201142354 六、發明說明： ' 【發明所屬之技術領域】 • /發明係關於—種應用共聚賴微鏡結構的被測物圖 像獲取方法，特別係關於—種為了盡可能地平均化掃 被測物的光線由於每個掃描位置表面的光學特性：反射比 、粗链度及反射角等不同而引起的獲取信號之差，由聲光 偏轉器調節光強後進行掃描，以此能夠提高檢測精度的應 用共聚焦賴鏡結構的麵物圖像獲取方法及系統。 【先前技術】 、，一般來說，共聚焦顯微鏡將雷射作為光源，利用從點 光亡、（point souice)出射的光線，使樣品的焦點與光電探 測為的縫m針孔的焦點形成共，以防 止焦平面以外的部分出現在光電探測器上，因此盥習知的 =光顯微鏡相比’料焦顯微鏡聽平面的騎度高達Η 工右而且共聚焦頭微鏡在光秘（叩如別axis)上設置了 縫隙掩模等，從而能在透過標本(specimen)或者 析;並:t::線中僅選擇準確對焦的光線，以提高解 捷么=⑤絲焦顯微鏡可透過預定崎體將二維圖像重 到或者立體圖像，因此能夠觀察以前無法觀察 建且有^ /咖咖）_像’並能透過絲焦顯微鏡重 建具有體積_物峨，顺軸f方向的圖Ϊ 需要二Τ顯微鏡為了使光線偏轉到樣品的ΧΥ面上 描位置上，採用掃描鏡(檢流™” 機電錢）元件或者聲光㈣ϋ等麵财置。 5/32 201142354 其中’掃描鏡（檢流計）是在旋轉的軸上貼附鏡子（ 反射鏡）的裝置，具有能夠以簡單的結構進行高速驅動的 優點’而 MEMS (microelectromechanicalsystem)是將這種 反射鏡結構小型化、高度積體化的系統。 此外，聲光偏轉器是為了偏轉入射光而廣為採用的手 段，如圖1所示，其可由壓電轉換器（a)與介質（b)構 成。 如果由控制單元分配的具有一定頻率的射頻信號透過 射頻調製益傳送到該壓電轉換器（a)，壓電轉換器（a)就 根據射頻信號並以所傳送的頻率加壓介質（b)，以產生具 有波長Λ且向介質（b)中傳播的聲波（c)。 結果，由於所產生聲波⑷所引起的聲光效應，介質 (b)中產生週期性的折射率的變化。 這種折射率的變化可視作衍射光拇，其如同在晶體表 面的原子铺X射線（布拉格衍射所入射的光 線。 ^設所產生聲波㈦的頻率為f，前進速“ V，由於 V = fA’可以得出介質㈦情射率變化的週期。 δίηθ = λ/ 2Λ = If/ 2v 即可知，可读苗含 即如圖2所示，假設人射光具有波長λ，由聲波 引起的入射光的偏轉角（Θ)可由以下公式表示。 ，可透過調節聲波（c)的頻 的頻率f，以改變入射 的頻率f可透過控制射 光的偏轉角（Θ)。如此的聲波（c) 頻信號的頻率來確定。 :透過以這種原理工作的聲光偏轉器 在需掃描的被測物的χγ 來控制入射光 平面上向掃描方向偏轉，並從每 6/32 201142354 個掃描位置獲取光線而獲得需掃描被測物的圖像。 在很多情況下，一般被測物的每—個掃插位 ^ 畫素）的高度不一樣，因此在被測物的某一部八、（單位 對焦後，分步驟進行掃描而完成其高度的檢挪。、向X上 即如圖3所示，如果透過掃描光學系統（1) 線在被測物中掃描區域（2)的各掃描位置表面费描的光 焦’從每個掃描位置反射的光線也能在縫隙掩準確地聚 隙上準確地聚焦，從而透過光電探測器⑷莽^的縫 而如圖4所示，如果在被測物⑺的每^ί線。 沒有準確地形成光線焦點，縫隙掩模⑶的=位置上 形成光線魅，因此從光電_器（4)所*也不會 也就相對較低。 又τ叱、，泉的光強 ^此’可透過綜合從高度互不相同的掃· 的光線，以形成掃描區域的整體 ^則出 的高度（三維形貌）結果。 表木焱伃正肢如描區域 然而，此時從每個掃描位置丨古 小信號值之差則根據掃描位置各部八的反=§號值與最 反射角等表面特性而不同。°刀勺反射比、粗繞度及 題。結果，存在著整體掃描區域的檢測精度不夠均勻的問 中需要掃描的部:了:上:二:。’題，有人提出根據被測物 礎上，對每個掃描位置進行檢測光強，並在此基 出光來進行掃描的方法。尤知彻蚪，直接改變光源的輸 :、、、:而，上述方法雖然可 ^ 掃描後，雹座扭# 知向檢測精度’但進行初步 而要根據_玲㈣基_成的各掃描位置的 7/32 201142354 反射比，調節光源所產生的光線的強度，因此具有總體製 程時間加長的問題。 一 而且，需要在每個掃描位置改變來自光源的輸出光， 因此更加增加了總體製程時間，而對每個掃描位置調節光 源的光輸出也具有一定的難度。 【發明内容】 本發明是為了解決上述習知技術中存在的問題而提出 的，其目的在於提供-種制共聚焦顯微鏡結構的被測物 圖像獲取方法及系統，根據掃描區域中由於每個掃描位置 表面的反射比、粗糙度及反射角等光學特性不同而導致的 „號之間的差所引起的圖像的亮度差，職地根據從 每個掃描位置檢測出的光絲調節掃描光的強度並獲得圖 像，藉以k南掃描區域的檢測精度。 上述目的是透過以下技術手段來實現的。本發明的一 種應用共聚:!、賴鏡結構的被測物圖像的獲取方法，在被 測物的上方產生域’並採肖聲光偏㈣使光線依次偏轉 於掃描區域的χγ平面上的同時進行掃描，以獲取圖像， 其中包括下列步驟： 強度資訊獲取步驟，其透過顯微鏡光源產生光線，並 將此光線輸掃描單元的光路上，以使所產生的光線照 射到整個該掃描區域上，且透過照相機獲取與分析該掃描 區域=整體®像’以獲取每個掃描位置的絲資訊； 負efU又置步驟，其將所獲取的每個掃描位置的光強資 訊映射到每個掃描位置的位置資訊上，以設置映射資訊； 搭載步驟’其根據控制信號搭載該資訊設置步驟中儲 存的映射資訊； 8/32 201142354 傳送步驟，其基於所搭___ 並將其傳送到聲光偏轉器； ' 置耳強貝a’ ，而所輸出的光線透過掃描單二二_=;= 反射後’反射光、_進人卿描單元姑位置亚破 記錄步驟，其透過光電接 射且進入該掃描單元的光線，、双測由母個掃描位置反 ； 亚5己錄所檢測的光檢測信號 Z軸掃描步驟，其在2 單元之_她麟改變上賴_物與該· 驟、該掃描步驟、該記錄t距=並依次執行該傳送步 每個掃描位置的光檢測信號，錄不同的相隔距離下 個掃描位置的光檢測信號的&錄至目隔距離下每 圖像獲取步驟，其從透過 二止人’ 每個掃福_勺多個光檢挪信;;中财檢挪出的 按該聲強:纽的每瓣描 u 〃自，並形成 的整體圖像。 置的圖像，以獲得該掃抱區域 檢測像獲取步”從每個掃描位置的多個I 中選擇的光檢測信號可以是 b個光 為取，壓_光檢測錢。 衫L的電壓 而足，在該資訊設置步驟中 外部輪入的資訊。該每個掃指位可以是由 每個掃福位置表面的反射比光學特性可 者。 祖钛度及反射角中的至 本聲明的上述目的可透過以下技術手段來實現， 201142354 明方式提供的一種應用共聚焦顯微鏡結構的被 測物圖像後取系統，其係包括： 傅刃板 光源單元，其位於被測物的上 其輸出到該被測物巾需要掃描崎邮域；、’將 偏轉早元》其包括聲来低鐘# 偏轉到該掃描區域的χγ料二光線 光源單元輪出的光線，並將其偏轉後輪出 根據所傳$的聲強資訊，其強度被調節後輸出； 光線掃用過該偏轉單元偏轉職^ 置反射過來的光線； 早70 ’其具有產生光線的顯微鏡光源，並將所 產生的先線輸入於該掃描單元的光路上，藉以使所產生的 圖像 =照_整體歸辟域上，崎取觸純域的整體 /刀光^其設置在該掃描單元，用以使從該偏轉單元 輸入的光線f過’並反射從每個掃描位置輸人的光線； …光檢測単兀’其位於該掃描單元的侧方，用以檢測透 過該分光單元反射的光線； &制單7C ’其用以控制該偏轉單元’以使光線偏轉到 ，掃描區域的XY平面上，並透過由鋪微鏡單元獲取的 正體圖像來分析該掃描區域中每個掃描位置的光強，以設 置映射資訊，且搭载該映射資訊而設置該聲強資訊，並從 该光檢測單元檢測出的、在每個掃描位置的不同 Z軸相隔 距離:的多個光檢測信號中選擇其中一個光檢測信號，以 形成每個掃描位置的禪像。 10/32 201142354 者偏振!束!可以是半透明反射鏡(ha,f〜)或 刀光口。（P〇larizjng Beam Spmter)。 且’該掃描單元較佳係具有分光器、掃描透餘/ 及物鏡，從該光源單元輸入二: 到二=透鏡、鏡筒透，1/4波長板及物鏡‘! ^ ]7 而在每個掃描位置反射的光 收從兮八丄 早疋可以包括：第—聚光鏡，用，、 ，用反射的光線並將其匯集成聚光光束；受^妾 接收透，光罩的光線，並將J強轉 ==用《 而且，該受光罩可設置有縫隙或 “心竣。 聚光鏡匯飾朗聚光光束朗’以使在該第〜 另外，該偏轉單元較佳係包含一 偏轉器，用以使光線偏轉到該二=專器與1 且分別受到控制。 4的χγ平面上， 此外’該述光_ϋ較佳為彳 篇 分光器的光線的光路上。 攸。亥忐原單元透過該 而且，該光偏轉器可以是掃描 鏡中的任何一者。 、·、”、流計或者MeMs 另外，該偏轉單元可由一對聲 光線偏轉到該掃描區域的XV平面上，振器構成，用以使 其中，該受光罩較佳被控制成且刀別雙到控制。 偏轉裔在Xγ平面上偏轉的光線而移‘。方' 透過讀一對聲光 而且，該顯微鏡單元可以包括：。 弟—分光器，其設置在該掃描單元的 11/32 人 攻長板與該 201142354 間，用以反射所輸入的光線，以使其照射到該 .整個領域巾；顯微鏡光源，用以產生並輸出光線 到刀光器，其用以將從該顯微鏡光源輸出的光線反射 透i ’並使從該第—分光11反射而射人的光線 、^…、相機，用以成像透過該第二分光器的光 成邊掃描區域的整體圖像。 、 y 另外’該控制單元可以包括： 、圖像》析早％ ’其透過從該照相機獲取的圖像，分析 亚、迗5玄掃描區域中每個掃描位置的光強. 強’赫_圖像分析單元傳送的光 位置的光強資訊’並將其映射到每個掃 描位置的位置資訊； 的二^_部控制㈣搭_儲存 、、、。亚將忒映射育訊傳送到該資訊設置單元； 一資=設置單元’其包含訊設置單元，該聲強資 置早70根據所搭載的映射資訊設置聲強資訊，以調節201142354 VI. Description of the invention: ' 【Technical field to which the invention belongs 】 • / The invention relates to a method for acquiring an image of a measured object using a copolymerized micromirror structure, in particular, for the purpose of averaging the scan as much as possible The light of the object is scanned by the acousto-optic deflector after the optical characteristics of the surface of each scanning position: the reflectance, the thick chain and the reflection angle are different, and the detection is improved by adjusting the light intensity by the acousto-optic deflector. A method and system for acquiring a facial image using a confocal mirror structure. [Prior Art] In general, a confocal microscope uses a laser as a light source, and uses a light emitted from a point souice to form a focus of the sample together with a focus of a photo-detection slit. In order to prevent the part outside the focal plane from appearing on the photodetector, it is known that the light microscope has a higher riding degree than the 'focusing lens' and the confocal head micromirror is in the light (such as Do not set the gap mask, etc. on the axis), so that only the light that is in focus can be selected in the specimen or the line: and the t:: line can be used to improve the solution. The body re-images the two-dimensional image to a stereoscopic image, so it can observe the image that can not be observed before and has a ^/caffey_image and can reconstruct the volume _ object and the direction of the f-axis through the wire-focus microscope. In order to deflect the light onto the surface of the sample, use a scanning mirror (Scanning TM), or a sound and light (4) ϋ. 5/32 201142354 where 'scanning mirror Is counting A device in which a mirror (mirror) is attached to a shaft has an advantage of being capable of high-speed driving with a simple structure. A MEMS (microelectromechanical system) is a system that compacts and highly integrates such a mirror structure. The deflector is a widely used means for deflecting incident light, and as shown in Fig. 1, it can be composed of a piezoelectric transducer (a) and a medium (b). If a radio frequency signal having a certain frequency distributed by the control unit is transmitted through the radio frequency The modulation benefit is transmitted to the piezoelectric transducer (a), and the piezoelectric transducer (a) pressurizes the medium (b) according to the radio frequency signal and at the transmitted frequency to generate a wavelength Λ and propagates into the medium (b) Acoustic wave (c). As a result, due to the acousto-optic effect caused by the generated acoustic wave (4), a periodic change in refractive index occurs in the medium (b). This change in refractive index can be regarded as a diffracted optical thumb, which is like a crystal. The surface of the atom is coated with X-rays (the light incident from the Bragg diffraction. ^ The frequency of the generated acoustic wave (7) is f, and the forward speed is "V. Since V = fA", the period of the medium (7) change in the rate of sensation can be obtained. Δίηθ = λ/ 2Λ = If/ 2v It can be seen that the readable seedlings are as shown in Fig. 2. It is assumed that the human light has a wavelength λ, and the deflection angle (Θ) of the incident light caused by the sound wave can be expressed by the following formula. Adjusting the frequency f of the frequency of the acoustic wave (c) to change the incident frequency f can be controlled by controlling the deflection angle of the emitted light (Θ). The frequency of such acoustic wave (c) is determined by the frequency of the frequency signal: through the sound working on this principle The light deflector deflects the scanning plane in the χγ of the object to be scanned to control the incident light plane, and obtains an image of the object to be scanned by taking light from every 6/32 201142354 scanning positions. In many cases, the height of each of the swabs of the object to be tested is different, so in a certain part of the object to be tested, eight (after the unit is focused, the step is scanned to complete its height). Checking, on X, as shown in Figure 3, if the scanning optical system (1) line in the scanning area (2) of the scanning area (2) scanning surface of the surface of the optical focus 'reflected from each scanning position The light can also be accurately focused on the gaps of the gap mask, so as to pass through the slit of the photodetector (4) as shown in Fig. 4, if the line of the object (7) is not accurately formed. Focus, the position of the slit mask (3) is glazed, so it will not be relatively low from the photo-electric device (4). Also τ叱, the light intensity of the spring ^ this can be integrated from the height The different sweeps of the light to form the height of the scan area (three-dimensional topography) results. Table rafts are the limbs as the drawing area However, at this time, the small signal value from each scanning position The difference is based on the inverse = § value and the most reflective angle of each part of the scanning position. The surface characteristics are different. °The reflectance of the scoop, the roughness and the problem. As a result, there is a part of the question that needs to be scanned in the detection accuracy of the whole scan area is not enough: on: 2:. On the basis of the object to be tested, the detection light intensity is applied to each scanning position, and the method of scanning out the light is performed at this base. In particular, the light source is directly changed: ,,,,, but the above method can be scanned After that, the yoke twist # sensation detection accuracy 'but preliminary, according to the _ ling (four) base _ into the 7/32 201142354 reflectance of each scanning position, adjust the intensity of the light generated by the light source, so the overall process time is lengthened The problem is that it is necessary to change the output light from the light source at each scanning position, thereby further increasing the overall processing time, and it is also difficult to adjust the light output of the light source for each scanning position. It is proposed to solve the above problems in the prior art, and an object thereof is to provide a method and system for acquiring an image of a measured object by using a confocal microscope structure, according to In the drawing area, the difference in brightness of the image caused by the difference between the numbers due to the difference in optical characteristics such as the reflectance, roughness, and reflection angle of each scanning position surface is detected from each scanning position. The light filament adjusts the intensity of the scanning light and obtains an image, thereby obtaining the detection precision of the k-scan region. The above object is achieved by the following technical means. One application of the invention is copolymerization: the image of the object to be measured The image acquisition method generates a field above the object to be measured and scans the light (4) to deflect the light on the χγ plane of the scanning area to acquire an image, which includes the following steps: The light is generated by the microscope light source, and the light is transmitted to the optical path of the scanning unit, so that the generated light is irradiated onto the entire scanning area, and the scanning area=the overall® image is acquired and analyzed by the camera to obtain each Scanning position of the silk information; negative efU is a step of mapping the acquired light intensity information of each scanning position to each scanning position Positioning information to set mapping information; carrying step 'which carries the mapping information stored in the information setting step according to the control signal; 8/32 201142354 transmitting step based on the taken ___ and transmitting it to the acousto-optic deflector; ' Set the ear strong shell a', and the output light passes through the scan single two two _=; = after the reflection 'reflected light, _ into the person's description of the position of the sub-breaking recording step, which passes through the photoelectric radiation and enters the scan The light of the unit, the double measurement is reversed by the parent scanning position; the Z-axis scanning step of the photodetection signal detected by the sub-5 recording, which is changed in the unit of 2 units, and the scanning step The recording t distance=and sequentially performs the light detection signals of each scanning position of the transmission step, and records the light detection signals of different scanning distances at the next scanning distance to each image acquisition step at the mesh distance. From the second passer's 'every blessings _ scooping multiple light inspections to the letter;; the financial check out according to the sound intensity: each of the petals of the u 〃 , 并 并 并 并 并 并 并 并 并 并 并 纽 纽 纽 纽 纽 纽 纽 纽 纽The image is set to obtain the sweeping area detection image acquisition step. The light detection signal selected from the plurality of I of each scanning position may be b light for taking, and the pressure for detecting the voltage of the shirt L. Foot, information that is externally wheeled in the information setting step. Each of the swipe positions may be a reflectance optical characteristic of the surface of each bail position. The ancestors and the reflection angles are as described above in this statement. The object can be achieved by the following technical means, which is a method for image-receiving of an object to be measured using a confocal microscope structure, which comprises: a blade-blade light source unit, which is located on the object to be tested, and outputs the same to The object to be tested needs to scan the postal domain; 'transfer the early element', which includes the sound of the low clock# deflected to the light of the gamma ray light source unit of the scanning area, and deflects it and then rotates according to The sound intensity information of the transmitted $ is adjusted and output; the light sweeps the light reflected by the deflection unit to deflect the position; the early 70' has a microscope light source that generates light, and the generated front line lose On the optical path of the scanning unit, the generated image=the whole image is returned to the field, and the whole/knife light of the touch-purchase domain is set in the scanning unit for inputting from the deflection unit. The light rays f' and reflect the light input from each scanning position; ...the light detection 単兀' is located on the side of the scanning unit for detecting the light reflected by the beam splitting unit; & Controlling the deflection unit 'to deflect the light onto the XY plane of the scanning area, and analyzing the intensity of each scanning position in the scanning area through the normal body image acquired by the micromirror unit to set mapping information And setting the sound intensity information by carrying the mapping information, and selecting one of the plurality of light detection signals detected by the light detecting unit and having different Z-axis separation distances at each scanning position to Form a zen image for each scanning position. 10/32 201142354 Polarization! Beam! Can be a semi-transparent mirror (ha, f~) or a knife-optic port. (P〇larizjng Beam Spmter). System with splitter , scanning the permeable/and objective lens, inputting two from the light source unit: to the second lens, the lens barrel, the 1/4 wavelength plate and the objective lens '! ^ ]7 and the light reflected at each scanning position is received from the 兮 丄The early sputum may include: a first concentrating mirror, using,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The cover can be provided with a gap or "heart." The concentrating mirror illuminates the light beam </ RTI> so that in the first portion, the deflection unit preferably includes a deflector for deflecting the light to the two multiplexers and 1 and is separately controlled. In the χγ plane of 4, the light ϋ is preferably the optical path of the light of the beam splitter. Hey. The primary unit is passed through and the optical deflector can be any one of the scanning mirrors. In addition, the deflection unit can be deflected by a pair of sound rays onto the XV plane of the scanning area, and the vibrator is configured to make the light receiving cover better controlled and doubled. To control. Deflected by the deflected light on the Xγ plane and shifted '.' By reading a pair of sound and light, and the microscope unit can include: Brother-Spectator, which is set in the scanning unit 11/32 attack a long plate and the 201142354 for reflecting the input light to illuminate the entire field towel; a microscope light source for generating and outputting light to the knife for outputting from the microscope light source The light reflects through and transmits light that is reflected from the first beam splitter 11 and is incident on the camera to image the entire image of the scanning region of the light passing through the second beam splitter. The control unit may include: , an image "premature %" which analyzes the intensity of each scanning position in the sub-scanning area of the sub-region by the image acquired from the camera. The strong 'h_image analysis unit transmits Light position Strong information 'and map it to the location information of each scanning position; the second part control (four) take_save, store, and transfer the information to the information setting unit; Including the setting unit, the sound strength is set to 70, according to the mapping information carried, the sound intensity information is adjusted to adjust
向母個掃描位置偏轉的光強，並將該聲強資訊傳送到該聲 光偏轉器； I 峨個掃 根據本發明’提供一種應用共聚焦顯鏡結構的被列 物圖像獲取方法及系統’其根據掃描區域中由於每個掃描 位置表面的反祕、轉度及反射㈣光㈣性不同 的檢測信號之間的差所弓丨起的圖像的亮度差，對應地根據 從每個掃描位置檢測出的光強來調節掃描光的強度並獲得 圖像，從而能夠提高掃插區域的檢測精度。 12/32 201142354 【實施方式】 對本發明進行說明之前咖 施例中對具有相同結構的：要說明的是’在以下多個實 ，並在第-實施财進行 ^了相_元件符號 中說明與第-實施例不同^構的說明’而在其餘實施例 下面，參照圖式對本於 共聚焦顯微鏡結制_物提供的應用 的說明。 η勿圖像獲取方法及系統進行詳細 ㈣H ί本發明的第—實施例所提供的應用共聚隹顯微. 鏡結構的被測物圖像獲取系_示意圖。 …^ 物Η俊所不本舍明的應用共聚焦顯微鏡結構的被測 ^像獲取减包含光源單元（】〇)、偏轉單元㈤、掃 = 光檢㈣元（4G)、控制單^⑼）及顯微 鏡早το (60)。 、，該光源單元（10)位於被測物⑴的掃描區域上方， 並可包含光源（11)與光擴散器㈠2)。 其中，該被測物（T)可位於預定的平台上，該平台可 透過預定的驅動手段控制為能夠在z軸方向上移動。 該光源（11)是He-Ne雷射器或者二極體雷射器等用 於產生光線並將此光線向被測物（丁）的2軸方向輸出的雷 射器。 田 該光擴散器（12)位於光源（n)的前方，用於對從 光源（12)輸出的光線進行空間過濾以使光線變形及= 後將其輸出。 汽放 該偏轉單元（20)可以包含用於把入射光向X輛方向 或者Y轴方向偏轉的聲光偏轉器（2丨）、用於向與前述的偏 13/32 201142354 轉軸的方向不同的另一軸向偏轉來自該聲光偏轉器（21) 的光線的光偏轉器（22)。 即，來自光源（12)的入射光可透過偏轉單元 偏轉到掃描區域的χγ平面上。 和習知技術同樣地，該聲光偏轉器（21)根據由後述 之控制單元（5〇)傳送的聲頻，由壓電壓電致動器按一定 ，期加屡介f，以生成狀的聲波，從而讓人射i按一定 角度向第一軸方向偏轉。 眾由控制單元（50)傳送的聲強資訊，壓 ^其^按—定強度加壓介#，從射光的強度後 π的=光偏轉器（21)的光強⑴與所傳送聲強資 也的聲強（？）具有關聯。 即在各向同性相互作用（is_ ⑽ 用以下公式來進行說明。 τ ΛLight intensity deflected to the parent scanning position, and the sound intensity information is transmitted to the acousto-optic deflector; I 峨 扫 according to the invention 'providing a method and system for acquiring an image of an object using a confocal mirror structure 'It is based on the difference in brightness between the images in the scanning area due to the difference between the detection signal of the surface of each scanning position, the rotation and the reflection (four) light (four), correspondingly according to each scanning The intensity of the detected light is used to adjust the intensity of the scanning light and obtain an image, thereby improving the detection accuracy of the swept area. 12/32 201142354 [Embodiment] The present invention has been described with respect to the same configuration in the following embodiments: "In the following, it is described in the following. Description of the different embodiments of the first embodiment, while in the remaining embodiments, the description of the application provided by the confocal microscope is described with reference to the drawings. ηDo image acquisition method and system are detailed (4) H ί 本 本 。 应用 。 。 。 。 。 。 。 。 。 。 。 应用 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 ...^ Η Η 所 所 的 的 的 的 的 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 共 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含And the microscope is early το (60). The light source unit (10) is located above the scanning area of the object (1) and may include a light source (11) and a light diffuser (1) 2). Wherein, the object to be tested (T) can be located on a predetermined platform, and the platform can be controlled to be movable in the z-axis direction by a predetermined driving means. The light source (11) is a laser that is used to generate light and output the light to the object in the direction of the two directions of the object (D), such as a He-Ne laser or a diode laser. The light diffuser (12) is located in front of the light source (n) and is used to spatially filter the light output from the light source (12) to distort the light and then output it. The deflecting unit (20) may include an acousto-optic deflector (2丨) for deflecting incident light in the X or Y-axis direction for different directions from the aforementioned offset 13/32 201142354 shaft. Another optical deflector (22) that axially deflects light from the acousto-optic deflector (21). That is, incident light from the light source (12) can be deflected by the deflection unit to the χγ plane of the scanning area. Similarly to the conventional technique, the acousto-optic deflector (21) is generated by a piezoelectric piezoelectric actuator according to an acoustic frequency transmitted by a control unit (5A) to be described later, and is formed in a predetermined manner. Sound waves, so that the person i can deflect at a certain angle in the direction of the first axis. The sound intensity information transmitted by the control unit (50) is pressed and pressed to determine the intensity of the light π = the light intensity (1) of the light deflector (21) and the transmitted sound strength Also the sound intensity (?) has an association. That is, the isotropic interaction (is_(10) is explained by the following formula. τ Λ
Τ 強；Μ、H 1(^人射光的強度；11是輸出光的強度；P是聲 nL是 長。 士 〜w /U 口/义，r疋写r 聲光偏轉器的特徵係數；λ〇是入射光的波 下 ，也可用A ®向異性相互作用（anisotropic interaction) 即，說明與聲強資訊的聲強之間的關係。 能夠獨自不受偏轉角與聲頻具有關聯的影響， 該光偏轉哭、Τ strong; Μ, H 1 (^ the intensity of the human light; 11 is the intensity of the output light; P is the sound nL is long. ± w / U mouth / meaning, r 疋 write r characteristic coefficient of the acousto-optic deflector; λ 〇 is the wave of incident light, and A ® can also be used to explain the relationship between the sound intensity and the sound intensity of the sound intensity information. It can be independently affected by the deflection angle and the sound. Deflected,
。。I 2)可以是掃描鏡、檢流計或者MEMS 14/32 201142354 f中任何一個’其被配置為根據從後述之控制單元（5〇) 傳达的預定的驅動錢驅動而使人射光向第二軸方向偏轉 0 透過如此的聲光偏轉器⑵）與光偏轉器（22)，光線 =偏轉到掃描區域的Χγ平面上，尤其是，透過聲光偏 轉為⑵）偏誠紐，其強紐調節後輪出。 該掃描單元⑼。）包含殼體（3〇Α)，並在該殼體（3〇α 的内側k光源單TL (1〇)方向依次設置有分光器⑶ )、，描透鏡（32 )、鏡筒透鏡（33 )、1/4波長板（34 )及 物鏡（3)) ’且能_過預定的_手段在z軸方向上移動 〇 透過聲光偏轉器（21)偏轉的光線經由分光器⑶）、 ==)、鏡筒透鏡(33)、1/4波長板㈤及物鏡 (5^物描到掃描區域中每個掃描位置上，而在每個掃 咖'經由物鏡(35)、1/4波長板㈤、鏡 (32)後在分光器（31)處反射。 或者偏(31)可由半透日収射鏡（halfm崎） 何-個構Ϊ光器（Ρ—ίη⑽⑽Splitter，PBS )中任 Ϊ ’並被構成為根據波長其透射率與反射率士 义化，藉此能夠分離兩個光線。 一 =器⑻設置在聲光偏轉器⑺)與光偏韓 光11 (31)能夠讓從聲光偏轉哭（2〇 =偏轉而射入的光線透過，並讓從掃描區域射二21 波長板（34)的過程中其波長被改變而反射、。' 忒 離果’透過分光器（31)與1/4波長板（34)，。可以 九先源早疋（10)射向掃描區域的光線與從掃描區域 15/32 201142354 入的光線。 掃描透鏡（32)被設置為可讓透過光偏轉器（22)偏 轉的光線在上部平面（32a)聚焦，而在上部平面（32a) 聚焦的光線經過鏡筒透鏡⑶）後輸出為平行光，並傳遞 到物鏡（35)。 透過這種聲光偏轉器（21)偏轉的光線能夠遂過掃描 透鏡（32)與鏡筒透鏡（33)準確地傳遞到物鏡（35)。 該光檢測單元（40)包含第一聚光鏡（41)、受光罩（ 42)及光電楝測器⑷），藉以檢測從掃描區域中每個掃描 位置反射過來的光線。 第-聚光鏡（41)接收透過前述1/4波長板（34)反射 的光線，並使之成為聚光光東。 ::圖受光罩（42)可以是具有縫隙（似）的縫 具有 (pinhQle)的針孔掩膜（未圖示 )，可透過該縫隙（42、—' 41)的聚光光束。）或者針孔接收來自第-聚光鏡（ 光電探測器（43、+ 受光罩⑼的縫隙二極體等構成，其接收透過 氣信號。 ’…（a)的光線，並將其光強轉換為電 该顯微鏡單元（60)力八笙八， 源⑽、概魏（63 絲(61 )、顯微鏡光 部（65)。 一刀光益（64)與圖像獲取 與上述分光L (61)與第二分光器（⑷可具有 分光器由半：月反射：叫而在本實施例中該第- 该第一分光器（61)設置在鏡筒透鏡（33)與1/4波長 16/32 201142354 板（34)之間，用以把透過顯微鏡光源（62)輸出的光線 射入掃描單元（3〇)的光路上’藉以對整個掃描區域照射 光線，並將由掃描區域反射的光線反射，以供圖像獲取部 (、65)獲取。 該顯微鏡光源（62)由與該光源單元（1〇)的雷射部 (、11)等對應的部件構成，用以輸出光線，擴散透鏡（63 )設置為其用以擴散來自顯微鏡光源（61)的輸出光。 該第二分光器（64)設置為其將由顯微鏡光源（62) 輪出的光線反射到第一分光器（61 )，並使由第一分光器（ 6〇傳遞的光線透過。 °° 該圖像獲取部（65)包含用以匯集透過第二分光器（ 64)~的光線的第二聚光鏡（65B)、以及接收所匯集的光線 並後取掃描區域的整體圖像的照相機（65A)。 顯微鏡單元（60)可透過掃描單元（3〇)的光路對整 個掃彳曰區域照射光線，並藉此迅速地獲取掃描區域的整體 圖像。 . 圖6是圖5中控制單元的具體結構方塊圖。如圖5及 圖6所示，該控制單元（50)包含資訊設置單元（51)、圖 像分析單元（52)、映射資訊設置單元（53)、映射資訊搭 載單元（54)及成像單元（55)。 、 ° 該資訊設置單元（51)包含聲頻資訊設置單元（51Α) 、聲強資訊設置單元（51Β)及驅動資訊設置單元（5iC) 〇 聲頻資讯设置單元（51A)可設置聲光偏轉器（21、）的 偏轉角的控制信號：聲頻資訊，驅動資訊設置單元（51C) 可設置光偏轉器（22)的偏轉角的控制信號：驅動資訊。 17/32 201142354 。聲強資訊設置單元（51B)可設置用岐制柄聲光偏 轉态（21)輸出的光強的控制信號：聲強資訊。 其中，在每個設置單元設置的每個資訊可由管理者設 置’或者可以被設置為’基於後述之映射資訊搭载單元（ 54)根據财的控制信號所搭載的掃描區域的映射資訊， 光電探測器（43)從該掃描區域的每個掃描位置上的光線 所獲取的光檢測信號能夠維持在一定程度以上。 結果聲光偏轉器⑵）根據所傳送的聲頻資訊，使 由或者γ軸方向中任-個方向偏轉的同時，根 據聲強資訊其強度被調節後。 而且：光偏轉器（22)根據所傳送的驅動資訊，使入 射光朝與聲光偏轉器（21)引叔的 、 轉後將其輸出。 > 引__方向不同的軸向偏 藉此，射入偏轉單元（2〇) 域的，其. . I 2) may be a scanning mirror, a galvanometer or any one of MEMS 14/32 201142354 f' which is configured to be illuminated according to a predetermined driving money conveyed from a control unit (5〇) described later The two-axis direction deflection 0 passes through such an acousto-optic deflector (2)) and the light deflector (22), the light = deflected to the Χ γ plane of the scanning area, in particular, the sound and light is deflected into (2)) Adjust after the wheel. The scanning unit (9). Included in the housing (3〇Α), and in the housing (3〇α, the inner k-source single TL (1〇) direction is provided with a beam splitter (3)), a drawing lens (32), a barrel lens (33) ), the 1/4 wavelength plate (34) and the objective lens (3)) 'and can pass the predetermined _ means to move in the z-axis direction. The light deflected by the acousto-optic deflector (21) is transmitted via the beam splitter (3)). =), barrel lens (33), quarter-wave plate (five) and objective lens (5^ traced to each scanning position in the scanning area, and in each sweeping coffee' via objective lens (35), 1/4 wavelength The plate (5) and the mirror (32) are reflected at the beam splitter (31). Or the partial (31) can be used by a semi-transparent day-receiving mirror (halfm), a structure-lighting device (Ρ-ίη(10)(10)Splitter, PBS). 'And is configured to convert the transmittance and reflectivity according to the wavelength, thereby being able to separate the two rays. set in the acousto-optic deflector (7)) and the light-biased illuminator 11 (31) can make the sound The light deflects and cries (2〇= deflected and the incident light passes through, and the wavelength is changed and reflected during the process of shooting the 21-wavelength plate (34) from the scanning area. ''果果' through the optical splitter (31) With 1/4 Wavelength plate (34), which can illuminate the scanning area with light from the scanning area 15/32 201142354. The scanning lens (32) is set to allow the transmitted light deflector (22) The deflected light is focused on the upper plane (32a), and the light focused on the upper plane (32a) passes through the barrel lens (3) and is output as parallel light and transmitted to the objective lens (35). Light deflected by such an acousto-optic deflector (21) can be accurately transmitted to the objective lens (35) across the scanning lens (32) and the lens barrel (33). The light detecting unit (40) includes a first condensing mirror (41), a light receiving cover (42), and a photodetector (4) for detecting light reflected from each scanning position in the scanning area. The first condensing mirror (41) receives the light reflected by the 1/4 wavelength plate (34) and makes it a concentrated light. The pattern mask (42) may be a slit having a slit (pinhQle) pinhole mask (not shown) through which the concentrated light beam of the slit (42, -' 41) can pass. Or the pinhole receives the light from the first concentrating mirror (photodetector (43, + mask (9), which receives the transmitted light signal. '...(a), and converts its light intensity into electricity) The microscope unit (60) has a force of eighty-eight, source (10), general Wei (63 filament (61), microscope light section (65). Yidao Guangyi (64) and image acquisition and the above-mentioned spectroscopic L (61) and second The beam splitter ((4) may have a beam splitter by half: moon reflection: called and in the present embodiment the first - the first beam splitter (61) is disposed in the barrel lens (33) with a quarter wavelength 16/32 201142354 board Between (34), the light output through the microscope light source (62) is incident on the optical path of the scanning unit (3〇) to illuminate the entire scanning area and reflect the light reflected by the scanning area for the picture. The image acquisition unit (65) is configured by a component corresponding to a laser portion (11) of the light source unit (1) for outputting light, and the diffusion lens (63) is set to It is used to diffuse the output light from the microscope source (61). The second beam splitter (64) is set to The light emitted by the microscope light source (62) is reflected to the first beam splitter (61), and the light transmitted by the first beam splitter (6〇 is transmitted. °° The image acquisition unit (65) is included for collection and transmission. a second concentrating mirror (65B) for the light of the second beam splitter (64), and a camera (65A) for receiving the collected light and taking an overall image of the scanned area. The microscope unit (60) is permeable to the scanning unit (3) The light path of the 彳曰) illuminates the entire broom area, and thereby the overall image of the scanned area is quickly obtained. Fig. 6 is a block diagram showing the specific structure of the control unit of Fig. 5. As shown in Fig. 5 and Fig. 6, The control unit (50) includes an information setting unit (51), an image analyzing unit (52), a mapping information setting unit (53), a mapping information loading unit (54), and an imaging unit (55). (51) comprising audio information setting unit (51Α), sound intensity information setting unit (51Β) and driving information setting unit (5iC) 〇 audio information setting unit (51A) can set the deflection angle of the acousto-optic deflector (21,) Control signal: audio information The driving information setting unit (51C) can set the control signal of the deflection angle of the optical deflector (22): driving information. 17/32 201142354. The sound intensity information setting unit (51B) can be set to use the shackle sound and light deflection state (21 The output light intensity control signal: sound intensity information. Among them, each information set in each setting unit can be set by the manager 'or can be set to 'based on the mapping information loading unit ( 54) according to the control The mapping information of the scanning area mounted on the signal, the photodetection signal obtained by the photodetector (43) from the light at each scanning position of the scanning area can be maintained at a certain level or more. As a result, the acousto-optic deflector (2) is deflected by either or both of the γ-axis directions based on the transmitted audio information, and its intensity is adjusted according to the sound intensity information. Further, the optical deflector (22) causes the incident light to be directed to the acousto-optic deflector (21) according to the transmitted driving information, and then outputs it. > The axial direction of the __ direction is different, thereby entering the deflection unit (2〇) domain,
=像刀析早元⑼構成為從由照相機 的知描區域的全體圖像分析 X ，，置的光強資訊後，將 強貪訊傳送到映射資訊設置單元⑸）。㈣田位置的先 該映射資訊設置單元 單元C52)傳迭的每個掃 成為將由圖像分析 描位置的位置資訊二光，資訊映射到每個掃 儲存裝置。 ”、、> 貝Λ，並將其保存到預定的 該映射資訊搭载單元 载相應掃描區域__ 11 ή/^被構成為根據指示為搭 18/32 201142354 元（51 )。 該成像單元（55)可被構成為其與光電探測器（43) 相連接，並從該被測物（T)與該掃描單元（30)之間的Z 軸相隔距離的變化過程中所檢測的每個掃描位置的多個光 檢測信號中選擇其中一個，藉以形成每個掃描位置的信號 強度（圖像）。 其中，所選擇的光檢測信號可以是光電探測器（43) 在最南電壓時的光檢測信號。 結果’能夠構成為可記錄每個掃描位置的圖像’並透 過預定的演算法形成掃描區域的整體圖像，該整體圖像則 透過預定的顯示裝置得到顯示。 下面說明採用了上述應用共聚焦顯微鏡結構的被測物 圖像獲取系統的圖像獲取方法。圖7是應用了圖5所示系 統的被測物圖像獲取方法的演算法。 如圖5至圖7所示，由顯微鏡光源（62)產生光線， 並將其輸出到第二分光器（64，S10)。 第二分光器（64)反射來自顯微鏡光源（62)的入射 光，並將其輸入於第一分光器（61，S11)。 所輸入的光線透過第一分光器（61)反射後，透過掃 描單元（30)的光路照射到整體掃描區域（S12)。 由掃描區域反射的光線射入於掃描單元（30)，並透過 第一分光器（61)朝第二分光器（64)方向反射（S13)。 由第一分光器（61)反射的光線通過第二分光器（64 )，而所通過的光線透過第二聚光鏡（65B)匯集後，由照 相機（65A)獲取掃描區域的整體圖像（S14)。 所獲取的掃描區域的整體圖像傳送到圖像分析單元（ 19/32 201142354 =圖像》析單疋（a)透過所傳送的整體圖像分析每個 掃描位置的光線’以獲取每個掃描位置的光強資訊後將复 傳送到映射資訊設置單it (53，S15)。 、 ^傳ϋ到映射資訊設置單元（53)的每個掃描位置的 光強資訊映射到每個掃描位置的位置資訊，藉以設置映射 貢訊後將其保存到預定的儲存裳置（S16)。 如此透過顯微鏡單元（60)獲取掃描區域的整體圖像 而設置每個掃描位置的_資訊的方式，與習知的對整個 掃描區域進行-次掃描後，根據每個掃描位置的表面資訊 设置光強並付儲存的方式相比，更能有效岐速地設置 並儲存映射資訊。 /妾者、’,由設置在被測物⑺上方的光源單元（10)產 生光線’並將此光線輸出到掃描區域（S20)。 2俊’如$由f理者施加指示為搭鑛應於掃描區域 中各抑描位置的映射:#訊的控制錢’由映射資訊搭載單 ^ (5€從所儲存的映射資訊中搭載相應掃描區域的映射 資訊，亚將其傳送到資訊設置單元（5l，s3〇)。 .資訊設置單元（51)基於所傳送的映射資訊設置聲頻 資訊與驅動資訊，以使域向每偏輪位置偏轉，並設置 聲強資訊’以使在每個掃描位置反射並在找探測器⑷ )檢測出的光強被調節為已設找光強後被檢測（⑽ 其中，已設定的光強可由管理者進行設置。 疋（2〇)根據所傳送的聲頻資訊與驅動資訊使 入i t尤其是’聲光偏轉器（21)在偏轉入射光的 同時，根據聲強資訊調節光強後予以輸出（S5〇)。 然後，所輸出的光線透過掃描單元（3〇)掃描到每個 20/32 201142354 掃描刪新輪入於掃描單元(3〇,叫 後’由光電二的t線透過分光f (31)反射 記錄所檢測到的光檢測信號而成像皁70 (55)則 之門軸上’將該掃描單元（3G)與該被測物⑺ (_、）。改變預定轉，並依次執行步驟S60〜步驟S7〇 朝"^預&距離可以由管理者設置，該步驟 S8〇可以 战诼早兀〔55)可在透過該步驟S80檢測出y ^艮據母墙描位置在z軸上的距離變化喊得的多個弁 =信號巾選擇任意-個，並纽基礎上軸每個掃描= 、圖像，藉此後取掃描區域的整體圖像（S9〇 )。 丄其中，所選擇的光檢測信號可以是光電探測器（幻） 的域強度為最大時，即光電探測器（43)在最大 的光檢測信號。 土守 透過這種方法，能夠盡可能地平均化根據每個掃描位 置表面的光學特性：反射比、粗糙度及反射角等的不同而 不同的所獲取圖像（光檢測信號）的光強之差，並藉此能 提高被測物的檢測精度。 而且，能夠使透過聲光偏轉器輸出的光線偏轉的同時 5周節光強’因此無需設置用以調節強度的額外的控制手段 ’可對掃描區域進行高精度及迅速的掃描。 另一方面，作為該映射資訊設置方法的另一例，可從 外部直接輸入包含每個掃描位置光強資訊的映射資訊。 其中’從外部輸入的映射資訊可以是含有對掃描區域 21/32 201142354 的表面資訊及光強資訊的圖。 圖中各掃描位置 因此，當輸入圖時，能夠簡便地根據 的光強資訊’而設置及儲存映射資訊。 …^供_情況下，也可與其他方法_地由映射資 w合載早元（54)根據預定的控_號搭鱗描區域中每 個掃描位㈣崎資缝，將其傳送職訊設置單元（51 透過上述方法能夠簡便地設置映射資訊，且以此為美 ，調節光線，以最大限度地發揮光電探測器的性能後用^ 節後的光線進行掃描，從而提高檢測精度。 下面為一具體例說明透過本發明的上述 與習知圖像獲取方法獲取的圖像。 &方法 在本具體例中，係假設被測物是固定的， 單元在Ζ軸方向上移動’並對同樣的掃描區域進行掃描。田 圖8是用以表示根據習知圖像獲取方法獲取的每個掃 描位置的光檢測信號強度的曲線圖，gj 9是根據圖8的曲 線圖結果所獲取的圖像。 請參見圖8’其表示的是具有單—強度的光線掃描到掃 描區域，掃描單元（30)與被測物（τ)在z 離多次被調節的情況下在掃描位置丨〜掃描位置4上記^的 、按掃描位置的光檢測信號。 、 其中，對於掃描位置1與掃描位置2而言，在掃描單 元與被測物之間的相隔距離為40卿時檢測到的光強最=， 而該40 μιη可以認定為掃描位置丨與掃描位置2的高度。 而且，對於掃描位置3而言，可以看出整體:“光 強過弱的狀態，對於掃描位置4而言，在4() _〜的卿處 22/32 201142354 處於光強過強的狀態。 透過如此被檢測出之在不同 測信號，成像單元在光檢測信 ^^目=離下的光檢 測信號，並以此私翻擇取大電壓下的光檢 圖像。 ’、’、土 ν α圖所示的每個掃描位置的 即，亮處過亮，暗處過暗，從 置上光強的偏差嚴重的圖像 :導^的掃描位 。 取…、此導致檢測精度下降 法的結果如下。 '在每個掃描位置上具有不同的^置㈣⑽而獲取的 得的光檢測信號大小的曲線 相/=^的情況下獲 圖結果而獲取的圖像。 Q疋根據圖ίο中曲線 如圖10所示，如果透過預定 位置卜掃描位置4的映射音 合載已含知描 中的、在母個掃描位置上檢測 1 :射'“ 聲強資訊。 叱強貝5孔，適當地設置 如果假設包含於映射資訊中 ' 方法的、在不同的z軸相F 貝0人土於έ亥習知 J町乙釉相隔距離下檢 描位置相對於…二 έ置為，錢上級測信號過低的掃描位置3在相應的2 轴抓距離下顯不的光檢測信號較高，整體 測 過高的掃描位置4在相應的ζ軸相 ::二 信號較低。 W距離下顯不的光檢測 ’聲光偏轉器可按每個掃 W位置调即先強後輸出’而隨之按每個掃描位置檢測出的 23/32 201142354 光檢測信號可以如圖中所示的曲線圖。 礎上在檢:=按z軸相隔距離的光檢號的展 礎上，成像早疋在光檢測信號中選擇最Af壓 ^基 信號，並以此絲礎形成每個掃描位置的圖像，^則 示。 _ U所 即，能夠使暗處變亮一定程度以上，使亮處變曰立一 程度，從而減少每個掃描位置上的光強偏 口疋 精度。 檢蜊 m佩攸母徊坷描位置檢測到的光強而势 資訊’從而能_節掃描光_光強而獲得平均 ，進而能夠提升整體掃描區域的檢測精度。 θ' 本發明的_料舰於上述實施例，在後述之申士 專利範圍内可以實施多種形態的實施例。在不㈣申^ 利範圍所要求保護的本發明要旨的情況下，本發明所^ 術領域十具有通常知識者均能進行變化的範圍理應屬於 發明的保護範圍。 u ' 若採用本發_應料聚域微鏡結構的被測物圖像 獲取方法及系統，就能根據掃描區域中由於每個掃描位置 表面的反射比、粗糙度及反射角等光學特性不同而致的檢 測信號之間的差所引起的圖像的亮度差，對應地根據從每 個掃描位置檢測出的光強來調節掃描光的強度並獲得圖像 ，藉以提高掃描區域的檢測精度。 【圖式簡單說明】 圖1是聲光偏轉單元的示意圖。 圖2是射入聲光偏轉單元的光線轉換圖。 圖3及圖4是共聚焦顯微鏡結構的聚焦圖。 24/32 201142354 圖5是採用了本發明第一實施例所提供的共聚焦顯微 鏡結構的被測物圖像獲取系統的示意圖。 圖6是圖5中控制單元的具體結構圖。 圖7是採用了圖5所示系統的被測物圖像獲取方法的 演算法。 圖8是用以表示根據習知圖像獲取方法所獲得的每個 掃描位置的光檢測信號大小的曲線圖。 圖9是根據圖8所示曲線圖結果而獲得的圖像。 圖10是用以表示根據映射資訊設置聲強資訊而獲取的 、在每個掃描位置上具有不同的Z軸相隔距離的情況下獲 得的光檢測信號大小的曲線圖。 圖】1是根據圖〗〇所示曲線圖結果所獲得的圖像。 【主要元件符號說明】 1. 掃描光學糸統 2. 掃描區域 3. 縫隙掩模 4. 光電探測器 10. 光源單元 11. 光源 12. 光擴散器 20. 偏轉單元 21. 聲光偏轉器 22. 光偏轉器 30. 掃描單元 30A.殼體 31. 分光器 25/32 201142354 32. 掃描透鏡 32a.平面 33. 鏡筒透鏡 34. 1/4波長板 35. 物鏡 40. 光檢測單元 41. 第一聚光鏡 42. 受光罩 42a.縫隙 43. 光電探測器 50. 控制單元 51. 資訊設置單元 51A.聲頻資訊設置單元 51B.聲強資訊設置單元 51C.驅動資訊設置單元 52. 圖像分析單元 53. 映射資訊設置單元 54. 映射資訊搭載單元 55. 成像單元 60. 顯微鏡單元 61. 第一分光器 62. 顯微鏡光源 63. 擴散透鏡 64. 第二分光器 65. 圖像獲取部 65A.照相機 26/32 201142354 65B.第二聚光鏡 a. 壓電轉換器 b. 介質 c. 聲波 T. 被測物= The knife-like early element (9) is configured to analyze the intensity of the information from the entire image of the camera's known area, and then transmit the strong information to the mapping information setting unit (5). (4) The position of the field first The mapping information setting unit unit C52) Each of the overlapped scans is a positional information that will be imaged by the image analysis, and the information is mapped to each of the scan storage devices. ",," and the beggar, and save it to the predetermined mapping information carrying unit carrying the corresponding scanning area __ 11 ή / ^ is configured to be based on the indication 18/32 201142354 yuan (51). 55) each scan that can be configured to be connected to the photodetector (43) and separated from the Z-axis of the object (T) and the scanning unit (30) One of the plurality of photodetection signals at the position is selected to form a signal intensity (image) of each scan position, wherein the selected photodetection signal may be photodetection of the photodetector (43) at the southernmost voltage. The result 'can be configured to record an image of each scanning position' and form an overall image of the scanning area through a predetermined algorithm, the overall image being displayed through a predetermined display device. An image acquisition method of a sample image acquisition system of a confocal microscope structure. Fig. 7 is an algorithm of a method for acquiring an object image to which the system shown in Fig. 5 is applied. As shown in Fig. 5 to Fig. 7, microscope The light source (62) generates light and outputs it to the second beam splitter (64, S10). The second beam splitter (64) reflects the incident light from the microscope source (62) and inputs it to the first beam splitter ( 61, S11) The input light is reflected by the first beam splitter (61), and then transmitted through the optical path of the scanning unit (30) to the entire scanning area (S12). The light reflected by the scanning area is incident on the scanning unit (30) And passing through the first beam splitter (61) toward the second beam splitter (64) (S13). The light reflected by the first beam splitter (61) passes through the second beam splitter (64), and the light that passes through After being collected by the second condensing mirror (65B), the entire image of the scanning area is acquired by the camera (65A) (S14). The entire image of the acquired scanning area is transmitted to the image analyzing unit (19/32 201142354 = Image) The analysis unit (a) analyzes the light of each scanning position through the transmitted overall image to obtain the light intensity information of each scanning position and then transmits the information to the mapping information setting list it (53, S15). ϋ to each scanning position of the mapping information setting unit (53) The light intensity information is mapped to the position information of each scanning position, thereby setting the mapping message and saving it to the predetermined storage spot (S16). Thus, each unit of the scanning area is acquired through the microscope unit (60) to set each The way of scanning the _ information of the position is compared with the conventional scanning of the entire scanning area, and the light intensity is set and stored according to the surface information of each scanning position. Mapping information. /妾, ', generates light by the light source unit (10) disposed above the object (7) and outputs the light to the scanning area (S20). 2 Jun' The mapping of the ore should be in the scanning area: the control of the money is controlled by the mapping information. (5€ From the stored mapping information, the mapping information of the corresponding scanning area is carried, and the information is transmitted to the information. Set the unit (5l, s3〇). The information setting unit (51) sets the audio information and the driving information based on the transmitted mapping information, so that the domain is deflected to each of the positional positions, and the sound intensity information is set to reflect at each scanning position and find the detector (4) The detected light intensity is adjusted to be detected after the light intensity has been set ((10) where the set light intensity can be set by the administrator. 疋(2〇) according to the transmitted audio information and drive information The 'acoustic light deflector (21), while deflecting the incident light, adjusts the light intensity according to the sound intensity information and outputs it (S5〇). Then, the output light is scanned through the scanning unit (3〇) to each 20/. 32 201142354 Scanning and deleting the new wheel into the scanning unit (3〇, called 'after the t-line of the photoelectric two through the spectroscopic f (31) reflection recording the detected light detection signal and imaging the soap 70 (55) on the door axis 'The scanning unit (3G) and the measured object (7) (_,) are changed by a predetermined rotation, and sequentially performing steps S60 to S7 to the "^pre & distance can be set by the administrator, the step S8〇 Can be wary early [55] can be checked through this step S80 y 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮 艮The overall image (S9〇). In which the selected light detection signal can be the maximum intensity of the photodetector (magic) when the domain intensity is maximum, that is, the photodetector (43) is at the maximum light detection signal. Method for averaging as much as possible the difference in light intensity of the acquired image (photodetection signal) according to the optical characteristics of the surface of each scanning position: different reflectance, roughness, and reflection angle, and This can improve the detection accuracy of the object to be tested. Moreover, the light output through the acousto-optic deflector can be deflected while the 5-week-thickness is strong. Therefore, there is no need to provide an additional control means for adjusting the intensity to accurately scan the scanning area. On the other hand, as another example of the mapping information setting method, mapping information including light intensity information of each scanning position can be directly input from the outside. The information can be a map containing surface information and light intensity information on the scanning area 21/32 201142354. Each scanning position in the figure, when inputting the picture, can easily set and store the mapping information according to the light intensity information. ^ For the case of _, it can also be combined with other methods _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The unit (51 can easily set the mapping information by the above method, and as a beauty, the light is adjusted to maximize the performance of the photodetector and then scan with the light after the section, thereby improving the detection accuracy. The specific example illustrates an image obtained by the above-described conventional image acquisition method of the present invention. & Method In this specific example, it is assumed that the object to be measured is fixed, the unit moves in the x-axis direction, and the same scanning area is scanned. Field 8 is a graph for indicating the intensity of the light detection signal for each scanning position acquired according to the conventional image acquisition method, and gj 9 is an image acquired based on the result of the graph of Fig. 8. Referring to FIG. 8', it is shown that the light having the single intensity is scanned to the scanning area, and the scanning unit (30) and the measured object (τ) are in the scanning position 扫描 to the scanning position 4 when the z is separated a plurality of times. The light detection signal of the scanning position is marked as above. Wherein, for the scanning position 1 and the scanning position 2, the detected light intensity is the most when the distance between the scanning unit and the object to be tested is 40 qing, and the 40 μm can be regarded as the scanning position 丨 and scanning The height of position 2. Further, as for the scanning position 3, it can be seen that the whole state: "the light intensity is too weak, and for the scanning position 4, the brightness of the 4 () _~ 22/32 201142354 is too strong. Through the detection of the different measured signals, the imaging unit is in the light detection signal = the lower light detection signal, and the private inspection image is taken at a large voltage. ', ', soil ν For each scanning position shown in the α image, the bright portion is too bright, the dark portion is too dark, and the image from which the deviation of the light intensity is severe is severe: the scanning position of the guide ^. Takes ..., which leads to the detection accuracy reduction method The result is as follows: 'The image obtained by obtaining the result of the curve of the photodetection signal size obtained with different (4) (10) at each scanning position. Q疋 according to the curve in Fig. As shown in FIG. 10, if the mapping tone of the scanning position 4 transmitted through the predetermined position is already included in the known scanning position, the sound intensity information is detected at the mother scanning position. Stubborn Bay 5 holes, properly set if the assumption is included in the mapping information 'methods' in different z-axis phase F shell 0 people in the έ 习 习 知 知 J J 乙 乙 釉 检 检 检 检 检 检 检 检The position is that the scanning position of the upper level of the signal is too low, and the light detection signal is higher under the corresponding 2-axis grasping distance. The overall measured high scanning position 4 is in the corresponding paraxial phase:: low. The light detection under the W distance is 'the sound and light deflector can be adjusted according to the position of each sweep W, that is, the first strong output, and then the 23/32 201142354 light detection signal detected by each scan position can be as shown in the figure. The graph shown. On the basis of the inspection: = according to the z-axis separation distance of the optical inspection number, the imaging early in the light detection signal to select the most Af pressure base signal, and the formation of each scan position image, ^ then show. _ U means that it can brighten the darkness to a certain extent or more, and make the bright spot stand a certain degree, thereby reducing the accuracy of the light intensity at each scanning position. The detection of the light intensity detected by the position of the mother's mother can be obtained by averaging the scanning light _ light intensity, thereby improving the detection accuracy of the entire scanning area. θ' The ship of the present invention can be embodied in various embodiments in the above-described embodiments, and various embodiments can be implemented within the scope of the patent application. In the case of the gist of the invention as claimed in the scope of the invention, the scope of the invention can be varied within the scope of the invention. u 'If the method and system for acquiring the object image using the micro-mirror structure of the present invention are different, the optical characteristics such as the reflectance, roughness and reflection angle of the surface of each scanning position in the scanning region can be different. The difference in brightness of the image caused by the difference between the detection signals is correspondingly adjusted according to the intensity of light detected from each scanning position to obtain an image, thereby improving the detection accuracy of the scanning area. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of an acousto-optic deflection unit. 2 is a light conversion diagram of the incident sound and light deflection unit. 3 and 4 are focus views of the confocal microscope structure. 24/32 201142354 Fig. 5 is a schematic diagram of an object image acquisition system using the confocal microscope structure provided by the first embodiment of the present invention. Figure 6 is a detailed structural view of the control unit of Figure 5. Fig. 7 is a diagram showing an algorithm for acquiring an image of a measured object using the system shown in Fig. 5. Fig. 8 is a graph for showing the magnitude of a light detecting signal for each scanning position obtained by a conventional image capturing method. Fig. 9 is an image obtained based on the results of the graph shown in Fig. 8. Fig. 10 is a graph showing the magnitudes of photodetection signals obtained in the case where the Z-axis separation distances are obtained at each scanning position, which are obtained by setting the sound intensity information based on the mapping information. Fig. 1 is an image obtained according to the result of the graph shown in Fig. 。. [Main component symbol description] 1. Scanning optical system 2. Scanning area 3. Slit mask 4. Photodetector 10. Light source unit 11. Light source 12. Light diffuser 20. Deflection unit 21. Acousto-optic deflector 22. Light deflector 30. Scanning unit 30A. Housing 31. Beam splitter 25/32 201142354 32. Scanning lens 32a. Plane 33. Barrel lens 34. Quarter wave plate 35. Objective lens 40. Light detecting unit 41. Condenser 42. Photoreceptor 42a. Slit 43. Photodetector 50. Control unit 51. Information setting unit 51A. Audio information setting unit 51B. Sound intensity information setting unit 51C. Drive information setting unit 52. Image analysis unit 53. Information setting unit 54. Mapping information mounting unit 55. Imaging unit 60. Microscope unit 61. First beam splitter 62. Microscope light source 63. Diffusion lens 64. Second beam splitter 65. Image acquisition unit 65A. Camera 26/32 201142354 65B. Second concentrating mirror a. Piezoelectric converter b. Medium c. Acoustic wave T.