201025800 六、發明說明： 【發明所屬之技術領域】 本發明是關於一種使用搬運裝置的台車的驅動等的線 型馬達’特別是線型馬達的定子被分散所配置的分散配置 線型馬達’及具備控制其線型馬達的馬達驅動裝置的分散 配置線型馬達驅動系統。 【先前技術】 使用於零件或工件的搬運等的線型馬達，一般爲可將 轉子移動在1個定子上的構造。但是，當搬運路變長，會 發生設備成本變高等的問題之故，因而提案分散定子加以 配置的方法。在此種分散配置（非連續配置）的定子，例 如，在專利文獻1，揭示把握二次側台車的位置與加速度 之關係，即使揭示開路所驅動的地上一次側分散配置方式 ，也不會發生速度不均勻的線型馬達的速度變動減低方法 〇 又，在線型馬達中，使用爲了正確地進行轉子的位置 控制，使用著光學式或磁性式線性標度與讀取該線型標度 的感測。例如，在專利文獻2，揭示著位置檢測手段是由 :作爲配設於一次側的基座的被檢測部的線性磁性標度， 及對應於該線性磁性標度而配設於二次側基台的線性標度 感測器部等所構成的技術。 又，使用線性標度之際，爲了決定轉子的位置的基準 ，與線性標度不相同地，設置能使光學式感測器所讀取的 -5- 201025800 方式訊號作爲原點所給予的原點訊號用的磁化 專利文獻3，線性磁性標度，是沿著基座的長 、S的磁極以微細間距交互地被多極磁化，而 成有原點訊號磁化部的技術。 專利文獻1:日本特開2004-8 08 8 1號公報 專利文獻2:日本特開平9_261943號公報（ 專利文獻3:日本特開平9-261 943號公報（ 【發明內容】 可是，在被分散配置的定子中，在1個定5 個轉子的情形不相冏必須考慮複數定子或複數 關連性等之故，因而控制方法也成爲多樣。 然而，專利文獻1的技術，是爲了避免主 變化時的運轉的速度不均勻的線型馬達的速度 法。尤其是轉子由定子一旦離開而再度移動至 情形的控制方法。 所以’轉子橫跨定子間的情形等，不能說 子的分散配置的線型馬達。 又，在分散配置的線型馬達爲了正確地進 ’因此，若利用專利文獻2等的習知技術，則 達’必須設置線性標度與讀取此的感測器。又 線型馬達，必須正確地黏貼於長度方向。 所以，在分散配置的線型馬達的系統中， 馬達的數，必須愈增加線性標度等的零件數， 部。例如在 邊方向，N 且在一端形 「0039」） Γ 0040」） 參 ^上與控制1 ^ 轉子的互相 要爲加速度 變動減低方 下一定子的 ❹ 充分考慮定 一\ 行位置控制 在各線型馬 ，必須在各 愈增加線型 又，在各線 -6- 201025800 型馬達設置線性標度上費時。 又，爲了在分散配置的線型馬達中正確地進行位置控 制，若利用專利文獻3等的習知技術，則在各線型馬達必 須設置原點用標誌與原點檢測用的感測器。所以在被分散 配置的線型馬達的系統中，愈增加線型馬達數，必須愈增 加原點用標誌與原點檢測用的感測器等的零件數。 本發明是爲了解決上述課題所發明者，提供一種適用 於定子的分散配置的線型馬達作爲課題。 爲了解決上述課題， 申請專利範圍第1項所述的發明是一種分散配置線型 馬達，是定子與轉子互相地相對運動的線型馬達，其特徵 爲· 上述定子與上述轉子是分別具有磁性地互相地作用的 複數種類的極，及上述複數種類的極依上述種類的順序朝 上述相對運動的方向周期地排列的周期構造， 上述定子是隔著複數排列於上述相對運動的方向， 相鄰接的上述定子的極彼此間的最小距離，爲上述轉 子的極彼此間的最大距離以下，且相鄰接的上述定子的相 同種類的極彼此間的最小距離，爲上述定子的周期構造的 1周期的長度的自然數倍。 又，申請專利範圍第2項所述的發明是一種分散配置 線型馬達，是定子與轉子互相地相對運動的線型馬達，其 特徵爲：上述定子與上述轉子是分別具有磁性地互相地作 用的複數種類的極，及上述複數種類的極依上述種類的順 201025800 序朝上述相對運動的方向周期地排列的周期構造’上述定 子是隔著複數排列於上述相對運動的方向’ 相鄰接的上述定子的各個周期構造的相位爲互相地一 致，且相鄰接的上述定子的極彼此間的最小距離’爲上述 轉子的極彼此間的最大距離以下。 又，申請專利範圍第3項所述的發明是，上述定子爲 具有與上述轉子進行上述磁性地作用的線圈’上述定子的 極爲藉由將電流流在上述線圈而發生於上述轉子側的極， 爲其特徵者。 又，申請專利範圍第4項所述的發明是，上述定子爲 具有與上述轉子進行上述磁性地作用的永久磁鐵，上述定 子的極爲藉由上述永久磁鐵而發生於上述轉子側的極，爲 其特徵者。 又，申請專利範圍第5項所述的發明是，上述線型馬 達是又具備：朝上述相對運動方向延伸的被檢測對象，及 檢測上述相對運動的上述被檢測對象的檢測器，上述檢測 器是具有排列於上述相對運動的方向的第1及第2檢測器， 上述第1檢測器與上述第2檢測器之距離，爲上述被檢測對 象的長度以下，爲其特徵者。 又，申請專利範圍第6項所述的發明是上述線型馬達 是又具備檢測上述轉子對於上述定子的相對性位置的位置 檢測裝置，上述位置檢測裝置是具有：依據上述周期構造 ’將藉由上述相對運動周期地發生的磁場方向的變化，輸 出作爲具有90°相位差的正弦波狀訊號與餘弦波狀訊號的 201025800 磁性感測器’及依據上述正弦波狀訊號與上述餘弦波狀訊 號，檢測上述位置的位置檢測電路，爲其特徵者。 又，申請專利範圍第7項所述的發明是分散配置線型 馬達’是上述磁性感測器是具有藉由磁場的方向使得電阻 値變化的磁性電阻元件，上述位置檢測電路是具有：以所 定周期抽樣上述正弦波狀訊號及上述餘弦波狀訊號而轉換 成數位資料的A/D轉換器；及由被轉換成上述數位資料的 _ 正弦成分與餘弦成分，求出相位角資料的相位角資料算出 手段；及生成因應於相位角資料的脈衝訊號的脈衝訊號輸 出手段，爲其特徵者。 又’申請專利範圍第8項所述的發明是一種分散配置 線型馬達驅動系統，其特徵爲：申請專利範圍第1項至第7 項中任一項所述的上述分散配置線型馬達的各線型馬達， 具備控制上述線型馬達的馬達驅動裝置。 又，申請專利範圍第9項所述的發明是一種分散配置 φ 線型馬達’是具備：互相地相對運動的定子與轉子，及檢 測上述轉子對於上述定子的相對性位置的位置檢測裝置的 線型馬達，其特徵爲：上述定子與上述轉子是分別具有磁 性地互相地作用的複數種類的極，及上述複數種類的極依 上述種類的順序朝上述相對運動的方向周期地排列的周期 構造’上述位置檢測裝置是具有：依據上述周期構造，將 藉由上述相對運動周期地發生的磁場方向的變化，輸出作 爲具有90°相位差的正弦波狀訊號與餘弦波狀訊號的磁性 感測器，及依據上述正弦波狀訊號與上述餘弦波狀訊號， -9 - 201025800 檢測上述位置的位置檢測電路，上述定子是隔著複數排列 於上述相對運動的方向。 又，申請專利範圍第1 0項所述的發明是上述磁性感測 器是具有藉由磁場的方向使得電阻値變化的磁性電阻元件 ，上述位置檢測電路是具有：以所定周期抽樣上述正弦波 狀訊號及上述餘弦波狀訊號而轉換成數位資料的A/D轉換 器；及由被轉換成上述數位資料的正弦成分與餘弦成分， 求出相位角資料的相位角資料算出手段；及生成因應於相 位角資料的脈衝訊號的脈衝訊號輸出手段，爲其特徵者。 又，申請專利範圍第1 1項所述的發明，是上述磁性感 測器是具有排列於上述相對運動的方向的第1及第2磁性感 測器，上述第1及第2磁性感測器’是設於上述定子及上述 轉子的任一方，上述第1磁性感測器與上述第2磁性感測器 之距離，爲上述定子與轉子的任何另一方的上述極彼此間 的最大距離以下，爲其特徵者。 又，申請專利範圍第1 2項所述的發明，是相鄰接的上 述定子的極被此間的最小距離，爲上述轉子的極彼此間的 最大距離以下，且相鄰接的上述定子的相同種類的極彼此 間的最小距離，爲上述定子的周期構造的1周期的長度的 自然數倍，爲其特徵者。 又，申請專利範圍第1 3項所述的發明，是相鄰接的上 述定子的各個周期構造的相位爲互相地一致，且相鄰接的 上述定子的極彼此間的最小距離，爲上述轉子的極彼此間 的最大距離以下，爲其特徵者。 -10- 201025800 又，申請專利範圍第14項所述的發明，是上述定子爲 具有與上述轉子進行上述磁性地作用的線圈，上述定子的 極爲藉由將電流流在上述線圈而發生於上述轉子側的極， 爲其特徵者。 又，申請專利範圍第15項所述的發明是上述定子爲具 有與上述轉子進行上述磁性地作用的永久磁鐵，上述定子 的極爲藉由上述永久磁鐵而發生於上述轉子側的極，爲其 φ 特徵者。 又，申請專利範圍第1 6項所述的發明，是一種分散配 置線型馬達驅動系統，其特徵爲：申請專利範圍第9項至 第15項中任一項所述的上述分散配置線型馬達的各線型馬 達，具備控制上述線型馬達的馬達驅動裝置。 又’申請專利範圍第1 7項所述的發明，是一種分散配 置線型馬達，是具備：互相地相對運動的定子與轉子，及 朝上述相對運動的方向延伸的被檢測對象，及檢測上述相 0 對運動的上述被檢測對象的檢測器的線型馬達，其特徵爲 :上述檢測器是複數排列於上述相對運動的方向，相鄰接 的上述檢測器彼此間之距離，爲上述被檢測對象的長度以 下，爲其特徵者。 又，申請專利範圍第1 8項所述的發明是上述定子與上 述轉子是分別具有磁性地互相地作用的複數種類的極，及 上述複數種類的極依上述種類的順序朝上述相對運動的方 向周期地排列的周期構造，上述定子是隔著複數排列於上 述相對運動的方向，相鄰接的上述定子的極彼此間的最小 -11 - 201025800 距離，爲上述轉子的極彼此間的最大距離以下，且相鄰接 的上述定子的相同種類的極彼此間的最小距離’爲上述定 子的周期構造的1周期的長度的自然數倍，爲其特徵者。 又，申請專利範圍第19項所述的發明是上述定子與上 述轉子是分別具有磁性地互相地作用的複數種類的極，及 上述複數種類的極依上述種類的順序朝上述相對運動的方 向周期地排列的周期構造，上述定子是隔著複數排列於上 述相對運動的方向，相鄰接的上述定子的各個周期構造的 相位爲互相地一致，且相鄰接的上述定子的極彼此間的最 小距離，爲上述轉子的極彼此間的最大距離以下，爲其特 徵者。 又，申請專利範圍第20項所述的發明是上述定子爲具 有與上述轉子進行上述磁性地作用的線圈，上述定子的極 爲藉由將電流流在上述線圈而發生於上述轉子側的極，爲 其特徵者。 又，申請專利範圍第21項所述的發明，是上述定子爲 具有與上述轉子進行上述磁性地作用的永久磁鐵，上述定 子的極爲藉由上述永久磁鐵而發生於上述轉子側的極，爲 其特徵者。 又，申請專利範圍第22項所述的發明，是上述線型馬 達是又具備檢測上述轉子對於上述定子的相對性位置的位 置檢測裝置，上述位置檢測裝置是作爲上述檢測器具有依 據上述周期構造，將藉由上述相對運動周期地發生的磁場 方向的變化’輸出作爲具有90°相位差的正弦波狀訊號與 201025800 餘弦波狀訊號的磁性感測器，又具有依據上述正弦波狀訊 號與上述餘弦波狀訊號’檢測上述位置的位置檢測電路， 爲其特徵者。 又’申請專利範圍第23項所述的發明，是上述磁性感 測器是具有藉由磁場的方向使得電阻値變化的磁性電阻元 件’上述位置檢測電路是具有：以所定周期抽樣上述正弦 波狀訊號及上述餘弦波狀訊號而轉換成數位資料的A/D轉 換器；及由被轉換成上述數位資料的正弦成分與餘弦成分 ’求出相位角資料的相位角資料算出手段；及生成因應於 相位角資料的脈衝訊號的脈衝訊號輸出手段，爲其特徵者 〇 又，申請專利範圍第24項所述的發明，是一種分散配 置線型馬達驅動系統，其特徵爲：申請專利範圍第17項至 第23項中任一項所述的上述分散配置線型馬達的各線型馬 達，具備控制上述線型馬達的馬達驅動裝置。 依照本發明，線型馬達的相鄰接的定子的極彼此間的 最小距離，爲轉子的極彼此間的最大距離以下，且相鄰接 的定子的相同種類的極彼此間的最小距離，成爲定子的周 期構造的1周期長度的自然數倍的方式，定子被分散配置 之故，因而轉子從定子轉動至相鄰接的定子之際，定子的 極與轉子的極互相地作用成在轉子不會發生轉子的推進力 損失，又，從轉子相鄰接的定子的至少一方可得到推進力 而可速度控制的適用於定子的分散配置的線型馬達。 -13- 201025800 【實施方式】 以下，針對於用以實施本發明的最好形態參照圖式加 以說明。 (第1實施形態） 首先，針對於本發明的第1實施形態的分散配置線型 馬達的驅動系統的槪略構成及功能，依據圖式加以說明。 第1圖是表示本實施形態的分散配置線型馬達的驅動 系統的槪略構成的方塊圖。第2圖是表示第1圖的分散配置 線型馬達的定子與轉子的立體圖。第3圖是表示第1圖的定 子的排列的圖式。第4圖是表示第1圖的定子及轉子的極的 周期構造的模式圖。 如第1圖所示地，分散配置線型馬達1 A的驅動系統是 具備：搬運零件或工件等的分散配置線型馬達1A，及控 制分散配置線型馬達1A的複數個馬達驅動裝置40，及控 制複數個馬達驅動裝置4 0的上級控制器5 0。 分散配置線型馬達1A是線型馬達1A1、1A2、1A3隔著 所定距離D 1的間隔排列於搬運方向。 分散配置線型馬達1A的各線型馬達1A1、1A2、1A3是 具有，藉由磁性作用互相地相對運動的定子丨〇 A與轉子 20A ’及檢測對於定子10A的轉子20A的相對性位置的複數 個位置檢測裝置30 ’及轉換來自複數個位置檢測裝置3〇的 訊號的位置資訊轉換器35。 上級控制器50與各該馬達驅動裝置4〇，是藉由控制線 201025800 51被連接。馬達驅動裝置40與位置資訊轉換器35是藉由編 碼器電纜52被連接。位置資訊轉換器35，及設於同定子 10A的位置檢測裝置30是藉由編碼器電纜52被連接。馬達 驅動裝置40與定子10 A是藉由動力電纜53被連接。 又，各線型馬達1A1、1A2、1A3的轉子20A，是移動 而移至下一線型馬達的定子上之故，因而並不是經常地屬 於同各線型馬達1A1、1A2、1A3。又，轉子2 0A是藉由未 φ 圖示的引導裝置，被引導所定軌道，又，維持著定子10A 與轉子20A之間隙》 如第2圖所示地，定子1 0 A是具有：供應有3相交流電 流而與轉子20A磁性地作用的線圈1 1的突極1 2。線圈1 1是 有U相用的線圈11a，及V相用的線圈lib及W相用的線圈 1 lc的3種類。突極12是對應於線圈1 la、1 lb、1 lc而有U相 用的突極12a、V相用的突極12b、W相用的突極12c的3種 類。此些爲藉由將電流流在線圈1 1，產生於轉子20A側的 φ 極的一例。又，此些線圈11a、lib、11c及突極12a、12b 、1 2c，爲依U相、V相、W相的順序，形成有周期性地排 列於定子10A與轉子2 0A的相對運動的方向的周期構造。 亦即，在相對運動的方向的一例的定子10A的長度方向的 線圈1 1及突極12是形成U相、V相、W相的周期構造。[Technical Field] The present invention relates to a linear motor that drives a vehicle such as a transport device, in particular, a distributed arrangement linear motor in which a stator of a linear motor is dispersed, and has control thereof A linear motor drive system for the distributed arrangement of the motor drive of the linear motor. [Prior Art] A linear motor used for conveyance of parts or workpieces is generally a structure in which a rotor can be moved on one stator. However, when the conveyance path becomes long, problems such as an increase in equipment cost occur, and therefore, it is proposed to disperse the stator and arrange it. In the stator of such a distributed arrangement (discontinuous arrangement), for example, Patent Document 1 discloses that the relationship between the position of the secondary side vehicle and the acceleration is grasped, and even if the above-ground primary side distributed arrangement driven by the open circuit is disclosed, it does not occur. Method for reducing the speed variation of a linear motor having a non-uniform speed. Further, in an in-line type motor, an optical or magnetic linear scale is used to sense the linear scale in order to accurately perform position control of the rotor. For example, Patent Document 2 discloses that the position detecting means is composed of a linear magnetic scale as a detected portion of a pedestal disposed on the primary side, and is disposed on the secondary side base corresponding to the linear magnetic scale. A technique consisting of a linear scale sensor unit of the stage. In addition, when the linear scale is used, in order to determine the position of the rotor, the same as the linear scale, the original signal given by the -5 - 201025800 mode signal read by the optical sensor is set as the origin. In the magnetization patent document 3 for the dot signal, the linear magnetic scale is a technique in which the magnetic poles of the S are alternately magnetized at a fine pitch along the length of the susceptor at a fine pitch to form an origin signal magnetization portion. Japanese Patent Laid-Open Publication No. Hei 9-261943 (Patent Document 3: Japanese Laid-Open Patent Publication No. Hei 9-261 943 (Patent Disclosure) In the stator, in the case of one fixed five rotors, it is necessary to consider the complex stator or the complex correlation, etc., and thus the control method is also diverse. However, the technique of Patent Document 1 is to avoid the main change. The speed method of a linear motor in which the speed of the operation is not uniform, in particular, the control method in which the rotor is moved again to the situation once the stator is separated. Therefore, the case where the rotor straddles the stator and the like cannot be said to be a distributed linear motor. In order to correctly enter the linear motor in a distributed manner, if a conventional technique such as Patent Document 2 is used, it is necessary to set a linear scale and read the sensor. The linear motor must be correctly attached. Therefore, in the system of the distributed linear motor, the number of motors must increase the number of parts such as the linear scale, for example, on the side. Direction, N and at the end of the shape "0039") Γ 0040") The control and the 1 ^ rotor are mutually dependent on the acceleration variation and the next stator is fully considered. The position control is determined in each line type. In addition to increasing the line type, it takes time to set the linear scale of each line-6-201025800 motor. Further, in order to accurately control the position of the linear motor in a distributed manner, it is necessary to provide a sensor for origin detection and a sensor for origin detection in each linear motor by the conventional technique such as Patent Document 3. Therefore, in the system of the distributed linear motor, the number of the linear motors must be increased, and the number of parts such as the origin point mark and the sensor for origin detection must be increased. The present invention has been made in an effort to solve the above problems, and provides a linear motor that is suitable for distributed arrangement of stators. In order to solve the above problems, the invention described in claim 1 is a distributed arrangement linear motor which is a linear motor in which a stator and a rotor move relative to each other, wherein the stator and the rotor are magnetically mutually mutually a plurality of poles of the plurality of types of action, and a periodic structure in which the plurality of types are periodically arranged in the direction of the relative movement in accordance with the order of the types, wherein the stator is arranged in a direction parallel to the relative movement, and the adjacent ones are adjacent to each other The minimum distance between the poles of the stator is equal to or less than the maximum distance between the poles of the rotor, and the minimum distance between the poles of the same type of the adjacent stators is the length of one cycle of the periodic structure of the stator. The number of times is many. Further, the invention described in claim 2 is a distributed arrangement linear motor which is a linear motor in which a stator and a rotor move relative to each other, and is characterized in that the stator and the rotor respectively have magnetically interacting with each other. The type of poles and the plurality of types of the above-described types of the periodic structure in which the above-described relative movements are sequentially arranged in the direction of the relative motion. The stator is adjacent to the stator in a direction in which the plurality of stators are arranged in the direction of the relative motion. The phases of the respective periodic structures are mutually coincident, and the minimum distance ' between the poles of the adjacent stators is equal to or less than the maximum distance between the poles of the rotor. According to the invention of claim 3, the stator is a coil having the magnetic action of the rotor, and the stator is extremely high in the rotor, and the current is generated in the coil. Characterized by it. Further, in the invention according to claim 4, the stator is a permanent magnet having a magnetic action on the rotor, and the stator is substantially formed on the rotor side by the permanent magnet. Feature. According to a fifth aspect of the invention, the linear motor further includes: a detection target extending in the relative movement direction; and a detector for detecting the relative movement of the object to be detected, wherein the detector is The first and second detectors are arranged in the direction of the relative movement, and the distance between the first detector and the second detector is equal to or less than the length of the object to be detected. Further, the invention according to claim 6 is that the linear motor further includes a position detecting device that detects a relative position of the rotor with respect to the stator, and the position detecting device has a configuration according to the periodic structure The change of the direction of the magnetic field occurring periodically relative to the motion, outputting the 201025800 magnetic sensor as a sinusoidal signal and a cosine wave signal having a phase difference of 90°, and detecting according to the sinusoidal signal and the cosine wave signal described above The position detecting circuit at the above position is characterized by it. Further, the invention described in claim 7 is a distributed arrangement line type motor, wherein the magnetic sensor is a magnetic resistance element having a resistance 値 change by a direction of a magnetic field, and the position detecting circuit has a predetermined period. An A/D converter that converts the sinusoidal signal and the cosine wave signal into digital data; and calculates a phase angle data of the phase angle data by converting the sinusoidal component and the cosine component of the digital data into Means; and a pulse signal output means for generating a pulse signal corresponding to the phase angle data, which is characterized by the same. The invention described in the eighth aspect of the invention is a distributed configuration line type motor drive system, characterized in that each of the above-described distributed configuration line type motors according to any one of the above claims 1 to 7 is applied. The motor includes a motor drive device that controls the above-described linear motor. Further, the invention according to claim 9 is a distributed arrangement φ linear motor ′ is a linear motor including a stator and a rotor that move relative to each other and a position detecting device that detects a relative position of the rotor with respect to the stator. The stator and the rotor are a plurality of poles each having magnetically interacting with each other, and a periodic structure in which the plurality of types are periodically arranged in the direction of the relative movement in the order of the above-described types. The detecting device has a magnetic sensor that outputs a sinusoidal signal having a phase difference of 90° and a cosine wave signal according to a change in a magnetic field direction periodically generated by the relative motion according to the periodic structure, and a basis The sinusoidal signal and the cosine wave signal, -9 - 201025800, detect the position detecting circuit at the above position, and the stator is arranged in a direction parallel to the relative movement. Further, the invention described in claim 10 is that the magnetic sensor is a magnetic resistance element having a resistance 値 changed by a direction of a magnetic field, and the position detecting circuit has: sampling the sine wave in a predetermined period An A/D converter that converts the signal into the digital data by the cosine wave signal; and a sinusoidal component and a cosine component converted into the digital data, and a phase angle data calculation means for obtaining the phase angle data; and generating a response The pulse signal output means of the pulse signal of the phase angle data is characterized by it. Further, in the invention according to claim 1, the magnetic sensor is a first and a second magnetic sensor having a direction of the relative motion, and the first and second magnetic sensors are provided. ' is provided in either one of the stator and the rotor, and the distance between the first magnetic sensor and the second magnetic sensor is equal to or less than a maximum distance between the other poles of the stator and the rotor. Characterized by it. Further, the invention of claim 12 is that the distance between the poles of the adjacent stators is equal to or less than the maximum distance between the poles of the rotor, and the adjacent stators are the same The minimum distance between the poles of the type is a natural multiple of the length of one cycle of the periodic structure of the stator described above. Further, the invention according to claim 13 is that the phases of the respective periodic structures of the adjacent stators are mutually coincident, and the minimum distance between the poles of the adjacent stators is the rotor. The poles below the maximum distance between each other are characteristic of them. In the invention according to claim 14, the stator is a coil having the magnetic action on the rotor, and the stator is generated in the rotor by flowing a current to the coil. The pole of the side is characterized by it. Further, the invention according to claim 15 is that the stator is a permanent magnet having a magnetic action on the rotor, and the stator is extremely large on the rotor side by the permanent magnet, and is φ Feature. Further, the invention described in claim 16 is a distributed arrangement line type motor drive system, which is characterized by the above-described distributed arrangement line type motor according to any one of the items 9 to 15. Each linear motor includes a motor drive device that controls the linear motor. Further, the invention of claim 17 is a distributed arrangement linear motor comprising: a stator and a rotor that move relative to each other, and a detected object extending in a direction of the relative movement, and detecting the phase 0 is a linear motor for detecting the object to be detected, wherein the detector is arranged in a plurality of directions in the relative movement, and the distance between the adjacent detectors is the object to be detected. Below the length, it is characterized by it. Further, the invention of claim 18 is characterized in that the stator and the rotor each have a plurality of poles that magnetically interact with each other, and the plurality of types of the poles in the direction of the relative movement in the order of the above-described types a periodic structure in which the stators are arranged in a direction in which the relative movement is interposed, and a distance between the poles of the adjacent stators is a minimum -11 - 201025800 distance, which is a maximum distance between the poles of the rotor The minimum distance ' between the poles of the same type of the adjacent stators is a natural multiple of the length of one cycle of the periodic structure of the stator. Further, in the invention of claim 19, the stator and the rotor each have a plurality of poles that magnetically interact with each other, and the plurality of types of the poles of the plurality of types are sequentially moved in the direction of the relative movement. a periodic structure in which the stators are arranged in a direction in which the relative movement is interposed, and phases of the respective periodic structures of the adjacent stators are mutually coincident, and a minimum of the poles of the adjacent stators are adjacent to each other The distance is equal to or less than the maximum distance between the poles of the rotor described above. Further, in the invention according to claim 20, the stator is a coil having the magnetic action of the rotor, and the stator is extremely generated by the current flowing through the coil and is generated on the rotor side. Its characteristics. Further, in the invention according to claim 21, the stator is a permanent magnet having a magnetic action on the rotor, and the stator is substantially formed on the rotor side by the permanent magnet. Feature. Further, in the invention of claim 22, the linear motor further includes a position detecting device that detects a relative position of the rotor with respect to the stator, and the position detecting device has the periodic structure as the detector. The magnetic field sensor having a sinusoidal signal having a phase difference of 90° and a cosine wave signal of 201025800 is outputted by the change of the direction of the magnetic field periodically generated by the relative motion, and has the sine wave signal and the cosine according to the above The wave signal 'detects the position detection circuit at the above position, which is characterized by it. Further, in the invention of claim 23, the magnetic sensor is a magnetic resistance element having a resistance 値 change by a direction of a magnetic field. The position detecting circuit has a sinusoidal shape sampled at a predetermined period. An A/D converter for converting a signal and the cosine wave signal into digital data; and a phase angle data calculation means for obtaining a phase angle data from a sinusoidal component and a cosine component converted into the digital data; and generating a response The pulse signal output means of the pulse signal of the phase angle data is characterized by the invention described in claim 24, which is a distributed configuration line type motor drive system, which is characterized in that: Each of the line motors of the above-described distributed arrangement line type motor according to any one of the items 23 includes a motor drive device that controls the line motor. According to the present invention, the minimum distance between the poles of the adjacent stators of the linear motor is below the maximum distance between the poles of the rotor, and the minimum distance between the poles of the same kind of adjacent stators becomes the stator. The periodic structure is a natural multiple of one cycle length, and the stator is dispersedly arranged. Therefore, when the rotor rotates from the stator to the adjacent stator, the poles of the stator and the poles of the rotor interact with each other so that the rotor does not A linear motor that is capable of obtaining a propulsive force from at least one of the stators adjacent to the rotor and capable of speed control, which is suitable for distributed arrangement of the stator, is generated. [Embodiment] Hereinafter, the best mode for carrying out the invention will be described with reference to the drawings. (First embodiment) First, the schematic configuration and function of the drive system of the distributed arrangement linear motor according to the first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a block diagram showing a schematic configuration of a drive system of a distributed arrangement linear motor according to the present embodiment. Fig. 2 is a perspective view showing a stator and a rotor of the distributed arrangement linear motor of Fig. 1; Fig. 3 is a view showing the arrangement of the stators in Fig. 1. Fig. 4 is a schematic view showing the periodic structure of the poles of the stator and the rotor of Fig. 1. As shown in Fig. 1, the drive system of the distributed arrangement linear motor 1A is a distributed arrangement linear motor 1A including a transporting component or a workpiece, and a plurality of motor drive devices 40 for controlling the distributed linear motor 1A, and a plurality of control motors The upper controller 50 of the motor drive unit 40. The distributed arrangement linear motor 1A is arranged such that the linear motors 1A1, 1A2, and 1A3 are arranged in the conveyance direction at intervals of a predetermined distance D1. Each of the linear motors 1A1, 1A2, and 1A3 of the distributed arrangement linear motor 1A has a plurality of positions of the stator 丨〇A and the rotor 20A' which are mutually moved relative to each other by magnetic action, and the relative position of the rotor 20A for the stator 10A. The detecting device 30' and the position information converter 35 for converting signals from the plurality of position detecting devices 3A. The upper controller 50 and each of the motor driving devices 4 are connected by a control line 201025800 51. The motor drive unit 40 and the position information converter 35 are connected by an encoder cable 52. The position information converter 35 and the position detecting device 30 provided in the same stator 10A are connected by an encoder cable 52. The motor drive unit 40 and the stator 10A are connected by a power cable 53. Further, the rotors 20A of the linear motors 1A1, 1A2, and 1A3 are moved to the stator of the next linear motor, and thus are not always associated with the respective linear motors 1A1, 1A2, and 1A3. Further, the rotor 20A is guided by a guide device not shown by φ, and the gap between the stator 10A and the rotor 20A is maintained. As shown in Fig. 2, the stator 10A has: supplied The salient pole 1 of the coil 1 1 that magnetically interacts with the rotor 20A in a three-phase alternating current. The coil 1 1 has three types of coils 11a for the U phase, and the coil lib for the V phase and the coil 1 lc for the W phase. The salient pole 12 is three types of the salient pole 12a for the U phase, the salient pole 12b for the V phase, and the salient pole 12c for the W phase corresponding to the coils 1 la, 1 lb, and 1 lc. These are examples of the φ pole generated on the side of the rotor 20A by flowing a current in the coil 11. Further, the coils 11a, 11b, 11c and the salient poles 12a, 12b, and 12c are formed in a sequence of U, V, and W phases, and are periodically arranged in the relative motion of the stator 10A and the rotor 20A. The periodic structure of the direction. In other words, the coil 11 and the salient pole 12 in the longitudinal direction of the stator 10A as an example of the direction of relative movement are periodic structures in which the U phase, the V phase, and the W phase are formed.
又，包括突極12的定子10A的電磁鐵的鐵心部，是矽 鋼等的磁滯損失少的磁性材料所構成，如第2圖所示地’ 鐵心部是形成朝定子10A的寬度方向而突出於轉子20A相 對的一側的突極12，該突極12爲梳齒狀地排列於定子1〇 A -15- 201025800 的長度方向。 如第3圖所示地，定子10A是隔著某一間隔，以定子 10A1、10A2、10A3等的順序隔離排列於定子10A的長度方 向。 之後，如第2圖所示地，轉子20是具有載置零件或工 件等的工作台21，及設置於工作台21下面的驅動用的永久 磁鐵22，而功能作爲零件或工件等的托架。如第4圖所示 地，永久磁鐵22是具有相對於定子10A—側的極爲N極的N 極磁鐵22a，及S極的S極磁鐵2 2b。又，依N極、S極之順 序，N極磁鐵22a與S極磁鐵22b具有交互地朝定子10A與轉 子20A的相對運動的方向周期地排列的周期構造。亦即， 轉子20 A是在相對運動的方向的一例子的定子10 A的長度 方向具有N極與S極的周期構造。 又，因應於流在定子10A的各線圈11a、lib、11c的3 相交流的電流的方向或強度而發生移動磁場，磁性地作用 著突極12a、12b、12c，及N極磁鐵22a與S極磁鐵22b，而 在定子10A的長度方向發生定子10A與轉子2〇A的相對運動 ，亦即，定子10A與轉子20A是互相地磁性地作用，而轉 子20A是朝定子10A的長度方向相對運動。 以下，依據於第4圖詳細地說明定子10A的排列關係 等。 如第4圖所示地，定子10A的突極12是以線圈間距的 Cp的1周期的長度，排列地突極12a、12b、12c的順序被排 列。定子1 0 A的周期構造的1周期的長度的一例的線圈間 201025800 距Cp，是UVW相中，相同相的突極彼此間的最小距離。 例如，U相用的突極12a與下一 u相用的突極12a的距離， 又，在第4圖中，以突極12的中心部分作爲基準描繪著距 離。在此，定子10A或轉子20A的距離或長度的測定方法 ，是連結不考慮突極12或永久磁鐵22的極種類的周期構造 的相同相位處加以測定就可以。例如，除了突極1 2的中心 以外，連結突極12的一方側的角的距離或長度也可以。 φ 相鄰接的定子10A1、10A2的相同種類的極彼此間的 最小距離D1的一例，是連結在定子10A1，最位於定子 10A2側的U相的突極12a，及在定子1 〇 A 2，最位於定子 10A1側的U相的突極12a的距離。 該距離D1爲成爲線圏間距Cp的自然數倍的方式，採 取定子1 0A彼此間的間隔，並隔著排列有定子1 OA。又， 作成另外的看法，則定子10A1的周期構造的相位與定子 10A2的周期構造的相位互相地一致。亦即，定子10A1的 φ UVW相的周期構造如第4圖中以虛線所示的方式，假設地 延長定子10A2側，作成在該延長上重疊定子10A2的周期 構造的方式，配置有定子10A。 又，如第4圖所示，相鄰接的定子10A1、10A2的極彼 此間的最小距離D2的一例中，連接在定子1 0 A 1最位於定 子1 0A2側的W相的突極12c，及定子10A2最位於定子10A1 側的U相的突極12a的距離。該距離D2是轉子20A的長度 Lmv以下。在此，如第4圖所示地，轉子20A的長度Lmv是 連結位於轉子20A的相對運動方向的兩端的永久磁鐵22彼 -17- 201025800 此間的距離。亦即，轉子20 A的極彼此間的最大距離的— 例。 如此地，距離D2爲轉子20A的長度Lmv以下，則轉子 20A可橫跨於定子10A1與定子i〇A2之狀態下，成爲經常地 相對定子10A的極的任一極，及轉子2〇A的極的任一極。 又’換句話說’定子10A1的周期構造的相位與定子 10A2的周期構造’互相地一致等，從定子1〇“連續到定 子10A2而在具有線圈11或突極I2的周期構造連續的1個定 子中’相當於省略了距離D2的部分的線圈11或突極12。 但是，除掉距離D2的兩端部分的線圈11或突極12。又， 第4圖的情形，距離D1是線圈間距Cp的2以上的自然數倍 。又，若考量沒有位於定子10A1的定子10A1側的端的V、 W相的突極12b、12c，U相的突極12a最位於定子10A1側的 情形，則距離D 1是線圈間距Cp的1以上的自然數倍。 以下如第5圖所示地，位置檢測裝置30是具有：檢測 磁性的磁性感測器3 1，及將來自磁性感測器3 1的訊號，轉 換成特定位置而用以檢測所用的訊號的位置檢測電路32。 在此，磁性感測器3 1是檢測器的一例。 磁性感測器3 1是在配置於定子1 0A的位置檢測裝置30 中，位於相對於轉子20A的一側的中心部分。 如第1或第3圖所示地，位置檢測裝置3 0是排列於位在 定子10A的長度方向的兩端的突極12的外側，且配置於定 子10A的寬度方向的中央。又，在相對於定子10A的轉子 20A的一側面對設置有磁性感測器3 1。位置檢測裝置30的 201025800 設置位置是隔著設於定子l〇A的長度方向，而不會受到線 圏11的影響就可以。 又，磁性感測器31是檢測從定子10A及轉子20A的相 對運動方向延伸的被檢測對象的一例的轉子20A的永久磁 鐵22所致的磁場。磁性感測器3 1是檢測定子1 0 A及轉子 20A進行相對運動所致的磁場的變化。尤其是，磁性感測 器3 1是檢測磁場的方向的感測器（詳述於後）。位置檢測 φ 裝置30間的距離Ds，亦即磁性感測器31間的距離Ds爲轉 子20A的長度Lmv以下。亦即，此爲第1磁性感測器31與第 2磁性感測器3 1之間的距離，爲轉子20A的極彼此間的最 大距離以下的一例子。 又，如第1圖或第5圖所示地，位置資訊轉換器35，若 來自複數位置檢測裝置30的輸入訊號爲複數，選擇其中之 一訊號輸出對馬達驅動裝置40。例如，位置資訊轉換器35 是輸出最新所輸入的輸入訊號。又，位置資訊轉換器35是 φ 輸入訊號爲一訊號時，則直接輸出，而沒有輸入訊號時， 則未輸出。 以下，如第5圖所示地，馬達驅動裝置40是具有：依 據感測器等資訊控制流在線型馬達的定子1 0 A的電流的控 制器41，及依據控制器41進行轉換來自電源45的電力轉換 器42，及檢測電力轉換器42流在定子Ι0Α的電力的電流感 測器43。 控制器4 1是連接有電流感測器43，及藉由控制線5 1與 上級控制器5〇相連接，藉由編碼器電纜5 2與位置資訊轉換 -19- 201025800 器35相連接。 又，控制器41是依據來自上級控制器50的指令値進行 移動轉子20A的方式，控制PWM反相器（PWM : Pulse Width Modulation )等的電力轉換器42，最後控制供應於 定子1 0A的線圈1 1的電流。控制器4 1的控制系統是由進行 位置控制的位置控制迴路，及進行速度控制的速度控制迴 路，及進行電流控制的電流控制迴路所構成。 馬達驅動裝置40是藉由來自上級控制器50的指令値被 控制，到達至如上級控制器50的指令値一樣的位置爲止， 將電流供應至定子1 〇 A的線圈1 1。 又，線型馬達1A1、1A2、1A3等是作爲轉子或定子的 一方，N極及S極的磁極被磁化於與交互地排列有N極及S 極的磁極的1個軸線方向正交的方向的兩端面的複數個永 久磁鐵，具有朝軸線方向排列的激磁磁鐵，而作爲轉子或 定子的另一方，具有經由間隙相對於激磁磁鐵的複數線圈 的扁形線型馬達的一例。 以下，針對於位置檢測裝置3 0的磁性感測器3 1及位置 檢測電路32依據圖式詳細地加以說明。 首先，針對於磁性感測器3 1，依據第6圖至第1 4圖加 以說明。 第6圖是表示磁性感測器3 1的原理的立體圖。第7圖是 表示磁性感測器3 1的電阻値與磁場方向的角度0之關係的 圖表。第8圖及第10(A)圖及第11 (A)圖是表示磁性感 測器3 1的強磁性薄膜金屬的形狀的俯視圖。第9圖及第1 〇 -20- 201025800 (B)圖及第11(B)圖是表示磁性感測器31的等値電路 圖。又，第10圖是表示由惠斯登電橋（Wheatstone bridge )所構成的磁性感測器3 1的圖式。 如第6圖所示地，磁性感測器3 1是具有：S i或是玻璃 基板3 1 a，及形成於其上面的以Ni、Fe等的強磁性金屬作 爲主成分的合金的強磁性薄膜金屬所構成的磁阻元件31b 。磁性感測器3 1是在特定的磁場方向有電阻値變化，而被 稱爲 AMR ( Anisotropic-Magnetro-Resistance )感測器（ 向異性磁阻元件）。 將電流流在磁阻元件3 1 b，施加電阻變化量會飽和的 磁場強度，而將其磁場（H)的方向對於電流方向γ作成 給予角度變化。如第7圖所示地，電阻變化量（△!〇是電 流方向與磁場方向呈垂直（0=90°，27〇。）時成爲最大， 而電流方向與磁場的方向呈平行（0=0。，180。）時成爲 最小。電阻値R是因應於電流方向與磁場方向的角度成分 φ ’如下述的（1)式地變化。 R = R 0 —△Rs i n20.·· (1) R〇 :無磁場中的強磁性薄膜金屬的電阻値 △ R :電阻變化量 Θ :表示磁場方向的角度 若飽和感度領域以上，則AR是成爲常數，而電阻値 R是不會受到磁場強度的影響。 以下’將以飽和感度領域以上的磁場強度，來檢測磁 -21 - 201025800 場的方向的磁性感測器的強磁性薄膜金屬的形狀表示於第 8圖。縱方向地所形成的強磁性薄膜金屬元件（R1)與橫 方向的元件（R2 )成爲串聯地連接的形狀。 對於元件（R1)促使最大電阻變化的垂直方向的磁場 ，是對於元件（R2 )成爲最小的電阻變化。電阻値R 1與 R2是以下式所給予。Further, the core portion of the electromagnet including the stator 10A of the salient pole 12 is made of a magnetic material having a small hysteresis loss such as a steel or the like, and as shown in Fig. 2, the core portion is formed to protrude in the width direction of the stator 10A. The salient poles 12 on the opposite side of the rotor 20A are arranged in a comb-tooth shape in the longitudinal direction of the stator 1A - 15 - 201025800. As shown in Fig. 3, the stator 10A is spaced apart from each other in the longitudinal direction of the stator 10A in the order of the stators 10A1, 10A2, 10A3 and the like with a certain interval therebetween. Then, as shown in FIG. 2, the rotor 20 is a table 21 having a workpiece or a workpiece placed thereon, and a permanent magnet 22 for driving provided on the lower surface of the table 21, and functions as a bracket for a component or a workpiece. . As shown in Fig. 4, the permanent magnet 22 is an N pole magnet 22a having a substantially N pole with respect to the stator 10A side, and an S pole magnet 2 2b having an S pole. Further, the N-pole magnet 22a and the S-pole magnet 22b have a periodic structure in which the N-pole magnet 22a and the S-pole magnet 22b are alternately arranged in the direction in which the stator 10A and the rotor 20A move relative to each other. That is, the rotor 20A has a periodic structure having N poles and S poles in the longitudinal direction of the stator 10 A as an example of the direction of relative motion. Further, a moving magnetic field is generated in response to the direction or intensity of the three-phase alternating current flowing through the coils 11a, 11b, 11c of the stator 10A, and the salient poles 12a, 12b, and 12c and the N-pole magnets 22a and S are magnetically applied. The pole magnet 22b has a relative movement of the stator 10A and the rotor 2A in the longitudinal direction of the stator 10A, that is, the stator 10A and the rotor 20A magnetically interact with each other, and the rotor 20A is relatively moved in the longitudinal direction of the stator 10A. . Hereinafter, the arrangement relationship of the stators 10A and the like will be described in detail based on Fig. 4 . As shown in Fig. 4, the salient poles 12 of the stator 10A are arranged in the order of one cycle of Cp of the coil pitch, and the arrays of the salient poles 12a, 12b, and 12c are arranged in this order. The inter-coil of an example of the length of one cycle of the periodic structure of the stator 10 A 201025800 The distance Cp is the minimum distance between the salient poles of the same phase in the UVW phase. For example, the distance between the salient pole 12a for the U phase and the salient pole 12a for the next u phase, and in Fig. 4, the distance is plotted with the central portion of the salient pole 12 as a reference. Here, the method of measuring the distance or length of the stator 10A or the rotor 20A may be measured at the same phase in which the periodic structure of the pole type of the salient pole 12 or the permanent magnet 22 is not considered. For example, in addition to the center of the salient pole 12, the distance or length of the corner of one side of the salient pole 12 may be connected. An example of the minimum distance D1 between the poles of the same type of the stators 10A1 and 10A2 adjacent to each other is the U-phase salient pole 12a connected to the stator 10A1, the stator 10A2, and the stator 1 〇A 2 . The distance of the U-phase salient pole 12a which is located most on the side of the stator 10A1. The distance D1 is a natural multiple of the line pitch Cp, and the stator 10A is spaced apart from each other with the stator 1 OA interposed therebetween. Further, in addition, the phase of the periodic structure of the stator 10A1 and the phase of the periodic structure of the stator 10A2 coincide with each other. In other words, the periodic structure of the φ UVW phase of the stator 10A1 is such that the stator 10A2 side is extended as shown by a broken line in Fig. 4, and the stator 10A is disposed such that the periodic structure of the stator 10A2 is superposed on the extension. Further, as shown in Fig. 4, in the example of the minimum distance D2 between the poles of the adjacent stators 10A1 and 10A2, the W-phase salient pole 12c on the side of the stator 10A2 is connected to the stator 10A1, The stator 10A2 is located at the distance of the U-phase salient pole 12a of the stator 10A1 side. This distance D2 is equal to or less than the length Lmv of the rotor 20A. Here, as shown in Fig. 4, the length Lmv of the rotor 20A is the distance between the permanent magnets 22 -17-201025800 which are connected at both ends in the relative movement direction of the rotor 20A. That is, the maximum distance between the poles of the rotor 20 A is as an example. As described above, when the distance D2 is equal to or less than the length Lmv of the rotor 20A, the rotor 20A can be traversed between the stator 10A1 and the stator i〇A2, and is always one of the poles of the stator 10A and the rotor 2A. Any pole of the pole. In other words, the "phase of the periodic structure of the stator 10A1 and the periodic structure of the stator 10A2" coincide with each other, and the stator 1 "continues to the stator 10A2 and has a continuous periodic structure having the coil 11 or the salient pole I2. In the stator, 'corresponds to the coil 11 or the salient pole 12 of the portion where the distance D2 is omitted. However, the coil 11 or the salient pole 12 at both end portions of the distance D2 is removed. Again, in the case of Fig. 4, the distance D1 is the coil pitch. In addition, when the V- and W-phase salient poles 12b and 12c are not located at the end of the stator 10A1 side of the stator 10A1, and the U-phase salient pole 12a is located most on the stator 10A1 side, the distance is considered. D 1 is a natural multiple of 1 or more of the coil pitch Cp. As shown in Fig. 5, the position detecting device 30 has a magnetic sensor 301 for detecting magnetism and a magnetic sensor 31 from the magnetic sensor 31. The signal is converted to a specific position for detecting the signal used by the position detecting circuit 32. Here, the magnetic sensor 31 is an example of a detector. The magnetic sensor 31 is detected at a position of the stator 10A. In the device 30, located on one side of the rotor 20A In the first or third embodiment, the position detecting device 30 is arranged outside the salient poles 12 at both ends in the longitudinal direction of the stator 10A, and is disposed at the center in the width direction of the stator 10A. The magnetic sensor 31 is disposed on a side opposite to the rotor 20A of the stator 10A. The 201025800 position of the position detecting device 30 is disposed in the longitudinal direction of the stator 10A without being received by the wire 11 The magnetic sensor 31 is a magnetic field caused by the permanent magnet 22 of the rotor 20A that detects an object to be detected extending from the relative movement direction of the stator 10A and the rotor 20A. The magnetic sensor 31 is The change of the magnetic field caused by the relative movement of the stator 10A and the rotor 20A is detected. In particular, the magnetic sensor 31 is a sensor for detecting the direction of the magnetic field (described in detail later). The position detection φ between the devices 30 The distance Ds, that is, the distance Ds between the magnetic sensors 31 is equal to or less than the length Lmv of the rotor 20A. That is, the distance between the first magnetic sensor 31 and the second magnetic sensor 31 is the rotor. 20A is below the maximum distance between the poles Further, as shown in Fig. 1 or Fig. 5, the position information converter 35 selects one of the signal outputs to the motor driving device 40 if the input signal from the plurality of position detecting devices 30 is plural. For example, the position The information converter 35 outputs the latest input signal. Further, the position information converter 35 outputs the φ input signal as a signal, and outputs no signal. If there is no input signal, it is not output. Hereinafter, as shown in Fig. 5. The motor drive unit 40 has a controller 41 for controlling a current flowing through the stator 10 A of the in-line motor according to information such as a sensor, and a power converter 42 for converting the power source 45 according to the controller 41, and A current sensor 43 that detects the power of the power converter 42 flowing through the stator Α0Α is detected. The controller 4 1 is connected to the current sensor 43 and connected to the upper controller 5 through the control line 51, and is connected to the position information conversion -19-201025800 through the encoder cable 52. Further, the controller 41 controls the power converter 42 such as a PWM inverter (PWM: Pulse Width Modulation) in accordance with a command from the upper controller 50 to move the rotor 20A, and finally controls the coil supplied to the stator 10A. 1 1 current. The control system of the controller 41 is composed of a position control loop for position control, a speed control loop for speed control, and a current control loop for current control. The motor driving device 40 is controlled by the command from the upper controller 50 to reach the position of the command 値 of the upper controller 50, and supplies current to the coil 1 1 of the stator 1 〇 A. Further, the linear motors 1A1, 1A2, 1A3 and the like are one of the rotor and the stator, and the magnetic poles of the N pole and the S pole are magnetized in a direction orthogonal to one axial direction in which the magnetic poles of the N pole and the S pole are alternately arranged. An example of a flat linear motor having a plurality of permanent magnets on both end faces having excitation magnets arranged in the axial direction and having a plurality of coils passing through the gap with respect to the field magnets as the other of the rotor or the stator. Hereinafter, the magnetic sensor 3 1 and the position detecting circuit 32 for the position detecting device 30 will be described in detail based on the drawings. First, the magnetic sensor 3 1 is explained in accordance with Figs. 6 to 14 . Fig. 6 is a perspective view showing the principle of the magnetic sensor 31. Fig. 7 is a graph showing the relationship between the resistance 値 of the magnetic sensor 3 1 and the angle 0 of the magnetic field direction. Fig. 8 and Figs. 10(A) and 11(A) are plan views showing the shape of the ferromagnetic thin film metal of the magnetic sensor 31. Fig. 9 and Fig. 1 - 20 - 201025800 (B) and Fig. 11 (B) are diagrams showing an isometric circuit of the magnetic sensor 31. Further, Fig. 10 is a view showing a magnetic sensor 3 1 composed of a Wheatstone bridge. As shown in Fig. 6, the magnetic sensor 3 1 is a ferromagnetic material having: S i or a glass substrate 31a, and an alloy having a ferromagnetic metal such as Ni or Fe as a main component formed thereon. A magnetoresistive element 31b made of a thin film metal. The magnetic sensor 3 1 has a resistance 値 change in a specific magnetic field direction, and is called an AMR (Anisotropic-Magnetro-Resistance) sensor (antotropic magnetoresistive element). A current is applied to the magnetoresistive element 3 1 b, and a magnetic field strength at which the amount of change in resistance is saturated is applied, and the direction of the magnetic field (H) is given an angle change with respect to the current direction γ. As shown in Fig. 7, the resistance change amount (Δ!〇 is the current direction perpendicular to the magnetic field direction (0=90°, 27〇.) becomes the maximum, and the current direction is parallel to the direction of the magnetic field (0=0). The angle 180R is determined by the angle component φ ' in the direction of the current direction and the direction of the magnetic field as shown in the following equation (1): R = R 0 - ΔRs i n20. (1) R〇: resistance of the ferromagnetic thin film metal in the absence of magnetic field 値 Δ R : resistance change amount Θ : indicates that the angle of the magnetic field direction is above the saturation sensitivity field, AR is constant, and the resistance 値 R is not subject to the magnetic field strength. The following is a description of the shape of the ferromagnetic thin film metal of the magnetic sensor using the magnetic field strength above the saturation sensitivity field to detect the direction of the magnetic-21 - 201025800 field. Figure 8 shows the strong magnetic field formed in the longitudinal direction. The thin film metal element (R1) and the horizontal element (R2) are connected in series. The magnetic field in the vertical direction in which the element (R1) causes the maximum resistance change is the smallest resistance change to the element (R2). R 1 and R2 are Type given.
Rl=R〇-ARs ίη2θ- (2) R 2=R〇-AR c o s 2 θ - (3) ❹ 將此磁性感測器的等値電路（半電橋）表示於第9圖 ’輸出Vout是以下式所給予。Rl=R〇-ARs ίη2θ- (2) R 2=R〇-AR cos 2 θ - (3) ❹ The isoelectric circuit (semi-bridge) of this magnetic sensor is shown in Fig. 9 'Output Vout is Given by the following formula.
Vout=Rl · Vcc/ (R1+R2) ·· (4) 將（2 ) ，（ 3 )式代入於（4 )式，經整理，則成立Vout=Rl · Vcc/ (R1+R2) ·· (4) Substituting (2), (3) into (4), and finishing
Vout = V cc/ 2 + acos20··· (5) a=AR-Vcc/2 (2R0-AR) © 如第1 0圖所示地，若形成強磁性薄膜金屬的形成，成 爲一般眾知的惠斯登電橋的構成。藉由使用兩個輸出 Vout +與Vout_，成爲可提高中點電位的穩定性與可進行放 大。 以下，在兩組的全電橋構成的元件中，以飽和感度領 域以上的磁場強度，將檢測磁場的方向的磁性感測器3 1的 強磁性薄膜金屬的形狀表示於第11圖。 -22- 201025800 如第1 1 ( B )圖所示地，此磁性感測器3 1是具有互相 地傾斜45°的兩組的全電橋構成的元件。 首先，假設串聯地連接形成於縱方向的強磁性薄膜金 屬元件（R1 )與橫方向的元件（R3 )的情形。又，在串 聯地連接的元件（R1 )的元件（R3 )中，將元件（R3 ) 側連接於接地（GND )，而將元件（R1 )側施加電壓Vcc 。又，從元件（R1)與元件（R3)之連接部分取出輸出 φ Vout。如此地，假定半電橋的等値電路，首先求出關係式 〇 對於元件（R1)促進最大的電阻變化的垂直方向的磁 場，是對於元件（R3 )成爲最小的電阻變化。電阻値R 1 與R3是以下式所給予。 R 1 =R〇-AR s i η2θ- (6) R 3 =R 0-AR c o s 2 θ ··· (7) φ 此半電橋的輸出Vout是下式所給予。Vout = V cc / 2 + acos20··· (5) a=AR-Vcc/2 (2R0-AR) © As shown in Fig. 10, when a ferromagnetic thin film metal is formed, it is generally known. The composition of the Wheatstone Bridge. By using the two outputs Vout + and Vout_, the stability of the midpoint potential can be improved and amplification can be performed. In the following, the shape of the ferromagnetic thin film metal of the magnetic sensor 3 1 in the direction of the saturation magnetic field is shown in Fig. 11 in the components of the two bridges. -22- 201025800 As shown in Fig. 1 (B), the magnetic sensor 3 1 is an element composed of two sets of full bridges which are inclined at 45° to each other. First, it is assumed that the ferromagnetic thin film metal element (R1) formed in the longitudinal direction and the element (R3) in the lateral direction are connected in series. Further, in the element (R3) of the element (R1) connected in series, the element (R3) side is connected to the ground (GND), and the element (R1) side is applied with the voltage Vcc. Further, the output φ Vout is taken out from the connection portion between the element (R1) and the element (R3). As described above, assuming that the isobaric circuit of the half bridge first obtains the relationship 〇 the magnetic field in the vertical direction in which the element (R1) promotes the largest resistance change is the smallest resistance change to the element (R3). The resistances 値 R 1 and R3 are given by the following formula. R 1 = R 〇 - AR s i η 2 θ - (6) R 3 = R 0 - AR c o s 2 θ · (7) φ The output Vout of this half bridge is given by the following equation.
Vout=R 1 · Vcc/ (R 1 +R 3)…（8) 在（8 )式代入（6 ) 、( 7)，加以整理， 則成立 V out == V cc/ 2 + ctcos20*** (9) a=AR-Vcc/2 (2R0~AR) 在此，如第1 1圖所示地，元件（R2 )、元件（R4 ) 、元件（R6 )及元件（R8 )的4個元件，或是元件（R1 ) -23- 201025800 、元件（R3 )、元件（R5 )及元件（R7 )的4個元件，是 分別成爲一般眾知的惠斯登電橋的構成。藉由使用兩個輸 出VoutA+與VoutA-或是兩個輸出VoutB +與VoutB-，成爲 可提升中點電位的穩定性與進行放大。 以下，針對於轉子20A直線運動時的磁場方向的變化 與磁性感測器3 1的輸出加以說明。如第1 2圖所示地，將磁 性感測器3 1，在施加有飽和感度域領以上的磁場強度的間 隙Gs的位置，且配置成磁場的方向變化有助於感測器面。 如第1 3圖所示地，轉子20直線移動距離Λ時，在感測器面 ，磁場的方向成爲1旋轉。此時，電壓訊號是成爲1周期的 正弦波。更正確而言，由（5)式或（9)式的 Vout = Vcc/2+ a cos2 Θ，輸出波形是成爲2周期的波形。但 是，對於磁性感測器31的元件的延伸方向45°地施加偏壓 磁場，則減半周期，而轉子20Α直線移動λ時，則可得到 1周期的輸出波形。 如第1 1圖所示地，欲知運動方向，將兩組全電橋構成 的元件互相地傾斜45 °的方式形成於一基板上就可以。如 第14圖所示地，藉由兩組全電橋電路所得到的輸出VoutA 與VoutB，是成爲互相地具有90°相位差的餘弦波及正弦波 〇 如此地磁性感測器31是依據轉子20 A的永久磁鐵22的 周期構造，將藉由相對運動周期性地發生的磁場方向的變 化，輸出作爲具有90°相位差的正弦波狀訊號及餘弦波狀 訊號。 -24- 201025800 以下，針對於位置檢測裝置30的位置檢測電路32，依 據第1 5圖及第1 6圖加以說明。 第1 5圖是表示位置檢測電路32的構成圖。磁性感測器 31所輸出的正弦波狀訊號及餘弦波狀訊號是被取進位置檢 測電路3 2。內插電路（內插器）的位置檢測電路3 2是在 90°相位不相同的正弦波狀訊號及餘弦波狀訊號施以數位 性的補間處理而輸出高分辨能力的相位角資料。轉子20的 磁極間的間距Mp是例如數十mm階，而與磁性式的編碼器 的數百// m比較相當大。將轉子20挪用作爲磁性式線性標 度時，須將磁性感測器31所輸出的正弦波狀訊號及餘弦波 狀訊號予以細分化，以提高分辨能力。磁性感測器3 1所輸 出的正弦波狀訊號及餘弦波狀訊號的變化，是對於提高分 辨能力的位置檢測電路有很大影響。 所以，磁性感測器3 1所輸出的正弦波狀訊號及餘弦波 狀訊號的變化是期盼較小。 9 0°相位不相同的正弦波狀訊號及餘弦波狀訊號分別 被輸入至A/D轉換器32a。A/D轉換器32a是將正弦波狀訊 號及餘弦波狀訊號分別以所定周期抽樣在數位資料DA， DB。 如第16圖所示地，在查表記憶體32c記錄有事先依據 使用逆正切函數（TAN·1 )的下式所製作的查表資料。 u = TAN·' ( DB/DA ) 在第16圖表示著在8位元X 8位元的位址空間具有1周期 -25- 201025800 1 000分割的相位角資料的情形的查表記憶體3 2c的記憶體 構成。 相位角資料算出手段的一例的訊號處理部32b是將數 位資料D A，DB分別作爲X，y位址而來檢索査表資料，以 得到對應於X，y位置的相位角資料u。藉此，成爲可分割 ，內插1波長（〇至2ττ爲止之區間）。又，代替使用查表 記憶體32c，演算x^TAN-1 ( DB/DA )，算出相位角資料u ，藉此分割，內插1波長（〇至2ττ爲止的區間）內也可以 〇 以下，脈衝訊號發生手段的一例的訊號處理部3 2b， 是從相位角資料u生成A相編碼器脈衝訊號及B相編碼器脈 衝訊號，而在1周期生成1次的Z相脈衝訊號。訊號處理部 32b所輸出的A相脈衝訊號、B相脈衝訊號、Z相脈衝訊號 是經由位置資訊轉換器35被輸出至馬達驅動裝置40。如第 5圖所示地，馬達驅動裝置40是依據此些A相編碼器脈衝 訊號，B相編碼器脈衝訊號及Z相編碼器脈衝訊號的位置 訊號，進行控制電力轉換器42。 以下，依據圖式來說明決定各線型馬達1 A2的原點的 動作。 第17圖的第17(A)圖至第17(E)圖是表示依照轉 子20A的移動，決定作爲線型馬達1A2的基準位置的原點 的動作的模式圖。又，如第1 7 ( A )圖所示地，從轉子 2 〇A位於定子10A1上的位置，移動至如第17(E)圖所示 地轉子20A位於定子10A2上的目標位置爲止的動作加以說 201025800 明。又，位置檢測裝置301^、3011間的距離〇8與轉子20入的 長度Lmv爲大約相等的情形。 如第17 ( A )圖所示地，轉子20A位於定子10A1上時 ，則定子10A1的兩個位置檢測裝置30L、30R是輸出訊號 。在此，位置資訊轉換器35是作爲輸出來自位置檢測裝置 3 011的訊號。一方面，定子10入2的兩個位置檢測裝置301^ 、30R，是轉子20A不在定子10A2之故，因而未輸出訊號 。又，圖中，依箭號表示有無位置檢測裝置30L、30R或 位置資訊轉換器35的輸出。又，依箭號的種類，表示位置 資訊轉換器35輸出位置檢測裝置30L、30R的那一種訊號 〇 如第17(8)圖所示地，轉子20八從定子1(^1的位置 檢測裝置30L偏離，則位置檢測裝置30L是成爲不會輸出 訊號。位置資訊轉換器35是繼續輸出來自位置檢測裝置 3 0 R的訊號。 如第17(C)圖所示地，當轉子2 0A正好來到定子 1 0A2，則反應於位於轉子20 A的下面的永久磁鐵22，定子 10A2的位置檢測裝置30 L是輸出訊號。如此，位置資訊轉 換器3 5是從未輸出訊號的狀態變更成輸出訊號的狀態。此 時，馬達驅動裝置40是檢測出來自位置資訊轉換器3 5的訊 號的變化。 在此’此定子10A2的位置檢測裝置30L爲開始輸出訊 號的時候，而將位置檢測裝置30L的位置作爲第1原點。又 ，正確爲，磁性感測器3 1設置於位置檢測裝置3 0 L等的位 -27- 201025800 置作爲原點。將轉子20A從該第1原點移動距離Ds，則到 達至目標位置。此目標位置是作爲轉子20A到達至定子 10A2的位置檢測裝置30R的位置。又，依據此第1原點也 進行修正。例如，轉子20 A位於定子10A1上時，某些原因 而過多負載施加於轉子20A，使得轉子20 A的位置或速度 偏離時，則藉由定子10A2上的原點正確地算出轉子20 A的 位置或速度，進行修正位置或速度。又，定子10A間的距 離從距離D1偏離，也藉由控制修正，可將轉子20 A停在正 確的停止位置。此些控制是由馬達驅動裝置40來執行。在 此，將作爲原點的位置檢測裝置30R、L在圖中全部塗掉 所表示。 在第17 ( C )圖的狀態時，定子10A2的位置資訊轉換 器35，是輸出至驅動定子10A2的馬達驅動裝置40。又， 馬達驅動裝置40是開始供電至定子10A2，而轉子20A是也 從定子10A2可得到推進力。 以下，如第1 7 ( D )圖所示地，若轉子2 0 A從定子 10A1偏離，則定子10A1的位置檢測裝置30L、30R是不會 輸出訊號。轉子20A是僅藉由定子10A2的位置檢測裝置 3 0L的輸出訊號所控制。 又，如第17(E)圖所示地，當轉子20 A到達至定子 10A2的位置檢測裝置30R，則定子10A2的位置資訊轉換器 3 5是從來自位置檢測裝置3 0L的訊號轉換成來自位置檢測 裝置30R的訊號的輸出。馬達驅動裝置40爲檢測出此變化 。又，此定子10A2的位置檢測裝置30R的位置爲第2原點 201025800 。先前的磁性感測器31導通的狀態下’下一磁性感測器31 成爲導通的狀態時’則下一磁性感測器3 1的位置成爲原點 。又，此第2原點成爲目標位置。因此’當轉子20A到達 至定子10A2的位置檢測裝置30R ’則控制成停止。又如在 第17(C)圖的動作加以說明，也依據此第2原點進行修正 控制。 如此地，從沒有訊號輸入於位置資訊轉換器35的狀態 φ 變更成有訊號被輸入的狀態時，則設有輸出其訊號的位置 檢測裝置3 0的磁性感測器3 1之處，或是位置資訊轉換器3 5 的訊號的輸出轉換時，設有重新輸出訊號的位置檢測裝置 3 〇的磁性感測器3 1之處作爲原點。 以下，依據圖式說明轉子20 A的動作的各種模型。 首先，依據第18圖至第2〇圖來說明位於定子10A上的 轉子20 A，同步地移動至鄰接的定子10 A的動作。 第18圖是表示轉子20 A的動作模型的一例的俯視圖。 第19圖是表示分散配置線型馬達1A的驅動系統的訊號的 流動的模式圖。第20圖是表示位置資訊轉換器35的動作的 模型的一例的模式圖。 如第1 9圖所示地，欲進行如第1 8圖所示的動作，首先 ，上級控制器5〇是經控制線5 1將指令値的脈衝訊號傳輸至 各定子10A的各馬達驅動裝置40。接收來自上級控制器50 的指令値的馬達驅動裝置40是比較指令値與來自位置資訊 轉換器35的資訊，當驅動的轉子20A未達到目標位置時， 則電流繼續流在動力電纜53。 -29- 201025800 又，上級控制器50是依照事先所設定的作業的順序， 將指令値輸出至各馬達驅動裝置40。又，上級控制器50的 初期設定以手動輸入於上級控制器50，或藉由來自位置檢 測裝置30的資訊加以把握都可以。又，固定初期位置，之 後依照作業順序進行動作也可以。 以下，依據第20 ( A )圖至第20 ( E )圖，來說明對 於轉子20A的動作的位置資訊轉換器35的輸出。 如第20(A)圖所示地，轉子20A1、20A2、20A3等分 別裝載於定子10A1、10A2、10A3等的上面。此時，位置 資訊轉換器35是從位置檢測裝置30L、30R得到輸入訊號 ，而作成來自位置檢測裝置30R的訊號輸出。藉由馬達驅 動裝置40，轉子20A1是一直到定子10A2，而轉子20A2是 一直到定子10A3等，一齊地開始動作。馬達驅動裝置40 是依據來自位置檢測裝置30R的訊號，進行控制定子20A1 、20A2、20A3 等。 如第20 ( B )圖所示地，轉子20A1、20A2、20A3等， 是從位置檢測裝置30L偏離，而沒有位置檢測裝置30L的 輸出訊號。 以下，如第20(C)圖所示地，當轉子20A1、20A2、 20A3等到達至定子10A1、10A2、10A3等的位置檢測裝置 3 0L，則位置檢測裝置30L是訊號輸出，而位置資訊轉換 器3 5是輸出來自位置檢測裝置3 0L的訊號。又，例如轉子 20A1是成爲橫跨定子10A1與定子10A2的狀態，相對有轉 子20A1的永久磁鐵22的任一，與定子10A1及定子10A2的 201025800 線圈11 (突極12)的任一，會從兩定子10A1、10A2接受 推進力。若以某些原因，使得轉子20A1的速度下降至目 標速度時’則控制速度使得轉子20A1的速度成爲目標速 度。又’定子10A1 ' 10A2的距離D1爲線圈間距Cp的自然 數倍之故，因而到達至定子10A2上的轉子20A1的永久磁 鐵22a、22b’及定子10A2的突極12a、12b、12c可作成同 步。亦即’轉子20A1從定子10A1移動至鄰接的定子10A2 φ 之際’定子10A2的突極12a、12b、12c與20A1的永久磁鐵 22a、22b爲可作用於防止在轉子的推進力發生損失的情形 。在此，將位置檢測裝置3 0 L作爲第1原點，而將轉子 2 0 A 1從該第1原點移動距離D s，則達到目標位置。 又，藉由此第1原點，在轉子20A1從定子10A1通過鄰 接的定子10A2之際等，若有來自上級控制器5〇的移動速 度或有關於預定通過時間等的指令値的誤差時，則藉由馬 達驅動裝置40，使得轉子20A1被修正控制。 ❹ 如第20(D)圖所示地，當轉子20A1、20A2、20A3 等 從位置檢測裝置3 0 R偏離，則沒有位置檢測裝置3 〇 r的訊 號。轉子20A1、20A2、20A3等，是僅從進行方向的鄰接 的定子1 0A1、1 0A2、1 0A3等得到推進力，再移動至目標 位置。 如第20(E)圖所示地，轉子2〇Al、20A2、20A3等， 到達至位置檢測裝置3 0R ’當位置檢測裝置3 〇r輸出訊號 ，而位置資訊轉換器35轉換輸出時，則馬達驅動裝置4〇進 行停止轉子20A1、20A2、20A3等。又，將該定子10A2的 -31 - 201025800 位置檢測裝置3 OR的位置作爲第2原點。若有未達到目標位 置的轉子20A，則在裝載有其轉子20的定子10A，使得馬 達驅動裝置40仍繼續供應電流，而把其轉子20移動至目標 位置的第2原點，以修正位置。 以下，依照第21圖來說明轉子與表示於第20圖的動作 相反方向地移動的圖案。又，將在第20圖等所說明的動作 相同的動作是省略，僅說明主要不相同的動作。在其他的 移動圖案也同樣。 馬達驅動裝置40是朝相反方向移動轉子20A1、20A2 、20A3等進行移動的方式，在各定子10A1、10A2、10A3 等的線圈22流著電流。又，如第2 1 ( A )圖至第2 1 ( E ) 圖所示地，藉由定子20A1、20A2、20A3等的移動的位置 及位置檢測裝置30R、3 0L的位置關係。使得位置資訊轉 換器35的輸出有變化。 馬達驅動裝置40是檢測出來自位置資訊轉換器35的轉 子20A1、2〇A2、2 0A3等的位置資訊，或位置資訊轉換器 35的輸出訊號的轉換等，執行控制轉子20A1、20A2、 20A3 等。 以下，依據第22圖及第23圖來說明轉子2 0A的轉子 20A1中僅移動的圖案。 如第22圖或第23圖所示地，將轉子20A1，從定子 10A1移動至定子10A2，而其他的轉子20A是進行不會移動 的控制。 首先，如第2 2圖所示地，上級控制器5 0將指令値輸出 -32- 201025800 至定子10A1、10A2的馬達驅動裝置40。之後，從定子 10A1的位置資訊轉換器35有訊號之故，因而定子10A1的 馬達驅動裝置40將電流供應於定子10A1。當經由表示於 第23 ( B )圖的狀態成爲如第23 ( C )圖的狀態，則在定 子10A2的馬達驅動裝置40，從位置資訊轉換器35也有訊 號之故，因而定子10A2的馬達驅動裝置40也將電流開始 供應於定子10A2。又，以高速移動轉子20A1等時，事先 φ 將電流供應於定子10A2。然後成爲表示於第23(D)圖的 狀態，則定子10A1的馬達驅動裝置40是停止對於定子 1 0A1的電流。 在如第23 ( E)圖所示的狀態下，停止轉子20A1。 以下，針對於轉子20A1通過1個定子10A2，而以定子 10A3停止的圖案依據第24圖及第25圖加以說明。 首先如第2 4圖所示地’上級控制器5 0，將指令値輸出 至定子10A1、10A2、10A3的馬達驅動裝置40。之後，從 ❹ 定子10A1的位置資訊轉換器35有訊號之故，因而定子 10A1的馬達驅動裝置40，供電於定子10A1。Vout=R 1 · Vcc/ (R 1 +R 3) (8) In the equation (8), substituting (6) and (7), and finishing, V out == V cc/ 2 + ctcos20*** (9) a=AR-Vcc/2 (2R0~AR) Here, as shown in Fig. 1, four elements of the element (R2), the element (R4), the element (R6), and the element (R8) Or four components of the component (R1) -23-201025800, the component (R3), the component (R5), and the component (R7) are the structures of the well-known Wheatstone bridge. By using two outputs VoutA+ and VoutA- or two outputs VoutB + and VoutB-, it is possible to increase the stability and amplification of the midpoint potential. Hereinafter, the change in the direction of the magnetic field when the rotor 20A is linearly moved and the output of the magnetic sensor 3 1 will be described. As shown in Fig. 2, the magnetic sensor 3 1 is placed at a position where the gap Gs of the magnetic field strength equal to or higher than the saturation sensitivity domain is applied, and the direction of the magnetic field is changed to contribute to the sensor surface. As shown in Fig. 3, when the rotor 20 linearly moves by a distance Λ, the direction of the magnetic field becomes 1 rotation on the sensor surface. At this time, the voltage signal is a sine wave of one cycle. More precisely, the output waveform is a two-cycle waveform by Vout = Vcc/2+ a cos2 ( of equation (5) or (9). However, when a bias magnetic field is applied to the extending direction of the element of the magnetic sensor 31 by 45°, the half cycle is halved, and when the rotor 20 Α linearly moves λ, an output waveform of one cycle can be obtained. As shown in Fig. 1, in order to know the direction of motion, it is sufficient to form the elements of the two sets of full bridges on the substrate by tilting each other by 45°. As shown in Fig. 14, the outputs VoutA and VoutB obtained by the two sets of full bridge circuits are cosine waves and sine waves having a phase difference of 90° with each other. Thus, the magnetic sensor 31 is based on the rotor 20 A. The periodic structure of the permanent magnet 22 outputs a sinusoidal signal and a cosine wave signal having a phase difference of 90° by a change in the direction of the magnetic field periodically generated by the relative motion. -24- 201025800 Hereinafter, the position detecting circuit 32 for the position detecting device 30 will be described based on Figs. 15 and 16. Fig. 15 is a view showing the configuration of the position detecting circuit 32. The sine wave signal and the cosine wave signal output from the magnetic sensor 31 are taken into the position detecting circuit 32. The position detecting circuit 32 of the interpolation circuit (interpolator) outputs phase-angle data of high resolution capability by performing multiplex processing on the sine wave signals and the cosine wave signals having different phases of 90°. The pitch Mp between the magnetic poles of the rotor 20 is, for example, several tens of mm steps, which is considerably larger than the hundreds//m of the magnetic encoder. When the rotor 20 is used as a magnetic linear scale, the sine wave signal and the cosine wave signal output from the magnetic sensor 31 are subdivided to improve the resolution. The variation of the sine wave signal and the cosine wave signal outputted by the magnetic sensor 3 1 has a great influence on the position detecting circuit for improving the discrimination capability. Therefore, the variation of the sinusoidal signal and the cosine wave signal outputted by the magnetic sensor 3 1 is expected to be small. The sinusoidal signals and the cosine wave signals having different phases of 90° are input to the A/D converter 32a, respectively. The A/D converter 32a samples the sine wave signal and the cosine wave signal at a predetermined period in the digital data DA, DB. As shown in Fig. 16, the look-up table memory 32c records the look-up table data prepared in advance based on the following equation using the inverse tangent function (TAN·1). u = TAN·' (DB/DA) In Fig. 16, the look-up table memory 3 in the case where the address space of the 8-bit X 8-bit has a phase angle of 1 cycle -25 - 25,025,800 1 000 is shown. 2c memory composition. The signal processing unit 32b, which is an example of the phase angle data calculation means, searches the table data by using the digital data D A and DB as the X, y address, respectively, to obtain the phase angle data u corresponding to the X, y position. Thereby, it is possible to divide and interpolate one wavelength (the interval from 〇 to 2ττ). In addition, instead of using the look-up table memory 32c, x^TAN-1 (DB/DA) is calculated, and the phase angle data u is calculated, and the division is performed, and the interpolation of one wavelength (the range from 〇 to 2ττ) may be performed below. The signal processing unit 32b, which is an example of the pulse signal generating means, generates the Z-phase pulse signal of the A-phase encoder pulse signal and the B-phase encoder pulse signal from the phase angle data u, and generates the primary phase pulse signal once. The A-phase pulse signal, the B-phase pulse signal, and the Z-phase pulse signal output from the signal processing unit 32b are output to the motor driving device 40 via the position information converter 35. As shown in Fig. 5, the motor driving device 40 controls the power converter 42 based on the A phase encoder pulse signal, the B phase encoder pulse signal and the Z phase encoder pulse signal position signal. Hereinafter, the operation of determining the origin of each linear motor 1 A2 will be described based on the drawings. 17(A) to 17(E) of Fig. 17 are schematic diagrams showing an operation of determining the origin of the reference position of the linear motor 1A2 in accordance with the movement of the rotor 20A. Further, as shown in Fig. 7 (A), the movement from the position where the rotor 2 〇A is located on the stator 10A1 to the target position of the rotor 20A located on the stator 10A2 as shown in Fig. 17(E) is moved. Let's say 201025800. Further, the distance 〇8 between the position detecting devices 301 and 3011 and the length Lmv of the rotor 20 are approximately equal. As shown in Fig. 17(A), when the rotor 20A is positioned on the stator 10A1, the two position detecting devices 30L, 30R of the stator 10A1 are output signals. Here, the position information converter 35 serves as a signal for outputting from the position detecting means 3 011. On the other hand, the two position detecting devices 301, 30R of the stator 10 are two, and the rotor 20A is not in the stator 10A2, so that no signal is output. Further, in the figure, the presence or absence of the position detecting means 30L, 30R or the output of the position information converter 35 is indicated by an arrow. Further, depending on the type of the arrow, the type of signal output from the position information converter 35 to the position detecting devices 30L and 30R is as shown in Fig. 17 (8), and the rotor 20 is received from the stator 1 (the position detecting device of the lens 1). When the deviation is 30L, the position detecting device 30L does not output a signal. The position information converter 35 continues to output the signal from the position detecting device 300R. As shown in Fig. 17(C), when the rotor 20A comes The stator 10A2 is reacted to the permanent magnet 22 located below the rotor 20A, and the position detecting device 30 L of the stator 10A2 is an output signal. Thus, the position information converter 35 is changed from the state of the unoutput signal to the output signal. At this time, the motor driving device 40 detects the change of the signal from the position information converter 35. Here, the position detecting device 30L of the stator 10A2 starts to output the signal, and the position detecting device 30L The position is the first origin. Further, the magnetic sensor 3 1 is set to the position -27-201025800 of the position detecting device 3 0 L or the like as the origin. The rotor 20A is moved from the first origin by the distance Ds. Then The target position is the position of the position detecting device 30R that reaches the stator 10A2 as the rotor 20A. Further, the first origin is also corrected. For example, when the rotor 20A is located on the stator 10A1, for some reason When an excessive load is applied to the rotor 20A so that the position or speed of the rotor 20A deviates, the position or speed of the rotor 20A is accurately calculated by the origin on the stator 10A2, and the corrected position or speed is corrected. The distance is deviated from the distance D1, and the rotor 20A can be stopped at the correct stop position by the control correction. Such control is performed by the motor driving device 40. Here, the position detecting device 30R as the origin is used. L is all shown in the figure. In the state of the 17th (C) diagram, the position information converter 35 of the stator 10A2 is output to the motor driving device 40 that drives the stator 10A2. Further, the motor driving device 40 is started. Power is supplied to the stator 10A2, and the rotor 20A is also capable of obtaining propulsion from the stator 10A2. Hereinafter, as shown in the seventh (D) diagram, if the rotor 20A is deviated from the stator 10A1, the position of the stator 10A1 is checked. The devices 30L, 30R do not output signals. The rotor 20A is controlled only by the output signal of the position detecting device 30L of the stator 10A2. Further, as shown in Fig. 17(E), when the rotor 20A reaches the stator The position detecting device 30R of the 10A2 transmits the position information converter 35 of the stator 10A2 from the signal from the position detecting device 300L to the signal from the position detecting device 30R. The motor driving device 40 detects the change. Further, the position of the position detecting device 30R of the stator 10A2 is the second origin 201025800. When the previous magnetic sensor 31 is turned on, when the next magnetic sensor 31 is turned on, the position of the next magnetic sensor 3 1 becomes the origin. Moreover, this second origin becomes the target position. Therefore, the position detecting means 30R' when the rotor 20A reaches the stator 10A2 is controlled to be stopped. Further, as described in the operation of Fig. 17(C), the correction control is also performed based on the second origin. In this manner, when the state φ when no signal is input to the position information converter 35 is changed to the state in which the signal is input, the magnetic sensor 3 1 of the position detecting device 30 that outputs the signal is provided, or When the output of the signal of the position information converter 3 5 is switched, the position of the magnetic sensor 3 1 of the position detecting means 3 that re-outputs the signal is set as the origin. Hereinafter, various models of the operation of the rotor 20A will be described based on the drawings. First, the operation of the rotor 20A on the stator 10A and synchronously moving to the adjacent stator 10 A will be described based on Figs. 18 to 2B. Fig. 18 is a plan view showing an example of an operation model of the rotor 20 A. Fig. 19 is a schematic view showing the flow of signals of the drive system in which the linear motor 1A is distributed. Fig. 20 is a schematic diagram showing an example of a model of the operation of the position information converter 35. As shown in FIG. 19, in order to perform the operation as shown in FIG. 18, first, the upper controller 5A transmits the pulse signal of the command 値 to each motor driving device of each stator 10A via the control line 51. 40. The motor drive unit 40 that receives the command from the upper controller 50 is the comparison command 値 and the information from the position information converter 35. When the driven rotor 20A does not reach the target position, the current continues to flow on the power cable 53. -29- 201025800 Further, the upper controller 50 outputs a command 至 to each of the motor driving devices 40 in accordance with the order of the jobs set in advance. Further, the initial setting of the upper controller 50 may be manually input to the upper controller 50 or may be grasped by information from the position detecting device 30. Further, the initial position is fixed, and then the operation may be performed in accordance with the operation sequence. Hereinafter, the output of the position information converter 35 for the operation of the rotor 20A will be described based on Figs. 20(A) to 20(E). As shown in Fig. 20(A), the rotors 20A1, 20A2, 20A3 and the like are mounted on the upper surfaces of the stators 10A1, 10A2, 10A3 and the like, respectively. At this time, the position information converter 35 obtains an input signal from the position detecting devices 30L, 30R, and produces a signal output from the position detecting device 30R. By the motor driving device 40, the rotor 20A1 is continued up to the stator 10A2, and the rotor 20A2 is up to the stator 10A3 or the like, and the operations are started in unison. The motor driving device 40 controls the stators 20A1, 20A2, 20A3 and the like in accordance with signals from the position detecting device 30R. As shown in Fig. 20(B), the rotors 20A1, 20A2, 20A3, and the like are deviated from the position detecting device 30L without the output signal of the position detecting device 30L. Hereinafter, as shown in Fig. 20(C), when the rotors 20A1, 20A2, 20A3, etc. reach the position detecting device 30L to the stators 10A1, 10A2, 10A3, etc., the position detecting device 30L is a signal output, and the position information is converted. The device 35 is a signal for outputting from the position detecting device 30L. Further, for example, the rotor 20A1 is in a state of straddle the stator 10A1 and the stator 10A2, and any one of the permanent magnets 22 facing the rotor 20A1 and the 201025800 coil 11 (the salient pole 12) of the stator 10A1 and the stator 10A2 may be The two stators 10A1, 10A2 receive the propulsive force. If, for some reason, the speed of the rotor 20A1 is lowered to the target speed, then the speed is controlled such that the speed of the rotor 20A1 becomes the target speed. Further, the distance D1 of the 'stator 10A1' 10A2 is a natural multiple of the coil pitch Cp, so that the permanent magnets 22a, 22b' of the rotor 20A1 reaching the stator 10A2 and the salient poles 12a, 12b, 12c of the stator 10A2 can be synchronized. . That is, when the rotor 20A1 moves from the stator 10A1 to the adjacent stator 10A2 φ, the permanent magnets 22a and 22b of the salient poles 12a, 12b, 12c, and 20A1 of the stator 10A2 can act to prevent loss of propulsion force in the rotor. . Here, the position detecting device 300L is used as the first origin, and when the rotor 20A1 is moved by the distance Ds from the first origin, the target position is reached. Further, when the rotor 20A1 passes through the adjacent stator 10A2 from the stator 10A1 by the first origin, if there is a movement speed from the upper controller 5A or an error in the command time such as the predetermined passage time, Then, the rotor 20A1 is corrected by the motor driving device 40. ❹ As shown in Fig. 20(D), when the rotors 20A1, 20A2, 20A3, etc. are deviated from the position detecting means 3 0 R, there is no signal of the position detecting means 3 〇 r. The rotors 20A1, 20A2, 20A3, and the like obtain the propulsive force only from the adjacent stators 10A1, 1 0A2, 1 0A3, and the like in the forward direction, and then move to the target position. As shown in Fig. 20(E), the rotors 2〇A1, 20A2, 20A3, etc. reach the position detecting device 3 0R 'when the position detecting device 3 〇r outputs a signal, and the position information converter 35 converts the output, The motor drive unit 4 stops the rotors 20A1, 20A2, 20A3, and the like. Further, the position of the -31 - 201025800 position detecting device 3 OR of the stator 10A2 is taken as the second origin. If there is a rotor 20A that does not reach the target position, the stator 10A on which the rotor 20 is loaded causes the motor drive unit 40 to continue to supply current, and the rotor 20 is moved to the second origin of the target position to correct the position. Hereinafter, a pattern in which the rotor moves in the opposite direction to the operation shown in Fig. 20 will be described based on Fig. 21 . Further, the same operations as those described in Fig. 20 and the like are omitted, and only the operations that are mainly different are described. The same is true for other moving patterns. The motor drive unit 40 moves the rotors 20A1, 20A2, 20A3, and the like in the opposite directions, and flows current to the coils 22 of the stators 10A1, 10A2, and 10A3. Further, as shown in Figs. 2 1 (A) to 2 1 (E), the positional relationship between the positions of the stators 20A1, 20A2, 20A3 and the like and the position detecting devices 30R and 30L are described. The output of the position information converter 35 is changed. The motor driving device 40 detects position information of the rotors 20A1, 2A2, 2A3, and the like from the position information converter 35, or conversion of an output signal of the position information converter 35, and executes control of the rotors 20A1, 20A2, 20A3, and the like. . Hereinafter, a pattern in which only the rotor 20A1 of the rotor 20A moves is explained based on Figs. 22 and 23. As shown in Fig. 22 or Fig. 23, the rotor 20A1 is moved from the stator 10A1 to the stator 10A2, and the other rotors 20A are controlled so as not to move. First, as shown in Fig. 2, the upper controller 50 outputs a command -32 - 201025800 to the motor drive unit 40 of the stators 10A1, 10A2. Thereafter, the position information converter 35 of the stator 10A1 has a signal, and thus the motor driving device 40 of the stator 10A1 supplies current to the stator 10A1. When the state shown in Fig. 23(B) is in the state shown in Fig. 23(C), the motor drive unit 40 of the stator 10A2 also has a signal from the position information converter 35, so that the motor of the stator 10A2 is driven. Device 40 also begins to supply current to stator 10A2. Further, when the rotor 20A1 or the like is moved at a high speed, current is supplied to the stator 10A2 in advance φ. Then, in the state shown in Fig. 23(D), the motor driving device 40 of the stator 10A1 stops the current to the stator 10A1. In the state shown in Fig. 23(E), the rotor 20A1 is stopped. Hereinafter, a pattern in which the rotor 20A1 passes through one stator 10A2 and the stator 10A3 is stopped will be described with reference to Figs. 24 and 25. First, as shown in Fig. 24, the upper controller 50 outputs the command 値 to the motor drive unit 40 of the stators 10A1, 10A2, and 10A3. Thereafter, the position information converter 35 of the stator 10A1 has a signal, so that the motor driving device 40 of the stator 10A1 is supplied with power to the stator 10A1.
從如第25(A)圖所示的狀態，成爲如第25(B)圖 的狀態，則定子1 〇 A 2的位置檢測裝置3 0 L開始輸出訊號， 而位置資訊轉換器35將此訊號輸出至馬達驅動裝置40。又 ，成爲第2 5 ( C )圖所示的狀態，則定子1 〇 a 2的位置檢測 裝置30R開始輸出訊號，在此訊號，位置資訊轉換器35進 行轉換輸出訊號。在此定子1 〇 A上的原點，是即使在如第 25 ( B )圖所示的狀態的位置檢測裝置30L，或如第25 ( C -33- 201025800 )圖所示的狀態的位置檢測裝置30R也可以。藉由此些原 點，在途中修正轉子20A1的位置也可以，惟在下一定子 10A3上，最後進行位置修正也可以。又，經由第25 ( D ) 圖的狀態，到達至如第25 ( E )圖所示的目標位置。 以上，在分散配置線型馬達的驅動系統中，如線型馬 達1A的定子10A1、10A2地相鄰接的定子10A1的相同種類 的突極12a與定子10A2的相同種類的突極12a的最小距離 D1，爲定子10A1、10A2的突極12的周期構造的1周期長度 Cp的自然數倍，亦即，如定子10A1及定子10A2地相鄰接 的定子10A的各該周期構造的相位互相地一致，且相鄰接 的定子10A1的突極12與定子10A2的突極12之最小距離D2 爲轉子20A1等的永久磁鐵22間的最大距離，亦即，成爲 轉子20A1的長度Lmv以下的方式，定子10A1、10A2等被 分散配置之故，因而當轉子2 0A1等從定子10A1移到至相 鄰接的定子10A2等之際，定子10A2的突極12與轉子20A1 等的永久磁鐵22的極作用成防止轉子20A1的推進力上發 生損失，又，轉子20A1等從定子10A1及定子10A2的至少 任一方得到推進力而可速度控制的所謂可適用於定子 10A1、10A2等的分散配置的控制。如此地，僅將各定子 10A的間隔的距離D1設定成周期構造的1周期的長度Cp的 自然數倍的簡單構成，就可作成適用於分散配置的控制。 又，定子10A別地配置馬達驅動裝置40，可將定子 10A1、10A2、10A3各個獨立地移動之故，因而可形成動 作自由度高的搬運系統。例如，如第1 8圖至第2 5圖所示地 -34- 201025800 ，可實現各種各樣的移動模型，而配合作業的順序，柔軟 地可控制轉子20A。 又，檢測器的一例的磁性感測器31檢測出對應於定子 10A與轉子20A而相對運動的被檢測對象的一例子的排列 於轉子20A的永久磁鐵1 2，兩個磁性感測器3 1爲配置於相 對運動方向，其長度小於轉子20 A的長度以下，藉此可決 定各線型馬達1 Al、1 A2、1 A3等的基準位置，而且任一磁 性感測器31經常地可檢測轉子20A。因此，線型馬達1A1 、1A2、1 A3等別地，成爲不需要原點用的標誌與原點檢 測用的感測器，利用更簡單的構成就可正確地控制位置。 如此地可減少原點用的標誌與原點檢測用的感測器的分量 的零件數，又可節省設置此些的工夫，又，如表示於第17 (C)圖或第17(E)圖的第1原點或第2原點的方式，因 應於轉子20 A的狀況就可決定原點，而對於指令値有誤差 時進行修正之故，因而可實現高精度的搬運系統。 又，依據具有轉子20 A的極的周期構造，將藉由相對 運動而周期性變化所發生的磁場的方向，輸出作爲具有 90°的相位差的正弦波狀訊號及餘弦波狀訊號，依據此些 正弦波狀訊號及餘弦波狀訊號，檢測出轉子20A的位置， 藉此，不需要設置於各定子10A或各轉子20A的線性標度 ，而可將定子10A所分散配置的線型馬達1A作成更簡單的 構成。又，爲了正確地進行位置控制而必須精度優異地設 置線性標度，惟可節省設置線性標度的工夫。 又，磁性感測器3 1可檢測出磁場的方向變化之故，因 •35- 201025800 而即使定子1 〇 A或轉子20 A的一方與磁性感測器3 1之間的 距離有所偏差，在磁性感測器所輸出的正弦波狀訊號及 餘弦波狀訊號上也變化少。因此，成爲可檢測轉子20 A的 正確位置，而且磁性感測器31的安裝調整成爲容易。又， 本來就將發生推力所用的定子l〇A或轉子2 0A的一方的磁 極挪用作爲磁性標度之故，因而可實現更低成本又小型的 磁性感測器3 1。 又，位置檢測電路32補間處理磁性感測器31所輸出的 正弦波狀訊號及餘弦波狀訊號之故，因而即使在磁極間的 間距比磁性式編碼器還要長的定子10A或轉子20A，將一 方的磁極挪用作爲磁性標度，也可得到分辨能力高的位置 檢測系統。 又，將N極及S極的磁極被磁化於與軸線方向正交的 方向的兩端面的複數永久磁鐵22排列於軸線方向，就可把 發生在激磁磁鐵的磁通密度的分布接近於理想性的正弦波 。因此，藉由磁性感測器3 1可檢測出轉子20A的正確位置 〇 又，在定子10A側設有磁性感測器31，而在轉子20A 不必設置編碼器電纜52，不會有圍上編碼器電纜52，或是 編碼器電纜52彼此間糾纏在一起的情形，而在具胃數定子 20A的搬運系統上特別有效。又，在轉子20A設有驅動用 永久磁鐵22，而轉子20 A不需要動力電纜之故，因而完全 地可作成無電纜的轉子20A，而在具有複數轉子2 0A的搬 運系統上特別有效。 -36- 201025800 以上又’依照本發明，分散配置線型馬達的定子，依 據定子與轉子所具有的極的周期構造，將藉由相對運動周 期性地變化所發生的磁場方向，輸出作爲具有90。的相位 差的正弦波狀訊號及餘弦波狀訊號，而依據此些正弦波狀 訊號及餘弦波狀訊號，檢測轉子的位置，藉此，成爲不需 翠設於各定子或各轉子的線性標度，而可將分散配置有定 子的線型馬達作成更簡單的構成。如此地，以更簡單的構 Φ 成又不需要線性標度，來配置複數定子之際，可提供節省 工夫，又適用於定子的分散配置的線型馬達。 例如，在分散配置線型馬達的驅動系統中，依據具有 轉子2 0 A的極的周期構造，將藉由相對運動周期性地變化 所發生的磁場方向，輸出作爲具有90°的相位差的正弦波 狀訊號及餘弦波狀訊號，而依據此些正弦波狀訊號及餘弦 波狀訊號，檢測轉子2 0 A位置，藉此，成爲不需要設於各 定子10A或各轉子20A的線性標度，而可將分散配置有定 φ 子10A的線型馬達1 A作成更簡單的構成。又，爲了正確地 進行位置控制必須精度優異地設置線性標度，惟可節省設 置線性標度的工夫。 又，如線型馬達1 A的定子10A1、10A2地相鄰接的定 子10A1的相同種類的突極12a與定子10A2的相同種類的突 極12a之最小距離D1，爲定子10A1、10A2的突極12的周期 構造的1周期的長度Cp的自然數倍，亦即，如定子10A1及 定子10A2地相鄰接的定子l〇A的各周期構造的相位互相一 致，且相鄰接的定子1〇Α1的突極12與定子10A2的突極12 -37- 201025800 之最小距離D2，爲轉子20A1等的永久磁鐵22間的最大距 離，亦即，成爲轉子20A1的長度Lmv以下的方式，分散配 置有定子10A1、10A2等之故，因而轉子20A1等從定子 10A1移動至鄰接的定子10A2等之際，定子10A2的突極12 與轉子2 0A1等的永久磁鐵22的極作用於防止在轉子2 0A1 等的推進力發生損失，又，轉子2 0A1等爲由定子10A1及 定子1 0A2的至少任一方得到推進力可作速度控制的可控 制定子10A1、10A2等的分散配置。如此地，將各定子10A 的間隔的距離D1，僅設定在周期構造的1周期的長度Cp的 自然數倍的簡單的構成，就可執行適用於分散配置的控制 〇 又，磁性感測器3 1檢測出排列在對應於定子1 0 A與轉 子20A進行相對運動的轉子20A的永久磁鐵12，而兩個磁 性感測器3 1爲以轉子20A的長度以下配置於相對運動方向 之故，因而可決定各線型馬達1 Al、1 A2、1 A3等的基準位 置，而且任一磁性感測器3 1經常地可檢測轉子20A。因此 ，線型馬達1 Al、1A2、1A3等別地，成爲不需要原點用標 誌與原點檢測用的感測器，而利用更簡單的構成就可正確 地進行位置控制。如此地，減少原點用標誌與原點檢測用 的感測器分量的零件數，又可節省設置此些的工夫。又， 如表示於第17(C)圖或第17(E)圖的第1原點或第2原 點地，因應於轉子20A的狀況而可決定原點，對於指令値 有誤差時進行修正之故，因而可實現精度高的搬運系統。 以上又，依照本發明，檢測對應於線型馬達的定子與 -38- 201025800 轉子進行相對運動的被檢測對象的檢測器，爲配置成被檢 測對象的長度以下之故，因而可決定各線型馬達的基準位 置，而利用更簡單的構成可正確地進行位置控制。如此地 ，不必設置原點用的標誌或感測器，配置複數定子之際， 可省略工夫，而且，可正確地進行位置控制，而可提供適 用於定子的分散配置的線型馬達。 例如，在分散配置線型馬達的驅動系統中，檢測器的 φ —例的磁性感測器3 1檢測出排列於對應在定子1 〇 A與轉子 20A進行相對運動的被檢測對象的一例的轉子20A的永久 磁鐵12，而兩個磁性感測器31爲以轉子20 A的長度Lmv以 下配置於相對運動方向之故，因而可決定各線型馬達1A1 、1A2、1A3的基準位置。因而線型馬達1A1、1A2、1A3 等別地，成爲不需要原點用的標誌與原點檢測用的感測器 ，而利用更簡單構成就可正確地進行位置控制。如此地減 少原點用的標誌與原點檢測用的感測器分量的零件數，又 φ 可節省設置此些的工夫。又，如表示於第17(C)圖或第 17(E)圖的第1原點或第2原點地，因應於轉子2 0A的狀 況而可決定原點，對於指令値有誤差時進行修正之故，因 而可實現精度高的搬運系統。 又，如線型馬達1 A的定子10A1、10A2地相鄰接的定 子1〇八1的相同種類的突極12&與定子10八2的相同種類的突 極12a之最小距離D1，爲定子10A1、10A2的突極12的周期 構造的1周期的長度Cp的自然數倍，亦即，如定子10A1及 定子10A2地相鄰接的定子10A的各該周期構造的相位互相 -39- 201025800 一致，且相鄰接的定子10A1的突極12與定子10A2的突極 12之最小距離D2，爲轉子20A1等的永久磁鐵22間的最大 距離，亦即，成爲轉子20A1的長度Lmv以下的方式，分散 配置有定子10A1、10A2等，又，檢測器的一例的磁性感 測器3 1檢測出排列在對應於定子1 0A與轉子20A進行相對 運動的被檢測對象的一例的定子1 〇 A的永久磁鐵1 2，而兩 個磁性感測器3 1以定子1 0 A的長度以下配置於相對運動方 向之故，因而可決定各線型馬達1A1、1A2、1A3等的基準 位置，而且任一磁性感測器3 1經常地可檢測轉子20A。 尤其是，如定子10A1及定子10A2地相鄰接的定子10A 的各周期構造的相位互相一致，且相鄰接的定子10A1的 突極12與定子10A2的突極I2之最小距離D2，爲轉子20A1 的永久磁鐵22間的最大距離，亦即，成爲轉子2 0A1的長 度Lmv以下的方式，分散配置有定子10A1' Ι0Α 2等之故， 因而轉子2〇Α1等從定子10A1移動至鄰接的定子10A2等之 際，定子10A2的突極12與轉子20A1等的永久磁鐵22的極 作用於防止在轉子2 0A1等的推進力發生損失，又，轉子 20A1等爲由定子10A1及定子10A2的至少任一方得到推進 力可作速度控制的適用於定子1 〇A 1、1 〇A2等的分散配置 的利用更簡單的構成可正確地控制位置。如此地，將各定 子10A的間隔的距離D1僅設定在周期構造的1周期的長度 Cp的自然數倍的簡單的構成，就可執行適用於分散配置的 控制。 又’作爲第1實施形態的第1變形例，如第2 6圖所示地 -40- 201025800 ’分散配置線型馬達1B的轉子20B的長度比定子10B還要 短時’則以轉子20B的長度以下的間隔，設置位置檢測裝 置3 0L、3 0M、3 OR。此時的位置資訊轉換器36是對於來自 位置檢測裝置30L、3 0M、3 0R的輸入訊號，將最新所輸入 的訊號輸出至馬達驅動裝置40。 轉子20B位於如第26 ( A )圖所示的位置時，則定子 10B1的位置檢測裝置30M輸出訊號，位置資訊轉換器36是 φ 輸出來自位置檢測裝置30M的訊號。 轉子20B位於如第26(B)圖所示的位置時，則定子 10B1的位置資訊轉換器36是輸出來自位置檢測裝置30R的 訊號。此時，該位置資訊轉換器36的輸出被轉換之故，因 而將此作爲定子1 0 B 1的原點也可以。 又，經由第26 ( C )圖的狀態，當轉子20B到達至如 第26(D)圖所示的位置，定子10B2的位置資訊轉換器36 是開始輸出來自定子10B2的位置檢測裝置30L的訊號。將 該位置檢測裝置30L的位置，成爲第1原點。從第1原點， 即使位置檢測裝置30L至位置檢測裝置30M爲止的距離， 加上轉子2〇B的長度1/2之處，爲目標位置。但是，位置檢 測裝置30M爲作成設於位置檢測裝置30L與位置檢測裝置 3 0R之中點。 又，經由第26 ( E )圖的狀態，如第26 ( F )圖所示地 ，定子10B2的位置資訊轉換器36是開始輸出定子10B2的 位置檢測裝置30M的訊號。該位置檢測裝置30M的位置成 爲第2原點。從第2原點至轉子20B的長度的1/2的距離爲目 201025800 標位置。最後，轉子20B到達至如第26 (G)圖所示的目 標位置。 如此地，配合轉子的長度，藉由設置位置檢測裝置30 ，來決定原點，而可正確地控制轉子。 又，如第2 7圖所示，作爲第1實施形態的第2變形例， 配置分散配置線型馬達1 c的各線型馬達也可以。 定子10A爲隔著成爲長方形地作成一周的間隔被連接 。在各角的位置，配置有方向轉換裝置I5。方向轉換裝置 15是在定子10A下部的中心部分’設有旋轉裝置（未圖示 )，從長方形一方的一邊轉換成另一邊的方式，進行旋轉 定子10A。又，在各定子10A連接有馬達驅動裝置40，而 此馬達驅動裝置40則利用上級控制器50進行控制。 如此地，各定子10A是利用定子10A彼此間隔著間隔 所配置的所謂間歇構造被連接之故，因而也可連接方向轉 換裝置15所旋轉的定子10A。又，利用方向轉換裝置15, 也可實現此種各種各樣的配置。 又，如第2 8圖所示地，作爲第1實施形態的第3變形例 ，分散配置線型馬達1D是在轉子20C具備光學式或磁性式 的線性標度23，及在定子10C具備讀取線性標度23的位置 檢測裝置30B也可以。又，線性標度23的長度，是配合連 接轉子20C兩端的極的距離。 利用此種線性標度2 3與位置檢測裝置3 0B，與第1實施 形態同樣’可決定各線型馬達1 A 1、1 A2、1 A3等的基準位 置’而且任一線型馬達經常地可檢測轉子20C上。 201025800 又，定子1 0A彼此間的各間隔是不相等也可以，距離 D 1爲線圈間距Cp的自然數倍就可以。流在線圈1 1的電流 是不被限定於3相交流、2相、4相等其他相位也可以。此 時，線圈1 1的極的種類的數不相同。 (第2實施形態） 以下’針對於本發明的第2實施形態的分散配置線型 φ 馬達的驅動系統加以說明。首先，針對於第2實施形態的 分散配置線型馬達的驅動系統的槪略構成，使用第29圖至 第31圖加以說明。又，在與上述第1實施形態同一或對應 的部分，使用同一符號僅說明不相同的構成及作用。其他 的實施形態及變形例也同樣。 第29圖是表示本發明的第2實施形態的分散配置線型 馬達的驅動系統的槪略構成的方塊圖。第30圖是表示第29 圖的分散配置線型馬達的定子及轉子的一例的立體圖。第 φ 31圖是表示第29圖的定子的極的周期構造的模式圖。 如第29圖所示地，與第1實施形態的線型馬達不相同 ，在定子排列有驅動用的永久磁鐵，而在轉子設有3相用 的線圈或位置檢測裝置等。 分散配置線型馬達2A的驅動系統是具備：搬運零件 或工件等的分散配置線型馬達2A、及控制分散配置線型 馬達2A的複數個馬達驅動裝置40，及控制複數個馬達驅 動裝置4 0的上級控制器5 0。 分散配置線型馬達2A是具有利用磁性的作用互相地 -43- 201025800 進行相對運動的複數定子60 A及轉子70 A、70B。在分散配 置線型馬達2 A中’有複數定子6 0 A以隔著所定間隔排列於 搬運方向。 與第1實施形態不相同，轉子70A、70B具有位置檢測 裝置30。又，轉子7〇A、70B與馬達驅動裝置40，爲藉由 動力電纜53被連接。轉子70A、70B的位置檢測裝置30與 位置資訊轉換器35 ’位置資訊轉換器35與馬達驅動裝置40 ，爲藉由編碼器52被連接。各該馬達驅動裝置40與上級控 制器5 0爲藉由控制線5 1被連接。 如第30圖所示地，定子60A1、60A2是分別具有底座 61，及設於底座61上面的永久磁鐵62。如第30圖或第31圖 所示地，永久磁鐵62是具有相對於轉子7〇A的一側的極爲 N極的N極磁鐵62a，及S極的S極磁鐵62b，進行磁性地作 用於轉子70A。此些N極、S極爲利用上述永久磁鐵62發生 於轉子7 0 A側的極的一例。又，依N極、S極的順序，N極 磁鐵62a與S極磁鐵62b爲交互地形成有周期性地排列於定 子60A1、60A2與轉子70A的相對運動的方向的周期構造。 亦即，定子60A1、60A2是在相對運動方向的一例的定子 60A的長度方向分別具有N極、S極的周期構造。 之後，如第30圖所示地，轉子70A等是具有：供應有 3相交流電流的線圈71、及捲繞有線圈71的突極72。線圈 71是有U相用線圈71a、V相用線圈71b及W相用線圈71c的 三種類。突極72是線圈71a、71b、71c對應於U相用的突極 72a、V相用的突極72b、W相用的突極72c的三種類。此些 201025800 線圈71a、71b、71c及突極72a、72b、72c爲依U相、V相 、W相的順序，形成有周期性地排列於定子6〇ai、60A2與 轉子70A的相對運動的方向的周期構造。亦即，線圈7 1及 突極72是在相對運動方向的一例的轉子7 0 A等的長度方向 形成U相、V相、W相的周期構造。 如此，因應於轉子7 OA的各線圏71a、71b、71c的3相 交流的電流方向或強度而發生移動磁場，磁性地作用著對 應於各線圈71a、71b、71c的突極72、及N極磁鐵62a與S極 磁鐵62b，而在定子60A1、60A2的長度方向發生定子60A1 、60A2與轉子70A的相對運動。亦即，定子60A1、60A2與 轉子70A是互相地磁性地作用，而轉子70A是相對運動在 定子60A1、60A2的長度方向。 以下，依據第31圖詳述定子60A1、60A2的排列關係 〇 如第31圖所示地，定子60A的永久磁鐵62是以磁鐵間 距Mp的1周期的長度，依N極磁鐵62a、S極磁鐵62b的順序 交互地排列。定子60 A的周期構造的1周期的長度的一例 的磁鐵間距Mp是N極磁鐵62a、S極磁鐵62b之中，同極彼 此間的最小距離。例如，N極磁鐵62a與下一 N極磁鐵62a 之距離。 相鄰接的定子60A 1、60A2的相同種類的極彼此間的 最小距離D1的一例，是連結在定子60A1中最靠近定子 60A2側的N極磁鐵62a，及在定子60A2中最靠近定子60A1 側的N極磁鐵62 a的距離。 -45- 201025800 該距離D1爲成爲磁鐵間距Mp的自然數倍的方式，採 用定子60A彼此間的間隔，隔著排列有定子6〇a。又，由 其他方式觀看，則定子60 A 1的周期構造的相位與定子 60A2的周期構造的相位互相地一致。亦即，依定子⑼^ 的永久磁鐵62的N極S極的周期構造是如第31圖中以虛線 所示地假設地延長於定子60A2側，使得定子60A2的周期 構造的相位一致於該延長上。 又’如第29圖所示地，相鄰接的定子60A1、60A2的 極彼此間的最小距離D2的一例，是連結在定子60A1中最 靠近定子60A2側的S極磁鐵62b，及在定子60A2中最靠近 定子60A1側的N極磁鐵62a的距離。該距離D2是轉子70A的 長度Lmvl或轉子70B的Lmv2以下。在此，轉子70A的長度 Lmvl或轉子70B的長度Lmv2，是如第29圖所示地，連結 轉子7〇 A、70B的相對運動方向的兩端的各該突極72彼此 間的距離。亦即，轉子70A、70B的極彼此間的最大距離 的一例。 如此地，距離D2是轉子7 0A的長度Lmvl以下，及轉子 70B的長度Lmv2以下，則轉子70A、70B可能橫跨於定子 60A1與定子60A2之狀態，與定子60A的任一極，或與轉子 7 0 A、7 0 B的任一極經常地成爲相對的狀態。 又，定子60A1的周期構造的相位與定子60A2的周期 構造的相位互相地一致’也可說是’從定子60A1連續至 定子60A2，而具有依永久磁鐵62的N極S極的周期構造而 連續的一個定子中，相當於省略了距離D2的部分的N極磁 201025800 鐵62a、S極磁鐵62b的情形。但是除了距離D2的兩端部分 的N極磁鐵62a、S極磁鐵62b以外。又，在第31圖的情形 ，距離D1是磁鐵間距Mp的2以上的自然數倍。又，假設沒 有定子60A1的定子6 0A1側的端的S極磁鐵62b，而N極磁鐵 62a是在最靠近定子60A1側的情形，則距離D1是磁鐵間距 Mp之1以上的自然數倍。 以下，如第3 0圖所示地，具有磁性感測器3 1的位置檢 φ 測裝置30是排列於轉子70A、70B的長度方向的兩端的突 極72的外側。又，在轉子70A、70B相對於定子60A的一側 設有磁性感測器3 1成爲相對狀態。位置檢測裝置3 0的設置 位置是隔著設於轉子7〇 A、70B的長度方向，不會受到線 圈7 1的影響就可以。 如此，磁性感測器3 1是檢測出朝定子60A及轉子70A 、7 0 B的相對運動方向延伸的被檢測對象的一例的定子 60A的永久磁鐵62所致的磁場。磁性感測器3 1是檢測出定 φ 子6〇A及轉子70A、70B進行相對運動所致的磁場變化。位 置檢測裝置3 0間的距離D s 1、D s2，亦即磁性感測器3丨間 的距離Ds爲定子60A的長度Lst以下。亦即，此爲第1磁性 感測器31與第2磁性感測器31之距離爲定子60A的極彼此 間的最大距離以下的一例。 以下’依據第32圖進行說明決定轉子70A時的原點的 動作。 第32圖的各第32(A)圖至第32 (E)圖，是表示依 照轉子70 A的移動，決定原點的動作的模式圖。轉子7〇 a -47- 201025800 的位置檢測裝置30L、30R間的距離Dsl與定子60A的長度 Lst爲大約相等的情形。 又’對於第1實施形態’除了定子與轉子成爲相反之 處以外，與第1實施形態的第1 7圖的動作的說明，及求出 原點的動作是基本上相同。亦即，依照位置資訊轉換器3 5 的狀態的變化來決定原點。 但是，將定子作爲基準，則將第3 2 ( C )圖的狀態時 的位置檢測裝置3 0 R所檢測的永久磁鐵6 2，亦即，將定子 60A1側的定子60A2的端的永久磁鐵62作爲第1原點。從該 第1原點將距離Ds 1作爲目標位置。又，將第3 2 ( e )圖的 狀態時的位置檢測裝置3 0 L所檢測的永久磁鐵6 2，亦即， 將位於定子60A1側的定子60A2的端的永久磁鐵62作爲第2 原點。該第2原點作爲目標位置。 以下，依據圖式來說明決定轉子7 Ο B時的原點的動作 〇 第33的各第33(A)圖至第33(E)圖是表示依照轉 子70B的移動，決定原點的動作的模式圖。轉子7〇b的位 置檢測裝置30L、30R間的距離Ds2，爲比定子60A的長度 Lst還要短的情形。 原點的決定方法，是與轉子7OA時大約相同。但是， 將第33 (C)圖的狀態時的位置檢測裝置3〇r所檢測的永 久磁鐵62 ’亦即，將定子6〇A1側的定子6〇A2的端的永久 磁鐵62作爲第1原點。從該第！原點將定子6〇A2的長度Lst 作爲目標位置。又’將第3 3 ( E )圖的狀態時的位置檢測 -48- 201025800 裝置30L所檢測的永久磁鐵62，亦即，將位於定子60A1側 的定子6〇A2的端的永久磁鐵02作爲第2原點。從該第2原 點距離（Lst-Ds2 ) /2作爲目標位置。 以上，如線型馬達2A的定子60A1、60A2地相鄰接的 定子60A1的N極磁鐵62a與定子60A2的N極磁鐵62a的最小 距離D1，爲定子6 0A1、60A2的極的周期構造的1周期Mp 的長度的自然數倍，亦即，如定子60A1及定子60A2地相 鄰接的定子60A的各個周期構造的相位互相地一致，且相 鄰接的定子60A1的永久磁鐵62的極與定子60 A2的永久磁 鐵62的極的最小距離D2，成爲轉子70A、70B的突極72間 的最大距離，亦即成爲70A、70B的長度Lmvl、Lmv2以下 的方式，定子60A1、60 A2等被分散配置之故，因而轉子 70A、70B從定子60A1移動至鄰接的定子60A2等之際，定 子60A2的永久磁鐵62的極與轉子70A、70B的突極72作用 成能防止在轉子70A、70B的推進力發生損失的情形，又 ，轉子70A、70B從定子60A1及定子60A2的至少任一方可 得到推進力而可控制速度的所謂可控制適用於定子60A 1 、60A2等的分散配置。如此地，將各定子60A的間隔的距 離D1，僅設定成周期構造的1周期的長度Mp的自然數倍的 簡單構成，就可作成適用於分配配置的控制。 以上又，在本實施形態的分散配置線型馬達的驅動系 統中，依據具有定子60A的極的周期構造，將藉由相對運 動周期性變化所發生的磁場的方向輸出作爲具有90。的相 位差的正弦波狀訊號及餘弦波狀訊號，檢測出轉子70 A的 -49- 201025800 位置，藉此，成爲不需要設於各定子60 A或各轉子7 0A的 線性標度，可將分散配置有定子60A的線型馬達2A可作成 更簡單的構成。 以上又，在本實施形態的分散配置線型馬達的驅動系 統中，檢測器的~例的位置檢測裝置30的磁性感測器3 1檢 測出排列於對應在定子60A與轉子70A、70B進行相對運動 的被檢測對象的一例的定子60 A的永久磁鐵62，使得兩個 磁性感測器31朝相對方向被配置成定子60 A的長度Lst以下 之故，因而，可決定線型馬達2A的各線型馬達的基準位 置，利用更簡單的構成可正確地進行位置控制。 又，在本實施形態中，除了不會成爲無電纜以外，可 發揮與第1實施形態同樣的效果。尤其是，馬達驅動裝置 40直接於轉子70A、70B之故，因而對於各轉子70A、70B 可分別做細微的移動。 又’依據具有定子60 A的極的周期構造，將藉由相對 運動周期性變化所發生的磁場的方向輸出作爲具有90°的 相位差的正弦波狀訊號及餘弦波狀訊號，檢測出轉子70A 的位置，藉此，成爲不需要設於各定子60A或各轉子70A 的線性標度，可將分散配置有定子6 0A的線型馬達2A可作 成更簡單的構成。 又，在各定子60A不需要位置檢測裝置30之故，因而 可對應於各種長度的轉子70A、70B。 又，如第3 4圖所示地，作爲第2實施形態的第1變形例 ，分散配置線型馬達2B是具備：在定子60B讀取光學式或 201025800 磁性式的線性標度2 3 B，及在轉子7 0 C讀取線性標度2 3 B的 位置檢測裝置30B也可以。又，線性標度23B的長度，是 合計定子6 0B兩端的極的距離。 藉由此些線性標度23與位置檢測裝置30B，與第1實施 形態同樣，可決定各線型馬達1 A 1、1 A2、1 A3等的基準位 置’而且任一都可經常地檢測出轉子2 0 C。 (第3實施形態） 以下’針對於本發明的第3實施形態的分散配置線型 馬達的驅動系統加以說明。 首先，針對於第3實施形態的槪要構成，使用第35圖 加以說明。 第3 5圖是表示第3實施形態的分散配置線型馬達的驅 動系統的槪略構成的一例的方塊圖。 如第35圖所示地，本實施形態的線型馬達3A的構成 ，是與第1實施形態的線型馬達1A大約相同，惟定子10A 彼此間的距離D3，比轉子20A的長度Lmv還要長之處，與 第1實施形態的線型馬達1 A不相同。又，在第1實施形態 的第1變形例或第2實施形態的線型馬達，也可將定子間的 距離D1距一直到距離D3的構成。 以下，依據第36圖來說明決定各線型馬達3A的原點 的動作。 如第36圖所示地，轉子20A是從表示於第36(A)圖 的狀態，經由表示於第3 6 ( B )圖的狀態，如第3 6 ( C ) -51 - 201025800 圖所示地，從定子1〇Α1離開。在該狀態下’轉子20A是未 與定子1 0A相對之故，因而不能做位置控制或速度控制。 又，如第36 ( D )圖所示地，當轉子20A到達，則定 子10 A2的位置資訊轉換器35是開始輸出來自定子10A 2的 位置檢測裝置30L的訊號。將此位置檢測裝置30L的位置 作爲第1原點。從此第1原點至位置檢測裝置3 0L、3 0R間 的距離Ds爲目標位置。 又，經由第36 ( E )圖的狀態，當轉子20A到達至如 第36(F)圖所示的位置，則定子10A2的位置資訊轉換器 36是開始輸出來自定子10A2由位置檢測裝置30R的訊號。 此位置檢測裝置30R的位置爲第2原點，而爲目標位置。 本實施形態是不得不將定子10A1、10A2間的距離作 成距離D 3的情形，例如，到下一處理工程還有距離，而 且不需要定子10A1、10A2間的途中的正確的位置控制或 速度控制，可適用於不計較精度等，而欲快速地搬運工件 等的情形。又，轉子20A爲無電纜之故，因而可加速而容 易移動至下一定子10A。 又，本發明是並不被限定於上述各實施形態者。上述 各實施形態是例示，與本發明的申請專利範圍所述的技術 性思想具有實質上同一構成，發揮同樣作用效果者，任何 者都被包括在本發明的技術性範圍。 日本特願2008-222534號公報、日本特願2008-222535 號公報及日本特願2008-222536號公報的所有內容是藉由 參照被編入本案發明說明書。 -52- 201025800 【圖式簡單說明】 第1圖是表示本發明的第1實施形態的分散配置線型馬 達的驅動系統的槪略構成的一例的方塊圖。 第2圖是模式地表示第1圖的分散配置線型馬達的定子 及轉子的一例的立體圖。 第3圖是表示第1圖的定子的排列的一例的俯視圖。 φ 第4圖是表示第1圖的定子及轉子的極的周期構造的模 式圖。 第5圖是表示第1圖的馬達控制裝置的構成的一例的方 塊圖。 第6圖是表示第5圖的磁性感測器的原理的立體圖。 第7圖是表示第5圖的磁性感測器的電阻値與磁場方向 的角度0的關係的圖表。 第8圖是表示第5圖的磁性感測器的強磁性薄膜金屬的 φ 形狀的俯視圖。 第9圖是表示第8圖的磁性感測器的等値電路圖。 第10圖是表示由索斯登電橋所構成的磁性感測器的形 狀的俯視圖（A)及等値電路圖（B)。 第11圖是表示兩組全電橋構成的磁性感測器的圖式[ 圖中（A )是表示磁性感測器的強磁性薄膜金屬的形狀的 俯視圖，圖中（B)是等値電路圖]。 第1 2圖是表示第1圖的轉子所發生的磁場與磁性感測 器之位置關係的模式圖。 -53- 201025800 第1 3圖是表示第5圖的磁性感測器所檢測出的磁性向 量的方向，及輸出電壓的關係的圖表。 第14圖是表示從第5圖的磁性感測器所輸出的正弦波 狀訊號及餘弦波狀訊號的圖表。 第15圖是表示第5圖的位置檢測裝置的輸出訊號的模 式圖。 第16圖是表示藉由第5圖的磁性感測器的輸出訊號的 正弦波及餘弦波利薩如圖形（Lissajou figures)的模式圖 〇 第17(A)圖至第17(E)圖是表示決定第1圖的各線 型馬達的原點的動作的模式圖。 第18(A)圖至第18(C)圖是表示第1圖的轉子的動 作的圖案的一例的俯視圖。 第19圖是表示在第1圖的方塊圖中，訊號的流動的模 式圖。 第20(A)圖至第20(E)圖是表示第1圖的位置資訊 轉換器的動作的圖案的一例的模式圖。 第21 (A)圖至第2〗（E)圖是表示第1圖的位置資訊 轉換器的其他動作的圖案的一例的模式圖。 第22圖是表示在第i圖的方塊圖中，訊號的流動的模 式圖。 第23 (A)圖至第23(E)圖是表示第1圖的位置資訊 轉換器的動作的圖案的一例的模式圖。 第24圖是表示在第1圖的方塊圖中，訊號的流動的模 -54- 201025800 式圖。 第25 (A)圖至第25(E)圖是表示第1圖的位置資訊 轉換器的動作的圖案的一例的模式圖。 第26(A)圖至第26(G)圖是表示決定第1圖的線型 馬達的第1變形例的原點的動作的模式圖。 第27圖是表示第1圖的分散配置線型馬達的其他配置 例的俯視圖。 第28圖是表示第1圖的線型馬達的第2變形例的模式圖 〇 第2 9圖是表示本發明的第2實施形態的分散配置線型 馬達的驅動系統的槪略構成的一例的方塊圖。 第3 0圖是模式地表示第29圖的分散配置線型馬達的定 子及轉子的一例的立體圖。 第31圖是表示第29圖的定子的極的周期構造的模式圖 〇 第32 ( A )圖至第32 ( E )圖是表示第29圖的位置資 訊轉換器的動作的圖案的一例的模式圖。 第33(A)圖至第33(F)圖是表示第29圖的位置資 訊轉換器的動作的圖案的一例的模式圖。 第34圖是表示第29圖的線型馬達的第1變形例的模式 圖。 第3 5圖是表示本發明的第3實施形態的分散配置線型 馬達的驅動系統的槪略構成的一例的方塊圖。 第36(A)圖至第36(F)圖是表示決定第35圖的各 -55- 201025800 線型馬達的原點的動作的模式圖。 【主要元件符號說明】 1A、IB、1C、ID、2A、2B :分散配置線型馬達 10A、10B、10C、60A、60B ：定子 1 1 :線圈 12 :突極 20A、 20B、 20C、 70A、 70C ：轉子 22、80 :永久磁鐵 30、30B :位置檢測裝置 3 1 :磁性感測器 32 :位置檢測電路 32a : A/D轉換器 3 2b :訊號處理部 40 :馬達驅動裝置From the state shown in Figure 25(A), Become the state as shown in Figure 25(B), Then the position detecting device 3 0 L of the stator 1 〇 A 2 starts to output the signal, The position information converter 35 outputs this signal to the motor driving device 40. Again, Become the state shown in the 2nd 5th (C) diagram, Then, the position detecting device 30R of the stator 1 〇 a 2 starts to output a signal, In this signal, The position information converter 35 performs a conversion output signal. The origin on this stator 1 〇 A, Is the position detecting device 30L even in the state shown in Fig. 25(B), Alternatively, the position detecting device 30R in the state shown in Fig. 25 (C-33-201025800) may be used. By taking these origins, It is also possible to correct the position of the rotor 20A1 on the way, Only on the next stator 10A3, Finally, position correction is also possible. also, Through the state of the 25th (D) diagram, Arrives to the target position as shown in Figure 25 (E). the above, In the drive system of the distributed configuration line motor, Such as the stator 10A1 of the linear motor 1A The minimum distance D1 of the same type of salient poles 12a of the stator 10A1 adjacent to the 10A2 and the salient poles 12a of the same kind of the stator 10A2, For the stator 10A1 The one-cycle length of the periodic structure of the salient pole 12 of 10A2 is a multiple of the natural number of Cp, that is, The phases of the periodic structures of the stators 10A adjacent to each other, such as the stator 10A1 and the stator 10A2, coincide with each other. The minimum distance D2 between the salient poles 12 of the adjacent stator 10A1 and the salient poles 12 of the stator 10A2 is the maximum distance between the permanent magnets 22 of the rotor 20A1 and the like. that is, The length of the rotor 20A1 is equal to or less than the length Lmv. Stator 10A1 10A2, etc. are distributed, Therefore, when the rotor 20A1 or the like moves from the stator 10A1 to the adjacent stator 10A2 and the like, The poles 12 of the stator 10A2 and the poles of the permanent magnets 22 such as the rotor 20A1 act to prevent loss of the propulsive force of the rotor 20A1. also, The rotor 20A1 or the like can obtain a propulsive force from at least one of the stator 10A1 and the stator 10A2, and can be speed-controlled, which is applicable to the stator 10A1. Control of distributed configuration of 10A2, etc. So, The distance D1 of the interval between the stators 10A is simply set to a natural multiple of the natural length of the one-cycle length Cp of the periodic structure. It is possible to make control suitable for distributed configuration. also, The stator 10A is additionally provided with a motor driving device 40, The stator 10A1 can be 10A2 10A3 moves independently, Therefore, a handling system with high degree of freedom of operation can be formed. E.g, As shown in Figures 18 to 25, -34- 201025800, A variety of mobile models can be implemented, And in the order of the work, The rotor 20A is softly controllable. also, The magnetic sensor 31 of an example of the detector detects the permanent magnet 12 of the rotor 20A, which is an example of the object to be detected that moves relative to the stator 10A and the rotor 20A. The two magnetic sensors 3 1 are arranged in opposite directions of motion, The length is less than the length of the rotor 20 A, Thereby, each linear motor 1 Al can be determined, 1 A2 1 A3 and other reference positions, Moreover, any of the magnetic detectors 31 can often detect the rotor 20A. therefore, Linear motor 1A1, 1A2 1 A3 and so on, It becomes a sensor for the mark and the origin detection that does not require the origin. With a simpler construction, the position can be controlled correctly. In this way, the number of parts of the mark for the origin and the sensor for the origin detection can be reduced, It also saves the effort of setting this up. also, As shown in the 17th (C) or 17th (E), the 1st origin or the 2nd origin, The origin can be determined in response to the condition of the rotor 20 A, And when the command is corrected, there is an error, so Therefore, a highly accurate handling system can be realized. also, According to the periodic structure of the pole having the rotor 20 A, The direction of the magnetic field that will occur periodically by relative motion, The output is a sinusoidal signal and a cosine wave signal with a phase difference of 90°. Based on these sinusoidal signals and cosine wave signals, The position of the rotor 20A is detected, With this, There is no need to set the linear scale of each stator 10A or each rotor 20A. Further, the linear motor 1A in which the stator 10A is dispersed can be formed into a simpler configuration. also, In order to perform position control correctly, it is necessary to set the linear scale with high precision. Only save time on setting the linear scale. also, The magnetic sensor 3 1 can detect the change of the direction of the magnetic field, Between 35-201025800, even if the distance between one of the stator 1 〇 A or the rotor 20 A and the magnetic sensor 3 1 is deviated, The sinusoidal signal and the cosine wave signal outputted by the magnetic sensor also change little. therefore, Become the correct position to detect the rotor 20 A, Moreover, the mounting adjustment of the magnetic sensor 31 is easy. also, Originally, the magnetic pole of one of the stator 10A or the rotor 20A used for the thrust is used as the magnetic scale. Therefore, a lower cost and compact magnetic sensor 31 can be realized. also, The position detecting circuit 32 tweens the sine wave signal and the cosine wave signal outputted by the magnetic sensor 31, Therefore, even if the pitch between the magnetic poles is longer than that of the magnetic encoder, the stator 10A or the rotor 20A, Use one of the magnetic poles as a magnetic scale. A position detection system with high resolution is also available. also, The plurality of permanent magnets 22 in which the magnetic poles of the N pole and the S pole are magnetized on both end faces in the direction orthogonal to the axial direction are arranged in the axial direction. It is possible to approximate the distribution of the magnetic flux density occurring in the field magnet to the ideal sine wave. therefore, The correct position of the rotor 20A can be detected by the magnetic sensor 31 〇 again, A magnetic sensor 31 is disposed on the side of the stator 10A, It is not necessary to provide the encoder cable 52 in the rotor 20A. There will be no enclosed encoder cable 52, Or the case where the encoder cables 52 are entangled with each other, It is particularly effective on a handling system having a stomach number stator 20A. also, The rotor 20A is provided with a driving permanent magnet 22, The rotor 20 A does not require a power cable. Therefore, the rotor 20A without cable can be completely formed. It is particularly effective on a transport system having a plurality of rotors 20A. -36- 201025800 above and in accordance with the present invention, Decentralized configuration of the stator of the linear motor, According to the periodic structure of the poles of the stator and the rotor, The direction of the magnetic field that will occur periodically by relative motion, The output has as 90. Sinusoidal signal and cosine wave signal with phase difference, Based on these sinusoidal signals and cosine wave signals, Detecting the position of the rotor, With this, Become a linear scale that does not need to be placed on each stator or rotor. A linear motor in which the stator is dispersed and arranged can be made simpler. So, With a simpler construction, no linear scale is required. To configure the complex stator, Provides savings, It is also suitable for a linear motor with a distributed arrangement of stators. E.g, In the drive system of the distributed configuration line motor, According to the periodic structure of the pole having the rotor 20 A, The direction of the magnetic field that occurs will be periodically changed by relative motion, The output is a sinusoidal signal and a cosine wave signal with a phase difference of 90°. Based on these sinusoidal signals and cosine wave signals, Detecting the rotor 2 0 A position, With this, It becomes a linear scale that does not need to be provided in each stator 10A or each rotor 20A. Further, the linear motor 1A in which the φ sub-10A is dispersed can be formed into a simpler configuration. also, In order to correctly perform position control, it is necessary to set the linear scale with high precision. This saves the effort of setting a linear scale. also, Such as the stator 10A1 of the linear motor 1 A The minimum distance D1 of the same type of salient pole 12a of the stator 10A1 adjacent to 10A2 and the same type of pole 12a of the stator 10A2, For the stator 10A1 The period of the salient pole 12 of 10A2 is a natural multiple of the length Cp of one cycle of the structure, that is, The phases of the respective periodic structures of the stators 10A adjacent to the stator 10A1 and the stator 10A2 are identical to each other. And the minimum distance D2 between the salient poles 12 of the adjacent stators 101 and the salient poles 12 - 37 - 201025800 of the stator 10A2, The maximum distance between the permanent magnets 22 of the rotor 20A1 or the like, that is, The length of the rotor 20A1 is equal to or less than the length Lmv. Decentralized configuration with stator 10A1 10A2, etc., Therefore, when the rotor 20A1 or the like moves from the stator 10A1 to the adjacent stator 10A2 or the like, The salient pole 12 of the stator 10A2 and the pole of the permanent magnet 22 such as the rotor 20A1 act to prevent loss of propulsion force in the rotor 20A1 or the like. also, The rotor 20A1 or the like is a controllable sub-controller 10A1 that receives propulsive force from at least one of the stator 10A1 and the stator 10A2 for speed control. Decentralized configuration of 10A2, etc. So, The distance D1 of the interval between the stators 10A, A simple configuration that sets only a natural multiple of the length Cp of one cycle of the periodic structure, It can perform control for distributed configuration. 〇 The magnetic sensor 3 1 detects the permanent magnet 12 arranged in the rotor 20A corresponding to the relative movement of the stator 10A and the rotor 20A, The two magnetic sensors 31 are arranged in the relative movement direction below the length of the rotor 20A. Therefore, it is possible to determine each linear motor 1 Al, 1 A2 1 A3 and other reference positions, Moreover, any of the magnetic sensors 31 can often detect the rotor 20A. Therefore, Linear motor 1 Al, 1A2 1A3 and so on, It becomes a sensor that does not require the origin mark and origin detection. With a simpler configuration, position control can be performed correctly. So, Reduce the number of parts of the origin marker and the sensor component for origin detection, It also saves the effort of setting this up. also, As shown in the first origin or the second origin of the 17th (C) or 17th (E), The origin can be determined in response to the condition of the rotor 20A, For the correction of the command 値 when there is an error, Therefore, a highly accurate handling system can be realized. Above, According to the present invention, Detecting a detector of a detected object corresponding to a stator of the linear motor and a relative movement of the -38-201025800 rotor, In order to be configured to be less than the length of the object to be inspected, Therefore, the reference position of each linear motor can be determined. With a simpler configuration, position control can be performed correctly. So, It is not necessary to set the sign or sensor for the origin. When configuring a plurality of stators, Can be omitted, and, Position control is correct, A linear motor suitable for the distributed configuration of the stator is available. E.g, In the drive system of the distributed configuration line motor, The magnetic sensor 3 1 of the φ detector of the detector detects the permanent magnet 12 of the rotor 20A arranged in an example of the object to be detected corresponding to the relative movement of the stator 1 〇 A and the rotor 20A, The two magnetic sensors 31 are disposed in the relative movement direction with the length Lmv of the rotor 20A as follows. Therefore, it is possible to determine each linear motor 1A1, 1A2 The reference position of 1A3. Thus the linear motor 1A1 1A2 1A3, etc., It becomes a sensor that does not require the origin and a sensor for origin detection. With a simpler configuration, position control can be performed correctly. In this way, the number of parts for the origin point and the sensor component for origin detection is reduced, Also φ can save the effort to set this up. also, As shown in the 17th (C) or 17th (E) map, the 1st origin or the 2nd origin, The origin can be determined in response to the condition of the rotor 20A. For the correction when there is an error in the command, Therefore, a highly accurate handling system can be realized. also, Such as the stator 10A1 of the linear motor 1 A 10A2 adjacent to the stator of the same type of sharp 12 & The minimum distance D1 from the same type of protrusion 12a of the stator 10 8 2, For the stator 10A1 The period of the salient pole 12 of 10A2 is a natural multiple of the length Cp of one cycle of the structure, that is, The phase of each of the periodic structures of the stator 10A adjacent to the stator 10A1 and the stator 10A2 is identical to each other - 39 - 201025800, And the minimum distance D2 between the salient pole 12 of the adjacent stator 10A1 and the salient pole 12 of the stator 10A2, The maximum distance between the permanent magnets 22 of the rotor 20A1 or the like, that is, The length of the rotor 20A1 is equal to or less than the length Lmv. Decentralized with stator 10A1 10A2, etc. also, The magnetic sensor 31 of an example of the detector detects the permanent magnets 1 2 of the stator 1 〇 A arranged in an example of the object to be detected that corresponds to the relative movement of the stator 10A and the rotor 20A, The two magnetic sensors 3 1 are disposed in the relative motion direction below the length of the stator 10 A. Therefore, each linear motor 1A1 can be determined. 1A2 Reference position of 1A3, etc., Moreover, any of the magnetic sensors 31 can often detect the rotor 20A. especially, The phases of the respective periodic structures of the stator 10A adjacent to each other, such as the stator 10A1 and the stator 10A2, coincide with each other. And the minimum distance D2 between the salient pole 12 of the adjacent stator 10A1 and the salient pole I2 of the stator 10A2, Is the maximum distance between the permanent magnets 22 of the rotor 20A1, that is, The length of the rotor 20A1 is less than or equal to the length Lmv, Decentralized arrangement of stator 10A1' Ι0Α 2, etc. Therefore, when the rotor 2〇Α1 or the like moves from the stator 10A1 to the adjacent stator 10A2 and the like, The salient poles 12 of the stator 10A2 and the poles of the permanent magnets 22 such as the rotor 20A1 act to prevent loss of propulsion force in the rotor 20A1 or the like. also, The rotor 20A1 or the like is adapted to the stator 1 〇A 1 by the propulsive force of at least one of the stator 10A1 and the stator 10A2. 1 The 分散A2 and other distributed configurations make it easier to control the position with a simpler configuration. So, A simple configuration in which the distance D1 of the interval between the stators 10A is set to a natural multiple of the length Cp of one cycle of the periodic structure, Controls that apply to decentralized configurations can be performed. Further, as a first modification of the first embodiment, As shown in Fig. 26, the length of the rotor 20B of the distributed arrangement linear motor 1B is shorter than that of the stator 10B, and the length of the rotor 20B is equal to or less than the length of the rotor 20B. Set the position detection device to 30L, 3 0M, 3 OR. The position information converter 36 at this time is for the position detecting means 30L, 3 0M, 3 0R input signal, The latest input signal is output to the motor drive unit 40. When the rotor 20B is located as shown in the figure 26 (A), Then, the position detecting device 30M of the stator 10B1 outputs a signal, The position information converter 36 is φ to output a signal from the position detecting means 30M. When the rotor 20B is located as shown in Fig. 26(B), Then, the position information converter 36 of the stator 10B1 outputs a signal from the position detecting means 30R. at this time, The output of the position information converter 36 is converted, Therefore, this can be used as the origin of the stator 10 B 1 . also, Through the state of the 26th (C) diagram, When the rotor 20B reaches the position as shown in Fig. 26(D), The position information converter 36 of the stator 10B2 is a signal for starting to output the position detecting means 30L from the stator 10B2. Positioning the position detecting device 30L, Be the first origin. From the first origin, Even the distance from the position detecting device 30L to the position detecting device 30M, Plus the length of the rotor 2〇B is 1/2, For the target location. but, The position detecting device 30M is provided at a midpoint between the position detecting device 30L and the position detecting device 30R. also, Through the state of the 26th (E) diagram, As shown in Figure 26 (F), The position information converter 36 of the stator 10B2 is a signal for starting to output the position detecting means 30M of the stator 10B2. The position of the position detecting device 30M becomes the second origin. The distance from the second origin to 1/2 of the length of the rotor 20B is the target position of 201025800. At last, The rotor 20B reaches the target position as shown in Fig. 26(G). So, With the length of the rotor, By providing the position detecting device 30, To decide the origin, The rotor can be controlled correctly. also, As shown in Figure 27, As a second modification of the first embodiment, It is also possible to arrange each of the linear motors of the distributed arrangement linear motor 1 c. The stator 10A is connected at intervals that are formed in a rectangular shape with a space therebetween. At the corners of each corner, A direction changing device I5 is provided. The direction changing device 15 is provided with a rotating device (not shown) at a central portion of the lower portion of the stator 10A. The way to convert from one side of the rectangle to the other side, The stator 10A is rotated. also, A motor driving device 40 is connected to each stator 10A, The motor drive unit 40 is controlled by the upper controller 50. So, Each of the stators 10A is connected by a so-called intermittent structure in which the stators 10A are spaced apart from each other. Therefore, the stator 10A rotated by the direction changing device 15 can also be connected. also, Using the direction changing device 15, This variety of configurations can also be implemented. also, As shown in Figure 28, As a third modification of the first embodiment, The distributed arrangement linear motor 1D has an optical or magnetic linear scale 23 on the rotor 20C. Further, the stator 10C may include a position detecting device 30B that reads the linear scale 23. also, The length of the linear scale 23, It is a distance that matches the poles at both ends of the rotor 20C. Using such a linear scale 2 3 with the position detecting device 3 0B, The linear motor 1 A 1 can be determined in the same manner as in the first embodiment. 1 A2 1 A3 or the like reference position 'and any linear motor can often detect the rotor 20C. 201025800 Again, The intervals between the stators 10A are not equal, The distance D 1 is a natural multiple of the coil pitch Cp. The current flowing in the coil 1 1 is not limited to the 3-phase alternating current, 2 phase, 4 equal other phases are also possible. at this time, The number of types of poles of the coil 1 1 is different. (Second Embodiment) Hereinafter, a drive system for a distributed arrangement line type φ motor according to a second embodiment of the present invention will be described. First of all, A schematic configuration of a drive system for a distributed arrangement linear motor according to the second embodiment, This will be explained using Figs. 29 to 31. also, In the same or corresponding part of the first embodiment described above, The same symbols are used to describe only the different configurations and functions. The same applies to other embodiments and modifications. Fig. 29 is a block diagram showing a schematic configuration of a drive system of a distributed arrangement linear motor according to a second embodiment of the present invention. Fig. 30 is a perspective view showing an example of a stator and a rotor of the distributed arrangement linear motor of Fig. 29. Fig. φ 31 is a schematic view showing a periodic structure of a pole of the stator of Fig. 29. As shown in Figure 29, Unlike the linear motor of the first embodiment, A permanent magnet for driving is arranged in the stator, On the other hand, a coil or a position detecting device for three phases is provided in the rotor. The drive system for the distributed configuration line motor 2A is: Dispensing line motor 2A for moving parts or workpieces, etc. And controlling a plurality of motor driving devices 40 of the distributed arrangement type motor 2A, And controlling the upper controller 50 of the plurality of motor drive units 40. The distributed arrangement linear motor 2A is a plurality of stators 60 A and rotors 70 A having relative motions by magnetic interactions of -43 to 201025800, 70B. In the distributed arrangement linear motor 2 A, a plurality of stators 60 A are arranged in the transport direction at predetermined intervals. Different from the first embodiment, Rotor 70A, The 70B has a position detecting device 30. also, Rotor 7〇A, 70B and motor drive unit 40, It is connected by the power cable 53. Rotor 70A, 70B position detecting device 30 and position information converter 35' position information converter 35 and motor driving device 40, To be connected by the encoder 52. Each of the motor driving device 40 and the upper controller 50 is connected by a control line 51. As shown in Figure 30, Stator 60A1 60A2 has a base 61, respectively. And a permanent magnet 62 disposed on the upper surface of the base 61. As shown in Figure 30 or Figure 31, The permanent magnet 62 is an N pole magnet 62a having a substantially N pole with respect to one side of the rotor 7A. And S pole S pole magnet 62b, Magnetically applied to the rotor 70A. These N poles, S is an example of a pole in which the permanent magnet 62 is generated on the rotor 70A side. also, According to the N pole, S pole order, The N-pole magnet 62a and the S-pole magnet 62b are alternately formed to be periodically arranged in the stator 60A1. A periodic configuration of the direction of relative movement of 60A2 and rotor 70A. that is, Stator 60A1 60A2 is an N pole in the longitudinal direction of the stator 60A as an example of the relative movement direction. The periodic structure of the S pole. after that, As shown in Figure 30, The rotor 70A or the like has: Supply coil 71 with 3-phase AC current, And a salient pole 72 around which the coil 71 is wound. The coil 71 is a U-phase coil 71a, There are three types of the V-phase coil 71b and the W-phase coil 71c. The salient pole 72 is a coil 71a, 71b, 71c corresponds to the salient pole 72a for the U phase, The salient pole 72b for the V phase, Three types of salient poles 72c for the W phase. These 201025800 coils 71a, 71b, 71c and salient pole 72a, 72b, 72c is based on U phase, V phase, The order of the W phase, Formed periodically in the stator 6〇ai, A periodic configuration of the direction of relative movement of 60A2 and rotor 70A. that is, The coil 7 1 and the salient pole 72 form a U phase in the longitudinal direction of the rotor 70 A or the like in an example of the relative movement direction. V phase, The periodic structure of the W phase. in this way, In response to the respective turns 71a of the rotor 7 OA, 71b, The moving magnetic field occurs when the current direction or intensity of the 3-phase alternating current of the 71c is generated. Magnetically acting on each coil 71a, 71b, The sharp pole of the 71c 72, And an N-pole magnet 62a and an S-pole magnet 62b, And in the stator 60A1 The stator 60A1 occurs in the length direction of the 60A2, The relative motion of 60A2 and rotor 70A. that is, Stator 60A1 60A2 and rotor 70A are magnetically interacting with each other, The rotor 70A is relatively moved in the stator 60A1. 60A2 length direction. the following, The stator 60A1 is detailed in accordance with FIG. Arrangement of 60A2 〇 As shown in Figure 31, The permanent magnet 62 of the stator 60A is a length of one cycle of the magnet pitch Mp. According to the N-pole magnet 62a, The order of the S pole magnets 62b is alternately arranged. An example of the length of one cycle of the periodic structure of the stator 60 A is the N-pole magnet 62a. Among the S pole magnets 62b, The minimum distance between the same pole and the other. E.g, The distance between the N-pole magnet 62a and the next N-pole magnet 62a. Adjacent stator 60A 1, An example of the minimum distance D1 between the poles of the same type of 60A2, It is an N-pole magnet 62a that is coupled to the stator 60A1 and is closest to the stator 60A2 side. And the distance of the N-pole magnet 62a closest to the stator 60A1 side in the stator 60A2. -45- 201025800 This distance D1 is a natural multiple of the magnet spacing Mp. Using the spacing of the stators 60A from each other, The stator 6〇a is arranged across. also, Viewed by other means, Then, the phase of the periodic structure of the stator 60 A 1 and the phase of the periodic structure of the stator 60A2 coincide with each other. that is, The periodic structure of the N-pole S pole of the permanent magnet 62 according to the stator (9) is assumed to extend on the side of the stator 60A2 as indicated by a broken line in Fig. 31. The phase of the periodic configuration of the stator 60A2 is made to coincide with the extension. And as shown in Figure 29, Adjacent stator 60A1 An example of the minimum distance D2 between the poles of 60A2, It is an S pole magnet 62b that is coupled to the stator 60A1 and is closest to the stator 60A2 side. And the distance from the stator 60A2 closest to the N-pole magnet 62a on the side of the stator 60A1. This distance D2 is equal to or less than the length Lmvl of the rotor 70A or the Lmv2 of the rotor 70B. here, The length Lmvl of the rotor 70A or the length Lmv2 of the rotor 70B, As shown in Figure 29, Connecting the rotor 7〇 A, The distance between each of the salient poles 72 at both ends of the relative movement direction of 70B. that is, Rotor 70A, An example of the maximum distance between the poles of 70B. So, The distance D2 is equal to or less than the length Lmvl of the rotor 70A. And the length of the rotor 70B is less than Lmv2, Then the rotor 70A, 70B may span the state of the stator 60A1 and the stator 60A2, With either pole of stator 60A, Or with the rotor 70 A, Any of the 7 0 B poles often become in a relative state. also, The phase of the periodic structure of the stator 60A1 coincides with the phase of the periodic structure of the stator 60A2. It can also be said that it is continuous from the stator 60A1 to the stator 60A2. Further, in one stator having a periodic structure of the N-pole S pole of the permanent magnet 62, Equivalent to the N-pole magnetic omitting part of the distance D2 201025800 iron 62a, The case of the S pole magnet 62b. However, except for the N-pole magnet 62a at both end portions of the distance D2, Other than the S pole magnet 62b. also, In the case of Figure 31, The distance D1 is a natural multiple of 2 or more of the magnet pitch Mp. also, It is assumed that there is no S-pole magnet 62b at the end of the stator 60A1 side of the stator 60A1, The N-pole magnet 62a is closest to the side of the stator 60A1, Then, the distance D1 is a natural multiple of 1 or more of the magnet pitch Mp. the following, As shown in Figure 30, The position detecting device 30 having the magnetic sensor 31 is arranged in the rotor 70A, The outer side of the projection 72 at both ends in the longitudinal direction of 70B. also, In the rotor 70A, The magnetic sensor 3 1 is placed in a relative state with respect to the side of the stator 60A. The position of the position detecting device 30 is set at the rotor 7A, 70B length direction, It will not be affected by the coil 7 1 . in this way, The magnetic sensor 3 1 detects the stator 60A and the rotor 70A, The magnetic field caused by the permanent magnet 62 of the stator 60A of an example of the object to be detected extending in the relative movement direction of 70B. The magnetic sensor 3 1 detects the predetermined φ sub 6〇A and the rotor 70A, 70B changes the magnetic field caused by relative motion. The distance D s 1 between the position detecting devices 30 D s2, That is, the distance Ds between the magnetic sensors 3 is less than the length Lst of the stator 60A. that is, This is an example in which the distance between the first magnetic sensor 31 and the second magnetic sensor 31 is equal to or less than the maximum distance between the poles of the stator 60A. Hereinafter, the operation of the origin when the rotor 70A is determined will be described based on Fig. 32. 32(A) to 32(E) of Figure 32, It means that according to the movement of the rotor 70 A, A pattern diagram that determines the action of the origin. Position detecting device 30L of rotor 7〇 a -47- 201025800, The distance Dsl between 30R and the length Lst of the stator 60A are approximately equal. Further, in the first embodiment, except that the stator and the rotor are opposite to each other, Description of the operation of the seventh embodiment of the first embodiment, And the action of finding the origin is basically the same. that is, The origin is determined in accordance with the change in the state of the position information converter 35. but, Using the stator as a reference, Then, the permanent magnet 6 2 detected by the position detecting device 3 0 R in the state of the 3 2 (C) diagram, that is, The permanent magnet 62 at the end of the stator 60A2 on the stator 60A1 side serves as a first origin. From the first origin, the distance Ds 1 is taken as the target position. also, The permanent magnet 6 2 detected by the position detecting device 3 0 L in the state of the 3 2 ( e ), that is, The permanent magnet 62 at the end of the stator 60A2 on the stator 60A1 side serves as a second origin. This second origin is used as the target position. the following, The operation of determining the origin of the rotor 7 Ο B will be described with reference to the drawings. 各 The 33rd (A)th to 33rd (E)th diagrams of the 33rd are shown in accordance with the movement of the rotor 70B. A pattern diagram that determines the action of the origin. a position detecting device 30L of the rotor 7〇b, The distance between 30R is Ds2, It is a case shorter than the length Lst of the stator 60A. The method of determining the origin, It is about the same as when the rotor 7OA is used. but, The permanent magnet 62' detected by the position detecting means 3?r in the state of Fig. 33(C), that is, The permanent magnet 62 at the end of the stator 6A2 on the stator 6A1 side is used as the first origin. From the first! The origin uses the length Lst of the stator 6A2 as the target position. Further, the position of the third 3 (E) is detected. -48- 201025800 The permanent magnet 62 detected by the device 30L, that is, The permanent magnet 02 at the end of the stator 6A2 on the stator 60A1 side serves as a second origin. The second origin distance (Lst-Ds2) /2 is taken as the target position. the above, Such as the stator 60A1 of the linear motor 2A The minimum distance D1 between the N-pole magnet 62a of the stator 60A1 adjacent to the 60A2 and the N-pole magnet 62a of the stator 60A2, For the stator 6 0A1 The natural number of times of the length of one cycle Mp of the periodic structure of the pole of 60A2, that is, The phases of the respective periodic structures of the stators 60A adjacent to each other, such as the stator 60A1 and the stator 60A2, coincide with each other. And the minimum distance D2 between the pole of the permanent magnet 62 of the adjacent stator 60A1 and the pole of the permanent magnet 62 of the stator 60 A2, Become the rotor 70A, The maximum distance between the salient poles of 70B, That is to become 70A, 70B length Lmvl, Lmv2 below, Stator 60A1 60 A2, etc. are distributed, Thus the rotor 70A, 70B moves from the stator 60A1 to the adjacent stator 60A2, etc. The pole of the permanent magnet 62 of the stator 60A2 and the rotor 70A, The salient pole 72 of the 70B acts to prevent the rotor 70A, 70B's propulsion loss, Again, Rotor 70A, 70B is a controllable force that can obtain a propulsive force from at least one of the stator 60A1 and the stator 60A2, and is controllable for the stator 60A 1 . Distributed configuration of 60A2, etc. So, The distance between the intervals of the stators 60A is D1, A simple configuration that is set to a natural multiple of the length Mp of one cycle of the periodic structure, It is possible to make controls suitable for the allocation configuration. Above, In the drive system of the distributed arrangement linear motor of the present embodiment, According to the periodic structure of the pole having the stator 60A, The direction of the magnetic field generated by the periodic change of the relative motion is output as having 90. The sinusoidal signal and the cosine wave signal of the phase difference, Detecting the position of the rotor 70 A from -49 to 201025800, With this, It becomes a linear scale that does not need to be provided in each stator 60 A or each rotor 70A. The linear motor 2A in which the stator 60A is dispersed can be formed in a simpler configuration. Above, In the drive system of the distributed arrangement linear motor of the present embodiment, The magnetic sensor 3 1 of the position detecting device 30 of the detector is detected to be arranged in correspondence with the stator 60A and the rotor 70A, 70B is a permanent magnet 62 of the stator 60 A of an example of the object to be detected that moves relative to each other, The two magnetic sensors 31 are arranged in the opposite direction to be equal to or less than the length Lst of the stator 60 A, thus, The reference position of each linear motor of the linear motor 2A can be determined, Position control can be performed correctly with a simpler configuration. also, In this embodiment, In addition to not becoming a cable, The same effects as those of the first embodiment can be obtained. especially, The motor drive unit 40 is directly to the rotor 70A, For the sake of 70B, Thus for each rotor 70A, The 70B can be moved slightly. Further, according to the periodic structure of the pole having the stator 60 A, The sinusoidal signal and the cosine wave signal having a phase difference of 90° are output as a direction of the magnetic field generated by the relative motion periodic change. The position of the rotor 70A is detected, With this, It becomes a linear scale that does not need to be provided in each stator 60A or each rotor 70A. The linear motor 2A in which the stator 60A is dispersed can be formed in a simpler configuration. also, The position detecting device 30 is not required in each of the stators 60A, Therefore, it can correspond to rotor 70A of various lengths, 70B. also, As shown in Figure 34, As a first modification of the second embodiment, The distributed configuration line motor 2B is provided with: Reading the optical or 201025800 magnetic linear scale 2 3 B on the stator 60B, The position detecting device 30B that reads the linear scale 2 3 B at the rotor 70 C may be used. also, The length of the linear scale 23B, It is the distance of the poles at both ends of the stator 60B. With the linear scale 23 and the position detecting device 30B, Similar to the first embodiment, Can determine each line motor 1 A 1, 1 A2 The reference position '1 of A3 or the like' and the rotor 2 0 C can be detected frequently. (Third Embodiment) Hereinafter, a drive system for a distributed arrangement linear motor according to a third embodiment of the present invention will be described. First of all, With regard to the basic configuration of the third embodiment, Use Figure 35 to illustrate. Fig. 3 is a block diagram showing an example of a schematic configuration of a drive system of a distributed arrangement linear motor according to the third embodiment. As shown in Figure 35, The configuration of the linear motor 3A of the present embodiment, It is approximately the same as the linear motor 1A of the first embodiment. However, the distance between the stators 10A and each other is D3, More than the length Lmv of the rotor 20A, It is different from the linear motor 1 A of the first embodiment. also, In the first modification of the first embodiment or the linear motor of the second embodiment, It is also possible to form the distance D1 between the stators up to the distance D3. the following, The operation of determining the origin of each linear motor 3A will be described based on Fig. 36. As shown in Figure 36, The rotor 20A is in a state shown in Fig. 36(A). Through the state indicated in the 3 6 (B) diagram, As shown in Figure 3 6 (C) -51 - 201025800, It leaves from the stator 1〇Α1. In this state, the rotor 20A is not opposed to the stator 10A. Therefore, position control or speed control cannot be performed. also, As shown in Figure 36 (D), When the rotor 20A arrives, The position information converter 35 of the stator 10 A2 is a signal for starting to output the position detecting means 30L from the stator 10A 2 . The position of the position detecting device 30L is taken as the first origin. From the first origin to the position detecting device 30L, The distance Ds between 3 0R is the target position. also, Through the state of the 36th (E) diagram, When the rotor 20A reaches the position as shown in Fig. 36(F), Then, the position information converter 36 of the stator 10A2 starts to output a signal from the position detecting means 30R from the stator 10A2. The position of the position detecting device 30R is the second origin. And for the target location. In this embodiment, the stator 10A1 has to be The distance between 10A2 is the distance D 3 . E.g, There is still distance to the next processing project. And does not need the stator 10A1 Correct position control or speed control on the way between 10A2, Can be applied without regard to accuracy, etc. And it is a case of moving a workpiece or the like quickly. also, The rotor 20A is cableless. Therefore, it is accelerated and easily moved to the next stator 10A. also, The present invention is not limited to the above embodiments. Each of the above embodiments is an example. The technical idea described in the scope of the patent application of the present invention has substantially the same composition. Those who have the same effect, Anybody is included in the technical scope of the present invention. Japanese Patent No. 2008-222534, All of the contents of Japanese Patent Application No. 2008-222535 and Japanese Patent Application No. 2008-222536 are incorporated herein by reference. [Brief Description of the Drawings] Fig. 1 is a block diagram showing an example of a schematic configuration of a drive system of a distributed arrangement linear motor according to the first embodiment of the present invention. Fig. 2 is a perspective view schematically showing an example of a stator and a rotor of the distributed arrangement linear motor of Fig. 1 . Fig. 3 is a plan view showing an example of an arrangement of stators in Fig. 1 . φ Fig. 4 is a schematic view showing the periodic structure of the poles of the stator and the rotor of Fig. 1. Fig. 5 is a block diagram showing an example of a configuration of a motor control device of Fig. 1. Fig. 6 is a perspective view showing the principle of the magnetic sensor of Fig. 5. Fig. 7 is a graph showing the relationship between the electric resistance 値 of the magnetic sensor of Fig. 5 and the angle 0 of the magnetic field direction. Fig. 8 is a plan view showing the φ shape of the ferromagnetic thin film metal of the magnetic sensor of Fig. 5. Fig. 9 is an isometric circuit diagram showing the magnetic sensor of Fig. 8. Fig. 10 is a plan view (A) and an isometric circuit diagram (B) showing the shape of a magnetic sensor comprising a Soesten bridge. Fig. 11 is a view showing a magnetic sensor composed of two sets of full bridges [Fig. (A) is a plan view showing the shape of a ferromagnetic thin film metal of a magnetic sensor. (B) in the figure is an isometric circuit diagram]. Fig. 1 is a schematic view showing the positional relationship between the magnetic field generated by the rotor of Fig. 1 and the magnetic sensor. -53- 201025800 Fig. 1 3 is a view showing the direction of the magnetic momentum detected by the magnetic sensor of Fig. 5, And a graph of the relationship between output voltages. Fig. 14 is a graph showing sinusoidal signals and cosine wave signals outputted from the magnetic sensor of Fig. 5. Fig. 15 is a view showing the output signal of the position detecting device of Fig. 5. Fig. 16 is a view showing a sine wave and a cosine Lissajou figure of the output signal of the magnetic sensor of Fig. 5, and Figs. 17(A) to 17(E) are A schematic diagram of the operation of the origin of each linear motor of Fig. 1 is determined. Figs. 18(A) to 18(C) are plan views showing an example of a pattern of the operation of the rotor of Fig. 1. Figure 19 is a block diagram showing the first figure, A pattern of the flow of signals. 20(A) to 20(E) are schematic diagrams showing an example of a pattern of the operation of the position information converter of Fig. 1. Figs. 21(A) to 2(E) are schematic diagrams showing an example of a pattern of another operation of the position information converter of Fig. 1. Figure 22 is a block diagram showing the i-th figure, A pattern of the flow of signals. 23(A) to 23(E) are schematic diagrams showing an example of a pattern of the operation of the position information converter of Fig. 1. Figure 24 is a block diagram showing the first figure, The flow of the signal is -54- 201025800. 25(A) to 25(E) are schematic diagrams showing an example of a pattern of the operation of the position information converter of Fig. 1. 26(A) to 26(G) are schematic diagrams showing the operation of the origin of the first modification of the linear motor of Fig. 1 . Fig. 27 is a plan view showing another example of the arrangement of the distributed arrangement line type motor of Fig. 1. Fig. 28 is a schematic diagram showing a second modification of the linear motor of Fig. 1 and Fig. 29 is a block diagram showing an example of a schematic configuration of a drive system of the distributed arrangement linear motor according to the second embodiment of the present invention. . Fig. 30 is a perspective view schematically showing an example of a stator and a rotor of the distributed arrangement linear motor of Fig. 29. Fig. 31 is a schematic diagram showing a periodic structure of the poles of the stator of Fig. 29. Figs. 32(A) to 32(E) are diagrams showing an example of a pattern of the operation of the position information converter of Fig. 29. Figure. Figs. 33(A) to 33(F) are schematic diagrams showing an example of a pattern of the operation of the positional information converter of Fig. 29. Fig. 34 is a schematic view showing a first modification of the linear motor of Fig. 29. Fig. 3 is a block diagram showing an example of a schematic configuration of a drive system of a distributed arrangement line type motor according to a third embodiment of the present invention. 36(A) to 36(F) are schematic diagrams showing the operation of determining the origin of each of the -55-201025800 linear motors of Fig. 35. [Main component symbol description] 1A, IB, 1C, ID, 2A, 2B: Decentralized configuration line motor 10A, 10B, 10C, 60A, 60B: Stator 1 1 : Coil 12 : Sharp pole 20A, 20B, 20C, 70A, 70C : Rotor 22, 80 : Permanent magnet 30, 30B: Position detecting device 3 1 : Magnetic sensor 32 : Position detection circuit 32a: A/D converter 3 2b : Signal processing unit 40: Motor drive