TW201131009A - Vacuum processing device and processing method performed by the same - Google Patents

Abstract

In a vacuum processing device, elevators 30L and 30P are driven, and a work piece W is installed at a transportation body 52 of an upper side and a lower side. Several motors 51 are driven at the same time. A movement, toward B direction, of the transportation body 52 of the upper side, and a movement, toward C direction, of the transportation body 52 of the lower side are performed at the same time. Next, elevators 30L and 30P are driven, then the work piece W uplifts and is received in a vacuum chamber of an opposite side.

Description

201131009 j^^oyyu VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a vacuum processing apparatus and a processing method using a vacuum processing apparatus. [Prior Art] In a vacuum processing apparatus such as a chemical vapor deposition (Chemlcal Vap〇rDep() siti()n, CVD), which includes a carrier chamber and a processing chamber, the substrate or the like is usually used in the following manner. The workpiece (read) is carried out at the US: it is carried into the vacuum preheating chamber and preheated. The pre-added parts are transported to the processing chamber and rided. The processed workpiece is returned to the hot chamber' and carried out to the outside of the apparatus. In such a device, if the element is formed, the lower workpiece cannot be cast. For this reason, it is known that the sputum and the ejector are as follows: a workpiece is transported from the vacuum preheating chamber to the processing chamber (for example, the vacuum processing device returned from the processing chamber is disclosed in Japanese Patent Laid-Open Publication No. Hei No. Hei. If the operation of the workpiece (4) is not completed, the true time-changing blush member cannot be transported to the processing chamber. Therefore, the invention is required for the transportation. 201131009 j*tzo^pu The vacuum processing device of the present invention. The second package includes a first vacuum chamber having a first opening, a second true first sealing plate opening portion = a portion, and a second sealing plate The second 筮1 is called an elevator, and the first sealing plate is pressed against the peripheral portion of the second liter 2 and 4 of the apparatus body, and the first vacuum chamber is sealed from the outside; The second vacuum chamber is sealed from the outside by the second opening of the apparatus main body, and the first sealing plate for transporting the first opening from the first loading port is at least 9 a body to be processed; and a second conveying mechanism for conveying the body. The processing of the at least two Γ Γ 真空 真空 真空 真空 真空 所载 所载 第 第 第 第 第 第 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空(1) The sealing plate is held at the position of the first stage, and the step of the second lift is lowered. The step of sealing the second seal of the second vacuum chamber is at the position of the second stage; The transporting body is received; the step of holding the object to be processed in the vacuum chamber or the tray ay) on which the object to be processed is placed; and the second transporting body is placed in the second chamber (10) In the case where the first transporting body is driven by the first transport mechanism, the first transporting body is driven by the first transport mechanism, and the step of reducing the load to the second vacuum chamber is performed. The second transporting body is driven by the second transporting means, and the workpiece or the pallet on which the object to be processed is placed is moved to a position corresponding to the second vacuum chamber 201131009; The tray of the first dense container to be held is placed until the first vacuum _ plate supported by the first vacuum = lowering machine, and will be received. The tray of the object to be processed is placed in the second vacuum chamber, and the tray of the == processing body is moved to the second side by the j-th transfer mechanism. The second step 'and the second transport by the second transport mechanism; the chamber to-be-processed body __ and the second g; the steps of the two steps are at least partially processed by the same timing method = vacuum processing device Side: Plate =: descending machine, sealing === position at the position; by the second body of the second chamber of the second ventilated vacuum chamber, the first and second plates are connected and the mechanism is used to drive the ith conveyor, force = = by: 11: the step of moving the object to be processed in the vacuum chamber to the position corresponding to the second true; the second transfer mechanism is used to == the sealing plate and the housing in the second vacuum chamber And moving to the step corresponding to the first vacuum chamber; if the body is 201131009 liter, the machine rises, the second sealing plate is adhered to the second vacuum chamber, and the object to be processed accommodated in the vacuum chamber is accommodated To j

The money raises the second elevator, and the first dense plate (four) is at the nth, and the object to be processed accommodated in the second vacuum chamber is accommodated in the second straight step, and the first transport mechanism drives the first (1) the transporting body, and the workpiece sealing plate together with the object to be processed accommodated in the i-th vacuum chamber = the tilt at the position corresponding to the second true "and the second transport mechanism to drive the second (4) The second step (4) The second (fourth) plate is conveyed to the position corresponding to the first vacuum chamber by the second object to be processed, at least in part, at the same timing. [Effect of the Invention] The object to be processed is housed in the second vacuum chamber by the first transport mechanism, and the object to be processed is housed in the second vacuum chamber by the second transport mechanism. 1 The above features and advantages of the present invention can be made more apparent. The following is a detailed description of the embodiments as follows: [Embodiment] (Embodiment 1) Hereinafter, a vacuum processing apparatus and a drawing of the present invention will be described together. A cross-sectional view in a plan view, and FIG. 2 is a cross-sectional view taken along line II-II of FIG. Fig. 3 is a cross-sectional view of the ΠΙ-ΙΙΙ line of Fig. 1. The vacuum processing apparatus 100 has a stacking chamber (Lc: L〇ck Chamber) 2, a processing chamber (PC: Process Chamber) 3, and a transfer chamber 4 The body frame 1. The opening portion 1L· is formed in the region 201131009 of the body frame 形成 forming the bearing chamber 2, and the imaginary structure 1 IP is formed. The opening portion is in the figure i is the opening of the opening portion Garden body frame factory installation

The top shot is kc, and the LC that can be opened and closed is placed in the opening 1L to carry out or move the workpiece (the object to be processed). Moreover, the sealing plate 6 is used. ^ The inner surface side of the opening is provided with a PC sealing plate 7 at the lower portion of the LC. . The inner side of the main body frame 1 is disposed on the inner side of the body frame (4). The lift is called AB dry motor (mot〇r) 2 guide member 26, lifting member 27 (secret coffee) 25, ί ^ 5 25 22 bead screw two forward or reverse 'by making the roll up and down to make lifting The member 27 is moved up and down along the t-lowering member 27 on the member 28 of the guiding member 26, and is fixed to the connecting frame from the main body frame and the first sealing plate 5, and is separated from the butt:1 in the sealing position shown in FIG. Displacement between open positions. The sealing member U' of the opening portion 1L is sealed from the outside by pressing the LC upper sealing plate 5 against the sealing member 11. The lowering machine 30L is provided with an elevator 30P on the side corresponding to the processing chamber 3. The elevator chaos and the brakes include a hydraulic cylinder (not shown) or a drive device such as a motor. The lift 3 children 201131009 and 3OP have 4 rods 31 respectively. The four links 31 of the elevator 30L are inserted through the main body frame 1 and protrude from the side of the carrying chamber 2 in the transfer chamber 4. Further, the four links 31 of the elevator 30P are inserted through the main body frame 1 and protrude from the processing chamber 3 side in the transfer chamber 4. Although not shown, in order to maintain the vacuum in the transfer chamber 4, the portions of the lifters 30L and 30P that penetrate the main body frame 1 are sealed. The four links 31 of the elevator 30L are reinforced by the connection of the reinforcing plates 32L. The four links 31 of the elevator 30P are reinforced by the reinforcing plates 32P. The transfer chamber 4 is connected to a vacuum device 19 including a valve and a vacuum pump for making the inside of the transfer chamber 4 vacuum. The transfer chamber 4 is formed longer in the length direction than the total length of the load chamber 2 and the process chamber 3, and is formed to be larger than the width of the load chamber 2 or the process chamber 3 in the width direction. Further, as shown in the following description, the height direction is formed to allow the link 31 to extend and contract. Therefore, the volume of the transfer chamber 4 is formed to be larger than the total volume of the volume of the load chamber 2 and the volume of the processing chamber 3. By raising the link 31 of the lifter 30L, the LC lower seal # plate 6 is pressed against the seal member 12 provided around the opening 1L of the main body frame 1, and the load chamber 2 is sealed from the transfer chamber 4. When the LC lower sealing plate 6 is lowered while the link 31 of the lifter 30L is lowered while being held by the link 31, the inside of the load cell 2 becomes the same environment as the transfer chamber 4. The carrying chamber 2 is connected to a vacuum device 14 and a vent system piping 15 including a valve and a vacuum pump for making the inside of the carrying chamber 2 vacuum. By raising the link 31 of the lifter 30P, the pc sealing plate 7 is pressed against the sealing member Η 201131009 JHZOVpn provided around the opening lp of the main body frame 1 and the processing chamber 3 is sealed from the transfer chamber 4. When the pc sealing plate 7 is lowered while the link 31 of the elevator 30P is lowered while being held by the link 3, the inside of the processing chamber 3 becomes the same environment as the transfer chamber 4. The high frequency electrode 16 is disposed in the processing chamber 3. A high-voltage electrode 16 is connected to the south power source 4, and the processing chamber 3 is connected to a gas introducing pipe 18 including a valve and a vacuum vacuuming device 17 and a raw material gas for vacuuming the inside of the processing chamber 3. At the time of carrying the chamber 2, a heater placed on the lower portion of the Lc is placed in a hung, and a tray 43L placed on the _42L is placed. A plurality of workpieces w are mounted on the tray machine. The power source wiring 44L of the heater is inserted into one of the links 31 and connected to a power source external to the device (not shown). The power supply wiring 44L may also be wound around the link 31. As shown in Fig. 11, the tray 43L is formed to have a size smaller than the opening portion 1L. A heater 42P placed on the PC adhesion board 7 and a tray 43p placed on the heater 42p are housed in the processing chamber 3. A plurality of workpieces w are mounted on the trays p. The power supply wiring 44p of the heater 43P is inserted into the inside of one link 31 and connected to a power supply outside the apparatus (not shown). The power supply wiring 44P can also be wound around the link 31. As shown in Fig. 1, the tray 43P is formed to have a size smaller than the opening portion 1L. In the transfer chamber 4, a transfer mechanism is attached to the two sections on the upper side and the lower side. As shown in Fig. 3, the transport mechanism on the upper side includes a pair of transport mechanisms 50UL on the left side of the main body frame 1 and a transport mechanism 5〇UR on the right side. The transport mechanism on the lower side includes a pair of transport mechanisms 50LL on the left side of the main body frame 与 and a transport mechanism 50Lr on the right side. Each of the transport mechanisms 5〇UL, 5〇UR, 201131009 jHzoypn 50LL, 50LR is described by the same configuration transport mechanism 50. In the following, the mechanism 5G includes the motor 5, and the transporting body 5 is the motor transport mechanism 5Q of the motor Miyazaki. The transport body 52 includes a core (), and the screaming of the singer In the workpiece mounting portion 52b, the σ Ρ 52b of the workpiece mounting portion b Ρ b b b b 且 且 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The motor 51 is an armor, and the horse's suspected shaft 54 protrudes toward the inside of the apparatus via a M + through hole provided in the main body frame. The front end of the shaft 1 is provided with a locking end = the front end of the shaft 51 of the motor 51 (four), and the bracket portion 52 & 52 of the protrusion = ^ = 52 is disposed to be sprayed with the bracket portion 52a. A center shaft 56 is fixed to the shaft core of the pinion gear 55, and a groove 56a for accommodating the locking member 54 of the motor 51 is formed along the shaft direction in the shaft %. The motor 51 rotates the rotating body 54 forward or reverse, whereby the pinion 55 that is locked to the locking member 54a can be rotated, so that the conveying body 52 including the bracket portion 52a is self-supporting on the guide plate 53. The 2 side moves to the processing chamber 3 side (B direction), or moves from the processing chamber 3 side to the carrying chamber 2 side (c direction). Both end sides of the guide plate 53 of the conveying mechanism 50UL or 50UR are fixed to the branch member 57, respectively. Each of the support members 57 is connected to a link 58a (see Fig. 3) of a cylinder (transport body spacing displacement member) 58. The branch member 57 is slidably mounted to the body frame! The guide body 61 (refer to FIG. 3) near the front wall or the rear wall. Both ends of the guide plate 53 of the transport mechanism 50LL or 50LR are respectively fixed to the support member 59 11 201131009 ί 259 connected to the gas rainbow (transport body spacer displacement member) 58 plus! The catching member 57 slidably mounts the link 58a of the guide body 62 (refer to FIG. 3) 58 attached to the side wall or the rear wall of the main body frame 1 from the cylinder. Then the support member 57 and the support member 59 It is guided by the guide body 61 or the guide body 62, and is displaced toward the direction of the arrow A of the device. With the displacement of the support member 57, the transport body 52 and the pinion 55 on the A ttH53 and the guide 53 are displaced at the same position = toward the center side of the apparatus. The details are described below, and the drawings do not drive the state of the upper mechanism and the state of the L and 5qur cylinders = floor member 57, the guide plate 53, the conveying body 52, and the pinion gear. The state of the main portion of the conveying mechanism shown in Fig. 4 in the shape L of the shape of the link tearing elongation (moving in the eight directions). In other words, when the link 58a of the red 58 is extended and the carrier % and the center of the pinion & disc guide are moved, the first member 54a can be held in the rotation shaft 56 2 of the pinion 55 as follows. In the state of FIG. 5, the conveyance body 52 can be moved from the side of the carrying case 2 to the processing to the 3 side (B direction) or the side of the processing chamber 3 (C direction) by the driving. . F戟 to z Next, a processing method using the vacuum processing apparatus in the present day (10) shown in the first embodiment will be described based on the flowcharts shown in Figs. 6 and 7 . In order to clearly understand the treatment method of the present invention, the case of the anti-reflection film is exemplified, but this is only an example, and this 4 = 12 201131009 ^ ΗΖ δνριι The processing method of the empty processing device can be applied to all the inclusions included in the inventive subject matter. Method. Further, in the flowcharts shown in Figs. 6 and 7, LC indicates = carrier chamber, and PC indicates processing chamber.

When the processing by the vacuum processing apparatus is started, first, in step S1, the vacuum processing apparatus 1 is set to the initial state, or it is confirmed that it has been set to the initial state. In this case, the initial state is set as follows. The transport mechanisms 50UL and 50UR on the upper side of the transport mechanism 50 and the transport mechanisms 52 of the four transport mechanisms of the lower transport mechanisms 50LL and 50LR are located on the side wall side of the main body frame 1, that is, at the pullback position. The link 31 of the elevator 3〇 and the lifter 30R is raised to the uppermost position, and the lc lower sealing plate 6 seals the load chamber 2, and the PC sealing plate 7 seals the processing chamber 3. As shown in Fig. 2, the conveyance mechanism (hereinafter referred to as "lower side conveyance body") 52 of the conveyance mechanism 5〇L1 and 50LR on the lower stage side is located on the LC side, and the conveyance mechanism of the conveyance mechanism 50UL and 50UR of the upper stage side (hereinafter referred to as The "upper side transfer body" 52 is located on the PC side. In the above-described state, the heater 42L and the tray 43L are placed on the LC lower sealing plate 6, and the heater 42P and the tray 43P are placed on the PC sealing plate 7. After recognizing the above initial state, the vacuum device 驱动 9 is driven to make the transfer chamber 4 a vacuum. When the transfer chamber 4 is brought into a vacuum, as shown in Fig. 8, the LC upper sealing plate 5 is opened and the workpiece w is loaded into the carrier chamber 2 (step S2). When the LC upper sealing plate 5 is opened, the motor 21 is driven, and the ball screw 25 is rotated by the bevel gear 22 which is attached to the rotating shaft of the motor 21 and the bevel gear 23 attached to the tip end of the ball screw 25. With the rotation of the ball screw 25 in accordance with 13 201131009, the elevating member 27 is guided by the guide member %, and the LC upper sealing plate 5 fixed to the connecting member 28 is lifted up. By rotating the connecting member 28 relative to the lifting member 27, t can make the upper portion (four) shame 5 from Fig. 8; although the anti-reflection film of the solar cell is formed in the process of 3, the main surface is Side forming (4) A plurality of solar cell substrates including a single crystal slab substrate, an amorphous slab substrate, or a polycrystalline slab substrate are used as workpieces by (4) the face of the electric riding (de screaming...f_) It is housed in the carrying room 2. When the solar cell substrate is thin, in order to prevent the substrate from being broken, a non-contact Bernoulli (B_sec) suction structure is used, and each solar cell substrate is placed on the tray. When the loading of the ride w is completed, the service motor 21 is reversed, and the load chamber 2 is sealed by the LC upper sealing plate 5. In addition, Fig. 8 is a view showing the workpiece W placed on the tray 43p accommodated in the processing chamber 3. However, the workpiece W is not disposed on the (four) 43p accommodated in the processing chamber 3. Next, the vacuum device 14 and the vacuum crack 17 are driven to bring the load chamber 2 and the process chamber 3 into a vacuum (step S3). Then, the lifter 3GL is driven, and the workpiece mounting portion 52b of the lower transfer body 52 is positioned between the tray 43L and the Lc lower-side plate 6 (hereinafter, this position is referred to as "lower holding position"). In addition, the workpiece mounting portion 5 of the upper transfer member 52 is placed between the tray 43P and the PC lower sealing plate 7 (hereinafter, this position is referred to as "upper holding position") (step S4). . Next, the conveyance mechanism 5呱 and the 5 hidden gas of the upper stage side are driven to 201131009 tr long, and the 58ί: drought 58a is extended toward the center side of the apparatus (step s5). The front end of the transfer mechanism 50UL and 50UR of the upper stage side is at the position of the side 30P of the tray 43p as shown in Fig. 9 by borrowing ## a. In the right domain state, the elevator 30 is next driven to contract the link 31 downward. By the miscellaneous work, the domain 43p charms the upper segment_transport mechanism

Liler. And the pallet mounting portion 52b of the 5〇UR, and the PC sealing plate 7 and the porter 42P are held by the link 31 of the elevator 3〇p. Figure ι〇 indicates the 2 . From the state of _10, the elevator is further driven to contract the link 31 to the lowest position (step %). In a state where the link 31 of the lifter 30P is contracted to the lowermost position, the front end of the link is lower than the reading and placing portion 52b of the transport mechanism 5GLL and 5GLR on the lower stage side. Next, the conveyance mechanisms 5〇LL and 5气LR of the lower stage side are driven, and the link 58a is extended toward the center side of the apparatus (step S7). By the extension link 58a, the end of the workpiece mounting portion 52b of the upper-stage conveying mechanisms 5〇UL and 5〇UR reaches a position overlapping the side end portion of the tray 43L·. When this state is reached, the elevator 3〇L is next driven, and the link 31 is contracted to the lowest position (step %). By this operation, as shown in FIG. 11, the tray 43L is placed on the tray mounting portion 52b of the conveying mechanisms 50LL and 5^) LR on the lower stage side, and the LC lower sealing plate 6 and the heater 42L are lifted. The 30L link 31 is held. In a state where the link 31 of the elevator 3〇L is contracted to the lowermost position, the front end of the link 31 is located lower than the workpiece mounting portion 52b of the conveyance mechanisms 50LL and 50LR on the lower stage side by 15 201131009 OHzoypu. In the state shown in Fig. 11, that is, in the state where the step S8 is completed, the LC lower sealing plate 6 and the heater 42L which seal the load chamber 2 are held by the link 31 of the lifter 30L. Then, the tray 43L accommodated in the loading chamber 2 and the workpiece W placed on the tray 43L are mounted on the workpiece mounting portion 52b of the lower-stage conveying mechanisms 50LL and 50LR. Further, the pc sealing plate 7 and the heater 42P that seal the processing chamber 3 are held by the link 31 of the elevator 30P. Then, the tray 43P accommodated in the processing chamber 3 and the workpiece W placed on the tray 43P are mounted on the workpiece mounting portion 52b of the upper-stage conveying mechanisms 50UL and 50UR. Then, the motor 51' of the transport mechanisms 5〇LL and 5〇LR of the lower stage side is driven, and the transport body 52 of the lower stage side is moved in the b direction of FIG. 2, and the M 43L and the workpiece w placed on the tray 43L are supported. When the position corresponding to the processing to 3 has been reached, the motors 51 are stopped. Further, each of the motors 51 of the transport mechanisms 50UL and 50UR on the upper side is driven to move the transport body 52 on the upper side in the direction C of FIG. 2. If the tray 43p and the workpiece W disposed on the tray 43p have reached the load chamber 2 At the corresponding position, each of the motors 51 is stopped (step S9). Fig. 12 shows the state in which the step S9 has been completed. Next, the elevator 30P is raised to the lower holding position. By this operation, the tray 43L and the workpiece w mounted on the lower conveyance body 52 are transferred to the heater 42p mounted on the PC/sealing panel 7 (step sl). Then, the motor 51 of the lower conveying mechanism 5〇LL and 5〇LR is driven to retract the lower workpiece loading unit 52b, and the front end of the conveying body is moved toward the side wall side of the main body frame 1 to The front end of the tray 16 16 201131009 The position where the part is overlapped (in the state of the cow U, Μ 43Ϊ·Λ Figure 13 shows this state. The figure can be passed between the lower side conveyors. (Step t raises the lift 3〇L In the upper part, the barge/stalk which is placed in the upper part is moved by the 5th sea, and the tray 43P and the worker's w wire which are carried on the upper side of the transport body 52 are reloaded to the lower sealing plate 6

R °7^ on. Then, each of the motors 51' of the transport mechanism 50UL w & on the upper side is driven to retract the workpiece mounting portion 52b on the upper stage side.

Then, the distal end of the transport body 52 is moved toward the side wall side of the main body frame 1 to a position where it does not overlap the end portion of the tray 4 = (step si3). Figure μ table does not have the shape, %. In the state shown in Fig. 14, the workpieces on the upper side and the lower side are placed. The ends of the P 52b are located closer to the side wall side of the main body frame 1 than the side end portions of the LC lower sealing plate 6 and the pc sealing plate 7. = Next, the elevators 3〇L and 3〇p are driven to extend the respective links 31 to the uppermost portion (step S14). By this operation, the pc sealing plate 7 is pressed against the sealing member 13 around the processing chamber 3, and the processing chamber 3 is sealed from the transfer chamber 4. Further, the heater 42p, the tray 43L, and the workpiece W are housed in the processing chamber 3. At the same time, the LC lower sealing plate 6 is pressed against the sealing member 12 around the carrying chamber 2, and the carrying chamber 2 is sealed from the transfer chamber 4. Further, the heater 42L and the tray 43P are housed in the carrying case 2. Fig. 15 shows this state. Referring to Fig. 15 and Fig. 2, the tray 43L and the workpiece w housed in the carrying case 2 in Fig. 2 are housed in the processing chamber 3 in Fig. 15 . Further, the tray 43P accommodated in the processing chamber 3 in Fig. 2 is housed in the carrying chamber 2 in Fig. 15 . 201131009 厶 O^pu· In step S15, it is determined whether or not θ is the first process in the processing chamber 3 this time. When the initial processing is performed, the handling workpiece w is processed in the carrying chamber 2, so that the unloading of step S16 is not required. Therefore, the processing of the workpiece W is performed in the processing chamber 3 of the second step H2. If it is not the original

As shown in the following processing flow, the workpiece w that has been processed in the J chamber 3 is unloaded in the carrying chamber 2, and the solar cell is formed in the processing chamber 3 in the processing chamber 3 at the same time. When the film is reflected, the treatment under °. The inside of the processing chamber 3 is turned into true/by the vacuum device 17 to introduce a process gas such as a gas or a gas into the processing chamber 3 from the gas introduction pipe 18. The workpiece W as the 13-cell battery substrate is heated to 28 (TC or more by the heater 42p, and the SiH4 gas is introduced from the gas introduction pipe 18, and the high-frequency electrode π = RF is applied by the high-frequency power source 41 (Radio The voltage 'RF' voltage is generated to generate electropolymerization. When 43 L is formed of carbon, the tray 43L serves as a counter electrode. A nitrogen cut film is formed on the surface of each of the W pieces by the upper path. The nitrogen cut film contains % 'forgiveness H2 and the dangUng b〇nd bond of the main surface of the ruthenium substrate have the effect of reducing the defect density and prolonging the luminescence lifetime. 、, σ If the processing of the workpiece W is completed in the processing chamber 3, In step S18, it is judged that: the shirt is the last button. If it is not the last process, then

The processing of step S19 is set. If it is the last processing, the step magic processing is performed. In step S19, as shown in Fig. 2, the elevating mechanism 2 is driven to open the LC upper crucible sealing plate 5, and the next workpiece w is placed on the tray 43P in the carrying chamber 2. When the workpiece w is housed in the carrying chamber 2, the upper portion is closed; 201131009 JHZoypu is sealed with the plate 5, and when the step S19 is performed, the Γ/ς ς = becomes a vacuum. The processing is carried out simultaneously.工件The workpieces in the processing chamber 17 of step 817 are so 15: the processing of steps S2 to S3. Here, when the state shown in FIG. 2 is compared with the state shown in FIG. 2, the moving of the lower stage side is located on the side of the carrying room 2, and in FIG. 15, the moving body of the upper side is located. 52 is located at SI 2 in FIG. 2 and on the side of the carrying room 2 in FIG. Therefore, in addition to the tray w on the side of the load-bearing chamber 2 and the transport body 52 arranged on the upper side of the tray, the loading body on the side of the reading chamber 3 and the workpiece W arranged on the tray are hung. The processing of steps S20 to S30 is the same as steps S4 to S14 except that the upper body 52 is placed on the lower side. The method of transferring the tray and the workpiece to the transport body 52 on the upper side and the lower side and transporting the transported lifts 3GP, 3GL, and the transport mechanism 5G are described in steps S20 to S30, and therefore should be fully understood. Figure 6 is a treated wire. Therefore, the re-explanation here is omitted. When the step S30 is completed, the state shown in Fig. 2 is obtained. In other words, the workpiece W that has been initially accommodated in the carrying chamber 2 is processed in the processing chamber 3, and is returned to the inside of the carrying chamber 2 in a state of being listed on the tray 43L. Further, the tray 43p initially placed in the processing chamber 3 is placed in a state of being placed in the processing chamber 3 in a state of being arranged. In step S31, the workpiece w returned to the carrying chamber 2 is unloaded. Further, the workpiece W is processed in the processing chamber 3. Next, it is judged whether: 19 201131009 The processing performed in the room / 3 is the last processing (steps such as). When it is not the last processing but continuous processing, return to the step,

The process of accommodating the workpiece W in the carrying chamber 2 and processing the workpiece W in the processing chamber 3 is repeated. When it is the final treatment, the processing of the step is performed. When it is determined in the step S18 that the last processing is performed, the processing in the step s33 or lower is performed. The process of steps S33 to S43 is the same as the process of steps 〇 to s3, and the description thereof is omitted. The process of steps S2q to S3g is for ending the processing by returning the processed read W in the processing chamber 3 to the carrier chamber 2. Therefore, after the step S43, the workpiece w returned to the inside of the carrying room 2 is unloaded (step S44) and all the processing is ended. When it is the last processing in step S32, the processing below step s45 is performed. The processing of steps S45 to S54 to S43 is the same as the processing of steps S4 to S43, and thus the description thereof is omitted. The processes of steps S45 to S54 to S43 are for returning the workpiece w to which the processing chamber 3 has been processed to the carrying chamber 2 and ending the processing. Therefore, after the step S43, the workpiece W returned to the inside of the carrying room 2 is unloaded (step S44) and all the processing is ended. In the above-described processing flow, when it is judged as the last processing in step S18 and the processing of steps S33 to S44 is ended, the number of processing is odd. When the number of times of processing is an odd number, as shown in Fig. 2, the following section_the transport body 52 is located on the side of the load-bearing chamber 2, and the transport body 52 on the upper-stage side is in the state of the processing chamber 3, and is completed. On the other hand, when it is determined in step S2 that the last processing has ended with steps S45 to S54 to S43 to S44, the number of processing is an even number. When the number of times of processing is an even number, as shown in Fig. 15, the conveying body 52 on the lower side is located on the side of the processing chamber 3, and the conveying body 52 on the upper side is in the state of the side of the carrying chamber 2, and is completed. This state is different from the initial state. Therefore, it is necessary to move the transport body 52 on the upper side and the lower side to the initial state before the completion of all the processes, or to perform the process for bringing it into the initial state at the next start. In addition, in the process flow shown in FIG. 6 and FIG. 7, the transport mechanism 50 in the retracted position can be driven in the state where the lifters 30L and 3〇P are raised to the uppermost step S14, and the lower side can be driven. The conveyance body 52 returns to the side of the carrying case 2, and the conveyance body 52 of the upper stage side is returned to the processing chamber 3 side. In other words, when the workpiece W is transported, the transport body 52 on the lower stage always transports the workpiece W from the side of the load chamber 2 to the side of the processing chamber 3, and the transport body 52 on the upper side always transports the workpiece W from the side of the processing chamber 3 to the side of the load chamber 2 . On the other hand, the conveyance body 52 on the lower stage side always conveys the workpiece w from the processing chamber 3 side to the carrier chamber 2 side, and the upper conveyance body 52 always conveys the workpiece w from the carrier chamber 2 side to the processing chamber 3 side. Therefore, when the transporting scales of the transporting bodies & are in the same direction, the processing is terminated in a state different from the initial state, regardless of whether the number of processing times is odd (four) or even. As described above, the vacuum processing apparatus 1A of the present invention shown in the first embodiment conveys the tray 43P of the workpiece W in the conveyance timing of the tray 43L including the workpiece w. That is, the workpiece w is conveyed at the same time. Therefore, after the vacuum chamber is moved out of the workpiece, the manual phase is started to be moved into the vacuum chamber: the transfer time can be greatly shortened compared to the vacuum processing device of the crucible. Further, the vacuum processing apparatus 1 of the present invention includes a transport chamber 0, which has a volume larger than the total volume of the volume of the load chamber 2 and the volume of the processing chamber 3. Therefore, when the LC lower sealing plate 6 that seals the load chamber 2 or the processing chamber 3 from the transfer chamber 4 is opened, or? (When the plate sealing plate 7 is connected to the transfer chamber 4, the entire vacuum can be made substantially the same as the transfer chamber 4. ^4 indicates that the transfer chamber 4 has a sufficient degree of vacuum, even when carried to 2 or When a sufficient degree of vacuum is not reached in the processing chamber 3, the degree of vacuum may be close to the degree of vacuum of the transfer chamber 4, thereby shortening the vacuum processing time of the load chamber 2 or the processing chamber 3. Turning to the above reasons, with the previous device In contrast, the processing time of the vacuum processing device 100 of the present invention is greatly shortened. As an example, when the vacuum processing apparatus 1 is a substantially rectangular parallelepiped of 200 cm (length) x 21 〇 cm (width) χ 50 cm (height), In the vacuum processing apparatus of the prior art, it takes about 4 minutes to complete the entire processing. In contrast, in the vacuum processing apparatus of the first embodiment, it may be about 1 minute to about 5 minutes, wherein 'in the processing flow of FIG. 6, The time required for the workpiece replacement in the step S9 is extremely short, and is about 3 seconds. Further, in the above-described first embodiment, the elevators 3〇L and 3〇P may be housed in the transfer chamber 4. Formed as not set The vacuum device 14 connected to the carrying case 2 or the one or both of the true/belt 17 connected to the processing chamber 3 is configured to have the function of the real device 19 connected to the transfer chamber* (Embodiment 2) Fig. 16 is a cross-sectional view showing a vacuum processing apparatus according to a second embodiment of the present invention. The vacuum processing apparatus 101 of the second embodiment differs from the air handling apparatus 100 of the embodiment 22 22 201131009 in that Fig. 17 is an enlarged plan view showing a main portion of the transport mechanism 70. The transport mechanism 70 includes a plurality of rollers 71 and support members 72 that rotatably support the rollers 71. A bevel gear 73 is fixed to the front end of the rotating shaft. On each of the bevel gears 73, a bevel gear 74 meshing with the bevel gear 73 is fixed to the rotating shaft body 77. The bevel gear 75 meshes with one of the plurality of bevel gears 74. The bevel gear 75 has a hollow rotating shaft 76, and a groove 76a along the axial direction is formed in the hollow rotating shaft 76. The front end of the rotating shaft 54 of the motor 51 described in the first embodiment is fitted into the groove 76a. a locking member 54a is provided. In the structure When the motor 51 is driven to rotate the rotating shaft 54, the bevel gear 75 that is integral with the rotating shaft 76 is rotated by the locking member 54a. The rotation of the bevel gear 75 is via the bevel gear 74 - the rotating shaft 77 - the bevel gear 73 Each of the rollers 71 is rotated in the clockwise direction and the counterclockwise direction in the drawing by the normal rotation and the reverse rotation of the rotary shaft 54 of the motor 51. Similarly to the conveying mechanism 50, the conveying mechanism 7〇 Four bodies are attached to the main body frame j: 7〇UL on the left side on the upper side, 7〇UR on the right side, 70LL on the left side on the lower side, and 7〇LRo on the right side as shown in Fig. 19, and the cylinder 58 is driven to be transported. When the mechanism 7 is advanced, the roller 71 reaches a position overlapping the front end portion of the tray 43l or 43P. When the elevator 3〇L or 3〇p is lowered, the disk 43L or 43P is transferred to the roller 71 together with the workpiece w, and the motor 51 is rotated to transport the tray 43L or 43P. When the conveying mechanism 70 is advanced, as shown in FIG. 18, the locking member 54a provided on the rotating shaft 76 of the motor 51 is fitted into the groove 76a of the bevel gear % 201131009 - -r - the rotating shaft 76, so Rotation can be communicated to each roller 71. The processing method using the vacuum processing apparatus shown in the second embodiment can be performed in the same manner as the processing flow shown in Figs. 6 and 7 . Here, the pro-71 can be arranged over substantially the entire length of the vacuum processing apparatus 101 in the longitudinal direction, and thus, the tray 43L or 43P can be transported at any position on the roller 71. Therefore, it is not necessary to pay attention to the initial position or the end position as in the case of the transport mechanism % of the embodiment.

In the vacuum processing apparatus 1〇1 of the present invention shown in the second embodiment, the same effects as those of the vacuum processing apparatus (8) shown in the first embodiment can be obtained. Regarding the transport time of the vacuum processing apparatus 1〇1, the time of the workpiece replacement f in the step S9 in the processing flow of Fig. 6 is slightly longer, and it is 1q to i5 seconds, but it is simple to raise. g, the secret is that the secret is placed on the ^ and transported. Therefore, there is no need to trust the member to be used. Clothing (Embodiment 3)

The structure of the wells Jit1 and 2 is as follows: when the lifter of the tray is lowered or lowered, the vacuum conveyance device (10) constructed by the three machines for transporting the support to the conveyor is not included. The body 20 is a cross-sectional view in a plan view of the vacuum processing apparatus 1 () 2 = 3 Ϊ XXI gauge cut sectional view, and Fig. 22 is a cross-sectional view taken along the line 。 ΧΧΙΙ ΧΧΙΙ. The robot processing device (1) 2 and the embodiment mechanism 5 are changed into a transport mechanism, and a transport mechanism is attached to the vacuum processing device 24 201131009 JHZO^pil segment side and the lower segment side. The transport mechanism on the upper side includes a pair of transport mechanisms 8〇UL on the left side of the main body frame 1 and a transport mechanism 8GUR on the right side. The lower section_relocation structure includes a pair of main body frames ^ a transport mechanism 80LL on the left side and a transport mechanism 8〇LR on the right side (particularly the milk map 22). Since each of the transport mechanisms 8〇UL, 8〇UR, 8〇11, and 8 is composed of the same constituent members, the transport mechanism 8G will be described below. The conveying mechanism 80 includes a conveying member 81 that extends toward the outside of the apparatus through a through hole formed in the main body casing (CaSe) 1. The conveying member 81 has a length d from the load chamber 2 to the processing chamber 3 and a distance d between the conveying members 81 at the front of the loading member 81 and an interval d2 between the front ends of the female __. That is, the interval 4 of dl >dw>d2^: is larger than the lower member of the Lc lower sealing pair 81 ^ L〇\" ^ Further, the length of the workpiece cutting portion 82 is slightly larger to a length of three. However, as described below, the member i or the process is positioned relative to the carrying chamber 2 or the processing chamber 3 relative to the workpiece mounting portion 82 in the process of positioning (four) as not reaching the adjacent; in the state of the setting, the workpiece is loaded separately, in the figure on Occupy A air load to a length of 2. In the middle, the transport unit 82 on the right side is the transport 25 on the upper side, and the transport unit 82 on the side of the transfer mechanism 80LR or 8〇 is the outer transport unit 81. The cow ° ° ^ ^ (bel丨ows) 83 and covered around. . The knife is wrong by the bellows body shell! The corrugated two mounted on the wall surface is protruded through the inside. In the case where the bellows 83 is inserted, the transfer chamber 4 seal 84: and the button (4) are attached to the transfer member 81 and the bellows 83 at the same time. The moving mechanism 90 includes a motor 9 and a ball is provided with a moving mechanism. The motor 91 is mounted on the moving member 96; it is fixed to the cymbal. On the motor shaft 91, on the rotating shaft, the front end of the holding member rod % is fixed with =9923' which is merging with the gear 92. When the ball screw drives the motor 91 to rotate the gear 92 forward or reverse IS, the moving member % and the holding member % and the motor 9; the sealing surface of the groove 83 and the moving member 96 are formed as pieces. Change or shrink. The motor 91 is driven to move the moving mechanism to the ball screw 95, whereby the placing portions 82 of the conveying mechanism 9A can be positioned opposite to the carrying chamber 2 and to the processing chamber 3 as shown in FIG. Corresponding position. The following is a description of a method of transporting the workpiece w by the tool-processing device 1〇2 of the embodiment 3 described above with reference to Figs. 20 to 28 . ~ 26 201131009 jn^oypu

As shown in Fig. 21, the vacuum processing apparatus 1〇2 is in a state in which the workpiece w is arranged on the tray 43L carried to the inner trough, and the elevator 3〇L is raised to the uppermost portion, and the LC lower sealing plate is used. 6 to seal the load compartment 2 . Further, the workpiece W may be arranged on the tray 43P accommodated in the processing chamber 3, and the elevator 3〇p may be raised to the uppermost portion, and the processing chamber 3 may be sealed by the PC lower sealing plate 7. Further, all of the conveying members 81 of the conveying mechanism 80 are maximally extracted to the outside of the apparatus so that the workpiece placing portion is responsive to the processing chamber 3. In the above-described state, the lifter 30L is lowered, and the lower portion side transport mechanism is stopped at the position where the workpiece mounting portion 82 on the lower stage side reaches the middle between the tray 43L and the LC lower shield 6. [The transfer member 81 of the OH 8GLR moves toward the back side in the transfer chamber 4... The position where the workpiece mounting portion 82 corresponds to the load chamber 2 is stopped. And H' drives the motor % to stop the conveying member 81 of the upper conveying mechanism 80UL toward the rear side of the conveying chamber 4 at a position corresponding to the carrying chamber 2 at the workpiece mounting portion 82. When the lifter is lowered, the workpiece mounting portion on the upper stage side, the position between the tray 43Ρ and the PC sealing plate 7 is stopped =: the transfer member 81 of the output =, and _ is transferred from the corresponding position stop. Fig. 2^ = 2 parts, 8 and 2 processing chambers 3, and the machine is placed, so that the lifting and lowering of the workpiece of the tray 43L盥 conveying member 81 is carried out by the operation of the tray 82: The placement of the load placed on the lower side is Μ2 The LC lower sealing plate 6 27 201131009 and the heater 42L are held on the link 31 of the elevator 30L. Further, the tray 43P and the workpiece W are placed on the workpiece mounting portion 82 of the conveying member 81 on the upper stage side, and the PC sealing plate 7 and the heater 42p are held on the link 31 of the lift 30P. Fig. 23 shows this state.

Then, the transport member 81 on the upper stage side is moved toward the back side of the transport chamber 4, and the position where the tray 43P and the workpiece W correspond to the load chamber 2 is strictly stopped. Then, the conveying member 81 on the lower stage side is moved from the conveying chamber 4 in the drawing direction, and is stopped at the position of the tray 43L and the workpiece W and the processing chamber 3. Fig. 24 shows this state. Then, the lifter 30P is raised, and the position where the heater 42p lifts the tray 43L and the PC sealing plate 7 does not reach the workpiece mounting portion 82 is stopped. Then, the lifter 30L is raised, and the heater 42L lifts the holder 43P and the LC lower seal member 6 does not reach the position where the ji member mounting portion 82 is reached. Fig. 25 shows this state. 々

Next, as shown in FIG. 26, the conveyance member 81 of the lower stage side is sent to the back side of 4 to move. Then, the lifter 3〇p is raised to the uppermost stage so that the tray 43L and the workpiece W are housed in the processing chamber 3. Further, the pC sealing plate 7 is pressed against the reading member U provided around the opening portion ι of the main body 丨, and the processing chamber 3 is sealed from the transfer chamber 4. Then, the transport member 81 on the upper stage side is moved in the direction from the transfer chamber 4, and after the transport body 82 and the processing chamber 3 correspond to each other, the lifter 30L is raised to the uppermost stage, and the tray is hungry. W is housed in the carrying room 2. Further, the sealing member 28 201131009 34Z»ypit provided around the opening 1L of the main body frame 1 is sealed by the Lc lower sealing plate, and the load chamber 2 is sealed. Fig. 27 is a view showing the same as Fig. 27, whereby the tray 43L and the workpiece W_ accommodated in the socket 2 can be accommodated in the processing chamber 3, and the tray 43p accommodated in the #^ chamber 3 can be accommodated. The workpiece w is accommodated in the carrier chamber 1. Therefore, the vacuum processing split 1〇2 of the third embodiment can be handled in the same manner as the processing flow described in FIGS. 6 and 7. The vacuum processing apparatus of the τ state 3 can also achieve the same effects as the vacuum processing apparatus and 101. The time of the jade piece of the step S9 described in the processing flow of Fig. 6 in the production process of the vacuum processing apparatus 1〇2 is about 3 to 5 seconds. Further, in the third embodiment, the conveying member 81 is moved by the moving mechanism 90 including the motor 91 and the roller %. At this time, the conveying member 81 can be moved by the gas red. 9 (Embodiment 4) Fig. 28 shows a fourth embodiment. In the vacuum apparatus 103, the transfer chamber 4 is enlarged, and the space s of the workpiece mounting portion 82 for accommodating the transporter 80A is provided between the processing chamber 3 and the main body frame 。. When the workpiece mounting portion 82 of the transporting 80A is moved to the space § in the transport chamber 4, the lift 3〇L or 3〇pj can be moved while holding the tray 43L or 43P. Therefore, for example, if (4) In the state, the upper and lower moving members 8A_feeding member 81 are moved to move the workpiece conveying portion 82 to the space S toward the drawing material transfer machine, and then can be changed: 29 201131009 342»ypit In Fig. 27, the lifts 30L and 30P are simultaneously raised to the uppermost position. Therefore, the transfer time can be further shortened. (Embodiment 5) In the fourth embodiment, the needles are transferred to the trays by pallets. The case of the workpiece W is explained.

Fig. 29 shows an example in which only the red member w is moved. The difference between the processing device Π) 4 and the vacuum processing device shown in the t-th embodiment is that the tray is not provided. The workpiece in the vacuum processing apparatus 1〇4 is approximately the same size as the _43L or 43p of the vacuum processing apparatus_. When the lifters 30L and 30P are raised or lowered, the workpiece mounting portion 52b of the transport body 5: is located between the workpiece W and the LC lower sealing plate 6, or between the workpiece W and the PC sealing plate 7, The workpiece is reloaded from the workpiece mounting portion 52 to the elevator 30L or 30P, or the engineering W is transferred from the elevator 30L or 30P to the workpiece mounting portion 52.

29 is a view showing the configuration of the transport mechanism 5A of the embodiment i. However, the transport mechanism 7 of the second embodiment or the transport mechanism 80 of the third embodiment can similarly transport only the workpiece. w.实施 ( (Embodiment 6) Fig. 30 is a cross-sectional view showing the vacuum processing apparatus 1〇5 of the present invention in the sixth embodiment. The first difference between the vacuum processing apparatus 1〇5 of the sixth embodiment and the vacuum processing apparatus 100 of the first embodiment is that only the workpiece w is accommodated in the carrying chamber 2 and the processing chamber 3, and the tray and the heater are not accommodated. The second difference is that the processing chamber 3 includes a packingpiate μ, which is fixed 30 201131009

Then, (4) (ta) 62, and an anode electrode 63 disposed around _62. The third difference is that the LC lower sealing plate 6 or the PC sealing plate 7 and the guard w are conveyed by the conveying body 52, and the details will be described later. The third difference will be described with reference to Figs. 3G to 33. Fig. 31 is a cross-sectional view taken along the side perpendicular to the side surface of J 30, and Fig. 33 and Fig. 33 are views showing different states of the conveying body having the same cross section as Fig. 30. In the state which is not shown in Fig. 30, the lifter 3Gp is stopped in a state where the link 31 of the lifter 30P is lowered, and the workpiece of the PC stacking plate 7 is slightly higher than the transporter of the upper stage. The state in which the transport mechanism of the upper side and the cylinders 58 of the 50UL are driven to move the transport body 52 to the center side front j and reach a position where a part of the workpiece mounting portion 52b overlaps the side end portion of the pc sealing plate 7 is driven. Stop below. The link 31 of the elevator 3GP is lowered to the lowermost position. In the case of the workpiece mounted on the upper stage side of the board, the board is placed in the upper stage side, and the state of the workpiece mounting portion 52b in which the SI is placed on the pC sealing sheet 7 and the workpiece W is set. In the month of the present embodiment, the link 31 of the elevator 30 is not loaded with any articles. Then, the link 31 of the lifter 30L is lowered, and the f-plate lower f is slightly higher than the workpiece mounting portion 52b η of the transport body 52 on the lower stage side, and the lower lifter 3〇1 is stopped. The money cylinder 58 that drives the transport mechanism f 50 of the upper side is stopped, and the center of the money feed body 52 is lowered, and the portion of the member mounting portion 52b is stopped at the position where the side end of the PC sealing plate 7 meets. . Fig. 31 shows this state. 31 201131009 From the state of Fig. 31, the link 31 of the elevator 3〇L is lowered to the lowest position. By this operation, the LC lower sealing plate 6 and the workpiece W are mounted on the workpiece mounting portion 52b on the lower stage side. In this case, in the case where the lower sealing plate 6 and the workpiece w are mounted on the workpiece mounting portion 52b on the lower stage side, in the case of the embodiment, the link 31 of the elevator 3〇L is not provided. Carry any item. Fig. 32 shows this state. In the state of FIG. 32, the conveyance body 52 of the lower stage side is conveyed in the B direction, and the conveyance body 52 of the upper stage side is conveyed in the C direction. By this operation, as shown in FIG. 33, the workpiece w accommodated in the carrying case 2 moves toward the processing chamber 3 side together with the LC lower sealing plate 6. Further, the workpiece w accommodated in the processing chamber 3 moves toward the carrier chamber 2 side with the PC sealing plate 7. Thereafter, the lifter 3〇p and the conveyance mechanisms 50LR, 50LL, 50UR, and 50UL are driven by the method described in the first embodiment, and the workpiece w can be carried into the inside of the carrier chamber 2 and the processing chamber 3. The method of transporting the LC lower sealing plate and the PC 岔 sealing plate 7 and the workpiece W as shown in the above-described sixth embodiment can also be applied to the vacuum processing apparatuses 1〇1 to 1〇3 of the second and fourth embodiments. . As described above, according to the vacuum processing apparatus of the present invention, the workpiece W or the tray is conveyed at the conveyance timing of the workpiece or the tray. Therefore, the transfer time can be significantly shortened compared to the previous vacuum processing apparatus in which the workpiece is loaded into the vacuum chamber from the vacuum to the workpiece. Here, the present invention does not, in the case where the conveyance of another workpiece is completed during the conveyance of one of the workpieces, but also the case where the conveyance of the other workpiece during the conveyance of one of the workpieces is not completed. Further, the start of the transport is not limited to 32 201131009. The transfer of one workpiece starts and the start of transport of another workpiece, and the case where transport starts at different times is also included.蛐 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , In the case of the above-described embodiment, the towel H is loaded and raped, but it can be loaded and unloaded by vacuum (4): and it is not limited to the case where the processing chamber is one, and may be applied to A vacuum processing apparatus comprising a plurality of processing chambers. Further, in the above-described embodiment, the LC upper portion (four) plate 5 may be opened or closed from the main body frame, but the LC upper plate 5 and the door for carrying in and out of the object to be processed may be provided. The body frame is integrally formed. The towel-shaped surface of the above embodiment has a structure in which the processing chamber 3 is integrally formed with the main body frame, but the chamber wall of the processing chamber 3 may be opened or closed from the main body frame i. In the present invention, the apparatus body includes a body frame 1, and a vacuum chamber-shaped plate that is switchably mounted on the body frame i. The LC lower sealing plate 6 and the pc sealing plate 7 are formed as flat members, but they may be of any shape. For example, the Lc upper sealing plate 5 is a hat type or a dome (d〇) Me) shape. Further, the vacuum processing apparatus of the present invention can be variously modified within the scope of the gist of the invention. Red, as long as it includes the following items, the body can be placed with a second vacuum chamber having a second opening and a side having The second opening (4) 2 vacuum m seal thief covers the first opening, the second sealing plate covers the second opening; the i-th lifting 33 201131009 1 'the first (four) plate is leaked to the device side portion' The vacuum chamber is sealed from the outside; the second sealing plate is pressed against the second opening of the housing body

Processing body; with 1 flute. At least the second transport mechanism is placed on the first seal plate that is opened, and is used to transport at least the object to be processed placed on the 2M board. The processing method of the vacuum processing apparatus includes the following steps: a step of lowering the first elevator, sealing the first position of the i-th vacuum chamber, and lowering the second elevator, and the social protection is completed. a step of holding the second sealing plate at the position of the second stage; and the step of holding the tray accommodated in the i-th vacuum chamber or the tray on which the object to be processed is placed in the vacuum chamber by the first conveying body a step of holding the object to be processed or a disk loaded with the body; and driving the upper ft 2 by the first conveying mechanism to move the object to be processed or the tray on which the object to be processed is placed to a position where the substrate is to be driven In the second step, the second transport unit is moved to the second vacuum chamber by the second lift chamber. The step of accommodating the processing body or the tray on which the object to be processed is placed in the first vacuum chamber raises the (4) 2 sealing plate supported by the second elevator, and places the object to be processed in the vacuum chamber to be processed. ^ the second vacuum chamber step; and by the first transport mechanism The second transport _ _ the second transport "make" the step of moving the tray to be processed to the object to be processed to the position of the object i by the second transport The step of the object to be processed or the region in which the object to be processed is placed corresponds to the first vacuum chamber, and at least one β may be performed at the same timing. Further, the processing method using the vacuum processing apparatus according to the present invention is a step of lowering the first elevator and holding the sealing plate for sealing the i-th vacuum chamber at the position of the first stage; and making the second elevator a step of holding the second sealing plate that seals the second vacuum chamber at the position of the second stage; and the first transfer member is processed in the first vacuum chamber by the first transfer body a step of holding the body in the step 2 and holding the body, and holding the second sealing plate and the object to be processed contained in the second vacuum chamber; and maintaining the body; The first transfer member is driven, and the second transfer member is driven by the step-by-step transfer mechanism that is placed in the position of the first vacuum chamber and moved to the second vacuum chamber, and the second transfer member is driven. The plate is moved to the position corresponding to the ith vacuum/chamber at a position of $ with the object to be processed in the second vacuum chamber; the first elevator is raised, and the second J is sealed to the first vacuum chamber. 'The step of accommodating the object to be processed in the second vacuum chamber to the first vacuum f; and raising the second elevator to adhere the first sealing plate to the second true one, and to be purely true * a step of accommodating the object to be processed in the second vacuum chamber; and driving the i-th transfer body by the first transfer mechanism, and transporting the i-th dense plate and the object to be processed accommodated in the i-th vacuum chamber to At the position 35 201131009 corresponding to the second vacuum chamber, the second sealing member is driven by the second conveying means to transport the second sealing plate together with the object to be processed stored in the second vacuum chamber to The step at the position corresponding to the first vacuum chamber may be performed at least in part at the same timing. The present invention has been disclosed in the above embodiments, and it is not intended to limit the invention to those skilled in the art, and it is possible to make some modifications and refinements without departing from the spirit and scope of the invention. this

The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a plan view of a vacuum processing apparatus according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1; Fig. 3 is a cross-sectional view showing the squash-melon line of Fig. 1; Fig. 4 is an enlarged plan view showing the conveying mechanism shown in Fig. 1. Fig. 4 is a view showing a different state of the conveying mechanism of Fig. 4; - The treatment of the invention using a vacuum processing device

6 shows a processing flow chart of the processing method. The process using the vacuum processing apparatus in the first state is a cross-sectional view showing the next operation of Fig. 8 . A cross-sectional view of the next action of Fig. 9. =1 shows a sectional view of the J-action. The cross-sectional view of the next action of FIG. 11 is not shown. 36 201131009 J4^sypit FIG. 13 is a cross-sectional view for explaining a retreating operation of the conveying mechanism. Fig. 14 is a cross-sectional view showing the next operation of Fig. 13; Fig. 15 is a cross-sectional view showing the next operation of Fig. 14; Fig. 16 is a cross-sectional view showing a second embodiment of the vacuum processing apparatus of the present invention. Fig. 17 is an enlarged plan view showing the conveying mechanism shown in Fig. 16; Fig. 18 is a cross-sectional view showing a different state of the conveying mechanism of Fig. 17; Fig. 19 is a cross-sectional view showing the forward state of the conveying mechanism in the second embodiment. Fig. 20 is a cross-sectional view showing a vacuum processing apparatus according to a third embodiment of the present invention in a plan view. Fig. 21 is a sectional view taken along line XXI-XXI of Fig. 20; Fig. 22 is a sectional view taken along line XXII-XXII of Fig. 20; Fig. 23 is a cross-sectional view for explaining a method of conveying the vacuum processing apparatus of Fig. 20; Fig. 24 is a cross-sectional view showing the next operation of Fig. 23; FIG. 25 is a cross-sectional view showing the next operation of FIG. 23. Fig. 26 is a cross-sectional view showing the next operation of Fig. 24; Fig. 27 is a view showing the next operation of Fig. 25; Fig. 28 is a cross-sectional view showing a fourth embodiment of the vacuum processing apparatus of the present invention. Fig. 29 is a cross-sectional view showing a fifth embodiment of the vacuum processing apparatus of the present invention. Figure 30 is a cross-sectional view showing a 37 201131009 342»ypit of a sixth embodiment of the vacuum processing apparatus of the present invention. Fig. 31 is a cross-sectional view for explaining a conveying method of the vacuum processing apparatus shown in Fig. 30. Figure 32 is a cross-sectional view showing the next operation of Figure 31. Figure 33 is a cross-sectional view showing the next operation of Figure 32. [Description of main component symbols] 1 : Main body frame 1L, 1P : Opening 2 : Carrying chamber (vacuum chamber) * 3 : Processing chamber (vacuum chamber) 4 : Transfer chamber 5 : LC upper sealing plate 6 : LC lower sealing Plate 7 : PC sealing plates U, 12, 13 : Sealing member 15 : Ventilation system piping 16 . South frequency electrode 隹 18 : Gas introduction pipes 14 , 17 , 19 : Vacuum device 20 : Lifting mechanism 21 : Motor 22 , 23 , 73, 74, 75: bevel gears 25, 95: ball screw 26: guide member 38 201131009 27: lifting member 28: connecting members 30L, 30P: elevators 31, 58a: connecting rods 32L, 32P · reinforcing plate 41. Local frequency power supplies 42L, 42A: heaters 43L, 43A: trays _ 44L, 44 Ρ : power supply wirings 50, 50LL, 50LR, 50UL, 50UR: transport mechanisms 70, 70LL, 70LR, 70UL, 70UR: transport mechanisms 80, 80Α, 80LL 80LR, 80UL, 80UR: transport mechanism 5: 91: motor 52: transport body 52a: bracket portion 52b, 82: workpiece mounting portion sin 53: guide plates 54, 56, 76: rotating shaft 54a: locking member 55: Pinion gears 56a, 76a: grooves 57, 59, 72: support member 58: cylinder (transport body spacing displacement member) 61: liner

S 39 201131009 62 : target ¢ 3 : anode electrode 71 : roller 77 : rotating shaft body 81 : conveying member 83 : bellows 84 sealing member 90 : moving mechanism 92 , 93 : gear 94 : holding member 96 : moving member 100 , 101, 102, 103, 104, 105: vacuum processing apparatus A, B, C: direction di, (I2, dw. interval S: space S1 to S51: step W: workpiece

Claims (1)

201131009 VII. Application for Patent Park: 1. - A vacuum chamber is provided with a first vacuum chamber having a first opening and a second vacuum chamber having a second opening on one side. a first sealing plate covering the first opening; a second sealing plate covering the second opening; and a first spreading device for squeezing the first sealing plate to the device The periphery 1 of the first opening of the main body and the vacuum chamber are sealed; and the first and second elevators are sealed from the outside, and the second sealed vacuum chamber is sealed from the outside. The second above-mentioned == structure is configured to transport at least the object to be processed placed on the board from the opening of the first opening; and the above-mentioned body is transported from the second opening At least the object to be processed placed on the upper (2) upper plate is opened. 2. The vacuum processing apparatus according to the first aspect of the invention, wherein the first transfer mechanism of the i-th sealing plate and the object to be processed are the second sealing plate and the third sealing plate The vacuum processing apparatus according to claim 1, wherein the first conveying mechanism is housed in the first item! The tray of the vacuum chamber is transported to and from the body, and the tray of the second vacuum chamber is transported together with the second vacuum chamber; 201131009. 2) The above-mentioned first lift is held at least from the above-mentioned first ϋ ϋ ' 其 其 其 其 其 其 , , , , , 第 第 第 第 上述 上述 上述 上述 上述 上述 上述 第 第 第 第 第The second sealing plate described above.砸 保持 保持 保持 5 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空 真空The object heater in the vacuum chamber is heated by the second vacuum chamber to receive the object to be processed in the second vacuum chamber. The valley is on the top 6. If the application machine is around the corner of the item, the word of the case is from the above! When the opening portion is opened, the side of the main body is displaced to the center side of the apparatus body when at least the object to be processed is conveyed. 7. The vacuum processing apparatus according to claim 1, wherein the first conveying mechanism and the second conveying mechanism are respectively slid along the conveying direction of the object to be processed; The member corresponds to a position corresponding to the first vacuum chamber 2 to the second vacuum chamber, and the workpiece mounting member is provided on the front end side of the upper reticle. 8. The vacuum processing apparatus according to claim 1, wherein the apparatus body has the above-mentioned first! At least part of the third vacuum chamber ′ of the transport mechanism and the first transport mechanism, and the volume of the third vacuum chamber 42 201131009 厶 oypii is larger than the above! The vacuum chamber and the second vacuum (4) ^The vacuum portion described in the first item of the patent application range "set, / middle ° to run the second transfer mechanism includes: - - ί: the treatment body and moves; and the transport body The shifting member is located at a forward position where the side end portions of the second-shaped sealing plate or the second sealing plate are overlapped, and the portion of the side end portion of the two disks is located in the upper lift and the second lift, respectively In a state in which the transport body is located at the retracted position, the second squeezing plate is held lower than the upper splicing body, and the object to be processed or the yoke is separated from the lower side; The moving body is located at the forward position to place the object to be processed or the above-mentioned tray in the vacuum processing device as described in claim 1 of the patent application, and the single-chamber recording plate, the amorphous wire plate and the crucible are accommodated in the vacuum chamber of the first chamber. And a vacuum processing apparatus according to any one of claims 1 to 10, wherein the vacuum processing apparatus according to any one of claims 1 to 10 is used in the second vacuum chamber. It causes the first transport mechanism to accommodate at least The object to be processed of the first vacuum chamber is transported to a position corresponding to the second vacuum to the position corresponding to the second vacuum chamber, and the first transport mechanism is connected to the fourth transport mechanism. The position corresponding to the position of the first vacuum f corresponding to the second vacuum chamber is performed as follows. In addition, the above includes: 2; S is a processing method using a vacuum processing apparatus, and is characterized in that the step of lowering the plate is to replace the first sealing plate of the first vacuum chamber at the position of the first 1& The step of lowering the lift, sealing the second sealing plate of the second vacuum chamber at the position of the second stage; (4) sealing or loading ==:=:;; chamber_treated body or upper =: support: := step true; indoor processed body == mechanism drives the first transport body, and the tray corresponding to the second body is moved to the second vacuum chamber mechanism to drive the second The carrier is transported, and the tray that has been moved to the tray corresponding to the first vacuum chamber is stored in the above-mentioned first! The step of the vacuum chamber is such that the second sealing plate supported by the second elevator is on the surface of the second sealing plate: 2011=3::=3, or the step of placing the second vacuum chamber on the main body 34 And the object to be processed or the transporting body is placed, and (4) at the position corresponding to the chamber is moved, and the second vacuum is moved to the second vacuum, and the second moving machine is driven by the second transport mechanism. The disk is moved to the disk = the processing body or the carrier on which the object to be processed is placed includes a squat; the processing method using the vacuum processing device is characterized in that the plate is held at the first::::: 1 first sealing of the vacuum chamber In the second seal for the second vacuum chamber, the first processed material f is used by the first transporting body to engage the second straight transporting body, and the second sealing is used for the second sealing. The step of holding the board together with the object to be processed contained in the above-mentioned ίίΪ; * 1 ^ sent to;:; Γ corresponding to the vacuum chamber: Li Zhao, 2 "Using the board two" to send the above to The second chamber for the upper chamber vacuum chamber phase L: (4) - and moved 45 201131009 The first elevator is raised, and the second sealing plate is used. In the above-described first vacuum chamber, the step of collecting the object to be processed in the second vacuum chamber to the first vacuum chamber; and the step of raising the second elevator to adhere the first sealing sheet to the first sealing sheet In the second vacuum chamber, the object to be processed stored in the first vacuum chamber is valleyd to the second vacuum chamber; and the first carrier is driven by the first transport mechanism, and the first (1) a step of loading a sealing plate together with a target object accommodated in the first vacuum chamber to a position corresponding to the second vacuum chamber, and driving the second transfer body by the second transfer mechanism The second sealing sheet is conveyed together with the object to be processed accommodated in the second vacuum chamber, and the step corresponding to the first vacuum chamber is performed at least one step at the same timing. 46