200952029 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種進行紫外線之照射而實施高分子材料 之聚合或硬化’例如液晶面板製造步驟所使用之紫外線放 電燈，更詳細而言，係關於一種藉由選定所塗佈之螢光體 或膜厚而使發光效率提高之紫外線放電燈。 【先前技術】 曰本特開2002-358926(先前技術1)之紫外線放電燈，形 成使波長253.7 nm之紫外線透射之鈉鈣玻璃製發光管之氣 禮容器’於發光管内部封入包含水銀及稀有氣體之放電介 質’於發光管内部配置引發低壓水銀蒸氣放電之一對電 極。因發光管内面’置有使藉由放電介質之低壓水銀蒸氣 放電所放射之波長253.7 nm之水銀輝線激發而發出波長 320〜400 nm之近紫外線光之BaSi2〇5 : 、200952029 VI. Description of the Invention: [Technical Field] The present invention relates to an ultraviolet discharge lamp for performing polymerization or hardening of a polymer material by ultraviolet irradiation, for example, a liquid crystal panel manufacturing step, and more specifically, An ultraviolet discharge lamp having improved luminous efficiency by selecting a coated phosphor or film thickness. [Prior Art] The ultraviolet discharge lamp of JP-A-2002-358926 (Prior Art 1) forms a gas-filled container of a soda-lime glass light-emitting tube that transmits ultraviolet light having a wavelength of 253.7 nm. The inside of the light-emitting tube is sealed with mercury and rare. The discharge medium of the gas is disposed inside the arc tube to cause one of the counter electrode of the low-pressure mercury vapor discharge. The BaX2〇5 of the near-ultraviolet light having a wavelength of 320 to 400 nm is emitted because the inner surface of the arc tube is excited by a mercury ray having a wavelength of 253.7 nm radiated by the low-pressure mercury vapor discharge of the discharge medium.
Ce(MeBa)A1ii〇i9、YP〇4 : Ce、LaP〇4 : Ce 等螢光體之至 少種或其組合，故對紫外線硬化型樹脂之内部浸透性高 之UV-A區域之光與使紫外線硬化型樹脂之表面硬化力強 之UV-C之光，可由1根燈管同時獲得。 【發明内容】 前述先前技術1之技術，雖UV-A區域舆UV-C區域之光可 由1根燈管同時獲得，但無法提高波長320〜340 nm下之照 度。為提高該波長域之照度，有必要相應增加燈管之根 數，而有增加多少成本就上昇多少之問題。 本發明之第1目的在於，提供一種於以鈉鈣玻璃之發光 138609.doc 200952029 ’塗佈可發出短波長域光 而謀求照度上昇之紫外線 管所形成之熱陰極低壓水銀燈上 之紫外線發光用之特定螢光體， 放電燈。 本發明之第2目的在於’提供一種藉由組合作為紫外線 照射用螢光體使用之LaP〇4: Ce的膜厚之適#化及使特定 波長透射之發光管’而使紫外線照射之高效率化成為可能 之紫外線放電燈。Ce(MeBa)A1ii〇i9, YP〇4 : at least one kind of phosphor such as Ce or LaP〇4 : Ce or a combination thereof, so that the UV-A region of the ultraviolet curable resin has high internal permeability and light The UV-C light having a strong surface hardening property of the ultraviolet curable resin can be simultaneously obtained by one lamp. SUMMARY OF THE INVENTION According to the technique of the prior art 1, although the light in the UV-A region 舆UV-C region can be simultaneously obtained by one lamp, the illuminance at a wavelength of 320 to 340 nm cannot be improved. In order to increase the illuminance of the wavelength domain, it is necessary to increase the number of the lamps accordingly, and there is a problem of how much the cost increases. A first object of the present invention is to provide an ultraviolet cathode for use in a hot cathode low-pressure mercury lamp formed by applying an ultraviolet tube which emits short-wavelength light and emits light in a short wavelength region by light emission of soda lime glass 138609.doc 200952029 Specific phosphor, discharge lamp. A second object of the present invention is to provide a high efficiency of ultraviolet irradiation by combining the film thickness of LaP〇4: Ce used as a phosphor for ultraviolet irradiation and the light-emitting tube for transmitting a specific wavelength. It becomes a possible ultraviolet discharge lamp.
【實施方式】 以下，兹對實施本發明之最佳方式，參照圖式進行詳細 說明。 圖1、圖2係對關於本發明之紫外線放電燈之一實施例進 行說明之圖’圖1係構成圊’圖2係圖1之〗_Γ線剖面圖。 另，圖1係作為紫外線放電燈之一例之熱陰極低壓水銀燈 之構成，局部以破斷狀態顯示之圖。 圖1、圖2中’ 11係包含於320〜3 40 nm之波長下可獲得 80¾以上透射率之Na2〇達10%以上之廉價鈉鈣玻璃製之透 明玻璃發光管。使用鈉弼玻璃之發光管之透射率，如圖3 所示’於340 nm附近以上之波長下可獲得80%以上之透射 率〇 發光管11之管徑D為38 mm、管長L為2367 mm，兩端具 有電極121、122，該等電極121、122係以導電性導線 131、132支持線圈狀之鎢絲14而成。導線131、132係貫穿 玻璃壓合密封部15。導線131、132係與位於固著於燈之對 向兩端部之各插接頭161、162之銷狀接點171、172連接。 138609.doc 200952029 此外，於發光管11以1〜1〇 T〇rr左右之低壓力封入有氬氣 (Ar)等稀有氣體與一定量之水銀。又，發光管丨丨之内側表 面，塗佈有可於300〜340 nm間出現峰值，具有如圖4所示 之變換效率之峰值之紫外線發光型螢光體18。 作為如此之螢光體18，可考慮例如日亞化學工業（株）製 之NP-806。該發光體係組成LaP〇4(磷酸鑭）：Ce(鈽）而成 者。 向前述構成之熱陰極低壓水銀燈從電極121、122供給電 力，可確保具有如圖5所示之分光分布之特性。該分光分 布中，基於紫外線發光型螢光體18之發光特性，可發現於 320~340 nm下之照度之進一步提高。 圖6係對於本發明之紫外線放電燈之中央部（a)、密封侧 (c)、及（a)與（c)之中間部（b)，使用本發明之螢光體之情形 與使用先前之不同螢光體A、B之在測定波長32〇〜34〇 nm 下之照度的情形之比較結果進行說明之說明圖。 另，圖7係對使用本發明之螢光體之情形與使用先前之 不同螢光體A、B之照度之比較結果進行說明之說明圖。 本發明之螢光體，如前所述組成為LaP〇4 : Ce，而先前 之螢光體A組成為YPO4 : Ce，先前之螢光體b組成為Ce (BaMgSr)Aln〇19 ° 組成LaPCU : Ce之情形之於燈位置（a)〜（c)之平均照度為 〇.457(mW/cm2)，其為100%之情形之螢光體八為72 7〇%、 螢光體B為44.67%。 因此，於含NaaO達10%以上之廉價之鈉鈣玻璃製之透明 138609.doc -6 - 200952029 玻璃發光管所構成之熱陰極低壓水銀燈上，塗佈組成為 LaP04 : Ce之螢光體之情形，與塗佈螢光體b之情形相比 可實現55%以上之照度提高，與塗佈螢光體a之情形相比 可實現30%左右之照度提高。 ' 該實施例中，藉由於含Na20達1 〇%以上之廉價之鈉鈣玻 - 璃製之發光管内壁塗佈紫外發光用之螢光體，可使 320〜340 nm之照度與先前相比至少增加3〇%左右。 耱 320~340 nm之照度提高，例如在對混合、封入有液晶材料 與對紫外線會反應而引起聚合之紫外線反應材料之狀態下 之液晶面板照射紫外線時，可使紫外錄;反應材料高效聚 合0 另，照度之提尚’於以同等照度即可完成時，因減少燈 管之根數，故可有助於省電力化。 該實施例中，使用一般之紫外發光型之熱陰極燈，可實 現320〜340 nm之波長下高效率發光之紫外線燈。另，也無 φ 需極短波長照射，混合或封入有液晶材料與紫外線反應材 料之狀態之液晶面板，可藉由來自本發明之紫外線放電燈 • 所照射之紫外光，以不會破壞液晶材料下，使紫外線反應 材料高效聚合。 " 圖8係對關於本發明之紫外線放電燈之其他實施例進行 . 說明之說明圖。該實施例係使螢光體之膜厚變化者，圖8 係對使螢光體18之膜厚變化時之相對照度之關係進行說明 之說明圖。 此處，使用發光長為2382.8±2.4 mm、發光管11之内和 138609.doc 200952029 為38±1·5 mm之熱陰極低壓水銀燈，對螢光體18之膜厚於 1〜49 μηι左右變化時之相對照度（％)(320 nm帶）進行測定。 如圖8所示，若螢光體18之膜厚為5〜40 μιη之範圍，則可 獲得大致90%左右以上之相對照度。因此，若所使用之榮 光體18之組成係LaP〇4: Ce，且膜厚為5〜40 μιη之螢光體 1 8，則可實現獲得高效照度之熱陰極低壓水銀燈。 本貫施例中’使用組成為LaP〇4 : Ce之營光體18，藉由 使该螢光體18之膜厚在5〜40 μηι之範圍，可謀求波長 320〜340 nm下之照度提高。 因此，可使波長320〜340 nm下之照度上昇。可在不增加 因照度上昇部分所需使用之燈管根數下，獲得波長 320〜340 nm之燈管，有助於減少成本，是為其效果。 又，螢光體18之粒徑宜為卜5 μιη左右。此係主要因為： 比1 μηι小之情形，光之透射性下降；比5 μηι大之情形，水 銀易於在發光管内部於粒徑間附著並黑化，造成燈管壽命 之降低。 ° 另，本發明並非局限於前述實施例者。因可使用—般紫 外發光型熱陰極燈製作，故同燈管之發光長亦可適用於次 世代液晶基板等大型尺寸之面板照射所要求之爪出。 【圖式簡單說明】 mm 圖1係針對與本發明之紫外線放電燈有關之—實施例進 行說明之局部破斷顯示之構成圖。 圖2係圖1之ι_Γ線刮面圖。 明之說明 圖3係針對一般鈉玻璃之紫外線透射率進行說 138609.doc 200952029 圖。 圖4係針對本發明所使用之螢光體之發光分布進行說明 之說明圖。 ° 圖5係針對本發明之效果進行說明之說明圖。 • 圖6係針對本發明與先前之燈之不同位置下之照度之比 * 較進行說明之說明圖。 負 圖7係針對本發明與先前之照度之比較進行說明之說明 圖0 ❹ 圖8係針對與本發明之紫外線放電燈有關之其他實施例 進行說明之說明圖。 【主要元件符號說明】 11 發光管 14 鎢絲 15 密封部 18 螢光體 121 、 122 電極 131 、 132 導線 161 、 162 插接頭 171 、 172 接點 138609.doc -9·[Embodiment] Hereinafter, the best mode for carrying out the invention will be described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 and Fig. 2 are views showing an embodiment of an ultraviolet discharge lamp of the present invention. Fig. 1 is a view showing a structure of Fig. 1 and Fig. 2 is a sectional view of Fig. 1. Further, Fig. 1 is a view showing a configuration of a hot cathode low-pressure mercury lamp as an example of an ultraviolet discharge lamp, partially shown in a broken state. In Fig. 1 and Fig. 2, the '11 series includes a transparent glass-emitting tube made of inexpensive soda lime glass having a transmittance of 803⁄4 or more and a Na2 of 10% or more at a wavelength of 320 to 3 40 nm. The transmittance of the illuminating tube using sodium bismuth glass, as shown in Fig. 3, can obtain a transmittance of 80% or more at a wavelength higher than 340 nm. The diameter D of the arc tube 11 is 38 mm, and the tube length L is 2367 mm. The electrodes 121 and 122 are provided at both ends, and the electrodes 121 and 122 are formed by supporting the coil-shaped tungsten wires 14 with the conductive wires 131 and 132. The wires 131, 132 are passed through the glass press-sealed portion 15. The wires 131, 132 are connected to pin-shaped contacts 171, 172 which are fixed to the respective plug connectors 161, 162 at opposite ends of the lamp. 138609.doc 200952029 Further, a rare gas such as argon (Ar) and a certain amount of mercury are sealed in the arc tube 11 at a low pressure of about 1 to 1 Torr T rr. Further, the inner surface of the arc tube is coated with an ultraviolet light-emitting phosphor 18 having a peak at 300 to 340 nm and having a peak of conversion efficiency as shown in Fig. 4 . As such a phosphor 18, for example, NP-806 manufactured by Nichia Chemical Industry Co., Ltd. can be considered. The luminescent system is composed of LaP〇4 (yttrium phosphate): Ce (钸). The electric cathodes of the above-described configuration are supplied with electric power from the electrodes 121 and 122 to ensure the characteristics of the spectral distribution as shown in Fig. 5. In the spectroscopic distribution, based on the luminescence characteristics of the ultraviolet ray-emitting phosphor 18, the illuminance at 320 to 340 nm can be further improved. Figure 6 is a view showing the use and use of the phosphor of the present invention for the central portion (a), the sealed side (c), and the intermediate portion (b) of (a) and (c) of the ultraviolet discharge lamp of the present invention. A comparison result of the case where the illuminance at the measurement wavelength of 32 〇 to 34 〇 nm is different between the phosphors A and B will be described. Fig. 7 is an explanatory view for explaining a result of comparison between the case where the phosphor of the present invention is used and the illuminance using the different phosphors A and B. The phosphor of the present invention has a composition of LaP〇4: Ce as described above, and the former phosphor A has a composition of YPO4: Ce, and the former phosphor b has a composition of Ce (BaMgSr)Aln〇19 ° to form a LaPCU. : The case of Ce is that the average illuminance of the lamp positions (a) to (c) is 457.457 (mW/cm2), and in the case of 100%, the phosphor VIII is 72 7〇%, and the phosphor B is 44.67%. Therefore, in the case of a hot cathode low-pressure mercury lamp composed of a transparent cadmium glass containing 133609.doc -6 - 200952029, which is made of a cheap soda-lime glass containing more than 10% NaaO, coating a phosphor having a composition of LaP04: Ce Compared with the case where the phosphor b is applied, an illuminance improvement of 55% or more can be achieved, and an illuminance improvement of about 30% can be achieved as compared with the case of coating the phosphor a. In this embodiment, by irradiating the phosphor for ultraviolet light-emitting with the inner wall of the inexpensive soda-lime glass-glass made of Na20 containing more than 1% by weight, the illumination of 320 to 340 nm can be compared with the previous one. Increase by at least 3%. The illuminance of 耱320~340 nm is improved. For example, when the liquid crystal panel is irradiated with ultraviolet rays in a state in which the liquid crystal material is mixed and the ultraviolet ray reactive material which reacts with ultraviolet rays is caused to be polymerized, the ultraviolet ray recording is performed; the reaction material is efficiently polymerized. In addition, when the illumination is completed, the number of lamps can be reduced, so that it can contribute to power saving. In this embodiment, a general-purpose ultraviolet light-emitting type of hot cathode lamp is used, and an ultraviolet lamp of high efficiency light emission at a wavelength of 320 to 340 nm can be realized. In addition, there is no φ liquid crystal panel which is required to be irradiated with a very short wavelength, and which is mixed or sealed with a liquid crystal material and an ultraviolet ray reactive material, and can be irradiated with ultraviolet light from the ultraviolet discharge lamp of the present invention so as not to damage the liquid crystal material. Next, the ultraviolet reactive material is efficiently polymerized. " Fig. 8 is an explanatory view of another embodiment of the ultraviolet discharge lamp of the present invention. In this embodiment, the film thickness of the phosphor is changed, and Fig. 8 is an explanatory view for explaining the relationship between the contrast degree when the film thickness of the phosphor 18 is changed. Here, a hot cathode low-pressure mercury lamp having a light-emitting length of 2382.8±2.4 mm, an inside of the arc tube 11 and 138609.doc 200952029 of 38±1·5 mm is used, and the film thickness of the phosphor 18 is changed from 1 to 49 μηι. The time contrast (%) (320 nm band) was measured. As shown in Fig. 8, when the film thickness of the phosphor 18 is in the range of 5 to 40 μm, a degree of contrast of about 90% or more can be obtained. Therefore, if the composition of the luminescent body 18 used is LaP〇4: Ce and the phosphor 1 8 having a film thickness of 5 to 40 μm, a hot cathode low-pressure mercury lamp which achieves high illuminance can be realized. In the present embodiment, 'the camping body 18 having the composition of LaP〇4: Ce is used, and the illuminance at a wavelength of 320 to 340 nm can be improved by making the thickness of the phosphor 18 in the range of 5 to 40 μm. . Therefore, the illuminance at a wavelength of 320 to 340 nm can be increased. It is possible to obtain a lamp having a wavelength of 320 to 340 nm without increasing the number of lamps required for the illuminance rise portion, which contributes to cost reduction and is effective. Further, the particle size of the phosphor 18 is preferably about 5 μm. This is mainly because: the transmittance of light is smaller than that of 1 μηι; in the case of 5 μηι, mercury is liable to adhere and blacken between the particle diameters inside the arc tube, resulting in a decrease in lamp life. Further, the present invention is not limited to the foregoing embodiments. Since it can be produced by using a general-purpose ultraviolet light-emitting type cathode lamp, it is also suitable for the long-term illumination of the lamp, and can be applied to the claws required for the irradiation of a large-sized panel such as a next-generation liquid crystal substrate. BRIEF DESCRIPTION OF THE DRAWINGS mm Fig. 1 is a view showing a configuration of a partial break display for explaining an embodiment relating to the ultraviolet discharge lamp of the present invention. Figure 2 is a plan view of the ι_Γ line of Figure 1. Description of the figure Figure 3 is a diagram of the ultraviolet transmittance of general soda glass 138609.doc 200952029. Fig. 4 is an explanatory view for explaining a light emission distribution of a phosphor used in the present invention. Fig. 5 is an explanatory view for explaining the effects of the present invention. • Figure 6 is an illustration of the ratio of illuminance at different locations of the present invention to the previous lamp. Negative Fig. 7 is a description of the comparison between the present invention and the previous illuminance. Fig. 0 ❹ Fig. 8 is an explanatory view for explaining another embodiment relating to the ultraviolet discharge lamp of the present invention. [Description of main component symbols] 11 Luminous tube 14 Tungsten wire 15 Sealing part 18 Phosphor 121, 122 Electrode 131, 132 Conductor 161, 162 Plug connector 171, 172 Contact 138609.doc -9·