TW200947597A - Tray conveying device and electronic part test device with the same - Google Patents

Abstract

A tray conveying device comprises stockers (211-213) for storing customer trays (KST), lifting devices (220A, 220B) for lifting the held trays, a storage plate (290) for temporarily storing the customer trays (KST), transfer arms (240, 250) for transferring the customer trays (KST) between the stockers (211-213), the lifting devices (220A, 220B) and the storage plate (290), and a controller (280) for controlling the transfer arms (240, 250).

Description

[Technical Field] The present invention relates to a tray transporting apparatus for transporting a tray capable of storing various electronic components (hereinafter collectively referred to as ic components) capable of accommodating a semiconductor integrated circuit component or the like and having the same Electronic component testing device. [Prior Art] In the manufacturing process of the 1C element, an electronic component test device is used to test the performance or function of the IC component in the packaged state. A handler constituting the electronic component testing device includes a loading portion, a chamber portion, an unloading portion, and a housing portion. The loading unit moves the 1C component from the client tray to the test tray and carries the test tray into the chamber. Furthermore, the client tray is a tray for storing the 1C component before or after the test, and the IC component before the test is supplied from the previous program to the processor in the state of being stored in the guest tray, and the tested Ic component is stored in the The tray is in the state of being sent from the processor to the next program. On the other hand, the test tray is a dedicated tray that is circulated and transported inside the processor. After the 1C component is placed in the test consumable state, the Ic component is subjected to high temperature or low temperature thermal stress, and then the component is pressed to the test stand provided on the test head. In this state, the tester constituting the electronic component testing device performs the test of 100 million components through the test head. The unloading unit will (4) test the completed 1 (the test tray of the component is moved from the chamber portion: the 1C component is transported to the passenger tray corresponding to the test result, thereby performing classification classified as a good or defective product. The storage department will store the pre-test ^

The client tray of the piece is supplied to the 2247-10331-PF 3 200947597 loading section and the client tray containing the tested ic component is received from the unloading section. The accommodating portion includes: a storage device in which a plurality of guest trays are stacked, a lifting device that supplies the front tray to the loading/unloading portion or the unloading portion by moving the guest tray up and down, and a passenger tray A pallet handling device that moves between the storage and lifting device. [Summary of the Invention]

Problem to be Solved by the Invention When the passenger tray carried by the lifting device is exchanged, the pallet handling device must be moved back and forth between the storage and the lifting device, so that it is easy to become a necking program. In particular, when the number of Ic 7L members (simultaneous measurement numbers) which can be simultaneously tested in the electronic component testing apparatus is increased, it is inevitable that the shifting operation of the passenger tray is accelerated, so that the above tendency becomes more remarkable. An object of the present invention is to provide a pallet transport device and an electronic component test device capable of shortening an exchange operation. Means for Solving the Problems According to the present invention, there is provided a tray transporting apparatus for transporting a tray capable of accommodating electronic components to be tested, #included: a storage device for storing the tray; holding a holding of the tray; temporarily holding the tray a storage device; at least one device between the storage device, the holding device, and the storage device (four); and a control device for controlling the operation of the conveying device (see claim 1). In the above invention, although it is not particularly limited, it is preferable that the storage device is a storage plate, and is held only by the transport I (4).

2247-10331-PF 4 200947597 Keep the tray in custody. In the above invention, the juxtaposition includes a holding device: the handle is preferably: the pre-test tray of the holding component; the device to be tested before the test is stored, and the test is stored. Finishing the test tray of the electronic component; placing the first holding device and the second item of the y罝 distribution range). Between the second holding device and the second holding device (see the application specification # 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The moving distance is shorter than the moving distance of the tray from the holding device to the storage device by the carrying device (see the third item of the patent application). The invention is not particularly limited, but preferably: The storage device comprises: a storage device for storing the electronic component π before the test (4); and a storage device for storing the tested electronic component of the tested electronic component; The device stores an empty tray in which the electronic component to be tested is not stored (see item 4 of the scope of the present application). In the above invention, it is preferable that the at least one conveying device includes the trays that can be independently transported. The i-th and the first carrying device; the control device 'controls the 帛i and the second conveying device, the 帛1 conveying device, the tray is placed in the ith storage I, the first holding device, the Guarantee Handling between the pipe device and the third storage device;: . . . 2, the carrier device transporting the tray between the storage device, the second holding device, and the third storage device (see the third storage device) (see Patent patent

2247-10331-PF 5 200947597 Section 5). In the above invention, it is not limited to „special limit, but it is better: the control device» ^ ^ ^, the handling device, so that the first porting attack, will be stored before the test _ ... storage The device is transported to the second member: the pre-test tray is driven from the device, and the empty disk that has no == test electronic component is transported from the first holding device = storage device; the second carrier device will There is no empty tray for storing the electronic component to be tested, and the third storage device is transported to the second holding device from the storage device, and the test of the tested electronic component is stored. The completed tray is transported from the second holding device to the second storage device (see item 6 of the patent application). The invention is not particularly limited, but it is preferable that the control device controls the first and the first (2) a transport device: the second transport device transports the test completion of the tested electronic component to be tested from the second holding device to the f-protection device; The storage device is transported to The first storage device of the first storage device (see the seventh application of the patent application), the device, the disk, the device, or the invention is not particularly limited, but preferably: the first The second holding device can move the tray in the i-th direction; the first and second conveying devices can independently move the tray along the second direction and the second direction different from the first direction The second, the second, and the third storage devices are disposed along the second direction; the first and third storage devices and the security device are provided for the first to third storage devices Located in the first direction (see item 8 of the patent application scope).

2247-10331-PF 6 200947597 (4) The middle of the shirt is determined by the heart, and this is the best device for grasping the consumables! The first gripping portion of the gripping portion can be integrally moved along the second direction along the second direction: and, . . . 2± See the ninth patent of the patent specification. In the above invention, it is not particularly limited to: £ ^ „ θ . . . , which is preferable: the second conveying device has a plurality of '2 gripping portions that can grip the tray; and the plurality of second gripping portions , can follow the first and the first movement (see the patent scope of the 1G item).

In the above invention, it is not particularly limited, but it is preferable that the U-th second gripping portion can grip a plurality of the trays; both the storage device and the holding device can hold a plurality of the trays (see Please patent the patent item). (2) According to the present invention, there is provided an electronic component testing apparatus for electrically contacting a contact terminal of a tested electronic component with a contact portion of a test head to perform a test of the electronic component to be tested, which includes a tray handling as described above Device (see section 12 of the patent application). Although it is not particularly limited in the above invention, it is preferable that it includes: a loading unit that moves the electronic component to be tested from the tray to the second tray; and a test unit that moves the load from the loading unit The test electronic component is pressed to the contact portion of the test head in a state of being carried on the second tray; the unloading portion moves the tested electronic component to be tested from the second tray to the tray corresponding to the test result; The tray transporting device supplies the tray containing the electronic component to be tested before the test to the loading unit, and the tray containing the tested electronic component that has been tested is taken out from the unloading portion (see

2247-10331-PF 7 200947597 See item 13 of the patent application scope). Advantageous Effects of Invention In the present invention, by temporarily placing the tray in the storage device, the number of times of moving the storage device can be reduced, so that the exchange operation of the tray can be shortened.

[Embodiment J] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 is a schematic cross-sectional view showing an electronic component testing apparatus of the present embodiment. FIG. 2 is a perspective view showing an electronic component testing apparatus of a second drawing, and FIG. 3 is a view showing processing of a tray in the electronic component testing apparatus of FIG. 1. Conceptual illustration. Further, Fig. 3 is a view for explaining a method of processing a tray in an electronic component testing apparatus, and actually includes a portion in which elements arranged in the vertical direction are displayed in a plane. Therefore, its mechanical (stereo) configuration is illustrated in Figure 2. 'The electronic component testing device of the present embodiment is a test in which the temperature of the κ element is applied with a temperature of a commercial temperature or a low temperature. (Check whether the claw element is properly (4) 'Depending on the test result, the c component is classified. The device is composed of a processor 1, a test head 5 and a test device 6. The IC component is transferred from the client tray m to the test tray TST by the test of the IC component of the electronic component test device, and carried on the test tray m Therefore, the processor of the present embodiment, as shown in FIG. 3, is composed of the following: a storage unit that accommodates a κ element or a test before carrying the test.

2247-10331-PF 200947597 The client tray KST of the 1C component after the test; the loading unit 300 moves the IC component transferred from the storage unit 200 to the test tray TST and sends it to the empty chamber unit 100; The thermal stress is pressed to the empty chamber portion 1〇0 of the test head 5 in a state of being stored in the test tray TST; the unloading unit 400' carries out the tested ic element from the empty chamber portion 1 And at the same time moved to the client tray KST.

The test stand 50 provided on the test head 5 is connected to the test device 6 through the electric wire 7 shown in Fig. 1. At the time of IC component test, the 1C component electrically connected to the test stand 5 is connected to the test device 6 through the electric wire 7, and the test signal is transmitted and received between the π element and the test device 6. As shown in the figure, a space 8 is provided in a portion of the lower portion of the processor 1, and the test head 5 is disposed in a replaceable manner in the space 8, and is formed on the main base (substrate) 101 of the processing machine. The opening 1Gla can make the Ic component and the test head 5: the test socket 5 electrically contact. When the type of the IC component is changed, the test stand 50 of the test head 5 is replaced with a test stand of a type suitable for the exchange. The following is a detailed description of each part of the processor 1. <Storage Unit 200> The figure shows an exploded view of the electrons in Fig. 1 , and Fig. 5 shows a perspective view of the guest consumables of the electric use bin, and Fig. 6 shows the second 4 set. The front view of the storage section of the store, the first? Fig. 8 shows the electronic component: Fig. 8 shows the storage section of Fig. 6: the storage section: the front side of the arm, and the second section of Fig. 6 = the second device of the transport device. She tweeted the front view of the transfer arm of the 4th pick, and the 10th figure shows the block diagram of the control system of the storage part of the electronic component test device. 2247-1033 l-pf 200947597 As shown in the second and sixth figures, the storage unit 2 includes: storage 211 to 213 for storing the client tray KST; lifting devices 220A and 220B for holding the passenger tray KST and lifting the lifting; and storing the client tray in the storage 211 to 213 The tray conveying device 23 that is transported between the lifting devices 220A and 220B. As shown in Figures 2 and 3, the storage unit 2 includes: a pre-test storage 211 for storing the client tray KST for storing the IC components before the test; the test completed e storage 212, and the storage and storage are classified according to the test results. IC: The customer's tray KST' empty tray warehouse 213' of the component stores the passenger tray KST without the empty ic component. As shown in the fourth circle, these storages 211 to 213 include: a frame-shaped tray support frame 214; and a lifting table 215 which can be accessed from the lower portion of the tray support frame 214 and which can be raised. In the tray support frame 214, a plurality of client trays kst are stacked and stacked, and the stacked client trays KST are moved up and down by the lift table 215. In the present embodiment, as shown in FIG. 5, the guest tray KST is provided with six rows of six storage units 91 for accommodating the Ic element, but actually corresponds to the type of the 1C element. There are various variations in the configuration. The warehouses 211 to 213 have the same structure. Therefore, the appropriate number can be set as the number of the 1C warehouse 211 before the test, the 1C warehouse 212 and the second pallet warehouse 213. In the present embodiment, as shown in Fig. 2, the 1C storage 211, the test Wu IC storage 212, and the empty pallet storage 213 are arranged side by side on the X-axis side.

2247-10331-PF 10 200947597 Towards. As shown in Figs. 2 and 3, a storage sh-β is provided in the storage unit 2A as the pre-test IC warehouse 211. On the other hand, seven storage units STK-i, sn-2, ..., STK-7 are provided in the storage unit 2 as the test completion Ic storage 212, which can be classified into a maximum of seven types of residuals corresponding to the results of the test. That is to say, in addition to the difference between good and bad products, ‘good products can be divided into high-speed products, medium-speed W and low-speed, or bad products can be divided into those who need to be retested. Φ Further, in the storage unit 200, two storage STK-Es are provided between the STK-4 and the STK-5 as the empty tray storage 213. In this STK_E, the stacking storage can be sent to the passenger tray KST which is open to the window portion 4〇6 of the clock carrier portion 4〇〇. The electronic component test apparatus of the present embodiment has two first lifting devices 22A and five second lifting devices 22A as shown in Fig. 6. In the two window portions 3〇6 of the main unit pedestal 1〇1, the loading unit 300 is provided with one first lifting device 22〇Αβ, and the unloading unit 4〇〇© is opened to the main base 101. Each of the five window portions 406 is provided with one second lifting device 220A. As shown in Fig. 7, the lifting devices 220 A and 22 0 are composed of the following: a z-axis rail 221 which is suspended from the main base 1〇1, and a platform 222 which is provided on the Z-axis rail 221 and which can be raised and lowered. The platform 222 can be raised and lowered between the i-th predetermined position H1 and the second predetermined position H2 by an actuator not shown. The second position Hi' is the upper limit of the z-axis direction of the platform .222. When the platform 222 is at the first predetermined position 1^, the transmission window 3〇6 (or the window portion 2247: 10331-PF "200947597 406) ' makes The client tray KST faces the loading unit 3 (or the unloading unit 4). In contrast, the second predetermined position Hz is the lower limit of the redundant direction of the platform 222, and the platform 222 is located at the second predetermined position H2. In the state, the receiving and transferring of the passenger tray KST between the pallet handling and the H30 is performed. Thus, the lifting device 220A, 220B can be held by the passenger tray KST being held on the platform 222 and being lifted and lowered. The end tray is moved between the storage portion 200 and the loading portion 300 (or the unloading portion 4A). ❹ Ο As shown in Figs. 6 and 7, the tray handling device 23 includes: a main base 101 and The magazine 211 is provided with a #χ axis rail 231 along the x-axis direction, a first transport arm 240 and a second transport arm 250 provided on the x-axis rail 231. The first transport arm 240 and the second transport arm 9t; The cooker arm 250 can be independently moved in the X-axis direction on the X-axis path k 2 31 by an actuator (not shown). As shown in FIG. 8, the first transport arm 24 includes: two cymbal rails 242 and 245 which are disposed on the base portion 241 of the cymbal rail 241 and movable in the y-axis direction, and are fixed to the base shaft 241; The roads 242 and 245 can be used to move the two holding heads 243 and 246 along the direction of the x-axis. Further, in the eighth figure, the first one is displayed as the first one. The younger brother 1 holds the state in which the master 243 has descended, and

The state in which the second holding head 246 has risen is 3 aL open. Further, the first transfer arm 240 can also move in the γ-axis direction. Each of the holding heads 243 and 246 and the 铱 兹 山 山 5 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉 藉The roads 242, 245, % # + m are mounted on the same base 241, and therefore cannot move independently in the horizontal direction.

2247-10331-PF 12 200947597 Further, the holding heads 243 and 246 are respectively disposed with the opening and closing type holding claws 244 and 247 for holding the client tray KST downward. In the present embodiment, the holding heads 243' 246 are capable of holding the two client trays KST at the same time. Further, the number of the passenger trays m held by the holding heads 243 and 246 at the same time is not particularly limited. The first transport arm 240 transports the passenger tray kst containing the pre-test IC component from the pre-test storage 211 to the i-th lifting device 22A, and the empty passenger tray KST that does not contain the 1c component. 1 The lifting device 220A is transported to the storage plate 290. Normally, the i-th holding head 243 of the first transfer arm 240 transports the guest tray lamp ‘with the IC element before the test from the pre-test storage 211 to

The first lifting device 220A' and the 固2 holding head 246 transport the empty passenger disk KST that does not contain the IC member from the jth lifting device 22A to the storage plate 290. On the other hand, as shown in Fig. 9, the second transport arm 250 includes two movable heads 26A and 27B provided on the X-axis rail 241. The first and second movable heads 260 and 270 are moved independently of each other in the z-axis direction by an actuator that is not particularly shown. In the case of the #2, the movable heads 260 and 270 of the second transport arm 25 0 are also movable in the γ-axis direction. The first movable head 260 includes a first base portion 261 that is disposed on the X-axis rail 241 and movable in the X-axis direction, and a first one of the first shaft rails 262 that are fixed to the base portion 261, and the crucible rail 262 can be disposed along the crucible rail 262. Move the axis in the direction of the axis! Hold head 263. Further, in Fig. 9, it is shown that the third holding head 263 has been lowered. ·

2247-10331-TF 13 200947597 The first holding head 263 can be moved without the Z: direction. Further, in the first embodiment in which the first holding head 263 is disposed to open and close the guest tray KST, the i-th holding head (10) can hold the claw 264. In this case, the two hopper trays KST are held at the same time. Further, the amount of the i-th retaining head 26 is not particularly limited. The number of the retaining tray KST is 地 = ground '[2 movable head 27 Including: the second Z-axis rail that can be moved in the X pumping direction by the second axis Z7 in the X pumping direction, the second "71" is fixed to the second base (7) H, and the two-axis rail 272 can be moved along the z = (four) The second solid (four) 273. Further, in Fig. 9, the state in which the second holding head 273 has been lowered is shown. The second holding head milk can be moved in the Z-axis direction by an actuator not specifically shown. Further, for the chain 9 assisting person, the second holding member m is disposed downward to dispose the opening and closing type i-th holding claw 274 for holding the client tray KST. In the present embodiment, the number of the passenger trays m held by the second holding head 273 at the same time is not particularly limited. The second transport arm 25G' transports the passenger tray KST' without the storage element from the storage plate 29 or the empty tray storage 213 to the second lifting device 220B, and the passenger tray in which the tested Ic element is stored is The second lifting device 220B is transported to the test completed storage 212. As shown in Fig. 10, the tray conveyance device 23 is connected to the control device 280 ° control device 280 ′ to transmit a control signal to each actuator (not shown) of the tray conveyance device 230, whereby it is possible to control Fi carrying arm

2247-10331-PF 14 200947597 240 and second transport arm 250. Further, the lifting devices 220A, 220B are also connected to the control device 280, and the control device 280 transmits a control signal to the lifting device 22A'', and each actuation (not shown), whereby the platform 222 can be controlled. Lifting action.托盘 托盘 The tray transporting device 23〇 in the form of a continuous embodiment has a horizontal movement of the platform 222 which allows the holding heads 243, 246, 263, 273 to interfere with the lifting devices 220Α, 220Β as shown in Figs. 6 and 7 The height position μ], ^ (hereinafter only referred to as the possible movement positions Μι, Μ 2). The first possible movement position is between the first predetermined position H1 of the lifting device 220, and the second predetermined position H2. On the other hand, the second movement possible position m2 is located in the second predetermined position 02 of the lifting device Wei, the 2 gauge, and the second flat state of the storage 2 ι ～ 213, and passes through the warehouses 211 to 213 and the second predetermined position 273. : 'Form a space that allows the holding heads 243, 246, and Ζ Γ to pass.

In this embodiment, the 篦7 I also has any _###################################################################################### Sage + ^ moves are stuffed enough to move horizontally. In particular, the transport arm 240 is particularly sturdy in the second movement, and the second holding position 243, 2 can be placed in the second position or the second movement is in the horizontal position. In the state of &quot;M2), the holding head of the holding head at the ί movement may be placed in the state where the holding head 246 of the holding head 243 is located at the 2nd &quot;M〇 and the other position w , enough Γ position M2 (or ^ move possible

The 2247-10331-PF b scoop moves the two holding heads 243, 246 upwards at a level of 15 200947597 million. Furthermore, for example, at 2 liters of liters, the holding heads 243, 246, 263, and 273 that move the position 2 in the second movement may move horizontally and move 2 soups, 9 lovers from 1 to 213. Regardless of the position of the lifting device or the platform 222, the solids (10), 263, and 273 can be moved in the horizontal direction. Furthermore, in this embodiment, as shown in FIG.

There is a storage board 290 for temporarily protecting the Hongwa Society blood τ, η 'ZUU e client tray KST. The storage 290 is composed of a plate-shaped component, which is placed on the board of the board, and is carried by the tray transporting device 23, the tray KST, on the sorghum 90n tt root, the plate 290, and the storage plate 290 can hold the passenger tray. like. In the storage plate 29A of this embodiment, the (10) end and the disk KST can be stacked and held. Further, the storage plate of the present invention is not limited to a plate shape as long as it is a shape that can be placed on the tray conveyance device. The storage plate 290 is disposed between the second position of the tray transfer device (10) and the second movement of the target position I, and is disposed between the second and second lifting devices. Located above the STK-3 of the tested storage 212. In the present embodiment, the passenger tray (10) is moved from the platform 222 of the second lifting device 220A located at the second predetermined position 02 to the storage plate 29 by the 240th. The distance of the cymbal is shorter than the distance from the transport arm 240 to move the passenger tray from the platform 222 to the empty pallet 213. Further, in the present invention, the above-mentioned passenger tray = moving distance is included in all Direction of movement distance. <Loading unit 30Q> • - Figure 11 shows the measurement of the electronic component tester shown in Figure i

2247-10331-PF 16 200947597 分解 Exploded oblique view of the test tray. The above-described guest tray KST is transported from the pre-test storage 211 to the first lifting device 22A by the pallet handling device 23, and then transported from the lower side of the main base 1〇1 to the lower side of the main base 1〇1 by the i-th lifting device 220A. Opening to the two window portions 306 of the main base 101 of the loading portion. Further, in the loading unit 300, the component carrying device 31 暂时 temporarily transfers the ic elements stacked in the guest tray kst to the aligner (i^eciser) Φ 305 ', hereby corrects the mutual positional relationship between the 1C elements. . The component handling device 310 then transfers the IC components transferred to the aligner 3〇5 to the test tray TST parked in the loading unit 300. The test tray tst, as shown in FIG. π, is arranged in the square frame 12 at equal intervals and at equal intervals, on both sides of the pallet 13 and on the side 12a of the square frame 12 opposite to the pallet 13 The mounting sheets 14 are protruded at equal intervals. Between the pallets 13 or between the pallets 13 and the sides i2a, the insert accommodating portion 15 is formed by two slats: 14 pieces. One insert 16 can be accommodated in each of the insert accommodating portions 15, and the insert 16 is attached to the mounting sheet 14 in a floating state using the fastener 17. Therefore, mounting holes 19 for attaching the insert 16 to the mounting piece 14 are formed at both end portions of the insert 16. This insert 16, as shown in Fig. 11, is provided with 64 rows of 4 rows and 16 columns. Further, each of the inserts 16 has the same shape and the same size, and the ic elements are housed in the respective inserts 16 respectively. The shape of the component housing portion 18 of the insert 16 is determined in accordance with the shape of the stored c-element, and is a square concave shape in the example shown in Fig. 1. .

2247-10331-PF 17 200947597 ❸

Returning to Fig. 2, the loading unit 300 has a component carrying device 3ig that moves 1 (the component is moved from the client tray m to the test tray TST. The component carrying device 31 includes: γ along the device main base m The shaft rail 3i can be moved by the movable arm 312 which is movable in the γ-axis direction on the γ-axis rail 311, and the movable head 313 which is supported by the movable arm 312 and can be moved in the pumping direction. The movable 帛 313 is provided with a plurality of downwardly attached pads (the unillustrated absorbing pad can be moved up and down by an actuator not specifically illustrated, and a plurality of IC components can be moved from the client tray to the test tray at one time. Further, as shown in Figures 2 and 3, an aligner 3〇5 is provided between the client tray KST and the test tray TST. Although not specifically shown, the aligner 305 has a relatively deep a recess, the periphery of which is surrounded by the inclined surface. Therefore, the lc element placed on the test tray TST from the client tray KST is dropped into the aligner 305 before being moved to the test tray TST The positional relationship of the IC components can be correctly determined, and thus can be accurately The IC component is transferred to the test tray tst. When all the inserts 16 of the test tray TST carry the Ic component, the test tray TST is moved into the chamber 1 by the tray circulation device 1〇2. On the other hand, when all the 1C components stored in the passenger tray KST are transferred to the test tray TST, the first lifting device 220A lowers the empty tray and delivers it to the first transfer arm 240 of the tray transport device 230. The arm 240 temporarily stores the empty tray||||||||||||||||||||||||||||||||||||||||||||||||| The empty tray is transported from the storage plate 290 to the second lifting device 220B. The test tray TST described in the room 1 is loaded into the loading unit 300 and sent to the adjacent ι〇0. Each of the 1c components performs the test of the IC component in a state of being carried on the test tray TST. e ❹ , as shown in Fig. 2 and Fig. 3, the chamber portion i 〇〇 is composed of the following values: , the thermal stress of the dish is applied to the soaking chamber 110 placed on the test tray; the TST IC element; The soaking chamber 110, the 1C element in a state in which thermal stress is applied, and the test chamber 12Q in contact with the test head 5; the heat removing chamber 13A from which the thermal stress is removed from the 1C element which is to be tested. The soaking chamber is configured to protrude above the test chamber. Moreover, as shown in the conceptual diagram of FIG. 3, a vertical carrying device is disposed inside, and a plurality of test trays m in the working room are held by the vertical carrying device while being in standby. Mainly, the high-temperature or low-temperature thermal stress of about ～55 to 150 degrees Celsius in the standby is applied to the Ic element. In the test chamber 12G, the central portion of the test chamber is provided with a test head 5, and as shown in the conceptual diagram of Fig. 3, the test tray m is transported to the upper side of the test head 5 by a horizontal transport device. (by a pressing device (not shown) The 1C element is pressed to the test stand 50 on the test head 5. Thereby, the input/output terminal of the IC component is electrically contacted with the contact pin of the test head 5, and in this state, the tester 6 performs the test of the IC component through the test head 5. The result of this test, the selection of the temple μ #, guarantee corresponds to the identification number of the test tray TST

2247-10331-PF 19 200947597 code, and the number of the ic component assigned in the test tray TST, is stored in the memory device of the electronic component test device. The heat removal chamber 130 is also disposed so as to protrude above the test chamber 120 as the heat equalization chamber 11 is provided. As shown in the conceptual diagram of Fig. 3, a vertical conveyance device is provided. In the heat removal chamber 130, when the temperature is high in the heat equalizing chamber 110, the 1C element is moved back to room temperature after the 1C element is cooled to room temperature by air blowing. On the other hand, when the soaking chamber Φ applies a low temperature to the 1C element, the IC element is heated and returned to a temperature at which no condensed water is generated by a warm air or a heater, and the The warm IC element is carried out to the unloading portion 40. On the upper portion of the soaking chamber 11 ,, an inlet for carrying the test tray τπ from the main susceptor 101 is formed. On the other hand, the upper portion of the heat removing chamber 13 is formed. The test tray TST is carried out to the outlet of the main base 110. Further, on the main base 101, a tray circulation device 102 is provided for passing the test tray TST from the chamber portion 100. For example, the tray_circulation device 102 is configured to transport the test tray tst by a rotary roller or the like. The test tray TST carried out from the heat removal chamber 130 by the tray circulation device 102 passes through the unloading unit 40 0 and the loading unit 300. Returning to the heat equalizing chamber 110. <Unloading unit 400> In the unloading unit 400, the test is performed The tested IC component is transported and sorted to the client tray KST corresponding to the test result from the test tray TST carried out from the heat removal chamber 13A. As shown in Fig. 2, the main base 1 of the unloading portion 400 is removed. On the first side, five window portions 406 are formed. The window portion 406 is disposed such that the passenger tray KST that has been transported from the remaining portion 200 by the second lifting device 22 〇β ° 2247-10331-PF 20 200947597 faces the unloading portion 400. The unloading unit 400' has two component sorting devices 41A to move the tested IC components from the test tray TST to the guest tray KST. The component sorting device 41G and the component carrying device 310 have the same: γ-axis track 411. The movable arm 412 and the movable head 413 can simultaneously move a plurality of IC components from the test tray TST to the guest tray [π. As shown in FIGS. 6 and 7, each window portion 406 is provided below φ The second lifting device 202B that raises and lowers the passenger tray KST. Here, the passenger tray KST that is loaded with the tested IC component is carried and lowered, and the full tray is received by the second transport arm 250 of the tray transport device 230. The second transport arm 250 transports the fully loaded tray to In the present embodiment, the window portion 406 at five places is formed in the unloading portion 4, so that five types (test results) can be immediately distinguished. In the case of corresponding to six types or more, the five types of client trays corresponding to the occurrence frequency are always located in the window portion 6, and the type having a low frequency is temporarily placed in the buffer portion 4〇5 (see the third section). Fig.), at a specific point in time, a guest tray corresponding to the kind can be called to the window portion 406. The operation of the guest tray in the storage unit of the present embodiment will be described below. 12A to 12M are schematic front views showing the first column of the method for transporting the client tray in the storage unit according to the embodiment of the present invention, and the first diagram showing the method for transporting the client tray in the storage unit of the present invention. No. 2

2247-10331-PF 200947597 A schematic front view of an example. Further, in the drawings 12A to 13K, the hatched guest tray indicates the tray in which the 1C component is housed, and the guest tray which is not hatched indicates the empty tray in which the 1C component is not accommodated. Further, the description of the drawings and the following description are not limited to the window portions 3〇6 and 4〇6 of the tray conveyance start point and the conveyance destination. First, referring to the drawings 12A to 12M, the use of the storage plate 29A will convey the empty tray £51 from the window portion 3〇6 of the loading unit 3〇〇 to the window portion 406 of the unloading unit 400 by the tray transport device 230. Methods. In addition, in the drawings 12A to 12M, for the sake of easy understanding, only the program for transporting the empty tray from the transport operation of the tray is used, and the transport arm 24 is actually transported. The 〇, 25 〇 and the lifting devices 220A and 220B simultaneously and independently carry out the handling of the plurality of passenger trays. The component transfer device 310 of the f-loading unit 300 moves all the IC components from the guest tray of the second window portion 3G6 located on the left side of FIG. 12A to the test tray, as shown in the figure, the guest tray It is an empty (four) hunger that does not contain the pieces. If the guest tray is an empty tray KSTe, as shown in the mth figure, hold the empty tray KSL! The lifting device s 2m is lowered to the second predetermined position H". Further, the empty tray KSTe is stacked on the passenger carrier with the full ic component. As shown in Fig. 12C, the second holding 246 is located in the lowered fi lifting device. Above #继之' As shown in Fig. 12D, the second holding head (10) is lowered, 1 the lifting device 220A receives the empty tray KSTe. % % - followed by the 'second holding head 246, such as the 12E圃蝌- and the UtL diagram No, hold 2247^1033 ΐ-ϊ&gt;ρ 22 200947597 while the tray KSTe is rising to the second position [moving cut j]. Thereby, the platform 222 of the first lifting device 220A is exposed to be fully loaded. As shown in FIG. 12F, the first transfer arm 240 is horizontally moved at the first possible position of movement so that the second holding head (10) is positioned above the use manifold plate 290, and then, the second holding head 24*, KSTe When the second tray is not stored in the storage tray 29, the first transport arm 240 must transport the *: the tray to the empty tray storage 213. In contrast, this embodiment: The empty (four) hunger is temporarily stored in the storage board 29q, and the number of accesses of the second transport arm 240 to the magazines 211 to 213 is reduced. The exchange operation of the passenger tray. In addition, the s column is shortened. "When the storage tray 290 is fully loaded with the passenger tray, the first transport arm 24 can also be stored in the tray 2, and the work (four) port is moved to the empty tray = 'As shown in Figure 12G, the third transport arm·

Head 246 rises to the first movement possible... as shown in Fig. 12H,; = arm wide moves 'from the storage plate (9). And the U downs, please return the tens of thousands of A. At the same time, as the _n figure does not '帛2, the i-th movable movement of the transport arm 250 may move horizontally at the position 1 'the stop at the storage plate (10) portion 406 as if not shown in the figure. The second lifting device η device 4 of the fourth window 4 406 is lowered by the user. Furthermore, 'the second lifting position』. Full of I. The component =' is 70 pieces of components sorted by the unloading unit 400, and becomes the full-load tray KSTf. Following the 〗 〖Rushang 1 Ο T rwi 21, the first holding of the i-th movable head 26〇

2247-10331-PF 23 200947597 When the 263 is lowered, the empty tray is received from the storage plate 29, and the lifting device 220 is lowered to the second predetermined position Η2, and the second lifting device 220 is started to rise. In the first place, the i-th holding head of the i-th movable head 260, =:: while holding the empty one, it rises to the first! Moves 4H: the first lifting device 220A rises to the first predetermined position! The full-load tray KSTf passes through the window portion 3. 6 facing the component transporting device (10) of the loading unit _ 300, and starts the test before the test 1 = the shifting operation of the tray KSTf. As shown in the figure m, the first movable head 260 is horizontally moved above the leak of the lowered second lifting device, the i-th holding head 2 is lowered, and the empty tray KSTe is placed on the second lifting device. _on. The empty tray m' is placed on the full load tray KSTf which is originally held on the platform 222 of the second lifting device 2. Then, as shown in Fig. 12L, the 帛1 holding head 263 rises to the ith movement possible position 1' 帛! The movable head 26 is horizontally moved and retracted from above the second lifting device 220B. Then, as shown in Fig. 12M, the second lifting device 2 is raised to the first predetermined position H1'. The empty tray KSTe passes through the side of the window to the unloading portion 400. The component sorting device 410 of the unloading unit 400, the tool set 410, restarts moving the tested I C component to the empty tray KSTe. Further, in the case where there is no storage plate, the empty tray is supplied from the empty tray storage 213 to the second lifting device 220B by the first or second movable heads 260, 270'. ' 2247-10331-PF 24 200947597 Describes that the passenger tray KSTr of the pallet handling device element is followed by the window portion 306 of the inlet portion 300, referring to Figures 13A to 13K, 230 'will unload the ic that must be retested The window portion 406 of the portion 400 is transported to the loading method. In the figure, for the sake of easy understanding, only the procedures for transporting the retest tray during the transport operation of the storage board 29〇, 4 red as &amp; pallets, and the actual handling, 陁 陁 陁, 埯 埯In the middle, the transport arm 240, 250 and the lift: 20 Β simultaneously and independently carry out the transport of the plurality of passenger trays: the transport of the retest trays described below can be performed in a sizable manner so that the second transport arm 2 此η a The second lifting device of the predetermined position 1 retests the tray from the moving distance at the second (four), and is shorter than the second moving platform 222 to the storage plate platform __ before the storage 211 == retest the tray from the μ, + , μ * U moving distance. Further, in the present invention, the above-described retesting tray is moved. In the middle, the movement containing all the directions will have to be retested. One of the windows is placed in the first tray 406 from the right of the third drawing. It is shown that the second lifting device 220 Β is lowered to the second predetermined position, and the force is set, and the 再 2 is further stacked with the KSTr, and the empty tray body that houses the 1C component is placed. Then, as shown in Fig. 13C, the second movable head 260 7jc moves the first movable ten of the 殍uu to the lower one, in order to avoid interference to the upper side of the ith. Move horizontally. • The moving head is deleted, and the second movable head 270 is also succeeded. 5 The first holding head 263 of the movable head 260 is lowered.

2247-10331-PF 25 200947597 .2 Lifting device 2203 receives the retest tray £3^. Then, the 'first holding head 263, like the _ test tray KSTr, rises and does not hold, and then moves again... flat shifts; /: above. Thereby, the third head = the holding head 263 is located on the storage board 29. The square retracement 0 is retracted from the top of the second lifting device _, and is exposed on the platform 222 of the second liter upper tray KST&quot; 220B. The first holding head 263 is lowered to the first to test the tray muscle. It is placed on the storage board 29. on. =: Set the second 2nd from the right in the picture. n At the same time, the first drop is set to drop at 220A. Then, as shown in Fig. 3F, 筮τι々 ' 2 Μ Η ', the first lifting device 220 ΑΤ is lowered to the second gauge position Η 2, and at the same time, the music position M1. Furthermore, it has been lowered ^^ 260 to rise to the first move can be specified. It is known that the descending second lifting device 220 is raised to the first] the component sorting device of the jr carrier 4° 须 which needs to be retested, and the 41° resumption of the phase must be centered (4) in the KSTe. Then, as the first β 9〇n ® U 'the first movable head 26G moves horizontally to the silver s ^ from above the storage plate 290, the first transfer arm 240 moves in the horizontal direction so that 笫9 m is The second holding head 6 is located above the storage plate 29A. Following, as the Hum tube ... two Sis; the first: a 6 drop, from the ^ ^ KSTr. In addition, the two arms 24° and the second transfer arm 250 of the storage plate 290 must respectively access the measurement type of the re-test tray, and by *, for this, it is less The storage μ ^ re-test tray is temporarily stored in the storage board 290, and is reduced to the storage access machine, thereby shortening the exchange of the client tray

2247-10331-PF 26 200947597

i 'As shown in Fig. 131 Ο 试 The test tray is grasped and raised to the first position, and the movement may be 246 to hold the re-measuring arm (10) horizontally, so that the first = 1 is set, and the first 1 is moved above the lifting device 220 Then, the 颂 颂 246 is located in the descending second test tray, and the hunger is placed on the platform 222 of the 22nd drop device. '图不不' 帛 2 holding head 246 rises to the first

After the position can be made, the first transport arm 24〇 is retracted from the top. 4 and "UA followed, as shown in the mth figure, the first lifting device Wei 1 specified position throw, and then test the tray KST; the first, carrying .... components:: set 2, 3066 on the manned test, will κ : The component is retested in order to move the ic component re-tray KSTr to the test tray TST. Further, when the first lifter 220A is full of the passenger tray KST, the first transport arm 240 can also move the retest tray KSTr to the test. Front storage (1). Further, '帛! Handling arm 24 () can also use the first holding head 243' to carry the retest tray hunger from the storage board to the second 220A. ^ As described above, in the present embodiment, By temporarily storing the client tray KST on the storage plate 290, the number of times the tray transporting device i 23 () moves to the storage 211 to 213 can be reduced, and the exchange time of the guest tray KST in the window portions 306 and 406 can be shortened. Furthermore, the embodiments described above are described to facilitate the understanding of the present invention and are not intended to limit the present invention. Therefore, in the above embodiments

2247-I0331-PF 27 200947597 The various elements disclosed include all or more of the 舛 舛 属于 属于 技术 技术 技术 技术. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing the actual state according to the present invention. Fig. 2 is a perspective view showing the electronic component testing device of Fig. 1. Fig. 3 is a conceptual view showing the electronic component testing device of Fig. 1. The processing of the centering tray is shown in Fig. 4, which shows the electronic component test device of Fig. 1 and the customer's bracket of the storage used in the exhibition. Use the oblique view of the disc. Fig. 6 is a view showing a storage portion of the electronic component testing device of Fig. 1 showing a side view of the storage portion of Fig. 6. ❿ Fig. 8 is a front elevational view showing the second transfer arm of the tray transporting device in the storage unit of Fig. 6. Fig. 9 is a front elevational view showing the second transfer arm of the tray transporting device in the storage unit of Fig. 6. Fig. 10 is a block diagram showing a control system of the storage unit of the electronic component testing device shown in Fig. 1. Fig. 11 is an exploded perspective view showing the test tray used in the electronic component testing apparatus shown in Fig. 1. Fig. 12 is a schematic front view (-) showing a first example of the method of transporting the passenger tray in the storage unit according to the embodiment of the present invention 2247-10331-PF 28 200947597. Fig. 12 is a schematic front view (part 2) of the first example of the storage tray in the storage unit of the first embodiment of the storage and transportation method according to the embodiment of the present invention. Fig. 12C is a view showing the λ of the embodiment of the present invention. A schematic front view (No. 3) of the first example of the passenger tray in the storage unit. Fig. 12D shows a first example of the guest tray stored in the ^^. A rough front view (fourth). e ❹ conveys a schematic front view (fifth) of the first example of the passenger tray in the storage unit according to the embodiment of the present invention. The figure shows the storage unit in the embodiment of the present invention. A schematic front view (sixth) of the first example of the passenger tray. Fig. 2G is a schematic front view (No. 7) showing a first example of the method of transporting the client tray in the storage unit according to the embodiment of the present invention. The figure shows a schematic front view (eighth) of the first example of the method of the passenger tray in the storage unit according to the embodiment of the present invention. (2) shows a schematic front view of the first example of the storage and transportation method according to the embodiment of the present invention. (9) End tray = 121 shows a passenger tray in the storage portion of the embodiment of the present invention The transportation method is sufficient, and the front view of the first example is shown in the figure (10). The 12K diagram shows a schematic front view of the first example of the method of the passenger tray in the storage unit according to the embodiment of the present invention (10). Fig. 12 and Fig. 12L are schematic front views showing the first example of the guest tray in the storage unit according to the embodiment of the present invention. (12) The coffee chart shows the guest in the library of the embodiment of the present invention. End tray

2247-10331-PF 29 200947597 How to carry out the method The schematic front view of the first example (13). Fig. 13 is a schematic front view (1) showing a second example of the passenger tray in the storage portion of the second core 4 of the embodiment of the present invention. The figure shows a schematic front view (part 2) of an example of a passenger tray in the storage unit of the second U in the present embodiment. 13C is a schematic front view (No. 3) showing a second example of the transport method according to the embodiment of the present invention; and FIG. 13D is a schematic view showing a second example of the storage and transport method according to the embodiment of the present invention. Front view (fourth). The conveyance drawing shows a schematic front view (fifth) of the second example of the method of transporting the passenger tray in the storage unit according to the embodiment of the present invention. Fig. 3 is a schematic front view (sixth) showing a second example of the method of transporting the passenger tray in the material portion of the embodiment of the present invention.搬运 Handling ^3G image display * The front view of the second example of the guest tray in the storage unit of the embodiment of the present invention (the seventh) ^ = 3 is a diagram showing the passenger tray in the storage portion of the embodiment of the present invention A schematic front view of the second example of the law (eighth). The figure shows a schematic front view (ninth) of a second example of the passenger tray in the storage unit according to the embodiment of the present invention. Figs. 13 and 13J are schematic front views (10) showing a second example of the method of the guest tray in the storage unit according to the embodiment of the present invention. Fig. 13K is a schematic front view (11) showing a second example of the method of the guest tray in the storage unit according to the embodiment of the present invention. [Main component symbol description]

2247-10331-PF 30 200947597 &quot; 1 processor 5 test head 50 test socket 6 test device 7 electric wire 8 space 91 storage portion 10 0 empty chamber portion 101 main base (substrate) 1 101 a opening 200 storage portion 211 to 213 Storage 214 tray support frame 215 lifting table 220A, 220B lifting device φ 222 platform 230 pallet conveying device 0 231 X-axis way 240 first carrying arm 243 first holding head 246 second holding head 250 second carrying arm 260 first movable Head 263 first holding head 31

2247-10331-PF 200947597 270 second movable head 270 273 second holding head 280 control device 290 storage plate 300 loading unit 306 window portion 400 unloading portion 406 window portion

2247-10331-PF 32

Claims (1)

200947597 VII. Patent application scope ·································································································· a storage device for the tray; and at least one conveying device for transporting the tray between the storage device and the holding device; A control device that controls the operation of the conveying device. 2. The first holding device of claim 1, comprising: the tray transporting device according to the item, wherein the solid first holding device holds a pre-test tray for storing the tested electronic component before the test; and the second retaining device holds the storage device. The tested test tray of the tested electronic component is tested; and the (four) tube device is disposed between the first holding device and the second holding device. &lt;3. The tray transporting device according to the patent scope 帛μ, wherein the transporting device moves from the holding device_storage device (4) to the tray (4), and is shorter than the carrier device from the holder device The moving distance of the tray of the storage device. 4. The tray handling device of claim </ RTI> wherein the storage device comprises: a first storage device s storing a pre-test tray containing the tested electronic component 2247-10331-PF 33 200947597 before testing; The second storage device stores the test tray in which the tested electronic component is tested, and the third storage device stores an empty tray in which the electronic component to be tested is not stored. 5. The tray transporting device according to claim 4, wherein the at least one transporting device includes first and second transporting devices capable of independently transporting the pallet; the control device controls the first and second transporting The apparatus is configured to: convey the tray between the first storage device, the first holding device, the storage device, and the third storage device; and the second conveying device stores the tray in the storage The device, the second holding device, and the second storage device are transported between the third storage devices. 6. The tray transfer device according to claim 4, wherein the control device controls the first and second transfer devices such that the first transfer device stores the tested electronic component before the test The pre-test tray is transported from the first storage device to the ith holding device, and the empty tray of the tested electronic component that has not been tested is transported from the first holding device to the storage device; the second transport device The empty tray for storing the electronic component to be tested is not transported from the storage device or the third storage device to the second holding device, and the test tray containing the tested electronic component to be tested is stored therefrom. The second holding device is transported to the second storage device. 7. The tray handling device according to claim 4, wherein the control device 2247-10331-PF 34 200947597 controls the first and the second conveying device such that: the second conveying device is stored The test completed tray of the component is transported from the second holding device 2 to the storage device by the second electronic device 2, and the first transport device transports the test tray from the warranty to the first The 丨 holding device or the 丨 storage device. 8. The tray transporting device ❹ 1 and the second holding device ′ according to the fourth aspect of the invention are capable of moving the tray along the first direction to the first and second conveying devices. The tray is independently moved in the direction and the second direction different from the first direction; the first, the second and the third storage devices are arranged along the direction; the first is relative to the first In the third storage device, the Jth and 2nd sets and the storage device are located in the i-th direction. 9. The tray transporting device according to claim 8, wherein the transporting device has a plurality of first gripping portions that can grip the tray, and the plurality of first gripping portions can follow the first The direction is 'only' and can move integrally along the second direction. 10. The pallet transport device according to claim 9, wherein the transport device has a plurality of second grip portions that can grip the tray, and the plurality of second grip portions can follow the first! And the first move independently. In the case of the pallet handling device according to the first aspect of the patent application, the first and the second gripping portions are capable of gripping a plurality of the trays; the 2247-10331-PF 35 200947597 the storage device and the holding device The device is capable of holding a plurality of the tray out sub-items 12. The electronic component testing device electrically contacts the wheel-in terminal of the tested electronic component with the contact portion of the test head to perform the test of the tested electrical component. The pallet handling device according to any one of the first to eleventh aspects of the invention. An electronic component testing device as claimed in claim 12, which comprises: The loading unit moves the electronic component to be tested from the tray to the second tray, and the test unit presses the electronic component to be tested carried in the loading unit to the test head while being carried on the second tray. The unloading portion moves the tested electronic component to be tested from the second tray to the tray corresponding to the test result; the tray handling device stores the tested electronic component before the test The tray is supplied to the loading cassette, and the tray containing the tested electronic component to be tested is taken out from the unloading portion. 2247-10331-PF 36