TW201112238A - CoFeNi-based alloy for soft magnetic film layer in vertical magnetic recording medium, and sputtering target material - Google Patents

Abstract

Disclosed is a soft magnetic Co-Fe-Ni alloy for a perpendicular magnetic recording medium, which has excellent saturation magnetic flux density, amorphousness, corrosion resistance and hardness. The Co-Fe-Ni alloy contains, in at%, 70-92% of Co + Fe + Ni (including 0% of Ni), 1-8% of Ta, and more than 7% but 20% or less of B. The composition of the Co-Fe-Ni alloy (expressed in at%) satisfies the following ratios: Co/(Co + Fe + Ni) of 0.1-0.9; Fe/(Co + Fe + Ni) of 0.1-0.65; Ni/(Co + Fe + Ni) of 0-0.35; and B/Ta of 1-8.

Description

201112238 VI. INSTRUCTIONS: Cross-references related applications This application is based on the Japanese Patent Application No. 2009-1 39 1 5 1, which was filed on June 10, 2009, and claims the priority. [Technical Field] The present invention relates to a CoFeNi-based alloy used as a soft magnetic film layer in a perpendicular magnetic recording medium, and a sputtering target thereof. [Prior Art] In recent years, advances in magnetic recording technology have become apparent, and the high recording density of magnetic recording media has progressed in order to quantify the volume of driving. For example, a vertical magnetic recording method capable of realizing a higher recording density than a conventional in-plane magnetic recording medium has been put into practical use. The perpendicular magnetic recording method is a method in which a magnetic recording easy axis is aligned in a vertical direction with respect to a medium surface in a magnetic film of a perpendicular magnetic recording medium, and is suitable for a high recording density. Then, in the perpendicular magnetic recording method, a two-layer recording medium having a magnetic recording film layer and a soft magnetic film layer for improving recording sensitivity has been developed. As the magnetic recording film layer, a Co Cr Pt-SiO 2 based alloy is generally used.

Further, as the soft magnetic film layer, a soft magnetic element of Co or Fe is used as a base material, and an alloy of Zr, Hf, Ta ' Nb and B which can improve amorphous properties is known. For example, an alloy for a soft magnetic film layer as disclosed in the perpendicular magnetic recording medium of Patent Document 1 or a Co-FeS-5-201112238 alloy sputtering target disclosed in Patent Document 2 and a method for producing the same. In the soft magnetic film layer of the perpendicular magnetic recording medium, high saturation magnetic flux density, high amorphous property, and high corrosion resistance are sought. Further, in recent years, the purpose is to reduce the damage of the optical disc produced by the contact between the magnetic recording medium and the head for reading and writing, and to require hardness in the soft magnetic film layer. CITATION LIST OF THE INVENTION The present inventors have a high saturation magnetic flux density and high amorphousness by the inventors of the present invention. The quality and high corrosion resistance, and the ratio of Ta and/or Nb, and B are specific, and an alloy having a higher hardness than the alloy proposed in Patent Document 1 can be obtained, and this knowledge is obtained. Accordingly, an object of the present invention is to provide a soft magnetic alloy for a perpendicular magnetic recording medium having excellent saturation magnetic flux density, amorphous property, corrosion resistance and hardness, a sputter target for producing a film of the alloy, and the like A perpendicular magnetic recording medium of a soft magnetic film layer composed of an alloy. According to the first aspect of the present invention, there is provided a CoFeNi-based alloy which is a Co FeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium. The CoFeNi-based alloy contains at least Co + Fe + Ni : 70 ~92% (but Ni contains 〇), 201112238 T a : 1 to 8 %, and B: more than 7% and 20% or less. 'The composition of the above CoFeNi-based alloy (at%) is the ratio that satisfies the following ratio · Co/ ( Co + Fe + Ni ) : 0.1~〇·9,

Fe / ( Co + Fe + Ni ) : 0·1~〇·65,

Ni / ( Co + Fe + Ni ) : 0 to 0.35, and B/Ta : 1 to 8. According to the second aspect of the present invention, there is provided a C〇FeNl alloy which is a CoFeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium, and the CoFeNi-based alloy contains Co + Fe + Ni at a%: 70~92% (but Ni contains 0),

Nb + Ta : 1 to 8%, B: more than 7% and 20% or less, and the composition (at %) of the above CoFeNi-based alloy is such that Co/ ( Co + Fe + Ni ) : 〇. 1-0.9 '

Fe / ( Co + Fe + Ni ) : 〇. 1 ~ 0.65,

Ni / ( Co + Fe + Ni ) : 0-0.35 > and B / ( Nb + Ta) : 1 ~ 8. According to the third aspect of the present invention, there is provided a CoFeNi-based alloy which is a CoFeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium, and the CoFeNi-based alloy contains Co + Fe + Ni : 70 at at % 92% (but Ni contains 0),

Zr + Hf+Nb + Ta : 1 to 8%, B: more than 7% and less than 20%, 201112238

Zr + Hf : 0 to less than 2%, and Al + Cr : 0 to 5%. The composition (at%) of the CoFeNi-based alloy is such that the following ratio is satisfied: Co / ( Co + Fe + Ni ) : 0 · 1 ~ 0.9,

Fe / ( Co + Fe + Ni ) : 0,1 to 0.65,

Ni/( Co + Fe + Ni ) : 0-0.35 ' and B/( Nb + Ta): 卜 8 ° According to another aspect of the present invention, a sputtering target can be provided, which is derived from the above states It is composed of a CoFeNi-based alloy. According to still another aspect of the present invention, a perpendicular magnetic recording medium comprising a soft magnetic film layer composed of the above-described various CoFeNi-based alloys can be provided. MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail. Further, the percentage (%) described in the present invention means the atomic % (at%) unless otherwise stated. The present invention relates to a CoFeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium. This CoFeNi-based alloy contains c〇+Fe + Ni : 7 0 to 9 2 % (but N i contains 0), 3:1 to 8% (first state), 1^1) + &: 1~8% (second aspect), or

Zr + Hf+Nb + Ta : 1 to 8% (third aspect), and B: more than 7% and less than 20%, preferably from the above elements to become substantially (consisting essentially 〇f), better Only composed of the above elements

-8 - 201112238 (consisting of). Further, the third aspect of the CoFeNi-based alloy system may further contain Zr + Hf: 0 to less than 2% and Al + Cr: 0 to 5%. Here, even in the first to third aspects, the composition (at%) of the CoFeNi-based alloy satisfies the following ratios:

Co/ ( Co + Fe + Ni ) : 0·1 to 0.9,

Fe / ( Co + Fe + Ni ) : 0.1-0.65,

Ni/ ( Co + Fe + Ni ) : 0 to 0.35, and B/Ta : 1 to 8 〇

Any of Co, Fe, and Ni has an element of soft magnetic properties. The content of each element of Co, Fe, and Ni is not particularly limited, but is preferably Co: 9 to 80%, Fe: 5 to 60%, Ni: 0 to 40%, and more preferably Co: 25 to 80%. Fe : 1 5-5 2%, Ni : 0 to 10%. The total amount of Co, Fe and Ni (i.e., the amount of Co + Fe + Ni) in the alloy of the present invention is 70 to 92%, more preferably 80 to 92%. When the amount of Co + Fe + Ni is less than 70%, the saturation magnetic flux density is insufficient, and if it exceeds 92%, the total amount of Zr, Hf, Ta, Nb, and B is reduced, and sufficient amorphous properties cannot be obtained. When these three elements are compared, the saturation magnetic flux density is large in the order of Fe>Co>Ni, and the corrosion resistance is large in the order of Ni>Co>Fe. Considering the balance between the saturation magnetic flux density and the corrosion resistance, the ratio of the amounts of Co, Fe, and Ni to Co + Fe + Ni is within the following range.

Co / ( Co + Fe + Ni ) : 0.1-0.9, preferably 0.3 to 0.9,

Fe / ( Co + Fe + Ni ) : 0.1-0.65 > preferably 0.2 to 0.55, and

Ni / ( Co + Fe + Ni ) : 0 to 0.35, preferably 0 to 0.10. S-· -9 - 201112238 If Ni / ( Co + Fe + Ni ) exceeds 〇·35', sufficient saturation magnetic flux density cannot be obtained. If Fe / (Co + Fe + Ni) is lower than o.i, a sufficient saturation magnetic flux density cannot be obtained. Moreover, if it exceeds 0.65, corrosion resistance will deteriorate. Thus, if the range of Ni/( Co + Fe + Ni) and Fe / ( Co + Fe + Ni ) is determined, the lower limit of Co / ( Co + Fe + Ni ) becomes 〇 (Ni / ( Co + Fe + Ni ) ) = 0.35 ' When Fe / ( Co + Fe + Ni) = 0.65), when Co is extremely small, the Ni/(Fe + Ni) is around 0.25 to 0.40, and there is a singular point where the saturation magnetic flux density becomes extremely small. Therefore, the lower limit of Co / ( Co + Fe + Ni ) is 0.10, and the upper limit of Co / ( Co + Fe + Ni) becomes 0.9 ( Ni / ( Co + Fe + Ni ) =0, Fe / ( Co + Fe + Ni ) = 0.1).

Among the alloys of the present invention, Ta, Nb and B are all elements which can improve the amorphous property. The content of each element of Ta, Nb, and B is not particularly limited, and is preferably T a : 1 to 8 %, N b : S 5 %, B more than 7% and 20% or less, more preferably T a : 2 to 6 % , N b : 0 ~ 3 %, B : 7.5~1 5 %. Further, the total amount of Nb and Ta (i.e., the amount of Nb + Ta) in the alloy of the present invention is 1 to 8%. When the amount of Nb + Ta is less than 1%, sufficient amorphous properties cannot be obtained, and if it exceeds 8%, a sufficient saturation magnetic flux density cannot be obtained. When B is 7% or less, sufficient amorphous properties cannot be obtained, and if it exceeds 2% by weight, a sufficient saturation magnetic flux density cannot be obtained. In the alloy of the present invention, the ratio of the amount of B to the amount of Ta + Nb, that is, B / ( Ta + Nb) is from 1 to 8, preferably from 1.5 to 6. If it is within such a range, it can achieve high hardness that has not been seen before. The detailed principle of high hardness is unknown, but the combination of Ta atoms and/or Nb atoms in the alloy and B atoms may affect. Here, when B/(Ta + Nb) is less than 1 or exceeds 8, the hardness of 201112238 cannot be obtained.

Any of Zr and Hf is an element which can improve the amorphous property. The content of each element of Zr and Hf is not particularly limited, but it is preferably Zr: $2%, Hf: S 1.0%. The total amount of Zr, Hf, Nb and Ta (that is, the amount of Zr + Hf + Nb + Ta) can be added by 1 to 8%, and the total amount of Zr and Hf (that is, the amount of Zr + Hf) can be less than 2%. The range is added, which is equivalent to the third aspect of the invention. When the amount of Zr + Hf + Nb + Ta is less than 1%, the amorphous property is insufficient, and if it exceeds 8%, a sufficient saturation magnetic flux density cannot be obtained. When the amount of Zr + Hf is 2% or more, the hardness is lowered. A1 and Cr are elements for improving corrosion resistance in the alloy of the present invention. The content of each element of A1 and Cr is not particularly limited, but it is preferably 3% of A1 and 3% of CrS. The total amount of A1 and Cr (i.e., the amount of Al + Cr) is such that the upper limit is 5%. If the amount of A1 + C r exceeds 5%, the saturation magnetic flux density decreases. Further, in general, a soft magnetic film layer in a perpendicular magnetic recording medium is obtained by sputtering a sputtering target having the same composition as that of a component, and is formed on a glass substrate or the like. Here, the film deposited by sputtering is quenched. However, the examples and comparative examples described below used a quenched ribbon produced by a single-roller liquid quenching apparatus as a sample. This system is actually evaluated by the liquid quenching ribbon by the influence of the characteristics of the components in the film formed by the splashing of the quenched film. [Embodiment] Hereinafter, the present invention will be specifically described by way of examples. The quenching thinner of Table 1 - 201112238 The raw material weighed by the ingredients is 3〇g. The water-cooled copper mold with a diameter of 1〇111111 and 40mm is arc-dissolved in decompressed Ar' as a melting base material for the quenched ribbon. . The production conditions of the quenched ribbon are mounted on the dissolved base material in a single-roller type quartz tube of 15 mm in diameter, with a nozzle diameter of 1 mm, an ambient pressure of 61 kPa, a spray pressure difference of 69 kPa, and a copper roll (φ 300 ηιηι). The number of rotations was 3000 rpm, and the gap between the copper roller and the outlet nozzle was 0.3 mm to discharge hot water. The outlet hot water temperature is dissolved after each molten base material is dissolved. 201112238 m throwing 枓鞠s莩a ja / -n 1? ο οό 0 csi CO 0 o CO 〇(N3 0 csj o Csj LO evi — called σ> ο If? CO ir> Csj ir> CO CO CM C0 — A NiACo ten Fe+Ni) along ο g 0 0 <z> s <=> g 0 S C> g 0 g 〇0 0 Kf> 00 0 ΙΛ CO 〇s S g 0 g 0 gc=> ΙΛ CO 〇0 0 0 0 § 0 S 〇Fe/CCo 十Fe+Ni) β ο 0 0 o 0 引 o 〇 another o ΙΛ to in m in in to CO \n CO gs 0 ss Co/(Co+ Fe +Ni) ο c> s 0 g 0 LO 〇s 0 s 0 0 0 s 0 in CO 0 0 in c〇m CO CO LT) σ> 0 Ln 〇〇+ 0 0 0 〇0 0 CS3 ΙΛ 0 0 0 3·········· 0 C〇GO _ — 呀〇e CO °Ί Co Ten Fe +Ni. 03 CO 00 CO CO 兮0〇ir> 00 cc» CO CO 0〇CO c〇CO CO 05 g LT3 GO CD eg p 0〇0 〇CO +» Λ sx 1S 琏Φ 1S 0 0 §s flame as m 筢AM? Insert m 筢m §g Flame series mm Bulleting 铌m §sl«W Bullying gM Sn Flame 镝 筢 AM? Flame i flame §s Flame 镝 AM? Achilles tendon (MW m flame 1-1 u ο 0 〇〇0 o CO CM 〇〇o CnI Ova CO ooo 〇ο c ο 0 〇0 0 Ό Cs] CVJ CSJ 〇〇0 CO CO 0 0 0 〇ο CQ CO 00 CO 0〇CO CO 0〇L£J c— σ>ir> W in LA 0〇CO lf>〇〇σ> Λ a CO CO 04 04 CO ir>| 0 CO CO ro CQ ^3· CO CO 03 •Ο 2 ο 0 CO 0 csi CvJ CO CO 0 0 0 CO CO CO o 0 CO 0 Ο «+-· X ο 0 0 0 0 σ> o 〇0 〇0 0 0 ' 0 0 〇0 0 0 0 Ο u N ο Q 0 0 — 〇0 03 0 0 0 σ> CO σ> 0 0 a> 0 ο Z 05 CO 〇CO 00 CM rr 0 0 CO 〇0 〇Τ3» CO in CO C \J o 0 0 CP CO 0 0 CO CO 〇> Du g OO CO 00 tfi CO CO 0 CO od CO eo in CvJ LO m σ> s in 5 σ> CO CO CO 00 CO 〇g CO CO s CD CO in 0 Τ3* CO —u J 3 — CO cc ΙΛ CO 卜 OQ σ> 0 £J CO ΙΛ CO CO 2 S Stupid S invites ss 13 201112238 The quenched ribbon produced by the above method is used as a test material, Evaluation of the following items: Evaluation 1: Saturation magnetic flux density about 15 mg of test material, using VSM device (vibration sample) Type magnetometer), the saturation magnetic flux density (T) was measured by applying a magnetic field of 1.2 MA/m (15 kOe). Evaluation 2: Amorphous (semi-wide) The evaluation of the amorphous nature of the quenched ribbon by X-ray diffraction. In general, if the X-ray diffraction pattern of an amorphous material is measured, the diffraction peak is not seen, and it becomes a halo-pattern unique to amorphous. Further, in the case of amorphous, although the diffraction peak is observed, the peak of the spectrum becomes lower than that of the crystalline material, and becomes a half-width 値 (the angle at which the diffraction peak is one-half height) Wide) broad spectrum peak. This semi-wide lanthanum is related to the amorphous nature of the material. The higher the amorphousness, the wider the diffraction spectrum peak, and the larger the half-width 値. Therefore, the amorphous property was evaluated by the following method. The glass plate was adhered to the test piece by double-sided tape, and the diffraction pattern was obtained by the X-ray diffraction device. At this time, the measurement surface became the contact surface of the copper roll of the quenched ribbon, and the test material was adhered to the glass plate. The X-ray source was measured by forming a scanning speed of 4° with a Cu-k α line. The image was analyzed by the angle of the angle at half the height of the main peak of the diffraction pattern, and the half width was determined to evaluate the amorphousness. 201112238 Evaluation 3 · 'Corrosion resistance The test piece was adhered to the glass plate with double-sided tape, and the salt spray was exposed for 16 hours at 35 ° C. Corrosion resistance was evaluated on the basis of the following criteria. X: Total rust △: - Partially rusted 〇: Approximate rust-free evaluation 4: Vickers hardness causes the quenching ribbon to be embedded in the resin in the longitudinal direction, and the Vickers hardness tester measures the Vickers load of the quenched ribbon The evaluation was performed on the average of 50 g and n=10. about. The results of these evaluation tests indicate a solution test of square g 5% NaCl, honing the strip of chilled strips to Vickers (! (HV). The size of the indentation is 1 〇> in Table 2. 15- 201112238 Table 2 No Saturated Magnetic (Τ) 値 (° > Corrosion Resistance Vickers Hardness (HV) Remark 1 1.4 0.4 〇1040 2 1.3 〇1080 3 1.2 〇1100 41.1 6.6 〇1120 Hair 5 1.6 1.5 △ 1080 Ming 6 1.5 D 8 △ 1060 —- 〇 1080 Example 7 1.4 0.6 8 1.4 0.6 〇 1100 9 1.1 ----- 6.4 Δ 1040 10 1.3 0.2 〇 880 11 1.1 〇 900 12 1.1 5.5 〇 940 13 0.8 7.3 △ 1020 Ratio 14 0.9 6.0 Δ 940 15 0.9 5.8 △ 1040 Compared with 16 0.9 1 1 0.4 △ 1000 Example 17 0.9 0.7 〇 1060 18 1.2 6.1 X 1060 19 0.9 — II 6.9 〇 1100 20 0.9 7.5 --- 〇 1100 In Table 1, Examples 1 to 9 are examples of the present invention, and examples 11 0 to 2 0 are comparative examples. As shown in Table 1, Example 10 has a small content of Ta and B, and has a large content of (Co + Fe + Ni ), and (Zr) The content of +Hf+Nb + Ta ) is small, and further B/(Nb + Ta) is large, so the half width is small and the Vickers hardness is low. Example 11 is B/( Nb + Ta ) When the size is large, the Vickers hardness is low. In Example 12, the B/(Nb + Ta) is small, so the Vickers hardness is low. -16- 201112238 Example 13 is the content of B and the content of (Co + Fe + Ni) The content of the saturated magnetic flux is low, and the content of (Zr + Hf + Nb + Ta ) is high, and the content of (Zr + Hf) is high, so the saturation magnetic flux density is low and the Vickers hardness is low. The content of + Cr) is large, so the saturation magnetic flux density is low. In Example 16 , Co/( Co + Fe + Ni ) is low, so the saturation magnetic flux density is low. Example 17 is the height of Co/ ( Co + Fe + Ni ) And Fe / ( Co + Fe + Ni ) is low, so the saturation magnetic flux density is low. Example 1 8 series Fe / ( Co + Fe + Ni ) is high, so the corrosion resistance is poor. Example 19 is Ni / ( Co + Fe + Ni ) is high, so the saturation magnetic flux density is low. In Example 20, the content of Ta is high, and the content of (Zr + Hf + Nb + Ta ) is high, so the saturation magnetic flux density is low. However, any of Examples 1 to 9 satisfies the conditions of the present invention, and it is understood that either of them has excellent characteristics. As described above, Ta and/or Nb and B are simultaneously added, and by forming a specific B/(Nb + Ta) ratio, high hardness which is not found in conventional alloys can be obtained. Thereby, an alloy excellent in magnetic properties, amorphousness, corrosion resistance, and hardness can be provided. -17-

Claims (1)

201112238 VII. Patent application scope: 1. A CoFeNi alloy which is a CoFeNi alloy for a soft magnetic film layer in a perpendicular magnetic recording medium, and the above CoFeNi alloy contains at least Co + Fe + Ni : 70 to 92% (The Ni system includes ruthenium), Ta: 1 to 8%, and B: more than 7% and 20% or less. The composition (at%) of the CoFeNi-based alloy is such that the following ratio is satisfied: Co/ ( Co + Fe + Ni ) : 0· 1 ～0.9, Fe/( Co + Fe + Ni ) : 0.1-0.65 ' Ni/ ( Co + Fe + Ni ) : 0-0.35 * and B/Ta: 1~8〇2 a CoFeNi-based alloy which is a CoFeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium, wherein the CoFeNi-based alloy contains Co + Fe + Ni at 70% to 92% (but the Ni system contains 0), Nb + Ta : 1 to 8%, B: more than 7% and 20% or less, and the composition (at %) of the above CoFeNi-based alloy is such that the following ratio is satisfied: Co / ( Co + Fe + Ni ) : 0.1- 0.9 'Fe/( Co + Fe + Ni ) : 0.1 to 0.65, Ni/( Co + Fe + Ni ) : 0 to 0.35, and B/( Nb + Ta) : 1 to 8. 3. A CoFeNi-based alloy which is a CoFeNi-based alloy for a soft magnetic film layer in a perpendicular magnetic recording medium, and the CoFeNi-based alloy contains Co + Fe + Ni at 70% to 92% (but the Ni system contains ruthenium) , 201112238 Zr+Hf+Nb+Ta : 1~8%, B: more than 7 % and less than 20%, Zr + Hf : 0~ less than 2%, and eight 1 + (:1*: 0~5% The composition (at%) of the aforementioned CoFeNi-based alloy is such that: Co/ ( Co + Fe + Ni ) : 0· 1 to 0·9, Fe / ( Co + Fe + Ni ) : 0.1 to 0.65 Ni/( Co + Fe + Ni ) : 0 to 0.35, and B/( Nb + Ta) : 1 to 8. 4. A sputtering target which is a CoFeNi-based alloy of the first application of the patent scope 5. A sputtering target comprising a CoFeNi-based alloy of the second application of the patent application. 6. A sputtering target comprising a CoFeNi-based alloy according to claim 3 of the patent application. A perpendicular magnetic recording medium comprising a soft magnetic film layer comprising a CoFeNi-based alloy according to claim 1 of the patent application. 8. A perpendicular magnetic recording medium having a patent application scope 2 A soft magnetic film layer composed of a CoFeNi-based alloy. 9. A perpendicular magnetic recording medium comprising a soft magnetic film layer composed of a CoFeNi-based alloy of the third application of the patent scope. -19- 201112238 : (1) The representative representative of the case is: No (2) The symbol of the symbol of the representative figure is simple: No 201112238 If there is a chemical formula in the case, please disclose the chemical formula that best shows the characteristics of the invention: None