201028566 六、發明說明： 【發明所屬之技術領域】201028566 VI. Description of the invention: [Technical field to which the invention pertains]
真空腔體之轉軸裝置。 【先前技術】 如圖！所示’為一種安裝在半導體製程所使用之真空 1 ’該轉軸裝置1是穿設固定於真空 -，並可透過繞自體軸心轉動之轴桿 腔體900上的轉軸裝置1 , 腔體900之腔壁901上， 11來驅動一安裝在真空腔體900内的閥門9〇2。這種轉轴裝 置i使用時，雖然已可藉由其結構設計而達到完全氣密的 效果，但因真空腔體900内部進行半導體製程作業時，真 空腔體900内部通常會處於高溫狀態，此高溫狀態會導致 轉軸裝置1溫度升高’由於轉軸裝置丨之組成構件的材質 並非完全同，亦即組成構件的熱膨脹係數不盡相同，所以 當轉軸裝置1溫度過高時，容易導致其内部構件因熱膨脹 變形’而影響其整體氣密效果’引發外界空氣經由該等組 成構件間的縫隙竄入真空腔體900内的現象，其中，又因 軸桿11是可轉動地直接穿設於腔壁901上，所以當抽桿u 與腔壁901間之熱膨脹幅度差異較大時，更容易因為轴桿 11之轉動，而造成外界空氣經由軸桿11與腔壁901間的縫 隙進入真空腔體900中，致使真空腔體900無法確保維持 在真空狀態下，而導致製程失誤’因而有待改進》 【發明内容】 因此，本發明之目的，即在提供一種具冷卻效果的轉 3 201028566 軸裝置。 於是，本發明具冷卻效果的轉軸裝置，適用於安裝在 一真空腔體上，該真空腔體具有一界定出一真空容室之腔 壁，該腔壁穿設有一連通真空容室之插孔，該轉軸裝置是 穿設固定於該插孔中，並包含一轴座單元，及一安裝於轴 座單元之軸桿，該轴座單元包括一安裝於腔壁外壁面並貫 穿插孔地延伸入真空容室内之中空的基座、一安裝於基座 内之中空的氣密襯套、至少一安裝於基座内之軸承，及一 套置於基座外且與基座外周面相配合界定出一環繞基座之 中空冷卻空間的冷卻套管，且該基座位於真空腔體外的部 位穿設有一用以將冷卻液注入冷卻空間之注水孔，及一用 以供冷卻空間中之冷卻液排出的排水孔。該軸桿是安裝於 該軸承中，且氣密貫穿該氣密襯套地延伸入真空容室内， 並可被驅動而繞自體轴心枢轉。 本發明之功效：透過可於冷卻空間通以低溫冷卻液進 行冷卻降溫的結構設計，可使轉轴裝置在真空腔體作業期 間，能夠冷卻降溫而保持在一預定溫度範圍，可大幅降低 其熱膨脹變形量，而維持一定之氣密效果。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之二個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中，類似的元件是以相同的編號來表示。 201028566 , 如圖2、3所示’本發明具冷卻效果的轉軸裝置之第一 較佳實施例，適用於安裝在一真空腔體2上，該真空腔體2 具有一界定出一真空容室20之腔壁21，且該腔壁21穿設 . 有一連通真空容室20之插孔210。 該轉軸裝置包含一穿設於插孔210中而安裝固定於該 腔壁21上之軸座單元3，及一可繞自體轴心拖轉地穿設於 該軸座單元3中之軸桿4。 該轴座單元3包括一限位靠抵於腔壁21外壁面並貫穿 鲁 該插孔21〇地延伸入真空容室20内之中空基座31、一氣密 靠抵於基座31内周面且氣密套抵於該軸桿4外周面之氣密 襯套32、二沿基座3 i長度方向間隔設置於基座31兩相反 端部中並供轴桿4可轉動地穿設定位之轴承33、一徑向間 隔地套接固定於基座31外並延伸入真空容室2〇中之冷卻 套管34 鐵*密塞裝固定於基座31位於真空容室20内之 端部中的内端蓋35，及數個間隔塞抵於内端蓋35内周面與 軸桿4外周面之油封36。 該基座31具有一限位靠抵於該腔壁21外壁面之外端 邛311 ’及一自外端部311 一體延伸穿過插孔而延伸入 f空容室20内之安裝管部314。該氣密襯套32具有一嵌裝 定位於安裝管部314中且套置於轴桿4外之管體321、數個 嵌裝固定於管體321内周面且分別氣密套抵於轴桿*外周 内氣密墊圈322，及數個嵌裝III定於管體321外周面且 氣进靠抵於女裝管部314内周面之外氣密塾圈⑵。 該等轴承33是分別位於氣密襯套32之兩相反端側， 5 201028566 而分別安裝於基座31之外端部311與安裝管部314中。該 冷卻套管34是套置於該安裝管部314夕卜，並與該安裝管部 314外周面相配合界定出—沿安裝管部3U長度方向延伸， 且環繞於安裝管部314外之環狀冷卻U 340,而該基座 31之外端部311穿設有分別與冷卻Μ烟連通之-注水 孔312與-排水孔313。該内端蓋％是氣密塞裝固定於該 安裝管部3U末端區段中，而封閉該基錢末端開口。 € 該轉轴裝置使用時，可經由該注水孔312將冷卻液（ 圖未丁）；主入該冷部空間34〇中藉由該冷卻液吸收傳導 至軸桿4'氣㈣套32與基座31..等構件之熱能，並將已 吸收熱能而溫度升高之冷卻液自排水们13排出，透過不 斷以相對低溫之冷卻液注入該冷卻Μ鳩中並將熱能帶 的方式可持續且快速散除傳導至整個轉抽裝置之熱能 ’使轉抽裝置降溫冷卻，而能夠在真空腔趙2内部進行半 導體製程作業期間’維持在一預定溫度範圍内，避免内部 構件因溫度過高而致使熱膨涨幅度差異過大，或因氣密襯 套32之該等氣密塾圈322、323無法承受高溫而老化變形 ，而破壞轉軸裝置之整體氣密效果。 且因該轉軸裝置是以其不會轉動之基座31與冷卻套管 裝靠抵於插孔21〇内緣，並將該袖桿4穿設於基座31 内4之軸承33上’而未與腔壁21接觸所以軸桿4轉動 時’不會影響整個轉軸裝置與腔壁21間的密合度。 如圏4所示’本發明具冷卻效果的轉轴裝置之第二較 佳實施例與第-實施例的差異處僅在於：該油封36之設置 201028566 • &置。為方便說明，以下僅就本實施例與第—實施例差異 處進行說明。 、 在本實施例中，僅設置-油封36，且該油封％是局部 卩下敌置於氣密襯套32之管體321的頂端部中，並套抵於 轴桿4頂端部外周面。 _、 由於本實施例之使用方式與功效都與第一實施例相同 ，因此不再詳述。 ，综上所述’透過上述冷卻空間340可通以低溫冷卻液 雩 進行冷卻降溫，及與腔壁2!接觸之構件不會相對腔壁21 轉動的結構設計，可使轉軸裝置在真空腔體2作業期間， 能夠冷卻降溫而保持在一預定溫度範圍，可大幅降低轉轴 裝置之組成構件的熱膨脹變形量，使轉軸裝置保有一定之 乳密效果，所以能夠確保真空腔體2在作業期間可維持在 真空狀態下，進而可提高製程品質，故確實能達成本發明 之目的。 0 惟以上所述者’僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是習知安裝於真空腔體之轉軸裝置側視剖面圖； 圖2是本發明具冷卻效果的轉轴裝置之第一較佳實施 例的立體圖； 圖3是該第—較佳實施例安裝於一真空腔體之側視剖 7 201028566 面圖；及 圖4是本發明具冷卻效果的轉軸裝置之第二較佳實施 例安裝於一真空腔體之側視剖面圖。 201028566 【主要元件符號說明】 2...... …真空腔體 32…. ••…氣密襯套 2 0# 1 * * * •…真空容室 321 - …"管體 2 1 κ * - * s 322 - .....内氣密塾圈 210… …·插孔 323 - .....外氣密塾圈 ^ ***»*» •…轴座單元 3 3 s… ••…轴承 31···*· …·基座 3 4 -… …··冷卻套管 311… •…外端部 340 - ••…冷卻空間 312 ·* •…注水孔 3 5… .....内端蓋 313… …*排水孔 3 6 4… .....油封 314 — •…安裝管部 4 .·… ••…軸桿 9The shaft device of the vacuum chamber. [Prior Art] As shown in the figure! Shown as 'a vacuum 1 used in a semiconductor process'. The spindle device 1 is a shaft device 1 that is fixed to a vacuum and is permeable to a shaft cavity 900 that rotates about its own axis. On the cavity wall 901 of the 900, 11 drives a valve 9〇2 installed in the vacuum chamber 900. When the shaft device i is used, it is possible to achieve a completely airtight effect by its structural design. However, when the semiconductor process is performed inside the vacuum chamber 900, the inside of the vacuum chamber 900 is usually at a high temperature. The high temperature state causes the temperature of the rotating shaft device 1 to rise. 'Because the materials of the components of the rotating shaft device are not exactly the same, that is, the thermal expansion coefficients of the constituent members are not the same, when the temperature of the rotating shaft device 1 is too high, the internal components are easily caused. The phenomenon that the overall airtight effect is affected by the thermal expansion deformation 'initiates the phenomenon that the outside air is plunged into the vacuum chamber 900 through the gap between the constituent members, wherein the shaft 11 is rotatably directly passed through the cavity wall 901, so when the difference in thermal expansion between the pumping rod u and the cavity wall 901 is large, it is more likely that the outside air enters the vacuum chamber 900 through the gap between the shaft 11 and the cavity wall 901 due to the rotation of the shaft 11. In this case, the vacuum chamber 900 is prevented from being maintained in a vacuum state, resulting in a process error 'and thus needs to be improved.>> SUMMARY OF THE INVENTION Accordingly, the present invention The purpose is to provide a cooling device with a cooling effect 3 201028566 shaft device. Therefore, the cooling shaft device of the present invention is suitable for being mounted on a vacuum chamber having a cavity wall defining a vacuum chamber, the cavity wall being provided with a plug for connecting the vacuum chamber a shaft, the shaft device is threaded and fixed in the socket, and comprises a shaft seat unit, and a shaft mounted on the shaft seat unit, the shaft seat unit includes a wall mounted on the outer wall surface of the cavity wall and penetrates the socket a hollow base extending into the vacuum chamber, a hollow airtight bushing mounted in the base, at least one bearing mounted in the base, and a set disposed outside the base and cooperating with the outer peripheral surface of the base Defining a cooling jacket surrounding the hollow cooling space of the base, and the base is located outside the vacuum chamber with a water injection hole for injecting cooling liquid into the cooling space, and a cooling hole for cooling space The drain hole drained by the liquid. The shaft is mounted in the bearing and extends through the airtight bushing into the vacuum chamber and can be driven to pivot about the body axis. The utility model has the advantages that the structure of the cooling device can be cooled and cooled by the low-temperature cooling liquid in the cooling space, so that the rotating shaft device can be cooled and cooled to maintain a predetermined temperature range during the operation of the vacuum chamber, and the thermal expansion can be greatly reduced. The amount of deformation, while maintaining a certain airtight effect. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the invention. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. 201028566, as shown in Figures 2 and 3, a first preferred embodiment of the present invention has a cooling effect, which is suitable for mounting on a vacuum chamber 2 having a vacuum chamber defined therein. A cavity wall 21 of 20, and the cavity wall 21 is bored. There is a socket 210 connecting the vacuum chamber 20. The shaft assembly includes a shaft base unit 3 that is inserted into the socket 210 and is fixedly mounted on the cavity wall 21, and a shaft that can be dragged and disposed in the shaft base unit 3 around the axis of the body. 4. The shaft base unit 3 includes a hollow base 31 which is restrained against the outer wall surface of the cavity wall 21 and extends through the insertion hole 21 into the vacuum chamber 20, and is airtight against the inner circumferential surface of the base 31. And the airtight bushing 32 which is airtightly sleeved on the outer circumferential surface of the shaft 4 is disposed at two opposite ends of the base 31 along the longitudinal direction of the base 3 i and the shaft 4 is rotatably worn through the set position. The bearing 33 is radially spaced apart from the cooling sleeve 34 which is fixed to the outside of the base 31 and extends into the vacuum chamber 2〇. The iron* is fixedly fixed to the end of the base 31 in the vacuum chamber 20. The inner end cover 35 and the plurality of spacers abut against the inner circumferential surface of the inner end cover 35 and the oil seal 36 on the outer circumferential surface of the shaft 4. The base 31 has a limiting end 311 ′ that abuts against the outer wall surface of the cavity wall 21 and a mounting tube portion 314 that extends from the outer end portion 311 and extends through the insertion hole into the empty chamber 20 . . The airtight bushing 32 has a tubular body 321 which is embedded in the mounting pipe portion 314 and sleeved outside the shaft 4, and a plurality of fittings are fixed on the inner circumferential surface of the pipe body 321 and are respectively airtightly sleeved against the shaft. The rod* outer peripheral airtight gasket 322, and a plurality of fittings III are set on the outer peripheral surface of the pipe body 321 and the gas abuts against the inner peripheral surface of the women's tube portion 314 to seal the airtight ring (2). The bearings 33 are respectively disposed on opposite end sides of the airtight bushing 32, 5 201028566, and are respectively mounted on the outer end portion 311 of the base 31 and the mounting pipe portion 314. The cooling sleeve 34 is sleeved on the mounting tube portion 314 and is defined to cooperate with the outer peripheral surface of the mounting tube portion 314 to extend along the length of the mounting tube portion 3U and surround the outer portion of the mounting tube portion 314. The U 340 is cooled, and the outer end portion 311 of the base 31 is bored with a water injection hole 312 and a drain hole 313 which are respectively connected to the cooling soot. The inner end cap % is airtightly fitted and fixed in the end portion of the mounting pipe portion 3U to close the terminal end opening. When the shaft device is in use, the coolant can be transferred through the water injection hole 312; the main coolant enters the cold space 34, and is absorbed by the coolant to the shaft 4' (four) sleeve 32 and the base The heat energy of the member such as 31.., and the cooling liquid which has absorbed the heat and increased in temperature is discharged from the draining member 13, and is continuously injected into the cooling crucible with a relatively low temperature cooling liquid, and the heat energy band is sustainable and Quickly dissipating the heat energy transmitted to the entire pumping device to cool down the pumping device, and can be maintained within a predetermined temperature range during the semiconductor process operation inside the vacuum chamber 2 to prevent the internal components from being overheated. The difference in thermal expansion is too large, or the airtight rims 322, 323 of the airtight bushing 32 cannot withstand high temperatures and aging and deform, thereby damaging the overall airtight effect of the shaft device. And because the rotating shaft device is mounted on the inner edge of the insertion hole 21 by the base 31 and the cooling sleeve which are not rotated, and the sleeve 4 is passed through the bearing 33 of the base 31 When it is not in contact with the cavity wall 21, the shaft 4 does not affect the degree of adhesion between the entire shaft device and the cavity wall 21. The difference between the second preferred embodiment of the present invention having a cooling effect and the first embodiment is as follows: the setting of the oil seal 36 201028566 • & For convenience of explanation, only the differences between the embodiment and the first embodiment will be described below. In the present embodiment, only the -oil seal 36 is provided, and the oil seal % is partially squatted in the tip end portion of the tubular body 321 of the airtight bushing 32, and is fitted against the outer peripheral surface of the tip end portion of the shaft 4. _, since the manner of use and the effect of the present embodiment are the same as those of the first embodiment, they will not be described in detail. In summary, the structure of the cooling space 340 can be cooled and cooled by the low-temperature cooling liquid ,, and the member in contact with the cavity wall 2! does not rotate relative to the cavity wall 21, so that the rotating shaft device can be in the vacuum chamber. During the operation period, the cooling chamber can be cooled and cooled to maintain a predetermined temperature range, which can greatly reduce the amount of thermal expansion deformation of the components of the shaft assembly, so that the shaft device can maintain a certain milk tightness effect, so that the vacuum chamber 2 can be ensured during operation. By maintaining the vacuum state, the process quality can be improved, and the object of the present invention can be achieved. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the description of the invention. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side cross-sectional view of a rotary shaft device conventionally mounted in a vacuum chamber; FIG. 2 is a perspective view of a first preferred embodiment of a rotary shaft device having a cooling effect according to the present invention; The first preferred embodiment is mounted on a side view of a vacuum chamber 7 201028566; and FIG. 4 is a side cross-sectional view of a second preferred embodiment of the rotating shaft device of the present invention mounted on a vacuum chamber Figure. 201028566 [Description of main component symbols] 2...... ...vacuum cavity 32.... ••...airtight bushing 2 0# 1 * * * •...vacuum chamber 321 - ..."tube 2 1 κ * - * s 322 - ..... inside airtight ring 210... ... jack 323 - ..... outer airtight ring ^ ***»*» •... axle seat unit 3 3 s... ••...bearing 31···*·...·Base 3 4 -... Cooling sleeve 311... •...Outer end 340 - ••...Cooling space 312 ·* •...Water injection hole 3 5... .. ... inner end cap 313... ...* drain hole 3 6 4... ..... oil seal 314 — •... mounting tube 4 ..... ••...shaft 9