201207947 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種薄膜太陽能電池的退火裝置，尤其關 於一種改善薄膜太陽能電池之受熱不均現象的薄膜太陽能 電池的退火裝置。 【先前技術】 薄膜太能電池中的 CIGS ( copper indium gallium (di)Sdenide )是屬於化合物半導體。CIGS屬於多晶薄膜的形 式，它是由銅、銦'鎵以及硒所組成的一三五族化合物半導 體材料。圖1A顯示CIGS薄膜太陽能電池製造過程之一步 驟的示意圖。圖1B顯示CIGS薄膜太陽能電池製造過程之一 步驟的示意圖。如圖1A所示，CIGS薄膜太陽能電池1〇包 含一玻璃基板11。於玻璃基板11上依序沉積鉬金屬層12、 銅鎵金屬層13、銦金屬層14及硒層15。如圖1B所示，對 圖1A步驟的CIGS薄膜太陽能電池10,進行退火(annexing) 處理，退火主要是指一種使材料曝露於高溫一段時間後，然 後再慢慢冷卻的製程，退火處理後，銅鎵金屬層13、銦金屬 層14及硒層15會形成一 CIGSe金屬層16。 201207947 圖2A顯示一習知薄膜太陽能電池的退火裝置之外部結 構的示意圖。習知薄膜太陽能電池的退火裝置2〇,包含互相 連通的5個退火室21〜25 '及2個冷卻室31〜32。進行退火 處理時，從退火裝置20的入口 35將圖1A步驟的aGS薄 膜太陽能電池10，送入至退火室21進行預熱，再藉由傳送 裝置（未圖示）送至退火室22快速加熱至高溫狀態，例如 5〇〇°C〜600°〇於退火室23及24中使CIGS薄膜太陽能電池201207947 VI. Description of the Invention: [Technical Field] The present invention relates to an annealing apparatus for a thin film solar cell, and more particularly to an annealing apparatus for a thin film solar cell which improves the uneven heating of a thin film solar cell. [Prior Art] CIGS (copper indium gallium (di) Sdenide) in a thin film battery is a compound semiconductor. CIGS is in the form of a polycrystalline film which is a tri- or tri-group compound semiconductor composed of copper, indium 'gallium and selenium. Figure 1A shows a schematic diagram of one of the steps in the fabrication of a CIGS thin film solar cell. Figure 1B shows a schematic diagram of one of the steps in the fabrication of a CIGS thin film solar cell. As shown in Fig. 1A, a CIGS thin film solar cell 1A includes a glass substrate 11. A molybdenum metal layer 12, a copper gallium metal layer 13, an indium metal layer 14, and a selenium layer 15 are sequentially deposited on the glass substrate 11. As shown in FIG. 1B, the CIGS thin film solar cell 10 of the step of FIG. 1A is subjected to an annexing process, and the annealing mainly refers to a process of exposing the material to a high temperature for a period of time and then slowly cooling, after annealing, The copper gallium metal layer 13, the indium metal layer 14, and the selenium layer 15 form a CIGSe metal layer 16. 201207947 Figure 2A shows a schematic diagram of the external structure of an annealing device for a conventional thin film solar cell. The annealing apparatus 2 of the conventional thin film solar cell includes five annealing chambers 21 to 25' and two cooling chambers 31 to 32 which are in communication with each other. When the annealing treatment is performed, the aGS thin film solar cell 10 of the step of FIG. 1A is sent from the inlet 35 of the annealing device 20 to the annealing chamber 21 for preheating, and then sent to the annealing chamber 22 for rapid heating by a transfer device (not shown). To a high temperature state, for example, 5 〇〇 ° C to 600 ° 〇 in the annealing chambers 23 and 24 to make CIGS thin film solar cells
ίο保持在高溫狀態下—段時間。在退火室25中使cigs薄 膜太陽能電池1G触降溫，最後碰CIGS _太陽能電池 10於冷卻室31〜32中緩慢降溫至低溫狀態後，從出口 36送 出。Ίο kept at a high temperature for a while. The cigs thin film solar cell 1G is brought down in the annealing chamber 25, and finally the CIGS_solar cell 10 is slowly cooled to a low temperature state in the cooling chambers 31 to 32, and then sent out from the outlet 36.
圖2B顯示-習知薄膜太陽能電池的退火裝置之各退火 室之内部結構的示意圖。如圖2B所示，退火室21中設有一 底板26。CIGS薄膜太陽能電池1〇靜置於底板％上。一加 熱器70包含有多個加熱管71並隔著一石墨板6〇對⑽薄 膜太陽能電池10進行加熱。 热只不一筲 立 ^ π肤π闲盹电池退火裝置之傳送裝置的 示意圖。如圖3所示’ f知薄膜太陽能電池退讀置 裝置-設於退火室21〜25的底板26，用以傳送⑽ς 太陽能電池Η)(脚其破魏㈣）。f知 池 退火裝置之傳送裝置嗜至少—滾輪41、^= 201207947 42及至少一抵靠桿43。滾輪41設置於各退火室21〜25的底 板26，較佳的情況是大部分設於底板26背側，並露出—小 部分，此部分突出於底板26 ’使CIGS薄膜太陽能電池1〇 的玻璃基板11其背面，不接觸於底板26，而能於滾輪41上 移動。 圖3習知例中，採用兩個為圓柱狀的推動桿42，分別位 於底板26的左半部及右半部，並且大致不突出於底板％。 抵靠桿43設於推動桿42。在傳送裝置40的靜止狀態（未圖 示）下，抵靠桿43位於凹槽27内，且呈不突出於底板26 的狀態。在傳送裝置40的傳送狀態下，如圖3所示，推動 桿42逆時鐘旋轉一預定角度，例如9〇度，使抵靠桿43突 出於底板26。推動桿42往下個退火室移動時，CIGS薄膜太 陽能電池10的玻璃基板U會抵靠在抵靠桿43，並隨著推動 桿42在滚輪41上移動。當推動桿42及玻璃基板11均移動 到下個退火室後’推動桿42再順時鐘旋轉（未圖示），使抵 靠桿43處於另一凹槽27内’再次回到不突出於底板26的 狀態，推動桿42退回當前退火室後，即完成CIGS薄膜太陽 能電池10在各退火室21〜25間的傳送操作。 然而’習知退火裝置20所形成的CIGS薄膜太陽能電 池10a’會因受熱不均勻的現象，而降低了 CIGS薄膜太陽 能電池l〇a的品質及良率。因此習知退火裝置2〇還有進—步 201207947 改善的空間。 【發明内容】 本發明-實施例之目的在於提供一種改善薄膜 電池之受熱不均現象的薄膜太陽能電池的退火裝置。 依據本發明-實施例，薄膜太陽能電池退火裝置包含至 少-退火室…支撐裝置、-加熱器及_傳送裝置。加熱器 • 設於退火室内，用以對薄膜太陽能電池加熱。傳送裝置設於 退火室内且包含傳練置及輸送帶。輸送帶設於退火室内且 位於薄膜太m纽支躲置間。傳練置鞭驅動輸送 帶，以使輸送帶上的薄膜太陽能電池相對退火室内的加熱器 移動。輸送帶由石墨所構成且包含多個輸送板，每一輸送板 包含一結合板及一支撐板。結合板包含至少一第一鉤部及至 少一第二鉤部分別位於結合板之兩相對側。支撐板包含一本 體部、自本體部的一頂面延伸而出的一第一延伸部'自本體 Φ 部的一底面延伸而出並界定有至少一開口的一第二延伸 部。該些輸送板中之一第一輸送板的結合板的第二鉤部與該 些輸送板中之一第二輸送板的結合板的第一鉤部，分別穿過 第一輸送板的支撐板的第二延伸部的該開口。第二輸送板的 第一延伸部位於第一輸送板的第二延伸部上。 一實施例中’第一輸送板的結合板的第二鉤部與第二输 201207947 送板的結合板的第一鉤部，分別鉤住界定出第一輸送板的支 樓板的開口之内壁面的兩相對側。於一實施例，界定出第一 輸送板的支撐板的開口之内壁面的兩相對側包含一第一弧 面，且第一輸送板的結合板的第二鉤部與第二輸送板的結合 板的第一鉤部包含一第二弧面，第一弧面與第二弧面互相配 合’藉以能夠在一預定範圍内進行轉動。 一實施例中，每一輪送板的支撐板的第一延伸部的底面 φ 咼於本體部的底面，且每一輸送板的支撐板的第二延伸部的 頂面低於本體部的頂面，且第二延伸部的頂面至少一部分形 成一平台。於一實施例中，第二輸送板的第一延伸部被支撐 於第一輸送板的第二延伸部的平台上，且第二輸送板之第一 延伸部的頂面與第一輸送板之本體部的頂面大致位於同一 水平面，且第二輸送板的第一延伸部覆蓋第一輸送板的開 σ 〇 於加熱器對薄膜太陽能電池的加熱程序時，退火室内的 薄膜太陽能電池與加熱器間形成有相對移動。藉此獨特且新 穎的設計’能夠改善利用加熱器對薄膜太陽能電池加熱時所 產生之薄膜太陽能電池的受熱不均的現象。於一實施例申， 由於第二輸送板之結合板的第一鉤部、以及第一輸送板之結 合板的第二鉤部’鉤住界定出開口之内壁面的兩相對侧，且 兩者間能夠在一預定範圍内較平順地進行相對地轉動，因此 201207947 能夠使由石墨所構成的輪送帶，隨著設於輸送帶之内環兩端 的傳動轴之弧面轉動。一實施例中，第二輸送板之第-延伸 部覆蓋第-輸送板之開口以及插入於其内的第二輸送板的 第-鉤部及第-輪送板的第二釣部，使得輸送帶的表面大致 平整，因此使CIGS薄膜太陽能電池於輸送帶上被傳送時能 夠較均勻較熱。因此，依本發明—實施例之_太陽能電 池的退火裝置，可以改善受熱不均的現象，減少斑點的產 生，友：升/專膜太％能電池之品質及良率。 本發明的其他目的和伽可以從本發明所揭露的技術 特徵中得魏—步的了解。鱗本發明之上述和其他目的、 特徵和優點缺_賴，下謂舉實補並配合所附圖 式，作詳細說明如下。 【實施方式】 圖4顯不依本發明一實施例薄膜太陽能電池退火裝置的 不意圖。如® 4所示’薄膜太陽能電池退火裝置1GG用以對 一 CIGS薄膜太陽能電池1〇進行退火製程，其包含至少一退 火至21、一支樓裝置26、一加熱器13〇、及一傳送裝置12〇。 於一實施例情可以更包含-石墨板MG。於本實施例中， 薄膜太陽能電池退火裝置1〇〇設有5個退火室21〜25 (請參 …圖2A)。以下以退火室？！為例示加以說明，其餘退火室 201207947 22〜25相同於退火室21，因此省略其相關說明。 支撐裝置26設於退火室21内且用以支撐ciGS薄膜太 陽能電池10的重量，於本實施例中其可以為一底板260，於 一只施例中亦可以為沿一第一方向排列的多個轉軸（未圖 示）所構成。傳送裝置120設於退火室21内，用以將CIGS 薄膜太陽能電池1〇從入口 35傳送至退火室21内，或將其 傳送出退火室21外。傳送裝置12〇包含一傳動裝置及一輸 # 送帶122。輪送帶122位於底板260及CIGS薄膜太陽能電 池10間，底板260用以支撐輸送帶122，進而能夠支樓位於 輸送帶122上之CIGS薄膜太陽能電池1〇的重量。傳動裝置 適於驅動輸送帶122，以使輸送帶122上的薄膜太陽能電池 1〇相對退火室21内的加熱器130移動，一實施例中傳動裝 置可以為多個傳動軸121。輪送帶122設置成環狀且具有一 長軸沿一第一方向延伸。每一傳動軸121設於輸送帶122之 内％側’皆朝相同方向旋轉，例如皆朝逆時針方向旋轉，用 Φ 以驅動輸送帶122轉動。於本實施例中’傳動裝置設有兩個 傳動軸121，且分別設於輸送帶I22之内環側的兩端，底板 260设於該些傳動# 121之間藉以支撐輸送帶122 ，進而 支撐置於其上_膜太陽能電池1G。於_實施例中，亦可以 於輪运帶122内側之兩端的中間部，還設有至少一傳動軸 121 ’而支樓裝置26則包含多個底板26，且該些底板如分 201207947 別設於兩相鄰傳動轴121之間（未圖示）。 ,薄膜太陽能電池10置於輸送帶122上，其背面接觸輸 送▼ 122 ’藉以使薄膜太陽能電池10隨著輸送帶122的轉動 而於輸送帶122上沿第-方向移動，使得退火室21内的薄 膜太陽能電池10相對加熱器130移動。較佳的情況是，薄 膜太陽能電池10能夠於輸送帶122上持續地移動。 加熱器130包含多個長條狀的加熱管131。石墨板14〇 # °又於加熱益130與傳送裝置12〇間’於退火過程中，由於加 熱器130的該些加熱管131先對石墨板14〇加熱，石墨板14〇 能夠預先均勻化該些加熱管131的熱，形成面的熱源，再對 CIGS薄膜太陽能電池力0熱。因此石墨板⑽能夠更進一 v改善5：熱不均的現象。此外’由於退火室21 0，含有砸 几素’容易對加熱器no的該些加熱管131造成腐蚀因此 加熱器no與CIGS薄膜太陽能電池1〇間隔著石墨板14〇， 還能夠有保護加熱器13〇的作用。由於砸元素具有腐錄， 鲁 因此輸送帶122使用抗腐Ί虫性材質的石墨。 圖5A顯不依本發明-實施例薄膜太陽能電池退火裝置 之傳送裝置其輪送帶之側面圖及其支撐板之俯視圖。圖5B 顯示依本發明一貫施例薄膜太陽能電池退火裝置之傳送裝 置其輸送帶之結合板之俯視圖。圖sc顯示依本發明一實施 例薄膜太陽能電池退火裝置之傳钱置其輪送帶之側面圖。 201207947 如圖5A〜5C所示，輸送帶122包含多個輸送板，該些 輸送板互相連接而構成輸送帶122。如圖5C所示，輸送帶 122至少包含一第一輸送板3〇〇a及一第二輸送板30〇b。第— 輸送板300a及一第二輸送板300b分別由石、墨所製成。由於 第一及二輸送板300a及300b的結構相似，為求簡明以下僅 以第一輸送板300a為示例加以說明。輸送板3〇〇a包含一支 撐板310a及一結合板320a。如圖5C所示，結合板320a包 含至少第一鉤部321a及至少一第二鉤部322a分別位於結合 板320a的兩端’且該些第一及二鉤部32ia及322a分別形成 弧狀’且分別向結合板320a之中間彎曲。 支撐板310a分別包含一本體部311a、一第一延伸部 312a及一第一延伸部313a。第一延伸部312a及第二延伸部 313a分別位於本體部311a的兩相對側。第一延伸部3i2a自 本體部311a的頂面延伸而出，且第一延伸部312a的底面高 於本體部311a的底面’藉以於第一延伸部312a下側形成一 容置空間。 第一延伸部313a分別自本體部311a的底面延伸而出， 且第二延伸部313a的頂面低於本體部3lla的頂面，且第二 延伸部313a的頂面至少一部分形成一平台，藉以使第二輸送 板300b的第一延伸部312b設於第一輸送板3〇〇a的第二延伸 部313a的平台上。更具體而言，第二延伸部31如包含一平 12 201207947 台部314a及一連接部315a。連接部315a界定有至少一開口 316a。第二輸送板300b之結合板320b的第一鉤部321b、以 及第一輸送板300a之結合板320a的第二鉤部322a，分別穿 過開口 316a，且鉤住界定出開口 316a之内壁面的兩相對側。 較佳的情況是’界定出開口 316a之内壁面的該兩相對側’亦 形成弧面，且内壁面的該兩相對側的弧面，分別與第一鉤部 321b及第二鉤部322a的弧面相配合，藉以能夠在一預定範 圍内較平順地進行轉動。因此，依據上述設計，能夠使由石 墨所構成的輪送帶122 ’隨著設於輸送帶丨22之内環兩端的 傳動軸121之弧面轉動。 第一輸送板300b的弟一延伸部312b被支撐於第一輸送 板300a的第二延伸部313a的平台部3丨4a上，且第一延伸部 312b覆蓋開口 316a以及插入於其内的第一鉤部321b及第-鉤部322a，使得輸送帶122的表面大致平整。較佳的情況是， 當第一延伸部312b置於第二延伸部313a的平台部31如上 後，第二輸送板300b之第一延伸部312b的頂面與第一輸送 板300a之本體部311a的頂面大致位於同一水平面。因此當 CIGS薄膜太陽能電池10於輸送帶122上被傳送時，能夠較 均勻地受熱。 發明人進行實驗，收集多片利用薄膜太陽能電池的傳送 裝置40完成退火後之CIGS薄膜太陽能電池咖的資料，將 201207947 其上的斑點繪於圖表上，藉以得知該些斑點的形狀及位置。 發明人歸納出形成斑點的原因如下。 圖6顯示使用習知退火裝置完成退火後之CIGS薄膜太 陽能電池的示意圖。如圖6所示，使用習知傳送裝置4Q完 成退火後之CIGS薄膜太陽能電池10a，其上的斑點大致可 區分為點狀斑點51及條狀斑點52。再次參照圖3 , —般而 5，退火至的底板26的材質為石墨，而滾輪41及推動桿42 的材質都不是採用石墨，且不與底板26 —體成形，該些構 件會造成CIGS薄膜太陽能電池i〇a受熱不均的現象，因此 CIGS薄膜太陽能電池i〇a之對應滾輪41的部分會形成點狀 斑點51，而對應推動桿42的部分會形成條狀斑點52。 相對於此，依本發明一實施例之輸送帶122，沒有該些 元件’CIGS薄膜太陽能電池能夠均勻地接觸輸送帶122, 因此加熱器130能夠對CIGS薄膜太陽能電池1〇均勻地加 熱，而減少該些斑點的產生。 依據習知薄膜太陽能電池的退火裝置2〇，傳送裝置4〇 包含靜止狀態及傳送狀態，造成CIGS薄膜太陽能電池1〇在 退火裝置20的各退火室中間歇性地移動。於加熱器對薄膜 太陽能電池的加熱程序中，傳送裝置4〇處於靜止狀態，CIGS 薄膜太陽能電池10靜置於退火室21的底板26^由於加熱管 111為長條狀，而CIGS薄膜太陽能電池1〇的玻璃基板u 201207947 為面狀’因而造成靠近加熱管ill之玻璃基板11的部分受熱 較多，而遠離加熱管ηι之玻璃基板u的部分受熱較少，產 生受熱不均的現象，進而影響CIGSe金屬層16内各金屬的 結晶、濃度等物理特徵不均勻。如此，會造成CIGS薄膜太 陽能電池10a之品質及良率的下降。 相對於此，於本發明一實施例中，由於輸送帶122能夠 連續地驅動CIGS薄膜太陽能電池10的玻璃基板u，使其 連續地沿第一方向移動，讓CIGS薄膜太陽能電池1〇的表面 都能夠較均勻地受熱，可以改善受熱不均的現象，提升cigs 薄膜太陽能電池l〇a之品質及良率。 依據本發明一實施例，於加熱器130對薄膜太陽能電池 10的加熱程序時’退火室21内的薄膜太陽能電池1〇與加熱 器130間形成有相對移動。藉此獨特且新穎的設計，能夠改 善利用加熱器130對薄膜太陽能電池加熱時所產生之薄 膜太陽能電池10的受熱不均的現象。 於一實施例中，由於第二輸送板3〇〇b之結合板32〇b的 第一鉤部321b、以及第一輸送板3〇〇a之結合板32〇a的第二 鉤部322a，分別穿過開口 316a，鉤住界定出開口 31如之内 壁面的兩相對側，且兩者間能夠在一預定範圍内較平順地進 行相對地轉動，因此能夠使由石墨所構成的輸送帶122，隨 著設於輸送帶122之内環兩端的傳動軸121之弧面轉動。 LS3 15 201207947 此外於另—實施例中，第一延伸部312b覆蓋開口 3l6a 以及插入於其⑽第-鉤部321b及第二鉤部322a，使得輪 送帶122絲面大致平整，因此使CIGS薄膜太陽能電池1〇 於輸送帶122上被傳送時能夠較均勻地受熱。 雖然本發明已啸佳實_揭露如上，财並非用以限 定本發明’任何熟習此技藝者，林麟本伽之精神和範 圍内，當可作些許之更動與_，因此本發明之保護範圍當 視後附之_請專賴騎界定者鱗。糾，本發明的任— 貫施例或_料職gj不須達成本發明賴露之全部目的 或優點或特點。此外’摘铸分和標題僅❹來獅專利文 件搜尋之S，麟时限縣伽之權利範圍。 【圖式簡單說明】 圖1A顯不CIGS薄膜太陽能電池製造過程之_步驟的 示意圖。 圖1B顯示CIGS薄膜太陽能電池製造過程之_步驟的 不意圖。 k 圖2A顯不-習知薄膜太陽能電池的退火裝置之外部結 構的示意圖。 圖2B顯示-習知薄膜太陽能電池的退火裝置之各退火 室之内部結構的示意圖。 201207947 圖3顯示一習知薄膜太陽能電池退火裝置之傳送裝置的 示意圖。 圖4顯示依本發明一實施例薄膜太陽能電池退火裝置的 示意圖。 圖5A顯示依本發明—實施例薄膜太陽能電池退火裝置 傳送製置其輸送帶之側面圖及其支撐板之俯視圖。 圖5B顯示依本發明一實施例薄膜太陽能電池退火裝置 φ 之傳送裴置其輸送帶之結合板之俯視圖。 圖5C顯示依本發明一實施例薄膜太陽能電池退火裝置 之傳送袭置其輸送帶之側面圖。 圖6顯示使用薄膜太陽能電池的退火裝置完成退火後之 CIGS薄膜太g能電池的示意圖。 【主要元件符號說明】 [S] 10 CIGS薄膜太陽能電池 100 薄膜太陽能電池退火裝置 10a CIGS薄膜太陽能電池 11 玻璃基板 12 鉬金屬層 120 傳送裝置 121 傳動軸 17 201207947Fig. 2B is a view showing the internal structure of each annealing chamber of the annealing apparatus of the conventional thin film solar cell. As shown in Fig. 2B, a bottom plate 26 is provided in the annealing chamber 21. The CIGS thin film solar cell 1 is placed on the bottom plate %. A heater 70 includes a plurality of heating tubes 71 and heats the (10) thin film solar cells 10 via a graphite plate 6 . The heat is not only a schematic diagram of the transfer device of the battery annealing device. As shown in Fig. 3, the thin film solar cell read-out device is disposed on the bottom plate 26 of the annealing chambers 21 to 25 for transferring (10) solar cells (the solar cells). The transfer device of the annealing device is at least - the roller 41, ^ = 201207947 42 and at least one abutment bar 43. The roller 41 is disposed on the bottom plate 26 of each of the annealing chambers 21 to 25. Preferably, most of the rollers 41 are disposed on the back side of the bottom plate 26, and are exposed to a small portion which protrudes from the bottom plate 26' to make the glass of the CIGS thin film solar cell The back surface of the substrate 11 is movable on the roller 41 without coming into contact with the bottom plate 26. In the conventional example of Fig. 3, two cylindrical push rods 42 are used, which are located in the left and right halves of the bottom plate 26, respectively, and do not protrude substantially from the bottom plate %. The abutment lever 43 is provided to the push lever 42. In the stationary state (not shown) of the conveyor 40, the abutment rod 43 is located in the recess 27 and is in a state of not protruding from the bottom plate 26. In the transport state of the transport unit 40, as shown in Fig. 3, the push lever 42 is rotated counterclockwise by a predetermined angle, for example, 9 degrees, so that the abutment lever 43 protrudes from the bottom plate 26. As the push rod 42 moves toward the next annealing chamber, the glass substrate U of the CIGS thin film solar cell 10 will abut against the abutment rod 43 and move with the push rod 42 on the roller 41. When both the push rod 42 and the glass substrate 11 are moved to the next annealing chamber, the push rod 42 is rotated clockwise (not shown), so that the abutment rod 43 is in the other recess 27' again back to the bottom plate. In the state of 26, after the push rod 42 is retracted to the current annealing chamber, the transfer operation of the CIGS thin film solar cell 10 between the annealing chambers 21 to 25 is completed. However, the CIGS thin film solar cell 10a' formed by the conventional annealing device 20 reduces the quality and yield of the CIGS thin film solar cell 10a due to uneven heating. Therefore, the conventional annealing device 2 has a space for improvement in the step 201207947. SUMMARY OF THE INVENTION An object of the present invention to provide an annealing apparatus for a thin film solar cell which improves the uneven heating of a thin film battery. According to an embodiment of the invention, a thin film solar cell annealing device comprises at least an annealing chamber ... support device, a heater and a transfer device. Heater • Located in the annealing chamber to heat the thin film solar cells. The transfer device is disposed in the annealing chamber and includes a transfer device and a conveyor belt. The conveyor belt is located in the annealing chamber and is located between the film and the m-joint. The whip drive belt is taught to move the thin film solar cell on the conveyor belt relative to the heater in the annealing chamber. The conveyor belt is composed of graphite and comprises a plurality of conveying plates, each conveying plate comprising a bonding plate and a supporting plate. The bonding plate includes at least one first hook portion and at least one second hook portion respectively located on opposite sides of the bonding board. The support plate includes a body portion, a first extension portion extending from a top surface of the body portion, and a second extension portion extending from a bottom surface of the body Φ portion and defining at least one opening. a first hook portion of the first hook portion of the first transport panel and a first hook portion of the second transport panel of the transport panel, respectively, passing through the support panel of the first transport panel The opening of the second extension. The first extension of the second conveyor panel is located on the second extension of the first conveyor panel. In one embodiment, the first hook portion of the second hook portion of the first transport plate and the second transport portion of the second transport 201207947 feed plate respectively hooks the inner wall surface of the opening of the support floor panel defining the first transport plate The opposite sides of the two. In one embodiment, the opposite sides of the inner wall surface defining the opening of the support plate of the first conveying plate comprise a first curved surface, and the combination of the second hook portion of the bonding plate of the first conveying plate and the second conveying plate The first hook portion of the plate includes a second curved surface, and the first curved surface cooperates with the second curved surface to enable rotation within a predetermined range. In one embodiment, the bottom surface φ of the first extending portion of the support plate of each of the transfer plates is entangled with the bottom surface of the body portion, and the top surface of the second extending portion of the support plate of each of the conveying plates is lower than the top surface of the body portion And at least a portion of the top surface of the second extension forms a platform. In an embodiment, the first extension of the second conveying plate is supported on the platform of the second extension of the first conveying plate, and the top surface of the first extending portion of the second conveying plate and the first conveying plate The top surface of the body portion is substantially at the same horizontal plane, and the first extension portion of the second conveying plate covers the opening σ of the first conveying plate. When the heater heats the film solar cell, the thin film solar cell and the heater in the annealing chamber There is a relative movement between the formations. This unique and innovative design can improve the uneven heating of thin film solar cells produced by heating a thin film solar cell with a heater. In one embodiment, the first hook portion of the bonding plate of the second conveying plate and the second hook portion of the bonding plate of the first conveying plate are hooked to define opposite sides of the inner wall surface of the opening, and both The room can be relatively rotated relatively smoothly within a predetermined range, so 201207947 enables the belt made of graphite to rotate with the arc of the drive shaft provided at both ends of the inner ring of the conveyor belt. In one embodiment, the first extending portion of the second conveying plate covers the opening of the first conveying plate and the first hook portion of the second conveying plate inserted therein and the second fishing portion of the first conveying plate, so that the conveying The surface of the strip is substantially flat so that the CIGS thin film solar cell can be more evenly heated when transported over the conveyor belt. Therefore, according to the invention - the solar cell annealing device can improve the phenomenon of uneven heating and reduce the generation of spots, and the quality and yield of the battery can be as high as possible. Other objects and gaze of the present invention can be understood from the technical features disclosed in the present invention. The above and other objects, features and advantages of the present invention are lacking. The following is a detailed description of the present invention. [Embodiment] Fig. 4 is a schematic view showing a thin film solar cell annealing apparatus according to an embodiment of the present invention. The thin film solar cell annealing device 1GG shown in FIG. 4 is used for annealing a CIGS thin film solar cell, which comprises at least one annealing to 21, a building device 26, a heater 13A, and a conveying device. 12〇. In one embodiment, it may further comprise a graphite plate MG. In the present embodiment, the thin film solar cell annealing apparatus 1 is provided with five annealing chambers 21 to 25 (refer to Fig. 2A). The following is an annealing chamber? ! As an illustration, the remaining annealing chambers 201207947 22 to 25 are the same as the annealing chamber 21, and thus the related description will be omitted. The supporting device 26 is disposed in the annealing chamber 21 and supports the weight of the ciGS thin film solar cell 10. In this embodiment, it may be a bottom plate 260, and in one embodiment, it may be arranged in a first direction. It consists of a rotating shaft (not shown). The transfer device 120 is disposed in the annealing chamber 21 for transferring the CIGS thin film solar cell 1 from the inlet 35 into the annealing chamber 21 or out of the annealing chamber 21. The conveyor 12A includes a transmission and a transmission belt 122. The transfer belt 122 is located between the bottom plate 260 and the CIGS thin film solar battery 10, and the bottom plate 260 is used to support the conveyor belt 122, thereby being able to support the weight of the CIGS thin film solar cell 1 on the conveyor belt 122. The transmission is adapted to drive the conveyor belt 122 such that the thin film solar cells 1 on the conveyor belt 122 are moved relative to the heaters 130 in the annealing chamber 21, which in one embodiment may be a plurality of transmission shafts 121. The belt 122 is disposed in a ring shape and has a long axis extending in a first direction. Each of the drive shafts 121 is disposed in the same direction as the inner side of the conveyor belt 122, for example, rotating in a counterclockwise direction, and Φ is used to drive the conveyor belt 122 to rotate. In the embodiment, the transmission device is provided with two transmission shafts 121, and is respectively disposed at two ends of the inner ring side of the conveyor belt I22. The bottom plate 260 is disposed between the transmissions #121 to support the conveyor belt 122, thereby supporting Placed on it _ film solar cell 1G. In the embodiment, the intermediate portion of the inner side of the wheeled belt 122 may also be provided with at least one transmission shaft 121', and the branch unit 26 includes a plurality of bottom plates 26, and the bottom plates are divided into 201207947. Between two adjacent drive shafts 121 (not shown). The thin film solar cell 10 is placed on the conveyor belt 122, and the back surface of the film is transported by the camera to cause the thin film solar cell 10 to move along the first direction on the conveyor belt 122 as the conveyor belt 122 rotates, so that the inside of the annealing chamber 21 The thin film solar cell 10 moves relative to the heater 130. Preferably, the thin film solar cell 10 is continuously movable on the conveyor belt 122. The heater 130 includes a plurality of elongated heating tubes 131. The graphite plate 14〇#° is further between the heating device 130 and the conveying device 12〇. During the annealing process, since the heating tubes 131 of the heater 130 first heat the graphite plate 14〇, the graphite plate 14〇 can be pre-homogenized. The heat of the heating tube 131 forms a heat source for the surface, and then the heat of the CIGS thin film solar cell is 0. Therefore, the graphite plate (10) can further improve the phenomenon of 5: heat unevenness. In addition, 'the annealing chamber 21 0, containing the quinones' easily corrodes the heating tubes 131 of the heater no. Therefore, the heater no and the CIGS thin film solar cells are separated from the graphite plate 14 〇, and the heater can also be protected. 13 〇 role. Since the bismuth element has a rot, the conveyor belt 122 uses graphite which is resistant to mites. Figure 5A shows a side view of the transfer belt of the conveyor of the thin film solar cell annealing apparatus according to the present invention - a plan view of the support plate. Fig. 5B is a plan view showing a bonding plate of a conveying belt of a conveying apparatus of a thin film solar cell annealing apparatus according to the present invention. Figure sc shows a side view of a transfer of a thin film solar cell annealing apparatus according to an embodiment of the present invention. 201207947 As shown in Figs. 5A to 5C, the conveyor belt 122 includes a plurality of conveying plates which are connected to each other to constitute a conveyor belt 122. As shown in Fig. 5C, the conveyor belt 122 includes at least a first conveying plate 3a and a second conveying plate 30b. The first conveying plate 300a and the second conveying plate 300b are made of stone and ink, respectively. Since the structures of the first and second conveying plates 300a and 300b are similar, only the first conveying plate 300a will be described as an example for the sake of brevity. The conveying plate 3A includes a gusset 310a and a coupling plate 320a. As shown in FIG. 5C, the bonding plate 320a includes at least a first hook portion 321a and at least one second hook portion 322a respectively located at opposite ends of the bonding plate 320a and the first and second hook portions 32ia and 322a respectively form an arc shape. And respectively bent to the middle of the bonding plate 320a. The support plates 310a respectively include a body portion 311a, a first extension portion 312a and a first extension portion 313a. The first extension portion 312a and the second extension portion 313a are respectively located on opposite sides of the body portion 311a. The first extending portion 3i2a extends from the top surface of the main body portion 311a, and the bottom surface of the first extending portion 312a is higher than the bottom surface of the main portion 311a to form an accommodating space on the lower side of the first extending portion 312a. The first extending portion 313a extends from the bottom surface of the body portion 311a, respectively, and the top surface of the second extending portion 313a is lower than the top surface of the body portion 311a, and at least a portion of the top surface of the second extending portion 313a forms a platform. The first extension portion 312b of the second conveying plate 300b is disposed on the platform of the second extension portion 313a of the first conveying plate 3A. More specifically, the second extension portion 31 includes a flat portion 12 201207947 a table portion 314a and a connecting portion 315a. The connecting portion 315a defines at least one opening 316a. The first hook portion 321b of the coupling plate 320b of the second conveying plate 300b and the second hook portion 322a of the coupling plate 320a of the first conveying plate 300a pass through the opening 316a, respectively, and hook the inner wall surface defining the opening 316a. Two opposite sides. Preferably, the two opposite sides of the inner wall surface defining the opening 316a also form a curved surface, and the curved surfaces of the opposite sides of the inner wall surface are respectively associated with the first hook portion 321b and the second hook portion 322a. The curved surfaces cooperate to enable a smoother rotation within a predetermined range. Therefore, according to the above design, the traveling belt 122' composed of graphite can be rotated along the arc surface of the transmission shaft 121 provided at both ends of the inner ring of the conveyor belt 22. The extension portion 312b of the first conveying plate 300b is supported on the platform portion 3丨4a of the second extension portion 313a of the first conveying plate 300a, and the first extending portion 312b covers the opening 316a and the first inserted therein The hook portion 321b and the first hook portion 322a are such that the surface of the conveyor belt 122 is substantially flat. Preferably, when the first extending portion 312b is placed on the platform portion 31 of the second extending portion 313a, the top surface of the first extending portion 312b of the second conveying plate 300b and the body portion 311a of the first conveying plate 300a The top surface is roughly at the same level. Therefore, when the CIGS thin film solar cell 10 is transported on the conveyor belt 122, it can be heated more uniformly. The inventors conducted experiments to collect information on a plurality of CIGS thin film solar cell coffees after annealing using a thin film solar cell transfer device 40, and plotted the spots on 201207947 on the graph to know the shape and position of the spots. The inventors have summarized the reasons for the formation of spots as follows. Figure 6 shows a schematic of a CIGS thin film solar cell after annealing has been accomplished using a conventional annealing apparatus. As shown in Fig. 6, the CIGS thin film solar cell 10a after annealing is completed by a conventional transfer device 4Q, and the spots thereon are roughly divided into a dot spot 51 and a strip spot 52. Referring again to FIG. 3, generally, the material of the bottom plate 26 which is annealed is graphite, and the material of the roller 41 and the push rod 42 are not graphite, and are not formed integrally with the bottom plate 26, and these members may cause CIGS film. The solar cell i〇a is heated unevenly, so that the portion of the corresponding roller 41 of the CIGS thin film solar cell i〇a forms a dot-like spot 51, and the portion corresponding to the push rod 42 forms a strip-shaped spot 52. In contrast, the conveyor belt 122 according to an embodiment of the present invention, without the components 'CIGS thin film solar cells, can uniformly contact the conveyor belt 122, so the heater 130 can uniformly heat the CIGS thin film solar cells 1 ,, and reduce The production of these spots. According to the conventional annealing apparatus 2 of the thin film solar cell, the transfer device 4A includes a stationary state and a transport state, causing the CIGS thin film solar cell 1 to intermittently move in each annealing chamber of the annealing device 20. In the heating process of the thin film solar cell by the heater, the transfer device 4 is in a stationary state, and the CIGS thin film solar cell 10 is placed in the bottom plate 26 of the annealing chamber 21, because the heating tube 111 is elongated, and the CIGS thin film solar cell 1 The glass substrate u 201207947 of the crucible is in a planar shape, so that the portion of the glass substrate 11 near the heating tube ill is heated more, and the portion of the glass substrate u far from the heating tube η is less heated, causing uneven heating, thereby affecting The physical characteristics such as crystals and concentration of each metal in the CIGSe metal layer 16 are not uniform. Thus, the quality and yield of the CIGS thin film solar cell 10a are lowered. In contrast, in an embodiment of the present invention, since the conveyor belt 122 can continuously drive the glass substrate u of the CIGS thin film solar cell 10 to continuously move in the first direction, the surface of the CIGS thin film solar cell 1 is The ability to heat more uniformly can improve the phenomenon of uneven heating and improve the quality and yield of the cigs thin film solar cell. According to an embodiment of the present invention, when the heater 130 heats the thin film solar cell 10, a relative movement between the thin film solar cell 1A and the heater 130 in the annealing chamber 21 is formed. With this unique and novel design, it is possible to improve the uneven heating of the thin film solar cell 10 which is generated when the heater 130 is used to heat the thin film solar cell. In an embodiment, the first hook portion 321b of the bonding plate 32〇b of the second conveying plate 3〇〇b and the second hook portion 322a of the bonding plate 32〇a of the first conveying plate 3〇〇a are Through the opening 316a, respectively, the opposite sides defining the opening 31 such as the inner wall surface are hooked, and the two can be relatively rotated relatively smoothly within a predetermined range, so that the conveyor belt 122 composed of graphite can be made. The arc surface of the drive shaft 121 disposed at both ends of the inner ring of the conveyor belt 122 rotates. LS3 15 201207947 In addition, in another embodiment, the first extending portion 312b covers the opening 316a and is inserted into the (k) first-hook portion 321b and the second hook portion 322a, so that the rolling belt 122 has a substantially flat surface, thereby making the CIGS film The solar cell 1 can be more uniformly heated when it is transported on the conveyor belt 122. Although the present invention has been disclosed above, it is not intended to limit the present invention to anyone skilled in the art, and in the spirit and scope of Lin Lin Bingga, when there are some changes and _, the scope of protection of the present invention When you look at the attached _ please rely on the definition of the scales. It is to be understood that the invention or the application of the present invention is not required to achieve all of the objects or advantages or features of the invention. In addition, the 'casting points and headings are only for the S-search for the patent documents of the Lions. [Simple description of the diagram] Figure 1A shows a schematic diagram of the steps of the CIGS thin film solar cell manufacturing process. Figure 1B shows the intent of the steps of the CIGS thin film solar cell manufacturing process. k Figure 2A shows a schematic view of the external structure of an annealing device for a thin film solar cell. Fig. 2B is a view showing the internal structure of each annealing chamber of the annealing apparatus of the conventional thin film solar cell. 201207947 Figure 3 shows a schematic diagram of a conventional transfer device for a thin film solar cell annealing device. Fig. 4 is a view showing a thin film solar cell annealing apparatus according to an embodiment of the present invention. Figure 5A is a plan view showing a side view of a conveyor belt of a thin film solar cell annealing apparatus according to the present invention, and a support plate thereof. Fig. 5B is a top plan view showing the bonding plate of the thin film solar cell annealing apparatus φ according to an embodiment of the present invention. Fig. 5C is a side elevational view showing the transport of the thin film solar cell annealing apparatus according to an embodiment of the present invention. Figure 6 is a schematic view showing the CIGS thin film solar cell after annealing in an annealing apparatus using a thin film solar cell. [Main component symbol description] [S] 10 CIGS thin film solar cell 100 Thin film solar cell annealing device 10a CIGS thin film solar cell 11 Glass substrate 12 Molybdenum metal layer 120 Transfer device 121 Drive shaft 17 201207947
122 輸送帶 13 銅鎵金屬層 130 加熱器 131 加熱管 14 姻金屬層 140 石墨板 15 石西層 16 CIGSe金屬層 20 退火裝置 21 〜25 退火室 26 底板 27 凹槽 300a 第一輸送板 300b 第二輸送板 31-32 冷卻室 310a 支樓板 311a 本體部 312a 第一延伸部 312b 第一延伸部 313a 第二延伸部 313b 第二延伸部 IS] 18 201207947122 Conveyor belt 13 Copper-gallium metal layer 130 Heater 131 Heating tube 14 Margin metal layer 140 Graphite sheet 15 Stone layer 16 CIGSe metal layer 20 Annealing device 21 ~ 25 Annealing chamber 26 Base plate 27 Groove 300a First conveying plate 300b Second Conveying plate 31-32 Cooling chamber 310a Supporting floor 311a Main body portion 312a First extending portion 312b First extending portion 313a Second extending portion 313b Second extending portion IS] 18 201207947
314a 平台部 314b 平台部 315a 連接部 315b 連接部 316a 開口 320a 結合板 320b 結合板 321a 第一鉤部 321b 第一鉤部 322a 第二鉤部 322b 第二鉤部 35 入口 36 出口 40 薄膜太陽能電池傳送裝置 41 滚輪 42 推動桿 43 抵靠桿 51 點狀斑點 52 條狀斑點 60 石墨板 70 加熱器 i s] 201207947 71 加熱管314a Platform portion 314b Platform portion 315a Connection portion 315b Connection portion 316a Opening 320a Bonding plate 320b Bonding plate 321a First hook portion 321b First hook portion 322a Second hook portion 322b Second hook portion 35 Entrance 36 Outlet 40 Thin film solar cell conveyor 41 Roller 42 Push rod 43 Abutment rod 51 Dot spot 52 Strip spot 60 Graphite plate 70 Heater is] 201207947 71 Heating tube
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