TW200941136A - Photocurable resin composition, cured product pattern, and printed wiring board - Google Patents
Photocurable resin composition, cured product pattern, and printed wiring board Download PDFInfo
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- TW200941136A TW200941136A TW097142869A TW97142869A TW200941136A TW 200941136 A TW200941136 A TW 200941136A TW 097142869 A TW097142869 A TW 097142869A TW 97142869 A TW97142869 A TW 97142869A TW 200941136 A TW200941136 A TW 200941136A
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- resin composition
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- 239000011342 resin composition Substances 0.000 title claims abstract description 40
- 229920005989 resin Polymers 0.000 claims abstract description 64
- 239000011347 resin Substances 0.000 claims abstract description 64
- 150000001875 compounds Chemical class 0.000 claims abstract description 52
- 239000000126 substance Substances 0.000 claims abstract description 38
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 36
- 239000000203 mixture Substances 0.000 claims abstract description 33
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 17
- 239000003513 alkali Substances 0.000 claims abstract description 15
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 8
- -1 oxime ester Chemical class 0.000 claims description 81
- 125000000217 alkyl group Chemical group 0.000 claims description 35
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 28
- 239000003999 initiator Substances 0.000 claims description 27
- 229910052799 carbon Inorganic materials 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 20
- 239000003086 colorant Substances 0.000 claims description 19
- 150000008065 acid anhydrides Chemical group 0.000 claims description 18
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 18
- 229920001187 thermosetting polymer Polymers 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 125000003118 aryl group Chemical group 0.000 claims description 10
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 10
- 125000005843 halogen group Chemical group 0.000 claims description 9
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical group CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 8
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 8
- 239000002585 base Substances 0.000 claims description 7
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 7
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 4
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 4
- 125000005011 alkyl ether group Chemical group 0.000 claims description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 150000001412 amines Chemical class 0.000 claims description 2
- 229910001392 phosphorus oxide Inorganic materials 0.000 claims description 2
- 125000004429 atom Chemical group 0.000 claims 1
- PXXJHWLDUBFPOL-UHFFFAOYSA-N benzamidine Chemical group NC(=N)C1=CC=CC=C1 PXXJHWLDUBFPOL-UHFFFAOYSA-N 0.000 claims 1
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- 150000001924 cycloalkanes Chemical class 0.000 claims 1
- 125000006612 decyloxy group Chemical group 0.000 claims 1
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 abstract description 30
- 230000035945 sensitivity Effects 0.000 abstract description 22
- 229910000679 solder Inorganic materials 0.000 abstract description 21
- 238000007747 plating Methods 0.000 abstract description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052737 gold Inorganic materials 0.000 abstract description 9
- 239000010931 gold Substances 0.000 abstract description 9
- 150000001733 carboxylic acid esters Chemical group 0.000 abstract 1
- 239000000049 pigment Substances 0.000 description 88
- 229920000647 polyepoxide Polymers 0.000 description 60
- 239000003822 epoxy resin Substances 0.000 description 53
- 239000010408 film Substances 0.000 description 46
- 238000006243 chemical reaction Methods 0.000 description 37
- 239000004593 Epoxy Substances 0.000 description 28
- 239000000758 substrate Substances 0.000 description 27
- 238000000576 coating method Methods 0.000 description 22
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 22
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 22
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 21
- 239000000243 solution Substances 0.000 description 21
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 20
- 239000007787 solid Substances 0.000 description 18
- 239000002966 varnish Substances 0.000 description 18
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 17
- 229920003986 novolac Polymers 0.000 description 17
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 16
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 description 16
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 16
- 238000011161 development Methods 0.000 description 15
- 239000000047 product Substances 0.000 description 13
- 238000011156 evaluation Methods 0.000 description 12
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 11
- 239000002253 acid Substances 0.000 description 11
- 125000003700 epoxy group Chemical group 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 9
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 9
- 229910052753 mercury Inorganic materials 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 8
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 7
- 150000004292 cyclic ethers Chemical group 0.000 description 7
- 238000004090 dissolution Methods 0.000 description 7
- 229910052747 lanthanoid Inorganic materials 0.000 description 7
- 150000002602 lanthanoids Chemical class 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 230000035515 penetration Effects 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 238000013329 compounding Methods 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 6
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 6
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000003208 petroleum Substances 0.000 description 6
- 150000007519 polyprotic acids Polymers 0.000 description 6
- 239000011541 reaction mixture Substances 0.000 description 6
- 238000007650 screen-printing Methods 0.000 description 6
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 5
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 5
- 229930185605 Bisphenol Natural products 0.000 description 5
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 5
- 229930003836 cresol Natural products 0.000 description 5
- 239000000975 dye Substances 0.000 description 5
- DCUFMVPCXCSVNP-UHFFFAOYSA-N methacrylic anhydride Chemical compound CC(=C)C(=O)OC(=O)C(C)=C DCUFMVPCXCSVNP-UHFFFAOYSA-N 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 230000005012 migration Effects 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical group S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 5
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000002845 discoloration Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 150000002576 ketones Chemical class 0.000 description 4
- 125000003566 oxetanyl group Chemical group 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical group N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- 235000017550 sodium carbonate Nutrition 0.000 description 4
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 3
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 3
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 210000004556 brain Anatomy 0.000 description 3
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000002738 chelating agent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229960000956 coumarin Drugs 0.000 description 3
- 235000001671 coumarin Nutrition 0.000 description 3
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 3
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 3
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- 230000002194 synthesizing effect Effects 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 2
- NFGXHKASABOEEW-UHFFFAOYSA-N 1-methylethyl 11-methoxy-3,7,11-trimethyl-2,4-dodecadienoate Chemical compound COC(C)(C)CCCC(C)CC=CC(C)=CC(=O)OC(C)C NFGXHKASABOEEW-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
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- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 2
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- ZBRZSJUFJUMKIM-UHFFFAOYSA-N 3-(1-phenylpropan-2-ylamino)propanenitrile;hydrochloride Chemical compound Cl.N#CCCNC(C)CC1=CC=CC=C1 ZBRZSJUFJUMKIM-UHFFFAOYSA-N 0.000 description 2
- YDIYEOMDOWUDTJ-UHFFFAOYSA-N 4-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=C(C(O)=O)C=C1 YDIYEOMDOWUDTJ-UHFFFAOYSA-N 0.000 description 2
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- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
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- 229920000877 Melamine resin Polymers 0.000 description 2
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- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
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- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
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- 238000010998 test method Methods 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- ITHPEWAHFNDNIO-UHFFFAOYSA-N triphosphane Chemical compound PPP ITHPEWAHFNDNIO-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- JNELGWHKGNBSMD-UHFFFAOYSA-N xanthone powder Natural products C1=CC=C2C(=O)C3=CC=CC=C3OC2=C1 JNELGWHKGNBSMD-UHFFFAOYSA-N 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
- C08F20/10—Esters
- C08F20/12—Esters of monohydric alcohols or phenols
- C08F20/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F20/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
- C08F290/064—Polymers containing more than one epoxy group per molecule
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
- C08G59/42—Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Polymers & Plastics (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials For Photolithography (AREA)
- Epoxy Resins (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
Description
200941136 九、發明說明 【發明所屬之技術領域】 本發明係關於一種對活性能量線之感度優異’且可用 作阻焊劑之鹼顯像型光硬化性樹脂組成物。 【先前技術】 最近印刷電路板用之阻焊劑之曝光方法,就優異對位 Φ 精確觀點而言,以雷射掃描曝光較普及。雷射曝光係不使 用光罩而一面在形成圖型之電路板上掃描阻焊劑一面形成 圖像者,但迄今爲止之阻焊劑由於其最適曝光量爲2 00m J/ cm2以上故有曝光時間極長之缺點,對應於雷射曝光,阻 焊劑需要非常高的感度化。 在此等背景下提出有可發揮高的光聚合能力之感光性 組成物(例如,參照專利文獻1及專利文獻2)。然而, 迄今爲止所提出之感光性組成物中雖存在可確實發揮光聚 φ 合能力者,但爲了進行雷射直接曝光所需的感度尙無法謂 之充分,又對感光性組成物所要求之感度以外所需之諸特 性亦尙不充分。具體而言,專利文獻1中揭示之組成物於 作爲形成含有羧基之感光性樹脂用之1分子中同時帶有環 狀醚基與乙烯性不飽和基之化合物僅例示有甲基丙烯酸縮 水甘油酯,但不僅感度不足且若附加量多則有顯像性惡化 之傾向。另一方面,專利文獻2之提案,於使用對於丙烯 酸酯使ε-己內酯進行連鎖反應使分子伸長之己內酯改質之 丙烯酸酯時’雖可提升感度但指觸乾燥性極度惡化,且焊 -5- 200941136 錫耐熱性不足。 再者鹼顯像型光阻焊劑在耐久性方面尙有問題。亦即 與以往之熱硬化型、溶劑顯像型者相較’鹼顯像型光阻焊 劑之耐藥品性、耐水性、耐熱性等均差。該等係起因於爲 了使鹼顯像型光阻焊劑可進行鹼顯像而以具有親水性基者 作爲主要成分之故。藉此,使藥液、水、水蒸氣等容易浸 透,且使耐藥品性降低且光阻皮膜與銅之密著性降低。作 爲結果,使作爲耐藥品性之鹸耐性減弱,尤其是於BGA 及CSP等半導體封裝中尤其應稱爲耐濕熱性之耐PCT性 (耐壓力鍋試驗性)爲必要,但現狀爲在如此嚴格條件下 僅耐數小時至數十小時左右。又,PCT條件下施加電壓之 狀態下之PCBT試驗在許多情況下,現狀爲在數小時內確 認到因移行之發生而引起不良。 [專利文獻1]特開20〇7-41 502號公報(申請專利範圍) [專利文獻2]特開2007-3590號公報(申請專利範圍) 【發明內容】 [發明解決之課題] 本發明係鑒於上述問題點而開發,其課題爲提供一種 可用作阻焊劑之鹼顯像型光硬化性樹脂組成物,該組成物 相對於活性能量線爲高感度、其直接描繪之曝光硬化性優 異’且顯像性、指觸乾燥性、焊料耐熱性、無電解鍍金性 、耐鹸性、PCT及PCBT耐性優異。 200941136 [解決課題之方法] 本發明者爲解決上述課題而積極硏究之結果,發現使 用含有特定構造之含羧酸之感光性樹脂作爲感光性樹脂, 經由組合其他成分而成之光硬化性樹脂組成物可解決上述 課題,因而完成本發明。 亦即,本發明爲一種鹼可顯像之光硬化性樹脂組成物 ,其特徵爲含有(A)含有以通式(I)表示之構造之含羧 ❹ 酸感光性樹脂,(B )光聚合物起始劑,(C ) 1分子中具 有2個以上之乙烯性不飽和基之化合物: R1BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alkali-developing photocurable resin composition which is excellent in sensitivity to an active energy ray and which can be used as a solder resist. [Prior Art] Recently, the exposure method of the solder resist for printed circuit boards has been popular for laser scanning in terms of excellent alignment Φ. Laser exposure is performed by scanning a solder resist on a circuit board on which a pattern is formed without using a photomask, but the solder resist has hitherto been exposed to an optimum exposure amount of 200 mJ/cm2 or more. The shortcomings of the long, corresponding to the laser exposure, the solder resist needs a very high sensitivity. In this context, a photosensitive composition capable of exhibiting high photopolymerization ability has been proposed (for example, refer to Patent Document 1 and Patent Document 2). However, in the photosensitive composition proposed so far, although it is possible to surely exhibit the ability of photopolymerization, the sensitivity required for direct laser exposure is not sufficient, and it is required for the photosensitive composition. The characteristics required outside of the sensitivity are also insufficient. Specifically, the composition disclosed in Patent Document 1 is exemplified by glycidyl methacrylate as a compound having a cyclic ether group and an ethylenically unsaturated group in one molecule for forming a photosensitive resin containing a carboxyl group. However, not only is the sensitivity insufficient, but if the amount of addition is large, the developing property tends to deteriorate. On the other hand, in the proposal of Patent Document 2, when an acrylate in which ε-caprolactone is subjected to a chain reaction of acrylate to modify a molecule-extended caprolactone is used, the sensitivity is improved, but the dryness of the touch is extremely deteriorated. And welding -5 - 200941136 tin heat resistance is insufficient. Further, the alkali-developing type photoresist has problems in durability. That is, compared with the conventional thermosetting type and solvent developing type, the alkali-developing type photoresist has poor chemical resistance, water resistance, heat resistance and the like. These are caused by the fact that the alkali-developing type solder resist can be subjected to alkali development and the hydrophilic group is used as a main component. Thereby, the chemical liquid, water, steam, and the like are easily impregnated, the chemical resistance is lowered, and the adhesion between the photoresist film and copper is lowered. As a result, the resistance to chemical resistance is weakened, and in particular, in semiconductor packages such as BGA and CSP, it is necessary to refer to PCT resistance (pressure cooker testability) which is particularly resistant to moist heat, but the current situation is such strict conditions. It only lasts for hours to tens of hours. Further, in many cases, the PCBT test in the state where the voltage is applied under the PCT condition is confirmed to be caused by the occurrence of the migration within a few hours. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. 2007-3590 (Patent Application). In view of the above problems, an object of the invention is to provide an alkali-developing photocurable resin composition which can be used as a solder resist, which is high in sensitivity to active energy rays and excellent in exposure hardenability of direct drawing. It is also excellent in developability, dryness to touch, solder heat resistance, electroless gold plating, scratch resistance, PCT and PCBT resistance. 200941136 [Means for Solving the Problems] As a result of intensive research to solve the above problems, the inventors of the present invention have found that a photocurable resin obtained by combining other components is used as a photosensitive resin containing a carboxylic acid-containing photosensitive resin having a specific structure. The composition can solve the above problems, and thus the present invention has been completed. That is, the present invention is an alkali-developable photocurable resin composition characterized by containing (A) a carboxylated phthalic acid-containing photosensitive resin having a structure represented by the general formula (I), and (B) photopolymerization. Starting agent, (C) a compound having two or more ethylenically unsaturated groups in one molecule: R1
❹ 通式(I)中,R1代表氫原子或甲基,R2代表碳數 2〜6之直鏈狀、分支狀或環狀烷基,R3代表氫原子或有機 酸酯殘基。 其中,通式(I)中之R3之一樣態爲酸酐殘基,或者 爲(甲基)丙烯酸殘基。 另外,(B)光聚合起始劑爲選自由含有以通式(π )表不之構造之假酯系光聚合起始劑、含有以通式(in) 200941136 表示之構造之胺基苯乙酮系光聚合起始劑及含有以通式( IV)表示之構造之醯基磷氧化物系光聚合起始劑組成之群 之一種或兩種以上之混合物: (II) -C=N^~0-—C——r2In the formula (I), R1 represents a hydrogen atom or a methyl group, R2 represents a linear, branched or cyclic alkyl group having 2 to 6 carbon atoms, and R3 represents a hydrogen atom or an organic acid ester residue. Among them, the same state as R3 in the formula (I) is an acid anhydride residue or a (meth)acrylic acid residue. Further, the (B) photopolymerization initiator is an aminophenyl group selected from the group consisting of a pseudo ester photopolymerization initiator having a structure represented by the formula (π) and having a structure represented by the formula (in) 200941136. One or a mixture of two or more of a ketone-based photopolymerization initiator and a sulfhydrylphosphine-based photopolymerization initiator having a structure represented by the general formula (IV): (II) -C=N^ ~0-—C——r2
R5 R6R5 R6
11 II R1 ο (III) ◎ (IV) 通式(II)〜(IV)中,R1表示氫原子、苯基(亦可 經碳數1~6之烷基、苯基或鹵原子取代)、碳數1~20之 直鏈狀、分支狀或環狀烷基(可經1個以上之羥基取代, 烷基鏈中間可具有1個以上氧原子)、碳數5~8之環烷基 、碳數2〜20之烷醯基或苯甲醯基(可經碳數1〜6之烷基 或苯基取代); R2表示苯基(可經碳數1~6之烷基、苯基或鹵原子取 代)、碳數1〜20之直鏈狀、分支狀或環狀烷基(可經1 個以上之羥基取代,烷基鏈中間可具有1個以上氧原子) 、碳數5~8之環烷基、碳數2〜2 0之烷醯基或苯甲醯基( 可經碳數1〜6之烷基或苯基取代); R3及R4分別獨立表示碳數1〜20之直鏈狀、分支狀或 環狀烷基或芳基烷基, -8- 200941136 R5及R6分別獨立表示氫原子、碳數1〜6之直鏈狀、 分支狀或環狀烷基,或R5及R6可鍵結合而形成環狀烷基 醚基, R7及R8分別獨立表示碳數1~1〇之直鏈狀、分支狀或 環狀烷基、烷氧基、環己基、環戊基、芳基(可經鹵原子 、烷基或烷氧基取代)、或R-C(=0)-基(其中R表示 碳數1~2〇之烴基),但R7及R8兩者均爲R-C ( =0)-基 0 時除外。 又,本發明之樹脂組成物可進一步含有(D)熱硬化 性成分。 又,本發明之樹脂組成物爲進一步含有(E)著色劑 之阻焊劑。 本發明之其他樣態中,係將上述本發明之光硬化性樹 脂組成物塗佈在載體膜上並乾燥所獲得之光硬化性乾膜。 又,本發明之其他樣態中,係使用由上述光硬化性樹 〇 脂組成物組成之樹脂層形成之硬化物圖型,該圖型之形成 係藉由照射活性能量線而進行者之硬化物圖型。其中,藉 由照射活性能量線形成圖型係使用波長3 5 0nm〜4 10nm之 活性能量線直接描繪者。 又,本發明之其他樣態,係在銅層上具備上述硬化物 圖型之印刷電路板。 又,本說明書中之(甲基)丙烯酸係作爲表示丙烯酸 及/或甲基丙烯酸之用語使用,其他類似之表現亦同。 200941136 【實施方式】 以下詳細說明本發明之光硬化性樹脂組成物之各構成 成分。 本發明之光硬化性樹脂組成物中所含之含有羧酸之感 光性樹脂(A)包含以通式(I)表示之構造,進而分子中 含有羧酸。11 II R1 ο (III) ◎ (IV) In the general formulae (II) to (IV), R1 represents a hydrogen atom or a phenyl group (may also be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (which may be substituted by one or more hydroxyl groups, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, a 2 to 20 carbon alkyl or benzylidene group (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group); R 2 represents a phenyl group (alkyl group having 1 to 6 carbon atoms, phenyl group or a halogen-substituted one), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (which may be substituted by one or more hydroxyl groups, and may have one or more oxygen atoms in the middle of the alkyl chain), and a carbon number of 5 to 8 a cycloalkyl group, a carbon number of 2 to 20 alkyl alkanoyl or a benzhydryl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group); R3 and R4 each independently represent a carbon number of 1 to 20; Chain, branched or cyclic alkyl or arylalkyl, -8- 200941136 R5 and R6 each independently represent a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, or R5 and R6 can be bonded to form a cyclic alkyl ether group, and R7 and R8 are each independently a linear, branched or cyclic alkyl group having 1 to 1 carbon atom, an alkoxy group, a cyclohexyl group, a cyclopentyl group, an aryl group (which may be substituted by a halogen atom, an alkyl group or an alkoxy group), or RC (=0)-Base (wherein R represents a hydrocarbon group having 1 to 2 carbon atoms), except when both R7 and R8 are RC (=0)-based 0. Further, the resin composition of the present invention may further contain (D) a thermosetting component. Further, the resin composition of the present invention is a solder resist further containing (E) a colorant. In another aspect of the invention, the photocurable resin composition of the present invention described above is applied onto a carrier film and the obtained photocurable dry film is dried. Further, in another aspect of the present invention, a cured image pattern formed of a resin layer composed of the photocurable resin composition is used, and the pattern is formed by irradiation of an active energy ray. Object pattern. Among them, the pattern formed by irradiation of the active energy ray is directly drawn using an active energy ray having a wavelength of 305 nm to 4 10 nm. Further, another aspect of the present invention is to provide a printed circuit board having the above-described cured pattern on a copper layer. Further, the (meth)acrylic acid in the present specification is used as a term indicating acrylic acid and/or methacrylic acid, and the other similar performances are also the same. [Embodiment] Hereinafter, each constituent component of the photocurable resin composition of the present invention will be described in detail. The photosensitive resin (A) containing a carboxylic acid contained in the photocurable resin composition of the present invention contains a structure represented by the formula (I), and further contains a carboxylic acid in the molecule.
(I) 式中,R1表示氫原子或甲基,R2表示碳數2〜6之直 鏈狀、分支狀或環狀烷基,R3表示氫原子或有機酸酯殘基 〇 其中,由R3所表示之有機酸酯殘基列舉有酸酐殘基 或(甲基)丙烯酸殘基,酸酐殘基之具體例列舉有後述之 (b)含有不飽和基之酸酐及(d)多元酸酐等。 本發明之含羧酸之感光性樹脂(A)可使用(a) 1分 子中具有至少兩個羥基及1個羧基之化合物、(b)含不 飽和基之酸酐、(c)l分子中具有至少2個以上之環氧基 之環氧化合物、及(d)多元酸酐,依循以下所示順序 )~(3)而獲得,但不限於該等。 亦即, -10- 200941136 (1)使1分子中具有至少2個羥基與1個羧基之化 合物(a)與含有不飽和基之酸酐(b)反應,合成1分子 中具有2個(甲基)丙烯醯基與1個羧基之化合物。對於 所得化合物,使1分子中具有至少2個以上之環氧基之環 氧化合物(c)反應後,進而與多元酸酐(d)反應而獲得 〇 (1) 之系統中之特徵舉例爲藉由提高感光性基之濃 φ 度可有效高感度化。又其細節尙不清楚,但確認顯像性亦 提高。認爲係由於伴隨著該等樹脂中丙烯醯基濃度之提高 ,因與不含羧基之其他成分之親和性變高而使乳化效果提 高之故。再者,亦確認伴隨著交聯密度之上升耐鹼性提高 、伴隨著疏水性提高PCT及PCBT耐性亦提高。 (2) 使1分子中具有至少2個羥基與1個羧基之化 合物(a)與含有不飽和基之酸酐(b)反應,合成1分子 中具有2個(甲基)丙烯醯基與1個羧基之化合物。對於 〇 所得化合物,使1分子中具有至少兩個以上環氧基之環氧 化合物(C )反應。對於所得化合物,再使1分子中具有 至少2個羥基與1個羧基之化合物(a)反應後,再與多 元酸酐(d)反應而獲得。 (2)之系統之特徵列舉與(1)相同,藉由提高感光 性基濃度而有效高感度化。又另外(2)之系統之特徵列 舉爲感光性單元(丙烯醯基)與顯像性單元(羧基)烷全 分開。可確認藉由該效果仍具有與(1)同等之感度但更 大顯像壽命比(1 )更延長。又如(1 )同樣,確認到顯像 -11 - 200941136 性提高且亦確認到PCT及PCBT耐性之提升。 (3)使1分子中具有至少2個以上之環氧基之環氧 化合物(c)與1分子中具有至少2個羥基與1個羧基之 化合物(a)反應。對於所得化合物使含有不飽和基之酸 酐(b)反應後,進而與多元酸酐(d)反應而獲得。 (3)之系統之特徵列舉與(1) 、 (2)相同’藉由 提高感光性基濃度可有效高感度化。又(3)亦與(1)及 (2 )相同,亦可確認顯像性之提高。但,與(2 )不同的 q 是感光性單元(丙烯醯基)與顯像性單元(羧基)成爲無 規之結果,發現有難以完全控制樹脂構造之傾向。 該等(1)〜(3)之系統各有其優異特徵,但由感光 性、顯像性之均衡,進而所得硬化物之特性而言,認爲( 2)或者(1 )最好。 上述(1)至(3)所述之(A)含有羧酸之感光性樹 脂之合成中所用之(a) 1分子中具有至少2個羥基及1個 羧基之化合物之具體例,可列舉爲例如二羥甲基丙酸、二 © 羥甲基乙酸、二羥甲基丁酸、二羥甲基戊酸、二羥甲基己 酸等含有多羥基之單羧酸類。作爲最佳者可列舉例如二羥 甲基丙酸等。 作爲(b)含有不飽和基之酸酐,列舉有丙烯酸酐、 甲基丙烯酸酐,該等可單獨使用或組合兩種以上使用。(I) wherein R1 represents a hydrogen atom or a methyl group, R2 represents a linear, branched or cyclic alkyl group having 2 to 6 carbon atoms, and R3 represents a hydrogen atom or an organic acid ester residue, wherein R3 is The organic acid ester residue shown is an acid anhydride residue or a (meth)acrylic acid residue, and specific examples of the acid anhydride residue include (b) an unsaturated group-containing acid anhydride and (d) a polybasic acid anhydride. The carboxylic acid-containing photosensitive resin (A) of the present invention may have (a) a compound having at least two hydroxyl groups and one carboxyl group in one molecule, (b) an acid anhydride containing an unsaturated group, and (c) one molecule having The epoxy compound having at least two or more epoxy groups and (d) the polybasic acid anhydride are obtained in the following order) to (3), but are not limited thereto. That is, -10-200941136 (1) reacting a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule with an acid anhydride (b) containing an unsaturated group, and synthesizing two molecules in one molecule (methyl group) a compound of an acryloyl group and a carboxyl group. The obtained compound is characterized in that a system in which an epoxy compound (c) having at least two epoxy groups in one molecule is reacted and then reacted with a polybasic acid anhydride (d) to obtain cerium (1) is exemplified by Increasing the concentration φ of the photosensitive base can effectively increase the sensitivity. The details are not clear, but the visibility is also improved. It is considered that the emulsification effect is improved by the increase in the affinity with other components having no carboxyl group due to the increase in the concentration of the acrylonitrile group in the resins. Further, it was confirmed that the alkali resistance was improved with an increase in the crosslinking density, and the PCT and PCBT resistance were also improved with the increase in hydrophobicity. (2) reacting a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule with an acid anhydride (b) containing an unsaturated group, and synthesizing two (meth)acrylonyl groups and one molecule in one molecule. a compound of a carboxyl group. For the compound obtained from ruthenium, an epoxy compound (C) having at least two or more epoxy groups in one molecule is reacted. The obtained compound is further reacted with a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule, and then reacted with a polybasic acid anhydride (d). The characteristics of the system of (2) are the same as (1), and the sensitivity is high and the sensitivity is improved by increasing the photosensitive base concentration. Further, the system of (2) is characterized in that the photosensitive unit (acrylonitrile group) is completely separated from the development unit (carboxyl) alkane. It can be confirmed that the effect is still the same as (1) but the image life is longer than (1). In the same way, (1), it was confirmed that the development of the image was improved, and the improvement in PCT and PCBT tolerance was also confirmed. (3) An epoxy compound (c) having at least two or more epoxy groups in one molecule is reacted with a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule. The obtained compound is obtained by reacting an acid anhydride (b) containing an unsaturated group and further reacting it with a polybasic acid anhydride (d). The characteristics of the system of (3) are the same as (1) and (2)', and it is effective and highly sensitive by increasing the photosensitive base concentration. Also (3) is the same as (1) and (2), and the improvement in developability can also be confirmed. However, q which is different from (2) is a result of the randomness of the photosensitive unit (acryloyl group) and the developing unit (carboxyl group), and it has been found that it is difficult to completely control the resin structure. The systems of the above (1) to (3) each have their excellent characteristics, but it is considered that (2) or (1) is preferable in terms of the balance of photosensitivity and development properties and the properties of the obtained cured product. Specific examples of the compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule of the (A) photosensitive resin containing a carboxylic acid described in the above (1) to (3) can be exemplified as For example, a monocarboxylic acid containing a polyhydroxy group such as dimethylolpropionic acid, bishydroxymethylacetic acid, dimethylolbutanoic acid, dimethylolvaleric acid or dihydroxymethylhexanoic acid. As a preferable one, for example, dimethylolpropionic acid or the like can be mentioned. Examples of the (b) acid anhydride containing an unsaturated group include acrylic anhydride and methacrylic anhydride, and these may be used alone or in combination of two or more.
至於(c) 1分子中具有至少2個環氧基之環氧化合物 爲習知慣用之各種環氧樹脂,可使用例如雙酚A型環氧樹 脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、溴化雙酚A -12- 200941136 型環氧樹脂、氫化雙酚A型環氧樹脂、聯酚型 聯二甲酚型環氧樹脂、酚酚醛清漆型環氧樹脂 清漆型環氧樹脂、溴化酚酚醛清漆型環氧樹脂 酚醛清漆型環氧樹脂等之縮水甘油醚化合物; 二縮水甘油酯、六氫苯二甲酸二縮水甘油酯、 水甘油酯等之縮水甘油酯化合物;三縮水甘油 酯、N,N,N’,N’-四縮水甘油基間二甲苯二胺、 φ 四縮水甘油基雙胺基甲基環己烷、Ν,Ν-二縮水 等之縮水甘油基胺化合物。其中,酚酚醛清漆 及甲酚酚醛清漆型環氧樹脂可以高感度提供耐 硬化塗膜故而較佳。再者,軟化點60°C以上之 漆型環氧樹脂由於指觸乾燥性亦優異故而較佳 能性環氧化合物可單獨使用或兩種以上倂用。 作爲(d)多元酸酐,列舉爲琥珀酸酐、 富馬酸酐、四氫苯二甲酸酐、六氫苯二甲酸酐 φ 苯二甲酸酐、衣康酸酐、甲基3 -甲基內次甲基 、偏苯三酸酐、均苯四酸酐等,該等可單獨使 種以上使用。 又,相對於(1) ~(3)中所得之含羧酸 _ 脂(A),亦可使用進而與(e) 1分子中同時 基與乙烯性不飽和基之化合物反應所獲得之樹 作爲上述(e) 1分子中同時帶有環狀醚基 飽和基之化合物,可列舉爲(甲基)丙烯酸2_ 水甘油醚、(甲基)丙烯酸2 -羥基丙酯縮水甘 環氧樹脂、 、甲酚酚醛 、雙酚A之 對苯二甲酸 二聚酸二縮 基異脲氰酸 N,N,N,,N’· 甘油基苯胺 型環氧樹脂 熱性優異之 甲酚酚醛清 。該等多官 馬來酸酐、 、甲基六氫 苯二甲酸酐 用或組合兩 之感光性樹 帶有環狀醚 脂。 與乙烯性不 -羥基乙酯縮 油醚、(甲 -13- 200941136 基)丙烯酸3-羥基丙酯縮水甘油醚、(甲基)丙烯酸2-羥 基丁酯縮水甘油醚、(甲基)丙烯酸4-羥基丁酯縮水甘油 醚、(甲基)丙烯酸2-羥基戊酯縮水甘油醚、(甲基)丙 烯酸6-羥基己酯縮水甘油醚或(甲基)丙烯酸縮水甘油酯 等含有環氧基之乙烯性不飽和單體類,該等可單獨使用或 組合兩種以上使用。該等含有環氧基之乙烯性不飽和單體 類中,尤其是(甲基)丙烯酸4-羥基丁酯縮水甘油醚、( 甲基)丙烯酸縮水甘油酯因具有適度生產性、光硬化性故 而較佳。 該等(e) 1分子中同時帶有環狀醚基與乙烯性不飽和 基之化合物之加成量,相對於酸酐殘基,較好爲5%當量 至40%當量,更好爲10%當量至30%當量。當加成量超過 5%當量時,就感度提升或無電解鍍金耐性之提升觀點而言 爲較佳,另一方面當超過40%當量時,最大顯像壽命變短 ,有指觸乾燥性惡化之情況而較不適當。藉由該等化合物 (e)之改質使交聯密度提高進而確認高感度化、耐鹼性 、PCT及PCBT耐性之相乘效果。 上述含有羧基之感光性樹脂(A)之酸價較好爲 40〜200mgKOH/g之範圍,更好爲8 0〜1 2 0 m g Κ Ο H/g之範圍 。含有羧基之樹脂之酸價若未達4 0mgKOH/g則鹼顯像變 困難,另一方面,當超過200mgKOH/g時由於以顯像液曝 光部之溶解過快,故使線(Line )變的比所需者更細,由 於該情況,曝光部與未曝光部無區別地由顯像液溶解並剝 離,因此正常之光阻圖型描繪變困難故而較不適當。 -14- 200941136 又,上述含有羧基之感光性樹脂(A)之重量平均分 子量,雖隨樹脂骨架而有所不同,但通常爲2000~50000, 又以5000〜20000之範圍者較佳。當重量平均分子量未達 20 00時,有不黏觸性性能劣化之情況,曝光後之塗膜之耐 濕性變差,於顯像時產生膜減少,而使解像度大幅變差。 另一方面,當重量平均分子量超過5 0 000時,有顯像性顯 著惡化,且有儲存安定性變差之情況。 〇 該等含有羧基之感光性樹脂(A)之調配率,相對於 樹脂組成物之全部質量,較好爲20〜60質量%,更好爲 3 0〜5 0質量%。少於上述範圍時,有塗膜強度降低之情況 而較不佳。另一方面,多於上述範圍時,黏性變高,有光 阻劑塗佈性等降低之情況因而較不佳。 本發明中,除上述含羧酸之感光性樹脂(A)以外, 亦可進而添加習知慣用之羧酸樹脂,最好爲感光性羧酸樹 脂。 〇 接著,說明光聚合起始劑(B)。 光聚合起始劑(B)較好使用選自由含有以下述通式 (Π)表7Γ:之構造之膀酯系光聚合起始劑(B-1)、含有以 下述通式(III)表示之構造之α-胺基苯乙酮系光聚合起 始劑(Β-2)、及含有以下述通式(IV)表示之構造之醯 基磷氧化物系光聚合起始劑(Β-3)組成之群之一種或兩 種以上之光聚合起始劑: -15- 200941136As for (c) an epoxy compound having at least two epoxy groups in one molecule, which is a conventionally used epoxy resin, for example, a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a bisphenol S can be used. Type epoxy resin, brominated bisphenol A -12- 200941136 type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol type bisphenol type epoxy resin, phenol novolac type epoxy resin varnish type ring a glycidyl ether compound such as an oxyresin or a brominated phenol novolac type epoxy resin novolac type epoxy resin; a glycidyl ester compound such as diglycidyl ester, diglycidyl hexahydrocarbonate or water glyceryl ester; a glycidyl group such as triglycidyl ester, N, N, N', N'-tetraglycidyl m-xylylenediamine, φ diglycidyl bisaminomethylcyclohexane, hydrazine, hydrazine-bi-dihydrate Amine compound. Among them, a phenol novolac and a cresol novolac type epoxy resin are preferable because they can provide a hardened coating film with high sensitivity. Further, the lacquer-type epoxy resin having a softening point of 60 ° C or higher is excellent in dryness to the touch, and the preferred epoxy compound may be used singly or in combination of two or more. Examples of the (d) polybasic acid anhydride include succinic anhydride, fumaric anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride φ phthalic anhydride, itaconic anhydride, and methyl 3-methyl endomethyl group. Trimellitic anhydride, pyromellitic anhydride, etc., may be used alone or in combination. Further, as the carboxylic acid-containing lipid (A) obtained in (1) to (3), a tree obtained by further reacting with a compound of the (e) 1 molecule and a compound having an ethylenically unsaturated group may be used as the tree. The compound of the above (e) 1 molecule having a cyclic ether group saturated group, which may be exemplified by (meth)acrylic acid 2-glycidyl ether, (meth)acrylic acid 2-hydroxypropyl ester glycidyl epoxy resin, Phenolic phenolic aldehyde, bisphenol A terephthalic acid dimer acid bis-isourea cyanide N, N, N, N'· glyceryl aniline type epoxy resin excellent cresol novolac. These photosensitive maleic anhydride, methyl hexahydrophthalic anhydride or a combination of two photosensitive trees have a cyclic ether resin. Ethylene non-hydroxyethyl condensate, (3--13- 200941136) 3-hydroxypropyl acrylate glycidyl ether, 2-hydroxybutyl methacrylate glycidyl ether, (meth) acrylate 4 - hydroxybutyl ester glycidyl ether, 2-hydroxypentyl (meth) acrylate glycidyl ether, 6-hydroxyhexyl methacrylate (meth) acrylate or glycidyl (meth) acrylate, etc. Ethylene-unsaturated monomers, which may be used singly or in combination of two or more. Among the epoxy group-containing ethylenically unsaturated monomers, especially 4-hydroxybutyl (meth)acrylate glycidyl ether and glycidyl (meth)acrylate are moderately productive and photocurable. Preferably. The addition amount of the compound having a cyclic ether group and an ethylenically unsaturated group in the (e) molecule is preferably from 5% equivalent to 40% by weight, more preferably 10%, based on the acid anhydride residue. Equivalent to 30% equivalent. When the addition amount exceeds 5% by weight, it is preferable from the viewpoint of improvement in sensitivity or improvement in electroless gold plating resistance. On the other hand, when it exceeds 40% equivalent, the maximum development life is shortened, and dryness of the touch is deteriorated. The situation is less appropriate. By the modification of the compound (e), the crosslinking density is increased to confirm the synergistic effect of high sensitivity, alkali resistance, PCT and PCBT resistance. The acid value of the carboxyl group-containing photosensitive resin (A) is preferably in the range of 40 to 200 mgKOH/g, more preferably in the range of 80 to 1 20 m g Κ Ο H/g. When the acid value of the carboxyl group-containing resin is less than 40 mgKOH/g, alkali development becomes difficult. On the other hand, when it exceeds 200 mgKOH/g, the line is changed because the dissolution of the exposure portion of the developing liquid is too fast. In this case, the exposed portion and the unexposed portion are dissolved and peeled off by the developing solution without distinction, and thus the normal photoresist pattern drawing becomes difficult and is not appropriate. In addition, the weight average molecular weight of the carboxyl group-containing photosensitive resin (A) varies depending on the resin skeleton, but is usually from 2,000 to 50,000, and preferably from 5,000 to 20,000. When the weight average molecular weight is less than 200, the non-tack property is deteriorated, and the moisture resistance of the coating film after exposure is deteriorated, and the film is reduced at the time of development, and the resolution is greatly deteriorated. On the other hand, when the weight average molecular weight exceeds 50,000, the development property is remarkably deteriorated, and the storage stability is deteriorated. The blending ratio of the carboxyl group-containing photosensitive resin (A) is preferably from 20 to 60% by mass, more preferably from 30 to 50% by mass, based on the total mass of the resin composition. When it is less than the above range, there is a case where the film strength is lowered and it is not preferable. On the other hand, when it is more than the above range, the viscosity is high, and the coating property of the photoresist is lowered, which is not preferable. In the present invention, in addition to the above-mentioned carboxylic acid-containing photosensitive resin (A), a conventionally used carboxylic acid resin may be further added, and a photosensitive carboxylic acid resin is preferable. 〇 Next, the photopolymerization initiator (B) will be explained. The photopolymerization initiator (B) is preferably selected from the group consisting of a lipoester-based photopolymerization initiator (B-1) having a structure of the following formula (Π): A-aminoacetophenone-based photopolymerization initiator (Β-2) having a structure, and a mercaptophosphorus-based photopolymerization initiator (Β-3) having a structure represented by the following formula (IV) One or more photopolymerization initiators of the group consisting of: -15- 200941136
通式(π )〜(IV )中, R1表示氫原子、苯基(可經碳數1~6之烷基、苯基或 鹵原子取代)、碳數1〜20之直鏈狀、分支狀或環狀烷基 (可經1個以上之羥基取代,烷基鏈中間可具有1個以上 氧原子)、碳數5〜8之環烷基、碳數2〜2 0之烷醯基或苯 甲醯基(可經碳數1〜6之烷基或苯基取代); R2表示苯基(可經碳數之烷基、苯基或鹵原子取 代)、碳數1〜20之直鏈狀、分支狀或環狀烷基(可經1 個以上之羥基取代,烷基鏈中間可具有1個以上氧原子) 、碳數5〜8之環烷基、碳數2〜2 0之烷醯基或苯甲醯基( 可經碳數1~6之烷基或苯基取代); R3及R4分別獨立表示碳數1〜20之直鏈狀、分支狀或 環狀烷基或芳基烷基, R5及R6分別獨立表示氫原子、碳數1〜6之直鏈狀、 分支狀或環狀烷基,或R5及R6可鍵結而形成環狀烷基醚 基, R7及R8分別獨立表示碳數1〜10之直鏈狀、分支狀或 環狀烷基、烷氧基、環己基、環戊基、芳基(可經鹵原子 -16- 200941136 、烷基或烷氧基取代)、或R-c( = o)-基(其中r表示碳 數1〜20之烴基),但R7及R8兩者均爲R-C( = 〇)-基時除 外。 具有以上述通式(II)表示之肟酯系光聚合起始劑( B-1)較好列舉爲以下述式(V)表不之2-(乙醯氧基亞 胺基甲基)噻噸-9-酮:In the formula (π) to (IV), R1 represents a hydrogen atom, a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear or branched carbon number of 1 to 20 Or a cyclic alkyl group (which may be substituted by one or more hydroxyl groups, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having a carbon number of 5 to 8, an alkanoyl group having a carbon number of 2 to 20 or a benzene group A fluorenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group); R2 represents a phenyl group (which may be substituted by an alkyl group having a carbon number, a phenyl group or a halogen atom), and a linear chain having a carbon number of 1 to 20 a branched or cyclic alkyl group (which may be substituted by one or more hydroxyl groups, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having a carbon number of 5 to 8, and an alkane having a carbon number of 2 to 2 0 a benzyl or benzhydryl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group); R3 and R4 each independently represent a linear, branched or cyclic alkyl or arylalkyl group having 1 to 20 carbon atoms; The radicals R5 and R6 each independently represent a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, or R5 and R6 may be bonded to form a cyclic alkyl ether group, and R7 and R8 are independently independent. Indicates a linear or branched shape with a carbon number of 1 to 10. a cyclic alkyl group, an alkoxy group, a cyclohexyl group, a cyclopentyl group, an aryl group (which may be substituted by a halogen atom-16-200941136, an alkyl group or an alkoxy group), or an Rc(=o)- group (wherein r represents carbon The hydrocarbon group of 1 to 20 is excluded, except when both R7 and R8 are RC(=〇)- groups. The oxime ester-based photopolymerization initiator (B-1) represented by the above formula (II) is preferably exemplified by 2-(ethyloxyiminomethyl)thiophene represented by the following formula (V). Tons of-9-one:
(式中, R9代表氫原子、鹵素原子、碳數1〜12之直鏈狀、分 支狀或環狀烷基、環戊基、環己基、苯基、苄基、苯甲醯 基、碳數2〜12之烷醯基、碳數2〜12之烷氧基羰基(當構 -17- 200941136 成烷氧基之烷基之碳數在2以上時’烷基亦可經一個以上 之羥基取代,烷基鏈中間可具有一個以上之氧原子)、或 苯氧基羰基, R1Q、R12分別獨立代表苯基(可經碳數1〜6之烷基、 苯基或鹵原子取代)、碳數1~2 0之直鏈狀、分支狀或環 狀烷基(可經1個以上之羥基取代,烷基鏈中間可具有1 個以上之氧原子)、碳數5~8之環烷基、碳數2〜2 0之烷 醯基或苯甲醯基(可經碳數1~6之烷基或苯基取代); R11代表氫原子、苯基(可經碳數1〜6之烷基、苯基 或鹵原子取代)、碳數1~20之直鏈狀、分支狀或環狀烷 基(可經1個以上之羥基取代,烷基鏈中間可具有1個以 上之氧原子)、碳數5〜8之環烷基、碳數2~20之烷醯基 或苯甲醯基(可經碳數1~6之烷基或苯基取代));以及 以下列通式(VII )表示之化合物:(wherein R9 represents a hydrogen atom, a halogen atom, a linear one having a carbon number of 1 to 12, a branched or cyclic alkyl group, a cyclopentyl group, a cyclohexyl group, a phenyl group, a benzyl group, a benzamyl group, or a carbon number; Alkoxycarbonyl group having 2 to 12 alkyl groups and alkoxycarbonyl group having 2 to 12 carbon atoms (when the carbon number of the alkyl group of the structure of -17-200941136 alkoxy group is 2 or more, the alkyl group may be substituted by one or more hydroxyl groups) , the alkyl chain may have more than one oxygen atom in the middle, or a phenoxycarbonyl group, and R1Q and R12 each independently represent a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), and a carbon number. a linear, branched or cyclic alkyl group of 1 to 20 (which may be substituted by one or more hydroxyl groups, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, a carbon number of 2 to 2 alkyl alkanoyl or benzhydryl (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group); R11 represents a hydrogen atom, a phenyl group (alkyl group having a carbon number of 1 to 6) a phenyl group or a halogen atom substituted), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (which may be substituted by one or more hydroxyl groups, and may have one or more oxygen atoms in the middle of the alkyl chain), Carbon number 5 The 8 cycloalkyl group, having 2 to 20 carbon atoms of the acyl or benzoyl alkyl group (may be substituted by an alkyl group having 1 to 6 carbon atoms or the phenyl group)); and a compound represented by the following general formula (VII):
(式中, R13、R14及R19分別獨立代表碳數1〜12之直鏈狀、 分支狀或環狀烷基, R15' R16、R17及R18分別獨立代表氫原子或碳數1~6 -18- 200941136 之直鏈狀、分支狀或環狀烷基, Μ代表〇、S或NH, m及η各獨立代表0〜5之整數)。 其中,較佳者爲以式(V)表示之2-(乙醯氧基亞胺 基甲基)噻噸-9-酮以及以式(VI)表示之化合物。至於 市售品列舉爲汽巴特用化學品公司製造之 CGI-325、 Irgacure ΟΧΕ01、Irgacure ΟΧΕ02 等。該等照酯系光聚合 0 起始劑可單獨使用或組合兩種以上使用。 含有以通式(III)表示之構造之(X-胺基苯乙嗣系光 聚合起始劑(Β-2 )列舉爲2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙酮-1、2-苄基-2-二甲胺基-1- ( 4-嗎啉基苯基 )-丙-1-酮、2-(二甲胺基)-2-[(4-甲基苯基)甲基]-1-[4- (4-嗎啉基)苯基]-1-丁酮、Ν,Ν-二甲基胺基苯乙酮等 。市售品列舉爲汽巴特用化學品公司製造之Irgacure 907 、Irgacure 369、Irgacure 3 79 等 ° φ 含有以通式(IV)表示之構造之醯基磷氧化物系光聚 合起始劑(B-3 )列舉爲2,4,6-三甲基苯甲醯基二苯基磷 氧化物、雙(2,4,6·三甲基苯甲醯基)-苯基磷氧化物、雙 (2,6-二甲氧基二苯甲醯基)-2,4,4-三甲基-戊基磷氧化物 等。市售品列舉爲BASF公司製造之LUCILIN TPO、汽巴 特用化學品公司製造之Irgacure 819等。 該等光聚合起始劑(B)之調配率,相對於上述含有 羧酸之感光性樹脂(A) 100質量份,可較好自0.01 ~3 0質 量份,更好0.5〜15質量份之範圍選擇。當未達0.01質量 -19- 200941136 份時,於銅上之光硬化性不足,造成塗膜剝離、耐藥品性 等之塗膜特性降低因而較不適當。另一方面,當超過30 質量份時,光聚合起始劑(B)之阻焊劑塗膜表面上之光 吸收變強,而有深部硬化性降低之傾向,因此較不適當。 另外,含有以上述式(III)表示之構造之肟酯系光聚 合起始劑時,其調配量相對於上述含羧酸之感光性樹脂( A) 100質量份,宜自較好之〇.〇1〜20質量份,更好0.01〜 5質量份之範圍內選擇。 本發明之組成物可使用除上述化合物以外之光聚合起 始劑,或光聚合起始劑及增感劑,可列舉爲例如苯偶因化 合物、苯乙酮化合物、蒽醌化合物、噻噸酮化合物、縮酮 化合物、二苯甲酮化合物、咕噸酮化合物及三級胺化合物 等。 苯偶因化合物之具體例列舉爲例如苯偶因、苯偶因甲 基醚、苯偶因乙基醚、苯偶因異丙基醚。 苯乙酮化合物之具體例列舉爲例如苯乙酮、2,2-二甲 氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二 氯苯乙酮。 蒽醌化合物之具體例列舉爲例如2-甲基蒽醌、2-乙基 蒽醌、2-第三丁基蒽醌、1-氯蒽醌。 噻噸酮化合物之具體例列舉爲例如2,4-二甲基噻噸酮 、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮 縮酮化合物之具體例列舉爲例如苯乙酮二甲基縮酮、 -20- 200941136 苄基二甲基縮酮。 二苯甲酮化合物之具體例列舉爲例如二苯甲酮、4-苯 甲醯基二苯基硫醚、4-苯甲醯基-4’·甲基二苯基硫醚、4-苯甲醯基-4-乙基二苯基硫醚、4-苯甲醯基-4’-丙基二苯基 硫醚。 三級胺化合物之具體例列舉爲例如乙醇胺化合物、具 有二烷基胺基苯構造之化合物,例如4,4’-二甲基胺基二 φ 苯甲酮(日本曹達公司製造之NISSOKUA MABP ) 、4,4’- 二乙基胺基二苯甲酮(保土谷化學公司製造之EAB)等二 烷基胺基二苯甲酮、7-(二乙胺基)-4 -甲基-2H-1-苯并吡 喃-2-酮(7-(二乙胺基)-4-甲基香豆素)等含二烷基胺 基之香豆素化合物、4-二甲胺基苯甲酸乙酯(日本化藥公 司製造之KAYAKUA-EPA) 、2 -二甲基胺基苯甲酸乙酯( 國際生物合成公司製造之Quantacure DMB) 、4-二甲胺基 苯甲酸(正丁氧基)乙酯(國際生物合成公司製造之 〇 Quantacure BEA)、對-二甲胺基苯甲酸異戊基乙酯(日 本化藥公司製造之KAYAKUA-DMBI) 、4-二甲胺基苯甲 酸2-乙基己酯(Van Dyk公司製造之Esolol 507) 、4,4,-二乙基胺基二苯甲酮(保土谷化學公司製造之EAB )。 上述中,以噻噸酮化合物及三級胺化合物較佳。若含 有噻噸酮化合物,就深部硬化性方面而言較佳,其中較佳 者爲2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮 、2,4-二異丙基噻噸酮等噻噸酮化合物。 該等噻噸酮化合物之調配率相對於上述含羧酸之感光 -21 - 200941136 性樹脂(A) 100質量份,較好爲20質量份以下,更好爲 10寳量份以下之比例。當噻噸酮化合物之調配率過多時, 膜厚硬化性降低,由於與製品成本提高有關,因而較不佳 〇 至於三級胺化合物,較好爲具有二烷基胺基苯構造之 化合物,其中最佳者爲二烷基胺基二苯甲酮化合物、最大 吸收波長爲3 50〜410nm之含有二烷基胺基之香豆素化合物 。至於二烷基胺基二苯甲酮化合物,4,4’-二乙基胺基二苯 甲酮因毒性低而較佳。最大吸收波長爲350~410nm之含有 二烷基胺基之香豆素化合物,由於最大吸收波長在紫外線 範圍內,因此著色少,以無色透明之感光性組成物爲原料 ,利用著色顏料,可提供反映著色顏料本身之顏色之著色 阻焊劑膜。尤其,7-(二乙胺基)-4-甲基-2H-1-苯并吡 喃-2-酮對於波長400〜410nm之雷射光顯示優異之增感效 果而較佳。 該等三級胺化合物之調配率相對於上述含羧酸之感光 性樹脂(A) 100質量份,較好爲0.1~20質量份,更好爲 0 · 1 ~ 1 0質量份之比例。當三級胺化合物之調配率未達0 · 1 質量份時,有無法獲得足夠增感效果之傾向。當超過20 質量份時,因三級胺化合物使乾燥阻焊劑塗膜表面上之光 吸收變強,而有深部硬化性降低之傾向。 該光聚合起始劑、光聚合起始助劑與增感劑可單獨使 用或以兩種以上之混合物使用。 該等光聚合起始劑(B)、光聚合起始助劑及增感劑 -22- 200941136 之總量,相對於上述含羧酸之感光性樹脂(A) 100質量 份,以成爲35質量份以下之範圍較佳。當超過35質量份 時,由於該等光吸收而有深部硬化性降低之傾向。 接著,說明分子中具有2個以上乙烯性不飽和基之化 合物(C )。 本發明之光硬化性樹脂組成物中所用之分子中具有2 個以上乙烯性不飽和基之化合物(C)爲藉由照射活性能 φ 量線而光硬化,使上述含乙烯性不飽和基之含羧酸感光性 樹脂(A)不溶於鹼水溶液中或有助於其不溶化之化合物 。該等化合物列舉爲乙二醇、甲氧基四乙二醇、聚乙二醇 、丙二醇等二醇之二丙烯酸酯類;己二醇、三羥甲基丙烷 、季戊四醇、二季戊四醇、參一羥基乙基異氰尿酸酯等多 價醇或該等之環氧乙烷加成物或環氧丙烷加成物等之多價 丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及該 等之酚類之環氧乙烷加成物或環氧丙烷加成物等多價丙烯 Q 酸酯類;甘油二縮水甘油醚、甘油三縮水甘油醚、三羥甲 基丙烷三縮水甘油醚、三縮水甘油基異氰尿酸酯等縮水甘 油醚之多價丙烯酸酯類;及三聚氰胺丙烯酸酯,及/或對 應於上述丙烯酸酯之甲基丙烯酸酯類等。 再者,列舉有使甲酚酚醛清漆樹脂型環氧樹脂等多官 能基環氧樹脂與丙烯酸反應之環氧基丙烯酸酯樹脂,及進 而使其環氧基丙烯酸酯樹脂之羥基與季戊四醇三丙烯酸酯 等之羥基丙烯酸酯與異彿爾酮二異氰酸酯等之二異氰酸酯 之半胺基甲酸酯化合物反應而成之環氧基胺基甲酸酯丙烯 -23- 200941136 酸酯化合物等。該等環氧基丙基酸酯系樹脂不會使指觸乾 燥性下降,而可提升光硬化性。 該等分子中具有2個以上乙烯性不飽和基之化合物( C)之調配率,相對於上述含有羧酸之感光性樹脂(A) 1〇〇質量份,較好爲1〜100質量份,更好爲5~70質量份 之比例。當上述調配率未達1質量份時,光硬化性會降低 ,經活性能量線照射後藉由鹼顯像難以形成圖型,因而較 不佳。另一方面,當超過100質量份時,有對於鹼性水溶 液之溶解性下降,塗膜變脆之傾向,因此較不佳。 以下說明熱硬化性成分(D )。 本發明之光硬化性樹脂組成物爲了賦與耐熱性,可添 加熱硬化性成分(D)。最好爲分子中具有2個以上之環 狀醚基及/或環狀硫醚基(以下簡稱爲環狀(硫)醚基) 之熱硬化性成分(D )。 該等分子中具有2個以上之環狀(硫)醚基之熱硬化 性成分(D)中,可列舉爲分子中具有兩個以上之3、4或 5員環狀醚基、或環狀硫醚基之任一者或兩種基之化合物 ,例如分子內具有至少2個以上環氧基之化合物,亦即多 官能性環氧化合物(D-1),分子內具有至少2個以上之 氧雜環丁烷基之化合物,亦即多官能性氧雜環丁烷化合物 (D-2 ),分子內具有2個以上環狀硫醚基之化合物,亦 即環硫化物化合物(D-3 )等。 作爲上述多官能性環氧化合物(D-1 ),列舉有例如 日本環氧樹脂公司製造之 Epicoat 828、Epicoat 834、 -24- 200941136(wherein R13, R14 and R19 each independently represent a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, and R15' R16, R17 and R18 each independently represent a hydrogen atom or a carbon number of 1 to 6 -18 - 200941136 A linear, branched or cyclic alkyl group, Μ represents 〇, S or NH, and m and η each independently represent an integer from 0 to 5). Among them, preferred is 2-(ethyloxyiminomethyl)thioxanthene-9-one represented by the formula (V) and a compound represented by the formula (VI). As for the commercial products, CGI-325, Irgacure ΟΧΕ01, Irgacure ΟΧΕ02, etc. manufactured by Steam Batt Chemical Company are listed. The photo-esterification photopolymerization initiators may be used singly or in combination of two or more. (X-Aminostyrene-based photopolymerization initiator (Β-2) having a structure represented by the formula (III) is exemplified as 2-methyl-1-[4-(methylthio)phenyl] -2-morpholinylacetone-1, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-propan-1-one, 2-(dimethylamino)-2 -[(4-Methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone, anthracene, fluorene-dimethylaminoacetophenone, etc. The product is exemplified by Irgacure 907, Irgacure 369, Irgacure 3 79, etc., manufactured by Kabat Chemicals Co., Ltd. ° φ fluorenyl phosphorus oxide photopolymerization initiator (B-3) having a structure represented by the general formula (IV) Listed as 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, bis(2,4,6-trimethylbenzylidene)-phenylphosphorus oxide, double (2, 6-Dimethoxybenzhydryl)-2,4,4-trimethyl-pentylphosphorus oxide, etc. Commercially available products are manufactured by LUCILIN TPO, manufactured by BASF Corporation, and by Steam Batt Chemical Company. Irgacure 819, etc. The blending ratio of the photopolymerization initiator (B) is preferably from 0.01 to 30 parts by mass, more preferably 100 parts by mass, based on 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). In the range of from 0.5 to 15 parts by mass, when it is less than 0.01 mass -19 to 200941136 parts, the photocurability on copper is insufficient, and coating film properties such as peeling of the coating film and chemical resistance are lowered, which is not preferable. On the other hand, when it exceeds 30 parts by mass, the light absorption on the surface of the solder resist coating film of the photopolymerization initiator (B) becomes strong, and the deep hardenability tends to be lowered, so that it is less appropriate. When the oxime ester photopolymerization initiator of the structure represented by the formula (III) is used, the amount thereof is preferably 100 parts by mass relative to the carboxylic acid-containing photosensitive resin (A), preferably from 1 to 20 by mass. The composition of the present invention may be selected from the range of 0.01 to 5 parts by mass. The composition of the present invention may be a photopolymerization initiator other than the above compound, or a photopolymerization initiator and a sensitizer, and may, for example, be a benzoin. a compound, an acetophenone compound, an anthraquinone compound, a thioxanthone compound, a ketal compound, a benzophenone compound, a xanthone compound, a tertiary amine compound, etc. Specific examples of the benzoin compound are exemplified by, for example, benzoin Benzoin methyl ether, Equivalent ethyl ether, benzoin isopropyl ether. Specific examples of the acetophenone compound are exemplified by, for example, acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-di Ethoxy-2-phenylacetophenone and 1,1-dichloroacetophenone. Specific examples of the hydrazine compound are, for example, 2-methyl hydrazine, 2-ethyl hydrazine, and 2-third butyl. Base, 1-chloroindole. Specific examples of the thioxanthone compound are exemplified by, for example, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2 Specific examples of the 4-diisopropylthioxanthone ketal compound are, for example, acetophenone dimethyl ketal, -20-200941136 benzyl dimethyl ketal. Specific examples of the benzophenone compound are, for example, benzophenone, 4-benzylidene diphenyl sulfide, 4-benzylidene-4'methylpredyl sulfide, 4-phenylene Mercapto-4-ethyldiphenyl sulfide, 4-benzylidene-4'-propyldiphenyl sulfide. Specific examples of the tertiary amine compound are exemplified by, for example, an ethanolamine compound, a compound having a dialkylaminobenzene structure, such as 4,4'-dimethylaminobisφbenzophenone (NISSOKUA MABP manufactured by Nippon Soda Co., Ltd.), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co., Ltd.), such as dialkylaminobenzophenone, 7-(diethylamino)-4-methyl-2H- a dialkylamino group-containing coumarin compound such as 1-benzopyran-2-one (7-(diethylamino)-4-methylcoumarin), 4-dimethylaminobenzoic acid B Ester (KAYAKUA-EPA manufactured by Nippon Kayaku Co., Ltd.), 2-dimethylaminobenzoic acid ethyl ester (Quantacure DMB manufactured by International Biosynthesis Co., Ltd.), 4-dimethylaminobenzoic acid (n-butoxy) B Ester (Quantacure BEA manufactured by International Biosynthesis Co., Ltd.), isoamyl ethyl p-dimethylaminobenzoate (KAYAKUA-DMBI manufactured by Nippon Kayaku Co., Ltd.), 2-ethyl 4-dimethylaminobenzoate Hexyl ester (Esolol 507, manufactured by Van Dyk Co., Ltd.), 4,4,-diethylaminobenzophenone (EAB, manufactured by Hodogaya Chemical Co., Ltd.). Among the above, a thioxanthone compound and a tertiary amine compound are preferred. If it contains a thioxanthone compound, it is preferable in terms of deep hardenability, and among them, preferred is 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone. a thioxanthone compound such as 2,4-diisopropylthioxanthone. The blending ratio of the thioxanthone compound is preferably 20 parts by mass or less, more preferably 10 parts by weight or less, based on 100 parts by mass of the carboxylic acid-containing photosensitive resin (21). When the compounding ratio of the thioxanthone compound is too large, the film thickness hardenability is lowered, and it is less preferable because it is related to the increase in the cost of the product, and the tertiary amine compound is preferably a compound having a dialkylaminobenzene structure, wherein The most preferred is a dialkylaminobenzophenone compound, and a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of from 3 to 50 nm. As for the dialkylaminobenzophenone compound, 4,4'-diethylaminobenzophenone is preferred because of its low toxicity. A coumarin compound containing a dialkylamine group having a maximum absorption wavelength of 350 to 410 nm, which has a maximum absorption wavelength in the ultraviolet range, is less colored, and is provided as a raw material using a colorless and transparent photosensitive composition, and a coloring pigment is provided. A color solder mask film that reflects the color of the coloring pigment itself. In particular, 7-(diethylamino)-4-methyl-2H-1-benzopyran-2-one exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm. The compounding ratio of the tertiary amine compound is preferably 0.1 to 20 parts by mass, more preferably 0 to 1 to 10 parts by mass, per 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). When the compounding ratio of the tertiary amine compound is less than 0.1 part by mass, there is a tendency that a sufficient sensitizing effect cannot be obtained. When it exceeds 20 parts by mass, the light absorption on the surface of the dry solder resist coating film is enhanced by the tertiary amine compound, and the deep hardenability tends to be lowered. The photopolymerization initiator, photopolymerization initiation aid and sensitizer may be used singly or in combination of two or more. The total amount of the photopolymerization initiator (B), the photopolymerization initiation aid, and the sensitizer-22-200941136 is 35 masses based on 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). The following ranges are preferred. When it exceeds 35 parts by mass, the deep curing property tends to decrease due to such light absorption. Next, a compound (C) having two or more ethylenically unsaturated groups in the molecule will be described. The compound (C) having two or more ethylenically unsaturated groups in the molecule used in the photocurable resin composition of the present invention is photocured by irradiation of an active energy φ line to cause the above-mentioned ethylenically unsaturated group. The carboxylic acid-containing photosensitive resin (A) is insoluble in an aqueous alkali solution or a compound which contributes to its insolubilization. These compounds are exemplified by diacrylates of diols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, and hydroxyl groups. a polyvalent alcohol such as an ethyl isocyanurate or a polyvalent acrylate such as an ethylene oxide adduct or a propylene oxide adduct; a phenoxy acrylate, a bisphenol A diacrylate, And polyvalent propylene Q acid esters such as ethylene oxide adducts or propylene oxide adducts of such phenols; glycerol diglycidyl ether, glycerol triglycidyl ether, trimethylolpropane triglycidyl a polyvalent acrylate of a glycidyl ether such as ether or triglycidyl isocyanurate; and a melamine acrylate, and/or a methacrylate corresponding to the above acrylate. Further, an epoxy acrylate resin obtained by reacting a polyfunctional epoxy resin such as a cresol novolac resin epoxy resin with acrylic acid, and a hydroxyl group of the epoxy acrylate resin and pentaerythritol triacrylate are listed. An epoxy group urethane propylene-23-200941136 acid ester compound obtained by reacting a hydroxy acrylate with a semi-carbamate compound of a diisocyanate such as isophorone diisocyanate. These epoxy propyl ester-based resins can improve the photocurability without deteriorating the dryness of the touch. The compounding ratio of the compound (C) having two or more ethylenically unsaturated groups in the molecule is preferably from 1 to 100 parts by mass based on 1 part by mass of the photosensitive resin (A) containing the carboxylic acid. More preferably in the proportion of 5 to 70 parts by mass. When the above compounding ratio is less than 1 part by mass, the photocurability is lowered, and it is difficult to form a pattern by alkali development after irradiation with an active energy ray, which is not preferable. On the other hand, when it exceeds 100 parts by mass, the solubility in the alkaline aqueous solution is lowered, and the coating film tends to be brittle, which is not preferable. The thermosetting component (D) will be described below. The photocurable resin composition of the present invention may be provided with a heat curable component (D) in order to impart heat resistance. It is preferably a thermosetting component (D) having two or more cyclic ether groups and/or cyclic thioether groups (hereinafter simply referred to as cyclic (thio)ether groups) in the molecule. Among the thermosetting components (D) having two or more cyclic (thio)ether groups in the molecule, there are two or more three, four or five membered cyclic ether groups or a ring in the molecule. Any one of the thioether groups or a compound of the two groups, for example, a compound having at least two or more epoxy groups in the molecule, that is, a polyfunctional epoxy compound (D-1) having at least two or more in the molecule. a compound of an oxetanyl group, that is, a polyfunctional oxetane compound (D-2), a compound having two or more cyclic thioether groups in a molecule, that is, an episulfide compound (D-3) )Wait. Examples of the polyfunctional epoxy compound (D-1) include Epicoat 828, Epicoat 834, and -24-200941136 manufactured by Nippon Epoxy Co., Ltd.
Epicoat 1001、Epicoat 1004,大日本油墨化學公司製造之 Epiclon 840、Epiclon 8 50、Epiclon 1 050、Epiclon 2055, 東都化成公司製造之EPOTOT YD-011、YD-013、YD-127 、YD-128,道化學公司製造之 D.E.R.317、D.E.R.331、 D.E.R.661、D.E.R.664,汽巴特用化學品公司之Araldide 6071、Araldide 6084 ' Araldide GY250 ' Araldide GY260 ,住友化學公司製造之Sumi-epoxy ESA-011、ESA-014、 |^ELA-115、ELA-128,旭化成工業公司製造之A.E.R.330、 A.E.R.331、A.E.R.661、A.E.R.6 64 等(均爲商品名)之雙 酚A型環氧樹脂;日本環氧樹脂公司製造之EPICOAT YL 903,大日本油墨化學工業公司製造之 Epiclon 152、 Epiclon 165,東都化成公司製造之EPOTOT YDB-400、 YDB-500,道化學公司製造之 D.E.R.542,汽巴特用化學 品公司之 Araldide 801 1,住友化學公司製造之8111111-epoxy ESB-400、ESB-700,旭化成工業公司製造之 φ A_E.R.71 1、A.E.R.714等(均爲商品名)之溴化環氧樹脂 :日本環氧樹脂公司製造之EPICOAT 152、EPICOAT 154 ,道化學公司製造之D.E.R.431、D.E.R.438,大日本油墨 化學工業公司製造之 Epiclon N-730、Epiclon N-770、 Epiclon N-8 65,東都化成公司製造之EPOTOT YDCN-701 、YDCN-704,汽巴特用化學品公司之 Araldide ECN1235 、Araldide ECN 1 273 ' Araldide ECN1 299 、 Araldide XPY307,日本化藥公司製造之EPPN-201、EOCN-1025、 EOCN-1020、EOCN-104S、RE-3 06,住友化學公司製造之 -25- 200941136Epicoat 1001, Epicoat 1004, Epiclon 840, Epiclon 8 50, Epiclon 1 050, Epiclon 2055 manufactured by Dainippon Ink Chemical Co., Ltd., EPOTOT YD-011, YD-013, YD-127, YD-128 manufactured by Dongdu Chemical Co., Ltd. DER317, DER331, DER661, DER664 manufactured by Chemical Company, Araldide 6071 from Arbatide Chemical Company, Araldide 6084 'Araldide GY250 ' Araldide GY260, Sumi-epoxy ESA-011, ESA-014 manufactured by Sumitomo Chemical Co., Ltd. , |^ELA-115, ELA-128, AER330, AER331, AER661, AER6 64, etc. (all trade names) manufactured by Asahi Kasei Industrial Co., Ltd. (bis-type A epoxy resin); manufactured by Japan Epoxy Resin Co., Ltd. EPICOAT YL 903, Epiclon 152, Epiclon 165 manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPOTOT YDB-400, YDB-500 manufactured by Dongdu Chemical Co., Ltd., DER542 manufactured by Dao Chemical Co., Ltd., Araldide 801 from Kabat Chemical Company 1, 8111111-epoxy ESB-400, ESB-700 manufactured by Sumitomo Chemical Co., Ltd., bromine ring of φ A_E.R.71 1 and AER714 (all trade names) manufactured by Asahi Kasei Industrial Co., Ltd. Resin: EPICOAT 152, EPICOAT 154 manufactured by Japan Epoxy Resin Co., Ltd., DER431, DER438 manufactured by Dao Chemical Co., Ltd., Epiclon N-730, Epiclon N-770, Epiclon N-8 65 manufactured by Dainippon Ink Chemical Industry Co., Ltd. EPOTOT YDCN-701 and YDCN-704 manufactured by Dongdu Chemical Co., Ltd., Araldide ECN1235, Araldide ECN 1 273 ' Araldide ECN1 299, Araldide XPY307, manufactured by Nippon Kayaku Co., Ltd., and EPPN-201, EOCN-1025, manufactured by Nippon Kayaku Co., Ltd. EOCN-1020, EOCN-104S, RE-3 06, manufactured by Sumitomo Chemical Co., Ltd. -25-200941136
Sumi-epoxy ESCN-195X、ESCN-220,旭化成工業公司製 造之A.E.R. ECN-235、ECN-299等(均爲商品名)之酚醛 清漆型環氧樹脂;大日本油墨化學工業公司製造之 Epiclon 830,日本環氧樹脂公司製造之EPICOAT 807,東 都化成公司製造之 EPOTOT YDF-170、YDF-175、YDF-2 004,汽巴特用化學品公司之Araldide XPY306等(均爲 商品名)之雙酚F型環氧樹脂;東都化成公司製造之 EPOTOT ST-2004、ST-2007、ST-3000 (商品名)等之氫 化雙酚 A型環氧樹脂;日本環氧樹脂公司製造之 EPICOAT 604,東都化成公司製造之EPOTOT YH-434,汽 巴特用化學品公司之Araldide MY720,住友化學公司製造 之Sumi-epoxy ELM-120等(均爲商品名)之縮水甘油胺 基型環氧樹脂;汽巴特用化學品公司之 Araldide CY-350 (商品名)等之乙內醯脲型環氧樹脂;Dicel化學公司製 造之 Celloxide 2021,汽巴特用化學品公司之 Araldide CY175、CY179等(均爲商品名)之脂環式環氧樹脂;日 本環氧樹脂公司製造之 YL-933,道化學公司製造之 T.E.N·, EPPN-501、EPPN-502等(均爲商品名)之三羥基 苯基甲烷型環氧樹脂:日本環氧樹脂公司製造之YL-6056 、YX-4000、YL-6121 (均爲商品名)等之雙二甲苯酣型 或聯酚型環氧樹脂或該等之混合物;日本化藥公司製造之 EBPS-200,旭電化工業公司製造之EPX-30,大日本油墨 化學工業公司製造之EXA-1514(商品名)等之雙酣s型 環氧樹脂;日本環氧樹脂公司製造之EPIC0 AT 15 7S (商 200941136 品名)等之雙酚A酚醛清漆型環氧樹脂;日本環氧樹脂公 司製造之EPICOAT YL-931,汽企巴特用化學品公司之 Araldide 163等(均爲商品名)之四苯醯基乙烷型環氧樹 脂;汽巴特用化學品公司之Araldide PT810,日產化學工 業公司製造之TEPIC (均爲商品名)之雜環式環氧樹脂; 日本油脂公司製造之Blenmer DGT等二縮水甘油基苯二甲 酸酯樹脂;東都化成公司製造之ZX- 1 063等四縮水甘油基 ❹ 二甲苯醯基乙烷樹脂;新日鐵化學公司製造之ESN-190、 ESN-360,大日本油墨化學工業公司製造之 HP-4032、 EXA-475 0、EXA-4700等含萘基之環氧樹脂;大日本油墨 化學工業公司製造之 HP-7200、HP-7200H等具有二環戊 二烯骨架之環氧樹脂;日本油脂公司製造之CP-50S、CP-50M等縮水甘油基甲基丙烯酸酯共聚物系環氧樹脂;進而 有環己基馬來西亞胺與縮水甘油基甲基丙烯酸酯之共聚合 環氧樹脂;環氧改質之聚丁二烯橡膠衍生物(例如,Dicel 〇 化學工業製造之PB-3600等)、CTBN改質之環氧樹脂( 例如,東都化成公司製造之 YR-102、YR-450等)等,但 並不限於該等。該等環氧樹脂可單獨使用或組合兩種以上 使用。該等中尤其以酚醛清漆型環氧樹脂、雜環式環氧樹 脂、雙酚A型環氧樹脂或該等之混合物較佳。 上述多官能基氧雜環丁烷化合物(D-2)列舉爲雙[( 3-甲基-3-氧雜環丁基甲氧基)甲基]醚、雙[(3_乙基_3_氧 雜環丁基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁 基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁基甲氧 -27- 200941136 基)甲基]苯、丙烯酸(3 -甲基-3·氧雜環丁基)甲酯、丙 烯酸(3 -乙基-3:氧雜環丁基)甲酯、甲基丙烯酸(3 -甲 基-3-氧雜環丁基)甲酯、甲基丙烯酸(3-乙基-3-氧雜環 丁基)甲酯或該等之寡聚物或共聚物等多官能性氧雜環丁 烷類,以及氧雜環丁烷醇與酚醛清漆樹脂、聚(對-羥基 苯乙烯)、CALDO型雙酚類、杯芳烴類、間苯二酚杯芳 烴(calix resorcin are ne )類、或倍半矽氧烷等具有羥基之 樹脂之醚化物等。另外,列舉爲具有氧雜環丁烷環之不飽 和單體與(甲基)丙烯酸烷酯之共聚物等。 上述環硫化物化合物(D-3 )列舉爲例如日本環氧樹 脂公司製造之雙酚A型環硫化物樹脂YL7000等。又,亦 可使用利用同樣之合成方法,以硫原子置換酚醛清漆型環 氧樹脂之環氧基之氧原子之環硫化物樹脂等。 上述分子中具有2個以上環狀(硫)醚基之熱硬化性 成分(D)之調配率,相對於上述含有羧酸之感光性樹脂 (A)之羧基1當量,較好爲〇.6~2.5當量,更好爲 0.8〜2.0當量之範圍。分子中具有2個以上環狀(硫)醚 基之熱硬化性成分(D)之調配量未達0.6當量時,爲造 成阻焊劑膜中羧基殘留之原因,該情況下由於耐熱性、耐 鹼性、電絕緣性等下降,因而較不佳。另一方面,當超過 2.5當量時,由於乾燥膜中殘留低分子量環狀(硫)醚基 ,因此有塗膜強度等降低之情況而較不佳。 當本發明之光硬化性樹脂組成物中使用熱硬化性成分 (D)時,較好合併使用熱硬化性觸媒。該等熱硬化觸媒 -28- 200941136 列舉爲例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲 基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪 唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等之唑衍生物 ;二氰基二醯胺、苄基二甲基胺、4-(二甲胺基)-N,N-二甲基苄基胺、4 -甲氧基-Ν,Ν -二甲基苄基胺、4 -甲基-Ν,Ν-二甲基苄基胺等胺化合物,己二酸二醯肼、癸二酸二 醯肼等醯肼化合物;三苯基膦等磷化合物等,另外市售者 φ 列舉爲例如四國化成工業公司製造之2ΜΖ-Α、2ΜΖ-ΟΚ、 2ΡΗΖ、2Ρ4ΒΗΖ、2Ρ4ΜΗΖ (均爲咪唑系化合物之商品名) 、SAN-APRO 公司製造之 U-CAT3503N、U-CAT3502T (均 爲二甲基胺之嵌段異氰酸酯化合物之商品名)、DBU、 DBN、U-CATSA102、U-CAT5002 (均爲二環式脒化合物 及其鹽)等。尤其,並不限定於該等’若是環氧樹脂及氧 雜環丁烷化合物之熱硬化觸媒,或是促進環氧基及/或氧 雜環丁烷基與羧基之反應,則單獨使用或混合兩種以上使 ❹ 用均無妨。又,可使用胍胺、乙醯基胍胺、苯并胍胺、三 聚氰胺、2,4-二胺基-6-甲基丙烯醯基氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6·二胺基-S-三嗪 .異氰尿酸加成物、2,4 -二胺基-6-甲基丙嫌釀氧基乙基- S-三嗪·異氰尿酸加成物等之S-三嗪衍生物,較好亦將作爲 密著性賦予劑功能之化合物與上述熱硬化性觸媒併用。 該等熱硬化性觸媒之調配率,以通常量之比例已足夠 ,例如相對於含有羧酸之感光性樹脂(A )或熱硬化性成 分(D ) 100質量份,較好爲0.1〜20質量份,更好爲 -29- 200941136 〇·5〜15·0質量份。 接著,說明本發明之光硬化性樹脂組成物中可使用之 著色劑(Ε )。 本發明之光硬化性樹脂組成物可調配著色劑。至於著 色劑亦可使用紅、藍、綠、黃、黑等慣用之習知著色劑、 顏料、染料、色素之任一種。但,就降低環境負荷及對人 體影響之觀點而言,較好不含鹵素及偶氮化合物。 藍色著色劑: 藍色著色劑有酞花菁系、蒽醌系,顏料系係分類爲顏 料(pigment )之化合物,具體而言列舉附有如下述之色 彩係數(C.I.;染料及色彩協會(The Society of Dyers and Colourists)發行)編號者:顏料藍15、顏料藍15:1 、顏料藍15:2、顏料藍15:3、顔料藍15:4、顏料藍15:6 、顏料藍16、顏料藍60。 染料係可使用溶劑藍35、溶劑藍63、溶劑藍68、溶 劑藍70、溶劑藍83、溶劑藍87、溶劑藍94、溶劑藍97、 溶劑藍122、溶劑藍136、溶劑藍67、溶劑藍70等。除上 述外,亦可使用經金屬取代或未經取代之酞花菁化合物。 綠色著色劑: 綠色著色劑同樣有酞花菁系、蒽醌系,具體而言可使 用顏料綠7、顏料綠36、溶劑綠3、溶劑綠5、溶劑綠20 、溶劑綠28等。除上述外,亦可使用經金屬取代或未經 取代之酞花菁化合物。 黃色著色劑: -30- 200941136 、縮合偶氮系、苯 具體而言列舉爲下 黃色著色劑爲單偶氮系、二偶氮系 并咪唑酮系、異吲哚酮系、蒽醌系等, 列者。 蒽醌系:溶劑黃163、顏料黃 顏枓黃108、顏料 黃193、顏料黃顏料黃〗"、顔料黃2〇2。 異_嗣系:顏料黃110、顏料黃109、顏料黃139、 _料黃179、顏料黃185。 、 Ο 縮合偶氮系:顏料黃93'顔料黃94、顏料黃95 料黃128、顏料黃155、顏料黃I66、顔料黃180。 苯并咪唑酮系:顏料黃12〇、顏料 頭料黃151、顏料黃154 、顏料黃156、顏料黃175、顔料黃181。 單偶氣系:顏料黃1、2、3、4、s Λ 6' ΐ〇. 12, 61、62、62:1、65、73、74、75、97、1〇〇、1〇4 1〇5 111、116、167、168、169、1 82、1 83。 二偶氮系:顏料黃 12、13、14、16、17、55、63、8ι 、83 、 87 、 126 、 127 、 152 、 170 、 172 、 174 、 176 、 188 、 198 ° 紅色著色劑: 紅色著色劑有單偶氮系、二偶氮系、可溶性偶氮染料 系、苯并咪唑酮系、茈系、二酮吡咯并吡咯系、縮合偶氮 系、蒽醌系、喹吖啶酮系等’具體而言列舉爲下列者。 單偶氣系:顏料紅 1、2、3、4、5、6、8、9、12、 、15、 16、 17、 21、 22、 23、 31、 32、 112、 114、 146、 U7、151、170、184、187、188、193、210、245、253、 -31 - 200941136 258 ' 266、267、268、269。 二偶氮系:顏料紅37、38、41。 可溶性單偶氮染料系:顏料紅48:1、48:2、48:3、 48:4 、 49:1 、 49:2 、 50:1 、 52:1 、 52:2 、 53:1 、 53:2 、 57:1 、58:4 、 63:1、 63:2、 64:1、 68 。 苯并咪唑酮系:顏料紅171、顏料紅175、顏料紅176 、顏料紅185、顏料紅208。 茈系:溶劑紅1 3 5、溶劑紅1 7 9、顏料紅1 2 3、顏料紅 149、顏料紅166、顏料紅178、顏料紅179、顏料紅190 、顏料紅194、顏料紅224。 二酮吡咯并吡咯系:顏料紅254、顏料紅25 5、顏料 紅264、顏料紅270、顏料紅272。 縮合偶氮系:顏料紅220、顏料紅144、顏料紅166' 顏料紅214、顏料紅220、顏料紅221、顔料紅242。 蒽醌系:顏料紅168、顏料紅I77、顏料紅216、溶劑 紅149、溶劑紅1 5 0、溶劑紅5 2、溶劑紅2 0 7。 喹吖啶酮系:顏料紅122、顏料紅202、顏料紅206、 顏料紅207、顏料紅209。 其他,亦可添加以調整色調爲目的之紫色、橙色、棕 色、黑色等之著色劑。 若具體例示,爲顏料紫19、23、29、32、36、38、42 、溶劑紫13、36、C.I.顏料橙1、C.I.顏料橙5、C.I.顏料 橙 13、(:.1.顏料橙14、(:.1.顏料橙 16、C.I.顏料橙 17、 C.I.顏料橙24、C.I.顏料橙34、C_I.顏料橙36、C.I.顏料 -32- 200941136 橙38、C.I.顏料橙40、C.I.顏料橙43、C.I.顏料橙46、 C.I.顏料橙49、c.l.顏料橙51、C_I.顏料橙61、c.l.顏料 橙63、C.I.顏料橙64、C.I.顏料橙71、C.I.顏料橙73、 C.I.顏料棕23、C.I.顏料棕25、C.I.顏料黑1、C.I.顏料黑 7等。 著色劑之具體調配比例受到所用著色劑種類及其他添 加劑等種類之影響而無法一槪而論,但相對於本發明之感 0 光性樹脂組成物之含羧酸感光性樹脂100質量份,較好調 配〇質量份至5質量份。可更好以0.05質量份至3質量 份使用之特佳著色劑,於藍色與綠色爲酞花菁系、蒽醌系 ,於黃色爲蒽醌系,於紅色爲二酮吡咯并吡咯系、蒽醌系 ,且不含有鹵素原子者。又,顏料系之藍色及綠色就耐熱 性觀點而言爲較佳,染料系之藍、綠及紅色著色劑就感度 及解像性之觀點而言爲較佳。 本發明之光硬化性樹脂組成物,爲提高其塗膜之物理 〇 強度,而可因應必要配合塡充劑。該等塡充劑可使用習知 慣用之無機或有機塡充劑,但尤其較好使用硫酸鋇、球狀 氧化矽以及滑石。再者,亦可使用於具有1個以上乙烯性 不飽和基之化合物或上述多官能環氧樹脂(D-1)中分散 有奈米氧化矽之Hanse-Chemie公司製之NANOCRYL (商 品名) XP 03 96、XP 0596、XP 073 3、XP 0746、XP 0765 、XP 0768、XP 0953、XP 0954、XP 1045 (均爲製品等級 名)或Hanse-Chemie公司製之NANOPOX (商品名)XP 0516、XP 0525、XP 0314(均爲製品等級名)等。該等可 -33- 200941136 單獨使用或組合2種以上使用。 此塡充劑之調配率,對於上述含有羧酸之感光性樹脂 (A) 100質量份,較好爲300質量份以下,更好爲 0.1 -300質量份,最好爲〇.1〜15〇質量份。於塡充劑之調 配率超過300質量份時,有感光性組成物之黏度便高使印 刷性降低,硬化物變脆之情況,故而較不佳。 再者’本發明之光硬化性樹脂組成物,可使用有機溶 劑用於合成上述含有羧酸之感光性樹脂(A)或調製組成 物或用於調整塗佈於基板或承載膜上之黏度。 該等有機溶劑,可舉例爲酮類、芳香族烴類、二醇醚 類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴類、石油系 溶劑等。更具體而言,爲甲基乙基酮、環己酮等之酮類; 甲苯、二甲苯、四甲基苯等之芳香族烴類;溶纖劑、甲基 溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇 、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基 醚、三乙二醇單乙基醚等之二醇醚類;乙酸乙酯、乙酸丁 酯、二丙二醇甲基醚乙酸酯' 丙二醇甲基醚乙酸酯、丙二 醇乙基醚乙酸酯、丙二醇丁基醚乙酸酯等之酯類;乙醇、 丙醇、乙二醇、丙二醇等之醇類;辛烷、癸烷等之脂肪族 烴;石油醚、石油腦、氫化石油腦、溶劑石油腦等之石油 系溶劑。該等有機溶劑可單獨使用或以2種以上之混合物 使用。 本發明之光硬化性樹脂組成物,進而可因應需要,調 配氫醌、氫醌單甲基醚、第三丁基兒茶酚、焦掊酚、吩噻 -34- 200941136 嗪等之已知慣用之熱聚合抑制劑;微粉氧化矽、有機膨潤 土、蒙脫土等之已知慣用增黏劑;矽氧系、氟系、高分子 系等之消泡劑及/或平流劑、咪唑系、噻唑系、三唑系等 之矽烷偶合劑、抗氧化劑、防銹劑等之已知慣用之添加劑 類。 本發明之光硬化性樹脂組成物係以例如前述有機溶劑 調整至適合塗佈方法之黏度,於基材上,藉由浸塗法、流 ❹ 塗法、輥塗法、桿塗法、網版印刷法、簾塗法等塗佈後, 於約60~100°C之溫度,使組成物中所含之有機溶劑揮發乾 燥(暫時性乾燥),藉此形成不觸黏之塗膜。又,將本發 明之樹脂組成物塗佈於承載膜上,經乾燥做成乾膜,藉由 將此乾膜捲取者貼合在基材上,可形成樹脂絕緣層。 如上述所得之塗膜或在承載膜上之樹脂層(與前述「 塗膜」一起稱爲「樹脂層」),藉由活性能量線之照射而 曝光,使曝光部(受活性能量線照射之部分)硬化。 © 具體而言,藉由接觸式(或非接觸式),通過形成有 圖型之光罩選擇性地藉活性能量線加以曝光或利用雷射直 接曝光機等,藉由活性能量線直接描繪而使圖型曝光,未 曝光部以稀鹼性水溶液(例如0.3〜3 %碳酸鈉水溶液)顯 像而形成光阻圖型。進而,於例如約140〜180°C之溫度加 熱而熱硬化,藉此使上述之含羧酸之感光性樹脂(A)之 羧基與分子中具有2個以上環狀醚基及/或環狀硫醚基之 熱硬化性成分反應,可形成耐熱性、耐藥品性、耐吸濕性 、密著性、電特性等諸特性均優異之硬化塗膜。 -35- 200941136 作爲上述基材,可舉例有使用紙酚'紙環氧基、玻璃 布環氧、玻離聚醯亞胺、玻璃布/不織布環氧、玻璃布/紙 環氧、合成纖維環氧、氟·聚乙烯· PPO·氰酸酯等之高 頻電路用貼銅層合板等之材質者之所有等級(FR-4 )之貼 銅層合板、其他聚醯亞胺薄膜、PET薄膜、玻璃基板、陶 瓷基板、晶圓板等。 本發明之光硬化性樹脂組成物塗佈後進行之揮發乾燥 ,可使用熱風循環式乾燥爐、IR爐、加熱板、通氣烘箱等 (使用具備由蒸氣引起之空氣加熱方式之熱源者之乾燥機 內之熱風對流接觸之方法以及由噴嘴吹附支持體之方式) 進行。 作爲上述活性能量線照射用之曝光機,可使用紫外線 照射裝置以及直接描繪裝置(例如由自電腦之CAD數據 以直接雷射描繪圖像之雷射直接呈像裝置)。作爲活性能 量線,只要使用最大波長在3 5 0〜4 1 Onm範圍之雷射光,則 爲氣體雷射、固體雷射任一者均可。又,其曝光量隨著膜 厚等而異,但一般可爲 5~200 mJ/cm2,較好爲 5〜100 mJ/cm2,又更好爲5~50 mJ/cm2之範圍。作爲上述直接描 繪裝置,可使用例如日本ORBETECH公司製、PENTAX公 司製等,只要以最大波長3 5 0~410nm之雷射光震盪之裝置 即可而可使用任何裝置。 作爲上述顯像方法,可由浸漬法、淋洗法、噴霧法、 刷塗法等,使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、 磷酸鈉、矽酸鈉、氨、胺類等之鹼水溶液作爲顯像液而進 -36- 200941136 行0 [實施例] 以下顯示實施例以具體說明本發明,但本發明並不限 定於下述實施例。 <含羧酸之感光性樹脂(A)之合成> Φ 樹脂合成例1 ( A-1) 於600克二乙二醇單乙基醚乙酸酯中添加44 2.2份( 3.3莫耳)二羥甲基丙酸、1031.8份(6.7莫耳)甲基丙烯 酸酐、3.0份甲基氫醌、8_5份之三苯基膦,且在95 °C下進 行反應8小時。接著饋入800克二乙二醇單乙基醚乙酸酯 、2140克鄰甲酚酚醛清漆型環氧樹脂[大日本油墨化學工 業股份有限公司製造,EPICLON N-695,軟化點95°C,環 氧當量214,平均官能基數7.6](縮水甘油基數(芳香環 〇 總數):10.0莫耳)、3.0份甲基氫醌、1 000份卡必醇乙 酸酯,攪拌下加熱至90 °C,使反應混合物溶解。接著使反 應溶液冷卻至60°C’饋入10.0份三苯基膦’加熱至100°c ,進行反應約30小時。接著’饋入912份(6.0莫耳)四 氫苯二甲酸酐,加熱至95 °C,進行反應約6小時後,使之 冷卻,獲得固體成分之酸價74mgKOH/g之固成份濃度 65%之含羧酸感光性樹脂(清漆A-1 )。 樹脂合成例2 ( A-2) -37- 200941136 於800克二乙二醇單乙基醚乙酸酯中添加442.2份( 3.3莫耳)二羥甲基丙酸、1031.8份(6.7莫耳)甲基丙烯 酸酐、3.0份甲基氫醌、8.5份之三苯基膦,且在95 °C下進 行反應8小時。接著饋入1〇〇〇克二乙二醇單乙基醚乙酸 酯、2846.2克鄰甲酚酚醛清漆型環氧樹脂[大日本油墨化 學工業股份有限公司製造,EPICLON N-695,軟化點95°C ,環氧當量214,平均官能基數7.6](縮水甘油基數(芳 香環總數):13.3莫耳)、442.2份(3.3莫耳)二羥甲基 丙烷、3.0份甲基氫醌、13 00份卡必醇乙酸酯,攪拌下加 熱至90°C,使反應混合物溶解。接著使反應溶液冷卻至 6〇t:,饋入12.0份三苯基膦,加熱至100°C,進行反應約 25小時。接著,於其中饋入1064份(7.0莫耳)四氫苯 二甲酸酐,加熱至95 °C,進行反應約6小時後,使之冷卻 ,獲得固體成分之酸價67mgKOH/g之固體成份濃度65% 之含羧酸感光性樹脂(清漆A-2)。 樹脂合成例3 ( A-3 ) 於600克二乙二醇單乙基醚乙酸酯中添加670份( 5.0莫耳)二羥甲基丙酸、1.5份甲基氫醌、7.5份之三苯 基膦,攪拌下加熱至使之溶解。在2小時內於其中緩 慢滴加溶解於75 0克二乙二醇單乙基醚乙酸酯中之770份 (5.0莫耳)甲基丙烯酸酐,隨後進行反應5小時。接著 饋入2140克鄰甲酚酚醛清漆型環氧樹脂[大日本油墨化學 工業股份有限公司製造,EPICLON N-695,軟化點95 °C, 200941136 環氧當量214,平均官能基數7.6](縮水甘油基數(芳香 環總數):10.0莫耳)、3_5份甲基氫醌、1100份卡必醇 乙酸酯,攪拌下加熱至9 0 °C,使反應混合物溶解。接著使 反應溶液冷卻至60°C,饋入12.0份三苯基膦,加熱至 100 °C,進行反應約25小時。接著,於其中饋入1 0 64份 (7.0莫耳)四氫苯二甲酸酐,加熱至95 °C,進行反應約 6小時後,使之冷卻,獲得固體成分之酸價85mg KOH/g Q 之固體成份濃度65%之含羧酸感光性樹脂(清漆A-3 )。 樹脂合成例4 ( A-4) 將400份環氧當量800、軟化點79 °C之雙酚F型固型 環氧樹脂與925份表氯醇及462.5份二甲基亞楓溶解後, 攪拌下於70 °C在1〇〇分鐘內添加81.2份98.5%之NaOH, 添加後再於70 °C下進行反應3小時。接著減壓餾除過量未 反應之表氯醇及二甲基亞礪之大部分,使含有副產物鹽及 Q 二甲基亞颯之反應產物溶解於750份甲基異丁基酮中,進 而添力Π 10份之30% NaOH且在70 °c下反應1小時。反應 結束後,以200份之水進行水洗兩次。油水分離後,自油 層蒸餾回收甲基異丁基酮,獲得370份環氧當量290、軟 化點62°C之環氧樹脂(a-Ι )。 接著於600克二乙二醇單乙基醚乙酸酯中添加442.2 份(3.3莫耳)二羥甲基丙酸、1031.8份(6.7莫耳)甲基 丙烯酸酐、3.0份甲基氫醌、8.5份之三苯基膦,且在95 °C 下進行反應8小時。接著饋入700克二乙二醇單乙基醚乙 -39- 200941136 酸酯、2900份(10莫耳)環氧樹脂(a-i) 、3.0份甲基 氫醌、1〇〇〇份卡必醇乙酸酯,攪拌下加熱至90 °C,使反 應混合物溶解。接著,使反應溶液冷卻至60 °C,饋入16.7 份三苯基膦’加熱至1〇〇°C,進行反應約32小時。接著, 於其中饋入786份(7.86莫耳)琥珀酸酐、450份卡必醇 ,加熱至95 °C,進行反應約6小時,使之冷卻後,獲得固 體成分之酸價爲85mgKOH/g之固體成份濃度65%之含羧 酸感光性樹脂(清漆A-4)。 樹脂合成例5 ( A-5) 於700克二乙二醇單乙基醚乙酸酯中添加44 2.2份( 3.3莫耳)二羥甲基丙酸、1031.8份(6.7莫耳)甲基丙烯 酸酐、3.0份甲基氫醌、8.5份之三苯基膦,且在951下進 行反應8小時。接著饋入95 0克二乙二醇單乙基醚乙酸酯 、2140克鄰甲酚酚醛清漆型環氧樹脂[大日本油墨化學工 業股份有限公司製造’ EPICLON N-695’軟化點95°C ’環 氧當量214,平均官能基數7.6](縮水甘油基數(芳香環 總數):1〇.〇莫耳)、3_〇份甲基氫醌、1〇00份卡必醇乙 酸酯,於90 °C加熱攪拌,使反應混合物溶解。接著’使反 應溶液冷卻至60饋入10.0份三苯基膦’加熱至100°c ,進行反應約30小時。接著,於其中饋入1140·0份(7.5 莫耳)四氫苯二甲酸酐,加熱至9 5 °c ’進行反應約6小時 。進而,於所得反應溶液中饋入213·0克(1·5莫耳)之 甲基丙烯酸縮水甘油酯,且在115 °C下進行反應4小時’ 65% 200941136 獲得固體成分之酸價爲68mgKOH/g之固體成份濃度 之含羧酸感光性樹脂(清漆A-5)。 比較合成例1 ( R-1) 於600克二乙二醇單乙基醚乙酸酯中添加1070 甲酚酚醛清漆型環氧樹脂[大日本油墨化學工業股份 公司製造,EPICLON N-695,軟化點95°C,環氧當量 0 ,平均官能基數7.6](縮水甘油基數(芳香環總數 5.0莫耳)、360克(5.0莫耳)丙烯酸及1_5克氫醌 l〇〇°C加熱攪拌,獲得均勻溶液。接著,饋入4.3克三 膦,加熱至1 l〇t反應2小時後,升溫至120°C,進而 反應2小時。所得反應溶液中添加415克芳香族系 SOLVESSO 150) ,4 5 6 · 0 克(3.0 莫耳)四氫苯二甲 ,且在110 °C下進行反應4小時,冷卻後,獲得固體 之酸價爲89mgKOH/g、固體成份65%之樹脂溶液。此 ❿ 清漆R-1。 比較合成例2 ( R-2) 於650克二乙二醇單乙基醚乙酸酯中添加1070 甲酚酚醛清漆型環氧樹脂[大日本油墨化學工業股份 公司製造,EPICLON N-695,軟化點95°C,環氧當量 ,平均官能基數7.6](縮水甘油基數(芳香環總數 5.0莫耳)、360克(5.0莫耳)丙烯酸及1.5克氫醌 100 °C加熱攪拌,獲得均句溶液。接著,饋入4.3克三 克鄰 有限 214 ): ,於 苯基 進行 烴( 酸酐 成分 稱爲 克鄰 有限 214 ): ,於 苯基 -41 - 200941136 膦,加熱至1 1 (Tc反應2小時後,再追加1 · 6克三苯基鱗 ,升溫至120 °C進而進行反應12小時。所得反應溶液中添 加525克芳香族系烴(SOLVES SO 150) ,608克(4.0莫 耳)四氫苯二甲酸酐,且在110 °C下進行反應4小時。進 而,於所得反應溶液中饋入142.0克(1.0莫耳)甲基丙 烯酸縮水甘油酯,且在1 1 5 t下進行反應4小時,獲得固 體成分之酸價77mgKOH/g、固體成份65%之樹脂溶液。此 稱爲清漆R-2。 比較合成例3 ( R-3 ) 將400份環氧當量800、軟化點79 °C之雙酚F型固型 環氧樹脂以925份表氯醇及462.5份二甲基亞碾溶解後, 在攪拌及70°C下於1〇〇分鐘內添加81.2份98.5%之Na〇H ,添加後再於70 °C下進行反應3小時。接著減壓餾除過量 未反應之表氯醇及二甲基亞碾之大部分,使含有副產物鹽 及二甲基亞砸之反應產物溶解於750份甲基異丁基酮中, 進而添加1〇份之30% NaOH且在70 °C下反應1小時。反 應結束後,以2 0 0份之水進行水洗兩次。油水分離後,自 油層蒸餾回收甲基異丁基酮,獲得3 70份環氧當量290、 軟化點62°C之環氧樹脂(a-Ι )。饋入2900份(10當量) 環氧樹脂(a-1) 、72 0份(10當量)丙烯酸、2.8份甲基 氫醌、1 95 0份卡必醇乙酸酯,且於90 °C加熱攪拌,使反 應混合物溶解。接著,使反應溶液冷卻至60°C ’饋入16.7 份三苯基膦,加熱至l〇〇°C,進行反應約32小時,獲得酸 -42- 200941136 價爲l.OmgKOH/g之反應物。接著,於其中饋入786份( 7.86莫耳)琥珀酸酐、423份卡必醇乙酸酯’加熱至95 °C ,進行反應約6小時,獲得固體成分酸價l〇〇mgKOH/g、 固體成份65%之樹脂溶液。此稱爲清漆R-3 ° 實施例1 使用上述合成例之樹脂溶液,以各比例(質量份)調 f) 配表1中所示之各種成分,經攪拌機預混合後,以3根輥 硏磨機混練,調製成光硬化性樹脂組成物。其中,以 ERIKSEN公司製造之硏磨檢驗儀進行粒度測定評價,所得 光硬化性樹脂組成物之分散度爲15μπι以下。 ❹ -43- 200941136 [表i] 表1 (組成物例J) 例1 例2 例3 例4 例5 例6 例7 例8 例9 例10 清漆(A-1) 155 155 - _ 清漆(A-2) - 155 麵 • 清漆(A-3) - - 155 - - 清漆(A-4) - - 胃 155 清漆(A-5) - - - _ 155 - - . - 清漆(R-1) - - • • • 155 155 - 清漆(R-2) - - - • • • 155 - 清漆(R-3) - - 155 光聚合起_出-1)” 1 - 1 1 1 1 1 1 光聚合起始劑(B-1)*2 - - 0.6 一 光聚合起始劑(B-2)·3 5 5 5 5 5 5 5 5 5 5 光聚合起始劑(B-3)*4 - 10 - _ _ _ - 10 - 化纖C-1), 20 20 20 20 20 20 20 20 20 20 麵化性成分(D-1)*6 15 15 15 15 15 15 15 15 15 15 麵化性成分(D-1)*7 25 25 25 25 25 25 25 25 25 25 熱硬化觸媒三聚氰胺 5 5 5 5 5 5 5 5 5 5 著色劑(E-1)*8 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 著色劑(E-2)*9 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 硫酸鋇*10 100 100 100 100 100 100 100 100 100 100 矽氧系消泡劑 3 3 3 3 3 3 3 3 3 3 有機溶劑DPM·11 5 5 5 5 5 5 5 5 5 5Sumi-epoxy ESCN-195X, ESCN-220, AER ECN-235, ECN-299, etc. (all trade names) manufactured by Asahi Kasei Kogyo Co., Ltd. (all are brand name) novolak type epoxy resin; Epiclon 830 manufactured by Dainippon Ink Chemical Industry Co., Ltd. EPICOAT 807 manufactured by Japan Epoxy Resin Co., Ltd., EPOTO YDF-170, YDF-175, YDF-2 004 manufactured by Dongdu Chemical Co., Ltd., Araldide XPY306 from Steam Batt Chemical Company (both trade names), bisphenol F type Epoxy resin; hydrogenated bisphenol A type epoxy resin such as EPOTOT ST-2004, ST-2007, ST-3000 (trade name) manufactured by Dongdu Chemical Co., Ltd.; EPICOAT 604 manufactured by Japan Epoxy Resin Co., Ltd., manufactured by Dongdu Chemical Co., Ltd. EPOTOT YH-434, Araldide MY720 from Steam Batt Chemical Company, Sumi-epoxy ELM-120 manufactured by Sumitomo Chemical Co., Ltd. (both trade names), glycidylamine-based epoxy resin; Araldide CY-350 (trade name), etc., such as uranyl urethane epoxy resin; Celloxide 2021 manufactured by Dicel Chemical Co., Ltd., Araldide CY175, CY179, etc. of Steam Batt Chemical Company (all trade names) Alicyclic epoxy resin; YL-933 manufactured by Japan Epoxy Resin Co., Ltd., TEN·, EPPN-501, EPPN-502, etc. (all trade names) manufactured by Dow Chemical Co., Ltd. : a bis-xylene oxime type or a biphenol type epoxy resin such as YL-6056, YX-4000, YL-6121 (all trade names) manufactured by Nippon Epoxy Co., Ltd. or a mixture thereof; manufactured by Nippon Kayaku Co., Ltd. EBPS-200, EPX-30 manufactured by Asahi Kasei Kogyo Co., Ltd., EXA-1514 (trade name) manufactured by Dainippon Ink Chemical Industry Co., Ltd., etc. EPIC0 AT 15 manufactured by Japan Epoxy Resin Co., Ltd. 7S (commercial 200941136 product name) and other bisphenol A novolac type epoxy resin; EPICOAT YL-931 manufactured by Japan Epoxy Resin Co., Ltd., Araldide 163 (all trade name) of gasoline company Batt Chemical Company, etc. Mercaptoethane type epoxy resin; Araldide PT810 from Steam Batt Chemical Company, heterogeneous epoxy resin of TEPIC (all trade name) manufactured by Nissan Chemical Industries Co., Ltd.; Blenmer DGT and other shrinkage water manufactured by Nippon Oil & Fats Co., Ltd. Glyceryl phthalic acid Ester resin; tetrahydroglycidyl fluorene xylene decyl ethane resin such as ZX-1 063 manufactured by Dongdu Chemical Co., Ltd.; ESN-190, ESN-360 manufactured by Nippon Steel Chemical Co., Ltd., HP manufactured by Dainippon Ink Chemical Industry Co., Ltd. -4032, EXA-475 0, epoxy resin containing naphthyl group such as EXA-4700; epoxy resin having dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by Dainippon Ink Chemical Industry Co., Ltd.; The company's CP-50S, CP-50M and other glycidyl methacrylate copolymer epoxy resin; further, a copolymerized epoxy resin of cyclohexylmalamine and glycidyl methacrylate; epoxy modification Polybutadiene rubber derivatives (for example, PB-3600 manufactured by Dicel Chemical Industry Co., Ltd.), CTBN modified epoxy resins (for example, YR-102, YR-450, etc. manufactured by Dongdu Chemical Co., Ltd.), etc. Not limited to these. These epoxy resins may be used singly or in combination of two or more. Among these, a novolak type epoxy resin, a heterocyclic epoxy resin, a bisphenol A type epoxy resin or a mixture thereof is preferable. The above polyfunctional oxetane compound (D-2) is exemplified by bis[(3-methyl-3-oxetanylmethoxy)methyl]ether, bis[(3_ethyl_3_oxygen) Heterocyclic butyl methoxy) methyl]ether, 1,4-bis[(3-methyl-3-oxetanylmethoxy)methyl]benzene, 1,4-bis[(3-ethyl-3) -oxetanylmethoxy-27- 200941136 yl)methyl]benzene, (3-methyl-3-oxetanyl)methyl acrylate, acrylic acid (3-ethyl-3: oxetanyl) Methyl ester, (3-methyl-3-oxetanyl)methyl methacrylate, (3-ethyl-3-oxetanyl)methyl methacrylate or such oligomers or Polyfunctional oxetane such as copolymer, and oxetane with novolak resin, poly(p-hydroxystyrene), CALDO type bisphenol, calixarene, resorcinol calixarene An etherified product of a resin having a hydroxyl group such as (calix resorcin are ne) or a sesquioxane. Further, it is exemplified by a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth)acrylate. The above episulfide compound (D-3) is exemplified by bisphenol A type episulfide resin YL7000 manufactured by Nippon Epoxy Co., Ltd., and the like. Further, an episulfide resin or the like which replaces the oxygen atom of the epoxy group of the novolac type epoxy resin with a sulfur atom by the same synthesis method can also be used. The compounding ratio of the thermosetting component (D) having two or more cyclic (thio)ether groups in the above molecule is preferably 〇.6 based on 1 equivalent of the carboxyl group of the carboxylic acid-containing photosensitive resin (A). ~2.5 equivalents, more preferably in the range of 0.8 to 2.0 equivalents. When the amount of the thermosetting component (D) having two or more cyclic (thio)ether groups in the molecule is less than 0.6 equivalent, it is a cause of residual carboxyl groups in the solder resist film, in which case heat resistance and alkali resistance are caused. Sexuality, electrical insulation, etc. are declining, which is less favorable. On the other hand, when it exceeds 2.5 equivalents, since the low molecular weight cyclic (thio)ether group remains in the dried film, the film strength and the like are lowered, which is not preferable. When the thermosetting component (D) is used in the photocurable resin composition of the present invention, it is preferred to use a thermosetting catalyst in combination. These thermosetting catalysts-28-200941136 are exemplified by, for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, An azole derivative such as 1-cyanoethyl-2-phenylimidazole or 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyanodiamine, benzyldi Methylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-indole, hydrazine-dimethylbenzylamine, 4-methyl-hydrazine, hydrazine- An amine compound such as dimethylbenzylamine, an anthracene compound such as diammonium adipate or diterpene sebacate; a phosphorus compound such as triphenylphosphine; and the commercially available φ are listed as, for example, Shikoku Chemical Industry Co., Ltd. Manufactured 2ΜΖ-Α, 2ΜΖ-ΟΚ, 2ΡΗΖ, 2Ρ4ΒΗΖ, 2Ρ4ΜΗΖ (all trade names of imidazole compounds), U-CAT3503N, U-CAT3502T manufactured by SAN-APRO Co., Ltd. (all block isocyanates of dimethylamine) The trade name of the compound), DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic hydrazine compounds and salts thereof). In particular, it is not limited to these, if it is a thermosetting catalyst of an epoxy resin and an oxetane compound, or a reaction that promotes the reaction of an epoxy group and/or an oxetane group with a carboxyl group, it is used alone or Mixing two or more types makes it easy to use. Further, guanamine, acetammine, benzoguanamine, melamine, 2,4-diamino-6-methylpropenyloxyethyl-S-triazine, 2-vinyl- can be used. 2,4-Diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine. Isocyanuric acid adduct, 2,4-diamino-6-methyl The S-triazine derivative such as a propylene oxyethyl-S-triazine-isocyanuric acid addition product is preferably used in combination with the above-mentioned thermosetting catalyst as a compound having a function as a tackifier. The blending ratio of the thermosetting catalyst is sufficient in a usual amount, and for example, it is preferably 0.1 to 20 parts by mass based on 100 parts by mass of the photosensitive resin (A) or the thermosetting component (D) containing a carboxylic acid. The mass fraction is more preferably -29-200941136 〇·5~15·0 parts by mass. Next, a coloring agent (Ε) which can be used in the photocurable resin composition of the present invention will be described. The photocurable resin composition of the present invention can be formulated with a colorant. As the coloring agent, any of the conventional coloring agents, pigments, dyes, and pigments conventionally used such as red, blue, green, yellow, and black may be used. However, in terms of reducing environmental load and affecting human body, it is preferred that halogen and azo compounds are not contained. Blue coloring agent: Blue coloring agent is phthalocyanine, lanthanide, and pigment system is classified as a pigment. Specifically, it is accompanied by a color coefficient (CI; Dye and Color Association ( Issued by The Society of Dyers and Colourists): Pigment Blue 15, Pigment Blue 15:1, Pigment Blue 15:2, Pigment Blue 15:3, Pigment Blue 15:4, Pigment Blue 15:6, Pigment Blue 16, Pigment Blue 60. As the dye, solvent blue 35, solvent blue 63, solvent blue 68, solvent blue 70, solvent blue 83, solvent blue 87, solvent blue 94, solvent blue 97, solvent blue 122, solvent blue 136, solvent blue 67, solvent blue can be used. 70 and so on. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used. Green coloring agent: Green coloring agents are also available in the form of phthalocyanine or lanthanide. Specifically, pigment green 7, pigment green 36, solvent green 3, solvent green 5, solvent green 20, and solvent green 28 can be used. In addition to the above, a phthalocyanine compound substituted with or without a metal may also be used. Yellow coloring agent: -30- 200941136, condensed azo type, benzene, specifically, the lower yellow coloring agent is a monoazo type, a diazo-type imidazolidinone type, an isoindolinone type, a hydrazine type, etc. Lister. Lanthanum: Solvent Yellow 163, Pigment Yellow, Yanhuanghuang 108, Pigment Yellow 193, Pigment Yellow Pigment Yellow, ", Pigment Yellow 2〇2. Different 嗣 :: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, _ Yellow 179, Pigment Yellow 185. Ο condensed azo system: Pigment Yellow 93' Pigment Yellow 94, Pigment Yellow 95 Material Yellow 128, Pigment Yellow 155, Pigment Yellow I66, Pigment Yellow 180. Benzimidazolone series: Pigment Yellow 12〇, Pigment Head Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181. Single gas system: Pigment Yellow 1, 2, 3, 4, s Λ 6' ΐ〇. 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 1 〇〇, 1 〇 4 1 〇 5 111, 116, 167, 168, 169, 1 82, 1 83. Diazo system: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 8, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198 ° Red Colorant: Red Examples of the coloring agent include a monoazo type, a diazo type, a soluble azo dye type, a benzimidazolone type, an anthraquinone type, a diketopyrrolopyrrole type, a condensed azo type, an anthraquinone type, a quinacridone type, etc. 'Specifically listed as the following. Single gas system: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, U7, 151, 170, 184, 187, 188, 193, 210, 245, 253, -31 - 200941136 258 '266, 267, 268, 269. Diazo system: Pigment red 37, 38, 41. Soluble monoazo dye series: Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53 :2, 57:1, 58:4, 63:1, 63:2, 64:1, 68. Benzimidazolone type: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208. Lanthanide: solvent red 135, solvent red 197, pigment red 133, pigment red 149, pigment red 166, pigment red 178, pigment red 179, pigment red 190, pigment red 194, pigment red 224. Diketopyrrolopyrrole: Pigment Red 254, Pigment Red 25 5, Pigment Red 264, Pigment Red 270, Pigment Red 272. Condensed azo system: Pigment Red 220, Pigment Red 144, Pigment Red 166' Pigment Red 214, Pigment Red 220, Pigment Red 221, Pigment Red 242. Lanthanide: Pigment Red 168, Pigment Red I77, Pigment Red 216, Solvent Red 149, Solvent Red 1 50, Solvent Red 5 2. Solvent Red 2 0 7. Quinacridone type: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209. In addition, a coloring agent such as purple, orange, brown, or black for adjusting the color tone may be added. Specific examples are Pigment Violet 19, 23, 29, 32, 36, 38, 42 Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, (: 1. Pigment Orange 14 (:.1. Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, C_I. Pigment Orange 36, CI Pigment-32-200941136 Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, Cl Pigment Orange 51, C_I. Pigment Orange 61, Cl Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25 , CI Pigment Black 1, CI Pigment Black 7, etc. The specific blending ratio of the colorant is not affected by the type of the colorant used and other additives, but it is inconsistent with respect to the photosensitive resin composition of the present invention. 100 parts by mass of the carboxylic acid-containing photosensitive resin, preferably blended with 〇 parts by mass to 5 parts by mass. More preferably from 0.05 parts by mass to 3 parts by mass of the preferred colorant, and blue and green are phthalocyanine , lanthanide, in yellow is lanthanide, in red is diketopyrrolopyrrole, lanthanide, and Further, the blue and green color of the pigment are preferable from the viewpoint of heat resistance, and the blue, green and red colorants of the dye are preferable from the viewpoint of sensitivity and resolution. The photocurable resin composition may be blended with a chelating agent in order to increase the physical strength of the coating film. The chelating agent may be a conventionally used inorganic or organic chelating agent, but is particularly preferably used. Barium sulfate, spheroidal cerium oxide, and talc. Further, it may be used in a compound having one or more ethylenically unsaturated groups or Hanse- in which a nano cerium oxide is dispersed in the above polyfunctional epoxy resin (D-1). NANOCRYL (trade name) manufactured by Chemie Inc. XP 03 96, XP 0596, XP 073 3, XP 0746, XP 0765, XP 0768, XP 0953, XP 0954, XP 1045 (all product grade names) or manufactured by Hanse-Chemie NANOPOX (trade name) XP 0516, XP 0525, XP 0314 (all product grade names), etc. These may be used alone or in combination of two or more. The blending ratio of the sputum is for the above Photosensitive resin of carboxylic acid (A) 100 parts by mass It is preferably 300 parts by mass or less, more preferably 0.1 to 300 parts by mass, and most preferably 〇.1 to 15 parts by mass. When the blending ratio of the enamel agent exceeds 300 parts by mass, the viscosity of the photosensitive composition is The high printability is lowered, and the hardened material becomes brittle, so it is not preferable. Further, the photocurable resin composition of the present invention can be used for synthesizing the above-mentioned carboxylic acid-containing photosensitive resin (A) or a modulating composition or for adjusting the viscosity applied to a substrate or a carrier film. Examples of the organic solvent include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum solvents. More specifically, it is a ketone such as methyl ethyl ketone or cyclohexanone; an aromatic hydrocarbon such as toluene, xylene or tetramethylbenzene; a cellosolve, a methyl cellosolve, or a butyl cellosolve; Glycol ethers such as carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether Ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol butyl ether acetate, etc.; ethanol, propanol Alcohols such as ethylene glycol and propylene glycol; aliphatic hydrocarbons such as octane and decane; petroleum solvents such as petroleum ether, petroleum brain, hydrogenated petroleum brain, and solvent petroleum brain. These organic solvents may be used singly or in combination of two or more. The photocurable resin composition of the present invention may further contain a known conventional use of hydroquinone, hydroquinone monomethyl ether, tert-butylcatechol, pyrogallol, phenothi-34-200941136azine, etc., if necessary. Thermal polymerization inhibitor; known conventional tackifiers such as fine powder of cerium oxide, organic bentonite, montmorillonite; antifoaming agents and/or admixtures of antimony, fluorine, and polymer, imidazole, and thiazole A conventionally used additive such as a decane coupling agent such as a triazole system, an antioxidant, or a rust preventive agent. The photocurable resin composition of the present invention is adjusted to a viscosity suitable for a coating method by, for example, the aforementioned organic solvent, and is applied to a substrate by dip coating, flow coating, roll coating, bar coating, screen printing. After coating by a printing method or a curtain coating method, the organic solvent contained in the composition is volatilized (temporarily dried) at a temperature of about 60 to 100 ° C to form a non-sticky coating film. Further, the resin composition of the present invention is applied onto a carrier film, dried to form a dry film, and the dry film winder is bonded to a substrate to form a resin insulating layer. The coating film obtained as described above or the resin layer on the carrier film (referred to as "resin layer" together with the above-mentioned "coating film") is exposed by irradiation with an active energy ray, and the exposed portion is irradiated with active energy rays. Partially) hardened. © Specifically, by contact (or non-contact), by using a pattern-shaped reticle to selectively expose by active energy lines or using a laser direct exposure machine, etc., by direct depiction of active energy lines The pattern is exposed, and the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3% aqueous sodium carbonate solution) to form a photoresist pattern. Further, it is heated and cured at a temperature of, for example, about 140 to 180 ° C, whereby the carboxyl group of the carboxylic acid-containing photosensitive resin (A) and the molecule have two or more cyclic ether groups and/or a ring. The thermosetting component of the thioether group reacts to form a cured coating film having excellent properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical properties. -35- 200941136 As the above substrate, paper phenol 'paper epoxy, glass cloth epoxy, glassy polyimide, glass cloth / non-woven epoxy, glass cloth / paper epoxy, synthetic fiber ring can be exemplified. All grades (FR-4) of copper-clad laminates, other polyimide films, PET films, etc., which are made of copper-clad laminates, such as oxygen, fluorine, polyethylene, PPO, cyanate, etc. Glass substrate, ceramic substrate, wafer board, etc. The photocurable resin composition of the present invention is subjected to volatilization and drying after application, and a hot air circulating type drying furnace, an IR furnace, a heating plate, a ventilating oven, or the like (a dryer using a heat source having an air heating method by steam) can be used. The method of convective contact between the hot air and the method of blowing the support by the nozzle). As the exposure machine for the active energy ray irradiation, an ultraviolet ray irradiation device and a direct drawing device (for example, a laser direct imaging device that directly draws an image by laser data from a computer) can be used. As the active energy line, any laser beam or solid laser can be used as long as the laser light having a maximum wavelength of 3 5 0 to 4 1 Onm is used. Further, the exposure amount varies depending on the film thickness, etc., but it is usually 5 to 200 mJ/cm2, preferably 5 to 100 mJ/cm2, and more preferably 5 to 50 mJ/cm2. As the above-described direct drawing device, for example, a product manufactured by ORBETECH Co., Ltd., PENTAX Corporation, or the like can be used, and any device can be used as long as it is oscillated by laser light having a maximum wavelength of 550 to 410 nm. As the above development method, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium citrate, ammonia, an amine or the like can be used by a dipping method, a rinsing method, a spraying method, a brushing method, or the like. The aqueous alkali solution is used as a developing solution. -36-200941136 Row 0 [Examples] The present invention will be specifically described below, but the present invention is not limited to the following examples. <Synthesis of carboxylic acid-containing photosensitive resin (A)> Φ Resin Synthesis Example 1 (A-1) 44 2.2 parts (3.3 m) was added to 600 g of diethylene glycol monoethyl ether acetate. Dimethylolpropionic acid, 1031.8 parts (6.7 moles) of methacrylic anhydride, 3.0 parts of methylhydroquinone, 8-5 parts of triphenylphosphine, and the reaction was carried out at 95 ° C for 8 hours. Then, 800 g of diethylene glycol monoethyl ether acetate and 2140 g of o-cresol novolac type epoxy resin were produced (manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPICLON N-695, softening point 95 ° C, Epoxy equivalent 214, average functional group number 7.6] (glycidyl number (total aromatic ring): 10.0 mol), 3.0 parts of methylhydroquinone, 1 000 carbitol acetate, heated to 90 °C with stirring The reaction mixture was dissolved. Then, the reaction solution was cooled to 60 ° C', and 10.0 parts of triphenylphosphine was fed and heated to 100 ° C to carry out a reaction for about 30 hours. Then, '912 parts (6.0 mol) of tetrahydrophthalic anhydride was fed, and the mixture was heated to 95 ° C, and the reaction was carried out for about 6 hours, and then cooled to obtain a solid content of 74 mg KOH / g of solid content of 65%. A carboxylic acid-containing photosensitive resin (varnish A-1). Resin Synthesis Example 2 (A-2) -37- 200941136 442.2 parts (3.3 mol) of dimethylolpropionic acid and 1031.8 parts (6.7 m) were added to 800 g of diethylene glycol monoethyl ether acetate. Methacrylic anhydride, 3.0 parts of methylhydroquinone, 8.5 parts of triphenylphosphine, and the reaction was carried out at 95 ° C for 8 hours. Then, 1 gram of diethylene glycol monoethyl ether acetate and 2846.2 g of o-cresol novolac type epoxy resin were produced. [Manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPICLON N-695, softening point 95 °C, epoxy equivalent 214, average functional group number 7.6] (glycidyl number (total aromatic ring): 13.3 moles), 442.2 parts (3.3 moles) of dimethylolpropane, 3.0 parts of methylhydroquinone, 13 00 The carbitol acetate was heated to 90 ° C with stirring to dissolve the reaction mixture. Then, the reaction solution was cooled to 6 Torr:, 12.0 parts of triphenylphosphine was fed, and the mixture was heated to 100 ° C to carry out a reaction for about 25 hours. Next, 1064 parts (7.0 mol) of tetrahydrophthalic anhydride was fed thereto, and the mixture was heated to 95 ° C to carry out a reaction for about 6 hours, followed by cooling to obtain a solid content concentration of a solid content of 67 mg KOH / g. 65% of a carboxylic acid-containing photosensitive resin (varnish A-2). Resin Synthesis Example 3 (A-3) 670 parts (5.0 mol) of dimethylolpropionic acid, 1.5 parts of methylhydroquinone, and 7.5 parts were added to 600 g of diethylene glycol monoethyl ether acetate. Phenylphosphine is heated to dissolve to dissolve. 770 parts (5.0 mol) of methacrylic anhydride dissolved in 75 g of diethylene glycol monoethyl ether acetate was slowly added dropwise thereto over 2 hours, followed by a reaction for 5 hours. Then, 2140 g of o-cresol novolac type epoxy resin was fed [manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPICLON N-695, softening point 95 ° C, 200941136 epoxy equivalent 214, average functional group number 7.6] (glycidol) Base (total number of aromatic rings): 10.0 mol), 3 to 5 parts of methylhydroquinone, 1100 parts of carbitol acetate, and heated to 90 ° C with stirring to dissolve the reaction mixture. Then, the reaction solution was cooled to 60 ° C, and 12.0 parts of triphenylphosphine was fed, and the mixture was heated to 100 ° C to carry out a reaction for about 25 hours. Next, 10 64 parts (7.0 mol) of tetrahydrophthalic anhydride was fed thereto, and the mixture was heated to 95 ° C, and the reaction was carried out for about 6 hours, followed by cooling to obtain an acid value of a solid content of 85 mg KOH/g Q. A carboxylic acid-containing photosensitive resin (varnish A-3) having a solid concentration of 65%. Resin Synthesis Example 4 (A-4) 400 parts of bisphenol F-type solid epoxy resin having an epoxy equivalent of 800 and a softening point of 79 ° C, and 925 parts of epichlorohydrin and 462.5 parts of dimethyl sulfoxide were dissolved and stirred. 81.2 parts of 98.5% NaOH was added at 70 ° C in 1 minute, and the reaction was further carried out at 70 ° C for 3 hours. Then, a large part of the excess unreacted epichlorohydrin and dimethyl hydrazine is distilled off under reduced pressure, and the reaction product containing the by-product salt and Q dimethyl hydrazine is dissolved in 750 parts of methyl isobutyl ketone, and further Add 10 parts of 30% NaOH and react at 70 °c for 1 hour. After the reaction was completed, water was washed twice with 200 parts of water. After the oil-water separation, methyl isobutyl ketone was distilled from the oil layer to obtain 370 parts of epoxy resin (a-Ι) having an epoxy equivalent of 290 and a softening point of 62 °C. Next, 642.2 parts (3.3 moles) of dimethylolpropionic acid, 1031.8 parts (6.7 moles) of methacrylic anhydride, and 3.0 parts of methylhydroquinone were added to 600 g of diethylene glycol monoethyl ether acetate. 8.5 parts of triphenylphosphine, and the reaction was carried out at 95 ° C for 8 hours. Then feed 700 g of diethylene glycol monoethyl ether B-39-200941136 acid ester, 2900 parts (10 moles) epoxy resin (ai), 3.0 parts of methylhydroquinone, 1 part of carbitol The acetate was heated to 90 ° C with stirring to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C, and 16.7 parts of triphenylphosphine was fed and heated to 1 ° C for about 32 hours. Next, 786 parts (7.86 mol) of succinic anhydride and 450 parts of carbitol were fed thereto, and the mixture was heated to 95 ° C to carry out a reaction for about 6 hours, and after cooling, the acid value of the solid component was 85 mgKOH/g. A carboxylic acid-containing photosensitive resin (varnish A-4) having a solid content of 65%. Resin Synthetic Example 5 (A-5) 44 2.2 parts (3.3 mol) of dimethylolpropionic acid and 1031.8 parts (6.7 mol) of methacrylic acid were added to 700 g of diethylene glycol monoethyl ether acetate. Anhydride, 3.0 parts of methylhydroquinone, 8.5 parts of triphenylphosphine, and the reaction was carried out at 951 for 8 hours. Then, 95 g of diethylene glycol monoethyl ether acetate and 2140 g of o-cresol novolac type epoxy resin were produced ([Japan Japan Ink Chemical Industry Co., Ltd. manufactured] EPICLON N-695' softening point 95 ° C 'Epoxy equivalent 214, average functional group number 7.6' (glycidyl number (total aromatic ring): 1 〇. 〇 Moel), 3 〇 part of methylhydroquinone, 1 00 parts of carbitol acetate, The mixture was heated and stirred at 90 ° C to dissolve the reaction mixture. Then, the reaction solution was cooled to 60, and 10.0 parts of triphenylphosphine was fed to 100 ° C to carry out a reaction for about 30 hours. Next, 1140·0 parts (7.5 mol) of tetrahydrophthalic anhydride was fed therein, and the mixture was heated to 95 ° C for about 6 hours. Further, 21.3 g (1.5 mol) of glycidyl methacrylate was fed into the obtained reaction solution, and the reaction was carried out at 115 ° C for 4 hours ' 65% 200941136 The acid value of the solid component was 68 mgKOH. a carboxylic acid-containing photosensitive resin (varnish A-5) having a solid concentration of /g. Comparative Synthesis Example 1 (R-1) 1070 cresol novolak-type epoxy resin was added to 600 g of diethylene glycol monoethyl ether acetate [manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPICLON N-695, softened Point 95 ° C, epoxy equivalent 0, average functional group number 7.6] (glycidyl number (total aromatic ring 5.0 moles), 360 grams (5.0 moles) of acrylic acid and 1_5 grams of hydroquinone l ° ° C heating and stirring, obtained Then, 4.3 g of triphosphine was fed, and after heating to 1 l〇t for 2 hours, the temperature was raised to 120 ° C, and further reacted for 2 hours. 415 g of aromatic SOLVESSO 150) was added to the obtained reaction solution, 4 5 6 · 0 g (3.0 mol) of tetrahydrobenzene was reacted at 110 ° C for 4 hours, and after cooling, a resin solution having a solid acid value of 89 mg KOH / g and a solid content of 65% was obtained. This ❿ varnish R-1. Comparative Synthesis Example 2 (R-2) Addition of 1070 cresol novolac type epoxy resin to 650 g of diethylene glycol monoethyl ether acetate [Manufactured by Dainippon Ink Chemical Industry Co., Ltd., EPICLON N-695, softened Point 95 ° C, epoxy equivalent, average functional group number 7.6] (glycidyl number (total aromatic ring 5.0 moles), 360 grams (5.0 moles) of acrylic acid and 1.5 grams of hydroquinone 100 ° C heating and stirring, to obtain a uniform solution Next, feed 4.3 g of three gram of finite 214):, a hydrocarbon in the phenyl group (an acid anhydride component called ketone limited 214):, phenyl-41 - 200941136 phosphine, heated to 1 1 (Tc reaction for 2 hours) Thereafter, an additional 1.6 g of triphenyl scale was added, and the temperature was raised to 120 ° C to carry out a reaction for 12 hours. 525 g of an aromatic hydrocarbon (SOLVES SO 150) and 608 g (4.0 mol) of tetrahydrogen were added to the obtained reaction solution. Phthalic anhydride, and the reaction was carried out for 4 hours at 110 ° C. Further, 142.0 g (1.0 mol) of glycidyl methacrylate was fed into the obtained reaction solution, and the reaction was carried out at 1 15 t for 4 hours. , obtaining a resin having a solid content of 77 mg KOH/g and a solid content of 65% This is called varnish R-2. Comparative Synthesis Example 3 (R-3) 400 parts of bisphenol F-type solid epoxy resin having an epoxy equivalent of 800 and a softening point of 79 ° C as 925 parts of epichlorohydrin and 462.5 After the dimethyl amide was dissolved, 81.2 parts of 98.5% Na〇H was added in 1 hour at 37 ° C with stirring, and the reaction was further carried out at 70 ° C for 3 hours, followed by distillation under reduced pressure. Excessive amount of unreacted epichlorohydrin and dimethyl argon, the reaction product containing by-product salt and dimethyl hydrazine is dissolved in 750 parts of methyl isobutyl ketone, and further added 30 parts % NaOH and reacted at 70 ° C for 1 hour. After the reaction was completed, it was washed twice with 200 parts of water. After separation of oil and water, methyl isobutyl ketone was distilled from the oil layer to obtain 3 70 parts of epoxy equivalent. 290, epoxy resin (a-Ι) with a softening point of 62 ° C. Feed 2900 parts (10 equivalents) of epoxy resin (a-1), 72 0 parts (10 equivalents) of acrylic acid, 2.8 parts of methylhydroquinone, 1 95 0 parts of carbitol acetate, and the mixture was heated and stirred at 90 ° C to dissolve the reaction mixture. Then, the reaction solution was cooled to 60 ° C to feed 16.7 parts of triphenylphosphine and heated to l 〇〇 ° C, the reaction was carried out for about 32 hours to obtain a reactant of acid-42-200941136 at a price of 1.0 mg/g. Then, 786 parts (7.86 mol) of succinic anhydride and 423 parts of carbitol were fed therein. The acetate 'heated to 95 ° C and the reaction was carried out for about 6 hours to obtain a resin solution having a solid content of acid 〇〇 mg KOH / g and a solid content of 65%. This is called varnish R-3 °. Example 1 Using the resin solution of the above synthesis example, each component (parts by mass) was adjusted to f) the various components shown in Table 1 were mixed, and after premixing with a stirrer, three rolls were used. The mill is kneaded to prepare a photocurable resin composition. Among them, the particle size measurement was carried out by a honing tester manufactured by ERIKSEN Co., Ltd., and the degree of dispersion of the obtained photocurable resin composition was 15 μm or less. ❹ -43- 200941136 [Table i] Table 1 (Composition Example J) Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Case 7 Case 8 Case 9 Example 10 Varnish (A-1) 155 155 - _ Varnish (A -2) - 155 faces • Varnish (A-3) - - 155 - - Varnish (A-4) - - Stomach 155 Varnish (A-5) - - - _ 155 - - . - Varnish (R-1) - - • • • 155 155 - Varnish (R-2) - - - • • • 155 - Varnish (R-3) - - 155 Photopolymerization_Out-1)" 1 - 1 1 1 1 1 1 Photopolymerization Starting agent (B-1)*2 - - 0.6 photopolymerization initiator (B-2)·3 5 5 5 5 5 5 5 5 5 5 photopolymerization initiator (B-3)*4 - 10 - _ _ _ - 10 - Chemical fiber C-1), 20 20 20 20 20 20 20 20 20 20 Faceting composition (D-1)*6 15 15 15 15 15 15 15 15 15 15 Faceting composition (D- 1)*7 25 25 25 25 25 25 25 25 25 25 Thermal curing catalyst melamine 5 5 5 5 5 5 5 5 5 5 Colorant (E-1)*8 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 0.3 Colorant (E-2)*9 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 0.8 Barium sulfate*10 100 100 100 100 100 100 100 100 100 100 Antimony defoamer 3 3 3 3 3 3 3 3 3 3 Organic solvent DPM ·11 5 5 5 5 5 5 5 5 5 5
* 1 2-(乙醯氧基亞胺基甲基)噻噸_9-酮 *2乙院,1·[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(0-乙醯基肟) (Irgacure OXE 02;汽巴特用化學品公司製造) *3 2-甲基-1-(4_甲基噻吩基)·2·嗎啉基丙心·酮(Irgacufe 9〇7;汽巴特用化學品公 製造) *4 *5 *6 *7 *8 *9 2^6-三甲基苯甲酿基-二苯基-憐氧化物 二季戊四醇六丙烯酸酯(DPHA/日本化藥製造> 酚苎醛清漆型環氧樹脂(DEN-431;道化學公司製造) 雙二甲苯醇型環氧樹脂(YX-4000,日本環氧樹脂公司製勸 C.I顧料藍15:3 爾曰A 口」—) C.I顧料黃147 »10堺化學公司製造之硫酸鎖B3〇 *11二丙二醇單甲甚酴 -44- 200941136 性能評價: <最適曝光量> 以網版印刷法將經調製之各上述光硬化性樹脂組成物 全面塗佈在銅厚35 μιη之電路圖型基板上,且以不織布輥 (Buff roll)硏磨該基板後,經水洗、乾燥,並在80°C之 熱風循環式乾燥爐中乾燥30分鐘。乾燥後,使用搭載最 大波長3 5 5nm之半導體雷射之直接描繪裝置(ORBOTECH φ 公司製造之Paragon 8000 ),搭載高壓水銀燈之直接描會 曝光機(搭載超高壓水銀燈燈管之直描曝光機,大日本螢 幕公司製造之Marculex)或搭載高壓水銀燈之曝光裝置( 搭載水銀短電弧燈之ORC公司製造之曝光機),透過階 變圖(Step Tablet)(柯達2號)曝光,進行顯像(30°C ,0.2MPa,1質量%碳酸鈉水溶液)60秒時,以殘存階變 圖之圖型爲7段時作爲最適曝光量。 〇 〈指觸乾燥性〉 以網版印刷將經調製之各上述光硬化性樹脂組成物全 面塗佈在形成有圖型之銅箔基板上,在80 °C下乾燥20分 鐘,且放冷至室溫。使該基板上與PET製負型薄膜接觸, 且以ORC公司製造(HMW680-GW20)在減壓條件下壓著 一分鐘,隨後剝離負型薄膜,評價此時之薄膜之拉伸貼附 狀態。 〇:薄膜無阻力地剝離 △:薄膜被剝離下來但塗膜上仍有少量痕跡 -45- 200941136 X :剝離薄膜時受到阻力,且塗膜上留有清楚痕跡 <最大顯像壽命> 以網版印刷將所調製之各上述光硬化性樹脂組成物全 面塗佈於形成有圖型之銅箔基板上,且在80°C下乾燥。自 該乾燥開始後20分鐘至80分鐘期間,每隔10分鐘取出 基板並在室溫下放置冷卻。該基板以30°C之1% Na2C03水 溶液在噴霧壓力2kg/cm2之條件下進行顯像60秒,未殘 留殘留物之最大容許乾燥時間稱爲最大顯像壽命。 特性試驗: (塗膜特性評價基板之製作) 以網版印刷將所調製之各上述光硬化性樹脂組成物全 面塗佈於形成有圖型之銅箔基板上,在80 °C下乾燥20分 鐘’並放冷至室溫。在該基板上使用搭載最大波長3 5 5nm 之半導體雷射之直接描繪裝置,以最適曝光量使阻焊劑圖 型曝光,且以 3(TC之1% Na2C03水溶液在噴霧壓力 2kg/cm2之條件下進行顯像6〇秒,獲得光阻圖型。使該基 板在UV輸送帶爐中,於累積曝光量1 000mJ/cm2之條件下 經紫外線照射後,在1 50°C下加熱60分鐘硬化。對所得印 刷基板(評價基板)如下列般評價其特性。 <焊料耐熱性> 將塗佈有松脂系助熔劑之評價基板浸漬於預先設定在 -46- 200941136 260 °C之焊料槽中,以改質醇洗淨助熔劑後,以目視評價 光阻劑層之膨脹·剝離。判定基準如下所述。 〇* :重複6次以上之浸漬1 0秒亦未見到剝離 〇:重複3次以上之浸漬1 0秒亦未見到剝離 △:重複3次以上之浸漬1 0秒後少許剝離 X : 3次以內之浸漬1 〇秒後光阻層膨脹、剝離 <耐無電解鍍金性> 使用市售品之無電解鍍鎳浴及無電解鍍金浴,在鎳 0.5 μιη、金0·03μιη之條件下進行電鍍,以目視評價光阻 層是否有剝離,以及電鍍浸透之有無後,以膠帶剝離評價 光阻層是否有剝離。判定基準如下。 〇* :未發現浸透、剝離 〇:電鍍後確認有少許浸透,但膠帶剝離後無剝離 △:電鍍後僅見到少許浸透,且在膠帶剝離後亦發現 G 剝離 X :電鍍後產生剝離 <耐鹼性評價> 在室溫下將評價基板浸漬於10體積%之NaOH溶液中 3 0分鐘,且以目視確認浸透或塗膜溶出,進而以膠帶剝離 確認剝離。 〇:無浸透或溶出,且膠帶剝離後未確認有剝離 △:無浸透或溶出,經膠帶剝離後確認僅少許剝離 -47- 200941136 X:有浸透或溶出,且膠帶剝離後有剝離 <PCT耐性> 使用PCT裝置(ESPEC股份有限公司製造之HAST SYSTEM TPC-4 12MD ),在 1 2 1°C、飽和、0 · 2 MP a 之條件 下處理評價基板50小時,以目視確認塗膜之狀態,再以 膠帶剝離確認剝離情形。判斷基準如下。 〇:無浸透或溶出,且膠帶剝離後未確認有剝離 q △:無浸透或溶出,經膠帶剝離後確認僅少許剝離 X :有浸透或溶出,且膠帶剝離後有剝離 < P C B T耐性> 以IPC代替銅箔基板,使用B-25之梳型電極B試片 ,以上述條件製作評價基板,在該梳型電極上施加DC30V 之偏壓電流,使用PCT裝置(ESPEC股份有限公司製造 之 HAST SYSTEM TPC-412MD ),在 12 It,濕度 97% 之 ◎ 條件下處理96小時,評價是否有變色、移行。判斷基準 如下。 〇*:未發生變色、移行者。 〇:僅發生稍微變色、移行者。 △:發生變色、移行者。 X:變色顯著,且移行自一邊之電極到達另一邊之電 極者。 -48- 200941136 <電特性> 以IPC代替銅箔基板,且使用B-2 5之梳型電極B試 片,以上述條件製作評價基板,在該梳型電極上施加DC 1 1 0V之偏壓電壓,且在85 °C、濕度85 %之恆溫恆濕條件 下1,0 0 0小時後確認是否有移行。判定基準如下。 〇:完全未確認到變化者。 △:僅有少許變化者。 φ X :發生移行者。 <塗膜顏色> 以目視判斷硬化物之顏色。 結果不於表2。 [表2] 表2 (組成物例) 例1 例2 ---1 例3 例4 例5 例6 例7 例8 例9 例10 色調 綠 綠 綠 綠 綠 綠 綠 綠 綠 綠 高壓水銀燈曝光感度(mJ/cm2) 60 110 60 80 250 19Π /|y|v ΊΠΓ\ 70 4ΠΠ 高壓水銀燈直描曝光感度 •y (mJ/cm ) 60 110 60 80 250 50 120 jUU 300 70 400 355nm雷射曝光感度(mJ/cm2) 70 130 60 100 300 60 150 80 4^π 指觸乾燥性 〇 〇 〇 〇 Λ 〇 A j Λ 〇 V 最大顯像壽命(分鐘) 60 60 70 60 50 60 ΙΛ Ζ_Λ AC\ Af\ 焊料耐熱性 〇* 〇 ,〇 Δ 〇* J\J 〇 〇 〇 *tU 無電解鍍金耐性 〇* X 〇* 〇 〇 〇 * Λ Λ 〇 Λ 耐驗性 〇 〇 〇 〇 〇 〇 ΔΛ Λ /Λ Λ 〇 /Λ Λ PCT耐性 〇 〇 〇 〇 Λ 〇 Λ χ \y Λ ΖΛ χ PCBT耐性 〇* 〇 〇* 〇 〇* Δ /.Λ Λ 〇 電特性 〇 * 〇 — — X 〇* 〇 Δ 〇* Δ Δ 〇 Δ -49- 200941136 實施例2 <乾膜評價> 以甲基乙基酮稀釋於實施例1中使用之組成物例1, 塗佈在PET薄膜上且在80°c下乾燥30分鐘,形成厚20μιη 之感光性樹脂組成物層。進而於其上貼合覆蓋薄膜獲得乾 膜。隨後,剝離覆蓋薄膜,在形成圖型之銅箔基板上熱層 合薄膜,接著,在與實施例1之塗膜特性評價中所用基板 相同之條件下曝光。曝光後剝離載體薄膜,且在1 5 0 °C之 熱風乾燥機中進行加熱硬化60分鐘,製作試驗基板。以 上述試驗方法及評價方法,對具有所得硬化皮膜之試驗基 板進行各種特性之評價試驗。結果示於表3。 [表3] 表3 (組成物例) 例1 高壓水銀燈曝光感度(mJ/cm2) 60 高壓水銀燈直描曝光感度(mJ/cm2) 60 3 5 5nm雷射曝光感度(mJ/cm2) 70 指觸乾燥性 〇 最大顯像壽命(分) 60 焊料耐熱性 〇* 無電解鍍金耐件 〇* 耐鹼性 〇 PCT耐性 〇 PCBT耐性 〇* 電特性 〇* 由實施例1及2中顯示於表2及表3中所示結果,含 -50- 200941136 有本發明之含羧酸之感光性樹脂(A)之光硬化性樹組成 物,與以往之樹脂相比,感度較高,且顯像性、指觸乾燥 性、焊料耐熱性、無電解鍍金耐性、耐鹼性、PCT耐性 PCBT耐性優異,可使用作爲光阻劑用油墨。又,判定本 發明之光硬化性樹脂組成物對於i線及h線等單色光或雷 色光,或者對於高壓水銀燈等紫外線光源,亦可以高感度 對應。 ❹* 1 2-(Ethyloxyiminomethyl)thioxanthene-9-one*2, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indole Zyrid-3-yl]-1-(0-ethenylhydrazine) (Irgacure OXE 02; manufactured by Steam Batt Chemical Company) *3 2-Methyl-1-(4-methylthienyl)·2· Morpholinyl ketone ketone (Irgacufe 9〇7; manufactured by Steam Batt Chemicals) *4 *5 *6 *7 *8 *9 2^6-trimethylbenzyl-diphenyl-pity Oxide dipentaerythritol hexaacrylate (DPHA/Nippon Chemical Manufacturing > Phenolfurfural varnish type epoxy resin (DEN-431; manufactured by Dao Chemical Co., Ltd.) Dixylene alcohol type epoxy resin (YX-4000, Japan Epoxy Resin company advises CI Co., Ltd. 15:3 er曰A mouth"-) CI Gu Huang 147 »10 堺Chemical company made sulphuric acid lock B3〇*11 dipropylene glycol monomethyl 酴-44- 200941136 Performance evaluation: < Optimum exposure amount> The above-mentioned photocurable resin composition prepared by the screen printing method is entirely coated on a circuit pattern substrate having a copper thickness of 35 μm, and the substrate is honed by a non-woven roll (Buff roll). , washed with water, dried, and dried in a hot air circulating drying oven at 80 ° C for 30 minutes. Then, using a direct drawing device (Paragon 8000 manufactured by ORBOTECH φ) equipped with a semiconductor laser with a maximum wavelength of 355 nm, a direct drawing exposure machine equipped with a high-pressure mercury lamp (a direct-drawing exposure machine equipped with an ultra-high pressure mercury lamp) Makulex manufactured by Nippon Screen Co., Ltd. or an exposure device equipped with a high-pressure mercury lamp (an exposure machine manufactured by ORC Corporation equipped with a mercury short arc lamp), and exposed by a Step Tablet (Kodak 2) for imaging (30°) C, 0.2 MPa, 1% by mass aqueous sodium carbonate solution) When the pattern of the residual step change pattern is 7 segments, the optimum exposure amount is 60 seconds. 〇 <finger dryness> Each of the above-mentioned prepared by screen printing The photocurable resin composition is entirely coated on the copper foil substrate on which the pattern is formed, dried at 80 ° C for 20 minutes, and allowed to cool to room temperature. The substrate is contacted with a negative film made of PET, and The ORC company (HMW680-GW20) was pressed under reduced pressure for one minute, and then the negative film was peeled off, and the stretched state of the film at this time was evaluated. 〇: The film was peeled off without resistance Δ: the film was peeled off However, there is still a small amount of trace on the film. -45- 200941136 X: Resistance is removed when the film is peeled off, and clear traces are left on the film. <Maximum development life> The above-mentioned photohardenability is modulated by screen printing. The resin composition was completely coated on a copper foil substrate on which a pattern was formed, and dried at 80 °C. The substrate was taken out every 10 minutes from 20 minutes to 80 minutes after the start of the drying and left to cool at room temperature. The substrate was developed with a 1% Na2CO3 aqueous solution at 30 ° C for 60 seconds under a spray pressure of 2 kg/cm 2 , and the maximum allowable drying time of the residue without residue was referred to as the maximum development lifetime. Characteristic test: (Production of coating film evaluation substrate) Each of the prepared photocurable resin compositions prepared by screen printing was applied onto a copper foil substrate on which a pattern was formed by screen printing, and dried at 80 ° C for 20 minutes. 'And let cool to room temperature. A direct drawing device equipped with a semiconductor laser having a maximum wavelength of 355 nm was used on the substrate, and the solder resist pattern was exposed at an optimum exposure amount, and 3 (TC of 1% Na2C03 aqueous solution was sprayed at a pressure of 2 kg/cm 2 ). The development was carried out for 6 sec., and a photoresist pattern was obtained. The substrate was subjected to ultraviolet irradiation at a cumulative exposure of 1 000 mJ/cm 2 in a UV conveyor belt furnace, and then cured by heating at 150 ° C for 60 minutes. The obtained printed circuit board (evaluation substrate) was evaluated for its characteristics as follows. <Solder heat resistance> The evaluation substrate coated with the rosin-based flux was immersed in a solder bath set at -46-200941136 260 °C in advance. After the flux was washed with the modified alcohol, the expansion and peeling of the photoresist layer were visually evaluated. The criteria for the determination were as follows. 〇*: The immersion was repeated 6 times or more for 10 seconds, and no peeling 〇 was observed: repeated 3 times No peeling was observed for the above immersion for 10 seconds. Δ: Repeating for 3 times or more, immersing for 10 seconds, slightly peeling off X: immersion within 3 times, lapse of 1 〇 second, expansion of the photoresist layer, peeling < electroless gold plating resistance gt ; Use of electroless nickel plating bath and electroless plating for commercial products The gold bath was electroplated under conditions of nickel 0.5 μm and gold 0·03 μm, and the photoresist layer was visually evaluated for peeling and the presence or absence of plating penetration, and the photoresist layer was peeled off by tape peeling. The judgment criteria were as follows. 〇* : No soaking or peeling was found: After plating, it was confirmed that there was a little soaking, but there was no peeling after peeling off the tape. △: Only a little soaking was observed after plating, and G peeling was also observed after peeling of the tape: peeling occurred after plating. Evaluation of the alkalinity> The evaluation substrate was immersed in a 10 volume% NaOH solution for 30 minutes at room temperature, and the penetration or coating film dissolution was visually confirmed, and peeling was confirmed by tape peeling. 〇: no penetration or dissolution, and After the tape was peeled off, no peeling was observed. Δ: no penetration or dissolution, and it was confirmed that only a little peeling was observed after peeling off the tape -47- 200941136 X: there was penetration or dissolution, and peeling after tape peeling <PCT resistance> Using PCT device (ESPEC shares) The HAST SYSTEM TPC-4 12MD manufactured by the Co., Ltd. was treated under the conditions of 1 2 1 ° C, saturation, and 0 · 2 MP a for 50 hours to visually confirm the state of the coating film. The peeling was confirmed by tape peeling. The judgment criteria were as follows. 〇: no penetration or dissolution, and peeling was not confirmed after peeling of the tape. △: no penetration or dissolution, and peeling off after tape removal confirmed only a little peeling X: soaked or dissolved, and tape Peeling after peeling <PCBT resistance> The copper foil substrate was replaced by IPC, and the evaluation electrode substrate was fabricated under the above conditions using a comb-shaped electrode B test piece of B-25, and a bias current of DC 30 V was applied to the comb-shaped electrode. The PCT device (HAST SYSTEM TPC-412MD manufactured by ESPEC Co., Ltd.) was treated under a condition of 12 It and a humidity of 97% for 96 hours to evaluate whether or not discoloration or migration occurred. The judgment criteria are as follows. 〇*: No discoloration or migration occurred. 〇: Only a slight discoloration or migrating person occurs. △: Discoloration or migration occurred. X: The color change is remarkable, and the electrode that moves from one side to the other side of the electrode. -48- 200941136 <Electrical characteristics> The copper foil substrate was replaced by IPC, and the evaluation electrode substrate was fabricated under the above conditions using a comb-shaped electrode B test piece of B-2 5, and DC 1 10 V was applied to the comb-shaped electrode. The voltage is biased, and it is confirmed that there is a migration after 1,100 hours under the constant temperature and humidity conditions of 85 ° C and a humidity of 85%. The judgment criteria are as follows. 〇: The change is not confirmed at all. △: There are only a few changes. φ X : The mover occurred. <Coating film color> The color of the cured product was visually judged. The results are not in Table 2. [Table 2] Table 2 (composition examples) Example 1 Example 2 ---1 Example 3 Case 4 Case 5 Case 6 Case 7 Case 8 Case 9 Case 10 Tone green green green green green green green high pressure mercury lamp exposure sensitivity (mJ/cm2) 60 110 60 80 250 19Π /|y|v ΊΠΓ\ 70 4ΠΠ High-pressure mercury lamp Direct exposure sensitivity • y (mJ/cm) 60 110 60 80 250 50 120 jUU 300 70 400 355 nm laser exposure sensitivity (mJ/cm2) 70 130 60 100 300 60 150 80 4^π Finger touch drying 〇〇〇〇Λ jA j Λ 〇V Maximum development life (minutes) 60 60 70 60 50 60 ΙΛ Ζ_Λ AC\ Af\ Solder heat resistance 〇* 〇 , 〇Δ 〇* J\J 〇〇〇*tU Electroless gold plating resistance 〇* X 〇* 〇〇〇* Λ Λ 耐 Testability 〇〇〇〇〇〇ΔΛ Λ /Λ Λ 〇/Λ Λ PCT resistance 〇〇〇〇Λ 〇Λ χ \y Λ ΖΛ χ PCBT resistance 〇* 〇〇* 〇〇* Δ /.Λ Λ 〇Characteristics 〇* 〇— — X 〇* 〇Δ 〇* Δ Δ 〇Δ -49- 200941136 Example 2 <Dry film evaluation> Example 1 of the composition used in Example 1 was diluted with methyl ethyl ketone, coated on a PET film and dried at 80 ° C After 30 minutes, a photosensitive resin composition layer having a thickness of 20 μm was formed. Further, a cover film was attached thereto to obtain a dry film. Subsequently, the cover film was peeled off, and the film was thermally laminated on the copper foil substrate on which the pattern was formed, and then exposed under the same conditions as those used in the evaluation of the film properties of Example 1. After the exposure, the carrier film was peeled off, and heat-hardened in a hot air dryer at 150 ° C for 60 minutes to prepare a test substrate. The test substrate having the obtained hardened film was subjected to various characteristics evaluation tests by the above test methods and evaluation methods. The results are shown in Table 3. [Table 3] Table 3 (composition examples) Example 1 High-pressure mercury lamp exposure sensitivity (mJ/cm2) 60 High-pressure mercury lamp direct exposure sensitivity (mJ/cm2) 60 3 5 5 nm laser exposure sensitivity (mJ/cm2) 70 Touch Dryness 〇 Maximum development lifetime (minutes) 60 Solder heat resistance 〇* Electroless gold plating resistance 〇* Alkali resistance 〇 PCT resistance 〇 PCBT resistance 〇 * Electrical characteristics 〇 * Displayed in Table 2 in Examples 1 and 2 As a result shown in Table 3, the photocurable tree composition containing the carboxylic acid-containing photosensitive resin (A) of the present invention contained in the range of -50 to 200941136 has higher sensitivity and developability than the conventional resin. Finger touch drying, solder heat resistance, electroless gold plating resistance, alkali resistance, and PCT resistance are excellent in PCBT resistance, and can be used as a photoresist ink. Further, it is determined that the photocurable resin composition of the present invention can correspond to monochromatic light or ray light such as i-line or h-line or ultraviolet light source such as a high-pressure mercury lamp. ❹
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Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007289996A JP5376793B2 (en) | 2007-11-07 | 2007-11-07 | Photocurable resin composition, cured product pattern thereof, and printed wiring board comprising the cured product pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200941136A true TW200941136A (en) | 2009-10-01 |
| TWI388927B TWI388927B (en) | 2013-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097142869A TWI388927B (en) | 2007-11-07 | 2008-11-06 | A photohardenable resin composition and a hardened pattern, and a printed circuit board |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5376793B2 (en) |
| KR (1) | KR101451435B1 (en) |
| CN (1) | CN101430506B (en) |
| TW (1) | TWI388927B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107436535B (en) * | 2016-05-26 | 2022-06-10 | 太阳油墨制造株式会社 | Photosensitive resin composition, dry film, cured product and printed wiring board |
| JP2018019018A (en) * | 2016-07-29 | 2018-02-01 | ローム・アンド・ハース電子材料株式会社 | Method of plating on non-conductive substrate surface |
| JP2018151628A (en) * | 2017-03-10 | 2018-09-27 | 日本化薬株式会社 | Photosensitive resin composition and cured product of the same, and article |
| WO2018169036A1 (en) * | 2017-03-17 | 2018-09-20 | 大阪有機化学工業株式会社 | Photosensitive resin composition |
| JP7153991B2 (en) * | 2019-03-12 | 2022-10-17 | 日本化薬株式会社 | Unsaturated group-containing polycarboxylic acid resin, photosensitive resin composition containing same, and cured product thereof |
| JPWO2023218876A1 (en) * | 2022-05-13 | 2023-11-16 | ||
| CN114854185B (en) * | 2022-07-06 | 2022-11-22 | 雄县立亚包装材料有限公司 | Biodegradable polymer composite material and preparation method thereof |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2877659B2 (en) * | 1993-05-10 | 1999-03-31 | 日本化薬株式会社 | Resist ink composition and cured product thereof |
| JPH06348009A (en) * | 1993-06-10 | 1994-12-22 | Nippon Kayaku Co Ltd | Resist ink composition and its hardened product |
| WO2001053890A1 (en) * | 2000-01-17 | 2001-07-26 | Showa Highpolymer Co., Ltd. | Photosensitive resin composition |
| JP4008273B2 (en) * | 2002-03-26 | 2007-11-14 | 太陽インキ製造株式会社 | Alkali development type photosensitive resin composition and printed wiring board using the same |
| JP2005036105A (en) * | 2003-07-15 | 2005-02-10 | Nippon Kayaku Co Ltd | Photosensitive resin composition and film with cured coating thereof |
| JP4366656B2 (en) * | 2004-07-02 | 2009-11-18 | 東洋紡績株式会社 | Resin having hyperbranch structure and resist agent using the same |
| JP4621036B2 (en) * | 2005-02-08 | 2011-01-26 | 太陽ホールディングス株式会社 | Photosensitive resin composition, cured product thereof and display panel spacer comprising the cured product |
| KR100787341B1 (en) * | 2005-09-06 | 2007-12-18 | 다이요 잉키 세이조 가부시키가이샤 | A resin composition, cured material therefrom, and printing wiring boards using the same |
| JP4849860B2 (en) * | 2005-10-04 | 2012-01-11 | 太陽ホールディングス株式会社 | Photocurable / thermosetting resin composition, cured product thereof, and printed wiring board obtained using the same |
| JP4855083B2 (en) * | 2006-01-25 | 2012-01-18 | 太陽ホールディングス株式会社 | Curable composition and cured product thereof |
| JP4827089B2 (en) * | 2006-04-13 | 2011-11-30 | 太陽ホールディングス株式会社 | Alkali development type solder resist, cured product thereof, and printed wiring board obtained using the same |
-
2007
- 2007-11-07 JP JP2007289996A patent/JP5376793B2/en active Active
-
2008
- 2008-11-06 TW TW097142869A patent/TWI388927B/en active
- 2008-11-06 KR KR1020080109717A patent/KR101451435B1/en active Active
- 2008-11-06 CN CN2008101726797A patent/CN101430506B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR101451435B1 (en) | 2014-10-15 |
| TWI388927B (en) | 2013-03-11 |
| JP2009116110A (en) | 2009-05-28 |
| KR20090047367A (en) | 2009-05-12 |
| JP5376793B2 (en) | 2013-12-25 |
| CN101430506A (en) | 2009-05-13 |
| CN101430506B (en) | 2012-09-26 |
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