201210699 六、發明說明： 【發明所屬之技術領域】 本發明有關專供塗佈機狹縫式塗佈喷嘴清潔累 殘留光阻污潰之輔助清潔方法及震置。 、/'、 【先前技術】 —-般電腦、視訊器、電視、行動電話及相關且顯 不功能之電子產品，已普遍應用液晶顯示器，而液日 顯:器中包含在玻璃基板上塗佈電路陣列，如第一^曰 :二’、電路陣列之產生’係以塗佈機經狹 ^ 錐型之塗佈喷嘴（11)由真空吸附在基=大 ==、13) 一端移動至另端並同時喷出i 佈先阻枓（1 4 )，而達成光阻塗佈作業。 如第二圖及第三圖所示，顯然，塗、 4)由塗佈喷嘴= 塗佈光阻料殘留在塗佈喷嘴U 字使部份 嗆嶝、角111)鄰近外緣及塗佈 拓”噴嘴杈板（15)塗佈噴嘴與噴嘴橫 板夾角（1 6) *，甚至累積至 狀殘留污潰，其將光阻塗佈 j而產生水滴 器之電路陣列品質。 （嚴重影響液晶顯示 έ且〇 般光阻塗佈機上設有一塗佈嘖嘴清潔模 =，二^模组…)將於每二 )移動對塗佈喷嘴（id上之喷嘴 累積殘留光阻（18)進 ）上之喷紫 塗体喷嘴（1 1 )鄰近之錄=* ’但其僅能清除 近之殘遠光阻，而對於塗佈喷嘴 S] 3 201210699 m)與嘴嘴橫板（15)連接部份最不易清潔之 塗佈噴嘴與喷嘴橫板夾角（1 6)處所殘留之塗佑啥 =喷嘴橫板夾角累_光阻（19)，卻無= :對=存在之清潔問題，發明人據以提出本發明 解決方案，據以克服該無法清潔的困窘。 【發明内容】 狀特徵係利用一枚中央呈凹槽兩側具錐 回 ’月溧裝置，藉由該清潔輔助裝置，在1表 =舖設-無塵布，再於無塵布上噴灑清潔溶劑了使 無塵布貼合於辅助清潔裝置表面，再以人員之手握持 抵住塗佈噴嘴上方之喷嘴横板沿塗佈喷嘴方向作左: 有效清除殘留在之塗佈嘴鄰近之累積殘 塗佈辅助裝置，其中央所設之凹槽可避開 嗔鳥（1 1 )並防止造成對塗佈喷嘴（1 i )之 ^裹+且凹槽兩側之上方呈直角到除銳角，據以可緊 背（1 1)與喷嘴橫板（1 5 )連接部份，並 嘴方向作左,、右移動，而達成快速有效清潔 二π矛、、—不易清潔之塗佈噴嘴與喷嘴橫板夾角（1 6 ) j之塗佈嘴嘴與喷嘴橫板夾角累積殘留触（1 9 ) 作業。 ’ 【實施方式】 ^第四圖及第五圖所示，本發明輔助清潔裝置 為一枚中央呈凹槽（21)兩側設有排列數枚 201210699 錐狀齒 應之錐妝I r / 2 3)之輔助清潔裝置， f之錐狀齒（22)、 ：『對 面，呈一吉丨队 刀”凹槽（21)斷 直角刮除銳角（2 2 2 )、（2 上述輔助清潔裴置（2)之_ 或到除累積㈣* )之凹& ( 2 1 )於清潔 1 )之H 時，僅會接難佈機㈣喷嘴（1 :而不會觸及塗佈喷嘴⑴）：以 噴嘴("71)隹。狀喷口’據以防止損壞該塗佈機之塗佈 Φ 嘴之=二=，本發明面板塗佈機狹縫式塗佈喷 其表==塵助裝置⑵，在 頌、主吻 ，，，、塵布（3 )，再於無塵布（3 )上喷 以j溶劑，使無塵布貼合於辅助清潔裝置表面，再 員之：握持該包附有無塵布（3)之清潔輔助裝 5 塗料嘴（1 1 )上方之喷嘴横板（1 佈喷嘴方向作左、右移動，據以有效清除殘 塗佈喷嘴（11)與噴嘴橫板（15)連接塗 、嘴與噴嘴橫板夾角鄰近之累積殘留光阻污潰。 【圖式簡單說明】 第一圖為一般光阻塗佈機之塗佈作業示意立體圖。 第為一般光阻塗佈機之塗佈喷嘴清潔模組作業示 意前視圖。 第二圖為一般光阻塗佈機之塗佈噴嘴清潔模組作業示 意側視圖。 ' 第四圖為本發明清潔輔助裝置立體圖。 第五圖為本發明清潔辅助裝置在其表面上舖設無塵布 s) 5 201210699 示意立體圖。 第六圖為本發明清潔輔助裝置進行清潔實施例示意 圖。 【主要元件符號說明】 塗佈喷嘴（1 1 ) 基座（1 2 ) 玻璃基板（1 3) 塗佈光阻料（1 4) 喷嘴橫板（1 5) 塗佈噴嘴與喷嘴橫板夾角（1 6) 塗佈喷嘴清潔模組（1 7) 喷嘴累積殘留光阻（1 8) 塗佈喷嘴與喷嘴橫板夾角累積殘留光阻（1 9) 輔助清潔裝置（2) 凹槽（2 1 ) 錐狀齒（2 2)、（ 2 3) 直角刮除銳角（2 2 1 )、（ 2 3 1 ) 無塵布（3) m 6201210699 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an auxiliary cleaning method and a shock for the application of a slit coating nozzle for a coating machine to clean residual photoresist. , / ', [previous technology] - general computer, video, television, mobile phone and related and displayless electronic products, has been widely used in liquid crystal displays, and liquid display: the device is coated on a glass substrate The circuit array, such as the first ^ 2: two ', the generation of the circuit array' is moved by the coating machine through the narrow cone type coating nozzle (11) by vacuum adsorption at the base = large ==, 13) At the same time, the i cloth is first ejected (1 4 ) to achieve a photoresist coating operation. As shown in the second and third figures, it is obvious that the coating, 4) by the coating nozzle = coating photoresist residue in the coating nozzle U word to make part of the 呛嶝, angle 111) adjacent to the outer edge and coating extension "The nozzle 杈 plate (15) coating nozzle and the nozzle horizontal plate angle (16) *, even accumulated to the residual residual stain, which will coat the photoresist to produce the circuit array quality of the dripper. (Severely affect the liquid crystal display 〇 〇 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光 光The spray purple spray nozzle (1 1 ) is adjacent to the record =* 'but it can only remove the near-distance far-resistance, but for the coating nozzle S] 3 201210699 m) and the nozzle cross-plate (15) connection The most difficult to clean coating nozzle and nozzle cross-plate angle (1 6) residual Tuyou 啥 = nozzle cross-plate angle _ photoresist (19), but no =: Yes = the existence of the cleaning problem, the inventor In order to solve the problem that the invention cannot be cleaned according to the solution of the present invention, the feature is based on the use of a central groove on both sides of the groove. The lunar device, with the cleaning auxiliary device, sprays the cleaning solvent on the 1 table=laying-dust-free cloth, and then sprays the cleaning solvent on the surface of the auxiliary cleaning device, and then holds the hand of the auxiliary cleaning device. The nozzle cross plate that is above the coating nozzle is left in the direction of the coating nozzle: effectively removes the accumulated residual coating aid remaining in the vicinity of the coating nozzle, and the groove provided in the center can avoid the ostrich (1 1 And preventing the coating nozzle (1 i ) from being wrapped + and the upper sides of the groove are at right angles to an acute angle, so that the portion of the nozzle (1 1 ) can be tightly connected (1 1) to the nozzle cross plate (15). And the mouth direction is left and right, and the fast and effective cleaning of the two π spears is achieved, and the angle between the coating nozzle and the nozzle horizontal plate (1 6 ) j which is difficult to clean and the nozzle horizontal plate accumulates residual contact (1 9 ) Operation. 'Embodiment>> ^The fourth and fifth figures show that the auxiliary cleaning device of the present invention has a central groove (21) arranged on both sides of a plurality of 201210699 conical teeth. Cone makeup I r / 2 3) Auxiliary cleaning device, f-cone teeth (22), : "opposite, presented as a team The knife" groove (21) is cut off at a right angle to scrape the acute angle (2 2 2 ), (2 above the auxiliary cleaning device (2) or to the accumulation (4) *) concave & (2 1) for cleaning 1) For H, only the refractory machine (4) nozzle will be connected (1: without touching the coating nozzle (1)): 喷嘴 ("71) 隹. The nozzle "in order to prevent damage to the coating machine of the coating machine Φ mouth = two =, the panel coating machine of the present invention slit coating spray table == dust assist device (2), in the 颂, main kiss,,, Dust cloth (3), then spray the solvent on the dust-free cloth (3) to make the dust-free cloth adhere to the surface of the auxiliary cleaning device, and then: hold the bag with the clean cloth (3) Auxiliary device 5 nozzle nozzle (1 1 ) above the nozzle horizontal plate (1 cloth nozzle direction for left and right movement, according to the effective removal of the residual coating nozzle (11) and the nozzle horizontal plate (15) connection coating, nozzle and nozzle horizontal The accumulated residual photoresist is adjacent to the plate. The first picture shows the coating operation of the general photoresist coater. The first is the coating nozzle cleaning module operation of the general photoresist coater. The front view is a schematic side view of the coating nozzle cleaning module of the general photoresist coater. The fourth figure is a perspective view of the cleaning aid device of the present invention. The fifth figure is the surface of the cleaning aid device of the present invention. Laying a clean cloth s) 5 201210699 Schematic perspective view. Figure 6 is a schematic view showing a cleaning embodiment of the cleaning assisting device of the present invention. [Main component symbol description] Coating nozzle (1 1 ) Base (1 2 ) Glass substrate (1 3) Coating photoresist (1 4) Nozzle cross plate (1 5) The angle between the coating nozzle and the nozzle cross plate ( 1 6) Coating nozzle cleaning module (1 7) Nozzle accumulated residual photoresist (1 8) Accumulated residual photoresist at the angle between the coating nozzle and the nozzle cross plate (1 9) Auxiliary cleaning device (2) Groove (2 1 ) Conical teeth (2 2), ( 2 3) Right angle scraping sharp angle (2 2 1 ), ( 2 3 1 ) Clean cloth (3) m 6