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TW201011373A - Air float unit and support apparatus provided with such air float - Google Patents

Air float unit and support apparatus provided with such air float Download PDF

Info

Publication number
TW201011373A
TW201011373A TW098128724A TW98128724A TW201011373A TW 201011373 A TW201011373 A TW 201011373A TW 098128724 A TW098128724 A TW 098128724A TW 98128724 A TW98128724 A TW 98128724A TW 201011373 A TW201011373 A TW 201011373A
Authority
TW
Taiwan
Prior art keywords
spherical
suspension unit
platform
main body
support
Prior art date
Application number
TW098128724A
Other languages
English (en)
Chinese (zh)
Inventor
Hidekazu Itoh
Shigeru Hayashimoto
Original Assignee
Ckd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp filed Critical Ckd Corp
Publication of TW201011373A publication Critical patent/TW201011373A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • H10P72/36—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Pivots And Pivotal Connections (AREA)
  • Support Of The Bearing (AREA)
TW098128724A 2008-09-02 2009-08-26 Air float unit and support apparatus provided with such air float TW201011373A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008224745A JP5089534B2 (ja) 2008-09-02 2008-09-02 浮上ユニット及びそれを備えた非接触支持装置

Publications (1)

Publication Number Publication Date
TW201011373A true TW201011373A (en) 2010-03-16

Family

ID=41796994

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098128724A TW201011373A (en) 2008-09-02 2009-08-26 Air float unit and support apparatus provided with such air float

Country Status (3)

Country Link
JP (1) JP5089534B2 (ja)
TW (1) TW201011373A (ja)
WO (1) WO2010026820A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI582314B (zh) * 2012-04-12 2017-05-11 Oiles Industry Co Ltd Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
CN113108715A (zh) * 2021-04-13 2021-07-13 南京中安半导体设备有限责任公司 悬浮物的测量装置和气浮卡盘

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5929117B2 (ja) * 2011-11-18 2016-06-01 オイレス工業株式会社 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
JP2013113344A (ja) * 2011-11-25 2013-06-10 Oiles Corp 静圧気体軸受構造
JP5868709B2 (ja) * 2012-01-10 2016-02-24 オイレス工業株式会社 静圧気体軸受装置
JP5913997B2 (ja) * 2012-01-13 2016-05-11 オイレス工業株式会社 エアスライド装置
JP5924084B2 (ja) * 2012-04-02 2016-05-25 オイレス工業株式会社 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
JP5928106B2 (ja) * 2012-04-02 2016-06-01 オイレス工業株式会社 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
NL2009764C2 (en) * 2012-11-06 2014-05-08 Univ Delft Tech An apparatus for carrying and transporting a product.
JP6001005B2 (ja) * 2014-05-26 2016-10-05 センクシア株式会社 間柱用油圧ダンパ
JP5868534B1 (ja) * 2015-02-26 2016-02-24 香川クレメン株式会社 被加工物のびびり振動防止治具
JP6237814B2 (ja) * 2016-04-13 2017-11-29 オイレス工業株式会社 静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置
DE102017006584A1 (de) 2017-01-17 2018-07-19 3D-Micromac Ag Verfahren und Vorrichtung zum berührungslosen Werkstücktransport
CN108655915B (zh) * 2018-05-15 2023-05-02 浙江辛子精工机械股份有限公司 一种特大型数控立磨机
CN110630638A (zh) * 2019-10-30 2019-12-31 北京灵禾科技发展有限公司 一种气浮轴承
CN114893499B (zh) * 2022-04-12 2024-05-28 天津航天机电设备研究所 一种气浮球轴承

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05318368A (ja) * 1992-05-18 1993-12-03 Tokyo Electron Yamanashi Kk 吸着搬送装置
JP4724562B2 (ja) * 2003-11-21 2011-07-13 三星ダイヤモンド工業株式会社 真空吸着ヘッド、その真空吸着ヘッドを用いた真空吸着装置及びテーブル
JP4354426B2 (ja) * 2004-11-24 2009-10-28 シーケーディ株式会社 傾斜機能付き浮上ユニット及び浮上装置
JP4302697B2 (ja) * 2005-04-11 2009-07-29 シーケーディ株式会社 浮上ユニット及び浮上装置
JP4824603B2 (ja) * 2007-02-27 2011-11-30 シーケーディ株式会社 浮上ユニット

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI582314B (zh) * 2012-04-12 2017-05-11 Oiles Industry Co Ltd Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
CN113108715A (zh) * 2021-04-13 2021-07-13 南京中安半导体设备有限责任公司 悬浮物的测量装置和气浮卡盘
CN113108715B (zh) * 2021-04-13 2024-01-23 南京中安半导体设备有限责任公司 悬浮物的测量装置和气浮卡盘

Also Published As

Publication number Publication date
WO2010026820A1 (ja) 2010-03-11
JP5089534B2 (ja) 2012-12-05
JP2010060013A (ja) 2010-03-18

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