201022680 六、發明說明： 【發明所屬之技術領域】 本發明係關於檢查用探針，用以使接觸頭接觸至形成在檢 查基板上的電路圖案以對該電路圖案進行檎查。 在本發明中，檢查基板不限於印刷電路板，也可 查例如撓性基板、多層配線基板、液晶顯示器或電聚 的，極板，及半導體封裝用的封裴基板或薄膜載體等^其 或半導體晶圓等所形成的電氣配線。本說明書中，誃^ 配線基板總稱為“基板”。 以矛合裡 ❹ 【先前技術】 【專利文獻1】日本特開2008 —107229號公報 接魅ΐ利文ί 1中，揭示由導電性之長條狀構件製造的檢杳用 較難ί探針的形狀限定於圓柱或圓筒形狀，又比 殿難形成直線度，也難以提高量產性。 【發明内容】 發明所欲解決之課題 降低ί :提供檢查赌針，能提高量產性而容易 斧低價格，又可輕易地達到直線度。 寸的i查目的為：提供可㈣地製造成各種形狀或尺 解決課題之手段 查 201022680 的步驟；及使複數檢查用探針從框架分離的步驟。 在導電查用騎之製造方法的特徵係包含： ^劑層覆蓋-圖案了第1 探針;及連接部，形 步驟_第i抗_層為料，對該板狀構件進行侧處理的 去除該第1抗钕劑層的步驟；及 ❹ ° S、 = ，而從該框架分離的 5J本發明之檢查用探針之製造方 板狀劑層覆=電性 應於數:ί:ί:案::連?部以外的表面，該圖案係對 連接部，形成針；及該 驟；以該第2抗_層為遮罩對該連接部進行半綱處理的步 去除該第2抗姓劑層的步驟；201022680 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an inspection probe for contacting a contact head to a circuit pattern formed on a inspection substrate to inspect the circuit pattern. In the present invention, the inspection substrate is not limited to a printed circuit board, and for example, a flexible substrate, a multilayer wiring substrate, a liquid crystal display or an electropolymer, an electrode plate, a sealing substrate for a semiconductor package, a film carrier, or the like may be inspected. Electrical wiring formed by semiconductor wafers or the like. In this specification, 誃^ wiring boards are collectively referred to as "substrate".矛合合❹ [Prior Art] [Patent Document 1] Japanese Patent Laid-Open No. 2008-107229, the disclosure of which is incorporated herein by reference, discloses that it is difficult to detect a probe made of a conductive strip-shaped member. The shape is limited to a cylindrical or cylindrical shape, and it is difficult to form a straightness than the temple, and it is also difficult to improve mass productivity. SUMMARY OF THE INVENTION Problems to be Solved by the Invention Reduction ί: Providing an inspection gambling needle can improve mass production and is easy to achieve a low price, and can easily achieve straightness. The purpose of the inspection is to provide a means for (4) manufacturing into various shapes or sizes to solve the problem. The steps of 201022680 and the steps of separating the plurality of inspection probes from the frame. The method for manufacturing the conductive inspection ride includes: a layer coating-patterning the first probe; and a connecting portion, the step _i-th layer is a material, and the side treatment of the plate member is removed. The step of the first anti-caries agent layer; and ❹ ° S, =, and the 5J of the inspection probe of the present invention separated from the frame is coated with a layer of the coating layer = electrical properties are: ί: ί: Case: a surface other than the portion, the pattern is formed by the pair of connecting portions, and the step; and the second anti-layer is removed by the step of the second anti-layer as a mask Step of the agent layer;
Q 兮福蝕劑層的步驟’該第3抗蝕劑層覆蓋著對應於 該複數檢查用探針、該框架及該連接部的該圖案者對應於 驟；以該第3抗_層為鮮對織狀構件進行綱處理的步 去除該第3抗餘劑層的步驟；及 驟。將該複數檢查用探針從該連接部切斷而從該框架分離的步 探針經由形成在框架的連接部而連接於框架。且複數檢查用 該片狀的檢查用探針連結體中，連接部可形成比框架及檢 4 201022680 查用探針薄。 複數3 探針從連接部切斷而從框架分離，可使 複數檢一用^針成為單獨的檢查用探針。 狀，探針的特徵為:呈薄板形 之配線圖案的電特己線圖案上的檢查點以對檢查基板 可堆疊複數薄板狀構件㈣成檢查雜針。 仃檢查，其特徵為：形成有連結於框架之連接部的痕跡。 檢査i板======'製T接觸至 驟及將利用切下步驟所切下之複數薄 狀構ΐίίΞ?針ί製造方法中’從導電性板狀構件切下薄板 板狀;可匕含—步驟’藉由光_從板狀構件切下薄 發明之效果 鲁 ，本，H可提供能提高量紐_格低的檢查用探針。 而日又分士日 可提供能輕易地達到直線度的檢查用探針。 形狀=寸探;輕易地提供如薄板狀或角柱㈣^ —【麵議 實施發明之最佳形態 甩探式，說雜本發明之齡實郷態的檢查 度、長声在开 巾須注意：為易於理解，對各構件的厚 長度減、及構件間的間隔等進行了放大·縮小.變形.簡化 201022680 等。 圖9係習知的檢查用探針9〇的立體圖。該檢查用探針卯 .本體部91及與檢查基板之檢查點接觸的尖端部92,由導 電?的圓柱狀騎或金屬線製造。又，尖端部％形成尖銳狀， 且在^體部91及尖端部92的外周面上塗佈有絕緣覆膜。 私雜這種自導電性的目柱狀芯材或金屬線製^^的檢查用探針比 =以提高量紐’且錄纽下也難以具有直線度。因此， ^在產量無法提高的問題。又，由於藉由將金屬線拉伸成細長 狀以形成探針，因此探針的形狀限定於圓柱狀或圓筒狀。 [檢查用板針的概略構造] 的檢分別顯示利用本發明之製造方法製造 的檢查用探針的第一實施形態及第二實施形態。 f 1 (a)所示依本發明之第一實施形態的檢查用探針7〇 Τίίΐ狀的薄板形狀，且包含：本體部71 ;尖端部72，接觸 二—土板上之配線圖案的檢查點；及後端部77，與未圖示之 ί Ϊίί置電連接°又’在檢查用探針7G形成有寬廣部分 將檢—用探針7G安裝在檢查^具時，該部分73卡合於該 的—部分而固定。該檢查職針70的厚度及寬度可形 魏的尺相靴。又，錄查用探 連接?ϊ Γ未ΐ基時’使後端部77導通 if 裝置（未圖不）的電極部，並使尖端部72血設 ^檢查基板上的檢查點導通接觸。藉此 ^ 極部與檢查點電連接。例如，在檢查基板上的=檢;= 以1個檢查用探針70的尖端部72與其接觸，從基=二:另J =電流至該等2個檢查用探針7G，可藉由測定^ j 針70之間的電位差以進行基板檢查。 一用探 又’檢查甩探針70的寬度（面向圖} (a)時 距離）較大時，翻於如上述以二端子測 行 °、. 但是將2麵知飾_方向平行分_配了^板^該 6 201022680 寬度較小時，也可使用於四端子測定法。此時，使用2根一 的2對檢查用探針70，在2個檢查點之間供給電流並測定^ 圖1 (b)係顯示並排配置2個依本發明之第二實施形熊 檢查用探針10之狀態的立體圖。2個檢查用探針1〇 铋 接觸至檢查基板上之配線圖案的檢查點。又，2個 針的外侧表面分別以絕緣材料被覆。— Ο 魯 圖1 (b)中，將2個檢查用探針以一方相對於另一方 ，反的方式配置，而且，以尖端部12比起本體部互相接近的 =配置。如此配置尖端部丨2，係由於2個檢查用探針的作用不 二5 在使2個尖端部的尖端分離的狀態下使該等探針接 基板上之1個狹窄區域的檢查點。例如檢查點之縱χ 的尺寸為40μιηχ50μιη。 ，2係如圖丨（b)並排配置的2個檢查職針的俯視圖。 13㈣的基礎上’將螺旋彈簧2G連接在各檢 本體部11的後端面，該職彈簧2G的端部22 連接於未圖示的檢查裝置。 达例如’進行四端子測定’如—輯2個檢查點供給測定用 該等2働查點之間的電位差時，準備2組圖2 所不結構的檢查用探針10，並以下述方式使用。 個檢2 U檢查用騎10之尖端部12的尖端接觸至1 至Λ檢查用，1G之尖端部12的尖端接觸 檢一點。其次，在該狀態下，從未圖示的檢查裝置經 ㈣部22供給電流至一組中的！個檢查用探針J與另一 探&===並_ W2梅的繼查用 在兮ΐ疋’也可使甩2根檢查用探針10而進行二端子測定法。 部3導H一其i之檢查用探針10後端之螺旋彈簀20的端 導通連接至基板檢絲置（未圖示）的電極部，並使尖端 201022680 部12導通接觸至檢查基板上所設的1個檢查點。而且’使另一. 邊之檢查用探針1〇後端之螺旋彈簧2〇的端部22導通連接至同 一個基板檢查裝置（未圖示）的電極部，並使尖端部12導通接 觸至檢查基板上所設的另一個檢查點。其後，使電流從基板檢 查裝置經由2個檢查用探針10在2個檢查點之間流動，並測定 該2個檢查點之間的電位差。藉此檢查既定之配線圖案的電特 性0 [檢查用探針的製造] 圖3、圖4、圖5A及圖用以說明製造依本發明之第二實 施形態的檢查用探針1〇的過程。 圖3係導電性板狀構件抑，例如金屬板或鶴片的概略立體 圖。板狀構件30具有例如寬度約l〇mm至20mm，長产約 30mm ’厚度約〇.lmm的尺寸。該板 g造 用探針的尺寸任意決I又，也可使用從匕 金屬片切下所需大小的金屬板。 娜视狀之 宰38如^示38 理解，在該板狀構件3G的面上顯示圖 3G切下；及框架32，利用枝狀部㈡ 的，38係於後述_之前的光微影時—开mm32 上並未描繪在板狀構件3〇上。但 ^罩上者，實際 峨之“進行印附後所殘留;表 示一部分’且“爽414省:檢式但H歲，針僅顯 探針的數目可依所需任意決定。 待臬4之檢查用 圖4顯示對板狀構件3〇進行蝕 案1的部分留下後的狀態、。如圖1^理以使對應於圖3之圖 從板f構件30被切下而殘留，該探針連的連結體4〇 及檢查用探㈣，有 201022680 32 尺寸 各檢一用探針10具有長度約l〇mm ’寬度約〇 imm左右的 0a step of the Q 兮 etchant layer, wherein the third resist layer covers the pattern corresponding to the plurality of inspection probes, the frame and the connection portion, and the third anti-layer is fresh a step of removing the third anti-surplus agent layer by a step of treating the woven member; and a step. The step probe that is cut from the connection portion by the plurality of inspection probes and separated from the frame is connected to the frame via a connection portion formed in the frame. In the inspection probe connection body for the sheet inspection, the connection portion can be formed thinner than the frame and the probe for inspection. The plurality of probes are cut off from the joint portion and separated from the frame, so that the plurality of probes can be used as separate test probes. In the shape of the probe, the inspection points on the electric special line pattern of the wiring pattern in the form of a thin plate are used to inspect the substrate, and the plurality of thin plate-like members (4) can be stacked to inspect the needle. The flaw inspection is characterized in that a trace connected to the joint portion of the frame is formed. Check the i-plate ======'T-contact to the step and the multi-layer thin structure that will be cut by the cutting step ίίΞ? Acupuncture in the manufacturing method 'cut the thin plate from the conductive plate member;匕Including - the step 'by light _ cutting the effect of thin invention from the plate-shaped member Lu, this, H can provide an inspection probe that can increase the amount of vacancies. On the other hand, we can provide inspection probes that can easily reach straightness. Shape = inch probe; easy to provide such as thin plate or corner column (four) ^ - [negotiable to implement the best form of the invention, the detection of the age of the invention, the length of the inspection, long sound in the towel must pay attention to: For the sake of easy understanding, the thickness of each member is reduced, and the interval between members is enlarged, reduced, deformed, simplified, etc. 201022680. Fig. 9 is a perspective view of a conventional inspection probe 9A. The inspection probe 本体. The main body portion 91 and the tip end portion 92 that is in contact with the inspection point of the inspection substrate are made of a conductive cylindrical ride or a metal wire. Further, the tip end portion % is formed in a sharp shape, and an insulating film is applied to the outer peripheral surfaces of the body portion 91 and the tip end portion 92. It is difficult to have a straightness in the case where the self-conducting columnar core material or the metal wire-made inspection probe ratio is increased by a certain amount. Therefore, ^ the problem that the output cannot be improved. Further, since the probe is formed by stretching the metal wire into an elongated shape, the shape of the probe is limited to a cylindrical shape or a cylindrical shape. The inspection of the schematic structure of the inspection plate needle shows the first embodiment and the second embodiment of the inspection probe manufactured by the production method of the present invention. F 1 (a) shows a thin plate shape of the inspection probe according to the first embodiment of the present invention, and includes a main body portion 71 and a tip end portion 72 for inspecting a wiring pattern on the second earth plate. The rear end portion 77 and the rear end portion 77 are electrically connected to each other (not shown). In addition, when the inspection probe 7G is formed in a wide portion, the inspection probe 7G is attached to the inspection tool, and the portion 73 is engaged. Fixed in this part. The thickness and width of the inspection needle 70 can be shaped as a ruler. Further, when the recording probe is connected, the rear end portion 77 is electrically connected to the electrode portion of the if device (not shown), and the tip portion 72 is provided with blood to check the inspection point on the substrate. The ^ pole is electrically connected to the checkpoint. For example, the inspection on the inspection substrate; = contact with the tip end portion 72 of one inspection probe 70, from the base = two: another J = current to the two inspection probes 7G, by measurement ^ j The potential difference between the pins 70 is used for substrate inspection. When the probe is used to check the width of the probe 70 (the distance from the figure (a) is large), turn it over as described above with the two terminals to measure the line, but the two sides are _ direction parallel. ^^^^6 201022680 When the width is small, it can also be used for the four-terminal measurement method. At this time, two pairs of inspection probes 70 are used, and current is supplied between the two inspection points, and measurement is performed. FIG. 1(b) shows two types of bear inspections according to the second embodiment of the present invention. A perspective view of the state of the probe 10. Two inspection probes 1〇 接触 Contact the inspection point of the wiring pattern on the inspection substrate. Further, the outer surfaces of the two needles are each covered with an insulating material. — 鲁 图 In Fig. 1(b), the two inspection probes are arranged opposite to each other, and the tip end portions 12 are arranged closer to each other than the body portion. The tip portion 2 is disposed in such a manner that the probes are connected to one of the narrow regions on the substrate in a state in which the tips of the two tip portions are separated by the action of the two inspection probes. For example, the size of the mediastinum of the checkpoint is 40 μm χ 50 μιη. 2, the top view of the two inspection posts arranged side by side as shown in Figure 丨 (b). On the basis of 13 (d), the coil spring 2G is connected to the rear end surface of each of the inspection main body portions 11, and the end portion 22 of the service spring 2G is connected to an inspection device (not shown). When, for example, 'four-terminal measurement' is performed, two sets of inspection points are supplied to the measurement for the potential difference between the two inspection points, and two sets of inspection probes 10 of the configuration shown in Fig. 2 are prepared and used in the following manner. . The tip of the tip end portion 12 of the rider 10 is in contact with 1 to the inspection, and the tip end of the tip end portion 12 of the 1G is in contact with the inspection point. Next, in this state, an unchecked inspection device supplies current to the group via the (four) portion 22! The inspection probe J and another probe &=== and _W2 plum are used for the subsequent inspection. The 端子' can also perform the two-terminal measurement method for the two inspection probes 10. The end of the spiral magazine 20 at the rear end of the inspection probe 10 is connected to the electrode portion of the substrate detection wire (not shown), and the tip end 201022680 portion 12 is electrically connected to the inspection substrate. One checkpoint set. Further, the end portion 22 of the coil spring 2A at the rear end of the inspection probe 1 is electrically connected to the electrode portion of the same substrate inspection device (not shown), and the tip end portion 12 is electrically connected to Check another checkpoint set on the substrate. Thereafter, a current is caused to flow from the substrate inspection device between the two inspection points via the two inspection probes 10, and the potential difference between the two inspection points is measured. Thereby, the electrical characteristics of the predetermined wiring pattern are checked. [Manufacture of inspection probe] FIGS. 3, 4, 5A and FIG. 3 are diagrams for explaining the process of manufacturing the inspection probe 1 according to the second embodiment of the present invention. . Fig. 3 is a schematic perspective view of a conductive plate member, for example, a metal plate or a crane piece. The plate member 30 has a size of, for example, a width of about 10 mm to 20 mm and a length of about 30 mm' of a thickness of about 0.1 mm. The size of the probe used for the plate g can be arbitrarily determined, and a metal plate of a desired size can be cut from the enamel metal piece. As shown in Fig. 38, it is understood that the surface of the plate member 3G is cut as shown in Fig. 3G; and the frame 32 is made of the branch portion (2), and 38 is used in the light lithography of the latter. The opening mm32 is not depicted on the plate member 3〇. However, the person who covers it, the actual 峨 “ 残留 进行 ; ; ; ; ; ; ; ; 且 且 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 414 Fig. 4 shows a state in which the portion of the slab 1 is etched. As shown in FIG. 1 , the image corresponding to FIG. 3 is cut and left from the plate f member 30, and the probe body 4 〇 and the inspection probe (4) have a probe 10 for each size inspection of 201022680 32 size. Has a length of about l〇mm 'width about 〇imm 0
Lt'以圖4中所示虛線圓5A圍住之部分的*大圖。該 从檢查用探針10之靠近尖端部12側的一部分連結於 框茱32之枝狀部分36的狀態。 =圖5A所示，在枝狀部分％的端部與檢查用探 近尖端部12侧的一部分之間形成有連接部52。 ❹ 參 的』H從圖5A中所示5B —5B線觀察，顯示枝狀部分36 =^與檢查用探針1G之靠近尖端部12側的—部分之間以連 接邛52連結的狀態的剖面侧視圖。 如圖5Λ及圖5B所示，在連接部52的表面侧及背面側（或 部52的上方及下方）形成有空間50。該空間50可藉由以 牛蝕刻（half etching)處理去除該部分的板狀構件3〇而形成。 u又，如圖5A及圖5B所示，由於連接部52形成比檢查 探針1〇及枝狀部分36的厚度薄，因此藉由對著枝狀部分 檢查用探針10折彎或扭轉以切斷連接部52，可將檢查 ϊ〇從枝狀部分36，即框架32分開。 — 然後，依所需將檢查用探針10之該切斷後的部分加以 磨，或者進行淬火以提高硬度，或者對整體施加電鑛。 [韻刻處理] 圖6係用以說明利用蝕刻處理從圖3之板狀構件3〇 4所示片狀之探針連結體40時的步驟的流程圖。又，與哕圖 步驟不同的步驟中’先在光罩形成對應於待製造之檢 及揭架的形牧的圖案’以便在蝕刻處理時使用。又，^ 衣^ 蝕刻處理去除相當於連接部52之空間50 (圖5A、圖5JB)用半 狀構件30的一部分，先在光罩形成對應於連接部52 ^板 圖案9.— 一— 形狀的 '-.--，--________ 該流程圖所示的步驟大致由以下步驟構成··首先，、/ 刻處理形成連接部52 (圖5A、圖5B)，接著以韻刻處理二二， 201022680 狀的探針連結體40 (圖4)。 及數量準備:需二3,所希望之檢查用探針的形狀 進行清洗。 ’並對該板狀構件30的表面 餘劑二後，使用mu狀構件30的表面及背面塗佈抗 _後的兩面，的掩膜版將該圖案印附於塗佈抗 輸時僅去除連：;丁2顯：：的案; 出之的ΐ僅將對細_]膜被除去而露 刻速度進行控刻去除。此時，藉由_ 劑膜步驟S64中，去除板狀構件3()之表面及背面所殘留的抗钱 劑m用冓件3°之表面及背面再次塗佈抗餘 =構工=檢背，針及框架之形狀的抗』 的板二働,m將抗_膜被去除而露出之部分 劑膜步驟s67中，去除板狀構件3g之表面及背面所殘留的抗餘 果’可形成圖4所*之片㈣探針連結體4〇。 分開。:===以從桓架32 檢查圖1 (a)所示依本發明之第一實施形態的 侧與圖4相= 反=f。30的概略立體圖。板狀構件 抖施ί圖7所示，在該板狀構件30上顯示圖案％，該圖案78 對應於.檢查用探針7〇，有複數個，預定從該板狀構件％切下； 201022680 及框架75 ’利用枝狀部分74、76連結該等複數個檢查用探針。 檢查用探針70形成直線狀的薄板形狀，尖端部72附近連結在 枝狀部分76，相反地後端部附近連結在枝狀部分74。在該後端 部附近形成有寬廣部分73’於該檢查用探針70安裝在檢查治具 時，該部分73卡合於該檢查治具的一部分以決定檢查用探針7〇 的安裝位置。 --固，甲興園」/入興員他恶像的信況相同，為簡化 圖式，複數檢查用探針僅顯示一部分，“…，，表示省略檢查用探 ❿ 參 針。同樣於該實施形態中，待製造之檢查用探針的數目 需任意決定。 、隹"it與圖3及圖4之實施態樣相同，對圖7所示圖案78 姓刻處理，以形成片狀的探針連結體。又雖未圖示，但盘 ΐ ί 1 示實施例相同’在檢查用探針7G與枝狀料74、76 ^ 的連結部形成有減少厚度的連接部。 [其他實施態樣] 上述實施例中’作為檢查用探針的形狀， 構件形成i， =:形合:突_狀等如== 線狀，但也可如圖二a)所72的尖端形狀為直 有2個尖銳形狀部狀的空間而具 尖銳形狀部82d。 個¥于狀李間而具有3個 sr私又-，不如上述實施形態地單體使用檢杳用浐斜,-Γ，^ 堆昼:板狀構件交替 構件-之方式在其㈣分別—真 11 201022680 溥板狀構件82e。 丛们薄構件82f具有1個尖銳狀的災端形狀，各薄板狀構 由形成v字狀的空間而具有2個尖銳形狀部。各個構 t 咖約為^111°又’—片薄板狀構件82e的厚度82eh ，為50μιη，薄板狀構件82f的厚度82fh也約為5〇陣。因此， 藉=黏& 3片構件，可形成侧面一邊約⑼叫之角柱狀的檢查 用探針85。 ^ 8B所示的檢查用探針％由於黏合3片薄板狀構件似、 而形成’因此其尖端部具有5個线形狀部。該薄板 ⑩ if組合可任意進行’藉此可形成各種形狀的尖端部，也 可輕易地調節檢查用探針的厚度。 ⑽實施例如圖2所示’利用螺旋彈簧20發揮檢查用 f : J0的彈性，但是依構成檢查用探針之板狀構件的材質，其 力身可具備當施加壓力時撓曲，而當該壓力解除時復原的彈 上明依本發明之檢查贿針及其製造絲的較佳實 旦本發明不限於該實施形態’熟悉本技藝之士可輕易 附:===定又’一 馨 【圖式簡單說明】 阁ΪΛ)係依本發明之一實施形態的檢查用探針的立體圖。 配置2個依本發明之第二實施形態的檢查用 用探·^置2個依本發明之第二實施形態的檢查 所使發明之第二實施職的檢查用探針時 4f ^ 包含複數個依本發明之第二實施形態的檢查用 才木針”連、4雜針之框架的片狀之探針連結體的立體圖。~ 12 201022680 中以虛線所示之圓圍住的部分的放大圖。 圖6梅田圖5八中之5B —5B線觀察時的放大剖面圖。 驟的i賴 縣圖4所利狀之探針連結體切下時的步 所使製^圖本發明之第—實郷態的檢查祕針時 之尖 fB軸示依本發明之其他實卿態的檢查肖探針的尖 端形狀的俯視圖。 圖9係顯示依習知一例之檢查用探針的立體圖。 【主要元件符號說明】 10〜檢查用探針 π〜本體部 12〜尖端部 20〜螺旋彈簧 鲁 22〜螺旋彈簧之端部 30〜板狀構件 32〜框架 34、36〜枝狀部分 38〜圖案 3〜iS的探針連結體 50〜空間 -52〜連接部 70〜檢查用探針 71〜本體部 72〜尖端部 73〜寬廣部分 74、76〜枝狀部分 13 201022680 75〜框架 77〜後端部 78〜圖案 82e、82f〜薄板狀構件 82w〜薄板狀構件之寬度 82eh、82fh〜薄板狀構件之厚度 90〜檢查用探針 91〜本體部 92〜尖端部Lt' is a large image of the portion enclosed by the dotted circle 5A shown in FIG. The portion of the inspection probe 10 that is close to the tip end portion 12 is connected to the dendritic portion 36 of the frame 32. As shown in Fig. 5A, a connecting portion 52 is formed between the end portion of the branch portion % and a portion on the side of the inspection inducing tip end portion 12. The "H" of the ginseng is observed from the line 5B - 5B shown in Fig. 5A, and shows a section in which the branch portion 36 = ^ is connected to the portion of the inspection probe 1G near the tip end portion 12 by the connection 邛 52. Side view. As shown in Figs. 5A and 5B, a space 50 is formed on the front side and the back side (or above and below the portion 52) of the connecting portion 52. This space 50 can be formed by removing the plate-like member 3 of the portion by a half etching process. Further, as shown in FIG. 5A and FIG. 5B, since the connecting portion 52 is formed thinner than the thickness of the inspection probe 1A and the branch portion 36, it is bent or twisted by the probe 10 for inspection of the branch portion. By cutting the connecting portion 52, the inspection flaw can be separated from the branch portion 36, that is, the frame 32. — Then, the cut portion of the inspection probe 10 is ground as needed, or quenched to increase the hardness, or the electric ore is applied to the whole. [Rhythm processing] Fig. 6 is a flowchart for explaining a procedure when etching the sheet-like probe connecting body 40 shown in the plate-like member 3A of Fig. 3 by etching. Further, in the step different from the drawing step, 'a pattern of the shape of the eagle corresponding to the inspection and uncovering of the hood is formed in the reticle for use in the etching process. Further, the etching process removes a portion of the half member 30 corresponding to the space 50 (Fig. 5A, Fig. 5JB) of the connecting portion 52, and first forms a shape corresponding to the connecting portion 52. '-.--,--________ The steps shown in the flowchart are roughly composed of the following steps: First, the / processing is performed to form the connecting portion 52 (Fig. 5A, Fig. 5B), and then the rhyme processing is performed two or two. 201022680-like probe connector 40 (Fig. 4). And quantity preparation: 2 to 3, the shape of the probe to be used for inspection is cleaned. 'And after the surface of the plate-like member 30 is two, the surface of the mu-shaped member 30 is coated with the surface of the back surface of the mu-shaped member 30, and the mask is applied to the coating to resist the transfer. :; Ding 2:: The case; the ΐ will only be removed from the fine _] film and the speed of the engraving is removed. At this time, in the _ film step S64, the anti-money agent m remaining on the surface and the back surface of the plate-like member 3 () is removed, and the surface and the back surface of the slab 3° are again coated with the anti-residue = structure = back , the shape of the needle and the frame of the anti-"plate, the m will be removed from the film to expose part of the film process step s67, remove the residual surface of the plate-like member 3g residual anti-remaining 'can be formed 4 pieces of * (4) probe link 4〇. separate. :=== Checking from the truss 32, the side according to the first embodiment of the present invention shown in Fig. 1 (a) is the same as Fig. 4 = inverse = f. A schematic perspective view of 30. As shown in FIG. 7, the pattern % is displayed on the plate member 30, and the pattern 78 corresponds to the inspection probe 7 〇, and there are plural, which are predetermined to be cut from the plate member %; 201022680 And the frame 75' connects the plurality of inspection probes by the branch portions 74, 76. The inspection probe 70 is formed into a linear thin plate shape, and the tip end portion 72 is coupled to the branch portion 76 in the vicinity thereof, and is connected to the branch portion 74 in the vicinity of the rear end portion. A wide portion 73' is formed in the vicinity of the rear end portion. When the inspection probe 70 is attached to the inspection jig, the portion 73 is engaged with a part of the inspection jig to determine the attachment position of the inspection probe 7A. - Solid, Jiaxingyuan/Introduction to the same situation of his evil image, in order to simplify the drawing, the probe for multiple inspections only shows a part, "..., which means that the inspection probe is omitted. In the embodiment, the number of inspection probes to be manufactured is determined arbitrarily. 隹"it is the same as the embodiment of Figs. 3 and 4, and the pattern 78 shown in Fig. 7 is processed to form a sheet. The probe connection body is not shown, but the disk ΐ 1 is the same as the embodiment. 'The connection portion of the inspection probe 7G and the branches 74 and 76 ^ is formed with a connection portion having a reduced thickness. In the above embodiment, 'as the shape of the probe for inspection, the member is formed i, =: the shape is: the shape of the protrusion is equal to == linear, but the shape of the tip of the 72 is as shown in Fig. 2a). Two sharp-shaped portion-shaped spaces have sharp-shaped portions 82d. Each of them has three sr-private--, and is not as slanted as the above-described embodiment, and is used for inspection. : The plate-shaped member alternates the member - in the manner of (4) respectively - true 11 201022680 溥 plate member 82e. The plexus member 82f has a tip The shape of the catastrophic shape has two sharp-shaped portions formed by forming a v-shaped space. Each of the structures is approximately 111° and the thickness of the thin-plate-shaped member 82e is 82 eh, which is 50 μm, and the thin plate is formed. The thickness 82fh of the member 82f is also about 5 angstroms. Therefore, the inspection probe 85 having a side column side (9) called a columnar side can be formed by the viscous & 3 member. The inspection probe shown in Fig. 8B % is formed by bonding three thin plate-like members, so that the tip end portion has five line-shaped portions. The thin plate 10 if the combination can be arbitrarily performed, whereby the tip end portions of various shapes can be formed, and the inspection can be easily adjusted. (10) For example, as shown in Fig. 2, the elasticity of the inspection f: J0 is exerted by the coil spring 20. However, depending on the material of the plate-like member constituting the probe for inspection, the force body may be provided to be scratched when pressure is applied. The invention is not limited to the embodiment of the present invention. The invention is not limited to the embodiment. The person skilled in the art can easily attach: === Also 'a sweet [simplified description of the schema] A perspective view of an inspection probe according to an embodiment of the present invention. Two inspection probes according to a second embodiment of the present invention are disposed, and two inspection apparatuses according to the second embodiment of the present invention are disposed. In the inspection probe of the second embodiment of the invention, 4f is a perspective view of a plurality of sheet-like probe couplings according to the frame of the inspection wood needle and the four needles according to the second embodiment of the present invention. ~ 12 201022680 An enlarged view of the portion enclosed by a circle indicated by a broken line. Fig. 6 is an enlarged cross-sectional view of the 5B-5B line of the Umeda figure 5-8. The step of cutting the probe link of the advantageous shape of Figure 4 of the Lai County is to make the first f-axis of the first embodiment of the present invention. A top view of the tip shape of the Schematic probe. Fig. 9 is a perspective view showing an example of an inspection probe according to a conventional example. [Description of main component symbols] 10 to inspection probe π to main body portion 12 to tip end portion 20 to coil spring Lu 22 to coil spring end portion 30 to plate member 32 to frame 34, 36 to dendritic portion 38 to pattern 3 to iS probe connector 50 to space - 52 to connector 70 to inspection probe 71 to body portion 72 to tip portion 73 to wide portion 74, 76 to dendritic portion 13 201022680 75 to frame 77 to rear end Portion 78 to pattern 82e, 82f to thin plate member 82w to width of plate-like member 82eh, 82fh to thickness of thin plate member 90 to inspection probe 91 to main body portion 92 to tip end portion
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