201032981 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種模仁之製造方法，尤其係涉及一種用於紫外 壓印之模仁之製造方法。 【先前技術】 參 模仁通常用於壓印熔融狀態之光固化材料，該光固化材料經 固化後得到成型元件。紫外壓印技術（請參見Liang Ying-xin，Wang Tai-hong, “A New Technique for Fabrication 〇f Nanodevices-Nanoimprint Lithography，' Micronanoelectronic Technology，2003, Vol. 4-5)係採用紫外光照射聚合物實現固化成型 之壓印技術，特別適用於大批量、重復性、精確製備微結構。 目前，模仁之製造方法通常係首先在玻璃基板表面塗覆一液 態或熔融態之光固化材料層，如PMMA，然後使用一金屬模仁壓 印該光固化材料，固化該光固化材料’脫模，完成圖形轉移而形 成具有複數成型面之模仁。超精密加工技術亦也可以被用於切 削、研磨該光固化材料，從而得到具有複數成型面之模仁。然，'以 上方法中’光固化材料層在形成於整個玻璃基板表面時，由於“edge bead”效應，即越靠近邊緣膜越厚，不易形成一層均勻厚度之膜層。 此外，由於該透明模仁在壓印過程中，與成型元件接觸之為該光 固化材料層，其機械強度較低易變形，容易導致複數成型元 寸不一致’影響壓印效果。 【發明内容】 仁之ϊίίϊ。’有必要提供—觀顧度較高、精销較高之模 外光製?:t l包括以下步驟:提供-個可透過紫 Uίϊίΐ!二t光阻層形成複數預定排列之通孔； 則趣數通蘭對叙賴基板絲，從而在該玻璃基板 4 201032981 3 ΐίίΐ^槽；在每個凹槽中填充光固化材料；去除光 3光之絲絲表面絲在外；固化每個凹 固2材，利用超精密加工機床對每個凹槽内之光固化材 枓進盯加工’在母個凹槽之光·材料表 從而得到射概成_之壯。 4個歧面 相較於先前技術’首先’本發明之模仁 又二勻其人，該透明模仁在壓印過程中，與成型元件 ^之大部分面積為玻璃基板，其機械強度較高變 壓印過程精確度較冑。 ^201032981 VI. Description of the Invention: [Technical Field] The present invention relates to a method of manufacturing a mold core, and more particularly to a method for manufacturing a mold core for ultraviolet embossing. [Prior Art] The reference resin is usually used for imprinting a photocurable material in a molten state, and the photocurable material is cured to obtain a molded component. UV imprinting technology (see Liang Ying-xin, Wang Tai-hong, "A New Technique for Fabrication 〇f Nanodevices-Nanoimprint Lithography, 'Micronanoelectronic Technology, 2003, Vol. 4-5) Curing technology for solidification molding is especially suitable for high-volume, reproducible and precise preparation of microstructures. At present, the manufacturing method of mold cores is usually to first coat a surface of a glass substrate with a liquid or molten photo-curable material layer, such as PMMA. Then, the photocurable material is embossed using a metal mold, and the photocurable material is cured to be demolded, and the pattern transfer is completed to form a mold having a plurality of molding surfaces. Ultra-precision processing technology can also be used for cutting and grinding the light. Curing the material to obtain a mold having a plurality of molding faces. However, in the above method, the photocurable material layer is formed on the entire surface of the glass substrate due to the "edge bead" effect, that is, the closer to the edge film, the thicker it is, which is difficult to form. a layer of uniform thickness. Further, since the transparent mold is in contact with the forming member during the imprinting process, The layer of solidified material has low mechanical strength and is easy to be deformed, which easily leads to inconsistent multi-dimensional forming dimensions. [Inventive content] 仁之ϊ ίίϊ. 'It is necessary to provide - high visibility, high precision outside the mold Light system: tl includes the following steps: providing - through the violet U ϊ ΐ ΐ 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二^Slot; fill each groove with a photocurable material; remove the surface of the light with 3 rays of light; solidify each of the recessed solid materials, and use an ultra-precision machine tool to penetrate the photocurable material in each groove Staring processing 'in the light of the mother groove · material table to get the shot into a strong _ strong. Compared with the prior art 'first' the mold of the present invention is evenly distributed, the transparent mold is under pressure In the printing process, most of the area of the molding element ^ is a glass substrate, and the mechanical strength is higher, and the precision of the embossing process is relatively poor.
【實施方式】 二面將結合附圖，對本發明實施例作進一步之詳細說明。 "月參閱圖1 ’其為本發明實施例中模仁之製造方法之流程圖。 該方法包括以下步驟： 提供一個可透過紫外光之玻璃基板； 在該玻璃基板之表面形成一層光阻層； 對该光阻層進行曝光顯影，從而在該光阻層形成複數預定 列之通孔； 蝕刻該複數通孔所對應之玻璃基板表面，從而在該玻璃基板 之表面形成複數相應之凹槽； 在每個凹槽中填充光固化材料； 去除光阻層，並保持未設置凹槽之玻璃基板表面暴露在外； 固化每個凹槽之光固化材料； 利用超精密加工機床對每個凹槽内之光固化材料進行加工， 在母個凹槽之光固化材料表面均形成一個成型面，從而得到具有 複數成型面之模仁。 ~ 下面結合圖2至圖7對本發明實施例中模仁之製造方法進行 詳細說明。 請參閱圖2，首先提供一玻璃基板3〇，該玻璃基板30可透過 5 201032981 •紫外光，優選為_率大於，在本實施例巾，該玻璃美杯切 1=¾面=璃基板30具有兩個相對之表“第- =用=層=二 進行= = 具有駭圖案之光罩(圖未示)對該光阻層40 ο 後飢娜劑，將未曝光之貞光阻溶解， 從而亥先阻層40形成複數預定排列之通孔402。 -矣Ξ 2圖餘刻該複數通孔4〇2所對應之玻璃基板30之第 之=5Γ 該玻璃基板30之第一表面302形成複數相應 請參閱圖5，去除剩餘之光阻層40。 斜在每個凹槽5〇填充液態或熔融狀態之光固化材 ^冰。叮保持未設置凹槽5〇之玻璃基板30之第一表面302暴露 光阻層也可以在填充光固化材料6〇之步驟完成後去除 ❿ ，固化每個凹槽5〇内之光固化材料6〇。該光 聚甲基丙稀酸甲醋(ρ〇ι^_副1—， =Α)、聚兔酸酯（P〇lyCarb〇nate，Pc)或聚對苯二曱酸乙二 酯（PolythyleneTerephthalate，PET)。 ,請參關7，超精密加工機床對每個凹槽50之光固化材 ，6〇進行加工’在每個凹槽5〇之光固化材料6〇表面均形成一個 成垔面602，從而得到具有複數成型面6〇2之模仁1〇〇 ^在本實施 例中1利用微細銑削(micr〇_miUing)之方法對該透光之光固化材 60進行切削。微細銑削方法係採用直徑在〇 lmm和2mm之間之 ，刀在超精密機床上對該光固化材料60進行切削，加工精度非常 尚。該成型面602為内凹之球面或非球面。在本實施例中， 型面602為内凹之非球面。 ” 相較於先前技術，首先，本發明之模仁1〇〇之製作方法採用 6 201032981 :光固化材料60填充於破璃基板 接觸面積較小，厚雜均自。其 ^ G t ’由於與破璃之 中，與成型树接觸之大部分面仁=在塵印過程 不易變形，使縣㈣雜確度3朗基板，其㈣強度較高 利申述以專利之要件，遂依法提出專 申請專利範圍。舉凡熟悉本案技藝之人士ίίχ 内把精相作之較修飾或變化，皆應涵蓋於町申請專利3[Embodiment] The embodiments of the present invention will be further described in detail in conjunction with the accompanying drawings. "Month Referring to Figure 1' is a flow chart of a method of manufacturing a mold core in an embodiment of the present invention. The method comprises the steps of: providing a glass substrate transparent to ultraviolet light; forming a photoresist layer on the surface of the glass substrate; exposing and developing the photoresist layer to form a plurality of predetermined rows of via holes in the photoresist layer Etching the surface of the glass substrate corresponding to the plurality of through holes, thereby forming a plurality of corresponding grooves on the surface of the glass substrate; filling each of the grooves with a photocurable material; removing the photoresist layer and maintaining the groove not provided The surface of the glass substrate is exposed; the photocurable material of each groove is cured; the photocurable material in each groove is processed by an ultra-precision processing machine, and a molding surface is formed on the surface of the photocurable material of the mother groove. Thereby, a mold having a plurality of molding faces is obtained. The method for manufacturing the mold core in the embodiment of the present invention will be described in detail below with reference to Figs. 2 to 7 . Referring to FIG. 2, a glass substrate 3 is first provided. The glass substrate 30 is permeable to 5 201032981. • ultraviolet light, preferably _ rate is greater than, in the embodiment, the glass cup is cut 1=3⁄4 surface=glass substrate 30 Having two opposite tables "the - = with = layer = two = = = a mask with a enamel pattern (not shown) for the photoresist layer 40, the unexposed 贞 photoresist, thereby The first resist layer 40 forms a plurality of through holes 402 of a predetermined arrangement. - 矣Ξ 2 is the first of the glass substrates 30 corresponding to the plurality of through holes 4 〇 2 = 5 Γ the first surface 302 of the glass substrate 30 forms a plurality Referring to FIG. 5, the remaining photoresist layer 40 is removed. The photocurable material is filled in a liquid or molten state in each of the grooves 5叮. The first surface of the glass substrate 30 is not provided with the recess 5〇. The 302 exposed photoresist layer may also be removed after the step of filling the photocurable material 6〇, curing the photocurable material 6〇 in each of the grooves 5〇. The light polymethyl methacrylate methyl vinegar (ρ〇ι ^_副1—, =Α), polypyrrolate (P〇lyCarb〇nate, Pc) or polyethylene terephthalate (PolythyleneTerep) Hthalate, PET)., please refer to 7, ultra-precision machining machine for each groove 50 of light-cured material, 6 〇 processing 'in each groove 5 〇 light-curing material 6 〇 surface formed a 垔The surface 602 is obtained to obtain a mold core having a plurality of molding faces 6〇2. In the present embodiment, the light-transmitting photocurable material 60 is cut by micromilling (micror〇_miUing). Fine milling The method adopts a diameter between 〇lmm and 2mm, and the knife cuts the photocurable material 60 on an ultra-precision machine tool, and the processing precision is very good. The molding surface 602 is a concave spherical surface or an aspheric surface. In this embodiment The profile 602 is a concave aspherical surface. ” Compared with the prior art, firstly, the method for manufacturing the mold core of the present invention adopts 6 201032981: the photocurable material 60 is filled on the glass substrate with a small contact area. Thick and mixed. Because of the contact with the molding tree, most of the noodles in the contact with the molded tree are not easily deformed during the dust-printing process, so that the county (four) miscellaneous degree 3 lang substrate, and (4) the higher the strength of the claim, the patent requirements, 遂Propose the scope of special patent application according to law. Anyone who is familiar with the skill of the case ίίχ should be more than a modification or change in the fine-grained
【圖式簡單說明】 圖1係本發明實施例提供之模仁之製造方法之流程圖。 圖2至圖7係本發明實施例提供之模仁之製造方法之過程示 【主要元件符號說明】 玻璃基板 30 第一表面 302 第—面 304 光阻層 40 通孔 402 凹槽 50 光固化材料 60 成型面 602 模仁 100BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flow chart showing a method of manufacturing a mold core according to an embodiment of the present invention. 2 to FIG. 7 are diagrams showing a process of manufacturing a mold core according to an embodiment of the present invention. [Main component symbol description] Glass substrate 30 First surface 302 First surface 304 Photoresist layer 40 Via hole 402 Groove 50 Light curing material 60 Molding surface 602 Mould 100