201127718 六、發明說明： 【發明所屬之技術領域】 本發明係關於-種在製造半導齡備 f除去雜質所使用的微影製程用之防塵 收納、保官、運送的防塵薄膜組件收納容器。 【先前技術】 器時製大ΐ積體電路等半導體或是液晶顯示 二用的位晶圓或气液晶用原板來製造圖案，惟此時 雜曾合@ # 12 '鮮(町⑽為光罩)若崎肺，則因為此 ，或使光偏轉’故除了所轉移的醜會變形，邊 ίί不IS:問ί;會跡尺寸、品質、外觀等都會有ί 日』作業通常是在無塵室内進行，但即便如此亦難隨 此，乃在光罩表面貼附上防雜質用的防塵 的圖案1¾•塵相組件上的異物就不會影響到轉印。 酸纖ίΐ^ί=ίί件係以具有良好透光性的硝化纖維素、醋 鋁2疋3 所構成的透明防塵薄膜，貼附或黏著在由 衫所構成的防塵薄膜框架的上端面。此外， f f賴框4下端’為了袋著在上 保濩黏者層之脫離層(分離部）。 的在 “此ϋ防麟廳件在軸於光罩後，雜具有防止显物從 難且係在密閉空間的内部之情形時，就 持高度的潔淨性ί伴i ’防塵薄膜組件本身當然要維 保S、運送日寸所使用的防塵薄膜組件收納容 201127718 器也強烈縣必财魏轉《料 之點如下：防止帶電性能佳、即使摩_:= 2 f而言，要求 盡量防止防塵薄膜組件及組成零件灰塵的材質、 力時的變形之高剛性的構造、材質。 、冓&、防止施加外 防塵薄膜組件收納容器通常是以 樹脂）、丙烯酸等之樹脂射出成型或 二稀-苯乙烯 或異物入侵的疑慮、即使形狀複=⑦=生 能降低成本。外觀的一例如圖7』置產性佳又 S 72^ΐ 5 在邊緣部相且f方塵薄膜組件收納容器本體 帶、略)或枝子73所扣接 長約〜300mm: 塵薄膜組件收納容器，外型邊 成。另-方面，主要内谷器通常是利用射出成型製造而 的大型防塵薄膜植件收納、上ϋ防f薄膜組件之邊長超過500職 稀-苯乙烯樹脂)、、^等入 11：；般/使用將顺丙稀腈丁二 在踨1考十夕i内席4 s成樹月曰片真空成型製成之物。此乃由於 脂产動的進模口將樹脂高速注入模具内之射出成型，樹 ==樹脂片覆蓋在模具上，僅憑抽真空即可使大 件固=膜=，’可依需要，裝上把手、防塵薄膜組。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] A semiconductor such as a large snubber circuit or a bit wafer for liquid crystal display or a liquid crystal liquid crystal is used to make a pattern, but at this time, Zaihehe @# 12 'Fresh (machi) is a mask. If Ruoqi lungs, because of this, or deflecting the light, the ugly will be deformed, and the ugly will not be IS: ask ί; the size, quality, appearance, etc. will be ί 日. The homework is usually dust-free. It is carried out indoors, but even if it is difficult to do so, it is attached to the surface of the mask with a dust-proof pattern for preventing impurities. The foreign matter on the dust-phase assembly does not affect the transfer. The acid fiber is a transparent dustproof film made of nitrocellulose and vinegar aluminum 2疋3 which has good light transmittance, and is attached or adhered to the upper end surface of the pellicle frame made of the shirt. Further, f f depends on the lower end of the frame 4 to separate the separation layer (separation portion) of the adhesive layer. In the case where the ϋ ϋ 麟 厅 在 在 于 于 于 于 于 于 于 于 于 于 于 于 于 于 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然 当然Maintenance S, the use of the dust-proof membrane module storage capacity 201127718 is also strong county must-finance Wei "material points are as follows: to prevent good charging performance, even if the friction _: = 2 f, it is required to prevent the dust-proof film as much as possible The material and the material of the dust that constitutes the part and the structure and material of the high rigidity of the deformation of the force. 冓&, the storage container for preventing the application of the outer pellicle is usually formed by resin injection of resin, acrylic or the like or dibenzo-benzene. Concerns about the intrusion of ethylene or foreign matter, even if the shape is complex = 7 = can reduce the cost. An example of the appearance is shown in Fig. 7 "Good productivity and S 72 ^ ΐ 5 at the edge portion and f dust film assembly container body belt, Slightly) or branch 73 is buckled to a length of ~300mm: Dust film assembly storage container, the outer side is formed. On the other hand, the main inner bar is usually made of large-sized dust-proof film implants manufactured by injection molding. f The length of the membrane module exceeds 500 grades - styrene resin), ^, etc. into 11:; general / use will be propylene acrylonitrile butyl 2 in the 踨 1 test ten eve i inside the seat 4 s into the tree 曰 真空 vacuum forming system The product is formed by the injection molding of the grease into the mold at the high speed of the injection mold. The tree == resin sheet is covered on the mold, and the vacuum can be used to make the large piece solid = film =, ' Install the handle and dustproof film set as needed
Si，因—般來說是用螺絲來實行。在以螺絲裝設的 Ξ乾】的ϋ曰ϊ物從間隙侵入’以及清洗時水會浸入，還 夾著塾圈)^’ ϊ以吾人所知之解決手段為例如：在螺絲的根部 災者，圈以订扣接的方式（參照專利文㈣。 …、、而’螺栓與J!具的嵌合部及表面微小的凹凸很難清洗，且 201127718 題點，故 =====合來取代二扣接之方=有=等 [習知技術文獻] [專利文獻] 專利文獻1:日本特開細8-216846號公報 【發明内容】 [發明所欲解決的問題] 本發明鑒於此問題，i目的^ ^ 器，即使將把手、防塵、^έ ι ^ 種防塵薄膜組件收納容 #^ι~^〇ί --Sir" 構件、補強構件中之任把手、防塵薄膜組件固定 薄膜組件收納容器本體與防塵脂製的防塵 容器本酸㈣敵件收納 或内虫 ΐί的ίίίί紋扣接機構係以成—體之樹脂覆蓋在外螺紋 令螺絲表©不露出在容器 "if ;?r 1 址件ί納容ίί::ίί;機構的樹脂’以與所接觸的防塵薄膜 °。體或疋Ρ方塵薄膜組件收納容器蓋體的材質有接著 201127718 性之樹脂為佳。另外， 將接觸部分周圍的間 ^情形為：在將功能性零件固定後， 產itr圍的黏著而覆蓋表面粗錄、 間障，二使’以溶解而密封 止從接著劑產生之氣 ^液^人、發生灰塵之外，亦可 [對照切之鮮’蚊㈣宜。 ΦSi, because it is generally implemented with screws. In the case of the screw, the sputum is invaded from the gap and the water will be immersed in the cleaning, and the shackles are also sandwiched. ^' 解决 The solution known to us is for example: at the root of the screw , the ring is bound by the way (refer to the patent text (4). ..., and 'the bolt and J! has a fitting part and the surface of the small concave and convex is difficult to clean, and 201127718 points, so ===== [Technical Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei No. 8-216846 [Draft of the Invention] [Problems to be Solved by the Invention] The present invention has been made in view of the above problems. , i purpose ^ ^ device, even if the handle, dustproof, ^ έ ι ^ kind of dust-proof film assembly storage capacity #^ι~^〇ί --Sir" component, reinforcing member of the handle, pellicle assembly fixed film assembly storage The container body and the dustproof container made of dustproof grease (4) The enemy piece storage or the inner worm ίίίί buckle fastening mechanism is made of the resin of the body to cover the external thread so that the screw table is not exposed in the container "if ;?r 1 Address member 纳纳容 ίί:: ίί; the resin of the mechanism 'with the contact with the dust-proof film °. The material of the body or the dust film assembly container cover is preferably the resin of 201127718. In addition, the case around the contact part is: after fixing the functional part, the adhesion of the itr The surface is covered with rough recording and barrier, and the second is to make the liquid produced by the adhesive from being dissolved and sealed, and the dust may be generated by the control.
Jr :裝在防塵薄膜組件收納容器時疋：:::2以 速、、以卜ΐ牙用接劍或有機溶劑固定接觸部時，可以防μ 、攻/乡入,、產生灰塵’轉防塵薄膜組件收納容器⑽的潔淨: 【實施方式】 样〜以下挪關來說日脉發明之防塵薄肋件㈣容器的實施 樣態，惟本發明不僅限於此。 …的只知 圖1係依本發明之防塵薄膜組件收納容器，此為適用 把手之防塵薄膜組件收納容器蓋體的實施樣態。 、σ 把手11，係於防塵薄膜組件收納容器蓋體1〇從外側插入六 承窩頭螺栓12 ’ ©定具13安|在其_。六角承窩頭螺检12， 亦可為六角螺栓等其他的頭部形狀。固定具13於内側設有金屬製 的螺帽部。固定具13，除了可以壓入並接合螺帽部而製造之外， 亦可不用金屬製的螺帽部，而將螺紋部直接設置在樹脂裡，或可 再採用螺蚊概套加工寺補強措施。 但是，最佳的實施樣態，是將螺帽插入以射出成型方式成一 體製造，其詳細為如圖3所示之構造。螺帽部3〇係將不鏽鋼、黃 銅等金屬切割加工而成，為了提高與其周圍之包覆樹脂體31的接 201127718 密接性，部3G的相宜施以滾紋法加工等使表面粗縫 ® ^ 32 i i ffl t IVI32 ： 地，採4面、6面、或^ 施樣悲中雖為雙面’惟理所當然 形狀=槽的形但是’因為有複雜 甲基丙1G _宜_驗(聚 醋）、pvc(聚氣二參苯乙_脂）、Pc(聚碳酸 明或半透明為±<jJlA 1 ;顏色，以可用肉眼辨識内容物之透 與防ii二ΐ收樹脂的材質，以採用 心鹿續，I t 體G具有接著性之材質為佳。例如， 10 abs(^^ 乙烯)等為i烯_本乙~_，或是PVC(職乙稀），聚苯 著性防塵薄膜組件收納容器蓋體10的接 ，由樹脂 在將把手η完全 細罐接合面紐的微= 祕卢ί的*痕專也以接著劑覆蓋，故可降低產生灰塵 如;:在防塵薄膜組件收納容器蓋體的材質使用ABS(丙 :前述接著劑可使用崎lic_A(商 μ 取代接著劑’而只塗佈將防塵薄膜組件收 、ί= i 疋具13的包_脂體—起溶解的有機溶劑。 後=固疋具'3周邊的剖面圖如圖5所示。塗佈在接線部14 的1機溶並溶解固定具13的包覆樹脂體31以及防塵薄膜 組件收納容器蓋體10’互相溶解接合的溶接部5〇會環繞在固定具 201127718 13的全部周圍產生。Jr : When installed in the dust-proof membrane module storage container, when the 疋:::2 speed is used, and the contact portion is fixed with the sword or the organic solvent, it can prevent μ, attack/home, and generate dust. Cleaning of the film module storage container (10): [Embodiment] The following is a description of the embodiment of the container of the dust-proof rib member (4) of the Japanese invention, but the present invention is not limited thereto. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a dust-proof membrane module storage container according to the present invention, which is an embodiment of a dust-proof membrane module storage container lid to which a handle is applied. The σ handle 11 is attached to the pellicle assembly container cover 1 and is inserted into the six socket head bolts 12' from the outside. The hexagonal socket head thread inspection 12 can also be other head shapes such as hexagon bolts. The fixture 13 is provided with a metal nut portion on the inner side. The fixing tool 13 can be manufactured by pressing and engaging the nut portion, and the screw portion can be directly disposed in the resin without using a metal nut portion, or the temple reinforcement can be processed by using the screw mosquito cover. . However, the best mode of implementation is to insert the nut into a single body by injection molding, which is detailed in the configuration shown in Fig. 3. The nut portion 3 is formed by cutting a metal such as stainless steel or brass, and in order to improve the adhesion of the coating resin body 31 to the surrounding coating structure 201127718, the portion 3G is suitably subjected to a knurling process to make the surface rough seam® ^ 32 ii ffl t IVI32 : Ground, picking 4 faces, 6 faces, or ^ Sorrow is a double-sided 'for the sake of the shape of the shape = groove shape but 'because of the complex methyl propyl 1G _ should be tested (poly vinegar ), pvc (polyglycol diphenyl phenyl ether), Pc (polycarbonate or translucent is ± < jJlA 1 ; color, can be used to identify the contents of the transparent and anti- ii two resin materials available to the naked eye It is better to use the material of the deer, and it is preferable that the material of the I t body G has an adhesive property. For example, 10 abs (^^ ethylene) is i ene _ _ B _ _, or PVC (ethylene), polystyrene dustproof The connection of the film assembly container lid body 10 is covered by a resin in the micro-contour of the handle η completely thin can joint surface, so that the dust can be reduced, such as: The material of the container lid is made of ABS (C: the above adhesive can be used with the lic_A (commercial μ instead of the adhesive agent) and only the coating will be dust-proof. The component receives, ί= i the package of the cookware 13 - the fat body - the dissolved organic solvent. The cross section of the rear = solid cooker '3 is shown in Fig. 5. The machine coated in the wiring portion 14 dissolves and dissolves. The sealing portion 5 of the covering resin body 31 of the fixture 13 and the pellicle assembly container lid 10' are mutually dissolved and joined around the fixture 201127718.
^藉由前述方式，除了可以完全防止清洗水從固定呈1 $組件收納容器蓋體1G之間的間隙浸入之外，還可 隙產生灰塵以及達成洗淨㈣提升。另外，藉域只 U ，之方式’旨溶解接合後，因為所塗佈之有機溶劑會氣化，、^ 面完全消失，故可完全防止從接合成分纽之氣體所造成 關於該溶劑之例子’例如，於防塵薄膜組件收納容哭 固定具13的包覆樹脂體的材質使用ABS(丙烯腈_丁二苯乙榭 脂)之情形時’雜劑以使用MEKCT㈣等為佳。此選擇只要按照 使用的材質，考慮溶解性、蒸氣壓、沸點等做出適當選擇即可: △圖2揭示將補強體安裝在防塵薄膜組件收納容器本體 樣態。補強體21是由從容器本體外側插入的六角承寫 、 巧定具23所固定的。此固定具23的詳細構造 巾i部30设在4個地方。 '、By the foregoing manner, in addition to completely preventing the washing water from being immersed in the gap between the fixed and the 1 1 component storage container lids 1G, dust can be generated and cleaned (4) can be achieved. In addition, the method of "only U" means that after the dissolution of the bonding, since the organic solvent to be coated is vaporized, the surface completely disappears, so that the example of the solvent caused by the gas of the bonding component can be completely prevented. For example, when ABS (acrylonitrile-butadiphenyl epoxide) is used as the material of the coating resin body in which the dust-proof film module is housed in the crying fixture 13, it is preferable to use MEKCT (four) or the like as the dopant. This selection can be appropriately selected in consideration of solubility, vapor pressure, boiling point, etc. according to the material used: Δ Figure 2 discloses the attachment of the reinforcing body to the body of the pellicle container storage container. The reinforcing body 21 is fixed by a hexagonal writing and customizing tool 23 inserted from the outside of the container body. The detailed construction of the fixture 23 is provided in four places. ',
-於本Ϊ施樣態中，亦宜選擇與有關前述防塵薄膜組件收納容 器^體的實施態制樣的包频雜31的材質。而縣固定後的 固定具23與防塵薄膜組件收納容器本體2〇的接線部％採接著劑 接合，或更宜用有機溶劑來接合。 【實施例】 以下說明本發明之實施樣態，惟本發明不僅限於此。 [實施例1] 使用厚度3mm的透明ρμμα(聚曱基丙烯酸曱酯)片材，藉由 真空成型法形成外型19004750^，高度18〇mm之如圖i所示 =狀的防塵薄膜組件收納容器蓋體1〇，將外圍部以NC起槽機施 仃精加工至既定尺寸，並以機械加工形成把手11的安裝孔。 另/卜二以射出成型方式製造如圖3所示之構造的固定具13。 内侧設有黃銅製的螺帽部30，將此螺帽部插入，並使用黑色 ABS(丙稀腈-丁二烯_苯乙烯樹脂)以射出成型方式形成包覆樹脂 體。在此’將包覆樹脂體31定為黑色，係為求易於觀察表面附著 201127718 之異物，及基於避免從外面看到插入内部的螺帽部3〇之外觀上的 另外’把手丨1係以加入玻璃強化纖維之八38(丙烯腈-丁二 苯乙烯樹賴⑽賴。並將相定具13與把手n以不 角承窩頭螺栓12(M8x30mm)鎖緊，另外在固定具13與 ^ 組件收納容器蓋體10的接觸部上，利用微注射器（圖示省3 有機溶劑_幻不留間隙地塗佈在接線部μ的全 全乾燥。 固便具元 之後，使用介面活性劑、純水、PVA(聚乙稀 =^膜組躲絲Μ前㈣洗猶淨，並 目、凡王乾燥。將此防麟膜組件收納容器蓋體的把手⑺以 5 13的附近於暗室内一邊使用聚光 ^ Ϊ態但於其周圍看不到間隙、辩污、附著異物等，係非ί潔= 【比較例】 製作了-外型為與前述實施例相同外型、 手之ff賴組件收納容器蓋體。該把手部附近的剖面二、2 製的六_頭螺栓不鏽鋼 之材質，為求具有良好的(密^封塾圈62 度定為2mm。 。職蛛用PTFE(t四既乙婦），厚 二防^薄膜組件收納容器蓋體ω 洗、乾無後，於暗室内—邊使 」樣方式清 察把手部附近。结果，降:’且(先里〇萬Lx)照射一邊觀 孔内有許多1物之^，_= 見六角承窩辆栓的外周以及六角 件收納容n蓋體1Q的融 Μ封墊圈62與防塵薄膜組 呈現難以稱之域淨之狀1。有洗淨水滲出並乾燥的痕跡(鱗污）， 201127718 【圖式簡單說明】 圖1係本發明之防塵薄敵件收納容紅 示把手安裝後之態樣的平賴與A—m剖蝴斷械’顯 一圖2係本發明之防塵薄敵件收納容器之另 顯示補強體安紐m的平面圖與B_B線 只β〜 圖2係本發明之固定具之一種實施形態θ° 平面圖與C—C線剖面圖。 只卞早一固疋具之 圖4係本發明之固定具之另—種實獅g 螺帽部的例子之平關與D—0線剖面圖。如⑦有複數的 圖5係本，明固定具附近的剖面概略圖。 圖ό係顯示依先前技術的把手安裝 圖7係顯示防塵薄膜組件收納容器明圖。 【主要元件符號說明】 10、 72〜防塵薄膜組件收納容器蓋體 11、 61〜把手 12〜六角承窩頭螺栓 13、 23〜固定具 14、 24〜接線部 20、71〜防塵薄膜組件收納容器本體 21〜補強體 22、63〜六角承窩頭螺栓 30〜螺帽部 31〜包覆樹脂體 32〜平面部 50〜溶解部 62〜密封墊圈 73〜夹子In the present embodiment, it is also preferable to select a material of the package frequency 31 which is prepared in accordance with the embodiment of the above-mentioned pellicle assembly container. On the other hand, the fixing member 23 after the fixing of the county is joined to the wiring portion of the pellicle assembly container main body 2 by an adhesive, or more preferably by an organic solvent. [Embodiment] Hereinafter, embodiments of the present invention will be described, but the present invention is not limited thereto. [Example 1] A transparent ρμμα (poly(mercapto yttrium acrylate) sheet having a thickness of 3 mm was used, and a dust-proof film assembly of the shape of a shape of 1, 1900, 750, and a height of 18 mm was formed by a vacuum molding method as shown in FIG. The container cover 1〇 is finished, and the peripheral portion is machined to a predetermined size by an NC grooving machine, and the mounting hole of the handle 11 is machined. Alternatively, the fixture 13 of the configuration shown in Fig. 3 is produced by injection molding. A brass cap portion 30 is provided on the inner side, and the nut portion is inserted, and a coated resin body is formed by injection molding using black ABS (acrylonitrile-butadiene-styrene resin). Here, 'the coated resin body 31 is made black, which is a foreign matter for easy observation of the surface adhesion 201127718, and another 'handle 丨 1 for avoiding the appearance of the nut portion 3〇 inserted into the inside from the outside. Add the glass reinforced fiber of the eight 38 (acrylonitrile-butylene styrene tree (10) Lai. and lock the phase set 13 with the handle n with the non-corner socket head bolt 12 (M8x30mm), in addition to the fixture 13 and ^ assembly The contact portion of the container lid body 10 is coated with a micro-syringe (the organic solvent is not applied to the entire portion of the wiring portion μ.) After the solid component, the surfactant, pure water is used. , PVA (polyethylene = ^ film group to avoid silk before the sputum (four) washes the net, and the eyes, the king is dry. The handle (7) of the anti-lens module storage container cover is used in the vicinity of the dark room in the vicinity of 5 13 Light ^ Ϊ 但 但 但 但 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 看不 【 【 【 【 【 【 【 【 【 Cover body. Section II, 2, 6-head bolt stainless steel near the handle Quality, in order to have a good (closed 62 degrees of the ring is set to 2mm. PTFE (t four women), thick two anti-film module storage container cover ω wash, dry no after, In the dark room, the side of the hand is inspected in the vicinity of the handle. As a result, the drop: 'And (the first Lie Wan Lx) is illuminated while there are many objects in the hole, _= see the outer circumference of the hexagonal socket bolt and The fused packing gasket 62 and the dustproof film group of the hexagonal housing accommodating cover 1Q are in a difficult shape to be called 1. The washing water is oozing and drying (staining), 201127718 [Simplified illustration] 1 is the dust-proof and thin enemy part of the present invention, and the red-handed display of the handle is mounted on the side of the handle and the A-m is cut off and the mechanical device is shown. FIG. 2 is another display reinforcing body of the dust-proof and thin enemy storage container of the present invention. The plan view of Annu and the B_B line are only β~ Figure 2 is an embodiment of the fixture of the present invention. The θ° plan view and the C-C line cross-sectional view. Fig. 4 of the present invention is a fixture of the present invention. The other is a kind of example of the lion g nut part and the D-0 line profile. If there are multiple figures in Figure 5, the vicinity of the fixed fixture Fig. 7 shows the handle of the dustproof film unit storage container. Fig. 7 shows the outline of the dustproof film unit storage container. [Main component symbol description] 10, 72~ PSA assembly container cover 11, 11 to handle 12 〜 hex socket head bolts 13, 23 to fixtures 14, 24 to wiring portions 20, 71 to pellicle assembly container body 21 to reinforcing body 22, 63 to hex socket head bolt 30 to nut portion 31 to coated resin body 32 to flat portion 50 to dissolution portion 62 to sealing gasket 73 to clip