200903690 九、發明說明： 【發明所屬之技術領域】 尤其涉及一種在製造 中，可連續輪入及輸 本發明涉及一種基板輸送裝置， 平板顯示器基板的各種工序的輸送線 出基板的基板輸送裝置。 【先前技術】 通常，用於平板顯示器的玻璃基板（以下稱“基板”、 是通過蒸鍍、蝕刻、剝離、清洗、漂洗等一系列工序來製 ，。所述各製造玉序中均設有輸送襄置，其沿著輸送線依 次輸送多個基板，並進行相應的作業。 所述輸送裴置是常用滾筒式輪送機結構，其在輸送線 上配置相隔一定距離的多個輸送輥，而基板能夠置放在所 述輸送輥的上面，並在此狀態下可移動。 而且’所述輸送裝置與緩衝單元連接，所述緩衝裝置 可對應於輸送線投入及輸出基板。 所述緩衝單元，分別位於輸送線的投入及輸出位置上， 而且通過上/下操作，將基板裝載於輸送輥上，或從輸送輥 卸載’並藉此緩衝方式進行基板的投入及輸出。 所述緩衝單元主要有兩種類型的緩衝結構。所述兩種 、'吉構中’其中一種緩衝單元的結構如下，即，在輸送輥之 間设置與基板底面接觸而用於支撐基板的多個提升銷 (lift-pin )’各提升銷則接收驅動源所傳遞的動力而進行 上/下移動動作。 200903690 而另一種緩衝單元則使用衆所周知的 械臂設置在輸送輥之間，並在此狀態下，可以二所述機 衝基板的上/下移動動作。 订用於緩 但疋，具有上述結構的現有緩衝單元 或機械臂設置在所述各輸送裝置的輸送輥之門j升鐵 態下進行上/下移動動作，因此這種結構，例 無法連續進行爲投入或輸出下一個基板的均：而 攸而在基板的緩衝作業中需要等待過多的時間。 ^別是，料這種輸送線進行投人或輸 :序中需要等待過多的時間，這是降低生產效率和= 率的主要因素。 干不作菜效 【發明内容】 本發明蓉於上诚門# 上迷問趨而提出的，纟目的在於提 易於進行基板的緩衝作章 ，、種 續投入和輸出基板，你 連 裝置。 將等待時間大幅縮短的基板輸送 爲貝見上述目$ ’本發明提供-種基板輸送裝置，盆 包括： /、 基板輸送單元，立嬰士 其配置有隔開設置的多個輪送輥，並 且在所述夕個輸送龜％ 、面以水平或傾斜狀態輸送基板； 、、'：= 置基板，並且通過上/下移動向所述輸 移父基板或從所料送輥上^接基板； 200903690 支架’其具備使所述緩衝臂上/下移動的㈣ 且固定所述緩衝劈，枯私、p 並 衝#使所述緩衝臂可在能夠移交或承接A 板的狀態下移動； 又次承接基 狀態變換單元，i 芊，並且产' 接方式連接所述緩衝臂和支 ” a生轉力’使料緩衝臂讀接部爲基準 旋轉而改變其狀態。 ‘、''土準進灯 本舍明基板輸送裝置，可遠墙.隹二& 七t 連續進仃向輸送線移交基;is 或14此相反從輸送線承接其故 〜線承接基板的緩衝臂的上/下移動動作， 口此，不僅大幅縮短了基板的 ^ 〇 -r 抄夂次承接刼作後産生的等 ::二而且可以提高基板輸送效率從而能夠提高工作效 率和生産效率。 【實施方式】 下面，參照附圖說明本發明的 ^ 权佳貫施例，在所屬領 域的技術人員旎夠貫施的範圍内進行說明。 然而，本發明可具有各種不 於在此示出的實施例。 的實W而並不局限 圖1是本發明實施例的基板輪送裝置整體結構的剖面 圖，元件符號2表示緩衝臂，而所述緩衝f2位於輸送裝 置F上方，所述輸送裝置F構成用於 輸送基板G的輪送線。 所述輸送裝置F，採用了 一般姓 又、、。構，即，由多個輸送 輥R構成，而X，當所述多個輸送輥r接收從電機 遞的旋轉力而旋轉時’可使基板〇在水平或傾斜放 述輸送裝置F上面的狀態下移動。 200903690 而且，所述輪送裝置F放置在一般支撐架上，例如， 如圖1所示的支撐架F1上’並與地面相隔-定距離。 如圖1所示，所述緩衝臂2，向所述輸送輥r上面移 交基板G，或與此相反從所述輸送幸昆R承接基板g，從而 起到-種搬運台的作用’所述緩衝臂2由多個臂組成，而 中間隔著所述輸送棍R’所述多個臂相互成組。 如圖2戶斤*，所述各緩衝f 2, #經過相隔一定距離 排列著的輸送輥R間時，能夠 此夠進仃移父或承接基板G的上 /下移動動作’在此過程中，可以與所述各輸送輥^ 並放置基板G。 所各緩衝臂2包括多個切銷p，而所述多個支樓 、肖P没置在相隔一定距離的 ο π - , 1 1上並且以如圖 所不的丑立狀態分別固定於所述緩衝臂2上。 所述各支撐銷ρ的頂端與基板G的底面接觸 致以水平狀態放置基板G。 大 且二二=多個支撐‘"被排列在所述緩衝臂2上， 且具此夠與基板g的底而 丄 町履面接觸而抑制基板G的下垂 如圖i所示，所述緩衝f2分別安裝在兩個支申 並可沿者所述支架4進行上/下移動而 、上， 或承接。所述上/下銘叙 土板G的移交 吓乩上/下移動，可以通 時完成，也可以通過常用的動力_方_^機組的驅動而同 而且，雖然附圖令未干出式來分別完成。 行一時，爲了避免:述 R之間產生幹擾’切除了與此相對應的部分支所:架各輪送觀 200903690 所迷支架4,包括上/下移動驅動單元6，丨用於産生 使所述緩衝臂2上/下移動的動力。而作爲一個例子，如圖 丁所述支架4中間隔著所述輸送装置f 立狀態設置。 1 所述上/下移動驅動單元6産生旋轉動力或直線動力， 以使所述緩衝臂2能夠進行上/下移動。 爲此’本實施例中，如 垂直方向豎立的滾珠针丄 所述支架4内侧， „ 珠螺卜si的-端與電機M1軸相連接， 亚且輸达頭S2以螺合方式套 珠螺桿S!正向、反向旋糙Γ 旱S1，當滾 丁孩叔 轉時，所述輸送頭S2通過螺絲上 下移動’從而使所述緩衝臂2進行上/下移動。 如圖4所示，所述支 導所述輸送頭S2,使並…：内側°又有通道L，以便弓丨 以上㈣了所、 34通道L進行上/下移動。 說月了所34上/下移動驅動單元6使用 力的電機Ml和滾珠螺桿 了産生釭轉 此。 的例子，但本發明並不局限於 例如，雖然附圖申未 與氣紅的活塞桿相連，並、以採用所述輪送頭S2 仃上/下移動的結構。 以返運動來進 ^外，所料㈣2,通過狀㈣換單元 悲，並且固定在所述支架4上。 8改變其狀 爲此’本實施例中，如圖3及 =:述緩衝臂2的連接部是以较接方式連接=送頭 接邛Η中設置産生旋轉 筏並在該鉸 的驅動源M2，所述緩衝臂2接 200903690 而以鉸接部Η爲基准旋 收所述驅動源M2傳遞的旋轉力 轉。 所述驅動源M2可使用 擺動氣缸等，並在较接部Η 通過绞接部Η向所述緩衝臂 衝臂2以鉸接部Η爲基准， 狀態（如圖5所示）。 —般的步進電機、齒輪電機、 上連接所述電機或氣缸，以便_ 2傳遞旋轉力，從而使所述，緩 向垂直或水平方向改變其固定 所述狀態變換單元 述方式改變所述緩衝臂 和輸出基板G。 8 ’在移交或承接基板G時，按下 2的固定狀態，以便可以連續投入 首先，如圖6及圖7斛； 不’在投入所述基板G時，水 平固定所述緩衝臂2。土古 ^ .. 種水平狀態可以使所述緩衝臂2 裝載基板並沿著所述支羊4 2 _ 叉朱4向下移動時，如圖8及圖9所 不，向所述輸送輥R上面移 父並技入放在所述緩衝臂上的 仪八尸；r 丞极 准進行旋轉，將所述緩衝臂2^部11爲基 登直狀態，在已移交的A板爲登直狀癌。由於這種 如圖u& ^反G未離開移交位置的狀態下， 圖二：緩衝臂可以進行向上移動，因此，如 • τ I緩衝臂2可以接收另 連續進行賴人所述基板G ^⑴’並可以 另外，雖然附圖中未干出/列上/下移動動作。 衝臂2以水平狀態固定在所述輸^出基板G日夺，所述緩 可以使所述緩衝臂2進行向上移動；接這種狀態 亏，此夠承接置放於所 10 200903690 述輸送輥R上面的基板G ’以便順利輸出所述基板G。 輸出所述基板G後’使所述緩衝臂2以鉸接部H爲基 准進行旋轉，而將其改變爲豎立狀態。由於這種暨直狀態， 當其他基板G進入所述輸送輥R的基板〇承接位置上時， 所述緩衝臂2也能夠向下移動，從而可以連續進行爲用來 投入及輸出基板G的一系列上/下移動動作。 因此，如上所述，在進行投入或輸出基板G的作業時， 通過所述狀態變換單元8，所述緩衝臂2變爲水平或豎直 狀態’並可以連續進行上/下移動動作，從而可以連續：入 或輸出基板G。200903690 IX. Description of the Invention: [Technical Field] The present invention relates to a substrate transport apparatus for transporting a line-out substrate in various steps of a substrate transfer apparatus and a flat panel display substrate. [Prior Art] Generally, a glass substrate (hereinafter referred to as a "substrate") for a flat panel display is produced by a series of processes such as vapor deposition, etching, peeling, washing, and rinsing, and each of the manufactured jade sequences is provided. The conveying device sequentially transports a plurality of substrates along the conveying line and performs corresponding operations. The conveying device is a common drum type wheeling machine structure, and a plurality of conveying rollers separated by a certain distance are arranged on the conveying line, and The substrate can be placed on the upper surface of the transport roller and movable in this state. Moreover, the transport device is connected to the buffer unit, and the buffer device can input and output the substrate corresponding to the transport line. They are respectively placed at the input and output positions of the transport line, and the substrate is loaded on the transport roller by the up/down operation, or unloaded from the transport roller, and the substrate is input and output by buffering. Two types of buffer structures. The structure of one of the two types of buffer units is as follows, that is, between the conveying rollers and the bottom of the substrate A plurality of lift-pins for contacting the substrate, the lift pins receive the power transmitted by the drive source to perform an up/down movement. 200903690 The other buffer unit uses a well-known arm. Provided between the conveying rollers, and in this state, the upper/lower movement of the substrate can be punched. The existing buffer unit or the robot arm having the above structure is disposed in the respective conveying. The door of the conveying roller of the apparatus performs the up/down movement in the j liter iron state. Therefore, in this configuration, it is not possible to continuously perform the input or output of the next substrate: and in the buffering operation of the substrate, it is necessary to wait for too much. Time. ^No, it is expected that this kind of conveyor line will be used for investment or loss: in the order, it needs to wait for too much time, which is the main factor to reduce production efficiency and = rate. The goal of the door is to make it easy to carry out the buffering of the substrate, to continually input and output the substrate, and to connect the device. For the above-mentioned item, the present invention provides a substrate transport apparatus comprising: /, a substrate transport unit, which is provided with a plurality of transfer rollers spaced apart, and in which the turtle is transported in the evening The surface is conveyed in a horizontal or inclined state; ,, ':= the substrate is placed, and the substrate is transferred to the transfer parent substrate or from the feed roller by the up/down movement; 200903690 the bracket is provided with The buffer arm is moved up/down (4) and the buffer 固定 is fixed, and the buffer arm can be moved in a state capable of handing over or receiving the A board; and the base state changing unit is again received, i 芊And the production method is connected to the buffer arm and the branch "a generating force" to change the state of the material buffer arm reading portion as a reference rotation. ', '' The far wall. 隹二& 7t continuous feeding to the conveyor line transfer base; is or 14 instead of taking the upper/lower movement of the buffer arm of the substrate from the conveyor line, which is not only greatly shortened ^ 〇-r of the substrate is taken after the 刼:: Second, it can improve the efficiency of substrate transport, which can improve work efficiency and production efficiency. [Embodiment] Hereinafter, the present invention will be described with reference to the drawings, and will be described within the scope of those skilled in the art. However, the invention may have various embodiments not shown herein. 1 is a cross-sectional view showing the entire structure of a substrate transfer device according to an embodiment of the present invention, the reference numeral 2 designates a buffer arm, and the buffer f2 is located above the transport device F, and the transport device F is configured. The conveying line of the substrate G is conveyed. The conveying device F adopts a general surname, and . , that is, constituted by a plurality of conveying rollers R, and X, when the plurality of conveying rollers r are rotated by the rotational force transmitted from the motor, the state in which the substrate can be horizontally or obliquely placed on the conveying device F Move down. 200903690 Moreover, the transfer device F is placed on a general support frame, for example, on the support frame F1 as shown in Fig. 1 and spaced apart from the ground by a fixed distance. As shown in FIG. 1, the buffer arm 2 transfers the substrate G to the transport roller r, or vice versa, from the transport of the substrate R, so as to function as a kind of transport platform. The buffer arm 2 is composed of a plurality of arms, and the plurality of arms are grouped with each other with the transporting rod R' interposed therebetween. As shown in Fig. 2, the buffers f 2, # can pass through the transport rollers R arranged at a certain distance, so that the upper/lower moving action of the transfer parent or the receiving substrate G can be performed in the process. The substrate G can be placed with each of the transport rollers. Each of the buffer arms 2 includes a plurality of cutting pins p, and the plurality of branch buildings and the Xiao P are not placed at a distance ο π - , 1 1 and are respectively fixed in the ugly state as shown in the figure. Said on the buffer arm 2. The tips of the respective support pins ρ are in contact with the bottom surface of the substrate G to place the substrate G in a horizontal state. Large and two==multiple supports '" are arranged on the buffer arm 2, and are sufficient to contact the bottom surface of the substrate g to suppress the sagging of the substrate G as shown in FIG. The buffers f2 are respectively mounted on the two supports and can be moved up, down, or received along the brackets 4. The upper/lower inscription of the earthboard G is transferred to the upper/lower movement, which can be completed on time, or can be driven by the common power_fang_^ unit, and although the drawing is not dry out Completed separately. For the first time, in order to avoid: the interference between R is described, the part of the branch corresponding to this is cut off: the bracket 4 of each wheel view 200003690, including the upper/lower moving drive unit 6, for generating The power of the buffer arm 2 to move up/down. As an example, the holder 4 is disposed in a state in which the conveying means f is spaced apart. 1 The up/down moving drive unit 6 generates rotational power or linear power to enable the buffer arm 2 to move up/down. To this end, in the present embodiment, the ball pin is vertically erected on the inner side of the bracket 4, the end of the bead screw si is connected to the motor M1 axis, and the head S2 is screwed into the bead screw. S! Forward and reverse rotation Γ drought S1, when the rolling head is untwisted, the conveying head S2 moves up and down by screws 'to move the buffer arm 2 up/down. As shown in FIG. The guide head S2 is guided so that: the inner side has a passage L, so that the upper/lower movement of the 34 passages L is performed above the fourth (four), and the upper/lower moving drive unit 6 is said to be 34. The use of the force motor M1 and the ball screw produces an example of twirling, but the invention is not limited to, for example, although the drawing is not connected to the gas red piston rod, and to employ the wheel head S2 仃The structure moves up/down. In the return motion, the material (4) 2 is changed by the shape (4), and is fixed on the bracket 4. 8 Changing its shape for this purpose, in this embodiment, as shown in FIG. And =: the connection portion of the buffer arm 2 is connected in a connected manner = the setting in the head connection is to generate a rotation 筏 and in the hinge Driving source M2, the buffer arm 2 is connected to 200003690 and rotates the rotational force transmitted by the driving source M2 with reference to the hinge portion 。. The driving source M2 can use a swinging cylinder or the like and is twisted at the connecting portion. The connecting portion Η is oriented to the buffer arm punch arm 2 with the hinge portion , as shown in FIG. 5 . The general stepping motor, the gear motor, and the motor or the cylinder are connected to the _ 2 to transmit the rotation a force, thereby causing the slow vertical or horizontal direction to change, the state of the state changing unit, changing the buffer arm and the output substrate G. 8 'When handing over or receiving the substrate G, pressing the fixed state of 2, Therefore, it can be continuously input first, as shown in FIG. 6 and FIG. 7; when the substrate G is not put, the buffer arm 2 is horizontally fixed. The horizontal state can make the buffer arm 2 load the substrate and When moving along the branch 4 2 _ fork Zhu 4, as shown in FIG. 8 and FIG. 9, the parent is transferred to the transport roller R and the occupant is placed on the buffer arm; r The crucible is rotated, and the buffer arm 2 is 11 The A plate that has been handed over is a straight-line cancer. Since this figure u&^ does not leave the transfer position, Figure 2: The buffer arm can move upwards, therefore, such as • τ I buffer arm 2 can Receiving another continuous substrate G ^ (1) ', and may additionally, although the drawing does not dry out / column up / down movement action. The punch 2 is fixed in the horizontal state on the output substrate G, The buffer arm 2 can be moved upwards; in this state, the substrate G′ placed on the transport roller R of 10200903690 can be received to smoothly output the substrate G. The substrate is output. After G, 'the buffer arm 2 is rotated with reference to the hinge portion H, and is changed to an upright state. Due to this straightening state, when the other substrate G enters the substrate 〇 receiving position of the conveying roller R, the buffer arm 2 can also move downward, so that one of the substrates for inputting and outputting the substrate G can be continuously performed. The series moves up/down. Therefore, as described above, when the operation of inputting or outputting the substrate G is performed, the buffer arm 2 is changed to the horizontal or vertical state by the state conversion unit 8, and the up/down movement action can be continuously performed, so that Continuous: Input or output substrate G.
另外，上述實施例說明及圖示了所述緩衝臂2的狀離 經所述狀態變換單元8從水平變爲垂直狀態時，如圖W 接部Η爲基准，沿下侧旋轉半徑進行旋轉而變爲 垂直狀恕的例子’但是本發明並不局限於此。 爲^如i如圖13所示，所述緩衝臂2也可以以鉸接部Η 爲i直隸。Γ旋轉μ ’按附圖中所示的方向旋轉而變 掌情'兄可以連蜻改變緩衝臂2狀態的旋轉’只要是根據作 續進行上/下移動動作的均可採用。 如圖14所示，上述 —步包括間距調整單元1()實施例的基板輸送裝置可進 所述間距調整單亓 F的兩個支架4的間距。整令間隔著所述輸送裝置 η爲此本實施例中，如圖Μ所示，用於$敕 側形成有右螺絲T1 用於調正間距、兩 ”、、'、2的螺桿12，其與所述兩個 200903690 支架4相螺合，並通過螺桿12 @正向、反向旋轉來調整 所述兩個支架4的間距。 用於調整間距的所述螺桿12，其一端與産生旋轉力的 電機14軸相連接，並且接收從所述電機14傳遞的動力， 而進行正向、反向旋轉。 另外’所述兩個支架4,可設置在直線滑動導軌等常 用的導執16 ϋ便在調整間距時，使其在地面上容易 移動。 具有上述結構的間距調整單元1〇，在進行移交和承接 基板G的作業時，可根據基板G大小和形㈣調整所述兩 個支架4的間距而使其變窄或冑寬，從而易於將所述支架 4上的緩衝臂2的放置位置變爲水平方向。 八 上面說明及圖示了通過具有右螺絲Τ1和左螺絲Τ2的 用於調整間距的螺# 12來調整所述兩個支架4的間距的 例子’但是本發明並不局限於此。 例如，雖然附圖中未示出，但是，可在所述各支架4 上連接氣缸的活塞桿，並通過活塞桿的直線往返運動來調 整所述兩個支架4的間距而使其變窄或變寬。 如上所述，根據本發明實施例的基板輪送裝置，可連 續進行向輪送線移交基板或與此相反從輪送線承接基板的 2臂的上/下移動動作’因此，不僅大幅縮短了基板的移 =接操作後産生的等待時間，而且可以提高基板輸送 ;從而此夠提高工作效率和生産效率。 12 200903690 【圖式簡單說明】 圖1是本發明實施例的基板輸送裝置整體結構的剖面 圖。 圖2是用於說明圖i中緩衝臂的上/下移動的示意圖。 圖3是用於說明圖！中支架結構的示意圖。 圖4及圖5是用於說明本發明實施例的基板輸送裝置 的狀態變換單元結構的示意圖。 ^圖6及圖7是本發明實施例的基板輸送裝置的基板移 父作業中，緩衝臂進行向下移動前狀態的示意圖。 ^圖8及圖9是本發明實施例的基板輸送裝置的基板移 乂作業中，緩衝臂進行向下移動後狀態的示意圖。 圖1〇、圖11及圖12是本發明實施例的基板輸送裝置 移父基板後，緩衝臂進行向上移動狀態的示意圖。 圖13是用於說明圖5中狀態變換單元的其他操作實施 例的示意圖。 圖14疋用於s兒明本發明另一實施例的基板輸送裝置結 構的示意圖。 【主要元件符號說明】 2 緩衝臂 4 支架 6 上/下移動驅動單元 8 狀態變換單元 10 間距調整單元 13 200903690 12 螺桿 14 電機 16 導軌 F 輸送裝置 FI 支撐架 G 基板 H 鉸接部 L 通道 Ml 電機 M2 驅動源 P 支撐銷 R 輸送輥 SI 滾珠螺桿 S2 輸送頭 T1 右螺絲 T2 左螺絲 14In addition, the above embodiment illustrates and illustrates that when the shape of the buffer arm 2 is changed from the horizontal to the vertical state by the state conversion unit 8, the rotation radius is rotated along the lower side as shown in FIG. An example of becoming a vertical one, but the present invention is not limited thereto. For example, as shown in FIG. 13, the buffer arm 2 can also be a hinged portion. The Γ rotation μ ′ is rotated in the direction shown in the drawing, and the change can be made by changing the state of the buffer arm 2 as long as it is performed according to the continuous up/down movement. As shown in Fig. 14, the above-described step includes the substrate transfer device of the pitch adjusting unit 1 () embodiment, and the pitch of the two holders 4 of the pitch adjustment unit F can be entered. In this embodiment, as shown in FIG. 2, a screw 12 for forming a right screw T1 for adjusting the pitch, two", ", 2" is formed on the side of the crucible. The two 200903690 brackets 4 are screwed together, and the pitch of the two brackets 4 is adjusted by the screw 12 @ forward and reverse rotation. The screw 12 for adjusting the pitch has one end and generates a rotational force. The motor 14 is axially connected and receives the power transmitted from the motor 14 to perform forward and reverse rotation. In addition, the two brackets 4 can be disposed on a common guide such as a linear sliding guide. When the pitch is adjusted, it is easy to move on the ground. The pitch adjusting unit 1 having the above structure can adjust the two brackets 4 according to the size and shape (4) of the substrate G when performing the work of handing over and receiving the substrate G. The pitch is narrowed or widened, so that the placement position of the buffer arm 2 on the bracket 4 is easily changed to the horizontal direction. Eighth is illustrated and illustrated by the adjustment with the right screw Τ1 and the left screw Τ2 Pitch #12 to adjust the two Examples of the pitch of the frame 4' However, the present invention is not limited thereto. For example, although not shown in the drawings, a piston rod of a cylinder may be coupled to each of the brackets 4, and a linear reciprocating motion through the piston rod The pitch of the two brackets 4 is adjusted to be narrowed or widened. As described above, the substrate transfer device according to the embodiment of the present invention can continuously perform the transfer of the substrate to the wheel feed line or vice versa. The wire receives the up/down movement of the two arms of the substrate. Therefore, not only the waiting time after the substrate is transferred and the connection operation is greatly shortened, but also the substrate transportation can be improved; thus, the work efficiency and the production efficiency can be improved. 12 200903690 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the entire structure of a substrate transfer apparatus according to an embodiment of the present invention. Fig. 2 is a schematic view for explaining the up/down movement of the buffer arm of Fig. i. Fig. 3 is a view for explaining 4 and 5 are schematic views for explaining the structure of a state conversion unit of a substrate transfer apparatus according to an embodiment of the present invention. FIG. 6 and FIG. 7 are substrate transfer apparatuses according to an embodiment of the present invention. FIG. 8 and FIG. 9 are diagrams showing a state in which the buffer arm is moved downward in the substrate transfer operation of the substrate transfer apparatus according to the embodiment of the present invention. 1 is a schematic view showing a state in which the buffer arm is moved upward after the substrate transfer device of the embodiment of the present invention is moved to the parent substrate. FIG. 13 is a view for explaining another operation of the state conversion unit of FIG. Fig. 14 is a schematic view showing the structure of a substrate transporting apparatus according to another embodiment of the present invention. [Main component symbol description] 2 buffer arm 4 bracket 6 up/down moving drive unit 8 state changing unit 10 pitch Adjustment unit 13 200903690 12 Screw 14 Motor 16 Guide rail F Conveying device FI Support frame G Substrate H Hinge L Channel Ml Motor M2 Drive source P Support pin R Conveying roller SI Ball screw S2 Conveyor head T1 Right screw T2 Left screw 14