201039373 六、發明說明： 【發明所屬之技術領域】 本發明是關於適用於半導體或液晶等的製造工程的曝 光用光源或電影放映機的光源等的短弧型放電燈者’尤其 是關於在發光管內具有吸氫器的短弧型放電燈。 【先前技術】 0 作爲上述曝光用光源，使用著在發光管內封入水銀的 短弧型放電燈。該短弧型放電燈是發光管內的一對電極的 前端距離（電弧間隙）短而接近於點光源之故，因而與光 學系組合而適合作爲聚光效率高且曝光用途。又，封入氙 氣的短弧型放電燈是在電影放映機等的畫像投影裝置中使 用作爲可視光光源。 在此種短弧型放電燈中，眾知有在點燈時使得含有於 發光管的OH基擴散於該發光管內作爲H20。擴散於此發 Q 光管內的H20 ’是利用來自電弧的熱來自氧氣與氫氣，而 此氫氣對照度穩定度有不良影響。此照度穩定度是藉由電 弧搖動對於光學系的光的入射量或藉由入射角度分布使之 變化而產生’該照度穩定度的降低是在曝光裝置產生所謂 曝光不均勻的問題，而在畫像投影裝置成爲產生畫像閃爍 的問題。 然而’ 一方面，在放電燈中，眾知有爲了吸附被放出 於發光管內的氫氣體而設置吸氫器，作爲該吸氫器眾知將 吸附氫氣的吸氣材料封入於氫氣透過性的材料所成的密閉 201039373 中空容器內者。作爲此種吸氫器的一例子，有日本特開昭 50-80683 號。 在第8圖表示著其構造。在第8(a)圖中，一對電 極12，13相對配置於放電燈1〇的發光管n的內部，在 發光管內’吸氫器14藉由焊著安裝於發光管內壁。如第 8(b)圖所示地’該吸氫器14是由钽等的金屬所成的氫 氣透過性的密閉中空容器15，及吸附被封入於其內部的 氫氣體釔等的吸氣材料1 6所構成。 發光管Π內的氫氣體，是透過氫氣透過性的中空容 器15而侵入至其內部，藉由內部的吸氣材料16被吸附。 依照此技術，內部的吸氣材料16是被密封在中空容器15 內之故’因而不會與發光空間內的其他物質反應，而發揮 僅可吸附透過中空容器15的氫氣的效果。 然而，在此習知技術中，吸氫器14是被安裝於發光 管11的內壁的構造之故，因而使得該吸氫器14與發光管 11的構成成分的二氧化矽會反應，此爲導致照度降低， 結果有產生發光管的破裂之虞的問題。 專利文獻1 :日本特開昭50-80683號公報。 【發明內容】 本發明欲解決的課題，是在將吸附氫氣於氫氣透過性 的中空容器內的吸氣材料予以封入所成的吸氫器設於發光 管內的短弧型放電燈，提供藉由將上述吸氫器安裝於電極 軸，防止吸氫器與發光管反應下可吸附發光管內的氫氣， -6- 201039373 且將對於電極軸的安裝作成容易的短弧型放電燈者。 爲了解決上述課題，本發明的短弧型放電燈，是上述 吸氫器設置成捲繞於電極軸，而在相對於構成該吸氫器的 中空容器的上述電極軸的內側面形成有波形凹部，爲其特 徵者。 然而，本案發明人等先前爲了解決上述習知技術的缺 點，提案一種將氫氣透過性的中空容器與在此內部吸附氫 氣的吸氣材料所成的吸氫器安裝成捲繞於電極軸周圍的構 造。日本特願2009-04 8066號爲此提案。 在第5圖及第6圖表示其構造。在第5圖中，在短弧 型放電燈1的發光管10內，相對配置有一對電極2，3。 該電極2，3是分別由電極本體2A，3A與電極軸2B，3B 所構成。在圖示之例子中，一方的電極，有吸氫器4安裝 成捲繞於陰極2的電極軸2B。表示於第5圖的吸氫器4 是斷面圓形的中空容器者，惟如第6圖所示地爲斷面方形 狀的中空容器也可以。 如第7圖所示地，上述吸氫器4是由氫氣透過性的細 長中空容器5與吸附被封入於其內部的氫氣的吸氣材料6 所構成。又，中空容器5是藉由其兩端密封部5a，5b密 閉狀地被密封。另外，彎曲此直管狀吸氫器4而環狀或盤 管狀地彎曲加工，並將此安裝成捲繞於電極2的電極軸 2 B者。 依照此構造，將吸氫器安裝於電極軸者之故，因而防 止上述習知技術的缺點問題的吸氫器與發光管的反應，而 201039373 且發揮有效果地可吸附被放出在發光管內的氫 〇 然而，本發明是提供關於上述先前發明的 電極軸的安裝的改良者，更容易地進行該吸氫 工作業，而在加工時不會使中空容器壓壞或破 ，而具有上述構成者。 爲了將吸氫器安裝成捲繞於電極軸，必須 狀中空容器予以環狀或盤管狀地形成的彎曲加 發明中，在相對於吸氫器的中空容器的上述電 面形成有波狀凹部之故，因而在上述彎曲加工 空容器局部地折彎壓壞，或是有龜裂，而發揮 的彎曲加工作業的效果。 亦即，在直管狀中空容器的一面形成波狀 容器是必定會彎曲，最後不會產生壓壞或龜裂 狀或是盤管狀地成形的效果者。 【實施方式】 第1圖是表示本發明的短弧型放電燈的吸 (a)圖是其立體圖，第1(b)圖是其俯視圖 地，吸氫器4是由鉬等金屬所成的氫氣透過性 容器5，及吸附被封入在其內部的氫氣體的釔 料6所構成，上述中空容器5是斷面圓形形狀 狀地成形。在此例中，其兩端5a，5b是稍留 地隔著形狀地成形。 氣體的效果 吸氫器對於 器的彎曲加 損的構造者 進行將直管 工，惟在此 極軸的內表 時不會有中 可進行圓滑 凹部，中空 ，而發揮環 氫器/第1 。如圖所示 的密閉中空 等的吸氣材 ，全體爲環 間隙的程度 201039373 又，在相對於此中空容器5的電極軸2B的表面，亦 即內側面形成有波形凹部8，捲繞於電極軸2B的方式， 全體彎曲形成把此面作成內側。 第2圖是表示其他的實施例，第2(a)圖是立體圖 ，第2 ( b )圖是其俯視圖。 上述吸氫器4是捲繞一周以上電極軸的周圍的方式， 使得中空容器5的兩端5a，5b互相重疊地盤管狀地成形 也可以。這時候，如圖示地，盤管狀的重疊的程度是兩端 5a，5b爲重疊的程度也可以，又，捲繞一周以上電極軸 的周圍，重疊成幾層的盤管狀也可以。 又，吸氫器4的中空容器5的斷面形狀是並不被限定 於圓形而可採用任意的斷面形狀，在第3圖，其斷面形狀 爲表不方形者。 上述中空容器5內側面的波形凹部8是以各種方法可 形成，惟在第4圖表示其一例子。 如第4(a)圖所示地，在工模11的圓形狀內部空間 12內，可旋轉地設置在外周具有凸狀齒14的輪子13，而 直管狀吸氫器4是被插入於該工模11的開口 15。 如第4(b)圖所示地，吸氫器4是與旋轉的輪子13 的齒14嚙合的方式被拉進，藉由此齒14有波狀凹部8形 成於內表面之下，沿著內部空間12的壁面把全體彎曲著 〇 另外，如第4 ( c )圖所示地，最後全體爲環狀地彎 曲，而成形有波形凹部8形成於內表面的吸氫器4。 -9- 201039373 所成形的吸氫器4是在紙面朝垂直方向被取出。 又，如第2圖所示的盤管狀地成形時，工模11的內 部空間12內，吸氫器4是被移送至在紙面朝垂直方向稍 偏離，而彎曲成形成端部重疊者。 當然，吸氫器4的成形是並不被限定於此成形方法， 當然可採用各種成形方法。 如以上所述地，本發明的短弧型放電燈是在密閉中空 容器，及被封入於此的吸氣材料所構成的吸氫器內側面形 成波形凹部之故，因而在將此安裝於電極軸的方式彎曲形 狀地彎曲加工之際，不會有中空容器變形而壓壞，或是有 龜裂的情形，不會有內部的吸氣材料漏出，或是發光管內 的氣體直接侵入至中空容器內的情形。 【圖式簡單說明】 第1(a)圖及第1(b)圖是本發明的短弧型放電燈 的吸氫器的說明圖。 第2(a)圖及第2(b)圖是其他實施例的說明圖。 第3圖是另一實施例的說明圖。 第4(a)圖至第4(c)圖是本發明的吸氫器的彎曲 加工說明圖。 第5圖是先前申請專利的說明圖。 第6圖是先前申請專利的其他實施例。 第7 ( a )圖及第7 ( b )是先前申請專利的直管狀吸 氫器。 -10- 201039373 第8 ( a )圖及第8 ( b )是習知技術的說明圖。 【主要元件符號說明】 1 :短弧型放電燈 2，3 :電極 2 a，2 b :電極軸 4 :吸氫器 5 :中空容器 6 :吸氣材料 8 =波狀凹部 〇 -11 -[Technical Field] The present invention relates to a short arc type discharge lamp suitable for use in an exposure light source for a semiconductor or liquid crystal manufacturing process, or a light source of a film projector, etc. A short arc type discharge lamp with a hydrogen absorbing device inside. [Prior Art] 0 As the light source for exposure, a short arc type discharge lamp in which mercury is sealed in an arc tube is used. This short arc type discharge lamp is such that the front end distance (arc gap) of a pair of electrodes in the arc tube is short and close to the point source. Therefore, it is suitable for use as an illuminating efficiency and exposure for combination with an optical system. Further, the short arc type discharge lamp in which helium is enclosed is used as a visible light source in an image projection apparatus such as a movie projector. In such a short arc type discharge lamp, it is known that an OH group contained in an arc tube is diffused in the arc tube as H20 at the time of lighting. The H20' diffused in the Q-ray tube is derived from oxygen and hydrogen using heat from the arc, and this hydrogen has an adverse effect on the stability of the contrast. This illuminance stability is caused by the arc oscillating the amount of light incident on the optical system or by changing the incident angle distribution. The decrease in illuminance stability is a problem of so-called exposure unevenness in the exposure apparatus, and the image is The projection device has a problem of causing the image to flicker. However, on the one hand, in a discharge lamp, it is known to provide a hydrogen absorbing device for adsorbing hydrogen gas which is discharged into an arc tube, and as the hydrogen absorbing device, it is known that a getter material for adsorbing hydrogen gas is sealed in a hydrogen permeable property. The material is sealed in the hollow container of 201039373. As an example of such a hydrogen absorbing device, there is Japanese Patent Laid-Open No. 50-80683. The structure is shown in Fig. 8. In Fig. 8(a), a pair of electrodes 12, 13 are disposed opposite to the inside of the arc tube n of the discharge lamp 1A, and the hydrogen absorbing device 14 is attached to the inner wall of the arc tube by welding. As shown in Fig. 8(b), the hydrogen absorbing device 14 is a hydrogen-permeable sealed hollow container 15 made of a metal such as ruthenium, and a getter material that adsorbs hydrogen gas enthalpy or the like enclosed therein. 1 6 constitutes. The hydrogen gas in the arc tube is infiltrated into the inside through the hydrogen-permeable hollow container 15, and is adsorbed by the internal getter material 16. According to this technique, the inner gettering material 16 is sealed in the hollow container 15 and thus does not react with other substances in the light-emitting space, and exhibits an effect of adsorbing only hydrogen gas permeating through the hollow container 15. However, in this prior art, the hydrogen absorbing device 14 is configured to be mounted on the inner wall of the arc tube 11, so that the hydrogen absorbing device 14 reacts with the cerium oxide of the constituent component of the arc tube 11, which In order to cause a decrease in illuminance, there is a problem that rupture of the arc tube occurs. Patent Document 1: Japanese Laid-Open Patent Publication No. SHO-50-80683. SUMMARY OF THE INVENTION The problem to be solved by the present invention is to provide a short arc discharge lamp in which a hydrogen absorbing device for adsorbing hydrogen gas in a hydrogen-permeable hollow container is sealed in a light-emitting tube. By attaching the hydrogen absorbing device to the electrode shaft, the hydrogen absorbing device and the arc tube are prevented from reacting to absorb hydrogen gas in the illuminating tube, -6-201039373, and the electrode shaft is mounted as an easy short arc type discharge lamp. In order to solve the above problem, in the short arc type discharge lamp of the present invention, the hydrogen absorbing device is provided to be wound around an electrode shaft, and a wavy concave portion is formed on an inner surface of the electrode shaft of the hollow container constituting the hydrogen absorbing device. , for its characteristics. However, the inventors of the present invention have previously proposed to mount a hydrogen absorbing container made of a hydrogen permeable hollow container and a getter material for adsorbing hydrogen therein to be wound around the electrode shaft in order to solve the above-mentioned drawbacks of the prior art. structure. Japan’s special offer 2009-04 8066 is the proposal. The structure is shown in Figs. 5 and 6. In Fig. 5, a pair of electrodes 2, 3 are opposed to each other in the arc tube 10 of the short arc type discharge lamp 1. The electrodes 2, 3 are composed of electrode bodies 2A, 3A and electrode shafts 2B, 3B, respectively. In the illustrated example, one of the electrodes has a hydrogen absorbing device 4 mounted on the electrode shaft 2B wound around the cathode 2. The hydrogen absorbing device 4 shown in Fig. 5 is a hollow container having a circular cross section, but a hollow container having a square cross section as shown in Fig. 6 may be used. As shown in Fig. 7, the hydrogen absorbing device 4 is composed of a hydrogen gas permeable hollow container 5 and a getter material 6 for adsorbing hydrogen gas enclosed therein. Further, the hollow container 5 is sealed by the seal portions 5a, 5b at both ends thereof. Further, the straight tubular hydrogen absorbing device 4 is bent and bent in a ring shape or a tubular shape, and this is mounted to be wound around the electrode shaft 2 B of the electrode 2. According to this configuration, the hydrogen absorbing device is attached to the electrode shaft, thereby preventing the reaction between the hydrogen absorbing device and the arc tube of the above-mentioned disadvantages of the prior art, and 201039373 is effectively adsorbed and discharged in the arc tube. However, the present invention provides an improvement in the mounting of the electrode shaft of the above-described prior invention, which makes it easier to carry out the hydrogen absorbing work, and does not crush or break the hollow container during processing, and has the above constitution. By. In order to mount the hydrogen absorbing device so as to be wound around the electrode shaft, it is necessary to form a hollow container into a ring or a tubular shape. In the invention, a wavy concave portion is formed on the electric surface of the hollow container with respect to the hydrogen absorbing device. Therefore, in the above-described bending processing, the empty container is partially bent and crushed, or cracked, and the bending work is performed. That is, the formation of the corrugated container on one side of the straight tubular hollow container is inevitably curved, and finally it does not cause crushing or cracking or tubular shape formation. [Embodiment] Fig. 1 is a perspective view showing a suction (a) diagram of a short arc type discharge lamp according to the present invention, and Fig. 1(b) is a plan view showing a hydrogen absorbing device 4 made of a metal such as molybdenum. The hydrogen permeable container 5 is composed of a crucible 6 that adsorbs hydrogen gas enclosed therein, and the hollow container 5 is formed in a circular cross section. In this example, the both ends 5a, 5b are formed with a slight shape therebetween. The effect of the gas The structure of the hydrogen absorbing device for the bending loss of the device is to be directly managed. However, the inner surface of the polar axis does not have a smooth recess and is hollow, and the hydrogen hydride/first is used. As shown in the figure, the air absorbing material such as the closed hollow has a ring gap of 201039373. The wavy concave portion 8 is formed on the surface of the electrode shaft 2B of the hollow container 5, that is, the inner side surface, and is wound around the electrode. The mode of the shaft 2B is formed by bending the entire surface. Fig. 2 is a view showing another embodiment, Fig. 2(a) is a perspective view, and Fig. 2(b) is a plan view thereof. The hydrogen absorbing device 4 is wound around one or more times of the electrode shaft, and the both ends 5a, 5b of the hollow container 5 may be formed in a tubular shape so as to overlap each other. At this time, as shown in the figure, the degree of overlapping of the tubular tubes may be such that the both ends 5a and 5b overlap, and it is also possible to wind the circumference of the electrode shaft for one or more rounds and to form a plurality of layers of the disk. Further, the cross-sectional shape of the hollow container 5 of the hydrogen absorbing device 4 is not limited to a circular shape, and may be any cross-sectional shape. In Fig. 3, the cross-sectional shape is not square. The corrugated concave portion 8 on the inner side surface of the hollow container 5 can be formed by various methods, but an example thereof is shown in Fig. 4. As shown in Fig. 4(a), in the circular inner space 12 of the mold 11, a wheel 13 having convex teeth 14 on the outer circumference is rotatably provided, and the straight tubular hydrogen absorbing device 4 is inserted therein. The opening 15 of the die 11. As shown in Fig. 4(b), the hydrogen absorbing device 4 is pulled in such a manner as to mesh with the teeth 14 of the rotating wheel 13, whereby the teeth 14 have undulating recesses 8 formed below the inner surface, along The wall surface of the internal space 12 is entirely curved. Further, as shown in Fig. 4(c), the entire body is bent in a ring shape, and the hydrogen absorbing device 4 in which the corrugated concave portion 8 is formed on the inner surface is formed. -9- 201039373 The formed hydrogen absorbing device 4 is taken out in the vertical direction on the paper surface. Further, when the disk shown in Fig. 2 is tubularly formed, the hydrogen absorbing device 4 is transferred to the inner space 12 of the mold 11 so as to be slightly offset from the paper surface in the vertical direction, and bent so that the end portions overlap. Of course, the formation of the hydrogen absorbing device 4 is not limited to this forming method, and various forming methods can of course be employed. As described above, the short arc type discharge lamp of the present invention forms a corrugated concave portion on the inner side surface of the hydrogen absorbing device formed by the closed hollow container and the getter material enclosed therein, and thus is mounted on the electrode. When the shaft is bent in a curved shape, there is no deformation of the hollow container and it is crushed or cracked, and no internal getter material leaks, or the gas in the arc tube directly invades into the hollow. The situation inside the container. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) and Fig. 1(b) are explanatory views of a hydrogen absorbing device of a short arc type discharge lamp of the present invention. 2(a) and 2(b) are explanatory views of other embodiments. Fig. 3 is an explanatory view of another embodiment. 4(a) to 4(c) are explanatory views of the bending process of the hydrogen absorbing device of the present invention. Fig. 5 is an explanatory diagram of a prior patent application. Figure 6 is a further embodiment of the prior patent application. Figures 7(a) and 7(b) are previously patented straight tubular hydrogen absorbers. -10- 201039373 Figures 8 (a) and 8 (b) are explanatory diagrams of the prior art. [Description of main component symbols] 1 : Short arc discharge lamp 2,3 : Electrode 2 a, 2 b : Electrode shaft 4 : Hydrogen absorber 5 : Hollow container 6 : Suction material 8 = Corrugated recess 〇 -11 -