201102546 六、發明說明： 【發明所屬之技術領域】 本發明係關於安裝於高壓氣體容器之閥、與安裝有該閥 之高壓氣體容器。 【先前技術】 例如為供給在半導體製造過程中所使用之氣體，使用有 安裝有閥之高壓氣體容器。由於如此之氣體多為對人體或 叹備造成損傷之毒性強之氣體，故有必要採取微小之洩漏 亦可防止，並確保安全性，不對環境造成影響之對策。因 此，作為高壓氣體容器用閥，使用有具備安裝於高壓氣體 容器之閥主體；形成於該閥主體内之氣體流路之開度變更 用閥體；及用於承受該閥體之閥座；且該閥體與閥座中至 少一者具有合成樹脂製密封構件，該閥體介隔密封構件壓 抵於閥座，藉此密閉氣體流路者。由於合成樹脂製密封構 件具有變形性，故即使萬一氣體流路混入微小異物，或發 生微小之傷痕等’亦可防止氣體之洩漏。 作為構成如此之密封構件之合成樹脂，通常使用有聚三 氟氣乙烯（PCTFE)樹脂。考慮PCTFE樹脂由於硬度適性、 加工性良好，且對於大多數之氣體種類不會產生膨潤或強 度降低等，故耐久性、耐钱性良好。 但，PCTFE樹脂存在根據氣體種類不同，耐蝕性、耐久 性不同之問題，且指出物理性強度降低或膨潤等會導致密 封性能降低。因此，有人提出密封構件為聚偏二氟乙烯 (PVDF)製或聚四氟乙烯（PTFE)製（參照專利文獻！、2)。 I468Il.doc 201102546 [專利文獻1]曰本特開平5-223176號公報 [專利文獻2]日本特開2005-157913號公報 【發明内容】 發明所欲解決之問題 專利文獻1中所記載之PVDF樹脂由於連續使用溫度為 15(TC ’故存在將高壓容器内部洗淨後，進行加溫乾燥時 會軟化之問題，又，亦存在因鋼或喊等之極性溶劑或胺而 軟化或溶解之問題。 專利文獻2中所記載之PTFE樹脂由於即使進行加熱亦難 以流動、無法射出成形或擠壓成形，將密封構件等之小型 零件進行成形加：η時之熱變形較大，加工需要㈣^ 能，故不適合量產，存在製造成本增加之問題。 又’近來，已知PCTFE樹脂作錢氣容“閥之密封構 件使用之情況，長期使用時，於該密封構件會出現龜裂或 剝離’有必要改善安全性之強度。 =明之㈣在於提供-種可消除上述之問題之高壓氣 體谷器用閥及咼壓氣體容器。 解決問題之技術手段 適用本發明之高歷氣體容器用闊具備：安裝於高壓氣體 容器之間主體；形成於上述間主體内之氣體流路之開度變 更用閥體’及用於承受上述閥體之 .,-^ . 柯厘，且上述閥體與上 t間座I至少一者具有合成樹脂製密封構件，上述間體介 隔上述达封構件壓抵於上述閥 路。 门座猎此密閉上述氣體流 146811.doc 201102546 * 本發明之高壓氣體容器用閥之特徵為：作為上述合成樹 月旨，係使用聚醚醚酮（PEEK)樹脂、聚苯硫醚（PPS)樹脂、 及聚醚颯（PES)樹脂中之至少一者。 尤其較佳為使用PEEK樹脂、PES樹脂，更佳為使用 PEEK樹月旨。 在使用有先前之PCTFE樹脂製密封構件之閥中，從高壓 氣體容器洩漏氣體之原因之一為PCTFE樹脂之柔軟性降 低，且因高壓之作用導致在密封構件產生龜裂或破壞，從 而失去密封性能。因此，本申請案發明者等經潛心研究後 之結果，發現作為密封構件之材料使用PEEK樹脂、PPS樹 脂、及PES樹脂中之至少一者，藉此能發揮優良之密封性 能，終完成本發明。又，PEEK樹脂、PPS樹脂、及PES樹 脂相較於PVDF樹脂，連續使用溫度較高，將高壓容器内 部洗淨後，進行加溫乾燥時不會軟化，又，不會因酮或醚 等之極性溶劑、或胺而軟化或溶解，且，相較於PTFE樹 月旨，藉由加熱可易於流動，可進行射出成形或擠壓成形， 從而適合量產。 本發明之高壓氣體容器之特徵為安裝有本發明之高壓氣 體容器用閥。根據本發明之高壓氣體容器，即使作用高壓 亦不會在密封構件產生龜裂或破壞，維持密封性能可防止 氣體之洩漏。 本申請案發明者等發現使用PEEK樹脂、PPS樹脂、及 PES樹脂中之至少一者作為密封構件之材料，藉此能發揮 對於氨之良好之耐蝕性，柔軟性之降低減少，耐久性良 146811.doc 201102546 好。因此’在本發明之高壓氣體容器中，作為高壓氣體， 尤其宜為填充液化氨氣。藉此，可防止由填充有氨氣之高 壓氣體容器之氣體洩漏。 再者，在本發明之高壓氣體容器所填充之高壓氣體，例 如可為在常溫下，壓力（稱為表壓，以下同）為丨〜15兆帕之 壓縮氣體’事實上其壓力為丨〜15兆帕者，或在溫度35度 下，壓力為1〜15兆帕之壓縮氣體，或亦可在常溫下壓力為 1〜15兆帕之液化氣體，事實上其壓力為卜15兆帕者，或壓 力為1〜15兆帕之情況之溫度為以下之液化氣體。 發明效果 根據本發明，可提供一種耐久性、耐蝕性良好，並防止 氣體洩漏，藉此可提高安全性，且減少對環境之影響、降 低製造成本、對高壓氣體之製造或消耗發揮作用的高壓氣 體容器用閥及高壓氣體容器。 【實施方式】 t裝於圖1所示之高壓氣體容器丨之閥2係具備：安裝於 问壓氣體容器1之閥主體3;形成於閥主體3之氣體流路4; 氣體流路4之開度變更用之閥體5 ;用於承受閥體5之閥座 6 ;及操作機構7。 在本實施形態中，於容器1填充液化氨氣作為高壓氣 體，但並非僅限於此。容器丨之材質在本實施形態中為不 鏽鋼，但並不特別限;t。再者，除不鏽鋼以外可使用例如 防錄性良好之調質㈣、！g、鉻_等，且較佳為研磨容 器1之内面、防止微小異物之產生。 1468H.doc 201102546 閥主體3在本實施形態中為不鏽鋼製，經由公螺紋部“ 裝於向壓氣體容器1，且經由公螺紋部％安裝於氣體供 給用配管（省略圖示）。 氣體流路4具有第i流路4a、第2流路仆、及閥體收納室 4c。第1流路4a之一端設為導通至高壓氣體容器内部之 氣體導入°4d ’另—端與閥體收納室4e相通，纟中途部與 真空㈣閥8連接。第2流路化之—端設為導通至氣體供給 用配官之氣體排出口 4e ’另-端導通至閥體收納室4c。氣 體排出口 4e在閥主體3連接至氣體供給用配管之前，係藉 由螺合於連接用螺紋部31)之蓋9密閉。 閥體5具有圓柱形之閥軸5a、安裝於閥軸&之密封構件 %’並從形成㈣主體3之凹部墙人至閥體收納室4c。 閥轴5a例如為不鏽鋼製。如圖2所示，密封構件為環狀， 嵌合於形成於閥轴5a之一端之環狀槽。 間座6包含圍繞閥主體3之第！流路4a與間體收納室化之 連接口之環狀區域。 七操作機構7具有將閥體收納室4e與凹部&之間密閉成氣 密狀之隔膜7a 將閥體5壓抵於隔膜之彈簧7㈧介隔隔 膜7a與墊片承受彈簧71)之彈力之桿&安裝於桿化之把手 7d，及介隔螺紋構件安裝於閥主體3之支撐筒b 螺合於支撐筒7e。 使把手7d朝一方向旋轉’藉此螺八支撐筒7e之桿八將閥 體5朝向閥座6按壓，使密封構件外壓抵於閥座201102546 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a valve installed in a high-pressure gas container and a high-pressure gas container in which the valve is mounted. [Prior Art] For example, to supply a gas used in a semiconductor manufacturing process, a high-pressure gas container equipped with a valve is used. Since such a gas is a highly toxic gas that causes damage to the human body or sighs, it is necessary to take a small leak to prevent it, and to ensure safety and countermeasures against environmental impact. Therefore, as the valve for the high-pressure gas container, a valve body having a valve body attached to the high-pressure gas container, a valve body for changing the degree of opening of the gas flow path formed in the valve body, and a valve seat for receiving the valve body are used; Further, at least one of the valve body and the valve seat has a synthetic resin sealing member that presses against the valve seat via the sealing member, thereby sealing the gas flow path. Since the synthetic resin sealing member has deformability, leakage of gas can be prevented even if a small foreign matter is mixed in the gas flow path, or a minute flaw or the like occurs. As the synthetic resin constituting such a sealing member, a polytrifluoroethylene (PCTFE) resin is usually used. In view of the fact that the PCTFE resin is excellent in hardness and workability, and does not cause swelling or strength reduction for most gas types, durability and durability are good. However, PCTFE resins have different corrosion resistance and durability depending on the type of gas, and indicate that physical strength is lowered or swelling is caused to cause a decrease in sealing performance. Therefore, it has been proposed that the sealing member is made of polyvinylidene fluoride (PVDF) or polytetrafluoroethylene (PTFE) (see Patent Documents!, 2). [Patent Document 1] JP-A-2005-157913 (Patent Document 2) JP-A-2005-157913 (Patent Document 2) SUMMARY OF THE INVENTION Problems to be Solved by the Invention PVDF resin described in Patent Document 1 Since the continuous use temperature is 15 (TC', there is a problem that the inside of the high-pressure vessel is cleaned and then softened when heated and dried, and there is also a problem of softening or dissolving due to a polar solvent such as steel or shark or an amine. The PTFE resin described in Patent Document 2 is difficult to flow even when heated, and it is impossible to perform injection molding or extrusion molding, and a small component such as a sealing member is formed by adding: η is thermally deformed greatly, and processing is required (4). Therefore, it is not suitable for mass production, and there is a problem of an increase in manufacturing cost. Further, in recent years, it is known that PCTFE resin is used as a sealing member for a valve, and it is necessary to cause cracking or peeling of the sealing member when used for a long period of time. Improve the strength of safety. = (4) It is to provide a high-pressure gas valve valve and a pressure gas container that can eliminate the above problems. The high-altitude gas container according to the present invention is provided with: a main body installed between the high-pressure gas containers; a valve body for changing the opening degree of the gas flow path formed in the intermediate body; and a member for receiving the valve body. ^ 。 。 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , .doc 201102546 * The valve for a high-pressure gas container of the present invention is characterized in that, as the above-mentioned synthetic tree, a polyetheretherketone (PEEK) resin, a polyphenylene sulfide (PPS) resin, and a polyether oxime (PES) are used. At least one of the resins. It is particularly preferable to use a PEEK resin or a PES resin, and it is more preferable to use a PEEK tree. The reason for leaking gas from a high-pressure gas container in a valve using a sealing member made of the previous PCTFE resin is used. The softness of the PCTFE resin is lowered, and the sealing member is cracked or broken due to the action of the high pressure, thereby losing the sealing performance. Therefore, the inventors of the present application have found that the result is as a result of painstaking research. The material of the sealing member uses at least one of PEEK resin, PPS resin, and PES resin, thereby achieving excellent sealing performance, and finally completing the present invention. Further, PEEK resin, PPS resin, and PES resin are compared with PVDF resin. The continuous use temperature is high, after the inside of the high-pressure vessel is washed, it does not soften when heated and dried, and does not soften or dissolve due to a polar solvent such as ketone or ether, or an amine, and is compared with PTFE. The high-pressure gas container of the present invention is characterized in that it is easy to flow by heating, and can be injection-molded or extruded to be mass-produced. The high-pressure gas container of the present invention is characterized by being equipped with the valve for a high-pressure gas container of the present invention. According to the high-pressure gas container of the present invention, even if a high pressure is applied, cracking or destruction of the sealing member is not caused, and the sealing performance is maintained to prevent gas leakage. The inventors of the present application found that at least one of PEEK resin, PPS resin, and PES resin is used as a material of the sealing member, whereby good corrosion resistance to ammonia can be exhibited, and reduction in flexibility is reduced, and durability is good 146811. .doc 201102546 Ok. Therefore, in the high-pressure gas container of the present invention, as the high-pressure gas, it is particularly preferable to fill the liquefied ammonia gas. Thereby, gas leakage from the high pressure gas container filled with ammonia gas can be prevented. Furthermore, the high-pressure gas filled in the high-pressure gas container of the present invention may be, for example, a compressed gas at a normal temperature, a pressure (referred to as gauge pressure, the same below) of 丨 15 MPa. In fact, the pressure is 丨 〜 15 MPa, or a compressed gas with a pressure of 1 to 15 MPa at a temperature of 35 degrees, or a liquefied gas with a pressure of 1 to 15 MPa at normal temperature. In fact, the pressure is 15 MPa. The temperature at which the pressure is 1 to 15 MPa is the following liquefied gas. Advantageous Effects of Invention According to the present invention, it is possible to provide a high pressure which is excellent in durability and corrosion resistance and prevents gas leakage, thereby improving safety, reducing environmental impact, reducing manufacturing cost, and contributing to production or consumption of high-pressure gas. Valves for gas containers and high pressure gas containers. [Embodiment] The valve 2 installed in the high-pressure gas container shown in Fig. 1 includes a valve body 3 attached to the pressure gas container 1, a gas flow path 4 formed in the valve body 3, and a gas flow path 4. The valve body 5 for changing the opening degree; the valve seat 6 for receiving the valve body 5; and the operating mechanism 7. In the present embodiment, the container 1 is filled with liquefied ammonia gas as a high-pressure gas, but it is not limited thereto. The material of the container crucible is stainless steel in the present embodiment, but is not particularly limited; t. In addition, in addition to stainless steel, for example, it is possible to use a tempering property with good anti-recording properties (4)! g, chromium _, etc., and preferably the inner surface of the grinding container 1, to prevent the generation of minute foreign matter. 1468H.doc 201102546 In the present embodiment, the valve body 3 is made of stainless steel, and is attached to the gas supply container 1 via the male screw portion, and is attached to the gas supply pipe (not shown) via the male screw portion %. 4 includes an i-th flow path 4a, a second flow path, and a valve body accommodating chamber 4c. One end of the first flow path 4a is a gas introduction into the high-pressure gas container, and the other end is connected to the valve body accommodating chamber. 4e is connected, and the middle portion of the crucible is connected to the vacuum (four) valve 8. The second end of the second flow path is set to be connected to the gas discharge port 4e of the gas supply controller, and the other end is connected to the valve body storage chamber 4c. 4e is sealed by a cover 9 screwed to the connecting screw portion 31) before the valve body 3 is connected to the gas supply pipe. The valve body 5 has a cylindrical valve shaft 5a and a sealing member attached to the valve shaft & %' is formed from the recessed wall member of the main body 3 to the valve body accommodating chamber 4c. The valve shaft 5a is made of, for example, stainless steel. As shown in Fig. 2, the sealing member has an annular shape and is fitted to one end of the valve shaft 5a. Annular groove 6. The seat 6 includes a first flow path 4a and a body surrounding the valve body 3 The annular region of the chambered connection port. The seven operating mechanism 7 has a diaphragm 7a that seals the valve body accommodating chamber 4e and the recessed portion into a gas-tight shape. The spring 7 that presses the valve body 5 against the diaphragm (8) blocks the diaphragm 7a. The lever rod of the spring receiving spring 71) is attached to the rod handle 7d, and the support cylinder b that is inserted into the valve body 3 via the threaded member is screwed to the support cylinder 7e. The handle 7d is rotated in one direction. The rod 8 of the screw eight support cylinder 7e presses the valve body 5 toward the valve seat 6, so that the sealing member is pressed against the valve seat
閉氣體流路4。使把手_另-方向旋轉，藉此解除桿7C 1468ll.doc 201102546 引起之閥體5朝向閥座6之壓抵，並藉由彈簀7b之彈力，使 與閥體5同時變位之密封構件％自閥座6脫離，從而開啟氣 體流路4。再者，把手7d之向另一方向之旋轉係在氣體流 路4成為全開之一定位置’藉由桿抵接於形成於支撐筒 7e之止動部而被限制。 密封構件5b為合成樹脂製，作為該合成樹脂，可使用 PEEK樹脂、PPS樹脂、及pES樹脂中之任一者，作為工程 塑膠可使用市售者。再者，密封構件5b之材質亦可為混合 PEEK樹脂、PPS樹脂、及pES樹脂中之二者或全部之樹 月曰或複數s又置環狀密封構件5 b，作為徑向尺寸互不相同 者，將其等配置成同心狀，且作為各自之材質，亦可從 PEEK樹脂、pps樹脂、及PES樹脂中任意選擇而成。主要 的是，作為密封構件5b之材質使用PEEK樹脂、pps樹脂、 及PES樹脂中之至少_•者即可。又，不限定密封構件之形 狀，例如亦可將圓板狀之密封構件安裝於閥體。 實施例 使用上述實施形態之閥2，進行以下之試驗作為實施例 1、實施例2及比較例1，將其結果顯示於以下之表丨中。 (實施例1) 將4個PEEK樹脂（日本P〇ripennko製ρκ_45〇)製密封構件 5b浸潰於液化氨中90日，並測量試驗前後之密封構件外之 全長（沿著閥體5之移動方向之尺寸）、質量、及利用高分子 計器（股）製「Asuka橡膠硬度計型d硬度計」之表面硬产， 又，觀測外觀之變化。 I46811.doc 201102546 (實施例2) 除使密封構件5b成為PPS樹脂（東洋塑膠精工製TPS-PPS(NS)-SC)製以外，進行與實施例1相同之試驗。 (比較例1) 除使密封構件5b成為PCTFE樹脂製以外，進行與實施例 1相同之試驗。 表1 實施例1 實施例2 比較例1 浸潰前全長 3.28 mm 3.28 mm 3.43 mm 浸潰後全長 3.30 mm 3.31 mm 3.46 mm 變化率 0.61% 0.91% 0.87% 浸潰前質量 0.189 g 0.198 g 0.333 g 浸潰後質量 0.191 g 0.198 g 0.335 g 變化率 1.05% 0.00% 0.60% 浸潰前硬度 91 89 81 浸潰後硬度 91 89 83 外觀 無變色 無變色 變茶色 根據表1，密封構件5b膨潤少，全長變化率與質量變化 率在實施例與比較例任一者中均較小，但朝液化氨中浸潰 後之硬度變化在實施例1與實施例2中並未察覺，相對於此 在比較例1中被察覺。又，外觀在實施例1及實施例2中未 察覺變色，但在比較例1中被察覺到變成茶色。進行變成 茶色之比較例1之樹脂表面之X射線光電子能譜分析（XPS 分析），其結果因氣（C1)之脫離、氮化、及氧化，產生樹脂 146811.doc •10- 201102546 表面之變質。藉此’可確認實施例之密封構件讣可保持樹 脂之性質’且對於氨具有耐蝕性。 再者，就PES樹脂（八十島purosid(^4i〇〇G)製之密封構 件5b，亦進行同樣之試驗，可確認其具有對於氨之耐蝕 性。 使用上述實施形態之閥2，進行以下之試驗作為實施例 3、實施例4、實施例5及比較例2，將其結果顯示於以下之 表2中。 (實施例3) 將與實施例1中使用者同樣之PEEK樹脂製密封構件外安 裝於閥體5，在未加壓之狀態下，使把手74往復旋轉，將 氣體流路4以1次/分之週期進行5〇〇〇次開閉之試驗，並測 量試驗前後之密封構件5b之全長（沿著閥體5之移動方向之 尺寸）、及從全開狀態密閉氣體流路4所需之把手7d之旋轉 角度再者，氣體流路4密閉時為以一定之力將密封構件 5b按壓於閥座6，將作用於把手7d之扭矩設為12 N.m。 又，為確認密閉狀態之氣體流路4之氣密狀態，進行使 用發/包丨生之氣體洩漏檢測液之方法，與將減壓至真空狀態 之面壓氣體容器置於氦氣環境中，檢測侵入至容器内之氦 氣之方法。 (實施例4) 除使密封構件5b成為pps樹脂製以外，進行與實施例3相 同之試驗。 (實施例5) 146811.doc 11 201102546 除使密封構件5b成為PES樹脂製以外，進行與實施例3相 同之試驗。 (比較例2) 除使密封構件5b成為PCTFE樹脂製以外，進行與實施例 3相同之試驗。 表2 實施例3 實施例4 實施例5 比較例2 試驗前樹脂南 0.50 mm 0.50 mm 0.47 mm 0.55 mm 試驗後樹脂南 0.34 mm 0.35 mm 0.29 mm 0.37 mm 變形量 0.16 mm 0.15 mm 0.18 mm 0.18 mm 第1次試驗角度 335° 3430 405° 370° 第5000次試驗角度 382° 3770 447° 430° 變異量 47。 34° 42° 60° 試驗前氣密 無茂漏 無、;戈漏 無泡漏 無洩漏 試驗後氣密 無:¾漏 無拽漏 無洩漏 無洩漏 根據表2，可確認密封構件5b之全長變化在實施例與比 較例中無大差異，但將氣體流路4從全開狀態進行密閉所 需之把手7d之旋轉角度之變化，相對於實施例3〜5中為 3 4°〜47。，在比較例2中增大至60°。其顯示有在實施例3〜5 中，與比較例2相比，使一定扭矩作用於把手7d時之變形 較小。 又，可確認PEEK樹脂、PPS樹脂、及PES樹脂製之密封 構件5b亦無損傷，且無He氣體洩漏，另一方面，在PCTFE 樹脂製之密封構件5b中，雖然不會洩漏He氣體，但確認有 146811.doc 12 201102546 微小之損傷。藉此，可確認實施例之密封構件5b即使作用 較大之扭矩而密閉氣體流路4，亦具有充分之機械強度， 且耐久性良好。 使用上述實施形態之閥2，進行以下之試驗作為實施例 6、實施例7及比較例3，將其結果顯示於以下之表3中。 (實施例6) 除使用在實施例1中浸潰至液化氨中90曰之PEEK樹脂製 者作為密封構件5b以外，進行與實施例3相同之試驗。 (實施例7) 除使用在實施例2中浸潰至液化氨中90曰之PPS樹脂製者 作為密封構件5b以外，進行與實施例3相同之試驗。 (比較例3) 除使用在比較例1中浸潰至液化氨中90日之PCTFE樹脂 製者作為密封構件5b以外，進行與實施例3相同之試驗。 表3 · 實施例6 實施例7 比較例3 試驗前樹脂南 0.50 mm 0.50 mm 0.55 mm 試驗後樹脂雨 0.35 mm 0.35 mm 0.39 mm 變形量 0.15 mm 0.15 mm 0.16 mm 第1次試驗角度 340° 3450 370° 第5000次試驗角度 370° 375° 400° 變異量 30° 30° 30。 試驗前氣密 無浅漏 無洩漏 無洩漏 試驗後氣密 無洩漏 無洩漏 微小泡漏 146811.doc -13- 201102546 根據表3，可確認相對於實施例6、7中無氣體洩漏，在 比較例3中試驗後，產生有氣體之洩漏。又，根據實施例 3、4之變異量與實施例6、7之變異量之比較，比較例之與 比較例3之變異量之比較，可確認實施例之密封構件5b對 於氨之柔軟性之降低較少，從而發揮耐蝕性。 本發明並不限定於上述實施形態或實施例。例如亦可將 環狀之密封構件絲於閥座，藉此並_體而使閥座具有 密封構件。或’亦可使閥體與閥座兩者均具有密封構件， 此情況，氣體流路密閉時’可將閥體之密封構件壓抵於閥 座’且將閥座之密封構件壓抵於閥體，亦可將密封構件彼 此相互壓抵。x，閥之種類並不限定於手動開閉閥，可為 例如具備作為減壓閥之功能者，或亦可為電動閥。 【圖式簡單說明】 閥之剖面 圖1係本發明之實施形態之高壓氣體容器用 圖。 之平面圖 圖2係本發明之實施形態之密封構件 【主要元件符號說明】 1 高壓氣體容器 2 閥 3 閥主體 4 氣體流路 5 閥體 5b 密封構件 6 閥座 146811.docClosed gas flow path 4. Rotating the handle _in the other direction, thereby releasing the pressing force of the valve body 5 caused by the rod body 7 toward the valve seat 6 by the rod 7C 1468ll.doc 201102546, and the sealing member which is displaced simultaneously with the valve body 5 by the elastic force of the magazine 7b % is detached from the valve seat 6, thereby opening the gas flow path 4. Further, the rotation of the handle 7d in the other direction is restricted by the rod being abutted against the stopper formed in the support cylinder 7e at a constant position where the gas passage 4 is fully opened. The sealing member 5b is made of a synthetic resin, and any of PEEK resin, PPS resin, and pES resin can be used as the synthetic resin, and a commercially available plastic can be used. Furthermore, the material of the sealing member 5b may be a double or double s and a ring-shaped sealing member 5 b of a mixed PEEK resin, a PPS resin, and a pES resin, which are different in radial size. These may be arranged in a concentric shape, and may be arbitrarily selected from PEEK resin, pps resin, and PES resin as respective materials. Mainly, as the material of the sealing member 5b, at least one of PEEK resin, pps resin, and PES resin may be used. Further, the shape of the sealing member is not limited, and for example, a disk-shaped sealing member may be attached to the valve body. EXAMPLES Using the valve 2 of the above-described embodiment, the following tests were carried out as Example 1, Example 2 and Comparative Example 1, and the results are shown in the following Tables. (Example 1) Four sealing members 5b made of PEEK resin (ρκ_45〇 made by P〇ripennko, Japan) were immersed in liquefied ammonia for 90 days, and the entire length outside the sealing member before and after the test (movement along the valve body 5) was measured. The size of the direction, the quality, and the surface of the "Asuka rubber hardness tester d hardness tester" manufactured by the polymer meter (stock) were hardly produced, and the change in appearance was observed. I46811.doc 201102546 (Example 2) The same test as in Example 1 was carried out except that the sealing member 5b was made of PPS resin (TPS-PPS (NS)-SC manufactured by Toyo Plastics Co., Ltd.). (Comparative Example 1) The same test as in Example 1 was carried out except that the sealing member 5b was made of PCTFE resin. Table 1 Example 1 Example 2 Comparative Example 1 Full length before dipping 3.28 mm 3.28 mm 3.43 mm Full length after dipping 3.30 mm 3.31 mm 3.46 mm Change rate 0.61% 0.91% 0.87% Quality before impregnation 0.189 g 0.198 g 0.333 g Dip After crushing mass 0.191 g 0.198 g 0.335 g Change rate 1.05% 0.00% 0.60% Hardness before impregnation 91 89 81 Hardness after impregnation 91 89 83 Appearance without discoloration No discoloration Change brown According to Table 1, the sealing member 5b has less swelling and full length change The rate and mass change rate were small in either of the examples and the comparative examples, but the change in hardness after impregnation in liquefied ammonia was not observed in Example 1 and Example 2, whereas in Comparative Example 1 Being noticed. Further, the appearance was not observed to be discolored in Example 1 and Example 2, but it was perceived as a brown color in Comparative Example 1. The X-ray photoelectron spectroscopy (XPS analysis) of the surface of the resin of Comparative Example 1 which was turned into brown was carried out, and as a result, the detachment, nitridation, and oxidation of the gas (C1) resulted in the deterioration of the surface of the resin 146811.doc •10-201102546 . Thereby, it can be confirmed that the sealing member of the embodiment can maintain the property of the resin and has corrosion resistance to ammonia. In addition, the same test was carried out on the sealing member 5b made of PES resin (Pentium Island purosid), and it was confirmed that it had corrosion resistance to ammonia. Using the valve 2 of the above embodiment, the following test was performed. The results of the third embodiment, the fourth embodiment, the fifth embodiment, and the second comparative example are shown in the following Table 2. (Example 3) The sealing member made of PEEK resin similar to the user of the first embodiment was mounted. In the valve body 5, the handle 74 is reciprocally rotated in a state where the pressure is not applied, and the gas flow path 4 is tested for opening and closing 5 times in a cycle of 1 time/minute, and the sealing member 5b before and after the test is measured. The full length (the dimension along the moving direction of the valve body 5) and the rotation angle of the handle 7d required to seal the gas flow path 4 from the fully open state. Further, when the gas flow path 4 is sealed, the sealing member 5b is pressed with a certain force. In the valve seat 6, the torque acting on the handle 7d is set to 12 Nm. In order to confirm the airtight state of the gas flow path 4 in the sealed state, a method of using the gas leakage detecting liquid generated by the hair supply/package is performed, and Pressure-reducing gas container under reduced pressure to vacuum In a helium environment, a method of detecting helium gas intruding into a container was carried out. (Example 4) The same test as in Example 3 was carried out except that the sealing member 5b was made of pps resin. (Example 5) 146811.doc 11 201102546 The same test as in Example 3 was carried out except that the sealing member 5b was made of PES resin. (Comparative Example 2) The same test as in Example 3 was carried out except that the sealing member 5b was made of PCTFE resin. 3 Example 4 Example 5 Comparative Example 2 Resin South 0.50 mm before test 0.50 mm 0.47 mm 0.55 mm Resin South 0.34 mm after test 0.35 mm 0.29 mm 0.37 mm Deformation 0.16 mm 0.15 mm 0.18 mm 0.18 mm First test angle 335 ° 3430 405° 370° 5000 test angle 382° 3770 447° 430° variation 47. 34° 42° 60° airtight without leakage before test; no leakage after leak test without leaking test :3⁄4 leaking, no leakage, no leakage, no leakage. According to Table 2, it can be confirmed that the total length change of the sealing member 5b is not greatly different between the embodiment and the comparative example, but the handle 7d required for sealing the gas flow path 4 from the fully open state is Rotation angle The change was 34 to 47 in Examples 3 to 5, and was increased to 60 in Comparative Example 2. It was shown in Examples 3 to 5, and compared with Comparative Example 2, When the torque is applied to the handle 7d, the deformation is small. Further, it can be confirmed that the PEEK resin, the PPS resin, and the sealing member 5b made of PES resin are not damaged, and there is no He gas leakage, and on the other hand, the sealing member made of PCTFE resin. In 5b, although He gas is not leaked, it is confirmed that there is a slight damage of 146811.doc 12 201102546. As a result, it was confirmed that the sealing member 5b of the embodiment has sufficient mechanical strength and good durability even if the gas passage 4 is sealed by a large torque. Using the valve 2 of the above embodiment, the following tests were carried out as Example 6, Example 7, and Comparative Example 3, and the results are shown in Table 3 below. (Example 6) The same test as in Example 3 was carried out except that the manufacturer of PEEK resin impregnated into 90 parts of liquefied ammonia in Example 1 was used as the sealing member 5b. (Example 7) The same test as in Example 3 was carried out except that the PPS resin which was immersed in 90% of the liquefied ammonia in Example 2 was used as the sealing member 5b. (Comparative Example 3) The same test as in Example 3 was carried out except that the PCTFE resin which was immersed in liquefied ammonia for 90 days in Comparative Example 1 was used as the sealing member 5b. Table 3 · Example 6 Example 7 Comparative Example 3 Resin South 0.50 mm 0.50 mm 0.55 mm before the test Resin rain 0.35 mm 0.35 mm 0.39 mm Deformation 0.15 mm 0.15 mm 0.16 mm First test angle 340° 3450 370° The 5000th test angle is 370° 375° 400° The variation is 30° 30° 30. Airtight, no shallow leak, no leakage, no leakage, no leakage, no leakage, no leakage after test, 146811.doc -13- 201102546 According to Table 3, it can be confirmed that there is no gas leakage in Examples 6 and 7, in the comparative example. After the test in 3, a gas leak occurred. Further, according to the comparison between the variation amount of Examples 3 and 4 and the variation amount of Examples 6 and 7, the comparison of the variation amount of the comparative example with Comparative Example 3 confirmed the softness of the sealing member 5b of the Example for ammonia. Less reduction, thus exerting corrosion resistance. The present invention is not limited to the above embodiments or examples. For example, the annular sealing member may be screwed to the valve seat, whereby the valve seat may have a sealing member. Or 'may also have a sealing member for both the valve body and the valve seat. In this case, when the gas flow path is sealed, the sealing member of the valve body can be pressed against the valve seat' and the sealing member of the valve seat is pressed against the valve. The body may also press the sealing members against each other. x The type of the valve is not limited to the manual opening and closing valve, and may be, for example, a function as a pressure reducing valve or an electric valve. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a high pressure gas container according to an embodiment of the present invention. Fig. 2 is a sealing member according to an embodiment of the present invention. [Description of main components] 1 high pressure gas container 2 valve 3 valve body 4 gas flow path 5 valve body 5b sealing member 6 valve seat 146811.doc