201038935 六、發明說明： 【發明所屬之技術領域】 本發明係有關一種面板影像檢測技術’特別是一種四龍門式檢測 機台。 【先前技術】 由於全球大尺寸基板之需求量與日倶增，使得針對檢測8.5世代 以下之基板其影像所設計之雙龍門式檢測機台，在檢測85世代以上 0 基板之影像時，檢測之速度明顯變得緩慢。 於TFT LCD之檢測過程中，在視覺檢測機台後有一雙龍門式檢測 機台’其係於龍門機構上置設檢測設備。請參閲圖丨，係為先前技術 之雙龍門式檢測機台（1〇)，如圖所示，係包含第一移動臂（12)及第 二移動臂（14)，該第一移動臂（12)及第二移動臂（14)上各設有檢 測單元。經由運輸設備將基板（16)導進檢測位置，於掃描缺陷（161、 162、 163、164)後再做影像擷取，故該基板（16)在製程中所產生之 缺陷（161、162、163、164)，可由雙龍門式檢測機台（1〇)得到再次 確認。 0 惟雙龍門式檢測機台（10)在針對已知座標位置的缺陷（161、162、 163、 164)進行檢測時’係以第一移動臂（12)、第二移動臂（14)先 分別滑動至缺陷（161)、缺陷(163)，並由其上所設置之檢測單元擷取 影像，再分別滑動至缺陷（164)、缺陷（162)，續由其上所設置之檢 測單几擷取影像。財之，在姻之時間下，該魏Π錄職台（10) 係僅將基板（16)分成左、右兩個區域進行檢測，使得單一移動臂所 須執行之影像檢测範圍較大。再者，由於基板之世代增加，使得其尺 寸亦隨之增大’雙龍門式檢測機台在檢測基板（26)之速度上，也漸 漸無法符合客戶的要求。 4 201038935 即有之雙朗式檢測機台⑽)之實用性 口此必祕其改良以驗影像檢_需之時間。 【發明内容】 龍門式檢測機 以提升檢測 台 為了解決上述問題，本發明目的之—係提供—種四切 :將基座分細個檢漸，並⑽個轉魏行檢測， 係包含基座、第 本發明目的之-储供—種四龍門式檢測機台， 其中第:測定機構包含第-移動臂及第 單元相接： -移動臂之-識_}分酸第一驅動 i 單元接設於麵，· 一攸娜，係包含 分it i::移該第三移動臂、第四移動臂之-侧或兩側 一多動第二驅鱗元接辦基座；於上述第 以下藉由具體實蘭’自&合所_圖式詳加制，當更容易瞭解 本發明之目的 '鎌够、_及其所達紅功效。 【實施方式】 將依據所附圖式 本發明之上述目的，及其結構與功能上的特性， 之較佳實施例予以說明。 =參關2、及3，本發明-較佳實施例之四朗式檢測機台包含 基座⑵）、第-測定機構㈤以及第二測定機構（24)。第一 機構（22)係置設於基座（2G)之—伟，包含第—移姆（222)及 第二移動臂（224)，將第-移動臂（222)、第二移動臂（224)之一側 分別與第-驅動料（226)相接設(如圖3)，且第—驅動單元（226) 201038935 接設於基座（20)上。 該第二測定機構（24) ’係置設於基座（2〇)之另一半側，包含第 三移動臂（242)及第四移動臂（244)，將第三移動臂（M2)、第四移 動臂（244)之一側分別與第二驅動單元（246)相接設(如圖3)，且第 二驅動單元（246)接設於基座（20)上。 如圖2所示，於第一移動臂（222)、第二移動臂（224)之相對内 側各接設可移動之檢測單元（223)、檢測單元(225)，經由第一驅動單 兀（226)以使第一移動臂（222)及其檢測單元（奶）、第二移動臂 (224)及其檢測單元（奶）分別移動至基板（26)之缺陷（262)處、 缺陷（201)處’以供該檢測單元（μ3、225)擷取該缺陷（261、2幻） 之影像並傳回該缺陷之位置或僅傳回該缺陷之位置。上述基板（26) 係為一平面待測物。 於第二移動臂（242)、第四移動臂（244)之相對内侧各接設可移 動之檢測單元(243)、檢測單元(245)，經由第二驅動單元(246)以使第 二移動臂（242)及其檢測單元（243)、第四移動臂（244)及其檢測 單元（245)分別移動至基板（26)之缺陷（263)處、缺陷(264)處， 以供該檢測單元（243、245)擷取該缺陷（263、264)之影像並傳回 該缺陷之位置或僅傳回該缺陷之位置。 於第一移動臂（222)及第二移動臂（224)之一側接設第一導軌 (227)，且第一導軌（227)置設於基座（2〇)之一側邊，於第一移動 臂（222)及第二移動臂（224)之另一側接設第二導執（228)，且第 二導軌（22δ)置設於基座（2〇)之中段處。第二導軌（22幻上可接 設排氣設備，該排氣設備可用以排出第二導軌（228)所產生之微塵， 以免微塵對檢測過程產生不良之影響。 於第三移動臂（242)及第四移動臂（244)之一側接設第三導軌 (247) ’且第三導軌（247)置設於基座（2〇)之一側邊，於第三移動 臂（242)及第四移動臂（244)之另一側接設第四導執（248)，且第 201038935 四導軌（248)置設於基座（2〇)之中段處。第四導軌（248)上可接 設排氣設備’該排氣設備可用以排出該第四導軌（248 )所產生之微塵， 以免微塵對檢測過程產生不良之影響。 前述第一驅動單元（226)、第二驅動單元(246)可為一精度較高、 剛性較強、能快速的到達定位，且在低速中平穩運轉之線性馬達(Linear motor)，或磁浮，或滾珠螺桿，或鏈條，或皮帶等等。前述基座（2〇) 上可設置電腦，且於電腦中預先植入一檢測軟體，用以指引第一移動 臂（222)、第二移動臂（224)、第三移動臂（242)及第四移動臂（Μ*) 之檢測路控。該基座（2〇)上可設置一運輸設備，用以傳送該基板（201038935 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a panel image detecting technique', particularly a four-gantry type detecting machine. [Prior Art] Due to the increasing demand for large-size substrates around the world, the double-gantry inspection machine designed for detecting images of substrates below 8.5 generations is tested when detecting images of the substrate of the 85th generation and above. The speed is obviously slow. In the process of detecting the TFT LCD, there is a pair of gantry-type inspection machines behind the visual inspection machine, which is equipped with a detection device on the gantry mechanism. Referring to the figure, the prior art double gantry type detection machine (1〇), as shown, includes a first moving arm (12) and a second moving arm (14), the first moving arm (12) and the second moving arm (14) are each provided with a detecting unit. The substrate (16) is guided into the detection position via the transport device, and the image is captured after scanning the defects (161, 162, 163, 164), so that the substrate (16) is defective in the process (161, 162, 163, 164), can be reconfirmed by the double gantry type inspection machine (1〇). 0 However, when the double gantry type inspection machine (10) detects defects (161, 162, 163, 164) at known coordinate positions, the first moving arm (12) and the second moving arm (14) are used first. Slide to defect (161), defect (163), and capture the image from the detection unit set on it, and then slide to defect (164), defect (162), and continue the test list set on it. Capture images. In the case of marriage, the Wei Wei Recording Station (10) only divides the substrate (16) into two areas, left and right, so that the image detection range to be performed by a single moving arm is large. Furthermore, as the number of substrates increases, the size of the substrate increases. The speed of the double-gantry inspection machine on the substrate (26) is gradually failing to meet customer requirements. 4 201038935 The practicality of the double-language inspection machine (10) is the result of the improvement. SUMMARY OF THE INVENTION The gantry type detecting machine is used to raise the detecting table. In order to solve the above problems, the object of the present invention is to provide a four-cutting method: the pedestal is divided into fine gradations, and (10) is rotated, and the pedestal is included. The purpose of the present invention is to store and supply a four-gantry type detecting machine, wherein: the measuring mechanism comprises a first moving arm and a first unit: - a moving arm - a _ _ acid first driving i unit Set in the face, · 一攸娜, contains the sub it i:: shift the third moving arm, the fourth moving arm - side or both sides of a multi-moving second drive scale to pick up the base; above the above By means of the specific real-language 'self-and-consultation' schema, it is easier to understand the purpose of the invention 'sufficient, _ and its red effect. [Embodiment] The above object of the present invention, and its structural and functional characteristics will be described in accordance with the accompanying drawings. = References 2 and 3, the four-language inspection machine of the preferred embodiment of the present invention comprises a base (2)), a first measuring mechanism (5) and a second measuring mechanism (24). The first mechanism (22) is disposed on the base (2G), including a first shifting arm (222) and a second moving arm (224), and the first moving arm (222) and the second moving arm ( One side of the 224) is respectively connected to the first driving material (226) (as shown in FIG. 3), and the first driving unit (226) 201038935 is connected to the base (20). The second measuring mechanism (24) is disposed on the other half of the base (2〇), and includes a third moving arm (242) and a fourth moving arm (244), and the third moving arm (M2), One side of the fourth moving arm (244) is respectively connected to the second driving unit (246) (as shown in FIG. 3), and the second driving unit (246) is connected to the base (20). As shown in FIG. 2, a movable detecting unit (223) and a detecting unit (225) are respectively connected to opposite inner sides of the first moving arm (222) and the second moving arm (224) via the first driving unit ( 226) to move the first moving arm (222) and its detecting unit (milk), the second moving arm (224) and its detecting unit (milk) to the defect (262) of the substrate (26), the defect (201) At the location where the detection unit (μ3, 225) captures the image of the defect (261, 2 magic) and returns the location of the defect or only the location of the defect. The substrate (26) is a planar object to be tested. A movable detecting unit (243) and a detecting unit (245) are respectively connected to opposite inner sides of the second moving arm (242) and the fourth moving arm (244), and the second moving unit (246) is used to make the second moving The arm (242) and its detecting unit (243), the fourth moving arm (244) and its detecting unit (245) are respectively moved to the defect (263) of the substrate (26) at the defect (264) for the detection. The unit (243, 245) retrieves the image of the defect (263, 264) and returns the location of the defect or only the location of the defect. a first rail (227) is connected to one side of the first moving arm (222) and the second moving arm (224), and the first rail (227) is disposed on one side of the base (2〇), The other side of the first moving arm (222) and the second moving arm (224) is connected to the second guide (228), and the second guide rail (22δ) is disposed at a middle portion of the base (2〇). The second guide rail (22 can be connected to the exhaust device, the exhaust device can be used to discharge the dust generated by the second guide rail (228) to prevent the dust from adversely affecting the detection process. The third moving arm (242) And a third rail (247) is connected to one side of the fourth moving arm (244) and the third rail (247) is disposed on one side of the base (2〇), and is disposed on the third moving arm (242) and The fourth guide arm (244) is connected to the fourth guide (248) on the other side, and the fourth guide rail (248) of the 201038935 is disposed at a middle portion of the base (2〇). The fourth guide rail (248) is Connecting the exhaust device 'The exhaust device can be used to discharge the dust generated by the fourth rail (248) to prevent the dust from adversely affecting the detection process. The first driving unit (226) and the second driving unit (246) It can be a linear motor with high precision, strong rigidity, fast reaching and positioning, and running smoothly at low speed, or maglev, or ball screw, or chain, belt or the like. (2〇) The computer can be set up, and a detection software is pre-implanted in the computer to guide the first Detection path of the moving arm (222), the second moving arm (224), the third moving arm (242) and the fourth moving arm (Μ*). A transport device can be arranged on the base (2〇) To transfer the substrate (
至待檢測位置。 ，什 1 π心四龍n式檢测機台將基板（26)分成四個檢 j ’亚在姻之時間下以四個義臂執行檢測，使得各個移動臂所 須t檢狀顧概料，贿桃本剌·谦敗基板 平均位大，如圖4所示。因此，模擬推估在單片基板⑻上 個缺陷，同0_雌朗式檢職台、本發明進 以上所述之實施例僅係為說明本發明之技術思想 ^項技藝之人士能夠瞭解本發明之内容並—μ二H 以之限疋本㈣之補朗，料膽本 田不能 等變化或修飾，仍應驢在本發明之細咖/树所作之均 7 201038935 【圖式簡單說明】 圖1為先前技術之雙龍門式檢測機台之俯視示意圖。 圖2為本發明之四龍門式檢測機台之俯視示意圖。 圖3為本發明之四龍門式檢測機台之側視示意圖。 圖4為本發明之四龍門式檢測機台之實施示意圖。 【主要元件符號說明】To the location to be tested. , Shi 1 π Xin Silong n-type detection machine divides the substrate (26) into four inspections. The inspection is performed by four prosthetic arms at the time of marriage, so that each moving arm needs to be checked. , the bribe Tao Biao · humble board average position is large, as shown in Figure 4. Therefore, the simulation estimates the previous defect on the single-piece substrate (8), and the embodiment of the present invention is merely for explaining the technical idea of the present invention. The content of the invention and - μ 2 H is limited to the 朗 ( (4), the biliary Honda can not be changed or modified, still should be in the fine coffee / tree of the present invention 7 201038935 1 is a top view of a prior art double gantry type inspection machine. 2 is a top plan view of a four-gantry inspection machine of the present invention. Figure 3 is a side elevational view of the four gantry type inspection machine of the present invention. 4 is a schematic view showing the implementation of the four-gantry type detecting machine of the present invention. [Main component symbol description]
10 雙龍門式檢測機台 12 第一移動臂 14 第二移動臂 16 基板 161 缺陷 162 缺陷 163 缺陷 164 缺陷 20 基座 22 第一測定機構 222 第一移動臂 223 檢測單元 224 第二移動臂 225 檢測單元 226 第一驅動單元 227 第一導執 228 第二導軌 24 第二測定機構 201038935 Ο 第三移動臂 檢測單元 第四移動臂 檢測單元 第二驅動單元 第三導執 第四導執 基板 缺陷 缺陷 缺陷 264 缺陷10 double gantry inspection machine 12 first moving arm 14 second moving arm 16 substrate 161 defect 162 defect 163 defect 164 defect 20 pedestal 22 first measuring mechanism 222 first moving arm 223 detecting unit 224 second moving arm 225 detecting Unit 226 First driving unit 227 First guide 228 Second guide rail 24 Second measuring mechanism 201038935 Ο Third moving arm detecting unit Fourth moving arm detecting unit Second driving unit Third guiding Fourth guiding substrate defect defect defect 264 defects