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TW201028702A - A parallel test switching device, a parallel test system and a parallel test method - Google Patents

A parallel test switching device, a parallel test system and a parallel test method Download PDF

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TW201028702A
TW201028702A TW98102230A TW98102230A TW201028702A TW 201028702 A TW201028702 A TW 201028702A TW 98102230 A TW98102230 A TW 98102230A TW 98102230 A TW98102230 A TW 98102230A TW 201028702 A TW201028702 A TW 201028702A
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test
parallel
sequential
parallel test
data
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TW98102230A
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Chinese (zh)
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TWI461712B (en
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Fu-Tai Chen
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King Yuan Electronics Co Ltd
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Abstract

The present invention relates to a parallel test switching device, a parallel test system and a parallel test method, and particularly relates to a parallel test switching device, a parallel test system and a parallel test method for an open test system. The present invention provides a simple parallel test switching device to help an open test system to perform parallel test without any complicated pre-compiler. The simple parallel test switching device has a parallel test macro. Therefore, the test cost can be reduced and test efficiency can be improved substantially.

Description

201028702 六、發明說明: 【發明所屬之技術領域】 本發明提供一種平行測試轉換裝置、平 統以及平行測試方法,特別是有關 試系統而實行平行測試的平行測試轉換放2 糸統以及平行測試方法。 、^置平订測忒 【先前技術】 統與;二採用的測試系 試系統,其較用 用者並無法對其加以修改或是編寫,即、封 , 測試系統;另-種則是開放給使用者。 測試韌體碼(code)編寫的系統,再依使 或疋 試程式或是測試韌體碼對半導體元件 ; 的開放式的測試系統。 叮只〗忒,即所謂 ❹ 由於半導體元件普及與多元化,越來越 的半導體元件被發展出來,因此,測試機台往往. 各種不同的半導體元件進行測試,而需要對不同邋 體元件使用不同的測試程式。因此,使用圓形介面 的測試系統此一封閉式系統顯然不敷使用,而開的 測試系統使用上的比重則日益增加。然而,大多 放式的測試系統只能提供單一半導體元件的测試,在二 一時間内僅能對一個半導體元件進行測試,需等一 半導體元件為測試完畢之前,才會對下一個半導體元 進行測試,即所謂的循序测試(Serial Test),但是放$ 在同一時間對多個半導體元件同時進行測試,即所^的 平行測試(Parallel Test)。因此,一般所使用的開放g測 3 201028702 t ί進行#序測試,而無法像封閉式的測試 二s可⑶多個半導體元件咖 導致統相比於封閉式測試系統 蜻,若要強行以現行的開放式系統實施平行測 i本邋加一前編譯器(pre-compiler)來處理同時對多 二ΐ?70件進行平行測試時所產生的資料與訊號傳 柿闲丄碭,而用以管理測試流程。但是,為了能夠應付 Ο 所撰寫的各種測試程式或是測試韌體碼,並且考 =…放測試流程與狀態,造成所需的前編譯器是很龐大 雜的’在開發上是报費時與困難的,並且在維護上 大的負擔’因此,使得整個開放式測試系統同樣 ’及传複雜而不易維護’所以使得整個測試成本大幅的增 加。 、,—其次,此一使用前編譯器的開放式測試系統,在 ,行測试進行時,每一半導體元件所採用記載有半導體 元件引腳(device pin)與測試通道(device channel)之間對 應關係的對應表皆為同一個並且為固定的,因此,導致 測試機台所使用的測試載板(load board)與探針卡(pr〇be card)上的走線設計受到限制,並且因此無法使平行測試 中的每一半導體元件都獲得最短與最佳的資料與訊號 傳遞路徑,導致開放式測試系統的訊號品質不良]舉^ 來說,在以使用前編譯器的開放式測試系統進行平&測 試時,每一測試區域(s i t e)分別對應並使用固定的測^ ^ 道,例如第一測試區域使用編號1-10的測試通道,= 第二測試區域使用編號11 -20的測試通道,由於每 . 試區域都使用同一對應表,所以當第一測試區域中 導體元件的引腳分別對應編號1-4的測試通道進行^ 4 201028702 输f區域中的半導體元件的引腳僅能對應 嚐韵J:二9^測試通道進行測試,而無法依據不同的測 忒载板或疋探針卡上的走線設計進行變更,更無法使每 一,試區域内的半導體元件對應不同的測試通道,而獲 知隶短與最佳的資料與訊號傳遞路徑。201028702 VI. Description of the Invention: [Technical Field] The present invention provides a parallel test conversion device, a flat test and a parallel test method, in particular, a parallel test conversion and a parallel test method for parallel testing of a test system . , ^ set flat test 忒 [previous technology] system and test system used by the test system, the user can not modify or write it, that is, seal, test system; the other is open To the user. Test the system written in the firmware code, and then use the open test system to test or test the firmware to the semiconductor component.叮 忒 忒 即 即 ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ ❹ Test program. Therefore, a closed system using a circular interface is obviously not suitable for use, and the specific gravity of the open test system is increasing. However, most of the test systems of the drop-off type can only provide testing of a single semiconductor component. Only one semiconductor component can be tested in two or two times. Before the semiconductor component is tested, the next semiconductor element is processed. The test, the so-called Serial Test, but puts the simultaneous testing of multiple semiconductor components at the same time, that is, the parallel test (Parallel Test). Therefore, the general use of the open g test 3 201028702 t ί to carry out the # sequence test, but can not be like the closed test two s can (3) multiple semiconductor components caused by the system compared to the closed test system, if forced to the current The open system implementation of the parallel test i plus a pre-compiler (pre-compiler) to deal with the simultaneous data and signal transmission of the parallel test of more than 70? Test process. However, in order to be able to cope with the various test programs written by Ο or to test the firmware code, and test the test process and state, the required pre-compiler is very large. And the burden of maintenance is large. Therefore, the entire open test system is equally 'and complicated and not easy to maintain', so the overall test cost is greatly increased. And, secondly, the open test system of the pre-compiler, when the line test is performed, each semiconductor component is recorded between a semiconductor device pin and a device channel. The correspondence tables of the correspondences are all the same and fixed, so the design of the traces on the test board and the probe card used by the test machine is limited, and thus cannot be The shortest and best data and signal transmission path is obtained for each semiconductor component in the parallel test, resulting in poor signal quality of the open test system. For example, it is flat in an open test system using a pre-compiler. When testing, each test area (site) corresponds to and uses a fixed test channel, for example, the first test area uses the test channel numbered 1-10, and the second test area uses the test channel numbered 11-20. Since each test area uses the same correspondence table, when the pins of the conductor elements in the first test area correspond to the test channels numbered 1-4, respectively, the test area is performed ^ 4 201028702 The pins of the semiconductor components can only be tested according to the test channel of the rhyme J: 2 9^, but cannot be changed according to the design of the traces on the different test boards or the probe cards, and it is impossible to make each test. The semiconductor components in the area correspond to different test channels, and the short and optimal data and signal transmission paths are known.

因,,亟需要一種平行測試系統、平行測試轉換裝置與 平行測試方法’使開放式測試系統可以在循序測試與g 行測試等測試模式進行切換,而在同一測試系統中提供 =測試與平行測試’並且無需使用龐大而複雜的前^ 澤益’更可以使平行測試中每一半導體元件的引腳分別 對應最佳的測試通道,而使其獲得最短與最佳的資料與 訊號傳遞雜’進而導朗試成本的降似及測試效^ 的增知。 【發明内容】 本發明之一目的為提供一種平行測試轉換裝置, 可以適用於各種開放式的測試系統,而用以做為循序測 試與平行測試等測試模式切換的簡單襞置,而使開放使 ❹ 用者編寫測試程式的開放式測試系統可以藉由一簡單 的裝置進行循序測試與平行測試之間的切換a,並且^時 提供平行測試中的每一半導體元件最佳的資料與訊號 傳遞路徑,進而降低測試成本以及增加測試效能 本發明之另一目的為提供一種平行測試系統,可 以對使用者所編寫的測試程式進行平行測試,而無需使 用龐大而複雜的前編譯器,並提供平行測試中的每一半 導體元件最佳的資料與訊號傳遞路徑,進而降低測試成 本以及增加測試效能。 201028702 # —目的為提供—種平行職方法,可 換為ί行ϋ ΐ系統中’將使用者所編寫的測試程式轉 =:=5程」而同時對數個半導體元件同時進行 si蔣、一每一半導體元件最佳的資料與訊號傳 遞路私,進而降低測試成本以及增加職效能。 Ο 述目的,本發明提供一種平行測試轉換裝 ί資試執行與結束控制單元、-平行測 :'#枓,之存放皁元以及一循序測試執行與結束控制 el。^中,平行測試執行與結束控制單元,用以將測 ϋ程轉換成平行賴而對多個半㈣元件進行平行 試二並且控制該平行測試的開始、執行與結束,而平 試> 料擷取存放單元,則用以將平行測試後所得到 血5料進行擷取與存放,而供後續測試進行資料的運算 ^判,。其次,循序測試執行與結束控制單元,則用以 試流程由平行測試轉換成循序測試而進行測試,並 ,制該循序測試的開始、執行與結束。此平行測試轉 二:置以簡單組成元件構建,而提供開放式測試系統進 序測試與平行測試之間的切換,而可以在開放式測 統中進行循序測試與平行測試兩種模式的測試,並 ^理同時對多個半導體元件進行平行測試時所產生 的^料與訊號傳遞的問題,而提供每一半導體元件最佳 祐2料與訊號傳遞路徑,而降低測試成本以及增加測試 双能。 根據上述目的,本發明提供一種平行測試系統,其 一但可以進行循序測試,更可以進行平行測試,其包含 =以控制半導體元件之測試之流程與運作的測試控 平公置、一用以進行猶序測試與平行測試之間的切換的 订測試轉換裝置、以及一用以接受該測試控制裝置所 6 201028702 提供之測試指令與該平行測試轉換裝置所 模式而執行測試的測試執行_。此—平;^ ^ 由-簡單的平行測試轉換褒置,例如—巨集指 可以將使用者所所編寫的測試程式或測試韌體 行測試流程而同時對數個半導體元件進行測·" 每一半導體元件最佳的資料與mg ^ ' ’、 試成本以及增加測試效能與城傳遞路径’而降低測 根據上述目的,本發明提供一種平行 而^ 吏用者所編寫的測試程式進行平行測試。 始巧:使用者編寫之測試程式,再依此 : :測,接著’將此測試流程轉換成一對多以 ’並且收集平行測試所量測之資料與;以千2 後,待所有半導體元件測試完畢後,即社 單而的將步驟’例“ φ 料與訊號傳遞路徑,而降低測試成本以 應用=放之功效在於提供-種 譯器,即可以將^用5去曰7取代龐大複雜的前編 碼以一 ‘ 歧測試㈣ 令成是勃;、裝置或步驟,例如一巨集指 指令步驟等’取代複雜而魔大並且開發 招,准j編寫益,而將循序測試流程轉換成平行測訧、、今 將降低測試成本與增加測試效^。 " 7 201028702 另外,本發明對比先前技術之另一功效於, 二種iic裝置、平行測試系統以及平行測t ί ’其每r半導體之位置與狀態提供*同的對應 it 導體元件引腳對應到最佳的測試通道, 藉此因的測試載板或探針卡而提供最佳的資料 ,並減少對測試餘或探針卡上走線設Therefore, you need a parallel test system, parallel test conversion device and parallel test method to enable the open test system to switch between test mode and g test, and provide test and parallel test in the same test system. 'And without the use of a large and complex front ^ Zeyi', the pins of each semiconductor component in the parallel test can be matched to the optimal test channel, so that the shortest and best data and signal transmission are obtained. The reduction of the cost of the trial and the increase of the test effect. SUMMARY OF THE INVENTION An object of the present invention is to provide a parallel test conversion device that can be applied to various open test systems, and is used as a simple device for switching between test modes such as sequential test and parallel test, and is made open.开放 The open test system in which the user writes the test program can perform the switching between the sequential test and the parallel test by a simple device, and provides the best data and signal transmission path for each semiconductor component in the parallel test. , thereby reducing the cost of testing and increasing the performance of the test. Another object of the present invention is to provide a parallel test system capable of parallel testing of test programs written by users without using a large and complicated pre-compiler and providing parallel testing. The best data and signal transmission path for each semiconductor component in the middle, which reduces the cost of testing and increases test efficiency. 201028702 #—The purpose is to provide a parallel method, which can be changed to ί ϋ ΐ ' 将 将 将 将 将 将 将 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 使用者 对 对 对 对 对 si si si si si si si si si si The best information and signal transmission of a semiconductor component reduces the cost of testing and increases job efficiency. For the purpose of the present invention, the present invention provides a parallel test conversion device, a test execution and end control unit, a parallel test: '#枓, a storage soap element, and a sequential test execution and end control el. In the parallel test execution and end control unit, the parallel test is performed to convert the test process into parallel and the parallel test of the plurality of half (four) components is performed and the start, execution and end of the parallel test are controlled, and the test is performed. The storage unit is used to capture and store the blood 5 obtained after the parallel test, and the subsequent test is used to calculate the data. Secondly, the sequential test execution and end control unit is used to test the parallel process from parallel test to sequential test, and to start, execute and end the sequence test. This parallel test turns into two: it is constructed with simple components, and provides switching between the open test system and the parallel test. In the open test, the test can be performed in both the sequential test and the parallel test. The problem of material and signal transmission generated when parallel testing of a plurality of semiconductor components is simultaneously performed, and the optimal material and signal transmission path of each semiconductor component is provided, thereby reducing the test cost and increasing the test dual energy. According to the above object, the present invention provides a parallel test system, which can perform parallel test, and can perform parallel test, which includes = test control for controlling the flow and operation of semiconductor components, and one for judging A test conversion device for switching between the sequence test and the parallel test, and a test execution _ for performing the test by the test command provided by the test control device 6 201028702 and the mode of the parallel test conversion device. This - flat; ^ ^ by - simple parallel test conversion device, for example - macro refers to the test program written by the user or test the firmware test process while measuring several semiconductor components ·" The best data for a semiconductor component and the mg ^ ' ', the test cost, and the increase of the test performance and the urban transfer path are reduced. According to the above object, the present invention provides a parallel test program for parallel testing by a user. It seems that the user writes the test program, and then:: test, then 'convert this test process into one-to-many' and collect the data measured by the parallel test; after all, test all semiconductor components After the completion, the company will simply step the 'example' φ material and signal transmission path, and reduce the test cost to apply = the effect of the release is to provide a translator, that is, you can replace the huge complex with 5 to 曰7 The pre-coding is converted into parallel test by a 'differential test (4), or by means of a device, such as a macro-instruction step, etc., which replaces the complex and magical and developmental tricks.訧,, now will reduce the cost of testing and increase the test efficiency. " 7 201028702 In addition, the present invention compares another effect of the prior art, two iic devices, parallel test systems and parallel test t ί ' The position and state provide the same as the corresponding it conductor component pin corresponds to the best test channel, thereby providing the best information due to the test carrier or probe card, and reducing the test or probe card Wiring set

【實施方式】 詳細的:t實施例詳細描述如下。然而’除了該 行。亦即,卜太^日f明還可以廣泛地在其他的實施例施 而以本發明不受已提出之實施例的限制, 圖示中的各元件或結構以單一元件或結 未不應以此作為有限定的認知,即如下之說明 可始》☆調數目上的限制時本發明之精神與應用範圍 多數個元件或結構並存的結構與方法上。再者, ^說明書中’各元件之不同部分並沒有完全依照尺寸 ' ,某些尺度與其他相關尺度相比或有被誇張或是簡 化,以提供更清楚的描述以增進對本發明的理解。而本 發明所沿用的現有技藝,在此僅做重點式的引用,以助 本發明的闡述。 參照第一 A圖,為本發明之一實施例的平行測試 系巧10的簡單示意圖,平行測試系統10包含一用以控 制半導體元件測試之流程與運作的測試控制裝置2〇、 一用以進行循序測試與平行測試之間切換的平行測試 骏置30、以及一用以執行半導體元件測試的測試 執行骏置40。其中,測試執行裝置40依據測試控制裝 置20所提供的測試指令與測試程式以及平行測試轉換 8 201028702 裝置30所提供的測試模式,而對半導體元件進行測試。 示),用二二測試程式平台(圏中未 ^測,式或是: 寫的,但並不以卜盔 ^驭疋从C程式語言編 t測試機台的種類。取適::式的需求或 台上編 符合此測試程式 寫的測試程以】二Τ: ί在測試程式平 (或測試建立—符合此測 與„ 3㈣提供财測試(Serial T⑽ 種=i:=r)=試模式,以及提供此兩 置30係由一平、、第一圖,平行測試轉換裝 丄 元甘33以及一循序測試執行與結束 Ο 單元1所成。其中,平行測試執行與結束控制 :則1起以將測試控制裝置20依照使用者所編寫^ ‘ίΪΐ所建立的測試流程,轉換成一可以同時測試數 +,體7〇件的平行測試。平行測試資料擷放^ mi摘取與存放平行測試中每—半導體 ί 否繼5的判斷依據。循序測試執行與結束;i —暗pa 是用以將測試流程由平行測試轉換成在同 二半導體元件進行測的試循序測試,並且 徑制循序測試的開始、執行與結束。 單亓t外’平行測試轉換裝s 30具有一同步測試旗號 早几35,用以依據當時測試狀態、測試流程或是測試 9 201028702 結果,而對一或多個半導體元件設定同步測試旗號,而 標示與決定那些半導體元件要進行同步測試,即標示與 決定要進行循序測試或平行測試的半導體元件。 其次’平行測試轉換裝置30還具有一測試通道自 動展延單元36,用以將測試流程中的測試項目展延並 對應至所有設定有同步測試旗號的半導體元件的測試 通道(device channel)以進行平行測試。其中,測試通道 自動展延單元36包含數個不同的對應表,每一對應表 皆s己載一半導體元件的各個引腳(pin)與各個測試通道 (device channel)之間的對應關係,並且每一對應表所記 載之對應關係皆不相同,使得進行每一半導體元件依其 位置與狀態找到合適的對應表,使得每一引腳可以與對 應之測試通道形成最佳的或是最短的訊號傳遞路徑,戋 是可以配合所使用之測試載板或是探針卡上的走 計,而降低對測試載板或是探針卡上走線設計的限制。 卞仃測試轉換裝置3〇還具有一量測資料存 放皁7G 37,用以在平行測試之中之後,一[Embodiment] Detailed: The t embodiment is described in detail below. However, except for the line. That is, the present invention may be widely practiced in other embodiments without being limited by the embodiments, and the various elements or structures in the drawings should not be This is a limited cognition, that is, the following description can be used to limit the number of restrictions. The spirit and scope of the present invention is the structure and method in which a plurality of elements or structures coexist. In addition, the various parts of the 'in the specification' are not in full accordance with the size ', and some of the dimensions are exaggerated or simplified compared to other related dimensions to provide a clearer description to enhance the understanding of the present invention. The prior art, which is used in the present invention, is only referred to herein by reference to the accompanying drawings. Referring to FIG. 1A, a simplified schematic diagram of a parallel test system 10 according to an embodiment of the present invention, the parallel test system 10 includes a test control device for controlling the flow and operation of semiconductor component testing, and A parallel test 30 for switching between sequential testing and parallel testing, and a test execution module 40 for performing semiconductor component testing. The test execution device 40 tests the semiconductor components according to the test command and test program provided by the test control device 20 and the test mode provided by the parallel test conversion 8 201028702 device 30. Show), use the two-two test program platform (not in the middle of the test, or: written, but not the use of the helmet ^ 驭疋 from the C programming language t test machine type. Appropriate:: The requirements or on-stage programming conforms to the test procedure written by this test program. Secondly: ί is in the test program level (or test established - in accordance with this test and „ 3 (four) provides financial test (Serial T (10) = i: = r) = test mode And providing the two sets of 30 series by a flat, first map, parallel test conversion device 甘 甘 甘 33 and a sequential test execution and end Ο unit 1. Among them, parallel test execution and end control: then 1 The test control device 20 converts into a parallel test that can simultaneously test the number + and the body 7 according to the test flow established by the user. The parallel test data is released and the mi test is stored and stored in each parallel test. —Semiconductor ί No. Based on the judgment of 5. Sequential test execution and end; i – dark pa is used to convert the test process from parallel test to test sequence test in the same two semiconductor components, and the beginning of the sequential test , execution and end. The 'parallel test conversion package s 30 has a synchronous test flag 35, which is used to set the synchronization test flag for one or more semiconductor components according to the current test state, test flow or test 9 201028702 results, and mark and determine those The semiconductor component is subjected to synchronous testing, that is, marking and determining the semiconductor component to be subjected to the sequential test or the parallel test. Next, the 'parallel test conversion device 30 further has a test channel automatic extension unit 36 for demonstrating the test project in the test flow. The test channel corresponding to all the semiconductor components set with the synchronous test flag is extended for parallel testing, wherein the test channel automatic extension unit 36 includes several different correspondence tables, each of which corresponds to Correspondence between each pin of a semiconductor component and each device channel, and the correspondence relationship recorded in each correspondence table is different, so that each semiconductor component is found according to its position and state. A suitable correspondence table allows each pin to form the most with the corresponding test channel Or the shortest signal transmission path, which can be used in conjunction with the test carrier or the probe card used to reduce the restrictions on the test carrier or the design of the trace on the probe card. The conversion device 3〇 also has a measurement data storage soap 7G 37 for use in parallel testing,

ϊί ί*二包、3數個資料存取區(圖中未示),每-資料 之量測資料與職結果。,存所對應之+導體讀 轉換祕时,平行測試 測試執行裝置40所執#1^ 所建立之測試流程與 201028702 試系統10,中的平行測試轉換裝置3〇係為測試控制裝 置2〇’的一部份,而設置於測試控制裝置20,中。 前述平行測試系統10與10,之運作方式如下:在使 f、者於測試控制裝置20或20,編寫好測試穋式或是測 f韌體碼之後,測试控制裝置20或20,會依測試程式或 ,測試韌體碼建立一對單一半導體元件進行測試的測 Ϊ流f,並將其傳送至平行測試轉換裝置3〇中,而同 ,測試控制裝置2〇或2〇,會直接對測試執行裝置40或 疋經由平行測試轉換裝對測試執行裝置4 〇下達執 行測試指令。 姓接著’平行測試轉換裝置30中的平行測試執行與 〜,控制單元32會將此一測試流程自動轉換成一平行 f試,程,而同步測試旗號單元35則設定同步測試旗 ^於母一半導體元件或是設定於需要進行平行測試的 ^導體元件,而做為進行同步測試之半導體的標示。平 ,測試執行與結束控制單元32則藉由此一同步測試旗 號的設定來選定與標示那些半導體元件要進行平行測 ⑩試。 一 然後,測試通道自動展延單元36會將測試流程中 =試項目自動展延,而使每一設定有同步測試旗號的半 體元件的測試通道對應這些測試項目,並且每一設定 $同步測試旗號的半導體元件依照各個不同的對應 丄而使其每-引腳皆對應一可以配合測試載板或是探 的制^線設計並獲得最短與最佳的訊號傳遞途徑 不合ί通道。因此,本發明之平行測試系統10盥1〇, 列ίΐΓί測試載板或是探針卡上的走線設計,或是對 Μ戰板歧騎卡上的鱗設計造魏制,而=是 11 201028702 適用於各種測試載板與探針卡,甚至靈活地運用各 試通道配合測試載板與探針卡上的走線,而獲得可以 短測試訊號的傳遞途徑,進而得到較佳的信號品質。、’ 接著,測試執行裝置4〇依據測試控制裝置2〇 20’提供之測試指令以及平行測試轉換裝置3〇提 ^ 試模$,以測試通道自動展延單元36所展延對^ 參 Φ 試通t對數個設定有同步測試旗號的半導體元g同’昧 進ϋ Ξ ϊ ’而未設^同步測試旗號的半導體轉則= 進行乂7=二在平行測試的同時或是之後,量測資料存放 ί元二2收集每一半導體元件的量測資料以i 果存於每_半導體元件對應的資‘ 隱’ p母-半導體元件個別專屬的資料存取區中。 i運算幻Γ齡而t導疋件的量測資料與測試結果進 分枝。舉例來說,若平耔孤仃測試 取之半導體元件的量測資^ 33操 進行測試分枝,或是若藉由:半ϊί 5¾,測試結果而判斷該半導體元工ϊ 知口則V止後續測試流程或是測試項目。件為- 測試等浪due都完成後*若還需要進行循序 行測試轉換裝置30 5 20’則傳遞循序測試指令給平 i 20或20,接收到j試執打裝5 40 °在測試控制襄 元35會對轉職指令後,同步測試旗號單 體7^件重新設定一同步測試旗號,但$ 12 201028702 在同一時間内僅對一個半導體元件設定同步測試旗 號’亦即在一個半導體元件完成測試前,不會設定同步 測試旗號於另一個半導體元件’因此,測試執行裝置 4〇在同一時間只會對同一個半導體元件進行測試。當 然’本發明之平行測試系統10與10’也可以依照測試需 求,而在一開始測試之時就進行上述之循序測試。Ϊί ί* Two packs, 3 data access areas (not shown), per-data measurement data and job results. The + conductor read conversion secret time corresponding to the deposit, the test flow established by the parallel test test execution device 40 and the parallel test conversion device 3 in the 201028702 test system 10 are the test control device 2' A part of it is provided in the test control device 20. The foregoing parallel test systems 10 and 10 operate in the following manner: after the test device 20 or 20 is programmed, the test control device 20 or 20 is prepared, and the control device 20 or 20 is Test program or test firmware code to establish a pair of single semiconductor components for testing the measured turbulence f, and transfer it to the parallel test conversion device 3, and the test control device 2 or 2 〇 will directly The test execution device 40 or 疋 executes the test command to the test execution device 4 via the parallel test conversion device. The last name is followed by the parallel test execution in the parallel test conversion device 30. The control unit 32 automatically converts this test flow into a parallel f test, and the synchronous test flag unit 35 sets the synchronous test flag to the mother-semiconductor. The component is either set to the conductor component that needs to be tested in parallel, and is used as a mark for the semiconductor to be tested synchronously. The test execution and end control unit 32 selects and tests those semiconductor components to be tested in parallel by the setting of the synchronization test flag. Then, the test channel automatic extension unit 36 will automatically extend the test process = test items, and each test channel of the half-body component set with the synchronous test flag corresponds to the test items, and each set $ synchronization test The semiconductor components of the flag are corresponding to each different pin, and each pin can be matched with the test carrier or the device to obtain the shortest and best signal transmission path. Therefore, the parallel test system of the present invention 10盥1〇, ΐΓίΐΓί test the routing design on the carrier board or the probe card, or the design of the scale on the Μ 歧 歧 骑 , , , The 201028702 is suitable for a variety of test carrier boards and probe cards, and even flexibly uses each test channel to match the traces on the test carrier board and the probe card, thereby obtaining a transmission path for short test signals, thereby obtaining better signal quality. Then, the test execution device 4 〇 according to the test command provided by the test control device 2 〇 20 ′ and the parallel test conversion device 3 〇 模 模 , , , , , , , , , , 测试 测试 测试 测试 测试 测试 测试 测试 测试 测试 测试 测试 测试Passing a number of semiconductor elements that have a synchronous test flag set to the same as '昧进ϋ Ξ ϊ' and the semiconductor test without the synchronization test flag = 乂7=2 at the same time as or after the parallel test, the measurement data The measurement data of each semiconductor element is stored in the data access area of each of the semiconductor elements corresponding to the 'hidden' p-semi-semiconductor element. i. Calculate the measurement data of the phantom age and the lead component and the test results. For example, if the measurement component of the semiconductor component is tested, or if the test result is determined by the test result, the semiconductor component knows the V. Follow-up testing process or test project. The pieces are - after the test is completed, etc. * If you need to perform a sequential test conversion device 30 5 20' then pass the sequential test command to the flat i 20 or 20, receive the j test and play 5 40 ° in the test control襄After the transfer command, the synchronous test flag unit 7^ re-sets a synchronous test flag, but $12 201028702 sets the synchronous test flag for only one semiconductor component at the same time', that is, the test is completed in one semiconductor component. Previously, the synchronous test flag was not set to another semiconductor component. Therefore, the test actuator 4〇 will only test the same semiconductor component at the same time. Of course, the parallel test systems 10 and 10' of the present invention can also perform the above-described sequential test at the beginning of the test in accordance with the test requirements.

另外,本發明之平行測試執行與結束控制單元32 中可以包含一簡單的平行測武巨集指令來控制平行測 甙的開始、執行、與結束,以及收集平行測試的量測資 料與測試結果,例如: //平行測試開始 //使用者的測試程式 //取得資料In addition, the parallel test execution and end control unit 32 of the present invention may include a simple parallel measurement macro instruction to control the start, execution, and end of the parallel test, and collect the measurement data and test results of the parallel test. For example: //parallel test start / / user's test program / / get information

MacroParallelTestStart() //User’s Test Item 1MacroParallelTestStart() //User’s Test Item 1

MacroGetTestData_l () //User’s Test Item 2 "使用者的測試程式MacroGetTestData_l () //User’s Test Item 2 "user test program

MacroGetTestData_2() //取得資料 MacroParallelTestEndQ //平行測試結束 Ϊ6Γ,δ ^ ItCm 1 ^ User,s Item 2 寫ϊ測試程式中的不同的測試項目侧 施例中雖然只有兩個項目,佝卄 隹个1 —測試需求而增減。 Q不叫域,而是W 中,也可以包ϊ二行與結束控制單元 測試的開始、執行、與結束指令來控制; 的運算,例如: 以及循序測試的量測: 201028702MacroGetTestData_2 () / / Get the data MacroParallelTestEndQ / / Parallel test end Ϊ 6 Γ, δ ^ ItCm 1 ^ User, s Item 2 Write the test program in the different test items side of the example, although there are only two items, one 1 - Increase or decrease the demand for testing. Q is not called a domain, but is W, and can also be used to control the start, execution, and end instructions of the control unit, and the operations of the control unit, for example: and the measurement of the sequential test: 201028702

MacroSerialTestStart〇 //循序測試開始 //User’s Operation //取得資料後的運算 MacroSerial TestEnd〇 //循序測試結束 因此,根據上述實施例,本發明之平行測試系統 不但可以對使用者所編寫的測試程式循序測試,更可'以 進行平行測試’而以一簡單的平行測試轉換裝置習知 大複雜且不易開發與維護的前編譯器,並提供平行測 中的每一半導體元件最佳的資料與訊號傳遞路徑,藉^ 降低測試成本以及增加測試效能。 響 另外,本發明更提供一種平行測試轉換裴置可以 是用於各種開放式測試系統,而進行循序測試與平行 試之間的切換’而使各種開放式測試系統不但可以進2 循序測試’更可以進行平行測試,而縮短測試時間,並 增加測試效能。此平行測試轉換裝置之組成如第二圖所 示,其已於前文描述,因此,在此不再贅述。 其次,本發明更提供一種平行測試方式,可以在 ❹ 一開放式測試系統中進行平行測試,而不需要任何魔大MacroSerialTestStart〇//Sequential test start //User's Operation //Get the data after the operation MacroSerial TestEnd〇//Sequence test ends Therefore, according to the above embodiment, the parallel test system of the present invention can not only sequence the test program written by the user Testing, but also 'for parallel testing', with a simple parallel test conversion device, a complex compiler that is difficult to develop and maintain, and provides the best data and signal transmission for each semiconductor component in parallel measurement. Path, use ^ to reduce test costs and increase test performance. In addition, the present invention further provides a parallel test conversion device which can be used for various open test systems, and performs switching between sequential test and parallel test, and enables various open test systems to not only perform 2 sequential tests. Parallel testing can be performed to reduce test time and increase test performance. The composition of the parallel test conversion device is as shown in the second figure, which has been described above, and therefore will not be described herein. Secondly, the present invention further provides a parallel test method, which can perform parallel test in an open test system without any magic big

且複雜的前編譯器。參照第三圖,其為本發明之—實施 例之平行測試方法的流程圖。首先,在使用者編寫二測 試程式或是測試韌體碼於測試機台後,測試機台會開# 執行此測試程式或是測試韌體碼(步驟300)。^中:^ 測試程式或是測試韌體碼係以C程式語言編寫的,但並 不以此為限,而是可以依測試程式的需求或是測試機台 的種類而採取適合的程式語言進行編寫,並且此測古式程 式包含有多項測試項目。 'W 201028702 接著’測試機台會依此測試式建立 =件進行測試的測試流程(步驟搬),而 此平行測試流程而對;:j體:進 严執行 半導體元件的量^ '、、,口果(步驟308),然後,在每一本婁艚 ]穴 試後’結束此平行測試流程(步驟31〇)。 Ρ完成測 定^外二方法更包含一同步測試旗號設 2 在i 轉換成平行測試流程步驟中(㈣ 鵪 〇4),更包3 一同步測試旗號設定步驟,而設定同測 ^旗號於需要進行同步測試的半導體元件,藉此標示或 ^定進行平測試的半導體元件。再者,測試流程轉換成 平行測試流程步驟中(步驟3〇4)還包含一測試通道展延 步驟,用以將各項測試項目展延並對應至所有設定有同 步測試旗號試的半導體元件的測試通道(device Carmel),而使每一設定有同步測試旗號試的半導體元 件可以對應實施各種測試項目,而進行平行測試。 ^ 測試通道展延步驟則包含一提供對應表步驟,使得 务一設定有同步測試旗號的半導體元件依照各個不同 ,對應表,而使每一引腳皆對應一可以配合測試載板或 <探針卡上的走線設§十並獲得最短與最佳的訊號傳遞 途徑的測試通道。每一對應表記載每一半導體元件的各 個引腳(pin)與各個測試通道之間的對應關係,而提供每 〜半導體元件最短與最佳的測試訊號傳遞途徑進行來 平行測試。因此,使得本發明之平行測試方法不但不會 15 201028702 受限於測試載板或是探針卡上的走線設計, 載板或是探針卡上的走線設計造成限制,甚至靈活地;1 用各個測試通道配合測試載板與探針卡上的走線,$ 得可以縮短測試訊號的傳遞途徑,進而得到較佳的信= 另外,收集參與平行測試的每一半導體元件的量 測資料與測試結果的步驟(步驟3 08)更包含一提供提供 資料存放區步驟,用以提供每一設定有同步測試旗號^ 半導體元件對應之資料存放區,即提供每一進行平行測 ❿ 試的半導體元件個別專屬的資料存放區。其次,收集^ 與平行測試的每一半導體元件的量測資料與ϋ 的少驟(步驟308)還包含一資料存放步驟,而將每一半 導體元件的量測資料與測試結果存放至對應的資料存 放區° 本發明之平行測試方法更包含一運算與判斷步 驟,其由每一半導體元件對應的專屬資料存放/區擷取此 半導體元件的量測資料與測試結果而進行運算與判 _ 斷,炎依照使用者編寫之測試程式所提供之規格,判斷 每/半導體元件之測試狀態,而判定每一半導體元件是 否要進行後續測試或進行測試分枝再者,本發明之平 行測試方法子,含一重新設定同步測試旗號步驟,而重 新對需要進行後續測試或進行測試分枝的半導體元件 重新進行同步測試旗號設定,而標示與選定需要進行後 續測試或進行測試分枝的半導體元件。 另外,本,明之平行測試方法可以藉由一簡單的 平行測試巨集指令’來控制平行測試的開始、執行、與 結束’以及收集平行測試的量測資料與測試結果’此一 16 201028702 +仃測試巨#指令已於前文描述,因此,在此不再資述。 行循序完舒行職,接著進 試,並且也包含—i一測試步驟,用以進行循序測 同-時間内,僅對—丰^測試旗號設定步驟’用以在 循序導體元件而進行測試。此 ❿ 試的量測資料的^結束,以及以及循序測 描迷, -述循序測試巨集指令已於前文 測^ =發明所提供應祕開放式測試系統而實行平行 g的,卿臭裝置、平行測試系統以及平Si 以丨者所編寫㈣成㈣或是職勤體碼 或是換裝置或步驟,例如-巨集指令 難驟Λ,取代複雜而魔大並且開發困 程、^ ^ ’而將#序測試流程轉換成平行測試流 明可本㈣加測触率。科,本發 表,而使ί母^in 置與狀態提供不同的對應 板或探針卡而提供最ίίΐ料 計的限制、: 洛徑,並齡制試胁崎 ^圖式簡單說明】 示i圖'圖係為本發明—實施例之平行剛試系統的簡單 17 201028702 單示意圖 第二圖係為本發明另一實施例 簡單示意圖。 十什_ 殊的簡 第ϋ圖係為本發明另—實施例 不恩圆。 1 4丁 的 Η轉辏骏复 第三圖係為本發明—實施例之平行蜊气方 【主要元件符號說明】 的'泉程阔 10、10’平行測試系統 20、20’測試控制装置 3〇平行測試轉換裝置 4〇測試執行裝置 32平行測試執行與結束控制單元 33平行測試資料擷取存放單元 34循序測試執行與結束控制單元 35同步測試旗號單元 參 36測試通道自動展延單元 37量測資料存放單元 :開始執行使用者編寫的測試 2依測試程式建立-測試流程步:步, ΐ測試流程轉換成平行測試流程步驟 306執行平行測試流程步驟 == = ; =測之資料與測試結果步驟 18And complex pre-compiler. Referring to the third figure, it is a flow chart of a parallel test method of an embodiment of the present invention. First, after the user writes the second test program or tests the firmware code on the test machine, the test machine will open # execute the test program or test the firmware code (step 300). ^中:^ Test program or test firmware code is written in C programming language, but not limited to it, but can be used in the appropriate programming language according to the requirements of the test program or the type of test machine. Written, and this ancient program contains several test items. 'W 201028702 Then 'the test machine will establish the test flow of the test according to this test type (step move), and this parallel test flow is correct;: j body: the amount of semiconductor components is strictly enforced ^ ', ,, The fruit is fruited (step 308), and then, after each test, the end of the parallel test procedure (step 31). ΡComplete the measurement ^The second method includes a synchronization test flag set to 2 in the i conversion to parallel test flow step ((4) 鹌〇 4), and further includes a synchronous test flag setting step, and set the same test flag to be performed. Synchronously testing the semiconductor components, thereby marking or determining the semiconductor components for the flat test. Furthermore, the conversion of the test flow into the parallel test flow step (step 3〇4) further includes a test channel extension step for extending each test item and corresponding to all semiconductor components set with the synchronous test flag test. The test device (device Carmel), and each semiconductor component set with the synchronous test flag test can perform various test items corresponding to the parallel test. ^ The test channel extension step includes a step of providing a correspondence table, so that the semiconductor components with the synchronous test flag are set according to different, corresponding tables, so that each pin corresponds to one can cooperate with the test carrier or < The traces on the pin card are set to § 10 and the test channel for the shortest and best signal transmission path is obtained. Each correspondence table records the correspondence between each pin of each semiconductor component and each test channel, and provides parallel testing of the shortest and best test signal transmission path for each semiconductor component. Therefore, the parallel test method of the present invention is not limited to 15 201028702 being limited to the test carrier or the trace design on the probe card, and the routing design on the carrier board or the probe card is limited or even flexible; 1 Use the test channels to match the traces on the test carrier and the probe card. The cost of the test signal can be shortened, and the better signal is obtained. In addition, the measurement data of each semiconductor component participating in the parallel test is collected. The step of testing the result (step 3 08) further comprises providing a data storage area step for providing each data storage area corresponding to the synchronous test flag and the semiconductor component, that is, providing each semiconductor for parallel testing. Individual data storage areas for components. Secondly, the measurement data of each semiconductor component collected and parallelly tested and the less steps of the ( (step 308) further comprise a data storage step, and the measurement data and the test result of each semiconductor component are stored to the corresponding data. The parallel test method of the present invention further includes an operation and determination step of calculating and judging the measurement data and the test result of the semiconductor component by the exclusive data storage/area corresponding to each semiconductor component. According to the specifications provided by the test program written by the user, the test state of each/semiconductor component is judged, and it is determined whether each semiconductor component is to be subjected to subsequent testing or test branching, and the parallel test method of the present invention includes A step of resetting the synchronization test flag is performed, and the semiconductor component that needs to be subjected to subsequent testing or test branching is re-synchronized to test the flag setting, and the semiconductor component that needs to be subjected to subsequent testing or test branching is selected. In addition, the parallel test method can control the start, execution, and end of the parallel test by a simple parallel test macro instruction 'and collect the measurement data and test results of the parallel test'. This 16 201028702 +仃The Test Giant # instruction has been described above and, therefore, will not be described here. The line is followed by the job, and then the test is carried out, and the test step is also included - for the sequential measurement - time, only the - Feng ^ test flag setting step ' is used to test the sequential conductor elements. The end of the measurement data of this test, as well as the follow-up test, the description of the sequence test macro instruction has been tested in the previous article ^ = the open test system provided by the invention, parallel g, the scent device, The parallel test system and the flat Si are written by the latter (4) into (4) or the job code or the device or the step, for example, the macro instruction is difficult to replace, and the complex is huge and the development process is difficult, ^ ^ ' Convert the #序 test flow into a parallel test flow. (4) Add the test rate. Section, this publication, and ί mother ^in set the state with a different corresponding board or probe card to provide the most ΐ ΐ 的 、 、 、 : : : : : : 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 洛 ^ ^ ^ ^ ^ Figure 2 is a simple diagram of a parallel test system of the present invention. The single figure is a simple schematic view of another embodiment of the present invention. Ten _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The fourth diagram of the 4th Η 辏 辏 辏 复 为本 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 第三 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉 泉〇Parallel test conversion device 4〇Test execution device 32 Parallel test execution and end control unit 33 Parallel test data capture storage unit 34 Sequential test execution and end control unit 35 Synchronization test flag unit Ref. Data storage unit: Start the execution of the user-written test 2 Build according to the test program - Test flow step: Step, ΐ Test flow is converted into parallel test flow Step 306 Perform parallel test flow step == = ; = Test data and test result steps 18

Claims (1)

201028702 七、申請專利範圍: 1. 一種平行測試轉換裝置,用以進行循序測試與平行測試 之間的轉換,其包含: 一平行測試執行與結束控制單元,用以將測試流程轉 換成平行測試而對多個半導體元件進行平行測試,並且控 制該平行測試的開始、執行與結束; 一平行測試資料擷取存放單元,用以將平行測試後所 _ 得到的資料進行擷取與存放,而供後續測試流程進行資料 的運算與判斷;以及 一循序測試執行與結束控制單元,用以將測試流程由 平行測試轉換成循序測試而進行測試,並且控制該循序測 試的開始、執行與結束。 2. 如申請專利範圍第1項所述之平行測試轉換裝置,其中 φ 更包含一同步測試旗號單元,用以依據當時測試狀態、測 試流程或測試結果而設定同步測試旗號,而決定要對那些 半導體元件進行同步測試。 3.如申請專利範圍第2項所述之平行測試轉換裝置,其中 該平行測試執行與結束控制單元藉由該同步測試旗號而選 定對那些半導體元件進行同步測試。 201028702 4.如申請專利範圍第2項所述之平行測試轉換裝置,其中 該同步測試旗號單7L在進行完平行測試後或是需要對半導 體7G件進行循序測試時,會依測試流程或結果而在同一時 間内’僅對-半導體元件設定同步測試旗號,而使循序測 試執行與結束控制單元依該同步測試旗號控制循序測試的 執行。 ❿S.如巾請專職圍第2項所述之平行測試轉換裝 置,其中 更包含一測試通道自動展延單元,用以將測試流程中的測 試項目展延並對應至所有設定有同步測試旗號試的半導體 元件的測試通道(device channel)以進行平行測試。 6_如申請專利範圍第5項所述之平行測試轉換裝置,其中 該測試通道自動展延單元更包含數個對應表,每一對應表 ❹ 皆記载一半導體元件的各個引腳(pin)與各個測試通道 (device channel)之間的對應關係。 7.如申請專利範圍第5項所述之平行測試轉換裝置,其中 更包含一量測資料存放單元,用以在平行測試後,將每一 半導體元件之測試結果與量測資料進行存放。 8.如申請專利範圍第7項所述之平行測試轉換裝置,其中 201028702 量測資料 更包含數個資料存取區,其中每—該資料存取區對應一半 導體兀件,而用以存放所對應之半導體元件的測試結果與 9. 如申請專利範圍第8項所述之平行測試轉換裝置,其中 該平行測試資料擷取存放單元藉由擷取每一半導體元件的 個別資料存放區内的測試資料與結果,經由運算與=定= • 決定那些半導體元件需要進行冑續測試或是測試分枝,而 10. 如申請專利範圍第1項所述之平行測試轉換裝置,其中 該平行測試執行與結束控制單元更包含下列平行測試巨 指令: “ m MacroParallelTestStart〇 //平行測試開始 //User’s Test Item 1 //使用者的測試程式 ❹ MacroGetTestData一 1() //取得資料 //User’s Test Item 2 MacroGetTestData_2() //使用者的測試程式 //取得資料 MacroParallelTestEndQ //平行測試結束。 11.如申請專利範圍第1項所述之平行測試轉換裝置,其中 該循序測試執行與結束控制單元更包含下列猶序測試2集 21 201028702 指令: MacroS erialTestStart() //循序測試開始 //User’s Operation //取得資料後的運算 MacroSerialTestEndQ //循序測試結束。 12.—種平行測試系統,用以進行循序測試與平行測試之 間,其包含: • 一測試控制裝置,用以控制半導體元件測試之流程與 運作; 一平行測試轉換裝置,用以進行循序測試與平行測試 之間的切換;以及 -測試執行裝置,帛以接受該測馳繼置所提供之 測試指令與該平行職裝置所提供之職模式,並根 據該測試指令與該測試模式執行測試。 測試程式或是韌體碼(c〇de) 13.如申請專利範圍帛12項所述之平行職系統,其中兮 :物制裝置更包含一測試程式平台,用以供使用者撰寫 14.如申請專利範圍第13項所述之平行測試 測試程式平台係為C語言測n 、,、中該 是動體碼_6)肢以C語^職程式或 22 201028702 15.如申請專利範圍第12項所述之平行測試系統,其中該 平行測試轉換裝置介於該測試控制裝置與該測試執行裝置 之間。 16.如申請專利範圍第12項所述之平行測試系統,其中該 平行測試轉換裝置與該測試控制裝置係為分離兩裝置。 • 17.如申請專利範圍第12項所述之平行測試系統,其中該 平行測試轉換裝置係設置於該測試控制裝置中。 18.如申請專利範圍第12項所述之平行測試系統,其中該 平行測試轉換裝置所提供之測試模式包含循序測試模式與 平行測試模式兩種。 ❿ 19.如申請專利範圍第13項所述之平行測試系統,其中該 平行測試轉換裝置包含: 一平行測試執行與結束控制單元,用以將依照使用者 撰寫之該測試程式或該是韌體碼(code)而建立的測試流 程,轉換成平行測試而對多個半導體元件進行平行測試, 並且控制該平行測試的開始、執行與結束; 一平行測試資料擷取存放單元,用以將平行測試後所 得到的資料進行擷取與存放,而供後續測試流程進行資料 23 201028702 的運算與判斷;以及 一循序測試執行與結束控制單元,用以將測試流程由 平行測試轉換成循序測試而進行測試,並且控制該循序測 試的開始、執行與結束。 20. 如申請專利範圍第19項所述之平行測試系統,其中更 包含一同步測試旗號單元,用以依據當時測試狀態、測試 φ 流程或測試結果而設定同步測試旗號,而決定要對那些半 導體元件進行同步測試。 21. 如申請專利範圍第20項所述之平行測試系統,其中該 平行測試執行與結束控制單元藉由該同步測試旗號而選定 對那些半導體元件進行同步測試,並且通知該測試執行裝 置對設定有同步測試旗號的半導體元件進行平行測試。 ❿ 22. 如申請專利範圍第20項所述之平行測試系統,其中該 同步測試旗號單元在進行完平行測試後或是需要對半導體 元件進行循序測試時,會依測試流程或結果而在同一時間 内,僅對一半導體元件設定同步測試旗號,而使循序測試 執行與結束控制單元依該同步測試旗號控制循序測試的執 行,並通知該進行測試執行裝置循序測試。 24 201028702 23. 如申請專利範圍第20項所述之平行測試系統’其中更 包含一測試通道自動展延單元,用以將該測試流程中的測 試項目展延並對應至所有設定有同步測試旗號試的半導體 元件的測試通道(device channel)以進行平行測試。 24. 如申請專利範圍第23項所述之平行測試系統,其中該 測試通道自動展延單元更包含數個對應表,每一對應表皆 • 記载一半導體元件的各個引腳(pin)與各個測試通道(device channel)之間的對應關係。 25·如申請專利範圍第23項所述之平行測試系統,其中更 包含一量測資料存放單元’用以在平行測試後,將每一半 導體元件之測試結果與量測資料進行存放。 G 26.如申請專利範圍第25項所述之平行測試系統,其中更 包含數個資料存取區’其巾每—該資料存取區對應一半導 體元件,而用以存放所對應之半導體元件的測試結果與量 測資料。 如申請專鋪圍第26項所述之平行職祕,其中該 平打測試資料擷取存放單元藉由擷取每一半導體元件的個 別資料存放區内的測試資料與結果,經由運算盘判定而決 25 201028702 定,那些半導體元件需要進行後續測試或是測試分枝。 28·如申請專利範圍第19項所述之平行測試系統,其中該 平行測試執行與結束控制單元更包含下列平行測試巨集指 令: MacroParallelTestStart() //平行測試開始 //User’s Test Item 1 //使用者的測試程式 MacroGetTestData_l () //取得資料 //User’s Test Item 2 //使用者的測試程式 //取得資料 &quot;平行測試結束。 MacroGetTestData_2() MacroParallelTestEndQ 29.如申請專利範圍第丨9項所述之平行測試系統,其中該 Φ 循序測試執行與結束控制單元更包含下列循序測試巨集指 令: MacroSerialTestStart〇 //User’s Operation MacroSerialTestEndQ //德序測試開始 //取得資料後的運算 &quot;循序測試結束。 30 -種平行麟方法’可以在财·與平㈣試之間轉 換測試模式,包含: 26 201028702 開始執行一測試程式; 依該測試程式建立一測試流程; 將該測試流程轉換成一對多個半導體元件進行同步 測試的平行測試流程; 執行該平行測試流程; 收集該平行測試流程所量測之資料與測試結果;以及 結束平行測試流程。 響 31. 如申請專利範圍第30項所述之平行測試方法,其中更 包含一撰寫該測試程式於測試機台步驟。 32. 如申請專利範圍第31項所述之平行測試方法,其中該 測試程式係以C語言撰寫而成。 ❹ 33.如申請專利範圍第30項所述之平行剥試方法,其中更 包含一同步測試旗號設定步驟,用以設定同步測試旗號於 需要進行同步測試的半導體元件,藉此標示或選定進行平 測試的半導體元件。 34.如申請專利範圍第33項所述之平行測試方法,其中該 測試流程更包含各項測試項目。 27 201028702 35 ·如申请專利範圍第34項所述之平行測試方法,立中更 包含一測試通道展延步驟,用以將該等測試項目展延並對 應至所有設定有同步測試旗號試的半導體元件的測試通道 (device channel),而進行平行測試。 36. 如申請專利範圍第35項所述之平行測試方法,其中誃 測試通道展延步驟更包含一提供對應表步驟,用以提供# • 一進行平行測試之半導體元件個別對應的對應表。 37. 如申請專利範圍第36項所述之平行測試方法,其中# 一該對應表記載每一該半導體元件的引腳(pin)對應之測試 通道,而提供每一該半導體元件最短與最佳的測試訊號得 遞途徑進行平行測試》 ❿ 38.如申請專利範圍第35項所述之平行測試方法,其中更 包含一提供資料存放區步驟,用以提供每一該半導體元袢 對應之資料存放區。 39·如申請專利範圍第38項所述之平行測試方法,其中更 包含一資料存放步驟,用以將每一該半導體元件所量測么 資料與測試結果存放至對應之該資料存放區。 28 201028702 40.如申請專利範圍第39項所述之平行測試方法,其中更 包含一運算與判斷步驟,用以擷取每一該資料存放區的量 測資料與測試結果進行運算與判斷,而判定每一該半導體 元件是否進行後續測試或進行測試分枝。 41·如申請專利範圍第4〇項所述之平行測試方法,其中更 包含一重新設定同步測試旗號步驟,重新對需要進行後續 ® 測试或進行測試分枝的每一該半導體元件重新進行同步測 試旗號設定。 42. 如申請專利範圍第4〇項所述之平行測試方法,其中該 平行測試方法可以藉由下列平行測試巨集指令來完成: MacroParallelTestStart〇 &quot;平行測試開始 //User’s Test Item 1 &quot;使用者的測試程式 Q MacroGetTestDatal 〇 //取得資料 //User’s Test Item 2 //使用者的測試程式 MacroGetTestData 一 2() //取得資料 MacroParallelTestEnd() //平行測試結束。 43. 如申請專利範圍第30項所述之平行測試方法,其中更 包含一循序測試步驟,用以進行循序測試。 29 201028702 44. 如申請專利範圍第43項所述之平行測試方法,其中該 循序測試步驟包含一單一同步測試旗號設定步驟,用以在 同一時間内,僅對一半導體元件設定同步測試旗號,而標 示或選定進行循序測試之半導體元件。 45. 如申請專利範圍第44項所述之平行測試方法,其中該 循序測試步驟可藉由下列循序測試巨集指令而完成: ⑩ MacroSerialTestStart() //循序測試開始 //User’s Operation //取得資料後的運算 MacroSerialTestEndQ //循序測試結束。 30201028702 VII. Patent application scope: 1. A parallel test conversion device for converting between sequential test and parallel test, comprising: a parallel test execution and end control unit for converting the test flow into parallel test Parallel testing of a plurality of semiconductor components, and controlling the start, execution, and end of the parallel test; a parallel test data capture storage unit for capturing and storing the data obtained after the parallel test for subsequent The test process performs calculation and judgment of the data; and a sequential test execution and end control unit for testing the test process from the parallel test to the sequential test, and controlling the start, execution and end of the sequential test. 2. The parallel test conversion device according to claim 1, wherein φ further comprises a synchronous test flag unit for setting a synchronous test flag according to the current test state, test flow or test result, and determining those to be The semiconductor components are tested synchronously. 3. The parallel test conversion device of claim 2, wherein the parallel test execution and end control unit selects for synchronous testing of those semiconductor components by the synchronization test flag. 201028702 4. The parallel test conversion device according to claim 2, wherein the synchronous test flag 7L is subjected to a parallel test or when a sequential test of the semiconductor 7G component is required, depending on the test flow or result. At the same time, the synchronous test flag is set only for the semiconductor component, and the sequential test execution and end control unit controls the execution of the sequential test according to the synchronous test flag. ❿S. For the towel, please refer to the parallel test conversion device mentioned in Item 2, which also includes a test channel automatic extension unit to extend the test items in the test process and corresponding to all the tests with the synchronous test flag. The device channel of the semiconductor component is tested for parallel. 6_ The parallel test conversion device according to claim 5, wherein the test channel automatic extension unit further comprises a plurality of correspondence tables, each of which records a pin of a semiconductor component. Correspondence with each test channel. 7. The parallel test conversion device according to claim 5, further comprising a measurement data storage unit for storing the test result and the measurement data of each semiconductor component after the parallel test. 8. The parallel test conversion device according to claim 7, wherein the 201028702 measurement data further comprises a plurality of data access areas, wherein each data access area corresponds to a semiconductor component for storing The test result of the corresponding semiconductor component is the parallel test conversion device according to claim 8, wherein the parallel test data capture unit is tested by taking in the individual data storage area of each semiconductor component. Data and results, through operations and = = = to determine those semiconductor components need to carry out subsequent tests or test branches, and 10. Parallel test conversion device as described in claim 1, wherein the parallel test execution and The end control unit also contains the following parallel test giant instructions: " m MacroParallelTestStart 〇 / / parallel test start / / User's Test Item 1 / / user's test program ❹ MacroGetTestData a 1 () / / get the data / / User's Test Item 2 MacroGetTestData_2 () / / user's test program / / get the information MacroParallelTestEndQ / / parallel test ends. 11. The parallel test conversion device according to claim 1, wherein the sequential test execution and end control unit further comprises the following test: 2 sets 21 201028702 instructions: MacroS erialTestStart() //Sequential test start // User's Operation //The operation after obtaining the data MacroSerialTestEndQ //The end of the sequential test. 12.-Parallel test system for performing the sequential test and the parallel test, including: • A test control device for controlling the test of the semiconductor component a process and operation; a parallel test conversion device for switching between the sequential test and the parallel test; and - a test execution device for accepting the test command provided by the test and the parallel device Job mode, and perform tests according to the test command and the test mode. Test program or firmware code (c〇de) 13. As described in the patent application scope 12, the parallel system, in which: the material device is more Includes a test program platform for users to write 14. Parallel testing as described in claim 13 The test program platform is a C language test n,,, which is a dynamic code _6) a C language program or 22 201028702 15. The parallel test system as described in claim 12, wherein the parallel test system A test conversion device is interposed between the test control device and the test execution device. 16. The parallel test system of claim 12, wherein the parallel test conversion device and the test control device are separate devices. 17. The parallel test system of claim 12, wherein the parallel test conversion device is disposed in the test control device. 18. The parallel test system of claim 12, wherein the parallel test conversion device provides a test mode comprising a sequential test mode and a parallel test mode. The parallel test system of claim 13, wherein the parallel test conversion device comprises: a parallel test execution and end control unit for using the test program written by the user or the firmware The test flow established by the code is converted into parallel test to perform parallel test on a plurality of semiconductor components, and controls the start, execution and end of the parallel test; a parallel test data capture storage unit for parallel test The obtained data is retrieved and stored for the subsequent test process to perform the calculation and judgment of the data 23 201028702; and a sequential test execution and end control unit for converting the test process from the parallel test to the sequential test for testing And control the start, execution, and end of the sequential test. 20. The parallel test system according to claim 19, further comprising a synchronous test flag unit for setting a synchronous test flag according to the current test state, the test φ process or the test result, and determining the semiconductor to be determined. The components are tested synchronously. 21. The parallel test system of claim 20, wherein the parallel test execution and end control unit selects a synchronization test for those semiconductor components by the synchronization test flag, and notifies the test execution device that the settings are The semiconductor components of the synchronous test flag are tested in parallel. ❿ 22. The parallel test system of claim 20, wherein the synchronous test flag unit performs the parallel test after the parallel test or the sequential test of the semiconductor component, at the same time according to the test process or the result The synchronization test flag is set only for a semiconductor component, and the sequential test execution and termination control unit controls the execution of the sequential test according to the synchronization test flag, and notifies the test execution device to perform the sequential test. 24 201028702 23. Parallel test system as described in claim 20, further comprising a test channel automatic extension unit for extending the test items in the test flow and corresponding to all set synchronization test flags Test the semiconductor device's device channel for parallel testing. 24. The parallel test system of claim 23, wherein the test channel automatic extension unit further comprises a plurality of correspondence tables, each of which corresponds to a pin of a semiconductor component and Correspondence between each test channel. 25. The parallel test system of claim 23, further comprising a measurement data storage unit </ RTI> for storing the test results and measurement data of each semiconductor component after the parallel test. G 26. The parallel test system of claim 25, further comprising a plurality of data access areas, wherein each of the data access areas corresponds to a semiconductor component for storing the corresponding semiconductor component Test results and measurement data. If you apply for the parallel job secrets mentioned in item 26, the flat test data capture unit will determine the test data and results in the individual data storage area of each semiconductor component by using the calculation disk. 25 201028702 It is determined that those semiconductor components need to be tested or tested for branching. 28. The parallel test system of claim 19, wherein the parallel test execution and end control unit further comprises the following parallel test macro instructions: MacroParallelTestStart() //parallel test start //User's Test Item 1 // The user's test program MacroGetTestData_l () / / get the data / / User's Test Item 2 / / user's test program / / get the data &quot; parallel test is over. MacroGetTestData_2() MacroParallelTestEndQ 29. Parallel test system as described in claim 9, wherein the Φ sequential test execution and end control unit further includes the following sequential test macro instructions: MacroSerialTestStart〇//User's Operation MacroSerialTestEndQ //De The sequence test starts//the operation after obtaining the data&quot; the sequential test ends. The 30-parallel lining method can convert the test mode between the financial and the ping (four) test, including: 26 201028702 Start executing a test program; establish a test flow according to the test program; convert the test flow into a pair of multiple semiconductors Parallel testing process for components to perform synchronous testing; performing the parallel testing process; collecting data and test results measured by the parallel testing process; and ending the parallel testing process. 31. The parallel test method described in claim 30, which further includes a step of writing the test program on the test machine. 32. The parallel test method as described in claim 31, wherein the test program is written in C language. ❹ 33. The parallel stripping method according to claim 30, further comprising a synchronization test flag setting step for setting a synchronous test flag to the semiconductor component that needs to be synchronously tested, thereby marking or selecting to perform the flat Tested semiconductor components. 34. The parallel test method of claim 33, wherein the test process further comprises various test items. 27 201028702 35 · As in the parallel test method described in claim 34, Lizhong also includes a test channel extension step for extending the test items and corresponding to all semiconductors set with the synchronous test flag test. The component's test channel is tested in parallel. 36. The parallel test method of claim 35, wherein the 誃 test channel extension step further comprises a correspondence table step for providing a corresponding table corresponding to the semiconductor components of the parallel test. 37. The parallel test method according to claim 36, wherein the one of the correspondence tables records a test channel corresponding to a pin of each of the semiconductor components, and provides the shortest and the best of each of the semiconductor components. The test signal transmission method is parallel test. ❿ 38. The parallel test method according to claim 35, further comprising a data storage area step for providing data storage corresponding to each of the semiconductor elements Area. 39. The parallel test method of claim 38, further comprising a data storage step for storing the measured data and test results of each of the semiconductor components in the corresponding data storage area. 28 201028702 40. The parallel test method as described in claim 39, further comprising an operation and a judgment step for extracting the measurement data and the test result of each of the data storage areas for calculation and judgment, and It is determined whether each of the semiconductor elements is subjected to subsequent testing or test branching. 41. The parallel test method as described in claim 4, further comprising the step of resetting the synchronous test flag, re-synchronizing each of the semiconductor components requiring a subsequent ® test or test branching Test flag setting. 42. The parallel test method as described in claim 4, wherein the parallel test method can be completed by the following parallel test macro instruction: MacroParallelTestStart〇&quot;parallel test start //User's Test Item 1 &quot; The test program Q MacroGetTestDatal 〇 / / get the data / / User's Test Item 2 / / user's test program MacroGetTestData a 2 () / / get the information MacroParallelTestEnd () / / parallel test end. 43. The parallel test method of claim 30, further comprising a sequential test step for performing a sequential test. 29 201028702 44. The parallel test method of claim 43, wherein the sequential test step comprises a single synchronous test flag setting step for setting a synchronization test flag for only one semiconductor component at the same time, and Label or select semiconductor components for sequential testing. 45. The parallel test method of claim 44, wherein the sequential test step can be completed by the following sequential test macro instruction: 10 MacroSerialTestStart() //Sequential test start //User's Operation //Get data Post-operation MacroSerialTestEndQ //Sequential test ends. 30
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US4710933A (en) * 1985-10-23 1987-12-01 Texas Instruments Incorporated Parallel/serial scan system for testing logic circuits
US6476628B1 (en) * 1999-06-28 2002-11-05 Teradyne, Inc. Semiconductor parallel tester
TWI287639B (en) * 2003-02-14 2007-10-01 Advantest Corp A distributed operating system for a semiconductor test system for testing at least one device under test
US7039545B2 (en) * 2004-04-19 2006-05-02 Agilent Technologies, Inc. Apparatus, system and/or method for converting a serial test to a parallel test
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