201132453 六、發明說明： 【發明所屬之技術領域】 本發明疋有關於一種化學機械研磨或平坦化（Chemical201132453 VI. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a chemical mechanical polishing or planarization (Chemical)
Mechanical Polishing or Planarization，CMP)裝置，特別是有 關於一種研磨墊調節器（pad c〇nditi〇ner)及其製造方法。 【先前技術】 在現今化學機械拋光製程當中，利用一研磨墊調節器 來調卽（conditioning)或修整（dressing)研磨墊表面，以維持 長時間晶圓移除率的穩定性與均勻性，已成為一不可或缺 的步驟。而研磨墊調節器亦發展成為影響CMp製程效能表 現的重要耗材之一。 目前半導體業所使用的研磨墊調節器，主要是以硬焊 或電鍍方法將鑽石磨粒以金屬黏結層固著於一不銹鋼圓盤 上’此乃源自於傳統超硬材料工具的製造方法。由於傳統 鑽石工具的加工對象為石材、陶瓷、玻璃 '混凝土等硬質 材料，為了能在大負荷的高速磨削作業中仍可有效避免鑽 石磨粒脫落，一般採用錄_鉻合金系的焊料，在95〇_ii〇〇〇c 高溫下進行鑽石與鋼基材的硬焊結合。在硬焊過程中，焊 料中的活性金屬鉻會與鑽石表面反應生成碳化物，使焊料 合金和鑽石之間有良好的浸潤性，並實現了金屬黏結層與 鑽石的冶金化學結合’因而可以獲得較高的黏結強度。 但尚溫硬焊製程也無可避免地對鑽石造成熱損傷，使 其強度降低。這其中有兩個主要原因：其一是，通常人造 鑽石中會含有鐵、鈷、鎳等觸媒金屬雜質，這些雜質不僅 201132453 因其具有與鑽石相差甚大的熱膨脹係數，當受熱時會在鑽 石明體中產生熱應力，更嚴重的是這些雜質在鑽石晶體中 形成多種顯微缺陷，熱應力在缺陷處形成應力集中，當應 力達到一定程度後’就會使鑽石晶體出現微裂紋 (microcracks)，因而降低了鑽石單晶的強度’甚至使鑽石晶 體發生破裂。其二是，鑽石的熱穩定性差，由於在常壓下 鑽石是碳的不穩定結構，當能量足夠時，有向它的同素異 形體石墨轉化的傾向，稱之為鑽石的石墨化。鑽石在不同 介質中受熱發生石墨化的溫度不同，纟空氣中，鑽石表面 石墨化的起始溫度為7〇(rc左右，在真空中為15〇〇。〇。另 外，在750 C左右，鐵、鈷、鎳等金屬接觸鑽石即能逐漸溶 蝕鑽石，使其石墨化。石墨化對於鑽石的危害更甚於氧化 ，它存在於鑽石晶體的内部和外部，尤其是鑽石晶體内部 的石墨化，會伴隨體積的變化，產生内應力，加速晶體中 微裂紋的產生與擴展。 鑽石受熱損傷對傳統鑽石工具在應用上並不會造成太 大困擾，反而提供鑽石磨粒沿著這些微裂紋處產生局部破 裂，而露出新的鋒利切刀，保持其切削能力。但是應用在 曰曰圓廠CMP製程的硬焊鑽石調節器，若其鑽石磨粒在受到 研磨墊切削阻力作用下，引發晶體内微裂紋的擴展，將導 致鑽石磨粒不定時發生破裂或微崩角（micr〇chipping)，掉落 的鑽石碎屑會在阳圓表面製造大量的微刮傷（mb⑺scratches) ，甚至疋大的弧形刮傷（arc scratches)，嚴重妨礙CMp製程 良率的提昇。 201132453 服了製造的鑽石調節器，雖然其製造溫度低，克 只是被機械：Γ熱損傷鑽石的弊病，但是鑽石磨粒實際上 皮機械包埋鑲嵌在鎳或鎳合 強度不高’鑽石磨粒易於脫落，嚴重=中，因而黏結 ⑽製程的要求。 “重到傷晶圓，無法符合 ，，二Τ利提出以樹脂黏結方式來製作研磨塾調節 中華民國專利第1264345號「化學機械研磨修㈣ 專利鬥民宏國專利第1289093號「鑽石碟製程」，及中華民國 Α歼’、第200906546號「樹脂黏結研磨塾調節器」等 =由樹脂黏結的低溫製程’使鑽石磨粒不受熱損傷，保 ”原有強度。此外’以樹脂黏結方法製作的調節器本 身平坦度較佳’鑽石磨粒的凸出高度、切刃形狀較為一致 ’且樹脂材料對酸驗溶液的腐餘抵抗性優於硬焊金屬或鎳 電鍍層。因此，可以滿足CMP技術朝向低壓研磨、低缺陷 率、低製造成本發展的需求。但是，樹脂黏結鑽石調節器 亦需克服樹脂與鑽石磨粒之間黏結強度不高的問題。 第1264345號專利揭露一種利用在鑽石磨粒表面塗鍍一 層金屬鍍層，使得鑽石磨粒表面呈粗糙不平的刺狀，以增 加樹脂層與鑽石磨粒的黏結強度。然而，透過該粗糙金屬 鍍層所增加的黏結表面積相當有限，對於提高樹脂與鑽石 磨粒之間黏結強度的效果亦不顯著。此外，第13 1 $ 6 91號揭 露一種改進握持超級磨粒的方法，藉由增加修整器上鑽石 磨粒與研磨墊的接觸顆粒數，均勻分散摩擦力給各鑽石磨 粒，使任何單個鑽石磨粒所受到的機械應力最小，以避免 201132453 鑽石磨粒在調節研磨墊時，因與樹脂層的黏結強度較低， 而發生脫落現象。但是此方法僅降低鑽石磨粒所受的機械 應力，並無法提高樹脂與鑽石磨粒間的黏結強度。 【發明内容】 因此，本發明之一目的，即在提供一種藉由纖維強化 而能夠提高樹脂與研磨粒的黏結強度之纖維強化的樹脂黏 結研磨墊調節器。 本發明之另一目的，在於提供一種纖維強化的樹脂黏 結研磨墊調節器的製造方法。 於是，本發明纖維強化的樹脂黏結研磨墊調節器，包 3 . —基板及多數個部分包覆在該基板内之研磨粒，該基 板具有一樹脂層及配置於各該研磨粒周圍並結合在該樹脂 層中的多數纖維材料。 本發明纖維強化的樹脂黏結研磨墊調節器的製造方法 ’步驟包含： 提供一載板’並將多數個研磨粒依預定方式暫時結合 於該載板表面上； 將該結合有研磨粒的載板置於一模具内，並於該載板 表面上配置多數纖維材料於該等研磨粒周圍； 注入樹月曰於5玄模具内覆蓋該載板表面，形成包覆該等 研磨粒和該等纖維材料的一樹脂層；及 脫模並分離該樹脂層與該載板，製得一調節器。 本發明之功效’本發明纖維強化的樹脂黏結研磨些調 節器，藉由在研磨粒周圍的樹脂層結合纖維材料，可以顯 201132453 著地提高研磨粒與樹脂層的黏結強度，從而解決現有樹脂 黏結研磨墊調節器的研磨粒黏結強度不高的問題。 【實施方式】 <發明詳細說明> 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例及四個具體例的詳細 說明中，將可清楚的呈現。 在本發明被洋細描述之前’要注意的是，在以下的說 明内容中’類似的元件是以相同的編號來表示。 本發明纖維強化的樹脂黏結研磨墊調節器及製造方法 之一較佳實施例說明如下： 參閱圖1，製作纖維強化的樹脂黏結研磨墊調節器的製 造方法’步驟包含： 步驟101 :提供一載板，並將多數個研磨粒依預定方式 暫時結合於該載板表面上； 步驟102 :將該結合有研磨粒的載板置於一模具内，並 於該載板表面上配置多數纖維材料於該等研磨粒周圍； 步驟103:注入樹脂於該模具内覆蓋該載板表面，形成 包覆該等研磨粒和該等纖維材料的一樹脂層；及 步驟104 :脫模並分離該樹脂層與該載板，製得一調節 器。 、於步驟102中，該等纖維材料係設置於該載板表面， 佈於各該研磨粒周圍，該等纖維材料間存在空隙以供 树月曰α入。較佳地，該等纖維材料於該载板表面的厚度不 201132453 小於該等研磨粒平均粒徑的〇 5倍。 设置纖維材料的方法，只要能將纖維材料均勻、可靠 地叹置在研磨粒周圍即可，並無特殊限制。較佳地，可採 用片層鋪放方式或預成形體（preform)鋪放方式。其中片層 鋪放方式係將片狀纖維材料剪裁成與該載板表面輪廓相接 近的形狀，-層-層地鋪放於該載板i，直到預定的傭設 厚度。剪裁片狀纖維材料時，可以利用切紙機、製衣廠用 的電剪刀、或其他合適的剪刀，一次剪裁單層或多層，·預 成形體鋪放方式係預先製成輪摩與載板表面輪廓相接近並 具有預定厚度的預成形體，再將預成形體直接鋪放於载板 上，預成形體的製造方法可利用如：剪裁_鋪放法、纖維喷 射法、模壓（stamping)法、縫合（stitching)法、二維編織法、 二維編織法等。片層鋪放方式或預成形體鋪放方式，皆能 使凸露於載板上的研磨粒藉由纖維間的空隙穿過纖維層， 即可使各研磨粒周圍均勻分佈纖維材料。 前述片狀纖維材料可舉例如：短切纖維毯（topped strand mat)、連續纖維毯（⑽如簡价㈣叫、纖維織物 (fabrics)、粗紗編織物（w〇ven⑺一叫）、表面毯（Surface爪^) 二不織布（n0n-wovenfabric)等，亦可將前述可由市售商品購 =的片狀材料與難以單獨形成片材的纖維材料（例如晶鬚、 奈米碳管等），利用膠黏、缝合等方法形成組合片材。而預 成形體可由片狀纖維材料疊置而成。 忒較佳實施例中，所使用的纖維材料之材質並無特別 限制，各種玻璃纖維、有機纖維、碳纖維、硼纖維、陶瓷 201132453 纖維金屬纖維、及各種晶鬚（whisker)、奈米碳管（carb〇n 職otube ’ CNT)等均可’其中以玻璃纖維較佳。有機纖維 可舉例如.芳香聚醯胺纖維（aromatic polyamide fiber ’商品 名Kevlar纖維）、聚醋纖維、超高相對分子質量聚乙烯纖維 (UHMWPE、商品名Dyneema纖維）等。陶竟纖維可舉例如 :氧化鋁纖維、碳化矽纖維、石英纖維等。金屬纖維可舉 例如.不錢鋼纖維、鈦纖維、鎳纖維等。晶鬚可舉例如： 鐵晶鬚、錄晶鬚、碳化石夕晶鬚、碳化侧晶鬚、爛酸紹晶鬚 鈦酸鉀日日鬚、氧化鋅晶鬚、氧化鈦晶鬚等。所選用的纖 維材料之材質可只有單_種類或多種材質_起使用。 值得注意的是，當纖維材料鋪放於研磨粒周圍之 :::維材料固定位置，以避免合模或注入樹脂時移動纖 、准材料而使纖維材料偏離研磨粒。固定纖維材料的方 舉例如.使用少讀結劑黏結，黏結劑的用量以不堵塞 維間空隙為原則；利用閉合模 具的㈣力來壓緊固定纖維 在模具内以均壓板、蜂巢板、芯材等壓緊固定纖維 材料’ ·或以任何其他機械方式來壓緊固定纖維材料於 暫時黏結固定纖維材料的黏結劑，適用者可舉例如十： 乙稀、丙稀酸酯、聚醋酸乙稀酯、聚氨自旨、不飽和聚^ 的乳液型或溶劑型黏結劑。 1專 工 佳 举用鑽:實細：中，適用的研磨粒可為高溫高壓合成的 業用鑽石，且其粒徑以介於美國篩網i4G目至 。 為 所使用之樹脂可為埶塑性谢+m 』性树月曰或熱固性樹脂，以熱固 201132453 性樹脂為佳，具體者可以舉例如，不飽和聚酯樹脂（ polyester resin)、乙烯醋樹脂（vinyl ester resin)、環氧樹脂 (epoxy resin)、酴樹脂（phenolic resin)、雙馬來醯亞胺 (bismaleimide)、聚醯亞胺（polyimide)樹脂等，其中較佳者 為環氧樹脂。 此外，適用於注入樹脂成形的方法，可舉例如：1.射出 成形法（Injection Molding) ; 2·結構反應射出成形法 (Structure Reaction Injection Molding，SRIM) ; 3.樹脂移轉 模造法（Resin Transfer Molding，RTM) ; 4.真空輔助樹脂移 轉模造法（Vacuum Assisted Resin Transfer Molding ’ VARTM) ; 5.真空袋法（Vacuum Bag) ; 6.壓力袋法（Pressure Bag) ; 7·壓力爸法（Autoclave) ; 8·真空輔助樹脂滲透法 (Vacuum Assisted Resin Infusion，VARI)，或稱為 SCRIMP 法（Seeman’s Composite Resin Infusion Molding Process)，或 半剛性模造法等，其中以真空輔助樹脂移轉模造法 (VARTM)及真空輔助樹脂滲透法（VARI)較佳。 以下藉由四個具體例進一步說明本發明，為了使圖式 内容較為明顯而容易了解，以下内容中的示意圖並未與實 際物品等比例製圖。 具體例1 載板結合研磨粒的製作 參閱圖2，製作一表面具有多數個以一定間隔排列的錐 形凹坑21的圓形載板2(直徑li〇mm)，並於各凹坑21底部 填充膠黏劑22，再將每一凹坑21置入一研磨粒3，藉由黏 10 201132453 結劑22使研磨粒3暫時結合於載板2。關於載板2的製作 、填充勝黏劑22及結合研磨粒3的詳細實施步驟，可參閱 申请人已揭露於中華民國專利公開案第2〇〇9〇6546號的說 明書中關於實施例1的說明。 在具體例1中’所使用的研磨粒3為ELEMENTSIX公 司所生產的工業用鑽石’型號SDB1100，粒徑範圍小於美 國篩網40目，大於美國篩網45目，平均粒徑約為4〇〇μιη 。於載板2形成錐形凹坑2丨的目的在於，可以使鑽石尖點 或稜線落入凹坑21底部。 在研磨粒周圍設置纖維材料 參閱圖3至圖6，具體例1中設置纖維材料的方法採用 片層鋪放方式。參閱圖3，將前述已結合研磨粒3的載板2 置入一成形模具之下模81的模腔84内。參閱圖4，將基重 30g/m '厚度約〇.2mm的玻璃纖維表面毯4，用剪刀裁剪成 直徑約110mm的圓片狀，並在其表面以3M公司生產的完 稿喷膠罐91噴塗壓克力黏結劑，使玻璃纖維表面毯4表面 沾附少量黏結劑，避免黏結劑阻塞玻璃纖維表面毯4表層 纖維間的空隙。參閱圖5，將玻璃纖維表面毯4沾附黏結劑 的那一面朝向載板2放入模腔8.4内，並覆蓋載板2表面， 透過一厚度約3mm的矽膠片92，用一模具鋼（SKD11)壓頭 93施加約o.iMPa的均勻壓力，將玻璃纖維表面毯4壓黏固 疋於載板2上，各研磨粒3部分穿過玻璃纖維表面毯4,使 各研磨粒3周圍分佈有玻璃纖維4(構成玻璃纖維表面毯4 的玻璃纖維，以相同標號表示），亦即各研磨粒3皆被玻璃 201132453 纖維4圍束。玻璃纖維表面毯4藉由黏結劑固定於載板2 表面’可以確保玻璃纖維4在隨後注入樹脂過程中，能夠 保持原位’使各研磨粒3被玻璃纖維4圍束，不會因為樹 脂流動充模而被帶動或沖散。參閱圖6,重複上述壓黏的操 作方式，總共鋪放六層玻璃纖維表面毯4,使載板2表面的 玻璃纖維表面毯4總厚度約1.2mm » 樹脂注入與硬化 具體例1所採用的注入樹脂成形方法一般稱為真空輔 助樹脂移轉模造法（VARTMP參閱圖7，將模具的上模82 與下模81合模，上模82與下模81之間有一 〇形密封圈83 ’從上模82的排氣口 821對模腔84内抽真空，使模腔84 内壓力低於lmbar，利用模腔84真空造成的内外壓力差， 由注入口 822注入熱固性樹脂（圖7中未示出），具體例1所 使用的熱固性樹脂是以STrUERS A/S公司所製的環氧樹脂 (EPOFIX RESIN)及硬化劑（EPOFIX HARDENER)以重 量比25 . 3的比例混合而成。藉由對模腔84内抽真空，有 利於排除玻璃纖維表面毯4的纖維間的空氣，以及吸附在 研磨粒3表面的氣體，如此能使玻璃纖維4、研磨粒3與樹 脂的浸潤更為充分’減少形成微觀孔隙的可能性。 為了量產需求可在注入樹脂時利用樹脂注射機加壓注 入樹脂’現有的樹脂注射機可舉例如：英國PLASTECH公 司生產的雙組分環氧樹脂注射機（型號MEGAJECT MK IV VR);美國VENUS-GUSMRT公司生產的雙組分環氧樹脂注 射機（型號EPO-2) » 12 201132453 樹脂填充模腔84並滲透玻璃纖維表面毯4到達載板2 表面（包含凹坑21中未填充黏結劑22的表面），待熱固性樹 脂在常溫下硬化12小時，固化形成結合玻璃纖維4及研磨 粒3的樹脂層5(參閱圖8)，各研磨粒3未埋入黏結劑22的 部分都被包埋於結合玻璃纖維4的樹脂層5中，而使研磨 粒3與樹脂層4形成永久性結合。 脫模完成調節器 參閱圖8，將樹脂層5脫模後，使載板2與研磨粒3分 離’再將樹脂層5具有研磨粒3之一側浸泡於甲乙酮 (methyl ethyl ketone)溶劑中約15分鐘，再以尼龍清洗刷輥 (scrubbing roller)施以水磨刷除沾黏在研磨粒3露出樹脂層 5的部分之膠黏劑22，使研磨粒3之尖點或稜線露出，接 著以超音波震盪清洗後，以壓縮空氣吹乾，製得一纖維強 化的樹脂黏結研磨墊調節器丨〇〇(參閱圖9)。 為了使脫模程序更易於進行，當然亦可在模具内面與 載板2表面塗覆適當的脫模劑’如聚乙烯醇（p〇iyvinyi alcohol)、| 四氣乙烯（p〇iytetrafiu〇r〇ethyiene)、聚二甲基妙 氧烷（dimethyl p〇lysii〇xane)或蠟等。清除膠黏劑22的方法 亦可以利用例如：乙醇或二甲苯等之溶劑浸泡。另外，亦 可用聚丙烯不織布清潔用無磨料磨輥，施以水磨刷除去膠 黏劑22。 樹脂黏結研磨塾調節器 參閱圖9 ’樹脂層5結合玻璃纖維4共同形成調節器 1〇〇的基板6,亦即，調節器100包含：一基板6及多數個 13 201132453 勿包覆在基板6内之研磨粒3。基板6具有一樹脂層5及 配置於各研磨粒3周圍並結合在樹脂層5中的多數纖維材 料（玻璃纖維）4。具體例1中，樹脂層5中結合有該等纖 維材料4的厚度大致接近於未注入樹脂前在載板2上的玻 璃纖維表面毯4厚度（約為1.2mm)，且約為研磨粒3平均粒 徑的3倍》 成品斷面觀察 圖10與圖11為具體例1所製作的調節器1〇〇的斷面， 以掃描式電子顯微鏡（SEM)拍攝的放大照片，其中圖1〇為 低倍率（35倍）放大照片，圖11為高倍率（200倍）放大照片。 圖1〇顯示在結合研磨粒3的基板6表面下方的樹脂層5中 可觀察到一些玻璃纖維（圖1〇中未標號）折斷的痕跡，由此 痕跡分布的範圍估計，結合有玻璃纖維的樹脂層5厚度 大約為1mm。圖U可清楚顯示研磨粒3周圍均勻交錯分布 著隨機指向（randomly oriente(i)的玻璃纖維4，表示在樹脂 注入硬化過程中，玻璃纖維表面毯 4的鋪放位置與狀態並 粒3 — 測量推力 未變動，確實牢靠地均勾設置在研錄3周圍，並與研磨 一起結合於硬化的樹脂層5。Mechanical Polishing or Planarization (CMP) devices, in particular, relate to a pad conditioner and a method of manufacturing the same. [Prior Art] In the current chemical mechanical polishing process, a polishing pad conditioner is used to condition or dress the surface of the polishing pad to maintain the stability and uniformity of the wafer removal rate for a long time. Be an indispensable step. The pad conditioner has also evolved into one of the most important consumables for CMp process performance. At present, the polishing pad conditioner used in the semiconductor industry mainly fixes the diamond abrasive grains with a metal bonding layer on a stainless steel disk by brazing or electroplating. This is derived from the manufacturing method of the conventional superhard material tool. Since the traditional diamond tools are processed into hard materials such as stone, ceramics, and glass concrete, in order to effectively prevent the diamond abrasive grains from falling off during high-speed high-speed grinding operations, it is generally used to record the chrome-based solder. 95〇_ii〇〇〇c Hard-welded combination of diamond and steel substrate at high temperatures. During the brazing process, the active metal chromium in the solder reacts with the diamond surface to form carbides, which provides good wetting between the solder alloy and the diamond, and achieves metallurgical chemical bonding of the metal bonding layer to the diamond. Higher bond strength. However, the hard soldering process inevitably causes thermal damage to the diamond, which reduces its strength. There are two main reasons for this: First, artificial diamonds usually contain catalytic metal impurities such as iron, cobalt, and nickel. These impurities are not only 201132453 because they have a thermal expansion coefficient that is very different from diamonds. Thermal stress is generated in the body. What is more serious is that these impurities form various microscopic defects in the diamond crystal. The thermal stress forms stress concentration at the defect. When the stress reaches a certain level, it will cause microcracks in the diamond crystal. Thus, the strength of the diamond single crystal is reduced, and even the diamond crystal is broken. Second, the thermal stability of the diamond is poor. Since the diamond is an unstable structure of carbon under normal pressure, when the energy is sufficient, there is a tendency to convert to its allotrope graphite, which is called graphitization of diamond. The temperature at which the diamond is graphitized by heat in different media is different. In the air, the onset temperature of the surface of the diamond is 7 〇 (about rc, 15 真空 in vacuum. 另外. In addition, at around 750 C, iron Metals such as cobalt and nickel can gradually erode and make graphitized diamonds. Graphitization is more harmful to diamonds than oxidation. It exists in the interior and exterior of diamond crystals, especially in the interior of diamond crystals. With the change of volume, internal stress is generated to accelerate the generation and expansion of microcracks in the crystal. The thermal damage of diamonds does not cause much trouble to the application of traditional diamond tools, but instead provides diamond abrasive grains along these microcracks. Rupture, revealing a new sharp cutter to maintain its cutting ability. However, the hard-weld diamond adjuster used in the CMP process of the round mill has micro-cracks in the crystal if its diamond abrasive grains are subjected to the cutting resistance of the polishing pad. The expansion will cause the diamond abrasive grains to crack or micr〇chipping irregularly, and the fallen diamond chips will make a large surface on the sunny surface. Micro-scratches (mb(7)scratches), and even large arc scratches, seriously hinder the improvement of CMp process yield. 201132453 Served the diamond regulator, although its manufacturing temperature is low, gram is only mechanical: Thermal damage to the diamonds, but the diamond abrasive particles are actually embedded in the mechanically embedded nickel or nickel. The diamond abrasive particles are easy to fall off, serious = medium, and therefore the bonding (10) process requirements. "Heavily injured wafers, Inconsistent with,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, , No. 200906546 "Resin-bonded grinding 塾 adjuster", etc. = low-temperature process by resin bonding 'The diamond abrasive grains are not damaged by heat, and the original strength is maintained. In addition, the adjuster made by the resin bonding method has better flatness. 'The protruding height of the diamond abrasive grains and the shape of the cutting edge are more consistent' and the corrosion resistance of the resin material to the acid test solution is better than that of the brazing metal or nickel plating. Therefore, it can meet the needs of CMP technology towards low pressure grinding, low defect rate, and low manufacturing cost. However, the resin bonded diamond regulator also needs to overcome the problem of low bonding strength between the resin and the diamond abrasive grain. No. 1264345 The patent discloses a method of coating a surface of a diamond abrasive grain with a metal plating layer to make the surface of the diamond abrasive grain rough and uneven, so as to increase the bonding strength between the resin layer and the diamond abrasive grain. However, the adhesion formed by the rough metal plating layer is increased. The surface area is rather limited and the effect of increasing the bond strength between the resin and the diamond abrasive particles is not significant. In addition, No. 13 1 $ 6 91 discloses a method for improving the holding of superabrasive grains by increasing the diamond abrasive grains on the dresser. The number of particles in contact with the polishing pad, uniformly disperse the friction force to the diamond abrasive grains, so that the mechanical stress of any single diamond abrasive particles is minimized, so as to avoid the bonding strength of the 201132453 diamond abrasive grains with the resin layer when adjusting the polishing pad. Lower, and shedding occurs. However, this method only reduces the mechanical stress on the diamond abrasive particles and does not increase the bond strength between the resin and the diamond abrasive particles. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a fiber-reinforced resin bonded polishing pad conditioner capable of improving the bonding strength between a resin and an abrasive grain by fiber reinforcement. Another object of the present invention is to provide a method of manufacturing a fiber reinforced resin bonded abrasive pad conditioner. Therefore, the fiber-reinforced resin bonded polishing pad adjuster of the present invention comprises: a substrate and a plurality of abrasive grains coated in the substrate, the substrate having a resin layer and disposed around each of the abrasive grains and bonded thereto Most of the fibrous materials in the resin layer. The method for manufacturing a fiber-reinforced resin bonded abrasive pad conditioner of the present invention comprises the steps of: providing a carrier plate and temporarily bonding a plurality of abrasive particles to the surface of the carrier plate in a predetermined manner; and the carrier plate incorporating the abrasive particles Putting in a mold, and arranging a plurality of fibrous materials around the abrasive grains on the surface of the carrier; injecting a tree stalk into the surface of the carrier to cover the surface of the carrier, forming the abrasive particles and the fibers a resin layer of the material; and demolding and separating the resin layer from the carrier to produce a regulator. The effect of the present invention is that the fiber-reinforced resin of the present invention is bonded to some of the regulators, and by bonding the fiber material around the abrasive grains, the bonding strength of the abrasive grains and the resin layer can be improved by 201132453, thereby solving the existing resin bonding. The problem of the abrasive grain bond strength of the polishing pad conditioner is not high. [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments Presentation. Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals. A preferred embodiment of the fiber-reinforced resin bonded abrasive pad conditioner and manufacturing method of the present invention is as follows: Referring to Figure 1, the method for manufacturing a fiber-reinforced resin bonded abrasive pad conditioner includes the following steps: Step 101: Provide one load a plate, and a plurality of abrasive particles are temporarily bonded to the surface of the carrier plate in a predetermined manner; Step 102: placing the carrier plate combined with the abrasive particles in a mold, and arranging a plurality of fibrous materials on the surface of the carrier plate Step 103: injecting a resin to cover the surface of the carrier in the mold to form a resin layer covering the abrasive grains and the fiber materials; and step 104: demolding and separating the resin layer and The carrier plate produces a regulator. In step 102, the fiber materials are disposed on the surface of the carrier, and are disposed around each of the abrasive grains, and a gap exists between the fiber materials for entering the tree. Preferably, the thickness of the fibrous material on the surface of the carrier is not more than 201132453 and less than 5 times the average particle size of the abrasive particles. The method of setting the fibrous material is not particularly limited as long as the fibrous material can be uniformly and reliably smeared around the abrasive grains. Preferably, a sheet layup or preform placement method can be employed. The laminating method is to cut the sheet-like fibrous material into a shape close to the surface contour of the carrier, and layer-layering is placed on the carrier i until a predetermined thickness is set. When cutting the sheet-like fiber material, you can use a paper cutter, electric scissors for the garment factory, or other suitable scissors to cut a single layer or multiple layers at a time. · The preform is laid in advance to form the wheel and the surface of the carrier. The preform having a contour close to and having a predetermined thickness is placed on the carrier directly on the carrier, and the preform can be manufactured by, for example, a trimming method, a fiber jet method, or a stamping method. , stitching method, two-dimensional weaving method, two-dimensional weaving method, and the like. The laminar deposition method or the pre-formed deposition method can make the abrasive grains protruding on the carrier plate pass through the fiber layer through the gap between the fibers, so that the fiber material can be uniformly distributed around the abrasive grains. The aforementioned sheet-like fiber material may, for example, be a topped strand mat, a continuous fiber mat ((10) such as a simple (four) call, a fabric, a roving weave (w), a surface blanket ( Surface claws ^) Two non-woven fabrics (n0n-woven fabric), etc., and the above-mentioned sheet materials which can be purchased from commercially available products and fibrous materials (for example, whiskers, carbon nanotubes, etc.) which are difficult to form sheets alone, may be used. The composite sheet is formed by a method such as sticking, sewing, etc. The preform may be formed by stacking the sheet-like fiber materials. In the preferred embodiment, the material of the fiber material used is not particularly limited, and various glass fibers, organic fibers, Carbon fiber, boron fiber, ceramic 201132453 fiber metal fiber, and various whiskers (whisker), carbon nanotubes (carbo-tube oCNT 'CNT), etc., among which glass fiber is preferred. Organic fiber can be, for example, aromatic Polyamide fiber (available in the name of Kevlar fiber), polyester fiber, ultra-high molecular weight polyethylene fiber (UHMWPE, trade name Dyneema fiber), etc. : Alumina fiber, strontium carbide fiber, quartz fiber, etc. The metal fiber may, for example, be a steel fiber, a titanium fiber, a nickel fiber, etc. The whisker may be, for example, an iron whisker, a crystal whisker, or a carbonized stone whisker. , carbonized side whiskers, rotten acid, whisker, potassium titanate, daily whiskers, zinc oxide whiskers, titanium oxide whiskers, etc. The material of the selected fiber material can be used only in single or multiple materials. When the fiber material is placed around the abrasive grain::: the dimension of the material is fixed to avoid moving the fiber and the quasi-material while the mold is being molded or injected, so that the fiber material is deviated from the abrasive grain. Use less read binder to bond, the amount of binder is not to block the inter-vessel gap; use the (four) force of the closed mold to press the fixed fiber in the mold to press the fixed fiber material with the pressure plate, honeycomb plate, core material, etc. Or in any other mechanical manner to compress the fixing of the fibrous material to temporarily bond the fixing agent of the fibrous material, for example, ten: ethylene, acrylate, polyvinyl acetate, polyamine, or not full Poly-emulsion or solvent-based adhesives. 1 Specialized drills: Fine: Medium, suitable abrasive particles can be high-temperature and high-pressure synthetic industrial diamonds, and their particle size is between the US mesh i4G mesh The resin to be used may be a ruthenium plastic or a thermosetting resin, and a thermosetting 201132453 resin is preferred, and specific examples thereof include an unsaturated polyester resin (polyester vinegar) and an ethylene vinegar. Vinyl ester resin, epoxy resin, phenolic resin, bismaleimide, polyimide resin, etc., of which epoxy resin is preferred. . Further, a method suitable for injection resin molding may, for example, be: injection molding (Injection Molding); 2. Structural Reaction Injection Molding (SRIM); 3. Resin Transfer molding method (Resin Transfer) Molding, RTM); 4. Vacuum Assisted Resin Transfer Molding 'VARTM; 5. Vacuum Bag; 6. Pressure Bag Method; 7. Pressure Daddy Method ( Autoclave; 8·Vacuum Assisted Resin Infusion (VARI), or SCRAMP (Seeman's Composite Resin Infusion Molding Process), or semi-rigid molding, etc., in which vacuum assisted resin transfer molding ( VARTM) and vacuum assisted resin infiltration (VARI) are preferred. The present invention will be further described below by way of four specific examples, and the schematic drawings in the following are not drawn to the scale of the actual articles in order to make the drawings more obvious and easy to understand. Specific Example 1 Production of Carrier-Incorporated Abrasive Particles Referring to Fig. 2, a circular carrier 2 (diameter li〇mm) having a plurality of tapered pits 21 arranged at regular intervals is formed, and is formed at the bottom of each pit 21. The adhesive 22 is filled, and each pit 21 is placed in an abrasive grain 3, and the abrasive particles 3 are temporarily bonded to the carrier 2 by the bonding agent 10201132453. For the detailed implementation steps of the production of the carrier 2, the filling of the adhesive 22, and the bonding of the abrasive particles 3, reference is made to the description of the first embodiment of the disclosure of the Chinese Patent Publication No. 2, No. 6,546, the disclosure of which is incorporated herein by reference. Description. In the specific example 1, 'the abrasive grain 3 used is the industrial diamond 'Model SDB1100 produced by ELEMENTSIX Co., Ltd., the particle size range is smaller than the US mesh 40 mesh, larger than the US mesh 45 mesh, and the average particle diameter is about 4〇〇. Ιιη. The purpose of forming the conical pits 2 on the carrier 2 is to allow the diamond cusps or ridges to fall into the bottom of the dimples 21. Arrangement of fibrous material around the abrasive grains Referring to Figs. 3 to 6, the method of providing the fibrous material in the specific example 1 is carried out by a sheet laying method. Referring to Fig. 3, the carrier 2 to which the abrasive grains 3 have been bonded is placed in a cavity 84 of a lower mold 81 of a forming mold. Referring to Fig. 4, a glass fiber surface blanket 4 having a basis weight of 30 g/m 'thickness of about 2 mm is cut into a disk shape of about 110 mm in diameter by scissors, and sprayed on the surface thereof with a finished spray can 91 manufactured by 3M Company. The acrylic adhesive adheres a small amount of adhesive to the surface of the glass fiber surface blanket 4 to prevent the adhesive from blocking the gap between the surface fibers of the glass fiber surface blanket 4. Referring to FIG. 5, the side of the glass fiber surface blanket 4 to which the adhesive is adhered is placed into the cavity 8.4 toward the carrier 2, and covers the surface of the carrier 2, through a film of about 92 mm thick, using a die steel ( SKD11) The indenter 93 applies a uniform pressure of about o.iMPa, and the glass fiber surface blanket 4 is pressure-bonded to the carrier 2, and each of the abrasive grains 3 passes through the glass fiber surface blanket 4 to distribute around the abrasive grains 3. There are glass fibers 4 (glass fibers constituting the glass fiber surface blanket 4, denoted by the same reference numerals), that is, each of the abrasive grains 3 is surrounded by the glass 201132453 fibers 4. The glass fiber surface blanket 4 is fixed to the surface of the carrier 2 by the binder. It can ensure that the glass fiber 4 can be kept in place during the subsequent injection of the resin, so that the abrasive grains 3 are surrounded by the glass fiber 4 without flowing the resin. It is driven or dissipated by filling the mold. Referring to Fig. 6, repeating the above-mentioned pressure-bonding operation mode, a total of six layers of glass fiber surface blanket 4 are laid, so that the total thickness of the glass fiber surface blanket 4 on the surface of the carrier 2 is about 1.2 mm. » Resin injection and hardening. The injection resin molding method is generally referred to as a vacuum assisted resin transfer molding method (VARTMP refers to Fig. 7, the upper mold 82 of the mold is clamped to the lower mold 81, and the upper mold 82 and the lower mold 81 have a serpentine seal 83'. The cavity 84 is evacuated from the exhaust port 821 of the upper die 82 so that the pressure in the cavity 84 is lower than 1 mbar. The internal and external pressure difference caused by the vacuum of the cavity 84 is used to inject the thermosetting resin from the injection port 822 (not shown in Fig. 7). The thermosetting resin used in the specific example 1 is a mixture of an epoxy resin (EPOFIX RESIN) manufactured by STrUERS A/S Co., Ltd. and a hardener (EPOFIX HARDENER) in a weight ratio of 25.3. Vacuuming the cavity 84 facilitates the removal of air between the fibers of the glass fiber surface blanket 4 and the gas adsorbed on the surface of the abrasive particles 3, so that the glass fibers 4, the abrasive grains 3 and the resin are more fully infiltrated' Reduce the possibility of forming microscopic pores. In order to mass production, a resin injection machine can be used to inject resin when injecting resin. The existing resin injection machine can be, for example, a two-component epoxy resin injection machine (model MEGAJECT MK IV VR) manufactured by PLASTECH, UK; VENUS, USA -Two-component epoxy resin injection machine (model EPO-2) manufactured by GUSMRT » 12 201132453 The resin fills the cavity 84 and penetrates the glass fiber surface blanket 4 to reach the surface of the carrier 2 (including the unfilled adhesive 22 in the pit 21) The surface of the thermosetting resin is cured at room temperature for 12 hours, and is solidified to form a resin layer 5 (see FIG. 8) in which the glass fibers 4 and the abrasive grains 3 are bonded. The portions of the abrasive grains 3 not embedded in the binder 22 are embedded. In the resin layer 5 in which the glass fiber 4 is bonded, the abrasive grain 3 is permanently bonded to the resin layer 4. The mold release completion adjuster Referring to Fig. 8, after the resin layer 5 is demolded, the carrier plate 2 and the abrasive grain 3 are obtained. Separating 'the resin layer 5 has one side of the abrasive particles 3 soaked in a methyl ethyl ketone solvent for about 15 minutes, and then applied with a scrub brush to remove the sticking of the abrasive grains 3 by a scrubbing roller. Resin layer 5 Part of the adhesive 22 exposes the sharp point or ridgeline of the abrasive grain 3, and then is ultrasonically oscillated and washed, and then blown dry with compressed air to obtain a fiber-reinforced resin bonded abrasive pad adjuster (see figure). 9). In order to make the demolding process easier, it is of course also possible to apply a suitable release agent on the inner surface of the mold and the surface of the carrier 2, such as polyvinyl alcohol (p聚乙烯iyvinyi alcohol), | tetraethylene (p〇iytetrafiu) 〇r〇ethyiene), dimethyl p〇lysii〇xane or wax. The method of removing the adhesive 22 can also be soaked with a solvent such as ethanol or xylene. Alternatively, the non-abrasive grinding rolls may be cleaned with a polypropylene non-woven fabric, and a water-abrasive brush may be used to remove the adhesive 22. Referring to FIG. 9 ' resin layer 5 combined with glass fiber 4 to form a substrate 1 of the regulator 1 ,, that is, the regulator 100 comprises: a substrate 6 and a plurality of 13 201132453 do not cover the substrate 6 Abrasive particles 3 inside. The substrate 6 has a resin layer 5 and a plurality of fibrous materials (glass fibers) 4 disposed around the respective abrasive grains 3 and bonded to the resin layer 5. In the specific example 1, the thickness of the fiber material 4 bonded to the resin layer 5 is substantially close to the thickness of the glass fiber surface blanket 4 (about 1.2 mm) on the carrier 2 before the resin is injected, and is about the abrasive grain 3. 3 times of the average particle diameter" The cross-section of the finished product is shown in Fig. 10 and Fig. 11 is a cross section of the regulator 1 制作 produced in the specific example 1, and an enlarged photograph taken by a scanning electron microscope (SEM), wherein Fig. 1 is A low magnification (35x) magnified photo, and Figure 11 is a high magnification (200x) magnified photo. 1A shows that some of the glass fibers (not labeled in FIG. 1A) are observed to be broken in the resin layer 5 below the surface of the substrate 6 to which the abrasive grains 3 are bonded, whereby the range of the trace distribution is estimated to be combined with the glass fiber. The resin layer 5 has a thickness of about 1 mm. Figure U clearly shows that the abrasive particles 3 are uniformly staggered with random oriente (i) glass fibers 4, indicating the placement and state of the glass fiber surface blanket 4 during the resin injection hardening process. The thrust is not changed, and it is surely hooked around the record 3 and bonded to the hardened resin layer 5 together with the grinding.
40倍）下進行。測量推力的步驟如下··40 times). The steps to measure the thrust are as follows...
(JIS 司製 於所4 10〜40倍）下推；〇油|县仏丄j 14 201132453 調⑷。〇固定於—工作表面(圖中未示出)； ;則里推力裝置94’透過實體顯微鏡將推針941 擺放於待測量的研磨粒3上； 3，:： 12所示，以傾斜於研磨粒3所在平面垂直方向 ^ 45度方向施力，使推針州向研磨粒3施加推 942紀錄τ研磨粒3被推動時(移動位置) 的何重值（kgf)。 7 依據前述測量步驟在具體 隨機測量H)顆研磨粒3被推動時的製于;I3周卽盗1〇0上， ，所得的平均值為叫時的何重值’再取其平均值 另外製作一對昭纟且丨，/ 大致相同，惟，對:…:：1的實施步驟與具體例1 組樹脂層中並未結合纖維材料。同樣在對二 1製侍的調節器（圖未示）上 了…、 動時的荷重值，再取並平约值機測置1〇顆研磨粒被推 由^ 均值，所得的平均值為2.5kgf。 由別迷可知，具體例j測得 平均推力為6.2kgf，而對照組^ L皮推動所需的 的平均推力為2.5 kgf，呈體们μ的研磨粒被推動所需 的2.5件〃 平均推力值約為對照組1 樹月日層5與研磨粒3之間的點 者地“ 2 具體例2的實施步驟與具 磨粒周圍設置大致相问，惟，在研 置纖維材科的方式有所差異 15 201132453 先以相同於具體例1的方式壓黏三層直徑100mm、基重 30g/m2的玻璃纖維表面毯’再壓黏兩層經預先縫合，直徑 110mm、基重200g/m2的方格布（玻璃纖維平織編紗束）。方 . 格步的縫合係將兩塊方格布經緯方向大致對齊堆疊後，以 家用缝紉機用棉線縫合。最後在載板上的纖維材料厚度約 為 0.9mm 〇 成品斷面觀察 圖13與圖14為具體例2所製作的調節器的斷面，以 掃描式電子顯微鏡（SEM)拍攝的放大照片，其中圖丨3為低 倍率（35倍）放大照片，圖14為高倍率（2〇〇倍）放大照片。與籲 具體例1相同地，在圖13及圖14中可以觀察到在研磨粒 周圍的樹脂層結合有玻璃纖維，並由圖13可以觀察到按鋪 放順序結合在研磨粒周圍的樹脂層中的玻璃纖維表面毯與 方格布的斷面形貌，並可估計結合玻璃纖維的樹脂層厚度 約為0.8mm，大致接近未注入樹脂前預先設置在載板表面 的玻璃纖維厚度（玻璃纖維表面毯加上方格布的厚度）。在具 體例2中，結合纖維材料的樹脂層厚度約為研磨粒平均粒 徑的2倍。 φ 測量推力 〜與具體例1相同的方式’隨機測量具體例2製得的調 郎益上10顆研磨粒被推動時的荷重值，再取其平均值，所 得的平均值為5·6 kgf。與對照組1的平均值2.5 kgf比較， =例2的平均推力值約為對照組，再次顯示研 周圍配置纖維材料可以顯著地提高樹脂層與研磨粒之 16 201132453 間的黏結強度。 具體例3 具體例3的實施步驟與具體例丨大致相同，惟載板的 製作、研磨粒的規格及配置纖維材料的方式與具體例1有 所差異。其中具體例3的載板是由射出成形方式所形成， 為聚丙烯材質的塑膠板，厚度約為15mm，表面具有直立 四角錐形凹坑，凹坑錐頂的角度約i 1〇度、凹坑深度約 105μηι、兩相鄰的凹坑錐頂間距約4〇〇μιη。具體例3採用的 研磨粒為ELEMENTSIX公司所生產的工業用鑽石，型號 SDB1125，粒徑範圍小於美國篩網7〇目，大於美國篩網8〇 目，平均粒徑約為200μιη。此外，具體例3在研磨粒周圍 設置纖維材料的方式，先以相同於具體例丨的方式壓黏兩 層直徑100mm、基重30g/m2的玻璃纖維表面毯，再壓黏一 層’直徑110mm、基重450g/m2的玻璃纖維切股毯。最後 在載板上的纖維材料厚度約為1 7mm。 成品斷面觀察 圖15與圖16為具體例3所製作的調節器的斷面，以 掃描式電子顯微鏡（SEM)拍攝的放大照片，其中圖15為低 倍率（80倍）放大照片’圖16為高倍率（15〇倍）放大照片。與 具體例1相同地，在圖15及圖16中可以觀察到在研磨粒 周圍的樹脂層結合有玻璃纖維，並由圖15可以觀察到按鋪 放順序結合在研磨粒周圍的樹脂層中的玻璃纖維表面毯與 切股毯的斷面形貌，並可估計結合玻璃纖維的樹脂層厚度 約為1.4mm，大致接近未注入樹脂前預先設置在載板表面 17 201132453 的玻璃纖維厚度（破璃纖 體例3中，結合纖維材料：t加上切股毯的厚度)。在具 徑的7倍。 ，丨知層厚度約為研磨粒平均粒 測量推力 與具體例1相同、 ❹上”研磨量具㈣3製得的調 付的平均值為4 9kgf。、、何重值，再取其平均值，所 另外製作一對照組7 大致相同，，准，對照*對照組2的實施步驟與具體例3 即，對照組2的樹置纖維材料的步驟。亦 細9制# 中並未結合纖維材料。同柹Λ 賊 組2製得的調節器（圖未示）上，隨機㈣寸+⑽在對照 動時的荷重值，再 "】〇顆研磨粒被推 與對照组二得的平均值為1.5… h^(A Λ "* ·5 kgf比較，具體例3的平均推 ==約為對照組2的3.3倍’亦顯示研磨= 度纖維材料可以顯著地提高樹脂層與研磨粒之間的黏結強 具體例4 具體例4的實施步驟與具體例3大致相同，惟在配置 纖維材料的方式及注人樹脂成形的方式與具體们有所差 異。具_ 4是以預成形體鋪放方式設置纖維材料，參閱 圓17與圖18,預成形體7採用剪裁_鋪放法製作，在一模 具85内置入一片直徑約l〇〇mm、基重45〇g/m2的玻璃纖維 切股毯71後’再依序堆疊兩片在朝下的一側表面已喷塗磨 克力黏結劑的玻璃纖維切股毯71，以及兩片在朝下的一側 18 201132453 表面已喷塗壓克力黏結劑的玻璃纖維表面毯72。接著以模 具鋼壓頭93施加O.IMPa的壓力，將玻璃纖維壓緊成形， 脫模後玻璃纖維黏結成一直徑約l〇〇mm、厚度約4.5mm的 預成形體7。 參閱圖19、20、21 ’具體例4注入樹脂成形的方式採 用真空輔助樹脂滲透法（VARI)，實施步驟說明如下。參閱 圖19 ’在一成形模具的下半模86(剛性模）内，置入研磨粒 3’已穩固結合在凹坑21，底部的載板2’，再將預成形體7具 有玻璃纖維表面毯72的那一側朝向載板2,置入下半模86 内’鋪蓋研磨粒3,分布的區域。參閱圖2〇，將一不錄鋼 (SUS 316)底盤87放入下半模86中，壓在預成形體7上。 參閱圖21，再以一尼龍（nyi〇n)製真空袋88作為上半模（柔 性模），用密封環89密封後，由真空袋88上的抽氣口 88丄 通過底盤87的排氣口 871抽真空。利用大氣壓力作用在真 空袋88上，壓緊底盤87和預成形體7 ,讓預成形體7被壓 縮至底盤87形腔深度的厚度，大約為4mm。抽真空到真空 袋88内壓力低於lmbar後，藉助内外壓力差，由真空袋88 的注入口 882注入樹脂，並通過底盤87的注入流道872與 環形引流道873迅速充模，以使樹脂快速滲透進入玻璃纖 維預成形體7内。如此，在樹脂注入與浸潰研磨粒3,和玻 璃纖維過程中，同時有大氣壓力作用在真空袋88上壓緊固 定預成形體7的位置，使其均勻配置在研磨粒3，周圍。待 樹脂固化後進行脫模步驟，脫模步驟與具體例3大致相同 ’不再重述。 19 201132453 值得注意的是，參閱圖22’具體例4製得的樹脂點姓 研磨墊調節器100,的基板6,還具有於樹脂層5固化成形^ . 一體黏結於樹脂層5的一底盤87，樹脂層5於固化成形時 一併與底盤87黏結’使結合纖維材料7 (即構成預成形體 7的纖維材料）的樹脂層5與底盤87形成一整體。同樣地 ，各研磨粒3部分被包覆於樹脂層5中且各研磨粒3周圍 的樹脂層5均結合有纖維材料7。在具體例4中，底盤87 材質為不銹鋼，但是底盤87的材質也可以選用工程塑膠， 例如聚碳酸酯（p〇lyearb〇nate ， pC)、聚甲駿 (polyoxymethylene，POM)、聚苯喊（polyphenylene 〇xide， _ PPO)、聚苯硫醚（polyphenylene sulfide，PPS)、聚亞醯胺 (polyimide，PI)、聚颯（p〇iySuifone , psj7)等。 成品斷面觀察 圖23與圖24為具體例4所製作的調節器之樹脂層的 部分截面’以掃描式電子顯微鏡（SEM)拍攝的放大照片，其 中圓23為低倍率（80倍）放大照片，圖24為高倍率（150倍） 放大照片。與具體例1相同地，在圖23及圖24中可以觀 察到在研磨粒周圍的樹脂層結合有玻璃纖維，並由圖23可· 以觀察到按鋪放順序結合在研磨粒周圍的樹脂層中的玻璃 纖維表面毯與切股毯的斷面形貌，並可估計結合玻璃纖維 的樹脂層厚度約為4mm，大致接近未注入樹脂前預先設置 在載板表面的玻璃纖維厚度（玻璃纖維表面毯加上切股毯的 厚度）。在具體例4中，結合纖維材料的樹脂層厚度約為研 磨粒平均粒徑的2〇倍。 20 201132453 測量推力 與具體例1相同的方式，隨機測量具體例4製得的調 節器上10顆研磨粒被推動時的荷重值，再取其平均值，所 得的平均值為5.2 kgf。 與對照組2的平均值1.5 kgf比較，具體例4的平均推 力值約為對照組2的3.5倍，亦顯示研磨粒周圍配置纖維材 料可以顯著地提高樹脂層與研磨粒之間的黏結強度。 發明的效果 現有樹脂黏結研磨墊調節器的研磨粒黏結強度不高的 問題’是因為黏結研磨粒的熱固性樹脂硬化後，通常形成 較高交鏈密度的三維網狀結構，其主鏈運動非常困難，使 得樹脂層的衝擊強度很低’脆性較大，直接影響其黏纟士強 度。當研磨粒承受外力作用時，很容易在樹脂層中產生裂 紋並迅速擴展，導致研磨粒脫落。 參閱圖25,本發明纖維強化的樹脂黏結研磨塾調節器 的樹脂層5中，由於結合纖維4’，裂紋51 (圖25中箭頭移 動指示方向為裂紋擴展方向）擴展需要消耗大量的外界能旦 ，因纖維4’與樹脂層5結合而可能提供能量消耗的三種機 制為： 1. 纖維4’從樹脂層5拔出（如圖25所示纖維拔出處41) » 2. 纖維4’的斷裂（如圖25所示纖維斷裂處42); 3. 纖維4’與樹脂層5的界面分離（如圖25所示纖維與 樹脂介面分離處43)。 21 201132453 因此’在研磨粒3、3’周圍配置纖維材料（即構成具體例 1、2、3、4中玻璃纖維表面毯、方格布或切股毯的玻璃纖 維）能阻止樹脂層5中的裂紋51擴展，具有增韌 (toughening)樹脂層5的作用。尤其當研磨粒3、3’受到切削 應力作用時’負荷主要由樹脂層5承擔，而因結合有纖維 材料的樹脂層5在受到應力作用時，可將應力均勻地傳遞 給纖維’轉由纖維承擔大部分的應力，達到均勻分散應力 和提兩承載強度的作用。再者，加入纖維材料可吸收大量 的衝擊能量’和減小樹脂層5的内應力，從而能大幅提昇 樹脂層5的剪切強度、衝擊強度、疲勞強度及耐久性，且 顯著地增強對於研磨粒3、3，的黏結強度，能有效避免研磨 粒3、3’脫落。 由上述可知’本發明纖維強化的樹脂黏結研磨墊調節 器100、100’，藉由在研磨粒3、3,周圍的樹脂層5結合纖 維材料，可以顯著地提高研磨粒3、3’與樹脂層5的黏結強 度’從而解決現有樹脂黏結研磨墊調節器的研磨粒黏結強 度不尚的問題。 准以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍’即大凡依本發明申請專利 I&圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一流程圖，說明本發明纖維強化的樹脂黏結研 磨墊调節器的製造方法之一較佳實施例； 22 201132453 圖2是說明本發明纖維強化的樹脂黏結研磨墊調節器 的製邊方去之具體例1形成結合研磨粒的載板之實施步驟 的一系意圖； 圖3至圖6是說明具體例1在研磨粒周圍設置纖維材 料之實施步驟的示意圖； 圖 7 县％ η 口 疋說月具體例1樹脂注入與硬化之實施步驟的示 意圖， 脫模之實施步驟的示意圖； 1之纖維強化的樹脂黏結研磨墊調(JIS Division in the 4 10~40 times) push down; oyster sauce|County 仏丄 j 14 201132453 tune (4). 〇 fixed to the working surface (not shown); then the thrust device 94' places the push pin 941 on the abrasive grain 3 to be measured through the solid microscope; 3,:: 12, inclined to The plane of the abrasive grain 3 is applied in a direction perpendicular to the direction of 45 degrees, so that the pusher state applies a push 942 to the abrasive grain 3 to record the weight value (kgf) when the abrasive grain 3 is pushed (moving position). 7 According to the above measurement steps, when the specific random measurement H) the abrasive grains 3 are pushed; the I3 week thieves 1〇0, the average value obtained is the weight value of the call' and the average value is taken A pair of 纟 纟 丨 / / / / / / / / ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... In the same way, the regulator (not shown) of the 2 1 servo is loaded with the load value of the moving time, and then the equal value is measured. The 1 grinding abrasive is pushed by the mean value, and the average value is 2.5kgf. As can be seen from the other, the average thrust measured in the specific example j is 6.2 kgf, while the average thrust required for the push of the control group is 2.5 kgf, which is 2.5 pieces of the average thrust required to push the abrasive particles of the μ. The value is about the point between the control layer 1 and the tree layer 5 and the abrasive grains 3 " 2 The implementation steps of the specific example 2 are roughly related to the setting around the abrasive grains, but the method of researching the fiber material is Difference 15 201132453 Firstly, the three-layer glass fiber surface blanket with a diameter of 100mm and a basis weight of 30g/m2 was pressure-bonded in the same manner as the specific example 1. The two layers were pre-stitched with a diameter of 110mm and a basis weight of 200g/m2. Gebu (glass fiber flat weave yarn bundle). Fang. The stitching system of the grid is roughly aligned with the latitude and longitude of the two gingham fabrics, and then stitched with cotton thread for the household sewing machine. Finally, the thickness of the fiber material on the carrier is about 0.9. Mm 〇 finished product section view FIG. 13 and FIG. 14 are cross-sectional views of the regulator prepared in the specific example 2, taken by a scanning electron microscope (SEM), wherein FIG. 3 is a low magnification (35 times) enlarged photo. , Figure 14 is a high magnification (2 times) magnified photo As in the case of Specific Example 1, it can be observed in Figs. 13 and 14 that the resin layer around the abrasive grains is bonded to the glass fiber, and it can be observed from Fig. 13 that the resin layer is bonded in the resin layer around the abrasive grains in the order of deposition. The cross-sectional shape of the glass fiber surface blanket and the woven fabric, and it can be estimated that the thickness of the resin layer combined with the glass fiber is about 0.8 mm, which is substantially close to the thickness of the glass fiber (glass fiber surface) previously set on the surface of the carrier before the resin is injected. In the specific example 2, the thickness of the resin layer in combination with the fiber material is about twice the average particle diameter of the abrasive grains. φ The measured thrust force is the same as in the specific example 1 'Special example of random measurement 2 The obtained value of the weight of the 10 pieces of the abrasive grains was pushed, and the average value was taken, and the average value was 5.6 kgf. Compared with the average value of 2.5 kgf of the control group 1, = 2 The average thrust value is about the control group, and it is again shown that the surrounding fiber material can significantly increase the bonding strength between the resin layer and the abrasive grain 16 201132453. Specific Example 3 The specific example 3 is substantially the same as the specific example. Similarly, the production of the carrier, the specifications of the abrasive particles, and the manner in which the fibrous material is disposed differ from the specific example 1. The carrier of the specific example 3 is formed by injection molding, and is a plastic plate of polypropylene. It is about 15mm, and the surface has an upright quadrangular pyramid pit. The angle of the top of the pit cone is about i 1〇, the depth of the pit is about 105μηι, and the pitch of the two adjacent pits is about 4〇〇μηη. The abrasive grain is an industrial diamond produced by ELEMENTSIX Company, model SDB1125, with a particle size range of less than 7 mesh of the US mesh, larger than 8 mesh of the US mesh, and an average particle size of about 200 μm. In addition, in the specific example 3, the fiber material is disposed around the abrasive grains, and the two glass fiber surface blankets having a diameter of 100 mm and a basis weight of 30 g/m 2 are pressure-bonded in the same manner as the specific example, and then a layer of '110 mm in diameter is pressed. A glass fiber ripper with a basis weight of 450 g/m2. Finally, the thickness of the fibrous material on the carrier is about 17 mm. Cross-sectional view of the finished product Fig. 15 and Fig. 16 are cross-sectional views of the adjuster produced in the specific example 3, taken by a scanning electron microscope (SEM), and Fig. 15 is a magnified photograph of a low magnification (80 times) 'Fig. Enlarge the photo for high magnification (15〇). As in the case of Specific Example 1, it can be observed in Figs. 15 and 16 that the resin layer around the abrasive grains is bonded to the glass fiber, and it can be observed from Fig. 15 that the resin layer is bonded in the resin layer around the abrasive grains in the order of deposition. The cross-sectional shape of the glass fiber surface blanket and the cut strand blanket, and it can be estimated that the thickness of the resin layer combined with the glass fiber is about 1.4 mm, which is substantially close to the thickness of the glass fiber previously set on the surface of the carrier sheet 17 201132453 before the resin is injected. In the slimming example 3, the fiber material was combined: t plus the thickness of the dicing blanket). 7 times in diameter. The thickness of the known layer is about the same as that of the specific grain of the abrasive grain. The average value of the weight of the grinding is the same as that of the specific example 1, and the average value of the weighting of the grinding tool (4) 3 is 49 kgf, and the value is taken, and the average value is taken. In addition, a control group 7 was prepared which was substantially the same, and the control step of the control group 2 was the same as that of the specific example 3, that is, the step of placing the fiber material in the control group 2. The fiber material was not combined in the fine #9.柹Λ On the regulator made by thief group 2 (not shown), random (four) inch + (10) is the load value at the time of the control, and then the average value of the 研磨 研磨 abrasive grain is compared with the control group. ... h^(A Λ "* ·5 kgf comparison, the average push of specific example 3 == about 3.3 times of control group 2' also shows that the grinding = degree fiber material can significantly improve the resin layer and the abrasive grain Adhesive strength specific example 4 The specific procedure of the specific example 4 is substantially the same as that of the specific example 3. However, the manner in which the fibrous material is disposed and the manner in which the resin is molded are different from those of the specific one. The _ 4 is a pre-formed laying method. Set the fiber material, refer to circle 17 and Figure 18, and the preform 7 is cut and laid. After the glass fiber cleavage blanket 71 having a diameter of about l〇〇mm and a basis weight of 45〇g/m2 is built in a mold 85, two pieces of the surface on the downward side are sprayed and polished. The glass fiber riprap 71 of the force bonding agent, and the two glass fiber surface blankets 72 on the side of the downward facing side 18 201132453 that have been coated with an acrylic adhesive. The O.IMPa is then applied by the die steel indenter 93. Under pressure, the glass fiber is compression-molded, and after the demolding, the glass fiber is bonded into a preform 7 having a diameter of about 10 mm and a thickness of about 4.5 mm. Referring to Figures 19, 20 and 21, the specific example 4 is injected into the resin. The vacuum assisted resin infiltration method (VARI) is used, and the implementation steps are explained as follows. Referring to Fig. 19 'in the lower mold half 86 (rigid mold) of a forming mold, the abrasive grains 3' placed are firmly bonded to the pits 21 at the bottom. The carrier 2', the side of the preform 7 having the glass fiber surface blanket 72 is directed toward the carrier 2, and placed in the lower mold half 86 to cover the area where the abrasive grains 3 are distributed. Referring to Fig. 2, one will be The unrecorded steel (SUS 316) chassis 87 is placed in the lower mold half 86 and pressed against the preform 7. 21, a nylon bag (nyi〇n) vacuum bag 88 is used as the upper mold half (flexible mold), sealed by the seal ring 89, and then sucked through the exhaust port 88 of the vacuum bag 88 through the exhaust port 871 of the chassis 87. Vacuum. The atmospheric pressure is applied to the vacuum bag 88, and the chassis 87 and the preform 7 are pressed to allow the preform 7 to be compressed to a depth of the cavity depth of the chassis 87, which is about 4 mm. Vacuum is applied to the pressure inside the vacuum bag 88. After less than 1 mbar, the resin is injected from the injection port 882 of the vacuum bag 88 by the pressure difference between the inside and the outside, and is rapidly filled through the injection flow path 872 of the chassis 87 and the annular flow path 873, so that the resin rapidly penetrates into the glass fiber preform. Within 7. In this manner, during the resin injection and impregnation of the abrasive grains 3 and the glass fibers, atmospheric pressure acts on the vacuum bag 88 to press and fix the position of the preform 7 so as to be uniformly disposed around the abrasive grains 3. After the resin is cured, the demolding step is carried out, and the demolding step is substantially the same as that of the specific example 3, and will not be repeated. 19 201132453 It is to be noted that the substrate 6 of the resin spot polishing pad conditioner 100 prepared in the specific example 4 of FIG. 22 has a resin layer 5 which is cured and formed. A chassis 87 integrally bonded to the resin layer 5 The resin layer 5 is bonded to the chassis 87 at the time of solidification molding. The resin layer 5 which bonds the fiber material 7 (i.e., the fiber material constituting the preform 7) is integrally formed with the chassis 87. Similarly, each of the abrasive grains 3 is partially coated in the resin layer 5, and the resin layer 5 around each of the abrasive grains 3 is bonded to the fibrous material 7. In the specific example 4, the chassis 87 is made of stainless steel, but the material of the chassis 87 can also be selected from engineering plastics, such as polycarbonate (p〇lyearb〇nate, pC), polyoxymethylene (POM), polystyrene ( Polyphenylene 〇xide, _ PPO), polyphenylene sulfide (PPS), polyimide (PI), polypeptone (p〇iySuifone, psj7) and the like. FIG. 23 and FIG. 24 are enlarged photographs taken by a scanning electron microscope (SEM) of a partial cross section of the resin layer of the regulator prepared in Specific Example 4, in which the circle 23 is a low magnification (80 times) enlarged photograph. Figure 24 shows a high magnification (150x) magnified photo. As in the case of Specific Example 1, it can be observed in Figs. 23 and 24 that the resin layer around the abrasive grains is bonded with the glass fiber, and from Fig. 23, it is observed that the resin layer is bonded around the abrasive grains in the order of deposition. The cross-sectional morphology of the glass fiber surface blanket and the cut strand blanket, and it can be estimated that the thickness of the resin layer combined with the glass fiber is about 4 mm, which is substantially close to the thickness of the glass fiber (glass fiber surface) previously set on the surface of the carrier before the resin is injected. The blanket plus the thickness of the dicing blanket). In Concrete Example 4, the thickness of the resin layer in combination with the fibrous material was about 2 times the average particle diameter of the abrasive grains. 20 201132453 Measuring thrust In the same manner as in the specific example 1, the load value of the 10 abrasive grains on the regulator prepared in the specific example 4 was randomly measured, and the average value was taken, and the average value was 5.2 kgf. Compared with the average value of 1.5 kgf of the control group 2, the average pushing force value of the specific example 4 was about 3.5 times that of the control group 2, and it was also shown that the arrangement of the fibrous material around the abrasive grains can remarkably increase the bonding strength between the resin layer and the abrasive grains. Effect of the Invention The problem of the low adhesion strength of the abrasive grain of the conventional resin bonded polishing pad conditioner is because the three-dimensional network structure of a high cross-link density is usually formed after the thermosetting resin of the bonded abrasive grain is hardened, and the main chain movement is very difficult, so that The impact strength of the resin layer is very low, and the brittleness is large, which directly affects the strength of the sticky gentleman. When the abrasive grains are subjected to an external force, cracks easily occur in the resin layer and rapidly spread, causing the abrasive grains to fall off. Referring to Fig. 25, in the resin layer 5 of the fiber-reinforced resin bonded abrasive crucible adjuster of the present invention, the crack 51 (the direction in which the arrow moves in the direction of crack propagation in Fig. 25) expands due to the bonding of the fibers 4', and consumes a large amount of external energy. The three mechanisms that may provide energy consumption due to the combination of the fiber 4' and the resin layer 5 are: 1. The fiber 4' is pulled out of the resin layer 5 (as shown in Figure 25, the fiber pull-out 41) » 2. Fiber 4' The fracture (as shown in Fig. 25 at the fiber break 42); 3. The separation of the fiber 4' from the resin layer 5 (as shown in Fig. 25, the fiber is separated from the resin interface 43). 21 201132453 Therefore, the arrangement of the fibrous material around the abrasive grains 3, 3' (that is, the glass fiber constituting the glass fiber surface blanket, the gingham cloth or the dicing blanket in the specific examples 1, 2, 3, and 4) can prevent the resin layer 5 from being contained. The crack 51 is expanded to have the effect of toughening the resin layer 5. Especially when the abrasive grains 3, 3' are subjected to cutting stress, the load is mainly borne by the resin layer 5, and when the resin layer 5 combined with the fibrous material is subjected to stress, the stress can be uniformly transmitted to the fiber. Bear most of the stress, achieve uniform dispersion stress and lift the two bearing strength. Furthermore, the addition of the fibrous material absorbs a large amount of impact energy' and reduces the internal stress of the resin layer 5, so that the shear strength, impact strength, fatigue strength and durability of the resin layer 5 can be greatly improved, and the grinding is remarkably enhanced. The bonding strength of the particles 3 and 3 can effectively prevent the abrasive grains 3, 3' from falling off. It can be seen from the above that the fiber-reinforced polishing pad conditioner 100, 100' of the present invention can significantly improve the abrasive grains 3, 3' and the resin by bonding the fiber materials to the surrounding resin layers 5 in the abrasive grains 3, 3. The bonding strength of the layer 5 is such that the problem of the bonding strength of the abrasive grains of the conventional resin bonded polishing pad conditioner is not solved. The above is only the preferred embodiment of the present invention, and should not be construed as limiting the scope of the present invention, i.e., the simple equivalent changes made in accordance with the present invention and the contents of the invention. Modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flow chart showing a preferred embodiment of a method for producing a fiber-reinforced resin bonded abrasive pad conditioner of the present invention; 22 201132453 FIG. 2 is a view showing the fiber-reinforced resin bonded grinding of the present invention. The specific example 1 of the pad conditioner is intended to form a carrier plate in combination with the abrasive particles; FIG. 3 to FIG. 6 are schematic views illustrating the steps of the embodiment 1 in which the fiber material is disposed around the abrasive particles; Fig. 7 Schematic diagram of the implementation steps of the resin injection and hardening of the specific example 1 of the county, η, 疋 口 月, the implementation steps of the demoulding; 1 fiber-reinforced resin bonding polishing pad adjustment
圖8是說明具體例i 圖9是說明具體例 節器之一示意圖； 圖10是具體例1之纲y OD & _ 之調即态貫際成品的載面以SEM取得 的放大35倍影像照片； 的放大200倍影像照片； 疋具體例1之調節器實際成品的截 品的截面以SEM取得 品的截面以SEM取得 品的截面以SEM取得 圖13疋具體例2之調節器實 的放大35倍影像照片； 圖14是具體例2之調節器實 的放大200倍影像照片； 圖15是具體例3f 的放大80倍影像照片； 圖16是具體例3之 的放大15G倍影像照片；。㈣成品的截面以腦取得 體 圈17與“是說明具趙例4製作玻璃纖維預成形 23 201132453 的實施步驟之示意圖； 圖19至圖21是說明具體例4設置預成形體及樹脂注-入與硬化的實施步驟之示意圖； 圖22是說明具體例4之纖維強化的樹脂黏結研磨墊調 節器之一示意圖； 圖23是具體例4之調節器實際成品的截面以SEM取得 的放大80倍影像照片； 圖24是具體例4之調節器實際成品的截面以Sem取得 的放大150倍影像照片；及 圖25是說明本發明纖維強化的樹脂黏結研磨墊調節器魯 之纖維強化機制的一示意圖。Fig. 8 is a view showing a specific example. Fig. 9 is a schematic view showing a specific example; Fig. 10 is a magnified 35-fold image obtained by SEM of the y OD & _ Photograph of magnified 200x image; 截面Specific cross-section of the actual product of the regulator of Example 1 is obtained by SEM. The cross-section of the product obtained by SEM is obtained by SEM. The SEM is used to obtain the cross-section of the regulator of Figure 2. Fig. 14 is a magnified 200x image of the actuator of the specific example 2; Fig. 15 is an enlarged 80x image of the specific example 3f; and Fig. 16 is an enlarged 15G image of the specific example 3; (4) The cross-section of the finished product is obtained by taking the acupuncture 17 from the brain and "is a schematic diagram showing the implementation steps of preparing the glass fiber preform 23 201132453 with the example 4; FIG. 19 to FIG. 21 are the specific example 4 for setting the preform and the resin injection-in FIG. 22 is a schematic view showing a fiber-reinforced resin bonded polishing pad adjuster of Specific Example 4; and FIG. 23 is an enlarged 80-fold image obtained by SEM of a cross section of the actual finished product of the specific example 4. Fig. 24 is a magnified 150-fold image taken from the cross section of the actual finished product of the regulator of Concrete Example 4; and Figure 25 is a schematic view showing the fiber strengthening mechanism of the fiber-reinforced resin bonded abrasive pad adjuster of the present invention.
24 201132453 【主要元件符號說明】 100 ··_· …調節器 3, ····· —研磨粒 100,… …調節器 4…… •…玻璃纖維表面毯 101 ···· …步驟 玻璃纖維） 102 ···· …步驟 5…… .....樹脂層 103 ···· …步驟 51 •…裂紋 104 .... …步驟 6…… .....基板 2 ....... 載板 6, .....基板 V…… …載板 7…… …··預成形體 21…… …凹坑 71 •…玻璃纖維切股毯 22…… …膠黏劑 72 ••…玻璃纖維表面毯 3 ....... …研磨粒 87···.. ••…底盤 2524 201132453 [Explanation of main component symbols] 100 ···· ... adjuster 3, ·····—abrasive grain 100, ... adjuster 4... •...glass fiber surface blanket 101 ···· ...step glass fiber 102 ···· ...Step 5: ..... Resin layer 103 ···· ...Step 51 •...Crack 104 .... ...Step 6...... ..... Substrate 2 .... ... carrier board 6, ..... substrate V ... ... carrier board 7 ... ... · preform 21 ... ... pit 71 ... ... glass fiber cleavage blanket 22 ... ... adhesive 72 ••...glass fiber surface blanket 3 ....... ...abrasive grain 87···.. ••...chassis 25