200929424 九、發明說明 【發明所屬之技術領域】 本發明係關於半導體基板、液晶基板等的工件的支承 裝置’更詳細而言，關於藉由以氣體來浮起，能夠不會產 生破損、傷痕等地進行搬送之工件的支承裝置者。 【先前技術】 © 例如，在精密機器領域等的生產製程，由於即使爲微 小’只要在工件少產生傷痕、髒污就會成爲不良原因，故 不被允許，因此，一般採用使用氣體，在非接觸狀態支承 工件加以搬送之方式。 例如，在專利文獻1，揭示有氣體浮起搬送裝置，此 氣體浮起搬送裝置，一邊藉由從配置於平面基板的下方之 氣體浮起單元噴出氣體用以使平面基板浮起，一邊藉由輸 送機構朝前方移送者，在位於平面基板的搬送方向的前端 ❺ 之氣體浮起單元的下游端附近，設有大幅增大平面基板的 浮起量之機構，使得平面基板與氣體浮起單元不會相互干 涉造成破損、產生傷痕者。 [專利文獻1]日本特開2006-222209號公報 另外，在專利文獻2，揭示有用於對大型基板附加具 光阻劑薄膜的裝置之基板搬送系統，利用以基板浮起板對 基板噴出來自於下面的氣體，使其浮起，藉由沿著基板的 搬送路徑所設置之搬送用滾子挾持基板端部加以搬送。 [專利文獻2]特開2002- 1 5 1 57 1號公報 200929424 又，如圖4所示的工件支承裝置1所示，從加壓氣體的 供給源2，將加壓氣體經由暫時充滿用之頭空間3，由在一 面具有多數個小孔h之支承板4送入，用以支承工件W者 在此方式，藉由調整工件W的質量與氣體的流量的 平衡，獲得穩定性。 如此，因前述工件支承裝置1爲藉由氣體的壓力來支 〇 承工件W者，故，可稱爲特別適合於需要非接觸方式之 精密工件的支承用者。 由於精密工件爲晶圓、基板、玻璃板等薄且輕之板形 狀，故，需要微小地控制氣體的流量，支承板4主要使用 衝孔金屬Pm、燒結板ps等的多孔質材（參照圖6、圖7 ) 。衝孔金屬Pm係在一面，具有以1 〇mm間隔所形成之孔 徑5 mm左右的小孔h。又，在燒結板Ps，以玻璃材G被 覆多孔質材 S表面，在一面以50mm間隔形成有徑30mm © 之小孔h。 【發明內容】 [發明所欲解決之課題]】 但，近年，精密製品的高密度化行進，所處理之工件 W更薄化’成爲薄膜狀工件w。爲了穩定地支承這樣之工 件W，對被要求更微妙之氣體流量的調整，衝孔金屬Pm 、燒結板Sp等，在構造上、流量的控制上存有界限，不 易對應。 -6- 200929424 例如，在現狀，當施加0.1 MPa之原壓時，從衝孔金 屬Pm、燒結板Sp這樣的支承板4，將所噴出之氣體的流 量作成爲〇.5NL/min/Cm2—事極爲困難，在此流量，在近 年之厚度ΙΟμιη級之薄膜狀工件W，工件W的質量與氣體 流量之平衡崩潰，引起所謂之波紋、膨脹鼓起，造成支承 姿勢不穩定（參照圖5)。 又，在支承面爲衝孔金屬Pm、燒結板Sp之情況，當 ❹ 姿勢變成爲不穩定之工件W接觸時，會有在工件W表面 產生傷痕之虞。 因此，被要求即使更輕量、薄型化之薄膜狀工件W 也能以穩定的姿勢支承，且，即使在工件W接觸之情況 ，也不會產生傷痕之支承裝置。 本發明是有鑑於以上這樣之背景所開發完成的發明， 其目的在於提供，藉由使用作爲支承面之通氣阻抗更大的 通氣性多孔薄片，從支承面全體，釋出所控制之微小流量 〇 的氣體，能夠進行輕量薄化之工件的穩定支承之工件的支 承裝置。 [用以解決課題之手段] 爲了解決前述課題，在第1發明之工件的支承裝置， 其特徵爲：具備有：基體（11):配設於基體（11)上之 框構件（12);配設於框構件（12)內側的基體（n)上 之至少一個安裝構件（13);藉由框構件（12)與安裝構 件（13)所支承的通氣性多孔薄片（14);及對通氣性多 200929424 孔薄片（14 )與框構件（12 )、和基體（1 1 )所區劃之密 閉空間（1 5 )供給加壓氣體之加壓氣體供給源（1 6 )，當 藉由加壓氣體供給源（16)供給加壓氣體時，藉由從通氣 性多孔薄片（14)所噴出之氣體來支承工件（W)，並且 使由通氣性多孔薄片（14)所噴出之氣體滯留於形成在安 裝構件（1 3 )上之空間（1 7 )。 藉此，當藉由加壓氣體供給源（1 6 )供給加壓氣體時 φ ，從通氣性多孔薄片（1 4 )，以通氣性多孔薄片（1 4 )之 高的通氣阻抗，噴出已被控制之微小流量的氣體，在與已 被載置於通氣性多孔薄片（14)上面之工件（W)之間， 形成氣體層。 此時，由於所噴出之氣體滞留於形成在通氣性多孔薄 片（1 4 )的安裝構件（1 3 )上的空間（1 7 )，故，即使工 件（W)爲薄型之薄膜狀薄片，也能以預定的氣體壓支承 其全體，能夠穩定地支承工件（W)。 〇 在第2發明，其特徵爲，安裝構件（13)係作爲稜部 構成於基體（1 1 )上。 藉此，在支承通氣性多孔薄片（14)之棱部狀的安裝 構件（1 3 )上，形成使所噴出的氣體滯留之空間。 在第3發明，其特徵爲，安裝構件（丨3 )係作爲柱 狀部形成於基體（11)上。 藉此，在支承通氣性多孔薄片（14)之柱狀的安裝構 件（1 3 )上，形成使所噴出的氣體滯留之空間。 在第4發明，其特徵爲，密閉空間（〗5 )係相互地連 -8- 200929424 通。 藉此，可使氣體遍及於所有的密閉空間（15)。 在第5發明，其特徵爲，通氣性多孔薄片（14)係以 氟系樹脂所構成。 藉此，即使工件（W)與通氣性多孔薄片（14 )接觸 ，由於氟樹脂爲具有低摩擦性特性的樹脂，不會有表面產 生損傷之虞。 在第6發明，其特徵爲，設有接近於通氣性多孔薄片 (14)上的工件（W)支承面，與工件（W)接觸來將工 件（W)朝搬送方向導引之工件搬送手段（21)。 藉此，因工件（W)在藉由氣體壓由通氣性多孔薄片 (14)上面浮起之狀態下被支承，所以，藉由工件搬送手 段（21)來搬送工件（W)之力爲微小之力即可達到。 再者，前述各手段的括弧內之符號爲顯示後述的實施 形態所記載的具體手段之對應關係的一例。 【實施方式】 以下’針對本發明之工件的支承裝置，顯示一實施形 態，根據圖面進行詳細說明。 圖1、圖2係示意地顯示作爲工件之薄化薄膜狀工件w 的支承裝置1〇的局部。 此支承裝置10具備有：配設於基體丨丨上之氣密狀的框 構件12 ;配設於此框構件12內側的基體11上之至少一個安 裝構件13 ;藉由這些框構件12與安裝構件13所支承的通氣 200929424 性多孔薄片1 4 ;及對通氣性多孔薄片1 4、框構件1 2、與基 體1 1所區劃之密閉空間1 5，供給加壓氣體之加壓氣體供給 源1 6。 基體11爲平坦狀的構件，以底部面積爲具有至少可載 置後述的欲進行支承搬送之工件W全體的面積之方形的 構件所構成，在基體11上的最外周，呈氣密狀地突設有框 構件1 2。 φ 安裝構件1 3係在框構件1 2的內側，於與框構件1 2相同 的高度，以每預定間隔呈稜狀地突設著。其排列的方式爲 適宜，亦可爲相互平行或格子狀地排列的結構（參照圖4 )。且’安裝構件13亦可購成爲柱狀物（參照圖5)。 通氣性多孔薄片1 4 ’可使用具有例如低摩擦性、非黏 著性的特性之氟系樹脂。在此情況，通氣性多孔薄片丨4之 厚度爲例如0.5mm。 在通氣性多孔薄片14下面側，形成有藉由基體丨丨、框 © 構件1 2與各安裝構件1 3所區劃之密閉空間1 5。在此密閉空 間1 5 ’連接有可從加壓氣體供給源！ 6供給加壓氣體之配管 L。再者’各自的密閉空間15係藉由設置於各安裝構件13 的連通口 Η連通著。 又’通氣性多孔薄片14，當藉由框構件12、與稜狀 的安裝構件1 3支承時’利用安裝構件i 3之支承部位間的部 k呈凸狀突出’在利用安裝構件13之支承部位上的空間17 ’使由通氣性多孔薄片14所噴出的氣體滞留（參照圖3) -10- 200929424 在此情況，通氣性多孔薄片14與安裝構件13係能藉由 適宜的固定手段加以固定。即，通氣性多孔薄片14與安裝 構件13，亦可經由適宜的抵接構件18’以螺栓等進行機械 式固定，亦可藉由接著、熔接來進行固定。 這些的固定部位係依據安裝構件13的高度尺寸來規定 高度，這些固定部位以外的通氣性多孔薄片14’由於呈凸 狀突出，故，在以固定部位作爲底部之呈凸狀突出的部位 0 ，以較該部位凹陷的狀態形成使氣體滯留之空間1 7。 再者，在此支承裝置10，將厚度例如之通氣性 多孔薄片14裝設於基體11上的安裝構件13時，將隣接之凸 狀突出的通氣性多孔薄片14之頂部間的間隔作爲支承間距 P，設爲 3 0mm。 對密閉空間1 5供給加壓氣體之加壓氣體供給源1 6係經 由連接構件20，以配管L連接於開口在基體11底部中央之 供給孔1 9，來供給加壓氣體。 φ 再者，加壓氣體供給源16能夠使用習知結構者。 且在以上這樣的支承裝置1 0，如圖1、圖2所示，在兩 側部設有適宜的工件搬送手段2 1。即，工件搬送手段2 1例 如具備有：配置於基體11兩側兩端部之轉動滑輪21a;及 分別掛設於兩側部兩端部之轉動滑輪2 1 a、2 1 a間的驅動 帶 21b。 本發明之工件的支承裝置10，爲以上這種結構所構成 者。其次，說明其作用。 針對藉由此支承裝置10進行支承搬送之對象物的工件 -11 - 200929424 W進行說明。此工件W爲例如’在厚度50μπι之樹脂上’ 形成厚度30 μιη之銅的電路圖案’每單位面積的質量設爲 0.02g/cm2 ° 當將該工件W載置於裝設在支承裝置10之基體11上 的安裝構件13之通氣性多孔薄片14上，驅動加壓氣體供給 源16時，加壓氣體透過基體11底部中央的供給孔19，被供 給至受到通氣性多孔薄片1 4下面側之基體1 1與安裝構件1 3 φ 所區劃的密閉空間1 5內。加壓氣體可透過形成於安裝構件 13之連通口 Η，無遺漏地遍及所有的密閉空間15，由通氣 性多孔薄片14上面，將氣體噴出於通氣性多孔薄片14全體 範圍。 通氣性多孔薄片14，由於在全面上存在有微細孔，故 當氣體通過之際，會有大的通氣阻抗。因此，從密閉空間 1 5內，流量被抑制成爲微少量之氣體從通氣性多孔薄片1 4 上面噴出。 G 藉由氣體的噴出，使得在通氣性多孔薄片14上面與工 件W之間充滿氣體，氣體聚集於通氣性多孔薄片14之凹 陷部位的空間1 7，形成氣體層。 工件W係能夠藉由這些氣體壓加以支承。在此情況 ，由於通氣性多孔薄片14之全面存在有微細孔，另外，空 間1 7雖氣體不會噴出，但從支承部位周圍所突出之部位噴 出的氣體會滯留，故，全體形成爲大致一定氣壓之氣體層 ，工件W在穩定的狀態下被支承。 再者，在實施形態，工件W係爲在厚度5 Ομιη之樹脂 -12- 200929424 上形成有厚度30 μιη之銅的電路圖案’每單位面積的質量 爲0.02g/cm2之薄膜材，藉由加壓氣體供給源16所供給的 加壓氣體係以壓力〇·1Μρ被輸送，從通氣性多孔薄片14上 面所噴出的氣體的流量，比起在以往的裝置所使用的衝孔 金屬Pm、燒結板Ps等的多孔質材，成爲大致1/10以下之 0.05NL/min/cm2，能成爲以1.5mm之支承高度丁所進行之 穩定的支承。 φ 又，爲了在此狀態搬送工件W，能夠使分別掛設於配 置在基體11兩側兩端部的件搬送手段21之轉動滑輪21a、 2 1 a間之驅動帶2 1 b朝搬送方向作動，藉由微小的力，即 可送出工件W。 再者，即使有因某種原因造成工件W與通氣性多孔 薄片14上面接觸，也因通氣性多孔薄片14爲軟質、低摩擦 性的氟系樹脂所構成，故不會造成在工件W上產生傷痕 〇 【圖式簡單說明】 圖1是顯示本發明之工件的支承裝置的局部之模式平 面圖。 圖2是圖1所示的工件的支承裝置之斷面説明圖。 圖3是圖2所示的工件的支承裝置的局部放大斷面説明 圖。 圖4是顯示本發明之工件的支承裝置之基體上的安裝 構件之其他排列結構的模式平面圖。 -13- 200929424 圖5是顯示本發明之工件的支承裝置之基體上的安裝 構件之其他排列結構的模式平面圖。 圖6是顯示以往的工件支承裝置的一例之模式局部斷 面説明圖。 圖7是使用圖6所示的工件支承裝置，在支承薄化薄膜 狀工件時的缺失之模式局部斷面説明圖。 圖8是顯示在以往的工件支承裝置中，用於作爲支承 φ 板之衝孔金屬的模式説明圖。 圖9是顯示在以往的工件支承裝置中，用於作爲支承 板之燒結板的模式説明圖。 【主要元件符號說明】 1〇 :支承裝置 1 1 :基體 1 2 :框構件 © 1 3 :安裝構件 1 4 :通氣性多孔薄片 1 5 :密閉空間 1 6 :加壓氣體供給源 1 7 :凹部 1 8 :抵接構件 1 9 :供給孔 20 :連接構件 2 1 :工件搬送手段 -14- 200929424200929424 IX. EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a support device for a workpiece such as a semiconductor substrate or a liquid crystal substrate. More specifically, it is possible to prevent damage, scratches, etc. by floating with a gas. The support device for the workpiece to be transported. [Prior Art] © For example, in the production process of the precision machine field, even if it is a small one, it is not allowed to cause scratches and dirt in the workpiece, so it is not allowed. Therefore, the gas is generally used. The way in which the workpiece is supported by the contact state. For example, Patent Document 1 discloses a gas floating and conveying device that discharges a flat substrate by floating gas from a gas floating unit disposed below a planar substrate. The transport mechanism is forward-transferred, and a mechanism for greatly increasing the floating amount of the planar substrate is provided in the vicinity of the downstream end of the gas floating unit located at the front end of the plane in the transport direction of the planar substrate, so that the planar substrate and the gas floating unit are not Will interfere with each other to cause damage and scars. Further, Patent Document 2 discloses a substrate transfer system for attaching a device having a photoresist film to a large substrate, and the substrate is ejected from the substrate by a substrate floating plate. The gas to be floated is lifted, and the end of the substrate is conveyed by the transfer roller provided along the transport path of the substrate. [Patent Document 2] JP-A-2002-1501 57 No. 200929424 Further, as shown in the workpiece supporting device 1 shown in Fig. 4, the pressurized gas is supplied from the supply source 2 of the pressurized gas through temporary filling. The head space 3 is fed by a support plate 4 having a plurality of small holes h on one side for supporting the workpiece W. In this manner, stability is obtained by adjusting the balance between the mass of the workpiece W and the flow rate of the gas. As described above, since the workpiece supporting device 1 supports the workpiece W by the pressure of the gas, it can be called a supporter particularly suitable for a precision workpiece requiring a non-contact method. Since the precision workpiece is a thin and light plate shape such as a wafer, a substrate, or a glass plate, it is necessary to minutely control the flow rate of the gas, and the support plate 4 mainly uses a porous material such as a punched metal Pm or a sintered plate ps (refer to the figure). 6, Figure 7). The punched metal Pm is provided on one side, and has a small hole h having a diameter of about 5 mm formed at intervals of 1 mm. Further, in the sintered plate Ps, the surface of the porous material S was covered with the glass material G, and a small hole h having a diameter of 30 mm was formed at intervals of 50 mm on one surface. [Problems to be Solved by the Invention] However, in recent years, the precision of the precision product has progressed, and the workpiece W to be processed has become thinner, and has become a film-like workpiece w. In order to stably support such a workpiece W, there is a limit in the control of the structure and the flow rate for the adjustment of the gas flow rate required for more delicate gas flow, and it is not easy to cope with the control of the flow rate of the metal Pm, the sintered plate Sp, and the like. -6- 200929424 For example, in the present state, when a raw pressure of 0.1 MPa is applied, the flow rate of the gas to be ejected is made to be 5 NL/min/cm 2 from the support plate 4 such as the punched metal Pm or the sintered plate Sp. It is extremely difficult. At this flow rate, in the film thickness W of the thickness ΙΟμηη in recent years, the balance between the mass of the workpiece W and the gas flow collapses, causing the so-called corrugation and expansion bulging, resulting in unstable support posture (refer to Fig. 5). . Further, when the support surface is the punched metal Pm or the sintered plate Sp, when the workpiece W is in contact with the unstable workpiece W, there is a flaw in the surface of the workpiece W. Therefore, it is required that the film-like workpiece W, which is lighter and thinner, can be supported in a stable posture, and a support device that does not cause scratches even when the workpiece W is in contact with each other. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a controlled flow of a small flow rate from the entire support surface by using a permeable porous sheet having a larger venting resistance as a support surface. A gas, a support device for a workpiece that can be stably supported by a lightweight and thinned workpiece. [Means for Solving the Problem] In order to solve the above problems, the support device for a workpiece according to the first aspect of the invention includes: a base body (11): a frame member (12) disposed on the base body (11); At least one mounting member (13) disposed on the base (n) inside the frame member (12); a permeable porous sheet (14) supported by the frame member (12) and the mounting member (13); The air permeability is more than 200929424. The hole sheet (14) and the frame member (12) and the sealed space (15) partitioned by the base body (1 1 ) supply a pressurized gas supply source (1 6 ) of the pressurized gas. When the pressurized gas supply source (16) supplies the pressurized gas, the workpiece (W) is supported by the gas ejected from the permeable porous sheet (14), and the gas ejected from the permeable porous sheet (14) is retained in the gas. A space (17) formed on the mounting member (13). As a result, when the pressurized gas is supplied by the pressurized gas supply source (16), φ is ejected from the permeable porous sheet (14) with a high ventilating resistance of the permeable porous sheet (14). The gas of a small flow rate is controlled to form a gas layer between the workpiece (W) that has been placed on the upper surface of the permeable porous sheet (14). At this time, since the gas to be ejected stays in the space (17) formed on the mounting member (13) of the permeable porous sheet (14), even if the workpiece (W) is a thin film-like sheet, The entire body can be supported by a predetermined gas pressure, and the workpiece (W) can be stably supported. According to a second aspect of the invention, the attachment member (13) is formed as a ridge portion on the base (1 1 ). Thereby, a space for retaining the discharged gas is formed in the rib-shaped mounting member (13) supporting the permeable porous sheet (14). According to a third aspect of the invention, the attachment member (丨3) is formed as a columnar portion on the base (11). Thereby, a space for trapping the discharged gas is formed in the columnar mounting member (13) supporting the permeable porous sheet (14). According to a fourth aspect of the invention, the sealed space (?5) is connected to each other -8-200929424. Thereby, the gas can be spread over all the sealed spaces (15). According to a fifth aspect of the invention, the air permeable porous sheet (14) is made of a fluorine resin. Thereby, even if the workpiece (W) is in contact with the permeable porous sheet (14), since the fluororesin is a resin having low friction properties, there is no possibility that the surface is damaged. According to a sixth aspect of the invention, there is provided a workpiece transporting means for guiding a workpiece (W) in contact with a workpiece (W) in proximity to a workpiece (W) supporting surface on the permeable porous sheet (14) (twenty one). Thereby, since the workpiece (W) is supported by the gas pressure on the upper surface of the permeable porous sheet (14), the force of transporting the workpiece (W) by the workpiece transfer means (21) is minute. The power can be achieved. Further, the symbols in parentheses of the respective means are examples of the correspondence relationship of the specific means described in the embodiment described later. [Embodiment] The following description of the support device for a workpiece according to the present invention will be described in detail with reference to the drawings. Fig. 1 and Fig. 2 schematically show a part of a supporting device 1A as a thinned film-like workpiece w of a workpiece. The support device 10 is provided with an airtight frame member 12 disposed on the base member, and at least one mounting member 13 disposed on the base 11 on the inner side of the frame member 12; and the frame member 12 and the mounting member a ventilating 200929424 porous sheet 14 supported by the member 13; and a pressurized gas supply source 1 for supplying a pressurized gas to the permeable porous sheet 14 and the frame member 1-2 and the sealed space 15 partitioned by the substrate 11. 6. The base 11 is a flat member, and has a bottom portion having a square shape having at least an area of a workpiece W to be supported and transported as described later, and is airtightly formed on the outermost periphery of the base 11. A frame member 12 is provided. The φ mounting member 13 is attached to the inside of the frame member 12, and is formed in a prismatic shape at a predetermined height at the same height as the frame member 12. The arrangement is preferably in the form of a structure in which they are arranged in parallel or in a lattice pattern (see Fig. 4). Further, the mounting member 13 can also be purchased as a column (see Fig. 5). As the permeable porous sheet 1 4 ', a fluorine-based resin having characteristics such as low friction and non-adhesive properties can be used. In this case, the thickness of the aerodynamic porous sheet crucible 4 is, for example, 0.5 mm. On the lower surface side of the permeable porous sheet 14, a sealed space 15 partitioned by the base member 框, the frame member 12 and the respective mounting members 13 is formed. In this sealed space, 1 5 ′ is connected from the pressurized gas supply source! 6 piping L for supplying pressurized gas. Further, the respective sealed spaces 15 are connected by the communication ports provided in the respective mounting members 13. Further, when the frame member 12 and the prism-shaped mounting member 13 are supported by the frame member 12 and the prismatic mounting member 13 , the portion k between the support portions of the mounting member i 3 protrudes convexly in the support by the mounting member 13 The space 17' in the portion retains the gas ejected from the permeable porous sheet 14 (refer to Fig. 3). -10-200929424 In this case, the permeable porous sheet 14 and the mounting member 13 can be fixed by suitable fixing means. . That is, the permeable porous sheet 14 and the attachment member 13 may be mechanically fixed by bolts or the like via a suitable abutting member 18', or may be fixed by welding or welding. These fixed portions are defined in accordance with the height dimension of the mounting member 13, and the permeable porous sheet 14' other than the fixed portions protrudes in a convex shape, so that the convex portion is protruded at the fixed portion as the bottom portion. A space 17 in which gas is trapped is formed in a state of being recessed from the portion. Further, in the support device 10, when the permeable porous sheet 14 having a thickness of, for example, is attached to the mounting member 13 on the base 11, the interval between the tops of the ventilated porous sheets 14 projecting in a convex shape is used as the support pitch. P, set to 30 mm. The pressurized gas supply source 16 for supplying the pressurized gas to the sealed space 15 is connected to the supply port 19 opened at the center of the bottom of the base 11 via the connecting member 20 via the connecting member 20, and the pressurized gas is supplied. φ Further, the pressurized gas supply source 16 can use a conventional structure. Further, in the above-described supporting device 10, as shown in Figs. 1 and 2, an appropriate workpiece conveying means 21 is provided on both side portions. In other words, the workpiece transporting device 2 1 includes, for example, a rotating pulley 21a disposed at both end portions of the base 11 and a driving belt that is hung between the rotating pulleys 2 1 a and 2 1 a at both end portions of the both side portions. 21b. The support device 10 of the workpiece of the present invention is constructed as described above. Second, explain its role. The workpiece -11 - 200929424 W which is the object to be supported by the support device 10 will be described. This workpiece W is, for example, a 'circuit pattern of copper having a thickness of 30 μm on a resin having a thickness of 50 μm.' The mass per unit area is set to 0.02 g/cm 2 °. When the workpiece W is placed on the support device 10 When the pressurized gas supply source 16 is driven on the permeable porous sheet 14 of the mounting member 13 on the base 11, the pressurized gas is supplied through the supply hole 19 at the center of the bottom of the base 11, and is supplied to the lower surface side of the permeable porous sheet 14 The base body 1 1 is enclosed in a sealed space 15 partitioned by the mounting member 1 3 φ. The pressurized gas is transmitted through the communication port formed in the mounting member 13, and passes through all the sealed spaces 15 without fail, and the gas is sprayed from the upper surface of the permeable porous sheet 14 to the entire range of the permeable porous sheet 14. Since the permeable porous sheet 14 has fine pores in its entirety, it has a large ventilating resistance when the gas passes. Therefore, from the inside of the sealed space 15, the flow rate is suppressed so that a small amount of gas is ejected from the upper surface of the permeable porous sheet 1 4 . G is ejected by gas so that a gas is filled between the upper surface of the permeable porous sheet 14 and the workpiece W, and gas is collected in the space 17 of the concave portion of the permeable porous sheet 14 to form a gas layer. The workpiece W can be supported by these gas pressures. In this case, since the air permeable porous sheet 14 has fine pores in its entirety, the gas is not ejected in the space 17, but the gas ejected from the portion protruding around the support portion is retained, so that the entire portion is formed substantially constant. The gas layer of the air pressure, the workpiece W is supported in a stable state. Further, in the embodiment, the workpiece W is a film material having a thickness of 30 μm of copper and a circuit pattern of a mass of 0.02 g/cm 2 per unit area formed on a resin having a thickness of 5 Ομηη, -12-200929424, by adding The pressurized gas system supplied from the pressurized gas supply source 16 is transported at a pressure of 〇·1Μρ, and the flow rate of the gas ejected from the upper surface of the permeable porous sheet 14 is compared with the punched metal Pm and the sintered plate used in the conventional apparatus. The porous material such as Ps is 0.05 NL/min/cm 2 which is approximately 1/10 or less, and can be stably supported by a support height of 1.5 mm. φ Further, in order to convey the workpiece W in this state, the driving belts 2 1 b between the rotating pulleys 21a and 21 a of the member conveying means 21 disposed at both end portions of the base 11 can be moved in the conveying direction. The workpiece W can be delivered by a small force. Further, even if the workpiece W comes into contact with the upper surface of the permeable porous sheet 14 for some reason, the permeable porous sheet 14 is made of a soft, low-friction fluororesin, so that it does not occur on the workpiece W. Scratch 〇 [Simplified illustration of the drawings] Fig. 1 is a schematic plan view showing a part of a supporting device for a workpiece of the present invention. Fig. 2 is a cross-sectional explanatory view of the supporting device of the workpiece shown in Fig. 1; Fig. 3 is a partially enlarged cross-sectional explanatory view showing the supporting device of the workpiece shown in Fig. 2; Fig. 4 is a schematic plan view showing another arrangement of the mounting members on the base of the supporting device of the workpiece of the present invention. -13- 200929424 Fig. 5 is a schematic plan view showing another arrangement of the mounting members on the base of the supporting device of the workpiece of the present invention. Fig. 6 is a schematic partial cross-sectional explanatory view showing an example of a conventional workpiece supporting device. Fig. 7 is a partial cross-sectional explanatory view showing a state in which a thin film-like workpiece is supported by the workpiece supporting device shown in Fig. 6; Fig. 8 is a schematic explanatory view showing a punching metal for supporting a φ plate in a conventional workpiece supporting device. Fig. 9 is a schematic explanatory view showing a sintered plate used as a support plate in a conventional workpiece supporting device. [Description of main component symbols] 1〇: support device 1 1 : base 1 2 : frame member © 1 3 : mounting member 1 4 : air permeable porous sheet 1 5 : closed space 1 6 : pressurized gas supply source 17 : recess 1 8 : abutting member 1 9 : supply hole 20 : connecting member 2 1 : workpiece conveying means - 14 - 200929424
21a :轉動滑輪 2 1 b :驅動帶 W :工件 Η :連通口 -1521a : Rotating pulley 2 1 b : Drive belt W : Workpiece Η : Communication port -15