TW201123575A - Thin-film transistor - Google Patents
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- TW201123575A TW201123575A TW099131306A TW99131306A TW201123575A TW 201123575 A TW201123575 A TW 201123575A TW 099131306 A TW099131306 A TW 099131306A TW 99131306 A TW99131306 A TW 99131306A TW 201123575 A TW201123575 A TW 201123575A
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- film transistor
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- 239000010409 thin film Substances 0.000 title claims abstract description 90
- 239000012212 insulator Substances 0.000 claims abstract description 75
- 239000004065 semiconductor Substances 0.000 claims abstract description 68
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims abstract description 60
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims abstract description 60
- 239000004417 polycarbonate Substances 0.000 claims abstract description 58
- 229920000515 polycarbonate Polymers 0.000 claims abstract description 57
- 239000002904 solvent Substances 0.000 claims abstract description 42
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 32
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims abstract description 32
- 238000000576 coating method Methods 0.000 claims abstract description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 51
- 229910052799 carbon Inorganic materials 0.000 claims description 49
- 125000004432 carbon atom Chemical group C* 0.000 claims description 38
- 125000005647 linker group Chemical group 0.000 claims description 37
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 35
- 125000003118 aryl group Chemical group 0.000 claims description 31
- 125000001931 aliphatic group Chemical group 0.000 claims description 25
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- 125000005843 halogen group Chemical group 0.000 claims description 16
- 229920001577 copolymer Polymers 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 8
- 125000002993 cycloalkylene group Chemical group 0.000 claims description 6
- 125000004429 atom Chemical group 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 125000001424 substituent group Chemical group 0.000 claims description 3
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 2
- 206010036790 Productive cough Diseases 0.000 claims 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims 1
- 210000003802 sputum Anatomy 0.000 claims 1
- 208000024794 sputum Diseases 0.000 claims 1
- 239000010410 layer Substances 0.000 description 190
- 150000001875 compounds Chemical class 0.000 description 92
- 239000010408 film Substances 0.000 description 69
- 238000000034 method Methods 0.000 description 56
- -1 poly(dicarbonate) Polymers 0.000 description 49
- 239000000463 material Substances 0.000 description 42
- 239000000243 solution Substances 0.000 description 41
- 229910052751 metal Inorganic materials 0.000 description 37
- 239000002184 metal Substances 0.000 description 37
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 29
- 238000006243 chemical reaction Methods 0.000 description 21
- 230000006870 function Effects 0.000 description 21
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 18
- 239000000203 mixture Substances 0.000 description 17
- 239000000126 substance Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 15
- 239000010931 gold Substances 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 14
- 239000007789 gas Substances 0.000 description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 14
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 13
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 13
- 239000002585 base Substances 0.000 description 13
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 12
- 239000002253 acid Substances 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 12
- 238000006068 polycondensation reaction Methods 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 11
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 10
- 239000007772 electrode material Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 229910052707 ruthenium Inorganic materials 0.000 description 10
- 238000011282 treatment Methods 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 9
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 8
- 229910052736 halogen Inorganic materials 0.000 description 8
- 150000002367 halogens Chemical class 0.000 description 8
- 239000011777 magnesium Substances 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 238000006116 polymerization reaction Methods 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 7
- 239000003792 electrolyte Substances 0.000 description 7
- 239000010419 fine particle Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 229910052749 magnesium Inorganic materials 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 7
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000006085 branching agent Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000005669 field effect Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 6
- 229920000573 polyethylene Polymers 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000001294 propane Substances 0.000 description 6
- 239000011734 sodium Substances 0.000 description 6
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000001273 butane Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000011133 lead Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 5
- 150000002894 organic compounds Chemical class 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- RYHBNJHYFVUHQT-UHFFFAOYSA-N p-dioxane Substances C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 229910052727 yttrium Inorganic materials 0.000 description 5
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000004793 Polystyrene Substances 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 150000004703 alkoxides Chemical class 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 239000000872 buffer Substances 0.000 description 4
- 229920001940 conductive polymer Polymers 0.000 description 4
- 239000002612 dispersion medium Substances 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000007790 solid phase Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 239000012808 vapor phase Substances 0.000 description 4
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 3
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000001879 gelation Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000002484 inorganic compounds Chemical class 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- 229910052762 osmium Inorganic materials 0.000 description 3
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004431 polycarbonate resin Substances 0.000 description 3
- 229920005668 polycarbonate resin Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 150000003505 terpenes Chemical class 0.000 description 3
- 235000007586 terpenes Nutrition 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000000052 vinegar Substances 0.000 description 3
- 235000021419 vinegar Nutrition 0.000 description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 3
- HCNHNBLSNVSJTJ-UHFFFAOYSA-N 1,1-Bis(4-hydroxyphenyl)ethane Chemical compound C=1C=C(O)C=CC=1C(C)C1=CC=C(O)C=C1 HCNHNBLSNVSJTJ-UHFFFAOYSA-N 0.000 description 2
- BTEIWWXAPYLKDK-UHFFFAOYSA-N 1,1-diphenyldecylbenzene Chemical compound CCCCCCCCCC(c1ccccc1)(c1ccccc1)c1ccccc1 BTEIWWXAPYLKDK-UHFFFAOYSA-N 0.000 description 2
- JCMVPOVHKWWBAU-UHFFFAOYSA-N 1,2-dichlorohydrazine Chemical compound ClNNCl JCMVPOVHKWWBAU-UHFFFAOYSA-N 0.000 description 2
- OEAJNZQFAHZXAB-UHFFFAOYSA-N 1,4-dioxane;methane Chemical compound C.C1COCCO1 OEAJNZQFAHZXAB-UHFFFAOYSA-N 0.000 description 2
- MEKOFIRRDATTAG-UHFFFAOYSA-N 2,2,5,8-tetramethyl-3,4-dihydrochromen-6-ol Chemical compound C1CC(C)(C)OC2=C1C(C)=C(O)C=C2C MEKOFIRRDATTAG-UHFFFAOYSA-N 0.000 description 2
- UIAFKZKHHVMJGS-UHFFFAOYSA-N 2,4-dihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C=C1O UIAFKZKHHVMJGS-UHFFFAOYSA-N 0.000 description 2
- NZGQHKSLKRFZFL-UHFFFAOYSA-N 4-(4-hydroxyphenoxy)phenol Chemical compound C1=CC(O)=CC=C1OC1=CC=C(O)C=C1 NZGQHKSLKRFZFL-UHFFFAOYSA-N 0.000 description 2
- BKTRENAPTCBBFA-UHFFFAOYSA-N 4-[2-(4-hydroxy-3-phenylphenyl)propan-2-yl]-2-phenylphenol Chemical compound C=1C=C(O)C(C=2C=CC=CC=2)=CC=1C(C)(C)C(C=1)=CC=C(O)C=1C1=CC=CC=C1 BKTRENAPTCBBFA-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 2
- UEXCJVNBTNXOEH-UHFFFAOYSA-N Ethynylbenzene Chemical group C#CC1=CC=CC=C1 UEXCJVNBTNXOEH-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- 238000012696 Interfacial polycondensation Methods 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- 238000005481 NMR spectroscopy Methods 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- DLRVVLDZNNYCBX-UHFFFAOYSA-N Polydextrose Polymers OC1C(O)C(O)C(CO)OC1OCC1C(O)C(O)C(O)C(O)O1 DLRVVLDZNNYCBX-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 229920002125 Sokalan® Polymers 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000007743 anodising Methods 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- 239000003849 aromatic solvent Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- OCKPCBLVNKHBMX-UHFFFAOYSA-N butylbenzene Chemical compound CCCCC1=CC=CC=C1 OCKPCBLVNKHBMX-UHFFFAOYSA-N 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- XLJMAIOERFSOGZ-UHFFFAOYSA-N cyanic acid Chemical compound OC#N XLJMAIOERFSOGZ-UHFFFAOYSA-N 0.000 description 2
- YPHMISFOHDHNIV-FSZOTQKASA-N cycloheximide Chemical compound C1[C@@H](C)C[C@H](C)C(=O)[C@@H]1[C@H](O)CC1CC(=O)NC(=O)C1 YPHMISFOHDHNIV-FSZOTQKASA-N 0.000 description 2
- 125000004956 cyclohexylene group Chemical group 0.000 description 2
- 125000002433 cyclopentenyl group Chemical group C1(=CCCC1)* 0.000 description 2
- ROORDVPLFPIABK-UHFFFAOYSA-N diphenyl carbonate Chemical compound C=1C=CC=CC=1OC(=O)OC1=CC=CC=C1 ROORDVPLFPIABK-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- PHTQWCKDNZKARW-UHFFFAOYSA-N isoamylol Chemical compound CC(C)CCO PHTQWCKDNZKARW-UHFFFAOYSA-N 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical class [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002401 polyacrylamide Polymers 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000767 polyaniline Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011541 reaction mixture Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000001338 self-assembly Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- LPXPTNMVRIOKMN-UHFFFAOYSA-M sodium nitrite Chemical compound [Na+].[O-]N=O LPXPTNMVRIOKMN-UHFFFAOYSA-M 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 125000003396 thiol group Chemical group [H]S* 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 125000003944 tolyl group Chemical group 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- IDTODQQHHXCCBI-UHFFFAOYSA-N (4-methylphenyl) phenyl carbonate Chemical compound C1=CC(C)=CC=C1OC(=O)OC1=CC=CC=C1 IDTODQQHHXCCBI-UHFFFAOYSA-N 0.000 description 1
- PUNXVEAWLAVABA-UHFFFAOYSA-N 1,2,3,4-tetrahydroanthracene;1,2,5,6-tetrahydroanthracene Chemical compound C1=CC=C2C=C(CCCC3)C3=CC2=C1.C1=CCCC2=C1C=C1CCC=CC1=C2 PUNXVEAWLAVABA-UHFFFAOYSA-N 0.000 description 1
- 125000001989 1,3-phenylene group Chemical group [H]C1=C([H])C([*:1])=C([H])C([*:2])=C1[H] 0.000 description 1
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 1
- IDQBJILTOGBZCR-UHFFFAOYSA-N 1-butoxypropan-1-ol Chemical compound CCCCOC(O)CC IDQBJILTOGBZCR-UHFFFAOYSA-N 0.000 description 1
- ZGPFGHSOYPBCGI-UHFFFAOYSA-N 1-chloroindole-2,3-dione Chemical compound C1=CC=C2N(Cl)C(=O)C(=O)C2=C1 ZGPFGHSOYPBCGI-UHFFFAOYSA-N 0.000 description 1
- DNWJJJOJBSVOEL-UHFFFAOYSA-N 1-ethenyl-1h-indene Chemical group C1=CC=C2C(C=C)C=CC2=C1 DNWJJJOJBSVOEL-UHFFFAOYSA-N 0.000 description 1
- JLBXCKSMESLGTJ-UHFFFAOYSA-N 1-ethoxypropan-1-ol Chemical compound CCOC(O)CC JLBXCKSMESLGTJ-UHFFFAOYSA-N 0.000 description 1
- SVIZHJGLXNKEHP-UHFFFAOYSA-N 1-heptoxyethanol Chemical compound CCCCCCCOC(C)O SVIZHJGLXNKEHP-UHFFFAOYSA-N 0.000 description 1
- OYTCWIBDTYOGCL-UHFFFAOYSA-N 1-heptoxypropan-1-ol Chemical compound CCCCCCCOC(O)CC OYTCWIBDTYOGCL-UHFFFAOYSA-N 0.000 description 1
- LHENQXAPVKABON-UHFFFAOYSA-N 1-methoxypropan-1-ol Chemical compound CCC(O)OC LHENQXAPVKABON-UHFFFAOYSA-N 0.000 description 1
- QACWCDDNEROCPA-UHFFFAOYSA-N 1-pentoxyethanol Chemical compound CCCCCOC(C)O QACWCDDNEROCPA-UHFFFAOYSA-N 0.000 description 1
- QQGRFMIMXPWKPM-UHFFFAOYSA-N 2,3,4-tributylphenol Chemical compound CCCCC1=CC=C(O)C(CCCC)=C1CCCC QQGRFMIMXPWKPM-UHFFFAOYSA-N 0.000 description 1
- XBLSTMLMODEXBV-UHFFFAOYSA-N 2,5-dimethyl-4-propylphenol Chemical compound CCCC1=CC(C)=C(O)C=C1C XBLSTMLMODEXBV-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- XDGOMLRQONVRDL-UHFFFAOYSA-N 2-[1-(2-hydroxy-3-methylphenyl)decyl]-6-methylphenol Chemical compound OC1=C(C=CC=C1C)C(CCCCCCCCC)C1=C(C(=CC=C1)C)O XDGOMLRQONVRDL-UHFFFAOYSA-N 0.000 description 1
- IXHWGNYCZPISET-UHFFFAOYSA-N 2-[4-(dicyanomethylidene)-2,3,5,6-tetrafluorocyclohexa-2,5-dien-1-ylidene]propanedinitrile Chemical compound FC1=C(F)C(=C(C#N)C#N)C(F)=C(F)C1=C(C#N)C#N IXHWGNYCZPISET-UHFFFAOYSA-N 0.000 description 1
- VPBCUWACUJDUSL-UHFFFAOYSA-N 2-bromo-4-[2-(3-bromo-5-chloro-4-hydroxyphenyl)propan-2-yl]-6-chlorophenol Chemical compound C=1C(Cl)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Cl)=C(O)C(Br)=C1 VPBCUWACUJDUSL-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- WCDDPILLXPWGQV-UHFFFAOYSA-N 2-chloro-4-[1-(3-chloro-4-hydroxyphenyl)decyl]phenol Chemical compound C=1C=C(O)C(Cl)=CC=1C(CCCCCCCCC)C1=CC=C(O)C(Cl)=C1 WCDDPILLXPWGQV-UHFFFAOYSA-N 0.000 description 1
- XBQRPFBBTWXIFI-UHFFFAOYSA-N 2-chloro-4-[2-(3-chloro-4-hydroxyphenyl)propan-2-yl]phenol Chemical compound C=1C=C(O)C(Cl)=CC=1C(C)(C)C1=CC=C(O)C(Cl)=C1 XBQRPFBBTWXIFI-UHFFFAOYSA-N 0.000 description 1
- DNCLEPRFPJLBTQ-UHFFFAOYSA-N 2-cyclohexyl-4-[1-(3-cyclohexyl-4-hydroxyphenyl)cyclohexyl]phenol Chemical compound OC1=CC=C(C2(CCCCC2)C=2C=C(C(O)=CC=2)C2CCCCC2)C=C1C1CCCCC1 DNCLEPRFPJLBTQ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- VFIUGIUVIMSJBF-UHFFFAOYSA-N 2-fluoro-4-(3-fluoro-4-hydroxyphenoxy)phenol Chemical compound C1=C(F)C(O)=CC=C1OC1=CC=C(O)C(F)=C1 VFIUGIUVIMSJBF-UHFFFAOYSA-N 0.000 description 1
- KLPQUCKLVZXJEH-UHFFFAOYSA-N 2-fluoro-4-[2-(3-fluoro-4-hydroxyphenyl)propan-2-yl]phenol Chemical compound C=1C=C(O)C(F)=CC=1C(C)(C)C1=CC=C(O)C(F)=C1 KLPQUCKLVZXJEH-UHFFFAOYSA-N 0.000 description 1
- LDQYTDPXIMNESL-UHFFFAOYSA-N 2-methyl-4-propylphenol Chemical compound CCCC1=CC=C(O)C(C)=C1 LDQYTDPXIMNESL-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 1
- YMTYZTXUZLQUSF-UHFFFAOYSA-N 3,3'-Dimethylbisphenol A Chemical compound C1=C(O)C(C)=CC(C(C)(C)C=2C=C(C)C(O)=CC=2)=C1 YMTYZTXUZLQUSF-UHFFFAOYSA-N 0.000 description 1
- CKNCVRMXCLUOJI-UHFFFAOYSA-N 3,3'-dibromobisphenol A Chemical compound C=1C=C(O)C(Br)=CC=1C(C)(C)C1=CC=C(O)C(Br)=C1 CKNCVRMXCLUOJI-UHFFFAOYSA-N 0.000 description 1
- RKSBPFMNOJWYSB-UHFFFAOYSA-N 3,3-Bis(4-hydroxyphenyl)pentane Chemical compound C=1C=C(O)C=CC=1C(CC)(CC)C1=CC=C(O)C=C1 RKSBPFMNOJWYSB-UHFFFAOYSA-N 0.000 description 1
- WBPXUJQSMIZWDY-UHFFFAOYSA-N 3,5-dimethylcyclohexene Chemical compound CC1C[C]=CC(C)C1 WBPXUJQSMIZWDY-UHFFFAOYSA-N 0.000 description 1
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- VWGKEVWFBOUAND-UHFFFAOYSA-N 4,4'-thiodiphenol Chemical compound C1=CC(O)=CC=C1SC1=CC=C(O)C=C1 VWGKEVWFBOUAND-UHFFFAOYSA-N 0.000 description 1
- MLDIQALUMKMHCC-UHFFFAOYSA-N 4,4-Bis(4-hydroxyphenyl)heptane Chemical compound C=1C=C(O)C=CC=1C(CCC)(CCC)C1=CC=C(O)C=C1 MLDIQALUMKMHCC-UHFFFAOYSA-N 0.000 description 1
- XTEGBRKTHOUETR-UHFFFAOYSA-N 4-(4-hydroxy-3-methylphenyl)sulfonyl-2-methylphenol Chemical compound C1=C(O)C(C)=CC(S(=O)(=O)C=2C=C(C)C(O)=CC=2)=C1 XTEGBRKTHOUETR-UHFFFAOYSA-N 0.000 description 1
- ILQWYZZOCYARGS-UHFFFAOYSA-N 4-(4-hydroxy-3-phenylphenyl)sulfonyl-2-phenylphenol Chemical compound OC1=CC=C(S(=O)(=O)C=2C=C(C(O)=CC=2)C=2C=CC=CC=2)C=C1C1=CC=CC=C1 ILQWYZZOCYARGS-UHFFFAOYSA-N 0.000 description 1
- OBWVOELZAMJXRD-UHFFFAOYSA-N 4-[1-(4-hydroxy-3-methylphenyl)cyclopentyl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C2(CCCC2)C=2C=C(C)C(O)=CC=2)=C1 OBWVOELZAMJXRD-UHFFFAOYSA-N 0.000 description 1
- OVVCSFQRAXVPGT-UHFFFAOYSA-N 4-[1-(4-hydroxyphenyl)cyclopentyl]phenol Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)CCCC1 OVVCSFQRAXVPGT-UHFFFAOYSA-N 0.000 description 1
- NZJGFJOITOQESZ-UHFFFAOYSA-N 4-[2,3,4,5-tetrafluoro-6-(1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-henicosafluorodecyl)phenyl]phenol Chemical compound FC=1C(=C(C(=C(C=1F)F)F)C1=CC=C(C=C1)O)C(C(C(C(C(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F NZJGFJOITOQESZ-UHFFFAOYSA-N 0.000 description 1
- ZULNKRMJOZOUND-UHFFFAOYSA-N 4-[2-(3,5-difluoro-4-hydroxyphenyl)propan-2-yl]-2,6-difluorophenol Chemical compound C=1C(F)=C(O)C(F)=CC=1C(C)(C)C1=CC(F)=C(O)C(F)=C1 ZULNKRMJOZOUND-UHFFFAOYSA-N 0.000 description 1
- KKBHVPNWMXTNBL-UHFFFAOYSA-N 4-[2-(4-hydroxy-3-methylphenyl)butan-2-yl]-2-methylphenol Chemical compound C=1C=C(O)C(C)=CC=1C(C)(CC)C1=CC=C(O)C(C)=C1 KKBHVPNWMXTNBL-UHFFFAOYSA-N 0.000 description 1
- XJGTVJRTDRARGO-UHFFFAOYSA-N 4-[2-(4-hydroxyphenyl)propan-2-yl]benzene-1,3-diol Chemical compound C=1C=C(O)C=C(O)C=1C(C)(C)C1=CC=C(O)C=C1 XJGTVJRTDRARGO-UHFFFAOYSA-N 0.000 description 1
- IQNDEQHJTOJHAK-UHFFFAOYSA-N 4-[4-[2-[4,4-bis(4-hydroxyphenyl)cyclohexyl]propan-2-yl]-1-(4-hydroxyphenyl)cyclohexyl]phenol Chemical compound C1CC(C=2C=CC(O)=CC=2)(C=2C=CC(O)=CC=2)CCC1C(C)(C)C(CC1)CCC1(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 IQNDEQHJTOJHAK-UHFFFAOYSA-N 0.000 description 1
- MTEFNCCAENLIOT-UHFFFAOYSA-N 4-[9-(4-hydroxy-3-methylphenyl)-10H-anthracen-9-yl]-2-methylphenol Chemical compound OC1=C(C=C(C=C1)C1(C2=CC=CC=C2CC=2C=CC=CC1=2)C1=CC(=C(C=C1)O)C)C MTEFNCCAENLIOT-UHFFFAOYSA-N 0.000 description 1
- HCCRFHKQDVMDKQ-UHFFFAOYSA-N 4-[9-(4-hydroxyphenyl)-10h-anthracen-9-yl]phenol Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2CC2=CC=CC=C21 HCCRFHKQDVMDKQ-UHFFFAOYSA-N 0.000 description 1
- XEWGWPVZCFNANE-UHFFFAOYSA-N 4-cyclohexyl-2-phenylphenol Chemical compound OC1=CC=C(C2CCCCC2)C=C1C1=CC=CC=C1 XEWGWPVZCFNANE-UHFFFAOYSA-N 0.000 description 1
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 1
- QHPQWRBYOIRBIT-UHFFFAOYSA-N 4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C=C1 QHPQWRBYOIRBIT-UHFFFAOYSA-N 0.000 description 1
- OJWXTHZHTXRMMI-UHFFFAOYSA-N 5,7-dichloro-8H-purine Chemical compound ClC12N(CN=C1N=CN=C2)Cl OJWXTHZHTXRMMI-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 244000291564 Allium cepa Species 0.000 description 1
- 235000002732 Allium cepa var. cepa Nutrition 0.000 description 1
- 241000272814 Anser sp. Species 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N Benzoic acid Natural products OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- 229940123208 Biguanide Drugs 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- XDACLRJRJBFXJD-UHFFFAOYSA-N C(=CC1=CC=CC=C1)C1=CC=CC=C1.C1=CC=CC=C1 Chemical compound C(=CC1=CC=CC=C1)C1=CC=CC=C1.C1=CC=CC=C1 XDACLRJRJBFXJD-UHFFFAOYSA-N 0.000 description 1
- ZTTBOIQESADICM-UHFFFAOYSA-N C1=CC(=CC(=C1)OC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)OC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F Chemical compound C1=CC(=CC(=C1)OC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)OC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F ZTTBOIQESADICM-UHFFFAOYSA-N 0.000 description 1
- 125000006519 CCH3 Chemical group 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- PCXAGBSFFWKAQW-UHFFFAOYSA-N FC=1C(=C(C(=C(C=1F)F)F)O)C(C(C(C(F)(F)F)(F)F)(F)F)(F)F Chemical group FC=1C(=C(C(=C(C=1F)F)F)O)C(C(C(C(F)(F)F)(F)F)(F)F)(F)F PCXAGBSFFWKAQW-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229910000799 K alloy Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- SUAKHGWARZSWIH-UHFFFAOYSA-N N,N‐diethylformamide Chemical compound CCN(CC)C=O SUAKHGWARZSWIH-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- ZMMSZSZGUGFUNF-UHFFFAOYSA-N OC1=CC=C(C=C1)C(CCCCCCCCC1=CC=CC=C1)(C1=CC=C(C=C1)O)C1=CC=C(C=C1)O Chemical compound OC1=CC=C(C=C1)C(CCCCCCCCC1=CC=CC=C1)(C1=CC=C(C=C1)O)C1=CC=C(C=C1)O ZMMSZSZGUGFUNF-UHFFFAOYSA-N 0.000 description 1
- 241000283973 Oryctolagus cuniculus Species 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 240000005373 Panax quinquefolius Species 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 229940126902 Phlorizin Drugs 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920001100 Polydextrose Polymers 0.000 description 1
- LFZGOHKNPWUFGK-UHFFFAOYSA-N SC(C=C(C)C1=CC=C(C=C1)O)(CC(C)(C1=CC=C(C=C1)O)S)C1=CC=C(C=C1)O Chemical compound SC(C=C(C)C1=CC=C(C=C1)O)(CC(C)(C1=CC=C(C=C1)O)S)C1=CC=C(C=C1)O LFZGOHKNPWUFGK-UHFFFAOYSA-N 0.000 description 1
- GTUVFCIGMCHQLG-UHFFFAOYSA-N SC(CC(C)C1=CC=C(C=C1)O)(CC(C)(C1=CC=C(C=C1)O)S)C1=CC=C(C=C1)O Chemical compound SC(CC(C)C1=CC=C(C=C1)O)(CC(C)(C1=CC=C(C=C1)O)S)C1=CC=C(C=C1)O GTUVFCIGMCHQLG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 239000004427 Tarflon Substances 0.000 description 1
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 1
- 208000037063 Thinness Diseases 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- NYRAVIYBIHCEGB-UHFFFAOYSA-N [K].[Ca] Chemical compound [K].[Ca] NYRAVIYBIHCEGB-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 125000001539 acetonyl group Chemical group [H]C([H])([H])C(=O)C([H])([H])* 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- XBYNNYGGLWJASC-UHFFFAOYSA-N barium titanium Chemical compound [Ti].[Ba] XBYNNYGGLWJASC-UHFFFAOYSA-N 0.000 description 1
- 229910021523 barium zirconate Inorganic materials 0.000 description 1
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 1
- 238000003287 bathing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 229940114055 beta-resorcylic acid Drugs 0.000 description 1
- 150000001602 bicycloalkyls Chemical group 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- IZJIAOFBVVYSMA-UHFFFAOYSA-N bis(4-methylphenyl) carbonate Chemical compound C1=CC(C)=CC=C1OC(=O)OC1=CC=C(C)C=C1 IZJIAOFBVVYSMA-UHFFFAOYSA-N 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- ZFVMWEVVKGLCIJ-UHFFFAOYSA-N bisphenol AF Chemical compound C1=CC(O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(O)C=C1 ZFVMWEVVKGLCIJ-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 125000005587 carbonate group Chemical group 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229960001701 chloroform Drugs 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000012043 crude product Substances 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000004978 cyclooctylene group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-M hydrosulfide Chemical compound [SH-] RWSOTUBLDIXVET-UHFFFAOYSA-M 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- CBOIHMRHGLHBPB-UHFFFAOYSA-N hydroxymethyl Chemical compound O[CH2] CBOIHMRHGLHBPB-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- NNIPDXPTJYIMKW-UHFFFAOYSA-N iron tin Chemical compound [Fe].[Sn] NNIPDXPTJYIMKW-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- MGJXBDMLVWIYOQ-UHFFFAOYSA-N methylazanide Chemical compound [NH-]C MGJXBDMLVWIYOQ-UHFFFAOYSA-N 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- YCWSUKQGVSGXJO-NTUHNPAUSA-N nifuroxazide Chemical group C1=CC(O)=CC=C1C(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 YCWSUKQGVSGXJO-NTUHNPAUSA-N 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005447 octyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- QBDSZLJBMIMQRS-UHFFFAOYSA-N p-Cumylphenol Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=CC=C1 QBDSZLJBMIMQRS-UHFFFAOYSA-N 0.000 description 1
- NKTOLZVEWDHZMU-UHFFFAOYSA-N p-cumyl phenol Natural products CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- IOUVKUPGCMBWBT-UHFFFAOYSA-N phloridzosid Natural products OC1C(O)C(O)C(CO)OC1OC1=CC(O)=CC(O)=C1C(=O)CCC1=CC=C(O)C=C1 IOUVKUPGCMBWBT-UHFFFAOYSA-N 0.000 description 1
- IOUVKUPGCMBWBT-GHRYLNIYSA-N phlorizin Chemical compound O[C@@H]1[C@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC(O)=CC(O)=C1C(=O)CCC1=CC=C(O)C=C1 IOUVKUPGCMBWBT-GHRYLNIYSA-N 0.000 description 1
- 235000019139 phlorizin Nutrition 0.000 description 1
- 125000005498 phthalate group Chemical group 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920001483 poly(ethyl methacrylate) polymer Polymers 0.000 description 1
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 239000001259 polydextrose Substances 0.000 description 1
- 229940035035 polydextrose Drugs 0.000 description 1
- 235000013856 polydextrose Nutrition 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 235000013824 polyphenols Nutrition 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000131 polyvinylidene Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 150000004032 porphyrins Chemical class 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M potassium chloride Inorganic materials [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- JJKUOVDAMCXQFK-UHFFFAOYSA-H ruthenium(3+);tricarbonate Chemical compound [Ru+3].[Ru+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O JJKUOVDAMCXQFK-UHFFFAOYSA-H 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000010288 sodium nitrite Nutrition 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical compound NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- 239000012085 test solution Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- PCCVSPMFGIFTHU-UHFFFAOYSA-N tetracyanoquinodimethane Chemical compound N#CC(C#N)=C1C=CC(=C(C#N)C#N)C=C1 PCCVSPMFGIFTHU-UHFFFAOYSA-N 0.000 description 1
- RSPCKAHMRANGJZ-UHFFFAOYSA-N thiohydroxylamine Chemical class SN RSPCKAHMRANGJZ-UHFFFAOYSA-N 0.000 description 1
- 238000005809 transesterification reaction Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000005829 trimerization reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 206010048828 underweight Diseases 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
- H10D30/6739—Conductor-insulator-semiconductor electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/021—Manufacture or treatment of multiple TFTs
- H10D86/0241—Manufacture or treatment of multiple TFTs using liquid deposition, e.g. printing
Landscapes
- Thin Film Transistor (AREA)
- Polyesters Or Polycarbonates (AREA)
Abstract
Description
201123575 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種薄膜電晶體。更詳細而言,本發明係 關於一種具有含有特定材料之絕緣體層之有機薄膜電晶 體。 【先前技術】 /專膜電日日體(TFT,thin film transistor)被廣泛地用作液 晶顯示裝置等之顯示用之開關元件。 先刖°亥TFT係使用非晶石夕或多晶石夕而製作,但使用石夕 製作 TFT 時所使用之 CVD(Chemical Vap〇r Dep〇siti〇n,化 子氣相沈積)裝置非常昂貴,存在使用TFT之顯示裝置等之 。又,由於非晶矽 §7之溫度下進行,故而存在 ’無法使用輕質之樹脂基板 大型化伴隨製造成本大幅増加的問題點 或夕日日石夕之成膜製程係於非常高之溫度 可用作基板之材料之種類有限 寺的問題。 為解決上述問題,提出有使 提出有使用有機物代替非晶矽及多201123575 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a thin film transistor. More specifically, the present invention relates to an organic thin film electro-crystal having an insulator layer containing a specific material. [Prior Art] /Thin film transistor (TFT) is widely used as a switching element for display of liquid crystal display devices and the like. The CVD (Chemical Vap〇r Dep〇siti〇n, Chemical Vapor Deposition) device used in the production of TFTs by Shi Xi is very expensive. There is a display device using a TFT or the like. In addition, since the amorphous 矽7 is carried out at a temperature, there is a problem that the use of a lightweight resin substrate can be increased, and the manufacturing cost is greatly increased, or the film forming process of the eve is available at a very high temperature. The type of material used as the substrate is limited to the problem of the temple. In order to solve the above problems, it is proposed to use organic matter instead of amorphous yttrium and
膜呀所需之製程溫度設為較低 時之成膜方法,已知 尤其是藉由使用塗布 件之大型化,可將成 之溫度。The film formation method in which the process temperature required for the film is set to be low is known, and the temperature can be set, in particular, by using a large size of the coating member.
如非專利文獻1及 ’其實用化受到期待。 TF丁中之電傳導係由在 〔。故而,使用有機物 J較少的優點。 之電荷負 絕緣膜界面電場感應 150866.doc 201123575 貝’故而電傳導受絕緣膜之影響巨大。 非專利文獻3揭示有,藉由旋塗氣仿溶液而將以雙酚a為 原料之聚碳酸酯層用作閘極絕緣體層,而使鄰接之有機半 導體薄膜中之有機分子相對基板垂直配向。專利文獻1揭 示有,藉由對支持基板選擇聚碳酸酯等適當之絕緣膜,可 實現具有可撓性、高遷移率、且具有高開關比的有機電晶 體,於其實施例中係使用聚碳酸酯之氣仿溶液,藉由旋塗 製程而形成絕緣膜。 先前已知之雙酚A型聚碳酸酯對鹵素系溶劑之溶解性良 好,但對四氫呋喃(THF)等非齒素系溶劑之溶解度並不充 分。又,使用齒素系溶劑製作之元件存在由於殘存有來自 溶劑之_素原子,故而其會對電晶體性能造成不良影響, 誘使所製作之元件於使用階段特性劣化的問題。 另外,齒素系溶劑存在對環境及人體之負荷較大之問 題。專利文獻1、非專利文獻3等所揭示之以雙酚A為原料 之聚碳酸醋存在對非齒素系溶劑之溶解度較低,無法適用 於使用非鹵素系溶劑之塗布製程的問題。 先前技術文獻 專利文獻 專利文獻1 :日本專利特開2004-128469號公報 非專利文獻 非專利文獻 1 : C. Dimitrakopoulos等人,Advanced Materials 第14卷,第99頁2002年 非專利文獻 2: A. Facchetti等人,Advanced Materials第 17 150866.doc 201123575 卷,第1705頁2005年 非專利文獻3 : Q· Zhang等人真空(J. Vac. S〇c Jpn),的 (2006) 446 【發明内容】 本發明之目的在於提供一種具有可藉由使用非鹵素溶劑 之塗布法而積層之絕緣體層,應答速率(驅動速率)較快, 開/關比較大,具有優異之電晶體特性的薄膜電晶體。 又,本發明之目的在於提供一種經時劣化減少且可減輕 環境負荷的薄膜電晶體。 本發明係為解決上述課題而完成者,本發明者發現具有 特定結構之聚碳酸酯樹脂層可藉由使用非鹵素系溶劑之塗 布製程而形成,且將其用作閘極絕緣體層之薄膜電晶體應Non-patent documents 1 and ' are put into practical use. The electrical conduction system in TF is based on [. Therefore, the advantage of using organic matter J is small. The charge negative insulation film interface electric field induction 150866.doc 201123575 shell 'electrical conduction is greatly affected by the insulating film. Non-Patent Document 3 discloses that a polycarbonate layer using bisphenol a as a raw material is used as a gate insulator layer by spin coating an air-imitation solution, and organic molecules in adjacent organic semiconductor thin films are vertically aligned with respect to a substrate. Patent Document 1 discloses that an organic insulating film having flexibility, high mobility, and high switching ratio can be realized by selecting an appropriate insulating film such as polycarbonate for a supporting substrate, and in the embodiment, a poly is used. An epoxy-like imitation solution is formed by an spin coating process to form an insulating film. The previously known bisphenol A type polycarbonate has good solubility in a halogen-based solvent, but is not sufficiently soluble in a non-dentate solvent such as tetrahydrofuran (THF). Further, since the element made of the dentate-based solvent has a residual atom derived from the solvent, it adversely affects the performance of the transistor and induces deterioration of the characteristics of the produced element at the use stage. In addition, the dentate solvent has a large load on the environment and the human body. The polycarbonate having bisphenol A as a raw material disclosed in Patent Document 1 and Non-Patent Document 3 has a low solubility in a non-dentate solvent and cannot be applied to a coating process using a non-halogen solvent. PRIOR ART DOCUMENT PATENT DOCUMENT Patent Document 1: Japanese Patent Laid-Open No. 2004-128469 Non-Patent Document Non-Patent Document 1: C. Dimitrakopoulos et al., Advanced Materials Vol. 14, p. 99, 2002 Non-Patent Document 2: A. Facchetti et al., Advanced Materials, Vol. 17 150866.doc 201123575, vol. 1705, 2005 Non-Patent Document 3: Q. Zhang et al. Vacuum (J. Vac. S〇c Jpn), (2006) 446 [Summary of the Invention] SUMMARY OF THE INVENTION An object of the present invention is to provide a thin film transistor having an insulator layer which can be laminated by a coating method using a non-halogen solvent, which has a fast response rate (driving rate), a relatively large on/off ratio, and excellent transistor characteristics. Further, it is an object of the present invention to provide a thin film transistor which is reduced in deterioration over time and which can reduce environmental load. The present invention has been made to solve the above problems, and the present inventors have found that a polycarbonate resin layer having a specific structure can be formed by a coating process using a non-halogen solvent, and is used as a thin film insulator layer. Crystal should
答速率(驅動速率)為高速,具有高開/關比,從而完成本發 明。 X 根據本發明’提供以下之薄膜電晶體。 1 ’種薄膜電晶體’其至少於基板上設置有閘極電極、 源極電極及汲極電極之三端子、絕緣體層、以及半導體 層藉由對閘極電極施加電壓而控制源極-汲極間電流; 並且 上述絕緣體層係藉由塗布法而積層之層,並含有對選自 四氫呋喃、環己酮及甲苯中之至少一種溶劑的溶解度為5 重量%以上’且包含下述式⑴所表示之重複單元之聚碳酸 酯: [化1] 150866.doc 201123575 ~^~〇-Ar-〇-c4- (l) O’ (式中,Ar為二價芳香族基)。 2.如1之薄膜電晶體,其^上述式⑴之^為下述式(1)成 (2)所表示之鍵結基: [化2]The answer rate (drive rate) is high speed and has a high on/off ratio to complete the present invention. X The following thin film transistor is provided in accordance with the present invention. a 'thin film transistor' having at least a gate electrode, a source electrode and a drain electrode, three terminals, an insulator layer, and a semiconductor layer for controlling source-drain by applying a voltage to the gate electrode And the above-mentioned insulator layer is a layer laminated by a coating method, and contains a solubility of at least one solvent selected from the group consisting of tetrahydrofuran, cyclohexanone, and toluene to be 5% by weight or more' and includes the following formula (1) Polycarbonate of the repeating unit: [Chemical Formula 1] 150866.doc 201123575 ~^~〇-Ar-〇-c4- (l) O' (wherein Ar is a divalent aromatic group). 2. The thin film transistor according to 1, wherein the above formula (1) is a bonding group represented by the following formula (1): (2): [Chemical 2]
(式中’ R1及R2分別為氫原子或碳數丨〜3之烷基); [化3](wherein R1 and R2 are each a hydrogen atom or an alkyl group having a carbon number of 丨3); [Chemical 3]
(式中,R及R分別為氫原子、碳數卜6之脂肪族烴基、峽 數6〜12之芳基或鹵素原子; X為-Ο-,-S- ’ -so- ’ _S〇2…_c〇_,9 9_亞苐基,f 述 式(2a)、(2b)、(2c)或(2d)所表示之鍵結基: [化4] R5 ί 一C— (2a) R6 (式中,R及R6分別為氫原子、碳數卜6之脂肪族烴基或碳 數6〜12之芳基’ 115與!^可相互鍵結而形成碳數4〜12之亞環 烷基); [化5] 150866.doc -6 - 201123575(wherein R and R are each a hydrogen atom, an aliphatic hydrocarbon group of carbon number 6, an aryl group having a chiral number of 6 to 12 or a halogen atom; X is -Ο-, -S- '-so- ' _S〇2 ..._c〇_,9 9_亚苐基,f The bond group represented by the formula (2a), (2b), (2c) or (2d): [Chemical 4] R5 ί A C—(2a) R6 (wherein, R and R6 each independently represent a hydrogen atom, an aliphatic hydrocarbon group of carbon number 6 or an aryl group of carbon number 6 to 12' 115 and can be bonded to each other to form a cycloalkylene group having a carbon number of 4 to 12 ); [5] 150866.doc -6 - 201123575
且R中至少一個 (式中R分別為氫原子或碳數1〜3之烷基 為碳數1〜3之院基);And at least one of R (wherein R is a hydrogen atom or an alkyl group having a carbon number of 1 to 3 is a hospital base having a carbon number of 1 to 3);
[化6J[化6J
(式(2c)所表示之鍵結 之任一種); [化7] 對位(p-) 基可為鄰位(0_)、間位(m_)、(any one of the bonds represented by the formula (2c)); [Chem. 7] The para (p-) group may be an ortho (0_), a meta (m_),
碳數1〜4之烷基)) 其中上述式(I)之Ar為 之鍵結基: 具有非對 3.如1或2之薄膜電晶體, 稱結構之下述式(3)所表示 [化8]Alkyl group having a carbon number of 1 to 4)) wherein the Ar of the above formula (I) is a bonding group: a film transistor having a non-pair of 3. such as 1 or 2, which is represented by the following formula (3) of the structure [ 8]
(3) 氫原子 (式中,R13及R14分別為 150866.doc 碳數1〜6之脂肪族烴基、 201123575 碳數6~12之芳基或齒素原子; R15與R16為相互不同之取代基,分別為氫原子、碳數 1〜6之脂肪族烴基或碳數6〜12之芳基)。 4. 如2之薄膜電晶體’其中上述式⑴之Ar為上述式(2)所表 示之鍵結基’ X為上述式(2a)所表示之鍵結基,R5與R6相 互鍵結形成碳數4〜12之亞環烷基》 5. 如1或2之薄膜電晶體,其中上述式⑴之Ar為下述式⑷ 所表示之鍵結基: [化9](3) A hydrogen atom (wherein R13 and R14 are respectively 150866.doc, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, 201123575 an aryl group or a dentate atom having 6 to 12 carbon atoms; and R15 and R16 are mutually different substituents. Each is a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms or an aryl group having 6 to 12 carbon atoms. 4. The thin film transistor according to 2, wherein Ar of the above formula (1) is a bond group represented by the above formula (2), wherein X is a bond group represented by the above formula (2a), and R5 and R6 are bonded to each other to form a carbon. a cycloalkylene group having a number of 4 to 12, 5. A thin film transistor according to 1 or 2, wherein Ar of the above formula (1) is a bonding group represented by the following formula (4):
(式中,X與上述式相同; R17及R18分別為碳數丨〜6之脂肪族烴基、碳數6〜12之芳 基或齒素原子)。 示之鍵結基: [化 10] 6.如1之薄膜電晶體,其中上述式⑴之心為下述式(5)所表(wherein X is the same as the above formula; and R17 and R18 are each an aliphatic hydrocarbon group having a carbon number of 丨6 or 6 or an aryl group having a carbon number of 6 to 12 or a dentate atom). The bonding group is shown as follows: 6. The thin film transistor of 1, wherein the core of the above formula (1) is represented by the following formula (5)
碳數6〜u (式中’ R 9為氫原子、碳數1〜6之脂肪族烴基、 之芳基或鹵素原子; R20分別為碳數6〜12之芳基、碳數4〜 如1之薄膜電晶體,其中上述式 r基、碳數4〜12之脂肪族烴基卜 其中上述式(I)之Ar具有 下述式 150866.doc 201123575 (6a)、(6b)及(6c)所表示之鍵結基’ 且尋鍵結基之個動在 足(6a+6c)/(6a+6b+6c)=〇.〇5~〇.95 · ‘ [化 11]Carbon number 6 to u (wherein R 9 is a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, an aryl group or a halogen atom; and R 20 is an aryl group having a carbon number of 6 to 12, respectively, and a carbon number of 4 to 1 The thin film transistor, wherein the above formula r is an aliphatic hydrocarbon group having a carbon number of 4 to 12, wherein Ar of the above formula (I) has the following formula: 150866.doc 201123575 (6a), (6b) and (6c) The bond base ' and the movement of the bond base is in the foot (6a+6c)/(6a+6b+6c)=〇.〇5~〇.95 · '[11]
.R (6a) (6c) (6b) (式中,X與上述式(2)相同; R為氫原子、碳數Μ之脂肪族經基 鹵素原子)。 < 方基或 8. 一種薄膜電晶體,其至少;^ ,、王乂於基板上設置有閘極電極、 極電極及汲極電極之r端+、的& — 而千硙緣體層、以及半導體層, 藉由對閘極電極施加電壓而控制、1 叩?工制源極-汲極間電流;並且 上述絕緣體層係藉由塗布法而 1衣叫積層之層,並含有對選自 四氫吱喃、環己酮及甲苯中之至少—種溶劑的溶解度為$ 重量%以上’且包含下述式(II)所表示之錢單元與下述式 (III)所表示之重複單元的共聚物之聚碳酸酯: [化 12] ,。-Ar2-。~兄- 0 (II) -O-Ar^O-C-0 (HI) (式中,Ar2及Ar3分別為下述式⑴或(2)所表示之鍵結基 且Ar2與Ar3為相互不同之鍵結基: [化 13].R (6a) (6c) (6b) (wherein, X is the same as the above formula (2); and R is a hydrogen atom and an aliphatic group-based halogen atom of a carbon number). < Square base or 8. A thin film transistor, at least; ^, Wang Hao is provided on the substrate with a gate electrode, a pole electrode, and a r-end of the gate electrode +, and And the semiconductor layer, controlled by applying a voltage to the gate electrode, 1 叩? The source-drain current is applied; and the insulator layer is a layer of a coating layer by a coating method and contains a solubility of at least one solvent selected from the group consisting of tetrahydrofuran, cyclohexanone, and toluene. A polycarbonate which is a copolymer of a weight unit expressed by the following formula (II) and a repeating unit represented by the following formula (III): [Chemical Formula 12]. -Ar2-. ~ brother - 0 (II) -O-Ar^OC-0 (HI) (wherein, Ar2 and Ar3 are respectively a bonding group represented by the following formula (1) or (2) and Ar2 and Ar3 are mutually different bonds Base: [Chem. 13]
150866.doc (1) 201123575 (式中,R1及R2分別為氫原子或碳數卜3之烷基); [化 14]150866.doc (1) 201123575 (wherein R1 and R2 are each a hydrogen atom or an alkyl group of carbon number 3);
(式中,R3及R4分別為氫原子、碳數1〜6之脂肪族烴基、旅 數6〜12之芳基或鹵素原子; X 為 _〇_,-S_,-SO-,-S02-,_c〇_ , 9,9-亞荞基,下述 式(2a)、(2b)、(2c)或(2d)所表示之鍵結基: [化 15] R5 —〒一(2a) (式中’ R5及R6分別為氫原子、碳數1〜6之脂肪族烴基或碳 數6〜12之芳基’ R5與R6可相互鍵結而形成;6炭數4〜12之亞環 烧基);(wherein R3 and R4 are each a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, an aryl group having a number of 6 to 12 or a halogen atom; and X is _〇_, -S_, -SO-, -S02- , _c〇_ , 9,9-indenylene, a bond group represented by the following formula (2a), (2b), (2c) or (2d): [Chem. 15] R5 — 〒 (2a) ( Wherein R 5 and R 6 are each a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms or an aryl group having 6 to 12 carbon atoms R 5 and R 6 may be bonded to each other; 6 a subring of 4 to 12 carbon atoms; base);
[化 16] F? D[化16] F? D
R R (式中,R分別為氫原子或碳數1〜3之烷基’且R中至少一個 為碳數1〜3之烷基); [化 17]R R (wherein R is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms respectively] and at least one of R is an alkyl group having 1 to 3 carbon atoms);
•C一 CH3 (2c) 150866.doc •10- 201123575•C-CH3 (2c) 150866.doc •10- 201123575
(式(2c)所表 種); f 化 18J 之鍵結基可為鄰位 間位、對位之任一(Formula of formula (2c)); f The bonding group of 18J can be either the ortho position or the alignment
(2d) (式中,R7〜RI2中 別為單鍵或伸Μ 基,作為鍵結基之R7〜R12分 碳數1〜4之院基)))' $為鍵結基之R7〜R 12分別為氫原子或 1:二8中任—項之薄膜電晶體,其中上述聚碳酸醋對 四風咬。南之溶解度為7重量%以上。 厌 10.如1至9中任一項之有機 + 層為有機半導體。 “體#中上述半導體 根據本發明,可提供—插 m Μ、種具有可_由❹㈣素溶劑之 二:而積層之絕緣體層,應答速率(驅動速率)較快,開/ 關比較大,具有優異之電晶體特性的薄膜電晶體。 又,根據本發明,可提供—種經時劣化減少 境負荷的薄膜電晶體。 【實施方式】 本發明之薄膜電晶體至少於基板上設置有閘極電極、、原 極電極及沒極電極之三端子、絕緣體層、以及有機半導體 層,藉由對閘極電極施加電壓而控制源極_汲極間電流/ 並且絕緣體層係藉由塗布法而積層之層,並含有對選自四 150866.doc -11 - 201123575 氫呋喃、環己酮及曱苯中之至少— 夕 種非鹵素溶劑的溶解度 為5重量%以上,且包含下城碎m ± 匕3卜遵式⑴所表示之重複單元之聚 碳酸酯: [化 19] 、(I) Ο (式中,Ar為二價芳香族基)。 ^發明之薄膜電晶體之絕緣體層含有包含式⑴所表示之 重相^早70之聚碳酸g旨。 本發明之薄膜電晶體之絕緣體層所含有之聚碳酸酿(以 下’有時簡稱為本發明之聚碳酸醋)對非齒素溶劑之溶解 度(室溫、常壓)為5重量%以上,較好的是7重量%以上, =的重量%以上。再者,溶解度之上限越高越好, 貫質之 >谷解度之上限為4〇重量%。 本發明之聚碳酸㈣㈣素溶劑之溶解度為5重量如 ^,故而於積層本發明之薄膜電晶體之絕緣體層時, 本發明之聚碳㈣溶解於㈣素溶财,並藉由塗布 f亥絕緣體層。㈣素溶劑不含成為環境破壞及元件性能 原^㈣子,故而本發明之薄膜電晶體於元:牛 時之%纟兄負何較小,經時劣化亦可減少。 大作為上述非函素溶劑’例如可列舉:苯、甲苯、二甲— 等芳香族系溶劑’丙闕、?基乙基酮、環己酮等:,二 ^醇、異丙醇等醇’乙酸乙酉旨、乙基賽路蘇等酿,四 虱咬喃(THF)、二料㈣,二甲基甲酿胺、:甲亞石風、 150866.doc 201123575 二乙基甲醯胺等。 本發明之聚碳酸酯較好的是式⑴之斛為下述式或(2) 所表不之鍵結基,該等鍵結基中更好的是如下鍵結基:式 (I)之Ar為式(2)所表示之鍵結基,χ為式(2a)所表示之鍵結 基’ R與R相互鍵結形成碳數4〜丨2之亞環烧基: [化 20] <1» (式中,R及R2分別為氫原子或碳數丨〜3之烷基); [化 21](2d) (In the formula, R7~RI2 is a single bond or a thiol group, and R7~R12 as a bond group is a base of carbon number 1~4)))' $ is the bond base R7~R 12 is a hydrogen atom or a film transistor of 1:8, wherein the above-mentioned polycarbonate is bitten to four winds. The solubility in the south is 7% by weight or more. 10. The organic + layer of any one of 1 to 9 is an organic semiconductor. According to the present invention, the above-mentioned semiconductor of "body# can provide - inserting m Μ, a kind of insulator layer which can be composed of yttrium (tetra) solvent: a laminate layer, a faster response rate (drive rate), and a larger on/off type, A thin film transistor having excellent crystal characteristics. Further, according to the present invention, a thin film transistor which is reduced in time and reduced in load can be provided. [Embodiment] The thin film transistor of the present invention is provided with a gate electrode at least on a substrate. And a three-terminal of the primary electrode and the electrodeless electrode, an insulator layer, and an organic semiconductor layer, and the source-drain current is controlled by applying a voltage to the gate electrode and the insulator layer is laminated by a coating method. a layer having a solubility of at least 5% by weight of a non-halogen solvent selected from the group consisting of four 150866.doc -11 - 201123575 hydrogen furan, cyclohexanone, and toluene, and comprising a lower city m ± 匕 3 Polycarbonate of the repeating unit represented by the formula (1): [Chem. 19], (I) Ο (wherein, Ar is a divalent aromatic group). The insulating layer of the inventive thin film transistor contains the formula (1). Weight The solubility of the polycarbonate contained in the insulating layer of the thin film transistor of the present invention (hereinafter referred to as "polycarbonate of the present invention") is a solubility in a non-dentate solvent (room temperature, often The pressure is 5% by weight or more, preferably 7% by weight or more, and 9% by weight or more. Further, the upper limit of the solubility is preferably as high as possible, and the upper limit of the degree of solution is 4% by weight. The solubility of the poly(dicarbonate) (tetra) (4) solvent of the present invention is 5 weights, so that when the insulating layer of the thin film transistor of the present invention is laminated, the polycarbon (4) of the present invention is dissolved in the (tetra) solute and coated by the insulating layer. (4) The solvent does not contain the environmental damage and the elemental performance of the element (4). Therefore, the thin film transistor of the present invention is less in the case of the element: the cow is less, and the deterioration can be reduced over time. Examples of the solvent solvent include aromatic solvents such as benzene, toluene, and dimethyl ketone, propyl ketone, ketone ethyl ketone, and cyclohexanone: alcohols such as di-alcohol and isopropanol. Ethyl sirolius, etc., four 虱 虱 (THF), two (four), two Alkylamine, ketone, 150866.doc 201123575 diethylformamide, etc. The polycarbonate of the present invention is preferably a bond of the formula (1) which is a bond of the following formula or (2) More preferably, the bonding group is a bonding group: Ar of the formula (I) is a bonding group represented by the formula (2), and fluorene is a bonding group represented by the formula (2a). And R are bonded to each other to form a cycloalkyl group having a carbon number of 4 to 2: [Chem. 20] <1» (wherein R and R2 are each a hydrogen atom or an alkyl group having a carbon number of 33); twenty one]
(式中’ R3及R4分別為氫屌早卢叙 匕眾于石反數1〜6之月曰肪族烴基、碳 數6〜12之^•基或鹵素原子; -C0_,9,9-亞苐基,下述 X 為-0-,_S-,-SO-,_§〇 式(2a)、(2b)、(2c)或(2d)所表示之鍵結基: [化 22] R5 一C一 (2a) R6 (式中,R5及R6分別為氫席 ..,^ nt η 勹飞原子、奴數1〜6之脂肪鵝烴基或石^ 數6〜12之芳基,R5盘只6_^4。π ^ , 了相互鍵結而形成碳數4〜12之亞 烷基); ’ [化 23] 150866.doc 201123575(In the formula, R3 and R4 are hydrogen hydrazine, respectively, and the alicyclic hydrocarbon group, carbon number 6 to 12, or halogen atom; -C0_,9,9- Yttrium, the following X is -0-, _S-, -SO-, _§ 键 (2a), (2b), (2c) or (2d) represented by the bonding group: [Chem. 22] R5 A C-(2a) R6 (wherein R5 and R6 are respectively hydrogen seats.., ^ nt η 勹 flying atoms, slaves 1 to 6 of fatty goose hydrocarbon groups or stones ^ 6 to 12 aryl groups, R5 plate Only 6_^4.π ^ , which are bonded to each other to form an alkylene group having a carbon number of 4 to 12); '[23] 150866.doc 201123575
(2b) 中 、 玟刀別為氫原子或碳數1〜3之烷基,且R中至少〆個 為碳數1〜3之p I & 〜& ’較好的是至少三個為碳數1~3之烷 基); [化 24] CH〇 CH: I v C~ (2c) 間位、對位之任一 (式(2c)所表示之鍵結基可為鄰位 種); [化 25](2b) In the middle, the file is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and at least one of R is a carbon number of 1 to 3, p I && Alkyl group having 1 to 3 carbon atoms; [Chemical 24] CH〇CH: I v C~ (2c) Any of the meta and para positions (the bonding group represented by the formula (2c) may be an ortholog) ; [化25]
(式中’心㊇有兩㈣鍵結基’作為鍵 別為單鍵或伸烷基,不Λ絲从w κ κ刀 碳數卜4之炫基))。為鍵結基之r〜r,2分別為氫原子或 本發明之聚碳酸酿較好的是式(1)之 之下述式(3)所表示之鍵結基、 “冉、、·口構 基、或下述式(5)所表示之鍵結基:^⑷所表不之鍵結 [化 26] 150866.doc 14 201123575(In the formula, the heart has two (four) bond groups as the bond is a single bond or an alkyl group, and the untwisted wire is from the w κ κ knife carbon number 4). R to r of the bonding group, and 2 are each a hydrogen atom or a polycarbonate of the present invention. Preferably, the bonding group represented by the following formula (3) of the formula (1), "冉, , · 口a ligand group, or a bond group represented by the following formula (5): a bond represented by ^(4) [Chem. 26] 150866.doc 14 201123575
石厌數6〜12之芳基或鹵素原子; R15與R16為相互不同之取代基’分別為氫原子、碳數 1〜6之脂肪族烴基或碳數6〜12之芳基);An aryl group or a halogen atom of 6 to 12; R15 and R16 are mutually different substituents ', respectively, a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms or an aryl group having 6 to 12 carbon atoms;
(4) (式中,X與上述式(2)相同; 碳數6〜12之芳 R及R刀別為碳數1〜6之脂肪族煙基 基或鹵素原子); [化 28](4) (wherein X is the same as the above formula (2); the aromatic group R and the R knife having a carbon number of 6 to 12 are an aliphatic nicotyl group or a halogen atom having a carbon number of 1 to 6);
(5) 碳數6〜12 (式中,R為氫原子、碳數卜6之脂肪族烴基 之芳基或鹵素原子; R2。分別為碳數6〜12之芳基、碳數4〜12之脂肪族烴基)。 又,本發明之聚碳酸酯較好的是式⑴之心具有下土述式 (㈣、(6b)及(6e)所表示之鍵結基,且該等鍵結基之個= 足(6a+6c)/(6a+6b+6c)=0.05〜0.95 : ' [化 29] 150866.doc 201123575(5) Carbon number 6 to 12 (wherein R is a hydrogen atom, an aryl group of a hydrocarbon group of carbon number 6 or a halogen atom; R2 is an aryl group having a carbon number of 6 to 12, and a carbon number of 4 to 12, respectively. An aliphatic hydrocarbon group). Further, in the polycarbonate of the present invention, it is preferred that the core of the formula (1) has a bonding group represented by the following formulas ((4), (6b) and (6e), and each of the bonding groups = foot (6a) +6c)/(6a+6b+6c)=0.05~0.95 : ' [29] 150866.doc 201123575
㈣ (6b) (式中’ X與上述式(2)相同; R分別為氫原子、碳數1〜6之脂肪族烴基、碳數6〜12之芳 基或鹵素原子)。 上述式(6a+6c)/(6a+6b+6c)中,6a為式(6a)所表示之鍵結 基之個數’ 6b為式(6b)所表示之鍵結基之個數,6c為式 (6c)所表示之鍵結基之個數。 上述(6a+6C)/(6a+6b + 6c)更好的是0.^07,進而好的是 0.2〜0.5 〇 於(6a+6C)/(6a+6b+6c)未達〇.05之情形時,存在聚碳酸酯 不溶於非鹵素溶劑之虞。 作為本發明之聚碳酸酯,可代替包含上述式⑴所表示之 重複單元之聚碳酸酯’而使用包含下述式(π)所表示之重 複單70與下述式(Ιπ;)所表示之重複單元的共聚物之聚碳酸 酯: [化 30] (II) (III) (式中,Ar及Ar3分別為下述式(丨)或(2)所表示之鍵結基 且Ar2與Ar3為相互不同之鍵結基: [化 31](4) (6b) (wherein 'X is the same as the above formula (2); and R is a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms or a halogen atom). In the above formula (6a+6c)/(6a+6b+6c), 6a is the number of the bonding groups represented by the formula (6a), and 6b is the number of the bonding groups represented by the formula (6b), 6c. It is the number of bonding groups represented by the formula (6c). The above (6a+6C)/(6a+6b + 6c) is more preferably 0.^07, and further preferably 0.2~0.5 〇(6a+6C)/(6a+6b+6c) is less than 〇.05 In the case of the case, there is a possibility that the polycarbonate is insoluble in a non-halogen solvent. The polycarbonate of the present invention may be represented by a repeating unit 70 represented by the following formula (π) and a formula (Ιπ;), instead of the polycarbonate comprising the repeating unit represented by the above formula (1). Polycarbonate of copolymer of repeating unit: (Formula 30) (II) (III) (wherein, Ar and Ar3 are respectively a bonding group represented by the following formula (丨) or (2) and Ar2 and Ar3 are Different bond bases: [Chem. 31]
R2 ⑴ 150866.doc -16· 201123575 (式中,R及R2分別為氫原子或碳數丨〜3之烷基); [化 32]R2 (1) 150866.doc -16· 201123575 (wherein R and R2 are each a hydrogen atom or an alkyl group having a carbon number of 33);
(式中R及R刀別為氫原子、碳數1〜6之脂肪族烴基、碳 數6〜12之芳基或鹵素原子; X為0 S ,-S〇-,-S02-,-CO- ’ 9,9-亞第基,下述 式(2a)、(2b)、(2c)或(2d)所表示之鍵結基。 包含上述式(II)所表示之重複單元與上述式(1⑴所表示 之重複單元的共聚物之聚碳酸酯巾,式(π)所表示之重複 單7L與式(III)所表示之重複單元之比 〜0.95。 枚子的疋 於(Π)/((ΙΙ)+(ΙΙΙ))未達〇〇5或超過〇95之情形時例如聚 碳酸醋具有如雙紛A之結晶性較高之骨架之情形時,其特 f·生表現強,、、(,存在對非鹵素溶劑之溶解性下降之虞。 包含上述式(II)所表示之重複單元與上述式(m)所表示 之重複單元的共聚物之聚碳酸酯,與包含式⑴所表示之重 複單元之聚碳酸§旨同樣對選自四氫吱D南、冑己酮及甲苯中 之至少-種非i素溶劑的溶解度為5重量m。因此, 可使包:上述式(11)所表示之重複單元與上述式_所表 示之重複單元的共聚物之聚碳酸s|溶解於非_素溶劑中, 使用該溶液,心塗布法積層本發明之薄膜電晶體之絕緣 體層。 包含式⑴所表示之重複單元之聚碳酸I旨、及包含式(„) J50866.doc 17 201123575 所表示之重複單it與式(m)所表示之重複單元的共聚物之 聚碳酸酯的以二氣甲烷作為溶劑之濃度〇 5以⑴之溶液於 20°C下的比濃黏度[t!SP/C]較好的是〇丨〜5 di/g,更好的是 0.3〜3 dl/g ’尤其好的是0.5〜2.5 dl/g。 於比濃黏度[tjsp/C]未達0.1 g/dl之情形時,塗布膜之強度 不充分,存在產生剝離、破裂等問題之虞。另一方面,於 比濃黏度hSP/C]超過5 dl/g之情形時,由塗敷液成形臈 時,塗敷黏度變得過高,存在生產性下降及膜厚產生不均 之虞。 為使聚奴自曰之比濃黏度處於上述範圍内,例如可藉由 選擇反應條件、調整支化劑及分子量調節劑之使用量等方 式而實現。又,亦可藉由對所得聚碳酸酯實施適宜之物理 處理(混合、區分等)及/或化學處理(聚合反應、交聯處 理、部分分解處理等),而使之成為特定比濃黏度 之聚碳酸酯。 作為R1、R2及式(2b)之R之碳數1〜3之烷基,較好的是曱 基、乙基、正丙基、異丙基。 作為R7〜R12之碳數1〜4之烷基,較好的是曱基、乙基、 正丙基 '異丙基、正丁基、2-丁基、第三丁基、異丁基。 作為R7〜R12之伸烷基’較好的是1,7_伸庚基、丨,8-伸辛 基、1,10-伸癸基、1,12-伸十二烷基。 作為R3〜R6,R13〜R19及式(6a)、(6b)、(6c)之R之碳數1〜6 之脂肪族烴基,較好的是甲基、乙基、正丙基、異丙基、 正丁基、2-丁基、第三丁基、異丁基、戊基、己基。 150866.doc -18· 201123575 作马〜R0,R13〜r20 — R及式(6a)、(6b)、(㈣之尺之碳數 6 12之芳基’車父好的是笨基、萘基、聯苯基。 作為R與R之碳數4〜12之亞環烷基,較好的是“卜亞環 戍基:^亞環己基、亞環辛基、1,卜亞環十二烧基。 作為R20之碳數4〜12之脂肪族烴基,較好的是丁基戍 基、己基、庚基、辛基、癸基、十二烷基。 本發明之聚碳酸醋可僅由上述重複單元構成,且只要對 非齒素溶劑之溶解度為5心以上,π亦可於對本發明之 目的無妨礙之範圍内具有上述以外之其他重複單元。 又,本發明之薄膜電晶體之絕緣體層可僅由本發明之聚 碳酸酯構成’亦可適宜地進而含有:其他聚碳酸酯成分、 聚醯亞胺'聚醯胺、聚酯、聚丙烯酸酯、光自由基聚合系 或光陽離子聚合系之光硬化性樹脂、含有丙烯腈成分之共 聚物、聚乙烯基苯酚、聚乙烯醇'酚醛清漆樹脂、及氰乙 基聚三葡萄糖、蠟、聚乙烯、聚氯平(p〇lychl〇r〇prene)、 聚對苯二甲酸乙二酯、聚曱醛、聚氣乙烯、聚偏二氟乙 烯、聚甲基丙烯酸曱酯、聚砜、聚碳酸酯、聚醯亞胺氰乙 基聚二葡萄糖、聚(乙烯基苯酚)(pVp)、聚(甲基丙烯酸甲 酯)(PMMA)、聚苯乙烯(PS) '聚烯烴、聚丙烯醯胺、聚(丙 稀酸)、盼駿清漆樹脂、可溶紛酸樹脂、聚醯亞胺、聚二 甲苯、環氧樹脂以及聚三葡萄糖等聚合物及添加物。 本發明之聚碳酸酯可藉由使二元酚與碳酸酯形成化合物 反應而製造’例如,可藉由使下述式(IV)所表示之二元酚 (IV)及/或與二元紛(IV)具有不同結構之二元酚與碳酸酯形 150866.doc -19· 201123575 成性化合物反應而製造: [化 33](wherein R and R are independently a hydrogen atom, an aliphatic hydrocarbon group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms or a halogen atom; X is 0 S , -S〇-, -S02-, -CO - '9,9-arylene, a bonding group represented by the following formula (2a), (2b), (2c) or (2d), which comprises the repeating unit represented by the above formula (II) and the above formula ( The polycarbonate towel of the copolymer of the repeating unit represented by 1 (1), the ratio of the repeating unit 7L represented by the formula (π) to the repeating unit represented by the formula (III) is 0.95. The enthalpy of the element is (Π)/( (ΙΙ)+(ΙΙΙ)) When the amount of 5% or more than 〇95 is not reached, for example, when the polycarbonate has a skeleton having a higher crystallinity such as Azure A, the characteristic f·sheng is strong, (There is a decrease in solubility in a non-halogen solvent. A polycarbonate comprising a copolymer of a repeating unit represented by the above formula (II) and a repeating unit represented by the above formula (m), and a formula represented by the formula (1) The polycarbonate of the repeating unit is the same as the solubility of at least one non-i solvent selected from the group consisting of tetrahydroanthracene D, hexanone, and toluene, and is 5 wtm. Therefore, the formula: (11) Table The polycarbonate s| of the copolymer of the repeating unit and the repeating unit represented by the above formula_ is dissolved in a non-element solvent, and the solution layer is laminated by the core coating method to laminate the insulating layer of the thin film transistor of the present invention. The polycarbonate represented by the repeating unit and the polysiloxane containing the copolymer of the repeating unit represented by the formula („) J50866.doc 17 201123575 and the repeating unit represented by the formula (m) As the concentration of the solvent 〇5, the specific viscosity of the solution of (1) at 20 ° C [t! SP / C] is preferably 〇丨 5 5 / g, more preferably 0.3 to 3 dl / g 'especially It is preferably 0.5 to 2.5 dl/g. When the concentration viscosity [tjsp/C] is less than 0.1 g/dl, the strength of the coating film is insufficient, and there are problems such as peeling and cracking. When the viscosity (hSP/C) exceeds 5 dl/g, the coating viscosity is too high when the coating liquid is formed, and the productivity is lowered and the film thickness is uneven. The specific viscosity of the self-enthalpy is in the above range, for example, by selecting reaction conditions, adjusting the branching agent and the molecular weight regulator It can be realized by the amount of the method, etc., or by subjecting the obtained polycarbonate to physical treatment (mixing, differentiation, etc.) and/or chemical treatment (polymerization, crosslinking treatment, partial decomposition treatment, etc.). A polycarbonate having a specific specific viscosity. The alkyl group having 1 to 3 carbon atoms of R, R2 and R of the formula (2b) is preferably a mercapto group, an ethyl group, a n-propyl group or an isopropyl group. The alkyl group having 1 to 4 carbon atoms of R7 to R12 is preferably an anthracenyl group, an ethyl group, a n-propyl 'isopropyl group, an n-butyl group, a 2-butyl group, a tert-butyl group or an isobutyl group. The alkylene group as R7 to R12 is preferably 1,7-heptyl, fluorene, 8-exenyl, 1,10-decyl, 1,12-decyldecyl. The aliphatic hydrocarbon group having 1 to 6 carbon atoms of R3 to R6, R13 to R19 and R of the formulae (6a), (6b) and (6c) is preferably a methyl group, an ethyl group, a n-propyl group or an isopropyl group. Base, n-butyl, 2-butyl, tert-butyl, isobutyl, pentyl, hexyl. 150866.doc -18· 201123575 Make a horse ~R0, R13~r20 - R and formula (6a), (6b), ((4) the carbon number of the ring 6 12 aryl 'Car father good is stupid, naphthyl And a bicycloalkyl group having 4 to 12 carbon atoms of R and R, preferably a "cyclohexylene group: a cyclohexylene group, a cyclooctylene group, a 1, a cyclopentene group. The aliphatic hydrocarbon group having 4 to 12 carbon atoms is preferably a butyl fluorenyl group, a hexyl group, a heptyl group, an octyl group, a decyl group or a dodecyl group. The polycarbonate of the present invention may be composed only of the above repeating units. Further, as long as the solubility in the non-dentate solvent is 5 or more, π may have other repeating units than those in the range which does not hinder the object of the present invention. Further, the insulating layer of the thin film transistor of the present invention may be only by the present invention. The polycarbonate composition may also suitably contain other polycarbonate components, polyamidiene polyamide, polyester, polyacrylate, photoradical polymerization or photocationic polymerization photocurable resin. , copolymer containing acrylonitrile component, polyvinyl phenol, polyvinyl alcohol 'novolak resin And cyanoethyl polytriglucose, wax, polyethylene, polychloropyrene (p〇lychl〇r〇prene), polyethylene terephthalate, polyfurfural, polyethylene, polyvinylidene fluoride, poly Ethyl methacrylate, polysulfone, polycarbonate, polyamid cyanoethyl polydextrose, poly(vinylphenol) (pVp), poly(methyl methacrylate) (PMMA), polystyrene ( PS) 'Polyolefin, polyacrylamide, poly(acrylic acid), Panjun varnish resin, soluble acid resin, polyimine, polyxylene, epoxy resin and polytriglucose The polycarbonate of the present invention can be produced by reacting a dihydric phenol with a carbonate forming compound, for example, by using a dihydric phenol (IV) represented by the following formula (IV) and/or Yuan Ding (IV) has a different structure of dihydric phenol and carbonate form 150866.doc -19· 201123575 synthetic compound produced: [Chem. 33]
(式中,R3、R4及X與式⑺相同)。 作為式(IV)所表示之二元酚之具體例’可列舉:雙經 苯基)曱烷、1,1-雙(4-羥苯基)乙烷、丨,2·雙(4_羥苯基)乙 烷、2,2-雙(4-羥苯基)丙烷、2,2_雙(3_甲基_4羥笨基)丁 烷、2,2_雙(4_經苯基)丁烧、2,2_雙(4•經苯基)辛烧、雙 (4-羥苯基)庚烷、3,3_雙(4_羥苯基)戊烷、4,4,-二羥基四= 基甲烷、1山雙(4-經苯基w、苯基乙烧、m(4_經苯基 1_苯基曱烷、雙(4_羥苯基)醚、雙(4-羥苯基)硫醚、雙(4_ 羥苯基)砜、1,卜雙(4_羥苯基)環戊烷、匕卜雙㈠―羥苯基)環 己烷、2,2-雙(3-甲基_4·羥笨基)丙烷、2_(3_甲基_4_羥苯 基)-2-(4-羥笨基)_〗_苯基乙烷、雙(3_甲基羥苯基)硫 醚、雙(3-甲基-4-羥苯基)砜、雙(3_甲基羥苯基)曱烷、 1’1_雙(3-曱基-4-經苯基)環己烧、2,2_雙(2_甲基_4_經苯基) 丙烷、2,2-雙(3,6-二曱基-4-羥苯基)丙烷、2,2-雙(3_環己 基-4-羥苯基)丙烷、丨,丨-雙(2_丁基·4_羥基_5甲基苯基)丁 烷、U-雙(2-第三丁基_4_羥基_3_甲基苯基)乙烷、丨,丨·雙 (2-第三丁基·‘羥基_5_甲基苯基)丙烷、丨,卜雙(2_第三丁 基-4-羥基-5-甲基苯基)丁烷、^―雙^-第三丁基_4_羥基-弘 甲基苯基)異丁烷、1}雙(2-第三丁基·4_羥基_5_甲基苯基) 庚烷、l’l-雙(2-第三丁基_4-羥基-5-曱基苯基)_丨_苯基甲 150866.doc •20· 201123575 烷、1,1-雙(2-第三戊基-4-羥基_5_甲基苯基)丁烷、雙(3_ 氯-4-羥苯基)曱烷、雙(3,5-二溴_4_羥苯基)甲烷、2,2-雙(3-氯-4-羥苯基)丙烷、2,2-雙(3-氟-4-羥苯基)丙烷、2,2-雙(3-溴-4-羥苯基)丙烷、2,2-雙(3,5-二氟-4-羥苯基)丙烷、2,2-雙(3,5-二氯-4-經苯基)丙烧、2,2-雙(3,5-二溴-4-經苯基)丙 烷、2,2-雙(3-溴-4-羥基-5-氯苯基)丙烷、2,2-雙(3,5-二氣_ 4-羥苯基)丁烷、2,2-雙(3,5-二溴-4-羥苯基)丁烷、丨·苯基_ 1,1_雙(3-氟-4-羥苯基)乙烷、雙(3-氟_4_羥苯基)醚、1,1_雙 (3-環己基-4-羥苯基)環己烷、4,4,-二羥基聯苯、4,4,-二經 基-3,3'-二曱基聯苯、4,4’-二羥基-2,2,-二曱基聯苯、4,4,-二經基-3,3’-二環己基聯苯、3,3’-二氟-4,4,-二經基聯苯、 2,2-雙(4-羥苯基)六氟丙烷、2,2-雙(3-苯基-4-羥苯基)丙 烧、1,1-雙(3-苯基-4-羥苯基)環己烧、雙(4-經苯基)颯、雙 (3-苯基-4-羥苯基)砜、雙(4-羥苯基)醚、9,9-雙(4-羥苯基) 苐、9,9-雙(3-甲基-4-羥苯基)苐、l,i_雙(4_羥苯基)_3,3,5_ 二甲基環己烧、4,4'-[1,4-伸苯基雙(1-曱基亞乙基)]雙盼、 4,4|-[1,3-伸苯基雙(1_甲基亞乙基)]雙酚、1,1_雙(3_甲基_4_ 羥苯基)環戊烷等。 式(IV)所表示之二元盼較好的是下述式(V)所表示之具有 非對稱結構之一元紛、或下述式(VI)所表示之各苯環之鄰 位上具有取代基之二元酚、下述式(VII)所表示之“與“相 互鍵結而形成碟數4〜12之亞環炫基之二元驗、下述式 (VIII)所表示之二元酚或者不述式(Ιχ)所表示之滿足 (6a+6c)/(6a+6b + 6c)為 〇.〇5〜0.95之二元酚: 150866.doc -21 · 201123575 [化 34](wherein R3, R4 and X are the same as in the formula (7)). Specific examples of the dihydric phenol represented by the formula (IV) include di-phenylphenyl decane, 1,1-bis(4-hydroxyphenyl)ethane, hydrazine, and bis (4-hydroxyl). Phenyl)ethane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(3-methyl-4-hydroxyphenyl)butane, 2,2-bis (4-phenylene) ) butyl, 2,2_bis(4•phenyl)octane, bis(4-hydroxyphenyl)heptane, 3,3-bis(4-hydroxyphenyl)pentane, 4,4,- Dihydroxytetrazole = meryl methane, 1 bis (4-phenyl phenyl, phenyl ethene, m (4 phenyl phenyl 1-phenyl decane, bis (4- hydroxyphenyl) ether, double (4 -Hydroxyphenyl)thioether, bis(4-hydroxyphenyl)sulfone, 1, bis(4-hydroxyphenyl)cyclopentane, bismuth(1)-hydroxyphenyl)cyclohexane, 2,2-double (3-methyl-4 hydroxyphenyl)propane, 2-(3-methyl-4-hydroxyphenyl)-2-(4-hydroxyphenyl)- _phenylethane, bis (3-A) Hydroxyphenyl) sulfide, bis(3-methyl-4-hydroxyphenyl)sulfone, bis(3-methylhydroxyphenyl)decane, 1'1_bis(3-indolyl-4-jing) Phenyl) cyclohexane, 2,2_bis(2-methyl-4-yl-phenyl)propane, 2,2-bis(3,6-diamidino-4-hydroxyphenyl)propane, 2, 2-double (3_ ring 4-hydroxyphenyl)propane, hydrazine, hydrazine-bis(2-butyl-4-hydroxy-5methylphenyl)butane, U-bis(2-tert-butyl-4-hydroxy-3) _Methylphenyl)ethane, hydrazine, hydrazine bis(2-tert-butyl-'hydroxy-5-methylphenyl)propane, hydrazine, bis (2_t-butyl-4-hydroxy- 5-methylphenyl)butane, ^-bis--t-butyl-4-yl-hydroxy-methylphenyl)isobutane, 1}bis(2-tert-butyl-4-hydroxy- 5 _Methylphenyl) heptane, l'l-bis(2-tert-butyl-4-hydroxy-5-fluorenylphenyl)_丨_phenylmethyl 150866.doc •20· 201123575 alkane, 1, 1-bis(2-tityl-4-hydroxy-5-methylphenyl)butane, bis(3-chloro-4-hydroxyphenyl)decane, bis(3,5-dibromo-4) Hydroxyphenyl)methane, 2,2-bis(3-chloro-4-hydroxyphenyl)propane, 2,2-bis(3-fluoro-4-hydroxyphenyl)propane, 2,2-bis(3- Bromo-4-hydroxyphenyl)propane, 2,2-bis(3,5-difluoro-4-hydroxyphenyl)propane, 2,2-bis(3,5-dichloro-4-phenyl) Propylene, 2,2-bis(3,5-dibromo-4-phenyl)propane, 2,2-bis(3-bromo-4-hydroxy-5-chlorophenyl)propane, 2,2- Bis(3,5-diqi-4-hydroxyphenyl)butane, 2,2-bis(3,5- Bromo-4-hydroxyphenyl)butane, fluorenylphenyl-1,1_bis(3-fluoro-4-hydroxyphenyl)ethane, bis(3-fluoro-4-hydroxyphenyl)ether, 1 , 1_bis(3-cyclohexyl-4-hydroxyphenyl)cyclohexane, 4,4,-dihydroxybiphenyl, 4,4,-di-based-3,3'-dimercaptobiphenyl, 4,4'-dihydroxy-2,2,-dimercaptobiphenyl, 4,4,-di-based-3,3'-dicyclohexylbiphenyl, 3,3'-difluoro-4,4 ,-di-biphenyl, 2,2-bis(4-hydroxyphenyl)hexafluoropropane, 2,2-bis(3-phenyl-4-hydroxyphenyl)propane, 1,1-double ( 3-phenyl-4-hydroxyphenyl)cyclohexane, bis(4-phenyl)anthracene, bis(3-phenyl-4-hydroxyphenyl)sulfone, bis(4-hydroxyphenyl)ether, 9,9-bis(4-hydroxyphenyl)anthracene, 9,9-bis(3-methyl-4-hydroxyphenyl)anthracene, l,i_bis(4-hydroxyphenyl)_3,3,5_ Dimethylcyclohexene, 4,4'-[1,4-phenylphenylbis(1-indenylethylene)], 4,4|-[1,3-phenylene double (1) _Methylethylidene)]bisphenol, 1,1-bis(3-methyl-4-hydroxyphenyl)cyclopentane, and the like. Preferably, the binary expectation represented by the formula (IV) is one having an asymmetric structure represented by the following formula (V) or having a substitution at the ortho position of each benzene ring represented by the following formula (VI). The dihydric phenol represented by the following formula (VIII), which is represented by the following formula (VII), and the "binary phenol which is bonded to each other to form a cyclopentene group having a number of 4 to 12; Or the satisfaction of (6a+6c)/(6a+6b + 6c) represented by the formula (Ιχ) is 二元.〇5~0.95 of dihydric phenol: 150866.doc -21 · 201123575 [Chem. 34]
(V) (式中,R13、R14、R15及R16與式(3)相同); [化 35](V) (wherein R13, R14, R15 and R16 are the same as in formula (3)); [Chem. 35]
[化 36][化36]
(式中,R3、R4與式⑺相同; R5與R6相互鍵結形成碳數4〜12之亞環烷基); [化 37](wherein R3 and R4 are the same as in the formula (7); R5 and R6 are bonded to each other to form a cycloalkylene group having a carbon number of 4 to 12);
19 OH (VIII) (式中,R19、r2〇與式⑺相同); [化 38]19 OH (VIII) (wherein R19, r2〇 are the same as in formula (7)); [Chem. 38]
I50866.doc •22· 201123575 基或鹵素原子)。 作為式(V)所表示之二元酚及式(VI)所表示之二元盼之具 體例’可列舉:1,1-雙(4-經苯基)-1-苯基乙院、2,2 -雙(3_ 甲基-4-羥苯基)丙烷及2,2_雙(3_苯基_4_羥苯基)丙烷、u_ 雙(4-羥基-3_甲基苯基)環己烷、2,2_雙(‘羥基_3_環己基苯 基)丙烧、2,2-雙(3,5-二溴-4-羥苯基)丙炫、2,2-雙(4-羥基_ 3,6-二甲基苯基)丙烷、丨’丨-雙丨‘羥苯基)乙烷' 2,2-雙(4_羥 本基)丁烧、1,1_雙(3_甲基_4_經苯基)環戊烧、9,9_雙(3胃甲 基-4-羥苯基)苐。 製造上述本發明之聚碳酸酯可使用以光氣為代表之碳醯 一鹵氯甲酸酯化合物等鹵甲酸酯類或碳酸酯化合物等作 為碳酸酯形成化合物,於適宜之酸結合劑之存在下藉由縮 聚反應而進行。 使用奴醯二_、由甲酸酯類、碳酸酯化合物等作為碳酸 醋形成化合物’於酸結合劑之存在下實施的縮聚反應,通 帝係於溶劑中或於無溶劑下進行。 作為奴酸酯形成化合物之碳醯二_可列舉光氣。 乍為厌k S曰形成化合物之齒曱酸酯類可列舉氣曱酸酯。 碳酸酯化合物可列舉碳酸二甲酯、碳酸二苯酯。 對於石反酉夂Sg形成化合物之使用比例,考慮反應之化學計 里比(田里)而進行適宜調整即可。又’於碳酸酯形成化合 物為光Λ等之氣體狀之情形時,可適宜採用將該氣體吹入 至反應體系中之方法。 作為酸結合劑,例如可使用氫氧化鈉、氫氧化鉀等鹼金 150866.doc •23· 201123575 屬氫氧化物,碳酸鈉、碳酸鉀等鹼金屬碳酸鹽,吡啶等有 機鹼或該等之混合物等。 對於酸結合劑之使用比例,考慮反應之化學計量比(當 篁)而適宜決定即可,較好的是相對於所使用之二元酚之 莫耳數(通常1莫耳相當於2當量)為2當量或多於2當量。 作為浴劑,可將能用於製造聚碳酸酯之公知溶劑等單獨 使用-種或形成混合溶劑使用,作為溶劑之具體例,可列 舉甲苯、二甲苯等煙溶劑,二氣甲烧、氣苯等鹵化烴溶劑 者作為/合劑,可使用彼此不混合之兩種溶劑進行界 面縮聚反應’尤其理想的是使用驗性水溶液及與水實質不 混合之有機溶劑進行界面縮聚反應。 為促進縮聚反應,較理想的是添加如三乙胺之三㈣或 四㈣鹽等觸媒。x,視需要亦可添加少量之亞硫酸納、 硫氫化物等抗氧化劑。 縮聚反應通常係於0〜⑽’較好的是5〜4吖之範圍之 溫度下進行。反應壓力可為減壓、常壓、加壓之任一種, 通常於常壓或反應體系自身壓力左 为及右之壓力下即可較好地 行。反應時間受反應溫度等影響,通常為^分鐘〜叫 時’較好的是1分鐘〜2小時左右。 縮聚反應視需要可於末端終止劑 進行。 幻及’次支化劑之存在下 作為上述末端終止劑,可使 及一元齡’例如可較好地使用 用元鲮酸及其衍生物、以 :對第三丁基苯酚、對苯基 150866.doc • 24· 201123575 苯酚、對異丙苯基苯酚'對全氟壬基苯酚、對全氟辛基笨 酚、對全氟己基苯酚、對(全氟壬基苯基)苯酚、對(全氟氧 基苯基)苯酚、對第三全氟丁基苯酚、(對經基节基)全氣 癸烧、對全氟三-十二烧氧基)_丨,丨,丨,3 丙基]苯驗、3,5 -雙(全氟己氧基幾基)苯紛、對經基苯曱奶 全說十二烧基醋、對(1H,1H-全氣辛氧基)苯酚^ 2H,2H,9H-全氟壬酸、1,1,1,3,3,3_四氟_2_丙醇或下述式所 表示之醇等: H(CF2)„CH2OH (式中,η為1〜12之整數); F(CF2)mCH2OH (式中,m為1〜12之整數)。 末端終止劑之添加比例以共聚組成比(末端終止劑之莫 耳數/(聚碳酸酯主鏈單體單元之莫耳數+末端莫耳數)計較 好的疋0_05〜3 0莫耳%,進而好的是〇1〜1〇莫耳%。於添加 比例超過30莫耳%之情形時,存在引起機械強度下降之 虞,於未達0.05莫耳。/。之情形時,塗敷液之黏度變得過 高’故而存在膜厚產生不均或引起成形性下降之虞。 作為支化劑,可列舉:根皮三酚(phl〇r〇glucin)、鄰笨三 酚、4,6-二曱基_2,4,6-三(4-羥苯基)-2-庚烯、2,6-二曱基_ 2,4,6-三(4-羥苯基)_3_庚烯、2,4_二曱基_2,4,6_三(4羥笨 基)庚烧、 ι,ι,ι-三(4-羥苯基)乙烷、三(4_羥苯基)苯基曱烷、2,2-雙 [4,4-雙(4-羥苯基)環己基]丙烷、2,4_雙[2_雙(4羥苯基 150866.doc 25· 201123575 丙基]苯酚、2,6-雙(2-羥基_5-曱基爷基)_4_甲基笨酚、2_(4_ 羥苯基)-2-(2,4-二羥苯基)丙烷、四(4_羥苯基)甲烷四[心 (4-羥苯基異丙基)苯氧基]甲烷、2,4_二羥基苯甲酸、 苯三甲酸、三聚氰酸、3,3_雙(3_曱基_4_羥苯基)_2_氧代_ 2,3-二氛叫卜朵、3’3_雙(4_經基芳基)氧化叫卜朵、%氣靛紅(5_ chloroisatin)、5,7-二氯靛紅、5-溴靛紅等。 支化劑之添加比例以共聚組成比(支化劑之莫耳數/(聚碳 酸酯主鏈單體單元之莫耳數+支化劑之莫耳數)計為莫耳 %以下,較好的是5莫耳%以下。於添加比例超過3〇莫耳% 之情形時,塗敷液之黏度變得過高,故而存在膜厚產生不 均或引起成形性下降之虞。 製造本發明之聚碳酸酯亦可藉由使用碳酸二芳基酯類作 為碳酸酯形成化合物的酯交換反應而進行。 作為碳酸酯形成化合物之碳酸二芳基酯類例如可列舉: 碳酸二苯酯、碳酸二對甲苯酯、碳酸苯基對甲苯酯、碳酸 二對氯苯酯、碳酸二萘酯等。 作為Sa交換反應之反應形式,合適的是熔融縮聚法、固 相縮聚法等。 於進行熔融縮聚法之情形時,可於減壓下、高溫下以熔 融狀態進行反應。反應通常係於15〇〜35〇〇c,較好的是 200〜300°C之範圍之溫度下進行。另一方面,於進行固相 縮聚法之情形時,可保持固相狀態,加熱至所生成之聚碳 酸自曰之炫點以下的溫度而進行反應(縮聚)。 於熔融縮聚法及固相縮聚法之任一情形時,均於反應之 150866.doc •26· 201123575 取後又將減麼度設為較佳為】mmHg以下,將藉由醋交 、心而生成之來自上述碳酸二芳基s旨類之酚類蒸館除去 至體系外。反應時間受反應溫度、減麼度等影響,通常為 1〜4小時左右。反應較好的是於氮氣或氬氣等惰性氣體環 i兄下進仃’視需要亦可添加抗氧化劑等而進行反應。 ° 斤得反應產物(粗產物)實施眾所周知之分離純化法 等各種後處理,回收所期望之純度(純化度)之聚碳酸醋。 *本發明之薄膜電晶體可根據電極之位置、層之積層順序 等而採用幾種構成,I有場效電晶體(FET : Field Effect Transistor)結構。 圖1係表示本發明之薄膜電晶體之一實施形態之圖。 薄膜電體1於基板1〇上積層有閘極電極2〇,絕緣體層 覆蓋閘極電極2〇之方式積層於基板⑺上。於絕緣體層 3〇上’源極電極40與汲極電極5〇隔開特定之間隔分別並列 積層。半導體層6G填充源極電極4()與沒極電極5〇間之空 ;、一積層於、,.邑緣體層3〇、源極電極4〇及;及極電極上。 β半導奴層60形成通道區域,藉由對閘極電極施加之電 磨而控制1 原極電極40與波極電極5〇之間流通之電流,從而 進行開/關動作。 t 2係表示本發明之薄膜電晶體之另-實施形態之圖。 1 '電曰曰體2於、絕緣體層30上積層冑|導體層6〇,於該 二V體層6G上,源極電極4。與沒極電極5㈣開特定之間隔 刀別亚列積層’除此以外與薄膜電晶體(具有相同之 150866.doc -27- 201123575 圖3係表示本發明之薄膜電晶體之另一實施形態之圖。 薄膜電晶體3中,源極電極4〇與汲極電極5〇隔開特定之I50866.doc •22·201123575 based or halogen atom). Specific examples of the dihydric phenol represented by the formula (V) and the binary expectation represented by the formula (VI) include 1,1-bis(4-phenylphenyl)-1-phenyl phenylene, 2 ,2-bis(3-methyl-4-hydroxyphenyl)propane and 2,2-bis(3-phenyl-4-hydroxyphenyl)propane, u-bis(4-hydroxy-3-methylphenyl) Cyclohexane, 2,2-bis('hydroxy-3_cyclohexylphenyl)propane, 2,2-bis(3,5-dibromo-4-hydroxyphenyl)propane, 2,2-double (4-hydroxy-3,6-dimethylphenyl)propane, 丨'丨-biguanide hydroxyphenyl)ethane '2,2-bis(4-hydroxyl)butane, 1,1_ Bis(3_methyl_4_phenyl)cyclopentane, 9,9-bis(3-gasmethyl-4-hydroxyphenyl)indole. As the polycarbonate of the present invention, a halogenate or a carbonate compound such as a carbonium-halide chloroformate compound represented by phosgene can be used as a carbonate-forming compound in the presence of a suitable acid binder. It is carried out by a polycondensation reaction. The polycondensation reaction carried out in the presence of an acid binder by using a benzoic acid ester, a carbonate compound or the like as a carbonated vinegar is carried out in a solvent or in the absence of a solvent. As the ruthenium carbonate forming compound, phosgene can be cited. Examples of the dentate ester which is a compound of the 厌k S曰 formation include a gas phthalate. Examples of the carbonate compound include dimethyl carbonate and diphenyl carbonate. The ratio of the use of the stone-reactive Sg-forming compound may be appropriately adjusted in consideration of the chemistry of the reaction (in the field). Further, in the case where the carbonate-forming compound is in the form of a gas such as a krypton, a method of blowing the gas into the reaction system can be suitably employed. As the acid binder, for example, an alkali gold such as sodium hydroxide or potassium hydroxide can be used. 150866.doc • 23· 201123575 is a hydroxide, an alkali metal carbonate such as sodium carbonate or potassium carbonate, an organic base such as pyridine or a mixture thereof. Wait. The ratio of the use of the acid binder may be appropriately determined in consideration of the stoichiometric ratio of the reaction (when 篁), preferably the molar number of the dihydric phenol used (usually 1 mole equivalent to 2 equivalents) It is 2 equivalents or more than 2 equivalents. As a bathing agent, a known solvent which can be used for producing a polycarbonate or the like can be used alone or in a mixed solvent. Specific examples of the solvent include a sonic solvent such as toluene or xylene, and a gas-fired and gas-benzene-based gas. When the halogenated hydrocarbon solvent is used as a mixture, the interfacial polycondensation reaction can be carried out using two solvents which are not mixed with each other. It is particularly preferable to carry out an interfacial polycondensation reaction using an aqueous test solution and an organic solvent which is not mixed with water. In order to promote the polycondensation reaction, it is preferred to add a catalyst such as a tri(tetra) or tetrakis(4) salt of triethylamine. x, if necessary, a small amount of an antioxidant such as sodium sulfite or hydrosulfide may be added. The polycondensation reaction is usually carried out at a temperature of from 0 to 10 °', preferably from 5 to 4 Torr. The reaction pressure may be any one of a reduced pressure, a normal pressure, and a pressurization, and it is usually carried out at a normal pressure or a pressure of the reaction system itself to the left and right pressure. The reaction time is affected by the reaction temperature and the like, and is usually from about 1 minute to about 2 minutes, preferably from about 1 minute to about 2 hours. The polycondensation reaction can be carried out at the terminal terminator as needed. In the presence of phantom and 'sub-branching agents, as the terminal terminator, it can be used as a one-year-old', for example, the use of the phthalic acid and its derivatives can be preferably used, such as: p-tert-butylphenol, p-phenyl 150866 .doc • 24· 201123575 Phenol, p-cumylphenol 'p-perfluorononylphenol, p-perfluorooctylphenol, p-perfluorohexylphenol, p-(perfluorodecylphenyl)phenol, pair Fluoroxyphenyl)phenol, p-tertiary perfluorobutylphenol, (for acetonyl) all gas calcination, perfluorotris-dodecyloxy) 丨, hydrazine, hydrazine, 3 propyl ] Benzene test, 3,5-bis(perfluorohexyloxy)benzene, all-by-base benzoquinone milk, 12-base vinegar, p-(1H, 1H-all-gas octyloxy) phenol ^ 2H , 2H, 9H-perfluorodecanoic acid, 1,1,1,3,3,3_tetrafluoro-2-propanol or an alcohol represented by the following formula: H(CF2)„CH2OH (in the formula, η An integer of 1 to 12); F(CF2)mCH2OH (wherein m is an integer of 1 to 12). The ratio of the terminal terminator added is a copolymer composition ratio (the number of moles of the terminal terminator / (polycarbonate main) The number of moles of the chain monomer unit + the number of moirs at the end is better than _0_ 05~3 0% by mole, and further preferably 〇1~1〇% by mole. When the addition ratio exceeds 30% by mole, there is a flaw in causing a decrease in mechanical strength, which is less than 0.05 mol. In the case where the viscosity of the coating liquid is too high, there is a possibility that the film thickness is uneven or the formability is lowered. Examples of the branching agent include phlorizin (lucl) and adjacent Stupitriol, 4,6-dimercapto-2,4,6-tris(4-hydroxyphenyl)-2-heptene, 2,6-dimercapto-2,4,6-tris(4- Hydroxyphenyl)_3_heptene, 2,4-dimercapto-2,4,6-tris(4-hydroxyphenyl)heptane, ι,ι,ι-tris(4-hydroxyphenyl)ethane, Tris(4-hydroxyphenyl)phenylnonane, 2,2-bis[4,4-bis(4-hydroxyphenyl)cyclohexyl]propane, 2,4_bis[2_bis(4-hydroxyphenyl) 150866.doc 25· 201123575 Propyl]phenol, 2,6-bis(2-hydroxy-5-fluorenyl) 4-methylphenol, 2-(4-hydroxyphenyl)-2-(2,4- Dihydroxyphenyl)propane, tetrakis(4-hydroxyphenyl)methanetetrakis[4-(hydroxyphenylisopropyl)phenoxy]methane, 2,4-dihydroxybenzoic acid, trimellitic acid, trimerization Cyanic acid, 3,3_bis(3_fluorenyl-4-hydroxyphenyl)_2_oxo_ 2,3- The second atmosphere is called Bu Duo, 3'3_ bis (4_ aryl) oxidized called bud, % chloroisatin, 5,7-dichloropurine, 5-bromo ruthenium, etc. The addition ratio of the chemical agent is preferably equal to or less than the molar composition of the branching agent (the number of moles of the branching agent / the number of moles of the polycarbonate backbone monomer unit + the number of moles of the branching agent), preferably It is 5 mol% or less. When the addition ratio exceeds 3 〇 mol%, the viscosity of the coating liquid becomes too high, so that the film thickness is uneven or the formability is lowered. The production of the polycarbonate of the present invention can also be carried out by using a transesterification reaction using a diaryl carbonate as a carbonate forming compound. Examples of the diaryl carbonate of the carbonate-forming compound include diphenyl carbonate, di-p-tolyl carbonate, phenyl p-tolyl carbonate, di-p-chlorophenyl carbonate, and dinaphthyl carbonate. As the reaction form of the Sa exchange reaction, a melt polycondensation method, a solid phase polycondensation method, or the like is suitable. In the case of the melt polycondensation method, the reaction can be carried out in a molten state under reduced pressure and at a high temperature. The reaction is usually carried out at a temperature of from 15 Torr to 35 Torr, preferably from 200 to 300 °C. On the other hand, in the case of the solid phase polycondensation method, the solid phase state can be maintained, and heating (polycondensation) can be carried out by heating to a temperature lower than the glare of the produced polycarbonate. In any case of the melt polycondensation method and the solid phase polycondensation method, the reaction is determined to be 150866.doc •26·201123575 and then the reduction is set to preferably less than mmHg, which will be vinegar and heart. The resulting phenolic vapor from the above-mentioned diaryl s carbonate is removed to the outside of the system. The reaction time is affected by the reaction temperature, the degree of reduction, and the like, and is usually about 1 to 4 hours. The reaction is preferably carried out by introducing an inert gas such as nitrogen or argon. The reaction may be carried out by adding an antioxidant or the like as needed. The reaction product (crude product) is subjected to various post-treatments such as a well-known separation and purification method to recover a desired purity (purification degree) of polycarbonate. * The thin film transistor of the present invention can be constructed in several configurations depending on the position of the electrode, the order of lamination of the layers, etc. I has a field effect transistor (FET) structure. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an embodiment of a thin film transistor of the present invention. The thin film electric body 1 is laminated on the substrate 1A with a gate electrode 2〇, and the insulator layer is laminated on the substrate (7) so as to cover the gate electrode 2〇. On the insulator layer 3', the source electrode 40 and the drain electrode 5 are respectively arranged at a predetermined interval. The semiconductor layer 6G fills the space between the source electrode 4 () and the electrodeless electrode 5, and is laminated on the surface of the edge layer 3, the source electrode 4, and the electrode. The β-semiconductor layer 60 forms a channel region, and the current flowing between the primary electrode 40 and the wave electrode 5〇 is controlled by electric arcing applied to the gate electrode to perform an on/off operation. t 2 is a view showing another embodiment of the thin film transistor of the present invention. 1 'Electrical body 2, a layer of germanium on the insulator layer 30, a conductor layer 6A, and a source electrode 4 on the body of the V body layer 6G. A thin film transistor is formed in the same manner as the electrodeless electrode 5 (four). (There are the same as the thin film transistor. (There are the same 150866.doc -27-201123575. FIG. 3 is a view showing another embodiment of the thin film transistor of the present invention. In the thin film transistor 3, the source electrode 4 〇 is separated from the drain electrode 5 特定 by a specific one.
及極電極50上。於半導體層6〇上積層有絕緣體層,於該 絕緣體層30上積層有閘極電極2〇。 圖4係表示本發明之薄膜電晶體之另一實施形態之圖。 薄膜電晶體4於基板1〇上積層有半導體層6〇,於半導體 層60上,源極電極4〇與沒極電極%隔開特定之間隔分別並 列積層。絕緣體層30填充源極電極4〇與汲極電極5〇間之間 隙,積層於源極電極4〇、汲極電極5〇及半導體層⑽上,絕 緣體層30上積層有閘極電極20。 於使用無機半導體作為半導體層之材料之情形時,為不 對作為絕緣體層之聚碳酸s旨層造成損傷,較好的是圖3及 圖4所示之稱為頂閘極型之元件構成。 本發明之薄膜電晶體具有有機半導體層(有機化合物声) 或無機半導體4 ’以相互隔開特定之間隔且對向之方式而 形成之源極電極及沒極電極,以及自源極電極、汲極電極 分別隔開特定之距離而形成之間極電極,並藉由對間極電 極施加電壓而控制源極_汲極電極間流通之電流。 而控制源極電極與汲極電極間流通^ 關動作,表現放大等效果之結構即可 件構成。 本發明之薄膜電晶體只要為藉由對閘極電極施加之電壓 之電流,從而進行開/ Γ ’並不限定於上述元 150866.doc •28- 201123575 本發明之薄膜電晶體可具有如例如下述有機薄膜電晶體 之元件構成:產業技術綜合研究所之吉田等人於第49次應 用物理學相關聯合演講會演講預稿集27a-M-3(2002年3月) 中提出的頂部及底部接觸型有機薄膜電晶體(參照圖5),及 千葉大學之工藤等人於電氣學會論文誌! Η,”%第 _頁中提出的垂直型之有機薄膜電晶體(參照叫。 以下,對轉明之薄膜電晶體之各構成構件進行說明。 本發明之薄膜電晶體之絕緣體層係藉由塗布法而積層之 層’且係含有本發明之聚碳酸酯之層。 通常聚碳酸酿之比介電係數較低,故而為降低薄膜電晶 體之驅動電壓,較好的是儘可能薄,但相反伴隨薄膜化曰,曰 源極-閘極間之漏電流變大,故而必須選擇適當之膜厚。 、-巴、.彖體層之厚度通常為10 nm〜5 μιη,較好的是打爪〜2 μηι,進而好的是1〇〇 nm〜1 μιη。 絕緣體層可藉由將使本發明之聚碳酸g旨溶解於非齒素容 劑所得之溶液,以例如浸塗法、錢法、洗鑄法、棒= 法、報塗法等塗布法進行塗布,並將塗布層藉由供烤、= 聚合、自溶液之自我組裝或該等之組合進行積層。 书 、、’邑緣體層可僅為含有本發明之聚礙酸酯之層,亦可為、 而含有包含其他材料之絕緣體層的2層以上之積層體γ ^ 便絕緣體層僅為含有本發明之聚碳酸酯之層,直 即 /、、七緣性亦 較咼,故而猎由設為充分薄之膜厚可製作 |工肖b〈有機镇 膜電晶體,但藉由組合介電係數較高之其他絕緣體層,1 更容易地降低臨界電壓。 胃 可 150866.doc -29- 201123575 通常’表面能較小之聚合物的比介電係數較低,薄膜電 曰曰曰體之臨界電壓變大。日本專利特開2005-72569號公報及 曰本專利特開2005-013468號公報中,揭示有藉由組合比 A t係數較高之絕緣體層與液相之低介電係數聚合物而獲 得的高遷移率且低臨界電壓之有機薄膜電晶體。本發明 中’於使用2層以上絕緣體層之積層體之情形時,只要與 半導體直接接觸之第1絕緣體層含有本發明之聚碳酸酯, 則對與閘極電極接觸之第2絕緣體層之材料及形成方法無 特別限制。 第1絕緣體層係含有本發明之聚碳酸酯,以塗布法積層 之層。關於其膜厚,只要可形成連續膜則越薄越好,例如 為0.5 nm〜1〇〇 nm ’較好的是1 nm〜20 nm,進而好的是1 nm〜1〇 nm。 形成第2絕緣體層之材料可使用金屬氧化物(包含石夕之氧 化物)、金屬氮化物(包含矽之氮化物)、高分子、有機低分 子等室溫(例如2〇~25°C )下之電阻率為1〇 Qcm以上之材 料’尤其好的是比介電係數高於3之材料。 藉由以上述材料形成第2絕緣體層,容易於半導體層中 產生儲存層,可減低電晶體動作之臨界電壓。 作為形成第2絕緣體層之上述金屬氧化物及金屬氮化物 等,可列舉:氧化矽、氧化鋁、氧化钽、氧化鈦、氧化 錫、氧化釩、鈦酸鋇鳃、锆鈦酸鋇、鍅鈦酸鉛、鈦酸如 鋼、鈦酸認、鈦酸領、氟化锅鎮、鑭氧化物、氟氧化物 鎮氧化物、秘氧化物、鈦酸祕、錕氧化物、鈦酸錄祕、組 150866.doc •30- 201123575 2人物乳化纽、组銳酸紅、三氧化織組合該等所成 ° ,車父好的是氧化矽、氧化鋁、氧化组、氧化鈦。 又’亦可較好地使用氮化砂⑻⑻、SixNy、刪χ(χ、 y>0)卜氮化料無機氮化物。藉由m si為、 SiONJx、y>G)等氮化石夕形成絕緣體層,變得更易產生儲 存層卩it步減低電晶體動作之臨界電壓。 第2絕緣體層亦可由合古 』由δ有金屬酵鹽之前驅物質形成。 作為上述金屬醇鹽之,mi it 、 旰·^ t 4屬例如可自過渡金屬、鑭系元 素或主族元素中選擇,具體而言可列舉:鋇㈣、錄 、鈦(Ti)、絲(Bi)、组(Ta)、鍅(Zr)' 鐵(Fe)、錄(Ni)、 猛(Μη)、錯(Pb)、鑭(La)、經(Li)、納(Na)、_ (κ)、物 (Rb)、!色(Cs)、妨(Fr)、皱(Be)、鎂、約心)、就 (Nb)釔(τΐ)、汞(Hg)、銅(cu)、鈷(c〇)、铑(Rh)、銃(Sc) 及釔(Y)等。 作為上述金屬醇鹽之醇鹽,例如可列舉自下述化合物衍 生之醇鹽:包含甲醇、乙醇、丙醇、異丙醇、丁醇、異丁 醇等之醇類,包含甲氧基乙醇、乙氧基乙醇、丙氧基乙 醇、丁氧基乙醇、戊氧基乙醇、庚氧基乙醇、甲氧基丙 醇、乙氧基丙醇、丙氧基丙醇、丁氧基丙醇、戊氧基丙 醇.、庚氧基丙醇之烷氧基醇類。 第2絕緣體層亦可由有機化合物形成。 作為上述有機化合物,例如可使用:聚醯亞胺、聚醯 胺、聚醋、聚丙稀酸酯、光自由基聚合系或光陽離子聚合 系之光硬化性樹脂、含有丙烯腈成分之共聚物、聚乙炼基 150866.doc 201123575 苯酚、聚乙烯醇、酚醛清漆樹脂及氰乙基聚三葡萄糖等。 除上述有機化合物以外,亦可使用蠟、聚乙烯、聚氣 平、聚對本—甲酸乙一醋、聚曱盤、聚氣乙稀、聚偏二敦 乙烯、聚曱基丙烯酸曱酯、聚砜、聚醯亞胺氰乙基聚三葡 萄糖、聚(乙烯基苯酴)(PVP)、聚(曱基丙烯酸曱 酯)(PMMA)'聚碳酸酯(PC)、聚苯乙烯(ps)、聚烯烴、聚 丙烯醯胺、聚(丙烯酸)、酚醛清漆樹脂、可溶酚醛樹脂、 聚醯亞胺、m、環氧樹脂、聚三葡萄糖等具有高介 電係數之高分子材料。 第2絕緣體層可為使用複數種上述無機化合物材料或 機化合物材料之混合層,亦可為由料材料單獨構成之/ 的積層體。第2絕緣體層視需要亦可為介電係數較高之; 料與具有斥水性之材料的混合 之層的積㈣。 。層&由㈣材料單獨構』 或者進而含有該陽極氧 可為第2絕緣體層與陽 第2絕緣體層可為陽極氧化骐, 化膜作為構成部分。於該情形時, 極氧化膜積層之形態。 似年HQ勝口J猎—… 屬陽榀ϋ儿二心丄 r/,丨β知之々法將可陽極氧化 氧化而形成’較好的是進 作為可進行陽極氧化處理之 _孔處理。 陽炻S π老《 兔屬’可列舉紹或釦。 %極氧化處理之方法並無让 方法。藉由進行陽極氧化處理制,可使用眾㈣ 氧化處理中所使用之電解液,。^氧化被膜。作^ 膜之電解液則並無特別限制二是可形成多孔質氧, 通㊉使用硫酸、磷酸、 J50866.doc •32· 201123575 酸、鉻酸、硼酸、胺基磺酸、苯磺酸等或將該等之兩種以 上組合所得之混合酸或該等之鹽。 陽極氧化之處理條件根據所使用之電解液而有所不同, 通节較適合為:電解液之濃度為1~80質量。/。,電解液之溫 度為5 70 C,電流密度為〇 5〜6〇 A/cm2,電壓為卜丨⑼伏 特,電解時間為1〇秒〜5分鐘之範圍。較佳之陽極氧化處理 係使用硫酸、磷酸或硼酸之水溶液作為電解液,以直流電 流進行處理之方法,亦可使用交流電流。電解液之酸之濃 度較好的是5〜45質量%,較好的是於電解液之溫度 2〇〜5〇C、電流密度〇·5〜20A/cni2下進行20〜250秒之電解處 理。 若第2絕緣體層之層厚度較薄,則有機半導體上施加之 有效電壓變大’故而可減低器件(device)自身之驅動電 壓、界電壓’但相反源極_閘極間之漏電流變大,故而 必須選擇適當之膜厚。第2絕緣體層之厚度通常_阶5 μηι ’車父好的是50 nm〜2 μπι,進而好的是⑽_〜1 _。 第2絕緣體層之形成方法並無特別限制,可利用氣相成 ,、亦二利用液相成膜’可根據材料而使用例如真空蒸锻 法、,分子束蟲晶法,離子團束法,低能離子束法,離子電 ^法’ CVD法,濺鑛法,日本專利特開平丨卜61彻號公 2二:專利特開平…咖號公報、曰本專利特開 曰本真/Ο45虎公報、曰本專利特開2_·147209號公報、 等氣開2·1 85362號公報中所揭示之大氣電漿法 相成膜;Μ塗法、旋塗法、刮塗法、浸塗法、洗鑄 150866.doc -33- 201123575And the electrode 50. An insulator layer is laminated on the semiconductor layer 6A, and a gate electrode 2 is laminated on the insulator layer 30. Fig. 4 is a view showing another embodiment of the thin film transistor of the present invention. The thin film transistor 4 has a semiconductor layer 6 on the substrate 1A. On the semiconductor layer 60, the source electrode 4A and the electrodeless electrode % are stacked in a predetermined interval. The insulator layer 30 is filled with a gap between the source electrode 4 and the drain electrode 5, and is laminated on the source electrode 4, the drain electrode 5, and the semiconductor layer (10), and the gate electrode 20 is laminated on the insulator layer 30. In the case where an inorganic semiconductor is used as the material of the semiconductor layer, it is preferable to form a device having a top gate type as shown in Figs. 3 and 4 in order not to damage the polycarbonate layer as the insulator layer. The thin film transistor of the present invention has an organic semiconductor layer (organic compound sound) or an inorganic semiconductor 4' which is formed by a source electrode and a gate electrode which are formed at a predetermined interval and opposed to each other, and a source electrode and a germanium electrode. The pole electrodes form a pole electrode with a specific distance therebetween, and a current flowing between the source and the drain electrodes is controlled by applying a voltage to the interlayer electrode. The structure that controls the flow between the source electrode and the drain electrode and performs the amplification effect can be constructed. The thin film transistor of the present invention is not limited to the above-mentioned element as long as it is a current applied to the gate electrode by a voltage applied to the gate electrode. The above-mentioned element 150866.doc • 28-201123575 The thin film transistor of the present invention may have, for example, the following The composition of the organic thin film transistor: the top and bottom of the Yoshida et al. in the 49th Applied Physics Symposium, 27a-M-3 (March 2002) Contact type organic thin film transistor (refer to Fig. 5), and Kudo et al. of Chiba University, in the paper of the Electrical Society! Η, "% of the organic thin film transistor proposed in the page _ (refer to the call. The constituent elements of the thin film transistor of the present invention will be described. The insulating layer of the thin film transistor of the present invention is a layer which is laminated by a coating method and contains a layer of the polycarbonate of the present invention. The coefficient is low. Therefore, in order to reduce the driving voltage of the thin film transistor, it is preferable to be as thin as possible, but conversely, with the thinning of the thin film, the leakage current between the source and the gate becomes large, so it is necessary to select a suitable one. The thickness of the film, the bar, and the body layer is usually 10 nm to 5 μm, preferably the claws are ~2 μηι, and further preferably 1 〇〇 nm to 1 μηη. The insulator layer can be made by The polyglycol g of the present invention is prepared by dissolving a solution obtained from a non-dentate container, for example, by a dip coating method, a money method, a washing method, a rod method, a coating method, or the like, and coating a coating layer. For laking, = polymerization, self-assembly from solution, or a combination of these. The book, the 'layer of the edge layer may be only the layer containing the agglomerate of the present invention, or may contain other materials. Two or more layers of the insulator layer γ ^ The insulator layer is only a layer containing the polycarbonate of the present invention, and the thickness of the layer is also relatively short, so that the film thickness can be made sufficiently thin. |工肖b <organic film transistor, but by combining other insulator layers with higher dielectric constant, 1 easier to lower the threshold voltage. Stomach can be 150866.doc -29- 201123575 usually 'smaller polymerization The specific dielectric constant of the material is low, and the threshold voltage of the thin film electrical body becomes large. Japanese Patent Laid-Open Publication No. 2005-72569 and Japanese Patent Laid-Open Publication No. Hei No. 2005-013468 disclose high levels of low dielectric constant polymers which are obtained by combining an insulator layer having a higher At coefficient and a liquid phase. An organic thin film transistor having a mobility and a low threshold voltage. In the case of using a laminate of two or more insulator layers in the present invention, as long as the first insulator layer in direct contact with the semiconductor contains the polycarbonate of the present invention, The material and method of forming the second insulator layer that is in contact with the gate electrode are not particularly limited. The first insulator layer contains the polycarbonate of the present invention and is layered by coating. The film thickness is such that a continuous film can be formed. The thinner the better, for example, 0.5 nm to 1 〇〇 nm' is preferably 1 nm to 20 nm, and more preferably 1 nm to 1 〇 nm. The material for forming the second insulator layer can be a room temperature (for example, 2 〇 to 25 ° C) of a metal oxide (including an oxide of a shi shi), a metal nitride (a nitride containing ruthenium), a polymer, or an organic low molecule. The material having a resistivity of 1 〇 Qcm or more is particularly good as a material having a specific dielectric constant higher than 3. By forming the second insulator layer from the above material, it is easy to generate a storage layer in the semiconductor layer, and the threshold voltage of the transistor operation can be reduced. Examples of the metal oxide, the metal nitride, and the like which form the second insulator layer include cerium oxide, aluminum oxide, cerium oxide, titanium oxide, tin oxide, vanadium oxide, barium titanate, barium zirconate titanate, and barium titanium. Lead acid, titanic acid such as steel, titanic acid recognition, titanate collar, fluorinated pot town, bismuth oxide, oxyfluoride oxide, secret oxide, titanic acid, strontium oxide, titanate recording, group 150866.doc •30- 201123575 2 character emulsification, group of acid red, trioxide woven combination of these into ° °, the car is good is yttrium oxide, alumina, oxidation group, titanium oxide. Further, it is also preferable to use nitride sand (8) (8), SixNy, and ruthenium (yt, y > 0) nitride inorganic nitride. By forming an insulator layer by nitriding, such as m si , SiONJx, y > G), it becomes easier to generate a storage layer to reduce the threshold voltage of the transistor operation. The second insulator layer may also be formed of a δ-metallized salt precursor material. As the metal alkoxide, the mi it and the genus 4 can be selected, for example, from a transition metal, a lanthanoid element or a main group element, and specific examples thereof include ruthenium (tetra), ruthenium, titanium (Ti), and silk ( Bi), group (Ta), 鍅 (Zr) 'iron (Fe), recorded (Ni), 猛 (Μη), wrong (Pb), 镧 (La), ( (Li), nano (Na), _ ( κ), (Rb),! Color (Cs), fr (Fr), wrinkle (Be), magnesium, about the heart), (Nb) 钇 (τΐ), mercury (Hg), copper (cu), cobalt (c〇), 铑 (Rh) , 铳 (Sc) and 钇 (Y). Examples of the alkoxide of the metal alkoxide include an alkoxide derived from the following compounds: an alcohol containing methanol, ethanol, propanol, isopropanol, butanol or isobutanol, and methoxyethanol. Ethoxyethanol, propoxyethanol, butoxyethanol, pentyloxyethanol, heptoxyethanol, methoxypropanol, ethoxypropanol, propoxypropanol, butoxypropanol, pentane Alkoxy alcohols of oxypropanol and heptoxypropanol. The second insulator layer may also be formed of an organic compound. As the organic compound, for example, a polyimide, a polyacetamide, a polyester, a polyacrylate, a photoradical polymerization or a photocationic polymerization photocurable resin, a copolymer containing an acrylonitrile component, or the like may be used. Polyethylene refining base 150866.doc 201123575 Phenol, polyvinyl alcohol, novolak resin and cyanoethyl polytriglucose. In addition to the above organic compounds, wax, polyethylene, polygas flat, poly-p-ethyl formic acid, polypyrene, polyethylene, polyvinylidene, polydecyl acrylate, polysulfone, Polyimide cyanoethyl polytriglucose, poly(vinyl benzoquinone) (PVP), poly(decyl methacrylate) (PMMA) 'polycarbonate (PC), polystyrene (ps), polyolefin A polymer material having a high dielectric constant such as polyacrylamide, poly(acrylic acid), novolak resin, resol resin, polyimine, m, epoxy resin or polytriglucose. The second insulator layer may be a mixed layer using a plurality of the above-mentioned inorganic compound materials or organic compound materials, or may be a laminate body composed of a material material alone. The second insulator layer may also be a product of a layer having a higher dielectric constant and a mixture of a material having water repellency (IV). . The layer & is composed of (4) material alone or further contains the anode oxygen. The second insulator layer and the anode layer may be anodized ruthenium, and the film may be a constituent. In this case, the morphology of the epitaxial oxide film layer. Like HQ Shengkou J hunting-... It belongs to Yangshuo Erxin 丄 r/, 丨β knows that it can be anodized and oxidized to form 'good' as a anodic treatment that can be anodized. Yangshuo S π old "rabbit" can be cited or buckled. The method of % polar oxidation treatment does not give way. By performing anodizing, the electrolyte used in the oxidation treatment can be used. ^ Oxidation film. There is no particular limitation on the electrolyte of the membrane. The second is the formation of porous oxygen. The use of sulfuric acid, phosphoric acid, J50866.doc •32· 201123575 acid, chromic acid, boric acid, aminosulfonic acid, benzenesulfonic acid, etc. The mixed acid or the salt obtained by combining the two or more kinds of these. The treatment conditions for the anodization vary depending on the electrolyte used, and the specific conditions are: the concentration of the electrolyte is 1 to 80 mass. /. The temperature of the electrolyte is 5 70 C, the current density is 〜 5 to 6 〇 A/cm 2 , the voltage is dip (9) volt, and the electrolysis time is in the range of 1 〜 to 5 minutes. The preferred anodizing treatment uses an aqueous solution of sulfuric acid, phosphoric acid or boric acid as an electrolytic solution, and is treated by a direct current, and an alternating current can also be used. The concentration of the acid of the electrolyte is preferably 5 to 45% by mass, preferably 20 to 250 seconds after the temperature of the electrolyte is 2〇~5〇C, and the current density is 5~20A/cni2. . When the layer thickness of the second insulator layer is thin, the effective voltage applied to the organic semiconductor becomes large, so that the driving voltage and the boundary voltage of the device itself can be reduced, but the leakage current between the source and the gate becomes larger. Therefore, it is necessary to choose an appropriate film thickness. The thickness of the second insulator layer is usually _step 5 μηι ‘the goodness of the vehicle is 50 nm to 2 μπι, and further preferably (10)_~1 _. The method for forming the second insulator layer is not particularly limited, and it can be formed by a vapor phase or a liquid phase film formation. For example, a vacuum vapor deposition method, a molecular beam crystal method, or an ion beam method can be used depending on the material. Low-energy ion beam method, ion-electric method 'CVD method, splashing method, Japanese patent special-opening 丨 丨 61 彻 彻 彻 彻 2 2 2 2 2 2 2 专利 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖The method of forming an atmospheric plasma method disclosed in Japanese Laid-Open Patent Publication No. Hei. No. 2-147209, et al., pp. 2, 85, 362; Μ coating method, spin coating method, knife coating method, dip coating method, washing and casting 150866.doc -33- 201123575
…、處理之化學溶液處理而形成絕緣體層。 持薄膜電晶體之結構之作用者,作為其材 亦可使用金屬氧化物或氮化物等無機化合 物、塑膠膜(PET(p〇lyethyiene terephthalate,聚對苯二甲 酉夂乙 一 8日)、PES(P〇1yethersulfone,聚醚石風)、 (polycarbonate,聚碳酸酯))、金屬基板或該等之複合體 於藉由基板以外之構成要素可充分支持 或積層體等。又, 薄膜電晶體之結構之情形時,亦可不使用基板。 又,作為基板之材料,多使用矽(Si)晶圓。於此情形 時,可將Si本身用作閘極電極兼基板。又,亦可將&之表 面氧化,形成Si〇2而活用作絕緣層,於此情形時,如圖7 所示,有時亦於基板兼閘極電極之以基板12上形成Au等之 金屬層,作為導線連接用電極70。再者,於圖7中,12表 示南丨辰度摻雜Si基板(閘極電極),3 2表示S i〇2層(絕緣層), 42表示Au電極(源極電極),52表示Au電極(沒極電極),6〇 表示半導體層’ 70表示導線連接用電極,72表示Au金屬 層,74表示Cr金屬層。 150866.doc •34· 201123575 於圖7之薄膜電晶體中,係將本發明之聚碳㈣使用於 设置在Sl〇2層(絕緣層)與半導體層之間之第】絕緣體層令。 對於半導體層中所使用之半導體為有機或無機並無特別 限制’例如於使用有機半導體形成有機半導體層之情形 時’可使用chemicaI Review,第1〇7卷第i嶋頁讀 年中所記載之有機半導體材料等。 有機半導體層亦可將選自上述有機半導體材料中之複數 種材料組合而為由複數種材料之混合物形成之層、或由該 等材料單獨形成之層之積層體。 作為有機半㈣層之材料之具體例,可列舉:稠五苯、 :周四苯、葱、稍七苯、稠六苯、C6〇、C7〇、菲、祐、 :矢A、蔻、紅螢烯、酞菁類、卟啉類等低分子材料及其 衍生物;二苯乙稀基苯、低聚乙快、低㈣吩、低聚石西吩 :低:物類及其衍生物;聚乙炔、聚嗟吩、聚(3-己基嘴 为)i(9,9-—辛基苐_共_聯„塞吩)({)〇1外9,9|士〇叫出_嶋_ 〇 bUlnophene))、%苯乙炔、聚。塞吩乙炔等冗共輛系高分 子類及其衍生物等,但並非限定於該等。 使用無機半導體作為半導體層之例可列舉:以非晶 夕夕晶矽、微晶(microcrystal)矽等為代表之非單晶半導 體膜或晶態矽、以及Zn〇、a_InGaZn〇、8心、等化 合物半導體或氧化物半導體等,但並不限定於該等。 i半導體層之膜厚並無特別限制,通常為0.5 nm〜;i μιη, 較好的是2 nm〜250 nm。 半導體層之形成方法並無特別限制,可適用眾所周知之 150866.doc -35· 201123575 方法。 例如於如圖1及圖2之有機薄膜電晶體i及2之元件構成之 情形時,較好的是在形成聚碳酸酯絕緣體層後,於不曝露 於大氣中之情況下將有機半導體層成膜。該成膜較理想的 疋分子束外延法(MBE(m〇lecular beam ephax幻法)、真空 蒸鍍法、化學謎法、分子束蒸鍍、濺鐘等氣相成膜。除 該成膜方法外,將使材料溶解於溶劑中所得之溶液利用浸 塗法、奴塗法、澆鑄法、棒塗法、輥塗法等印刷塗布法 形成塗布層’ II由對職布層進行烘烤、電聚合、自溶液 之自我組裝及組合該等之手段而成膜亦較理想。 亦可組合2種以上之上述成膜方法而形成有機半導體 層0 又,於如圖3及圖4之有機薄膜電晶體3及4之元件構成之 情形時’較理想的是在將有機半導體層成膜後,於不曝露 於大氣中之情況下形成聚碳❹旨層(絕緣體層)。於該情形 時、’有機半導體層之積層並無特別限制,可適用上述成膜 方法’較好的是氣相成膜。 本發明之半導體眉r $报士、+ 凊之形成方法使用眾所周知之方沒 可’較理想的是如上所述於 於不曝露於大氣中之情況Ί 續進行半導體及絕緣膜層之形成步驟1而,於選擇 有機半導體材料作為半導體層之情形時,對於藉由曝寅 大氣中可使性能提昇之半導體材料,較理想的是於^ 體-絕緣體層形成步驟以後之步驟 ,故而 藉由提高半導體層之結晶性,可提高場效:移率 150866.doc •36· 201123575 於有機半導體層之成膜中使用氣相成膜(蒸錢、㈣等)之 情形時’較理想的是將成膜時之基板溫度保持為高溫。該 溫度較好的是50〜250°c,進而好的是7〇〜15(rc。又,若不 論成膜方法而於成膜後實施退火,則可獲得高性能器件, 故而較好。退火之溫度較好的是50〜200t,進而好的是 70〜·。c,時間較好的是10分鐘〜12小時,進而好的是 1〜10小時。 閘極電極、源極電極及汲極電極之材料只要為導電性材 科則並無特別限制,可使用:紐、金、銀、錄、絡、銅、 鐵錫、銻'鈕、銦、鈀、碲、銖、銥、鋁、釕、鍺、 =、鎢、氧化錫録、氧化銦錫(ITO)、換敦氧化辞、辞、 石厌、石.墨、玻璃石墨、銀衆及碳聚、鐘、鈹、鈉、鎂、 鉀鈣、銳、鈦、錳、鍅、鎵、鈮、鈉-鉀合金、鋁、鎂/ 銅此合物、鎂/銀混合物、鎂/鋁混合物、鎂/銦混合物、鋁/ 氧化鋁混合物、鋰/鋁混合物等。 關於閘極電極、源極電極及汲極電極之膜厚,只要有電 流導通則並無特別限制’較好的是02 nm〜10 _,進而奸 的是4麵〜300 nm之範圍。若電極之膜厚在上述範圍内, 則藉由膜厚較薄’可使電阻變高而避免電壓下&,並且, 由於膜厚不過厚故而膜形成無需花費時間,且於積層保 層或有機半導體層等其他層之情形時,可不產生階差而; 滑地形成積層膜。 p 又源極邊極與及極電極例如係隔開特定之間隔 層,該間隔係根據薄膜電晶體之用途而決定,通常為^ 150866.doc •37- 201123575 μηι 〜1 較好的是1 μπι〜100 μιη,進而好的是5 μιη〜100 μηι 〇 源極電極及汲極電極可使用包含上述導電性材料之溶 液、漿料(paste)、油墨、分散液等流動性電極材料,較好 的是使用包含導電性聚合物或者含有鉑、金、銀或銅之金 屬微粒子之流動性電極材料而形成。 作為上述流動性電極材料之溶劑或分散介質,為抑制對 有機半導體之損傷,較好的是含有6〇質量%以上之水,較 好的是90質量%以上之水的溶劑或分散介質。 作為含有金屬微粒子之分散物’例如可使用眾所周知之 導電性聚料等,通常較好的是含有粒徑為〇5 nm〜5〇 nm, 較好的是i nm〜Η)⑽之金屬微粒子之分散物。該金屬微粒 子例如可使用翻 '金、銀、錄、鉻、鋼、鐵、錫、録、 等 鉛、钽、銦、鈀、碲、銖、銥、紹、釕、錯、銦、鶴、辞 車又好的疋使用主要包含有機材料之分散穩定劑,將該 金屬微粒子分散於例如為水或任意有機溶劑之分散介質 形成分散物,使用該分散物形成電極。 作為上述金屬微粒子之分散物之製造方法,可列舉: 相蒸發法、減鐘法、在厘$ 、,屬軋相σ成法等物理生成法,膠 =、共沈殿法等於液相中還原金屬離子而生成金屬微粒 的:學生成法,較好的是藉由日本專㈣開平__ 二3Y9S日本專利特開平1卜嶋47號公報、日本專利特開 8號公報、曰本專利特開2_伽53號公報等 I50866.doc •38· 201123575 所不之膠體法’曰本專利特開2〇〇ι·254ΐ85號公報、曰本 專利特開2001-53 028號公報、日本專利特開2()()1_35255號 公報、日本專利特開2__124157號公報、日本專利特開 2000 123634 5虎公報等中所揭示之氣相蒸發法而製造的金 屬微粒子之分散物。 使用金屬微粒子分散物形成電極具體而言,係於將金屬 微粒子分散物之溶劑乾燥後,視需要於⑽。c〜3Q(rc,較 好的是150t〜200。。之範圍内根據形狀進行加熱,從而使 金屬微粒子熱融著’藉此可形成具有目標形狀之電極圖 尤其是形成源極電極及汲極電極之材料較好的是與半導 !層之接觸面之電阻較小的材料。該電阻於製作電流控制 Γ件夺與場效遷移率對應,為獲得較大之遷移率,電阻必 須儘可能小。其通常由電極材料之功函數與有機半導體層 之能階的大小關係所決定。 若將電極材料之功函數(w)設為a,將有機半導體層之游 離電位(Ipm為b ’將有機半導體層之電子親和力(Af)設為 c,則較好的是滿足以下之關係式。此處,a、均為以 真空能階為基準之正值。 於p型有機薄膜電晶體之情形時,較好的是beu 式(A))’進而好的是b_a<1 Q eVL材料與有機半 導體層之關係可維持上述關係則可獲得高性能之器件,尤 其好的是選擇功函數儘可能大之電極材料,較好的是功函 數為4.0 ev以上,進而好的是功函數為42 eV以上。 150866.doc •39· 201123575 關於金屬之功函數之值,只要自例如化學便覽基礎篇 11-493頁(修訂第3版曰本化學會編九善月又伤有限^'司务 行1983年)中所記載的具有4.〇 eV或其以上之力函數勺有 效金屬之上述列示中挑選金屬即可。 高功函數金屬主要有Ag(4_26、4·52、4·64、4_74 eV) '..., treated with a chemical solution to form an insulator layer. As a material of the structure of the thin film transistor, an inorganic compound such as a metal oxide or a nitride or a plastic film (PET (p〇lyethyiene terephthalate), PES (PET) can be used as the material. P〇1yethersulfone, polyetherite (polycarbonate), a metal substrate, or a composite of these can be sufficiently supported or laminated by a constituent element other than the substrate. Further, in the case of the structure of the thin film transistor, the substrate may not be used. Further, as a material of the substrate, a bismuth (Si) wafer is often used. In this case, Si itself can be used as a gate electrode and a substrate. Further, the surface of the & may be oxidized to form Si 〇 2 and used as an insulating layer. In this case, as shown in FIG. 7 , Au or the like may be formed on the substrate 12 also on the substrate and the gate electrode. The metal layer serves as the electrode 70 for wire connection. Further, in Fig. 7, 12 denotes a Nanxun doped Si substrate (gate electrode), 3 2 denotes an S i 〇 2 layer (insulation layer), 42 denotes an Au electrode (source electrode), and 52 denotes Au The electrode (the electrodeless electrode), 6 〇 indicates that the semiconductor layer '70 indicates an electrode for wire connection, 72 indicates an Au metal layer, and 74 indicates a Cr metal layer. 150866.doc • 34· 201123575 In the thin film transistor of Fig. 7, the polycarbon (4) of the present invention is used for the first insulator layer disposed between the S1 layer (insulating layer) and the semiconductor layer. The semiconductor used in the semiconductor layer is organic or inorganic, and is not particularly limited. For example, when an organic semiconductor layer is formed using an organic semiconductor, it can be used as described in the chemica I Review, Vol. 1, pp. i. Organic semiconductor materials, etc. The organic semiconductor layer may also be a combination of a plurality of materials selected from the above organic semiconductor materials to form a layer formed of a mixture of a plurality of materials or a layer formed of a layer separately formed of the materials. Specific examples of the material of the organic half (four) layer include: pentacene, benzene, onion, heptabenzene, hexabenzene, C6 oxime, C7 fluorene, phenanthrene, yoshi, yag, yttrium, red Low molecular materials such as fluorene, phthalocyanines, and porphyrins and derivatives thereof; diphenylethylene benzene, oligoethylene fast, low (tetra) phenoline, oligolithite: low: species and derivatives thereof; Polyacetylene, polyporphin, poly(3-hexyl mouth) i (9,9--octyl 苐_共_联 ” 塞 ” ({) 〇 1 outside 9,9|士〇出_嶋_ 〇bUlnophene)), % phenylacetylene, poly. pheno- acetylene and other redundant polymers and derivatives thereof, but are not limited thereto. Examples of using an inorganic semiconductor as a semiconductor layer include: a non-single crystal semiconductor film or a crystalline germanium represented by a cerium, a microcrystal, or the like, and a compound semiconductor or an oxide semiconductor such as Zn〇, a_InGaZn〇 or 8 core, but is not limited thereto. The film thickness of the i-semiconductor layer is not particularly limited, and is usually 0.5 nm to 1 μm, preferably 2 nm to 250 nm. The method for forming the semiconductor layer is not particularly limited and can be applied to the public. The method of 150866.doc -35· 201123575 is well known. For example, in the case of the components of the organic thin film transistors i and 2 as shown in FIGS. 1 and 2, it is preferred that after forming the polycarbonate insulator layer, The organic semiconductor layer is formed into a film when exposed to the atmosphere. The film formation is ideal for molecular beam epitaxy (MBE (m〇lecular beam ephax phantom method), vacuum evaporation method, chemical puzzle method, molecular beam evaporation) a gas phase filming such as a splashing clock. In addition to the film forming method, a solution obtained by dissolving a material in a solvent is formed by a dip coating method, a slave coating method, a casting method, a bar coating method, a roll coating method, or the like. It is also preferable that the coating layer 'II is formed by baking, electropolymerization, self-assembly from a solution, and a combination of the above-mentioned layers. It is also possible to form an organic semiconductor layer by combining two or more of the above film formation methods. 0, in the case of the components of the organic thin film transistors 3 and 4 as shown in FIGS. 3 and 4, it is preferable to form a polycarbon without being exposed to the atmosphere after the organic semiconductor layer is formed into a film. The layer of the layer (insulator layer). In this case When the layer of the organic semiconductor layer is not particularly limited, the film forming method described above is preferably a film formed by vapor phase. The method for forming the semiconductor eyebrow r $ 士, + 凊 of the present invention is not known. It is preferable to carry out the step of forming the semiconductor and the insulating film layer in the case of not exposing to the atmosphere as described above, and in the case of selecting the organic semiconductor material as the semiconductor layer, by exposing the atmosphere to the atmosphere The semiconductor material which can improve the performance is preferably a step after the step of forming the insulator-insulator layer, so that the field effect can be improved by improving the crystallinity of the semiconductor layer: the mobility is 150866.doc • 36· 201123575 in organic When a vapor phase film is formed in the film formation of the semiconductor layer (steaming, (4), etc.), it is preferable to maintain the substrate temperature at the time of film formation at a high temperature. The temperature is preferably from 50 to 250 ° C, and more preferably from 7 to 15 (rc. Further, if annealing is performed after film formation by a film formation method, a high-performance device can be obtained, which is preferable. The temperature is preferably from 50 to 200 t, and further preferably from 70 to c. The time is preferably from 10 minutes to 12 hours, and more preferably from 1 to 10 hours. Gate electrode, source electrode and drain electrode The material of the electrode is not particularly limited as long as it is a conductive material, and can be used: New Zealand, Gold, Silver, Record, Complex, Copper, Iron Tin, 锑' Button, Indium, Palladium, Rhodium, ruthenium, osmium, aluminum, iridium. , 锗, =, tungsten, tin oxide, indium tin oxide (ITO), exchange of oxidation, remarks, stone, stone, ink, glass graphite, silver and carbon, bell, strontium, sodium, magnesium, potassium Calcium, sharp, titanium, manganese, lanthanum, gallium, lanthanum, sodium-potassium alloy, aluminum, magnesium/copper mixture, magnesium/silver mixture, magnesium/aluminum mixture, magnesium/indium mixture, aluminum/aluminum oxide mixture, lithium /Aluminum mixture, etc. Regarding the film thickness of the gate electrode, the source electrode and the drain electrode, there is no particular limitation as long as current is conducted. Preferably, it is 02 nm to 10 _ And then the range of 4 to 300 nm. If the film thickness of the electrode is within the above range, the film thickness can be made higher by the thin film thickness, and the voltage is not too thick. Therefore, it takes no time to form the film, and in the case of another layer such as a build-up layer or an organic semiconductor layer, a step can be formed without slippage; a laminated film is formed slipwise. p The source side electrode and the electrode electrode are separated by a specific one. The spacer layer is determined according to the use of the thin film transistor, and is usually 150606.doc • 37- 201123575 μηι 〜1 preferably 1 μπι to 100 μιη, and further preferably 5 μιη to 100 μηι As the electrode electrode and the drain electrode, a fluid electrode material such as a solution, a paste, an ink or a dispersion containing the above-mentioned conductive material can be used, and it is preferable to use a conductive polymer or contain platinum, gold, silver or The solvent or the dispersion medium of the metal ion particles is a solvent or a dispersion medium for the fluid electrode material, and it is preferable to contain water of 6 〇 mass% or more in order to suppress damage to the organic semiconductor. A solvent or a dispersion medium of water of 90% by mass or more is preferable. As the dispersion containing metal fine particles, for example, a well-known conductive polymer or the like can be used, and it is usually preferred to have a particle diameter of 〇5 nm to 5 〇. Nm, preferably a dispersion of metal fine particles of i nm ~ Η) (10). For the metal microparticles, for example, lead, gold, silver, tin, chrome, steel, iron, tin, ruthenium, etc. lead, bismuth, indium, palladium, ruthenium, osmium, iridium, osmium, iridium, ruthenium, indium, crane, and rhetoric can be used. Further, the vehicle preferably uses a dispersion stabilizer mainly containing an organic material, and the metal fine particles are dispersed in a dispersion medium such as water or an arbitrary organic solvent to form a dispersion, and the dispersion is used to form an electrode. Examples of the method for producing the dispersion of the metal fine particles include a phase evaporation method, a clock reduction method, a PCT method, and a physical formation method such as a rolling phase σ formation method, and a gel method, and a common sedimentation method is equal to a reduction metal in a liquid phase. Ion-forming metal particles: the method of learning, preferably by Japanese (4) Kaiping __ 2 3Y9S Japanese Patent Special Kaiping 1 Bu 嶋 47 Gazette, Japanese Patent Special Open 8 Gazette, 曰本专利专开 2 _ gamma 53 bulletin, etc. I50866.doc •38· 201123575 The colloidal method of 曰 专利 专利 专利 专利 专利 〇〇 〇〇 ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 A dispersion of metal fine particles produced by a vapor phase evaporation method disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. Specifically, the formation of the electrode using the metal fine particle dispersion is carried out after drying the solvent of the metal fine particle dispersion, if necessary, in (10). c~3Q (rc, preferably 150t~200. The temperature is heated according to the shape, so that the metal microparticles are thermally fused", thereby forming an electrode pattern having a target shape, particularly forming a source electrode and a drain electrode. The material of the electrode is preferably a material having a small electrical resistance with the contact surface of the semiconducting layer. The resistor corresponds to the field effect mobility in the production of the current control element, and in order to obtain a large mobility, the resistance must be as large as possible. It is usually determined by the relationship between the work function of the electrode material and the energy level of the organic semiconductor layer. If the work function (w) of the electrode material is set to a, the free potential of the organic semiconductor layer (Ipm is b ' When the electron affinity (Af) of the organic semiconductor layer is c, it is preferable to satisfy the following relationship. Here, a is a positive value based on the vacuum level. In the case of a p-type organic thin film transistor Preferably, the beu formula (A))' is further preferably b_a<1 Q eVL material and the relationship of the organic semiconductor layer can maintain the above relationship to obtain a high performance device, especially good choice of work function as much as possible Large electrode material Preferably, the work function is 4.0 ev or more, and preferably the work function is 42 eV or more. 150866.doc •39· 201123575 The value of the work function of the metal is as long as, for example, the basics of the chemical handbook, pages 11-493 (revised) The third edition of the Sakamoto Chemical Society may be selected from the above listed list of effective metals having a force function of 4. 〇eV or more as described in the article 1983. The high work function metals are mainly Ag (4_26, 4·52, 4·64, 4_74 eV)'
Al(4.06、4.24、4.41 eV)、Au(5.1、5.37、5.47 eV)、 Be(4.98 eV)、Bi(4.34 eV)、Cd(4.08 eV)、Co(5.0 eV)、Al (4.06, 4.24, 4.41 eV), Au (5.1, 5.37, 5.47 eV), Be (4.98 eV), Bi (4.34 eV), Cd (4.08 eV), Co (5.0 eV),
Cu(4.65 eV)、Fe(4.5、4.67、4.81 eV)、Ga(4.3 eV)、Cu (4.65 eV), Fe (4.5, 4.67, 4.81 eV), Ga (4.3 eV),
Hg(4.4 eV)、Ir(5,42、5·76 eV)、Mn(4.1 eV)、Mo(4.53、 4.55、4.95 eV)、Nb(4.02、4.36、4.87 eV)、Ni(5.04、 5·22、5.35 eV)、Os(5.93 eV)、Pb(4.25 eV)、Pt(5.64 eV)、Pd(5_55 eV)、Re(4.72 eV)、Ru(4.71 eV)、Sb(4.55、 4.7 eV)、Sn(4.42 eV)、Ta(4.0、4.15、4.8 eV)、Ti(4.33 eV)、V(4_3 eV)、W(4.47、4.63、5.25 eV)、Zr(4.05 eV)。 該等之中,較好的是貴金屬(Ag、Au、Cu、Pt)、Ni、Co、 Os、Fe、Ga、Ir、Mn、Mo、Pd、Re、ru、v、w 0 金屬之外,較好的是ITO、聚苯胺或pED〇T : PSS(poly(ethylenedioxythiophene) : p〇iy(styrene sulf〇nic acid) ’聚(二氧乙基噻吩)-聚(苯乙烯磺酸))等導電性聚合 物及碳《作為電極材料,只要功函數滿足上述式(A),^ 可含有一種或複數種該等高功函數 双之物質,並無特別限 制。 於η型有機薄膜電晶體之情形時 吟’較好的是a-c<l.5 eV(式(B))’ 進而好的是 a-c<i.〇 eV。 右電極材料與有機半 150866.doc • 40- 201123575 導體層之關係可維持上述關係則可獲得高性能之器件,尤 其好的是選擇功函數儘可能小之電極材料,較好的是功函 數為4.3 eV以下,進而好的是功函數為3.7 eV以下。 作為低功函數金屬之具體例,自例如化學便覽基礎篇 II-493頁(修訂第3版日本化學會編丸善股份有限公司發 行1983年)中所記載的具有4.3 eV或其以下之功函數的有 效金屬之上述列示中挑選即可。 作為低功函數金屬,可列舉:Ag(4.26 eV)、Al(4.06、 4.28 eV)、Ba(2.52 eV)、Ca(2.9 eV)、Ce(2.9 eV)、Cs(1.95 eV)、Er(2.97 eV)、Ειι(2·5 eV)、Gd(3.1 eV)、Hf(3.9 eV) ' In(4.〇9 eV)、Κ(2·28)、La(3.5 eV)、Li(2.93 eV)、Mg(3.66 eV)、Na(2.36 eV)、Nd(3.2 eV)、Rb(4.25 eV)、Sc(3.5 eV)、Sm(2.7 eV)、Ta(4.0、4.15 eV)、Y(3.1 eV)、Yb(2.6 eV)、Zn(3.63 eV)等。該等之中,較好的是Ba、Ca、Cs、Hg (4.4 eV), Ir (5, 42, 5.76 eV), Mn (4.1 eV), Mo (4.53, 4.55, 4.95 eV), Nb (4.02, 4.36, 4.87 eV), Ni (5.04, 5·) 22, 5.35 eV), Os (5.93 eV), Pb (4.25 eV), Pt (5.64 eV), Pd (5_55 eV), Re (4.72 eV), Ru (4.71 eV), Sb (4.55, 4.7 eV), Sn (4.42 eV), Ta (4.0, 4.15, 4.8 eV), Ti (4.33 eV), V (4_3 eV), W (4.47, 4.63, 5.25 eV), Zr (4.05 eV). Among these, preferred are noble metals (Ag, Au, Cu, Pt), Ni, Co, Os, Fe, Ga, Ir, Mn, Mo, Pd, Re, ru, v, w 0 metals. Preferred is ITO, polyaniline or pED〇T: PSS (poly(ethylenedioxythiophene): p〇iy(styrene sulf〇nic acid) 'poly(dioxyethylthiophene)-poly(styrenesulfonic acid)) The polymer and the carbon are not particularly limited as long as the work function satisfies the above formula (A), and may contain one or a plurality of such high work function double substances. In the case of an n-type organic thin film transistor, 吟' is preferably a-c < l.5 eV (formula (B))' and further preferably a-c<i.〇 eV. The right electrode material and the organic half 150866.doc • 40- 201123575 conductor layer relationship can maintain the above relationship to obtain high performance devices, especially good to choose the electrode material with the work function as small as possible, preferably the work function is 4.3 eV or less, and further preferably the work function is 3.7 eV or less. As a specific example of the low work function metal, a work function having a work function of 4.3 eV or less is described in, for example, the basics of the chemical handbook, page II-493 (revised the third edition of the Japanese Chemical Society, Maruzen Co., Ltd., issued 1983). The above list of effective metals can be selected. Examples of the low work function metal include Ag (4.26 eV), Al (4.06, 4.28 eV), Ba (2.52 eV), Ca (2.9 eV), Ce (2.9 eV), Cs (1.95 eV), and Er (2.97). eV), Ειι (2·5 eV), Gd (3.1 eV), Hf (3.9 eV) ' In (4.〇9 eV), Κ (2·28), La (3.5 eV), Li (2.93 eV) , Mg (3.66 eV), Na (2.36 eV), Nd (3.2 eV), Rb (4.25 eV), Sc (3.5 eV), Sm (2.7 eV), Ta (4.0, 4.15 eV), Y (3.1 eV) , Yb (2.6 eV), Zn (3.63 eV), etc. Among these, Ba, Ca, Cs,
Er、Eu、Gd、Hf、K、La、Li、Mg、Na、Nd、Rb、Y、Er, Eu, Gd, Hf, K, La, Li, Mg, Na, Nd, Rb, Y,
Yb、Zn。 作為電極材料,只要功函數滿足上述式(B),則可含有 一種或複數種該等低功函數之物質,並無特別限制。然 而’低功函數金屬若接觸大氣中之水分或氧則容易劣化, 故而較理想的是視需要以Ag及Au等在空氣中穩定之金屬 進行被覆。被覆所必需之膜厚為10 nm以上’膜厚越厚則 越可保護其不受氧或水之影響,但實際使用時,為提高生 產性等理由,較理想的是1 μιη以下。 作為源極電極及汲極電極之形成方法’例如可藉由蒸 150866.doc •41 - 201123575 鍍'電子束蒸鍍、濺鍍、大 相蒸鍍、電沈積、非電解鍍覆、二、離子電鍍、化學氣 成。又,作為視需要進行之圖宰:塗、印刷或喷墨等而形 使用眾所周知之光微影法或剝離法,::上=下方法: 導電性薄膜形成電極述方法形成之 銅等之金屬落上形成U墨等於銘或 又,源極電極及汲極電極 之-液或分散液、含有金屬微二二=性聚合物 墨法而圖案化從而形成電極,亦 : 法等由塗敷膜形成電極。進而亦可使用下田射剝钮 導電性聚合物或金屬微 雷.將含有 藉由凸版、凹版、wH1、導㈣料等 形成電極。 ”明印刷法而圖案化從而 除上述電極材料之外,作為閘極電極、源極電極及沒極 电極之電極材料’使用藉由換雜等而導電率提高之眾所周 知之導電性聚合物亦較好。例如,亦可較好地使用:導電 性聚苯胺、導電性聚°比°各、導電性聚嗟吩(聚(二氧乙基售 吩)與聚苯乙稀績酸之錯合物等)、聚(二氧乙基嘆 吩KPEDOT)與聚苯乙料酸之錯合㈣。藉由該等材料, 可減低源極電極及汲極電極與半導體層之接觸電阻。 於本發明之溥膜電晶體中,為提高注入效率,例如可於 有機半導體層與源極電極及汲極電極之間設置緩衝層。 η型有機薄膜電晶體中設置之緩衝層較理想的是有機電 致电光元件之陰極中所使用的LiF、Li2〇、CsF、NaCCb、 150866.doc •42- 201123575 KCl、MgF2、CaC〇3等具有驗金屬、驗土金屬離子鍵之化 合物。 p型有機薄膜電晶體中設置之緩衝層較理想的是: FeCl3,TCNQ(7,7,8,8-tetracyanoquinodimethane,7,7,8,8-四氰基對醌二曱烷)、F4-TCNQ、HAT等氰基化合物;CFX 或 Ge02、Si〇2、Mo03、V2〇5、V〇2、V2〇3、MnO、Yb, Zn. As the electrode material, as long as the work function satisfies the above formula (B), one or a plurality of such low work functions may be contained, and it is not particularly limited. However, when the low work function metal is exposed to moisture or oxygen in the atmosphere, it is easily deteriorated. Therefore, it is preferable to coat the metal which is stable in the air such as Ag or Au as needed. The film thickness required for the coating is 10 nm or more. The thicker the film thickness, the more it is protected from oxygen or water. However, in actual use, it is preferably 1 μm or less for the purpose of improving productivity. As a method of forming a source electrode and a drain electrode, for example, by evaporating 150866.doc •41 - 201123575, 'electron beam evaporation, sputtering, large phase vapor deposition, electrodeposition, electroless plating, di-ion, ion Electroplating, chemical gasification. Further, as a pattern to be carried out as needed, a well-known photolithography method or a peeling method is used for coating, printing, or inkjet, etc.:: upper=lower method: a conductive thin film is formed into a metal such as copper formed by an electrode method. Forming a U-liquid equal to or in addition, a liquid or dispersion of a source electrode and a drain electrode, and a metal micro-two-component polymer ink method to form an electrode, also: a coating film An electrode is formed. Further, it is also possible to use a drop-off button conductive polymer or a metal micro-bar. The electrode is formed by a relief, a gravure, a wH1, a conductive material, or the like. "The printing method is patterned to remove the electrode material, and the electrode material as the gate electrode, the source electrode, and the electrodeless electrode" uses a well-known conductive polymer whose conductivity is improved by substitution or the like. Preferably, for example, conductive polyaniline, conductive polyphthyl ratio, conductive polybenzate (poly(dioxyethyl phenyl) and polystyrene) are used. (etc.), poly(dioxyethyl sin KPEDOT) and polystyrene acid (4). With these materials, the contact resistance between the source electrode and the drain electrode and the semiconductor layer can be reduced. In the ruthenium film transistor, in order to improve the implantation efficiency, for example, a buffer layer may be provided between the organic semiconductor layer and the source electrode and the drain electrode. The buffer layer provided in the η-type organic thin film transistor is preferably an organic caller. LiF, Li2〇, CsF, NaCCb, 150866.doc •42- 201123575 KCl, MgF2, CaC〇3, etc. used in the cathode of the optical element have compounds for metal and soil metal ion bonding. p-type organic thin film transistor The buffer layer set in the middle is ideal FeCl3, TCNQ (7,7,8,8-tetracyanoquinodimethane, 7,7,8,8-tetracyano-p-dioxane), cyano compound such as F4-TCNQ, HAT; CFX or Ge02, Si〇2 Mo03, V2〇5, V〇2, V2〇3, MnO,
Mn304、Zr02、W03、Ti02、ln203、ZnO、Ni〇、Hf02 'Mn304, Zr02, W03, Ti02, ln203, ZnO, Ni〇, Hf02 '
Ta2〇5、Re〇3、Pb〇2等驗金屬;驗土金屬以外之金屬氧化 物’ ZnS、ZnSe等無機化合物。該等氧化物於較多情形時 會引起氧空位’該氧空位適合注入電洞。進而,亦可為 TPD(N,N'-diphenyl-N,N'-bis(3-methylphenyl)-l,l'-biphenyl- 4,4i-diamine ’ N,N’-二苯基-Ν,Ν·-雙(3_ 甲基苯基)」,!,-二苯 基-4,4,-二胺)4NPD(N,N,_diphenyl-N,N,_bis(i naphthyi)_ l,l|-blphenyl-4,4'’-diamine,N,N’-二苯基 _N,N,_ 二(1_ 萘基)_ 1,1 -聯本-4,4'-二胺)等胺系化合物或Cupc等有機el元件中 用作電洞注入層、電洞傳輸層之化合物。X,較理想的是 包含兩種以上之上述化合物之緩衝層。 於本發明之薄膜電晶體中’例如考慮到 氧:水等對半導體層之影響,可於元件之外周面之整Π 一部分形成阻氣層。 之正面或 作為形成阻氣層之材料,可使用 可列舉:聚乙、法π 门^之材枓,例如 偏二氯乙稀1氣^稀_乙稀醇共聚物、聚氯乙烯、聚 體層之材料而例亍::乙稀寻。a而,亦可使用作為絕緣 /、的/、有絕緣性之無機物及有機物。 150866.doc -43- 201123575 [實施例] 合成例1 將使0.2 kg之1,1-雙(4-羥苯基)乙烷溶解於12 4之12重 量%之氫氧化鈉水溶液中所得之溶液,與1〇 0二氣曱烷 扣& 面攢:拌一面於冷卻下向溶液中以1 L/min之比例 0人入光氣直至pH值成為9以下為止。繼而,將該反應液靜 置刀離於有機層獲得聚合度為2〜6,分子末端具有氣曱 酸酯基之低聚物(PC0_E)之二氣甲烷溶液。 於反應谷益上安裝機械攪拌器、攪拌翼、隔板,於上述 低聚物(3 1G mL)中添加二氣曱烧(14Q紅)。於其中添加作 為末立而終止劑之對第三丁基苯盼(2 9 ,授拌使之充分混 口於°玄'合液中全量添加另外製備之單體溶液,繼續持續 攪拌1小時。 再者,早體溶液係以如下方式製備:製備185社之2 N =虱乳化鈉水溶液,冷卻至室溫以下後,添加〇 i g亞硫酸 虱-16.7 g之1山雙(4經苯基)乙燒⑼卜使之完全溶 肘所得之反應混合物 ' μ 2 L二氣甲烷及丨L水稀釋, :洗°分離下層,進而以1 L水1次,i RO.Ol Ν之鹽 1 L水3_人的順序進行清洗。將所得之三氯甲烧溶 口投入至含有異兩醇之溫水⑽)中將所得析出」 濾、乾燥,藉此獲得化合物(1): [化 39] 150866.doc -44- 201123575Metals such as Ta2〇5, Re〇3, and Pb〇2; metal oxides other than soils, such as inorganic compounds such as ZnS and ZnSe. These oxides cause oxygen vacancies in many cases. The oxygen vacancies are suitable for injection into the cavity. Further, it may be TPD(N,N'-diphenyl-N,N'-bis(3-methylphenyl)-l,l'-biphenyl- 4,4i-diamine 'N,N'-diphenyl-fluorene, Ν·-bis(3_methylphenyl)", !,-diphenyl-4,4,-diamine) 4NPD(N,N,_diphenyl-N,N,_bis(i naphthyi)_ l,l| -blphenyl-4,4''-diamine,N,N'-diphenyl-N,N,_bis(1_naphthyl)-1 1,1-benben-4,4'-diamine) A compound used as a hole injection layer or a hole transport layer in an organic el element such as a compound or Cupc. X, more preferably a buffer layer comprising two or more of the above compounds. In the thin film transistor of the present invention, for example, in consideration of the influence of oxygen: water or the like on the semiconductor layer, a gas barrier layer can be formed on a part of the entire outer peripheral surface of the element. The front side or the material for forming the gas barrier layer may be used, for example, polyethylene, π, and the like, such as vinylidene chloride, gas-thin copolymer, polyvinyl chloride, and polymer layer. The material is exemplified by: 乙 寻. a can also be used as an insulating /, /, insulating inorganic and organic matter. 150866.doc -43- 201123575 [Examples] Synthesis Example 1 A solution obtained by dissolving 0.2 kg of 1,1-bis(4-hydroxyphenyl)ethane in 12% by weight of a 12% by weight aqueous sodium hydroxide solution , and 1 〇 2 dioxane buckle & 攒 攒 拌 拌 拌 拌 攒 攒 攒 攒 攒 攒 攒 攒 拌 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Then, the reaction solution was allowed to stand still in the organic layer to obtain a two-gas methane solution having a degree of polymerization of 2 to 6 and having a gas phthalate group-containing oligomer (PC0_E) at the molecular end. A mechanical stirrer, a stirring blade, and a separator were attached to the reaction solution, and dioxane (14Q red) was added to the above oligomer (3 1 G mL). To the third butyl benzene was added as a terminal agent and the monomer solution was added in a sufficient amount to the mixture, and the mixture was continuously stirred for 1 hour. Furthermore, the early solution was prepared as follows: Prepare 2 N = 虱 emulsified sodium aqueous solution of 185, and after cooling to room temperature or less, add 〇ig sulfite-16.7 g of 1 mountain double (4 phenyl) Ethylene (9) Bu to completely dissolve the elbow obtained reaction mixture 'μ 2 L di-methane and 丨L water diluted, : Wash ° separation of the lower layer, and then 1 L water once, i RO.Ol Ν salt 1 L water 3_ The human is washed in the order. The obtained trichloromethane boiling port is poured into warm water (10) containing isoamyl alcohol, and the resulting precipitate is filtered and dried to obtain a compound (1): [Chem. 39] 150866 .doc -44- 201123575
On Ο-Η- 化合物(1) /η 化合物(1)之結構係根據 iH_NMR(pr〇t〇n nUclear magnetic resonance’質子核磁共振)圖譜而確認。 又’濃度為0.5 g/d丨的化合物(1)之二氣曱烷溶液於2〇°c 下之比;1 辰黏度[r|sp/C]為dl/g。 實施例1 將25x20x 1.1 mm大小之玻璃用作基板,於該基板上以 1 00 nm之厚度形成ιΤ〇膜,使用光微影法進行圖案化,獲 得透明閘極電極(以下,將具備IT〇膜之基板稱作透明支持 基板)^將β玄透明支持基板以異丙醇進行5分鐘超音波清洗 後,以純水清洗5分鐘,進而以異丙醇進行5分鐘超音波清 洗後,吹附乾燥A氣體進行乾燥。最後,以uv(ultravi〇iet, 紫外線)-臭氧清洗裝置[Samco International(股)製造]清洗 3 0分鐘。 將0.25 g所製備之化合物(1)添加至5 giTHF中於市售 之超音波清洗機中清洗30分鐘,藉此製備5 wt%聚碳酸酯 溶液。將該聚碳酸g旨溶液以〇 2微米之Ptfe (polytetrafluoroethylene,聚四氟乙烯)薄膜過濾器進行過 濾後,滴加至上述透明支持基板上,以15〇〇 rpm旋塗3〇秒 鐘’藉此形成膜厚7 1 〇 nm之閘極絕緣體層。 形成絕緣體層之後,固定於市售之真空蒸鍍裝置 [ULVAC(股)製造]之基板固持器上,於一連串之真空環境 下根據以下要領形成有機半導體層及金屬電極。 150866.doc •45· 201123575 將成膜有聚碳㈣層之透明支持基板固定於真空蒸 置^進行真空排氣至㈣下。對裝有稍五苯之鶴 舟進仃通電加熱,將蒸鍍源加熱至400t,以0.05咖/3之 蒸鑛速率於積層結構體之外表面設置膜厚50 _之稠五苯 溥膜(半導體層)。最後’通過金屬罩以5G⑽之膜厚形成 金膜’藉此以間隔(通道長度L)成為75㈣之方式形成相互 不接觸之源極電極與汲極電極。此時係以源極電極及汲極 電極之寬度(通道寬度w)成為5 mm之方式成膜,藉此製作 具有圖2之構成之薄膜電晶體。 對於有機半導體層及金屬電極之膜厚及縫速率,係藉 由真工L至内所配置之晶體振盪式膜厚計[ulvac(股)製 這]面姐控蒸鍍膜之膜厚一面加以控制。又,藉由觸針 式膜厚计測定所得各層之膜厚’確認其與晶體振盪式膜厚 計之讀數一致。 對所得薄膜電晶體之閘極電極施加〇〜_ 1 〇〇 v之閘極電 壓,於源極-汲極間施加5〜_1〇〇 V之電壓使電流流通,評價 開/關比、臨界電壓及場效遷移率μ。其結果,電流飽和區 域中源極-汲極電極間的電流之開/關比為9·3χΐ〇5,臨界電 β、為23 V 场效遷移率μ為1_1 cm2/ Vs。各電壓之施加及 源極-汲極電極間電流之測定係使用半導體特性評價系統 (Keithley lnstruments(股)製造之 42〇〇scs)而進行。 再者,所得薄膜電晶體中’電子於有機半導體層之通道 區域(源極-汲極間)受到感應’作為p型電晶體而動作。 又’場效遷移率μ係使用下述式(A)而算出: 150866.doc -46- 201123575On Ο-Η- Compound (1) / η The structure of the compound (1) was confirmed by iH_NMR (pr〇t〇n nUclear magnetic resonance). Further, the ratio of the dioxane solution of the compound (1) having a concentration of 0.5 g/d 〇 at 2 ° C; the viscosity at 1 hr [r|sp/C] was dl/g. Example 1 A glass of 25×20×1.1 mm was used as a substrate, and a ITO film was formed on the substrate at a thickness of 100 nm, and patterned by photolithography to obtain a transparent gate electrode (hereinafter, IT 〇) The substrate of the film is called a transparent support substrate. ^The β-transparent support substrate is ultrasonically cleaned with isopropyl alcohol for 5 minutes, then washed with pure water for 5 minutes, and further ultrasonically cleaned with isopropyl alcohol for 5 minutes. Dry the A gas for drying. Finally, it was washed with a UV (ultravi〇iet, ultraviolet)-ozone cleaning device [manufactured by Samco International] for 30 minutes. 0.25 g of the prepared compound (1) was added to 5 giTHF and washed in a commercially available ultrasonic cleaner for 30 minutes, thereby preparing a 5 wt% polycarbonate solution. The solution of the polycarbonate was filtered through a Ptfe (polytetrafluoroethylene) membrane filter of 2 μm, and then dropped onto the transparent support substrate and spin-coated at 15 rpm for 3 sec. This forms a gate insulator layer having a film thickness of 7 1 〇 nm. After the formation of the insulator layer, it was fixed to a substrate holder of a commercially available vacuum vapor deposition apparatus [ULVAC], and an organic semiconductor layer and a metal electrode were formed in a series of vacuum environments according to the following procedure. 150866.doc •45· 201123575 The transparent support substrate with a polycarbon (four) layer formed on the film is fixed in vacuum evaporation and vacuum evacuated to (4). The electric pump was heated and heated to 400t, and the film thickness of 50 _ thick pentacene film was set on the outer surface of the laminated structure at a steaming rate of 0.05 coffee/3. Semiconductor layer). Finally, a gold film is formed by a metal cover with a film thickness of 5 G (10), whereby source electrodes and drain electrodes which are not in contact with each other are formed so that the interval (channel length L) becomes 75 (four). In this case, a film transistor having the structure of Fig. 2 was formed by forming a film having a width (channel width w) of 5 mm as the source electrode and the drain electrode. The film thickness and the slit rate of the organic semiconductor layer and the metal electrode are controlled by the thickness of the crystal oscillation type film thickness meter [ulvac (manufactured by the company)]. Further, the film thickness of each of the obtained layers was measured by a stylus type film thickness meter to confirm that it coincided with the reading of the crystal oscillation type film thickness meter. A gate voltage of 〇~_1 〇〇v is applied to the gate electrode of the obtained thin film transistor, and a voltage of 5 〜1 〇〇V is applied between the source and the drain to circulate current, and the on/off ratio and the threshold voltage are evaluated. And field effect mobility μ. As a result, the on/off ratio of the current between the source-drain electrodes in the current saturation region is 9·3 χΐ〇 5, and the critical electric β is 23 V. The field effect mobility μ is 1_1 cm 2 /Vs. The application of each voltage and the measurement of the current between the source and the drain were performed using a semiconductor characteristic evaluation system (42 〇〇 scs manufactured by Keithley Instruments). Further, in the obtained thin film transistor, 'electrons are induced in the channel region (source-drain) of the organic semiconductor layer' to function as a p-type transistor. Further, the field effect mobility μ is calculated using the following formula (A): 150866.doc -46- 201123575
Id = (W/2L) - Ομ - (Vg-Vt)2 (A) (式中’ Id為源、極-汲極間電流,W為通道寬度,l為通道長 度,C為閘極絕緣體層每單位面積之電容,&為問極臨界 電壓,Vg為閘極電壓)。 又,對薄膜電晶體之絕緣體層中所使用之化合物(丨)之 響溶解性進行評價。具體而言,於可塞嚴之樣品瓶中添 W g之化合物⑴及19 g之THF,於室溫下(:的卜常壓條 件下以24小時為上限進行振盪直至溶解為止,然後目視評 價樣品瓶令有無不溶物。結果示於表(。再者,於無不溶 物之情形時,將THF溶解性評價為「〇」。又,於可明顯 確認有不溶物之情形、及可確認如細小灰塵般之不溶物之 情形時,最終無法形成均勻之絕緣體層故而評價為 「X」。又,因樹脂之形狀(顆粒狀、薄片狀等)之不同而 導致溶解性存在差異之情形時,以溶解性較差者作為判斷 基準。 因可確認到化合物⑴之溶解,故而將裝有化合物⑴之 THF溶液的樣品瓶進而靜置旧,與上述同樣地目視喊認 有無凝膠化,評價THF溶解穩定性。結果示於表!。再 者’,未能確關凝膠化之情形時,將THF溶解穩定性評 知為〇」,於確認到凝膠化之情形時評價為「χ」。 進而,以與THF溶解性之評價相同之方法,亦對環己酮 及甲苯溶解性進行評價。結果示於表1。 實施例2 將使〇·2 kg之2,2-雙(4_羥苯基)丙烷溶解於丨3 kg之⑺重 150866.doc -47- 201123575 量%之風氣化鈉水溶液φ张^ 液中所得的溶液,與1.0 kg二氣曱烧 混合,一面攪拌一面於冷 虱甲烷 片 向'合液中以1 L/min之比例 吹入光氣直至pH值成為9以 、灿 下為止。繼而,將該反應液靜 置为離,於有機層獲得 度為2〜6,分子末端具有氣甲 ㈣基之低聚物(PC()_A)之二氯甲烧溶液。 於反應容器上安裝機械授拌器、授拌翼、隔板,於上述 低聚物(310 mL)中添加二氣 虱甲烷(160 mL)。於其中添加作 為末端終止劑之對第二丁萁 丁弟一丁基本酚(2.3 g),攪拌使之充分混 合。於該溶液中全量沐Λ 小加另外製備之單體溶液,繼續持續 攪拌1小時。 只Id = (W/2L) - Ομ - (Vg-Vt)2 (A) (where Id is the source, pole-drain current, W is the channel width, l is the channel length, and C is the gate insulator layer The capacitance per unit area, & is the threshold voltage, Vg is the gate voltage). Further, the solubility of the compound (丨) used in the insulator layer of the thin film transistor was evaluated. Specifically, W g compound (1) and 19 g of THF were added to a stoppered sample vial, and shaken at room temperature under a normal pressure condition for 24 hours until dissolved, and then visually evaluated. The results are shown in the table. The results are shown in the table. (In addition, when there is no insoluble matter, the solubility of THF is evaluated as "〇". In addition, the insoluble matter can be clearly confirmed and confirmed. In the case of a fine dust-like insoluble matter, it is not possible to form a uniform insulator layer, and it is evaluated as "X". Further, when there is a difference in solubility due to the difference in the shape of the resin (granular or flake, etc.), In the case where the solubility of the compound (1) was confirmed, the sample bottle containing the THF solution of the compound (1) was allowed to stand still, and the presence or absence of gelation was visually observed in the same manner as above to evaluate the dissolution of THF. The results are shown in Table!. In addition, when the gelation was not confirmed, the THF dissolution stability was evaluated as "〇", and when the gelation was confirmed, it was evaluated as "χ". and then, The solubility of cyclohexanone and toluene was also evaluated in the same manner as the evaluation of the solubility of THF. The results are shown in Table 1. Example 2 2,2-bis(4-hydroxyphenyl) of 〇·2 kg Propane is dissolved in 丨3 kg (7) weight 150866.doc -47- 201123575% of the solution of the air-gasified sodium aqueous solution φ Zhang ^ liquid, mixed with 1.0 kg of digastric simmer, while stirring on one side of the cold methane sheet The phosgene was blown into the mixture at a ratio of 1 L/min until the pH became 9 and then allowed to stand. Then, the reaction solution was allowed to stand still, and the organic layer was obtained in an amount of 2 to 6, molecular end. a methylene chloride solution having an air (4) group oligomer (PC()_A). A mechanical agitator, a mixing wing, and a separator are attached to the reaction vessel, and the above oligomer (310 mL) is added. Dimethyl methane (160 mL), which was added as a terminal terminator to the second butyl butyl butyl phenol (2.3 g), and stirred to mix well. In this solution, the whole amount of Λ Λ The monomer solution was continued to stir for 1 hour.
再者’單體溶液係以如下方式製備:製備195mk2N t氮氧化鈉水溶液,冷卻至室溫以下後,添加(M g亞硫酸 風鹽、29 g雙(2 -硫代(4_麵笑其、7与甘、 P包本基)乙氧基)甲烷,使之完全溶 解。 將所得之反應混合物以2 L二氯曱烧及1 L水稀釋’進行 清洗。分離下層,進而……次,之鹽酸ι -人1 L水3次的順序進行清洗1所得之二氣甲烧溶液滴 加4又入至含有異丙醇之;田匕 < 水(70 c )中,將所得析出物過 滤、乾燥,藉此獲得作為共聚物之下述化合物⑺。 [化 40]Furthermore, the monomer solution was prepared as follows: a 195 mk 2 N t sodium nitrite aqueous solution was prepared, and after cooling to room temperature or lower, it was added (M g sulfite wind salt, 29 g bis (2 - thio (4 _ 笑 笑, 7 and glycerol, P-packaged) ethoxy) methane, completely dissolved. The resulting reaction mixture was washed with 2 L of dichlorohydrazine and 1 L of water to 'wash. Separate the lower layer, and then ... times, The dimethyl-manual 1 L water was washed three times in sequence, and the obtained two-gas calcination solution was added dropwise to the solution containing isopropanol; 匕 匕 < water (70 c ), and the resulting precipitate was filtered. And drying, thereby obtaining the following compound (7) as a copolymer.
化合物(2) η/(χ+η)=0.2 150866.doc -48- 201123575 化合物(2)之結構係根據ih_N]VIr圖譜而確訪。 又,濃度為0.5 g/dl的化合物⑺之二氣甲烧溶液於抓 下之比濃黏度[riSP/C]為0.51 dl/g。 除使用下述化合物⑺代替化合物⑴積層絕緣體層之 外,以與實施例i相同之方式製作薄膜電晶體,進行評 價。又,以與實施例W同之方式對化合物⑺之THF、環 己酮及甲苯溶解性進行評價。結果示於表】。 實施例3 (1)積層絕緣體層之 膜電晶體,進行評 除使用下述化合物(3)代替化合物 外,以與實施例1相同之方式製作薄 價。又,以與實施例1相同 j <万式對化合物(3)之THF、環 己萌及甲苯溶解性進行評價。結果示於表1。 又,f度為〇·5 g/dl的化合物⑺之二氯甲烧溶液於抓 下之比濃黏度[r(sp/C]為1 3 dl/g : [化 41]Compound (2) η / (χ + η) = 0.2 150866.doc -48- 201123575 The structure of the compound (2) was confirmed based on the ih_N] VIr pattern. Further, the specific viscosity (riSP/C) of the dioxo-burning solution of the compound (7) having a concentration of 0.5 g/dl was 0.51 dl/g. A thin film transistor was produced in the same manner as in Example i except that the following compound (7) was used instead of the compound (1) laminated insulator layer, and evaluation was carried out. Further, the solubility of the compound (7) in THF, cyclohexanone and toluene was evaluated in the same manner as in Example W. The results are shown in the table]. (Example 3) (1) Membrane transistor of a build-up insulator layer was evaluated and a thin price was produced in the same manner as in Example 1 except that the following compound (3) was used instead of the compound. Further, in the same manner as in Example 1, the solubility of THF, cycloheximide and toluene of the compound (3) was evaluated in the same manner as in Example 1. The results are shown in Table 1. Further, the ratio of the concentration of the dichloromethane solution of the compound (7) having a f degree of 〇·5 g/dl to the grasped concentration [r(sp/C) is 13 dl/g : [Chem. 41]
化合物(3) 實施例4 外,以與實施例i相同之方二合物⑴積層絕緣體層』 俨叉 w你一 式製作薄膜電晶體,進行言 {又,以與貫施例1相同之方式對化合物⑷之… 己嗣及甲総解性進行評價。結W於表卜 150866.doc •49· 201123575 又’濃度為0.5 g/dl的化合物(4)之二氯甲烷溶液於2〇〇c 下之比濃黏度[riSP/C]為0.70 dl/g : [化 42]Compound (3) In the same manner as in Example 1, except that the same method as in Example i (1) laminated insulator layer was used, a thin film transistor was fabricated. The compound (4) was evaluated for its hydrazine and formazibility. Kie W in the table 150866.doc •49· 201123575 And the concentration of 0.5 g / dl of the compound (4) in methylene chloride solution at 2 〇〇c concentration ratio [riSP / C] is 0.70 dl / g : [化42]
化合物(4) 實施例5 除使用下述化合物(5)代替化合物(1)積層絕緣體層之 外,以與實施例1相同之方式製作薄膜電晶體,進行評 價。又,以與實施例丨相同之方式對化合物〇之、環 己酮及甲苯溶解性進行評價。結果示於表丨。 又,濃度為0.5 g/dl的化合物(5)之二氣甲烷溶液於2〇。〇 下之比濃黏度hsp/C]為0.50 dl/g : [化 43]Compound (4) Example 5 A thin film transistor was produced in the same manner as in Example 1 except that the following compound (5) was used instead of the compound (1) laminated insulator layer, and evaluation was carried out. Further, the solubility of the compound oxime, cyclohexanone and toluene was evaluated in the same manner as in Example 。. The results are shown in Table 丨. Further, a dioxane methane solution of the compound (5) having a concentration of 0.5 g/dl was used in 2 Torr. The underlying viscosity hsp/C] is 0.50 dl/g : [Chem. 43]
實施例6 化合物(5 )Example 6 Compound (5)
又,濃度為〇·5 己酮及甲苯溶解性進行評價。結果示於表i。 又,濃度為0.5 g/dl的化合物⑹之二氣甲烧溶液於飢 下之比濃黏度hsp/C]為i 7 dl/g : [化 44] 150866.doc 50- 201123575Further, the concentration was evaluated by the solubility of 〇·5 hexanone and toluene. The results are shown in Table i. Further, the concentration of the gas (2) of the compound (6) at a concentration of 0.5 g/dl is less than the concentration hsp/C] of i 7 dl/g: [Chem. 44] 150866.doc 50- 201123575
除便用卜述化合物⑺代替化 夕卜,以应實施#丨丨4 ()積層、纟ε緣體層之 貫“列1相同之方式製作薄膜電曰m 價。又,以與實施例!相同之 體進灯评 己酮及甲苯溶M w· 式對化合物(7)之THF、環 己酮及曱本岭解性進行評價。結果示於表卜 又’濃度為0.5 g/dl的化合物In addition, the compound (7) is replaced by the compound (7), and the film is formed in the same manner as in the column 1 of the layer 纟4 (), and the same is the same as in the embodiment. The hexanone and the toluene-soluble M w· formula of the compound (7) were evaluated for the THF, cyclohexanone and sulfonate calculus of the compound (7). The results are shown in the table and the compound with a concentration of 0.5 g/dl.
-g *. p: r f ()之一虱甲烷溶液於20〇C 下之比濃黏度[r]SP/C]為0 5〇 di/g : [化 45]-g *. p: r f () One of the 虱 methane solutions at 20 〇 C has a specific viscosity [r]SP/C] of 0 5〇 di/g : [Chem. 45]
實施例8 除使用下述化合物(8)代替化^ n ;〜# 1匕σ物(1)積層絕緣體層之 外’以與實施作_"相同之方式製作薄膜電晶體,進行評 價。又’以與實施例i相同之方式對化合物⑻之THF、環 己酮及甲苯溶解性進行評價。結果示於表1。 又’濃度為G.5 g/dl的化合物⑻之二氯甲烧溶液於抓 下之比濃黏度hsp/C]為0.50 dl/g : [化 46](Example 8) A thin film transistor was produced and evaluated in the same manner as in the practice of _" except that the following compound (8) was used instead of the compound (1). Further, the solubility of the compound (8) in THF, cyclohexanone and toluene was evaluated in the same manner as in Example i. The results are shown in Table 1. Further, the concentration ratio hsp/C] of the dichlorocarboate solution of the compound (8) having a concentration of G.5 g/dl was 0.50 dl/g: [Chem. 46]
150866.doc 51 - 201123575 實施例9 除使用下述化合物 外,以盥每施仞“ 帛&物⑴積層絕緣體層之 η“"相同之方式製作薄膜電晶體,進行評 ^。又’以與實施例1相 门方式對化δ物(9)之THF、環 己酮及甲本溶解性進行評價。結果示於表卜 又,濃度為0.5 g/dl的化合物⑼之二氣甲院溶液於飢 下之比濃黏度hsp/C]為0.50 dl/g : [化 47]150866.doc 51 - 201123575 Example 9 A thin film transistor was produced in the same manner as in the "n" of "layered insulator layer (1) laminated insulator layer) except that the following compound was used. Further, the solubility of THF, cyclohexanone, and methyl amide of the δ (9) was evaluated in the same manner as in Example 1. The results are shown in the table. Further, the concentration of the compound (9) of the compound (9) at a concentration of 0.5 g/dl is less than the concentration viscosity hsp/C] of 0.50 dl/g: [Chem. 47]
化合物(9) 除使用下述化合物(10)代替化合物(1)積層絕緣體層之 外,以與實施例1相同之方式製作薄膜電晶體,進行評 價。又,以與實施例丨相同之方式對化合物(1〇)之thf、環 己酮及甲苯溶解性進行評價。結果示於表i。 又’濃度為0.5 g/dl的化合物(1〇)之二氣曱烷溶液於2〇。〇 下之比濃黏度[T)SP/C]為0.40 dl/g :Compound (9) A thin film transistor was produced in the same manner as in Example 1 except that the following compound (10) was used instead of the compound (1) laminated insulator layer, and evaluation was carried out. Further, the solubility of thf, cyclohexanone and toluene of the compound (1〇) was evaluated in the same manner as in Example 。. The results are shown in Table i. Further, a solution of a compound (1 Torr) having a concentration of 0.5 g/dl was dissolved in 2 Torr. The underweight viscosity [T)SP/C] is 0.40 dl/g:
[化 48J[化48J
—化合物(10) y/(x+y)=0.2 150866.doc •52· 201123575 實施例1 1 除使用下述化合物(11)代替化合物(1)積層絕緣體層之 外,以與實施例丨相同之方式製作薄膜電晶體,進行評 4貝又以與貫施例1相同之方式對化合物(.11)之thf、環 己鲷及曱苯溶解性進行評價。結果示於表i n 又’濃度為〇·5 g/dl的化合物(11)之二氯曱烧溶液於2(TC 下之比濃黏度[T)SP/C]為ο.% d丨/g : [化 49]- Compound (10) y / (x + y) = 0.2 150866.doc • 52· 201123575 Example 1 1 The same as Example 除 except that the following compound (11) was used instead of the compound (1) laminated insulator layer The film transistor was produced in the same manner, and the solubility of thf, cyclohexyl and terpene of the compound (.11) was evaluated in the same manner as in Example 1. The results are shown in the table in which the concentration of the dichlorohydrazine solution of the compound (11) having a concentration of 〇·5 g/dl is 2 (the specific viscosity [T) SP/C at TC is ο.% d丨/g. : [化49]
除使用下述化合物(12)代替化合物⑴積層絕緣體層之 外,以與實施例1相同之方式製作薄膜電晶體,進行評 價。又’以與實施例1相同之方式對化合物(12)之THF、環 己酮及曱苯溶解性進行評價。結果示於表丄。 又,濃度為0.5 g/山的化合物(12)之二氯甲烷溶液於2〇<t 下之比濃黏度hsp/C]為0.50 dl/g : [化 50]A thin film transistor was produced in the same manner as in Example 1 except that the following compound (12) was used instead of the compound (1) laminated insulator layer, and evaluation was carried out. Further, the solubility of the compound (12) in THF, cyclohexanone and terpene was evaluated in the same manner as in Example 1. The results are shown in Table 丄. Further, the methylene chloride solution of the compound (12) having a concentration of 0.5 g/mountion at a concentration of 0.5 dl/g at 2 〇 < t is 0.50 dl/g : [Chem. 50]
150866.doc •53· 201123575 除使用下述化口物(13)代替化合物⑴積層絕緣體層之 外’以與實施例1相同之方式製作薄膜電晶體,進行評 4貝又《與貫施例!相同之方式對化合物⑴)之、環 己酮及曱苯溶解性進行評價。結果示於表丄。 又’漢度為0.5 g/dl的化合物(13)之二氣甲烧溶液於2〇t>c 下之比濃黏度[rjsp/C]為0.50 dl/g : [化 51]150866.doc •53·201123575 In addition to the use of the following chemical substance (13) instead of the compound (1) laminated insulator layer, a thin film transistor was produced in the same manner as in Example 1, and the evaluation was carried out. The solubility of the compound (1)), cyclohexanone and terpene was evaluated in the same manner. The results are shown in Table 丄. Further, the specific viscosity [rjsp/C] of the dioxin-burning solution of the compound (13) having a degree of 0.5 g/dl is 0.50 dl/g at 2〇t>c: [Chem. 51]
化合物(13) 實施例14 除使用下述化合物(14)代替化合物(〗)積層絕緣體層之 外’以與實施例1相同之方式製作薄膜電晶體,進行評 價。又’以與實施例丨相同之方式對化合物(丨4)之THF、環 己酮及甲苯溶解性進行評價。結果示於表1。 又’濃度為0.5 g/dl的化合物(14)之二氣甲烷溶液於2〇°C 下之比濃黏度[nsp/C]為0_50 dl/g : [化 52] 化合物(14) 比較例1 除使用雙齡A型聚碳酸醋樹脂(出光興產(Idemitsu Kosan) 150866.doc -54- 201123575 股份有限公司製造,Tarflon A2200)代替化合物(1)積層絕 緣體層之外,以與實施例1相同之方式製作薄膜電晶體, 進行評價。然而,bis-A型聚碳酸酯樹脂對THF之溶解度較 低,無法形成均勻之絕緣體層。故而,製作之電晶體無法 獲得FET特性。 又,以與實施例1相同之方式對bis-A之THF、環己酮及 甲苯溶解性進行評價。結果示於表1。 [表1]Compound (13) Example 14 A thin film transistor was produced in the same manner as in Example 1 except that the following compound (14) was used instead of the compound (?) laminated insulator layer, and evaluation was carried out. Further, the solubility of the compound (丨4) in THF, cyclohexanone and toluene was evaluated in the same manner as in Example 。. The results are shown in Table 1. Further, the specific viscosity [nsp/C] of the dioxane methane solution of the compound (14) having a concentration of 0.5 g/dl is 0-50 dl/g at 2 ° C: [Chem. 52] Compound (14) Comparative Example 1 The same as in the first embodiment except that a double-aged type A polycarbonate resin (manufactured by Idemitsu Kosan 150866.doc -54-201123575, Tarflon A2200) was used instead of the compound (1) laminated insulator layer. The film transistor was produced in the same manner and evaluated. However, the bis-A polycarbonate resin has a low solubility in THF and cannot form a uniform insulator layer. Therefore, the fabricated transistor cannot obtain the FET characteristics. Further, the solubility of THF, cyclohexanone and toluene of bis-A was evaluated in the same manner as in Example 1. The results are shown in Table 1. [Table 1]
化合物 遷移率 [cm2/Vs] 臨界電 壓[V] 開/關 比[-] THF溶 解性 THF 溶解 穩定性 環己 酮溶 解性 甲苯 溶解 性 實施例1 化合物(1) 0.84 -13 1.5χ107 〇 〇 〇 〇 實施例2 化合物(2) 0.017 -20 9-lxlO4 〇 〇 〇 〇 實施例3 化合物(3) 0.77 -39 7.3χ106 〇 〇 〇 〇 實施例4 化合物(4) 1.4 -27 Ι.ΟχΙΟ7 〇 〇 〇 〇 實施例5 化合物(5) 0.1 -23 9.3 xlO6 〇 〇 〇 〇 實施例6 化合物(6) 0.46 -14 4.8χ106 〇 〇 〇 〇 實施例7 化合物(7) 0.67 -22 3.5χ107 〇 〇 〇 〇 實施例8 化合物(8) 0.54 -14 1.0x107 〇 〇 〇 〇 實施例9 化合物(9) 0.81 -28 8.3 χΙΟ6 〇 〇 〇 〇 實施例10 化合物(10) 0.52 -15 8.9χ106 〇 〇 〇 〇 實施例11 化合物(11) 0.60 -20 9.8χ106 〇 〇 〇 〇 實施例12 化合物(12) 0.23 -20 9.〇χ106 〇 〇 〇 〇 實施例13 化合物(13) 0.11 -21 8.5χ106 〇 〇 〇 〇 實施例14 化合物(14) 0.092 -24 8.7x106 〇 〇 〇 〇 比較例1 bis-A - - - X X X X 由表1可知,作為本發明之聚碳酸酯之化合物(1)〜(14)可 確認到對THF溶劑具有充分之溶解性。又,可確認對THF 之溶解度較高之聚碳酸酯材料對其他非li素溶劑亦大體上 具有對於成膜薄膜電晶體用絕緣體層充分之溶解性。 150866.doc -55- 201123575 體=界:所周知,構成有機TFT之絕緣體層與有機半導 旦二r1之狀態會對遷移率、臨界電壓或開/關比產生 ”曰(應用物理」第77卷、第4號(2008)432-437)。本發 月之有機TFT中的絕緣體層與有機半導體層之界面之狀態 V未月確但例如對有機半導體之配向有影響之絕緣體層 之表面此、對斷態電流有影響之絕緣體層之表面清潔性、 對絕緣體層之連續性(即較少產生龜裂等)或與有機半導體 層之达著⑷等有影響之平滑性有可能對有機TFT之性能產 生影響。 •另一方面,表1中所示之各實施例的遷移率、臨界電 壓、開/關比存在差異’使用式⑴之Ar為具有非對稱結構 之式(3)所表示之鍵結基的聚碳酸酯,或為式(4)所表示之 鍵結基的聚碳酸酯之有機TFT顯示更優異之性能。 又,關於包含式(II)與式(1„)之重複單元之聚碳酸酯共 聚物,於Ar2及Ar3均為式(2)所表示之鍵結基,且為提高溶 解性而導入之重複單元為9,9-亞苐基或式(6a)之情形時, 顯示更優異之性能。 另一方面,於式(I)之Ar為式(2)所表示之鍵結基,χ為式 (2a)所表示之鍵結基’ r3ar4為氫原子,尺5與尺6相互鍵結 形成亞環烷基的聚碳酸酯,或結構與其類似之式(2b)所表 示之鍵結基的聚碳酸酯之情形時’雖具有優異之性能,但 遷移率顯示較小之傾向。作為其理由,可能與上述界面之 狀態有關。 可確認絕緣體層中含有本發明之聚碳酸酯之薄膜電晶體 150866.doc -56· 201123575 在應用於電子紙或液晶顯$器等時可發揮充分之性能。 再者,於本案實施例中,係對THF溶解性進行評價,但 ™f冷解性僅為評價「對非幽素系溶劑之溶解度」之基 用本發明之聚奴酸酯時,其塗敷溶劑並不限定於 THF。 作為THF以外之非鹵素溶劑,有苯、甲苯、二甲苯等芳 香族系溶劑,環己酮等酮,二噚烷等醚,^曱基曱醯胺' 一甲亞碾、二乙基甲醯胺等醯胺。本發明之聚碳酸酯可溶 解於及等a裔|之任_種,故而可藉由塗布法使絕緣體層成 膜。 產業上之可利用性 一本^/之4膜電晶體可較好地用於例如電子紙或液晶顯 八°°等之驅動電路、各種感測器及認證標籤 (authentication tag)等中。 :上對本發明之幾個實施形態及/或實施例進行了詳細 的况明’業者可容易地於實質上不偏離本發明之新穎之指 示及效果之範圍内’對該等例示之實施形態及/或實施例 進打多種變更。因Λ,該等多種變更包含於本發明之範圍 内0 說月曰所5己載之文獻之内容被全部引用至本文中。 【圖式簡單說明】 圖1係表示本發明之薄膜電晶體之-實施形態之圖。 圖2係表示本發明之薄膜電晶體之另—實施形態之圖。 圖3係表示本發明之薄膜電晶體之另—實施形態之圖。 150866.doc -57· 201123575 圖4係表示本發明之薄膜電晶體之另一實施形態之圖。 圖5係表示本發明之薄膜電晶體之另一實施形態之圖。 圖6係表示本發明之薄膜電晶體之另一實施形態之圖。 圖7係表示具有基板兼閘極電極之si基板及導線連接用 電極的本發明之薄膜電晶體之一實施形態之圖。 【主要元件符號說明】 1、2、3 ' 4 薄膜電晶體 10 基板 12 Si基板 20 閘極電極 30 絕緣體層 32 Si02 層 40 源極電極 42 Au電極(源極電極) 50 及極電極 52 Au電極(及極電極) 60 半導體層 70 導線連接用電極 72 Au金屬層 74 Cr金屬層 150866.doc -58-Compound mobility [cm2/Vs] Threshold voltage [V] On/off ratio [-] THF soluble THF Dissolution stability Cyclohexanone Solubility Toluene Solubility Example 1 Compound (1) 0.84 -13 1.5χ107 〇〇〇 〇 Example 2 Compound (2) 0.017 -20 9-lxlO4 〇〇〇〇 Example 3 Compound (3) 0.77 - 39 7.3 χ 106 〇〇〇〇 Example 4 Compound (4) 1.4 -27 Ι.ΟχΙΟ7 〇〇〇 〇 Example 5 Compound (5) 0.1 -23 9.3 xlO6 〇〇〇〇 Example 6 Compound (6) 0.46 - 14 4.8 χ 106 〇〇〇〇 Example 7 Compound (7) 0.67 -22 3.5 χ 107 〇〇〇〇 Example 8 Compound (8) 0.54 - 14 1.0x107 〇〇〇〇 Example 9 Compound (9) 0.81 -28 8.3 χΙΟ 6 〇〇〇〇 Example 10 Compound (10) 0.52 -15 8.9 χ 106 〇〇〇〇 Example 11 Compound (11) 0.60 -20 9.8 χ 106 〇〇〇〇 Example 12 Compound (12) 0.23 -20 9. 〇χ 106 〇〇〇〇 Example 13 Compound (13) 0.11 - 21 8.5 χ 106 〇〇〇〇 Example 14 Compound (14) 0.092 -24 8.7x106 〇〇〇〇Comparative Example 1 bis-A - - - X X X X As apparent from Table 1, it was confirmed that the compounds (1) to (14) of the polycarbonate of the present invention have sufficient solubility in a THF solvent. Further, it was confirmed that the polycarbonate material having a high solubility in THF has substantially sufficient solubility to the other non-li-based solvent for the insulating layer for a film-forming film transistor. 150866.doc -55- 201123575 体=Boundary: It is well known that the state of the insulator layer and the organic semi-conductive binary r1 constituting the organic TFT will produce a mobility, a threshold voltage or an on/off ratio. Vol. 4 (2008) 432-437). The state of the interface between the insulator layer and the organic semiconductor layer in the organic TFT of this month is not true, but for example, the surface of the insulator layer which affects the alignment of the organic semiconductor, and the surface of the insulator layer which has an influence on the off-state current is cleaned. The properties, the continuity of the insulator layer (i.e., less cracking, etc.) or the smoothness of the organic semiconductor layer (4) and the like may affect the performance of the organic TFT. On the other hand, the mobility, the threshold voltage, and the on/off ratio of the respective embodiments shown in Table 1 are different. 'Ar of the formula (1) is a bonding group represented by the formula (3) having an asymmetrical structure. The polycarbonate, or an organic TFT of a polycarbonate which is a bonding group represented by the formula (4), exhibits superior properties. Further, the polycarbonate copolymer containing the repeating unit of the formula (II) and the formula (1) is a bonding group represented by the formula (2) in both Ar2 and Ar3, and is introduced repeatedly for the purpose of improving solubility. When the unit is a 9,9-fluorenylene group or a formula (6a), it exhibits superior performance. On the other hand, Ar in the formula (I) is a bond group represented by the formula (2), and is a formula (2a) The bond group represented by 'r3ar4 is a hydrogen atom, a polycarbonate having a ring 5 and a ruler 6 bonded to each other to form a cycloalkylene group, or a bond group having a structure similar to the bond group represented by the formula (2b) In the case of a carbonate, although it has excellent performance, the mobility tends to be small. For this reason, it may be related to the state of the above interface. It is confirmed that the thin film transistor 150866 containing the polycarbonate of the present invention in the insulator layer can be confirmed. .doc -56· 201123575 It can exert sufficient performance when applied to electronic paper or liquid crystal display. In addition, in the case of this case, the solubility of THF is evaluated, but the cooling property of TMf is only evaluation. When the polystearate of the present invention is used as the basis for the "solubility of the non-seletable solvent", the coating thereof is applied. Agent is not limited to THF. Examples of the non-halogen solvent other than THF include aromatic solvents such as benzene, toluene, and xylene; ketones such as cyclohexanone; and ethers such as dioxane; and mercaptoamines. Amines such as amines. The polycarbonate of the present invention can be dissolved in a kind of a material of the same type, so that the insulator layer can be formed into a film by a coating method. Industrial Applicability A film of 4/4 is preferably used in a driving circuit such as an electronic paper or a liquid crystal display, various sensors, and an authentication tag. The embodiments and/or the embodiments of the present invention are described in detail in the context of the present invention and the embodiments of the present invention. / or the embodiment made a variety of changes. Because of these, various changes are included in the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an embodiment of a thin film transistor of the present invention. Fig. 2 is a view showing another embodiment of the thin film transistor of the present invention. Fig. 3 is a view showing another embodiment of the thin film transistor of the present invention. 150866.doc -57· 201123575 Fig. 4 is a view showing another embodiment of the thin film transistor of the present invention. Fig. 5 is a view showing another embodiment of the thin film transistor of the present invention. Fig. 6 is a view showing another embodiment of the thin film transistor of the present invention. Fig. 7 is a view showing an embodiment of a thin film transistor of the present invention having a substrate and a gate electrode for a connection. [Main component symbol description] 1, 2, 3 ' 4 thin film transistor 10 substrate 12 Si substrate 20 gate electrode 30 insulator layer 32 SiO 2 layer 40 source electrode 42 Au electrode (source electrode) 50 and electrode 52 Au electrode (and electrode) 60 semiconductor layer 70 wire connection electrode 72 Au metal layer 74 Cr metal layer 150866.doc -58-
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| CN105121525A (en) * | 2013-04-08 | 2015-12-02 | 出光兴产株式会社 | Coating liquid, laminate, optical device, and electronic device |
| TWI611587B (en) * | 2016-08-31 | 2018-01-11 | 明新科技大學 | Oxide thin-film transistor |
| TWI678739B (en) * | 2015-03-25 | 2019-12-01 | 日商富士軟片股份有限公司 | Transistor and method for manufacturing transistor |
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| JP2004128469A (en) * | 2002-07-31 | 2004-04-22 | Mitsubishi Chemicals Corp | Field effect transistor |
| JP2006232936A (en) * | 2005-02-23 | 2006-09-07 | Ricoh Co Ltd | Purification method for polymer material for organic semiconductor, polymer material for organic semiconductor, and organic semiconductor device |
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| CN105121525A (en) * | 2013-04-08 | 2015-12-02 | 出光兴产株式会社 | Coating liquid, laminate, optical device, and electronic device |
| TWI678739B (en) * | 2015-03-25 | 2019-12-01 | 日商富士軟片股份有限公司 | Transistor and method for manufacturing transistor |
| TWI611587B (en) * | 2016-08-31 | 2018-01-11 | 明新科技大學 | Oxide thin-film transistor |
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