generating device, so that a plurality of combinations can be provided to measure a plurality of angular changes.
有關本發明t前述及其他技術内纟、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可 清楚的呈現。 參閱圖1與圖2 ’為本發明組合式角度量測系統的較佳 實施例，用以量測一工作件2對應將空間以一第一方向X、 -第二方向Y’以及一第三方向z定義時該工作件2沿 該第"""*方向X、第大· V 够一 , 一方向Y、第二方向z為軸心偏轉的角度 變化量’該工作件2具有-沿平行該第三方向Z設置的作 動梓21。特別說明的是，在本較佳實施例中該工作件2 是以加工機的主軸頭作說明’當然該工作# 2也可以是車 床設備或其他會位移作業進而導致角度變化的裝置。 參閱圖1與圖3，本發明組合式角度量測系統包含-光 源裝置3、—干涉產生裝置4、一光轉向裝置5,以及-接 該光源裝置3能產生朝該第一方向X行進的光束31。 在本較佳實施例中’該光源裝置3是以雷射據以實施而 該先束31 $同調雷射光’然而其他具有方向性的光也能夠 201226847 達成相同功效’因此不應以本較佳實施例所揭露的内容為 限。 該干涉產生裝置4包括一直線型的光路μ，以及分別 设置於該光路41相反兩端的一分光鏡組42與一反射鏡組 43。在本較佳實施例中’該分光鏡組42具有二平行設置的 分光鏡421作說明，當然該分光鏡組42也能夠只使用一個 分光鏡421 ’另一個分光鏡421則以一與該分光鏡421間隔 设置的角鏡取代。在本較佳實施例中，該反射鏡組43具有 二平行且對應該二分光鏡421設置的反射鏡43 i。 參閱圖3與圖4’該光轉向裝置5是可拆卸地連接在該 干涉產生裝置4上。在本較佳實施例中，該光轉向裝置5 具有一改變該光束31行進方向的五稜鏡51。該五稜鏡51 具有二相對設置的反射面511、一連接所述反射面511 一端 的連接面512，以及二彼此相連接並連接於所述反射面511 另一端的外表面513。在本較佳實施例中，所述反射面5 11 的長度相等，所述外表面513的長度相等，所述反射面511 朝該連接面512 —側延伸的延伸線的夾角θι為45度，所 述外表面513彼此相連接處的夾角Θ2為90度。藉由該光 轉向裝置5的設計能使該光束3 1轉折90度。 °玄五稜鏡51疋以圖4所示的方式使光束31的行進方 向轉折90度’雖然使用45度平面鏡也能使光轉折9〇度， 但是使用五棱鏡51的優點在於當光束3丨產生位移時，由 於該光束31會在五稜鏡51内進行兩次反射，因此入射該 五稜鏡51的光束31與射出該五稜鏡51的光束31會因為 201226847 兩次反射而維持夾角90度。 該接收裝置6能接收該光源裝置3產生的光束η在通 過該干涉裝置後的光現象。在本較佳實施例中，該接收裝 置ό是以電荷柄合元件（Charge c〇upled ^心，ccd)據 以實施’當然也可以使用其他光檢測器，不應以本較佳實 施例所揭露的内容為限。 參閱圖1與圖2,該工作件2在作業時是沿該光路41 的方向往復移動，因此該反射鏡組43是設置於該作動桿21 上而能隨該工作件2移動，該分光鏡組42則是相對於該反 射鏡組43不動地設置，因此當該工作件2移動時，該反射 鏡組43與該分光鏡組42的距離會改變而造成該光路*丨的 長度改變，實際上該工作件2在重覆地往復移動與作業之 後可能會沿第-方向X、第二方向γ、第三方向2為軸心產 生角度變化量，角度變化之後的施工作業容易產生誤差。 本發明組合式角度量測系統能夠以一第一量測位置或 一第二量測位置設置進行量測。在該第一量測位置時，還 月b進一步分為一第一量測狀態或一第二量測狀態。在該第 二量測位置時，還能進一步分為一第三量測狀態或一第四 量測狀態。 參閱圖1與圖2，以下將對所述量測位置與狀態作詳細 的說明。以所述光路41平行於該第三方向z地將該干涉產 生裝置4 置於該作動桿21上時為該第一量測位置。在該 第一量測位置時，該光源裝置3產生的光束3 1如圖2所示 直接進入該干涉產生裝置4為該第一量測狀態。該光源裝 201226847 置3產生的光束31如圖1所示經該光轉向裝置5後再進入 δ亥干涉產生裝置4為該第二量測狀態。 參閱圖2，在該第一量測狀態時，該光源裝置3產生的 光束31 i接射入該分光鏡組42，也就是說，_ 2所示為不 設置該光轉向裝置5(見圖υ的態樣。該光束31在通過 該分光鏡組42後配合該反射鏡組43而對應該工作件2的 作動產生沿該第二方向γ為軸心的干涉現象。也就是說， 該第一量測位置的第一量測狀態能用以量測在該工作件2 沿該第三方向Ζ移動作業時，以該第二方向γ為轴心的角 度變化量，並將圖2所示的量測狀態記為叮⑷。 參閱圖1，在該第二量測狀態時，該光源I置3產生的 光束31先進人該光轉向裝置5再被轉向而沿該第二方向γ 進入該光干涉產生裝置4,並在通過該分紐組42後配合 該反射鏡組43而對應該工作件2的作動產生沿該第一方向 X為軸心的干涉現象。也就是說，該第__位置的第二量 測狀態能用以量測在該卫作件2沿該第三方向Z移動作業 2以該第二方向X為軸心的角度變化量，並將圖i所示 的量測狀態έ己為ex ( z )。 參閱圖5與圖6,以所述光路41平行於該第二方向γ 干:產生裝置4設置於該作動桿2ι上時為該第二量 如圖6該第二量測位置時’該光源裝置3產生的光束 31如圖6所示直接進入該干涉產生裝置4 態。該光源裝置3產生的光束31如圖5所示 置5後再進人該干涉產生裝置4為該第四量測狀;:裝 201226847 參閱圖6 ’在4第二量測狀態時，該光源裝置3產生的 光束直接射人該分光鏡組42，也就是說圖6所示為不 設置該光轉向裝置5(見圖5)㈣樣。該光束3ι在通過 該分光鏡組42後配合該反射鏡組43而對應該卫作件2的 作動產生沿該第三方向Z為軸心的干涉現象。也就是說， 該第二量測位置的第三量測狀態能用以量測在該工作件2 沿該第二方向γ移動作業時’以該第三方向z為軸心的角 度變化量’並將圖6所示的量測狀態記為ez ( y )。The foregoing and other technical features, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. 1 and FIG. 2 ' is a preferred embodiment of the combined angle measuring system of the present invention, for measuring a working piece 2 corresponding to a space in a first direction X, a second direction Y', and a third When the direction z is defined, the workpiece 2 has an angle change along the first """* direction X, the first large V, a direction Y, and the second direction z is an angular change amount of the axis deflection. - an actuating jaw 21 arranged parallel to the third direction Z. Specifically, in the preferred embodiment, the work piece 2 is illustrated by the spindle head of the processing machine. Of course, the work #2 may also be a lathe device or other device that causes displacement to cause an angular change. Referring to Figures 1 and 3, the combined angle measuring system of the present invention comprises a light source device 3, an interference generating device 4, a light steering device 5, and a light source device 3 capable of generating a direction toward the first direction X. Light beam 31. In the preferred embodiment, the light source device 3 is implemented by laser irradiation and the first beam 31$ is equivalent to the laser light. However, other directional light can also achieve the same effect in 201226847. Therefore, it should not be preferred. The content disclosed in the embodiments is limited. The interference generating device 4 includes a linear optical path μ, and a beam splitter group 42 and a mirror group 43 respectively disposed at opposite ends of the optical path 41. In the preferred embodiment, the beam splitter group 42 has two spectroscopic mirrors 421 arranged in parallel. Of course, the beam splitter group 42 can also use only one beam splitter 421 'the other beam splitter 421 is used to split the beam. The mirror 421 is replaced by a corner mirror that is spaced apart. In the preferred embodiment, the mirror set 43 has two mirrors 43i that are parallel and disposed corresponding to the dichroic mirror 421. Referring to Figures 3 and 4', the light steering device 5 is detachably coupled to the interference generating device 4. In the preferred embodiment, the light redirecting device 5 has a fifth turn 51 that changes the direction of travel of the beam 31. The five turns 51 have two oppositely disposed reflecting surfaces 511, a connecting surface 512 connecting one end of the reflecting surface 511, and two outer surfaces 513 connected to each other and connected to the other end of the reflecting surface 511. In the preferred embodiment, the lengths of the reflecting surfaces 5 11 are equal, the lengths of the outer surfaces 513 are equal, and the angle θ of the extending line of the reflecting surface 511 extending toward the side of the connecting surface 512 is 45 degrees. The angle Θ 2 at which the outer surfaces 513 are connected to each other is 90 degrees. The beam 3 1 is turned 90 degrees by the design of the light steering device 5. °Xuan Wuyi 51疋 turns the traveling direction of the light beam 31 by 90 degrees in the manner shown in Fig. 4 although the 45 degree plane mirror can also make the light turn 9 degrees, but the advantage of using the pentaprism 51 is that when the beam 3 is generated In the case of displacement, since the light beam 31 is reflected twice in the five turns 51, the light beam 31 incident on the five turns 51 and the light beam 31 emitted from the five turns 51 are maintained at an angle of 90 degrees due to the two reflections of 201226847. The receiving device 6 is capable of receiving a light phenomenon in which the light beam η generated by the light source device 3 passes through the interference device. In the preferred embodiment, the receiving device is implemented by a charge handle element (ccd), and of course other light detectors may be used, which should not be used in the preferred embodiment. The content disclosed is limited. Referring to FIG. 1 and FIG. 2, the working member 2 reciprocates in the direction of the optical path 41 during operation, so that the mirror group 43 is disposed on the operating rod 21 and can move with the working member 2, the beam splitter The group 42 is fixedly disposed with respect to the mirror group 43. Therefore, when the workpiece 2 moves, the distance between the mirror group 43 and the beam splitter group 42 changes to cause the length of the optical path to change. After the workpiece 2 is repeatedly reciprocated and moved, the amount of change in the angle may be generated in the first direction X, the second direction γ, and the third direction 2, and the construction work after the angle change is likely to cause an error. The combined angle measuring system of the present invention is capable of measuring at a first measurement position or a second measurement position setting. In the first measurement position, the monthly b is further divided into a first measurement state or a second measurement state. In the second measurement position, it can be further divided into a third measurement state or a fourth measurement state. Referring to Figures 1 and 2, the measurement position and state will be described in detail below. When the optical path 41 is placed parallel to the third direction z, the interference generating device 4 is placed on the actuating lever 21 as the first measuring position. In the first measurement position, the light beam 3 1 generated by the light source device 3 directly enters the interference generating device 4 as shown in Fig. 2 for the first measurement state. The light source 31 generated by the light source device 201226847 passes through the light steering device 5 as shown in FIG. 1 and then enters the δH interference generating device 4 for the second measurement state. Referring to FIG. 2, in the first measurement state, the light beam 31 i generated by the light source device 3 is incident into the beam splitter group 42, that is, _ 2 is not provided with the light steering device 5 (see FIG. The action of the beam 31 after the beam 31 is matched by the mirror group 42 and corresponding to the operation of the workpiece 2 produces an interference phenomenon along the second direction γ as an axis. The first measurement state of the measurement position can be used to measure the angular change amount of the second direction γ as the axis when the workpiece 2 moves in the third direction, and the amount of the angle change is shown in FIG. 2 The measurement state is recorded as 叮(4). Referring to Fig. 1, in the second measurement state, the light source I is set to 3 and the light beam 31 is advanced. The light steering device 5 is again turned to enter the second direction γ. The light interference generating device 4, after passing through the branch group 42 and cooperating with the mirror group 43, acts on the workpiece 2 to generate an interference phenomenon along the first direction X. That is, the _ a second measurement state of the position _ can be used to measure the second operation in the third direction Z of the guard 2 to the second party X is the angular change amount of the axis, and the measurement state shown in Fig. i is ex x (z). Referring to Fig. 5 and Fig. 6, the optical path 41 is parallel to the second direction γ: the generating device 4 is disposed on the actuating lever 2ι when the second amount is as shown in the second measuring position of FIG. 6. The light beam 31 generated by the light source device 3 directly enters the interference generating device 4 state as shown in FIG. 6. The light source device 3 The generated light beam 31 is set to 5 as shown in FIG. 5 and then enters the interference generating device 4 for the fourth measurement state;: 201226847 Referring to FIG. 6 'In the second measurement state, the light source device 3 is generated. The light beam directly hits the beam splitter group 42, that is, the light steering device 5 (see Fig. 5) (4) is not provided as shown in Fig. 6. The light beam 3ι is matched with the mirror group after passing through the beam splitter group 42. 43. The action corresponding to the guard 2 generates an interference phenomenon along the third direction Z. That is, the third measurement state of the second measurement position can be used to measure the work piece 2 When the operation is moved in the second direction γ, 'the amount of change in the angle in which the third direction z is the axis' and the measurement state shown in FIG. 6 is denoted as ez ( y).
參閱圖5，纟該第四量測狀態時，該光源裝置3產生的 光束是先進人該光轉向裝置5並被轉向之後再沿該第 三方向Z進入該光干涉產生裝置4，並在通過該分光鏡組 42後配合該反射鏡組43而對應該工作件2的作動產生沿該 第-方向X為軸心的干涉現象。也就是說，該第二量測位 置的第四量測狀態能用以量測在該工作件2沿該第二方向Y 移動作業時，以該第一方向χ為軸心的角度變化量，並將 圖5所示的量測狀態記為ex ( y )。 綜上所述，在該光源裝置3、工作件2的設置空間或方 向受限時’本發明組合式角度量測系統藉由該光轉向裝置5 使該光束31轉向而能量測該方向的角度變化量，而且該光 轉向裝置5是可拆地設置於該干涉產生裝置4上因此能 夠提供多種組合方式而能量測以多個方向為軸心的角度變 化量，故確實能達成本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 201226847 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一立體圖，說明本發明組合式角度量測系統的 較佳實施例的ex ( z )量測狀態； 圖2是一立體圖，說明該較佳實施例的ey ( z )量測狀 態； 圖3是一示意圖，輔助說明該較佳實施例的分光鏡組 、反射鏡組、光路； 籲 圖4是一示意圖’說明該較佳實施例的五稜鏡； 圖5是一立體圖，說明該較佳實施例的ex ( y )量測狀 態；以及 圖6是一立體圖，說明該較佳實施例的ez ( y )量測狀 態0Referring to FIG. 5, in the fourth measurement state, the light beam generated by the light source device 3 is the advanced person of the light steering device 5 and is turned and then enters the light interference generating device 4 in the third direction Z, and passes through The spectroscope group 42 is then fitted to the mirror group 43 to act on the workpiece 2 to generate an interference phenomenon along the first direction X. That is, the fourth measurement state of the second measurement position can be used to measure the angular change amount of the first direction χ as the axis when the workpiece 2 moves in the second direction Y, The measurement state shown in Fig. 5 is denoted as ex ( y ). In summary, when the light source device 3 and the installation space or direction of the workpiece 2 are limited, the combined angle measuring system of the present invention deflects the light beam 31 by the light steering device 5 to measure the direction. The amount of change in angle, and the light steering device 5 is detachably disposed on the interference generating device 4, so that various combinations can be provided and energy can be measured in an amount of angle change in a plurality of directions. Therefore, the present invention can be achieved. The purpose. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent change and modification of the scope of the invention and the description of the invention are as follows. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an ex (z) measurement state of a preferred embodiment of the combined angle measuring system of the present invention; FIG. 2 is a perspective view showing the ey of the preferred embodiment ( z) measurement state; FIG. 3 is a schematic view for explaining the beam splitter group, the mirror group, and the optical path of the preferred embodiment; FIG. 4 is a schematic view showing the five 该 of the preferred embodiment; FIG. A perspective view illustrating the ex ( y ) measurement state of the preferred embodiment; and FIG. 6 is a perspective view illustrating the ez ( y ) measurement state of the preferred embodiment.
1010
201226847 【主要元件符號說明】 2 ..........工作件 21.........作動桿 3 ..........光源裝置 31.........光束 4 ..........干涉產生裝置 41 .........光路 42 .........分光鏡組 421 .......分光鏡 43 .........反射鏡組 431.......反射鏡 5 ..........光轉向裝置 51…… …·五稜鏡 511 ··· •…反射面 512… •…連接面 513… —外表面 6 ....... •…接收裝置 X....... —第 方向 Y....... •…第二方向 Z....... —第一方向 Θ 1 ·· •…夾角 0 2··· •…夾角201226847 [Explanation of main component symbols] 2 ..........Working parts 21.........Acoustic levers 3 ..........Light source devices 31.... ..... Beam 4 ..... Interference generating device 41 ......... Optical path 42 .... Beam splitter group 421 ..... .. Beam splitter 43 .... mirror group 431....... mirror 5 .......... light steering device 51 ... ... · five 511 · ··•...Reflecting surface 512... •...Connection surface 513...——Outside surface 6.......•...Receiving device X.......—First direction Y....... •... The second direction Z....... —the first direction Θ 1 ·· •...the angle 0 2··· •...the angle