201224580 六、發明說明： 尤其是對於顯示模組製程中液 補方法與系統。 Q曰 【發明所屬之技術領域】 本發明係為修補技術， 組立製程（cell)段之修面板 【先前技術】 :曰:顯示器為非主動發光元件，其色 =組提供，搭配驅動電路與液晶控制形成 n母—個晝素特定顏色，不同顏㈣畫素即形 St面。面板若存在瑕疲’將造成顯示器中該像素益 顯需色彩’而形成亮點或是暗點，尤以亮點對 使时而謂別明顯，因此亮點數亦為面板等級評 ^，之—。如圖―所示’該_為液晶顯示模組示意 二U晶顯不模組1〇的上下兩面貼附有-偏光板11與 測試時畫面會產生嚴重漏光二= 丁 H、月光模組結合後，所形成的液晶顯示器產生黑 η。在修補偏光板n與12所產生的亮點缺^ ^ v :子雷射加J1 ’不過這樣的加卫方式熱影響區大， 導致顯示器周圍區域以及偏光板表面受損。 在習用的修補技術中’例如：中華民國公開號 2/〇_827819所提出的液晶顯示面板之修復方法，其係利用υ 第一道奈秒雷射使遽光片產生間隙裂縫，第二道飛秒雷射 (450·、1〇ΜΗζ以上）或二極體雷射（Diode Laser)，透過 201224580 線性吸收使已有間隙的濾光片產生物理性質變化，以降低 亮點透光性。此外，又如中華民國公開號200829977與 200887821揭露一種液晶顯示面板之修復方法與裝置，其 係使用450ηηι飛秒雷射，利用RGB線性吸收區間進行修 復，需由液晶顯示器之電晶體面加工，若從彩色濾光面進 行修復，則易破壞偏光膜。 另外又如WO 2008-156286揭露一種修補方法，其係透 過雷射如、射，使光阻材料和玻璃之間形成間隙（gap )，再透 φ 過雷射配合掃描將周圍黑色矩陣（black matrix)融化帶至 gap中，使有亮點的光阻區域形成黑化。（非直接黑化光 阻）。又如美國專利US.Pat_No.7,502,094也揭露一種修補 方法’其係透過雷射（Nd:YAGlaser 380〜740nm，<55Hz) 以光罩之方式照射，使濾光片面向基材面產生黑化（使光 源所產生的光線無法通過濾光片），因照射過程中產生擴 散區’因此需以三組大小不同之光罩進行加工，修補亮 點。此外’又如美國專利US.Pat.No.7,636,148 φ 則揭露一種修復液晶顯示器的方法與系統，其係揭露 三種修復方式，第一種為在面板下上的玻璃基材上鍍上一 層修復膜，將有亮點的位置利用雷射（YAG、excimer、 diode laser)加工修復膜。第二種在黑色矩陣加工。第三種 在支撐物（pattern spacer)加工將融化的支撐物覆蓋到有亮 點的彩色光阻上。而美國專利US.Pat.No.7,126,232，亦是 屬於將修復膜（repair film)轉移至缺陷位置的一種修補機 制。 另外，又如美國專利 US.Pat.No.5,926,246 或 201224580 US.Pub.No.2006050623也揭露—種修復方法，其係利用雷 射加工在液晶面板裡的配向膜，利用偏光膜旋轉方向來檢 測7C點區，進行雷射加工配向膜。而中華民國新型專利 M381804，則提供-種含m片之顯示器之修補裝置， 係包含至少-雷射源、至少二反射鏡組、至少二鏡頭與至 少-鏡組控制單it，其可選擇性輸出不同波長之f射光以 黑化濾、光片上不關色之色點，而完成亮點修補。. 【發明内容】 本發明提供平面顯示模組之修財法與純，盆係禾 用飛秒雷射聚焦至對應到有瑕_偏光板上 偏朵柄 進行改質加h由於飛秒雷射可讓被加卫之偏光板 點，因此可以直接修補具有瑕㈣顯示㈣ 顯示模組内其他區域的結構。 而不㈢彳貝傷 本發明提供平面顯示模組之修補方法 飛秒雷射光透過偏光板上方之表層，取隹^糸、、先，其係使 亮點瑕疵之位置，使偏光板内層進行=質、:偏光板上對應 形成面板上之亮點變成暗點，並且不合斟黑化，使原來所 害，提高顯示器產品的品質與等級。 ”他區域造成傷 本發明提供平面顯示模組之修補方 以在液晶_模組生產過程中之液晶組立、„，其係可 程時，即對具有亮點缺陷的顯示模組進〜=王（cell)段製 晶顯示器之製程的良率與生產效率。仃k復，以提升液 在-實施例中，本發明提供一種 卸顯不模組修補方 201224580 貼附有下列步驟··提供一平面顯示模組’其表面 …接供飞"板，該平面顯示模組具有至少一亮點；以及 爾射聚焦照射於對應該亮點之該偏光板上，使 質之錢光板產生非線性多光子吸收而形成一改 貝Q域，進而將該亮點轉換成暗點。 系二1::中’=?供一種平面顯示模組修補 =二千面顯示模組；以及一飛秒雷射源，其係提供一 以聚焦照射於對應該亮點之該平面顯示模组 而將平：顯示模組產生非線性多光子吸收而改質，進 而將该売點轉換成暗點。 貝遲 【實施方式】 為使貴審查委員能對本發明之特徵、目的 更進-步的認知與瞭解，下文特將本發明 匕有 部結構以及設計的理念原由進行說明，以使得：= 可'了解本發明之特點，詳細說明陳述如下·♦-貝 請參閱圖二所示，該圖係為本發明 補方法實關流㈣意目。祕财Μ首 供-平面顯示模組。如圖三所示，該圖係為平：’：：提 剖面示意圖。本實施例中，該平面顯示模組:、、不杈組 面顯示模組，但不以此為限，只要是L糸為液晶平 示器都可以利用本實施例之方法予以：補：：：光板之顯 顯示模組係為在液晶組立製程例令之 光板之液晶顯示模組。 7成之具有偏 201224580 基板-液晶層單元3〇，其係具有上 材質。上美：上 為玻璃或者是塑膠等透光 _ "板3舁下基板32間填充有液晶301 ,在上其 板31與該液晶3〇1門i 士 土 該據光们4為彩色在本實施例中， 該平面顯示模組Y表面310係為 為該平面顯示模组/之;^ =基板32之底面320係 有Γ 上有—薄膜電晶體層_，其上具 曰曰，/、内具有支撐物302(spacer)。在本實& 該平面顯示模组3之μ )隹丰貝轭例中 底面320分別設置有—=m=與下基板32之 存在瑕貌94 * - 斜㈣示模組3 n ’本L中的職94係、為亮點的缺陷。所 二可能由偏光板4或6内層或黏著層之異 34、液嚴重漏光的瑕庇’或者是由遽光層 係指由偏疋電路缺陷所造成的。圖示中的瑕疲舛 產生嚴重漏光的瑕疵。 电〜<4時 亮點= = ’提供射聚焦照射於對應該 光子吸收而改質里：對板内產生非線性多 、…化進而將该壳點轉換成暗點。如圄ro 所不’猎由飛秒雷射9。聚焦照射於對應 ^四 厂酬光板4内部改質而形成黑化區域;丨之:= 的改質’係可以藉由飛秒雷射光東 ：之1 板4上的區域因為多光子吸收，而產生物=;=光 成黑化’亦不會有其它區域受損。要朗的是，本發明= 201224580 以藉由§周整该飛秒雷射之波長、脈衝頻率、雷射功率以及 偏極方向來調整飛秒雷射之狀態’進而使該偏光板内部對 應該亮點的區域因為非線性多光子吸收，而產生物理反 應，使此該區域形成黑化，亦不會有其它區域受損。其 中，該飛秒雷射之波長範圍為200〜11〇〇 nm ;而該飛秒雷 射之雷射脈衝頻率介於1 Hz〜2MHz ;歲飛秒f射投射至咳 偏光板之投射功率密度大於1G8 w/em2。飛秒雷射之脈衝 寬度小於等於500飛秒。 靖蒼閲圖五A所示 μ㈡外π个试卞囬顯示模組 L補糸統不思圖。該平面顯示模組修補系統6包括有一移 ^平台⑼以及一飛秒雷射源6卜該移動平台60具有一平 600 “ il? 亥驅動單元6〇"區動該平台 產生―、准度線性位移運動 6〇1係由馬達與蟫裎笙-从 Τ及驅動早兀 ^ 寻70件所組成或者是線性馬達所構 成，但不以此為限制。^ Μ尸請 生X Μ V 動早兀601驅動該平台000產 土 =方向的位移運動，使得平 進仃位置調整的動作.另从 ^ <仕枣十由上 6〇〇產生z軸方向的/，、，驅動單兀6〇1驅動該平台 _間的距離。在^=動以調整聚焦單716 4與該平台 3,其係具有亮點的^陷上放置有—平面顯示模組 圖三所示，在此不作_。平面顯示 3的結構係如 δ亥移動平台6〇 ® . 係可以為電腦或旦古、f —控制單元62，該控制單元62 合。藉由該控制單元算處理能力的單晶片與記憶體組 位置，使該控制軍 戶斤提供的輸入介面，輸入亮點之 記錄關於該亮點之位置。該控制 201224580 單元62可以產生控制訊號使該移動平台60移動而使該亮 點位置對應到飛秒雷射90，使該飛秒雷射90聚焦於平面 顯示模組3之偏光板4上。在本實施例中，該偏光板4指 的為上基板31上的偏光板4，但不以此為限制，例如下基 板32的底面所貼附的偏光板5，亦可以實施。該控制單元 62產生之控制訊號給驅動單元601，驅動單元601收到了 驅動訊號之後，驅動該平台600產生對應該驅動訊號之位 移運動。 該飛秒雷射源61設置在該移動平台60之一側，本實 施例為上方，其係可以產生一飛秒雷射90。該飛秒雷射源 61更耦接有一調整單元63。本實施例中，該調整單元63 更包括有一雷射波長調整裝置630，雷射頻率調整裝置 631，以及雷射能量與偏振調整裝置632，以調整該飛秒雷 射之波長、脈衝頻率、雷射能量以及偏極角度等特徵。其 中該雷射波長調整裝置630可以調整飛秒雷射之波長範圍 係為200〜llOOnm。而利用該雷射頻率調整裝置631調整飛 秒雷射頻率的範圍在1Hz〜2MHz之間。另外，雷射能量與 偏振調整裝置632可以對飛秒雷射的能量進行調整，在本 實施例中，該雷射能量與偏振調整裝置632調整飛秒雷射 的投射功率係大於1〇8 W/cm2。 另外，請參閱圖六所示，該圖係為光束通過偏光板示 意圖。由於本發明之精神在於提供飛秒雷射聚焦照射於偏 光板上，而在圖六中，如果飛秒雷射的偏極方向沒有被控 制，如圖六A中的飛秒雷射90所示，則會有部分的飛秒 雷射穿透偏光板4，而到達平面顯示模組内的其他區域， 10 201224580 進而可能造成對平面顯示模組内部結構的損傷。因此，根 據偏光板對不同極化方向光線吸收率不同之特性，雷射能 量與偏振調整裝置632更可以藉由調整雷射偏極方向控制 修補加工效果，需使雷射偏極方向與偏光板成一夾角，該 夾角可以大於零度。比較好的效果是如圖六B所示，可以 讓該飛秒雷射90的偏極化方下與該偏光板4之偏極化角度 成垂直關係，使雷射能量易被偏光板吸收，產生黑化。 再回到圖五A所示，為了增加該飛秒雷射90的聚焦效 φ 果，在該飛秒雷射90投射至該平面顯示模組3之光路上設 置有聚焦物鏡64。該聚焦物鏡64係由至少一聚焦透鏡或 反射鏡所構成，其組成可以利用習用技術之透鏡予以組 合。該飛秒雷射90之焦距也可藉由改變聚焦透鏡64的高 度或焦距來達成。另外，在飛秒雷射90之光路上亦可以 視狀況而設置反射鏡65以導引該飛秒雷射90至平面顯示 模組3上。在本實施例中，該聚焦物鏡64係為之數值光圈 (numerical aperture，NA)值大於等於0.5。藉由高數值光圈 # 值的聚焦物鏡64，可以使得聚焦焦點處能量集中，離焦處 由於發散角較大可有效降低雷射劑量，避免焦點外的區域 受到雷射加工。 如圖七A所示，該圖係為利用高NA值聚焦物鏡所產 生的聚焦光斑示意圖。由於高NA物鏡聚焦光斑92較小， 雖可以對偏光板產生好的改質效果，不過並不適合大面積 加工製程。因此，在另一實施例中，如圖五B所示，在該 聚焦物鏡64之前，更可以設置一整形元件66，使飛秒雷 射在進入該聚焦物鏡64之前，先通過該整形元件66，以 201224580 ，整該聚焦光斑之形狀。在本實施例t，該整形 、:為7狹？結構：但不以此為限制。狹縫之形狀可以為， 4形’本實施例係為矩形。當f射光經過整形元件的二 長繞^再二聚@焦物鏡64聚焦後其光斑將會橫向的被拉 長以形成如圖七B所示之聚焦光斑93 量分佈則不變，此方法可補償高να物鏡加工效率 點。由於飛秒雷射本身低熱加卫效m =缺 合針對焦點處的光斑做有效率之整形（sha細g)，即可= ’以修補缺陷。藉由聚焦物 鏡以及U讀的組合，可實現在厚 板内部快逮製作出-層更薄的改質區。 _之偏先 所-=A所示，該平面顯示模組修補系統6根據圖二 所不之步驟’對具有亮點的該平面顯示模組3進行修補。 一開始藉由控制單元62設定關於各亮點或者是要修補的 立置’该控制單元62根據設定的位置控制驅動單元_以 ，該平台_產生對應的位移運動。由於飛秒雷射源Ο固 平台_的位移運動’可以將亮點移動 對應該飛秒雷射90之位置’使得飛秒雷射9〇聚隹於該 平面顯示模組3内部對應該亮點位置之偏光板4上，使對 應該亮點之透光基材產生非線性多光子吸收而形成一改質 區域9卜雷射光修補位置亦可藉由光路 且 ⑷立置的改變達成，而待修補之平面顯示模心置= 不動（飛打光路）；或者是搭配二者相互位移來達成。當對 應亮點的偏光板4黑化之後’經由亮點所發出之光後到改 質區域内的結構所產生的散射或反射等現象，使得光無法 12 201224580 由：系統6對偏光板進行改質，可以在 二 面漏光現象的條件下，達到局部 …、化’多補α不态冗點’進而提高顯示器的等級 針圖Γ示，雖然前述之實施例 偏来板'4谁—你‘、丁果、、且3的上基板31的表面310的 ==!:是並不以上基板為限制，亦即，如 果漏先之缺陷發生在下基板32底 :罐r梅補。此外，在另-== ㈤所不3有背光源7的平面顯示器8，亦可以利用本發 明之方法與系統進行修補。雖然前述 板⑽成黑化的改質區域，但是根據本發明之精神= ^飛秒雷射之聚焦位置’該飛秒雷射也可以在偏光板之 表面形成改質區域，同樣也可以達到修補的效果。 淮以上所述者’僅為本發明之實施例，當不能以之限 制本發明範圍。即大凡依本發明申請專利範圍所做之均等 變化及修飾，仍將不失本發明之要義所在，亦不脫離本發 明之精神和^圍，故都應視為本發_進—步實施狀況。 201224580 【圖式簡單說明】 圖一係為液晶顯示模組示意圖。 =二係為本發明之平面顯示模組修補方法實施例流程示意 圖。 圖二係為平面顯示模組剖面示意圖。 =四係為平面顯示模組之偏光板内形成黑色改質區域示意 圖五A係為本發明之平面顯示模組修補 圖五B係為本發明之平面二'“二 意圖。 供、、且修補糸統另一實施例示 圖，、A與圖六B係為飛秒雷射通過偏光 圖七A係為本發明利用高 Ί、圖。 斑示意目。 A值承焦物鏡所產生的聚焦光 圖七B係為本發明利用高Na 生的聚焦光斑示意圖。 水為與整形元件所產 圖八所不含有背光源的平面顯示器示意圖。 【主要元件符號說明】 10-液晶顯示模組 11、12·偏光板 ϋ缺陷 2平面顯示模組修補方法 20〜21-步驟 3_平面顯示模組 3〇-液晶層單元 14 201224580 300-薄膜電晶體層 3 01 -液晶 302-支撐物 31- 上基板 310-表面 32- 下基板 320-底面 34-濾光層 φ 4、5-偏光板 6-平面顯示模組修補系統 60- 移動平台 61- 飛秒雷射源 600- 平台 601- 驅動單元 62- 控制單元 63- 調整單元 ^ 630-雷射波長調整裝置 631- 雷射頻率調整裝置 632- 雷射能量與偏振調整裝置 64- 聚焦單元 65- 反射鏡 66- 整形元件 90- 飛秒雷射 91- 黑化區域 92、93-聚焦光斑 15 201224580 94-瑕疵201224580 VI. Description of the invention: Especially for the liquid filling method and system in the display module process. Q曰【Technical field to which the invention pertains】 The present invention is a repairing technique, and a repair panel for forming a cell segment [Prior Art]: 显示器: The display is a non-active light-emitting element, and its color=group is provided, with a driving circuit and a liquid crystal Control to form n mother - a specific color of the halogen, different face (four) pixels are the shape of the St face. If there is a fatigue in the panel, it will cause the pixel in the display to be color-dependent, and a bright spot or a dark dot will be formed. In particular, the bright spot is not obvious, so the number of bright spots is also the panel level. As shown in the figure, 'This _ is a liquid crystal display module, indicating that the upper and lower sides of the two U-crystal display modules are attached. - The polarizing plate 11 and the test screen will cause serious light leakage. 2 = D, H, Moonlight module combination Thereafter, the formed liquid crystal display produces black η. In the repair of the polarizing plates n and 12, the bright spots are lacking ^ ^ v : the sub-laser plus J1 '. However, such a curing method has a large heat-affected zone, resulting in damage to the area around the display and the surface of the polarizing plate. In the conventional repairing technique, for example, the repair method of the liquid crystal display panel proposed by the Republic of China Publication No. 2/〇_827819, which uses the first nanosecond laser to cause a gap crack in the calendering sheet, the second pass Femtosecond lasers (450·, 1〇ΜΗζ or more) or diode lasers (Diode Laser), through the linear absorption of 201224580, the physical properties of the filters with existing gaps to reduce the light transmission of bright spots. In addition, as disclosed in the Chinese Republic of China Publication No. 200829977 and 200887821, a method and a device for repairing a liquid crystal display panel are disclosed, which use a 450 ηη femtosecond laser to repair using a linear absorption interval of RGB, which is processed by a crystal face of a liquid crystal display. Repairing from the color filter surface can easily damage the polarizing film. In addition, as disclosed in WO 2008-156286, a repairing method is disclosed in which a gap (gap) is formed between a photoresist material and a glass by laser irradiation, and a black matrix is surrounded by a laser scanning. The melting zone is brought into the gap, so that the photoresist region with bright spots is blackened. (Indirect blackening resistance). A repairing method is also disclosed in the U.S. Patent No. 7,502,094, which is irradiated by a laser (Nd:YAGlaser 380-740 nm, <55 Hz) in a reticle to cause blackening of the filter facing the substrate surface. (The light generated by the light source cannot pass through the filter), because the diffusion zone is generated during the irradiation process. Therefore, it is necessary to process three sets of masks of different sizes to repair the bright spots. In addition, a method and system for repairing a liquid crystal display is disclosed in US Pat. No. 7,636,148, which discloses three repair methods. The first is to apply a repair film to the glass substrate under the panel. The position of the bright spot is processed by a laser (YAG, excimer, diode laser) to repair the film. The second is processed in black matrix. The third type of processing in the pattern spacer covers the melted support onto a colored photoresist with bright spots. U.S. Patent No. 7,126,232 is also a repairing mechanism for transferring a repair film to a defect location. In addition, as disclosed in US Pat. No. 5,926,246 or 201224580 US Pat. No. 2006050623, a repairing method for detecting an alignment film in a liquid crystal panel by laser is used to detect the direction of rotation of the polarizing film. In the 7C point area, the laser processing alignment film is performed. The Republic of China new patent M381804 provides a repair device for a display containing m-chips, comprising at least a laser source, at least two mirror groups, at least two lenses and at least a mirror control unit it, which is selectively selectable. The f-lights of different wavelengths are output to blacken the filter, and the color points on the light film are not turned off, and the bright spot repair is completed. SUMMARY OF THE INVENTION The present invention provides a flat display module for the financial method and pure, the basin system uses a femtosecond laser to focus to correspond to the 瑕 _ polarized plate on the partial handle for modification and h due to femtosecond laser It can be used to protect the polarized plate points, so it can directly repair the structure with the 瑕(4) display (4) display other areas in the module. Without (three) mussel injury, the present invention provides a method for repairing a flat display module. The femtosecond laser light passes through the surface layer above the polarizing plate, and the 亮^糸, first, the position of the bright spot is made, so that the inner layer of the polarizing plate is subjected to quality ,: The bright spots on the polarizing plate corresponding to the formed panel become dark spots, and the black spots are not blackened, which causes the original damage and improves the quality and grade of the display products. The invention provides a repair of the flat display module to set up the liquid crystal in the liquid crystal_module production process, and the system is capable of entering the display module with bright defects. Cell) The yield and production efficiency of the process of the crystal display.仃k complex, to enhance the liquid in the embodiment, the present invention provides a disassembly display module repairing party 201224580 attached with the following steps ··providing a flat display module 'the surface of which is connected to the flying " board, The flat display module has at least one bright point; and the illuminating focus is irradiated on the polarizing plate corresponding to the bright spot, so that the quality money plate generates nonlinear multiphoton absorption to form a modified Q domain, thereby converting the bright spot into a dark point. Department 2:: '=? for a flat display module repair = two thousand surface display module; and a femtosecond laser source, which provides a focus display illumination module for the corresponding bright spot The flat: display module produces nonlinear multiphoton absorption and is modified to convert the defect into a dark spot.别迟 [Embodiment] In order to enable the reviewing committee to further understand and understand the features and objectives of the present invention, the following is a description of the original structure of the present invention and the concept of the design, so that: Understand the characteristics of the present invention, the detailed description is as follows: ♦-Bei Please refer to FIG. 2, which is the actual flow of the supplementary method of the present invention (4). The secret money dagger - the flat display module. As shown in Figure 3, the figure is a flat: ':: schematic cross-section. In this embodiment, the flat display module: is not limited to the group display module, but is not limited thereto. As long as it is a liquid crystal flat display, the method of the embodiment can be used: The display module of the light board is a liquid crystal display module of the light board in the liquid crystal group manufacturing process. 70% has a bias of 201224580 substrate-liquid crystal layer unit, which has an upper material. Shangmei: On the glass or plastic, etc. _ " plate 3 under the substrate 32 is filled with liquid crystal 301, on the plate 31 and the liquid crystal 3 〇 1 door i Shi soil the light according to the light 4 In this embodiment, the surface display module Y surface 310 is the planar display module /; the bottom surface 320 of the substrate 32 is provided with a thin film transistor layer _ on the substrate, There is a support 302 inside. In the present embodiment, the bottom surface 320 of the flat display module 3 is provided with -=m= and the presence of the lower substrate 32. 94 * - oblique (four) shows the module 3 n 'this L The 94th line in the position is a defect of the highlight. The second may be caused by a difference in the inner layer or the adhesive layer of the polarizing plate 4 or 6, a smear of liquid leakage, or a defect of the eccentric circuit. The exhaustion in the illustration creates a flaw that causes severe light leakage. When the electricity is ~4°, the bright spot == ’ provides the focus of the radiation to the photon absorption and the modification: the nonlinearity in the plate is generated, and the shell point is converted into a dark spot. If 圄ro is not hunted by Femtosecond Laser 9. The focus is irradiated on the interior of the corresponding 4th compensation plate 4 to form a blackened area; the ::: the modified ' can be made by femtosecond laser light: 1 on the plate 4 because of the multiphoton absorption, Produce =; = light blackening 'will not be damaged in other areas. To be sure, the present invention = 201224580 to adjust the state of the femtosecond laser by § the wavelength of the femtosecond laser, the pulse frequency, the laser power, and the direction of the polarization, thereby making the interior of the polarizer corresponding The bright spot creates a physical reaction due to nonlinear multiphoton absorption, which causes blackening of this area and no damage to other areas. Wherein, the wavelength range of the femtosecond laser is 200 to 11 〇〇 nm; and the laser pulse frequency of the femtosecond laser is between 1 Hz and 2 MHz; the projection power density of the femtosecond f-projection projected to the cough polarizer More than 1G8 w/em2. The pulse width of the femtosecond laser is less than or equal to 500 femtoseconds. Jing Cang read Figure 5A shown μ (2) outside π test 卞 back display module L 糸 不 不 。 。 The flat display module repairing system 6 includes a moving platform (9) and a femtosecond laser source. The mobile platform 60 has a flat 600 "il? Hai driving unit 6" " regional motion generated by the platform, and accuracy linearity The displacement movement 6〇1 is composed of a motor and a cymbal---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- 601 drives the displacement movement of the platform 000 soil = direction, so that the position of the flat 仃 position adjustment action. Another ^ ^ 仕 枣 10 from the top 6 〇〇 z axis direction /,,, drive unit 兀 6 〇 1 Driving the distance between the platform _. In the ^= move to adjust the focus sheet 716 4 and the platform 3, which has a bright point on the trap placed on the plane display module shown in Figure 3, no _. The structure of 3, such as the δ hai mobile platform 6 〇 . 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Make the input interface provided by the control army, enter the record of the highlights, and focus on the highlight The control unit 201224580 can generate a control signal to move the mobile platform 60 such that the bright spot position corresponds to the femtosecond laser 90, and the femtosecond laser 90 is focused on the polarizing plate 4 of the flat display module 3. In the present embodiment, the polarizing plate 4 refers to the polarizing plate 4 on the upper substrate 31. However, the polarizing plate 5 attached to the bottom surface of the lower substrate 32 may be implemented. The control unit may also be implemented. The generated control signal is sent to the driving unit 601. After receiving the driving signal, the driving unit 601 drives the platform 600 to generate a displacement motion corresponding to the driving signal. The femtosecond laser source 61 is disposed on one side of the mobile platform 60. The embodiment is an upper portion, which can generate a femtosecond laser 90. The femtosecond laser source 61 is further coupled with an adjustment unit 63. In this embodiment, the adjustment unit 63 further includes a laser wavelength adjustment device 630. a laser frequency adjusting device 631, and a laser energy and polarization adjusting device 632 for adjusting characteristics of the wavelength, pulse frequency, laser energy, and polarization angle of the femtosecond laser. The 630 can adjust the wavelength range of the femtosecond laser to be 200 to 110 nm, and the range of the femtosecond laser frequency is adjusted by the laser frequency adjusting device 631 to be between 1 Hz and 2 MHz. In addition, the laser energy and polarization adjusting device 632 The energy of the femtosecond laser can be adjusted. In this embodiment, the laser energy and the polarization adjusting device 632 adjust the projection power of the femtosecond laser to be greater than 1 〇 8 W/cm 2 . The figure is a schematic diagram of the light beam passing through the polarizing plate. Since the spirit of the present invention is to provide a femtosecond laser focusing illumination on the polarizing plate, in Figure 6, if the polarization direction of the femtosecond laser is not controlled, such as As shown by the femtosecond laser 90 in Fig. 6A, a portion of the femtosecond laser penetrates the polarizing plate 4 and reaches other areas in the flat display module, 10 201224580, which may cause internal to the flat display module. Structural damage. Therefore, according to the characteristics that the polarizing plate has different light absorption rates for different polarization directions, the laser energy and polarization adjusting device 632 can control the repairing effect by adjusting the polarization direction of the laser, and the laser polarizing direction and the polarizing plate are required. At an angle, the angle can be greater than zero degrees. The better effect is as shown in FIG. 6B, which can make the polarization of the femtosecond laser 90 perpendicular to the polarization angle of the polarizing plate 4, so that the laser energy is easily absorbed by the polarizing plate. Blackening occurs. Returning to Fig. 5A, in order to increase the focusing effect of the femtosecond laser 90, a focusing objective 64 is disposed on the optical path of the femtosecond laser 90 projected onto the flat display module 3. The focusing objective 64 is composed of at least one focusing lens or mirror, and its composition can be combined using a lens of a conventional technique. The focal length of the femtosecond laser 90 can also be achieved by varying the height or focal length of the focusing lens 64. Alternatively, a mirror 65 may be provided on the optical path of the femtosecond laser 90 to guide the femtosecond laser 90 to the flat display module 3. In the present embodiment, the focusing objective 64 has a numerical aperture (NA) value of 0.5 or more. By focusing the objective lens 64 with a high numerical aperture # value, the energy at the focus can be concentrated. The defocusing angle can effectively reduce the laser dose and prevent the area outside the focus from being subjected to laser processing. As shown in Fig. 7A, the figure is a schematic view of a focused spot produced by focusing an objective lens with a high NA value. Since the high NA objective lens has a small spot size 92, it can produce a good modification effect on the polarizing plate, but it is not suitable for a large-area processing process. Therefore, in another embodiment, as shown in FIG. 5B, before the focusing objective 64, a shaping element 66 may be further disposed to pass the femtosecond laser through the shaping element 66 before entering the focusing objective 64. , to 201224580, the focus of the spot shape. In this embodiment t, the shaping, is: 7 narrow? Structure: But not limited by this. The shape of the slit may be a 4-shaped 'this embodiment is a rectangle. When the f-light is focused by the two long windings of the shaping element and then the dimeric @focus objective 64 is focused, the spot will be laterally elongated to form a focused spot 93 as shown in FIG. 7B. Compensates for high να objective processing efficiency points. Since the femtosecond laser itself has low heat and effectiveness m = lack of efficient shaping of the spot at the focus (sha fine g), it can be used to repair defects. By combining the objective lens and the U-reading, it is possible to achieve a thinner reforming zone in the interior of the thick plate. The flat display module repairing system 6 repairs the flat display module 3 having bright spots according to the steps ′ of FIG. Initially, the control unit 62 sets the stand for each bright spot or to be repaired. The control unit 62 controls the drive unit according to the set position, and the platform_ generates a corresponding displacement motion. Since the displacement motion of the femtosecond laser source tamping platform _ can move the bright point corresponding to the position of the femtosecond laser 90, the femtosecond laser 9 converges on the interior of the flat display module 3 corresponding to the bright spot position. On the polarizing plate 4, non-linear multiphoton absorption is generated for the light-transmitting substrate corresponding to the bright spot to form a modified region. The laser light repairing position can also be achieved by the change of the optical path and (4) standing, and the plane to be repaired The display mode is set to = no moving (flying light path); or it is achieved by displacing the two with each other. When the polarizing plate 4 corresponding to the bright spot is blackened, the phenomenon of scattering or reflection caused by the light emitted from the bright spot to the structure in the modified region makes the light unable to be 12 201224580 by: System 6 to modify the polarizing plate, Under the condition of two-side light leakage phenomenon, it can reach the local..., and the 'multiple complement α non-state redundant point' can improve the level of the display of the display, although the foregoing embodiment prefers the board '4 who-you', Ding The ==!: of the surface 310 of the upper substrate 31 of the 3 and 3 is not limited by the above substrate, that is, if the missing defect occurs at the bottom of the lower substrate 32: the tank is filled with plum. In addition, the flat display 8 having the backlight 7 in another -== (five) can also be repaired by the method and system of the present invention. Although the aforementioned plate (10) is a blackened modified region, according to the spirit of the present invention = ^ the focus position of the femtosecond laser 'the femtosecond laser can also form a modified region on the surface of the polarizing plate, and can also be repaired. Effect. The above is only an embodiment of the present invention, and the scope of the present invention is not limited thereto. That is, the equivalent changes and modifications of the scope of the present invention will not be deviated from the spirit and scope of the present invention, and therefore should be regarded as the implementation status of the present invention. . 201224580 [Simple description of the diagram] Figure 1 is a schematic diagram of the liquid crystal display module. = Second is the flow chart of the embodiment of the flat display module repairing method of the present invention. Figure 2 is a schematic cross-sectional view of a flat display module. = The four-series is a schematic diagram of the black modified region formed in the polarizing plate of the flat display module. The fifth A is the flat display module repairing of the present invention. FIG. 5B is the plane 2' of the present invention. Another embodiment of the system is shown in Fig. A, and Fig. 6B is a femtosecond laser passing through a polarizing pattern. The seventh A system is a sorghum and a figure for the present invention. The spotted image is obtained by the A value of the focusing objective lens. Seven B is a schematic diagram of a focused spot using high Na. The water is a schematic diagram of a flat panel display that does not contain a backlight in Figure 8. [Main component symbol description] 10-LCD module 11, 12· Polarizing plate defect 2 flat display module repairing method 20 to 21 - step 3 - flat display module 3 - liquid crystal layer unit 14 201224580 300 - thin film transistor layer 3 01 - liquid crystal 302 - support 31 - upper substrate 310 - Surface 32 - Lower substrate 320 - Bottom surface 34 - Filter layer φ 4, 5 - Polarizer 6 - Flat display module repair system 60 - Mobile platform 61 - Femtosecond laser source 600 - Platform 601 - Drive unit 62 - Control unit 63- Adjustment unit ^ 630-Laser wavelength adjustment device 6 31- Laser Frequency Adjustment Device 632- Laser Energy and Polarization Adjustment Device 64- Focusing Unit 65- Mirror 66- Shaper 90-Femtosecond Laser 91- Blackened Area 92, 93-Focused Spot 15 201224580 94-瑕疵