200914137 九、發明說明： 【發明所屬之技術領域】 本發明係關於使用油墨噴嘴將彩色材料供給於基板表 面之塗布裝置。 【先前技術】 自以往，就提案有一種使用油墨噴嘴在玻璃基板上製 造彩色濾光片之方法（參照專利文獻1) ° 具體而言，在玻璃基板上至少設置透明的著色材接受 層，將應成爲不同顏色之畫素間的區域’作成具有排斥著 色材性之非著色區域，並在應成爲相同顏色之畫素彼此相 鄰之部位，包含應成爲該相同顏色之複數個畫素部分及畫 素間區域在內，以無縫隙的方式供給著色材以進行著色而 製造彩色濾光片。 [專利文獻1]日本特開平9-686 1 1號公報 【發明內容】 (發明所欲解決之課題） 因爲油墨噴嘴之使用頻率高，所以在專利文獻1之方 法中，在没有保證能始終狀態良好地進行彩色材料之噴吐 下，當產生噴吐不良時，因爲是繼續製造迄至檢查步驟中 檢測到不良爲止的關係，所以會有所製造之不良品的數量 大幅增加的問題。 另外，爲了從油墨噴嘴正常地噴吐彩色材料，需要將 油墨噴嘴之表面保持成不髒的狀態。這是因爲若在油墨噴 嘴之表面蓄積有油墨或存在有異物時，噴吐之彩色材料的 200914137 飛行軌跡會彎曲或產生堵塞，此等結果會造成無法從油墨 噴嘴正確地噴吐彩色材料’進而無法狀態良好地將彩色材 料附著於玻璃基板之表面’而成爲產生不良品之原因。 藉此’需要定期性地對油墨噴嘴之表面進行清潔，以 確保在油墨噴嘴之表面不會蓄積有油墨或存在有異物的狀 態。另外’在彩色材料噴吐裝置本身因某種不明理由而停 止’並於之後恢復時’需要進行將彩色材料供給於油墨噴 嘴之供給路徑的換液、放氣及噴嘴之清潔，並於完成此等 一連串之作業之後’油墨噴嘴始能對玻璃基板塗布彩色材 料。 在進行油墨噴嘴之清潔的情況，需要停止用以供給彩 色材料之一連串的動作（玻璃基板之供給、玻璃基板之對 準、彩色材料之供給）’以進行清潔之動作。 另外，在裝置起動時，亦需要等待起動所需之動作（供 給路徑的換液、放氣及噴嘴之清潔）完成後，再進行供給彩 色材料用之一連串的動作。 依此’起因於需要此等之動作’而造成所謂彩色濾光 片之生產效率降低的問題。 本發明係鑒於上述之問題點而完成者，其目的在於提 供一種塗布裝置’能在產生噴吐不良之情況，迅速地檢測 到不良，同時可防止因清潔用之必要動作、裝置起動時之 必要動作而引起生產效率降低。 (解決課題之手段） 200914137 本發明係在塗布門架初次的1個掃描（塗布動作）的最 後，由所有噴嘴進行彩色材料之塗布而形成測試圖案，並 在照相機門架即將與塗布門架之來回掃描並行地開始掃描 之前，由掃描照相機拍攝塗布後之測試圖案，檢測此圖案 中有無中彈口徑小或無中彈者等之「異常」，運算並判斷此 「異常」判定數或密度是否超過允許値，若在判斷爲超過 允許値的情況，此玻璃基板則作爲彩色材料之塗布不良而 被排出，塗布裝置停止生產步驟而進入「清潔」的製程。 / . 、 亦即，本發明提供一種塗布裝置，係使用油墨噴嘴（52) 將彩色材料供給於基板（2)表面，其包含有： 第1門架（4)，係搭載具有將彩色材料供給於基板（2) 表面之複數個油墨噴嘴（5 2)的油墨噴頭（51); 第2門架（6)，係搭載照相機（9);及 判斷控制部，係將藉該油墨噴頭所形成於該基板上之 測試圖案以該照相機轉換爲影像資料，並自該影像資料來 ij 判斷該油墨噴頭的噴吐不良。 若爲此種塗布裝置，則可藉由搭載於第1門架上之油 墨噴頭，將彩色材料供給於基板表面。另外，使用來自搭 載於第2門架上之照相機的影像資料，可檢查彩色材料是 否被狀態良好地附著於基板表面。 因此，在發生噴吐不良之情況，可立即檢測到不良， 可將所製造之不良品的數量抑制成僅爲一片基板。 在此情況時，該第1門架（塗布門架）及該第2門架（照 200914137 相機門架），係以相對於支撐基板之作業台可相互獨立地作 往返移動者爲佳。這是因爲可提高彩色材料塗布及檢查之 效率的緣故。 (發明效果） 本發明係可使塗布門架及照相機門架獨立地移動，並 在塗布門架最初的塗布動作，藉由照相機門架拍攝最後來 自所有噴嘴的油墨噴吐，以確認塗布狀態，所以，在發生 噴吐不良之情況，可立即檢測到不良，而可獲得將所製造 之不良品的數量減低成僅爲一片基板的特有效果。 另外，藉由使第1門架及第2門架可相對於支撐基板 之作業台相互獨立地作往返移動，可不用停止用以供給彩 色材料之一連串的動作，而可進行油墨噴嘴之清潔動作。 這是意味在塗布裝置起動時，不需要等待起動所需之 動作的完成，便可開始進行供給彩色材料用之一連串的動 作。另外，進而可提高供給有彩色材料之基板的生產效率。 【實施方式】 以下，參照所附圖面來詳細說明本發明之塗布裝置的 實施形態。又，在以下之說明中，以彩色濾光片製造裝置 爲例進行說明。 第1圖爲顯示彩色濾光片製造裝置之一實施形態的立 體圖。 此彩色濾光片製造裝置，係於機台1上支撐屬作業台 之一實施形態的吸附台3、塗布門架（第1門架）4、及照相 200914137 機門架（第2門架）6等。又，塗布門架4及照相機門架6， 如後述’係可相對於吸附台3作往返移動。 吸附台3係用以吸附保持玻璃基板2，爲了達成此玻 璃基板2之定位，藉由未圖示之驅動機構、導引機構進行 旋轉驅動，並朝Y方向進行驅動。 塗布門架4係用以保持油墨噴頭桿5，爲了於玻璃基 板2上塗布彩色材料，藉由未圖示之驅動機構、導引機構， 朝X方向進行驅動。另外，爲了調整對玻璃基板2之相對 位置，藉由未圖示之驅動機構、導引機構，朝Z、Y方向進 行驅動。 照相機門架6係用以保持玻璃基板2之對準用的對準 照相機7，8、及檢測玻璃基板2之黑色矩陣畫素用之掃描照 相機9，爲了進行對準及畫素檢測，藉由未圖示之驅動機 構、導引機構，朝X方向進行驅動。另外，藉由未圖示之 驅動機構、導引機構，將對準照相機7,8及掃描照相機9 朝Υ方向驅動。 塗布門架4及照相機門架6之初期位置，如第1圖所 示，係在機台1上位於相對之側。這是因爲在本發明之塗 布裝置中，係在塗布門架4最初的塗布掃描之後，塗布測 試圖案，然後再由照相機門架拍攝測試圖案。此時，照相 機門架之初期位置，位於與塗布門架之初期位置的相反 側，可使塗布門架之移動受到之限制較少。又，照相機門 架亦可位於比塗布門架之初期位置更靠最初之掃描側，而 200914137 與塗布門架一起移動。 對準照相機7,8係用以檢測玻璃基板2之標記（未圖 示）’根據對準照相機7，8之標記檢測結果，以使吸附台3 旋轉’及/或使之朝Y方向移動，藉此可達成玻璃基板2之 對準。 又’ X、Y係表示用以規定與藉由吸附台3所吸附保持 之玻璃基板2之上面平行的平面而設定之相互正交之方 向，Z係表示與藉由Χ,Υ所規定之平面正交的方向。 第2圖爲彩色瀘光片製造裝置之控制系統的構成之示 意圖。塗布門架4及照相機門架6，係構成爲相對於保持 於吸附台3上之玻璃基板2而可分別移動。彩色濾光片製 造裝置係具有控制此等之控制部1 2。自控制部1 2對於照相 機門架發出指示照相機位置之命令Cdvc。藉此命令，而由 未圖示之驅動裝置來移動照相機門架之位置及照相機的位 置。 另外，可自照相機取得影像資料Sim。此影像資料Sim 內亦可包含所拍攝之照相機的位置資訊。控制部1 2係根據 影像資料Sim來判斷搭載於塗布門架上之各油墨噴嘴的油 墨的噴吐狀態之良/不良。 控制部12係可對塗布門架輸出移動命令Cdvh。另外， 亦可對搭載於塗布門架上之油墨噴頭51之油墨噴嘴52發 出噴吐命令Cpr。另外，針對塗布門架之位置資訊Sxy，亦 能以機械讀取之方法來獲取。又，亦可於控制部1 2進行吸 -10- 200914137 附台之吸附動作等的控制。 控制部1 2亦可利用MPU及程式來實現，亦可由專用 之硬體所構成，或組合序列控制裝置來構成。 第3圖爲槪要顯示油墨噴頭桿5之構成的放大圖。 此油墨噴頭桿5係使複數個油墨噴頭5 1整齊排列所構 成’各油墨噴頭51係使複數個油墨噴嘴5 2整齊排列所構 成。複數個油墨噴頭51係設定爲使所有油墨噴嘴52之X 方向的間隔、Y方向的間隔分別成爲規定間隔。 又，油墨噴嘴52係需要配置成在油墨噴頭桿5之直角 方向可獲得所需之塗布密度，在此例中，係以規定個數爲 單位而排列於傾斜方向，所以，藉由一面將塗布門架4朝 X方向驅動，一面使油墨噴嘴5 2依序動作，可在直線地排 列於Y方向之狀態下塗布彩色材料。 第3圖所示之油墨噴頭桿5,係用以塗布紅（R)、綠（G)、 藍（B)之彩色材料的任一顏色者，雖未特別加以圖示，但亦 設置有塗布其他之彩色材料用的油墨噴頭桿。 接著，說明上述構成之彩色濾光片製造裝置的動作。 又，以下之動作係可由控制部1 2對塗布門架或照相機門架 發出之命令及分別接收到之資訊來實現。 第4圖爲說明彩色材料塗布處理及測試圖案檢查處理 之時序流程圖，第8圖爲說明噴吐資料表製作處理之流程 圖，第9圖爲說明彩色濾光片製造處理之流程圖。首先’ 參照第9圖說明彩色濾光片製造處理。 -11 - 200914137 在步驟SP1，在藉由未圖示之搬入機器人等而將玻璃 基板2搬入吸附台3之後，在步驟SP2，使照相機門架6 朝去程移動，以檢測玻璃基板2之標記，並根據檢測結果 而使搬入機器人等動作，藉以達成玻璃基板2之定位。 然後，在步驟SP3，藉由吸附台3吸附玻璃基板2之 後，在步驟SP4，使照相機門架6朝去程移動，在步驟SP5， 進行玻璃基板2之對準，在步驟S P6，使照相機門架6朝 回程移動。 接著，在步驟SP7，判定是去程塗布還是回程塗布， 並在判定爲去程塗布之情況，在步驟S P8，使塗布門架4 朝去程移動，同時對控制部1 2輸出X座標値，相反地在步 驟SP7，在判定爲回程塗布之情況，在步驟SP9，使塗布門 架4朝回程移動。又，塗布門架之X座標値，係可藉由機 台上之直線刻度的直讀資料、或來自以起始點爲原點之進 給機構的進給量的資料的塗布門架之位置運算等而獲得。 另外，塗布門架及油墨噴頭桿5之位置關係，係爲預 定之位置關係，另外’油墨噴頭桿與油墨噴頭之位置關係 亦可預知。油墨噴頭中之油墨噴嘴，係以所決定之位置關 係來製作，所以，若知道塗布門架之X座標値的話，即可 獲得各個油墨噴嘴的X座標値。 然後，在進行完步驟SP8或步驟SP9之處理後，在步 驟SP1 0，根據X座標値來判定塗布是否有進行到終端。又， 在檢測X座標値之情況，事先停止塗布門架4與玻璃基板 -12- 200914137 2之相對移動。藉此，油墨噴嘴52之嘴孔正下方的彈痕， 可成爲轉印噴嘴孔之排列者。 又，因噴吐時之彎曲等的影響，會在油墨噴嘴之X座 標値與實際之彈痕之間產生微妙的偏移。但是，因爲根據 實際之彈痕進行修正之後才進行塗布，所以，不會產生塗 布位置偏移允許範圍以上的問題。 第11圖爲來自油墨噴嘴52之彈痕之一例的示意圖。 在第11圖顯示依噴嘴列、噴嘴編號所產生之彈痕，P係畫 素間距，L1〜L5係噴嘴列塗布方向間隔。 回到第9圖，在步驟S P 1 0，判定爲塗布未進行到終端 的情況，在步驟SP1 1，比較塗布門架4之X座標値輸出信 號與噴吐資料表之噴吐資料，在步驟S P 1 2，判定X座標値 與噴吐資料是否一致，在判定爲X座標値與噴吐資料一致 的情況，在步驟SP13，藉由油墨噴嘴52進行噴吐動作。 第10圖爲噴吐資料表之一例的示意圖，圖中設定有塗 布掃描次數、塗布方向畫素編號、塗布方向畫素位置、噴 嘴列、塗布門架X座標値、所有噴嘴之噴吐圖案。又，XO 係初期移動量，Pg係畫素間距，L 1〜Ln係噴嘴列塗布方向 間隔，m係2以上之自然數。 再度返回第9圖，在進行步驟SP13之處理的情況，或 是在步驟S P 1 2，判定X座標値與噴吐資料爲不一致的情 況，則再度進行步驟S P 1 0之判定。 另外，在步驟S P 1 0，判定塗布已進行到終端的情況， -13- 200914137 在步驟SP14，判定是否爲去程之第1次的塗布。 然後，在判定爲去程之第1次塗布的情況，在步驟 SP15,使塗布門架4移動至測試圖案塗布位置，在步驟SP16 形成測試圖案（具體而言，例如，利用X方向移動及油墨 噴嘴52之選擇來形成交錯形之測試圖案）。 然後，在步驟SP17，判定有無噴吐不良，在判定爲有 噴吐不良之情況，進行油墨噴嘴之清潔（參照第1 2圖之流 程的處理）。 在此，所謂的噴吐不良係指由以搭載於照相機門架上 之照相機所拍攝的影像資料，利用影像處理所求出之噴吐 出的彈痕之量不足。在此，所謂的量不足亦包含彈痕的欠 缺。利用影像處理所獲得之噴吐量與規定之臨界値比較且 在爲臨界値以下之情況，判斷爲有噴吐不良的情形。此判 斷包含噴吐量之總和爲臨界値以下之情況、判斷爲噴吐量 不足之噴嘴數爲一定數量以下的情況。 如此，在根據測試圖案之檢查的不良判定的噴嘴數、 及此不良判定之噴嘴的密度超過允許範圍時’首度使塗布 裝置之塗布動作休止，進入「清潔」之處理’而使生產停 止數分鐘。 在通常之量產品的生產步驟中’係在塗布步驟後’在 剛完成之製品的檢查步驟進行製品的品質確認’而在此階 段發現塗布時之噴吐不良。但是’在本發明之塗布裝置係 在最初之塗布掃描之後立即確認來自噴嘴之油墨噴吐狀 -14 - 200914137 態，所以，可將所製造之噴吐不良造成的基板不良品的發 生抑制成僅爲一片。 另一方面，在步驟SP17，判定爲無噴吐不良之情況， 或是，在步驟SP 1 4，判定爲不是去程之第1次塗布的情況， 在步驟SP18，判定是否有進行指定次數之塗布，在判定爲 未進行指定次數之塗布的情況，在步驟S P 1 9，使塗布門架 4停止，並使油墨噴頭桿5朝Y方向移動，再度進行步驟 SP7的判定。 又，在藉由複數次之噴吐來塗布應予塗布之畫素的情 況，Y方向之移動距離係可移動與彈痕大致相等之距離、 噴嘴排列間距、畫素之並列間距、或油墨噴頭桿5之一次 塗布寬度。另外，Y方向之移動距離亦可爲在與彈痕大致 相等之距離上加上油墨噴嘴之長度方向的間隔之整數倍的 距離。在後者之情況，一個畫素係由不同之油墨噴嘴的噴 吐所塗布。於是，若即使在油墨噴嘴間具有噴吐量之差， U 若任一畫素均由複數個油墨噴嘴的噴吐所塗布，則任一畫 素之被塗布的油墨量被平均化，可製造少有塗布不均的製 品。 另一方面，在步驟SP18，判定爲進行了規定次數之塗 布的情況，在步驟SP20結束塗布，在步驟SP21解除玻璃 基板2之吸附，以進行搬出處理，並就此結束一連串之處 理。 以上，若簡要槪括上述之與彈痕大致相等之距離的移 -15- 200914137 動之塗布動作的話，在進行了玻璃基板2對吸附台3之搬 入之後’使照相機門架6朝去程移動，以檢測玻璃基板2 之標記，並根據檢測結果使吸附台3動作，藉以達成玻璃 基板2之對準。然後使照相機門架6朝回程移動。 接著，使塗布門架4朝去程移動，以進行第1次之去 程塗布。 隨後，僅在朝Y方向移動之狀態下使塗布門架4朝回 程移動’以進行第1次之回程塗布，在此期間，使照相機 門架6朝去程移動，藉由掃描照相機9進行玻璃基板2之 測試圖案的檢查，然後使照相機門架6朝回程移動。隨後， 僅在朝Y方向移動之狀態下使塗布門架4朝去程移動，以 進行第2次之去程塗布。 隨後，僅在朝Y方向移動之狀態下使塗布門架4朝回 程移動，以進行第2次之回程塗布。其後，停止對玻璃基 板2之吸附保持，並自吸附台3搬出。 然後藉由反複地進行上述一連串之處理，可製造所需 片數之彩色濾光片。 又，在此雖說明了進行2次往返塗布的步驟’但往返 次數係依畫素之大小來決定塗布次數’而不受此次數所限 定。例如往返之次數亦可爲由彈痕、噴嘴間距、畫素間距 或油墨噴頭桿5之一次塗布寬度來決定機台上之塗布門架 的每次掃描的中彈徑的大小而可獲得連續之塗布狀態所需 的Y方向的移動量，並因應根據下一個噴嘴應予塗布之γ -16- 200914137 方向的塗布寬度（畫素的大小）來決定塗布門架的掃描次 數。 在此，所謂的連續之塗布狀態係指藉由使自油墨噴嘴 52噴吐之點狀態的彈痕連續而在一定之距離間塗布的狀 態。 例如，在藉由一次噴吐以進行彩色材料之塗布的情 況，以與油墨噴嘴5 2彼此之間隔相等之間隔進行彩色材料 之中彈，所以，若形成於油墨噴頭51上之油墨噴嘴52的 間距大的話，則無法達成連續地塗布彩色材料的狀態。 但是，在依上述之時序流程進行處理的情況，因僅使 Y方向之位置變化來進行塗布，所以，最終如第5，6圖所 示，可在形成於玻璃基板2上之相當於黑色矩陣22的畫素 區域23內連續地塗布彩色材料。 又，在第5圖中，元件符號24顯示噴吐之中心位置， 噴吐之油墨成爲比符號24更寬之彈痕。即，第5圖顯示以 5個彈痕相同地塗布於一個黑色矩陣上的狀態。 接著，參照第8圖來說明噴吐資料表製作處理。 在步驟SP1，將測試用基板搬入吸附台3，在步驟SP2， 進行測試用基板之定位，在步驟SP3，將測試用基板吸附 保持於吸附台3上，在步驟SP4，使照相機門架6朝去程 移動’在步驟SP5，進行測試用基板之對準，在步驟SP6， 使照相機門架6朝回程移動。 接著，在步驟SP7，使塗布門架4朝去程移動，同時 -17- 200914137 輸出X座標値’並在步驟SP8，判定是否到達測試圖案塗 布位置’在判定爲未到達測試圖案塗布位置的情況，再度 進行步驟SP7的處理。即’藉由重複進行此程序，將塗布 門架移動至規定位置。 在步驟S P 8 ’在判定爲到達測試圖案塗布位置的情況， 在步驟SP9使塗布門架4停止’從噴射油墨的所有孔（塗布 門架所有的油墨噴嘴5 2)，以彈痕成爲交錯配置的方式使塗 布門架稍作移動’而各個油墨噴嘴52的噴吐體，亦使油墨 偏移而將彩色材料吐出一滴，並在步驟SP10，使塗布門架 4朝回程移動，並停止在待機位置上。 接著’在步驟S P1 1 ’使照相機門架6朝去程移動，並 在步驟SP12 ’判定是否到達測試圖案檢查位置，在判定爲 未到達測試圖案檢查位置的情況，再度進行步驟s P 1 1的處 理。 在步驟SP 1 2，在判定爲到達測試圖案檢查位置的情 況，在步驟SP13使照相機門架6停止，在步驟SP14，使 掃描照相機9朝Y方向移動，以檢測測試圖案，並於檢測 完測試圖案之後，使掃描照相機9朝Y方向朝回程移動。 測試圖案之檢測步驟，更具體言之，包含使掃描照相 機朝Y方向往返移動，拍攝從所有噴嘴噴吐之液滴彈痕並 作爲檢測信號的情況。 在步驟S P 1 4之處理後，在步驟s P 1 5，使照相機門架6 朝回程移動而停止在待機位置上，在步驟S P 1 6，解除測試 -18 - 200914137 用基板之吸附並搬出，進而結束一連串之處理。 另外，與步驟SP15，SP16之處理並行地在步驟SP17進 行掃描照相機9之檢測信號的影像處理，並計算Χ,Υ座標 或彈痕直徑，在步驟S Ρ 1 8，輸入從測試圖案之彩色材料彈 痕所檢測到之座標位置資訊，在步驟SP19，輸入測試用基 板上之全畫素的位置資訊，在步驟SP20,輸入其他之參數， 在步驟SP21，進行資料表之運算/製作，在步驟SP22，將 運算結果記憶於噴吐資料表內，而結束一連串之處理。 弟6圖顯不在玻璃基板2上形成有6個彩色減光片CF 之狀態。並顯示在比彩色濾光片C F更靠外側之剩餘區域形 成有各彩色材料的測試圖案ΤΡ的狀態。 第7圖爲測試圖案ΤΡ形成部分之放大示意圖，作爲由 照相機門架6所檢查者，顯示藉由第一次去程塗布所形成 的測試圖案ΤΡ。顯示測試圖案ΤΡ係具有紅（R)、綠（G)、藍 (Β)之圖案，把搭載有3種顏色之門架作爲塗布門架。另外， 顯示搭載於塗布門架上之油墨噴頭的噴嘴配置寬度及塗布 區域寬度，大致成爲一致的情況。 另外，如上述，測試圖案係當塗布門架5稍微移動時， 各個油墨噴嘴52的噴吐體亦使油墨偏移而噴吐，所以，彩 色材料彼此相互分離並形成爲交錯狀。透過檢查此測試圖 案ΤΡ，在檢測到噴吐不良之情況，可立即進行必要之對應 (油墨噴嘴52之清潔等），可將所製造之不良品限制在最小 限度。 -19- 200914137 另外，藉由將測試圖案之彈痕配置成交錯狀，可增大 彩色材料彼此間之彈痕的間隔，不使相鄰之彈痕相重疊而 能在寬鬆之狀態下進行影像處理，所以可提高檢查精度。 另外，利用照相機門架6之掃描照相機9對測試圖案ί’ρ所 進行之檢查，係在使塗布門架4動作之塗布動作中進行， 所以，不需要多餘之用以測試圖案TP之檢查的時間，可防 範節拍時間變長之不利情況於未然。 上述說明之藉由測試圖案來進行噴嘴不良之檢查，亦 可在塗布前執行。在此情況時，雖節拍時間變長，但可將 知道會成爲不良品的塗布中止，可將基板之損失減少到最 小限度。另外，亦可於塗布結束後進行檢查。但是在此情 況時，因爲係成爲在塗布之下一步驟的檢查，所以，雖對 節拍時間不造成影響，但基板之損失會成爲一片以上。 另外，利用照相機門架6之掃描照相機9對測試圖案 TP進行之檢查，係根據形成於玻璃基板2上之測試圖案TP 來進行，所以，可精度良好地檢查彩色材料之塗布被如何 進行之狀況。當然，可迅速地判斷哪一油墨噴頭51之噴吐 異常。 另外，因爲從彈痕之口徑來換算油墨噴嘴之噴吐量， 所以，藉由根據檢查結果來進行油墨噴頭51之噴吐控制， 可達成彩色材料之噴吐的適量性。 此外，由於在製造有彩色濾光片之每一玻璃基板上進 行上述的檢查，所以，可檢測噴吐方向之偏移漸漸增大的 -20- 200914137 情況等’其結果可早期檢測噴吐方向之異常。 又’可利用另設之檢查裝置來檢查測試圖案TP，可達 成超過掃描照相機9之檢查界限的詳細檢查。 另外’亦可考慮將測試圖案描繪於紙等與玻璃基板2 不同之材料上’但在此情況時’具有不僅需要描繪測試圖 案用之多餘的材料，亦需要描繪測試圖案用之多餘時間的 問題。但是’在上述實施形態中，不僅不需要描繪測試圖 案用之多餘的材料’亦不需要描繪測試圖案用之多餘時間。 第12圖爲說明在彩色濾光片製造裝置之塗布動作中 需要進行油墨噴嘴之清潔之情況的處理之一例的流程圖。 在步驟S P 1，使塗布門架4移動至規定的清潔位置， 在步驟SP2 ’開始油墨噴嘴52之清潔動作。然後，在步驟 SP3，開始塗布後之動作（玻璃基板2之搬出、玻璃基板2 之搬入、使照相機門架6動作而進行之玻璃基板2的對 準）。然後，在步驟SP4，等待至油墨噴嘴52之清潔動作結 束，在步驟SP5，等待至塗布後之動作結束，在步驟SP6， 爲了進行塗布動作而使塗布門架4動作，結束此處理。依 此，隨後進行塗布處理。 從以上可知，可使油墨噴嘴52之清潔動作與塗布後之 動作同時進行，從而可提高彩色濾光片之生產效率。 第13圖爲說明在彩色濾光片製造裝置起動時之處理 之一例的流程圖。在步驟SP1，開始起動所需之動作（供給 路徑的換液、放氣及噴嘴之清潔），在步驟SP2，開始塗布 -21- 200914137 用之一連串的動作（玻璃基板2之搬入、玻璃基板2之對 準、彩色材料之供給），在步驟SP3，等待至起動所需要之 動作結束，在步驟SP4，等待至塗布用之一連串的動作中 的玻璃基板2之對準結束，在步驟s P 5，爲了進行塗布動 作而使塗布門架4動作，結束此處理。依此，隨後進行塗 布處理。 從上述可知’可使起動所需之動作與塗布用之一連串 的動作的一部分同時進行，從而可提高彩色濾光片之生產 效率。 【圖式簡單說明】 第1圖爲顯示彩色濾光片製造裝置之一實施形態的立 體圖。 第2圖爲彩色濾光片製造裝置之控制系統的構成的示 意圖。 第3圖爲槪要顯示油墨噴頭桿之構成的放大圖。 第4圖爲說明彩色材料塗布處理及測試圖案檢查處理 之時序流程圖。 第5圖爲顯示塗布有彩色材料之狀態的一例之槪要 圖。 第6圖爲顯示在玻璃基板上形成有彩色濾光片及測試 圖案之狀態的槪要圖。 第7圖爲放大顯示測試圖案形成部分之槪要圖。 第8圖爲說明噴吐資料表製作處理之流程圖。 -22- 200914137 第9圖爲說明彩色濾光片製造處理之流程圖。 第10圖爲噴吐資料表之一例的示意圖。 第11圖爲來自油墨噴嘴之彈痕之一例的示意圖。 弟12圖爲說明在彩色漉光片製造裝置之塗布動作中 需要進行油墨噴嘴之清潔之情況的處理之流程圖。 第13圖爲說明在彩色濾光片製造裝置起動時之處_ 之〜例的流程圖。 / 【主要元件符號說明】 2 玻 璃 基 板 3 吸 附 台 4 塗 布 門 架 6 照 相 機 門架 5 1 油 墨 噴 頭 52 油 EQS 墨 噴 嘴 -23-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for supplying a color material to a surface of a substrate using an ink nozzle. [Prior Art] Conventionally, there has been proposed a method of manufacturing a color filter on a glass substrate using an ink nozzle (see Patent Document 1). Specifically, at least a transparent color receiving layer is provided on the glass substrate. a region between pixels of different colors should be formed as a non-colored region having a repulsive coloring property, and a portion adjacent to each other in which pixels of the same color should be adjacent to each other, and a plurality of pixel portions which should be the same color and A color filter is produced by supplying a coloring material in a seamless manner to the coloring region in the inter-pixel region. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 9-686 No. 1 (Invention) The problem of the ink nozzle is high. Therefore, in the method of Patent Document 1, the state of the patent document 1 is not guaranteed. When the ejection of the color material is performed satisfactorily, when the ejection failure occurs, the relationship between the subsequent manufacture and the inspection step is poor, and thus the number of defective products to be manufactured is greatly increased. Further, in order to normally eject the color material from the ink nozzle, it is necessary to keep the surface of the ink nozzle in a state of being dirty. This is because if ink is accumulated on the surface of the ink nozzle or if foreign matter is present, the 200914137 flight path of the sputtered color material may be bent or clogged, and as a result, the color material cannot be ejected from the ink nozzle correctly. The color material is favorably attached to the surface of the glass substrate, which is a cause of defective products. Therefore, it is necessary to periodically clean the surface of the ink nozzle to ensure that no ink or foreign matter is accumulated on the surface of the ink nozzle. In addition, when the color material ejection device itself is stopped for some unknown reason and is restored later, it is necessary to perform liquid exchange, deflation, and nozzle cleaning for supplying the color material to the supply path of the ink nozzle, and to complete this. After a series of operations, the ink nozzles are capable of applying a color material to the glass substrate. In the case of cleaning the ink nozzle, it is necessary to stop the operation for supplying a series of color materials (supply of glass substrate, alignment of glass substrate, supply of color material) to perform cleaning. Further, when the apparatus is started, it is necessary to wait for the operation required for starting (the liquid exchange, the deflation of the supply path, and the cleaning of the nozzle), and then perform a series of operations for supplying the color material. According to this, the problem that the production efficiency of the so-called color filter is lowered is caused by the need for such an action. The present invention has been made in view of the above problems, and an object of the present invention is to provide a coating apparatus capable of rapidly detecting a defect when a discharge failure occurs, and preventing a necessary operation for cleaning and a necessary action when the apparatus is started. And cause the production efficiency to decrease. (Means for Solving the Problem) 200914137 In the present invention, at the end of the first scanning (coating operation) of the coated gantry, the color material is coated by all the nozzles to form a test pattern, and the camera gantry is about to be coated with the gantry. Before the scanning is started in parallel, the scanned test pattern is photographed by the scanning camera, and the presence or absence of an "abnormal" such as a small or no bullet in the pattern is detected, and the "abnormal" determination number or density is calculated and determined. When it exceeds the allowable enthalpy, if it is judged that it exceeds the allowable enthalpy, the glass substrate is discharged as a coating failure of the color material, and the coating device stops the production process and enters the "cleaning" process. That is, the present invention provides a coating apparatus for supplying a color material to a surface of a substrate (2) using an ink nozzle (52), comprising: a first gantry (4) mounted to supply a color material The ink nozzle (51) of the plurality of ink nozzles (52) on the surface of the substrate (2); the second gantry (6) is equipped with a camera (9); and the judgment control unit is formed by the ink nozzle The test pattern on the substrate is converted into image data by the camera, and the ink jet head is judged to be poor in ejection from the image data. In the case of such a coating device, the color material can be supplied to the surface of the substrate by the ink jet head mounted on the first gantry. Further, by using image data from a camera mounted on the second gantry, it is possible to check whether or not the color material is adhered to the surface of the substrate in a good state. Therefore, in the case where the ejection failure occurs, the defect can be detected immediately, and the number of defective products to be manufactured can be suppressed to only one substrate. In this case, it is preferable that the first gantry (coated gantry) and the second gantry (in accordance with the 200914137 camera gantry) are reciprocally movable independently of each other with respect to the work table of the support substrate. This is because the efficiency of coating and inspection of color materials can be improved. (Effect of the Invention) In the present invention, the coating gantry and the camera gantry can be independently moved, and the first coating operation of the gantry is applied, and the last ink ejection from all the nozzles is taken by the camera gantry to confirm the coating state. In the case where the ejection is poor, the defect can be detected immediately, and the unique effect of reducing the number of defective products manufactured to only one substrate can be obtained. Further, by allowing the first gantry and the second gantry to reciprocate independently of each other with respect to the work table of the support substrate, it is possible to perform the cleaning operation of the ink nozzle without stopping the operation for supplying a series of color materials. . This means that a series of operations for supplying the color material can be started when the coating device is started without the need to wait for the start of the operation. Further, the production efficiency of the substrate to which the color material is supplied can be further improved. [Embodiment] Hereinafter, embodiments of the coating apparatus of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a color filter manufacturing apparatus will be described as an example. Fig. 1 is a perspective view showing an embodiment of a color filter manufacturing apparatus. The color filter manufacturing apparatus is configured to support the adsorption stage 3, the coated gantry (the first gantry) 4, and the photographic 200914137 gantry (the second gantry) of one embodiment of the work table on the machine 1. 6 and so on. Further, the gantry 4 and the camera gantry 6 are coated so as to be reciprocally movable with respect to the suction stage 3 as will be described later. The adsorption stage 3 is for sucking and holding the glass substrate 2, and in order to achieve the positioning of the glass substrate 2, the drive mechanism and the guide mechanism (not shown) are rotationally driven to drive in the Y direction. The coating door frame 4 is for holding the ink jet head 5, and is driven in the X direction by a driving mechanism and a guiding mechanism (not shown) in order to apply a color material to the glass substrate 2. Further, in order to adjust the relative position to the glass substrate 2, the drive mechanism and the guide mechanism (not shown) are driven in the Z and Y directions. The camera gantry 6 is a aligning camera 7 and 8 for aligning the glass substrate 2, and a scanning camera 9 for detecting black matrix pixels of the glass substrate 2, for alignment and pixel detection, by The driving mechanism and the guiding mechanism shown in the figure are driven in the X direction. Further, the alignment cameras 7, 8 and the scanning camera 9 are driven in the x direction by a drive mechanism and a guide mechanism (not shown). The initial positions of the coated gantry 4 and the camera gantry 6 are shown on the opposite side of the machine table 1 as shown in Fig. 1. This is because in the coating apparatus of the present invention, after the initial coating scan of the coated gantry 4, the test pattern is applied, and then the test pattern is taken by the camera gantry. At this time, the initial position of the camera gantry is located on the opposite side of the initial position of the coated gantry, so that the movement of the coated gantry is less restricted. Also, the camera gantry may be located on the first scanning side of the initial position of the coated gantry, and 200914137 moves with the coated gantry. The alignment cameras 7, 8 are used to detect the mark (not shown) of the glass substrate 2 'based on the detection results of the alignment cameras 7, 8 to rotate the adsorption stage 3 ' and/or to move in the Y direction, Thereby, the alignment of the glass substrate 2 can be achieved. Further, the 'X and Y lines indicate directions orthogonal to each other to define a plane parallel to the upper surface of the glass substrate 2 held by the adsorption stage 3, and the Z system indicates the plane defined by Χ, Υ. Orthogonal directions. Fig. 2 is a view showing the configuration of a control system of a color splicing sheet manufacturing apparatus. The coated gantry 4 and the camera gantry 6 are configured to be movable with respect to the glass substrate 2 held by the adsorption stage 3, respectively. The color filter manufacturing apparatus has a control unit 12 that controls these. The self-control section 1 2 issues a command Cdvc indicating the position of the camera to the camera gantry. By this command, the position of the camera gantry and the position of the camera are moved by a driving device not shown. In addition, the image data Sim can be obtained from the camera. This image data can also contain the location information of the camera being shot. The control unit 1 2 determines whether the ink discharge state of each of the ink nozzles mounted on the coated gantry is good or bad based on the image data Sim. The control unit 12 can output a movement command Cdvh to the coated gantry. Further, an ejection command Cpr may be issued to the ink nozzle 52 of the ink jet head 51 mounted on the coating gantry. In addition, the position information Sxy for the coated gantry can also be obtained by mechanical reading. Further, the control unit 12 may perform control such as suction operation of the suction station - 200914137 attachment stage. The control unit 12 can also be realized by an MPU and a program, or can be constituted by a dedicated hardware or a combination of sequence control devices. Fig. 3 is an enlarged view showing the configuration of the ink jet head 5. The ink jet head 5 is formed by arranging a plurality of ink jets 51 in order. Each ink jet head 51 is formed by arranging a plurality of ink nozzles 5 2 in a neat manner. The plurality of ink jet heads 51 are set such that the interval in the X direction and the interval in the Y direction of all the ink nozzles 52 are each a predetermined interval. Further, the ink nozzles 52 are required to be disposed so as to obtain a desired coating density in the direction perpendicular to the ink jet head 5, and in this example, they are arranged in a predetermined direction in the oblique direction, so that they are coated by one side. The gantry 4 is driven in the X direction, and the ink nozzles 5 2 are sequentially operated, and the color material can be applied in a state of being linearly arranged in the Y direction. The ink jet head 5 shown in Fig. 3 is used to apply any color of red (R), green (G), and blue (B) color materials, and is not specifically shown, but is also coated. Ink nozzle rods for other color materials. Next, the operation of the color filter manufacturing apparatus having the above configuration will be described. Further, the following operations can be realized by the control unit 12 giving an instruction to the coated gantry or the camera gantry and the information received separately. Fig. 4 is a timing chart for explaining the color material coating processing and the test pattern inspection processing, Fig. 8 is a flow chart for explaining the processing of the ejection data sheet, and Fig. 9 is a flow chart for explaining the color filter manufacturing processing. First, the color filter manufacturing process will be described with reference to Fig. 9. -11 - 200914137 After the glass substrate 2 is carried into the adsorption stage 3 by a loading robot or the like (not shown), the camera gantry 6 is moved to the outward movement in step SP2 to detect the marking of the glass substrate 2 in step SP1. And, based on the detection result, the robot or the like is moved to obtain the positioning of the glass substrate 2. Then, in step SP3, after the glass substrate 2 is adsorbed by the adsorption stage 3, the camera gantry 6 is moved toward the outward movement in step SP4, and the alignment of the glass substrate 2 is performed in step SP5, and the camera is made in step Sp6. The gantry 6 moves toward the return trip. Next, in step SP7, it is determined whether it is the overcoat coating or the return coating, and in the case where it is determined that the outward coating is applied, the coating gantry 4 is moved toward the outward movement at step S P8 while the X coordinate is output to the control portion 12 Conversely, in step SP7, in the case where it is determined that the return coating is applied, the coating gantry 4 is moved toward the return stroke at step SP9. Moreover, the X coordinate mark of the coated gantry is the position of the coated gantry which can be directly read by the linear scale on the machine or by the feed amount from the feed mechanism starting from the starting point. Obtained by arithmetic, etc. Further, the positional relationship between the coated gantry and the ink jet head 5 is a predetermined positional relationship, and the positional relationship between the ink jet head and the ink jet head can be predicted. The ink nozzles in the ink jet head are produced in the determined positional relationship. Therefore, if the X coordinate mark of the gantry is known, the X coordinate mark of each ink nozzle can be obtained. Then, after the processing of step SP8 or step SP9 is performed, it is determined in step SP1 0 whether or not the coating has proceeded to the terminal based on the X coordinate 値. Further, in the case where the X coordinate mark is detected, the relative movement of the coated door frame 4 and the glass substrate -12-200914137 2 is stopped in advance. Thereby, the bullet marks directly under the nozzle holes of the ink nozzle 52 can be arranged as the arrangement of the transfer nozzle holes. Further, due to the influence of bending or the like during ejection, a subtle shift occurs between the X coordinate of the ink nozzle and the actual bullet mark. However, since the coating is performed after the correction is performed based on the actual bullet marks, there is no problem that the coating position shift allowable range or more. Fig. 11 is a schematic view showing an example of a bullet mark from the ink nozzle 52. Fig. 11 shows the bullet marks generated by the nozzle row and the nozzle number, the P-picture pixel pitch, and the L1 to L5 nozzle row application direction intervals. Returning to Fig. 9, in step SP10, it is determined that the coating has not been carried out to the terminal, and in step SP1, the X coordinate output signal of the coated gantry 4 and the ejection data of the ejection data table are compared, in step SP1. 2. It is determined whether or not the X coordinate 値 is consistent with the ejection data, and if it is determined that the X coordinate 一致 coincides with the ejection data, the ejection operation is performed by the ink nozzle 52 in step SP13. Fig. 10 is a view showing an example of the ejection data table in which the number of coating scans, the coating direction pixel number, the coating direction pixel position, the nozzle row, the coated gantry X coordinate mark, and the ejection pattern of all the nozzles are set. Further, XO is an initial movement amount, a Pg-based pixel pitch, and an interval of L 1 to Ln nozzle row application directions, and m is a natural number of 2 or more. Returning to Fig. 9, if the processing of step SP13 is performed, or if it is determined in step S P 1 2 that the X coordinate 値 and the ejection data are not identical, the determination of step S P 10 is performed again. Further, in step S P 10 0, it is determined that the coating has proceeded to the terminal, and -13-200914137, in step SP14, it is determined whether or not the first coating of the past is performed. Then, when it is determined that the first coating is performed, the coating gantry 4 is moved to the test pattern application position in step SP15, and a test pattern is formed in step SP16 (specifically, for example, movement in the X direction and ink The nozzles 52 are selected to form a staggered test pattern). Then, in step SP17, it is determined whether or not there is a discharge failure, and when it is determined that there is a discharge failure, the ink nozzle is cleaned (refer to the process of Fig. 12). Here, the term "discharge failure" refers to the amount of bullet marks ejected by the image processing by the image data captured by the camera mounted on the camera gantry. Here, the so-called insufficient amount also includes the lack of bullet marks. When the amount of discharge obtained by the image processing is compared with the predetermined threshold 且 and the value is below the critical threshold, it is determined that there is a poor discharge. This judgment includes a case where the sum of the discharge amounts is equal to or less than the critical value, and it is determined that the number of nozzles having an insufficient discharge amount is a predetermined number or less. When the number of nozzles for the failure of the inspection according to the test pattern and the density of the nozzle for the failure determination exceed the allowable range, the application operation of the coating device is stopped for the first time, and the process of "cleaning" is entered to stop the production. minute. In the production step of the usual amount of product, the quality of the product was confirmed after the coating step, and the quality of the product was confirmed in the inspection step of the finished product. However, the coating apparatus of the present invention confirms the state of the ink ejection from the nozzle immediately after the initial coating scan, so that the occurrence of the defective substrate due to the produced ejection failure can be suppressed to only one piece. . On the other hand, in step SP17, it is determined that there is no discharge failure, or in step SP14, it is determined that the first application is not the outward process, and in step SP18, it is determined whether or not the coating is performed a specified number of times. When it is determined that the application has not been performed for a predetermined number of times, the coating gantry 4 is stopped in step SP1, and the ink jet head 5 is moved in the Y direction, and the determination in step SP7 is performed again. Further, in the case where the pixel to be coated is applied by a plurality of ejections, the moving distance in the Y direction is a distance substantially equal to the bullet mark, the nozzle arrangement pitch, the parallel spacing of the pixels, or the ink jet head 5 One coat width. Further, the moving distance in the Y direction may be a distance which is an integral multiple of the interval in the longitudinal direction of the ink nozzle at a distance substantially equal to the bullet mark. In the latter case, a single pixel is coated by the ejection of different ink nozzles. Therefore, even if there is a difference in the amount of discharge between the ink nozzles, if any of the pixels is coated by the ejection of a plurality of ink nozzles, the amount of the applied ink of any of the pixels is averaged, and it is rare to manufacture. A product that is unevenly coated. On the other hand, if it is determined in step SP18 that the coating has been performed a predetermined number of times, the coating is terminated in step SP20, and the adsorption of the glass substrate 2 is released in step SP21 to carry out the unloading process, thereby ending a series of processes. As described above, if the coating operation of the movement of the distance -15-200914137 which is substantially equal to the above-described elastic ridge is briefly described, after the glass substrate 2 is carried into the adsorption stage 3, the camera gantry 6 is moved to the outward movement. The mark of the glass substrate 2 is detected, and the adsorption stage 3 is operated according to the detection result, whereby the alignment of the glass substrate 2 is achieved. The camera mast 6 is then moved towards the return stroke. Next, the coating gantry 4 is moved toward the outward movement to perform the first coating application. Subsequently, the coating gantry 4 is moved toward the return stroke only in the state of moving in the Y direction to perform the first return coating, during which the camera gantry 6 is moved toward the outward movement, and the glass is scanned by the scanning camera 9. Inspection of the test pattern of the substrate 2 then moves the camera gantry 6 toward the return stroke. Subsequently, the coating gantry 4 is moved toward the outward movement only in the state of being moved in the Y direction to perform the second pass coating. Subsequently, the coating gantry 4 is moved toward the return only in the state of being moved in the Y direction to perform the second return coating. Thereafter, the adsorption holding of the glass substrate 2 is stopped, and it is carried out from the adsorption stage 3. Then, by repeating the above-described series of processes, a desired number of color filters can be manufactured. Here, the step of performing the two-way coating is described here, but the number of round trips is determined by the size of the pixels, and is not limited by the number of times. For example, the number of round trips may be determined by the size of the bullet diameter, the nozzle pitch, the pixel pitch, or the coating width of the ink jet head 5 to determine the medium diameter of each scan of the coated gantry on the machine. The amount of movement in the Y direction required for the state, and the number of times of coating the gantry is determined according to the coating width (the size of the pixel) in the direction of γ -16 - 200914137 to be applied by the next nozzle. Here, the continuous coating state refers to a state in which the elastic state of the state in which the ink nozzle 52 is ejected is continuous and applied at a constant distance. For example, in the case where the color material is applied by one discharge, the color material is bombarded at intervals equal to the interval between the ink nozzles 52, so that the pitch of the ink nozzles 52 formed on the ink head 51 is spaced. If it is large, it is impossible to achieve a state in which the color material is continuously applied. However, in the case of processing according to the above-described sequence flow, since the application is performed only by changing the position in the Y direction, finally, as shown in FIGS. 5 and 6, the black matrix which can be formed on the glass substrate 2 can be obtained. The color material is continuously coated in the pixel region 23 of 22. Further, in Fig. 5, the component symbol 24 indicates the center position of the ejection, and the ink to be ejected becomes a bullet mark wider than the symbol 24. That is, Fig. 5 shows a state in which five bullet marks are applied to one black matrix in the same manner. Next, the ejection data table creation processing will be described with reference to Fig. 8. In step SP1, the test substrate is carried into the adsorption stage 3, and in step SP2, the test substrate is positioned, and in step SP3, the test substrate is adsorbed and held on the adsorption stage 3, and in step SP4, the camera gantry 6 is moved toward The outward movement 'in step SP5, the alignment of the test substrate is performed, and in step SP6, the camera gantry 6 is moved toward the return stroke. Next, at step SP7, the coating gantry 4 is moved toward the outward movement while -17-200914137 outputs the X coordinate 値' and at step SP8, it is determined whether or not the test pattern application position is reached" when it is determined that the test pattern coating position is not reached. Then, the processing of step SP7 is performed again. That is, by repeating this procedure, the coated gantry is moved to a predetermined position. In the case where it is determined in step SP8' that the test pattern application position is reached, the coating gantry 4 is stopped at step SP9 'from all the holes in which the ink is ejected (all the ink nozzles 5 2 of the gantry are coated), and the bullet marks are alternately arranged. In a manner, the coated gantry is slightly moved, and the ejection body of each ink nozzle 52 also deflects the ink to discharge a drop of the color material, and in step SP10, the coated gantry 4 is moved toward the returning path and stopped at the standby position. . Then, 'the camera gantry 6 is moved to the outward movement in step S P1 1 ', and it is determined in step SP12 'whether the test pattern inspection position is reached, and if it is determined that the test pattern inspection position is not reached, the step s P 1 1 is performed again. Processing. In step SP12, when it is determined that the test pattern inspection position is reached, the camera gantry 6 is stopped at step SP13, and at step SP14, the scanning camera 9 is moved in the Y direction to detect the test pattern, and the test is detected. After the pattern, the scanning camera 9 is moved toward the return direction in the Y direction. The detecting step of the test pattern, more specifically, includes a case where the scanning camera is moved back and forth in the Y direction, and the droplet marks ejected from all the nozzles are taken as a detection signal. After the processing of step SP14, in step s P15, the camera gantry 6 is moved to the standby position to stop at the standby position, and in step SP1, the adsorption of the substrate for the test -18 - 200914137 is released and carried out. Then end a series of processing. Further, in parallel with the processing of steps SP15, SP16, the image processing of the detection signal of the scanning camera 9 is performed in step SP17, and the Χ, Υ coordinates or the bullet diameter are calculated, and in step S Ρ 1 8, the color material bullet marks from the test pattern are input. The detected coordinate position information is input to the position information of the full pixels on the test substrate in step SP19, and other parameters are input in step SP20, and the data table is calculated/produced in step SP21. The operation result is memorized in the spit data table, and the series of processing ends. The figure 6 shows a state in which six color light-reducing sheets CF are not formed on the glass substrate 2. Further, a state in which the test pattern 各 of each color material is formed is formed in the remaining area outside the color filter C F . Fig. 7 is an enlarged schematic view showing a portion where the pattern ΤΡ is formed, and as a person inspected by the camera gantry 6, the test pattern 形成 formed by the first pass coating is displayed. The display test pattern has a pattern of red (R), green (G), and blue (Β), and a gantry equipped with three colors is used as a coated gantry. Further, the nozzle arrangement width and the coating area width of the ink jet head mounted on the coating gantry are displayed to substantially match each other. Further, as described above, in the test pattern, when the coating gantry 5 is slightly moved, the ejection body of each of the ink nozzles 52 also displaces the ink and ejects, so that the color materials are separated from each other and formed in a staggered shape. By inspecting this test pattern, if a poor ejection is detected, the necessary correspondence can be immediately performed (cleaning of the ink nozzle 52, etc.), and the defective product can be minimized. -19- 200914137 In addition, by arranging the bullet marks of the test pattern in a staggered shape, the interval between the elastic materials can be increased, and the adjacent bullet marks can be overlapped to perform image processing in a loose state. Can improve inspection accuracy. Further, the inspection of the test pattern ί'ρ by the scanning camera 9 of the camera gantry 6 is performed in the coating operation for operating the coating gantry 4, so that unnecessary inspection for testing the pattern TP is not required. Time can prevent the unfavorable situation that the beat time becomes longer. The above-described inspection of the nozzle failure by the test pattern can also be performed before coating. In this case, although the tact time is long, the application of the defective product can be stopped, and the loss of the substrate can be minimized. In addition, it is also possible to perform inspection after the application is completed. However, in this case, since the inspection is performed in one step under coating, although the tact time is not affected, the loss of the substrate becomes one or more. Further, since the inspection of the test pattern TP by the scanning camera 9 of the camera gantry 6 is performed based on the test pattern TP formed on the glass substrate 2, it is possible to accurately check how the application of the color material is performed. . Of course, it is possible to quickly judge which of the ink jetting heads 51 is abnormal in ejection. Further, since the discharge amount of the ink nozzle is converted from the diameter of the bullet mark, it is possible to achieve the appropriate amount of ejection of the color material by performing the discharge control of the ink head 51 based on the inspection result. Further, since the above-described inspection is performed on each of the glass substrates on which the color filters are manufactured, it is possible to detect the -20-200914137 case where the offset of the ejection direction is gradually increased, and the result can detect the abnormality of the ejection direction at an early stage. . Further, the test pattern TP can be inspected by means of a separate inspection device to achieve a detailed inspection exceeding the inspection limit of the scanning camera 9. In addition, it is also conceivable to describe the test pattern on a material different from the glass substrate 2 such as paper, but in this case, there is a problem that it is necessary to draw unnecessary materials for the test pattern and to spend unnecessary time for drawing the test pattern. . However, in the above embodiment, it is not necessary to draw unnecessary materials for the test pattern, and it is not necessary to draw unnecessary time for the test pattern. Fig. 12 is a flow chart showing an example of processing in a case where it is necessary to clean the ink nozzle in the coating operation of the color filter manufacturing apparatus. At step S P 1, the coating gantry 4 is moved to a predetermined cleaning position, and the cleaning operation of the ink nozzle 52 is started at step SP2'. Then, in step SP3, the operation after the application (the alignment of the glass substrate 2, the loading of the glass substrate 2, and the alignment of the glass substrate 2 by the operation of the camera gantry 6) is started. Then, in step SP4, the cleaning operation of the ink nozzle 52 is waited for, and in step SP5, the operation until the coating is completed is completed. In step SP6, the coating gantry 4 is operated to perform the coating operation, and the processing is terminated. Accordingly, the coating treatment is subsequently carried out. As apparent from the above, the cleaning operation of the ink nozzle 52 can be performed simultaneously with the post-coating operation, whereby the production efficiency of the color filter can be improved. Fig. 13 is a flow chart for explaining an example of processing at the time of starting the color filter manufacturing apparatus. In step SP1, the operation required for starting (the liquid exchange of the supply path, the deflation, and the cleaning of the nozzle) is started, and in step SP2, the series of operations of the coating 21-200914137 is started (the loading of the glass substrate 2, the glass substrate 2) In the step SP3, the operation required for the start is completed, and in step SP4, the alignment of the glass substrate 2 in one of the series of operations for coating is waited for, and the step s P 5 is performed. The coating gantry 4 is operated to perform the coating operation, and the process is terminated. Accordingly, the coating treatment is subsequently carried out. From the above, it can be seen that the operation required for the start-up can be performed simultaneously with a part of the series of operations for coating, whereby the production efficiency of the color filter can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of a color filter manufacturing apparatus. Fig. 2 is a view showing the configuration of a control system of a color filter manufacturing apparatus. Fig. 3 is an enlarged view showing the configuration of the ink jet head. Fig. 4 is a timing chart showing the color material coating process and the test pattern check process. Fig. 5 is a view showing an example of a state in which a color material is applied. Fig. 6 is a schematic view showing a state in which a color filter and a test pattern are formed on a glass substrate. Fig. 7 is a schematic view showing an enlarged portion of the test pattern forming portion. Fig. 8 is a flow chart for explaining the processing of the ejection data table. -22- 200914137 Figure 9 is a flow chart showing the manufacturing process of color filters. Fig. 10 is a schematic view showing an example of a spit data sheet. Figure 11 is a schematic illustration of an example of a bullet mark from an ink nozzle. Fig. 12 is a flow chart for explaining the processing in the case where the ink nozzle needs to be cleaned in the coating operation of the color calender manufacturing apparatus. Fig. 13 is a flow chart for explaining an example of the case where the color filter manufacturing apparatus is started up. / [Main component symbol description] 2 Glass base plate 3 Suction table 4 Coated door frame 6 Photo camera door frame 5 1 Oil ink head 52 Oil EQS Ink nozzle -23-