TW201119697A - Plasma jet device. - Google Patents

Abstract

A plasma jet device includes a housing that circumferentially delimits an accommodating chamber, a gas supply unit, and a plurality of electrode units that are arranged in parallel in the accommodating chamber. Each electrode unit includes a first electrode and a second electrode, which are spaced from each other and are of opposite polarities. Furthermore, the first electrode and the second electrode together define a dissociation channel having an inlet end and an outlet end. Each first electrode and the second electrode of an adjacent electrode unit also collectively define a dissociation channel. The outer shapes of the first and second electrodes are different so as to make the width of each dissociation channel change from the inlet end to outlet end. As such, the range of jetting plasma can be increased and the acceleration effect of plasma jet can be enhanced by the changing of the width of the dissociation channel.

Description

201119697 VI. Description of the Invention: [Technical Field] The present invention relates to an injection device, and more particularly to a plasma injection device. [Prior Art]

In recent years, research on the use of plasma to promote the dissociation effect of gases for the removal of gaseous pollutants is progressing, and the application of sterilization by plasma has been extended to products such as air conditioners and air cleaners. Studies have shown that plasma has the effect of destroying its extracellular membranes for Gram-negative bacteria, such as E. coli, because charged particles in the plasma can be found on the rough surface of such bacteria. The difference in curvature produces an effect similar to the tip discharge, which makes free radicals (plasma) and ultraviolet radiation in the plasma easily penetrate, causing damage to the tissue inside the cell. However, the general thermoelectric equipment (thermal coffee surface), because the system temperature is more than the Celsius temperature - more than 10,000 degrees, suitable for high temperature areas, such as nuclear power plant waste treatment, for non-heat resistant materials (four) treatment has its difficulties To solve the above problems, there will be as shown in Figure 1, Zhonghuamin@公告$

The "hot air plasma sterilizing device" disclosed in the invention patent No. 1262801 comprises a plasma generating unit 丨丨, R and a fan 12. The plasma generating unit 11 includes a transformer unit M1, an electric water pressure king, a flat lamp electrode plate 112 coupled to the transformer unit 111, and a counter electrode m; the two electrode plates 112 The mixed gas 113 is mixed with a high-resistance material on the 1U-V plate U2 to form a resistive layer 114' or a y. y _ 疋 directly in a plate-like high-resistance layer 201119697 On an electrode plate 112. By the above arrangement, the two electrode plates 112 are lightly connected to the variable μ unit ill to form an electric field, and the airflow generated by the fan 12 is used to supply the plasma and heat provided by the plasma generating unit 11. Delivered to a specific location to achieve the effect of hot air plasma sterilization. However, the above design still has the following disadvantages: (1) The two parallel electrode plates 112 are actually too small to ignite the plasma at a helium atmosphere, and the sterilization range is limited. (2) The two parallel electrode plates U2 are arranged in parallel, so that the air flow between them has no acceleration effect, which affects the sterilization efficiency. (3) If the high-resistance layer 114 is bonded to the electrode plate ι 2 in a plate shape, the curved electrode cannot be applied; if the high-resistance layer 114 and the electrode plate ι 2 are combined by coating, the strain amount is different due to heat between different materials. The high resistance layer 114 is prone to breakage or deformation. (4) Sufficient temperature effect sterilization by the resistive layer 114 will result in energy consumption and poor efficiency, or the processing material may be affected by the thermal mass change, which cannot contribute to low temperature sterilization. SUMMARY OF THE INVENTION It is an object of the present invention to provide a plasma jet apparatus having a wide range of plasma working zones and capable of providing low temperature plasma. Therefore, the plasma spraying device of the present invention comprises: a casing defining an accommodating space; a milk supply unit communicating with the accommodating space and supplying gas into the accommodating space; 201119697 a plurality of electrodes a plurality of electrodes are arranged side by side in the accommodating space, each of the electrode units includes a first electrode, and a space is spaced apart from the first electrode and the first electrode ′, wherein the first and second electrodes have opposite polarities And jointly defining a dissociation channel 'the dissociation channel has an inlet end, and an outlet end' and the [electrode of each electrode unit and the second electrode of the adjacent electrode unit together define the dissociation channel, wherein the dissociation channel One or two electrodes

: different' such that each dissociation channel varies its width along the inlet end to the outlet end as the shape of the first and second electrodes is different; and a voltage source supplies electrical energy to the electrode unit; the gas supply The gas supplied by the unit is dissociated into a quasi-neutral air mass when entering from the inlet end of the dissociation channel, and is ejected outward from the outlet end. The effect of the invention is that: by arranging a plurality of electrode units in the accommodating space, the scope of the electrosurgical injection can be greatly improved, and the dissociation defined by the first and second electrodes different in shape of each electrode The channel can enhance the acceleration of the plasma jet. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the drawings. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Fig. 2', a first preferred embodiment of the plasma spraying device 2 of the present invention comprises a casing 3, a gas supply unit 4, a plurality of electrode units 5, and a voltage source 6. 201119697 _ The housing 3 defines an accommodating space 31. The gas supply unit 70 4 is in communication with the accommodating space 31 and supplies gas into the accommodating space 31. The electrode unit 5 is a straight line. The form is juxtaposed in the housing 31 and the voltage source 6 is used to supply electrical energy to the electrode unit. Referring to FIG. 3 and reviewing FIG. 2, each of the electrode units 5 includes a first electrode 51. And a second electrode 52 spaced apart from the first electrode 51. Wherein the children, the electrodes 51, 52 have opposite polarities and collectively define a dissociation channel 5.3 having an inlet end 531 and an outlet end and the first electrode 51 of each electrode unit 5 adjacent to each other The second electrode 52 of the electrode unit $ also collectively defines the dissociation channel 53. In this embodiment, the center line 2 of the first electrode 51 of each electrode unit 5 overlaps with the center line and the point line of each second electrode 52, that is, the first pole 51 and The second electrode 52 is concentrically arranged: in the middle, the first and second electrodes S1 are different in shape, such that each dissociation channel 53 along the enclosing 531 to the outlet # 532 will follow the first The shape of one of the electrodes 51, 52 is varied to change its width. Referring to FIG. 3 to FIG. 9, in the embodiment, as shown in FIG. 3, the cross-sectional shape of each of the first electrodes 51 is a hollow circle, and the cross-sectional shape of each second electrode brother is a rectangle. The female-second electrode 52 having a rectangular cross-sectional shape is used, and the cross-sectional shape of each of the first electrodes 5i is a solid circular shape as shown in FIG. 4, and the hollow circular shape shown in FIG. , 楕 round, hollow asymmetrical circular circle as shown in ® 7, or a solid asymmetric circular shape as shown in Figure 8. Here, the asymmetric circular opening in FIG. 7 and FIG. 8 201119697 means that the first electrode 51 is substantially circular, but is based on the axis passing through the center point of the first electrode 51 in the lateral direction. The upper and lower sides are asymmetrical patterns with a width and a width. In addition, in the first and second electrodes 51 and 52 shown in FIG. 3 to FIG. 8 , each of the first electrodes 51 is made of a metal material, and each of the second electrodes 52 is made of a metal material and the surface is covered with a surface. A dielectric layer 54 is formed to block the electron path from the flow of light. The dielectric layer 54 may be coated on the first electrode 51 as shown in FIG. 9 , and is not limited thereto. The dielectric layer 54 is made of a material having a resistivity greater than l〇E8 ohm_cm. In this embodiment, quartz glass is used, and of course, alumina ceramics, aluminum oxide, Teflon, and fluorin may be used. Resin, or engineering plastics (such as: p〇M, pEEK, pBT, PPS, ABS, ultra-high molecular weight polyethylene) should be used instead of this. Referring to FIG. 10, the cross-sectional shape of each of the second electrodes 52 may also be a modified shape as shown in the figure, and matched with the first electrodes 51 of various shapes as mentioned in FIGS. 3 to 9, the same An effect of defining a dissociation channel 53 having a width variation can be achieved. Referring to FIG. 9 and FIG. 11, it is to be particularly noted that when the dielectric layer 54 is coated on the first electrode 51 of a circular shape (or a shape of the aforementioned circular or asymmetrical idle pattern, etc.) as shown in FIG. The dielectric layer 54 is completely covered on the first electrode 51; and as shown in FIG. u, when the dielectric layer 54 is coated on the rectangular second electrode 52, each of the second electrodes 52 has - The cladding region is cut and a pre-deformed region 522 is coated, and the dielectric layer 54 is coated on the cladding region 521 such that the pre-deformation region 522 is exposed outside the dielectric layer 54. In this way, the second electrode 52 and the dielectric layer 54 are combined in a local manner, and the pre-deformed region 522 is a region where a deformation buffer is reserved to prevent the second electrode 52 and the dielectric layer 54 from being affected. The degree of thermal expansion is different and the deformation is destroyed. Referring to FIG. 11 to FIG. 16 , in the embodiment, the pre-deformed region 522 has a U-shape as shown in FIG. 11 , and may of course be a v-shape as shown in FIG. 12 and a rectangular shape as shown in FIG. 13 . The single-slope v-shape shown in Fig. 4, the semi-circular shape shown in Fig. 15, or the ladder type shown in Fig. 16 can also be used for buffering. 2 and 3, the plasma spraying device 2 is used to place a workpiece 200 adjacent to the outlet end 532 of the dissociation channel 53, and to provide the voltage source 6 with electrical energy to the electrode unit. 5, and the gas supplied from the gas supply unit 4 enters from the inlet end of the dissociation passage 53 and is dissociated into a quasi-neutral air mass (that is, plasma), and is ejected outward from the outlet end 532. And sprayed onto the surface of the object to be treated 2〇〇. With the above design, the plasma spraying device 2 of the present invention has the following advantages in practical use: (1) A plasma working area having a large area: The present invention is a method in which a plurality of electrode units 5 are juxtaposed to supply the gas early. The gas supplied by %4 forms a quasi-centralized passage through the dissociation passage 53, and the air mass erupts 'so that the plasma is ejected in a large area, unlike the single-point or single-line eruption in the prior art, so According to the present invention, the large-sized object to be processed can be processed at a high speed, and the number of the electrode units 5 can be adjusted in accordance with the area of the material to be treated 200. () Dissociation channel 53 has the effect of segmentation acceleration: Since the first and second electrodes 51, 52 have different shapes, the dissociation channel 53 defined by 201119697 from the inlet end 531 to the outlet end 532 may have different widths. Forming such that the gas generates a venturi effect while passing through the dissociation 1L 53 to accelerate through ' and the first electrode 51 is in an arc shape, so that when the gas passes through the dissociation channel 53, Its width is continuously changed, and it can have the effect of segmentation acceleration. (3) Plasma jet uniformity: through the arrangement of the electrode units 5, the gas is dispersed through the dissociation channel 53 to form an excited state and then erupted, instead of being single-point or single-line as in the prior art. The eruption can greatly improve the uniformity of the plasma spray and improve the performance of the plasma spray device 2. (4) The electrode unit 5 has a buffer region: the pre-deformation region 522 of the second electrode 52 of the electrode unit 5 is designed to prevent deformation and damage of the second electrode 52 and the dielectric layer 54 due to the degree of thermal expansion. The effect of extending the service life. (5) Sterilization by low-temperature ultraviolet light: Since the present invention is a plurality of electrode units 5 juxtaposed, each dissociation. The plasma generated by the channel 53 has a low-temperature characteristic and can release various wavelengths including ultraviolet light. Light, if the invention is applied to the technical field of sterilization, a large-area sterilization operation of the object to be treated 200 can be performed by using a plasma of a plurality of low-temperature ultraviolet rays. Take Escherichia coli. ATCC 11775 as an example to make 9

[S 201119697 Using argon plasma to match the radio frequency (13 56]^1^) The power supply sterilization time is about 1 minute to achieve solid sterilization, and the liquid sterilization is effective in about 3 minutes, and the plasma temperature is about 53. (: Referring to Figure 17, a second preferred embodiment of the plasma ejection device 2 of the present invention is substantially similar to the first preferred embodiment described above, except that the first electrode of each electrode is 7L 5 The center point of 51 is connected, and the line connecting the center point of the second electrode 52 of each electrode unit 5 is such that there is a gap 21〇, that is, the first electrode 51 and the second electrode 52 are eccentrically disposed. Inseparable. "

Through the above-mentioned eccentrically disposed aspect, in addition to the efficiency of the foregoing first preferred embodiment, the speed of the gas passing through the dissociation passage 53 can be accelerated to make the quasi-neutral air mass have a sufficiently large jet velocity. The outward sputum flows out, and the performance of the plasma jet skirt 2 can be improved. 1 and 19, a third comparative embodiment of the electrospray jetting apparatus 2 of the present invention is substantially similar to the foregoing preferred embodiment in that the electrode unit 5 is other than (4) - the preferred embodiment Straight line

In addition to the W mode, the circular curve shown in Fig. 18 is arranged in accordance with the shape of the object to be processed, and the free curve is shown in Fig. 19 as follows: The composite arrangement form, : , the change of the form of the 1 利 1 ,, which falls outside the large plasma working area, can also be related to the change of the shape of the object to be treated 200 The applicability of the electric (four) projecting device 2 is improved. In summary, the electric (four) projecting device 2 of the present invention can respond to different shapes of the object to be processed by the arrangement of the plurality of electrode units 10 201119697 5 . The operation of the plasma (four) or the surface modification; and the design of the -electrode 51, 52 having different shapes per electrode unit 5 can make the plasma injection device 2 have a large area of the electric destruction working area and the dissociation channel. The utility model has the effects of segmentation acceleration, plasma jet uniformity, and the like, and the electrode unit A 5 also has a buffering function to increase the service life, so that the object of the invention can be achieved.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent change of the patent scope and the description of the invention in the present invention is Modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a "hot air plasma sterilization device" disclosed in the Patent No. 126 of the Republic of China Announcement; FIG. 2 is a schematic view of the plasma ejection device of the present invention. A preferred embodiment illustrates the overall structure of the plasma spraying device. (10) FIGS. 3 to 1B are side views showing various different forms of the first and second electrodes in the electrode unit in the first preferred embodiment. Figure 11 is a side view showing the second electrode having a buffer in the first preferred embodiment; Figure 12 i 16 is a side view of the first preferred embodiment, the first electrode FIG. 17 is a side view showing a second preferred embodiment of the plasma spraying device of the present invention, wherein the first and second electrodes are eccentrically disposed; FIG. 18 is a side view showing the present invention. The third preferred plasma spraying device

11 201119697 Embodiment, an arrangement of the electrode unit; and Fig. 19 is a side view showing another arrangement of the electrode unit in the third preferred embodiment.

12 201119697 [Description of main component symbols] 2 Spraying device 52 Second electrode 200 Object to be treated 521 Covering area 210 Spacing 522 Pre-deformation zone 3 Housing 53 Dissociation channel 31 accommodating space 531 Inlet end 4 Gas supply unit 532 Outlet end 5 Electrode unit 54 dielectric layer 51 first electrode 6 voltage source

[si 13

Claims (1)

201119697 VII. Patent application scope: 1. A plasma mouthpiece device comprising: a casing defining an accommodation space; a gas supply unit communicating with the accommodation space and providing gas into the accommodation a plurality of electrode units disposed side by side in the accommodating space, each electrode unit includes a first electrode, and a first electrode spaced apart from the first electrode, wherein the first and second electrodes The opposite polarity and the (four) boundary μ - dissociation channel 'the dissociation channel has a population end, and the outlet end and the first electrode of each electrode unit and the second electrode of the adjacent electrode unit together define the dissociation channel, wherein The first electrode has a different shape such that each of the dissociation channels varies along the inlet end = the outlet end according to the shape of the first and second electrodes; and a voltage source supplies electric energy to the material electrode The gas supplied by the gas supply unit is separated from the inlet of the dissociation channel by a quasi-neutral air mass and is ejected outward from the exit end. : According to: Hey! The plasma spraying device according to Item 1, wherein, _, the center point of the very high 7 〇H pole is connected to the center point of the second electrode of each electrode unit, and there is a line of 3 ^ 埂spacing. 3. The plasma spraying device according to the first aspect of the invention, wherein the first electrode of the first electrode element of the mother-electrode unit is connected to the center of the first electrode and the center of the first electrode The connections are overlapping. 14 201119697 4. According to the scope of the patent application 帛1, the arrangement of the electrode unit is in the form of a curve in the form of a straight line, or in the form of a composite arrangement of the aforementioned forms. χ · · · 申请 申请 申请 申请 申请 申请 申请 申请 电 电 电 电 电 电 电 电 电The cross-sectional shape of the mother-first electrode is selected from the group consisting of a hollow circle, a solid circle, a palpitations circle, a solid 楕 circle, a hollow asymmetrical 楕 circle, or a solid symmetrical circle. The electric t-jet device of the fifth aspect of the invention, wherein the cross-sectional shape of each of the second electrodes is selected from a rectangular shape or a wedge shape. 7. The electrospray ejection device according to claim 6, wherein the first electrode of each electrode unit is made of a metal material, and the surface is coated with a dielectric layer, and the second electrode is a metal. Material. 8. The plasma spraying device according to claim 6, wherein the first electrode of each electrode unit is made of a metal material, and the second electrode is made of a bismuth material, and the surface is covered with a dielectric layer. . 9. The plasma spraying device of claim 8, wherein each of the second electrodes has a cladding region and a pre-deformation region, and the dielectric layer is coated on the cladding region Upper 'so that the pre-deformed zone is exposed outside the dielectric layer. 10. The electric discharge device according to claim 9, wherein the shape of the pre-deformation zone of each second electrode is a ϋ type, a V shape, a rectangular shape, a single oblique V shape, a semicircular shape, or Choose one of the ladder types. 11. The plasma spray device of claim 7 or 8, wherein the dielectric layer has a resistivity greater than 1 OE8 ohm-cm. 12. The plasma spraying device according to claim 7 or 8, wherein the dielectric layer is made of quartz glass, alumina ceramic, aluminum oxide, Teflon, fluorocarbon resin, Or use one of engineering plastics 16