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TW200945339A - Optical disk format for direct writing materials on a substrate - Google Patents

Optical disk format for direct writing materials on a substrate Download PDF

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Publication number
TW200945339A
TW200945339A TW97148990A TW97148990A TW200945339A TW 200945339 A TW200945339 A TW 200945339A TW 97148990 A TW97148990 A TW 97148990A TW 97148990 A TW97148990 A TW 97148990A TW 200945339 A TW200945339 A TW 200945339A
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TW
Taiwan
Prior art keywords
tracking
laser
carrier
layer
writing
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Application number
TW97148990A
Other languages
Chinese (zh)
Inventor
Floris Maria Hermansz Crompvoets
Coen Adrianus Verschuren
Original Assignee
Koninkl Philips Electronics Nv
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Publication of TW200945339A publication Critical patent/TW200945339A/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/048Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

A direct write carrier, system and method include an optical assembly (11) configured to direct a writing laser (16) and a tracking laser (22). A carrier (12) has a material layer (18) and a tracking layer (14). The carrier is moveable relative to the optical assembly such that when the material layer is energized by the writing laser, direct writing is provided to a surface below the carrier. The tracking layer includes readable data which is employed to control one of the optical assembly and a position of the carrier.

Description

200945339 九、發明說明: 【發明所屬之技術領域】 本發明係關於指引寫入,特別是係關於一種裝置、一種 系統及一種方法,其包含並利用—材料載體,該材料載體 具有一用於在該載體上循軌材料的可程式化㈣層。 【先前技術】 指引寫入是-種經由沒有使用遮罩或預先存在的形式而 從一基板上增加或移除材料在該基板上生成一圖案的技 術。指引寫入技術促進各種電子電路的快速原形設計。在 電子工業中,這有—個優點,因為指引寫人比用如光微影 技術的基於遮罩技術的原料計更加快速及便冑。原形設 計可被更快地重複,導致更快速地部署該終端產品。通 常,可使用指引寫入技術被寫入的最小特徵約幾個微米。 存在幾種指引寫入方法’參見例如2_年9月雷射聚焦世 界(Laser Focus World),D〇uglas 等人的美國專利 第7,〇14,885號「雷射指引寫人建立生物結構(l騎心⑽ writing builds biostructures)」。 使用基於以使用者定義順序在基板上沈積材料的光碟 格式的定址與循軌方案提供三維印刷將是有利的。 【發明内容】 根據本發明原理,所有說明性實施例將描述雷射指引寫 入,也稱為雷射誘發向前轉移。在該例子中,一脈衝雷射 光束被指引穿過一透明基板並被聚焦到在該基板的對立面 上的材料薄膜上。該基板最好不會吸收該雷射光。該聚 136214.doc 200945339 焦雷射脈衝的能量使在該薄膜中的該材料蒸鍍,其隨後被 推進到另一鄰近基板,該材料被沈積在該鄰近基板上。經 由以預定義順序沈積該等適當材料,使用者可設計例如電 子電路或介觀(mesoscopic)材料。 在特別有用的實施例中,在大約〇1與大約1〇微米之間 的層可被寫入。最先進的雷射寫入速度是在ijm/s的範圍 '' 内。解析度由該雷射聚焦點大小限制,該點可能是大約 _ 1〇〇微米。結合這些數字產生一 0.001-0,002 cm3/s (即3.6_ 7.2 cm3/h)的增長速度。這些數字可與商業快速原形設計 二維(3D)雷射印刷系統引用的數字相比。 一指引寫入載體包含一材料層,該材料層具有沈積在該 載體之-第-面上的至少一材料。—循軌層被提供而㈣ 立於該材料層。該循軌層包含一儲存資料的可讀媒體,該 資料在指引寫入期間被用於提供關於該至少一材料以及該 至少一材料在該載體上的位置的資訊。 ⑩ —指引寫人系統及其方法包含-組態成指引-寫入雷射 - 及一循軌雷射的光學總成。-載體有-材料層及一循軌 : &。該載體相對於該光學總成是可移動的,使得當該材料 I由該寫人雷射料能量時,指引寫人被提供給在該載體 下方的-表面。邊循軌層包含可讀資料,該資料被用於控 制該光學總成與該載體的位置中之一者。 另一指引寫人系統包含—光學總成,該光學總成被組態 成經由同-物鏡指引一寫入雷射及一循軌雷射,使得該循 軌雷射提供資訊以保持該寫入雷射聚焦。一光碟包含一材 136214.doc 200945339 料層及一循軌層。該材料層包含以二維配置的至少一材 料,使得該寫入雷射被控制選擇性地燒蝕該材料層以沈積 燒蝕過的材料在一表面上。該循軌層有一具有可讀資料的 資料磁軌《該可讀資料在指引寫入過程期間被讀取以提供 關於至少一材料類型、材料位置與燒蝕準則的資訊。 一種指引寫入的方法包含從形成在一載體上的一循軌層 讀取資料以根據該資料確定在該載體上形成的一材料層^ 形成的一材料的類型與位置,經由聚焦一寫入雷射穿過該 循軌層燒蝕該材料層,以及根據該資料定位該載體以選擇 性地燒蝕待沈積在一表面上的材料,使得指引寫入被提供 給在該載體下方的一表面。 ” 本發明的這些與其他目的、特色與優點從其說明性實施例 的以下詳細描述將變得明顯,這應結合該等所附圖式閱讀。 【實施方式】 本發明將參考以下圖式詳細地描述較佳實施例。 本發明為述了-種指引寫入技術,其被提供給在基板上 的三維印刷(功能)材料。這提供使用者一種快速原形設計 技術,其中該使用者可建立-設計並立即印刷該設計。一 特別有用的實施例是基於一材料載體…材料載體可包含 一具有-循軌層與一材料層的光碟。一燒钮雷射被用於從 該材料層把該等材料沈積在一單獨的基板上。該單獨的基 板可包含例如-板’其中-電路可被直接寫入用於原形設 計等等。該循軌雷射確保正確的材料被沈積。在該光碟上 的一則置碼(記錄或程式化的資訊)描述了在該光碟上的材 136214.doc 200945339 料的類型與位置以及如何「寫入」該等材料。 一維或二維的格式被提供在該載體上並且使用儲存在該 載體上的資訊根據本發明原理加以循軌。一基於該光碟格 式的疋址方案被利用並且增加了至少以下好處· 功率校準:一前置碼(在位址預刻凹軌(Address in200945339 IX. DESCRIPTION OF THE INVENTION: FIELD OF THE INVENTION The present invention relates to directed writing, and more particularly to an apparatus, a system and a method comprising and utilizing a material carrier having a A programmable (four) layer of tracking material on the carrier. [Prior Art] Guide writing is a technique for creating a pattern on a substrate by adding or removing material from a substrate without using a mask or a pre-existing form. Guided write technology facilitates rapid prototyping of various electronic circuits. In the electronics industry, this has the advantage that directing writers is faster and more convenient than using mask-based materials such as photolithography. The prototype design can be repeated more quickly, resulting in a faster deployment of the end product. Typically, the minimum feature that can be written using the index write technique is on the order of a few microns. There are several guidelines for writing methods. See, for example, Laser Focus World, September 2, U.S. Patent No. 7, pp. 14,885, to D〇uglas et al. Calling (10) writing builds biostructures)". It would be advantageous to provide three-dimensional printing using an addressing and tracking scheme based on a disc format that deposits material on a substrate in a user defined order. SUMMARY OF THE INVENTION All illustrative embodiments will describe laser guidance writing, also referred to as laser induced forward transfer, in accordance with the principles of the present invention. In this example, a pulsed laser beam is directed through a transparent substrate and focused onto a film of material on the opposite side of the substrate. Preferably, the substrate does not absorb the laser light. The poly 136214.doc 200945339 energizes the laser pulse to vaporize the material in the film, which is then advanced to another adjacent substrate onto which the material is deposited. By depositing such suitable materials in a predefined order, the user can design, for example, an electronic circuit or a mesoscopic material. In a particularly useful embodiment, a layer between about 〇1 and about 1 〇 micron can be written. The most advanced laser write speed is within the range of ijm/s. The resolution is limited by the size of the laser focus point, which may be approximately _ 1 〇〇 micron. Combining these numbers yields a growth rate of 0.001-0,002 cm3/s (ie 3.6_ 7.2 cm3/h). These numbers can be compared to figures quoted in a commercial rapid prototyping two-dimensional (3D) laser printing system. A directing write carrier comprises a layer of material having at least one material deposited on the - face of the carrier. - The tracking layer is provided and (iv) is placed on the material layer. The tracking layer includes a readable medium for storing data that is used to provide information regarding the at least one material and the location of the at least one material on the carrier during indexing. 10—Guide the writer system and its methods include - configured to direct-write lasers - and an orbiting laser optical assembly. - Carrier has - material layer and a track: & The carrier is movable relative to the optical assembly such that when the material I is energized by the writing laser, the writer is directed to the surface below the carrier. The edge tracking layer contains readable material that is used to control one of the positions of the optical assembly and the carrier. Another guidance writer system includes an optical assembly configured to direct a write laser and a tracking laser via a homo-objective such that the tracking laser provides information to maintain the write Laser focusing. A disc consists of a material layer 136214.doc 200945339 material layer and a tracking layer. The layer of material comprises at least one material disposed in two dimensions such that the writing laser is controlled to selectively ablate the layer of material to deposit the ablated material on a surface. The tracking layer has a data track with readable material "This readable material is read during the index writing process to provide information regarding at least one material type, material location and ablation criteria. A method of directing writing includes reading data from a tracking layer formed on a carrier to determine a type and location of a material formed on a material layer formed on the carrier based on the data, and writing via focusing A laser ablates the layer of material through the tracking layer and positions the carrier according to the data to selectively ablate material to be deposited on a surface such that the index write is provided to a surface below the carrier . These and other objects, features and advantages of the present invention will become apparent from the Detailed Description of the Description of Description DETAILED DESCRIPTION OF THE INVENTION The present invention is directed to a directed writing technique that is provided to a three dimensional printed (functional) material on a substrate. This provides the user with a rapid prototyping technique in which the user can create Designing and printing the design immediately. A particularly useful embodiment is based on a material carrier. The material carrier can comprise a disc having a tracking layer and a material layer. A burn button laser is used to remove the layer from the material. The materials are deposited on a separate substrate. The separate substrate may comprise, for example, a board where the circuitry can be written directly for prototype design, etc. The tracking laser ensures that the correct material is deposited. A code (recorded or stylized information) on the disc describes the type and location of the material on the disc and how to "write" the material. A one or two dimensional format is provided on the carrier and the information stored on the carrier is tracked in accordance with the principles of the present invention. A web site based on the disc format is utilized and adds at least the following benefits: Power calibration: a preamble (in the address pre-groove (Address in

Pregr〇〇ve ; ADIP))提供關於在該ADIp的一表面上的材料 - 的類型與位置的資訊並且給定這些材料燒蝕所需的初始雷 _ 射功率。此外,該表面的一部分可被用於實施功率測量與 雷射聚焦(光點大小等)測量以尋找最佳雷射燒蝕功率。一 查詢表可被用於提供關於在該表面上的該等材料的位置與 類型的資訊。一擺動頻率(wobble frequency)也可被用於提 供關於在該表面上的該等材料的位置的資訊。該定址方案 從而可促進使用在該表面上的不同材料,因為該等材料的 位置是已知的。經由利用二維格式,與磁帶的線性、一維 情況相比,可提供更快的存取時間而沒有磁帶斷裂的風 φ 險。(一維系統可利用磁帶指引寫入)。此等磁帶在寫入作 11期間容易受到斷裂的影響。此外,光碟製造便宜並且包 含便宜材料(例如,一聚碳酸酯基板)。 本文描述的该等實施例將說明性地把重點放在使用雷射 月包!指引寫入技術上。應明白該等指引寫入技術可利用複 數個不同光束大小與波長的雷射,並且光點大小可基於這 些特徵、所用透鏡、焦距與其他光學特性是有所不同的。 此外’可從根據本發明的該等教示受益的其他方法可被用 於才曰引寫入。例如’其他類型的能量或輻射可被利用並且 136214.doc 200945339 指引以改變在基板上的層以直接寫入或成像該等層。例 如’一電弧可被利用。 還應明白,本文描述的該等說明性例子可適合包含額外 的電子元件。這些元件可與該雷射設備整體形成或被作為 單獨裝置提供。例如,循軌或定位裝置可與該雷射設備被 包含在一單個總成中。在附圓中描繪的該等元件可以硬體 與軟體的不同組合實施並且提供可被結合在單個元件或多 個元件中的功能。 現參考附圖,其中相同的數字表示相同或相似的元件, 以及先參考圖1,根據一說明性實施例說明性地顯示了一 指引寫入系統10。系統1 〇包含一光學寫入總成〗i,其包含 光學控制裝置,如一物鏡38及用於指引或產生雷射能量的 光學元件,以及雷射能量最好是脈衝雷射能量。在一實施 例中,總成11包含用於改變來自一循軌雷射22的雷射的方 向的鏡子、一燒蝕雷射16及一可選的退火雷射32。該等雷 射可使用一或多個透鏡聚焦並且可利用一光閘以提供該等 雷射的脈衝。也可經由使用一開關以啟動/撤銷啟動該雷 射來提供脈衝。 系統10包含二維格式化的載體12,其可以是任何形狀的 二維物體,但是可能最好是一磁盤,如,例如一光碟。在 一實施例中,該物體12包含儲存在其上(例如,在一循軌 層14中)用於循軌目的的循軌資訊。該循軌層14被用於確 定材料形成在該光碟12上的位置以及用於確定用於燒蝕形 成在該光碟12上的材料的一燒蝕雷射16的位置。該光碟^ 136214.doc -10· 200945339 還包含-材料層18,其包含一或多個形成在該光碟i2上的 不同材料。 該循軌層14提供-默義凹㈣於循軌。該凹軌可包含 在該表面或該循軌層14中的一連續螺旋或_系列同心圓。 胃凹軌由—循執雷射則於保持該_#射16聚焦在該材 料層18中。循軌層14可使用用於光碟(CD)、數位多功能光 ' #(DVD)或其他記錄媒體的已知技術程式化。該材料層18Pregr〇〇ve; ADIP)) provides information on the type and location of the material on a surface of the ADIp and gives the initial lightning power required for ablation of these materials. In addition, a portion of the surface can be used to perform power measurements and laser focus (spot size, etc.) measurements to find the optimum laser ablation power. A lookup table can be used to provide information about the location and type of the materials on the surface. A wobble frequency can also be used to provide information about the location of the materials on the surface. This addressing scheme thus facilitates the use of different materials on the surface since the location of the materials is known. By utilizing the two-dimensional format, faster access times can be provided without the risk of tape breakage compared to the linear, one-dimensional case of tape. (One-dimensional systems can be written using tape guidance). These tapes are susceptible to breakage during writing to 11. In addition, optical discs are inexpensive to manufacture and contain inexpensive materials (e.g., a polycarbonate substrate). The embodiments described herein will illustratively focus on the use of laser moon packs! The guidelines are written into the technology. It should be understood that these index writing techniques can utilize a plurality of lasers of different beam sizes and wavelengths, and the spot size can be different based on these features, the lens used, the focal length, and other optical characteristics. Further, other methods that may benefit from such teachings in accordance with the present invention may be used to write. For example, 'other types of energy or radiation can be utilized and 136214.doc 200945339 directed to change the layers on the substrate to directly write or image the layers. For example, an arc can be utilized. It should also be understood that the illustrative examples described herein may be adapted to include additional electronic components. These elements may be integrally formed with the laser device or provided as a separate device. For example, a tracking or positioning device can be included with the laser device in a single assembly. The elements depicted in the attached circle can be implemented in different combinations of hardware and software and provide the functionality that can be combined in a single element or multiple elements. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION Referring now to the drawings in which like reference FIGS System 1 〇 includes an optical writing assembly i comprising optical control means such as an objective lens 38 and optical elements for directing or generating laser energy, and the laser energy is preferably pulsed laser energy. In one embodiment, assembly 11 includes a mirror for changing the direction of the laser from a tracking laser 22, an ablation laser 16 and an optional annealing laser 32. The lasers can be focused using one or more lenses and a shutter can be utilized to provide pulses of the lasers. The pulse can also be provided by using a switch to activate/deactivate the laser. System 10 includes a two-dimensionally formatted carrier 12, which may be a two-dimensional object of any shape, but may preferably be a magnetic disk such as, for example, a compact disc. In one embodiment, the object 12 includes tracking information stored thereon (e.g., in a tracking layer 14) for tracking purposes. The tracking layer 14 is used to determine the location of the material formed on the optical disk 12 and the location of an ablative laser 16 for ablating the material formed on the optical disk 12. The disc ^ 136214.doc -10. 200945339 also includes a layer of material 18 comprising one or more different materials formed on the disc i2. The tracking layer 14 provides a sinusoidal (four) tracking. The recessed rail may comprise a continuous spiral or a series of concentric circles in the surface or the tracking layer 14. The gastric concave track is held in the material layer 18 by the continuation of the laser. The tracking layer 14 can be programmed using known techniques for compact disc (CD), digital versatile light '# (DVD) or other recording media. The material layer 18

參提供-層材料15,該等材料被燒餘以把該等材料Μ轉移到 一基板24的一表面。沈積材料17因為該燒姓(或其他指引 寫入過程)被沈積在該基板24上。在該材料層18上的該等 材料15可以按螺旋型1心、圓、放射輻面等加以構造。 (見’例如圖3A至圖3D)。該循軌層14及材料層18被空間分 離使得該循軌層14不會受該聚焦燒钮雷射光㈣損壞。該 循執層14對於該燒蝕或寫入雷射16最好是通透的。 X 一種在光碟12上的該等材料的定址方法可模仿在其他光 e 碟格式中利用的定址方法,或該定址方法可簡單地包含資 • 料,該資料指示材料出現在一給定位置。在一實施例中, 該定址方案提供一種在單個光碟上定址多種材料的方式, 例如,儲存在該循軌層14中的資訊可提供關於在該材料層 中的材料的類型的資訊,可提供關於一給定類型材料的位 置的資訊以及還可提供用於設置該雷射、控制燒蝕、控制 該光碟的旋轉速度的控制資訊或其他辅助指引寫入過程的 任何資訊》在一實施例中,一類ADIP的前置碼可被提供 在該光碟12上(例如,在該循軌層14中),其提供關於在該 136214.doc • 11 · 200945339 光碟12上是什麼材料、從該光碟燒姓這些材料需要什麼強 度的資訊’以及提供一功率校準磁區以使該燒钮雷射適合 自定義材料或變動。在該光碟上的該前置碼的一部分可以 是可寫的或可重寫的。該可寫部分可被用於儲存關於該光 碟12的哪個部分已經被存取以及哪裡的材料已經被燒钱的 資訊。該定址方案也可適用於基於磁帶的系統。 參考圖2 ’根據一說明性實施例更詳細地顯示了圖1的該 指引寫入系統1 0。光學總成11被更詳細地顯示。材料46被 從該光碟12燒蝕’該光碟作為該等材料的一載體。使用一 強大的脈衝轉移雷射或燒钱雷射16,不同材料46被從該光 碟12燒钮到基板24上,該基板被安裝在一 xyz平移台4〇 上。此外,一脈衝雷射32可被用於使沈積材料42退火。一 由一循軌與成像模組44控制的循軌雷射(22)與伺服系統保 持該燒蝕光束16在目標上。該循軌與成像模組44可包含用 於讀取該反射的循軌雷射的感測器並且可包含一成像相機 以提供該沈積過程的即時回饋。 在一實施例中,利用一基質輔助脈衝雷射蒸鍍(指引寫 入(MAPLE-DW)安裝)。如上所述,先前技術中所用的該載 體是一帶子或磁帶。根據本發明原理,一維或二維的載體 被利用具有關於該載體的循軌資訊,其輔助在該載體上的 材料的識別與處理。在一實施例中,該載體包含一光碟。 忒光碟12最好包含凹軌,該等凹軌促進雷射循軌與過程資 訊的儲存。該光碟12提供—表面,在該材料層18中的材料 46可被附加至該表面。這些材料隨後被燒蝕或蒸鍍與沈積 136214.doc 200945339 在基板24上。一脈衝高功率雷射16被聚焦在一在該光碟基 板14與該材料層18之間的介面。出現在該雷射聚焦的該材 料46被從該光碟燒蝕並被向安裝在該xyz支架4〇上的該基 板24推進。雖然其他間隙大小可被設想,但是在該基板24 與該材料層18之間的距離可能是大約1毫米。 循軌是以與光學資料儲存類似的方式完成。該循執雷射 22提供一徑向推挽信號、一切向推挽信號與一聚焦誤差信 號化些彳3號藤回饋給模組4 4的词服系統,使得該燒敍雷 射16總是聚焦在該材料層18上。該燒蝕雷射16及該循軌雷 射22最好經由同一透鏡38聚焦到該光碟12上。在該循軌與 成像模組44中讀取從該光碟12反射的雷射,以提供該指引 寫入過程的回饋。或者,一光學拾取單元(〇pu)可被提供 用於讀取該光碟12。該循執過程包含收集的關於在光碟12 上的材料46的位置與材料42在基板24上的位置的資訊。循 軌與成像模組44可包含一電腦裝置’該電腦裝置能夠儲存 該資訊並且比較該資訊與將待製造的裝置的一儲存的電腦 辅助設計❶以這種方式,該設計的精確品質可被保持與檢 查以確保可實現該指引寫入電路(或其他物件)的規格。 一單透鏡系統38是較佳的以便該燒蝕光束16將自動跟著 該循軌光束22。從準直光束開始,該燒蝕光束16的聚焦比 s亥病軌光束22的聚焦在更下游。用同一透鏡38實現這目 標,利用該燒钮雷射16的一波長(λι),該波長比該循執雷 射22的一波長(λ〇)更長®在一實施例中,一紅外雷射被用 於燒蝕,因為這使生物材料與組織工程的燒蝕成為可能。 136214.doc -13- 200945339 如果會聚不充分的,則可使用在該循軌雷射22的光學路徑 中的一望遠鏡36以製成一會聚入射循軌光束。一個二向色 鏡48可被形成在該光碟12上,二向色鏡“反射該循軌雷射 22的光’同時透射該燒蝕雷射16的光。 該燒蝕雷射光束16在該循軌層14的位置的強度應低於該 循軌層14的損壞臨限值。這限制了該透鏡38聚焦該燒蝕雷 射光束16的聚焦強度。在該循軌層14與該材料層18之間的 距離可被製作得與所需的一樣大,以防止由於使用在該循 軌雷射22的該光學路徑中的該望遠鏡%而損壞。一旦該材 料46被燒蝕,该材料沈積42在基板24上。該退火雷射32然 後被用於退火或以其他方式處理該等沈積材料42。該等沈 積材料42可包含-螺旋圖案’其可根據從材料_燒餘選 擇的該等材料選擇性地包含不同材料。 因為多個雷射與光學裝置被利用,所以二向色鏡34可被 用於視需要使光束重導向與濾'光。此外,其他光學裂置, 包含透鏡、濾、光鏡、光束分離器、鏡或其他裝置,取決於 該應用與該組態可被利用。 參考圖3A至圖3D,複數個不同的光碟佈局被說明性地 描繪。材料46被沈積在該光碟12上的輻面52中。循軌被完 成在-螺旋凹軌或磁軌54(圖3A)上或在同心凹軌%(圖3b) 上。混合材料層可包含在輻面佈局58中的材料與沿著一磁 軌60的材料(圖3C)以及沿著磁軌56外面佈局的材⑽(圖 3D)。這些磁軌可以是同心或螺旋型的。 該循軌層(18)有-螺旋磁軌或同心磁軌n料層_ I36214.doc •14· 200945339 含具有不同材料46的輻面(52, 58)。換句話說,每個輻面 ° S不同材料或材料的組合。該等材料46,如圖3D與 3C中所示的56與6〇’也可被沿著該等磁軌54、骑局並且 材料輻面與材料磁轨的混合也是可能的(圖與3D)。 對於脈衝燒飯雷射應用,只有輕面的佈局是較佳的。輕 面佈局的優點包含不同材料可被沈積而不用相對於該光碟 的旋轉中心移動該樣本。由於該燒名虫的脈衝性質,光碟旋 轉必須同步於該燒㈣射的重複率。該材料被頻閃地燒 钮。可停止光碌的旋轉並沿著徑向方向或切向地在該轄面 區域内掃描。徑向或切向循軌較不重要。 φ 备連續波雷射提供足夠功率從該光碟燒蝕材料時,該 螺方疋佈局疋較佳的;然而,實際上,用脈衝雷射系統更容 易實現燒蝕。該等光碟可經由使用一簡單「輻面」遮罩在 β亥材料層上沈積材料製得。輻面52較佳地被充分分離以防 止該等輕面交又污染。該循軌層14提供該系統關於在該光 碟2上的位置的資訊…類Amp前置碼可被提供在該光 碟上以提供關於在該光碟上是什麼材料的資訊,提供從該 光碟燒餘這些材料需要的強度,以及提供-功率校準磁區 以使該燒蝕雷射適合自定義材料或變動等。 β在又-較佳實施例中,在該光碟上的該前置碼的一部分 疋可寫的(可重寫的)。該可寫部分被用於儲存關於該光碟 的哪個部分已經被存取以及哪裡的材料已經被燒敍的資 訊。一標準光碟(CD,DVD)的表面面積約H)0平方釐米(更 具體地說88平方爱米)。假設我們可燒银/寫入一 1〇微米的 136214.doc 15 200945339 材料層,那麼-光碟可容納大約o.i立方釐米的材料。更 大的光碟’如雷射光碟,當然可容納更多的材料,從而減 少了印刷一物件所需的光碟數目。 本發明的實施例可被實施在複數個不同應用中。這些應 用可包含例如電子電路的快速原形設計、生物製造、組織 工程、應用裝飾設計等。採用更接近終端使用者的快速原 形設計,、終端使用者可使用_電腦輔助設計程式設計一電 路(電子裝置)並且然後印刷一功能齊全的三維設計。 /考圖4流程圖說明性地描螬了 一種根據本發明原 Ο 理之指引寫入的方法。在塊1〇2中,一載體被提供具有以 -維或二維包含的一材料層與一循軌層。該材料層包含一 或多個以輻面螺旋或其他形狀形成的材料。該循軌層可包 含一具有一形成在其中的磁軌的聚碳酸酯材料(例如,光 碟)。該磁軌可包含按一螺旋或同心圓t寫入的資料。該 循軌層可包含一個二向色鏡,以及在塊104中,該循軌雷 射可從該二向色鏡反射並被用於循軌該寫入雷射。該寫入 雷射被透射穿過該循軌層。該循軌雷射與該寫人雷射最肖 〇 經由同一物鏡聚焦。 在塊108中,該資料被從一循軌層讀取(例如,經由使用 : 一循軌雷射或使用—光學拾取單棒PU))。該資料被提# · 在該載體上以確定在_形成在該載體上的材料層中的一材 料的類型與位置。其他資訊也可被儲存在該循軌層中。在 塊110中,根據該資料,該材料層的該材料經由聚焦—寫 入雷射穿過該循軌層被燒餘。該寫入雷射需要有足夠功率 I362l4.doc -16 - 200945339 燒#在該材料層中提供的該等材料。在塊112中,該載體 被定位與重新定位以根據該資料選擇性地燒蝕被沈積在一 表面上的材料,使得指引寫入被提供給一在該載體之下或 下方的表面。 在塊114中,形成在該表面上的沈積材料可使用一退火 _雷射被退火在塊116中,該基板的該表面可被成像以提 供回饋並且控制用於指引寫入之沈積。此外,回饋被提供 給塊110與112並且被用於重新定位該載體,調整雷射功率 以及其他特性。在塊118中,該基板被平移以在該基板上 指引寫入一圖案。 在解釋該等所附請求項時,應明白: a) 該單詞「包括」不排除除了在—給定請求項中所列 出的那些以外的其他元件或動作的存在; b) 在一元件之前的該單詞「一(a)」或「一(an)」不排 除存在複數個此等元件; © C) 6亥等睛求項中的任何參考符號並不限制它們的範 - 圍; d) 4個「構件」可由同一項目或硬體或軟體實施的結 構或功能表示;以及 e) 並不要求動作的特定順序,除非特別指出。 雖然已經描述了在基板上指引寫人材料的光碟格式的系 統及其方法的較佳實施例(其等意為是說明性的並不是阳 制),應指出熟習此項技術者蓥於以上教示可作修部與改( 變因此應明白在此處所揭露的該等實施例由該等所附請 136214.doc 200945339 求項所概述的範圍與精神内可對揭露的本發明的該等具體 實施例作改變。因此已經描述了專利法所要 張並且由專利證書保護所要求的内容被閣述在該 等所附請求項中。 【圖式簡單說明】 圖1是根據一說明性實施例的基質輔助脈衝雷射基 指引寫入系統的橫截面圖; 射蒸鑛 圖2疋一顯示了更多細節的根據一說明性實施例的美質 輔助脈衝雷射蒸鑛指引寫人系統的透視圖; &quot; 圖3Α是顯示了一以光碟體現的載體的圖,該光碟具有一 健存資料的螺旋磁軌與用於根據本發明原理指引寫 料輻面; 圖3Β是顯示了一以光碟體現的載體的圖,該光碟具有儲 存資料的同心磁軌與用於根據本發明原理指引寫入的材 輻面; ’ 圖3C是顯示了一以光碟體現的載體的圖,該光碟具有— 儲存責料的螺旋磁軌、都用於根據本發明原理指 材料轄面與一螺旋材料; 寫的 圖3D是顯示了一以光碟體現的載體的圖,該光碟具有儲 存資料的同心磁軌與一沿著該等同心磁軌組態用於根據本 發明原理指引寫人的螺旋材料;以及 圖4疋顯不了 一種根據本發明原理指引寫入的方法的流 程圖。 &lt; 【主要元件符號說明】 136214.doc 200945339 10 指引寫入系統 11 光學寫入總成 12 載體 14 循軌層 15 材料 16 燒蝕雷射 17 沈積材料 18 材料層 22 循軌雷射 24 基板 32 退火雷射 34 二向色鏡 38 物鏡 40 xyz平移台 42 沈積材料 44 循軌與成像模組 46 材料 48 二向色鏡 52 輻面 54 螺旋凹轨 56 同心凹軌 58 輻面 60 材料 62 材料 136214.doc 19-The material is provided as a layer material 15 which is burned to transfer the material to a surface of a substrate 24. The deposition material 17 is deposited on the substrate 24 because of the burnt name (or other directing writing process). The materials 15 on the material layer 18 can be constructed in a spiral shape, a circle, a radial surface, or the like. (See, for example, Figures 3A through 3D). The tracking layer 14 and the material layer 18 are spatially separated such that the tracking layer 14 is not damaged by the focused firing button (4). The routing layer 14 is preferably transparent to the ablation or writing laser 16. X An addressing method for such materials on the optical disc 12 can mimic the addressing method utilized in other optical disc formats, or the addressing method can simply include information indicating that the material is present at a given location. In one embodiment, the addressing scheme provides a means of addressing a plurality of materials on a single optical disc, for example, information stored in the tracking layer 14 can provide information about the type of material in the layer of material, available Information about the position of a given type of material and any information for setting the laser, controlling ablation, controlling the rotational speed of the disc, or other auxiliary guidance writing process. In one embodiment A preamble of a type of ADIP can be provided on the optical disc 12 (e.g., in the tracking layer 14) that provides information about what material is on the 136214.doc • 11 · 200945339 disc 12, from which the disc is burned. The information on the strength of the material required for these surnames' and the provision of a power calibration magnetic zone to make the burnt-button laser suitable for custom materials or variations. A portion of the preamble on the disc can be writable or rewritable. The writable portion can be used to store information as to which portion of the disc 12 has been accessed and where the material has been burned. This addressing scheme is also applicable to tape-based systems. The index writing system 10 of Fig. 1 is shown in more detail with reference to Fig. 2' in accordance with an illustrative embodiment. The optical assembly 11 is shown in more detail. Material 46 is ablated from the disc 12 as a carrier for the materials. Using a powerful pulse-transferred laser or burnt-out laser 16, different materials 46 are burned from the disc 12 onto the substrate 24, which is mounted on an xyz translation stage 4''. Additionally, a pulsed laser 32 can be used to anneal the deposited material 42. A tracking laser (22) controlled by a tracking and imaging module 44 and the servo system maintain the ablation beam 16 on the target. The tracking and imaging module 44 can include a tracking laser for reading the reflection and can include an imaging camera to provide instant feedback of the deposition process. In one embodiment, a matrix assisted pulsed laser evaporation (guided write (MAPLE-DW) mounting) is utilized. As described above, the carrier used in the prior art is a tape or a magnetic tape. In accordance with the principles of the present invention, a one- or two-dimensional carrier is utilized with tracking information about the carrier that aids in the identification and processing of materials on the carrier. In an embodiment, the carrier comprises a compact disc. Preferably, the disc 12 includes concave rails that facilitate the storage of laser tracking and process information. The disc 12 provides a surface to which material 46 in the material layer 18 can be attached. These materials are then ablated or vapor deposited and deposited on substrate 24 by 136214.doc 200945339. A pulsed high power laser 16 is focused on an interface between the disc substrate 14 and the material layer 18. The material 46 present at the laser focus is ablated from the disc and advanced toward the substrate 24 mounted on the xyz bracket 4''. While other gap sizes are contemplated, the distance between the substrate 24 and the material layer 18 may be approximately 1 millimeter. Tracking is done in a similar manner to optical data storage. The circulatory laser 22 provides a radial push-pull signal, a signal to the push-pull signal and a focus error signal to the vocabulary system of the No. 3 rattan feedback module 44, so that the burnt laser 16 is always Focusing on the layer 18 of material. The ablation laser 16 and the tracking laser 22 are preferably focused onto the optical disk 12 via the same lens 38. The laser reflected from the optical disk 12 is read in the tracking and imaging module 44 to provide feedback for directing the writing process. Alternatively, an optical pickup unit (〇pu) may be provided for reading the optical disc 12. The circumscribing process includes information gathered about the location of the material 46 on the optical disk 12 and the location of the material 42 on the substrate 24. The tracking and imaging module 44 can include a computer device that can store the information and compare the information with a stored computer-aided design of the device to be manufactured in such a manner that the precise quality of the design can be Maintain and check to ensure that the specifications of the instructions are written to the circuit (or other object). A single lens system 38 is preferred so that the ablation beam 16 will automatically follow the tracking beam 22. Starting from the collimated beam, the ablation beam 16 is focused further downstream than the focus of the s-beam beam 22. This object is achieved with the same lens 38, using a wavelength (λι) of the burn button laser 16 that is longer than a wavelength (λ〇) of the circulatory laser 22. In one embodiment, an infrared ray The shot is used for ablation because it makes ablation of biological materials and tissue engineering possible. 136214.doc -13- 200945339 If the convergence is insufficient, a telescope 36 in the optical path of the tracking laser 22 can be used to create a converging incident tracking beam. A dichroic mirror 48 can be formed on the optical disc 12, the dichroic mirror "reflecting the light of the tracking laser 22" while transmitting the light of the ablation laser 16. The ablated laser beam 16 is The intensity of the position of the tracking layer 14 should be lower than the damage threshold of the tracking layer 14. This limits the focus of the lens 38 to focus the ablated laser beam 16. The tracking layer 14 and the material layer The distance between 18 can be made as large as needed to prevent damage due to the use of the telescope in the optical path of the tracking laser 22. Once the material 46 is ablated, the material is deposited. 42 is on the substrate 24. The annealing laser 32 is then used to anneal or otherwise treat the deposition material 42. The deposition material 42 may comprise a -helix pattern which may be selected from the material_burning The material optionally comprises different materials. Because multiple lasers and optical devices are utilized, the dichroic mirror 34 can be used to redirect and beam the light as needed. In addition, other optical splits, including lenses, Filter, light mirror, beam splitter, mirror or other device, depending on The application and the configuration can be utilized. Referring to Figures 3A through 3D, a plurality of different disc layouts are illustratively depicted. Material 46 is deposited in the web 52 on the disc 12. Tracking is done at - a spiral groove or track 54 (Fig. 3A) or on a concentric groove % (Fig. 3b). The layer of mixed material may comprise material in the radial layout 58 and material along a track 60 (Fig. 3C) And the material (10) (Fig. 3D) laid out along the outside of the track 56. These tracks may be concentric or spiral. The tracking layer (18) has a spiral track or a concentric track n layer _ I36214. Doc •14· 200945339 contains spokes (52, 58) with different materials 46. In other words, each spoke is a different material or combination of materials. These materials 46, as shown in Figures 3D and 3C 56 and 6〇' can also be along these tracks 54, riding and mixing of material surfaces with material tracks (figure and 3D). For pulsed rice cooking applications, only a light-surface layout It is preferred that the advantages of the lightweight layout include that different materials can be deposited without moving the sample relative to the center of rotation of the disc. The pulse nature of the burned worm, the rotation of the disc must be synchronized with the repetition rate of the burn (four) shot. The material is strobed to burn the button. The rotation of the light can be stopped and the radial direction or tangentially in the jurisdiction Intra-area scanning. Radial or tangential tracking is less important. φ When a continuous wave laser provides sufficient power to ablate the material from the disc, the layout is better; however, in practice, with a pulsed thunder The ablation system is easier to achieve ablation. These discs can be made by depositing material on a layer of beta material using a simple "radial" mask. The webs 52 are preferably sufficiently separated to prevent such light sidelines from being contaminated. The tracking layer 14 provides information about the location of the system on the optical disc 2... an Amp-like preamble can be provided on the optical disc to provide information about what material is on the optical disc, providing information from the optical disc The strength required for these materials, as well as the provision of a -power calibration magnetic zone to make the ablation laser suitable for custom materials or variations. In a further preferred embodiment, a portion of the preamble on the disc is writable (rewritable). The writable portion is used to store information about which portion of the disc has been accessed and where the material has been burned. A standard optical disc (CD, DVD) has a surface area of about H) 0 square centimeters (more specifically, 88 square meters). Suppose we can burn silver / write a 1 〇 micron 136214.doc 15 200945339 material layer, then - the disc can hold about o.i cubic centimeter of material. Larger discs, such as laser discs, can of course accommodate more material, reducing the number of discs needed to print an object. Embodiments of the invention may be implemented in a number of different applications. These applications may include, for example, rapid prototyping of electronic circuits, biomanufacturing, tissue engineering, applied decorative design, and the like. With a fast, original design that is closer to the end user, the end user can design a circuit (electronic device) using a computer-aided design program and then print a fully functional 3D design. The flowchart of Figure 4 illustratively depicts a method of writing in accordance with the guidelines of the present invention. In block 1-2, a carrier is provided with a layer of material and a tracking layer contained in - or two dimensions. The layer of material comprises one or more materials formed by a radial spiral or other shape. The tracking layer can comprise a polycarbonate material (e.g., a disc) having a magnetic track formed therein. The track may contain data written in a spiral or concentric circle t. The tracking layer can include a dichroic mirror, and in block 104, the tracking laser can be reflected from the dichroic mirror and used to track the writing laser. The write laser is transmitted through the tracking layer. The tracking laser is focused with the writer's laser through the same objective lens. In block 108, the material is read from a tracking layer (e.g., via use: a tracking laser or using - optical pickup of a single stick PU)). The data is extracted on the carrier to determine the type and location of a material in the layer of material formed on the carrier. Other information can also be stored in the tracking layer. In block 110, based on the data, the material of the layer of material is burned through the tracking layer via a focus-write laser. The write laser needs to have sufficient power. I362l4.doc -16 - 200945339 Burn #The materials provided in the material layer. In block 112, the carrier is positioned and repositioned to selectively ablate material deposited on a surface based on the material such that the index writing is provided to a surface below or below the carrier. In block 114, the deposited material formed on the surface can be annealed in block 116 using an annealed-laser that can be imaged to provide feedback and control deposition for directing writes. In addition, feedback is provided to blocks 110 and 112 and used to reposition the carrier, adjusting laser power and other characteristics. In block 118, the substrate is translated to direct writing a pattern on the substrate. In interpreting such appended claims, it should be understood that: a) the word "comprising" does not exclude the presence of elements or actions other than those listed in the given claim; b) before a component The word "a" or "an" does not exclude the existence of a plurality of such elements; ©C) any reference in the six-equivalent term does not limit their scope; d) The four "components" may be represented by structures or functions implemented by the same item or hardware or software; and e) the specific order of actions is not required unless otherwise indicated. Although a preferred embodiment of a system for directing a disc format for writing a person's material on a substrate and methods therefor has been described (which are meant to be illustrative and not yang), it should be noted that those skilled in the art are obsessed with the above teachings. The invention may be modified and modified (therefore, it is to be understood that the embodiments disclosed herein may be embodied by the scope and spirit of the invention as set forth in the appended claims 136, 214. </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; A cross-sectional view of the auxiliary pulsed laser-based writing system; a shot of the steam-extracted map showing a more detailed view of the aesthetically-assisted pulsed laser-steaming guide system in accordance with an illustrative embodiment; &quot; Figure 3A is a diagram showing a carrier embodied in a compact disc having a spiral magnetic track for storing data and for directing the surface of the material according to the principles of the present invention; Figure 3A shows a light A diagram of a carrier having a concentric track for storing data and a web surface for directing writing in accordance with the principles of the present invention; 'Figure 3C is a diagram showing a carrier embodied in a disc having a storage The spiral magnetic track is used to refer to the material jurisdiction and a spiral material according to the principles of the present invention; FIG. 3D is a diagram showing a carrier embodied by a compact disk having a concentric magnetic track for storing data and a A spiral material configured to guide a person in accordance with the principles of the present invention is configured along the equivalent core track; and Figure 4 shows a flow chart of a method for directing writing in accordance with the principles of the present invention. &lt; 136214.doc 200945339 10 Guide writing system 11 Optical writing assembly 12 Carrier 14 Tracking layer 15 Material 16 Ablative laser 17 Depositing material 18 Material layer 22 Tracking laser 24 Substrate 32 Annealing laser 34 Dichroic mirror 38 Objective 40 xyz translation stage 42 Deposition material 44 Tracking and imaging module 46 Material 48 Dichroic mirror 52 Radius 54 Spiral concave rail 56 Concentric concave rail 58 Radial surface 60 Material 62 Materials 136214.doc 19-

Claims (1)

200945339 十、申請專利範圍: 1. 種“引寫入載體,其包括: 材料層(18)’其具有沈積在該載體之一第一面上的 至少一材料;以及 —循軌層(14),該循軌層經提供而相對立於該材料 層’該猶軌層包含-健存資料之可讀媒體,在指引寫人 • 期間採用該資料以提供關於該至少-材料以及該至少— . 材料在該载體上的一位置之資訊。 ❹2.根據請求項i之載體,其中該載體包含—光碟⑽。 3·根據請求項2之載^體,其中該可讀媒體儲存一前置碼, 該前置碼描述了在該光碟上之材料的一類型與位置以及 如何寫入該等材料。 4. 根據請求項丨之載體,其中該材料層包含若干材料輻面 (52)與一材料螺旋(62)中之至少一者。 5. 根據請求項〖之載體,其中該循軌層包含一個二向色鏡 φ (48) ’該二向色鏡係用於反射一循軌雷射以及允許—寫 - 入雷射之透射。 :6.根據請求項丨之載體,其中該循軌層包含一螺旋磁軌(54) 與若干同心磁軌(56)中之至少一者。 7. 根據請求項1之載體,其中該至少一材料包含複數種不 同材料(46)。 8. 一種指引寫入系統,其包括: 光學總成(11) ’其組態成指引一寫入雷射(16)與— 循軌雷射(22);以及 136214.doc 200945339 載體(12),該载體具有—材料層(18)與一循軌層 (14)該載體相對於該光學總成是可移動的,使得當該 材料層由該寫入雷射賦予能量時,指引寫入被提供給在 i載體下方之一表面,該循軌層包含可讀資料,該資料 被用於控制該光學總成與該載體的一位置中之一者。 9·根據明求項8之系統,其中該載體包含一光碟(⑺以及該 材料層包含料材㈣面(52)與—材料螺旋㈣材料中 之至少一者。 10·根據μ求項8之系統’其中該可讀資料包含儲存在該光 碟上之-前置碼’該前置碼描述了在該光碟上之材料的 一類型與位置以及如何寫入該等材料。 根據'求項8之系統,其中該循軌層包含一個二向色鏡 ()I —向色鏡係用於反射該循軌雷射以及允許該寫 入雷射之透射。 · 12.根據請求項8之系、统,其進-步包括-退火雷射(32),該 退火雷射組‘4成退火形成在該表面上之沈積材料。 13·根據請求項8之系統,丨中該載體包含-光碟(12)以及該 循軌層包含一螺旋磁軌(54)與若干同心磁軌(56)中之至 少一者。 14.根據'求項8之系統,其進一步包括一循軌與成像模組 (44) ’該循軌與成像模組組態成收集來自該表面之 以控制用於指引寫入之沈積。 15n求項8之系統’其中該載體包含複數種不同材料 (46) ’以及該寫入雷射經同步以寫入不同材料到該表面 I36214.doc 200945339 上之不同位置。 16. 根據叫求項8之系統,其中該表面被包含在一基板(μ)上 以及該基板由一平移台(40)平移以在該基板上指引寫入 一圖案。 17. 根據請求項8之系統,其中該循轨雷射與該寫入雷射透 過同一物鏡(38)被聚焦》 18. 一種指引寫入系統,其包括: ^ 一光學總成(11),其組態成經由同一物鏡(38)指引一 寫入雷射(16)與一循軌雷射(22),使得該循軌雷射提供 資訊以保持該窝入雷射聚焦,該光學總成包含一循軌與 成像模組(44),該循軌與成像模組組態成收集來自該表 面之回饋以控制用於指引寫入之沈積; 一光碟(12),該光碟具有一材料層(18)與一循軌層 (14),該材料層包含以二維配置之至少一材料㈠6),使 得該寫入雷射被控制選擇性地燒蝕該材料層以沈積燒蝕 〇 過的材料在一表面上,該循軌層具有一含有可讀資料之 - 貧料磁軌,該可讀資料在指引寫入過程期間被讀取以提 :供關於至少一材料類型、材料位置與燒蝕準則之資訊。 根據π求項18之系統,其中該載體包含複數種不同材料 (46),以及該寫入雷射經同步以寫入不同材料到該表面 上之不同位置。 20. —種指引寫入方法,其包括: 從形成在一載體上之一循軌層讀取(1〇8)資料,以確定 形成在該載體上之一材料層中之一材料的一類型與位 136214.doc 200945339 置; 根據該資料,經由聚焦一寫入雷射穿過該循軌層燒轴 (110)s亥材料層;以及 根據該資料定位(112)該載體’以選擇性地燒㈣沈積 在一表面上的材料,使得指引寫入被提供給在該載體下 方之一表面。 21,根據請求項20之方法,其中該循軌層包含一個二向色鏡 以及该方法包含反射(104)用於讀取該資料且循軌該寫入 雷射之一循軌雷射,以及透射該寫入雷射穿過該循轨 層。 22. 根據請求項21之方法,其中該循軌雷射與該寫入雷射經 由同一物鏡被聚焦。 23. 根據請求項20之方法,進一步包括退火(114)形成在該表 面上之沈積材料。 24. 根據請求項20之方法’進一步包括成像(116)該表面以提 供回饋以及控制用於指引寫入之沈積。 25. 根據請求項20之方法,其中該表面被包含在一基板上, 以及該方法進一步包括平移(ns)該基板以在該基板上指 引寫入一圖案。 136214.doc -4-200945339 X. Patent Application Range: 1. A "write-on carrier" comprising: a material layer (18) having at least one material deposited on a first side of the carrier; and - a tracking layer (14) The tracking layer is provided to be contiguous with the material layer </ RTI> </ RTI> </ RTI> </ RTI> containing the readable medium of the health information, which is used during the guidance of the writer to provide information about the at least-material and the at least. Information on a position of the material on the carrier. ❹ 2. The carrier according to claim i, wherein the carrier comprises a disc (10). 3. The payload according to claim 2, wherein the readable medium stores a preamble The preamble describes a type and location of the material on the disc and how the material is written. 4. The carrier according to the request, wherein the material layer comprises a plurality of material webs (52) and a material At least one of the spirals (62) 5. The carrier according to the claim, wherein the tracking layer comprises a dichroic mirror φ (48) 'the dichroic mirror is used to reflect a tracking laser and Allow-write-transmission into the laser. :6.According to The carrier of the request item, wherein the tracking layer comprises at least one of a spiral track (54) and a plurality of concentric tracks (56). 7. The carrier according to claim 1, wherein the at least one material comprises a plurality of Different materials (46) 8. A guidance writing system comprising: an optical assembly (11) 'configured to direct a write laser (16) and - a tracking laser (22); and 136214. Doc 200945339 A carrier (12) having a material layer (18) and a tracking layer (14) that is movable relative to the optical assembly such that when the material layer is imparted by the writing laser At the time of energy, the index write is provided to a surface below the i-carrier, the tracking layer containing readable material that is used to control one of the optical assembly and a position of the carrier. The system of claim 8, wherein the carrier comprises a disc ((7) and the material layer comprises at least one of a material (4) face (52) and a material spiral (4) material. The readable data includes a preamble of the preamble stored on the disc A type and location of materials on the optical disc and how to write the materials are described. According to the system of claim 8, wherein the tracking layer comprises a dichroic mirror () I - a color mirror system is used Reflecting the tracking laser and allowing transmission of the written laser. 12. According to the system of claim 8, the further step comprises an annealing laser (32), and the annealing laser group is annealed A deposition material formed on the surface. 13. The system according to claim 8, wherein the carrier comprises a disc (12) and the tracking layer comprises a spiral track (54) and a plurality of concentric tracks (56) At least one of them. 14. The system of claim 8, further comprising a tracking and imaging module (44). The tracking and imaging module is configured to collect deposition from the surface to control deposition for directing writes. 15n The system of claim 8 wherein the carrier comprises a plurality of different materials (46)&apos; and the writing lasers are synchronized to write different materials to different locations on the surface I36214.doc 200945339. 16. The system of claim 8, wherein the surface is contained on a substrate (μ) and the substrate is translated by a translation stage (40) to direct writing a pattern on the substrate. 17. The system of claim 8, wherein the tracking laser is focused with the writing laser through the same objective lens (38). 18. A guidance writing system comprising: ^ an optical assembly (11), It is configured to direct a write laser (16) and a tracking laser (22) via the same objective lens (38) such that the tracking laser provides information to maintain the folio focus, the optical assembly A tracking and imaging module (44) is included, the tracking and imaging module configured to collect feedback from the surface to control deposition for directing writing; a disc (12) having a material layer (18) and a tracking layer (14), the material layer comprising at least one material (1) 6) arranged in two dimensions such that the writing laser is controlled to selectively ablate the material layer to deposit ablation The material is on a surface having a viscous track containing readable data that is read during the indexing process to provide for at least one material type, material location and burn Information on the eclipse guidelines. A system according to π, wherein the carrier comprises a plurality of different materials (46) and the writing lasers are synchronized to write different materials to different locations on the surface. 20. A method of writing a guide comprising: reading (1〇8) data from a tracking layer formed on a carrier to determine a type of material formed in one of the material layers on the carrier And the bit 136214.doc 200945339; according to the data, the laser is passed through the tracking layer via the focus-writing laser; and the carrier is selectively positioned (112) according to the data Burning (d) a material deposited on a surface such that a guide write is provided to one surface below the carrier. 21. The method of claim 20, wherein the tracking layer comprises a dichroic mirror and the method includes a reflection (104) for reading the data and tracking the one of the tracking lasers, and The writing laser is transmitted through the tracking layer. 22. The method of claim 21, wherein the tracking laser and the writing laser are focused by the same objective lens. 23. The method of claim 20, further comprising annealing (114) the deposited material formed on the surface. 24. The method of claim 20, further comprising imaging (116) the surface to provide feedback and controlling deposition for directing the write. 25. The method of claim 20, wherein the surface is included on a substrate, and the method further comprises translating (ns) the substrate to index a pattern on the substrate. 136214.doc -4-
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