201027008 六、發明說明： 【發明所屬之技術領域】 本發明係有關一種揮發性有機廢氣處理系統之控溫裝 置及方法，尤指一種藉由令位於燃燒室上游之熱交換器產 生旁通之效果，進而降低燃燒廢熱之回收程度，俾以藉控 制爐頭之入流溫度讓燃燒室溫度不致過溫，進而確保爐頭 及燃燒爐材質結構之安全設計者。 【先前技術】 ® 按，生活和生産中廣泛應用的有機溶劑極易揮發成氣 體，故又名揮發性有機物（Volatile Organic Compounds， VOCs) ’而多數的VOCs對人體有一定毒性，必須加以處理； 其中，焚化法為VOCs廢氣處理方式之一種，在適當條件下 之VOCs去除率可達99%以上，燃燒後之產物通常為水、二 氧化碳、氮氧化物、硫氧化物…等，故為一種可有效處理 廢氣中所含之VOCs之方法；然而，一般會先以轉輪式濃縮 器（Rotor type rotary concentrator)、轉環式濃縮器 (Carousel type rotary concentrator)或流體化床濃縮器 (Fluidized bed concentrator)或固定床式濃縮器將 VOCs 廢氣濃縮，再把濃縮之VOCs廢氣送入焚化爐淨化處理，而 利用吸附一濃縮脫附一焚化等三項連續程序，使VOCs裂解 為無害之水及二氧化碳，而利用濃縮器提升焚化爐之焚化 效能。 次按，轉輪式或轉環式濃縮器搭配焚化爐之揮發性有 機廢氣處理系統，其設備特性適合處理高流量（10000Nm3/hr 201027008 以上）、中低污染物濃度（1000ppmv@solvent以下）及含多物 • 種之VOCs廢氣；其中，轉輪式（或轉環式）濃縮器通常可分 為較大之吸附區（Adsorption zone; Process zone)及較小 之脫附區（Desorption zone ; Regeneration zone ;也稱為 再生區），或是進一步於脫附區與吸附區之間增加面積與脫 附區相當之冷卻區（Cool ing zone ; Purge zone ;也稱為隔 離區）；其三者的面積比可為3:1:1或5:2:1或6:1: 1或10: 1 : 1或其他比例；而轉輪（或轉環）的基體（Matrix) 是由一些特定的固體基材（Substrate)塗佈上一層吸附劑 © 粉末所組成，基材是以陶瓷或玻璃或活性碳纖維紙經燒結 所作成，陶瓷纖維因具備耐高溫、熱穩定性高、可水洗、 不可燃及耐酸鹼的特性而最受廣泛使用，吸附劑的種類則 視欲處理的臭味氣體成份而有所不同，一般可採用活性碳 或沸石。 於是，轉輪（或轉環）因減速機（Geared motor)之帶動 而轉動（1〜10RPH ;大部份為2〜6RPH)，轉輪（或轉環）位於 吸附區内之吸附劑，乃進行第一階段之吸附程序，將VOCs φ 廢氣於常溫下予以吸附，淨化後之氣體直接排放至大氣； 而隨著轉輪（或轉環）之轉動，當吸附VOCs廢氣後之吸附劑 轉至脫附區時，即進入第二階段之脫附程序，此脫附程序 所須之熱空氣，是由冷卻區出口之預熱空氣與後端焚化爐 熱交換後之熱空氣（約160〜300°C ;大部份為180〜220°C) 來提供，藉熱空氣自進入脫附區之吸附劑將有機物濃縮脫 附出來，此時出流污染物濃度大約為入流廢氣之5〜20倍 左右，而脫附出來之有機物則可於第三階段之焚化爐進行 201027008 高溫（600°C以上；若為觸媒式直燃爐則為200〜450°C)焚 • 化，如此可以減少後續之廢氣處理單元尺寸，並節省初設 費用及運轉費用。 然而，如第一圖所示，習知之揮發性有機廢氣處理系 統，其處理揮發性有機廢氣之過程，係藉一第一風機（11) 將揮發性有機廢氣抽送流經一轉輪式濃縮器（30)之吸附區 (31)，致使揮發性有機廢氣中之有機物質被位於吸附區（31) 之吸附劑所吸附，吸附處理後之淨化氣體則經該第一風機 (11)排放；此後，當已吸附揮發性有機廢氣之吸附劑轉至 ® 脫附區（32)時，則將經一第一熱交換器（21)加熱之脫附氣 流由一第二風機（12)抽送通過，被吸附劑吸附的有機物質 因受熱脫附到濃縮氣流中，該濃縮氣流再被導引至一第二 熱交換器（22)預熱，而導入一直燃式焚化爐（40)燃燒淨化 成水及二氧化碳為主的物質，燃燒後之淨化氣流由該第二 熱交換器（22)及該第一熱交換器（21)進行熱回收之後，對 外排放；其中，該直燃式焚化爐（40)與第二熱交換器（22) 之組合可稱為恢復式直燃焚化爐（Recuperative Thermal ❿ Oxidizer) ° 此外，由於該直燃式焚化爐（40)之爐頭有其所能耐受 之入流溫度上限，過溫之入流溫度乃會造成該爐頭之氣密 材與結構損壞；不過，保護該爐頭之傳統方法，僅在於控 制該直燃式焚化爐（40)之燃燒溫度，但一旦該爐頭之燃料 提供量已調整至最低量，而該直燃式焚化爐（40)所焚化之 揮發性有機廢氣濃度又較高之際，因揮發性有機廢氣之燃 燒熱值提高之因素，該第二熱交換器（22)所回收之熱能隨 201027008 之相對升高，亦即導入該直燃式焚化爐（40)之濃縮氣流得 到較高之預熱溫度，而若此一預熱溫度超過該爐頭所能耐 受之入流溫度上限，該爐頭仍可因此因素損壞，故僅控制 該直燃式焚化爐（40)之燃燒溫度，仍無法確保該爐頭不受 損壞。 【發明内容】 本發明之主要目的，係欲解決先前技術僅能控制焚化 爐燃燒溫度但未能控制熱回收效能之問題，乃具有控制焚 化爐入流溫度及進一步控制焚化爐燃燒溫度，而確保爐頭 及燃燒爐材質結構不受損壞之功效。 為達上述功效，本發明之結構特徵，係包括有： 一濃縮器，至少區分有一吸附區及一脫附區； 一第一風機，設置於該濃縮器之吸附進氣管或吸附排 氣管； 一第二風機，設置於該濃縮器之脫附進氣管或脫附排 氣管； 一直燃式焚化爐，設置於該濃縮器之脫附排氣管下游 端，而連接有一焚化排氣管； 一第一熱交換器，冷側端設置於該脫附進氣管，而熱 侧端設置於該焚化排氣管之下游段； 一第二熱交換器，冷侧端設置於該脫附排氣管，而熱 側端設置於該焚化排氣管之上游段；以及 一控溫裝置，將一旁通管設置於該第二熱交換器之冷 侧端或熱側端，並於該旁通管設置有一控制閥，另於該脫 附排氣管且位於該第二熱交換器之下游設置有一焚化爐入 201027008 流溫度感測器，而將該控制閥與入流溫度感測器連線至一 ， 入流溫度控制器，俾以根據該直燃式焚化爐之入流溫度控 制該控制閥之啟閉程度者。 此外，該入流溫度控制器進一步與該直燃式焚化爐之 燃燒溫度控制器連線，同步控制該直燃式焚化爐爐頭之燃 料提供量。另者，進一步增設一第三熱交換器，該第三熱 交換器之冷側端設置於該脫附排氣管且位於該第二熱交換 器之上游，而熱側端設置於該焚化排氣管之下游段且位於 φ 該第一熱交換器之下游，而該控溫裝置之旁通管及控制閥 亦可設置於該第三熱交換器之冷側端或熱側端。再者，進 一步於該濃縮器之脫附區與吸附區之間增加一冷卻區，並 將其冷卻進氣管連接至該吸附排氣管、吸附進氣管或冷卻 氣源之任一，且將其冷卻排氣管連接至該脫附進氣管之上 游而成為脫附氣流之氣源。 。然而，該第一熱交換器、第二熱交換器與第三熱交換 器為管殼式或板式熱交換器。又，該濃縮器為轉輪式濃縮 ® 器、轉環式濃縮器、流體化床濃縮器或固定床式濃縮器。 另，該直燃式焚化爐於燃燒室上游端增設觸媒床，而成為 觸媒直燃式焚化爐。 本發明之控溫方法，係包括下列步驟： 步驟一、將揮發性有機廢氣濃縮； 步驟二、將濃縮之揮發性有機廢氣燃燒淨化； 步驟三、將燃燒過程所產生之廢熱回收，用以預熱即 將燃燒之濃縮揮發性有機廢氣； 201027008 步驟四、根據燃燒室之入流溫度，而調整即將進入燃 燒室之濃縮廢氣之預熱程度，致使燃燒室之入流溫度不致 過溫，進而確保爐頭不受損壞者。 再者，步驟四中進一步根據燃燒溫度控制器控制燃燒 室溫度，同步調整爐頭之燃料提供量，當達最小燃料提供 量（low fire)時，經由調整即將進入燃燒室之濃縮廢氣之 預熱程度來控制燃燒室溫度，致使燃燒室溫度不致過溫， 進一步確保爐頭及燃燒爐材質結構不受損壞。 【實施方式】 首先，請參閱第二圖所示，本發明之第一實施例係包 括有： 一濃縮器（30)，可為圖示之轉輪式濃縮器或圖未示之 轉環式濃縮器，甚至是流體化床濃縮器或固定床式濃縮 器，而至少區分有一吸附區（31)及一脫附區（32); 一第一風機（11)，設置於該濃縮器（30)之吸附進氣管 (311)或吸附排氣管（312); 一第二風機（12)，設置於該濃縮器（30)之脫附進氣管 (321)或脫附排氣管（322); 一直燃式焚化爐（40)，設置於該濃縮器（30)之脫附排 氣管（322)下游端，而連接有一焚化排氣管（41);其中，該 直燃式焚化爐（40)亦可於燃燒室上游端增設觸媒床，而成 為觸媒直燃式焚化爐（Catalytic Rec叩erative Thermal Oxidizer) » 一第一熱交換器（21)，冷侧端設置於該脫附進氣管 (321)，而熱側端設置於該焚化排氣管（41)之下游段； 201027008 - 一第二熱交換器（22)，冷側端設置於該脫附排氣管 (322)，而熱側端設置於該焚化排氣管（41)之上游段；以及 一控溫裝置（50)，將一旁通管（51)設置於該第二熱交 換器（22)之冷側端或熱側端，並於該旁通管（51)設置有一 控制閥（52)，另於該脫附排氣管（322)且位於該第二熱交換 器（22)之下游設置有一焚化爐入流溫度感測器（53)，而將 該控制閥（52)與入流溫度感測器（53)連線至一入流溫度控 制器（54)，俾以根據該直燃式焚化爐（40)之入流溫度控制 該控制閥（52)之啟閉程度，且該入流溫度控制器（54)可進 ® 一步與該直燃式焚化爐（40)之燃燒溫度控制器（42)連線， 當該直燃式焚化爐（40)之爐頭燃料提供量已調整至最低量 則啟動該入流溫度控制器（54)之控制權者。 再者，請參閱第三圖所示，本發明之第二實施例係較 第一實施例進一步增設一第三熱交換器（23)，該第三熱交 換器（23)之冷側端設置於該脫附排氣管（322)且位於該第 二熱交換器（22)之上游，而熱側端設置於該焚化排氣管（41) 之下游段且位於該第一熱交換器（21)之下游，而該控溫裝 φ 置（50)之旁通管（51)及控制閥（52)亦可設置於該第三熱交 換器（23)之冷側端或熱側端。 此外，請參閱第四圖所示，本發明之第三實施例係較 第一實施例進一步於該濃縮器（30)之脫附區（32)與吸附區 (31)之間增加一冷卻區（33)，該冷卻區（33)乃具有隔離、 冷卻與熱回收之功能，並將其冷卻進氣管（331)連接至該吸 附排氣管（312)、吸附進氣管（311)或冷卻氣源（34)之任 一，且將其冷卻排氣管（332)連接至該脫附進氣管（321)之 201027008 上游而成為脫附氣流之氣源。 另者，請參閱第五圖所示，本發明之第四實施例係較 第三實施例進一步增設一第三熱交換器（23)，該第三熱交 換器（23)之冷側端設置於該脫附排氣管（322)且位於該第 二熱交換器（22)之上游，而熱側端設置於該焚化排氣管（41) 之下游段且位於該第一熱交換器（21)之下游，而該控溫裝 置（50)之旁通管（51)及控制閥（52)亦可設置於該第三熱交 換器（23)之冷側端或熱侧端。 又，該第一熱交換器（21)、第二熱交換器（22)與第三 © 熱交換器（23)為管殼式或板式熱交換器。 基於如是之構成，本發明於各實施例所設置之控溫裝 置（50)，其入流溫度控制器（54)遂以入流溫度感測器（53) 感測該直燃式焚化爐（40)之入流溫度，若該入流溫度逼近 該直燃式焚化爐（40)爐頭之耐受溫度，則令該控制閥（52) 之逐漸開啟，讓設置於該第二熱交換器（22)之冷側端或熱 側端（亦可是該第三熱交換器（23)之冷側端或熱側端）任一 端之旁通管（51)開通，降低該第二熱交換器（22)(亦可是該 φ 第三熱交換器（23))之熱回收量，即可降低該直燃式焚化爐 (40)之入流溫度；此外，尚可進一步與該直燃式焚化爐（40) 之燃燒溫度控制器（42)連線，同步控制該直燃式焚化爐爐 頭之燃料提供量；是以，本發明具有控制焚化爐入流溫度 及進一步控制焚化爐燃燒溫度，而確保爐頭及燃燒爐材質 結構不受損壞之功效。 綜上所述，本發明所揭示之技術手段，確具「新穎性」、 「進步性」及「可供產業利用」等發明專利要件，祈請鈞 -10- 201027008 局惠賜專利，以勵發明，無任德感。 惟，上述所揭露之圖式、說明，僅為本發明之較佳實 施例，大凡熟悉此項技藝人士，依本案精神範疇所作之修 飾或等效變化，仍應包括本案申請專利範圍内。201027008 VI. Description of the Invention: [Technical Field] The present invention relates to a temperature control device and method for a volatile organic waste gas treatment system, and more particularly to a bypass effect by a heat exchanger located upstream of a combustion chamber In addition, the degree of recovery of combustion waste heat is reduced, and the safety of the burner and the furnace material structure is ensured by controlling the inlet temperature of the burner to prevent the temperature of the combustion chamber from overheating. [Prior Art] ® According to the widely used organic solvents in life and production, they are highly volatile, so they are also known as Volatile Organic Compounds (VOCs). Most VOCs are toxic to humans and must be treated. Among them, the incineration method is one of the treatment methods of VOCs, and the removal rate of VOCs under appropriate conditions can reach more than 99%. The products after combustion are usually water, carbon dioxide, nitrogen oxides, sulfur oxides, etc., so it is a kind. A method for effectively treating VOCs contained in exhaust gas; however, a Rotor type rotary concentrator, a Carousel type rotary concentrator or a fluidized bed concentrator is generally used first. Or a fixed bed concentrator to concentrate the VOCs exhaust gas, and then send the concentrated VOCs waste gas to the incinerator for purification treatment, and use the three consecutive procedures of adsorption-concentration desorption and incineration to crack the VOCs into harmless water and carbon dioxide. The concentrator is used to enhance the incineration efficiency of the incinerator. The secondary press, rotary or rotary concentrator is combined with the volatile organic waste gas treatment system of the incinerator. Its equipment characteristics are suitable for handling high flow rate (10000Nm3/hr 201027008 or above), medium and low pollutant concentration (below 1000ppmv@solvent) and VOCs containing multiple substances and species; among them, the rotary (or rotary) concentrator can be generally divided into a larger adsorption zone (Process zone) and a smaller desorption zone (Desorption zone; Regeneration). Zone (also known as regeneration zone), or a cooling zone (Cool ing zone; Purge zone; also known as the isolation zone) that further increases the area between the desorption zone and the adsorption zone; The area ratio can be 3:1:1 or 5:2:1 or 6:1:1 or 10:1:1 or other ratios; and the matrix of the runner (or swivel) is made up of specific solids Substrate is coated with a layer of adsorbent © powder. The substrate is made of ceramic or glass or activated carbon fiber paper. The ceramic fiber has high temperature resistance, high thermal stability, water washability and non-combustibility. It is most widely used because of its acid and alkali resistance. It depends on the kind of sorbent smell gas components to be treated vary, generally a zeolite or activated carbon may be employed. Thus, the runner (or the swivel) is rotated by the geared motor (1~10RPH; most of it is 2~6RPH), and the runner (or the swivel) is located in the adsorption zone. Carrying out the adsorption process of the first stage, the VOCs φ exhaust gas is adsorbed at normal temperature, and the purified gas is directly discharged to the atmosphere; and with the rotation of the runner (or the rotating ring), the adsorbent after adsorbing the VOCs exhaust gas is transferred to In the desorption zone, the second stage of the desorption process is entered. The hot air required for the desorption process is the hot air after the heat exchange between the preheated air at the outlet of the cooling zone and the back end incinerator (about 160~300). °C; most of it is 180~220°C). The organic matter is concentrated and desorbed by hot air from the adsorbent entering the desorption zone. At this time, the concentration of the outflow pollutant is about 5 to 20 times that of the inflowing exhaust gas. Left and right, and the desorbed organic matter can be burned in the third stage of the incinerator at 201027008 high temperature (above 600 °C; if it is a catalytic direct-fired furnace, 200~450 °C), thus reducing the follow-up Exhaust gas treatment unit size, and save initial cost and operating costs . However, as shown in the first figure, the conventional volatile organic waste gas treatment system processes a volatile organic waste gas by pumping a volatile organic waste gas through a rotary concentrator through a first blower (11). (30) an adsorption zone (31), wherein the organic matter in the volatile organic waste gas is adsorbed by the adsorbent located in the adsorption zone (31), and the purified gas after the adsorption treatment is discharged through the first blower (11); thereafter When the adsorbent adsorbing the volatile organic waste gas is transferred to the ® desorption zone (32), the desorbed gas stream heated by the first heat exchanger (21) is pumped through a second fan (12). The organic matter adsorbed by the adsorbent is desorbed into the concentrated gas stream by heat, and the concentrated gas stream is further guided to a second heat exchanger (22) for preheating, and is introduced into the constant combustion incinerator (40) for purification and purification into water. And the carbon dioxide-based substance, after the combustion purified gas stream is heat-recovered by the second heat exchanger (22) and the first heat exchanger (21), and discharged to the outside; wherein the direct-fired incinerator (40) ) and the combination of the second heat exchanger (22) can be called Recovererative Thermal ❿ Oxidizer ° In addition, since the burner of the direct-fired incinerator (40) has an upper limit of the inflow temperature that it can withstand, the over-temperature inflow temperature will cause the burner. The airtight material and structural damage; however, the traditional method of protecting the burner is to control the combustion temperature of the direct-fired incinerator (40), but once the fuel supply of the burner has been adjusted to a minimum amount, When the concentration of volatile organic waste gas incinerated by the direct-fired incinerator (40) is high, the heat energy recovered by the second heat exchanger (22) is increased due to the increase in the combustion heat value of the volatile organic waste gas. The relative increase of 201027008, that is, the concentrated gas flow introduced into the direct-fired incinerator (40), gives a higher preheating temperature, and if the preheating temperature exceeds the upper limit of the inflow temperature that the burner can withstand, The burner can still be damaged by this factor, so only controlling the combustion temperature of the direct-fired incinerator (40) still does not ensure that the burner is not damaged. SUMMARY OF THE INVENTION The main object of the present invention is to solve the problem that the prior art can only control the combustion temperature of the incinerator but fails to control the heat recovery efficiency, and has the advantages of controlling the inflow temperature of the incinerator and further controlling the combustion temperature of the incinerator. The material structure of the head and the burner is not damaged. In order to achieve the above effects, the structural features of the present invention include: a concentrator that distinguishes at least one adsorption zone and one desorption zone; a first fan disposed in the concentrator suction adsorption pipe or the adsorption exhaust pipe a second fan disposed on the desorbing or desorbing exhaust pipe of the concentrator; a constant-burning incinerator disposed at a downstream end of the desorbing exhaust pipe of the concentrator and connected with an incineration exhaust gas a first heat exchanger, the cold side end is disposed on the desorption inlet pipe, and the hot side end is disposed in a downstream section of the incineration exhaust pipe; a second heat exchanger, the cold side end is disposed on the pipe An exhaust pipe is disposed, and a hot side end is disposed at an upstream portion of the incineration exhaust pipe; and a temperature control device is disposed at a cold side end or a hot side end of the second heat exchanger, and The bypass pipe is provided with a control valve, and the degassing exhaust pipe is disposed downstream of the second heat exchanger, and an incinerator is disposed in the 201027008 flow temperature sensor, and the control valve is connected to the inflow temperature sensor. Line to one, inflow temperature controller, according to the direct combustion type Furnace temperature control of the inflow opening and closing degree of the control valve of the person. In addition, the inflow temperature controller is further connected to the combustion temperature controller of the direct combustion incinerator to synchronously control the fuel supply amount of the direct combustion incinerator burner. In addition, a third heat exchanger is further disposed, the cold side end of the third heat exchanger is disposed on the desorption exhaust pipe and located upstream of the second heat exchanger, and the hot side end is disposed on the incineration row The downstream section of the gas pipe is located downstream of the first heat exchanger, and the bypass pipe and the control valve of the temperature control device may be disposed at the cold side end or the hot side end of the third heat exchanger. Furthermore, a cooling zone is further added between the desorption zone and the adsorption zone of the concentrator, and the cooling intake pipe is connected to the adsorption exhaust pipe, the adsorption intake pipe or the cooling gas source, and A cooling exhaust pipe is connected to the upstream of the desorption intake pipe to become a source of desorption gas flow. . However, the first heat exchanger, the second heat exchanger and the third heat exchanger are shell-and-tube heat exchangers. Further, the concentrator is a rotary concentrator, a rotary concentrator, a fluidized bed concentrator or a fixed bed concentrator. In addition, the direct-fired incinerator is provided with a catalytic bed at the upstream end of the combustion chamber to become a catalytic direct-incineration incinerator. The temperature control method of the present invention comprises the following steps: Step 1: concentrating the volatile organic waste gas; Step 2: burning and purifying the concentrated volatile organic waste gas; Step 3. recovering the waste heat generated by the combustion process for pre-preparation The concentrated volatile organic waste gas that is about to be burned by heat; 201027008 Step 4: According to the inflow temperature of the combustion chamber, the preheating degree of the concentrated exhaust gas that is about to enter the combustion chamber is adjusted, so that the inflow temperature of the combustion chamber is not overheated, thereby ensuring that the burner is not Damaged. Furthermore, in step 4, the combustion temperature is further controlled according to the combustion temperature controller, and the fuel supply amount of the burner is synchronously adjusted. When the minimum fuel supply is reached, the preheating of the concentrated exhaust gas that is about to enter the combustion chamber is adjusted. The degree of combustion chamber temperature is controlled so that the temperature of the combustion chamber is not overheated, further ensuring that the material structure of the burner and the burner is not damaged. [Embodiment] First, referring to the second figure, the first embodiment of the present invention includes: a concentrator (30), which can be a rotary concentrator as shown or a rotating ring not shown. a concentrator, even a fluidized bed concentrator or a fixed bed concentrator, having at least one adsorption zone (31) and a desorption zone (32); a first fan (11) disposed in the concentrator (30) Adsorption intake pipe (311) or adsorption exhaust pipe (312); a second fan (12) disposed on the desorbing intake pipe (321) or desorbing exhaust pipe of the concentrator (30) 322); a continuous combustion incinerator (40) disposed at a downstream end of the desorbing exhaust pipe (322) of the concentrator (30), and connected to an incineration exhaust pipe (41); wherein the direct combustion incineration The furnace (40) may also add a catalyst bed at the upstream end of the combustion chamber to become a Catalytic Rec叩erative Thermal Oxidizer » a first heat exchanger (21), and the cold side end is disposed at the Desorbing the intake pipe (321), and the hot side end is disposed at a downstream section of the incineration exhaust pipe (41); 201027008 - a second heat exchanger (22), the cold side end is disposed Dissolving the exhaust pipe (322), wherein the hot side end is disposed at an upstream portion of the incineration exhaust pipe (41); and a temperature control device (50), a bypass pipe (51) is disposed at the second portion a cold side end or a hot side end of the heat exchanger (22), and a control valve (52) is disposed in the bypass pipe (51), and the exhaust pipe (322) is desorbed and located in the second heat exchange An incinerator inflow temperature sensor (53) is disposed downstream of the device (22), and the control valve (52) is connected to the inflow temperature sensor (53) to an inflow temperature controller (54). Controlling the degree of opening and closing of the control valve (52) according to the inflow temperature of the direct-fired incinerator (40), and the inflow temperature controller (54) can be further burned with the direct-fired incinerator (40) The temperature controller (42) is connected, and when the fuel supply amount of the direct combustion incinerator (40) has been adjusted to a minimum amount, the controller of the inflow temperature controller (54) is activated. Furthermore, referring to the third embodiment, a second embodiment of the present invention further adds a third heat exchanger (23) to the cold side of the third heat exchanger (23). The desorption exhaust pipe (322) is located upstream of the second heat exchanger (22), and the hot side end is disposed at a downstream portion of the incineration exhaust pipe (41) and located at the first heat exchanger ( Downstream of 21), the bypass pipe (51) and the control valve (52) of the temperature control device (50) may be disposed at the cold side end or the hot side end of the third heat exchanger (23). In addition, referring to the fourth embodiment, the third embodiment of the present invention further adds a cooling zone between the desorption zone (32) and the adsorption zone (31) of the concentrator (30) as compared with the first embodiment. (33), the cooling zone (33) has the functions of isolation, cooling and heat recovery, and connects its cooling intake pipe (331) to the adsorption exhaust pipe (312), the adsorption intake pipe (311) or Cooling gas source (34) and connecting its cooling exhaust pipe (332) to the upstream of 201027008 of the desorption inlet pipe (321) to become a source of desorption gas flow. In addition, referring to the fifth embodiment, the fourth embodiment of the present invention further adds a third heat exchanger (23) than the third embodiment, and the cold side end of the third heat exchanger (23) is disposed. The desorption exhaust pipe (322) is located upstream of the second heat exchanger (22), and the hot side end is disposed at a downstream portion of the incineration exhaust pipe (41) and located at the first heat exchanger ( Downstream of 21), the bypass pipe (51) and the control valve (52) of the temperature control device (50) may also be disposed at the cold side end or the hot side end of the third heat exchanger (23). Further, the first heat exchanger (21), the second heat exchanger (22), and the third © heat exchanger (23) are a shell-and-tube type heat exchanger. Based on the configuration, the temperature control device (50) provided in each embodiment of the present invention has an inflow temperature controller (54) that senses the direct combustion incinerator (40) with an inflow temperature sensor (53). Inflow temperature, if the inflow temperature approaches the withstand temperature of the direct combustion incinerator (40), the control valve (52) is gradually opened to be disposed in the second heat exchanger (22) The bypass pipe (51) at either end of the cold side end or the hot side end (which may also be the cold side end or the hot side end of the third heat exchanger (23)) is opened to lower the second heat exchanger (22) ( The heat recovery amount of the φ third heat exchanger (23) may be reduced to reduce the inflow temperature of the direct-fired incinerator (40); and further, the direct-fired incinerator (40) may be further The combustion temperature controller (42) is connected to synchronously control the fuel supply amount of the direct combustion incinerator burner; therefore, the invention has the control of the inflow temperature of the incinerator and further controls the combustion temperature of the incinerator to ensure the burner and the combustion The material structure of the furnace is not damaged. In summary, the technical means disclosed in the present invention have the invention patents such as "novelty", "progressiveness" and "available for industrial use", and pray for 钧-10-201027008 Invention, no sense of morality. The drawings and descriptions disclosed above are only preferred embodiments of the present invention, and those skilled in the art, which are subject to the spirit of the present invention, should be included in the scope of the patent application.
-11 - 201027008 【圖式簡單說明】 第一圖係習知揮發性有機廢氣處理系統之結構說明圖。 第二圖係本發明第一實施例之結構說明圖。 第三圖係本發明第二實施例之結構說明圖。 第四圖係本發明第三實施例之結構說明圖。 第五圖係本發明第四實施例之結構說明圖。 【主要元件符號說明】-11 - 201027008 [Simplified description of the drawings] The first figure is a structural explanatory diagram of a conventional volatile organic waste gas treatment system. The second drawing is a structural explanatory view of the first embodiment of the present invention. The third drawing is a structural explanatory view of a second embodiment of the present invention. The fourth drawing is a structural explanatory view of a third embodiment of the present invention. Figure 5 is a structural explanatory view of a fourth embodiment of the present invention. [Main component symbol description]
(11)第一風機 (33)冷卻區 (12)第二風機 (331)冷卻進氣管 (21)第一熱交換器 (332)冷卻排氣管 (22)第二熱交換器 (34)冷卻氣源 (23)第三熱交換器 (40)直燃式焚化爐 (30)濃縮器 (41)焚化排氣管 (31)吸附區 (42)燃燒溫度控制器 (311)吸附進氣管 (50)控溫裝置 (312)吸附排氣管 (51)旁通管 (32)脫附區 (52)控制閥 (321)脫附進氣管 (5 3)入流溫度感測器 (322)脫附排氣管 (54)入流溫度控制器 -12-(11) First fan (33) cooling zone (12) Second fan (331) Cooling intake pipe (21) First heat exchanger (332) Cooling exhaust pipe (22) Second heat exchanger (34) Cooling gas source (23) third heat exchanger (40) direct combustion incinerator (30) concentrator (41) incineration exhaust pipe (31) adsorption zone (42) combustion temperature controller (311) adsorption intake pipe (50) Temperature control device (312) adsorption exhaust pipe (51) bypass pipe (32) desorption zone (52) control valve (321) desorption intake pipe (53) inflow temperature sensor (322) Desorption exhaust pipe (54) inflow temperature controller-12-