201107216 六、發明說明： 【發明所屬之技術領域】 本發明係關於-種基板傳輸系統，特·關於—種用 以存取複數基板之基板傳輸系統。 【先前技術】 隨著科技的蓬勃發展及市場的大量需求，液晶顯示器 已廣泛的應用在現代生活的各種領域中，其中製程技術的 提升及生產成本的降低是促成液晶顯示器普及化的主要 因素，當中，$以基板（substrate)的研究改良與創新突 破具有不可忽略的貢獻。 基板疋製作液晶顯示器的關鍵材料，一般是為一種高 品質的超薄平板玻璃。在液晶顯示器大型化的發展趨勢 下’作為載體的基板，其面積亦在快速增加中；，然而，由 於基板在程序處理前、後都必須利用卡g (eassette)以妥 善儲存，以避免碰撞或損傷’大型基板因佔據的空間較 大，自朗加了儲存系統的負擔，成為量產大型液晶顯示 器的阻礙之一。 在液晶顯示器的製程中，基板是以放置在具有多層承 載面的卡匣内儲存，而現行使用的卡匣主要分為標準式卡 匡（normal cassette)及線索式卡匣（wirecassette)。標準 式卡昆疋傳統基板儲存所採用的卡昆形式，主要是由多層 相同的基板承載面所組成，因各承載面之間皆間隔一定的 距離，足以使機械手臂伸入其牙又，故使用標準式卡匣可 201107216 以隨機之方式對任一承載面取放基板，但是，亦由於各承 載面之間隔要有一定的距離，造成單一卡匣内只能規劃有 限的承載面數，產生空間利用的浪費。相反的，線索式卡 匣則是將各承載面的間距縮小，藉以提供較大的基板容 量’但因各機械手臂無法將其牙叉伸入如此緊密的承載面 中間，也就是說’線索式卡匣無法以機械手臂方式隨機取 放基板’造成基板的取放順序有嚴重的限制，而通常只能 利用輸送帶以單一方向存取基板，或需搭配額外增設之可 動元件協助存取基板。 由此可知，目前的基板傳輸系統並無法對基板的存取 提供一個能兼顧可隨機取放又具有較大儲存容量的卡匣 形式，雖然已有部分製程改以線索式卡匣取代標準式卡 匣，以求在生產大型液晶顯示器時能有足夠的倉儲空間， 但依舊無法解決線索式卡匣僅能以整個卡201107216 VI. Description of the Invention: [Technical Field] The present invention relates to a substrate transfer system, and a substrate transfer system for accessing a plurality of substrates. [Prior Art] With the rapid development of technology and the large demand of the market, liquid crystal displays have been widely used in various fields of modern life. Among them, the improvement of process technology and the reduction of production cost are the main factors contributing to the popularization of liquid crystal displays. Among them, the research improvement and innovation breakthrough of the substrate has a non-negligible contribution. Substrate 关键 The key material for making liquid crystal displays is generally a high quality ultra-thin flat glass. In the development trend of liquid crystal display enlargement, the area of the substrate as the carrier is also increasing rapidly; however, since the substrate must be properly stored before and after the program processing, the card g (eassette) is used to avoid collision or The damage of the large substrate is due to the large space occupied, and the burden of the storage system has become one of the obstacles for mass production of large liquid crystal displays. In the process of liquid crystal display, the substrate is stored in a cassette having a multi-layer bearing surface, and currently used cassettes are mainly classified into a standard cassette and a lead cassette. The standard kakun疋 traditional substrate storage uses the kakun form, which is mainly composed of multiple layers of the same substrate carrying surface. Because each bearing surface is separated by a certain distance, it is enough for the mechanical arm to reach into the tooth. Use standard cassettes 201107216 to pick and place substrates on any bearing surface in a random manner. However, because there is a certain distance between the bearing surfaces, only a limited number of bearing surfaces can be planned in a single cassette. Waste of space utilization. Conversely, the clue-type cassette reduces the spacing of the bearing surfaces to provide a larger substrate capacity', but because the robotic arms cannot extend their forks into the middle of such a tight bearing surface, that is, 'cue-style The cassette cannot be randomly picked and placed by the robot arm. This causes a serious limitation on the pick-and-place sequence of the substrate. Usually, the substrate can only be accessed in a single direction by using the conveyor belt, or an additional added movable element can be used to assist the access of the substrate. It can be seen that the current substrate transmission system cannot provide a card form that can accommodate both random access and large storage capacity for the access of the substrate, although some processes have been replaced with lead cards instead of standard cards. Hey, in order to have enough storage space when producing large LCD monitors, but still can not solve the clue card, only the entire card
取放基板所造成耗費X時的問題，可見線索式卡&財助 於成本控制，但是仍未盡完善。 的課題之一 有鑑於此，如何開發出一種基板傳輪系統，其可用於 存取複數基板，並能兼顧儲存容量與存取效㈣當前重要 【發明内容】 種基板傳輸 並能兼顧儲 有鑑於上述課題，本發明之目的為提供— 系統及其操作方法，是用作於存取複數基板， 存容量與存取效率。 201107216 為達上述目的，依姑 ΛΑ # ^ W本發明之一種用以存取複數基板 的基板傳輸糸統包含〜七 本體、複數對第-支撐元^以及一搬運裝置。卡Ε包含一 體具有相對設置之以及複數對第二支撐元件。本 ...^^ 3 壁與一第二壁。該等第一支撐元 件的其中任一對是分〜 ^^ ^ 於弟一壁及第二壁以構成存放基 板之複數第一承载面之f1 與第-承載面垂直/、中之―，該等第—支樓元件是沿 區，且沿此方向之相鄰:：向而設置以構成一第一儲存 該等第二支撑元件的心支撑70件具有―第一距離。 壁以構成存放基板之複^一對是分設於第一壁及第二 二支撐元件是沿鱼數名二承載面之其中之-’該等第 鄰設於第-儲存區之一:載面垂直之方向而設置以構成 第二Φ妗-生 第—儲存區’且沿此方向之相鄰兩 叉得兀件具有一、泉_ 古+ +丄 禾一距離。另外，沿與第一承載面垂 直之方向之相鄰的笫— 七咕 ^ 支撐元件與第二支撐元件之間具 有一第三距離，且筮二 ^ 吊二距離是大於第一距離及第二距離。 搬運裝置是鄰設於卡 „ y. ^ 且具有至少一適於伸入卡匣以存 取基板的搬運單元。笛στΓ^ 时_ 弟—距離與第二距離是分別大於搬運 yX^ I* σ-g 庙 且上移距離是適於使各基板脫離相對 二之各對第—支撐％件或相對應之各對第二支撐元 撐之—向上距離。 统的H卜為達上述目的，依據本發明之—種基板傳輸系 步驟用以取出複數基板，此操作方法包含下列 二鍅户美 +匣，卡厘具有鄰設的-第-儲存區盥―第 區，第—儲存區具有複數對第—支撐元件以構成存 201107216The problem of cost-consuming X when the substrate is taken and dropped can be seen. The clue card & financial aid is cost control, but it is still not perfect. In view of this, how to develop a substrate transfer system, which can be used to access a plurality of substrates, and to achieve both storage capacity and access efficiency (4) current important [invention] substrate transmission and can take into account In view of the above problems, an object of the present invention is to provide a system and an operating method thereof for accessing a plurality of substrates, memory capacity and access efficiency. 201107216 In order to achieve the above object, a substrate transfer system for accessing a plurality of substrates includes a ~7 body, a plurality of pairs of first support members, and a handling device. The cassette includes a body having a relative arrangement and a plurality of pairs of second support members. The ...^^ 3 wall and a second wall. Any one of the first supporting members is a part of the first wall and the second wall to form a plurality of first bearing surfaces of the storage substrate, and the first bearing surface is perpendicular to the first bearing surface and/or the medium The eaves-building element is an edge zone and adjacent in this direction: a core support 70 that is disposed to form a first storage of the second support elements has a "first distance." The pair of walls constituting the storage substrate are respectively disposed on the first wall and the second support member is one of the two bearing surfaces along the fish--the one adjacent to the first storage area: The faces of the faces are arranged to form a second Φ-sheng-storage zone and the adjacent two-pronged members in this direction have a distance of 泉古++丄. In addition, a third distance is provided between the adjacent support member and the second support member in a direction perpendicular to the first bearing surface, and the distance between the second and second support members is greater than the first distance and the second distance. distance. The carrying device is adjacent to the card y y. ^ and has at least one handling unit adapted to extend into the cassette to access the substrate. The flute στΓ^ _ brother-distance and the second distance are respectively greater than the handling yX^ I* σ -g temple and the upward movement distance is an upward distance suitable for separating each substrate from each pair of the first pair of support members or corresponding pairs of the second support members. The H b is for the above purpose, The substrate transporting step of the present invention is for taking out a plurality of substrates. The method includes the following two households: 卡 卡 卡 匣 匣 匣 匣 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 卡 第 第 第 第 第The first - support element to constitute the deposit 201107216
一承載 面，沿與第一承載面垂直之方向之相鄰兩第二支 苐一支擇元件具 有一第二距離，而同樣沿，Μ·古而夕始齙从松 .A bearing surface has a second distance along the adjacent two second branches in a direction perpendicular to the first bearing surface, and the same distance, and the same as the old one.
運單元依序自第一儲存區之底部至第一 撐元件與 第三距離是大於 •區，最後，由搬 儲存區之頂部取 出基板，其中，搬運單元是以分別移動基板一上移距離的 方式，使位於第一儲存區的各基板能脫離相對應之各對第 一支撐7G件的支撐，且上移距離是小於該第一距離。 承上所述，在本發明之基板傳輸系統及其操作方法 中，由於相鄰的兩第一支撐元件或第二支撐元件是以較1 的間距設置於卡匣本體的壁上，因此可在固定大小的卡匣 參内構成較多的基板承載面，有效提高基板的儲存容量.另 外，在相鄰之第一支撐元件與第二支撐元件間則是另外具 有一較大的第三距離，其適於使搬運裝置將其搬運單元; 入。以整體結構觀之，由於第三距離亦可視為第—儲存區 與第一儲存區之間距，故本發明的基板傳輸系統在操作上 可先提供搬運裝置隨機挑選儲存區’再針對此儲存區依序 取放基板，是為一種有彈性的基板取放方式，而不需偈限 於以整個卡匣為單位依序取放基板。 與習知技術相較，本發明兼具部分隨機存取基板與較 201107216 佳空間利用效率的兩項優點，不僅改善標 巧承載面間距較大所造成存放空間浪費的問題，另=各 2省線索式切每次取放基板所要耗費的大量時間與 重複作動，有助於控制夜晶顯示器的生產成本。除此之 外，本基板傳輸系統之卡£在結構上是為一整體，不需附 加任何可動元件以協義縣置取放基板，可減少來 :外部的落塵機率或因本身元件間摩擦所產生的粉塵 里’在液晶顯示器的製程過程中維持基板表面的較佳狀 況’避免影響成品良率。 【實施方式】 H將參照相關式，㈣本發明較佳實施例之基板 傳輸系統及其操作方法。 請參考圖1A及圖2所示，根據本發明第—較佳實施 敎-種用以存取複數基板A的基板傳輸系統卜盆包含 複Hr以及—搬運裝置12。卡E U包含-本體111、 撐元件112以及複數對第二切元件H3。 一丄具有相對設置之一第一壁ma與—第二壁⑴卜 及 1弟—支樓兀件112的其中任—對是分設於第-壁ma 盆壁⑽以構成存放基板a之複數第一承載面B之 2之一’第一支撐元件112是沿與第—承载面B垂直之 万向C而設置以構成一第一綠左The transport unit sequentially removes the substrate from the bottom of the first storage area to the first support element and the third distance is greater than the area. Finally, the substrate is taken out from the top of the transfer storage area, wherein the transport unit moves the substrate up by a distance The method enables the substrates located in the first storage area to be detached from the support of the corresponding pairs of first support members 7G, and the upward movement distance is less than the first distance. As described above, in the substrate transfer system of the present invention and the method of operating the same, since the adjacent two first support members or the second support member are disposed on the wall of the cassette body at a pitch of one, The fixed size of the card ginseng constitutes a plurality of substrate bearing surfaces, which effectively increases the storage capacity of the substrate. In addition, the adjacent first supporting member and the second supporting member additionally have a larger third distance. It is suitable for the handling device to carry its handling unit; In view of the overall structure, since the third distance can also be regarded as the distance between the first storage area and the first storage area, the substrate transfer system of the present invention can be operated by first providing a handling device to randomly select a storage area and then targeting the storage area. The substrate is sequentially taken and placed, which is a flexible substrate pick-and-place method, and is not limited to sequentially picking and placing the substrate in units of the entire cassette. Compared with the prior art, the present invention has the advantages of partial random access substrate and better space utilization efficiency than 201107216, which not only improves the waste of storage space caused by the large bearing surface spacing, but also = 2 provinces The clue-cutting process takes a lot of time and repetitive action to take the substrate, which helps to control the production cost of the night crystal display. In addition, the card of the substrate transmission system is structurally integrated, and no need to attach any movable components to the substrate of the Jieyi County, which can be reduced: the external dust-collecting rate or the friction between the components themselves In the generated dust, 'the better condition of maintaining the surface of the substrate during the process of the liquid crystal display' avoids affecting the yield of the finished product. [Embodiment] H will refer to a correlation formula, and (4) a substrate transfer system and a method of operating the same according to a preferred embodiment of the present invention. Referring to FIG. 1A and FIG. 2, a substrate transfer system for accessing a plurality of substrates A includes a complex Hr and a handling device 12 in accordance with a first preferred embodiment of the present invention. The card E U comprises a body 111, a support element 112 and a plurality of pairs of second cutting elements H3. One of the first wall ma and the second wall (1) and the 1st - branch member 112 having a relative arrangement is disposed on the wall of the first wall ma (10) to constitute a plurality of storage substrates a. One of the first bearing surfaces B''the first supporting member 112 is disposed along the universal C perpendicular to the first bearing surface B to constitute a first green left
4存區114，且沿此方向C 支撐元件112具有—第—距㈣。該等第二 牙兀件H3的其中任—對是分設於第—壁仙及第二壁 201107216 lllb以構成存放基板A之複數第二承载面〇之其中之—， 第二支撐元件113是沿方向C而設置以構成鄰設於第—儲 存區114之一第二儲存區115，且沿方向c之相鄰兩第二 支撑元件113具有一第二距離d2e此外，沿方向c之相鄰 之第一支撐元件112與第二支撐元件113之間具有一第三 距離d3，且第三距離d3是大於第—距離⑴及第二距離 d2。搬運襄置12是鄰設於卡g ^，且具有至少一適於伸 入卡匣11以存取基板A的搬運單元121。第一距離以與 第二距離d2是分別大於搬運單元121之—上移距離，且 上移距離是適於使各基板A脫離相對應之各對第一支撐元 件112或相對應之各對第二支撐元件113支撐之一向上距 離。 在本實施例中，基板傳輸系統丨所存取之基板A可包 括玻璃基材、塑膠基材、金屬基材、已填入液晶的對組基 材或其他適合基材。本實施例之基板八係以玻璃基板為例。 • 卡匣11是用作於存放基板A，以提供基板a在處理 程序剷、後較為妥善的儲存方式，為此，卡匣Η是為具 有一本體111、複數第一支撐元件112以及複數第二支撐 元件113而可將基板A收容成積層狀態的一立體結構。卡 匣11之本體111具有一第一壁111a及一第二壁lllb，其 可使用之材質包括不銹鋼、鋁、其他穩定性佳之金屬或穩 定性佳之合金，又或者為樹脂（聚醚、醚酮、聚醚醯亞胺、 聚碳酸酯等）、高性能碳纖維複合材料（carb〇n讪沉 reinforced plastics，CFRP)或其他類人工合成材料。本發 201107216 明不限於上述描述，可依實際需切擇適當材料。請參考 圖1A所示，在本實施例中，第一壁111&與第二壁π lb 可為彼此平行且相同之一對四邊型平板，而第一支撐元件 112與第二支撐70件113是各自成對地分別設置於第一壁 111a與第二壁lllb上；當然、，請參考圖1(：所示，在本實 施例之另-態樣中’第一壁llla與第二壁1111?亦可為平 行且相同之一對四邊型框架，四邊型框架包含成對之支撐 條板I分別以縱向方向固定於四邊型框架中的上下框架 上，而第一支撐7〇件112或第二支撐元件113則是設置於 支撐條板I上。 本發明中第-支撐元件112是以成對之方式分別設置 於第一壁111a與第二壁1111?上，且每一對第一支撐元件 112可構成一存放基板a的第一承载面&在本實施例中， 請參考圖1A所示，第一支撐元件112係為連續長條板狀 結構；然而，在本實施例之另一態樣中，第一支撐元件112 亦可為獨立的桿狀結構（如圖1B與圖1C所示），換言之， 每-對第-支撐元件112可為多個桿狀結構以構成一存放 基板A的第-承載面—切元件ιΐ2以使用具有不 易^曲、抗靜電性、耐磨耗性、高表面硬度、低析出物、 耐向溫性及财化學性等特姓古_ & 寻狩性者為佳，不僅可以提升成品的 良率亦可以延長卡g π的使用壽命與減少卡Β η的維 ㈣件112可由具有良好強度之不 鏽鋼！呂口成樹月曰、石及纖维戏強化彈性碳鐵維所製造， 再者，於第-支撐元件U2上可更進一步塗以預定之村 201107216 料，以降低接觸基板A時可能造成的基板A表面劃傷。另 外，請同時參考1A戶斤示，各對第一支撐元件112是沿 方向C分別設置於第—壁llla及第二壁mb上，其設置 2式可騎合卡固、螺絲顧、熱融或鉚接等方式，或 是第-支撐元件112亦可直接與卡E u 一體成型。本發明 不限於上述描述，可依實際需求選擇適當的設置方式。 第二支撐元件113亦是以成對之方式分別設置於第-壁111&與第二壁Ulb上，且每—對第二支撐元件113可 構成-存放基板A的第二承載面D，由於第二支撐元件ιΐ3 之結構、製造材料與設置方式皆與第-支撐元件112相 同’於此不再贅述。 凊參考圖2所示，卡匣〗·|且古锋 具有一弟一儲存區114及一 二:區115,第—儲存區114是由第—支撐 置而構成，而第二儲存區出則是由第二支撐 兀件113沿方向c設置而構成。 在曰本發明之基板傳輸系統中，第_距離^鱼第二距 _ 2疋大於搬運單元121之一上移距離，t 離是適於使各基板八脫_對應 ^ ’上移距 或相對應之各對第二支禮元件113//；；支撐元件山 離；據此，當搬運裝置12以其搬運^斤$的一向上距 第-承载面B或第二承載面D中的2取：置放於 121可承载並向上移動此基板a-距離，使此 =!元 與原本支撐此基板A的第一支撐元件丄 土板A侍不 113接觸’同時亦不會使得基板A ^二支撐元件 ，、上方之另一對第— 11 201107216 撐元件112或第二支撐元件113接觸，將基板A在搬運過 程中接觸面積及可能的刮損程度減到最低，確保成品良 率。 請參考圖1A及圖2所示，沿方向C的相鄰兩第一支 撐元件112間具有第一距離dl，而沿方向C的相鄰兩第二 支撐元件113間具有第二距離d2，在本實施例中，第一距 離dl可實質等於第二距離d2,使達到較佳儲存容量分配。 第一距離dl與第二距離d2是大於待搬運裝置12存取的 基板A的厚度，使基板A能在最少實質接觸的情況下置入 或取出於第一承載面B或第二承載面D。 沿方向C之相鄰之第一支撐元件112與第二支撐元件 113之間具有第三距離d3，而第三距離d3必須要大於第 一距離dl及第二距離d2 ;請參考圖2所示，在本實施例 中，由於第一儲存區114與第二儲存區115是分別由第一 支撐元件112與第二支撐元件113所構成，因此，第三距 離d3亦可視為第一儲存區114之底部與第二儲存區115 之頂部的間距，由此可以得知，在本實施例中，第一儲存 區114與第二儲存區115間的距離是分別大於第一承載面 B與第一承載面B間的距離或第二承載面D與第二承載面 D間的距離。 搬運裝置12具有至少一適於伸入卡匣11的搬運單元 121，因此，搬運裝置12可利用搬運單元121承載並移動 基板A，而將基板A分別存放於卡匣11中，或分別由卡 匣11中取出基板A。請參考圖1A所示，在本實施例中， 12 201107216 =:12可為一具有兩個搬運單元121之機械手臂， 二運？單元121則可為一具有四支牙又的牙又組，當 μ 早70 121亦可為具有其他數目牙又之牙叉έ另 L常機；Γ在制上並無特麻制，可為真空機械手 二機械手臂或其他適於搬運基板Α之機械手臂，且 合金、高性能碳纖維複合材料或其他具有足夠 f的工程彈性材料所製成4發_ =求選擇適當的搬運裝置與其材質：;:，: 下將牙又tins使機器手臂可在最少接觸的情況 基板A，牙叉舆第二健存區115之間存取 之間，或入於ί 第三距離d3與第一距離dl 戍〗丨於第二距離d3與第二距離d2之間。 严4本實施例中’當各基板A被分別放置於各對第一支 =件112或各對第二支撐元件113上時，二支； 兀件112或各對第 〗各對弟支撐 A的#件3以接觸相對應之基板 板傳輸=:=板:’而當操作本發明之基 趣“ 4 土全基板^搬衫置I2亦是以接觸 二=;A1以將基“置入卡…自卡民 化·為避免&彼覆化學塗層或預倩予以披覆 面Γ斑I ί表面Α2(即相對抵靠表❺八1的另一 他物件有貫f接觸。在本實施例中所使用的「抵 1面厂詞是指基板的兩表面之其中之―，是為未實施 理或未規劃好以加卫或處理的基板表面，其可 …載搬運或與其他物件接觸，以避免造成非基板抵「r 13 201107216 靠表面上的刮傷或顆粒附著，影響成品良率。 以下將參照圖3A、圖3B及圖4說明本發明第二較佳 實施例之基板傳輸系統的卡匣3。 圖3A是為本發明第二較佳實施例之一種基板傳輸系 統之卡匣3的示意圖，圖4則是為圖3A之卡匣3的前視 圖。請參考圖3A及4所示，根據本發明第二較佳實施例 之一種用以存取複數基板E的基板傳輸系統，其包含一卡 匣3以及一搬運裝置（圖中未示）。卡匣3包含一本體31、 複數對第一支撐元件32、複數對第二支撐元件33以及複 數辅助支撐元件39。本體31具有相對設置之一第一壁 3Π、一第二壁312與一第三壁313，第三壁313是分別與 第一壁311與第二壁312連接。該等第一支撐元件32的 其中任一對是分設於第一壁311及第二壁312以構成存放 基板E之複數第一承載面F之其中之一，該等第一支撐元 件32是沿與第一承載面F垂直之一方向G而設置以構成 一第一儲存區34，且沿方向G的相鄰兩第一支撐元件32 具有一第一距離d4。該等第二支撐元件33的其中任一對 是分設於第一壁311及第二壁312以構成存放基板E之複 數第二承載面Η之其中之一，該等第二支撐元件33是沿 方向G而設置以構成鄰設於第一儲存區34之一第二儲存 區35，且沿方向G之相鄰兩第二支撐元件33具有一第二 距離d5。此外，沿方向G之相鄰之第一支撐元件32與第 二支撐元件33之間具有一第三距離d6,且第三距離d6是 大於第一距離d4及第二距離d5。該等辅助支撐元件39是 14 201107216 〇又置於第二壁313上，且與相對應之各對第一支撐元件32 共同構成相對應之各第—承载面F或與相對應之各對第二 支撐兀件33共同構成相對應之各第二承載面H，該等辅助 支撐元件39是沿方向g而設置於第三壁313。換言之，每 一第-承載面F可由對應之—對第—支撐元件32^至少 :辅助支撐元件39構成；每―第二承載面H可由對應之 一對第二支稽元件33與至少—辅助支撐^件39構成。其 中母一第一承载面F或每一第二承載面Η使用的輔助支撐 兀件39的數目並不限於圖式所示，可依實際需求調整， 、避免基板因中央支撐力較小而彎曲。搬運袭置（圖中未 不）是鄰於卡g 3，且具有—至少適於伸人卡g 3以存 取基板E的搬運單元。第一距離d4與第二距離&是分別 大於搬運單元之—上移距離，且上移輯是適於使各基板 E脫離相對應之各對第一支撐元件32或相對應之各對第 一支撐元件33支撐之一向上距離。4 storage area 114, and in this direction C support element 112 has a - first distance (four). The pair of the second jaw members H3 are disposed on the first wall and the second wall 201107216 lllb to form a plurality of second bearing surfaces of the substrate A. The second supporting member 113 is Arranged along the direction C to form a second storage region 115 adjacent to the first storage region 114, and the adjacent two second support members 113 in the direction c have a second distance d2e. Further, adjacent to the direction c The first supporting member 112 and the second supporting member 113 have a third distance d3, and the third distance d3 is greater than the first distance (1) and the second distance d2. The carrying device 12 is disposed adjacent to the card g^ and has at least one handling unit 121 adapted to extend into the cassette 11 to access the substrate A. The first distance and the second distance d2 are respectively greater than the upward movement distance of the transport unit 121, and the upward movement distance is suitable for the respective substrates A to be separated from the corresponding pairs of the first support elements 112 or the corresponding pairs. The two support members 113 support one of the upward distances. In this embodiment, the substrate A accessed by the substrate transfer system can include a glass substrate, a plastic substrate, a metal substrate, a pair of substrates filled with liquid crystal, or other suitable substrate. The substrate of the present embodiment is exemplified by a glass substrate. • The cassette 11 is used for storing the substrate A to provide a better storage method for the substrate a to be shoveled after the processing. For this purpose, the cassette has a body 111, a plurality of first supporting members 112, and a plurality of The support member 113 can accommodate the substrate A in a three-dimensional structure in a laminated state. The body 111 of the cassette 11 has a first wall 111a and a second wall 111b, and the materials which can be used include stainless steel, aluminum, other stable metal or alloy with good stability, or resin (polyether, ether ketone). , polyether phthalimide, polycarbonate, etc.), high-performance carbon fiber composites (carb 〇 讪 reinforced plastics, CFRP) or other types of synthetic materials. This is not limited to the above description, and the appropriate materials can be selected according to actual needs. Referring to FIG. 1A, in the embodiment, the first wall 111& and the second wall π lb may be parallel to one another and the same one of the quadrilateral flat plates, and the first support member 112 and the second support 70 member 113 They are respectively disposed in pairs on the first wall 111a and the second wall 111b; of course, please refer to FIG. 1 (:, in the other embodiment of the embodiment, the first wall 111a and the second wall) 1111? may also be parallel and identical one-to-four-sided frame, the quadrilateral frame includes a pair of support strips I respectively fixed in the longitudinal direction on the upper and lower frames in the quadrilateral frame, and the first support 7 is 112 or The second support member 113 is disposed on the support strip 1. In the present invention, the first support member 112 is disposed on the first wall 111a and the second wall 1111, respectively, in pairs, and each pair is first The supporting member 112 can constitute a first bearing surface of the storage substrate a. In this embodiment, referring to FIG. 1A, the first supporting member 112 is a continuous elongated plate-like structure; however, in the embodiment In another aspect, the first support member 112 can also be a separate rod-shaped structure (as shown in FIG. 1B). 1C), in other words, each of the pair of first support members 112 may have a plurality of rod-like structures to constitute a first load-bearing surface-cutting element ιΐ2 for storing the substrate A for use, which is resistant to rubbing, antistatic, and resistant. Abrasiveness, high surface hardness, low precipitates, resistance to temperature and chemical chemistry, etc. _ & hunting is better, not only can improve the yield of finished products but also extend the life of card g π The dimension (four) member 112 with the reduced Β η can be made of stainless steel with good strength! Lukou Chengshu, 石, stone and fiber reinforced elastic carbon iron, and further coated on the first support member U2 According to the predetermined village 201107216, the surface of the substrate A may be scratched when the substrate A is contacted. In addition, please refer to the 1A household, and the first supporting members 112 are respectively disposed along the direction C in the first wall 111a. And the second wall mb, which is provided with the type 2, can be snapped, screwed, hot melted or riveted, or the first support member 112 can be directly formed integrally with the card E u. The invention is not limited to the above description. , you can choose the appropriate setting according to actual needs. The second supporting members 113 are also disposed on the first wall 111 & and the second wall U1b in pairs, and each of the pair of second supporting members 113 can constitute a second bearing surface D for storing the substrate A, Since the structure, manufacturing material and arrangement of the second supporting member ΐ3 are the same as those of the first supporting member 112, the details are not described herein. Referring to FIG. 2, the card has a storage area. 114 and 12: a region 115, the first storage region 114 is formed by the first support, and the second storage region is formed by the second support member 113 disposed along the direction c. In the transmission system, the second distance _ 2 疋 of the first distance is greater than the upward movement distance of the transport unit 121, and the distance t is suitable for each substrate to be detached or corresponding to each other. The support member 113//;; the support member is separated; according to this, when the transport device 12 takes an upward distance from the first load-bearing surface B or the second load-bearing surface D, it is placed at 121 The substrate a-distance can be carried and moved upwards so that the =! element and the first supporting member bauxite originally supporting the substrate A A waiter 113 contact 'does not cause the substrate A ^ two support members, the other pair of the upper 11 201107216 support member 112 or the second support member 113 to contact, the contact area of the substrate A during handling and possible The degree of scratching is minimized to ensure finished product yield. Referring to FIG. 1A and FIG. 2, a first distance d1 is formed between two adjacent first supporting members 112 in the direction C, and a second distance d2 is formed between adjacent two second supporting members 113 in the direction C. In this embodiment, the first distance d1 may be substantially equal to the second distance d2 to achieve a better storage capacity allocation. The first distance d1 and the second distance d2 are greater than the thickness of the substrate A accessed by the device to be transported 12, so that the substrate A can be placed in or taken out on the first bearing surface B or the second bearing surface D with minimal physical contact. . A third distance d3 between the adjacent first support member 112 and the second support member 113 in the direction C, and the third distance d3 must be greater than the first distance d1 and the second distance d2; please refer to FIG. In this embodiment, since the first storage area 114 and the second storage area 115 are respectively formed by the first supporting component 112 and the second supporting component 113, the third distance d3 can also be regarded as the first storage area 114. The distance between the bottom of the second storage area 115 and the top of the second storage area 115, it can be seen that, in this embodiment, the distance between the first storage area 114 and the second storage area 115 is greater than the first bearing surface B and the first The distance between the bearing surfaces B or the distance between the second bearing surface D and the second bearing surface D. The transport device 12 has at least one transport unit 121 adapted to extend into the cassette 11. Therefore, the transport device 12 can carry and move the substrate A by the transport unit 121, and store the substrates A in the cassette 11 respectively, or respectively by the card. The substrate A was taken out from the crucible 11. Referring to FIG. 1A, in the embodiment, 12 201107216 =:12 can be a robot arm with two handling units 121, second transport? The unit 121 can be a tooth with a set of four teeth. When the μ is 70, the 121 can also be a tooth with a different number of teeth, and the other is a conventional machine; Vacuum manipulator two robotic arm or other robotic arm suitable for carrying the substrate, and alloy, high-performance carbon fiber composite material or other engineering elastic material with sufficient f to make 4 rounds _ = choose the appropriate handling device and its material: ;:,: The lower teeth and the tins allow the robot arm to be accessed between the substrate A, the second fork storage area 115, or the third distance d3 and the first distance dl.戍 丨 丨 between the second distance d3 and the second distance d2. In the present embodiment, when each substrate A is placed on each pair of first branch members 112 or pairs of second support members 113, two pieces; #部件3 is in contact with the corresponding substrate board transmission =:= board: 'And when operating the basics of the invention "4 soil full substrate ^ shirt set I2 is also contact two =; A1 to "base" Card...from the cardinization ·To avoid & the chemical coating or the pre-Qin to cover the surface freckle I ί surface Α 2 (that is, the other object relative to the surface of the ❺8 1 has a f contact. In this implementation The term "a factory term refers to one of the two surfaces of the substrate" used in the example, which is the surface of the substrate that is not implemented or planned to be added or treated, which can be carried or contacted with other objects. In order to avoid the occurrence of scratches or particle adhesion on the surface of the non-substrate against "r 13 201107216, affecting the yield of the finished product. The substrate transfer system of the second preferred embodiment of the present invention will be described below with reference to FIGS. 3A, 3B and 4. Figure 3A is a schematic view of a cassette 3 of a substrate transfer system in accordance with a second preferred embodiment of the present invention, and Figure 4 3 is a front view of the cassette 3 of FIG. 3A. Referring to FIGS. 3A and 4, a substrate transfer system for accessing a plurality of substrates E includes a cassette 3 according to a second preferred embodiment of the present invention. And a handling device (not shown). The cassette 3 includes a body 31, a plurality of pairs of first support members 32, a plurality of pairs of second support members 33, and a plurality of auxiliary support members 39. The body 31 has a relative arrangement of one of the first a wall 3Π, a second wall 312 and a third wall 313, the third wall 313 is respectively connected to the first wall 311 and the second wall 312. Any one of the first supporting members 32 is divided into a wall 311 and a second wall 312 constituting one of a plurality of first bearing surfaces F for storing the substrate E. The first supporting members 32 are disposed in a direction G perpendicular to the first bearing surface F to constitute a a first storage area 34, and adjacent first support members 32 in the direction G have a first distance d4. Any one of the second support members 33 is disposed on the first wall 311 and the second wall. 312 to constitute one of a plurality of second bearing surfaces of the storage substrate E, the second supporting elements 33 is disposed along the direction G to constitute a second storage region 35 adjacent to the first storage region 34, and the adjacent two second support members 33 in the direction G have a second distance d5. Further, along the direction G There is a third distance d6 between the adjacent first support member 32 and the second support member 33, and the third distance d6 is greater than the first distance d4 and the second distance d5. The auxiliary support members 39 are 14 201107216 The cymbal is placed on the second wall 313 and corresponds to each of the corresponding first supporting members 32 to form a corresponding first bearing surface F or corresponding to the corresponding pair of second supporting members 33. Each of the second bearing surfaces H, the auxiliary supporting members 39 are disposed in the third wall 313 in the direction g. In other words, each of the first bearing surfaces F may be constituted by a corresponding one-to-first supporting member 32^ at least: an auxiliary supporting member 39; each "second bearing surface H" may be associated with at least one of the second supporting members 33 and at least - assisted The support member 39 is constructed. The number of the auxiliary supporting members 39 used for the first bearing surface F or each of the second bearing surfaces 并不 is not limited to the figure, and can be adjusted according to actual needs, and the substrate is prevented from being bent due to the small central supporting force. . The transport (not shown) is adjacent to the card g 3 and has a transport unit that is at least adapted to extend the card g 3 to store the substrate E. The first distance d4 and the second distance & are respectively greater than the upward movement distance of the transport unit, and the upper shift is adapted to separate the respective substrates E from the corresponding pairs of first support members 32 or corresponding pairs of A support member 33 supports one of the upward distances.
本貫施例之基板傳輸系統之卡匣適用於提供大尺寸 的基板足夠強度的支撐，避免因為基板£在第一承载面F 或第一承載面Η上時由於左右兩端與中間部位受力不均勻 而產生曲折或變形。 在本實施例中，基板傳輸系統所存取的基板Ε、複數 對第一支撐元件32以及複數對第二支撐元件33皆與本發 明第一較佳實施例中所揭示之基板傳輸系統丨所存取的^ 板A、複數對第一支撐元件112以及複數對第二支撐元= 113相同（如圖1所示），於此不再贅述。 15 201107216 請參考圖3A所示，在本實施例中，卡匣3是和本發 明第一較佳實施例中所揭示之卡匣11相似但其本體31而· 更具有一第三壁313,其材質可與第一壁312與第二壁313 相同，再者，請參考圖4所示，第三壁313可為一四邊型 平板，其長寬比例則可依照欲存放基板E的長寬比例及欲 使用的基板E承載面數量進行規劃，然而第三壁313可為 與第一壁311及第二壁312不同的形狀或結構；當然，在 本實施例的另一態樣中，第三壁313亦可為一四邊型框架 (如圖3B所示），惟本發明不限於上述描述，可依實際需 求選擇適當的第三壁結構或形狀。本發明之第三壁313與 第一壁311及第二壁312連接之方式可為螺絲鎖固、插入 嵌合、藉由其他元件連結固定或一體成型，第三壁313並 以此與第一壁311及第二壁312組成一截面為门字形立體 結構的本體31 (如圖3A與圖3B所示）。當然，本體亦可 具有一上蓋以及一底板，以與第一壁311、第二壁312及 第三壁313組成具有一開口的箱體，然其並非為限制性， 可依實際需求調整。 請參考圖3A所示，在本實施例中，輔助支撐元件39 是沿方向G而設置於第三壁313並相對應之第一支撐元件 32共同構成相對應之第一承載面F或與相對應之第二支撐 元件33共同構成相對應之第二承載面H。辅助支撐元件 39可由良好強度之不鏽鋼、鋁、合成樹脂、碳纖維、強化 彈性碳纖維或其他適當材料所製造，並如同使用第一支撐 元件32及第二支撐元件33，要考量不易彎曲、抗靜電性、 16 201107216 耐磨耗性、高表面硬度、低析出物、耐高溫性及耐化學性 等特性，再者，辅助支撐元件39上可更進一步塗以預定 之材料，以降低接觸基板E時可能造成的基板E表面劃 傷。另外，在本實施例中，輔助支撐元件39是為連續長 條狀，而其長度是必須依據待存放之基板E的大小，考量 是否能提供足夠之支撐力，而必須使基板£在置放於第一 承載面F或第二承載面H上時不會因為本身之重量下壓而 產生瓞形彎曲。另外，辅助支撐元件39是設置於第三壁 313 ，其設置之方式可為嵌合卡固、螺絲鎖固、熱融或 鉚接等方式，或是輔助支撐元件39亦可直接與卡匣；3 — 體成型。本發明不限於上述描述，可依實際需求選擇適當 的設置方式。 亦=藉由接觸基板Ε之抵靠表面Ε1以支撐基板 -罪表面Ε1即為各基板£被分別放置於各對第 月多考圖4所示，在本實施例中，辅助支撐元件39 Ε1以支稽基板Ε，其中，The card transfer system of the present embodiment is suitable for providing a support of a large-sized substrate with sufficient strength to avoid stress on the left and right ends and the intermediate portion when the substrate is on the first bearing surface F or the first bearing surface. Unevenness causes tortuosity or deformation. In this embodiment, the substrate 存取 accessed by the substrate transfer system, the plurality of pairs of the first support member 32, and the plurality of pairs of the second support member 33 are combined with the substrate transfer system disclosed in the first preferred embodiment of the present invention. The access board A, the complex pair first support element 112 and the complex pair second support element = 113 are the same (as shown in Fig. 1), and will not be described again here. 15 201107216 Referring to FIG. 3A, in the present embodiment, the cassette 3 is similar to the cassette 11 disclosed in the first preferred embodiment of the present invention, but has a body 31 and a third wall 313. The material can be the same as the first wall 312 and the second wall 313. Further, please refer to FIG. 4, the third wall 313 can be a quadrilateral plate, and the length to width ratio can be long according to the length of the substrate E to be stored. The width ratio and the number of substrate E bearing faces to be used are planned, but the third wall 313 may have a different shape or structure from the first wall 311 and the second wall 312; of course, in another aspect of the embodiment, The third wall 313 can also be a quadrilateral frame (as shown in FIG. 3B), but the invention is not limited to the above description, and an appropriate third wall structure or shape can be selected according to actual needs. The third wall 313 of the present invention is connected to the first wall 311 and the second wall 312 in a manner of screw locking, insertion fitting, joint fixing or integral molding by other elements, and the third wall 313 and the first wall The wall 311 and the second wall 312 constitute a body 31 having a gate-shaped three-dimensional structure (as shown in Figs. 3A and 3B). Of course, the main body can also have an upper cover and a bottom plate to form a box having an opening with the first wall 311, the second wall 312 and the third wall 313. However, it is not limited and can be adjusted according to actual needs. Referring to FIG. 3A, in the embodiment, the auxiliary supporting member 39 is disposed on the third wall 313 along the direction G and the corresponding first supporting member 32 together constitutes a corresponding first bearing surface F or phase. Corresponding second support elements 33 together form a corresponding second bearing surface H. The auxiliary support member 39 can be made of stainless steel, aluminum, synthetic resin, carbon fiber, reinforced elastic carbon fiber or other suitable material of good strength, and as with the first support member 32 and the second support member 33, it is considered that the bending and antistatic properties are not easy. 16 201107216 Abrasion resistance, high surface hardness, low precipitates, high temperature resistance and chemical resistance. Further, the auxiliary support member 39 can be further coated with a predetermined material to reduce the possibility of contacting the substrate E. The surface of the substrate E is scratched. In addition, in the present embodiment, the auxiliary supporting member 39 is in the form of a continuous strip, and the length thereof must be based on the size of the substrate E to be stored, whether or not it can provide sufficient supporting force, and the substrate must be placed. When it is on the first bearing surface F or the second bearing surface H, it does not cause a meandering bending due to its own weight pressing. In addition, the auxiliary supporting member 39 is disposed on the third wall 313, and can be arranged in a manner of fitting, screwing, hot-melting or riveting, or the auxiliary supporting member 39 can be directly connected with the card; — Body molding. The present invention is not limited to the above description, and an appropriate setting manner can be selected according to actual needs. Also, by contacting the substrate Ε1 against the surface Ε1 to support the substrate-sin surface Ε1, each substrate is placed in each pair of the first month, as shown in FIG. 4, in the present embodiment, the auxiliary supporting member 39 Ε1 To support the substrate, where
凊參考圖5所示，依據本發明較佳實施例 之基板傳輸 201107216 系統的操作方法，係包括步驟S11至步驟S13。少雜Sl1 係提供一卡匣；步驟S12係提供具有至少—搬運單元的/ 搬運f:置，並將搬運單元伸入第-儲存區；步驟S13你由 搬運單7G依序自第—儲存區之底部至第 之讀部 取出基板。 在本發明之基板傳輸系統的操作方法中，使用搬速装 置依序自第—儲存區之底部至第—儲存區之頂部取出基 板的方式是魏運單元先分別健基板-上移距離’使备 基板脫離㈣紅各對第-支#元件支撐，再前侧 取出基板’ f注意的是，上移距離要小於相鄰兩第，支據 兀件間的第-距離’㈣免當搬運單元以取出基板為目的 而向上移動基板時，基板會接觸到其上的第一支撐元件’ 產生無§胃的碰撞或刮傷。 在本實施例中，當實施本發明之基板傳輸系麻的#作 方法之步驟S3前，第—支禮元件的其中任—對是以换觸 基板的一抵靠表面以支撐基板，使基板能處於4定的狀 態，其中，抵靠表面是指基板具有之未實施加工、處该成 未規劃要予以加工或處理的一表面，其可提供承载或搬運 使用’以聽其他物件接觸非基板抵靠表面可能造成 面刮傷或驗附著’再者，於實施本發明之基板傳輪: 的操作方法之步驟S3日寺，搬運單元亦是以接觸基板的: 靠表面以取出基板。另外，在本實施例中，搬運單元θ ; 真空吸附或靜電吸附基板的方式承載輿移動基板，可= 基板位於搬運單元上時的穩定性，以避免基板在搬運的過 201107216 =產生位移、晃動、不穩甚至由搬運單元上墜落，惟本 J不限於上述描述，可依實際需求選擇適當的承載其板 的機制。此處是以取出第—儲存區的基板為例，而取=第 -儲存區的基板之概念與上述原理相近，於此不再費述。 a綜上所述，依據本發明之基板傳輸系統及其操作方法 是以-緊密的距離間隔設置相鄰的第一支撐元件或第二 支撐元件，故可使單-卡_具妹多的基板承载面，ί =提南卡㈣基板儲存容量；另外，在相鄰之儲存區與儲 子區間則是搭配設置-較大的第三距離，其適於使搬運裝 置將其搬運單元伸人，以快速完成此儲存區内的基板存 取；據此，本基板傳輸系統可提供先隨機選取儲存區，再 對儲存區内之各承载面依序取放基板的基板取放方式，除 ^善使用標準式卡Ε所造成卡Ε内内部空間浪費的問 題，還可突破現行線索式卡匣嚴重受限的基板存取方式， 有助於節省倉儲空間或工時，降低液晶顯示器的生產成 本。另外，本基板傳輸系統亦不需在卡匣結構上附加任何 可動元件來協助搬運裝置取放基板，避免因為外部落塵進 入或可動元件磨擦所產生出的顆粒掉落基板表面上，影響 成品t 4。 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 【圖式簡單說明】 19 201107216 圖1A係為本發明第一較佳實施例之一種基板傳輸系 統之示意圖； 圖係為圖1A之卡匣的示意圖； 圖1C係為圖ία之卡匣之另一態樣的示意圖； 圖2係為圖ία之卡匣的前視圖； 圖3A係為本發明第二較佳實施例之一種基板傳輪系 統之卡匣的示意圖； 圖3B係為本發明弟二較佳實施例之一種基板傳輪系 統之卡匣之另一態樣的示意圖； 圖4係為圖3A之卡匣的前視圖；以及 圖5係為本發明較佳實施例之一種基板傳輸系統的操 作方法之步驟流程圖。 【主要元件符號說明】 1 :基板傳輸系統 11、3 :卡匣 1Π、31 :本體 111a、311 :第一壁 Ulb、312 :第二壁 112、 32 :第一支撐元件 113、 33 :第二支撐元件 114、 34 :第一儲存區 115、 35 :第二儲存區 12 :搬運裝置 201107216 121 :搬運單元 dl、d4 :第一距離 d2、d5 :第二距離 d3、d6 :第三距離 313 :第三壁 39 :辅助支撐元件 A、 E :基板Referring to FIG. 5, the method of operating the substrate transmission 201107216 according to the preferred embodiment of the present invention includes steps S11 through S13. The less miscellaneous Sl1 provides a cassette; the step S12 provides at least the handling unit / handling f: and the handling unit is extended into the first storage area; in step S13, the carrier 7G is sequentially from the first storage area The substrate is taken out from the bottom to the first reading portion. In the operation method of the substrate transfer system of the present invention, the method of removing the substrate from the bottom of the first storage area to the top of the first storage area by using the speeding device in sequence is that the Wei Yun unit first separately moves the substrate-upward distance' The preparation substrate is detached (4) the red pair is supported by the first-branch component, and the substrate is taken out from the front side. f Note that the upward movement distance is smaller than the adjacent two, and the first-distance between the components is (4) When the substrate is moved upward for the purpose of taking out the substrate, the first supporting member on which the substrate comes into contact 'produces a collision or scratch without a stomach. In the present embodiment, before performing the step S3 of the method for transferring the substrate of the present invention, the first of the first-to-shoulder elements is to replace the abutting surface of the substrate to support the substrate, so that the substrate It can be in a state of 4, wherein the abutting surface refers to a surface of the substrate that has not been processed, which is not planned to be processed or processed, and can provide carrying or handling to listen to other objects contacting the non-substrate. The surface may be scratched or adhered to the surface. Further, in the step S3 of the operation method for implementing the substrate transfer wheel of the present invention, the transport unit is also a substrate that contacts the substrate to take out the substrate. In addition, in the present embodiment, the transport unit θ; the vacuum adsorption or electrostatic adsorption substrate carries the 舆 moving substrate, and can be used to ensure the stability of the substrate when it is placed on the transport unit, so as to avoid the substrate being transported over 201107216 = displacement, sloshing It is unstable or even dropped by the handling unit. However, this J is not limited to the above description, and the mechanism for carrying the board can be selected according to actual needs. Here, the substrate of the first storage area is taken as an example, and the concept of the substrate of the first storage area is similar to the above principle, and will not be described here. In summary, the substrate transfer system and the method of operating the same according to the present invention are such that the adjacent first support member or the second support member is disposed at a close distance, so that the single-card_multiple substrate can be made. Carrying surface, ί = Tienanka (4) substrate storage capacity; in addition, the adjacent storage area and the storage section are matched with a larger third distance, which is suitable for the carrying device to extend its carrying unit, In order to quickly complete the substrate access in the storage area; according to the present invention, the substrate transmission system can provide a storage device that randomly selects the storage area, and then sequentially picks up and places the substrate on each bearing surface in the storage area, except for the good The use of the standard type of cassette causes a waste of internal space in the cassette, and can also break through the severely limited substrate access mode of the current lead type card, which helps to save storage space or man-hours and reduce the production cost of the liquid crystal display. In addition, the substrate transfer system does not need to attach any movable components to the cassette structure to assist the handling device to pick up and place the substrate, so as to prevent the particles generated by the external dust entering or the friction of the movable component from falling onto the surface of the substrate, thereby affecting the finished product t 4 . The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic view of a substrate transfer system according to a first preferred embodiment of the present invention; FIG. 1A is a schematic view of the card of FIG. 1A; FIG. 1C is a card of FIG. FIG. 2 is a front view of the cassette of FIG. 3A; FIG. 3A is a schematic view of a cassette of a substrate transfer system according to a second preferred embodiment of the present invention; FIG. 3B is a schematic diagram of the present invention. 2 is a schematic view of another aspect of a substrate transfer system of the preferred embodiment; FIG. 4 is a front view of the cassette of FIG. 3A; and FIG. 5 is a substrate transfer of the preferred embodiment of the present invention. Flow chart of the steps of the system's method of operation. [Main component symbol description] 1 : Substrate transfer system 11, 3: cassette 1Π, 31: body 111a, 311: first wall Ulb, 312: second wall 112, 32: first support member 113, 33: second Supporting elements 114, 34: first storage area 115, 35: second storage area 12: handling device 201107216 121: handling unit dl, d4: first distance d2, d5: second distance d3, d6: third distance 313: Third wall 39: auxiliary support members A, E: substrate
Al、E1 :抵靠表面 A2 :表面 B、 F :第一承載面 C、 G :方向 D、 Η :第二承載面 I :支撐條板 S11〜S13 :步驟Al, E1: abutting surface A2: surface B, F: first bearing surface C, G: direction D, Η: second bearing surface I: support strip S11~S13: steps