201218210 六、發明說明： 【發明所屬之技術領域】 本發明係有關小型且構造簡單，僅精密設備 有工件之活動載物台相對於固定載物台容易且^安裝 動，並且固定活動載物台時之間隙、活動栽物么===滑 移動少的載物台機構。 D疋後之 【先前技術】 以往’提出有各種在使用進行切削、磨 加工機、顯微鏡等時，用於設置工件之戴物么婊 等的 載物台機構所包括的載物台之固定裝置。 此種 亦即，公知的載物台機構，基本上具 及活動載物台，例如將與進給螺絲、進給 疋栽物台以 -體的測微計頭等安裝於固定載物台側呈 側安裝限位器。 且於活動載物台 之限 之產 進而’於載物台機構中，活動軸與活動載物 2器經常處於由拉伸彈簧拉合的_ 並且’作為此種手動載物台之一 =定組件之限位機構以及= = ，度的進行調整，且容易讀取刻度之 手動載物台（例如，參照專利文獻D。 而1 :如第14圖所示’-種手動載物台200， i八二"㈣固件絲有精密設備之滑動組件204 件及底座1接的固定組件2〇5經由滑動機構連 ϋϊί柄219之操作使滑動組件2G4滑動，以進行所 女裝的精減備之位置調整，固定組件挪係由樹脂形成， 201218210 於該固定組件205之兩側的壁部以形成倒三角形之突出部 231的方式分別沿縱向設置槽232。 ^於是，使滑動固定螺釘210貫通入壁部設置的滑動固 定螺釘用孔216進而抵靠.於突出部231，使突出部231向内 側傾斜而壓入滑動組件2〇4 ’由此固定滑動組件204相對於 ，定士件205之位置，並且使多個滑動調節螺釘（未予圖 :)貫通入固定組件205的兩側之壁部設置的多個滑動調 即螺釘用孔215進而抵靠於突出部231，使突出部231 =員斜而壓住滑動組件2〇4，從而對固定組件2〇5與滑動組 件204之間的滑動之程度進行微調。 台之高精度且牢固的固定高精度载物 戟D 口疋凌置（例如，參照專利文獻。 f置Hr ’如第15圖所示，公開著-種載物台固定 將用於固定工件之載物台⑽二 置 載物台303並沿缝具備.汉置於上述 齡以及自與载物⑶博狀構件 的方式固定該棒狀構件咖之㈣構件3=方向以面接觸 範圍[)專利文獻Π日本特開__22期號公報（申請專利 範圍等）1獻2]曰本特開2003~48129號公報（申請專利 以燕尾槽滑以獻4 手動載物台存在下述問題： 動載物台之際’會產生： 4 201218210 不足 並且，專利文獻2所娜喊物㈣定裝 題：由於需要突出設置於規定的載物台之外部 為包括該載物台©定裝置之載物台猶況下，載物 型化’並且在ϋ定載物台時，會產生大的間 二，车 載物台之固定性不足。 或者疋手動 【發明内容】 因此，本發明人經精心檢討的研究，处 間f吸收構件，能夠;成工i: 動性、間隙防止性、以及固紐，=至完==台之移 台時嶋、活動載：¾ 若依本發明時，提供—種 及沿該固定載物台之表面滑動包括固定載物台 之特徵在於’在形成於固定說，該載物台機構 土-個或者兩個以上的^^孔。卩設置有進給螺絲 件’該連結構件用於使活^件，並且設置有連結構 滑動’由此能夠解決上述的問題^、進給螺絲之進給同步的 鎿孔部設置:置，藉由形成有螺 物台之移動性。 。螺4奴轉即可得優異的栽 並且，藉由以此種方式構成，能夠提供固定活動裁物 201218210 台時之間隙、固定後之移動少的載物台機構。 藉由以此種方式構成間隙吸 相對於規定位置的安裝變得容 ，使仔間隙吸收構件 構件之應力吸收變得容易，能於該間隙吸收 移動性、固定性。 X于更為優異的戴物台之 藉由以此種方式構成間隙吸收 才目對於規定位置之安裝、固定性變‘件 ;=構:ί,，’能夠長期獲得優異的活4::: 構件;=種 之移動性、固定性。 動載物台 並且’當構成本發明之载物台機構時，以於 台與活動載物台之間具備作為料構件之金屬跋I載物 通過以此種方式設置作為引導構件之金屬Μ，可 ί:ΐίί3物台之間發揮作為導轨之功能，可得更優 的活動載物。之移動性、固定性，可獲得更良好= 6 201218210 f件’該螺釘二本::上之下載方物向載f為具備螺釘 物台，並游峡祕台餘輯物力動載 久性。 疋注或者優異的而才 及活動載物台分別形:二二=幾構時’以固定載物台 安裝於活動台，可提供即使 ' 1]½ ’並則、型且廉價 長二:供-種載物台機構，包括 物台機構之特徵在於載動的活動載物台，該載 :=間隙吸收構件===== 利用安 圓柱狀 構件滑動，咖以使 士此規疋开^狀的固定載物台與活動載物A經由賴;I* 實質的連結，並 性等，並且小型並且廉_^台触付&異的女裝 【實施方式】 [第1實施方式] 201218210 包括ί 第1a〜b圖例示，載物台機構i。 隙吸收構件l16p 進置固以· 給螺絲15之進㈣步贱構件18與進 分別定載物台11及活動載物台12 進行ϊί說Ϊ當的參照關對第1實施方式之載物台機構10 1.固定載物台 (1)形態 實ia〜b圖所示_定載物台11之形態，於第1 ^ίί；台機構1G中，若為平板狀即可，並未予特 通常較宜為’將11定載物台11之平面形狀形成 為二邊形(，括正方形)’並且作為其尺寸，將縱宽形成為 β :之巳圍内的值’將橫寬形成為2〜10cm之範圍内的 值，並且將厚度形成為1〜1〇_之範圍内的值。 此乃因.若採用此種平面形狀及尺寸之固定載物台11 時，不僅操作方便及製造容易，且即使在介經工件固定用 貫通孔12b等與安裝有規定的工件（未予圖示）之活動載 物台12組合的情況下，亦可穩定的進行保 使其滑動所致。 並且，關於固定載物台之形態，如第2a〜b圖所示，宜 為在俯視四邊形狀的固定載物台n、u，之情況下，在其 一邊設置著供形成規定空間而用的缺口 llc。 、 8 201218210 此乃因：利用該缺口 lie之空間予以形成進給螺 之移動空間，該進給螺絲15具備沿規定方向移動而用''於 壓活動載物台12之連結構件18,能使該等沿規定方 移動所致。 疋轉 因此，具有具備連結構件18之進給螺絲15的固^ 物台11、11，經由利用多個連結構件用固定件19 (if栽 19b)平衡良好且予以牢固安裝的連結構件18與活 台12連結，因此能與由進給螺絲15之旋轉移動引 勿 給對應的僅使活動載物台12同步滑動。 進 亦即，藉由形成此種缺口 11C，能於固定載物台 11，停止的狀態下，僅使活動載物台12沿規定方向滑動'。 在此’至於設置於固定載物台n、n，之缺口 Uc 平面形狀，並無特別限定，但以採用例如矩形狀、槽& : 半圓形狀、半橢圓形狀、倒三角形狀、異形狀等為宜。 於是，雖然亦取決於固定載物台n、u，之大小， 定載物台11、11，之自一邊至缺口 llc之最深部的距離 亦即第2a〜b圖中以標號L1表示的距離通常以形成為工丄 15腿之範圍内的值為宜，形成為3〜12_之範圍内的值= 較宜，形成為5〜l〇mm之範圍内的值為尤宜。 … 並且，第2a〜b圖中以標號L2表示的缺口 Uc之面办 長度通常以形成5〜30mni之範圍内的值為宜，形成8〜25= 之範圍内的值為較宜，形成10〜2〇mm之範圍内的值為尤宜。 於是、’至於固定載物台u之構成材料並無特別限定， 但通常且為鋁（包括陽極氧化處理鋁）、銅、黃銅、鐵、鎳、 鎂、鎢、陶瓷、高分子樹脂材料等中的至少一種。 尤其，右為陽極氧化處理鋁時，由於涉及輕量性、耐 201218210 腐蝕性、耐久性、加工 故作為固定載物台 ⑽性及經濟性等， 此外，至於固定栽物a 固定載物台U較宜為於二;1之：態’如$ la〜b圖所示， 以上的安裝孔、潤滑脂 置有-個或兩個 、札ua、〗ib之小孔。 亦即’若上述 其他組件進行固定者，’即可利用該安 即可藉由向in定裁物台3 孔為潤滑脂以孔時Ϊ 滑動。0 〜勺^月月旨 (2)進給螺絲 裝在形成於^載^所台不^^螺^5及墊圈15’共同安 絲】5之端部設置有且 13’並且在上述進給螺 18。 〜麵、、，。構制11定件19之連結構件 U呈因直t狀累絲15之進給對應的’上述連，件 直線狀移動，由此可使活動載物台12穩定的連骨。動構件 具有^螺絲起子等不^進給螺絲15宜為形成為包括 螺紋部15b的結的凹部之頭㈣a、及具有螺紋槽之 •或者用馬達等利用機械式的_ 作。累'、糸起子或六角扳手等予以手動的使其旋轉動 之構s可若述進給_15相同的作用效果 亦了適當更換或改變規定形態，例如，亦可 10 201218210201218210 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a small-sized and simple structure, and only a movable stage having a workpiece of a precision device is easy to mount and mount with respect to a fixed stage, and the movable stage is fixed. Time gap, active planting ===The stage mechanism with less sliding movement. [Prior Art] In the past, various fixing devices for the stage included in the stage mechanism for setting the workpiece, such as a cutting, a grinding machine, a microscope, etc., have been proposed. . In this case, the known stage mechanism basically has a movable stage, and for example, a micrometer head such as a feed screw or a feed slab is mounted on the fixed stage side. Install the limiter on the side. And in the production of the limit of the movable stage, in the stage mechanism, the movable shaft and the movable loader 2 are often pulled by the tension spring _ and 'as one of the manual stages= The limit mechanism of the component and the manual stage that adjusts the scale and is easy to read the scale (for example, refer to Patent Document D. And 1: as shown in Fig. 14 - a manual stage 200, i八二"(4) Firmware wire has a sliding device of precision equipment 204 pieces and a fixed component of the base 1 2〇5 is connected via a sliding mechanism ί handle 219 to slide the sliding assembly 2G4 to perform the finishing of the women's clothing The position adjustment is performed, and the fixing component is formed of a resin. The wall portions on both sides of the fixing component 205 are respectively provided with the grooves 232 in the longitudinal direction so as to form the inverted triangular protrusions 231. Thus, the sliding fixing screws 210 are passed through. The sliding fixing screw hole 216 provided in the wall portion is further abutted against the protruding portion 231, and the protruding portion 231 is inclined inwardly and pressed into the sliding assembly 2〇4' to thereby fix the sliding assembly 204 with respect to the fixing member 205. Location and make multiple A plurality of sliding adjustment screw holes 215 provided through the wall portions of the two sides of the fixing assembly 205 are further abutted against the protruding portion 231, so that the protruding portion 231 is inclined to press the sliding portion The assembly 2〇4 finely adjusts the degree of sliding between the fixed unit 2〇5 and the slide unit 204. The high-precision and firm high-precision load of the stage is fixed (for example, refer to the patent literature). f is set to Hr ', as shown in Fig. 15, it is disclosed that the stage is fixed for the stage (10) of the workpiece to fix the workpiece, and the two stages 303 are provided along the slit. (3) The method of the Bo-shaped member is fixed to the rod-shaped member (4) The member 3 = the direction to the surface contact range [) Patent document Π Japan special opening __22 issue bulletin (application patent scope, etc.) 1 offer 2] 曰本特开2003 ~48129 (Applicant for the patent to use the dovetail slot to slide 4 to provide the following problems: The stage of the movable stage will produce: 4 201218210 Insufficient and Patent Document 2, Nao shouting (4) Fixing questions: Due to the need to be prominently placed outside the specified stage, including the load If the stage of the unit is fixed, the load type will be changed, and when the stage is fixed, a large space will be generated, and the fixedness of the vehicle platform will be insufficient. Or 疋 manual [invention] The inventors have carefully reviewed the research, the inter-facies of the f-absorbing members, can be; the work i: dynamic, gap prevention, and solid, = to finish = = when the station moves, the activity: 3⁄4 In accordance with the present invention, the provision of the species and sliding along the surface of the fixed stage includes a fixed stage characterized by 'in the formation of a fixed, said stage mechanism soil - one or more holes. The 卩 is provided with a feed screw member 'the joint member is for the movable member, and is provided with the sliding structure of the joint structure', thereby solving the above problem ^, the feed portion of the feed screw is synchronized with the boring portion setting: The mobility is formed by the screw table. . In this way, it is possible to provide a stage mechanism in which a gap of 201218210 sets and a small movement after fixing are fixed. By attaching the gap suction to the predetermined position in this manner, the stress absorption of the gap-absorbing member member is facilitated, and the mobility and the fixing property can be absorbed in the gap. X is a more excellent wearer by which the gap is absorbed in this way, and the mounting and fixing properties of the specified position are changed; = constituting: ί,, ' can obtain excellent living for a long time 4::: Component; = mobility, fixedness. a movable stage and 'when constituting the stage mechanism of the present invention, a metal crucible having a material as a material member between the stage and the movable stage is provided with a metal crucible as a guiding member in this manner, ί: ΐίί3 The function of the rail as a guide rail can be used to obtain a better movable load. Mobility, fixability, and better can be obtained = 6 201218210 f pieces 'The two screws:: The downloading object on the loading side is a screw table, and the rest of the game is loaded with the force. Note or excellent and the movable stage is shaped separately: when two or two are configured, the fixed stage is mounted on the movable table, which can provide even '1]1⁄2 'and type and cheap length two: for - a kind of stage mechanism, including a stage mechanism characterized by a movable movable stage, the load: = gap absorbing member ===== sliding with the cylindrical member, the coffee is used to make the rule open The fixed stage and the movable load A are connected to each other by the I*; the I* is substantially connected, and the other is small and inexpensive. [Embodiment] [First Embodiment] 201218210 Includes ί 1a~b diagram illustration, stage mechanism i. The gap absorbing member l16p is inserted and fixed, and the screw (15) step member 18 and the respective fixed stage 11 and the movable stage 12 are referred to the stage of the first embodiment. Mechanism 10 1. The shape of the fixed stage (1) is shown in the form of the IA to b. The form of the fixed stage 11 is in the form of a flat plate in the first mechanism 1G. It is generally preferred to form the planar shape of the 11 stage 11 into a quadrilateral (including a square) and as its size, the width is formed into a value of β: the width is formed as A value in the range of 2 to 10 cm, and the thickness is formed into a value in the range of 1 to 1 〇. In this case, when the fixed stage 11 having such a planar shape and size is used, it is easy to handle and easy to manufacture, and a predetermined workpiece is attached to the workpiece fixing through hole 12b or the like (not shown). When the movable stage 12 is combined, it can be stably prevented from slipping. Further, as for the form of the fixed stage, as shown in Figs. 2a to 2b, it is preferable to provide a fixed space on the side of the fixed stage n and u in a plan view. Notch llc. 8 201218210 This is because the space for the gap lie is used to form a moving space for the feed screw, and the feed screw 15 is provided with a connecting member 18 that moves in a predetermined direction and is used to press the movable stage 12. These are caused by movement along the prescribed side. Therefore, the solid stage 11 and 11 which have the feed screw 15 which has the connection member 18 are connected by the connection member 18 which is well-balanced by the fixing member 19 (if plant 19b), and is firmly attached. Since the table 12 is coupled, it is possible to slide only the movable stage 12 in synchronization with the rotation of the feed screw 15. In other words, by forming such a notch 11C, only the movable stage 12 can be slid in the predetermined direction while the fixed stage 11 is stopped. Here, the shape of the notch Uc which is provided on the fixed stages n and n is not particularly limited, but may be, for example, a rectangular shape, a groove & a semicircular shape, a semi-elliptical shape, an inverted triangular shape, a different shape, or the like. It is appropriate. Therefore, although depending on the size of the fixed stages n, u, the distance from the side of the fixed stage 11, 11 to the deepest part of the notch llc, that is, the distance indicated by the reference L1 in the 2a to bth figure. Generally, it is preferable to form a value within the range of the leg of the work roll, and it is preferable to form a value in the range of 3 to 12 mm, and it is preferable to form a value in the range of 5 to 10 mm. Further, the length of the surface of the notch Uc indicated by the reference numeral L2 in the second drawing of Fig. 2a is generally set to a value in the range of 5 to 30 mni, and a value in the range of 8 to 25 = is preferably formed to form 10 Values in the range of ~2〇mm are particularly suitable. Therefore, the constituent material of the fixed stage u is not particularly limited, but is usually aluminum (including anodized aluminum), copper, brass, iron, nickel, magnesium, tungsten, ceramics, polymer resin materials, and the like. At least one of them. In particular, when the aluminum is anodized to the right, it is a fixed stage (10) and economy due to its light weight, resistance to 201218210 corrosion, durability, and processing. In addition, as for the fixed plant a, the stage U is fixed. It is more suitable for two; 1: state 'as shown in the figure of $ la~b, the above mounting holes, grease are provided with one or two, ua ua, 〗 ib small holes. That is, if the above-mentioned other components are fixed, the ampule can be slid by the hole in the hole of the in-cut stage 3 as the grease. 0 〜 勺 ^ ^ 月 月 (2) feed screw is installed in the ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 Screw 18. ~surface,,,. The connecting member U that constitutes the stator 19 is in a straight line that moves in accordance with the feeding of the straight t-shaped wire 15 so that the movable stage 12 can be stabilized. The movable member has a screw (not shown), such as a head (4) a formed as a concave portion including a knot of the threaded portion 15b, and a threaded groove or a mechanical type by a motor or the like. A tired ', a screwdriver or a hex wrench can be manually rotated to move the structure s. If the effect of the feed _15 is the same, the predetermined shape can be changed or changed, for example, 10 201218210
Si蝴㈣處理的金屬材料形成的棒狀物、棱柱物、 (3)間隙吸收構件 物魏構件16係確保活動載 物口上t良好移生’並且吸收在活動載物台 =應力^而抑姻隙之產生並牢固的保制定狀態之^ 若依上述間隙吸收構件16時，在活動載物A 12 !?2 1 σ 12月動並此夠防止其出現橫擺或扭轉等。 進而，能夠在固定活動載物台12時適度 少活動，物台12之間隙，並且在岐後充分 =在活動載物台12等產生的應力，能夠牢固的= =’關於間隙吸收構件16之形態，如第3 ， 且為有用於使進給螺絲15通過的通過孔16 緩衝樹脂構件16b。 同狀的 亦即，藉由以此種方式構成間隙吸收構件16 :吸，6相對於進給螺絲15之規6 =The rods and prisms formed by the metal material treated by the Si butterfly (4), and the (3) gap-absorbing member material member 16 ensure that the movable load port is well-migrated and absorbed in the movable stage = stress ^ The gap is generated and firmly maintained. If the gap absorbing member 16 is used, the movable load A 12 !? 2 1 σ 12 months is moved to prevent yaw or twist. Further, it is possible to have a small amount of movement when the movable stage 12 is fixed, and the gap between the object stage 12 and the stress generated in the movable stage 12 or the like after the crucible 12 can be firmly fixed == ' with respect to the gap absorbing member 16 The form, as in the third, is a buffer resin member 16b having a through hole 16 for passing the feed screw 15. In the same manner, by forming the gap absorbing member 16 in this manner: suction 6 is relative to the feed screw 15 =
構件16之應力吸收變容易C 了心侍俛異的活動载物台12之移動性、固定性。 的構然2間隙吸收構件16之緩衝樹月旨構件⑽ 少—i，進仃特殊限定’但宜為例如由下述樹脂中的至 rπ抖料脂材料構成：_$娜（尼龍麟），聚㈣樹脂， =脂、碳酸§旨樹脂、丙烯樹脂、烯脒樹 (天然橡膠、苯乙稀橡膠、丁二烯橡膠、苯乙^膠丁類^曰— 201218210 苯乙烯嵌段共聚物（SBS)'苯乙烯-異戊二烯-苯乙烯嵌段 共聚物（SIS)、苯乙嫦_乙稀丁二婦-苯乙稀嵌段共聚物 (SEBS)等）、醯亞胺樹脂、酿胺-醯亞胺樹脂、笨氧基樹 脂、聚醚砜樹脂、聚醚醚酮樹脂 '聚矽氧烷樹脂、環氧樹 脂、氰酸酯樹脂、胍胺樹脂、尿素樹脂、及苯酚樹脂。 此乃因.若為由此種熱塑性樹脂材料、熱固性樹脂材 料構成的間隙吸收構件16時，則間隙吸收構件16之成形 性、間隙吸收性等可予提高，進一步，可得優異的活動载 物台12之移動性、固定性。 於是’尤其’若為醯胺樹脂（尼龍樹脂）、聚胺酯樹脂 以及橡膠類樹脂中的至少一種時，則活動載物台12之移動 性與固疋性之間的平衡更好，对久性等更為優異，因此係 較合適的樹脂材料。 並且，通常，以間隙吸收構件16之緩衝樹脂構件16b 的巧成材料（樹脂材料）之玻璃轉化溫度或者熔點為3〇〜 250 C之範圍内的值較宜。 此;^因.當上述構成材料之玻璃轉化溫度或者炼點為 未滿3(Tc之值時，耐熱性、機械強度不足，存在間隙吸收 性、活動載物台12之固定性下降的情況所致。 .^方面，當上述構成材料之玻璃轉化溫度或者熔點 ί超的值時’存在可使用的樹脂材料之種類過度受 、，4隙吸收性顯著降低的情況所致。 11 ’較宜為㈣:^收構件16之構成材料的玻璃轉化 :广艿；熔點為50〜败之範圍内的值，尤宜為80〜180 c之範圍内的值。 另外’間隙吸收構们6之構成材料的玻璃轉化溫度能 201218210 熱峰值溫度進行測定^夠JISK712為基準作為DSC融化 且/如第3a圖以及第3b圖所示，宜為卩媒 件W在制圍具有規定纏之金屬保縣及收構 屬保^ 16=,為=下述方式構成間隙吸收構件16 :具有金 緩衝樹脂構件第如^以及第3b圖中的箭頭方向將 隙吸得間 定性變得容易，並且該間隙吸 ，的女虞、固 長期糖優異的活動載物台12之移致能 脂構4b ®~f ’亦宜為在將緩衝樹 之前端部折彎。屬保邊罩16C後，將帽狀的收容部16d 構件折彎，可防止緩衝樹脂 移動性、__㈣…之 特別，之構成材料進行 之觀點出發’宜為銘、銅、、鎳及耐久性 吸收=射對基於間隙吸收構件16之應力 201218210 亦即，第4a圖係用於對基於間隙吸收構件16 效果進行說明的圖’示出在形成於固定載物台11之缺作用 13安裝有進給螺絲15及兩個間隙吸收構件16 (具^孔部 保護罩16c之緩衝樹脂構件16b)的狀態。 "有金屬 並且，第4b圖係第4a圖所示的兩個間隙吸收 之局部放大圖，示出以各個金屬保護罩16C之收容$件16 彼此對置、重合的方式配置的狀態。 〜# I6d 再者，第4c圖示出以金屬保護罩i6c相對於 15朝向同-方向（圖中為分別向右）之方式配置 吸收構件16的狀態。 』化間隙 因此，設置一個間隙吸收構件16之情況自不必說， 第4a〜c圖所示，即便係在設置兩個間隙吸收構件^ ^ = 況下，在進給螺絲15朝規定方向旋轉移動的期㈤ = 脂構件16b等亦可發揮規定的滑動性，不會 ^ 的活動載物台12之動作，能有效的防止其橫擺動 鼽現ί外給螺絲15之旋轉移動，有時會產生發 象隙吸收構件16能有效的吸收由於發熱現 化局㈣ 緩衝! JSJ11 ΐ在構成間隙吸收構件16之圓筒狀的 無需擔心緩=月旨2圍設置有規㈣金屬保護罩阶，故 構件16b過度變形、或自規定位置流出。 件16另之,!^下如f 4a〜c圖所示’在設置兩個間隙吸收構 碑# 15二給螺絲15之旋轉移動停止、與進給 螺，..糸15冋步的活動栽物台12之位置經予固定時，兩個間 14 201218210 隙吸收構件16適度變形，可減少活動载物台i2之間隙。 亦即’作為緣於進給螺絲15之旋轉 作用，產生活動載物台12倒轉的排斥應力勤 件16適度^形’可有效的吸收上述排斥 動載物台12之間隙。 月馮乂在 於疋，進一步，在活動載物纟12、經 後，兩，=收構件16所含的圓筒狀之緩衝‘構ί 16b成為充分固化的狀態。 因此，在第4a〜c圖所示的間隙吸收構件16之情況下， 左方的間隙吸收構件16能夠有效的吸收從進給螺絲15之 頭部15a-侧施加的外部應力，右方之間隙吸收構件16能 夠有效的吸收從進給螺絲15之與頭部15a相反的一側施加 的外部應力。 另外，即使在作用有兩個間隙吸收構件16中之某一個 產生鬆弛的應力的情況下，亦會發揮所謂的雙螺母效應。 因此’能夠有效的防止產生基於兩個間隙吸收構件16 的樹脂構件16b之鬆弛，並且，即使自外部施加意欲使活 動載物台12移動的應力，亦可有效的吸收該應力，能夠牢 固的保持固定狀態。 (4)引導構件 並且，如第2a〜b圖、或第5圖〜第β圖所示，宜為於 載物台機構10之規定位置設置有由金屬片2〇a及引導槽 20b構成的一個或者兩個以上之引導構件。 亦即’上述引導構件2〇係用於使活動載物台12無左 右晃動的僅沿規定方向穩定滑動的構件。 201218210 因此，雖然對引導構件2〇之構成材料、形態未予特別 二機為形成為如下的結構：例如如第1圖所示的載 =，構10之Β-Β剖視圖，亦即第6圖所示，於大致四邊 =之活動载物台12的左右之兩邊附近分別形成引導槽 州b ，並將規定長度之金屬片2〇a壓入引導槽2〇b，内， 由此’金屬片20a在活動載物台12之表面突出曰。 二12進述’洲絲M U巾，讀活動載物 σ 2之引導槽2〇b對置的位置形成同樣的引導槽滿。 之榛^^予分賴人上下方向的弓丨導槽施、， ^ f ή活動載物台12能夠沿著料構件2〇相對^ 2 物台11順暢的滑動。 LJ疋m 另外，如第2b圖所示，自操作性良好的 — 為金屬片2Ga呈直線狀，但如第2a圖所示，使兩 圓狀（曲率）棒狀的金屬片2〇a向規定方。曲 使其平面形狀描繪平缓的圓弧之情況亦較宜。 此乃因：通過使金屬片20a描繪此種彎曲狀 地將金屬片20a墨入引導槽20a’中，並且壓入 的彎曲狀態，因此能夠更為牢固的進行保持。 寻見疋 進一步，如第2a圖所示，宜為準備兩個 的方式彎曲的金屬片服’並分別壓入： 12 引導性更好。 文/、所提供的 部分的金屬 接著，參考第7圖對構成引導構件2〇之— 16 201218210 =③與固定载物台11之引導槽2°b的長度之間的 係不僅適用於固定載物台u之5樺：專t故後述的關 載物台12之引導槽20b， 。 g ，亦適用於活動 20b 的50〜90%之範圍内的值，較具 之範圍内的值。 股而。δ又疋成1·5〜8cmThe stress absorption of the member 16 becomes easy to change the mobility and fixability of the movable stage 12. The structure of the buffering tree member (10) of the gap-absorbing member 16 is less than i, and is particularly limited to, for example, from the following resin to the rπ dip material: _$Na (nylon) Poly(tetra) resin, =lipid, carbonic acid § resin, acryl resin, enephonium (natural rubber, styrene rubber, butadiene rubber, styrene-butadiene rubber) - 201218210 styrene block copolymer (SBS ) 'styrene-isoprene-styrene block copolymer (SIS), phenelzine-ethene dibutyl-styrene block copolymer (SEBS), etc.), quinone imine resin, amide - a quinone imine resin, a stupid oxy resin, a polyether sulfone resin, a polyether ether ketone resin 'polyoxy siloxane resin, an epoxy resin, a cyanate resin, a guanamine resin, a urea resin, and a phenol resin. In the case of the gap absorbing member 16 made of such a thermoplastic resin material or a thermosetting resin material, the formability of the gap absorbing member 16 and the gap absorbing property can be improved, and further, an excellent movable load can be obtained. The mobility and fixedness of the table 12. Therefore, if it is at least one of a polyamide resin (nylon resin), a polyurethane resin, and a rubber resin, the balance between the mobility and the solidity of the movable stage 12 is better, and the durability, etc. It is more excellent and therefore is a suitable resin material. Further, in general, the glass transition temperature or the melting point of the material (resin material) of the cushioning resin member 16b of the gap absorbing member 16 is preferably in the range of 3 Torr to 250 C. When the glass transition temperature or the refining point of the above-mentioned constituent material is less than 3 (the value of Tc, the heat resistance and the mechanical strength are insufficient, the gap absorbability is present, and the fixing property of the movable stage 12 is lowered. In the case of the above-mentioned constituent materials, when the glass transition temperature or the melting point of the constituent material is too high, the type of the resin material that can be used is excessively affected, and the 4-gap absorbability is remarkably lowered. (4): Glass conversion of the constituent material of the receiving member 16: 艿; the value in the range of melting point 50 to the extent of the defeat, particularly preferably in the range of 80 to 180 c. In addition, the material of the gap absorbing structure 6 The glass transition temperature can be measured at the hot peak temperature of 201218210. The JISK712 is used as the benchmark for DSC melting and / as shown in Fig. 3a and Fig. 3b, it is advisable that the sputum medium W has the required entanglement of the metal in the county. Constituting the gap absorbing member 16 as follows: the gap absorbing member 16 is formed in the following manner: having the gold buffer resin member, the direction of the arrow in the first and third figures is easy to draw the gap, and the gap is sucked. Nvwa, solid long-term sugar excellent work It is also preferable to bend the end of the cushioning tree 4b ®~f ' at the end of the buffer tree. After the edge guard 16C, the cap-shaped receiving portion 16d member is bent to prevent the buffer resin. Mobility, __(4)...Special, the constitutive material is based on the viewpoint 'Yi Ming, copper, nickel and durability absorption = shot versus stress based on the gap absorbing member 16 201218210, that is, the 4a map is used for The diagram of the effect of the gap absorbing member 16 shows that the feed screw 15 and the two gap absorbing members 16 (the cushioning resin member 16b having the hole portion protective cover 16c) are attached to the defect 13 formed in the fixed stage 11. The state of the metal gap, and the 4b diagram is a partial enlarged view of the two gap absorptions shown in Fig. 4a, showing that the housing members 16 of the respective metal protective covers 16C are arranged to face each other and overlap each other. 〜# I6d Further, Fig. 4c shows a state in which the absorbing member 16 is disposed such that the metal protective cover i6c faces the same direction with respect to 15 (to the right in the figure). The condition of the gap absorbing member 16 is not It is to be noted that, as shown in Figs. 4a to 4c, even in the case where two gap absorbing members are provided, the feed screw 15 is rotated in a predetermined direction (5) = the grease member 16b or the like can exhibit a predetermined slip. Sexuality, the action of the movable stage 12, which can prevent the lateral movement of the screw 15, can effectively prevent the rotation of the screw 15 from being generated, and sometimes the hair absorbing member 16 can be effectively absorbed due to the heat generation. (4) Buffering! JSJ11 ΐ The cylindrical member constituting the gap absorbing member 16 is not required to be placed in the shape of a metal shield cover. Therefore, the member 16b is excessively deformed or flows out from a predetermined position. Piece 16 is another, !^下 as shown in the figure f 4a~c 'Set the two gaps to absorb the monument. #15二Rotate the rotation of the screw 15 to stop, and the feed screw, ..糸15冋步的活动When the position of the stage 12 is fixed, the two spaces 14 201218210 the gap absorbing member 16 are moderately deformed, and the gap of the movable stage i2 can be reduced. That is, as a result of the rotation of the feed screw 15, the repulsive stress device 16 which produces the reverse rotation of the movable stage 12 can effectively absorb the gap of the above-mentioned repelling movable stage 12. In the month of the 载 疋 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Therefore, in the case of the gap absorbing member 16 shown in Figs. 4a to 4c, the left gap absorbing member 16 can effectively absorb the external stress applied from the head 15a side of the feed screw 15, and the gap on the right side. The absorbing member 16 is capable of effectively absorbing external stress applied from the side of the feed screw 15 opposite to the head portion 15a. Further, even in the case where one of the two gap absorbing members 16 acts to generate a slack stress, a so-called double nut effect is exerted. Therefore, it is possible to effectively prevent the slack of the resin member 16b based on the two gap absorbing members 16 from being generated, and even if the stress intended to move the movable stage 12 is externally applied, the stress can be effectively absorbed and can be firmly held. Fixed state. (4) The guide member is preferably provided with a metal piece 2a and a guide groove 20b at a predetermined position of the stage mechanism 10 as shown in Figs. 2a to 2b or 5th to 7th. One or more guiding members. That is, the above-described guide member 2 is a member for stably sliding the movable stage 12 in the predetermined direction without shaking left and right. 201218210 Therefore, the constituent materials and the form of the guide member 2 are not specifically formed as follows: for example, the load shown in Fig. 1 and the cross-sectional view of the structure 10, that is, Fig. 6 As shown in the figure, the guide groove state b is formed in the vicinity of the left and right sides of the movable stage 12 of the substantially four sides =, and the metal piece 2〇a of the predetermined length is pressed into the guide groove 2〇b, thereby, the metal piece 20a protrudes from the surface of the movable stage 12. The second guide 12 'detailed silk M U towel, read the movable load σ 2 guide groove 2 〇 b opposite position to form the same guide groove full. After that, the ^^ ή movable stage 12 can smoothly slide along the material member 2〇 relative to the object table 11. LJ疋m In addition, as shown in Fig. 2b, the self-operability is good—the metal piece 2Ga is linear, but as shown in Fig. 2a, the two round (curvature) bar-shaped metal pieces 2〇a are oriented. Prescribed party. It is also preferable to make the plane shape depict a flat arc. This is because the metal piece 20a is inked into the guide groove 20a' by drawing the curved shape of the metal piece 20a, and the pressed state is pressed, so that it can be held more firmly. Seek 疋 Further, as shown in Figure 2a, it is advisable to prepare a two-piece curved metal piece ‘and press them separately: 12 Guided better. The metal of the part provided, and the system between the length of the guide groove 2 constituting the guide member 2 - 16 201218210 = 3 and the guide groove of the fixed stage 11 are not only applicable to the fixed load. The 5th birch of the object table u: the guide groove 20b of the shut-off stage 12, which will be described later. g , also applies to values in the range of 50 to 90% of activity 20b, which are within the range of the range. Stocks. δ is further reduced to 1·5~8cm
此乃因：若上述金屬片2〇a之長卢 二 =情二ί構成引導構件2°的情況下之引導效果顯I 的值二::現; :上5。之進給同步的僅使活動載物台12順暢的滑 〜二====長度(L3)形成為2 〈顚㈣11尤且為叹疋成3〜5cm之範圍内的值。 士且:關於金屬片20a之厚度⑻，雖 ::值的大致2倍的值’但通常宜為設定成。以: 此乃因：若該金屬片20a之厚度（tl)為 另-方面’若上述金屬片咖之厚度⑻為超出8咖 201218210 之值時’會出現載物台機構〗〇番 螺絲15之進給同步的僅使、、舌㈣^過重，或很難與進給 況所致。 〇 轉載物台12順暢的滑動之情 因此，較宜為將上述金屬片2〇a之 〜7mm之範圍内的值，尤宜為讯定# 又（1)。又疋成1 值兀且為5又疋成2〜6咖之範圍内的值。 與此相對，構成引導構件20之一部分的 b 長度（L4)可考慮上述的金屬片2〇a之長度（L3 3产 或者金屬^ 20仏彎曲程度等確定，但通常 j 〜9cm之範圍内的值。 此乃因：若上述引導槽20b之長度（⑷為不足18cm 之值時’會出現構成引導構件2〇之情况下的引導效果顯著 降低，或金屬片20a之壓入變得困難的情況所致。 另方面，若上述引導槽20b之長度（L4)為超出9cm 之值時，會出現金屬片20a之固定性降低，或難以與進給 螺絲15之進給同步的僅使活動載物台12順暢的滑動的情 況所致。 因此’較宜為將上述引導槽20b之長度（L4)設定成 2. 2〜7. 5cm之範圍内的值，尤宜為設定成& 5〜5. 5cm之範 圍内的值® 進一步，關於構成引導構件20之一部分的引導槽20b 之深度（t2)，雖然取決於金屬片20a之厚度（ti)，但通 常宜為設定成0. 1〜8mm之範圍内的值。 此乃因：若上述引導槽20b之深度（tl)未滿0.1mm 之值時，會出現構成引導構件20之情况下的引導效果顯著 降低，或金屬片20a之固定性降低的情況所致。 另一方面，若上述引導槽20b之深度（tl)為超出8咖 201218210 二之僅=穩定性，或: 滑動的情況所致。 使活動載物台12順暢的 因此’幸^為將上述引導槽2〇b之深度⑻設定成 ^5。〜6麵之範圍内的值，尤宜為設定成1〜4麵之範圍内的 另外，代替上述的引導構件20或與上述的引導組件 2〇，亦宜為同時採用滾珠導執（_即池）或交叉滾子 等執（cross roller guide)等的情況。 亦即，雖然並未圖示，但是，藉由於固定載物台及活 =載物台之各自的規定場所、且為平行位置設置二條v槽 並於其中排列多個滾珠或者滾柱，形成為此等滾珠 二者滾柱沿V槽軌道一邊滾動一邊移動的結構，由此發揮 規定的引導效果，此種情況亦較宜。 2.活動載物台 (1)形態 〜關於第1圖所示的活動載物台12之形態的特徵，與固 定载物台11之形態同樣，並未受特別的限定，大致呈平板 狀。 ^ 亦即，如第5圖的分解圖所示，宜為，通常將活動載物 台12之平面形狀形成為四邊形（包括正方形），並且，作為 ^尺寸，與固定載物台η同樣，將縱寬形成為2〜10(：〇1之 範圍内的值，橫寬形成為2〜10cm之範圍内的值，且厚度形 成為1〜1〇麵之範圍内的值。 此乃因：若為具有此種平面形狀及尺寸之活動載物台 12時’則具有與固定載物台11同樣的尺寸，比較緊湊，並 19 201218210 且利用與進給螺絲15之進給對應 物台12之·能夠僅使活動 由此，作為載物台機構1〇之 造容易丄:ΐΐΐ在f安裝有規定的工件之活動二用：3 仍可穩定的保持活動載物 另外’如第la圖所示宜為活動 置有一個或兩個以上的小孔亦即潤^ 在;、表面側設 小孔注入規定的潤滑脂，能夠進一牛=^2a°使用該 活動載物台12之間的滑動性步楗同固疋載物台11與 設置St?的^ 伽:能夠使用該工件固定用貫通孔： 件牢固的安裝於載物台機構10。 t现疋的工 進-步’如第la圖所示，宜為活動 個或者兩個以上的例如直徑f J = 用貝=版。使用該推壓構件用貫通孔⑶插 ^ ;以夠將固定載物台11與活動載物台12維持在規定以 (2)構成材料 ^且m純物台12之賊材料亦未予特別限 ^，與固定載物台同樣’通常宜為採用紹（包括陽極氧化 =、二=鐵、鎳，、鎢、陶究、高分手樹脂 (3)引導構件 20 201218210 另外，如第5圖以及第6圖所示，宜為不 物台11 ’亦於上下方向與其對置的位置、且 J定載 12上亦設置有.一個或者兩個以上的引導槽 戴物台 片20a壓入其中，從而形成引導構件2〇。 ，將金屬 此乃因：藉由設置此種引導構件2〇，於將 1，活動載物台12以對置狀態配置後，能夠 ^台 給對應的連結構件18之的推壓動作，ΪΪΪ螺 載物台12於固定載物台11之表面上沿引導構件活動 方向穩定的滑動。 爯牛20向規定 3.連結構件 並且，如第la〜b圖所示，递纟士拔彼 Α 構件用固定件19 (19a、i9b)平二牛，由多個連結 於活動載物台12，並且為用^ 好的且牢固的安裝 台η之總孔部13的進破，於形成在固定載物 同步的使活動載物台12滑動的^動作（旋轉直進運動） 因此，如第la〜b圖所示，、鱼 方體狀，至於其平面形狀，;^ ，二構件18宜為板狀或長 於是，至於上述連結構 台12之構成材料同樣，宜 之構成材料，與活動載拍 銅、黃銅、鐵、鎳、鎂、’、、、、呂^包括陽極氧化處理鋁）、 的至少一種。 陶瓷、向分子樹脂材料等中 另外，如第lb圖所示，^ 能夠進行預壓調整而使進、认設置有預壓構件22，以便 成為規定壓力。 5螺絲15相對於該連結構件^ 亦即，宜為利用進給螺絲 又碩部15a及預壓構件22 異形狀等任—種形狀。 苟牛圓狀、橢圓狀、矩形狀、 201218210 夾入連結構件18’並且預壓構件22使用預壓螺紋22b對進 給螺絲15進行推壓調整。 此乃因：藉由以此種方式設置預壓構件22，能夠在不 阻礙進給螺絲15之規定方向的進給之狀態下，使連結構件 18甚至固定於連結構件18之活動載物台12順暢的滑動。 4.推壓構件 並且，宜為设置有規定的推壓構件1了，以於上下方向 推壓固定載物台11與活動載物台丨2，並利用進給螺絲15 之進給使兩者一邊滑移一邊順暢的滑動。 較具體而言，如作為第la〜b圖所示的載物台機構1〇 之C-C剖視圖的第8圖所示，宜為於固定載物台11之下表 面的一部分設置锪孔部17c，隔著壓縮彈簧17a及墊圈nb 將作為推壓構件17之螺栓自下方旋入，使固定載物台n 與活動载物台12於上下方向上壓接。 亦即，調節推壓構件17之旋入量，將作為推壓構件17 之螺栓與壓縮彈簧17a之間的距離形成為規定範圍内的值。 旦是，至於推壓構件17之結構，並不局限於此種螺栓， 亦可為板簧或壓板等。 [第2實施方式] =第9a〜b圖例示’第2實施方式之載物台機構1〇〇包 j方體狀之固定載物台111 ;收納於棚定載物台⑴ 的圓柱狀構件1Π;及沿固定載物台lu之表面滑動 的活動載物台112。 22 201218210 且，利用連結構件118予以連結裝配間隙吸收構件116之 圓柱狀構件117與活動載物台112,並且’利用安裳於固定 載物台111之進給螺絲115借助間隙吸收構件116使圓二 狀構件117滑動，由此使活動載物台112同步滑動。 以下，適當參照附圖以與第1實施方式之载物台機構 10的不同點為中心，對第2實施方式之載物台機構1〇〇 ^ 行具體說明。 1.固定載物台 (1)形態 於第2實施方式之载物台機構1〇〇的情況下，如第9a 圖所示’其特徵在於固定載物台ηι呈長方體狀。 亦即，通㊉以平面尺寸為0. 8〜5cmxl〜10cm之四邊形 宜匕括正方幵/)，並且厚度形成為1〜匪之範圍内的值較 於使此ϊ尺寸之固定載物台111時，不僅便 動載物台使於與安裝有駭的工件之活 載物台112，並==二仍載 (2) 構成材料 得優ΪΪ輕=固;成材請分別獲 發，宜為紹（包括陪托' 寸私疋性、加工性等角度出 鎂、鎢、陶瓷、古八丄J化處理鋁）、銅、黃銅、鐵、鎳、 Μ文㈤分子樹脂材料等中的至少一種。 (3) 進給螺絲 並且，於第2眚# + I她方式之载物台機構100中，進給螺 23 201218210 絲115於其螺紋部115b之規定位置具備後述的間隙吸收構 件116，進一步，該進給螺絲115與後述的圓柱狀構件117 卡合，係供使活動載物台同步滑動而用的構件。 在此，參照第l〇a〜c圖對將進給螺絲115所具備的間 隙吸收構件116安裝於圓柱狀構件117之端部的方法進行 說明。 首先，如第10a圖所示，準備具備間隙吸收構件116 之進給螺絲Π5。 接著’如第10b圖所示，使進給螺絲u 送出，從而使其與於端部具有凹部的圓筒狀 頭方^轉如二-步沿箭 之端部的凹部内。 袍入认置於圓筒狀構件1Π 亦即，如此能夠將進給螺絲11ς 件116容易且正確的裝配於圓梭狀構〜、備„吸收構 進而，利用間隙吸收構件1] 部115b之間的關係，能夠容易的，播進給螺絲115之螺紋 由此能夠有效地防止間隙吸收播*又螺母效應，亦即， 崎⑽產生鬆弛等。 另外，如第9_所示，㈣ 置有預壓構件122，以賦與規定厭力上述進給螺絲115亦設 亦即，利用進給螺絲115與 物台111之一部分，於該狀鲅下I構件122夾入固定载 於進給螺絲115推壓預壓構12使用預壓螺紋 122b相對 防止進給螺絲115之進給動 让由此能夠於不至於過度 定預壓構件122。 、狀態下進行預壓調整並固 24 201218210 (4)間隙吸收構件 16(且有金屬㈣1 1财«_吸收構件 的内容。、’ ’、罩化的緩衝樹脂構件16b)基本上相同 亦即’如第9b圖所矛 規定構造之 於進給螺絲115之中途設置有 間隙吸收構件16。 蟫纹dUf 1〇c圖所示’準備經予裝配於具有 Ζ 屬f㈢⑽㈤收容部之緩衝樹脂構件 ；^ ^、，羡衝树脂構件116b之間隙吸收構件116設 置於進給螺絲115之中途。 ”人傅叶口又This is because: if the above metal piece 2〇a is long Lu 2 = love 2 ί constitutes the guiding member 2 °, the guiding effect shows the value of I: 2; The feeding synchronization is only smooth sliding of the movable stage 12~2 ==== Length (L3) is formed as 2 <顚(4)11, and the value is in the range of 3 to 5 cm. Also, the thickness (8) of the metal piece 20a is preferably set to be equal to a value twice as large as the value of ::. Therefore, if the thickness (tl) of the metal piece 20a is another aspect, 'if the thickness of the metal piece (8) is more than the value of 8 coffee 201218210, the stage mechanism will appear. The feed synchronization is only caused by, the tongue (4) is too heavy, or it is difficult to be caused by the feed condition. 〇 The smooth rotation of the transfer table 12 Therefore, it is preferable to set the value in the range of ~7 mm of the above-mentioned metal piece 2〇a, and it is particularly preferable to be #定(1). It is also a value in the range of 2 to 6 coffees. On the other hand, the length b (L4) constituting a part of the guiding member 20 can be determined in consideration of the length of the above-mentioned metal piece 2〇a (L3 3 production or metal bending degree, etc., but usually in the range of j to 9 cm) The reason is that when the length of the guide groove 20b ((4) is less than 18 cm, the guiding effect in the case where the guiding member 2〇 is formed is remarkably lowered, or the pressing of the metal piece 20a becomes difficult. On the other hand, if the length (L4) of the above-described guide groove 20b is a value exceeding 9 cm, the fixing property of the metal piece 20a may be lowered, or the movable load may be difficult to synchronize with the feeding of the feed screw 15. The value of the range of the above-mentioned guide groove 20b (L4) is set to be in the range of 2. 2~7. 5cm, and is preferably set to & 5~5. The value of the thickness of the metal sheet 20a (ti) is usually set to 0. 1~8mm. The value within the range. This is because: if the above guiding groove 20b is deep When the degree (t1) is less than the value of 0.1 mm, the guiding effect in the case where the guiding member 20 is formed is remarkably lowered, or the fixing property of the metal piece 20a is lowered. On the other hand, if the guiding groove 20b is used The depth (tl) is more than 8 coffee 201218210 2 = stability, or: sliding condition. Smoothing the movable stage 12, therefore, the depth (8) of the above-mentioned guide groove 2〇b is set to ^ 5. The value in the range of ～6 faces is particularly set to be in the range of 1 to 4 faces. Instead of the above-described guiding member 20 or the above-described guiding member 2 〇, it is also preferable to use the ball guiding at the same time ( a case of a cross roller guide, etc., that is, not shown, but by a fixed place of the fixed stage and the live=stage, Two v-grooves are arranged in parallel, and a plurality of balls or rollers are arranged therein to form a structure in which the rollers of the balls move along the V-slot track while rolling, thereby exerting a prescribed guiding effect. 2. 2. Activity stage (1) form ~ about The feature of the movable stage 12 shown in Fig. 1 is not particularly limited as in the form of the fixed stage 11, and is substantially flat. ^ That is, as shown in the exploded view of Fig. 5. Preferably, the planar shape of the movable stage 12 is generally formed into a quadrangular shape (including a square), and as the size of the fixed stage η, the vertical width is formed to be 2 to 10 (: 〇1 range) The value in the width is formed to a value in the range of 2 to 10 cm, and the thickness is formed in a range of 1 to 1 。. This is because: if it is a movable stage having such a planar shape and size At 12 o'clock, it has the same size as the fixed stage 11, and is relatively compact, and 19 201218210, and can be used only by the feed table 12 of the feed screw 15 to act as the stage mechanism 1 〇 造 造 丄 丄 丄 丄 丄 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装 安装That is, the lubrication is in; the small hole on the surface side is filled with the prescribed grease, and the The cow=^2a° uses the slidability step between the movable stage 12 and the fixed stage 11 and the set St?: the workpiece fixing through hole can be used: the piece is firmly attached to the load Taiwan institution 10. The current work-steps as shown in Fig. 1a should be active or more than two, for example, the diameter f J = with the shell = version. The pressing member is inserted through the through hole (3); the thief material for fixing the fixed stage 11 and the movable stage 12 to the predetermined structure (2) and the pure stage 12 is not particularly limited. ^, the same as the fixed stage 'usually suitable to use (including anodizing =, two = iron, nickel, tungsten, ceramics, high-strength resin (3) guiding member 20 201218210 In addition, as shown in Figure 5 and As shown in Fig. 6, it is preferable that the non-stage 11' is also opposed to the upper and lower directions, and the J fixed load 12 is also provided. One or two or more guide grooved wearing pieces 20a are pressed therein, thereby The guiding member 2 is formed. By providing such a guiding member 2, after the movable stage 12 is placed in an opposing state, the corresponding connecting member 18 can be provided. The pressing action causes the scooping stage 12 to stably slide along the movable direction of the guiding member on the surface of the fixed stage 11. The yak 20 is directed to the connecting member and, as shown in the first to the right,士拔彼Α The member fixing member 19 (19a, i9b) is flat two cows, and is connected to the movable load by a plurality of 12, and the use of the total hole portion 13 of the mounting hole η which is good and firm, and the movement of the movable stage 12 which is formed in the fixed load synchronization (rotation straight motion) As shown in the diagrams of la to b, the shape of the fish is square, as for its planar shape; ^, the two members 18 are preferably plate-shaped or longer than the same, and the constituent materials of the above-mentioned continuous structural table 12 are similar, suitable constituent materials, and activities. At least one of copper, brass, iron, nickel, magnesium, ', , , , , , including anodized aluminum. Further, as shown in Fig. 1b, the pre-compression member 22 can be preliminarily adjusted so as to be a predetermined pressure. The screw 15 is preferably formed in a shape such as a different shape of the base 15a and the preload member 22 with respect to the connecting member. The yak is round, elliptical, or rectangular, 201218210 is sandwiched into the joint member 18' and the preload member 22 is pressed and adjusted by the preloading screw 22b. This is because by providing the preload member 22 in this manner, the joint member 18 can be fixed to the movable stage 12 of the joint member 18 without hindering the feed of the feed screw 15 in the predetermined direction. Smooth sliding. 4. The pressing member is preferably provided with a predetermined pressing member 1 for pressing the fixed stage 11 and the movable stage 2 in the up and down direction, and feeding by the feed screw 15 Sliding smoothly while sliding. More specifically, as shown in FIG. 8 which is a cross-sectional view taken along line CC of the stage mechanism 1 shown in FIGS. 1a to 5B, it is preferable to provide a hole portion 17c in a part of the lower surface of the fixed stage 11, The bolt as the pressing member 17 is screwed in from the lower side via the compression spring 17a and the washer nb, and the fixed stage n and the movable stage 12 are press-contacted in the vertical direction. That is, the amount of screwing of the pressing member 17 is adjusted, and the distance between the bolt as the pressing member 17 and the compression spring 17a is set to a value within a predetermined range. However, the structure of the pressing member 17 is not limited to such a bolt, and may be a leaf spring, a pressure plate, or the like. [Second Embodiment] = Fig. 9a to Fig. 2b show a fixed stage 11 in which the stage mechanism 1 of the second embodiment is in the shape of a square, and a cylindrical member housed in the fixed stage (1). 1Π; and a movable stage 112 that slides along the surface of the fixed stage lu. 22 201218210 Further, the cylindrical member 117 to which the gap absorbing member 116 is fitted and the movable stage 112 are joined by the joint member 118, and the circle is absorbed by the feed screw 115 of the fixed stage 111 by the gap absorbing member 116. The two-shaped member 117 slides, thereby causing the movable stage 112 to slide synchronously. Hereinafter, the stage mechanism 1 of the second embodiment will be specifically described focusing on differences from the stage mechanism 10 of the first embodiment with reference to the drawings as appropriate. 1. Fixed stage (1) In the case of the stage mechanism 1 of the second embodiment, as shown in Fig. 9a, the fixed stage η is in the shape of a rectangular parallelepiped. That is, the quadrilateral shape of the plane is 0. 8~5cmxl~10cm, and the square is preferably squared/), and the thickness is formed in a range of 1~匪 compared with the fixed stage 111 which makes the size of the crucible. At the same time, not only the movable stage is placed on the live stage 112 of the workpiece with the cymbal mounted, but also == two is still loaded (2). The constituent materials are better and lighter than the solid material; (including at least one of magnesium, tungsten, ceramics, and ancient gossip-treated aluminum), copper, brass, iron, nickel, and bismuth (five) molecular resin materials. . (3) In the stage mechanism 100 of the second embodiment, the feed screw 23 201218210 is provided with a gap absorbing member 116 to be described later at a predetermined position of the screw portion 115b. Further, The feed screw 115 is engaged with a cylindrical member 117 to be described later, and is a member for synchronously sliding the movable stage. Here, a method of attaching the gap absorbing member 116 provided in the feed screw 115 to the end portion of the columnar member 117 will be described with reference to the first to fourth embodiments. First, as shown in Fig. 10a, a feed screw 具备 5 having a gap absorbing member 116 is prepared. Next, as shown in Fig. 10b, the feed screw u is fed out so as to be rotated into the concave portion of the end portion of the arrow with the cylindrical head having the concave portion at the end portion. The robes are placed in the cylindrical member 1 亦, that is, the feed screw 11 116 116 can be easily and correctly assembled to the round bobbin structure, and the absorbing structure can be used between the portions 115b by the gap absorbing member 1 The relationship can be easily propagated into the thread of the screw 115, thereby effectively preventing the gap from absorbing the effect of the nut and the nut, that is, the slug (10) is slackened, etc. In addition, as shown in the 9th, (4) The pressing member 122 is also provided with the predetermined repulsion force, that is, the feeding screw 115 is used, and the feeding screw 115 and one portion of the object table 111 are sandwiched and fixed by the feeding screw 115. The pre-compression structure 12 uses the pre-pressing screw 122b to prevent the feed of the feed screw 115, thereby preventing the pre-stressing member 122 from being over-adjusted. The pre-pressure adjustment is performed in a state of 24 201218210 (4) Clearance absorption The member 16 (and having the contents of the metal (four) 1 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A gap absorbing member 16 is provided. 蟫 dUf As shown in Fig. 1c, 'the buffer member is prepared to be attached to the accommodating portion having the genus f(3)(10)(5); and the gap absorbing member 116 of the damped resin member 116b is disposed in the middle of the feeding screw 115. Mouth again
Wit㈣絲115沿規定方向進給，而使活動載 物台 滑動的期間’間隙吸收構件116發揮規定的滑動 性，以不致阻礙該活動載物台112的滑動之方式發揮功能。 進而，當固定活動載物台112時，間隙吸收構件116 適度變形’減少活動載物台112之間隙，並且於固定活動 載物台112後充分固化’同樣能夠吸收於活動載物台U2 等產生的應力，能夠牢固的保持固定狀態。 另外，第10c圖中示出設置一個間隙吸收構件116之 例子，亦可以基於第4a〜c圖排列兩個以上之上述間隙吸收 構件116。 (5)移動孔 並且’載物台機構1〇〇之特徵在於，於固定載物台 之内部設置有戴面形狀呈大致圓柱狀之移動孔117b，後述 25 201218210 的圓筒狀構件1Π能夠於移動孔U7b内滑動。 較具體而言’如第11圖所示，宜為於固定載物台111 之内部設置有移動孔117b，該移動孔117b呈大致圓筒狀， 並且具有向上方開口的四邊形狀之開口部117c。 亦，，於拆除活動載物台112之情況下，圓筒狀構件 117之平/旦部117a經由移動孔n7b之的開口部UR露 出’並且該圓筒狀構件m之平坦部心與固定載物台⑴ 二構。面側的平坦面1Ua之面位置一至夂，形成同一平面之 述的圓筒狀構彳;U 孔11⑴’能夠使後 件117之卜类心一I順％的峋動，並且，即使於圓筒狀構 亦不致阻礙的活域物台112之情況下， 规圓同狀構件117之順暢的滑動。 2.活動載物台 再後ί;圓連結構件邯與 圖示）之狀態下步的於設置有工件（未予 有作::工:上：工:，載物台1〗2之表面側設置 狀態下，‘用 置進行微調。 1ί3對该活動載物台112之位When the Wit (four) wire 115 is fed in a predetermined direction and the movable stage is slid, the gap absorbing member 116 exhibits a predetermined slidability and functions so as not to hinder the sliding of the movable stage 112. Further, when the movable stage 112 is fixed, the gap absorbing member 116 is moderately deformed 'reducing the gap of the movable stage 112, and is sufficiently solidified after the movable stage 112 is fixed', and can be absorbed in the movable stage U2 or the like. The stress can be firmly maintained in a fixed state. Further, Fig. 10c shows an example in which one gap absorbing member 116 is provided, and two or more of the above-described gap absorbing members 116 may be arranged based on the fourth to fourth c-pictures. (5) The moving hole and the 'stage mechanism 1' are characterized in that a moving hole 117b having a substantially cylindrical shape in a wearing shape is provided inside the fixed stage, and the cylindrical member 1 of 25 201218210 described later can be The inside of the moving hole U7b slides. More specifically, as shown in Fig. 11, it is preferable that the inside of the fixed stage 111 is provided with a moving hole 117b having a substantially cylindrical shape and having a rectangular opening portion 117c that opens upward. . Further, in the case where the movable stage 112 is removed, the flat/denier portion 117a of the cylindrical member 117 is exposed through the opening portion UR of the moving hole n7b, and the flat portion and the fixed load of the cylindrical member m are fixed. Table (1) Two structures. The surface of the flat surface 1Ua on the front side is positioned to 夂, forming a cylindrical structure of the same plane; the U-hole 11(1)' can cause the heart of the back piece 117 to sway, and even if In the case of the surface stage 112 in which the cylindrical structure is not obstructed, the smooth sliding of the member 117 is performed. 2. The movable stage is further ί; the circular joint member 邯 and the state of the figure) is placed on the surface side of the workpiece (not prepared: work: upper: work:, stage 1) 2 In the setting state, 'Use the device to fine-tune. 1ί3 to the position of the active stage 112
另外，關於活動载物台U 規定尺寸之長方形以進一步 之形怂，除平面形狀採用 成為與第1實施方式之活動裁物等外，形 3·連結構件 26 201218210 並且，連結構件118係直接連結活動载板 配有間隙吸收構件116之圓筒狀構件117 二丨12與裝 與安裝在形成於固定載物台lu之锪孔部=構件，且 115同步的借關隙魏構件116以使 進給螺絲 動，進而使活動载物台112沿同向滑動的固$=。爪滑 因此，連結構件118既可為第9b圖所 118，或亦可為其他的形態。 、的螺釘構件 進而’在第2實施方式之載物台機構刚 結構件118亦發揮作為第丨實施方式之载物 述連 壓構件之作用。 α機構10的推 與活g物向推壓固物勿台⑴ 接著’參照第12a〜b ®對|§&有間隙吸 :==:=12之_ 基於二= 構，===: m研磨規定厚之圓筒狀構件 H7b 之移動孔mb的表面固定載物台iu 無間隙的狀態。 /、5牛17的表面之間幾乎 接著’如第12b圖所示，於圓筒狀構件117之平垣部 27 201218210 117a及固定载物台lu之平坦面形成同— 將固定載物台U1載置於規定位置後，利下’在 件118牢固的連結包括間隙吸收構件16 ^丁專連結構 與活動載物台112。 囡畸狀構件1Π 亦即，如此可利用連結構件U8以未 2 包括間隙吸收構件16之圓筒狀;件t i 二12之間，此外能夠維持圓筒狀構件mg 動孔117b内部之順暢的滑動。 17於移 另外，如第12a圖所示，宜為於將圓筒 2=當的位置之圓筒狀構件㈣行 預先Π分===的移動孔⑽之外, 件117奸入5進千丨一化處理，此夠顯著縮短將圓筒狀構 密的研磨4==:11之移動孔11切 4.圓柱狀構件 於第=實施方式之載物台機構1〇〇的情況下，如第牝 在於：設置有在形成於較載物台111之 柱Lf冓件nf 117b内滑動的、戴面形狀實質上為圓狀之圓 =即，圓柱狀構件丨17具備與固定載物台ιη之上表 貝平坦部111a共同於面位置之關係上形成同一平面的 t = 117a’且該圓柱狀構件117與上述的活動載物台112 ，'”α構件118連結，進—步，利用安裝於固定載物台 ^給螺絲115使圓柱狀構件117滑動，由此間接的使 遠活動载物台112滑動。 28 201218210 117，日將、緣式設置—個或兩個以上的圓柱狀構件 之内邻，連結螺釘）118設置於載物台機構100 112 V恭：接的連結固定載物台111與活動載物台 112’使載物台機構更加小型化且輕量化。 限定另二狀構件117之構成材料雖未予特別 二唑 '"而;々物台1U同樣的，宜為由在輕量性、機 械特性、耐久性4方面優異_、紹合金等構成。 =步，至於圓柱狀構件117之變形例，亦可使用包 柱:構構件之多棱柱狀構件、橢圓柱狀構件及倒三棱 5.側面罩 图所亚且丄ΐϊ 2實施方式之載物台機構100内’如第9b Γΐ9ί固固定構件（固定螺釘等）_將側面罩 xt定載物台111之移動孔⑽的端部， 以隱敝該移動孔117b。 F j即j由利用上述側面罩119隱蔽移動孔IHb，防 性刀、灰塵成分等的侵人，提高載物台機構10G之耐久 別J外;f於該側面罩119之形態、構成材料亦未予特 =二:固定載物台111同樣的，宜為由在輕量: =特性、敎㈣方面優異_、齡縛構成的矩形 產業上的可利用性 〜=上所述，若依據本發明之載物台機構時，藉 3 ΐϊ規定的間隙吸收構件，可得該載物台機構Ϊί 且廉價的簡㈣造，並錄動載物台具有良好的淨多動 29 201218210 固定活動載物台時之間隙、㈣活動載物台後的 ::亦可獲得優異的活動載物台之移動t :的；ί 構。υ為小型^廉價之可進行高精細對位的載物台ί 方向或XYZ— =:載=:時之間隙、固定活動載物台後之移 較具體而§，如第13a圖所示，以由固定載物台丨^、 活動載物台12、進給螺絲15、連結組件18及連結組件用 固定件19等構成的第1單軸載物台機構1〇中虛擬的中心 軸與同一結構之第2單軸載物台機構50’中虛擬的中心軸 呈直角的交叉之方式’將第1單軸载物台機構10與第2單 軸载物台機構50’於上下方向重疊並固定配置，由此能夠 構成可於XY方向移動的二軸載物台機構5〇。 並且，藉由將一個單轴載物台機構與另一單軸載物台 機構於上下方向重疊’並且，進一步於垂直方向固定配置 其他的單軸載物台機構’能夠構成固定於XYZ方向（三維 方向）移動的活動載物台時之間隙、固定活動載物台後之 移動少的三抽載物台機構。 較具體而言，如第13b圖所示，以由固定載物台u、 201218210 /舌動栽物台 用固定件絲15、連結組件18以及連結組件 =與同-結構載物台機構ig中虛擬的中 軸呈直角的交叉之ii早軸裁物台機構5〇，中虛擬的中心 單軸栽物台機禮式，將第1單軸載物台機構10與第2 進一步將實上下方向重疊並固定配置’並且， !°； 向）固定阶罢^/戰物σ機構5〇於垂直方向（重力方 物台機構70。此能夠構成可於ΧΥΖ方向移動的三軸載 台機構、二舳明之载物台機構時’無論單軸載物 制間隙，使於將asΓ 2構或三ί載物台機構，均可分別抑 活動載物台時之Ϊ測器、電極、燈等工件搭載於 用備受期彳^。“極其容易，對於各種載物台機構之應 【圖式簡單說明】 第1&圖係第1實施方式之載物台機構的立體圖。 第lb圖係帛la圖所示的載物台機構之a_a剖視圖。 定和實峨之紐機構中的固 之對嶋吸㈣件（圓筒狀之樹脂構件） 用的 圖 第3b圖係供說明對間隙吸收構件之金屬保護罩而 第4a圖係供說明對間隙吸收構件之作用效果而用的圖 第4b圖係第4a圖所示的附圖之局部放大圖。 31 201218210 第其㈣構件之組合的局部放大圖。 第la_示㈣物台機構之分解圓。 …圖所示的載物台機構之包含引導構件的部 構丨键喊度與料 第8圖係第〗a圖所示 的部位之視圖/載物台機構之包含螺釘固定構造 第9a圖係第2 物靖的立體圖。 第此陶93輪犧自版D-D到視圖 對==^:收構件之進給螺絲相 的之 ==。2魏料之載料機構除麵給螺絲後 *4i2台a 構件之_狀構件與活 構=:說明對能夠㈣方向移動之二輪載物台機 4:的圖Γ說明對能夠向XYz方向移動的斗載物台 第14圖係供說明對以往的手動載物台而用的立體圖。 第15圖係供說明對以往的載物台固定裝置而用的立體圖。 32 201218210 【主要元件符號說明】 10 載物台機構 11 11， 固定載物台 11a 安裝孔 lib 潤滑脂注入孔 11c 缺口 12 活動載物台 12a 潤滑脂注入孔 12b 貫通孔 12c 貫通孔 13 锪孔部 15 進給螺絲 15， 墊圈 15a 頭部 15b 螺紋部 16 間隙吸收構件 16a 通過孔 16b 緩衝樹脂構件 16c 金屬保護罩 16d 收容部 16e 螺紋部 18 連結構件 19、19a ' 19b 固定件 20 引導構件 20a 金屬片 20a，、 20b、20b’ 引導槽 50 二軸載物台機構 50， 第2單軸載物台機構 70 三軸載物台機構 70’ 第3單軸載物台機構 100 載物台機構 111 固定載物台 111a 平坦面 112 活動載物台 115 進給螺絲 115b 螺紋部 116 間隙吸收構件 33 201218210 116b 緩衝樹脂構件 116e 117 圓柱狀構件 117a 平坦部 117b 117c 開口部 118 連結構件 119 側面罩 119a 固定構件 122 預壓構件 200 手動載物台 204 滑動組件 205 219 手柄 210 231 突出部 232 303 載物台 304 306 棒狀構件 307 螺紋部 移動孔 固定組件 滑動固定螺釘 槽 加工轴 固定構件 34In addition, the rectangle of the size of the movable stage U is further shaped, and the shape of the planar member is the same as that of the first embodiment, and the connecting member 26 201218210 is connected directly to the connecting member 118. The movable carrier plate is provided with a cylindrical member 117 of the gap absorbing member 116, and a cover member Wei, which is mounted on the boring portion = member formed on the fixed stage lu, and 115 is synchronized to make the The screw is moved to further move the movable stage 112 in the same direction. Claw slipping Therefore, the connecting member 118 may be 118 of Fig. 9b or may be in other forms. Further, the screw member of the second embodiment is also used as the load-carrying member of the second embodiment. The push of the α-mechanism 10 and the push of the solid object do not stand (1) Next 'Refer to the 12a~b ® pair | § & have a gap suction: ==:=12 _ based on two = structure, ===: m: The surface of the moving hole mb of the cylindrical member H7b having a predetermined thickness is fixed to a state in which the stage iu has no gap. /, the surface of the 5 cattle 17 is almost followed by 'as shown in Fig. 12b, and the flat surface of the cylindrical member 117 is formed by the flat surface 27 201218210 117a and the flat surface of the fixed stage lu - the fixed stage U1 is carried After being placed in the prescribed position, the secure connection at the member 118 includes the gap absorbing member 16 and the movable stage 112. In other words, the connecting member U8 can be used to form the cylindrical shape including the gap absorbing member 16 in the second portion; between the members ti 2 and 12, the smooth sliding of the inside of the cylindrical member mg moving hole 117b can be maintained. . In addition, as shown in Fig. 12a, it is preferable to divide the cylindrical member (four) at the position of the cylinder 2 = the moving hole (10) which is pre-divided ===, and the piece 117 is sown into 5 thousand. In the case of the singulation treatment, it is possible to significantly shorten the movement of the moving hole 11 of the cylindrically shaped grinding 4==:11. 4. When the cylindrical member is in the stage mechanism 1 of the third embodiment, The third aspect is that a circular shape in which the wearing surface is substantially circular in the column Lf element nf 117b formed in the stage 111 is provided. That is, the cylindrical member 丨17 is provided with the fixed stage The upper surface flat portion 111a forms a plane t = 117a' in common with respect to the surface position, and the cylindrical member 117 is coupled to the above-described movable stage 112, '"α member 118, and is mounted by using The cylindrical member 117 is slid in the fixed stage by the screw 115, thereby indirectly sliding the distal movable stage 112. 28 201218210 117, the day and the edge are set to one or two or more cylindrical members. The inner adjacent, connecting screw) 118 is disposed on the stage mechanism 100 112 V: the connected fixed stage 111 and the movable load The stage 112' further miniaturizes and reduces the weight of the stage mechanism. The constituent material defining the other two members 117 is not particularly diazole '" and the same one of the stage 1U is preferably lightweight. , mechanical properties, durability 4 excellent _, Shao alloy, etc. = step, as for the deformation of the cylindrical member 117, can also be used: the polygonal member of the structural member, elliptical cylindrical member and inverted triangular 5. Side cover view and 丄ΐϊ 2 In the stage mechanism 100 of the embodiment, as in the case of the 9b Γΐ 9 固 solid fixing member (fixing screw, etc.) _ the side cover xt is fixed at the end of the moving hole (10) of the stage 111 In order to conceal the moving hole 117b, F j is j by concealing the moving hole IHb by the side cover 119, intrusion of a knife, a dust component, etc., and improving the durability of the stage mechanism 10G; The form and the constituent material of the side cover 119 are not particularly limited to two. The same applies to the fixed stage 111, and it is preferable to use it in a rectangular industry which is excellent in weight: = characteristic, 敎 (four), and age. ~= Above, if the stage mechanism according to the present invention is used, the gap specified by 3 ΐϊ The receiving member can obtain the simple and simple (4) construction of the stage mechanism, and the recording stage has a good net hyperactivity. 29 201218210 The gap between the fixed movable stage and (4) After the movable stage: You can also get excellent movement of the active stage t:; 构 υ. υ is small ^ cheap for high-precision alignment of the stage ί direction or XYZ - =: load =: gap, fixed activity The rear movement of the stage is more specific and §, as shown in Fig. 13a, consisting of a fixed stage 丨^, a movable stage 12, a feed screw 15, a joint assembly 18, and a fixing member 19 for the joint assembly. The first single-axis stage is placed in a manner that the virtual central axis of the first uniaxial stage mechanism 1 交叉 intersects with the virtual central axis of the second uniaxial stage mechanism 50 ′ of the same configuration at right angles The mechanism 10 and the second uniaxial stage mechanism 50' are stacked and fixed in the vertical direction, thereby constituting a two-axis stage mechanism 5 that is movable in the XY direction. Further, by arranging one single-axis stage mechanism and the other single-axis stage mechanism in the vertical direction, and further arranging another single-axis stage mechanism in the vertical direction, it can be fixed in the XYZ direction ( In the three-dimensional direction, the gap between the movable stage and the three-push stage mechanism with a small movement after the movable stage is fixed. More specifically, as shown in FIG. 13b, the fixing stage u, the 201218210 / the tongue-and-wire stage fixing member wire 15, the joint assembly 18, and the joint assembly = and the same-structure stage mechanism ig The virtual central axis is a right-angled crossover ii early-axis cutting mechanism mechanism 5 〇, the middle virtual single-axis gantry mechanism, the first single-axis stage mechanism 10 and the second further overlap the vertical direction And fixed configuration 'and, ° °; to) fixed order ^ / war σ mechanism 5 〇 in the vertical direction (gravity object stage mechanism 70. This can constitute a three-axis stage mechanism that can move in the ΧΥΖ direction, two In the case of the stage carrier mechanism, regardless of the uniaxial load-carrying gap, the workpieces, electrodes, lamps, etc., which can be used to separate the movable stage, can be mounted on the asΓ2 or three-load stage mechanism. It is extremely easy to use, and it is extremely easy for all kinds of stage mechanisms. [1] A perspective view of the stage mechanism of the first embodiment is shown in Fig. 1b. A_a cross-sectional view of the stage mechanism shown in the table. (4) (Cylinder-shaped resin member) FIG. 3b is a view showing a metal protective cover for the gap absorbing member, and FIG. 4a is a view for explaining the effect on the gap absorbing member. FIG. A partially enlarged view of the drawing shown in Fig. 4a. 31 201218210 A partially enlarged view of the combination of the fourth component. The fifth drawing shows the decomposition circle of the object stage mechanism. The structure of the part of the 喊 喊 与 与 与 第 第 第 第 / / / / 载 载 载 载 载 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 93 From the version DD to the view pair ==^: The feeding screw phase of the receiving member ==. 2 The loading mechanism of the Wei material is added to the screw after the surface of the *4i2 table a member and the structure =: Description A diagram of a two-wheeled stage machine 4 that can move in the (fourth) direction. A four-dimensional diagram of a bucket stage that can be moved in the XYz direction will be described for a conventional manual stage. Fig. 15 is for A perspective view of a conventional stage fixing device will be described. 32 201218210 [Main component symbol description 】 10 stage mechanism 11 11, fixed stage 11a mounting hole lib grease injection hole 11c notch 12 movable stage 12a grease injection hole 12b through hole 12c through hole 13 boring part 15 feed screw 15, washer 15a Head portion 15b Thread portion 16 Clearance absorbing member 16a Passing through hole 16b Capaciting resin member 16c Metal protective cover 16d accommodating portion 16e Thread portion 18 Connecting member 19, 19a ' 19b Fixing member 20 Guide member 20a Metal piece 20a, 20b, 20b' Guide groove 50 Two-axis stage mechanism 50, second single-axis stage mechanism 70 Three-axis stage mechanism 70' Third single-axis stage mechanism 100 Stage mechanism 111 Fixed stage 111a Flat surface 112 Moving stage 115 Feeding screw 115b Threaded portion 116 Clearance absorbing member 33 201218210 116b Cushioning resin member 116e 117 Cylindrical member 117a Flat portion 117b 117c Opening portion 118 Connecting member 119 Side cover 119a Fixing member 122 Pre-pressing member 200 Manual load Table 204 slide assembly 205 219 handle 210 231 Projection 232 303 Stage 304 306 Rod member 307 Threaded part Moving hole Fixing assembly Sliding fixing screw Slot Machining shaft Fixing member 34