201218242 六、發明說明： 【發明所屬之技術領域】 本發明係關於長弧型放電燈及光照射裝置，尤其係關 於在發光管內被封入有水銀、鐵等金屬、及鹵素的長弧型 放電燈、及具備該長弧型放電燈的光照射裝置。 【先前技術】 自以往以來，在發光管內封入有水銀、水銀以外的金 屬、及鹵素的長弧型放電燈，即所謂的長弧金屬鹵化物燈 ，係作爲放射紫外線的燈，而被廣泛利用在例如樹脂、接 著劑、油墨、光罩的硬化、或乾燥、熔融、或軟化等各種 處理的用途。具體而言，對塗佈有接著劑等的被照射物（ 工件）照射紫外線，藉由產生化學反應來進行處理。 在日本特開平03-25055 1號公報中係針對該類放電燈 有所記載。 使用第1圖，說明長弧型放電燈。 長弧型放電燈1係在石英玻璃製的長形發光管2的兩端 ，以彼此朝管軸方向相對向的方式配置一對電極4、4，被 密封在發光管2的兩端的密封部3、3，藉由金屬箔6而將電 極4與外部引線5作電性連接。 在發光管2的內部係被封入有水銀120mg、鐵4mg、碘 化汞12mg、碘化鉍5.3 mg。接著，鉍的封入量相對鐵在特 定範圍內，藉此不會對鐵與水銀的發光頻譜造成不良影響 ，而防止鐵附著在發光管2的內壁。 -5- 201218242 [先前技術文獻] [專利文獻] [專利文獻1]日本特開平03-25055 1號公報 【發明內容】 (發明所欲解決之課題） 近年來，對該等放電燈的環境負荷減低的請求更爲強 烈，而期望減低封入在發光管內的水銀量。此外，亦期望 放電燈的使用電力減低。 在以往，在專利文獻1中已記載當水銀量較低時，鐵 的發光強度分布會非常不均，但是因亮燈裝置的安定器的 性能提升等，即使爲水銀量少的燈，亦可進行取得良好照 度分布的亮燈。 基於如上所示之背景，期望頻繁切換使用投入電力， 俾以減少燈的水銀量，且減低使用電力。 例如一種利用在照射工件時以平常亮燈時的電力亮燈 ，在待機時則相較於該電力而使電力降低，在需要照射時 則再提高電力的亮燈電力切換的亮燈方法。此時，實際使 用的亮燈燈的待機時間爲例如1分鐘以內。 但是，關於已減低水銀Μ的燈，如上所述進行頻繁電 力切換的亮燈，結果會發生照度在短時間內明顯降低的問 題。 針對該問題，本發明人精心硏究的結果，得到以下知 見。 -6- 201218242 若將照度在短時間內降低的燈的發光管破壞，關於其 破片的內壁部分，以氟化氫水溶液洗淨內壁的石英玻璃最 表面後，同樣地以氟化氫水溶液進行蝕刻至離表面1 〇μηι左 右爲止來作調查時，在從發光管的內壁至一定深度爲止的 領域含有所封入的金屬。 由該點來看，考慮到封入金屬係被打入至發光管的內 部，而不只於附著於發光管的內壁。如上所示之現象係被 認爲發生在由待機時至照射時電流急劇增加時。其理由被 推測如下。 低電力待機時，形成爲發光管內壁附近的鹵素密度爲 較低的狀態。因此，若進行切換至高電力的電力切換時， 電弧的電子密度會急劇增加，鐵或鉍等封入金屬的原子會 在電弧內與電子衝撞，而朝向發光管內壁飛來。 若爲習知技術，由於存在大量水銀，因此水銀發揮緩 衝的作用，而抑制封入金屬打入至發光管內。但是，由於 使水銀量降低，因此緩衝效果小，鐵或鉍等封入金屬容易 被打入。 尤其可知待機時與照射時的電力差超過1.5倍時，打 入量會急劇增加。 如上所示封入金屬被打入至發光管內部時，發光管內 部的發光物質會減少，照度會降低，因此照度維持率會降 低。 基於以上，本案發明係一種在發光管內相對向配置有 一對電極，且被封入有0.5mg/cm3以下的水銀、鐵等金屬 201218242 、及鹵素的長弧型放電燈，即使在頻繁進行使電力上升的 電力切換的情形下’亦抑制封入金屬被打入在發光管內壁 的現象，而防止照度維持率在短期間內降低爲其目的。 (解決課題之手段） 爲了解決上述課題’本案發明係一種長弧型放電燈， 係在發光管內相對向配置有一對電極，該長弧型放電燈之 特徵爲：在前述發光管內被封入水銀（Hg)，該水銀的封 入量爲0.5mg/cm3以下，至少被封入鐵（Fe)、鉈（T1) 、鉍（Bi )的任一種金屬，被封入鹵素，將水銀以外的封 入金屬的物質量設爲M(mol)、封入鹵素的物質量設爲 H(mol)，Η/M 在 2.1SH/MS5.0 的範圍。 此外，本案發明之特徵爲：以照射用亮燈模式、及待 機用亮燈模式的2個亮燈模式進行亮燈，該待機用亮燈模 式係藉由比該照射用亮燈模式爲更低的電力來進行亮燈的 亮燈模式，交替切換成任何亮燈模式》 此外，本案發明之特徵爲具備有：上述長弧型放電燈 :對前述長弧型放電燈供給電力的亮燈裝置；及被設在該 亮燈裝置且切換投入電力量的電力切換手段。 (發明之效果） 藉由本發明，在被封入在發光管內的水銀（Hg)的量 爲0.5mg/cm3以下的長弧型放電燈中，將水銀以外的封入 金屬的物質量設爲M(m〇l)、封入鹵素的物質量設爲H(mo1) 201218242 ，該等的比亦即Η/M在2.1SH/MS5_0的範圍內’藉此可防 止作爲發光物質的封入金屬減少’且可防止照度維持率降 低。 尤其，在使用使電力頻繁且大幅上升的亮燈方法時’ 達成防止封入金屬打入至發光管內壁的效果’即使使用如 上所示之亮燈方法，亦使照度維持率不易降低’因此可將 燈的亮燈電力省電力化。 此外，藉由本發明，在將照射用亮燈模式與待機用亮 燈模式的至少2個投入電力爲不同的亮燈模式作切換來進 行亮燈時，即使在由待機用亮燈模式切換至照射用亮燈模 式的切換瞬後，亦由於發光管內壁附近的鹵素密度較高， 而可防止封入金屬打入至發光管內壁。 【實施方式】 第1圖係關於本發明之長弧型放電燈的管軸方向的剖 面圖。 在該圖中，長弧型放電燈1係在例如由石英玻璃等透 光性材料所構成的發光管2的兩端具備有密封部3、3，在 該發光管2的內部，係隔著預定距離相對向配置有由鎢所 構成的一對對向電極4、4。 各電極4的根部側端部係與被埋設在密封部3內之例如 鉬的金屬箔6相接合。在該金屬箔6的另一端側係連接有外 部引線5，朝向發光管2的外部突出。在該外部引線5係由 未圖示的電源及亮燈電路連接有供電線而被供電。 -9 - 201218242 長弧型係指電極間距離爲預定的長度以上 離，在亮燈時形成較長的電弧，此與提供點先 有所不同，依此而稱呼者。 具體而言，相對發光管內徑，電極間距I 者，較長者中係成爲ίο倍以上。此係基於被使 大的被照射物掃描燈本身、或排列複數個而均 射的用途之故。 在發光管1的內部係被封入有鐵（Fe)、 錫（Sn)、鋅（Zn)、鉍（Bi)等金屬作爲發 以其他發光物質而言，被封入水銀以調整 入量爲0.5mg/cm3以下的量。 在水銀以外的封入金屬中，係適於使用鐵 作爲發光物質。各自的封入量爲例如0.2〜6x10 該等物質係當在發光管內封入作爲發光物 燈時，在紫外線領域具有發光頻譜的金屬。 所被封入的鹵素爲例如碘（I )、溴（B! 在例如碘化汞、碘化鉍等鹵化物的狀態下被封 內。 在本發明中，將被封入在發光管1內的上 的金屬（鐵、鉈、鉍、錫、鋅等）、與鹵素（ 物質量的關係規定如下。 若水銀以外的金屬的物質量設爲M(mol)、 量設爲H(mol)時，將其物質量比Η/M的範U H/MS5.0。其理由容後詳述。201218242 VI. Description of the Invention: [Technical Field] The present invention relates to a long arc discharge lamp and a light irradiation device, and more particularly to a long arc discharge in which a metal such as mercury, iron, or halogen is enclosed in an arc tube A lamp and a light irradiation device including the long arc discharge lamp. [Prior Art] A long-arc discharge lamp in which a metal other than mercury or mercury or a halogen is sealed in a light-emitting tube, that is, a long-arc metal halide lamp, is widely used as a light-emitting ultraviolet lamp. It is used for various processes such as curing of a resin, an adhesive, an ink, a photomask, or drying, melting, or softening. Specifically, the object to be irradiated (workpiece) coated with an adhesive or the like is irradiated with ultraviolet rays, and a chemical reaction is performed to perform treatment. This type of discharge lamp is described in Japanese Laid-Open Patent Publication No. Hei 03-25055. Use the first figure to illustrate a long arc discharge lamp. The long arc type discharge lamp 1 is disposed at both ends of the elongated arc tube 2 made of quartz glass, and is disposed so as to face each other in the tube axis direction, and is sealed at the sealing portions at both ends of the arc tube 2. 3, 3, the electrode 4 is electrically connected to the outer lead 5 by the metal foil 6. In the interior of the arc tube 2, 120 mg of mercury, 4 mg of iron, 12 mg of mercury iodide, and 5.3 mg of cesium iodide were sealed. Then, the amount of encapsulation of the crucible is within a specific range with respect to iron, whereby the iron and mercury emission spectrum is not adversely affected, and iron is prevented from adhering to the inner wall of the arc tube 2. [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open No. Hei 03-25055 No. 1 (Invention) The environmental load of the discharge lamp in recent years The request for reduction is more intense, and it is desirable to reduce the amount of mercury enclosed in the tube. In addition, it is also desirable to reduce the power consumption of the discharge lamp. Conventionally, in Patent Document 1, it has been described that when the amount of mercury is low, the distribution of the luminous intensity of iron is extremely uneven. However, even if the lamp has a small amount of mercury due to the performance improvement of the ballast of the lighting device, Perform a lighting that achieves a good illumination distribution. Based on the background as shown above, it is desirable to frequently switch the use of input power to reduce the amount of mercury in the lamp and to reduce the use of power. For example, a lighting method in which the electric power is turned on when the workpiece is illuminated normally when the workpiece is irradiated, the electric power is reduced in comparison with the electric power, and the lighting power is switched to increase the electric power when the irradiation is required. At this time, the standby time of the actually used lighting lamp is, for example, within 1 minute. However, with regard to the lamp in which the mercury sputum has been reduced, the lighting for frequent power switching as described above causes a problem that the illuminance is remarkably lowered in a short time. In response to this problem, the inventors have carefully studied the results and obtained the following findings. -6- 201218242 If the illuminating tube of the lamp whose illuminance is reduced in a short period of time is broken, the inner surface of the fragment is washed with an aqueous solution of hydrogen fluoride to clean the outermost surface of the quartz glass, and then etched with a hydrogen fluoride aqueous solution. When the surface 1 〇μηι is investigated, the enclosed metal is contained in the field from the inner wall of the arc tube to a certain depth. From this point of view, it is considered that the sealed metal system is driven into the inner portion of the arc tube, and is not attached to the inner wall of the arc tube. The phenomenon as described above is considered to occur when the current suddenly increases from standby to illumination. The reason is presumed as follows. In the case of low power standby, the halogen density in the vicinity of the inner wall of the arc tube is formed to be low. Therefore, when the power is switched to the high power, the electron density of the arc increases sharply, and atoms of the metal such as iron or helium collide with the electrons in the arc and fly toward the inner wall of the arc tube. In the conventional technique, since a large amount of mercury exists, the mercury acts as a buffer, and the enclosed metal is inhibited from entering the arc tube. However, since the amount of mercury is lowered, the buffering effect is small, and the enclosed metal such as iron or tantalum is easily driven. In particular, it can be seen that the amount of input increases sharply when the power difference between the standby time and the irradiation time exceeds 1.5 times. When the sealed metal is driven into the inside of the arc tube as described above, the luminescent substance inside the arc tube is reduced, and the illuminance is lowered, so that the illuminance maintenance rate is lowered. Based on the above, the present invention is a long-arc discharge lamp in which a pair of electrodes are disposed in opposite directions in the arc tube, and a metal such as mercury, iron, or the like 201218242 and halogen is sealed in an amount of 0.5 mg/cm 3 or less, and the electric power is frequently performed. In the case of the rising power switching, the phenomenon that the enclosed metal is driven into the inner wall of the arc tube is also suppressed, and the illuminance maintenance rate is prevented from being lowered for a short period of time. (Means for Solving the Problem) In order to solve the above problem, the invention of the present invention relates to a long arc type discharge lamp in which a pair of electrodes are disposed opposite to each other in an arc tube, and the long arc type discharge lamp is characterized in that it is enclosed in the arc tube Mercury (Hg), which is contained in an amount of 0.5 mg/cm 3 or less, and is sealed with at least one of iron (Fe), lanthanum (T1), and bismuth (Bi), and is enclosed in a halogen to encapsulate a metal other than mercury. The mass of the material was set to M (mol), the mass of the halogen-encapsulated material was set to H (mol), and the mass / M was in the range of 2.1 SH/MS 5.0. Further, the present invention is characterized in that the lighting mode is illuminated in two lighting modes of the lighting lighting mode and the standby lighting mode, and the standby lighting mode is lower than the lighting lighting mode. In addition, the invention of the present invention is characterized in that: the long-arc type discharge lamp includes: a lighting device for supplying electric power to the long-arc type discharge lamp; and A power switching means provided in the lighting device and switching the amount of input electric power. (Effect of the Invention) According to the present invention, in the long arc discharge lamp in which the amount of mercury (Hg) enclosed in the arc tube is 0.5 mg/cm3 or less, the mass of the metal to be sealed other than mercury is set to M ( M〇l), the mass of the halogen-encapsulated material is set to H(mo1) 201218242, and the ratio of Η/M is in the range of 2.1SH/MS5_0 'by thereby preventing the encapsulating metal as the luminescent substance from decreasing' Prevent the illuminance maintenance rate from decreasing. In particular, when the lighting method for frequently and greatly increasing the electric power is used, the effect of preventing the sealing metal from entering the inner wall of the arc tube is achieved. Even if the lighting method as described above is used, the illuminance maintenance rate is not easily lowered. The lamp's lighting power is saved. Further, according to the present invention, when the lighting mode in which the illumination lighting mode and the standby lighting mode are different from each other is switched to be turned on, the lighting is switched from the standby lighting mode to the irradiation. After the switching mode of the lighting mode, the density of the halogen near the inner wall of the arc tube is also high, and the enclosed metal can be prevented from entering the inner wall of the arc tube. [Embodiment] Fig. 1 is a cross-sectional view showing a tube axis direction of a long arc type discharge lamp of the present invention. In the figure, the long arc type discharge lamp 1 is provided with sealing portions 3 and 3 at both ends of the arc tube 2 made of, for example, a translucent material such as quartz glass, and is interposed between the arc tubes 2 and the inside of the arc tube 2 A pair of counter electrodes 4, 4 made of tungsten are disposed opposite to each other with a predetermined distance. The root end portion of each electrode 4 is joined to a metal foil 6 such as molybdenum embedded in the sealing portion 3. The outer lead 5 is connected to the other end side of the metal foil 6, and protrudes toward the outside of the arc tube 2. The external lead 5 is powered by a power supply line connected to a power supply and a lighting circuit (not shown). -9 - 201218242 Long arc type means that the distance between the electrodes is longer than the predetermined length, and a long arc is formed when the light is turned on. This is different from the point of supply, and is called accordingly. Specifically, with respect to the inner diameter of the arc tube, the electrode pitch I is λ or more in the longer case. This is based on the use of the large object to be scanned by the scanning lamp itself or by a plurality of arrays. In the interior of the arc tube 1, a metal such as iron (Fe), tin (Sn), zinc (Zn), or bismuth (Bi) is sealed as a light-emitting substance, and mercury is sealed to adjust the amount to 0.5 mg. The amount below /cm3. Among the encapsulated metals other than mercury, it is suitable to use iron as a light-emitting substance. The respective sealing amounts are, for example, 0.2 to 6x10. These materials are metals having an emission spectrum in the ultraviolet field when a light-emitting lamp is enclosed in the arc tube. The halogen to be enclosed is, for example, iodine (I) or bromine (B! is encapsulated in a state of, for example, a mercury halide such as mercury iodide or cesium iodide. In the present invention, it is enclosed in the arc tube 1 The relationship between the metal (iron, bismuth, antimony, tin, zinc, etc.) and halogen (the mass of the substance is as follows. If the mass of the metal other than mercury is M (mol) and the amount is H (mol), Its mass ratio is U/M of the range UH/MS5.0. The reason is detailed later.
，按照該距 源的短弧型 隹爲5倍以上 用在對面積 等進行面照 鉈（T1)、 光物質。 燈電壓。封 、鉈、鉍來 *6mol/cm3 » 質而將燈亮 )。該等係 入在發光管 述水銀以外 碘、漠）的 鹵素的物質 目設爲2.1 S -10- 201218242 以下列舉封入在發光管1內的水銀、及除此之外的金 屬的組合之例。 若將水銀作爲發光物質時，係以水銀與鉍、水銀與鉈 、水銀與錫' 水銀與綷的任何組合來予以封入。 若將鐵作爲發光物質時，係以鐵、鉈與水銀；鐵、鉍 與水銀；鐵、錫與水銀；鐵、鋅與水銀的任何組合來予以 封入。 其中，在發光管內亦可封入包含上述金屬組合的3種 以上或4種以上的金屬。 關於本發明之長弧型放電燈之亮燈裝置，將其構成之 一例顯示於第2圖。 在該圖中，交流電源21係其輸出側與升壓整流電路22 相連接。 升壓整流電路22係例如藉由輸入側與交流電源2 1相連 接的升壓變壓器T1、整流二極體D1、平滑電容器C1所構 成的整流電路，將交流電流轉換成直流電壓來進行輸出。' 之後，該直流電壓利用由線圈L3、切換元件S 1、整流 二極體D2、平滑電容器C2所構成的升壓斬波電路予以升壓 ，對極性反轉電路23輸出經平滑化的直流電壓。 在升壓斬波電路的切換元件S1 (例如IGBT、FET )連 接有控制電路24，藉由使該切換元件S1的切換頻率、及 ON、OFF期間改變，可供給所希望的電壓》 藉此，可進行切換投入電力，藉由來自控制電路24的 訊號，來切換照射時亮燈模式及待機時亮燈模式等不同的 -11 - 201218242 亮燈模式。 與升壓整流電路22的輸出側相連接的極性反轉電路23 係由例如橋接電路所構成的反相器電路，由以橋接狀相連 接的IGBT或FET等切換元件Q1〜Q4所構成。 極性反轉電路23的切換元件Q1〜Q4的ON、OFF係藉 由控制電路25所包含的驅動器電路來進行驅動。 極性反轉係藉由作爲切換元件Q1及Q4的驅動訊號的 極性反轉電路驅動訊號X、及作爲切換元件Q2及Q3的驅動 訊號的極性反轉電路驅動訊號Y交替反覆ON、OFF的動作 ，使矩形波交流電壓被供給至放電燈1。 燈的亮燈始動係藉由對與燈串聯連接的起動器線圈L2 由起動器電路26施加脈衝電壓，而將被封入在燈的氣體進 行絕緣破壞來進行。 關於具備有以上的燈及其亮燈裝置的光照射裝置的使 用方法，說明如下。 關於光照射裝置之構成雖未圖示，但是具備有上述的 燈、及具備有燈亮燈裝置的燈罩、反射鏡等，按照作爲照 射對象的工件（被照射物）而具備有適當的搬送裝置等。 在習知的使用方法中，燈的亮燈頻度係每1次進行至 少1小時左右的連續照射亮燈，由再亮燈至照度安定爲止 需要預定的時間’因此並未進行在不需要照射時使電力降 低等動作。 在本發明中，係藉由照射用亮燈模式及待機用亮燈模 式的至少2個模式來進行亮燈。 -12- 201218242 照射用亮燈模式係以例如額定電力等預定的投入電力 予以亮燈。在待機用亮燈模式中，係以比照射用亮燈模式 爲更低的投入電力予以亮燈，在該期間並未進行對被照射 物照射紫外線，藉由遮光片（shutter )等遮光手段來將照 射光遮光，且爲了省電力化而待機。 投入電力的切換係藉由例如第2圖所示之燈亮燈裝置 來進行。其中，若可進行投入電力的切換，則並非侷限於 如上所示之亮燈裝置。 切換的時序係例如可藉由利用被設置在搬送裝置等的 預定的感測手段，來感測工件被搬送而來的情形，感測訊 號被傳送至燈亮燈裝置的控制電路24，藉由控制電路24來 切換投入電力等動作，藉此自動計量。或者，亦可藉由程 式，將預先決定的時序輸入至控制電路。 照射用亮燈模式與待機用亮燈模式係交替作切換。切 換週期係各自的亮燈模式中的連續亮燈時間爲1分鐘以內 ，例如，待機/亮燈均爲3 0〜5 0秒左右。各亮燈模式的切 換係以0.5秒至3.0秒左右即完成。 如上所示進行亮燈，藉此對依序搬送、搬運而來的工 件，在需要照射時，係以預定電力進行亮燈，在不需要照 射時，則以低於該預定電力的電力進行亮燈，不進行照射 而待機，藉此以使用時間全體而言，可將亮燈電力省電力 化》 但是，若如上所示切換電力而亮燈時，在水銀量較少 的長弧型金屬鹵化物燈中，如前所述由小電力切換成大電 -13- 201218242 力時，會發生燈封入金屬打入至發光管內壁的情形，結果 會有封入金屬量減少的問題。 關於使長弧型放電燈的投入電力改變時的電壓、電流 等的變化，在表1顯示一例。 在該表中，關於電極間距離爲150cm左右的1個燈，顯 示所投入的電力、與電壓、電流、電流密度的關係者。 [表1] 總電力(W) 電駿V) 電流(A) 12,000 1340 9.0 15,000 1376 11.0 18,000 1411 12.9 24,000 1463 16.6 30,000 1542 19.7 36,000 1600 22.7 藉由該表可知，在長弧型放電燈中，在使電力增加時 ，與電壓的變化相比，電流的變化較大。 在此，若針對形成有電弧的發光管內的電流密度加以 硏究時，長弧型放電燈的發光管的內徑係在管軸方向爲大 致一定，因此發光管內的電流密度係取決於電流値。亦即 ，隨著電力的增加，電流密度會增加。 在電弧內的電子與金屬原子的衝撞次數係取決於電流 密度，因此若電流密度增加時，朝向發光管內壁運動的金 屬原子會增加。 在使電力作切換而增加的瞬後，追隨其的發光管內的 溫度上升並不充分。因此，經氣化的鹵素量較少，且發光 管內壁附近的鹵素密度較低，金屬原子並未被鹵素捕捉而 -14- 201218242 容易被打入至發光管內壁。 因此，本發明係藉由規定水銀以外的封入金屬與封入 鹵素的物質量，相對水銀以外的金屬，較爲豐富地封入鹵 素，藉此提高發光管內壁附近的鹵素密度。 發光管內壁附近的鹵素密度較高時，在電弧內金屬原 子與電子衝撞而飛來時，容易與鹵素相結合，而抑制被打 入至發光管內壁。 其中，之所以將水銀由規定的金屬中去除，係因爲前 述關於被打入至發光管內的物質的分析結果，關於水銀， 幾乎未觀測到打入至發光管內壁之故。 [實施例] 以下一面使用圖示，一面說明驗證本發明之效果的實 驗結果。 第3圖係將複數長弧型放電燈的亮燈經過時間（h )、 與照度維持率（％)的關係作比較的圖表。 在此，照度維持率係指針對預定波長的光的照度，將 亮燈開始時的照度、與亮燈任意時間後的照度的比，以亮 燈開始時的照度爲基準而以百分率表示者。在本實驗中係 將3 65ηιη的波長的光作爲對象，藉由在該波長附近具有感 度的照度計來進行測定。 實驗所使用的燈均爲電極間距離1 450mm的長弧型放 電燈，以最大額定電力34.8kW來進行交流亮燈者。發光管 爲石英玻璃，電極爲鎢。各燈的詳細規格的不同之處容後 -15- 201218242 詳述。 比較例的燈係在內徑22mm的發光管內封入水銀260mg 、鐵10mg、碘化汞55mg、碘化鉍45mg、氙6.7kPa，對發 光管內容積的水銀量爲〇.48mg/cm3。 該燈中的水銀以外的封入金屬的物質量M(mol)與封入 鹵素的物質量H(mol)的比Η/M爲0.99。 第3圖所示的是進行將燈的輸入電力分別爲1 1.6k W的 待機用亮燈模式、與爲17.4kW的照射用亮燈模式之電力差 爲1.5倍的2個亮燈模式，每隔60秒鐘作切換的亮燈時的亮 燈經過時間（h )與照度維持率（％ )的關係。 可知在比較例的燈中，450小時的照度維持率爲70%， 相對亮燈經過時間，照度維持率急劇降低》 本發明1的燈係在內徑22mm的發光管內被封入有水銀 2 5 3 mg ' 鐵 10mg、碘化荥 90mg、碘化鉍45mg、氣 6.7kPa， 相對發光管內容積的水銀量爲0.5mg/cm3的燈。 該燈中的水銀以外的封入金屬的物質量M(m〇l)與封入 鹵素的物質量H(mol)的比Η/M爲2.1。 關於該燈，與上述同樣地進行切換亮燈模式的亮燈， 結果亮燈1 000小時後的照度維持率爲90%，在經過2000小 時後，亦顯示76%的照度維持率。 亦即，在該燈中，由於Η/M爲2.1，因此藉由提高存在 於發光管內壁附近的鹵素密度，飛到內壁的水銀以外的封 入金屬原子與鹵素會相結合，因此防止被打入至石英玻璃 -16- 201218242 本發明2的燈係在內徑22mm的發光管內被封入有水銀 273 mg、碘化汞24mg、碘化鉈3mg、氙6.7kPa，相對發光 管內容積的水銀量爲0.5mg/cm3的燈。 該燈中的水銀以外的封入金屬的物質量M(mol)與封入 鹵素的物質量H(mol)的比Η/M爲4.0。 關於該燈，與上述同樣地進行切換亮燈模式的亮燈， 結果亮燈1〇〇〇小時後的照度維持率爲96%，在經過40 00小 時後亦顯示92 %的照度維持率。 亦即，即使在所被封入的金屬種類爲不同時，亦發揮 與本發明1的燈爲相同的效果》 在本發明之燈更加增加鹵素量，而將Η/M形成爲5.0的 本發明3的燈中，係至3 000小時爲止均顯示96%的照度維持 率。但是，在3 400小時，單側的電極會在密封部附近折彎 而無法亮燈。此被認爲發生因鹵素所造成之電極腐蝕。 但是，針對防止發光物質減少等效果爲有效，3400小 時的壽命在實用上已足夠，因此Η/M爲5.0時，亦爲可發揮 本案發明之效果的範圍。 亦即，Η/M的範圍係以2.1SH/MS5.0爲佳，在該範圍 內，可達成本案發明之效果。更佳爲2.1 SH/MS 4.0，在該 範圍內係具有不會發生因鹵素所造成之電極腐蝕的效果。 基於以上，在發光管內被封入水銀且水銀量爲 〇.5mg/cm3以下的長弧型放電燈中，將水銀以外的封入金 屬的物質量設爲M(mol)、將封入鹵素的物質量設爲H(mol) ，當該等的比亦即Η/M爲2.1SH/MS5.0的範圍內時，在發 -17- 201218242 光管內壁附近’鹵素與封入金屬相結合，抑制封入金屬打 入至發光管內壁。 藉此，可防止作爲發光物質的封入金屬減少，且可防 止照度維持率降低。 尤其，當使用使電力頻繁且大幅上升的亮燈方法時， 達成防止封入金屬打入至發光管內壁的效果，即使使用如 上所示之亮燈方法，亦不易降低照度維持率，因此可將燈 的亮燈電力省電力化。 此外，將照射用亮燈模式、及待機用亮燈模式的至少 2個投入電力不同的亮燈模式在1分鐘以內作切換而亮燈時 ，即使在由待機用亮燈模式切換成照射用亮燈模式的瞬後 ，亦由於發光管內壁附近的鹵素密度高，因此防止封入金 屬打入至發光管內壁。 此外，即使由待機用亮燈模式切換至照射用亮燈模式 時的電力上升率爲1 .5倍以上，亦可維持長時間照度，因 此可使使用電力省電力化》 【圖式簡單說明】 第1圖係顯示長弧型放電燈之構成的管軸方向剖面圖 〇 第2圖係顯示本發明之長弧型放電燈之亮燈裝置之一 例圖。 第3圖係顯示本發明之實驗結果的圖。 -18- 201218242 【主要元件符號說明】 1 :長弧型放電燈 2 :發光管 3 :密封部 4 :電極 5 :外部引線 6 :金屬箔 2 1 :交流電源 2 2 :升壓整流電路 23 :極性反轉電路 2 4 :控制電路 2 5 :控制電路 26 :起動器電路 C 1 :平滑電容器 C2 :平滑電容器 D 1 :整流二極體 D2 :整流二極體 L2 :起動器線圈 L3 :線圈 Q 1 :切換元件 Q2 :切換元件 Q3 :切換元件 Q4 :切換元件 S 1 :切換元件 -19According to the short-arc type 该 of the source, it is used for surface 等 (T1) and light substances. Lamp voltage. Seal, 铊, 铋 *6mol/cm3 » quality and light up). The substance which is a halogen which emits iodine or uranium other than mercury in the light-emitting means is 2.1 S -10- 201218242. Hereinafter, a combination of mercury enclosed in the arc tube 1 and a combination of other metals will be described. If mercury is used as the luminescent material, it is sealed with any combination of mercury and strontium, mercury and strontium, mercury and tin 'mercury and strontium. If iron is used as a luminescent substance, it is enclosed by iron, strontium and mercury; iron, strontium and mercury; iron, tin and mercury; and any combination of iron, zinc and mercury. Among them, three or more kinds or four or more kinds of metals including the above metal combinations may be enclosed in the arc tube. An example of the configuration of the lighting device for the long arc type discharge lamp of the present invention is shown in Fig. 2. In the figure, the AC power source 21 is connected to the boost rectifier circuit 22 on its output side. The boost rectifier circuit 22 is a rectifier circuit formed by a step-up transformer T1, a rectifying diode D1, and a smoothing capacitor C1, which are connected to the AC power source 2 1 on the input side, and converts the AC current into a DC voltage for output. After that, the DC voltage is boosted by a boost chopper circuit composed of the coil L3, the switching element S1, the rectifying diode D2, and the smoothing capacitor C2, and the smoothed DC voltage is output to the polarity inverting circuit 23. . The control circuit 24 is connected to the switching element S1 (for example, IGBT or FET) of the step-up chopper circuit, and the desired voltage can be supplied by changing the switching frequency and the ON and OFF periods of the switching element S1. The input power can be switched, and the signal from the control circuit 24 can be switched between different illumination modes such as the illumination mode and the standby illumination mode. The polarity inverting circuit 23 connected to the output side of the boost rectifier circuit 22 is composed of, for example, an inverter circuit composed of a bridge circuit, and is constituted by switching elements Q1 to Q4 such as IGBTs or FETs connected in a bridge shape. The ON and OFF of the switching elements Q1 to Q4 of the polarity inverting circuit 23 are driven by the driver circuit included in the control circuit 25. The polarity inversion is performed by the polarity inversion circuit driving signal X as the driving signals of the switching elements Q1 and Q4, and the polarity inversion circuit driving signal Y as the driving signals of the switching elements Q2 and Q3 alternately turning ON and OFF. The rectangular wave AC voltage is supplied to the discharge lamp 1. The lighting start of the lamp is performed by applying a pulse voltage to the starter circuit 26 to the starter coil L2 connected in series with the lamp to insulate the gas enclosed in the lamp. The method of using the light irradiation device including the above lamp and its lighting device will be described below. Though the light irradiation device is not illustrated, the lamp and the lamp cover and the mirror including the lamp lighting device are provided, and an appropriate conveying device is provided for the workpiece (irradiated object) to be irradiated. Wait. In the conventional method of use, the lighting frequency of the lamp is continuously illuminated for at least one hour or so per time, and a predetermined time is required from the re-lighting to the illuminance stabilization. Reduce power and other actions. In the present invention, lighting is performed by at least two modes of the illumination lighting mode and the standby lighting mode. -12- 201218242 The illumination lighting mode is illuminated by a predetermined input power such as rated power. In the standby lighting mode, the power is turned on at a lower input power than the illumination lighting mode, and during this period, the irradiated object is not irradiated with ultraviolet rays, and is shielded by a light shielding means such as a shutter. The illumination light is shielded from light and stands by for power saving. The switching of the input electric power is performed by, for example, the lamp lighting device shown in Fig. 2. However, if the switching of the input power can be performed, it is not limited to the lighting device as described above. The timing of the switching can be sensed by, for example, using a predetermined sensing means provided on the conveying device or the like, and the sensing signal is transmitted to the control circuit 24 of the lamp lighting device. The control circuit 24 switches the operation such as inputting electric power to automatically measure the operation. Alternatively, a predetermined timing can be input to the control circuit by a program. The illumination lighting mode and the standby lighting mode are alternately switched. The switching cycle is continuous within 1 minute of the respective lighting mode. For example, the standby/lighting is about 30 to 50 seconds. The switching of each lighting mode is completed in about 0.5 seconds to 3.0 seconds. When the lighting is performed as described above, the workpieces that are sequentially conveyed and transported are turned on with predetermined electric power when the irradiation is required, and are turned on with the electric power lower than the predetermined electric power when the irradiation is not required. The lamp is placed on standby without irradiation, and the lighting power can be saved in the entire use time. However, when the power is switched and turned on as described above, the long-arc metal halide having a small amount of mercury is halogenated. In the object lamp, when the small electric power is switched to the large electric-13-201218242 as described above, the lamp is sealed and the metal is driven into the inner wall of the arc tube, and as a result, there is a problem that the amount of the enclosed metal is reduced. An example of the change in voltage, current, and the like when the input electric power of the long arc type discharge lamp is changed is shown in Table 1. In this table, one lamp having a distance between electrodes of about 150 cm shows the relationship between the electric power input and the voltage, current, and current density. [Table 1] Total power (W) Electric Jun V) Current (A) 12,000 1340 9.0 15,000 1376 11.0 18,000 1411 12.9 24,000 1463 16.6 30,000 1542 19.7 36,000 1600 22.7 From the table, in the long arc discharge lamp, When the power is increased, the current changes more than the voltage change. Here, when the current density in the arc tube in which the arc is formed is investigated, the inner diameter of the arc tube of the long arc discharge lamp is substantially constant in the tube axis direction, so the current density in the arc tube depends on Current 値. That is, as the power increases, the current density increases. The number of collisions of electrons and metal atoms in the arc depends on the current density, so if the current density increases, the metal atoms moving toward the inner wall of the arc tube will increase. After the power is switched and increased, the temperature rise in the arc tube following it is not sufficient. Therefore, the amount of vaporized vapor is small, and the density of halogen near the inner wall of the arc tube is low, and the metal atoms are not trapped by the halogen, and -14-201218242 is easily driven into the inner wall of the arc tube. Therefore, in the present invention, by defining the mass of the sealing metal other than mercury and the halogen-immobilized material, the halogen is richly encapsulated with respect to the metal other than mercury, thereby increasing the halogen density in the vicinity of the inner wall of the arc tube. When the halogen density in the vicinity of the inner wall of the arc tube is high, when the metal atoms collide with the electrons in the arc and fly, they are easily combined with the halogen, and are prevented from being driven into the inner wall of the arc tube. Among them, the reason why the mercury was removed from the predetermined metal was because of the analysis result of the substance which was driven into the arc tube as described above, and the mercury was hardly observed to enter the inner wall of the arc tube. [Examples] The results of experiments for verifying the effects of the present invention will be described below using the drawings. Fig. 3 is a graph comparing the relationship between the lighting elapsed time (h) and the illuminance maintenance rate (%) of the plurality of long arc type discharge lamps. Here, the illuminance maintenance rate is the illuminance of the light of the predetermined wavelength, and the ratio of the illuminance at the start of lighting to the illuminance after the illuminating at any time is expressed as a percentage based on the illuminance at the start of the lighting. In the present experiment, light having a wavelength of 3 65 η η is used as a target, and measurement is performed by an illuminometer having sensitivity near the wavelength. The lamps used in the experiment were long-arc type discharge lamps with a distance of 1 450 mm between the electrodes, and the AC lighting was performed with a maximum rated power of 34.8 kW. The light-emitting tube is quartz glass and the electrode is tungsten. The details of the detailed specifications of each lamp are detailed -15- 201218242. In the lamp system of the comparative example, 260 mg of mercury, 10 mg of iron, 55 mg of mercury iodide, 45 mg of cesium iodide, and 氙 6.7 kPa were enclosed in an arc tube having an inner diameter of 22 mm, and the amount of mercury in the inner tube of the light tube was 〇.48 mg/cm3. The ratio Η/M of the mass M (mol) of the metal encapsulated other than mercury in the lamp to the mass H (mol) of the halogen-imparted material was 0.99. Fig. 3 shows two lighting modes in which the standby lighting mode in which the input power of the lamp is 1 1.6 kW and the lighting mode in the illumination mode of 17.4 kW are 1.5 times. The relationship between the lighting elapsed time (h) and the illuminance maintenance rate (%) at the time of switching the switching is performed every 60 seconds. It can be seen that in the lamp of the comparative example, the illuminance maintenance rate for 450 hours is 70%, and the illuminance maintenance rate is rapidly lowered with respect to the elapsed time of the illumination. The lamp of the present invention is sealed with mercury 2 5 in the arc tube having an inner diameter of 22 mm. 3 mg '10 mg of iron, 90 mg of cesium iodide, 45 mg of cesium iodide, 6.7 kPa of gas, and a lamp having an amount of mercury of 0.5 mg/cm3 relative to the inner volume of the arc tube. The ratio Η/M of the mass M (m〇l) of the metal-encapsulated material other than mercury in the lamp to the mass H (mol) of the halogen-implanted material was 2.1. With respect to the lamp, the lighting in the switching lighting mode was performed in the same manner as described above, and as a result, the illuminance maintenance rate after the lighting for 1,000 hours was 90%, and after the lapse of 2000 hours, the illuminance maintenance rate of 76% was also displayed. That is, in the lamp, since Η/M is 2.1, by increasing the density of the halogen existing in the vicinity of the inner wall of the arc tube, the enclosed metal atoms other than mercury flying to the inner wall are combined with the halogen, thereby preventing being Into the quartz glass-16-201218242 The lamp system of the invention 2 is sealed with mercury 273 mg, mercury iodide 24 mg, cesium iodide 3 mg, 氙 6.7 kPa in an arc tube having an inner diameter of 22 mm, relative to the inner volume of the luminous tube. A lamp having a mercury content of 0.5 mg/cm3. The ratio Η/M of the mass M (mol) of the metal encapsulated other than mercury in the lamp to the mass H (mol) of the halogen-imparted material was 4.0. With respect to the lamp, the lighting of the switching lighting mode was performed in the same manner as described above, and as a result, the illuminance maintenance rate after the lighting for 1 hour was 96%, and after the lapse of 40,000 hours, the illuminance maintenance rate of 92% was also displayed. That is, even when the type of the metal to be sealed is different, the same effect as the lamp of the present invention 1 is exerted. The lamp of the present invention further increases the amount of halogen, and the invention of which the Η/M is formed into 5.0 is 3 The lamp has a 96% illumination maintenance rate up to 3,000 hours. However, at 3,400 hours, the one-sided electrode would bend near the seal and could not be lit. This is believed to occur due to electrode corrosion caused by halogen. However, it is effective to prevent the luminescent substance from being reduced, and the life of 3,400 hours is practically sufficient. Therefore, when Η/M is 5.0, the effect of the present invention can be exerted. That is, the range of Η/M is preferably 2.1SH/MS5.0, and within this range, the effect of the invention can be achieved. More preferably, it is 2.1 SH/MS 4.0, and in this range, there is no effect of corrosion of the electrode due to halogen. In the long arc type discharge lamp in which the mercury is sealed in the arc tube and the amount of mercury is 〇.5 mg/cm3 or less, the mass of the metal to be sealed other than mercury is M (mol), and the mass of the substance to be enclosed in the halogen is used. When H(mol) is set, when the ratio is Η/M is 2.1SH/MS5.0, the halogen is combined with the enclosed metal in the vicinity of the inner wall of the -17-201218242 light pipe to suppress the sealing. The metal is driven into the inner wall of the arc tube. Thereby, it is possible to prevent the amount of the enclosed metal as the luminescent material from being reduced, and it is possible to prevent the illuminance maintenance rate from being lowered. In particular, when a lighting method that frequently and greatly increases the electric power is used, an effect of preventing the enclosed metal from entering the inner wall of the arc tube is achieved, and even if the lighting method as described above is used, it is difficult to reduce the illuminance maintenance rate, and thus it is possible to The lighting of the lights is electrically powered. In addition, when the lighting mode in which at least two of the input lighting modes of the illumination lighting mode and the standby lighting mode are different is switched within one minute, the lighting mode is switched to the illumination brightening mode. Immediately after the lamp mode, the halogen density near the inner wall of the arc tube is high, so that the enclosed metal is prevented from entering the inner wall of the arc tube. In addition, even if the power increase rate when switching from the standby lighting mode to the illumination lighting mode is 1.5 times or more, the long-term illuminance can be maintained, so that the power can be saved." Fig. 1 is a cross-sectional view showing a tube axial direction of a long arc type discharge lamp. Fig. 2 is a view showing an example of a lighting device for a long arc type discharge lamp of the present invention. Fig. 3 is a view showing the experimental results of the present invention. -18- 201218242 [Description of main components] 1 : Long arc discharge lamp 2 : Illuminated tube 3 : Sealing part 4 : Electrode 5 : External lead 6 : Metal foil 2 1 : AC power supply 2 2 : Boost rectifier circuit 23 : Polarity reversal circuit 2 4 : Control circuit 2 5 : Control circuit 26 : Starter circuit C 1 : Smoothing capacitor C2 : Smoothing capacitor D 1 : Rectifying diode D2 : Rectifying diode L2 : Starter coil L3 : Coil Q 1 : switching element Q2 : switching element Q3 : switching element Q4 : switching element S 1 : switching element -19