TW201127500A - Droplet discharge device and method for controlling droplet discharge device - Google Patents

Abstract

A droplet discharge device is adapted to perform drawing of droplets of functional liquid from a functional droplet discharge head onto a workpiece in a drawing area, and to perform discharge inspection of the functional droplet discharge head in an inspection area. which is separated from the drawing area. The droplet discharge device includes a positioning stage, a flushing unit and an inspection stage disposed in this order along a common movement axis passing through the drawing area and the inspection area so that the inspection stage is disposed at a position closer to the inspection area. An image recognition device is disposed in the inspection area. A movement mechanism is arranged to move the positioning stage, the flushing unit and the inspection stage along the common movement axis. The movement mechanism is arranged to move the inspection stage independently of the positioning stage and the flushing unit.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a droplet discharge which performs drawing of a workpiece by a functional liquid droplet ejection head and inspection of a function liquid droplet ejection head on a common moving axis. The device and the method of controlling the droplet discharge device. [Prior Art] As such a droplet discharge device, a device for performing discharge inspection of a functional liquid droplet ejection head in material removal supply of a workpiece is known (refer to Patent Document 1P / The droplet discharge device includes: An X-axis table that moves the workpiece set on the workpiece table in the x-axis direction, a Y-axis table that is disposed across the x-axis table, and a Y-axis table that has a plurality of functional droplet ejections The first two groups of the head =:: On the table of the Γ axis, except for the workpiece table, it moves freely. The dry material from the functional droplet discharge head is sprayed out: it is received by the functional droplet discharge head. The pre-spraying is called the periodic flushing of the sheet, and the rail part of the pumping table is provided with an image unit for performing image recognition on the inspection spray to check the spray point. == Table and γ-axis table and table area Set the liquid area of the discharge function to the area of the self-draw area _ direction deviation. There is one piece of material or material cutting for the workpiece. If the workpiece is moved to the alignment position f via the setting table, a flushing box Move to the function of the nozzle tip (bay unit: set Period == fixed (four) washing the box - single: taking down =, in this state, the material removal supply and alignment of the workpiece is performed 150865.doc 201127500 (material removal supply action), and the fragrance is removed and the material is removed During the supply, the implementation of the self-functioning droplets will be carried out, and the image recognition (slipping inspection) of the camera sheet will be carried out. [Technical Document] [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-6212 [Draft] [Problems to be Solved by the Invention] However, in the case of such a droplet ejected, "in the device" The workpiece table and the periodic material are included in the description data: the ejection is performed by the inspection image (the ejection inspection) after the inspection operation, and the storage is performed. The child is restrained during the period when the material of the workpiece is only enough for the supply operation of the workpiece. "For a. This is because the inspection time is longer than the supply time of the supply action. On the contrary, if The process of processing the leather parts is to be right-handed and In the case of the sequence operation time, there is a problem that the content is temporally constrained. The object of the present invention is to provide a control method such as a ^^rr von blasting device and a droplet ejector device: first, the slanting 33 λ# The township a affects the operation time of the processing of the parts and is not affected by the time constraints. The ejection of the droplets of the droplets can reduce the working time of the workpiece processing and fill the nozzles to ensure the ejection of the droplets of the target. [Injection inspection time of the head. [Technical means for solving the problem] <single unit> The droplet discharge device of the present invention is characterized in that the workpiece is moved in the drawing area J50865.doc 201127500 - the side drive function liquid droplet ejection head Performing a drawing inspection on the workpiece, and performing a discharge inspection of the functional liquid droplet ejection head in the inspection area where the self-centering area deviates from the moving direction of the guard; #包括: setting table on which the workpiece is set; the flushing unit, The pre-discharge from the functional liquid droplet ejection head is received on the inspection area side with respect to the setting table; the inspection table is disposed in the inspection area _ with respect to the flushing unit, and the receiving is received from (4) The inspection sheet for the inspection of the droplet discharge head; the image recognition mechanism, 1 is disposed in the inspection area to perform image recognition on the inspection result of the inspection sheet; and (4) a mechanism for setting the table, The rinsing unit and the inspection table move on a common moving axis extending between the drawing area and the inspection area; and the moving mechanism is configured to allow the inspection table to move individually with respect to the setting table and the rinsing unit. According to the configuration, the setting table, the rinsing unit, and the inspection table are movably slid in accordance with the order from the drawing area side to the moving axis extending between the drawing area and the inspection area, and the image recognition means is disposed in the inspection area. Further, the inspection table is configured to be movable individually with respect to the setting table and the flushing unit. Therefore, after the inspection table is inspected and ejected in the drawing area, the inspection table is faced to the image recognition mechanism, and the ejection inspection of the functional liquid droplet ejection head is performed (the image recognition is wide, but the ejection inspection can be performed in parallel with the ejection inspection. The setting table faces the (4) zone to perform the drawing and the material droplet ejection head is facing the flushing unit to perform the pre-centering (maintenance) when the material is removed from the workpiece, but the material may be given the required time for yesterday. The test droplets are ejected and the inspection time is ejected, and the use of H does not affect the processing time of the workpiece processing and is not subject to time constraints, and the ejection inspection of the functional droplet ejection head can be performed. 150865.doc 201127500

In this case, the moving mechanism is preferably configured to allow the flushing unit to be individually moved relative to the setting table and the inspection table. According to the configuration, when the material is removed from the workpiece, the functional liquid droplet ejection head can be relatively Pre-discharge is performed for the flushing unit. The functional liquid droplet ejection head can be maintained in a good state due to &amp; when the material of the workpiece is removed and supplied. Moreover, it is preferable to observe the area from the drawing area, and set a secondary maintenance area for the maintenance inspection table in front of the inspection area; the movement axis is extended to the secondary maintenance area beyond the inspection area, and the μ, the ice, the female i The liquid droplet ejecting apparatus further includes: a main chamber 'which covers the drawing area and the inspection area; and a sub-chamber which covers the sub-maintenance area. According to this configuration, the inspection table autonomous chamber in which the inspection sheet is mounted can be moved to the sub-chamber □ to perform maintenance work such as replacement of the inspection sheet. Thereby, the maintenance of the inspection table can be performed without affecting the drawing operation in the main chamber. On the other hand, preferably, in the inspection of the functional liquid droplet ejection head, there is a function in the liquid droplet ejection head. The discharge failure inspection for inspecting the discharge failure of each of the discharge nozzles and the discharge amount inspection for inspecting the discharge amount of the functional liquid from each of the discharge nozzles'. The liquid discharge device further includes a pair of functional droplets a control unit for controlling the discharge head, the image recognition unit, and the moving mechanism; and the control unit performs a first inspection discharge for performing the discharge failure inspection on the inspection sheet and a second inspection spray for performing the discharge amount inspection And the image recognition of the discharge result of the discharge and the image recognition of the discharge result of the second inspection discharge. 150865.doc 201127500: Invented in the painting action can be implemented in the function of the liquid droplet nozzle inspection -. That is, it is possible to sufficiently ensure the time for the discharge inspection to be performed: in addition to the discharge failure inspection of the discharge head, it is also possible to check the inspection result by the quality of the drawing and the yield of the workpiece. In the same manner, it is preferable to perform the ejection of the ejection failure of each of the ejection nozzles in the inspection of the functional liquid droplet ejection head: = amount = discharge amount of the functional liquid from each ejection nozzle Inspection of the discharge amount of the inspection; the inspection table includes a first inspection table on which the first inspection sheet for performing the second inspection discharge is mounted, and a second inspection table for performing the discharge amount inspection. Check the second inspection table of the second inspection sheet of the mouth; the image recognition mechanism includes the first inspection of the first inspection table! ejection,. The first image recognition unit that performs image recognition and the second image identification element that performs image recognition on the second inspection discharge result of the second inspection station are based on the configuration 'by the first inspection station (first The inspection sheet is subjected to the first inspection discharge for performing the discharge failure inspection, and the second inspection chamber (the second inspection sheet) receives the second inspection discharge for performing the discharge amount inspection. The discharge pattern of the discharge amount inspection is not restricted to each other. Moreover, the control system for performing the discharge inspection can be simplified at the same time. It is also preferable to use the second inspection sheet with respect to the frequency of replacement of the first inspection sheet. The replacement frequency is set to be higher; on the moving axis, the first inspection table and the second inspection table are arranged in the order from the setting table side; and the moving mechanism is configured to allow the first inspection table and the second inspection to be performed. According to this configuration, since the frequency of replacement of the first inspection sheet and the second inspection sheet are different, the winding timing, replacement order, and the like of the inspection sheet can be individually adjusted. Replace the second inspection station with a higher frequency Since it is disposed at the outermost end with respect to the moving shaft, the first inspection sheet is not inconvenienced when the second inspection sheet is replaced. The control method of the droplet discharge device of the present invention is characterized in that it includes one side. The drawing area for driving the functional liquid droplet ejection head while moving the workpiece, and the inspection area for performing the discharge inspection of the functional liquid droplet ejection head at a position shifted from the drawing area to the moving direction of the workpiece A setting table for setting a workpiece and a check σ for receiving inspection ejection from the functional liquid droplet ejection head are mounted on a common moving axis extending between the drawing area and the inspection area, and the inspection result of the inspection table is arranged in the inspection area. An image recognition mechanism for image recognition; before the workpiece is to be traced, the inspection table is inspected and ejected in the drawing area; thereafter, the inspection table is moved to the inspection period during the tracing of the workpiece in the drawing area In the area, image recognition by the image recognition means is performed on the inspection discharge result. According to this configuration, the function can be performed on the drawing of the workpiece. Since the discharge inspection (image recognition) of the droplet discharge head is sufficient, the time for performing the discharge inspection is sufficient. Therefore, the functional liquid can be implemented without affecting the working time of the workpiece processing step and without being restricted by time. The discharge inspection of the droplet discharge head. <Double stage> Another droplet discharge device of the present invention is characterized in that the functional droplet discharge head is driven to move the workpiece while moving the workpiece in the drawing area. Drawing 150865.doc •10· 201127500 The 昼 action removes the supply area from the two materials that are offset from the outside of the workpiece to the moving direction of the workpiece, alternately performing the material removal supply of the workpiece, and removing the moving direction of the supply area to each material. The two inspection areas that are laterally offset, alternately perform the discharge inspection of the functional liquid droplet ejection head by image recognition; the method includes: a pair of setting stations, which are set with a workpiece; a pair of inspection σ, It is disposed outside the setting table and receives inspection and ejection from the functional liquid droplet ejection head; a pair of image recognition mechanisms are arranged in each inspection area to check the inspection table. Checking the ejection result for image recognition; and moving the mechanism to freely move one of the setting stations between the drawing area and one of the material removal supply areas, and to remove the supply of the other setting table in the drawing area and the other side The area moves freely, and one of the inspection stations moves between the tracing area and the inspection area, and the other inspection table moves between the tracing area and the other inspection area. In the case of a crucible, the droplet ejecting apparatus of the present invention preferably further comprises a functional liquid droplet ejection head, a control mechanism for controlling the image recognition mechanism and a pair of moving mechanisms, and the control mechanism is configured to make a pair of settings. The table is alternately moved between the tracing area and each material removal supply area to alternately perform the drawing action; and the pair of inspection tables are alternately moved between the tracing area and each inspection area to perform the tweaking operation. According to this configuration, the pair of set areas are moved to alternately perform the inspection and ejection of the scanning area and the inspection area, and the ejection inspection table is in the tracing area. And the material removal supply 昼 action, and a pair of inspection stations are alternately implemented in conjunction with the drawing action. Thereby, the tracing action of the 150865.doc • 11 · 201127500 workpiece and the ejection inspection of the functional liquid droplet ejection head can be alternately and continuously performed. In addition, if the inspection of the inspection table of the counter-side is immediately moved to the inspection area, the image recognition mechanism of one side is implemented during the drawing of the workpiece of the setting table of the opposite side. It is done. When the time for the discharge inspection is ensured, then in the drawing operation for the other side, the time for the discharge inspection can also be utilized. Therefore, the operation time of the drawing operation with respect to the workpiece can be shortened, and the time of the discharge inspection can be filled. Further, the moving mechanism preferably moves the set table and the inspection table on a common moving axis. 'According to this configuration', the structure of the mobile system in the inspection station can be simplified. Further, it is preferable to use a linear motor in the moving mechanism. Moreover, it is preferable that the control means is in the drawing area, and each setting table is reciprocated in the moving direction for a plurality of times to perform the drawing operation; and the first movement of the reciprocating movement is synchronized with the moving operation to move the inspection table from the inspection area to the drawing area. Spray out by inspection. In the case of 11 2 °H, the control mechanism preferably moves the inspection area from the tracing area to the inspection area to perform the discharge inspection after the inspection is performed. according to. In the case of the Hai, etc., the inspection can be performed without affecting the drawing operation, and inspection ejection reflecting the actual drawing condition can be performed. The y-test-spray is performed at the beginning of the drawing operation to ensure sufficient spraying time. Preferably, the control means preferably completes the discharge inspection until the drawing operation is completed with the inspection. 70 150865.doc 201127500 According to this configuration, the inspection result of the discharge inspection can be reflected in the next drawing operation, so that the yield can be improved. Similarly, the control means preferably completes the discharge inspection until the tracing operation is completed and the tracing operation is completed. ::°H consists of a high-precision discharge inspection that takes a long time without the need to process the workpiece (drawing operation). In another aspect, it is preferable that the liquid droplet ejecting apparatus of the present invention further comprises: being disposed in each material removing supply region and performing work; and removing one of the materials to remove the supply mechanism and the batch structure; Shift::: system - removes the supply of the material from the supply machine. ::: Composition, which can continuously carry out the material 2, ·, relative to the workpiece of the setting table. 1' can be handed over # continuously to perform drawing operations and work on the workpiece). Therefore, the workpiece processing can be performed in two ways (the liquid droplet ejection device of the present invention is preferably disposed between: and receives a single pre-spray from the functional liquid droplet ejection head In the case of the first:: domain = structure, the flushing unit can be removed from the two materials, and even if the spraying operation is temporarily stopped, the drawing can be realized. Situation ψ 55 Λ ” The yoke comes from the functional droplet 喑:: squirting, so as to maintain the discharge performance of the functional droplet 嗔 。. Z is enough to use the rinsing unit, and is implemented in the squirting (pre-drawing). Pre

150865.dOC •13· 201127500 Similarly, it is preferable that the droplet discharge device of the present invention further comprises a pre-sprayed single from the functional liquid droplet ejection head disposed outside the moving direction of the inspection table. - a flushing unit; the moving mechanism is configured to move the flushing unit between one of the inspection areas and the tracing area. ^虞^ constitutes a flushing unit, and is configured to be placed at the outermost end of the moving direction of the guard to perform maintenance of the flushing unit regardless of the drawing action. Similarly, it is preferable that the droplet discharge device of the present invention further includes a pre-discharge from the functional liquid droplet ejection head on the inner side in the moving direction of each setting table, and a moving unit configured to be Each flushing unit moves integrally with each setting station. According to the § 玄 configuration, even if the road 4 μ, +, ', 丨, the above-mentioned discharge inspection result is NG, etc., temporarily stop the drawing operation ,., ε 卞 11 shape, can also be applied from the function droplet Pre-spraying, so that the performance of the spray from the At, -T, (10) work & droplet discharge head is again, which is enough to use the flushing unit, which is only the spurt that he started at the beginning of the talent painting (draw Before flushing). And set the $ to simplify each flushing unit and each setting I second. Going again, ::, soil σβ _ , early 兀 can be mounted on the setting table or connected to the setting table. Moreover, it is preferable that the droplet ejection device of the present invention further comprises a material disposed on a pair: two = the weight of the functional liquid ejected from the functional liquid droplet ejection head: two: a table; a moving mechanism In order to allow the weight measurement table to be removed from the supply area. According to this configuration, when the function needs to be ejected, and when the replacement is performed (the tray is replaced), the weight of the 贝 忐 忐 忐 J J J J J J J , , , , , , ' ' ' ' ' ' ' ' ' ' ' ' ' Improve productivity. 150865.doc 14 201127500 Preferably, the liquid droplet ejection device of the present invention further comprises a single weight of the weight of the functional liquid which is disposed outside the moving direction of the (4)-square inspection ·. In order to make the weight measuring station check on one side:: the table; the moving mechanism is constructed according to this configuration, and the weight 2: = 昼 is moved between regions. : Hunting can be performed on the weight measuring table without regard to the drawing operation. [Embodiment] A droplet discharge device and a method for manufacturing the same according to the present invention will be described with reference to the accompanying drawings. The liquid droplet ejecting device is incorporated in a production line of a flat panel display, for example, using a functional liquid droplet ejection method in which a special liquid or a luminescent liquid resin liquid, that is, a functional liquid is introduced, to form a color light-emitting sheet or Organic EL (EleetrQlumineseence, light-emitting elements of each pixel of the electro-acoustic device, and functions in parallel (4) function maintenance of the ejection head. Function recovery (maintenance). &lt;First embodiment: single unit&gt; As shown in FIG. 1, the droplet discharge device includes an X-axis table 2' extending along the X-axis direction which becomes the main scanning direction at the time of the welfare and moving the workpiece in the direction of the parent axis to cross the X-axis table 2 The cymbal table 3 extending in the direction of the x-axis direction in the sub-scanning direction during the drawing is movably mounted on the γ-axis table 3 and each of which is provided with a plurality of (12) functional liquid droplet ejection heads 8 η carriage units 4. The droplet discharge device ' selectively drives the discharge function droplet discharge head 8 in synchronization with the drive of the shaft table 2 &amp; γ-axis table 3, thereby depending on the specific The tracing pattern traces the workpiece W. Furthermore, the bracket The unit 150865.doc -15-201127500 4 is only shown in each of the figures, and the functional liquid droplet ejection head 8 is shown in Fig. only for each of the carrier units 4 in each drawing. The droplet discharge device 1 includes: a maintenance unit $ having a suction unit u, a wiping unit 12, and a rinsing unit 3 and maintaining a function liquid droplet ejection head 8, and having an inspection table 14 and an image recognition unit 15 (Fig. The discharge inspection device 6 that performs the discharge inspection of the discharge of the functional liquid droplets 11 is disposed in the maintenance area 22, which will be described later, by the suction unit 11 and the wiping unit 12, and the rinsing unit 13 and the inspection table 14 are freely movable. The image recognition unit 15 is disposed between the drawing area 21 and the inspection area 23 to be described later, and the image recognition unit 15 is disposed in the inspection area. Further, the droplet discharge apparatus L includes control (four) of the collective control of the constituent apparatuses (omitted) Illustrated), and includes a chamber for accommodating the constituent devices to 7. The chamber 7 has a prefabricated clean shed form, and the interior thereof is constantly ventilated to reconcile the internal environment to a fixed temperature, etc. on the X-axis table 2 and the cross-section of the axis table 3 is set to work (4) The drawing area 21 of the line drawing process is provided with a maintenance area 22 in which the suction unit u and the wiping unit 12 are disposed in the moving area of the γ-axis table 3 which is deviated from the drawing area 21 in the γ-axis direction. X, in self-drawing The area 21 is shifted to the X-draw direction, and the movement area of the square table σ is set with the inspection area 23 in which the discharge inspection device 6 is disposed, and the other movement area is provided with material removal for material removal supply of the workpiece W. The supply area 24. The X-axis table 2 includes: one of the X-axis guides 31 (moving axis) that is extended in the direction of the parent axis, and is mounted on the X-axis rail 31 and adsorbs the workpiece w. a setting movement mechanism for moving the setting table 32 along the revolving guide rail 31 to move the intermediate washing unit 13 along the X-axis guide 31 to the flushing movement mechanism I50865.doc 201127500 34, and to cause the inspection table 14 along the X-axis guide rail 3 1 moving table moving mechanism 35 ° setting table moving mechanism 33, flushing moving mechanism 34 and inspection table moving mechanism 35 are constituted by linear motors having three sliders corresponding to the mechanisms, setting table 32, flushing unit 13 and the inspection table 14 is configured to be Move individually on the X-axis guide 31. Further, the pair of X-axis guide rails 3丨 extend so as to cut the supply region 24, the drawing region 21, and the inspection region 23 by the longitudinal cutting material. Further, in the present embodiment, the moving mechanism mentioned in the technical solution of the present invention is The setting table moving mechanism 33, the flushing moving mechanism 34, and the inspection table moving mechanism 35 are included. Further, the setting table 32 and the rinsing unit 13 may be integrally moved by a single slider (not shown). The Y-axis table 3 includes a pair of vehicle guide rails 41 extending in the γ-axis direction across the pallet table 2. A plurality of bridge plates (not shown) that are mounted on the pair of X-axis guide rails η and each of the bracket units 4 are erected, and a plurality of carriages 4 are moved along the γ-wheel guide 41 via the respective bridge plates. The carriage moving mechanism 42. The carriage moving mechanism 42 is constituted by a linear motor having a plurality of sliders corresponding to a plurality of bridges of a plurality of bracket units, and is configured such that the unit 4 can be individually moved (also a bracket unit) 4 becomes one and moves). Further, the 斟ν红道 to the maintenance area is called, and the Ymr (four) traces the area 21 and extends out of the weiser unit. 4) In addition to the description, the functional droplets are sprayed toward the maintenance area 22. In addition, the brackets are raised during maintenance.

R frame early 7L4 includes head unit (provincial display. GBC-M.Yi6 color 夂乂颂 夂乂颂 兀 兀 兀 兀 兀 兀 兀 兀 兀 兀 兀 8 8 8 8 8 8 8 、 、 、 、 、 、 、 、 、 、 、 8 8 8 8 8 8 8 Each of the functional liquid droplet ejection heads 8 is divided into two groups to support the top plate every six. Further, each of the carriage units 4 includes a crucible rotating mechanism that supports the head unit in a rotatable direction in the θ direction, and The head unit is supported by the hanging members of the bridge plate (all are omitted). Further, the number of the tray units 4 and the number of the functional liquid droplet ejection heads 8 mounted on the respective tray units 4 are arbitrary. As shown in Fig. 2, the functional liquid droplet ejection head 8 includes a functional liquid introduction portion 51 having two rows of connection pins 54, a two-row head substrate 52 connected to the functional liquid introduction portion 51, and a head substrate 52 connected to the functional liquid. The head main body 53. The functional liquid introduction unit 51 receives the supply of the functional liquid from the functional liquid supply device outside the drawing. The head main body 53 includes a two-stage pump unit 55 composed of a piezoelectric element or the like, and has a plurality of sprays formed thereon. The nozzle plate % of the nozzle face 58 of the nozzle 57. The plurality of ejection nozzles 57 formed in the nozzle plate 56 The nozzle rows 59 are formed in two rows at equal intervals, and the two nozzle rows 59 are arranged parallel to each other and displaced by a half nozzle pitch. The functional liquid droplet ejection head 8 drives the driving waveform from the control device via the head substrate 52. The pumping unit 55 (piezoelectric element) is applied to each of the discharge nozzles 57 to discharge the functional liquid. Further, in the first inspection discharge for inspecting the leak point or the flight bending, the nozzle row 59 is used. The unit inspects and discharges the functional liquid, and in the second inspection discharge for measuring the discharge amount, the discharge position is shifted, and the functional liquid is discharged plural times in the nozzle row 59. The suction is disposed in the maintenance area 2 2 The unit 丨丨 includes the same number of individual suction units Ua as the plurality of carriage units 4. The respective suction units include a cover unit having two hoods corresponding to the twelve functional liquid droplet ejection heads 8, and The suction mechanism connected to the cover unit and the lifting mechanism for raising and lowering the cover unit (all are omitted). The individual suction unit Ua is used for storage. The function liquid suction I50S65.doc •18· 201127500 Departure location, and head unit The cover unit is lifted and lowered in three stages between the replacement positions of the consumables for replacement or replacement of the cover unit. The wiping unit 12 is disposed between the tracing area 21 and the suction unit u, and includes: winding the wiping sheet into The take-up reel of the 轺i shape, the take-up reel from which the wiping sheet drawn from the take-up reel is taken up, and the squeezing roll which is erected between the two reels and pressed toward the functional liquid droplet ejection head 8 ( The wiping unit 12 is configured to press the wiping sheet to the functional liquid droplet ejection head 8' via the pressing roller, and move the wiping sheet to move in the X-axis direction as a whole, thereby wiping each of the wiping units. The function of the liquid droplet ejection head 8 of the nozzle surface is Μ. The flushing unit 13 is disposed on the inspection area 23 side with respect to the setting table 32, and is slidably supported by the X-axis guide rail 31 by the flushing movement mechanism 34. The rinsing unit 13 includes: a rinsing tank that receives the functional liquid ejected from the functional liquid droplet ejecting head 8, and sucks and removes the absorbing and discharging mechanism of the functional liquid accumulated in the rinsing box (all of which are omitted). The flushing sheet (four) receives the pre-spraying (flushing) from the functional liquid droplet ejection head 8 when the material of the jade material is removed, and the functional liquid ejection from the functional liquid droplet ejection head 8 is stabilized. In addition, although the illustration is omitted, the two ends of the setting table 32 in the x-axis direction are S &amp;# -

Self-moving and moving movements The drip-free head 8 receives flushing. The inspection area 23 (the main image recognition unit 15) disposed in the area of the self-drawing area 21 is disposed under the positive inspection 150. After that, it moves to directly below the image recognition unit 15 for image recognition. The inspection table 14 is disposed on the inspection area 23 side with respect to the rinsing unit 13, and is opposed to the X-axis guide 3 by the inspection table moving mechanism 35. The inspection table 14 includes an inspection table 61 that adsorbs and mounts the inspection sheet S wound into a roll shape, and draws the inspection sheet S to the take-up mechanism 62 of the inspection table 61, and after inspection The take-up mechanism 63 is taken up by the inspection sheet S. The inspection table 14 receives the inspection sheet S drawn by the extraction mechanism 62 and is subjected to inspection from the functional liquid droplet ejection head 8 while being adsorbed on the inspection table 61. The inspection table 14 winds the inspection sheet S after the inspection by the take-up point by the take-up mechanism 63 and draws the new inspection sheet s to the inspection table 61. Further, it is taken out to Inspecting the sheet s of the table 61, the setting is used for The first inspection discharge area 64 for receiving the first inspection discharge and the second inspection discharge area 65 for receiving the second inspection discharge by the discharge discharge amount inspection are performed by the discharge failure inspection. The unit 15 includes a camera 71 facing the inspection table 14 from above, a camera table 72 supporting the camera 71, and a camera frame 73 that is erected across the X-axis table 2 and slidably supports the camera table 72 in the γ-axis direction. a camera moving mechanism (not shown) that moves the camera 71 in the x-axis direction along the camera frame 73 via the camera stand 72. The camera frame 73 includes a plurality of pillars 74 disposed on both sides of the pivot table 2 The support member 74 supports and extends in the γ-axis direction, and the camera guide 75' is integrally formed as a door type image recognition unit i5. When the camera 7 is moved in the axial direction via the camera table 72, the inspection is performed in units of several points. The image is sent out continuously to the spray point of the inspection sheet S. 150865.doc -20· 201127500 The two cameras 71 can be provided with a plurality of sets, and the image recognition time can be shortened according to the situation. Check the ejection of the i-th inspection of the ejection area 64喷 喷 喷 、 、 、 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷When the discharge is performed, the inspector first ejects the functional liquid droplets from the ejection nozzles 57 to the inspection sheet s (the first inspection discharge). Then, the image recognition unit 15 performs the image recognition on the first inspection nozzle result. After the image processing by the control device, the Langzhi® image is checked for leaks or flight bending inspections. In the result of the inspection, 'when it becomes a light post, 'flush in the flushing single magic 3 to achieve functional recovery' In the case of a severe NG, the function liquid is sucked and wiped by the suction unit &quot; and the wiping sheet 7C 12 to achieve functional recovery. In addition, the discharge amount inspection is for inspecting the discharge amount of the liquid from each of the discharge nozzles 57, and while driving the inspection table moving mechanism 乂, the inspection sheet S is pressed by the same-nozzle row 59. The functional liquid is ejected several times (the second inspection is ejected). Then, the second inspection ejection result is image-formed by the image recognition unit 15, and the nozzles 57 are ejected from the area of the root (four) attachment point after the image processing to calculate the average discharge amount. Then, the driving voltage of the functional liquid droplet ejection head 8 is corrected based on the calculated amount of discharge of the functional liquid. In this way, even if the i-th inspection discharge is narrower than the second inspection discharge, the inspection discharge can be performed, and the first inspection discharge area 64 is set to be larger than the second inspection discharge area in the main scanning (X-axis direction). Narrower. In addition, the D 2 discharge inspection does not have to be performed every time for the drawing of the wei (4), and can be ordered periodically by 150865.doc 201127500. In this case, the second inspection discharge area 65 is set only when the second inspection discharge is performed, and the entire inspection sheet s is set as the first inspection discharge area 64 when the second inspection discharge is not performed ( Omit the illustration). Next, a series of operations of the droplet discharge device , will be described with reference to Fig. 3, focusing on the drawing of the workpiece W and the discharge inspection of the functional liquid droplet ejection head 8. In addition, the case where only the discharge failure inspection is performed as the discharge inspection of the functional liquid droplet ejection head 8 will be described. The setting table 32 in which the workpiece w has been set to the alignment state is located in the material removal supply region 24, and the inspection table i4 is located directly below the carriage unit 4 in the drawing region 21. From this state, the inspection table 14, the rinsing unit 13, and the setting table 32 are moved in the z-axis direction (the inspection region 23 side), and first, the inspection sheet s is subjected to the first inspection discharge. The inspection table 14 moves toward the inspection area 23, and the setting table 32 moves toward the drawing area 21. The rinsing unit 13 passes directly under the cradle unit 4, and after the end of the setting table η reaches directly below the cradle unit 4, the workpiece w is drawn. After the first inspection, the inspection table 14 after the discharge reaches the lower side of the image recognition unit 15, the movement of the inspection table 14 is stopped. Then, the image recognition unit U is driven to perform image recognition on the ejection point of the first inspection ejection, and the ejection failure is checked. On the other hand, in the drawing area 2, the workpiece w is reciprocated in the main scanning direction (X-axis direction), and the carriage unit 4 is appropriately moved in the sub-scanning direction (Y-axis direction), and is ejected according to the specific direction. The pattern draws the workpiece w. That is, during the drawing of the workpiece w in the drawing area, the inspection area 23 is subjected to inspection of the ejection failure at the center of the image recognition by the ejection point. When the tracing of the workpiece w is finished, the setting table 32 is moved to the material removal for the area of 24,865.doc •22·201127500, 24/3⁄4, and the flushing unit! 3 Move to the bottom of the carriage unit 4. Here, the material removal supply of the old and new workpieces is carried out, and the alignment of the workpiece W to which the material has been supplied is performed. Further, flushing is performed from the carriage unit 4 first unit 13 in parallel with this, so that the f liquid 2 of the functional liquid droplets out of the head 8 is maintained to be good. Further, during this period, the inspection after the end of the discharge inspection is carried out - 14 and then the person moves to the tracing area 21 to prepare for the next inspection discharge. By repeating the above steps, the discharge inspection of the functional liquid droplet ejection head 8 is performed in the drawing of the workpiece w and the removal of the workpiece material. In addition, since the discharge inspection can be performed in the description of the workpiece W, when the result of the discharge inspection is NG, the drawing of the workpiece w is suspended, and the function recovery and the workpiece of the carriage single_four (4) (4) Replacement of w (material removal supply &quot; In this configuration, the setting table 32, the rinsing unit 13, and the inspection table fulcrum guide 3 1 are movably configured in this order from the drawing area 2! side. The identification unit 15 is disposed in the inspection area 23. Thereby, when the drawing in the drawing area 21 and the material removal supply area are called the material removal supply and alignment of the workpiece w, the function droplets can be implemented without time constraints. The discharge inspection of the discharge head 8. <First modification example: single unit> Next, the droplet discharge package according to the first modification of the present invention will be described with reference to Fig. 4. Further, in order to avoid repeated description, The portion different from the second embodiment will be described. The droplet discharge device 进行 performs the above-described discharge amount inspection in addition to the discharge failure inspection. Therefore, the consumption of the inspection sheet S in the inspection table is greatly increased. Must be frequently used as roll paper The inspection sheet S is replaced. The sub-maintenance area 25 is set in the inspection area 150865.doc 23·201127500 23 to observe the "self-picking area 21, so that the inspection table can be moved in the maintenance area 25 Further, in the above-described chamber 7, the sub-chamber "covers the sub-maintenance area 25, and the other portion is covered by the main chamber 82. Thereby, the inspection sheet s in the inspection table 14 can be performed without stopping the drawing operation. Replace

The setting of the Ik-person maintenance area 25 extends the x-axis guide rail 3 to the secondary maintenance area 25. The main chamber to 82 is configured to cover the drawing area 21, the inspection area 23, and the maintenance area 22, and the side wall on the side of the sub-chamber 81 in the X-axis direction is provided with a main body through which the X-axis guide 31 is inserted and passed through the inspection table 14. The chamber opening 83 and the opening and closing door 84 that opens and closes a portion other than the X-axis table 2 of the main chamber opening 83. Further, the main chamber 82 is configured to adjust the inner ring of the inner ring by the main chamber adjusting mechanism outside the drawing. Further, the internal environment is adjusted by using various sensors disposed in the main chamber U to control the heater, the cold state, the fan, and the like built in the main chamber adjustment mechanism. Further, it is preferable to adjust the internal environment while constantly ventilating in the main chamber 82. The sub-chamber 8 1 is mainly used when the inspection sheet s of the inspection table 4 is replaced, and is configured to accommodate the inspection table 14 that is moved to the end of the X-axis table 2 . In the sub-chamber 8 1 , the opening has a sub-chamber opening 85 through which the X-axis guide 3 is inserted to the side wall of the main chamber 82 side and through which the inspection table 14 passes. Further, the sub-chamber 8 is configured to adjust the internal environment by the sub-chamber adjustment mechanism outside the drawing. Furthermore, the adjustment of the internal environment is the same as in the case of the main chamber 82. In the operation of the droplet discharge device 本 of the present embodiment, the first inspection discharge for detecting the discharge failure is performed, and the second inspection discharge for checking the discharge amount of the functional liquid is performed. Specifically, the inspection inspection is performed, and then the second inspection discharge is performed on the same inspection sheet S of 150865.doc - 24. 201127500. Then, after the first and second inspections have reached the inspection table 14 immediately below the image recognition unit 15 and the movement of the inspection table 14 is stopped, the drive image recognition unit 15 discharges the first and second inspections. The spray point performs image recognition, checks for poor ejection, and checks the amount of discharge. Further, either of the first inspection discharge and the second inspection discharge may be performed first. In this case, in the subchamber 81, when the inspection sheet s is replaced, the opening and closing door 84 is opened to accommodate the moving inspection table 14, and the opening and closing door 84 is closed, and the internal environment is replaced with the atmosphere. Then, the operator replaces the inspection sheet S in the sub-chamber 81, and replaces the internal environment of the sub-chamber 81 with the same nitrogen or dry air as the internal environment of the main chamber 82. Thereafter, the opening and closing door 84' is opened to move the inspection table 14 to the main chamber 82 for inspection and ejection. Thereby, the inspection sheet s of the inspection table 14 can be replaced in the sub-chamber 81, so that it is not necessary to stop the droplet discharge device 于 during the replacement operation. Moreover, the turbulence, dust, dust, and the like generated by the human work industry do not affect the processing of the drawing area 21 in the main chamber. Further, the main chamber adjusting mechanism and the sub-chamber adjusting mechanism may be used as a common (concurrent) chamber adjusting mechanism to appropriately perform flow path switching to the pipe (or piping) connected thereto. &lt;Twenth Modification: Single Unit&gt; Next, the present invention is stagnate with reference to Fig. 5 . Dei Λ丨,, + % of the second variation of the droplet discharge device} will be explained. The liquid droplet ejection device includes the first inspection sheet 14 on which the first inspection sheet S1 is mounted, the first inspection table 14a that receives the first inspection discharge, and the second inspection sheet S2. In the second inspection, the second inspection table 14b is discharged, and the inspection table 150865.doc -25-201127500 14a and the second inspection table 14b are accommodated in the sub-chamber 81 via the x-axis guide 31. Further, the inspection table moving mechanism 35 includes a first inspection table moving mechanism 35a that moves the second inspection table 14a on the x-axis guide 31, and a second inspection table moving mechanism that moves the second inspection table on the X-axis guide 31. 35b. In other words, the second inspection table 14a and the second inspection table Mb are configured to be individually movable along the x-axis guide rail 3 by the first inspection table moving mechanism 35a and the second inspection table moving mechanism 35b. Further, the first inspection table 14a and the second inspection table 14b have the same configuration as the inspection table 14, and thus the description thereof is omitted here. In this case, the second inspection discharge area 64 s that has received the second inspection discharge is placed on the entire surface of the first inspection sheet si of the first inspection table 14a, and the second inspection discharge is performed by the second inspection discharge. The area 65 is provided on the entire surface of the second inspection sheet S2 of the second inspection table i4b. Further, as described above, the first inspection discharge (discharge failure inspection) received by the first inspection table 14a can be narrower than the second inspection discharge (discharge amount inspection) received by the second inspection station 1 In this case, the replacement frequency of the first inspection sheet S1 and the second inspection sheet s 2 is different. The replacement frequency of the second inspection sheet S2 is set to be smaller than the replacement of the first inspection sheet 81. The frequency is higher. Thereby, the winding timing or the replacement timing of the first inspection sheet s and the second inspection sheet S2 can be individually managed, so that the waste of the two inspection sheets SI and S2 is not caused. On the other hand, the image recognition unit 15 includes a first image recognition unit 15a that performs image recognition on the first inspection discharge result, and a second image recognition unit that performs image recognition on the second inspection discharge result. Further, the first image recognizing unit 15a and the second image recognizing unit 15b have the same configuration as the image recognizing unit 15, and thus the description thereof is omitted here. The first image recognizing unit I50865.doc -26-201127500 15a is disposed at the end of the inspection region 23 so as to straddle the reel table 2 corresponding to the first inspection table 14a. Similarly, the second image recognizing unit 15b is disposed on the side of the sub-chamber 8 1 from the first image recognizing unit 15a so as to straddle the X-axis table 2 corresponding to the second inspection table 14b'. In other words, the first image recognizing unit 15a and the second image recognizing unit 15b are disposed at the end of the X-axis table 2 in this order from the side of the tracing region 21. As shown in Fig. 6, in the series of operations of the droplet discharge device 1 of the present embodiment, the discharge failure inspection and the discharge amount inspection are independently performed. Specifically, the setting table 32 in which the workpiece W is set is located in the material removal supply region 24, and the second inspection table 14b is located directly below the carriage unit 4, the first! The inspection table 1 is blunt between the setting table 32 and the second inspection table 14b. In this state, each of the constituent devices 32, 14a, and 14b is moved to the X-axis direction (the inspection region 23 side), and the second inspection sheet S2 is first subjected to the second inspection discharge. The second inspection table 14b moves to the inspection area 23 after the second inspection discharge, and the i-th inspection table moves toward the drawing area 21 to receive the first inspection discharge. The rinsing unit 13 starts drawing the workpiece W after passing the end portion of the setting table 32 directly below the cradle unit 4 to the immediately below the cradle unit 4. After the second inspection table 14b after the second inspection discharge reaches the immediately below the second image recognition unit 15b, the movement of the second inspection table 14b is stopped. Then, the second image recognition unit 15b is driven to perform image recognition on the ejection point of the second inspection ejection, and the ejection amount is checked. In parallel with this, after the first inspection table 14a after the first inspection has reached the first image recognition unit 15a, the movement of the second inspection table 14a is stopped, and the first image recognition unit 15a is driven to the first inspection.喷 Ejected spray points for image recognition and check for poor ejection. Further, in the drawing area 21, the workpiece W and the carriage unit 4 are subjected to main scanning and sub-scanning in the opposite direction, and the workpiece w is drawn based on the specific ejection pattern. After the drawing of the workpiece w is completed, the setting table 32 is moved to the material removal supply area 24, and the material removal supply of the workpiece W and the alignment of the workpiece are performed. Further, the flushing of the rinsing unit 13 of the cradle unit 4 is carried out in parallel with it. Then, the i-th inspection table 14a after the end of the discharge inspection is moved again to the vicinity of the drawing area 21 to be in a standby state. In this case, when the first inspection sheet 51 (the second inspection sheet S2) is replaced by the sub-chamber 81, the opening/closing door 84 is opened to accommodate the movement of the second inspection table 14b or the first inspection table. 4a and the second inspection table 丨4b, after the opening and closing door 84 is closed, the internal environment is replaced with the atmosphere. Then, after the operator replaces the first inspection sheet 81 (second inspection sheet 82) in the sub chamber 81, the internal environment of the sub chamber 81 is replaced with the same nitrogen or dry as the internal environment of the main chamber 82. After the second gas, the opening and closing door 84 is opened, and the first inspection table i4a and the second inspection table 14b are moved to the main chamber 82 for inspection and discharge. In this way, the first and second inspection sheets 81 and S2 of the first inspection table and the second inspection table 14b can be replaced in the sub-chamber 81. Therefore, the second and second inspection sheets SI and S2 can be replaced. At the time of replacement, it is not necessary to stop the droplet discharge device j. Further, atmospheric turbulence, dust, dust, and the like due to manual work do not affect the processing of the tracing area 21 in the main chamber 82. &lt;Second Embodiment: Double Table&gt; Next, a liquid droplet ejecting apparatus 1 according to a second embodiment of the present invention will be described with reference to Figs. 7 to 1B. Further, in order to avoid redundancy, the parts different from the first embodiment will be mainly described. As shown in Fig. 7, the droplet discharge device 150865.doc • 28· 201127500 1 includes a pair of setting table 32 extending in the z-axis direction and mainly causing the workpiece w to be in the X-axis direction via a pair of turns 疋〇 32 The y-axis table 2, which is alternately moved, is erected on the γ-axis table 3 so as to be erected in the γ-axis direction so as to straddle the X-axis table 2, and is mounted on the γ-axis table 3 and loaded with plural numbers One (2) solid function droplet discharge head 8 of 13 carriage units 4. Further, in the present embodiment, the moving mechanism mentioned in the technical solution of the present invention includes the spindle table 2. Further, the droplet discharge device 1 includes a suction unit 11 and a wiping unit 12 disposed in the maintenance area 22, and is mounted on the rinsing unit 13 of the boring table 2, the weight measuring table 16, and the pair of inspection tables 14 Provided in each of the inspection areas 23a, a pair of material removal supply robots 7 (material removal supply means) and one for the image recognition unit 15'' to face the material removal supply area 24 to be described later The aligning unit 18 is a control device for collectively controlling the constituent devices, and a chamber 7 for accommodating the constituent devices. Further, the γ-axis table 3, each of the carriage units 4, the functional liquid droplet ejection head 8, the suction unit i, the wiping unit 12, the rinsing unit 13, the inspection table 14, the image recognition unit Η, and the first implementation The form is the same structure, and thus the description thereof will be omitted. In the intersection area of the X-axis table 2 and the Y-axis table 3, a description area 21 for drawing the workpiece w is set, and a function droplet is set at a position shifted from the drawing area 21 to the outside of the ¥ axis direction. The maintenance area 22 of the ejection head 8 is ejected. Further, two material removal supply regions 24 for removing and supplying the material of the workpiece W are set on the side of the drawing region 21 which is deviated in the z-axis direction. Further, a plurality of inspection regions 23 for performing the discharge inspection of the functional liquid droplet ejection head 8 are set in the both sides of the supply region which are removed from the respective material directions. 150865.doc -29-201127500 Further, the two material removal supply regions 24 are removed from the supply and supply regions 24a of the first material (the upper side in FIG. 7) and the second material removal supply region of the other region (the side of FIG. 7tT). 24b constitutes. Further, the two inspection areas 23 are one by one (upper side in Fig. 7)! The second inspection area 2 3 b of the inspection areas 23a and 3 (lower side in Fig. 7) is constructed. The pair of setting tables 32 are composed of a first setting table 32a and a second setting table 32b, and are mounted on the X-axis table 2, respectively. Each of the setting tables 32a (32b) includes a suction stage 91 that adsorbs the setting tool W and a rotation mechanism 9 that rotatably supports the adsorption stage in the θ direction. Similarly, the pair of inspection tables 14 are composed of a second inspection table 14&amp; and a second j inspection table 14b. Further, the pair of image recognition units 15 is composed of a second image recognition frame 15a and a second image recognition unit 15b. Further, the pair of material removal supply robots 17 are constituted by the second material removal supply robot 17a and the second material removal supply robot 17b, and the pair of alignment units 18 are composed of the second alignment unit 18a and the second alignment unit 18b. Composition. The X-axis table 2 includes a pair of X-axis guides 31 for moving the second setting table 32& along the parallel axis guide 31 to the second setting table moving mechanism 33a, and the second setting table 32b is guided along the X-axis 31. The second setting stage moving mechanism 33b that moves the rinsing unit 13 and the weight measuring table 16 as a unitary moving mechanism 36 that moves integrally along the cymbal guide 31, and moves the first inspection table 143 along the parent axis guide 31 The inspection table moving mechanism 35a and the second inspection table moving mechanism 35b that moves the second inspection table 14b along the X-axis guide 31 are provided. The X-axis table 2 freely moves the first setting table 32a between the drawing area 21 and the second material removal supply area 24a, and moves the second setting table 32b between the tracing area 21 and the second material removal supply area 24b. . Further, the axis table 150865.doc • 30· 201127500 sets the first inspection table 14a to move freely between the drawing area 21 and the first inspection area 23a, and causes the second inspection table i4b to be in the drawing area 21 and the second inspection area. Move freely between 23b. The first and second setting table moving mechanisms 33a and 33b, the common table moving mechanism 36, and the first and second two-stage moving mechanism 35&amp;, 351&gt; are driven by motors (linear motors) corresponding to the mechanisms. The second and second setting table moving mechanisms 33a and 33b, the common table moving mechanism 36, and the second two-stage moving mechanism 35a' 35b are configured to be individually visible on the X-axis guide rail 3 Move on the ground. Further, the pair of X-axis guide rails 31 and the stator (not shown) of the linear motor straddle the first inspection region 23a, the first material removal supply region 24a, the drawing region 21, the second material removal supply region 24b, and the second inspection region. Extended by 23b. That is, the X-axis table 2 can be used for the second and second setting tables 32 &amp; 32a, the flushing unit 13, the weight measuring platform 16, and the first and second two inspection tables 丨 ", 14b on the common moving shaft. The rinsing unit 13 is disposed between the first setting table 32a and the second setting table 3, and is configured to be capable of removing the supply region 24a and the second material in the first material by the X-axis table 2. The weight measuring station 16 is disposed between the i-th setting table 32 and the second setting table, and is configured to be capable of removing the supply of the first material removal supply region 24a and the second material by the axis table 2 Each of the inspection tables i4a' to 14b is disposed outside the y-axis direction with respect to each of the setting tables and the milk, and receives the inspection and discharge from the functional liquid droplet ejection head 8. The weight measuring table 16 has a plurality of electrons. The balance and the plurality of trays (both omitted) of the electronic balance are used to carry out the weight of the functional liquid from the functional liquid droplet ejection head (4). The electronic balance is discharged from the functional liquid droplet ejection head (4) function I50865.doc 201127500, , before and after measuring the weight of the tray 'according to the weight of the tray before and after the ejection The weight of the discharged functional liquid can be measured by a knife, and the driving discharge of the functional liquid droplet ejection head 8 is corrected based on the calculated average discharge amount of the liquid, and the washing sheet 70 13 and the weight measuring table are corrected. 16 may also be physically unitized. Further, in the chamber 7, a main cavity (10) covering the drawing area 21 and the second material removal supply areas 24a and m, and the first and second coverings are respectively covered. In the sub-chamber 81, one of the inspection areas 23a and 23b can be used for maintenance of the rinsing unit 13 and the weight measuring unit (replacement of the ink and the material or the tray, etc.). The maintenance of the rinsing unit 13 and the weight measuring table 16 can be performed by the drawing. The material removing the supply robots 17a, 17b | the outer side of the x-axis table 2 removes the supply regions 24a, 24b from the respective materials, and moves to remove the materials. The setting stations 32a and 32b of the supply regions 24a and 24b perform material removal from the setting table 32 on the workpiece W that has been finished, and supply the material of the new workpiece|to the setting stations 32a and 321^. Time material removal supply mechanism includes workpiece The replacement (loading and unloading) and the setting of the workpiece w are performed. The material removal supply operation can be performed while the other setting stations 32a and 32b are being drawn. Next, the reference first indicates the first FIG. 8 showing the positional relationship between the setting table 32a, the second setting table 32b, the first inspection table i4a, the second inspection table 14b, the flushing unit 13, and the weight measuring table 16 will explain a series of operations of the droplet discharge device 1. First, the second setting table 32a of the workpiece w set to the aligned state is located in the first material removal supply area 24a'. The first inspection table 14a is located at 150865.doc • 32 - 201127500 The first inspection area 23a (same figure (a)) . From this state, the first setting table 32a and the first inspection table 14a are moved toward the drawing area 21, and first, the leading end of the first setting table 32a reaches the directly below the drawing unit 4 (drawing area 21), and then starts. The drawing operation of the first pass (moving in the forward direction) of the workpiece W (the same figure (b)). Then, the first inspection table 14a is placed directly under the cradle unit 4, and then the first inspection is performed (the same as Fig. (c)). When the first inspection table 14a finishes the inspection and discharge, it moves to the lower side of the second image recognition unit 15a in synchronization with the movement of the first setting table 32&amp; and is ejected by the first image recognition unit 15a. Check (same figure (d)). On the other hand, 'in the drawing area 21', the workpiece W is moved back and forth in the main scanning direction (X-axis direction) a plurality of times--the edge from the functional liquid droplet ejection head 8 is drawn according to the specific ejection pattern. Action (same figure (4)). #, When the moving direction of the old line in the drawing operation is moved (may also move in the coming direction), the inspection jet is performed, and when the second pass is moved, the second inspection table 14 moves to the first inspection area 23' f The inspection begins. At the time when the discharge inspection is started, the drawing operation is continued until the drawing operation is completed (substantially the i-th setting table 32a returns to the second material removal supply region 24a), and the other end is: In the second material removal supply region 2, the second material removal supply robot 17b and the second alignment unit i8b are removed, and the second setting table 32b is subjected to material removal (replacement). When the final setting movement is completed, the first setting table moves to the first material removal supply area 24ae in synchronization with the movement of the first setting table 向 to the second cutting supply area 24a, and the weight measuring table 16 and the flushing unit I50865 .doc •33·201127500 13 The second and second inspection tables 32b and the second inspection table 14b move toward the first material removal supply region 24a so as to follow the first setting table 32a (the same figure (e)). The measuring table 16 is moved directly below the cradle unit 4 as needed, and is subjected to weight measurement ejection from the functional liquid droplet ejection head 8. Similarly, the rinsing unit 13 receives rinsing as needed (Fig. (e)). After the first setting table 32a, the flushing unit 13, and the weight measuring table 16 are moved to the i-th material removal supply region 24a, the second setting table 32b and the second inspection table 14b are moved toward the tracing region 21 this time. First, the first pass (moving in the forward direction) of the workpiece W of the second setting table 3 is performed (the same figure (7)), and then the second inspection table 14b is inspected and ejected (the same figure (g)). . When the second inspection table 14b finishes the inspection and discharge, it moves to the right side of the second image recognition unit 15b in synchronization with the movement of the second setting table 3 to perform the discharge inspection (the same figure (h)). On the other hand, in the drawing area 21, the main scanning direction of the workpiece material is reciprocated a plurality of times, and the functional liquid droplet ejection head 8 draws the guard w according to the specific ejection pattern (Fig. 9). In other words, the first inspection is performed during the movement of the first passage in the tracing operation, and the inspection table 14 is moved to the first inspection region 23 when the second passage is moved, and the discharge inspection is started. At the time point when the discharge inspection is started, the drawing operation is continued until the drawing operation is completed, and the discharge inspection is ended. On the other hand, during this period, the supply is removed in the first step. In the region 24a, the material removal and supply (replacement) of the i-th setting table 32a by the first material removal supply robot and the second alignment unit 18b is aligned with the new workpiece W. By repeating the above steps, it can be alternately performed - and the inspection and ejection inspection of the I50865.doc • 34 · 201127500 drawing operation of the workpiece* is performed. In addition, since the discharge inspection is performed during the drawing operation of the workpiece %, when the result of the discharge inspection is ^^^^, the drawing operation of the workpiece W is suspended, and the carriage unit 4 is executed (functional droplet discharge) The function recovery of the head 8) and the replacement of the workpiece w (material removal supply). Further, in the present embodiment, the discharge inspection and the discharge inspection are performed every time the workpiece W is drawn, but the drawing operation may be performed in a plurality of drawing operations. In other words, for example, when the discharge inspection is performed every time the drawing operation is performed, the period in which the first image recognition unit 15a performs the discharge inspection is set to the first setting table 32a and the second setting table. The workpiece of 32b completes the drawing action. In this case, the inspection time can be further ensured, and a precise discharge inspection (not shown) can be further carried out. According to the above configuration, the pair of setting tables 32 are alternately subjected to the drawing operation, and the pair of inspection tables 14 are alternately subjected to the inspection discharge and the discharge inspection performed together with the drawing operation. The drawing operation and the ejection inspection of the function liquid droplet ejection head 8. Further, during the drawing of the workpiece W of the one setting table 32b (32a), the ejection inspection of one of the image recognition units 15a (15b) can be performed, and the process of the tracing operation with respect to the workpiece W can be shortened. Working time, and the time for the discharge inspection can be fully ensured. &lt;First Modification: Double Table&gt; Next, a droplet discharge device i according to a third modification of the present invention will be described with reference to Fig. 9 . Furthermore, in order to avoid repeated description, the different parts are mainly explained. In the liquid droplet ejecting apparatus, the rinsing unit 13 and the weight measuring unit 16 are disposed on the first inspection table 14a or the second inspection table Mb in the moving direction 150865.doc - 35 - 201127500 side 'the first inspection table moving mechanism 35a Alternatively, the second inspection table moving mechanism 35b (the X-axis table 2) integrates the first inspection table 14a or the second inspection table 14b with the flushing unit π and the weight measuring table 16 in the drawing region 21 and the first inspection region 23a or The second inspection area 23b moves between. Incidentally, the drawing operation, the inspection discharge, and the discharge inspection in this case are the same as those in the second embodiment described above, and thus the description thereof is omitted here. As a result, since the rinsing unit 13 and the weight measuring table 6 are disposed outside the first (second) inspection table 14a (14b), the second (second) inspection region 23a (23b) is not related. The drawing operation can be performed to check the replacement (maintenance) of the sheet 8 or the waste liquid treatment (maintenance) of the functional liquid accumulated in the rinsing unit 13. &lt;Second modification: double stage&gt; Next, the droplet discharge of the second modification of the present invention will be described with reference to Fig. 10

The maintenance of the functional liquid droplet ejection head 8 can be maintained. In the case of the situation, the performance can also be implemented. Further, the configuration is 150865.doc -36 * 201127500 Each of the flushing units Ua, Bb and the setting tables 32a, 32b can be moved integrally, so that the moving systems of the respective flushing units 13a, 13b and the setting tables 32a, 32b can be simplified. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a droplet discharge device according to a first embodiment. Fig. 2 is an external perspective view of a functional liquid droplet ejection head. Fig. 3 is a view for explaining a droplet of a second embodiment. Fig. 4 is a plan view of a droplet discharge device of a first modification; Fig. 5 is a plan view of a droplet discharge device of a second modification; Fig. 6 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 8 is a plan view showing a liquid droplet ejecting apparatus according to a second embodiment. FIG. 8 is a plan view for explaining a liquid droplet ejecting apparatus according to a second embodiment. FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 9 is a plan view schematically showing a droplet discharge device according to a first modification; and FIG. 10 is a plan view showing a droplet discharge device according to a second modification. [Description of main component symbols] 1 Droplet ejection device 2 Moving mechanism 3 Y-axis table 4 Bracket unit 5 Maintenance device 6 Discharge inspection device 150865.doc -37- 201127500 7 Chamber 8 Functional droplet ejection head 11 Pumping Suction unit 11a Individual suction unit 12 Wiping unit 13 Flushing unit 14 Inspection table 14a First inspection table 14b Second inspection table 15 Image recognition unit 15a First image recognition unit 15b Second image recognition unit 16 Weight measurement table 17 Material removal supply robot 17a First material removal supply robot 17b Second material removal supply robot 18 Alignment unit 18a First alignment unit 18b Second alignment unit 21 Tracing area 22 Maintenance area 23 Inspection area 23a 1st Inspection area 23b Second inspection area 150865.doc -38- 201127500 24 Material removal supply area 24a First material removal supply area 24b Second material removal supply area 25 Secondary maintenance area 31 X-axis guide 32 Setting stage 32a First setting stage 32b Second setting table 33 setting table moving mechanism 33a first setting table moving mechanism 33b second setting table moving mechanism 34 flushing moving mechanism 35 checking Moving mechanism 35a First inspection table moving mechanism 35b Second inspection table moving mechanism 36 Common table moving mechanism 41 Y-axis guide 42 Bracket moving mechanism 51 Functional liquid introduction portion 52 Head substrate 53 Head body 54 Connecting needle 55 Pump portion 56 Nozzle Plate 150865.doc -39- 201127500 57 Discharge nozzle 58 Nozzle surface 59 Nozzle row 61 Inspection table 62 Extraction mechanism 63 Reel mechanism 64 First inspection ejection area 65 Second inspection ejection area 71 Camera 72 Camera table 73 Camera Frame 74 Pillar 75 Camera Guide 81 Subchamber 82 Main Chamber 83 Main Chamber Opening 84 Opening and Closing Door 85 Subchamber Opening 91 Adsorption Table 92 Rotating Mechanism S Inspection Sheet SI First Inspection Sheet S2 Second Inspection Sheet W workpiece 150865.doc -40-

Claims (1)

201127500 VII. Patent application scope: 1. A droplet discharge device, characterized in that: in the drawing area, while driving, driving a functional liquid droplet squirt head to perform drawing on the workpiece, and the m-jet is emitted from the above-mentioned drawing area. The movement direction of the piece is offset from the apricot area, and the above-described function liquid droplet ejection-page ejection inspection is performed; the method includes: a setting table on which the workpiece is set; and a flushing unit configured to be arranged with respect to the setting table The inspection area side 'accepts the pre-discharge from the functional liquid droplet ejection head; and the inspection table is mounted on the inspection area side with respect to the rinsing unit, and is mounted to receive the inspection from the functional liquid droplet ejection head The inspection sheet to be ejected; the image recognition mechanism, i ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The setting table, the rinsing unit and the inspection table have a common shift between the drawing area and the inspection area Moving shaft; and said moving means is configured to allow the inspection system table individually movable relative to the table and set the flushing means. 2. The liquid droplet ejecting apparatus according to claim 1, wherein the moving mechanism is configured to allow the flushing unit to move individually with respect to the setting table and the inspection table. 3. The droplet discharge device of claim 1, wherein the observation area is viewed from the above-mentioned inspection area, and 150865.doc 201127500 is set to maintain a secondary maintenance area for the inspection table; the moving shaft system is over the above The inspection area is extended to the upper area; the liquid droplet ejection apparatus further includes: _ to cover the drawing area and the inspection area; and the field J cavity to cover the secondary maintenance area. 4. The droplet discharge device of claim 1, wherein: in the inspection of the functional liquid droplet ejection head, there is a discharge failure for inspecting a discharge failure of each of the discharge nozzles in the functional liquid droplet head - and a pair The discharge amount of the functional liquid discharged from each of the discharge nozzles is inspected for inspection. The liquid droplet ejection device further includes control of controlling the functional liquid droplet ejection head, the upper surface, the image recognition mechanism, and the moving mechanism. In the above-described control unit, the inspection sheet is subjected to a second inspection discharge for performing the above-described spray inspection, and a second inspection discharge for performing the discharge amount inspection; and: The image recognition and the result of the result; 2 the image recognition of the ejection result of the ejection. 5. The liquid droplet ejecting apparatus according to claim 1, wherein: in the inspection of the functional liquid droplet ejection head, there is a discharge failure in which the discharge of the respective ejection nozzles in the functional liquid droplet = head is inspected. And a discharge amount inspection for inspecting the discharge amount of the functional liquid from each of the discharge nozzles; W. The inspection station includes a first inspection discharge that is received for receiving the discharge failure I50865.doc 201127500. a first inspection table of the first inspection sheet and a second inspection table on which the second inspection sheet for receiving the second inspection discharge for performing the discharge amount inspection is mounted; the image recognition mechanism includes the The second image recognizing means that performs image recognition by checking the ejection result of the second inspection table, and the second image recognizing means that performs image recognition on the second inspection ejection result of the second inspection table. 6. The liquid droplet ejecting apparatus according to claim 5, wherein a frequency of replacement of said second inspection sheet is set higher than a frequency of replacement of said first inspection sheet; and said setting is on said moving axis The stage side is arranged in the order of the i-th inspection table and the second inspection table. The moving mechanism is configured to allow the second inspection table and the second inspection table to be individually moved. A method for controlling a droplet discharge device, comprising: a drawing region for driving a functional liquid droplet ejection head while moving a workpiece to draw the member, and a movement from the drawing region to the workpiece An inspection region in which the direction of the direction is deviated and the discharge inspection of the liquid droplet ejection head is performed, and the m history table is mounted on the common moving axis extending between the drawing region and the inspection region, and the functional liquid is received. Detecting the ejected inspection table of the drip ejection head, and arranging an image recognition mechanism for performing image recognition on the inspection ejection result of the inspection table in the inspection area; 150865.doc 201127500 Performing the above-described inspection ejection in the above-described drawing area; the field is for moving the inspection table to the inspection area during the upper m-area H; 8. The identification means recognizes the image of the inspection discharge result A droplet discharge device characterized by: working on a drawing area The workpiece is moved to drive the function droplet discharge + head to perform the drawing operation on the workpiece, and the two materials are removed from the two outward directions of the workpiece from the drawing area to the moving direction of the workpiece 9 9/fra^al χ 仟In addition to the supply, the material of the upper member is alternately applied to the two inspection regions that are separated from the moving direction of the material removal region, and the discharge of the functional liquid droplet ejection head by image recognition is alternately performed. The inspection includes: a pair of setting stations for setting the workpiece; and a pair of inspection tables, which are disposed outside the setting stations, and receiving inspection and ejection from the functional liquid droplet ejection head; An image recognition unit that is disposed in each of the inspection areas, performs image recognition on the inspection discharge result of the inspection table, and a movement mechanism that removes and supplies the one of the setting stations in the drawing area and one of the materials Freely moving between regions, and setting the other side of the above setting between the above-mentioned drawing area and the other material removal supply area of the other side If moving, and moving the above-mentioned inspection table between the inspection area of one of the above-mentioned inspection areas and the inspection area of the other side, and moving the above-mentioned inspection table between the above-mentioned inspection area and the other inspection area of the other side . 9. The liquid droplet ejecting apparatus according to claim 8, wherein the moving mechanism moves the pair of setting tables and the pair of inspection tables on a common moving axis. 1. The droplet ejection nozzle of claim 8, wherein the device further includes a control mechanism for controlling the functional droplet, the image recognition mechanism, and the pair of moving mechanisms; The control mechanism is a description of the sighing station alternately moving between the description area and the above-mentioned material removal supply area to alternately perform the above-described drawing operation; and .... The parent moves between the above-mentioned drawing area and each of the above-mentioned inspection areas, and alternates the parent to perform the above-described inspection ejection and the above-described ejection inspection. The liquid droplet ejecting apparatus according to claim 10, wherein the control means is attached to the drawing area, and the setting stations are moved back and forth a plurality of times to perform the drawing operation; and the first round-trip movement In synchronization with the movement, the eclipse inspection table is moved from the inspection area to the above-described inspection and ejection. ^^田画区域Μ12. The droplet ejection device of claim U, wherein the control mechanism is configured to move the inspection table from the tracing area to the inspection area after performing the inspection and ejection described above. 13. The above-described discharge inspection is carried out. The droplet discharge device according to claim 12, wherein the control means is completed until the above-described drawing operation accompanied by the inspection and ejection is completed, and the discharge inspection is completed. 14. The droplet ejection device of claim 12, wherein the control mechanism is until the 倬 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , an examination. 15. The device further comprising: a material disposed on the workpiece of the above-mentioned materials for performing a removal supply, such as the droplet discharge material removal supply region of claim 10; and the upper material removal supply mechanism; - a material removal supply mechanism; and two: each material setting removal σ of each material removal supply region is applied to the material removal supply of the workpiece. 16.:; = droplet discharge device, which further comprises a flushing unit disposed between the above-mentioned - δ and 疋 且 接受 接受 接受 接受 ; ; ; ; ; ; ; ; ; ; 功能 功能 功能 功能 功能 功能 功能 功能 功能 功能 功能 功能 功能 功能The material is removed from the supply region I by the soaping element, and the pre-spraying is performed on the outer side of the above-mentioned life-span The left-out-out--washing unit 150865.doc 201127500 The above-mentioned moving mechanism is formed on the left r丄h 1 J 1 history. The flushing unit moves between the check area and the above-mentioned illustration area. The nozzle of the item 8 is further provided, and further comprises: a pair of pre-spraying of the head in the moving direction of the head; a pair of flushing units of the head; The rinsing unit 5 is configured to move integrally with each other. The squirting of the droplets as in claim 8 is further included in the pair of S and the mouthpiece and measured from the above functions. The tongue is a DD _ shape / the same weight of the functional liquid The weight measuring station of the early one; the moving mechanism is configured to move between the two material removal supply areas by the escapeable resetting table. 2. The droplet ejection device of claim 8 is provided with a single weight measuring table that measures the weight of the functional liquid ejected from the functional liquid droplet ejection head on the outer side of the inspection table in the moving direction, and the moving mechanism is configured to allow the weight measuring unit to be The inspection area of one of the areas is moved between the above-mentioned drawing area. 150865.doc