201029901 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種岔道裝置。 本案係根據2008年11月28日向曰本申請之特願 2008-305279號主張優先權，且將其内容援用於本說明書 中。 【先前技術】 習知已有一種轉盤（turntable)作為岔道裝置，用以將 沿著滾輪輸送機（roller conveyor)等搬運路徑所運送之 〇 搬運物之運送方向切換至岔道搬運路徑側（參照專利文獻 1)。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利第3749176號公報 【發明内容】 [發明所欲解決之課題] ❹ 轉盤在將搬運路徑上所運送之搬運容器切換至岔道搬 運路徑侧時，需要在搬運物載置於轉盤上之狀態下使之旋 轉。因此，轉盤旋轉時，由於後續搬運物之進行（搬運）被 停止而停滯在搬運路徑上，因此搬運效率降低。 本發明係有鑑於上述情形而研創者，其目的在提供一 種不需使搬運容器之流程停滯即可順暢且確實地轉換運送 方向之岔道裝置。 [解決問題之方案] 4 321618 201029901 在本發明之岔道裝置中，係採用以下手段解決上述問 題。 本發明係一種搬運路徑之岔道裝置，該搬運路徑係用 ' 以搬運收容搬運物之搬運容器，其特徵為具備：第一引導 部，配設在與搬運容器上面之搬運方向正交之寬度方向兩 側；第二引導部，配設在與搬運容器下面之搬運方向正交 之寬度方向兩側；複數個搬運滾輪，沿著搬運路徑中第一 搬運路徑與第二搬運路徑之交叉部分以外之搬運方向的寬 ® 度方向兩側配設，以支撐搬運容器下面進行運送；導執， 沿著搬運路徑中交叉部分以外之搬運方向的寬度方向兩側 配設，並與第二引導部抵接進行引導；及切換導件，具有 第一切換導執及第二切換導軌，並且配設成可在交叉部分 上方水平移動，該第一切換導軌係與第一引導部中配設於 第二搬運路徑側者抵接而將搬運容器沿著第一搬運路徑進 行引導，該第二切換導軌係與第一引導部中配設於第一搬 @運路徑侧者抵接而將搬運容器沿著第二搬運路徑進行引 導。 此外，導軌亦可配設在較搬運滾輪更靠搬運路徑之搬 運方向之寬度方向外側。 此外，搬運滾輪亦可配設在較導軌更靠搬運路徑之搬 運方向之寬度方向外側。 此外，第一引導部亦可具有引導滾輪，該引導滾輪係 具備朝垂直方向延伸之旋轉軸。 此外，第二引導部亦可具有引導滚輪，該引導滾輪係 5 321618 201029901 具備朝垂直方向延伸之旋轉轴。 此外，第一引導部亦可為呈平板狀之凸緣（flange)之 側面。 此外，第二引導部亦可為搬運容器之側面部。 [發明之功效] 依據本發明，僅需移動切換導件之位置，即可簡單且 確實地切換搬運容器之搬運方向（直進與岔道）。此外，即 使連續搬運複數個搬運容器時，此等複數個搬運容器亦不 需暫時停止，而可使其保持原速度連續地直進或岔道運送。 ® 【實施方式】 以下參照圖式說明本發明之岔道裝置之實施形態。 第1圖係為顯示第一實施形態之岔道裝置之概略構成 斜視圖。 第2圖係為在第一實施形態之岔道裝置所使用之搬運 容器之斜視圖。 搬運容器10係為將例如複數個圓板狀半導體晶圓D ^ (搬運物）排列收容成複數段而進行搬運之容器。此搬運容 器10係構成為包括：收容箱體（case)12，形成有複數段卡 止溝，用以將半導體晶圓D兩侧卡止於兩側内部側壁；及 蓋體14，用以將該收容箱體12之開口部13予以密閉。 收容有複數個半導體晶圓D之搬運容器10，係將密閉 之開口部13朝橫向順著箭頭方向運送於後述之主搬運路 徑S或岔道搬運路徑B。 在搬運容器10之上面T，於藉由支柱保持為固定高度 6 321618 201029901 並朝寬度方向延伸之矩形凸緣15之兩側，於搬運方向之前 • 後按預定間隔以旋轉自如方式分別支撐有一對第丨引導滾 ο 輪G1、G2。此外，在搬運容器1〇之下面Ε，亦於搬運方向 之2側，在與第1引導滾輪G1、G2相同之位置，朝搬運方 向前後地按預定間隔以旋轉自如之方式支撐有一對第2引 導滾輪G3、G4(參照第3A圖、第3B圖、第4A圖及第4B 圖）。此等引導滾輪（Π、G2、G3、G4均具備朝垂直方向延 伸之旋轉軸RA(參照第3B圖），且繞著此旋轉軸旋轉。 第1引導滾輪Gl、G2亦可為平板狀凸緣15之侧面， 而不形成滾輪狀。此外，第2引導滾輪G3、G4亦 (蓋龍之側面下部141或 =之收容箱體12之背面下部121)，而不作成滾輪狀。 ’士、P ’在第1實施形態中’無引導滾輪以、Μ或⑺、Μ =二Γ5之側面或搬運容器10之側面部可發揮與上述 引導滾輪G1至G4相同之功能。 ❹ =3A圖及第3B圖係為本發明第一實施形態之岔道襄 =其係顯示將搬運容器之運送方向切換為直進方向之狀 第4A圖及第4B圖係為本發明第一實 置T第將:ΓΓ運送方向切換為岔道二 路徑S盘岔道搬運=72道裝置1U配設於主搬運 用 用以將搬運容㈣從該线運㈣係 321618 7 201029901 在主搬運路徑S以及岔道搬運路徑B之架體（frame)16 之兩内侧面，朝搬運方向連續地配設有複數個搬運滾輪 R1A、R2A。搬運滾輪R1A、R2A係由驅動滾輪DR與可自由 旋轉之自由滾輪FR所構成，且以與配設於搬運容器10下 面之第2引導滚輪G3、G4之寬度方向内側抵接之方式配設。 此外，在主搬運路徑S與岔道搬運路徑B交叉之岔道 區域BA1(由二點鏈線所包圍之區域）以外之區域，於搬運 滾輪R1A、R2A之外側，係沿著運送方向設有用以將搬運容 器10下面之第2引導滾輪G3、G4朝運送方向引導之導執 ❿ TG卜 在岔道區域BA1中，主搬運路徑S位於岔道搬運路徑 B側之搬運滚輪R2A，並不存在於與岔道搬運路徑B之兩搬 運滾輪R3A、R4A交叉之範圍。此外，岔道搬運路徑B位於 主搬運路徑S側之搬運滾輪R3A，並不存在於與主搬運路 徑S之兩搬運滾輪R1A、R2A交叉之範圍。 岔道裝置1A係具備由上面觀看為大致三角形之切換 @ 導件2A，該切換導件2A則藉由未圖示之驅動源朝橫貫主 搬運路徑S與岔道搬運路徑B之間之方向進退移動（水平移 動）。 切換導件2A係具備：直線狀之第1切換導軌SG1，其 係與搬運容器10之第1引導滾輪Gl、G2中配設於岔道搬 運路徑B侧之引導滾輪G2抵接而沿著直進方向引導；及圓 弧狀之第2切換導軌BG1，其係與第1引導滾輪Gl、G2中 配設於主搬運路徑S側之引導滾輪G1抵接而沿著岔道方向 321618 201029901 引導。再者’第1切換導軌SG1與第2切換 別以位在切換導件2A外㈣之方式 接著參照第3A圖、第3B圖、第4a 第一實施形態之岔道襞置1A之作用。 第4B圖說明 首先，將搬運容器1〇在主搬運路徑5上 時’如第3A圖所示，係藉由將切換導件^進運送 S侧移動至岔道搬運路徑 搬運路徑 φ 第1引導滾輪運容器10上面T之 第i引^袞輪G卜G2中之岔道路徑側 々 第1切換導執SG卜 引導至 如第3B圖所示’於搬運容器1〇 中直進時’搬運容器1G之上面τ之岔道路側引導滾= 會被引導至第1切換導執SG1。因此，得以防止搬運容号 10朝岔道路㈣而使搬運容器1Q在維持水平姿勢 之狀態下藉由錢滾輪Ru之驅動力沿著行進方向順暢地 運送。 φ 在此’如第1圖所示’將搬運容器10上面T之第1引 導滾輪G1與Gl、G2與G2之中心間之距離均設為L。此外， 如第3A圖所示，將主搬運路徑s及岔道搬運路徑B之導執 TG1彼此交又部份之導軌TG1之端部設為符號TG10、且將 第1切換導執SG1在搬運容器10的運送方向後方侧之端部 設為SG10。此時，若此等端部TG1〇、SG10間之距離S1為 S1<L，則在搬運前後方向存在有2個引導滚輪G2、G2情 形下，於其中之一引導滾輪G2通過間歇部時，搬運容器 10亦不會與第1切換導軌SG1碰撞，而可藉由其他3個引 9 321618 201029901 導滾輪G3 ' G3、G2順暢地運送。 此外，引導滾輪G2為1個日矛，只要將切換導件2八 尺寸設定為較大，以使第1切換導軌SG1之端部SGl〇之 置大致與導軌TG1之端部TG10义位置一致。 4 此外，如第4A圖所示，搬速容器10從主撖運略秤s 岔道運送至岔道搬運路徑B時，係使切換導件2A從岔道搬 運路徑B側水平移動至主搬運絡授S側。結果，搬運容哭 10上面之第1弓丨導滾輪Gl ' G2中之主搬運路徑弓丨導滾輪 G1係藉由第2切換導執bgi引淨。 另外，只要將第4A圖之間取郄β1之距離設成B1<l， 或將第2切換導執BG1設置為輯大，則可達成與前述相同 之功能，其理甚明，自不待言。 亦即，如第4B圖所示，搬逢谷器在岔道區域“I 中岔道於岔道搬運路徑B側時，#運容器10上面T之主搬 運路控弓丨導滚輪G1係被引導至第2切換導軌BG1。因此， 得以防止搬運容器1〇朝主搬運絡徑側傾倒，而使搬運容器 10在維持水平姿勢之狀態下藉兩摊運滾輪側之驅動滾 輪DR 著岔道搬運路徑b之行進方向順暢地運送。 連續搬運複數個搬運容 亦不需暫時停止，而可 道方向移動。 如此，僅需使切換導件2A水乎移動，即可簡單且確實 地切換搬運容器10朝直進與岔道方向之移動。因此，即使201029901 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a tunnel device. The present application claims priority from Japanese Patent Application No. 2008-305279, filed on Nov. 28, 2008, the content of which is incorporated herein by reference. [Prior Art] Conventionally, a turntable has been used as a tunnel device for switching the conveyance direction of a conveyed object conveyed along a conveyance path such as a roller conveyor to the ramp conveyance path side (refer to the patent document). 1). [Prior Art] [Patent Document 1] Japanese Patent No. 3749176 [Disclosure] [Problems to be Solved by the Invention] 转盘 The turntable switches the transport container transported on the transport path to the ramp transport path side. At this time, it is necessary to rotate the carrier while it is placed on the turntable. Therefore, when the turntable is rotated, the conveyance efficiency is lowered because the conveyance (transport) of the subsequent conveyance is stopped and stagnated in the conveyance path. The present invention has been made in view of the above circumstances, and an object thereof is to provide a tunnel device which can smoothly and surely switch a conveyance direction without stagnation of a flow of a conveyance container. [Solution to Problem] 4 321 618 201029901 In the ramp device of the present invention, the following means are used to solve the above problem. The present invention is a tunneling device for transporting a transporting container that transports a transported object, and is characterized in that it includes a first guide portion that is disposed in a width direction orthogonal to a transport direction of the transport container. The two guide portions are disposed on both sides in the width direction orthogonal to the conveyance direction of the conveyance container, and the plurality of conveyance rollers are disposed along the intersection of the first conveyance path and the second conveyance path in the conveyance path. The conveyance direction is disposed on both sides in the width direction of the conveyance direction to support the conveyance container to carry the conveyance; the guide is disposed along both sides in the width direction of the conveyance direction other than the intersection portion in the conveyance path, and is in contact with the second guide portion And guiding the switching guide, having a first switching guide and a second switching rail, and configured to be horizontally movable above the intersection portion, the first switching rail and the first guiding portion being disposed in the second handling The side of the path abuts and guides the transport container along the first transport path, and the second switching rail and the first guide portion are disposed on the first transport path side. The carrier is guided to follow the second transport path. Further, the guide rail may be disposed outside the width direction of the conveyance path of the conveyance roller. Further, the conveyance roller may be disposed outside the width direction of the conveyance path of the conveyance path. Further, the first guide portion may have a guide roller having a rotation shaft extending in the vertical direction. Further, the second guiding portion may have a guiding roller, and the guiding roller system 5 321 618 201029901 has a rotating shaft extending in the vertical direction. Further, the first guiding portion may be a side surface of a flat flange. Further, the second guiding portion may be a side portion of the carrying container. [Effect of the Invention] According to the present invention, the conveyance direction (straight forward and ramp) of the conveyance container can be simply and surely switched by simply moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the plurality of transport containers need not be temporarily stopped, but can be continuously fed straight or ramped at the original speed. ® Embodiments Hereinafter, embodiments of the tunnel device of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a schematic configuration of a tunnel device of a first embodiment. Fig. 2 is a perspective view showing a conveyance container used in the tunnel device of the first embodiment. The transport container 10 is a container that transports, for example, a plurality of disk-shaped semiconductor wafers D ^ (transported objects) in a plurality of stages. The transport container 10 is configured to include a case 12 formed with a plurality of locking grooves for locking both sides of the semiconductor wafer D to the inner side walls, and a cover 14 for The opening 13 of the housing case 12 is sealed. The transport container 10 in which a plurality of semiconductor wafers D are accommodated is transported to the main transport path S or the tunnel transport path B, which will be described later, in the direction of the arrow in the horizontal direction. On the upper surface T of the transport container 10, on both sides of the rectangular flange 15 which is held at a fixed height of 6 321 618 201029901 by the struts and extending in the width direction, respectively, a pair of rotatably supported at a predetermined interval before and after the transport direction The third guide rolls the wheels G1 and G2. In addition, in the lower side of the conveyance container, a pair of seconds are rotatably supported at predetermined intervals in the conveyance direction at the same position as the first guide rollers G1 and G2 on the side of the conveyance direction. Guide rollers G3 and G4 (see FIGS. 3A, 3B, 4A, and 4B). These guide rollers (Π, G2, G3, and G4 each have a rotation axis RA extending in the vertical direction (refer to FIG. 3B), and are rotated around the rotation axis. The first guide rollers G1 and G2 may also be flat convex. The side of the rim 15 is not formed in the shape of a roller. Further, the second guide rollers G3 and G4 are also (the lower side portion 141 of the cover dragon or the rear lower portion 121 of the storage case 12 of the cover), and are not formed into a roller shape. In the first embodiment, the side of the side of the transport container 10 or the side surface of the transport container 10, which has no guide roller, or the side of the transport roller 10, can exhibit the same function as the guide rollers G1 to G4. ❹ = 3A and 3B is the first embodiment of the present invention, and the fourth embodiment and the fourth embodiment of the present invention are the first embodiment of the present invention. The direction is switched to the ramp 2 path S-disc transport = 72-channel device 1U is arranged for the main transport to transport the transport capacity (4) from the line (4) 321618 7 201029901 in the main transport path S and the ramp transport path B ( Two inner sides of the frame 16 are continuously arranged in the conveying direction The transport rollers R1A and R2A are composed of a drive roller DR and a freely rotatable free roller FR, and are offset from the width direction of the second guide rollers G3 and G4 disposed under the transport container 10. In addition, the area other than the ramp area BA1 (the area surrounded by the two-point chain line) where the main transport path S intersects the ramp transport path B is on the outer side of the transport rollers R1A and R2A. The conveyance direction is provided with a guide roller TG for guiding the second guide rollers G3 and G4 below the conveyance container 10 in the conveyance direction, and the conveyance roller R2A of the main conveyance path S on the side of the ramp conveyance path B, and It does not exist in the range in which the conveyance rollers R3A and R4A of the ramp conveyance path B intersect. Moreover, the ramp conveyance path B is located in the conveyance roller R3A on the side of the main conveyance path S, and does not exist in the conveyance roller R1A with the main conveyance path S. The R2A crossover range. The ramp device 1A includes a switching @guide 2A that is substantially triangular in plan view, and the switching guide 2A is traversed to the main transport path S by a driving source (not shown). The switching guide 2A includes a linear first switching rail SG1 that is disposed on the ramp of the first guide rollers G1 and G2 of the transport container 10. The guide roller G2 on the transport path B side abuts and guides in the straight direction; and the arc-shaped second switching rail BG1 and the guide roller disposed on the main transport path S side of the first guide rollers G1 and G2 G1 is abutted and guided along the ramp direction 321618 201029901. Further, the first switching rail SG1 and the second switching are placed outside the switching guide 2A (4), and then refer to FIG. 3A, FIG. 3B, and 4a first. The role of the channel device 1A of the embodiment. 4B, when the transport container 1 is smashed on the main transport path 5, as shown in FIG. 3A, the transfer guide is moved to the transport side S side to the ramp transport path transport path φ. The first switching guide SG of the i-th wheel of the transport container 10 on the upper side of the transport wheel 10, the second switch guide SG, is guided to the 'transport container 1G' when the transport container 1 is straight as shown in FIG. 3B. The road side guide roll = above τ will be guided to the first switching guide SG1. Therefore, it is possible to prevent the transport container 10Q from being transported in the traveling direction by the driving force of the money roller Ru while maintaining the horizontal posture while the transport container 10 is facing the road (4). Here, as shown in Fig. 1, the distance between the first guide rollers G1 of the upper surface T of the transport container 10 and the centers of G1, G2 and G2 is set to L. Further, as shown in FIG. 3A, the end portion of the guide rail TG1 in which the main conveyance path s and the guide TG1 of the ramp conveyance path B are overlapped with each other is denoted by reference numeral TG10, and the first switching guide SG1 is placed in the conveyance container. The end of the rear side of the transport direction of 10 is set to SG10. In this case, when the distance S1 between the end portions TG1 〇 and SG10 is S1 < L, when there are two guide rollers G2 and G2 in the transport front-rear direction, when one of the guide rollers G2 passes through the intermittent portion, The transport container 10 does not collide with the first switching rail SG1, but can be smoothly transported by the other three guides 321 618 201029901 guide rollers G3 ′ G3 and G2. Further, the guide roller G2 is a single spear, and the size of the switching guide 2 is set to be large so that the end portion SG1 of the first switching rail SG1 substantially coincides with the position of the end portion TG10 of the guide rail TG1. 4, as shown in Fig. 4A, when the transport container 10 is transported from the main transport scale s ramp to the ramp transport path B, the switching guide 2A is horizontally moved from the ramp transport path B side to the main transport node S. side. As a result, the main transport path bow guide roller G1 in the first bow guide roller G1 'G2 on the top of the 10th guide roller G1 is guided by the second switch guide bgi. Further, as long as the distance between 第β1 in Fig. 4A is set to B1<l, or the second switching guide BG1 is set to be large, the same function as described above can be achieved, and it goes without saying. In other words, as shown in Fig. 4B, when the reloading device is in the ramp area "I is on the side of the ramp transport path B, the main transport path guide roller G1 on the top of the transport container 10 is guided to the first 2. The guide rail BG1 is switched. Therefore, it is possible to prevent the conveyance container 1 from tilting toward the main conveyance path side, and the conveyance container 10 is driven by the drive roller DR on the side of the distribution roller on the side of the conveyance path b while maintaining the horizontal posture. The direction is smoothly transported. The plurality of transporting contents are continuously transported without stopping temporarily, and can be moved in the direction of the road. Thus, the transporting container 10 can be simply and surely switched to the straight forward and the ramp by simply moving the switching guide 2A. Direction of movement. Therefore, even
可使其保持原速度連續地朝直進或岔 接著參照第5A圖、 第6A圖、第6B圖及第 321618 10 201029901 6C圖說明本發明第二實施形態之岔道裝置。 另外，關於與第一實施形態相同之構成部件，係附上 相同符號並省略其說明。 第5A圖、第5B圖係為本發明第二實施形態之岔道裝 置，其係顯示將搬運容器之運送方向切換為直進方向之狀 態圖。 第6A圖、第6B圖及第6C圖係為本發明第二實施形態 之岔道裝置，其係顯示將搬運容器之運送方向切換為岔道 ®方向之狀態圖。 在第5A圖、第5B圖、第6A圖、第6B圖及第6C圖中， 收容有複數個半導體晶圓D之搬運容器20，其容器本體係 形成與第一實施形態相同之構成。 在搬運容器20之上面T，係於保持為固定高度之矩形 凸緣17兩側，於搬運方向前後按預定間隔以旋轉自如之方 式分別支撐有一對第1引導滾輪Gil、G12。此外，在搬運 φ容器20之下面E，亦於搬運方向兩側，在與第1引導滾輪 Gil、G12相同之位置，朝搬運方向前後地按預定間隔以旋 轉自如之方式支撐有一對第2引導滾輪G13、G14。此等引 導滾輪G1卜G12、G13、G14均具備朝垂直方向延伸之旋轉 轴RA(參照第5B圖），且繞著此旋轉軸旋轉。 另外，在第2實施形態中，無引導滚輪Gil、G12時， 凸緣15之側面可發揮與上述引導滾輪Gil、G12相同之功 能。 另一方面，在主搬運路徑S及岔道搬運路徑B之架體 11 321618 201029901 18之兩内側面，係朝搬運方向連續地配設有複數個搬運滾 輪RIB、R2B。此搬運滾輪RIB、R2B係由驅動滾輪DR與可 自由旋轉之自由滾輪FR所構成，且以接近配設於搬運容器 20下面之第2引導滾輪G13、G14之寬度方向外側的方式 配設。 此外，在主搬運路徑S與岔道搬運路徑B交叉之岔道 區域BA2(由二點鏈線所包圍之區域）以外之區域，於搬運 滾輪RIB、R2B之内側，係沿著運送方向設有用以將搬運容 器20下面之第2引導滾輪G13、G14朝運送方向引導之導 ❹ 執 TG2 〇 在岔道區域BA2中，主搬運路徑S位於岔道搬運路徑 B側之搬運滾輪R2B並不存在於與岔道搬運路徑B之兩搬 運滚輪R3B、R4B交叉之範圍。此外，岔道搬運路徑B位於 主搬運路徑S側之搬運滾輪R3B並不存在於與主搬運路徑 S之兩搬運滾輪RIB、R2B交叉之範圍。 岔道裝置1B係具備切換導件2B，該切換導件2B係藉 @ 由未圖示之驅動源朝橫貫主搬運路徑S與岔道搬運路徑B 間之方向進退移動。 切換導件2B係具備：直線狀之第1切換導軌SG2，其 係與搬運容器20上面T之第1引導滾輪Gil、G12中配設 於岔道路徑侧之引導滾輪G12抵接，而沿著直進方向引 導；及圓弧狀之第2切換導執BG2，其係與第1引導滾輪 Gil、G12中配設於主搬運路徑S側之引導滾輪G11抵接， 而沿著岔道方向引導。再者，第1切換導軌SG2與第2切 12 321618 201029901 換導軌BG2係分別以位在切換導件2B外側面之方式一體構 成。 接著參照第5A圖、第5B圖、第6A圖、第6B圖及第 6C圖說明第二實施形態之岔道裝置1B之作用。 首先，將搬運容器20在主搬運路徑S上進行直進運送 時，如第5A圖所示，係藉由使切換導件2B從主搬運路徑 S側移動至岔道搬運路徑B側，使搬運容器20上面T之第 1引導滚輪Gil、G12中之岔道路徑侧引導滚輪G12引導至 ®第1切換導執SG2。 亦即，如第5B圖所示，於搬運容器20在岔道區域BA2 中直進時，搬運容器20之上面T之岔道路側引導滚輪G12 係被引導至第1切換導執SG2。因此，得以防止搬運容器 20朝岔道搬運路徑B侧傾倒，而使搬運容器20在維持水 平姿勢之狀態下藉由搬運滾輪R1B之驅動力沿著行進方向 順暢地運送。The crucible device according to the second embodiment of the present invention can be described with reference to Figs. 5A, 6A, 6B, and 321618 10 201029901 6C. The same components as those of the first embodiment are denoted by the same reference numerals and their description will not be repeated. Fig. 5A and Fig. 5B are diagrams showing a tunnel device according to a second embodiment of the present invention, which is a view showing a state in which the conveyance direction of the conveyance container is switched to the straight direction. Fig. 6A, Fig. 6B, and Fig. 6C are diagrams showing a state in which the conveyance direction of the conveyance container is switched to the tunnel direction by the tunnel device according to the second embodiment of the present invention. In the 5A, 5B, 6A, 6B, and 6C, the carrier container 20 in which a plurality of semiconductor wafers D are accommodated has the same configuration as that of the first embodiment. The upper surface T of the conveyance container 20 is supported on the both sides of the rectangular flange 17 which is held at a fixed height, and the pair of first guide rollers Gil and G12 are rotatably supported at predetermined intervals in the conveyance direction. In addition, in the lower surface E of the conveyance φ container 20, a pair of second guides are rotatably supported at predetermined intervals in the conveyance direction at the same position as the first guide rollers Gil and G12 on both sides in the conveyance direction. Rollers G13, G14. Each of the guide rollers G1, G13, and G14 has a rotation axis RA (see Fig. 5B) extending in the vertical direction, and is rotated about the rotation axis. Further, in the second embodiment, when the guide rollers Gil and G12 are not provided, the side faces of the flange 15 can exhibit the same functions as those of the guide rollers Gil and G12. On the other hand, on the inner side surfaces of the main conveyance path S and the frame conveyance path B of the frame body 11 321 618 201029901 18, a plurality of conveyance rollers RIB and R2B are continuously arranged in the conveyance direction. The conveyance rollers RIB and R2B are constituted by the drive roller DR and the freely rotatable free roller FR, and are disposed so as to be close to the outer side in the width direction of the second guide rollers G13 and G14 disposed under the conveyance container 20. Further, in a region other than the tunnel region BA2 (the region surrounded by the two-dot chain line) where the main conveyance path S and the tunnel conveyance path B intersect, the inside of the conveyance rollers RIB and R2B is provided along the conveyance direction for The second guide rollers G13 and G14 on the lower side of the transport container 20 guide the transport guide TG2 in the transport direction, and the transport roller R2B on the bypass transport path B side of the main transport path S does not exist in the ramp transport path. The range of the intersection of the two carrying rollers R3B and R4B. Further, the conveyance roller R3B on the side of the main conveyance path S on the side conveyance path B does not exist in a range intersecting the conveyance rollers RIB and R2B of the main conveyance path S. The bypass device 1B includes a switching guide 2B that moves forward and backward in a direction crossing the main conveyance path S and the tunnel conveyance path B by a drive source (not shown). The switching guide 2B includes a linear first switching rail SG2 that abuts on the guide roller G12 disposed on the ramp path side of the first guide rollers Gil and G12 on the upper surface T of the transport container 20, and follows the straight forward The second guide switch BG2 that is in the arc shape is in contact with the guide roller G11 disposed on the main conveyance path S side of the first guide rollers Gil and G12, and is guided along the ramp direction. Further, the first switching rail SG2 and the second slit 12 321618 201029901 change rail BG2 are integrally formed so as to be positioned on the outer side surface of the switching guide 2B. Next, the action of the tunnel device 1B of the second embodiment will be described with reference to Figs. 5A, 5B, 6A, 6B and 6C. First, when the transport container 20 is transported straight on the main transport path S, as shown in FIG. 5A, the transport guide 20 is moved by moving the switching guide 2B from the main transport path S side to the ramp transport path B side. The ramp path side guide roller G12 of the first guide rollers Gil and G12 of the upper T is guided to the first switching guide SG2. That is, as shown in Fig. 5B, when the transport container 20 is straight in the tunnel area BA2, the road side guide roller G12 of the upper surface T of the transport container 20 is guided to the first switching guide SG2. Therefore, it is possible to prevent the conveyance container 20 from being tilted toward the tunnel conveyance path B side, and the conveyance container 20 is smoothly conveyed in the traveling direction by the driving force of the conveyance roller R1B while maintaining the horizontal posture.
φ 此外，如第6A圖所示，搬運容器20從主搬運路徑S 岔道運送至岔道搬運路徑B時，係使切換導件2B從岔道搬 運路徑B側移動至主搬運路徑S側，而使搬運容器20上面 之第1引導滚輪Gil·、G12中之主搬運路徑引導滾輪G11藉 由第2切換導執BG2引導。 另外，在交叉之處，直進用與岔道用之導軌TG2、TG2， 亦可如第6C圖所示延長舖設至交叉之位置。 亦即，如第6B圖所示，搬運容器20在岔道區域BA2 中搬運至岔道搬運路徑B側時，搬運容器20上面T之主搬 13 321618 201029901 運路徑引導滾輪G1係被引導至第2切換導軌BG2。因此， 得以防止搬運容器10朝主搬運路徑側傾倒，而使搬運容器 10在維持水平姿勢之狀態下藉由搬運滾輪R4B侧之驅動滾 輪DR沿著贫道搬運路徑B之行進方向順暢地運送。 如此，僅需使切換導件2B移動，即可簡單且確實地切 換搬運容器20朝直進與岔道方向之移動。因此，即使連續 地搬運複數個搬運容器20時，當然不需暫時停止此等複數 個搬運容器20，亦不需使其減速，而可使其保持原速度連 續地朝直進或念道方向移動。 以附帶效果而言，因為使搬運容器朝岔道彎曲内側傾 斜，因此亦可使容器内之半導體晶圓等物品不易因為離心 力而產生位置偏移。 上述實施形態中所示各構成構件之各形狀及組合等均 僅為一例，只要在不脫離本發明之主旨之範圍下，均可根 據設計要求作各種變更。 例如，如前所述，配設於搬運容器之上面乃至下面之 搬運方向前後之第1、第2引導滾輪亦可為不同位置。此 外，第1引導滾輪在搬運方向之寬度方向亦可分別具有至 少一個規格。 此外，在上述實施形態中，雖係說明將搬運容器之搬 運方向設為直進或岔道之情形，惟本發明之應用領域並不 限定於此。例如，亦可將本發明之岔道裝置應用在主搬運 路徑與岔道搬運路徑會合之部分。 (產業上之可利用性） 14 321618 201029901 依據本發明，僅需使切換導件之位置移動，即可簡單 且確實地切換搬運容器之搬運方向（直進與岔道）。此外， 即使連續地搬運複數個搬運容器時，此等複數個搬運容器 亦不需暫時停止，而可使其保持原速度連續地朝直進或岔 道方向搬運。 【圖式簡單說明】 第1圖係為顯示本發明第一實施形態之岔道裝置之概 略構成斜視圖。 ® 第2圖係為使用於本發明第一實施形態之岔道裝置之 搬運容器斜視圖。 第3A圖係為本發明第一實施形態之岔道裝置，其係顯 示將搬運容器之運送方向切換為直進方向之狀態圖。 第3B圖係為本發明第一實施形態之岔道裝置，其係顯 示將搬運容器之運送方向切換為直進方向之狀態圖。 第4A圖係為本發明第一實施形態之岔道裝置，其係顯 @示將搬運容器之運送方向切換為岔道方向之狀態圖。 第4B圖係為本發明第一實施形態之岔道裝置，其係顯 示將搬運容器之運送方向切換為岔道方向之狀態圖。 第5A圖係為本發明第二實施形態之岔道裝置，其係顯 示將搬運容器之運送方向切換為直進方向之狀態圖。 第5B圖係為本發明之第二實施形態之岔道裝置，其係 顯示將搬運容器之運送方向切換為直進方向之狀態圖。 第6A圖係為本發明第二實施形態之岔道裝置，其係顯 示將搬運容器之運送方向切換為岔道方向之狀態圖。 15 321618 201029901 _ \6B圖係為本發明第二實施形態之岔道裝置，其係顯 不將搬運容ϋ之運送方向切換為岔道方向之狀態圖。In addition, as shown in Fig. 6A, when the transport container 20 is transported from the main transport path S to the ramp transport path B, the switching guide 2B is moved from the ramp transport path B side to the main transport path S side, and the transport is performed. The main conveyance path guide roller G11 of the first guide rollers Gil· and G12 on the upper side of the container 20 is guided by the second switching guide BG2. Further, at the intersection, the guide rails TG2 and TG2 for the straight-forward and the ramp can be extended to the intersecting position as shown in Fig. 6C. That is, as shown in Fig. 6B, when the transport container 20 is transported to the ramp conveyance path B side in the ramp area BA2, the main transport 13 of the upper surface of the transport container 20 13321618 201029901 is guided to the second switch. Guide rail BG2. Therefore, it is possible to prevent the transport container 10 from being tilted toward the main transport path side, and the transport container 10 is smoothly transported along the traveling direction of the lean transport path B by the drive roller DR on the transport roller R4B side while maintaining the horizontal posture. Thus, the movement of the transport container 20 in the direction of the straight forward and the ramp can be simply and surely changed by simply moving the switching guide 2B. Therefore, even if a plurality of transport containers 20 are continuously transported, it is of course not necessary to temporarily stop the plurality of transport containers 20, and it is not necessary to decelerate them, and the original speed can be continuously moved in the straight forward or the sinus direction. In addition, since the conveyance container is inclined toward the inside of the curve bend, it is possible to prevent the position of the semiconductor wafer or the like in the container from being displaced due to the centrifugal force. The respective shapes, combinations, and the like of the respective constituent members shown in the above-described embodiments are merely examples, and various modifications can be made according to the design requirements without departing from the scope of the invention. For example, as described above, the first and second guide rollers disposed before and after the conveyance container or the lower conveyance direction may be at different positions. Further, the first guide roller may have at least one specification in the width direction of the conveyance direction. Further, in the above-described embodiment, the case where the conveyance direction of the conveyance container is a straight forward or a ramp is described, but the application field of the present invention is not limited thereto. For example, the ramp device of the present invention can also be applied to a portion where the main transport path meets the ramp transport path. (Industrial Applicability) 14 321 618 201029901 According to the present invention, the conveyance direction (straight forward and ramp) of the conveyance container can be easily and surely switched only by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the plurality of transport containers need not be temporarily stopped, but can be continuously transported in the straight forward or the squat direction at the original speed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a schematic configuration of a tunnel device according to a first embodiment of the present invention. Fig. 2 is a perspective view of a carrying container used in the tunnel device of the first embodiment of the present invention. Fig. 3A is a view showing a state in which the conveyance direction of the conveyance container is switched to the straight direction in the tunnel device according to the first embodiment of the present invention. Fig. 3B is a view showing a state in which the conveyance direction of the conveyance container is switched to the straight direction in the tunnel device according to the first embodiment of the present invention. Fig. 4A is a view showing a state in which the direction of conveyance of the conveyance container is switched to the direction of the tunnel, which is a tunnel device according to the first embodiment of the present invention. Fig. 4B is a view showing a state in which the conveyance direction of the conveyance container is switched to the ramp direction, which is the ramp apparatus according to the first embodiment of the present invention. Fig. 5A is a view showing a state in which the conveyance direction of the conveyance container is switched to the straight direction in the tunnel device according to the second embodiment of the present invention. Fig. 5B is a view showing a state in which the conveyance direction of the conveyance container is switched to the straight direction in the tunnel device according to the second embodiment of the present invention. Fig. 6A is a view showing a state in which the conveyance direction of the conveyance container is switched to the ramp direction, according to the tunnel device of the second embodiment of the present invention. 15 321 618 201029901 _ \6B is a boring device according to a second embodiment of the present invention, which is a state diagram in which the conveyance direction of the conveyance cassette is switched to the ramp direction.
第6C圖係為本發明之第二實施形態之盆道裝置，其係 ，不將搬運容器之運送方向切換為岔道方向之狀態圖。 【主要元件符號說明】 ΙΑ、1Β 岔道裝置 2Α、2Β 切換導件 10、20 搬運容器 12 收容箱體 13 14 開口部 蓋體 15 16、18 凸緣 架體 17 凸緣 121 收容箱體之背面下部 141 蓋體之側面下部 Β 岔道搬運路徑（第二搬運路徑） Bl 間歇部 BAl 、 ΒΑ2 岔道區域 BGl 、 BG2 第2切換導執 D 搬運物（半導體晶圓） DR 驅動滾輪 Ε 搬運容器之下面 FR 自由滾輪 16 321618 201029901 G1、G2、Gil、G12第1引導滚輪（第一引導部） G3、G4、G13、G14第2引導滾輪(第二引導部） L R1A'R2A> G1與G1、G2與G2之中心間之距離 ‘ RIB、R2B、R3A、R4A、R3B、R4B 搬運滾輪 RA 旋轉車由 S 主搬運路徑（第一搬運路徑） S1 距離 SGI 、 SG2 ® SG10 第1切換導軌 第1切換導軌SG1之端部 T 搬運容器之上面 TGI ' TG2 導執 TG10 導軌TG1之端部 ❿ 17 321618Fig. 6C is a view showing a state in which the conveyance direction of the conveyance container is switched to the tunnel direction, in the channel device according to the second embodiment of the present invention. [Description of main component symbols] ΙΑ, 1Β Ramp device 2Α, 2Β Switching guides 10, 20 Transport container 12 Storage case 13 14 Opening cover 15 16、18 Flange frame 17 Flange 121 Storing the lower part of the case 141 Lower side of the cover Β Path of the ramp (second transport path) Bl Intermittent part BAl, ΒΑ2 Ramp area BGl, BG2 2nd switch guide D Transporter (semiconductor wafer) DR Drive roller 下面 Transport container below FR Free Roller 16 321618 201029901 G1, G2, Gil, G12 1st guide roller (first guide) G3, G4, G13, G14 2nd guide roller (second guide) L R1A'R2A> G1 and G1, G2 and G2 Distance between the centers ' RIB, R2B, R3A, R4A, R3B, R4B Transport roller RA Rotating car by S main transport path (first transport path) S1 Distance SGI, SG2 ® SG10 1st switching rail 1st switching rail SG1 End T transport container above TGI ' TG2 guide TG10 rail TG1 end ❿ 17 321618