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TW201030459A - Photosensitive resin composition - Google Patents

Photosensitive resin composition Download PDF

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Publication number
TW201030459A
TW201030459A TW098139813A TW98139813A TW201030459A TW 201030459 A TW201030459 A TW 201030459A TW 098139813 A TW098139813 A TW 098139813A TW 98139813 A TW98139813 A TW 98139813A TW 201030459 A TW201030459 A TW 201030459A
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TW
Taiwan
Prior art keywords
resin composition
photosensitive resin
group
acid
acrylate
Prior art date
Application number
TW098139813A
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Chinese (zh)
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TWI476514B (en
Inventor
Isao Tateno
Masaru Shida
Mitsuru Kondo
Dai Shiota
Original Assignee
Tokyo Ohka Kogyo Co Ltd
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Publication of TW201030459A publication Critical patent/TW201030459A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0046Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055Radiation sensitive composition or product or process of making
    • Y10S430/106Binder containing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)

Abstract

The present invention provides a photosensitive resin composition which possesses an outstanding coating and an outstanding ink repulsive characteristic. The photosensitive resin composition of the present invention contains: photopolymerization compound (A), photopolymerization initiator (B), and fluorine surfactant (C), in which the fluorine surfactant (C) has fluorinated alkenyl group and solvent-philic group on a side chain thereof. As the fluorine surfactant (C), polymer of mass average molecular weight of 5000 - 30000 is preferred; as the fluorinated alkenyl, perfluorinated alkenyl is preferred.

Description

201030459 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種感光性樹脂組成物。 【先前技術】 液晶顯示器等顯示體係形成為以下結構:在相互對向 而形成有成對電極的2片基板間夾入液晶層。並且,在一 ❿片基板之内側形成具有包括紅色(R)、綠色(〇)、藍色 等各色之像素區域的彩色濾光片。該彩色濾光片通常為了 提高對比度及防止漏光等,而形成配置成矩陣狀之黑色矩 陣,以劃分R、G、B各色之像素區域。 以往,彩色濾光片係如下製造:先藉由微影法形成黑 色矩陣,將尺、〇、6各色的每一感光性樹脂組成物反覆塗 佈、曝光、顯影在藉由該黑色矩陣所劃分之各區域中藉 此將各色圖案形成於規定的位置。近年來,為了提升生產 性’而亦探討著以喷墨方式來製造彩色據光片之方法。此 喷墨方式’是將R、G、b各色之墨汁自喷墨嘴喷出至藉由 已形成的黑色矩陣所劃分之各區域中,然後利用熱或光使 所蓄積之墨汁硬化,藉此而製造出彩色遽光片。 然而,於該噴墨方式中,為防止鄰接之像素區域間之 墨汁發生/¾色等,而要求用於形成黑色矩陣之感光性樹脂 組成物,具有對水或二甲苯等墨汁溶劑之抗溶劑性,即所 謂之斥墨性。 3 201030459 此種具有斥墨性之感光性樹脂組成物,例如揭示有一 種含有斥墨劑之負型感光性樹脂組成物(專利文獻〇,該 斥墨劑係由具有以下聚合單元之聚合物所形成,即,具有: 氮原子中之至少1個經氟原子取代的碳數為2〇以下之烷基 (其中’上述烷基包括具有醚性氧原子者)的聚合單元、 以及具有乙烯性雙鍵之聚合單元。該負型感光性樹脂組成 物由斥墨劑之氟化烷基而獲得斥墨性。又,因為斥墨劑含 〇有具有乙烯性雙鍵之聚合單元,因此可利用光照射而硬 化’且斥墨性得到維持。 [專利文獻1]國際公開第2004/042474號小冊子 【發明内容】 [發明所欲解決之問題] 然而,專利文獻1所記載之負型感光性樹脂組成物雖 • 然具有優異的斥墨性,但塗佈性則有問題。本發明者等人 為了提升塗佈性,而思及添加被認為能有效提升塗佈性的 界面活性劑。於是,在開發一種將斥墨劑取代為含全氟烷 基之氟系界面活性劑的感光性樹脂組成物時瞭解到,塗佈 性雖然提升’但斥墨性則有問題。 本發明係鑒於以上課題而完成者,目的在於提供一種 感光性樹脂組成物,其兼具有優異的塗佈性與優異的斥墨 性。 4 201030459 [解決問題之技術手段] 本發明人發現,可藉由使用具有特定結構之敗系界面 活性劑而解決上述課題’從而完成本發明。具體而言,本 發明提供如下之物。 本發明係一種感光性樹脂組成物,其係含有:光聚合 性化合物⑷、光聚合起始劑⑻、以及氣系界面活性劑 (c)之感光性樹脂組成物,其中該氟系界面活性劑(c) • 於侧鏈具有氟化烯基與親溶劑性基。 [功效] 本發明之感光性樹脂組成物,係兼具優異的塗佈性與 優異的斥墨性。因此,適合使用於形成例如以彩色濾光片 之黑色矩陣為代表的框架(格子狀結構物)。 【實施方式】 [實施發明的較佳形態] 以下針對本發明之實施形態進行說明。 本發明之感光性樹脂組成物,係含有:光聚合性化合 物(A )、光聚合起始劑(B )、以及氟系界面活性劑(c )。 以下分別針對各成分進行說明。 [光聚合性化合物(A)] 光聚合性化合物(A )係受到紫外線等光之照射而聚 合、硬化之物質》光聚合性化合物(A)較佳為具有乙烯性 不飽和基之樹脂或者單體,更佳為將該等進行組合。藉由 201030459 將具有乙烯性不飽和基之樹脂與具有乙稀性不飽和基之單 體進行組合,可提高硬化性,容易形成圖案。再者,本說 明書中,在具有乙稀性不飽和基之化合物令,將質量平均 分子量為1000以上者稱為「具有乙烯性不飽和基之樹 脂」,將質量平均分子量小於1000者稱為「具有乙稀性不 飽和基之單截J » 《具有乙稀性不飽和基之樹脂》 Φ 作為具有乙烯性不飽和基之樹脂,可列舉:(甲基)丙 稀酸、反丁稀二酸、順丁稀二酸、反丁稀二酸單曱酯反 丁烯二酸單乙酯、(甲基)丙烯酸2-羥乙酯、乙二醇單甲醚(甲 基)丙烯酸酯、乙二醇單乙醚(甲基)丙烯酸酯、(甲基)丙烯 酸甘油酯、(甲基)丙烯醯胺、丙烯腈、甲基丙烯腈、(▼基) 丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸異丁酯、(甲 基)丙稀酸2 -乙基己醋、(甲基)丙稀酸苄醋、乙二醇二(甲基) 丙烯酸酯、二乙二醇二丙烯酸酯、三乙二醇二(甲基)丙稀 ❿ 酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二甲基丙稀酸 酯、丙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙稀 酸酯、四經甲基丙炫四(甲基)丙稀酸酯、季戊四醇三(曱基) 丙稀酸酯、季戊四醇四(甲基)丙稀酸酯、二季戊四醇五(甲 基)丙烯酸酯、二季戊四醇六(曱基)丙烯酸酯、1,6-己二醇 二(甲基)丙烯酸酯、咔哚環氧二丙烯酸酯(cardo ep〇xy diacrylate)等進行聚合而獲得之寡聚物類;使(甲基)丙稀 酸與將多元醇類與一元酸或多元酸進行縮合而獲得之聚酯 預聚物進行反應而獲得之聚酯(曱基)丙烯酸酯、使多元醇 6 201030459 與具有2個異氰酸酯基之化合物反應後再與(甲基)丙缔竣 進行反應而獲得之聚(甲基)丙烯酸胺基曱酸酯;使雙紛a 型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹腸、苯 酚或者甲酚酚醛清漆型環氧樹脂、可溶酚醛型環氧樹脂 (resol epoxy resin)、三苯酚甲烷型環氧樹脂、聚羧酸聚縮 水甘油酯、多元醇聚縮水甘油酯、脂肪族或者脂環式環氧 樹脂、胺環氧樹脂、二羥基苯型環氧樹脂等環氧樹脂與(甲 φ基)丙烯酸反應而獲得之環氧(甲基)丙烯酸酯樹脂等。此 外’可使用使多元酸酐與環氧(曱基)丙烯酸酯樹脂反應而 獲得之樹脂。 又,具有乙烯性不飽和基之樹脂可較好地使用:藉由 使環氧化合物(al)與含乙烯性不飽和基之羧酸化合物(a2) 的反應物,進一步與多元酸酐(a3)反應而獲得之樹脂。 〈環氧化合物(al)&gt; 作為環氧化合物(al ),可列舉:縮水甘油醚型、縮水 ®甘油酯型、縮水甘油胺型、脂環型、雙酚A型、雙酚F型、 雙酚S型、聯苯型、萘型、第型、苯酚酚醛清漆型、鄰甲 齡型環氡樹脂等。其中,較佳為聯苯型環氧樹脂。聯苯型 環氧樹知係於主鏈上具有i個以上之以下述式(“。表 示的聯苯骨架’並且具有1個以上之環氧基。又,作為環 氧化〇物(al)’較佳為具有2個以上之環氧基者。該環氧 化口物(al)可單獨使用或者將2種以上組合而使用。 [化學式1] 201030459201030459 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a photosensitive resin composition. [Prior Art] A display system such as a liquid crystal display has a structure in which a liquid crystal layer is sandwiched between two substrates in which a pair of electrodes are formed to face each other. Further, a color filter having pixel regions of respective colors of red (R), green (〇), and blue is formed on the inside of the gusset substrate. In order to improve contrast and prevent light leakage, the color filter is usually formed in a matrix of black matrices to divide pixel regions of R, G, and B colors. Conventionally, a color filter is manufactured by first forming a black matrix by a lithography method, and repeatedly coating, exposing, and developing each photosensitive resin composition of each of a ruler, a cymbal, and a sixth color by the black matrix. In each of the regions, the respective color patterns are formed at predetermined positions. In recent years, in order to improve productivity, a method of manufacturing a color light film by an ink jet method has also been explored. In this inkjet method, inks of respective colors of R, G, and b are ejected from the ink ejecting nozzles into respective regions divided by the formed black matrix, and then the accumulated ink is hardened by heat or light. A color calender is produced. However, in the ink jet method, in order to prevent ink generation between adjacent pixel regions, a photosensitive resin composition for forming a black matrix is required, and an anti-solvent for an ink solvent such as water or xylene is required. Sex, the so-called repellency. 3 201030459 Such a photosensitive resin composition having ink repellency, for example, a negative photosensitive resin composition containing an ink repellent agent is disclosed (Patent Document 〇, the ink repellent agent is a polymer having the following polymerization unit) Forming, that is, having at least one of a nitrogen atom substituted with a fluorine atom and having an alkyl group having 2 or less carbon atoms (wherein the above alkyl group includes an etheric oxygen atom), and having an ethylenic double The polymerization unit of the bond. The negative photosensitive resin composition is obtained by the fluorinated alkyl group of the ink repellent to obtain ink repellency. Further, since the ink repellent contains a polymer unit having an ethylenic double bond, light can be utilized. In the case of the invention, the problem of the ink repellent is maintained. [Patent Document 1] International Publication No. 2004/042474 [Problems to be Solved by the Invention] However, the composition of the negative photosensitive resin described in Patent Document 1 Though the ink repellency is excellent, the coating property is problematic. The present inventors have thought of adding a surfactant which is considered to be effective in improving coatability in order to improve coatability. In the development of a photosensitive resin composition in which an ink repellent is substituted with a perfluoroalkyl group-containing fluorine-based surfactant, it has been found that although the coating property is improved, the ink repellent property is problematic. The present invention is based on the above problems. The object of the present invention is to provide a photosensitive resin composition which has excellent coatability and excellent ink repellency. 4 201030459 [Technical means for solving the problem] The inventors have found that it can be specified by using The present invention provides the following, and the present invention provides a photosensitive resin composition containing a photopolymerizable compound (4) and photopolymerization. a photosensitive resin composition of the initiator (8) and the gas-based surfactant (c), wherein the fluorine-based surfactant (c) has a fluorinated alkenyl group and a solvophilic group in the side chain. The photosensitive resin composition of the invention has excellent coatability and excellent ink repellency. Therefore, it is suitably used for forming a frame represented by a black matrix such as a color filter (grid). [Embodiment] [Best Mode for Carrying Out the Invention] Hereinafter, an embodiment of the present invention will be described. The photosensitive resin composition of the present invention contains a photopolymerizable compound (A) and a photopolymerization initiation. The agent (B) and the fluorine-based surfactant (c) are described below. [Photopolymerizable compound (A)] The photopolymerizable compound (A) is polymerized and hardened by irradiation with light such as ultraviolet rays. The material "polymerizable compound (A) is preferably a resin or a monomer having an ethylenically unsaturated group, more preferably such a combination. The resin having an ethylenically unsaturated group and having ethylene by 201030459 When the monomers of the unsaturated group are combined, the curability is improved and the pattern is easily formed. Further, in the present specification, in the case of a compound having an ethylenically unsaturated group, a mass average molecular weight of 1,000 or more is referred to as "having "Ethylene-unsaturated resin", the mass average molecular weight of less than 1000 is called "single-band with ethylenically unsaturated group" » "Resin with ethylenically unsaturated group" Φ As the resin having an ethylenically unsaturated group, (meth)acrylic acid, transbutanic acid, cis-butane diacid, and anti-butyric acid monodecyl fumarate monoethyl ester , 2-hydroxyethyl (meth)acrylate, ethylene glycol monomethyl ether (meth) acrylate, ethylene glycol monoethyl ether (meth) acrylate, glyceryl (meth) acrylate, (meth) propylene Indoleamine, acrylonitrile, methacrylonitrile, (▼-) methyl acrylate, ethyl (meth)acrylate, isobutyl (meth)acrylate, 2-ethylhexyl acrylate (Methyl) benzyl acrylate, ethylene glycol di(meth) acrylate, diethylene glycol diacrylate, triethylene glycol di(methyl) propylene phthalate, tetraethylene glycol bis ( Methyl) acrylate, butanediol dimethyl acrylate, propylene glycol di(meth) acrylate, trimethylolpropane tri(methyl) acrylate, tetramethyl methacrylate Acetate, pentaerythritol tris(fluorenyl) acrylate, pentaerythritol tetrakis (meth) acrylate, dipentaerythritol penta (methyl) Oligomerization obtained by polymerization of acrylate, dipentaerythritol hexa(meth) acrylate, 1,6-hexanediol di(meth) acrylate, cardo ep〇xy diacrylate, etc. a polyester (mercapto) acrylate obtained by reacting (meth)acrylic acid with a polyester prepolymer obtained by condensing a polyol with a monobasic acid or a polybasic acid, and a polyol 6 201030459 Poly(meth)acrylic acid amide phthalate obtained by reacting with a compound having two isocyanate groups and then reacting with (meth) propyl hydrazine; making a double-type epoxy resin, bisphenol F type Epoxy resin, bisphenol S type epoxy tree sausage, phenol or cresol novolac type epoxy resin, resol epoxy resin, trisphenol methane epoxy resin, polycarboxylic acid polycondensation water Epoxy resin obtained by reacting an epoxy resin such as glyceride, polyol polyglycidyl ester, aliphatic or alicyclic epoxy resin, amine epoxy resin or dihydroxybenzene type epoxy resin with (meth)acrylic acid ( Methyl) acrylate resin or the like. Further, a resin obtained by reacting a polybasic acid anhydride with an epoxy (fluorenyl) acrylate resin can be used. Further, a resin having an ethylenically unsaturated group can be preferably used by further reacting an epoxy compound (al) with a carboxylic acid compound (a2) containing an ethylenically unsaturated group, and a polybasic acid anhydride (a3). The resin obtained by the reaction. <Epoxy compound (al)&gt; Examples of the epoxy compound (al) include a glycidyl ether type, a shrinkage glyceride type, a glycidylamine type, an alicyclic type, a bisphenol A type, and a bisphenol F type. Bisphenol S type, biphenyl type, naphthalene type, first type, phenol novolak type, ortho-type ring-type resin. Among them, a biphenyl type epoxy resin is preferred. The biphenyl type epoxy tree is known to have i or more of the following formulas (the biphenyl skeleton represented by "." and has one or more epoxy groups in the main chain. Also, as an epoxidized anthracene (al)' It is preferred to have two or more epoxy groups. The epoxidized opening (al) may be used singly or in combination of two or more. [Chemical Formula 1] 201030459

式(al-〇中,多個Ru分別獨立表示氫原子、碳數為 1〜U之烷基、卤原子、或可具有取代基之苯基,1表示ι 〜4之整數。In the formula (al-〇, a plurality of Ru independently represent a hydrogen atom, an alkyl group having 1 to U carbon atoms, a halogen atom, or a phenyl group which may have a substituent, and 1 represents an integer of 1 to 4.

;聯本型環氧樹腊争,較佳為使用以下述式(Η·。) 表不:環氧樹脂,特佳為使用以下述式(al 3)表示之環 =脂°藉由使用&lt; (al_3)之環氧樹脂,可獲得良好地The conjugated epoxy tree wax is preferably used in the following formula (Η·.). No: epoxy resin, particularly preferably used in the ring represented by the following formula (al 3) = fat ° by using &lt;; (al_3) epoxy resin, well obtained

了靈敏度及溶解性,並且像素邊緣(edge)之清晰 sharP ) &amp;、密著性優異之感光性樹脂組成物。 [化學式2]Sensitivity and solubility, and clear pixel edge (sharP) &amp; photosensitive resin composition excellent in adhesion. [Chemical Formula 2]

式(al-2)、(al-3)中,多個 R2a 刀別獨表示氫原子、 饮聚為1〜12之烷基、自原子 界于或可具有取代基之苯基, 表示 4之整數》q為平均值,In the formulas (al-2) and (al-3), a plurality of R2a knives independently represent a hydrogen atom, an alkyl group having a concentration of 1 to 12, a phenyl group which may or may have a substituent, and a The integer "q" is the average value.

P 於1 表示0〜10之數,較佳為 8 201030459 又,於聯苯型環氧樹脂中,較佳者亦為使用以下述式 (al-4)表示之環氧樹脂。藉由使用式(al 4)之環氧樹脂, 可獲得良好地平衡了靈敏度及溶解性,並且像素邊緣之清 晰性、密著性優異之感光性樹脂組成物。 [化學式3]P is 1 in the range of 0 to 10, preferably 8 201030459. Further, in the biphenyl type epoxy resin, an epoxy resin represented by the following formula (al-4) is preferably used. By using the epoxy resin of the formula (al 4), it is possible to obtain a photosensitive resin composition which is excellent in balance between sensitivity and solubility, and which is excellent in clarity and adhesion of the edge of the pixel. [Chemical Formula 3]

(a 1—4) 式(al-4)中,多個分別獨立表示氫原子、碳數為 1〜12之烷基、鹵原子、或可具有取代基之苯基。^為平均 值,表示0〜10之數’較佳為小於1。 〈含乙烯性不飽和基之羧酸化合物(a2)〉 • 作 為含乙烯性不飽和基之叛酸化合物(a2),較佳為在 分子中含有丙烯基或甲基丙稀基等反應性乙稀性雙鍵之單 綾酸化合物。作為此種含乙烯性不飽和基之羧酸化合物, 可列舉:丙烯酸、曱基丙烯酸、笨乙烯基丙烯酸冷- 糠基丙烯酸、氰基肉桂酸、肉桂酸等。該含乙烯性不飽 和基之羧酸化合物(a2)可單獨使用或者將2種以上組合 而使用。 作為使環氧化合物(al)與含乙烯性不飽和基之羧酸 化合物(a2 )反應之方法’可使用公知之方法。例如可列 9 201030459 舉以下方法:以三乙胺、苄基乙胺等三級胺;氣化十二燒 基三甲基銨、氣化四甲基銨、氣化四乙基銨、氣化节基三 乙基銨等四級銨鹽;》比啶、三苯基膦等為觸媒,在有機溶 劑中’於50C〜150C之反應溫度,使環氧化合物(ai) 與含乙稀性不飽和基之羧酸化合物(a2)反應數小時〜數 十小時。 環氧化合物(al)與含乙烯性不飽和基之羧酸化合物 ❿(a2 )的反應中之使用量比率,以環氧化合物(al )之環 氧當量與含乙稀性不飽和基之缓酸化合⑯(a2)的羧酸當 量之比計’通常為US&quot;〗,較佳為1:〇8〜1:125, 更佳為1…藉由設為上述範園’而有提高交聯效率之傾 向,故較佳。 〈多元酸酐(a3)〉 二讀酐(a3)係具有2個以上羧基之羧酸的酸酐 有至少、2個苯環之化合物。作為此種多元酸g C a3 ) ’例如可列舉:如 骨架之酸肝、如下述式r式(a3_1)所表示的具㈣ 機A而鍵# 〇 a3·2)所表示的2個苯環經由^ 機基而鍵結之酸奸。 [化學式4] 10 201030459(a 1-4) In the formula (al-4), a plurality of phenyl groups each independently represent a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a halogen atom, or a substituent. ^ is an average value, and the number of 0 to 10' is preferably less than 1. <The carboxylic acid compound (a2) containing an ethylenically unsaturated group> • As the acid-reducing compound (a2) containing an ethylenically unsaturated group, it is preferable to contain a reactive group such as a propenyl group or a methyl propyl group in the molecule. A mono-decanoic acid compound having a dilute double bond. Examples of such an ethylenically unsaturated group-containing carboxylic acid compound include acrylic acid, mercaptoacrylic acid, stupid vinyl acrylate cold-mercaptoacrylic acid, cyanocinnamic acid, and cinnamic acid. The carboxylic acid compound (a2) containing the ethylenically unsaturated group may be used singly or in combination of two or more. As a method of reacting the epoxy compound (al) with the ethylenically unsaturated group-containing carboxylic acid compound (a2), a known method can be used. For example, it can be listed as 9 201030459 by the following methods: tertiary amine such as triethylamine or benzylethylamine; gasification of tridecyltrimethylammonium, vaporized tetramethylammonium, vaporized tetraethylammonium, gasification a quaternary ammonium salt such as a triethylammonium group; a catalyst such as a pyridine or a triphenylphosphine, and a reaction temperature of 50 C to 150 C in an organic solvent to make the epoxy compound (ai) and ethylene-containing The unsaturated carboxylic acid compound (a2) is reacted for several hours to several tens of hours. The ratio of the use ratio of the epoxy compound (al) to the carboxylic acid compound ruthenium (a2) containing an ethylenically unsaturated group, and the epoxy equivalent of the epoxy compound (al) and the ethylidene-unsaturated group The ratio of the carboxylic acid equivalent of the acid compound 16 (a2) is usually US&quot;, preferably 1: 〇8 to 1:125, more preferably 1...the crosslinking is improved by setting it as the above-mentioned Fanyuan' The tendency of efficiency is better. <Polyure acid anhydride (a3)> The second-reading anhydride (a3) is an acid anhydride having two or more carboxyl groups and a compound having at least two benzene rings. Examples of the polybasic acid g C a3 ) ' include, for example, a fatty acid such as a skeleton, and two benzene rings represented by the formula (a) and the bond # 〇a3·2) represented by the following formula (a3_1). Smuggled by the base of the machine. [Chemical Formula 4] 10 201030459

式(a3-2)中,R4a表示碳數為的可具有取代基 之伸烧基。 藉由使用上述具有2個以上綾基之羧酸的酸酐,可在 光聚合性化合物(A)中導入至少2個苯環。 又’多元酸酐(a3)除了上述具有至少2個苯環之酸 軒以外’可包括其他多元酸酐。作為其他多元酸酐,例如 可列舉:順丁稀二酸肝、丁二酸肝、亞曱基丁二酸酐、鄰 % 苯二甲酸酐、四氳鄰苯二甲酸酐、六氫鄰苯二曱酸酐、甲 基六氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、偏苯三甲 酸酐、均苯四曱酸酐、二笨甲酮四曱酸二酐、3 -曱基六氫 鄰笨二甲酸酐、4-曱基六氫鄰苯二甲酸酐、3-乙基六氫鄰 笨二甲酸酐、4-乙基六氫鄰苯二甲酸酐、四氫鄰苯二甲酸 酐、3-曱基四氫鄰苯二甲酸酐、4-甲基四氫鄰苯二甲酸酐、 乙基四氫鄰苯二甲酸酐、4-乙基四氫鄰苯二甲酸酐。該 等多元酸酐可單獨使用或者將2種以上組合而使用。 作為使環氧化合物(al)與含乙烯性不飽和基之叛酸 11 201030459 化合物(a2)反應後’進一步與多元酸酐(a3)反應之方 法’可使用公知之方法。又,使用量比率,以環氧化合物 (al)與含乙烯性不飽和基之缓酸化合物(a2)的反應物 中之OH基之莫耳數、與多元酸肝(a3)之酸肝基的當量 比計,通常為1 : 1〜1 : 〇.1,較佳為! : 0 8〜i : 〇 2。藉 由設為上述範圍,而有對顯影液之溶解性變得適度之傾 向,故較佳。 _ 藉由使環氧化合物(al)與含乙烯性不飽和基之羧酸 化合物(a2)的反應物進一步與多元酸酐(a3)反應而獲 得之樹脂的酸價,以樹脂固體成分計,較佳為l〇mgK〇H/g 〜150 mgKOH/g ’ 更佳為 70 mgKOH/g〜110 mgKOH/g。藉 由將樹脂之酸價設為1 〇 mgK〇H/g以上,可獲得對顯影液 之充分溶解性’又,藉由設為15〇 mgKOH/g以下,可獲得 充分之硬化性,並且可使表面性良好。 又’樹脂之質量平均分子量較佳為1〇〇〇〜4〇〇〇〇,更 •佳為2000〜30000。藉由將質量平均分子量設為1000以 上,可提高耐熱性、膜強度,又,藉由設為4〇〇〇〇以下, 可獲得對顯影液之充分溶解性。 又,作為具有乙烯性不飽和基之樹脂,可較好地使用 在分子内具有咔哚結構之樹脂。具有咔哚結構之樹脂的耐 熱性及耐化學藥品性高,因此可藉由用於光聚合性化合物 (A )而提高感光性樹脂組成物之耐.熱性及耐化學藥品性。 例如,可較好地使用以下述式(a4 l)表示之樹脂。 [化學式5] 12 201030459In the formula (a3-2), R4a represents a stretchable group having a carbon number which may have a substituent. At least two benzene rings can be introduced into the photopolymerizable compound (A) by using the acid anhydride of the carboxylic acid having two or more mercapto groups. Further, the polybasic acid anhydride (a3) may include other polybasic acid anhydrides in addition to the above-mentioned acid having at least two benzene rings. Examples of the other polybasic acid anhydride include: cis-butanic acid liver, succinic acid liver, sulfhydryl succinic anhydride, o-% phthalic anhydride, tetraphthalic phthalic anhydride, and hexahydrophthalic anhydride. , methyl hexahydrophthalic anhydride, methyl tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, dimercapto ketone tetraphthalic acid dianhydride, 3-mercaptohexahydrogen Dicarboxylic anhydride, 4-mercaptohexahydrophthalic anhydride, 3-ethylhexahydrophthalic anhydride, 4-ethylhexahydrophthalic anhydride, tetrahydrophthalic anhydride, 3- Mercaptotetrahydrophthalic anhydride, 4-methyltetrahydrophthalic anhydride, ethyltetrahydrophthalic anhydride, 4-ethyltetrahydrophthalic anhydride. These polybasic acid anhydrides may be used singly or in combination of two or more. As the method of reacting the epoxy compound (al) with the ethylenically unsaturated group-containing tick acid 11 201030459 compound (a2) and further reacting with the polybasic acid anhydride (a3), a known method can be used. Further, the amount ratio of use, the molar number of OH groups in the reaction product of the epoxy compound (al) and the ethylenically unsaturated group-containing acid-suppressing compound (a2), and the acid liver group of the polyacid liver (a3) The equivalent ratio is usually 1: 1~1 : 〇.1, preferably! : 0 8~i : 〇 2. It is preferable to set it as the above range and to have a moderate tendency to dissolve the developer. _ The acid value of the resin obtained by further reacting the reactant of the epoxy compound (al) with the ethylenically unsaturated group-containing carboxylic acid compound (a2) with the polybasic acid anhydride (a3), based on the resin solid content Preferably, it is l〇mgK〇H/g~150 mgKOH/g′ more preferably 70 mgKOH/g~110 mgKOH/g. By setting the acid value of the resin to 1 〇mgK〇H/g or more, sufficient solubility in the developer can be obtained, and by setting it to 15 〇 mgKOH/g or less, sufficient hardenability can be obtained, and Make the surface good. Further, the mass average molecular weight of the resin is preferably from 1 Torr to 4 Torr, and more preferably from 2,000 to 30,000. By setting the mass average molecular weight to 1000 or more, heat resistance and film strength can be improved, and by setting it to 4 Torr or less, sufficient solubility in the developer can be obtained. Further, as the resin having an ethylenically unsaturated group, a resin having a fluorene structure in a molecule can be preferably used. Since the resin having a ruthenium structure has high heat resistance and chemical resistance, the photopolymerizable compound (A) can be used to improve the heat resistance and chemical resistance of the photosensitive resin composition. For example, a resin represented by the following formula (a4 l) can be preferably used. [Chemical Formula 5] 12 201030459

' COOH' COOH

II

HOOC— Y- CO — 〇--x —〇— CO— Z— CO— 0-—X—0—CO— Y-COOHHOOC— Y- CO — 〇--x —〇—CO— Z—CO— 0——X—0—CO— Y-COOH

II

COOH _ J 8 (a4-1) 式(a4- 1 )中,X係以下述式(a4-2 )表示之基。 [化學式6]COOH _ J 8 (a4-1) In the formula (a4-1), X is a group represented by the following formula (a4-2). [Chemical Formula 6]

又,式(a4-1 )中,Y係自順丁烯二酸酐、丁二酸酐、 亞甲基丁二酸酐、鄰苯二曱酸酐、四氫鄰苯二曱酸酐、六 氫鄰苯二甲酸酐、甲基内亞甲基四氫鄰苯二甲酸酐、氯橋 酸酐、曱基四氫鄰苯二甲酸酐、戊二酸酐等二羧酸酐中除 去羧酸酐基(-CO-0-CO-)而得之殘基。 又,式(a4-l)中,Z係自均苯四甲酸酐、二苯曱酮四 甲酸二酐、聯苯四甲酸二酐、聯苯醚四甲酸二酐等四羧酸 二酐中除去2個羧酸酐基而得之殘基。 又,式(a4-l )中,s為0〜20之整數。 《具有乙烯性不飽和基之單體》 具有乙烯性不飽和基之單體中,有單官能單體以及多 13 201030459 官能單體。 作為單官能單體’可列舉:(曱基)丙烯醯胺、羥甲基(甲 基)丙烯醮胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲 基)丙烯醯胺、丙氧基曱基(甲基)丙烯醯胺、丁氧基甲氧基 甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲 基(曱基)丙烯醯胺、(甲基)丙烯酸、反丁烯二酸、順丁烯二 酸、順丁烯二酸酐、亞甲基丁二酸、亞甲基丁二酸酐、甲 ❸基順丁稀二酸、甲基順丁婦二酸酐、丁稀酸、2-丙稀醯胺 -2-甲基丙磺酸、第三丁基丙烯酿胺磺酸、(甲基)丙烯酸甲 醋、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(曱基)丙烯酸 2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2_羥乙 醋、(甲基)丙稀酸2-經丙酯、(甲基)丙稀酸2_經丁醋、(曱 基)丙缔酸2-苯氧基-2-經丙醋、鄰苯二甲酸2_(甲基)丙婦醯 氧基-2-羥丙酯、單(甲基)丙烯酸甘油酯、(甲基)丙烯酸四 氫糠酿、(甲基)丙烯酸二甲胺酯、(甲基)丙烯酸縮水甘油 參酯、(甲基)丙烯酸2,2,2·三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、鄰苯二甲酸衍生物之(甲基)丙烯酸半酯等β該 等單官能單體可單獨使用或者將2種以上組合而使用。 另一方面’作為多官能單體,可列舉:乙二醇二(甲基) 丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基) 丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(^基) 丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(罕基) 丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三 (甲基)丙烯酸酯、二(甲基)丙烯酸甘油酯、季戊四醇三丙烯 201030459 酸酯、季戊四醇四丙烯酸酯、二季戌四醇五丙烯酸酯、二 季戊四醇六丙烯酸醋、季戊四醇二(▼基)丙烯酸酯、季戊 四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烤酸酯、二季 戊四醇五(甲基)丙烯酸酯、二季戊四醇六(曱基)丙烯酸酯、 2,2-雙(4-(甲基)丙烯醯氧基二乙氧基笨基)丙烷、2,2-雙 (4-(甲基)丙稀醯氧基聚乙氧基苯基)丙貌、(甲基)丙埽酸2-羥基-3-(甲基)丙烯酿氧基丙酯、乙二醇二縮水甘油醚二(曱 φ 基)丙稀酸酯、二乙二醇二縮水甘油醚二(甲基)丙稀酸酯、 鄰苯二甲酸二縮水甘油酯二(曱基)丙烯酸酯、三丙烯酸甘 油酯、甘油聚縮水甘油醚聚(甲基)丙烯酸酯、(甲基)丙烯酸 胺基甲酸酯(即’甲苯二異氰酸酯)、三甲基六亞曱基二異 氰酸酯及六亞曱基二異氰酸酯等與(曱基)丙烯酸2-羥乙酯 的反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲 醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等多官能 單體、或三丙烯基縮甲醛等β該等多官能單體可單獨使用 Φ 或者將2種以上組合而使用。 相對於感光性樹脂組成物之固體成分,該具有乙烯性 不飽和基之單體的含量較佳為5〜5〇質量%,更佳為〗〇〜 40質量%之範圍。藉由設為上述範圍’而有容易取得靈敏 度、顯影性、解析性之平衡的傾向,故較佳。 相對於感光性樹脂組成物之固體成分,光聚合性化合 物(Α)之含量較佳為5〜50質量%,更佳為1〇〜4〇質量% 之範圍。藉由設為上述範圍,而有容易取得靈敏度、顯影 性、解析性之平衡的傾向,故較好。 15 201030459 [光聚合起始劑(B)] 作為光聚合起始劑(B) ’可列舉:丨_羥基環己基苯基 酮、2-羥基-2-甲基-卜苯基丙烷-1-酮、1-[4-(2-羥乙氧基)苯 基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基 -2-甲基丙烧-1-嗣、1-(4 -十二烧基苯基)-2-經基-2-甲基丙炫 -1-酮、2,2-二曱氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲胺基 苯基)嗣、2-甲基-1-[4-(甲硫基)苯基]-2-嗎琳基丙院-1 _綱 ^ (2-methyl -1 - [4-(methy lthio)phenyl]-2-morpholino propane-1-one)、2-苄基-2-二甲胺基-1-(4-嗎你基苯基)·丁烧 -1-酮、乙酮-1·[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑基·3_ 基]-1-(鄰乙醯朋)、2,4,6 -三曱基苯曱醢基二苯基氧化鱗、 4-苯曱醯基-4·-曱基二甲硫醚、4-二曱胺基苯曱酸、4-二甲 胺基苯曱酸甲酯、4-二甲胺基苯甲酸乙酯、4-二曱胺基笨 曱酸丁酯、4-二甲胺基-2-乙基己基苯甲酸、4-二甲胺基_2_ 異戊基苯甲酸、苄基-Ρ-曱氧基乙基縮醛、苄基二甲基縮 # 酮、1-苯基-1,2-丙二酮-2-(鄰乙氧基羰基)肟、鄰苯甲醯基 苯甲酸甲酯、2,4-二乙基噻噸酮、2-氣噻噸酮、2,4-二甲基 噻噸酮、1-氣-4-丙氧基噻噸酮、噻噸、2-氯噻噸、2,4-二乙 基噻噸、2-曱基噻噸、2-異丙基噻噸、2-乙基蒽醗、八甲基 蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、過 氧化苯甲醯、過氧化異丙苯、2-酼基苯并咪唑、2-巯基笨 并噁唑(2-mercaptobenzoxazole)、2-酼基苯并噻唑、2·(鄰氣 苯基)-4,5-二(間甲氧基苯基)_咪唑基二聚物、二苯曱酮、2_ 氣二苯曱酮、^卩匕雙二甲胺基二苯甲酮、4,4匕雙二乙胺基 201030459 二苯甲酮、4,4'-二氣二苯甲酮、3,3_二甲基_4·甲氧基二苯 甲酮、苯偶酿、安息香、安息香甲醚、安息香乙醚、安息 香異丙醚、安息香正丁醚、安息香異丁醚、安息香丁醚、 苯乙嗣、2,2-二乙氧基苯乙鲷、對二甲基苯乙酮對二甲胺 基苯丙酮、二氣笨乙鲷、三氣苯乙酮、對第三丁基苯乙酮、 對二甲胺基苯乙酮、對第三丁基三氣苯乙酮、對第三丁基 二氣苯乙酮、α,α_二氣_4_苯氧基笨乙酮、噻噸_、2甲 •基噻噸酮、2-異丙基噻噸鲷、二苯并環庚酮、4·二甲胺基 苯曱酸戊酯、9-苯基吖啶、17_雙_(9_吖啶基)庚烷、15雙 -(9-吖啶基)戊烷、1,3-雙_(9_吖啶基)丙烷、對曱氧基三嗪 (p-methoxytdazine)、2,4,6_三(三氣甲基)均三嗪、2甲基 -4,6-雙(三氯甲基)_均三嗪、2[2_(5甲基呋喃_2基)乙烯 基M,6-雙(三氣甲基)_均三嗪、2_[2(咬喃_2基)乙烯 基]-4,6-雙(二氣甲基)_均三嗪、孓[2_(4二乙胺基_2甲基苯 基)乙烯基]-4,6-雙(三氣甲基)_均三嗪、2_[2(3,4二甲氧基 參苯基)乙稀基]-4,6_雙(三氣甲基)均三嗪、Μ#甲氧基苯 基)-4,6-雙(三氯甲基均三嗪、2㈠乙氧基苯乙烯基)4,6· 雙(二氣甲基)-均三》秦、2_(4_正丁氧基苯基)_4,6雙(三氣〒 基均三嗪、2,4-雙-三氯f基·6_(3溴·4_甲氧基)苯基_均三 秦2’4-雙-二氣甲基-6-(2-溴-4-甲氧基)苯基-均三嗪、2,4-雙-三氣甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基_均三嗪、2,4-雙-三氣甲基-6-(2-溴-4·〒氧基)苯乙烯基苯基-均三嗪等。 〃中就靈敏度方面而言,特佳為使用肟系光聚合起始劑。 該等光聚合起始劑可單獨使用或者將2種以上組合而使 201030459 用0 相對於感光性樹脂組成物之固體成分,光聚合起始劑 (B)之含量較佳為〇.5〜30質量。/。’更佳為質量0/〇 之範圍。藉由設為上述範圍,可獲得充分之耐熱性、耐化 學藥品性’又,可提高成膜性,並且可抑制光硬化不良。 [氟系界面活性劑(C )] φ 本發明之感光性樹脂組成物所含有的氟系界面活性劑 (C )’係於側鏈具有氟化烯基與親溶劑性基之聚合物。 氟系界面活性劑(C)藉由含有氟化烯基,而能相較於 含有氟化烷基者具有較高的斥液性。 氟化烷基的碳數以2〜20為佳,較佳為碳數6〜10之 氟化烯基(包含反式體及順式體)。具體而言,可舉出:全 氟-2-己稀-2-基、全1-2-庚稀-2-基、全氟-(2-,3-,或4-) 辛烯-2-基、全氟-(2-,3-,或4-)壬烯-2-基、全氟-(2-,3-, _ 或4-)癸烯-2-基、全氟-2-乙基-1-丁烯-1-基、全氟-4-甲基 -3-異丙基-2-戊稀-2-基、全氟(2-異丙基-1,3-二甲基-1-丁 烯基)基、全氟(1-乙基-2-甲基•卜丙烯基)基、全氟-2-甲基-2-戊烯-3-基等。 此等之中,較佳為支鏈狀者。藉由為支鏈狀,而可提 升斥液性。進而,關於氟化之比例,係以彿基中之氫原子 的25%以上經氟原子取代者為佳,較佳為50°/。以上經氟原 子取代者,特佳為全部氫原子經氟原子取代的全氟烯基。 此種氟化烯基之中,特佳為以下述(cl-Ι)或(cl-2) 201030459 表示者。 [化學式7]Further, in the formula (a4-1), Y is derived from maleic anhydride, succinic anhydride, methylene succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic acid Removal of a carboxylic acid anhydride group (-CO-0-CO-) in a dicarboxylic anhydride such as an acid anhydride, methyl endomethylenetetrahydrophthalic anhydride, chloro-bromic anhydride, mercaptotetrahydrophthalic anhydride or glutaric anhydride ) the resulting residue. Further, in the formula (a4-1), the Z system is removed from tetracarboxylic dianhydride such as pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride or diphenyl ether tetracarboxylic dianhydride. Residues obtained from two carboxylic anhydride groups. Further, in the formula (a4-1), s is an integer of 0 to 20. "Monomer having an ethylenically unsaturated group" Among the monomers having an ethylenically unsaturated group, there are a monofunctional monomer and a polyfunctional monomer of 201030459. The monofunctional monomer 'is exemplified by (mercapto) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (methyl) Acrylamide, propoxymercapto (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-hydroxyl Base (mercapto) acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, methylene succinic acid, methylene succinic anhydride, methyl sulfhydryl Succinic acid, methyl cis-butanic acid, butyric acid, 2-acrylamido-2-methylpropanesulfonic acid, tert-butylacrylamide, methyl methacrylate , ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-hydroxyethyl ketone (meth)acrylate, Methyl) acrylate 2- propyl ester, (meth) acrylic acid 2 _ butyl vinegar, (mercapto) propionic acid 2-phenoxy-2- propyl vinegar, phthalic acid 2 _ ( Methyl) propyl methoxy-2-hydroxypropyl ester, single (meth)acrylic acid glyceride, tetrahydroanthracene (meth)acrylate, dimethylamine (meth)acrylate, glycidyl (meth)acrylate, (meth)acrylic acid 2,2,2·3 Fluorine ethyl ester, 2,2,3,3-tetrafluoropropyl (meth)acrylate, (meth)acrylic acid half-ester of phthalic acid derivative, etc., such monofunctional monomers may be used alone or 2 Use in combination of the above. On the other hand, 'as a polyfunctional monomer, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, propylene glycol II (Meth) acrylate, polypropylene glycol di(meth) acrylate, butanediol di(meth) acrylate, neopentyl glycol bis(hanyl) acrylate, 1,6-hexanediol di(a) Acrylate, trimethylolpropane tri(meth)acrylate, di(meth)acrylic acid glyceride, pentaerythritol tripropylene 201030459 acid ester, pentaerythritol tetraacrylate, diquaternic pentaerythritol pentaacrylate, dipentaerythritol Acrylic vinegar, pentaerythritol di(▼) acrylate, pentaerythritol tri(meth) acrylate, pentaerythritol tetra(methyl) propyl acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa(indenyl) acrylate Ester, 2,2-bis(4-(methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl)propyl decyloxypolyethoxyphenyl ) propylene, (methyl)propionic acid 2-hydroxy-3-(methyl) Alkyloxypropyl acrylate, ethylene glycol diglycidyl ether bis(曱φ) acrylate, diethylene glycol diglycidyl ether di(meth) acrylate, phthalic acid diglycidyl Ester di(mercapto) acrylate, glyceryl triacrylate, glycerol polyglycidyl ether poly(meth) acrylate, (meth) acrylate urethane (ie 'toluene diisocyanate), trimethyl hexa a reaction product of mercapto diisocyanate and hexamethylene diisocyanate with 2-hydroxyethyl (meth) acrylate, methylene bis(meth) acrylamide, (meth) acrylamide, methylene ether, A polyfunctional monomer such as a condensate of a polyhydric alcohol and N-methylol (meth) acrylamide, or a polyfunctional monomer such as tripropylene acetal may be used Φ alone or in combination of two or more. . The content of the monomer having an ethylenically unsaturated group is preferably from 5 to 5 % by mass, more preferably from 〇 to 40% by mass, based on the solid content of the photosensitive resin composition. By setting it as the said range, it is easy to acquire the balance of sensitivity, developability, and analytical property, and it is preferable. The content of the photopolymerizable compound (Α) is preferably from 5 to 50% by mass, more preferably from 1 to 4% by mass, based on the solid content of the photosensitive resin composition. By setting it as the said range, it is easy to acquire the balance of sensitivity, developability, and an analytical property, and it is preferable. 15 201030459 [Photopolymerization initiator (B)] As a photopolymerization initiator (B) ', 丨-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-phenyl phenylpropane-1- Ketone, 1-[4-(2-hydroxyethoxy)phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2- Hydroxy-2-methylpropan-1-yl, 1-(4-didecylphenyl)-2-yl-2-methylpropan-1-one, 2,2-dimethoxy -1,2-diphenylethane-1-one, bis(4-dimethylaminophenyl)anthracene, 2-methyl-1-[4-(methylthio)phenyl]-2-? 2-methyl -1 - [4-(methy lthio)phenyl]-2-morpholino propane-1-one), 2-benzyl-2-dimethylamino-1- (4-?-ylphenyl)·butan-1-one, ethyl ketone-1·[9-ethyl-6-(2-methylbenzhydryl)-9H-carbazolyl-3-yl] -1-(o-Ethyl), 2,4,6-trimercaptobenzoyldiphenyl oxide scale, 4-phenylhydrazin-4·-mercaptodimethyl sulfide, 4-dioxene Aminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-diaminoamine butyl citrate, 4-dimethylamino-2- Ethylhexylbenzoic acid, 4-dimethylamino 2-episopentyl bromide Acid, benzyl-fluorenyl-methoxyethyl acetal, benzyl dimethyl ketal, 1-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl) fluorene, o-benzene Methyl mercaptobenzoate, 2,4-diethyl thioxanthone, 2-oxythioxanthone, 2,4-dimethylthioxanthone, 1-aluminum-4-propoxythioxanthone, Thiophene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-mercaptothioxanthene, 2-isopropylthioxanthene, 2-ethylhydrazine, octamethylguanidine, 1,2 -benzopyrene, 2,3-diphenylfluorene, azobisisobutyronitrile, benzammonium peroxide, cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole (2-mercaptobenzoxazole), 2-mercaptobenzothiazole, 2·(o-phenyl)-4,5-di(m-methoxyphenyl)-imidazolyl dimer, dibenzophenone, 2_gas Dibenzophenone, bis-dimethylaminobenzophenone, 4,4 bisdiethylamine 201030459 benzophenone, 4,4'-dibenzobenzophenone, 3,3_two Methyl-4 methoxybenzophenone, benzoin, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, phenelzine, 2 , 2-2-B Benzo acetophenone, p-dimethylacetophenone p-dimethylaminopropiophenone, dioxetane, tri-o-acetophenone, p-tert-butylacetophenone, p-dimethylaminoacetophenone, For t-butyl tri-o-acetophenone, p-tert-butyl diacetophenone, α,α_di- gas _4-phenoxy acetophenone, thioxanthene, 2-methyl thioxanthone, 2-isopropyl thioxanthene, dibenzocycloheptanone, amyl 4-dimethylaminobenzoate, 9-phenyl acridine, 17-bis-(9-acridinyl) heptane, 15 Bis-(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytdazine, 2,4,6_three (three gas Triazine, 2 methyl-4,6-bis(trichloromethyl)-s-triazine, 2[2_(5-methylfuran-2-yl)vinyl M,6-bis(trimethylmethyl) )_s-triazine, 2_[2(bate-2-yl)vinyl]-4,6-bis(dimethylmethyl)-s-triazine, hydrazine [2_(4 diethylamino-2-methylbenzene) Vinyl]-4,6-bis(trimethylmethyl)_s-triazine, 2_[2(3,4 dimethoxyphenyl)vinyl]-4,6_bis (three gases Methyl)-s-triazine, Μ#methoxyphenyl)-4,6-bis(trichloromethyls-triazine, 2(1)ethoxybenzene Alkenyl) 4,6·bis(dimethylmethyl)-homogeneous, Qin, 2_(4_n-butoxyphenyl)_4,6-bis (trioxanyl-triazine, 2,4-bis- Trichlorof-yl-6-(3bromo-4-yloxy)phenyl--tris-methyl 2'4-bis-dimethyl-6-(2-bromo-4-methoxy)phenyl- Triazine, 2,4-bis-trismethyl-6-(3-bromo-4-methoxy)styrylphenyl-s-triazine, 2,4-bis-trismethyl-6- (2-Bromo-4·decyloxy)styrylphenyl-s-triazine or the like. In terms of sensitivity, it is particularly preferable to use a lanthanide photopolymerization initiator. These photopolymerization initiators may be used singly or in combination of two or more, such that 201030459 is 0 with respect to the solid content of the photosensitive resin composition, and the photopolymerization initiator (B) is preferably 〇.5 to 30. quality. /. 'Better is the range of quality 0/〇. When it is in the above range, sufficient heat resistance and chemical resistance can be obtained, and film formability can be improved, and photohardening failure can be suppressed. [Fluorine-based surfactant (C)] φ The fluorine-based surfactant (C)' contained in the photosensitive resin composition of the present invention is a polymer having a fluorinated alkenyl group and a solvophilic group in a side chain. The fluorine-based surfactant (C) has a high liquid repellency as compared with a fluorinated alkyl group by containing a fluorinated alkenyl group. The fluorinated alkyl group preferably has 2 to 20 carbon atoms, preferably a fluorinated alkenyl group having 6 to 10 carbon atoms (including a trans form and a cis form). Specific examples thereof include perfluoro-2-hexyl-2-yl, all-1-2-hept-2-yl, perfluoro-(2-,3-, or 4-)octene-2 -based, perfluoro-(2-,3-, or 4-)nonen-2-yl, perfluoro-(2-,3-, _ or 4-)nonen-2-yl, perfluoro-2 -ethyl-1-buten-1-yl, perfluoro-4-methyl-3-isopropyl-2-pentan-2-yl, perfluoro(2-isopropyl-1,3-di Methyl-1-butenyl), perfluoro(1-ethyl-2-methylindolyl), perfluoro-2-methyl-2-penten-3-yl, and the like. Among these, it is preferably a branched one. By being branched, liquid repellency can be improved. Further, the ratio of the fluorination is preferably 25% or more of the hydrogen atom in the fluorocarbon, and is preferably replaced by a fluorine atom, preferably 50°/. The above substituted by a fluorine atom is particularly preferably a perfluoroalkenyl group in which all hydrogen atoms are replaced by a fluorine atom. Among such fluorinated alkenyl groups, it is particularly preferred to be represented by the following (cl-Ι) or (cl-2) 201030459. [Chemical Formula 7]

(C1-2)(C1-2)

作為此種句人 徑匕含氟化烯基的單艚, (Μ)表示的單…下又稱為「圭二以下述式 系界面活性劑體(C1)J)。藉由氟 聚合物,而可Γ有;b種具有單體(ci)作為重複單元的 J丹有向斥墨性。 [化學式8 ]As a single enthalpy of the fluorinated alkenyl group in this sentence, the singularity of (Μ) is also referred to as "the second type of surfactant (C1) J). By fluoropolymer, There may be b; a kind of J Dan directional ink repellency having a monomer (ci) as a repeating unit. [Chemical Formula 8]

RlC^V〇XR^Rf 〇 (C1-3) 式(Cl-3)中,Rlc表示氫原子或甲基,Rf表示上述的 烯基。R表示碳數為丨〜1〇的伸烷基,其可為直鏈狀 亦可為支鏈狀^ 作為親溶劑性基,雖可列舉以往公知的非離子系界面 活性劑’但以含有經醚鍵、酯鍵或羰基中斷之伸烷基者為 佳°其_,又以含有聚環氧烷基(p〇lyalkylene〇xy)(聚環氧 乙燒基、聚環氧丙烷基、聚環氧丁烷基)者為佳。 201030459 氟系界面活性劑(c)可至少藉由使上述具有氟化烯基 之單體與上述具有親溶劑性基之單體聚合而獲得。作為具 有親溶劑性基之單體,較佳為具有乙烯性不飽和基、以及 以下述式(c2-l)所示結構之單體(以下又稱為「單體 (c2)」)。 [化學式9] (C2-1) 此單體(c2),較佳為具有乙烯性不飽和基、以及以下 述式(C2-2)所示結構者。 [化學式10]RlC^V〇XR^Rf 〇 (C1-3) In the formula (Cl-3), Rlc represents a hydrogen atom or a methyl group, and Rf represents the above alkenyl group. R represents an alkylene group having a carbon number of 丨~1〇, which may be linear or branched. It may be a solvophilic group, and a conventionally known nonionic surfactant may be mentioned. An ether bond, an ester bond or a carbonyl interrupted alkyl group is preferred, and a polyepoxyalkylene group (p〇lyalkylene〇xy) (polyepoxyalkylene group, polypropylene oxide group, polycyclic ring) Oxybutylene) is preferred. 201030459 The fluorine-based surfactant (c) can be obtained at least by polymerizing the above monomer having a fluorinated alkenyl group and the above monomer having a solvophilic group. The monomer having a solvophilic group is preferably a monomer having an ethylenically unsaturated group and a structure represented by the following formula (c2-1) (hereinafter also referred to as "monomer (c2)"). (C2-1) The monomer (c2) preferably has an ethylenically unsaturated group and a structure represented by the following formula (C2-2). [Chemical Formula 10]

(C2-2)(C2-2)

可為支鏈狀。其中’較佳為碳數為卜3之烷基,最佳為甲 基。作為上述取代基,可以列舉羧基、羥基、碳數為丨〜: 60之整數, 之烧氧基等°x表不1以上之整數,較佳為 更佳為1〜12之整數。 作為此種單體(c2)’可列舉以下述式(c2_3)表示之 化合物等。該等單體(c2),可單獨使用或將 2種以上組合 201030459 而使用。 [化學式11] RSc 〇-L.R4c R3e CH2=C-C-〇It can be branched. Wherein ' is preferably an alkyl group having a carbon number of 3, most preferably a methyl group. Examples of the substituent include a carboxyl group, a hydroxyl group, and a carbon number of 丨 to 60: an alkyl group such as an alkoxy group, and an integer of 1 or more, more preferably an integer of 1 to 12. Examples of such a monomer (c2)' include a compound represented by the following formula (c2_3). These monomers (c2) may be used singly or in combination of two or more kinds of 201030459. [Chemical Formula 11] RSc 〇-L.R4c R3e CH2=C-C-〇

II ο (c2-3) 式(c2-3 )中,R5c表示氫原子或曱基。r3c、r4c、&gt; 之含義與上述式(c2-l)、(c2-2)相同β &quot; • &amp;系界面活性劑(C)中的氟化烯基與親溶劑性基之莫 耳比,亦即,上述具有敦化烯基之單體(cl)與上述具有 親溶劑性基之單體(c2)之莫耳比,以】:99〜5〇: 5〇為 佳,較佳為! : 99〜25: 75,最佳為5: 95〜25: 75。 該等之中’又以將上述式⑺_3)中Rf為全氟稀基之 單體(U)與上述單體(c2)聚合而獲得之氟系界面活性 劑為佳,作為其具體例示,可列舉:Ftergent 73〇fl (上述 ® 弋(cl-3 )中Rf為上述式(cl-1 )所示之丙烯酸單體:上 过·式(c2-3)中具有環氧乙烧基之丙稀酸單體=3: 97(莫 耳比))、Ftergent 710FL (上述式(cl_3)中Rf為上述式 (Cl 1)所示之丙稀酸單禮:上述式()中具有環氧乙 疋基之丙烯酸單體=9: 91(莫耳比))、Ftergent 703FL· (上 述式(cl-3)中Rf為上述式(cl-1)所示之丙烯酸單體: 上述式(C2-3 )中具有環氧乙烷基之丙烯酸單體(cl)二 :75 (莫耳比))(均為NEOS株式會社製造)等。 此氟系界面活性劑(C ),可以是無規聚合物、嵌段聚 21 201030459 合物、以及接枝聚合物中任一者,但以接枝聚合物為佳。 藉由設作接枝聚合物’可保持與光聚合性化合物(a)之相 溶性,同時可較為提高塗佈性。又,若為接枝聚合物的情 形中,即使含量增加,發生白濁之虞也會較少。 該氟系界面活性劑(c)之質量平均分子量,以5000 〜30000為佳,較佳為1〇〇〇〇〜2〇〇〇〇。又氟系界面活性 劑(c)之含量,以相對於光聚合性化合物(A)為ι〇〇〇 ❹〜20000質量ppm為佳,較佳為2〇〇〇〜8〇〇〇質量卯爪。即 便是上述範圍般的少許添加量,亦可獲得斥墨性優異的感 光性樹脂層。 另外’本發明之感光性樹脂組成物中,在無損於本發 明之功效的範圍内,可含有以往公知之其他界面活性劑。 [著色劑(D)] 本發明之感光性樹脂組成物,亦可含有著色劑。作為 ❹著色劑(D ),可列舉碳黑或鈦黑等遮光劑。又,亦可使用II ο (c2-3) In the formula (c2-3), R5c represents a hydrogen atom or a fluorenyl group. The meanings of r3c, r4c, &gt; are the same as those of the above formulae (c2-l) and (c2-2). β &quot; • &amp; is a fluorinated alkenyl group and a solvophilic group in the surfactant (C). Preferably, the molar ratio of the monomer having a Dunkenyl group (c) to the monomer having the solvophilic group (c2) is preferably 99 to 5: 5, preferably ! : 99~25: 75, best for 5: 95~25: 75. Among these, it is preferable to use a fluorine-based surfactant obtained by polymerizing a monomer (U) in which Rf is a perfluoro group in the above formula (7)-3) and the above monomer (c2), and as a specific example thereof, List: Ftergent 73〇fl (Rf in the above ® 弋(cl-3) is an acrylic monomer represented by the above formula (cl-1): C has an epoxy group in the formula (c2-3) Dilute acid monomer = 3: 97 (mole ratio), Ftergent 710FL (Rf in the above formula (cl_3) is an acrylic acid shown by the above formula (Cl 1): Ethylene B in the above formula () Acrylic monomer of fluorenyl group = 9: 91 (mole ratio), Ftergent 703FL (In the above formula (cl-3), Rf is an acrylic monomer represented by the above formula (cl-1): the above formula (C2- 3) an oxiranyl group-containing acrylic monomer (cl) 2: 75 (mole ratio) (both manufactured by NEOS Co., Ltd.). The fluorine-based surfactant (C) may be any of a random polymer, a block polymer 21 201030459, and a graft polymer, but a graft polymer is preferred. By providing the graft polymer ', the compatibility with the photopolymerizable compound (a) can be maintained, and the coatability can be improved. Further, in the case of a graft polymer, even if the content is increased, the occurrence of white turbidity is less. The fluorine-based surfactant (c) preferably has a mass average molecular weight of from 5,000 to 30,000, preferably from 1 to 2 Torr. The content of the fluorine-based surfactant (c) is preferably from ITO to 20,000 ppm by mass based on the photopolymerizable compound (A), preferably from 2 to 8 Å. . Even if it is added in a small amount as in the above range, a photosensitive resin layer excellent in ink repellency can be obtained. Further, the photosensitive resin composition of the present invention may contain other conventionally known surfactants within a range not impairing the effects of the present invention. [Colorant (D)] The photosensitive resin composition of the present invention may further contain a colorant. As the ruthenium colorant (D), a light-shielding agent such as carbon black or titanium black can be mentioned. Also, you can use

Cu、Fe、Mn、Cr、Co、Ni、V、Zn、Se、Mg、Ca、Sr、Cu, Fe, Mn, Cr, Co, Ni, V, Zn, Se, Mg, Ca, Sr,

Ba、Pd、Ag、Cd、In、Sn、Sb、Hg、Pb、Bi、Si 及 ai 等 各種金屬氧化物、複合氧化物、金屬硫化物、金屬硫酸鹽、 或者金屬碳酸鹽等無機顏料》 碳黑可使用槽黑、爐黑、熱碳黑、燈黑等公知之碳黑, 尤其槽黑因遮光性優異而可較好地使用。又’亦可使用經 樹脂包覆之碳黑。具體可列舉:將碳黑以及與存在於碳黑 表面之羧基、羥基、羰基具有反應性之樹脂混合,於50°c 22 201030459 〜38(TC進行加熱而獲得的經樹脂包覆之碳黑;或者將乙烯 性單體分散於水-有機溶劑混合系或者水界面活性劑混合 系中,於聚合起始劑之存在下進行自由基聚合或者自由基 共聚合而獲得的經樹脂包覆之碳黑等。與未經樹脂包覆之 碳黑相比,該經樹脂包覆之碳黑的導電性低,因此在用作 液晶顯示器等之彩色濾光片時,可形成漏電少、可靠性高 之低耗電顯示器。 φ 作為著色劑,可在上述無機顏料中添加有機顏料來作 為輔助顏料。有機顏料藉由適當選擇添加呈現無機顏料之 補色的有機顏料而獲得如下效果。例如,碳黑呈現略帶紅 色之黑色。因此,藉由在碳黑中添加呈現紅色之補色即藍 色的有機顏料來作為輔助顏料,可消除碳黑之紅色,從而 整體上呈現出更好之黑色。相對於無機顏料與有機顏料之 合計’有機顏料之使用量較佳為10〜80質量%之範圍,更 佳為20〜60質量%之範圍,特佳為20〜40質量%之範圍。 • 作為上述無機顏料及有機顏料,可使用利用分散劑以 適當濃度分散顏料而得之溶液。例如,作為無機顏料,可 列舉:御國色素公司製造之碳分散液CF Black (含有濃度 為20%之碳)、御國色素公司製造之碳分散液CF Black(含 24%之高電阻碳)、御國色素公司製造之鈦黑分散液CF Black (含20%之黑鈦顏料)。又,作為有機顏料,例如可 列舉:御國色素公司製造之藍色顏料分散液CF Blue (含有 20%之藍色顏料)、御國色素公司製造之紫色顏料分散液 (含有10%之紫色顏料)等。又,作為分散劑,較佳為使 23 201030459 用:聚乙烯亞胺系、胺基甲酸酯樹脂系、丙烯酸系樹脂系 高分子分散劑。 相對於感光性樹脂組成物之固體成分,著色劑(D)之 含量較佳為10〜70質量%。藉由將含量設為70質量%以 下,可抑制光硬化不良,又,藉由將含量設為10質量%以 上,可獲得充分之遮光性。又,在以後述方式使用本發明 之感光性樹脂組成物來成膜為黑色矩陣時,著色劑之濃度 參較佳為調整成每1 #ιη膜厚之OD ( Optical Density,光學 密度)值成為1.5以上。若每1 em膜厚之〇D值為ι5 以上’則用於液晶顯示器之黑色矩陣時,可獲得充分之對 比度。Inorganic pigments such as various metal oxides, composite oxides, metal sulfides, metal sulfates, or metal carbonates such as Ba, Pd, Ag, Cd, In, Sn, Sb, Hg, Pb, Bi, Si, and ai As the black, a known carbon black such as channel black, furnace black, hot carbon black, or lamp black can be used. In particular, the groove black can be preferably used because it has excellent light blocking properties. Further, a resin-coated carbon black can also be used. Specific examples thereof include: carbon black and a resin reactive with a carboxyl group, a hydroxyl group, or a carbonyl group present on the surface of the carbon black, and a resin-coated carbon black obtained by heating at 50 ° C 22 201030459 to 38 (TC; Or a resin-coated carbon black obtained by dispersing an ethylenic monomer in a water-organic solvent mixed system or a water surfactant mixed system in the presence of a polymerization initiator to carry out radical polymerization or radical copolymerization. Since the resin-coated carbon black has low conductivity as compared with the carbon black which is not coated with the resin, when used as a color filter such as a liquid crystal display, it is possible to form less leakage and high reliability. Low-power consumption display φ As a coloring agent, an organic pigment can be added to the above inorganic pigment as an auxiliary pigment. The organic pigment can be obtained by appropriately adding an organic pigment which exhibits a complementary color of an inorganic pigment to obtain the following effects. Reddish black. Therefore, by adding an organic pigment that exhibits a red complementary color, that is, a blue color, as an auxiliary pigment in carbon black, the red color of carbon black can be eliminated, thereby A better black color is present. The amount of the organic pigment used is preferably in the range of 10 to 80% by mass, more preferably in the range of 20 to 60% by mass, particularly preferably 20%, based on the total of the inorganic pigment and the organic pigment. In the range of 40% by mass, as the inorganic pigment and the organic pigment, a solution obtained by dispersing a pigment at a suitable concentration with a dispersing agent can be used. For example, as the inorganic pigment, a carbon dispersion CF Black manufactured by Yuki Co., Ltd. can be cited. (containing carbon with a concentration of 20%), carbon black CF Black (including 24% high-resistance carbon) manufactured by Yuki Co., Ltd., and titanium black dispersion CF Black (20% black titanium) manufactured by Yuki Co., Ltd. In addition, as the organic pigment, for example, a blue pigment dispersion CF Blue (containing 20% of a blue pigment) manufactured by Yuki Co., Ltd., and a purple pigment dispersion made by Yuki Co., Ltd. (containing 10%) Further, as the dispersing agent, 23 201030459 is preferably used: a polyethyleneimine type, a urethane resin type, or an acrylic resin type polymer dispersing agent. In the solid content of the composition, the content of the coloring agent (D) is preferably from 10 to 70% by mass. By setting the content to 70% by mass or less, photohardening failure can be suppressed, and the content is made 10% by mass. In the above, a sufficient light-shielding property can be obtained. When a photosensitive resin composition of the present invention is used as a black matrix, the concentration of the colorant is preferably adjusted to an OD per 1 #ιη film thickness. The (Optical Density, Optical Density) value is 1.5 or more. When the 〇D value of ι 5 or more per 1 em film thickness is used for the black matrix of the liquid crystal display, sufficient contrast can be obtained.

本發明之感光性樹脂組成物,較佳為含有 溶劑。作為該溶劑,例如可列舉:乙二醇單曱喊、乙一 單乙醚、乙二醇單正丙醚、乙二醇單正丁醚二乙二醇 甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇 正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單 喊、丙二醇單乙謎、丙二醇單正丙趟、丙二醇單正丁趟 二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚 二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚 (聚)烷二醇單烷基醚類;乙二醇單甲醚乙酸酯、乙二醇 乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙趟 酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等( 24 201030459 烷二醇單烷基醚乙酸酯類;二乙二醇二甲醚二乙二醇甲 基乙醚、二乙二醇二乙醚、四氫吱味等其他醚類;甲基乙 基酮、環己明、2-庚酮、3_庚酮等酮類;2羥基丙酸甲酯、 2-羥基丙酸乙酯等乳酸烷基酯類;2羥基·2甲基丙酸乙 酯、3-甲氧基丙酸甲酯、3·曱氧基丙酸乙酯、3乙氧基丙酸 甲醋、3~乙氧基丙酸乙_、乙氧基乙酸乙醋麵基乙酸乙 酯、2-羥基_3_甲基丁酸曱酯、乙酸3甲氧基丁酯、乙酸3_ #甲基_3_甲氡基丁酯、丙酸3·曱基-3-曱氧基丁酯、乙酸乙 酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、 甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸 正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸曱酯、丙酮酸 乙酯、丙酮酸正丙酯、乙酿乙酸甲酯、乙醯乙酸乙酯、2_ 氧代丁酸乙酯等其他酯類;甲苯、二甲苯等芳香族烴類; Ν-甲基》比洛燒網、ν,Ν-二曱基甲酿胺、ν,Ν-二甲基乙醢胺 等酿胺類等。該等溶劑可單獨使用或者將2種以上組合而 ❹使用。 相對於100質量份的感光性樹脂組成物之固體成分, 溶劑(S)之含量較佳為5〇〜5〇〇質量份。 [其他成分] 本發明之感光性樹脂組成物中,可視需要而含有添加 劑。作為添加劑,可列舉:熱聚合抑制劑、消泡劑、敏化 劑、硬化促進劑、光交聯劑、光敏劑、分散劑、分散助劑、 填充劑、密著促進劑、抗氧化劑、紫外線吸收劑、抗凝聚 25 201030459 劑等。 [感光性樹脂組成物之製備方法] 本發明之感光性樹脂組成物,可藉由將上述各成分全 部以攪拌機進行混合而獲得。再者’為了使所獲得之混合 物變得均勻,可使用過濾器進行過濾。 φ [本發明之感光性樹脂組成物之應用例] 如同上述’本發明之感光性樹脂組成物,因為兼具優 異的塗佈性與優異的斥墨性’而適合使用於形成例如以彩 色渡光片之黑色矩陣為代表的框架(格子狀結構物)。在 此’作為其中一個應用例’而於以下記載使用本發明之感 光性樹脂組成物的彩色濾光片之製造方法。 [彩色濾光片之製造方法] 首先’使用輥塗機(rollcoater)、反向塗佈機(reverse coater )、到棒塗佈機(bar coater )等接觸轉印型塗佈裝置, 或者旋轉器(spinner )(旋轉式塗佈裝置)、淋幕式平面塗 装機(curtain flow coater)等非接觸型塗佈裝置,將本發 明之感光性樹脂組成物塗佈於基板上。基板係使用具有透 光性之基板。 繼而,使所塗佈之感光性樹脂組成物乾燥而形成塗 膜。乾燥方法並無特別限定,例如可使用以下方法中之任 種方法:(1)利用加熱板(hot plate )於80°C〜120。(:、 26 201030459 較佳為於9(TC〜·c之溫度乾燥6Q〜i 2q秒之方 至恤放置數小時〜數曰之方法’(3)在溫風加熱器或紅 外線加熱器中放置數十分鐘〜數小時而除去溶劑之方法、。 繼而’經由負像光罩(negativemask),對該塗膜照射 昭外線、#分子雷射光等活性能量線而進行部分曝光。所 照射之能量纟量根據感光性樹脂組成物以且《而有所不 同’例如較佳為30〜2000 mJ/cm2左右。The photosensitive resin composition of the present invention preferably contains a solvent. Examples of the solvent include ethylene glycol monoterpene, ethyl monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether diethylene glycol methyl ether, diethylene glycol monoethyl ether, and diethyl ether. Glycol mono-n-propyl ether, diethylene glycol n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol single shout, propylene glycol mono-resonance, propylene glycol mono-n-propyl propene, propylene glycol mono-n-butyl bromide Propylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether (poly) alkanediol monoalkyl ether; ethylene glycol monomethyl Ether acetate, ethylene glycol ethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoacetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc. 24 201030459 Alkanediol monoalkyl ether acetates; diethylene glycol dimethyl ether diethylene glycol methyl ether, diethylene glycol diethyl ether, tetrahydro anthracene and other ethers; methyl ethyl ketone, a ketone such as cyclohexamine, 2-heptanone or 3-heptanone; an alkyl lactate such as methyl 2-hydroxypropionate or ethyl 2-hydroxypropionate; Ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3-ethoxypropionic acid Ethoxyacetate ethyl acetate ethyl acetate, 2-hydroxy-3-methylbutyrate decyl acetate, acetic acid 3 methoxybutyl ester, acetic acid 3_ #methyl_3_methylmercaptobutyl ester, propionic acid 3 · Mercapto-3-hydroxybutyl acrylate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate Ester, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, decyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate Other esters such as ethyl ester and ethyl 2-oxobutanoate; aromatic hydrocarbons such as toluene and xylene; Ν-methyl" piroxime, ν, Ν-dimercaptoamine, ν, Ν- The emulsifiable amines such as dimethylacetamide, etc., may be used singly or in combination of two or more kinds thereof. The content of the solvent (S) is relatively larger than 100 parts by mass of the solid content of the photosensitive resin composition. Good for 5〇~5〇〇 parts by mass. [Others In the photosensitive resin composition of the present invention, an additive may be contained as needed. Examples of the additive include a thermal polymerization inhibitor, an antifoaming agent, a sensitizer, a curing accelerator, a photocrosslinking agent, a photosensitizer, and a dispersion. Agent, dispersing aid, filler, adhesion promoter, antioxidant, ultraviolet absorber, anti-agglomeration 25 201030459, etc. [Preparation method of photosensitive resin composition] The photosensitive resin composition of the present invention can be used The above-mentioned components are all obtained by mixing with a stirrer. In order to make the obtained mixture uniform, it can be filtered using a filter. φ [Application example of the photosensitive resin composition of the present invention] The photosensitive resin composition of the invention is suitably used for forming a frame (lattice-like structure) represented by a black matrix of a color light-passing sheet, for example, because of excellent coating properties and excellent ink repellency. Here, as one of the application examples, a method of producing a color filter using the photosensitive resin composition of the present invention will be described below. [Manufacturing Method of Color Filter] First, a contact transfer type coating device such as a roll coater, a reverse coater, a bar coater, or the like, or a rotator A non-contact type coating device such as a spinner (rotary coating device) or a curtain flow coater is applied to the substrate on the photosensitive resin composition of the present invention. As the substrate, a substrate having light transmittance is used. Then, the applied photosensitive resin composition is dried to form a coating film. The drying method is not particularly limited. For example, any of the following methods can be used: (1) using a hot plate at 80 ° C to 120 °. (:, 26 201030459 is preferably a method of placing 9 hours to TC~·c at a temperature of 6Q~i 2q seconds to the shirt for several hours to several '' (3) in a warm air heater or an infrared heater A method of removing the solvent for several tens of minutes to several hours. Then, the coating film is irradiated with an active energy ray such as an ultraviolet ray or a molecular laser light through a negative mask to perform partial exposure. The amount is, for example, preferably about 30 to 2000 mJ/cm 2 depending on the photosensitive resin composition.

,繼而,利用顯影液對曝光後之膜進行顯影而形成所需 形狀之圖案。顯影方法並無特別限定,例如可使用浸潰法、 噴霧法等。作為顯影液,可列舉:單乙醇胺、。乙醇胺、 三乙醇胺等有機系顯影液,或者氫氧化鈉、氫氧化鉀、碳 酸鈉、氨、四級銨鹽等之水溶液。 繼而,於200艺左右之溫度對顯影後之圖案進行後烘 烤(post-bake )。此時’較佳為對所形成之圖案進行全面曝 光°藉由以上操作可形成具有規定圖案形狀之黑色矩陣。 繼而’將R、G、B各色墨汁自喷墨嘴喷出至由黑色矩 陣所劃分之各區域内,利用熱或光使所蓄積之墨汁硬化。 藉此可製造彩色濾光片。 [實施例] 以下’參照實施例而詳細地說明本發明。另外,本發 明並不受下述任一實施例所限定。 〈實施例1〉 光聚合性化合物(A )係使用下述樹脂(A-1 )、以及 27 201030459 作為單體(A-2)之二季戊四醇六丙烯酸酯(DPHA )。樹脂 (A-1)之合成方法係如下所述。 [樹脂(A-1 )之合成] 樹脂(A-1)之合成方法如下所述。 一面以25 ml/分鐘之速度吹入空氣,一面於90°C〜100 C對235 g之雙酚苐型環氧樹脂(環氧當量為235 )、110 mg 之氯化四甲基銨、1〇〇 mg之2,6-二-第三丁基-4-甲基苯酚、 參及72.0 g之丙烯酸進行加熱而使之溶解後,緩慢升溫至12〇 °C。其間,測定酸價,連續加熱攪拌約12小時直至酸價小 於1.0 mgKOH/g為止。繼而冷卻至室溫’獲得無色透明且 固體狀之雙酚第型環氧丙烯酸酯。 繼而’在307.0 g所獲得之上述雙酚苐型環氧丙烯酸酯 中加入3 50 g之丙二醇單曱醚乙酸酯(PGMEA)使其溶解 後,將80.5 g之二苯甲酮四曱酸二酐及1 g之溴化四乙基 銨進行混合,於110°C〜115°C反應4小時。確認酸酐基消 _ 失後,混合38.0 g之1,2,3,6-四氫鄰苯二甲酸酐,並於90 °C反應6小時而獲得樹脂(A-1 )。再者,酸酐基之消失係 藉由紅外(IR)光譜而確認。所獲得之樹脂(A-1 )以凝膠 滲透層析法(gel permeation chromatograph,GPC)而測定 之質量平均分子量為5000,酸價為80 mgKOH/g »該樹脂 (A-1 )係利用乙酸-3-甲氧基丁酯而調整成固體成分濃度 為55質量%。 光聚合起始劑(B)係使用CGI242( B-1,汽巴精化(Ciba Specialty Chemicals)公司製造)。 28 201030459 界面活性劑(C )係使用Ftergent 710FL ( C-l,(上述 式(cl-3)中Rf為上述式(dd)所示之丙烯酸單體:上 述式(c2-3)中具有環氧乙烷基之丙烯酸單體=9: 91 (莫 耳比),質量平均分子量為20000)。 著色劑(D )係使用黑色顏料(D-1,御國色素公司製 造’ CF Black :碳黑為25質量%,溶劑:乙酸3-甲氧基丁 酯) φ 溶劑(S )係使用3_曱氧基丁酯:環己酮=6〇 : 4〇 (質 量比)之混合溶劑(S-1 )。 調配上述各成分及溶劑而使全體之固形分濃度為22 質量% ’以攪拌機混合2小時後,以5私m膜濾器 (membrane fiiter)進行過濾’製備感光性樹脂組成物。各 成分及溶劑之調配量係如表1所示。 〈實施例2、3,比較例1、2〉 ❹ 變更為下述表1所述之組成而製備感光性樹脂組成 物。表1中的樹脂(A_3 )之合成方法,係如下所述。 [樹脂(A-3)之合成] 混合 400 g 之 EPIKOTE YX4000H( Japan Epoxy Resins 公司製造,環氧當量為192)、4g之三苯基膦、153g之丙 烯酸、600 g之3-甲氧基丁酯,並於90〜100。(:使其反應。 之後,作為多元酸酐而添加40 g之四氫鄰苯二甲酸酐及3 60 g之聯苯四甲酸二酐,進而使其反應,藉此獲得具有聯苯 骨架之樹脂(A-3 )。此樹脂(A-3 ),以GPC測定之質量平 29 201030459 均分子量為7000,酸價為90mgK〇H/ge另外此樹脂(A」) 係以3-曱氧基丁酯調整至固形分濃度為5〇質量%。 又,表1中之界面活性劑(c_2)係KL 6〇〇(共榮社 化學株式會社製造,具有含(甲基)丙歸酸全氣辛基乙醋 之聚合物的氟系界面活性劑),界面活性劑()係 BYK-310 (日本畢克化學有限公司製造,矽系界面活性 劑)0Then, the exposed film is developed with a developing solution to form a pattern of a desired shape. The development method is not particularly limited, and for example, a dipping method, a spray method, or the like can be used. As a developing solution, monoethanolamine is mentioned. An organic developing solution such as ethanolamine or triethanolamine, or an aqueous solution of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia or a quaternary ammonium salt. Then, the developed pattern was post-bake at a temperature of about 200 art. At this time, it is preferable to perform full exposure of the formed pattern. By the above operation, a black matrix having a predetermined pattern shape can be formed. Then, the inks of the respective colors of R, G, and B are ejected from the ink ejecting nozzles into the respective regions divided by the black matrix, and the accumulated ink is hardened by heat or light. Thereby, a color filter can be manufactured. [Examples] Hereinafter, the present invention will be described in detail with reference to examples. Further, the present invention is not limited by any of the following embodiments. <Example 1> The photopolymerizable compound (A) used the following resin (A-1) and 27 201030459 as the monomer (A-2) dipentaerythritol hexaacrylate (DPHA). The synthesis method of the resin (A-1) is as follows. [Synthesis of Resin (A-1)] The synthesis method of the resin (A-1) is as follows. Air was blown at a rate of 25 ml/min on one side at 90 ° C to 100 C to 235 g of bisphenol quinone type epoxy resin (epoxy equivalent of 235 ), 110 mg of tetramethylammonium chloride, 1 2 mg of 2,6-di-t-butyl-4-methylphenol and 72.0 g of acrylic acid were heated and dissolved, and then slowly heated to 12 ° C. Meanwhile, the acid value was measured, and heating and stirring were continued for about 12 hours until the acid value was less than 1.0 mgKOH/g. Then, it was cooled to room temperature to obtain a colorless transparent and solid bisphenol type epoxy acrylate. Then, after adding 3 50 g of propylene glycol monoterpene ether acetate (PGMEA) to the above-mentioned bisphenolphthalein type epoxy acrylate obtained at 307.0 g, 80.5 g of benzophenone tetradecanoic acid was dissolved. The anhydride and 1 g of tetraethylammonium bromide were mixed and reacted at 110 ° C to 115 ° C for 4 hours. After confirming the loss of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C for 6 hours to obtain a resin (A-1). Further, the disappearance of the acid anhydride group was confirmed by infrared (IR) spectroscopy. The obtained resin (A-1) was measured by gel permeation chromatograph (GPC) to have a mass average molecular weight of 5,000 and an acid value of 80 mgKOH/g. The resin (A-1) was acetic acid. -3-methoxybutyl ester was adjusted to have a solid content concentration of 55 mass%. As the photopolymerization initiator (B), CGI242 (B-1, manufactured by Ciba Specialty Chemicals Co., Ltd.) was used. 28 201030459 The surfactant (C) is Ftergent 710FL (Cl, (the above formula (cl-3) wherein Rf is an acrylic monomer represented by the above formula (dd): the above formula (c2-3) has epoxy B Alkyl acrylic monomer = 9: 91 (mole ratio), mass average molecular weight is 20000). Colorant (D) is made of black pigment (D-1, manufactured by Royal Color Co., Ltd. 'CF Black: carbon black is 25 % by mass, solvent: 3-methoxybutyl acetate) φ Solvent (S) is a mixed solvent of 3 曱 oxybutyl ester: cyclohexanone = 6 〇: 4 〇 (mass ratio) (S-1) The components and the solvent were mixed to have a solid content concentration of 22% by mass. The mixture was mixed for 2 hours with a stirrer, and then filtered by a membrane filter. The photosensitive resin composition was prepared. The blending amounts are shown in Table 1. <Examples 2 and 3, Comparative Examples 1 and 2> 感光 A photosensitive resin composition was prepared by changing the composition described in Table 1 below. The resin (A_3) in Table 1 The synthesis method is as follows: [Synthesis of Resin (A-3)] Mixing 400 g of EPIKOTE YX4000H (Japan Epoxy Resin) Manufactured by the company, epoxide equivalent: 192), 4 g of triphenylphosphine, 153 g of acrylic acid, 600 g of 3-methoxybutyl ester, and 90 to 100. (: The reaction is carried out. Thereafter, as a polybasic anhydride Further, 40 g of tetrahydrophthalic anhydride and 3 60 g of biphenyltetracarboxylic dianhydride were added to further react, thereby obtaining a resin (A-3) having a biphenyl skeleton. This resin (A-3) The mass measured by GPC was 29, 2010, and the average molecular weight was 7,000, and the acid value was 90 mg K 〇 H / ge. Further, the resin (A") was adjusted to a solid content concentration of 5 〇 mass% with 3-methoxy butyl acrylate. In addition, the surfactant (c_2) in Table 1 is KL 6〇〇 (manufactured by Kyoeisha Chemical Co., Ltd., a fluorine-based surfactant having a polymer containing (meth) acryl acid total octyl vinegar) ), surfactant () is BYK-310 (manufactured by BYK Chemical Co., Ltd., lanthanide surfactant)0

〈評價〉 2中所製備之感光性 ’於90°C乾燥2分鐘 繼而’經由負像光罩 將上述實施例1〜3、比較例1〜 樹脂組成物分別塗佈於玻璃基板上後 而獲得具有約2//m膜厚之感光層。 以200mJ/ cm2之曝光量對該感光層選擇性地照射紫外 線,使用N-a3K (東京應化工業公司製造):純水=i : 25 之溶液作為顯影液,於25。(:喷霧顯影60秒,藉此形成圓 案。然後,於220C對所形成之圖案實施3〇分鐘的後烘烤’ 藉此形成線寬為20 之格子狀黑色矩陣圖案。然後, 針對二乙二醇單丁醚乙酸酯(BDGAC )、二乙二醇單乙醚 乙酸酯(EDGAC)、1,3·丁 二醇二乙酸酯(i,3_bgda)、丙 二醇單甲醚(PM)及純水’對形成於圖案上之溶劑接觸角 進行測定。將結果表示於表1。 30 201030459 [表i] 成分 實施例1 實施例2 實施例3 比較例1 比較例2 樹脂 A-1 A-2 A-3 A-1 A-1 (添加量:質量%) (6) (12) (6) (6) (6) 單體 A-2 A-2 A-2 A-2 A-2 (添加量:質量%) (4) (7) (4) (4) (4) 光聚合起始劑 B-1 B-1 B-1 B-1 B-1 (添加量··質量%) (2) (3) (2) (2) (2) 界面活性劑 C-1 C-1 C-1 C-2 C-3 (添加量:質量ppm) (4000) (4000) (4000) (10000) (10000) 著色劑 D-1 無 D-1 D-1 D-1 (添加量:質量°/〇) (10) (〇) (10) (10) (10) 溶劑 S-1 S-1 S-1 S-1 S-1 (添加量:質量%) (78) (78) (78) (78) (78) 接觸角(度) BDGAC 54 53 54 34 31 EDGAC 53 53 54 34 30 1,3-BGDA 53 52 54 33 30 PM 45 44 46 28 27 純水 110 110 110 99 97 由表1可知,相較於使用含全氟烧基之界面活性劑(比 較例1 )或矽系界面活性劑(比較例2 )的情形,藉由使用 於側鏈具有氟化烯基與親溶劑性基之氟系界面活性劑(實 φ 施例1〜3 ),可獲得優異的斥液性。 【圖式簡單說明】 無 【主要元件符號說明】 無 31<Evaluation> The photosensitive property prepared in 2 was dried at 90 ° C for 2 minutes, and then the above Examples 1 to 3 and Comparative Example 1 to the resin composition were respectively applied onto a glass substrate via a negative image mask. A photosensitive layer having a film thickness of about 2/m. The photosensitive layer was selectively irradiated with ultraviolet light at an exposure amount of 200 mJ/cm2, and a solution of N-a3K (manufactured by Tokyo Ohka Kogyo Co., Ltd.): pure water = i: 25 was used as a developing solution at 25. (: spray development for 60 seconds, thereby forming a round case. Then, the formed pattern was subjected to post-baking for 3 minutes at 220 C to thereby form a lattice-like black matrix pattern having a line width of 20. Then, for two Ethylene glycol monobutyl ether acetate (BDGAC), diethylene glycol monoethyl ether acetate (EDGAC), 1,3, butanediol diacetate (i, 3_bgda), propylene glycol monomethyl ether (PM) And the pure water' was measured for the contact angle of the solvent formed on the pattern. The results are shown in Table 1. 30 201030459 [Table i] Ingredient Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Resin A-1 A -2 A-3 A-1 A-1 (addition amount: mass%) (6) (12) (6) (6) (6) Monomer A-2 A-2 A-2 A-2 A-2 (Addition amount: mass%) (4) (7) (4) (4) (4) Photopolymerization initiator B-1 B-1 B-1 B-1 B-1 (addition amount··% by mass) (2) (3) (2) (2) (2) Surfactant C-1 C-1 C-1 C-2 C-3 (addition: mass ppm) (4000) (4000) (4000) ( 10000) (10000) Colorant D-1 No D-1 D-1 D-1 (addition amount: mass ° / 〇) (10) (〇) (10) (10) (10) Solvent S-1 S- 1 S-1 S-1 S-1 (addition amount: mass%) (78) (78) (7 8) (78) (78) Contact angle (degrees) BDGAC 54 53 54 34 31 EDGAC 53 53 54 34 30 1,3-BGDA 53 52 54 33 30 PM 45 44 46 28 27 Pure water 110 110 110 99 97 1 It is understood that the fluorinated alkenyl group and the solvophilic property are used in the side chain by using a surfactant containing a perfluoroalkyl group (Comparative Example 1) or a fluorene-based surfactant (Comparative Example 2). Based on the fluorine-based surfactant (real φ Examples 1 to 3), excellent liquid repellency can be obtained. [Simple description of the diagram] No [Main component symbol description] No 31

Claims (1)

201030459 七、申請專利範圍: 1· 一種感光性樹脂組成物,其係含有:光聚合性化合物 (A)、光聚合起始劑(B)、以及氟系界面活性劑之 感光性樹脂組成物,其中 前述氣系界面活性劑(C )於側鏈具有氟化烯基與親溶 劑性基。 # 2·如申請專利範圍第1項所述之感光性樹脂組成物,其 中前述氟系界面活性劑(C)係質量平均分子量為5 000〜 30000之聚合物。 3. 如申請專利範圍第1項所述之感光性樹脂組成物,其 中前述氟化烯基係全氟烯基。 4* 如申請專利範圍第1項所述之感光性樹脂組成物,其 . 中前述氟化烯基係支鏈狀。 5. 如申請專利範圍第1項所述之感光性樹脂組成物’其 中前述氟化烯基係以下述式(cl-1)或(cl-2)表示。 [化學式1] 32 201030459201030459 VII. Patent application scope: 1. A photosensitive resin composition containing a photopolymerizable compound (A), a photopolymerization initiator (B), and a photosensitive resin composition of a fluorine-based surfactant, The gas phase surfactant (C) has a fluorinated alkenyl group and a solvophilic group in the side chain. The photosensitive resin composition according to the first aspect of the invention, wherein the fluorine-based surfactant (C) is a polymer having a mass average molecular weight of from 5,000 to 30,000. 3. The photosensitive resin composition according to claim 1, wherein the fluorinated alkenyl group is a perfluoroalkenyl group. 4* The photosensitive resin composition according to Item 1, wherein the fluorinated alkenyl group is branched. 5. The photosensitive resin composition as described in claim 1, wherein the fluorinated alkenyl group is represented by the following formula (cl-1) or (cl-2). [Chemical Formula 1] 32 201030459 6. 如申請專利範圍第1項所述之感光性樹脂組成物,其 • 中前述氟化烯基與前述親溶劑性基之莫耳比係1 : 99〜50 : 50 0 7. 如申請專利範圍第1項所述之感光性樹脂組成物,其 中前述氟系界面活性劑(C )的相對於前述光聚合性化合物 (A)之含量,為1000〜20000質量ppm。 8. 如申請專利範圍第1項所述之感光性樹脂組成物’其 ® 中進而含有著色劑(D)。 33 201030459 四、指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件符號簡單說明:無。 五、本案若有化學式時,請揭示最能顯示發明特徵的化學式:6. The photosensitive resin composition according to claim 1, wherein the molar ratio of the fluorinated alkenyl group to the solvophilic group is 1:99 to 50: 50 0 7. The photosensitive resin composition according to the above aspect, wherein the content of the fluorine-based surfactant (C) relative to the photopolymerizable compound (A) is from 1,000 to 20,000 ppm by mass. 8. The photosensitive resin composition described in the first aspect of the patent application, wherein the ® further contains a coloring agent (D). 33 201030459 IV. Designated representative map: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the representative figure: None. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention:
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