201008705 六、發明說明： 【發明所屬之技術領域】 本發明是關於：硏磨裝置、硏磨輔助裝置及硏磨方法 【先前技術】 將可對工件相對旋轉的旋轉磨石按壓於工件的表面， φ 而將工件硏磨至特定厚度爲止的硏磨方法已爲大眾所熟知 。該硏磨方法所使用的習知硏磨裝置的其中一例如第4圖 所示。 該硏磨裝置101具有：工件保持部102、及用來硏磨工 件200的旋轉磨石103。 工件保持部102具有：圓筒狀的旋轉軸部1〇4、及可旋 轉地支承於旋轉軸部104之上部的旋轉台105。 旋轉台105，是將其上表面作爲用來保持工件200的工 ❹ 件保持面106，並藉由圖面中未顯示的旋轉驅動機構而朝 圖中箭號a方向旋轉驅動。藉由旋轉台105的旋轉驅動，使 被保持於工件保持面106的工件200以旋轉台105的旋轉軸 作爲中心而公轉。 旋轉磨石103具有：被支承成可旋轉的磨石保持具1〇7 '及被保持於磨石保持具107的磨石108，磨石108的表面 是配設成面向工件保持面106。 此外，該旋轉磨石103，是藉由圖面中未顯示的旋轉 驅動機構，而朝與旋轉台105之旋轉方向相反的方向（圖 -5- 201008705 中箭號b方向）旋轉驅動’並藉由升降操作機構，而在從 工件保持面106分離的位置（初期位置）、及磨石1〇8與工 件200之表面接觸的位置（硏磨位置）間移動操作。 在上述的硏磨裝置101中’在使旋轉台105與旋轉磨石 103朝彼此相反的方向旋轉驅動的狀態下，使旋轉磨石103 朝下方移動操作，並使磨石108的表面按壓於工件200的表 面時，工件200的表面將由於磨石108而滑動，而對工件 200的表面施以硏磨。 _ 此外，就該種的硏磨裝置而言，具備：工具旋轉驅動 部’該工具旋轉驅動部可促使硏削工具或硏磨工具旋轉驅 動；和工件保持部，該工件保持部是用來保持工具，而該 工具是與前述工具旋轉驅動部的旋轉軸平行地旋轉；和軸 方向驅動部，該軸方向驅動部可促使工具旋轉驅動部與工 件保持部在上述兩者的旋轉軸方向上相對接近或後退·，及 控制部，在將前述工件按壓於前述工具而執行平面最終加 工的硏磨裝置中，前述工具旋轉驅動部或工件保持部的旋 © 轉軸，是位在用來導引「因前述軸方向驅動部所產生的驅 動」之驅動基準面的面内，而這樣的硏磨裝置已爲大眾所 知悉（請參考專利文獻1)。此外，就該種的裝置而言， 除了以上所述的硏磨裝置以外，有些硏削裝置還具備：將 旋轉台設置成可自由水平旋轉，倂設有被支柱狀管柱所支 承而能上下自由移動的旋轉磨石（請參考專利文獻2)， 或者有些平面硏削裝置具備：具有真空吸附機構之杯狀磨 輪型的硏削磨石（請參考專利文獻3)，而這樣的裝置也 -6- 201008705 已被大眾所知悉。 [專利文獻1]日本特開2007 - 2100 74號公報 [專利文獻2]日本特開平10-058320號公報 [專利文獻3]日本特開平05 - 077147號公報 【發明內容】 [發明欲解決之課題] 參 然而，在上述的硏磨裝置101中，從工件200所產生的 硏磨粉，將於磨石108產生淤塞，以致磨石1 08的硏磨性能 下降，或產生對工件2 00造成損傷之類的問題。特別是在 工件爲藍寶石基板或SiC基板的場合中，由於其硏磨粉具 有黏性，而容易產生旋轉磨石的淤塞。 因此，上述的硏磨裝置101爲了抑制磨石108的淤塞， 採用了以下的對策：降低旋轉磨石103的旋轉數、或者中 途停止硏磨加工以便於執行數次去除附著於旋轉磨石之硏 粵 磨粉的修整步驟。這裡所述的修整步驟，是藉由使修正用 磨石活動於旋轉磨石之表面的方式來執行。 但是，一旦降低旋轉磨石103的旋轉數，將導致工件 的硏磨速度下降，而需要更長時間才能將工件硏磨至特定 厚度。此外，一旦中途停止硏磨加工來執行修整步驟，除 了工件之硏磨本身需要時間以外，就連修整步驟也需要時 間。因爲上述的狀況，使得習知的硏磨裝置101無法獲得 充分的加工效率，而招致加工品的生產性下降的現狀。 此外，上述的情形也同樣存在於專利文獻1〜3所記載 201008705 的硏磨裝置，因此期待能出現一種：既能解決磨石淤塞的 問題，又可提高硏磨性能的硏磨裝置。 本發明正是爲了解決上述的課題所硏發而成的發明， 本發明的目的是提供：可抑制旋轉磨石的淤塞並有效率地 對工件硏磨加工，並可在抑制其損傷的狀態下對工件硏磨 加工的硏磨裝置及硏磨方法、硏磨輔助裝置。 [解決課題之手段] @ 本案的發明團隊，爲了解決上述課題所努力鑽硏的結 果，發現藉由提供以下的硏磨裝置、硏磨輔助裝置及硏磨 方法，而輕易地解決上述課題。 換言之，本發明的硏磨裝置，（1)其特徵在於：具 備：旋轉軸部；和旋轉台，該旋轉台被設在前述旋轉軸部 上，並將工件保持於其上表面；和旋轉磨石，該旋轉磨石 是與前述旋轉台的上表面相對，並被支承成朝與前述旋轉 台之旋轉方向相反的方向自由旋轉且升降操作；和修整用 G 磨石設置部，該修整用磨石設置部被配設於前述旋轉軸部 的周圍；及修整用磨石，該修整用磨石被固定在前述修整 用磨石設置部上，其硏磨面被配設成面對前述旋轉磨石的 硏磨面，藉由在使前述旋轉台和修整用磨石與前述旋轉磨 石間相互地朝反方向旋轉的狀態下，促使前述旋轉磨石的 硏磨面接觸於工件的表面，可硏磨前述工件，並在硏磨工 件的同時，藉由使前述旋轉磨石的硏磨面接觸於前述修整 用磨石的硏磨面，而自在地去除附著於前述旋轉磨石的硏 -8 - 201008705 磨粉。 (2) 本發明的硏磨裝置之（i)所記載的修整用磨石 ’其特徵爲：也可以是配置在前述修整用磨石設置部上的 環狀修整用磨石。 (3) 本發明的硏磨裝置之（1)所記載的修整用磨石 ’也可以是由：在前述修整用磨石設置部上，以特定的間 隔並列成環狀的複數個修整用磨石片所構成。 • (〇本發明的硏磨裝置之（1)〜（3)的其中任一 個所記載的修整用磨石設置部，其特徵爲具有：修整用磨 石台’該修整用磨石台是用來保持前述修整用磨石；及修 整用磨石台支承部，該修整用磨石台支承部將前述修整用 磨石台支承成可上下搖動。 (5)本發明的硏磨裝置之（1)〜（4)的其中任一 個所記載的修整用磨石台支承部，其特徵爲：具備彈性支 承前述修整用磨石台的彈簧。 • (6)本發明的硏磨輔助裝置，其特徵爲：具有：環 狀的修整用磨石設置部、及被固定於前述修整用磨石設置 部上的修整用磨石，前述修整用磨石設置部是構成：可自 由安裝於硏磨裝置之旋轉軸部的周面。 (7) 本發明的硏磨輔助裝置之（6)所記載的修整用 磨石，其特徵爲：是由配置於前述修整用磨石設置部上的 環狀修整用磨石片所形成。 (8) 本發明的硏磨輔助裝置之（6)所記載的修整用 磨石，其特徵爲：是由在前述修整用磨石設置部上以特定 -9 - 201008705 間隔倂設成環狀的複數個修整用磨石片所形成。 (9) 本發明的硏磨輔助裝置之（6)〜（8)的其中 任一個所記載的修整用磨石設置部，其特徵爲：具有：用 來保持前述修整用磨石的修整用磨石台；及將前述修整用 磨石台支承成可上下搖動的修整用磨石台支承部。 (10) 本發明的硏磨輔助裝置之（6)〜（9)所記載 的修整用磨石台支承部，其特徵爲：具備彈性支承前述修 整用磨石台的彈簧。 (11) 本發明的硏磨方法，其特徵爲：在促使保持工 件的旋轉台與旋轉磨石彼此朝相反方向旋轉的狀態下，藉 由使前述磨石的硏磨面接觸於工件的表面，當硏磨前述工 件時，將修整用磨石配設於前述旋轉台的周圍，而使硏磨 前述工件的動作同時進行，藉由使前述旋轉磨石的硏磨面 接觸於前述修整用磨石的硏磨面，一邊去除附著於前述旋 轉磨石的硏磨粉，並一邊進行硏磨。 [發明效果] 根據本發明，當將可相對於工件而旋轉的旋轉磨石按 壓於工件的表面，而將工件硏磨至特定厚度爲止時，抑制 旋轉磨石的淤塞，並可抑制其損傷而有效率地對工件硏磨 加工。 此外，藉由「修整用磨石設置部具有：用來保持修整 用磨石的修整用磨石台；及將修整用磨石台支承成可上下 搖動的修整用磨石台支承部」，即使在磨石及/或修整用 -10- 201008705 磨石的高度不一致的場合中，由於修整用磨石台產生搖動 而抵銷其高度的差異，而接觸於磨石並去除硏磨粉，因此 可一致地由修整用磨石防止磨石的淤塞。 此外，藉由「修整用磨石台支承部具有彈簧」，即使 修整用磨石台朝其中一側傾斜，也能快速地恢復至初期狀 態。因此，可促使磨石與修整用磨石以良好的接觸狀態長 時間接觸，並有效率地對硏磨中的磨石施以修整處理。 【實施方式】 以下，針對本發明的硏磨裝置、硏磨輔助裝置、及硏 磨方法的實施形態進行說明。 (硏磨裝置及硏磨輔助裝置） 首先’針對本發明的硏磨裝置及硏磨輔助裝置進行說 明。201008705 6. Technical Field of the Invention The present invention relates to a honing device, a honing aid, and a honing method. [Prior Art] A rotating grindstone capable of relatively rotating a workpiece is pressed against a surface of a workpiece. The honing method of honing the workpiece to a specific thickness is well known to the public. One of the conventional honing devices used in the honing method is shown in Fig. 4, for example. The honing device 101 has a workpiece holding portion 102 and a rotating grindstone 103 for honing the workpiece 200. The workpiece holding portion 102 has a cylindrical rotating shaft portion 1〇4 and a rotary table 105 rotatably supported by the upper portion of the rotating shaft portion 104. The rotary table 105 has its upper surface as a workpiece holding surface 106 for holding the workpiece 200, and is rotationally driven in the direction of arrow a in the figure by a rotary drive mechanism not shown in the drawing. By the rotational driving of the rotary table 105, the workpiece 200 held by the workpiece holding surface 106 is revolved around the rotation axis of the rotary table 105. The rotating grindstone 103 has a grindstone holder 1〇7' supported by the rotatable grindstone 103 and a grindstone 108 held by the grindstone holder 107, and the surface of the grindstone 108 is disposed to face the workpiece holding surface 106. Further, the rotary grindstone 103 is rotated and driven in a direction opposite to the rotation direction of the rotary table 105 (the direction of the arrow b in FIG. 5 - 201008705) by a rotary drive mechanism not shown in the drawing. The lifting operation mechanism moves between a position (initial position) separated from the workpiece holding surface 106 and a position (honing position) at which the grindstone 1 is in contact with the surface of the workpiece 200. In the above-described honing apparatus 101, in a state where the rotary table 105 and the rotary grindstone 103 are rotationally driven in directions opposite to each other, the rotary grindstone 103 is moved downward, and the surface of the grindstone 108 is pressed against the workpiece. At the surface of 200, the surface of the workpiece 200 will slide due to the grindstone 108, and the surface of the workpiece 200 will be honed. Further, in the case of the honing device, there is provided: a tool rotation driving portion that drives the boring tool or the honing tool to be rotationally driven; and a workpiece holding portion that is used to hold a tool that rotates in parallel with a rotation axis of the tool rotation driving portion; and an axial direction driving portion that urges the tool rotation driving portion and the workpiece holding portion in a direction of a rotation axis of the both In the honing device that performs the final processing of the plane by pressing the workpiece on the tool, the rotation/rotation axis of the tool rotation driving unit or the workpiece holding unit is used to guide the “proximity/retraction” and the control unit. Such a honing device is known to the public because of the surface of the drive reference surface of the drive generated by the axial direction drive unit (refer to Patent Document 1). Further, with respect to such a device, in addition to the above-described honing device, some boring devices are provided with: the rotary table is set to be horizontally rotatable, and the cymbal is supported by the pillar-shaped column to be able to move up and down A freely moving rotating grindstone (refer to Patent Document 2), or some planar boring apparatus includes a cup-shaped grinding wheel type honing grindstone having a vacuum suction mechanism (refer to Patent Document 3), and such a device also- 6- 201008705 has been known to the public. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In the above-described honing device 101, the honing powder generated from the workpiece 200 will be fouled in the grindstone 108, so that the honing performance of the grindstone 108 is lowered, or damage to the workpiece 200 is caused. A problem like that. In particular, in the case where the workpiece is a sapphire substrate or a SiC substrate, since the honing powder has viscosity, it is liable to cause siltation of the rotating grindstone. Therefore, in order to suppress the siltation of the grindstone 108, the above-described honing apparatus 101 employs measures for reducing the number of revolutions of the rotating grindstone 103 or stopping the honing process in the middle to perform the removal of the adhered to the grindstone several times. Finishing steps of Yue mill. The trimming step described herein is performed by causing the correcting grindstone to move on the surface of the rotating grindstone. However, once the number of revolutions of the rotating grindstone 103 is lowered, the honing speed of the workpiece is lowered, and it takes a longer time to honing the workpiece to a specific thickness. Further, once the honing process is stopped in the middle to perform the dressing step, it takes time for the dressing step in addition to the time required for the honing of the workpiece itself. Because of the above-mentioned situation, the conventional honing apparatus 101 cannot obtain sufficient processing efficiency, and the productivity of the processed product is degraded. Further, the above-mentioned case is also similar to the honing device of 201008705 described in Patent Documents 1 to 3. Therefore, it is expected that a honing device capable of solving the problem of squeezing of the grindstone and improving the honing performance can be produced. The present invention has been made to solve the above problems, and an object of the present invention is to provide a method of suppressing fouling of a rotating grindstone and efficiently honing a workpiece, and suppressing damage thereof. Honing device, honing method and honing aid for honing the workpiece. [Means for Solving the Problem] @ The inventors of the present invention have found that the following problems can be easily solved by providing the following honing device, honing aid, and honing method in order to solve the above problems. In other words, the honing device of the present invention (1) is characterized by comprising: a rotating shaft portion; and a rotary table provided on the rotating shaft portion to hold the workpiece on the upper surface thereof; and a rotary grinding machine a rotating grindstone that is opposed to the upper surface of the rotating table and that is rotatably supported in a direction opposite to a rotation direction of the rotating table and that is lifted and lowered; and a G grindstone setting portion for trimming The stone installation portion is disposed around the rotation shaft portion; and the dressing grindstone is fixed to the dressing grindstone installation portion, and the honing surface is disposed to face the rotary mill The honing surface of the stone urges the honing surface of the rotating grindstone to contact the surface of the workpiece in a state in which the rotating table and the dressing grindstone and the rotating grindstone are mutually rotated in opposite directions. The honing of the workpiece and the honing of the workpiece, the honing surface of the rotating grindstone is brought into contact with the honing surface of the dressing grindstone, and the 硏-8 attached to the rotating grindstone is freely removed. - 201008705 grinding . (2) The dressing grindstone described in (i) of the honing device of the present invention is characterized in that it is a ring-shaped dressing grindstone disposed on the dressing grindstone installation portion. (3) The dressing grindstone described in (1) of the present invention may be a plurality of dressing mills which are arranged in a ring shape at a predetermined interval in the dressing grindstone installation portion. Stone tablets. (a grinding stone installation part according to any one of (1) to (3) of the honing apparatus of the present invention, characterized in that the dressing stone table is used for the dressing stone table And the dressing grindstone support portion, the dressing grindstone support portion supports the dressing grindstone table to be vertically rockable. (5) The honing device of the present invention (1) The dressing table support portion according to any one of the preceding claims, characterized in that: the spring is provided with a spring that elastically supports the dressing stone table. (6) The honing aid of the present invention is characterized The apparatus includes: a ring-shaped dressing grindstone installation portion, and a dressing grindstone fixed to the dressing grindstone installation portion, wherein the dressing grindstone installation portion is configured to be freely attachable to the honing device (7) The dressing grindstone according to (6) of the honing assisting device of the present invention is characterized in that it is used for annular dressing disposed on the dressing grindstone installation portion. Grinding stone formed. (8) (6) of the honing aid of the present invention The dressing grindstone is characterized in that it is formed of a plurality of dressing grindstones which are annularly arranged at intervals of a specific -9 - 201008705 in the dressing grindstone installation portion. (9) The present invention The dressing grindstone installation unit according to any one of (6) to (8), further comprising: a dressing grindstone table for holding the dressing grindstone; and (1) The dressing grindstone support portion according to (6) to (9) of the honing assisting device of the present invention, wherein the dressing grindstone table is supported by the dressing grindstone support portion that can be swung up and down. The invention is characterized in that: the spring is provided with a spring that elastically supports the dressing stone table. (11) The honing method of the present invention is characterized in that, in a state in which the rotating table and the rotating grindstone for holding the workpiece are rotated in opposite directions from each other, When the honing surface of the grindstone is brought into contact with the surface of the workpiece, when the workpiece is honed, the dressing grindstone is disposed around the rotating table, and the operation of honing the workpiece is simultaneously performed by The honing surface of the aforementioned rotating grindstone is in contact with the front The honing surface of the grindstone is trimmed, and the honing powder adhering to the rotating grindstone is removed and honed. [Effect of the Invention] According to the present invention, the rotating grindstone rotatable with respect to the workpiece is pressed against When the workpiece is honed to a specific thickness, the squeezing of the rotating grindstone is suppressed, and the damage can be suppressed and the workpiece can be honed efficiently. Further, the "repairing grindstone setting portion has: a dressing grindstone table for maintaining the dressing grindstone; and a dressing grindstone support for the dressing grindstone support portion, even for grindstones and/or dressings -10- 201008705 In the case where the heights of the stones are inconsistent, since the dressing stone table is shaken to offset the difference in height, and the grinding stone is contacted and the honing powder is removed, the grinding stone can be uniformly prevented from being fouled by the dressing stone. Further, by "the spring for the dressing table support portion", even if the dressing stone table is tilted toward one side, the state can be quickly restored to the initial state. Therefore, it is possible to cause the grindstone to be in contact with the dressing grindstone for a long time in a good contact state, and to efficiently perform the dressing treatment on the grindstone in the honing. [Embodiment] Hereinafter, embodiments of the honing device, the honing assisting device, and the honing method of the present invention will be described. (honing device and honing assisting device) First, the honing device and the honing assisting device of the present invention will be described.
第1 A及1B圖，是顯示具備本發明硏磨輔助裝置之硏磨 裝置（本發明的硏磨裝置）的實施形態的立體圖，第2圖 爲第1A圖所示之硏磨裝置的示意圖，第3圖，是具備第1A 圖所示之硏磨裝置的旋轉磨石，從第1A圖中的下方所見的 立體圖。 第1A圖及第2圖所示的硏磨裝置1具有：工件保持部2 :和硏磨工件30的旋轉磨石3;及修整處理旋轉磨石3的硏 磨輔助手段（硏磨輔助裝置）4。 工件保持部2具有：旋轉軸部5、和旋轉台6、及旋轉 -11 - 201008705 驅動旋轉台6的旋轉驅動機構。 旋轉台6呈圓盤狀’且被固定於旋轉軸部5的上部。該 旋轉台6的上表面，構成用來保持工件30的工件保持面7。 在該工件保持面7’藉由接著或吸附等固定方法而保持著1 個或複數個工件30。 就旋轉台6的材料而言，並無特殊的限制，舉例來說 譬如氧化鋁之類的陶瓷。 旋轉驅動旋轉台6的旋轉驅動機構是由以下所構成： ⑩ 圖示省略的馬達；和連接於旋轉台6之中央部的旋轉軸部5 ;及用來傳送前述馬達之軸的旋轉的旋轉傳送手段等。在 形成上述構造的旋轉驅動機構中，一旦馬達被驅動，其軸 的旋轉將透過旋轉傳送手段而傳送至旋轉軸部5，使被固 定於旋轉軸部5的旋轉台6，對應於馬達的旋轉數，朝圖中 箭號A方向旋轉操作。如此一來，可使被保持於工件保持 面7的工件30，以旋轉軸作爲中心而公轉。 本實施形態的旋轉磨石3具有：磨石保持具8;和被保 G 持於磨石保持具8的複數個磨石9;及旋轉驅動機構，該旋 轉驅動機構使磨石保持具8朝與旋轉台6之旋轉方向相反的 逆方向（圖中箭號B方向）旋轉驅動。 磨石保持具8呈圓盤狀，該其中一側的主面是採面向 旋轉台6之工件保持面7的方式被支承成可旋轉。該磨石保 持具8的旋轉軸28，是形成與旋轉台6的旋轉軸6 a略平行。 在本實施形態中，磨石保持具8的旋轉軸28是被設定在： 與後述之修整用磨石11的内周交叉的位置。如此一來，可 -12 - 201008705 藉由修整用磨石11而有效率地修整處理被保持於磨石保持 具8的磨石9，而去除硏磨粉。 本實施形態的構造如第3圖所示，在磨石保持具8之其 中一個主面的外周緣部，以相等的間隔固定著複數個（第 3圖所示的例子爲18個）磨石9。 各磨石9是呈4角柱狀，其長軸方向是被倂設成略平行 於圓盤狀之磨石保持具8外周的接線方向。 φ 旋轉驅動磨石保持具8的旋轉驅動機構具有：圖示省 略的馬達、和被固定於磨石保持具8的旋轉軸28、及將馬 達軸的旋轉傳送至前述旋轉軸28的旋轉傳送手段等，而構 成：使磨石保持具8朝與前述旋轉台6之旋轉方向相反的方 向（圖中箭號B方向）旋轉操作。在如上述所構成的旋轉 驅動機構中，一旦馬達被驅動，其軸的旋轉將透過旋轉傳 送手段而傳送至旋轉軸28，而促使被固定於旋轉軸28的磨 石保持具8對應於馬達旋轉數而朝圖中箭號B方向旋轉操作 # 。如此一來，被固定於磨石保持具8的複數個磨石9，是以 旋轉軸28作爲中心而公轉。 此外，該形態的硏磨裝置1，具有升降操作機構（圖 面中未顯示），該升降操作機構是用來使旋轉磨石3在旋 轉軸28的延伸方向上（在第1A圖所示之範例中的上下方向 )升降操作。如第2圖所示，旋轉磨石3是藉由該升降操作 機構，而形成在：從工件30的表面分離的位置（初期位置 )、和磨石9與工件30之表面接觸的位置（硏磨位置）之 間移動操作。 -13- 201008705 構成上述說明的旋轉磨石3’ 一旦在使磨石保持具8朝 與旋轉台之旋轉方向相反的方向旋轉驅動的狀態下’朝下 方移動操作，而使磨石9的表面按壓於工件30的表面時’ 磨石9將滑動於工件30的表面，而硏磨工件30的表面。如 此一來，工件30被加工成：其上表面成爲具有目的範圍之 表面粗度的平滑面。 此外，如第1A圖及第2圖所示，本發明的硏磨裝置1的 特徵在於：在旋轉台6的周圍配設有硏磨輔助手段（硏磨 輔助裝置）4。 硏磨輔助手段（硏磨輔助裝置）4，是由修整用磨石 設置部10、及被配設於該修整用磨石設置部10上的複數個 修整用磨石11所槪略構成。 修整用磨石設置部10具有：修整用磨石台12、及用來 支承修整用磨石台12的修整用磨石台支承部13。 修整用磨石台12是形成：其内周的尺寸略大於旋轉軸 部5外周的圓環狀，且被配設於旋轉軸部5之上部的周圍。 該修整用磨石台12，是藉由修整用磨石台支承部13，而在 特定的高度範圍被支承成可上下搖動。此外，在該修整用 磨石台12的外周緣部，沿著圓周而間歇地設有可供後述第 2螺栓25貫穿的複數個螺栓孔14。 此外，修整用磨石台12，對應於後述第1螺栓安裝板 20的部分被裁切。如此一來，可容易地使工具抵接於第1 螺栓21的頭部，而可執行鎖緊第1螺栓21的操作。 在該修整用磨石台12上固定有：由複數個（第1A圖中 201008705 爲16個）修整用磨石片HA配置成環狀的修整用磨石11。 各修整用磨石片11A形成磚狀，並在修整用磨石台12 的外周部上倂設成環狀，而使其長軸方向與修整用磨石台 12外周的接線方向略呈平行。此外’各修整用磨石Π是形 成：其表面與工件30的表面略呈同一個面的尺寸。 藉由上述的構造，一旦在修整用磨石與旋轉台一體旋 轉，而使磨石保持具8朝與旋轉台之旋轉方向相反的方向 φ 旋轉驅動的狀態下’朝下方移動操作’而使磨石9的表面 按壓於工件30的表面時，磨石的表面9也能按壓於修整用 磨石1 1的表面。 如此一來，形成：在磨石9滑動於工件30之表面的狀 態下，其表面藉由修整用磨石11而滑動進而對工件3 0研磨 加工的同時，也執行了修整用磨石11對磨石9的修整處理 ，而將硏磨粉予以去除。而本實施形態中所使用的磚狀修 整用磨石片ΠΑ爲其中一例，亦可如第1B圖所示，在修整 φ 用磨石台12的外周部上配置1個預先形成環狀的修整用磨 石 1 1B。 因此，在對工件30硏磨加工時，可抑制工件30的硏磨 粉淤塞於磨石9的狀況，磨石9可於整個硏磨加工的過程中 發揮良好的硏磨性能。此外，可抑制由硏磨粉導致工件30 產生損傷的疑慮。 此外，一旦與工件30的硏磨加工同時執行磨石9的修 整處理，相較於中斷硏磨加工後執行修整處理的場合，可 縮短完成硏磨加工（將工件硏磨至特定的厚度）所需的時 -15- 201008705 間。 根據以上的說明，該實施形態的硏磨裝置1，可於硏 磨加工中獲得極高的加工效率，並可飛躍地提升硏磨加工 品的生產性。 修整用磨石台支承部13是由以下所構成：用來支承修 整用磨石台12的圓環部15、及用來支承圓環部15的支承部 16與緩衝機構17。 圓環部15是形成其内周的尺寸略大於旋轉軸部之外周 的圓環狀，且被配設在旋轉軸部5的周圍，而與修整用磨 石台12的下面抵接。此外，在該圓環部15的外周緣部，沿 著圓周分別設有所需數量的：可供後述第1螺栓21貫穿的 第1螺栓孔19、及可供後述螺栓25與彈簧26貫穿的第2螺栓 孔18。 第1螺栓21是旋鎖於上述的第1螺栓孔19。此外螺栓25 與彈簧26則貫穿第2螺栓孔18。 支承部16是由第1螺栓安裝板20、和第1螺栓21、及輔 助螺栓23所構成。 在設置有前述螺栓25及彈簧26之部分的下方，設有安 裝板24，該安裝板24是分別沿著旋轉軸5的圓周，間歇地 在旋轉軸5的外周藉由輔助螺栓27從圓環部15朝下方懸吊 固定。 此外，在前述支承部16，於旋轉軸部5的外周部設有 螺栓安裝板20，經旋鎖於該部分之圓環部15的螺栓孔19的 第1螺栓21、輔助螺栓23，是旋鎖或者抵接於安裝板20。 201008705 複數個第2螺栓25，分別是將頭部朝上，而貫穿修整 用磨石台12的螺栓孔14、圓環部15的第2螺栓孔18及第2螺 栓安裝板24的螺栓孔。此外，在各第2螺栓25的下端部旋 鎖著螺帽，並使該螺帽與第2螺栓安裝板24的下面抵接。 如此一來，可防止各第2螺栓25分別從各螺栓孔拔出。 在各第2螺栓25套裝有彈簧26。各彈簧26是被配置在 第2螺栓安裝板24的上表面、與修整用磨石台12的下表面 參 之間。如此一來，彈簧26可發揮彈性支承修整用磨石台12 的作用。 構成上述說明的修整用磨石台支承部12，在初期狀態 下，圓環部I5是由彈簧26所彈性支承。該初期狀態下之修 整用磨t台12的高度位置被稱爲初期位置。 前述的初期位置，可根據工件的厚度、工件的硏磨量 、彈簧26的種類而任意設定，雖然並無特殊的限制，但在 如第1A圖所示的配置的場合中，最好是設定成：修整用磨 ® 石11的使用面，略高於被載置於旋轉台6之工件的硏磨面 。此外，雖然可在硏磨過程中，配合硏磨量而中途再度設 定該初期位置，但就生產性的觀點來看，最好是將初期位 置設成一定。 當從該狀態下對修整用磨石台12的局部施加外力時， 由於修整用磨石台12是由彈簧26所彈性支承，而形成可朝 必要的方向傾斜。 當修整用磨石台12因爲上述的動作，而在各磨石9公 轉的狀態下抵接於修整用磨石11時，即使各磨石9及/或 201008705 各修整用磨石11的高度不一致，由於在高度較高的部分， 修整用磨石台12將朝下方下沈，而此各磨石9與各修整用 磨石11平均地抵接。此外，即使修整用磨石台12朝其中一 側傾斜，也能快速地恢復成初期狀態，故能使磨石9與各 修整用磨石1 1以良好的接觸狀態形成長時間的接觸，而能 有效率地修整處理各磨石9。 再者，雖然在本實施形態的硏磨裝置1中，是針對預 先將硏磨輔助手段（硏磨輔助裝置）4安裝於旋轉軸部5的 @ 狀態進行說明，但由於該硏磨輔助手段4是由修整用磨石 設置部10、及配設於該修整用磨石設置部1〇上的複數個修 整用磨石11所槪略構成，所以該硏磨輔助手段4可安裝在 與「第1A圖、第2圖所示的旋轉軸部5」不同的圓盤狀旋轉 軸部。 由於修整用磨石設置部10具有修整用磨石台12、及用 來支承修整用磨石台12的修整用磨石台支承部13’故可藉 由將硏磨輔助手段4安裝固定在「未安裝有硏磨輔助手段4 Q 之一般的圓盤狀旋轉軸部」，而額外地將硏磨輔助手段4 安裝於習知硏磨裝置的圓盤狀旋轉軸部。 如此一來，藉由構成將硏磨輔助手段4安裝於其他旋 轉軸部，可將本發明構造的硏磨輔助手段4應用於具備現 今生產現場中所使用之圓盤狀旋轉軸部的習知硏磨裝置。 藉此，可將習知的硏磨裝置改造成可達到本發明之作 用效果的新型硏磨裝置’無須捨棄使用中的現成裝置’能 直接沿用並提高生產效率。 -18- 201008705 (硏磨方法） 接下來’採用第1A圖及第2圖所示的硏磨裝置作爲例 子，說明本發明的硏磨方法。 如第1A圖及第2圖所示，首先，硏磨裝置1在初期狀態 下’旋轉磨石3是被設定在已從工件30的表面分離的位置 (初期位置）。 φ 接著’將工件（被加工基板）30安裝於旋轉台6的工 件保持面7。 就工件30而言並無特殊的限制，舉例來說，可以是譬 如由鐵、鋼、銅等的金屬材料；藍寶石、矽、SiC等的半 導體材料；陶瓷等所形成的基板等。根據本發明，即使是 應用於如藍寶石或SiC般容易產生淤塞的工件，也能抑制 旋轉磨石的淤塞，並執行效率良好的硏磨加工。 安裝於工件保持面7之工件的數量，無論是1個或者複 ❿ 數個皆可，可對應於工件保持面7的直徑與工件30的直徑 作適當的設定。舉例來說，在工件保持面7的直徑約爲 300 mm，而工件30爲4吋基板的場合中，可將3個左右的基 板安裝於工件保持面7。 含有旋轉軸部5的旋轉驅動機構，是以特定的旋轉數 使旋轉台6朝圖中箭號A方向旋轉驅動。如此一來，被保持 於工件保持面7的工件30，是以旋轉軸作爲中心而水平地 公轉。 此外，具有旋轉磨石3的旋轉驅動機構，是以特定的 -19- 201008705 旋轉數使磨石保持具8朝圖中箭號B方向旋轉驅動。如此一 來，被固定於磨石保持具8的複數個磨石9’是以旋轉軸作 爲中心而水平地公轉。 接著，藉由升降操作機構，使旋轉磨石3從初期位置 ，下降至「磨石9的表面與工件30的表面接觸」的位置（ 硏磨位置）。藉此，使磨石9的表面抵接於工件30的表面 〇 一旦與工件逆向公轉之磨石9的表面接觸於公轉中的 工件表面，將使磨石9滑動於工件30的表面，並硏磨工件 3 0的表面。 如此一來，可加工工件而使其厚度變薄，而將其表面 硏磨加工成所期待之粗度的平坦面。 此外，此時磨石9的表面，也按壓於修整用磨石11的 表面。藉此，在磨石9對工件30的表面硏磨加工的狀態下 ，其表面則被修整用磨石11所硏削，而在硏磨加工工件30 的同時，執行修整用磨石Π對磨石9的修整處理。因此， 可抑制因工件的硏磨粉等於磨石9的表面產生淤塞的現象 ，結果形成：可對應於較習知裝置更高速的硏磨加工。 接著，一旦各工件30被硏磨至特定的厚度，升降操作 機構將促使旋轉磨石3上升至從工件30表面分離的位置（ 初期位置），故形成可將工件30取出。 如以上所述’在上述方法的硏磨方法中，是在硏磨加 工工件3 0的同時’執行磨石9的修整處理。 因此，在硏磨加工工件30時，可抑制工件30的硏磨粉 201008705 淤塞於磨石9的情形，磨石9可在硏磨加工的整個過程中， 發揮良好的硏磨性能。 此外，一旦同時執行工件30的硏磨加工與磨石9的修 整處理，相較於中斷硏磨加工後執行修整處理的場合，可 縮短完成硏磨加工（使工件形成特定厚度）所需的時間。 根據上述各項說明，該硏磨方法可獲得極高的加工效 率，並可飛躍地提高加工品的生產性。 φ 舉例來說，當採用第1A圖及第2圖所示的硏磨裝置， 執行將藍寶石基板（厚度·· 700 // m，直徑：4吋）硏磨至 80#m厚的加工時，能以50〜100/z m/分的硏磨速度執行硏 磨，相對於此，當採用習知的硏磨裝置（第4圖所示的硏 磨裝置）執行相同的硏磨加工時，則僅能以1 0 /z m/分的硏 磨速度執行硏磨。換言之，藉由採用本發明的硏磨裝置（ 硏磨方法），可獲得習知的5〜10倍的硏磨速度。 然而，在前述的實施形態中，構成硏磨裝置與硏磨輔 ❿ 助裝置的各部；及硏磨方法的各步驟僅是其中一種範例， 在不脫離本發明範圍的範圍內，能有適當地變更。 [產業上的可利用性] 由於根據本發明的硏磨裝置、硏磨輔助裝置及硏磨方 法，可抑制旋轉磨石的淤塞，且能在不造成工件損傷的狀 態下有效率地硏磨加工，因此具有：適用於將容易產生旋 轉磨石之淤塞的藍寶石基板或Sic基板作爲研磨加工對象 的特徴。 -21 - 201008705 【圖式簡單說明】 第1A圖：是具備本發明硏磨輔助裝置之硏磨裝置的裝 置全體的槪略立體圖。 第1B圖：是顯示在具備本發明硏磨輔助裝置的硏磨裝 置中，所具備之修整用磨石的其他範例的立體圖。 第2圖：是第1A圖所示之硏磨裝置的示意圖。 第3圖：是從第1A圖中的下方，觀視第1A圖所示之硏 · 磨裝置所具備的旋轉磨石的立體圖。 第4圖：是顯示習知硏磨裝置的示意圖。 【主要元件符號說明】 1 :硏磨裝置 2 :工件保持部 3 :旋轉磨石 4:硏磨輔助手段（硏磨輔助裝置） β 5 :旋轉軸部 6 :旋轉台 8 :磨石保持具 9 :磨石 1〇:修整用磨石設置部 11 :修整用磨石 1 1 A :修整用磨石片 1 1 B :修整用磨石 -22- 201008705 1 2 :修整用磨石台 13 :修整用磨石台支承部 1 5 ·圓環部 1 6 :支承部 17 :緩衝機構 18 :第2螺栓孔 1 9 :第1螺栓孔 ❹ 20 :螺栓安裝板 21 :第1螺栓 24 :安裝板 25 :第2螺栓 2 6 :彈簧 3 0 :工件 鲁 -231A and 1B are perspective views showing an embodiment of a honing device (the honing device of the present invention) including the honing aid of the present invention, and Fig. 2 is a schematic view of the honing device shown in Fig. 1A. Fig. 3 is a perspective view of the rotating grindstone having the honing device shown in Fig. 1A as seen from the lower side in Fig. 1A. The honing device 1 shown in FIGS. 1A and 2 has a workpiece holding portion 2: a rotating grindstone 3 for honing the workpiece 30, and a honing assisting device (honing assisting device) for trimming the rotating grindstone 3 4. The workpiece holding portion 2 includes a rotating shaft portion 5, a rotating table 6, and a rotation driving mechanism that drives the rotating table 6 by the rotation -11 - 201008705. The turntable 6 has a disk shape and is fixed to the upper portion of the rotary shaft portion 5. The upper surface of the rotary table 6 constitutes a workpiece holding surface 7 for holding the workpiece 30. One or a plurality of workpieces 30 are held on the workpiece holding surface 7' by a fixing method such as adhesion or adsorption. The material of the rotary table 6 is not particularly limited, and is, for example, a ceramic such as alumina. The rotation drive mechanism for the rotary drive rotary table 6 is constituted by: 10 a motor omitted from the drawing; and a rotary shaft portion 5 connected to a central portion of the rotary table 6; and a rotary transmission for transmitting the rotation of the shaft of the motor Means, etc. In the rotation drive mechanism that forms the above configuration, once the motor is driven, the rotation of the shaft is transmitted to the rotary shaft portion 5 through the rotary transmission means, so that the rotary table 6 fixed to the rotary shaft portion 5 corresponds to the rotation of the motor. Number, rotate in the direction of arrow A in the figure. As a result, the workpiece 30 held by the workpiece holding surface 7 can be revolved around the rotation axis. The rotary grindstone 3 of the present embodiment includes: a grindstone holder 8; and a plurality of grindstones 9 held by the grindstone holder 8; and a rotary drive mechanism that causes the grindstone holder 8 toward The reverse direction (the direction of the arrow B in the figure) is rotationally driven in the opposite direction to the rotation direction of the turntable 6. The grindstone holder 8 has a disk shape, and the main surface on one side thereof is supported to be rotatable in such a manner as to face the workpiece holding surface 7 facing the rotary table 6. The rotating shaft 28 of the grindstone holder 8 is formed to be slightly parallel to the rotating shaft 6a of the rotary table 6. In the present embodiment, the rotating shaft 28 of the grindstone holder 8 is set to a position that intersects with the inner circumference of the dressing grindstone 11 to be described later. In this way, the honing stone 9 can be efficiently trimmed by the dressing stone 11 by trimming the grindstone 9 held by the grindstone holder 8 to remove the honing powder. As shown in Fig. 3, in the structure of the present embodiment, a plurality of grindstones (18 in the example shown in Fig. 3) are fixed to the outer peripheral edge portion of one of the main faces of the grindstone holder 8 at equal intervals. 9. Each of the grindstones 9 has a columnar shape of a four-corner shape, and its longitudinal direction is a wiring direction which is set to be slightly parallel to the outer circumference of the disk-shaped grindstone holder 8. The rotational drive mechanism for rotationally driving the grindstone holder 8 includes a motor (not shown), a rotary shaft 28 fixed to the grindstone holder 8, and a rotary transmission means for transmitting the rotation of the motor shaft to the rotary shaft 28. In other words, the grindstone holder 8 is rotated in a direction opposite to the rotation direction of the rotary table 6 (arrow B direction in the drawing). In the rotary drive mechanism constructed as described above, once the motor is driven, the rotation of its shaft is transmitted to the rotary shaft 28 through the rotary transmission means, and the grindstone holder 8 fixed to the rotary shaft 28 is caused to correspond to the motor rotation. Rotate the operation # in the direction of the arrow B in the figure. In this way, the plurality of grindstones 9 fixed to the grindstone holder 8 revolve around the rotating shaft 28 as a center. Further, the honing device 1 of this aspect has a lifting operation mechanism (not shown in the drawing) for moving the rotating grindstone 3 in the extending direction of the rotating shaft 28 (shown in FIG. 1A). The up and down direction in the example) is the lifting operation. As shown in Fig. 2, the rotary grindstone 3 is formed at a position (initial position) separated from the surface of the workpiece 30 by the elevating operation mechanism, and a position where the grindstone 9 is in contact with the surface of the workpiece 30 (硏Grinding position) moves between operations. -13- 201008705 The rotary grindstone 3' constituting the above-described description is moved downward by the state in which the grindstone holder 8 is rotationally driven in a direction opposite to the rotational direction of the rotary table, and the surface of the grindstone 9 is pressed. At the surface of the workpiece 30, the grindstone 9 will slide against the surface of the workpiece 30 while honing the surface of the workpiece 30. As a result, the workpiece 30 is processed such that its upper surface becomes a smooth surface having a surface roughness of a target range. Further, as shown in Figs. 1A and 2, the honing apparatus 1 of the present invention is characterized in that a honing aid (honing aid) 4 is disposed around the turntable 6. The honing aid (honing aid) 4 is roughly constituted by a dressing grindstone installation unit 10 and a plurality of dressing grindstones 11 disposed on the dressing grindstone installation unit 10. The dressing grindstone installation portion 10 includes a dressing grindstone table 12 and a dressing grindstone support portion 13 for supporting the dressing grindstone table 12. The dressing table 12 is formed such that its inner circumference has an annular shape slightly larger than the outer circumference of the rotating shaft portion 5, and is disposed around the upper portion of the rotating shaft portion 5. The dressing stone table 12 is supported by the dressing stone table support portion 13 so as to be vertically swayable in a specific height range. Further, in the outer peripheral edge portion of the dressing table 12, a plurality of bolt holes 14 through which the second bolts 25 to be described later are inserted are intermittently provided along the circumference. Further, the dressing stone table 12 is cut in accordance with a portion of the first bolt mounting plate 20 which will be described later. In this way, the tool can be easily abutted against the head of the first bolt 21, and the operation of locking the first bolt 21 can be performed. The dressing stone table 12 is fixed with a plurality of dressing grindstones 11 which are arranged in a ring shape by a plurality of (the 201008705 in FIG. 1A). Each of the dressing stone pieces 11A is formed into a brick shape, and is formed in a ring shape on the outer peripheral portion of the dressing stone table 12, and the longitudinal direction thereof is slightly parallel to the wire connecting direction of the outer periphery of the dressing stone table 12. Further, each of the dressing stones is formed such that its surface is slightly the same as the surface of the workpiece 30. According to the above configuration, once the dressing grindstone is rotated integrally with the rotary table, the grindstone holder 8 is rotationally driven in a direction φ opposite to the rotational direction of the rotary table, and the operation is performed by moving downward. When the surface of the stone 9 is pressed against the surface of the workpiece 30, the surface 9 of the grindstone can also be pressed against the surface of the dressing stone 11. In this way, in the state where the grindstone 9 slides on the surface of the workpiece 30, the surface thereof is slid by the dressing grindstone 11 to grind the workpiece 30, and the dressing grindstone 11 is also executed. The finishing treatment of the grindstone 9 removes the honing powder. In addition, as shown in FIG. 1B, one of the pre-formed ring-shaped dressings is disposed on the outer peripheral portion of the dressing stone table 12 as shown in FIG. 1B. Use Millstone 1 1B. Therefore, in the honing process of the workpiece 30, the state in which the honing powder of the workpiece 30 is stuck to the grindstone 9 can be suppressed, and the grindstone 9 can exhibit good honing performance throughout the honing process. Further, it is possible to suppress the fear that the workpiece 30 is damaged by the honing powder. Further, once the dressing process of the grindstone 9 is performed simultaneously with the honing process of the workpiece 30, the honing process (the honing of the workpiece to a specific thickness) can be shortened compared to the case where the dressing process is performed after the honing process is interrupted. When needed -15- 201008705. According to the above description, the honing apparatus 1 of the embodiment can obtain extremely high processing efficiency in the honing process, and can drastically improve the productivity of the honing processed product. The dressing table support portion 13 is composed of an annular portion 15 for supporting the dressing stone table 12, a support portion 16 for supporting the annular portion 15, and a buffer mechanism 17. The annular portion 15 has an annular shape in which the inner circumference thereof is slightly larger than the outer circumference of the rotating shaft portion, and is disposed around the rotating shaft portion 5 to abut against the lower surface of the dressing stone table 12. Further, in the outer peripheral edge portion of the annular portion 15, a required number of first bolt holes 19 through which the first bolts 21 to be described later are inserted and through which the bolts 25 and the springs 26 which will be described later are inserted are provided along the circumference. Second bolt hole 18. The first bolt 21 is screwed to the first bolt hole 19 described above. Further, the bolt 25 and the spring 26 penetrate the second bolt hole 18. The support portion 16 is composed of a first bolt mounting plate 20, a first bolt 21, and an auxiliary bolt 23. Below the portion where the bolt 25 and the spring 26 are provided, a mounting plate 24 is provided which is spaced apart from the circumference of the rotating shaft 5, intermittently on the outer circumference of the rotating shaft 5 by the auxiliary bolt 27 from the ring. The portion 15 is suspended and fixed downward. Further, in the support portion 16, a bolt attachment plate 20 is provided on the outer peripheral portion of the rotary shaft portion 5, and the first bolt 21 and the auxiliary bolt 23 that are screwed to the bolt hole 19 of the annular portion 15 of the portion are rotated. Lock or abut against the mounting plate 20. 201008705 A plurality of second bolts 25, which are bolt holes 14 for the dressing millstone 12, the second bolt holes 18 of the annular portion 15, and the bolt holes of the second bolt mounting plate 24, respectively. Further, a nut is screwed to the lower end portion of each of the second bolts 25, and the nut is brought into contact with the lower surface of the second bolt attachment plate 24. In this way, each of the second bolts 25 can be prevented from being pulled out from each of the bolt holes. A spring 26 is fitted to each of the second bolts 25. Each of the springs 26 is disposed between the upper surface of the second bolt mounting plate 24 and the lower surface of the dressing table 12. In this way, the spring 26 can function to elastically support the dressing table 12 for dressing. In the initial stage, the ring portion I5 is elastically supported by the spring 26 in the initial stage. The height position of the dressing table 12 in the initial state is referred to as an initial position. The initial position described above can be arbitrarily set depending on the thickness of the workpiece, the amount of honing of the workpiece, and the type of the spring 26. Although it is not particularly limited, in the case of the arrangement shown in Fig. 1A, it is preferable to set The surface of the dressing stone® 11 is slightly higher than the honing surface of the workpiece placed on the rotary table 6. Further, although the initial position can be set again in the middle of the honing process in accordance with the amount of honing, it is preferable to set the initial position to be constant from the viewpoint of productivity. When an external force is applied to a part of the dressing table 12 from this state, since the dressing table 12 is elastically supported by the spring 26, it can be formed to be inclined in a necessary direction. When the dressing stone table 12 abuts against the dressing grindstone 11 in a state in which each of the grindstones 9 is rotated by the above-described operation, the heights of the grindstones 11 for each of the grindstones 9 and/or 201008705 are inconsistent. Since the dressing table 12 is lowered downward in the portion where the height is high, the plurality of grindstones 9 abut on the dressing stones 11 on average. Further, even if the dressing stone table 12 is inclined toward one side thereof, the initial state can be quickly restored, so that the grindstone 9 and the dressing grindstones 1 can be brought into contact with each other in a good contact state for a long time. The individual grindstones 9 can be trimmed efficiently. In the honing apparatus 1 of the present embodiment, the state in which the honing assisting means (honing assisting device) 4 is attached to the rotating shaft portion 5 in advance is described. However, the honing assisting means 4 is used. The grinding stone setting unit 10 and the plurality of dressing stones 11 disposed on the dressing stone setting unit 1 are slightly configured. Therefore, the grinding assisting device 4 can be attached to the The disc-shaped rotating shaft portion different from the rotating shaft portion 5" shown in Fig. 1A and Fig. 2 is different. Since the dressing grindstone installation portion 10 has the dressing grindstone table 12 and the dressing grindstone support portion 13' for supporting the dressing grindstone table 12, the honing assisting means 4 can be attached and fixed to The general disk-shaped rotating shaft portion ′ of the honing aid 4 Q is not attached, and the honing assisting device 4 is additionally attached to the disk-shaped rotating shaft portion of the conventional honing device. In this way, by arranging the honing aid 4 to be attached to the other rotating shaft portion, the honing assisting means 4 of the present invention can be applied to the conventional disc-shaped rotating shaft portion used in the production site. Honing device. Thereby, the conventional honing device can be modified into a new honing device which can achieve the effect of the present invention. It is possible to directly use and improve the production efficiency without having to discard the ready-made device in use. -18- 201008705 (honing method) Next, the honing method of the present invention will be described using the honing device shown in Figs. 1A and 2 as an example. As shown in Figs. 1A and 2, first, in the initial state, the honing device 1 is set to a position (initial position) at which the rotating grindstone 3 is separated from the surface of the workpiece 30. φ Next, the workpiece (substrate to be processed) 30 is attached to the workpiece holding surface 7 of the turntable 6. The workpiece 30 is not particularly limited. For example, it may be a metal material such as iron, steel or copper; a semiconductor material such as sapphire, bismuth or SiC; a substrate formed of ceramics or the like. According to the present invention, even if it is applied to a workpiece which is liable to cause fouling such as sapphire or SiC, the fouling of the rotating grindstone can be suppressed, and efficient honing processing can be performed. The number of workpieces attached to the workpiece holding surface 7 may be set to be one or more, and may be appropriately set in accordance with the diameter of the workpiece holding surface 7 and the diameter of the workpiece 30. For example, in the case where the diameter of the workpiece holding surface 7 is about 300 mm and the workpiece 30 is a 4-inch substrate, three or so substrates can be attached to the workpiece holding surface 7. The rotation drive mechanism including the rotary shaft portion 5 rotationally drives the rotary table 6 in the direction of the arrow A in the figure with a specific number of rotations. As a result, the workpiece 30 held on the workpiece holding surface 7 is horizontally revolved around the rotation axis. Further, the rotary drive mechanism having the rotary grindstone 3 rotates the grindstone holder 8 in the direction of the arrow B in the figure with a specific number of revolutions of -19 - 201008705. In this manner, the plurality of grindstones 9' fixed to the grindstone holder 8 are horizontally revolved around the rotation axis. Then, the rotary grindstone 3 is lowered from the initial position to the position (the honing position) where the surface of the grindstone 9 is in contact with the surface of the workpiece 30 by the elevating operation mechanism. Thereby, the surface of the grindstone 9 abuts against the surface of the workpiece 30. Once the surface of the grindstone 9 that revolves counter-rotating with the workpiece contacts the surface of the workpiece in the revolution, the grindstone 9 is slid on the surface of the workpiece 30, and Honing the surface of the workpiece 30. In this way, the workpiece can be machined to a reduced thickness, and the surface can be honed to a flat surface of the desired thickness. Further, at this time, the surface of the grindstone 9 is also pressed against the surface of the dressing grindstone 11. Thereby, in the state in which the surface of the workpiece 30 is honed by the grindstone 9, the surface is honed by the dressing grindstone 11, and the honing of the workpiece 30 is performed while the dressing grindstone grind is performed. Finishing treatment of stone 9. Therefore, it is possible to suppress the occurrence of fouling due to the honing powder of the workpiece being equal to the surface of the grindstone 9, and as a result, it is possible to correspond to a higher speed honing process than the conventional device. Next, once each workpiece 30 is honed to a specific thickness, the lifting and lowering mechanism causes the rotating grindstone 3 to rise to a position (initial position) separated from the surface of the workpiece 30, so that the workpiece 30 can be taken out. As described above, in the honing method of the above method, the dressing process of the grindstone 9 is performed while honing the workpiece 30. Therefore, when the workpiece 30 is honed, the honing powder of the workpiece 30 can be suppressed. 201008705 The sludge 9 is fouled in the grinding stone 9, and the grinding stone 9 can exert good honing performance throughout the honing process. Further, once the honing process of the workpiece 30 and the dressing process of the grindstone 9 are simultaneously performed, the time required to complete the honing process (forming the workpiece to a specific thickness) can be shortened compared to the case where the trimming process is performed after interrupting the honing process. . According to the above description, the honing method can attain extremely high processing efficiency and can drastically improve the productivity of the processed product. φ For example, when the sapphire substrate (thickness··700 // m, diameter: 4吋) is honed to 80#m thick by the honing device shown in Figs. 1A and 2, The honing can be performed at a honing speed of 50 to 100/zm/min. On the other hand, when the same honing process is performed using a conventional honing device (the honing device shown in Fig. 4), only Honing can be performed at a honing speed of 10 / zm / min. In other words, by using the honing device (honing method) of the present invention, a conventional honing speed of 5 to 10 times can be obtained. However, in the foregoing embodiments, the respective steps constituting the honing device and the honing auxiliary device; and the steps of the honing method are only one of the examples, and can be appropriately performed without departing from the scope of the invention. change. [Industrial Applicability] According to the honing device, the honing assisting device, and the honing method according to the present invention, it is possible to suppress the silt of the rotating grindstone and efficiently honing the workpiece without causing damage to the workpiece. Therefore, it has a feature that is suitable for a sapphire substrate or a Sic substrate which is likely to cause siltation of a rotating grindstone as a target for polishing. -21 - 201008705 [Brief Description of the Drawings] Fig. 1A is a schematic perspective view of the entire apparatus including the honing device of the honing assisting device of the present invention. Fig. 1B is a perspective view showing another example of the dressing grindstone provided in the honing device provided with the honing assisting device of the present invention. Fig. 2 is a schematic view of the honing device shown in Fig. 1A. Fig. 3 is a perspective view of the rotary grindstone provided in the honing device shown in Fig. 1A from the lower side in Fig. 1A. Fig. 4 is a schematic view showing a conventional honing device. [Description of main component symbols] 1 : Honing device 2 : Workpiece holding portion 3 : Rotary grindstone 4 : Honing aid (honing aid) β 5 : Rotary shaft portion 6 : Rotary table 8 : Grinding holder 9 : Millstone 1〇: Trimming mill setting section 11: Trimming grindstone 1 1 A : Trimming grindstone 1 1 B : Trimming grindstone-22- 201008705 1 2 : Trimming grindstone 13 : Trimming Grinding table support portion 1 5 · Annular portion 16 : Support portion 17 : Buffer mechanism 18 : Second bolt hole 1 9 : First bolt hole ❹ 20 : Bolt mounting plate 21 : First bolt 24 : Mounting plate 25 : 2nd bolt 2 6 : Spring 3 0 : Workpiece Lu-23