201111788 六、發明說明: 【發明所屬之技術領域】 本發明係提供一種可校正取放器上之 元件之接腳準確對位於測試機之探針 試品質之輸送裝置。 執仃礼式作業’以&升測 【先前技術】 製程,為確保IC成品之品質,業者^炊^制封勝等多道加工 類機,用以測試I C,以淘汰出不良:曰j裝程配置有測試分 供料裝置、收料裝置、輸送裝置及:二目2測試分類機包含有 納待測之I C ’收料裝置伽以容納3之巧料裝置係用以容 測試I C,輸送裳置則於供料装置C、’測試機係用以 測/完測之I C ;請參閱第1、2圖Γ、置及測試機間移載待 係設有複數個具探針之測試座i 類機之測試機1 0 1 0之前方設有具供料载台2 1 1及]^2 ◦係於測試機 機構2卜於測試機工〇之後方2之第一載送 載台2 2 2之第二载送機構2 2,另於測^機^ 2 21及收料 料機構2 3,該移料機構2 3係於測 ,1◦之上方設有移 動結構2 3 1,用以帶動—承架2 3 側設有第-驅 架2 3 2之底面則固設有第一取放器 軸向位移,而承 構21及測試機1〇間移載待測/ 用以於第-載送機 測試機1 0之另-_設有第二轉結^ ^移料機構2 3於 架2 3 5作Y- z轴向位移,而承架p 4 ’用以帶動一承 取放器2 3 6,用以於第二載送機構=底面顧設有第二 測/完測之IC,以移料機構2 3 j及蜊試機1〇間移載待 式為,該第—驅動結構2 3 1係帶動承構2 3 1作動方 2 3 2轴向位移,於第一載送機“ ί2及第一取放器 1十?出之1 C,並移載至測試機1 〇夕1之供料载台2 1 使 腳與測試座1 1内之探針相接觸而: 2〇1111788 於,試完畢後,第—驅動結構2 3 i再帶動第一取放器2 3 3於 ,試座11内取出完測之!c,並移载至第一載送機構2丄之收 料載台212上,使收料載台212載出完測之IC ;惟,由於 日趨精密與輕巧,其各接腳之間距亦相對縮小,使得丨C2 1之探針相互對位之精準度要求相當高,但該移 =機構2 3之第-、二驅動結構2 31、2 3 4係具有元件組裝 之,積誤差’導致第—取放器2 3 3及第二取放器2 3 6將待 人於測試座1 1時,易因此—累積誤差,而不易使1201111788 VI. Description of the Invention: [Technical Field] The present invention provides a conveying device capable of correcting the pin of a component on a pick-and-placer accurately to the probe test quality of the test machine. In order to ensure the quality of the finished IC, the manufacturer is responsible for the quality of the finished IC, and the manufacturer has used a number of processing machines to test the IC to eliminate the bad: 曰j The process is equipped with a test sub-feeding device, a receiving device, a conveying device, and a: the second-eye 2 test sorting machine includes an IC to be tested. The receiving device is used to accommodate the test device IC. The skirt is placed in the feeding device C, 'testing machine is used to test / complete the IC; please refer to the first and second diagrams, and the test and transfer between the test machine to be equipped with a plurality of test sockets with probes The test machine of class i machine is equipped with a feeding stage 2 1 1 and ^^2 before the test machine mechanism 2 and the first carrier stage 2 2 after the test machine work 2 2 The second carrier mechanism 2 2 is further connected to the measuring device 2 21 and the receiving material mechanism 23, and the moving mechanism 2 3 is connected to the measuring device, and the moving structure 2 3 1 is disposed above the 1 inch. Driven-supported frame 2 3 side is provided with the first drive frame 2 3 2 the bottom surface is fixed with the first pick-and-place axial displacement, while the bearing 21 and the test machine 1 are transferred between the test pieces / for the first - Carrier test The test machine 10 is further equipped with a second transfer knot ^ ^ the transfer mechanism 2 3 for the Y-z axial displacement of the frame 2 3 5, and the carrier p 4 ' is used to drive a loader 2 3 6. For the second carrier mechanism=the bottom surface is provided with the second measurement/finished IC, and the transfer mechanism 2 3 j and the test machine 1 are transferred between, the first drive structure 2 3 1 series drives the bearing 2 3 1 to move the 2 2 2 axial displacement, in the first carrier " ί2 and the first pick-and-place device 1 ten out of 1 C, and transfer to the test machine 1 〇 1 1 The feeding stage 2 1 makes the foot contact with the probe in the test seat 1 1 : 2〇1111788 After the test, the first driving structure 2 3 i drives the first pick-and-place device 2 3 3, The test block 11 takes out the measured !c and transfers it to the receiving stage 212 of the first carrier mechanism 2, so that the receiving stage 212 carries out the tested IC; however, due to the increasingly sophisticated and lightweight The distance between the pins is also relatively narrow, so that the accuracy of the alignment of the probes of the C2 1 is relatively high, but the movement of the mechanism 2 3 and the second drive structure 2 31, 2 3 4 have Component assembly, product error 'lead to the first pick-and-placer 2 3 3 and second take Device 236 to be a person on the test base 1, thus easily - cumulative errors, but not easy to make a
接腳解對健職座1 1之各探針,以歸生職不準確 之情形’造成測試品質不佳之缺失。 【發明内容】 置,目的一,係提供—種可校正電子元件位置之輸送裝 ί料裝配於具測試機之機台上,包含有載送機構及 像写之# ^1,該輸达裝置另於錢機構及賴機間設有具取 ί ,機翻於—縣結構之下方設有調整結 試機之探針,以準確^行射3之各接腳精準對位於測 益。 柯執仃㈣健’ _提升測試品質之實用效 本發明之目的二,係提供一種可枋 置^該移料機構之調整結構係依取像資料=^ ^輸送裝 ::輛向驅動源分別帶動取放器自動校二二=動源及X =之各接腳精準對位於測試機測試座使電子 作業,達到提升使用便利性之實用效益。丨彳確貝執行測試 201111788 【實施方式】 實二明作更進一步之瞭解,_-較佳 於具有測試機5 0之機台4 3裝置3 〇係配置 座51,本實施例係設有複 係於測試機5 〇之前方設有第― f/^測之電子元件’輸送健3 Q g 1 # 送機構3 2,第二載送機構3 2係具^有 收料載台3 2 2,用以分別載送待測/完測之=載二3 21及 -載送機構3 1與測試機5⑽設有第 ’另於第 數個為CCD之取像ί?ί用= 二央控制單元= 旋轉《動源,該旋轉堪動^'承架3 5 2上因設有 轉軸連結第—機架3 5 4,該^以3 達3 5 3之 向之第―滑座3 5 5,一位於機、5 底面則設有γ軸 架’該疊層式機钱於—第 機^5 4下方之叠層式機 滑軌3 5 7,並於底面設6 = #向之第一 一滑軌3 5 7滑置連結於第,架3 5 4:第一滑y::第 201111788 設有¥軸向驅動源及x軸向驅動源, 軸桿端部裝設有第5 9,並於線性馬達3 5 9史 二機架3 5 6作之底面’使線性馬達3 5 9可帶動第 5 5位蔣,軸向移,並以第一滑執3 5 7沿第一滑座3 轉軸則傳動一古ϊί驅動源係為-馬達361,該馬達361文 連結以3 2,並於皮帶輪組3 6 2上設有第二 Ί fi 4,姑势乂連、、"一位於第二機架3 5 6下方之第三機傘 5,並以ΐ第ΐ機架3 6 4之頂面係設有x軸向之第二滑座3 6、 8上,使5滑置於第二機架3 5 6之第二滑軌3 5 第:機6 1可帶動第三機架3 6 4作X軸向位移,另於 ==^1;-浮動頭3 6 6,該第-浮動續 構,該第二,ΐη,該承架3 6 9之下方則設有第二調整結 轉驅動承架3 6 9上固設有旋轉驅動源,該旋 3 7 i =馬達3 7 0之轉軸連結第-機架 2 機架3 71之底面則設有γ軸向之第-滑座3 7 於-第二機疊層式機架’該疊層式機架係 向驅動源及X軸向驅動源而;;=以, =3 7 4滑置連結於第—機架3 7丄之第—;;U g以= 為6,並於線性馬達3 7 6之= 3 71之底面,使線性馬ϊ3、7 i端s ΙΐΙ軸向位移’並以第-滑執3 7 4沿第-滑ί 而χ轴向驅動源係為-馬達3 7 8,該馬達3 7 8H由 201111788 皮帶輪組3 7 9,並於皮帶輪組3 7 9上設有第二連結 木3 8 0 ’用以連結一位於第二機架373 1,該第三機架3 8丄之頂面係設衫轴 ^ 並以第二滑座3 8 2滑置於第二機架3 7 3 ; 亡機3 7 8可帶動第三機架3 81作X軸向位移,另於黑 3 8 1之底面裝設有第二浮動頭3 8 3,該第二通 8 3之下方則裝設有第二取放器3 8 4,使 / 麵3 2及職 移料機構3 5係以第-驅動結構3 51帶動第_巧整社盖 取放器3 6 7作Y軸向位移至供料載台:匕3 !第一 取放器3 6 7係裝配於第一浮&載方,由於第一 作一浮動緩衝,以防壓損待測之電子 二動頭3 θ β 子元件6 1移载至視覺機構3 3之上方,並制測之電 6定位,該視覺機構3 3係以取像器動頭3 6 61取像,並將取像資料輸送至中央電子元件 ►則依取像資料控制相關機構作1中2制;元 作Υ軸向位移至測試機5 〇處,以測:J子元件6 1 準確對位於測試座51之探針,第一j 61之各接腳 帶動第-機架3 5 4及其下方之f關Γ 先以馬達3 5 3 取放器3 6 7帶動待測;旋轉作動,使第一 線性馬達3 5 9之轴桿端部係連結度補償校正,又由於 得線性馬達3 5 9可帶動第二機加q ς ; 一連結架3 6 0,使 一滑軌3 5 7沿第一機架3 ,並使第 二機架3 5 6及其下方之相闕二輔助位移’第 取放器3 6 7帶動待測之電子元件移移之 201111788 動第-機ίS ^ 1 ί、以皮帶輪組3 6 2經第二連結架3 6 3 64其下方之第—浮動頭3 6 6、第—取放器 3 移,使第—取放器3 6 7 φ動待測之電子元件 ^1作X軸向位置之補償校正,因此,該第一取放 作 及ill軸向位移,而使待測之電子元件^1自動補償 該移料機構3 5係以第二驅動結構3 6 !=二;ii4於第二載送機構3 2之供料載台3 21 上取出下一待測之電子元件6 2,並移載至 處’第二視覺機構3 4即以取像器 、 :===取ί;請參閱第H0圖取 C 第一驅動結構3 5 1係以第—取放器3 6 座51内取出完測之電子元件6 1,並移 ΐ出!二收料Ϊ台31 2上,使收料載台3 1 2 整姓構、第二敢二Η ,第一驅動結構3 6 8則帶動第二調 5 0°之例3 8 f及待測之電子元件6 2位移至測試機 ,: ί二調整結構亦以馬達3 7 〇帶動第-:關元件同步旋轉作動’使第二取放器3 ;=及其下方之相關元件作 = 皮帶;組3 7 9及第二連結架=The pin solutions to the probes of the health seat 1 1 are inaccurate in returning jobs, resulting in a lack of test quality. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a transportable device for correcting the position of an electronic component, which is mounted on a machine having a test machine, including a carrier mechanism and a writing device #^1, the transmission device In addition, there is a probe with an adjustment test machine under the money organization and the machine. The accurate positioning of each pin is accurate. Ke Zhizhen (four) Jian' _ enhances the quality of the test. The purpose of the invention is to provide a configurable structure. The adjustment structure of the material is based on the image data = ^ ^ transport:: the vehicle to the drive source respectively The automatic pick-and-place device of the pick and place device = the source and the X = each pin are accurately placed on the test machine test stand to make the electronic work, and the practical benefit of improving the convenience of use is achieved.丨彳 贝 执行 执行 执行 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 Before the test machine 5 〇, the electronic component of the ―f/^ measurement is transmitted, the transmission 3 3 g 1 # delivery mechanism 3 2, and the second carrier mechanism 3 2 is equipped with a receiving stage 3 2 2 For carrying the test to be tested/tested separately = load 2 3 21 and - the carrier mechanism 3 1 and the test machine 5 (10) are provided with the 'the other number is the image of the CCD ί?ί with = two central control Unit = Rotating "Moving source, the rotation is ok ^' Shelf 3 5 2 is connected by the rotating shaft - the frame 3 5 4, the ^ 3 to 3 5 3 to the first - the sliding seat 3 5 5 One is located on the bottom of the machine, and the bottom of the 5 is equipped with a γ-axis frame. The stacked machine is used for the laminating machine slides under the machine ^5 4 and is set to 6 = 7 to the bottom. A slide rail 3 5 7 is slidably coupled to the first frame, and the frame 3 5 4: the first slide y:: the 201111788 is provided with an axial drive source and an x-axis drive source, and the shaft end is provided with the 5th 9, And in the linear motor 3 5 9 history two racks 3 5 6 made of the bottom surface 'make linear motor 3 5 9 can drive the 5th 5th Chiang, axial shift, and with the first slip 3 5 7 along the first slide 3 shaft, then drive a Gu ί drive source is - motor 361, the motor 361 text link to 3 2 And on the pulley set 362, there is a second Ί fi 4, a squat, and a third umbrella 5 located below the second frame 356, and the ΐ ΐ frame 3 The top surface of the 6 4 is provided with the second sliding seat 3 6 , 8 of the x-axis, so that the sliding of the 5 is placed on the second sliding frame of the second frame 3 5 6 3 5: the machine 6 1 can drive the third The frame 3 6 4 is X-axis displacement, and the other is ==^1; - the floating head 3 6 6, the first-floating continuation, the second, ΐη, the lower part of the frame 3 6 9 is provided The second adjustable carry-over drive frame 3 6 9 is fixed with a rotary drive source, and the rotary 3 7 i = motor 3 7 0 rotating shaft is coupled to the first frame 2 frame 3 71 is provided with a γ-axis - slide 3 7 in - second machine stacked rack 'the stacked frame is driven to the drive source and the X-axis drive source;; =, = 3 7 4 is slip-connected to the first frame 3 7丄第—;; U g with = 6 and on the underside of the linear motor 3 7 6 = 3 71, making the linear stirrup 3, 7 i end s ΙΐΙ axial position 'And with the first - slip 3 7 4 along the first - slide ί and the axial drive source is - motor 3 7 8 , the motor 3 7 8H by 201111788 pulley set 3 7 9, and on the pulley set 3 7 9 a second connecting wood 380 is provided for connecting a second frame 373 1 , the top surface of the third frame 380 is attached to the shirt shaft ^ and is disposed by the second sliding seat 328 The second frame 3 7 3 ; the dead machine 3 7 8 can drive the third frame 3 81 to be X-axis displacement, and the bottom surface of the black 3 8 1 is equipped with a second floating head 3 8 3, the second pass The second pick-and-place device 3 8 4 is installed below the 8 3 , and the / surface 3 2 and the working material transfer mechanism 3 5 are driven by the first driving structure 3 51 to drive the first pick-up pick-up device 3 6 7 Y-axis displacement to the feeding stage: 匕3! The first pick-and-placer 3 6 7 is assembled on the first float & the carrier, due to the first floating buffer, to prevent pressure loss of the electron to be tested The moving head 3 θ β sub-element 6 1 is transferred to the upper side of the visual mechanism 3 3 and the measured electric power 6 is positioned. The visual mechanism 3 3 takes an image of the image pickup moving head 36 6 and takes image data. Delivered to the central electronic component ►According to the image data control related institutions for the 1 2 system; The axial displacement is to the test machine 5 , to measure: the J sub-element 6 1 is exactly opposite to the probe located in the test stand 51, and the pins of the first j 61 drive the first frame 3 5 4 and the lower side thereof Γ First take the motor 3 5 3 pick-and-placer 3 6 7 to drive the test; rotate the action to make the first linear motor 359 shaft end joint degree compensation correction, and because the linear motor 3 5 9 can drive The second machine adds q ς; a connecting frame 306, so that a sliding rail 3 5 7 is along the first frame 3, and the second frame 356 and the lower two auxiliary displacements of the second frame 3 6 7 drives the electronic component to be tested to move 201111788 to the first machine ίS ^ 1 ί, to the pulley set 3 6 2 via the second link 3 6 3 64 below the first - floating head 3 6 6 , - the pick and place device 3 is moved, so that the electronic component ^1 of the first pick-and-placer 3 6 7 φ is to be compensated for the X-axis position. Therefore, the first pick-and-place operation and the axial displacement of the ill cause The electronic component to be tested ^1 automatically compensates the transfer mechanism 35 to take the second drive structure 3 6 !=2; ii4 on the supply stage 3 21 of the second carrier mechanism 3 2 to take out the next test to be tested Electronic component 6 2, and transferred everywhere' The second visual mechanism 34 is taken by the image capturing device, :===; please refer to the figure H0 to take the C. The first driving structure 3 5 1 is taken out by the first pick-and-placer 36 seat 51 Element 6 1, and moved out! Two receiving platform 31 2, so that the receiving stage 3 1 2 the whole name, the second dare, the first driving structure 3 6 8 drives the second adjustment 5 0 Example 3 8 f and the electronic component to be tested 6 2 Displacement to the test machine, : ί 2 adjustment structure is also driven by the motor 3 7 第 -: the closing element synchronously rotates to make the second pick-and-placer 3; = and The relevant components below it are = belt; group 3 7 9 and second link =
Li 向位移’使第二取放器3 8 4帶動待測之 償校正,因此,該第二取放器3 8 4可作角 =jr腳精準對位於測試座51之 據此,本發明輸送裝置之調整結構 'fit。 的接腳精準對位於測試座之探針而執行測 201111788 及 第2圖 第3圖 第4圖 第5圖 第6圖 第7圖 第8圖 第9圖 第1圖· f式輸送裝置朗賴之配置圖。 習式移料機構之示意圖。 本發明輸送裝置與測試機之配置圖。 本發明移料機構之示意圖。 本發明第-、二調整結構之前視圖。 本發明第一、二調整結構之側視圖。The Li-direction displacement causes the second pick-and-placer 3 8 4 to drive the compensation to be tested. Therefore, the second pick-and-placer 384 can be accurately positioned on the test stand 51 according to the angle of the jr foot. The adjustment structure of the device is 'fit. The pin is accurately placed on the probe in the test stand and is tested 201111788 and 2nd figure 3rd figure 4th figure 5th figure 6th figure 7th figure 8th figure 9th figure 1st figure · f type conveying device Lang Lai Configuration diagram. Schematic diagram of the conventional material transfer mechanism. The configuration diagram of the conveying device and the testing machine of the present invention. A schematic view of the transfer mechanism of the present invention. The front view of the first and second adjustment structures of the present invention. A side view of the first and second adjustment structures of the present invention.
本發明輪送裝置之使用示意圖(一)。 本發明輪送裝置之使用示意圖(二)。 本發明輸送裴置之使用示意圖(三)。 第1 0圖:本發明輪送裝置之使用示意圖(四)。 【主要元件符號說明】 〔習式〕 測試機:10 輸送裝置:2 0 供料載台:211 第二載送機構:2 2: 收料載台:2 2 2 第一驅動結構:2 31 第一取放器:2 3 3 承架:2 3 5 〔本發明〕 測試座:11 第一載送機構:2 i 收料載台:212 供料載台:2 21 移料機構:2 3 承架:2 3 2 第二驅動結構:2 3 4 第二取放器:2 3 6 輸送裝置:3 0 供料載台:311 第二載送機構:3 2 收料載台:3 2 2 取像器:3 31 取像器:3 41 第一載送機構:31 收料載台:312 供料載台:3 21 第一視覺機構:3 3 第二視覺機構:3 4 移料機構:3 5 201111788 第一驅動結構:3 51 馬達:3 5 3 第一滑座:3 5 5 第一滑軌:3 5 7 線性馬達:3 5 9 馬達:3 61 第二連結架:3 6 3 第二滑座:3 6 5 第一取放器:3 6 7 承架:3 6 9 • 第一機架:3 71 第二機架:3 7 3 第二滑執:3 7 5 第一連結架:3 7 7 皮帶輪組:3 7 9 第三機架:3 81 第二浮動頭:3 8 3 機台:4 0 測試機:5 0 φ 電子元件:61、6 2 承架:3 5 2 第一機架:3 5 4 第二機架:3 5 6 第二滑執:3 5 8 第一連結架:3 6 0 皮帶輪組:3 6 2 第三機架:3 6 4 第一浮動頭:3 6 6 第二驅動結構:3 6 8 馬達:3 7 0 第一滑座:3 7 2 第一滑執:3 7 4 線性馬達:3 7 6 馬達:3 7 8 第二連結架:3 8 0 第二滑座:3 8 2 第二取放器:3 8 4 測試座:51Schematic diagram of the use of the wheeling device of the present invention (1). Schematic diagram of the use of the wheeling device of the present invention (2). Schematic diagram of the use of the delivery device of the present invention (3). Figure 10: Schematic diagram of the use of the wheeling device of the present invention (4). [Main component symbol description] [Literature] Tester: 10 Conveying device: 2 0 Feeding station: 211 Second carrier: 2 2: Receiving stage: 2 2 2 First drive structure: 2 31 A pick and place device: 2 3 3 Shelf: 2 3 5 [Invention] Test stand: 11 First carrying mechanism: 2 i Receiving platform: 212 Feeding station: 2 21 Transfer mechanism: 2 3 Rack: 2 3 2 Second drive structure: 2 3 4 Second pick-and-place device: 2 3 6 Conveying device: 3 0 Feeding station: 311 Second carrying mechanism: 3 2 Receiving platform: 3 2 2 Take Imager: 3 31 Imager: 3 41 First Carrier: 31 Receiving Station: 312 Feeding Station: 3 21 First Vision: 3 3 Second Vision: 3 4 Transfer Mechanism: 3 5 201111788 First drive structure: 3 51 Motor: 3 5 3 First slide: 3 5 5 First slide: 3 5 7 Linear motor: 3 5 9 Motor: 3 61 Second link: 3 6 3 Second Slide: 3 6 5 First pick-and-place: 3 6 7 Shelf: 3 6 9 • First frame: 3 71 Second frame: 3 7 3 Second slip: 3 7 5 First link: 3 7 7 Pulley set: 3 7 9 Third frame: 3 81 Second floating head 3 8 3 Machine: 4 0 Tester: 5 0 φ Electronic components: 61, 6 2 Shelf: 3 5 2 First frame: 3 5 4 Second frame: 3 5 6 Second slip: 3 5 8 First link: 3 6 0 Pulley set: 3 6 2 Third frame: 3 6 4 First floating head: 3 6 6 Second drive structure: 3 6 8 Motor: 3 7 0 First slide: 3 7 2 First slip: 3 7 4 Linear motor: 3 7 6 Motor: 3 7 8 Second link: 3 8 0 Second slide: 3 8 2 Second pick-and-place: 3 8 4 Test stand: 51