TW200901280A - Optical element module with imaging error and position correction - Google Patents

Abstract

There is provided an optical element module comprising an optical element and a support structure supporting the optical element, the support structure comprising a first holding structure, an intermediate structure and a second holding structure. The first holding structure contacts the optical element and is adapted to adjustably introduce defined deformations into the optical element. The intermediate structure supports the first holding structure while the second holding structure supports the intermediate structure and is adapted to adjust the position of the intermediate structure.

Description

。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The interest of the inventor, Schoppach et al., is incorporated herein by reference. FIELD OF THE INVENTION The present invention relates to several optical component modules for use in an exposure process 10, particularly optical component modules for micr〇iith〇graphy systems. The present invention is more concerned with several optical imaging configurations that can be used in such lithography systems. The invention further relates to a method of supporting an optical component. The invention also relates to an optical imaging method for transferring a pattern of images onto a substrate. The present invention can be used to fabricate miniature electronic devices, particularly semiconductor devices, in the context of photolithographic processes 15 or in the context of fabricating devices (e.g., masks or reticle) for use in photolithographic processes. [Prior Art 3 Background of the Invention In the context of manufacturing microelectronic devices (for example, semiconductor devices)

The image is transferred to a substrate (eg, a wafer). The optical components of the pattern are often combined with one or more functional optical component groups and can be sandwiched between different optical component modules. In the case of such optical systems, the optical component modules are often constructed of a stack of optical component modules that sandwich one or more generally rotationally symmetric optical components. The optical component modules often include a support structure having an annular shape for supporting one or more optical component holders (and then, they can clamp one or more optical components). Since the semiconductor device continues to be miniaturized, the optical system for manufacturing the semiconductor device also needs to continuously improve the resolution. Clearly, the need to increase the resolution 10 will also increase the imaging accuracy of the optical system. In addition, in order to reliably obtain a high-quality semiconductor device, it is not only necessary to provide an optical system with high development accuracy, but also to maintain high accuracy throughout the life of the exposure process and the system. As a result, in the exposure process, the cooperative components 15 of the optical system must be supported in a defined manner so that the components of the optical system have a predetermined spatial relationship and can be maintained, which in turn ensures a high quality exposure process. In order to reduce image aberrations that occur during operation of the optical system, it is known to actively control the position of one or more optical components in the optical system. Such an optical system can be found, for example, in U.S. Patent No. US 2005/000, 2011, the entire disclosure of which is incorporated herein by reference. However, this active position control may not be sufficient to eliminate or compensate for some image deviations that may have occurred or may occur during optical system operation. For example, wavefront aberration of 200901280 is caused by one or several optical elements in the displacement optical system that cannot satisfactorily compensate for the uneven load caused by one or several optical elements acting on the optical system. ). In order to deal with such image deviations, it has been proposed to actively deform one or several optical elements in an optical system. Such an image deviation correction method can be referred to, for example, US Patent No. US 2003/0234918 A1 (Watson), US Pat. No. 5,842,277 B2 (Watson), US Pat. No. 6,884,994 B2 (Melzer et al.), No. US 2004/0144915 A1 (Wagner et al.), the entire contents of which are incorporated herein by reference. U.S. Patent No. 2,04,449,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, (Watson) suggests displacing and deforming the optical element with a plurality of active support elements that act kinematically in parallel on a single optical element. Although most active support components are only used to deform the optical components, there are three so-called servos that can be used to actively position the optical components. This is for the purpose of adjusting the position of the first support structure 209 via the servo system. On the other hand, the deformation control of the lens 2〇7 and the position control of the lens 207 can be independently but simultaneously provided, whereby the change in the boundary condition can be quickly reacted 'this can reduce the deformation change of the optical element, but still needs to be The actuator actively compensates for this change.

SUMMARY OF THE INVENTION SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to overcome the above disadvantages at least to a certain extent and to provide excellent, long-term reliable imaging properties for small optical systems for exposure processes. 7 200901280 Another goal of this month is to reduce the need for the optical system to be used in the exposure process, and to maintain at least the imaging accuracy during operation of the optical system. - The above-mentioned target wire of the present invention is guided by the guide: by providing the support of the light cow, the poetic optical element has independent position control on the rider's control, thereby making it possible to reduce the 2 or out in order to correct the operation in the fresh system. (4) Efforts are made in terms of control. * The positional control and deformation control of the motion control are achieved by causing the position control mechanism and the __ agency to be arranged in series in service. 10 15 20 \ can be used only for a simple image with a simple image deviation correction ^ & control material slamming the distortion of the optical element makes it difficult to adjust the optical element position to adjust the optical element deformation. It should be understood that for accurate image orientation, the positional adjustment of the optical component can be accompanied by the shape adjustment of the workpiece, and vice versa. However, since it is kinematically independent, it is still possible to achieve simple and predictable correction performance. Cylinder: According to the first aspect of the present invention, there is provided an optical element mold: a tether 3 - an optical element and a support structure supporting the optical element - the θ support structure comprises an H holding structure, an intermediate structure, and a Lost structure. The first-clamping structure is in contact with the optical element and 4; a specified deformation (deflned def_ation) can be introduced into the optical element Λ + 1纟4 structure to support the first-clamping structure, and the H-th structure The intermediate structure is adapted to adjust the position of the intermediate structure. Tether: According to a second aspect of the present invention, there is provided an optical imaging configuration, which further comprises a mask unit capable of accepting a pattern, a substrate unit designed to accept a substrate by 200901280, and a design The image of the pattern is transferred to an optical projection unit on the substrate. The optical projection unit includes at least one optical component and a support structure supporting the at least one optical component. The support structure includes a first clamping structure, an intermediate structure, and a second 5 clamping structure. The first lost structure is in contact with the optical element and is adapted to adjustably introduce a specified deformation into the optical element. The intermediate structure supports the first clamping structure and the second clamping structure supports the intermediate structure and is adapted to adjust the position of the intermediate structure. According to a third aspect of the present invention, there is provided an optical development arrangement, the tenth aspect comprising: a mask unit designed to accept a pattern, a substrate unit designed to accept a substrate, and a design to be The image of the pattern is transferred to an optical projection unit on the substrate. The optical projection unit includes at least one optical component and a support structure supporting the at least one optical component. The support structure includes a first clamping structure and a second clamping structure. The first 15 clamping structure is in contact with the optical element and is adapted to adjustably introduce a specified deformation into the optical element. The second lost holding structure is adapted to adjust the position of the optical element. The first-inflamed structure and the second inflammatory structure are arranged in series on the mover. The second lost structure supports the first-clamping structure. According to a fourth aspect of the present invention, there is provided a method of supporting an optical component, comprising: providing an optical component and a support structure supporting the optical component, the support structure comprising - a fourth contact with the optical component , an alpha-structure intermediate structure, and a second clamping structure; the specified deformation is introduced to the optical element via the first clamping structure; via the intermediate recording. The first clamping structure and the position of the intermediate structure of the 9 200901280 are adjusted via the second clamping structure. According to a fifth aspect of the present invention, an optical imaging method is provided, comprising: providing a pattern, a substrate, and an optical projection unit designed to transfer an image of the pattern onto the substrate, the optical projection unit 5 comprising at least one optical component, the optical projection unit comprising at least one optical component and a support structure supporting the at least one optical component; the support structure comprises a first clamping structure in contact with the optical component, and a support for the first An intermediate structure of the clamping structure and a second clamping structure capture an image deviation value indicating an image deviation of the optical projection unit, and at least one of the following functions is based on the image deviation 10 value; Compensating for the image deviation: introducing a specified deformation into the optical element via the first clamping structure, and adjusting a position of the intermediate structure via the second clamping structure, and finally, transferring the image of the pattern to the image using the optical projection unit On the substrate. According to a sixth aspect of the invention, there is provided a method of supporting an optical component, comprising: providing an optical component and a support structure supporting the optical component, the support structure comprising a first clamping structure and a second a clamping structure that introduces a specified deformation into the optical element via the first clamping structure, and in a manner that is kinematically independent of the step of introducing the specified deformation into the optical element via the first clamping structure, The position of the optical element is adjusted via the second clamp 20 structure. According to a seventh aspect of the present invention, an optical imaging method is provided, comprising: providing a pattern, a substrate, and an optical projection unit designed to transfer an image of the pattern onto the substrate, the optical projection unit Included in at least one optical component, the optical projection unit comprises at least one optical element 10 200901280 and a support-supporting less-optical element (four) support structure; comprising a first-teacher structure and a second cool-holding structure, and a na (b) unit The image deviation value of the image deviation is at least partially compensated for the image deviation by (4)/one of the following functions according to the $, 扁, 扁 difference of the following functions, and the specified deformation is introduced by the younger-missing structure The optical element, ', is kinematically independent of the charm-(four) structure, will adjust the position of the element through the second scale structure, and finally, the image transfer of the (four) optical projection single case Onto the substrate. In addition, it should be understood that if the first supporting structure provides the positional adjustment of the light, and the second supporting structure provides the optical element material through the intermediate structure and the 2 structure, the optical element is lightly deformed, so According to an eighth aspect of the present invention, there is provided a group comprising an optical component, a support member, a dry support member, a support member, and a support member member. , the intermediate structure, and the first clamping structure 'the first clamping structure is in contact with the optical element,

The intermediate structure supports the first-clamping structure and the second scale A. The first continuation structure and the second detachment structure are adapted to adjust the secret deformation directional field to optically the other of the first central structure and the second clamping structure The position of the optical component. According to a ninth aspect of the present invention, there is provided a method of claim-optical element comprising: providing an optical element and an element 11 200901280 a building structure comprising - contacting the optical element, - intermediate a structure, and a second cooling structure; supporting the 4th-clamping structure via the intermediate structure, and via the =:Γ structure; and 'incorporating the specified deformation with the first through the first-to-hold structure The optical element, the first-clamping structure and the position of the element in the second clamping structure. In addition, the optical ... in addition, it should be understood that, according to the present invention, the optical element can be omitted and the material component is 10 15 20 ^ ^ i* Λ, , „ k items can still be passed through the Q, the *-clamping structure and the intermediate structure to provide fortune and scorpion for the 哕 兀 # . . . . . 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 因此 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据An optical component module comprising: - (4) t ^ pieces of the selected knot - the second Jie A ¥ holding '纟 4, - the intermediate structure, and the middle 帛 - (4) structural money optical element contact, the support The first clamping structure and the second clamping structure support a system of fineness: the at least adjustable center of the earth is selected by the group of the following functions: the position of the piece is The optical element, and the side of the optical element (4), the tenth aspect, provides a support - the support element of the optical element ^ contains the H optical element and - supports the optical element to hold the structure - the support structure contains - and the optical a first-drink, a structure, and a second clamping structure in contact with the component; a structure of the 01101280 supports the first clamping structure, and supports the intermediate structure via the second clamping structure; performing at least one function via at least one of the first clamping structure and the second clamping structure, The at least one function is selected from the group consisting of: adjustably introducing a specified deformation into the optical component, and adjusting the position of the optical component. The subsidiary of the scope of the patent application and the following preferred implementation The aspects and specific embodiments of the present invention can be understood by referring to the description of the drawings. All combinations of the disclosed features are within the scope of the invention, whether or not explicitly stated in the claims. A schematic diagram of a preferred embodiment of a preferred embodiment, comprising a preferred embodiment of the optical component module of the present invention and using the method of the present invention; FIG. 2 is an optical imaging configuration of FIG. A cross-sectional view of one of the optical component modules (drawn along line II-II of Figure 3); and Figure 3 is a schematic top view of the optical component module of Figure 2; 4 is a block diagram of a preferred embodiment of an optical imaging method of the present invention, which comprises a method of supporting an optical component and can be accomplished by the optical imaging configuration of FIG. 1; The cross-sectional view illustrates another preferred embodiment of the optical component module of the present invention that can be used in the optical imaging configuration of FIG. 1; the schematic cross-sectional view of FIG. 6 is applicable to the optical imaging of FIG. Another preferred embodiment of the optical element module of the present invention is configured. [Embodiment 3 13 200901280 Detailed Description of the Preferred Embodiments First Embodiment The optical imaging of the present invention will be described below with reference to FIGS. 1 to 3. A preferred embodiment of configuration 1〇1. 5 Figure 1 is an optical imaging arrangement of optical exposure apparatus 101 in a non-proportional schematic representation. The optical exposure device 101 includes an illumination unit 102 and an optical projection unit 103. The optical projection unit 103 is adapted to transfer an image of a pattern formed on the mask 104 of the mask unit 104 to the substrate unit during the exposure process. 105 on the substrate 1051. For this purpose, the illumination unit 10 102 illuminates the mask 104. The optical projection unit 1〇3 receives light from the mask 1〇41 and projects an image of the pattern formed on the mask 1〇41 to the substrate 105.1 (eg ' On a wafer or the like). The optical projection unit 1G3 includes a refractive optical element m stack containing a plurality of refractive elements (for example, a lens or the like), and an optical element module 1 () 6 and a _ 彡 彡 为 7 7 7 The light component: the component module is used to lose the optical component system. 2 and 3 respectively show a cross-sectional view and a top view of the optical element module 106, not to scale. It can be seen from Fig. 2 and Fig. 3; there is a substantially rotationally symmetrical mirror body 1〇71, and its spherical surface 1〇7 2 defines a rotational 2〇 symmetry axis 1〇7.3 (referred to herein as lens 1〇7). Light (4) (9). 107.1 defines the radial direction R and the main extension plane which are substantially perpendicular to the optical axis 1 () 7.3. The lens 107 is a support cut 8 cut, and then the cut structure (10) disc optical projection unit Κ) 3 other The optical component module (4) is connected. The support structure (10) comprises - a first clamping contact with the through-thickness, an intermediate structure of the first-cut ring 11 (in the form of 200901280) and supporting the first clamping structure ι〇9 And a second clamping structure m that then supports the intermediate structure 110. Thus, that is, the first clamping structure and the second clamping structure 111 are kinematically arranged in series such that, for example, the height of the first holding structure 5 (ie, 'along the optical axis' The change in the size of 1〇7·3 does not affect the height of the second clamping structure 111, and vice versa. The first clamping structure 109 includes a plurality of first clamping elements 1〇9丨 and a plurality of second clamping elements 109.2 (for simplicity, the two elements are only illustrated in Figures 2 and 3) . f - clamping element! The 〇9" and 帛3 clamping members just 2 are in contact with the surface 1〇7.4 of the lens 107 (the lower surface 1〇7·4 in the illustrated embodiment). Both the first clamping element 109.1 and the second clamping element 1〇9 2 are evenly distributed over the outer circumference of the lens 107. However, it should be understood that other embodiments of the invention that use reflective elements (e.g., mirrors) may not necessarily be limited to the outer circumference 15 but may be uniformly distributed throughout the surface of the optical element (e.g., the entire back side of the mirror). The first clamping element 109.1 each applies a counter force pi to the lens IQ to counteract the gravitational force G acting on the lens 107 (in the illustrated embodiment, it is parallel to the optical axis 107.3). Similarly, the second clamping member 109_2 applies a second second supporting force F2 to the lens 107 to cancel the gravity G acting on the lens 1〇7. In the illustrated embodiment, the first and second supporting forces π, ^ act in a direction substantially parallel to the gravitational force G. However, it should be understood that in other embodiments of the present invention, the first and second supporting forces pi, F2 may have any suitable direction in space as long as they have a force component that can cancel the gravity G to 15 200901280 Support the respective optical components. In order to support the lens 107 with the determined second supporting force F2, the second clamping jaws 109.2 each comprise a passive resilient element 109.4 (eg, a spring, etc.) that applies the second supporting force F2 to the lens 1〇7. ). It will be appreciated that the passive second support force ρ2 can be adjusted by providing 5 suitable adjustment members (e.g., 'adjustment screws or the like) such that the pretension of the resilient element can be adjusted. According to the material properties of the lens 107, the first and second supporting forces η are applied to the lens 1〇7 at different positions from the gravity G, so that the lens 1〇7 has a certain deformation (that is, slightly deviated from the nominal of the lens 107). geometric). 1) By adjusting the deformation of the lens 107, at least partially compensated or corrected (as detailed below) image deviations of some of the optical projection units 1 〇 3 (eg 'wavefront aberrations, etc. ). In order to be able to actively adjust the deformation of the lens 107, the first clamping elements 109.1 each comprise a deformation adjustment device supported on the first support ring 110 in the form of an active first actuator 109.3. The first actuator 109.3 adjustably produces a first support force F1 that is each applied to the lens unit 7 by a respective first clamping element 107.1. It will be appreciated that the first actuator 109.3 can be of any suitable design and can be fabricated, for example, according to electronic, electrical, pneumatic, or hydraulic operating principles, or any combination thereof. For example, the first actuator 1〇9·3 may be a piezo-actuator, a voice coil motor (v〇ice coil m〇t〇r), or the like. The resulting deformation of the lens 107 is primarily dependent on the number and distribution of the first clamping elements 109.1 and the number and distribution of the second clamping elements 109.2. The total number of any of the first and second clamping members 109.1, 109.2 greater than 3 can be selected depending on the type of deformation desired. Providing at least 3 first clamping elements 16 200901280 10 9.1 and at least 3 second clamping elements 1 〇 9 · 2 are preferred for proper and substantially uniform support of the lens i 〇 7 . Further, it is preferable that the number of the second holding members 109.2 is equal to or larger than the number of the first holding members 109.2. Therefore, for example, along the circle 5 of the lens 1〇7, one of the n holding members (η > 1) may be the first holding member 109.1. Typically, the number of first clamping elements 109.2 is a function of the type of deformation desired for lens 107 and thus a function of the type of image deviation to be corrected. For example, typically, the number of first clamping elements 109.2 corresponds to the maximum order in which the lens is desired to be deformed. However, it should be understood that in a particular embodiment of the invention, the first support structure can include a plurality of dedicated active clamping elements that adjustably produce a biasing force to provide the desired deformation of the optical element. In the illustrated embodiment, an image bias capture device 112 is provided. The image deviation capture device 112 captures one or more image deviations of the optical component system in the optical projection unit 1-3. For example, the image deviation 15 capture device can use a portion of the light projected by the illumination device 102 via all or a portion of the optical element system in the optical projection unit 1〇3. Alternatively, the light from individual sources can be used. Moreover, the wavelength of the one of the other light sources may be the same or different from the wavelength of the exposure of the illumination device 102. Such image deviation attendance devices are well known in the art and will therefore not be described in detail in this regard. 20 The material deviation picking device 112 is connected to the control device m and provides an image deviation signal indicating the deviation of each image taken by the control (4). The control device 113 is mainly connected to the first actuator 1〇73 of the first-inflamed component coffee. The money control device (1) deforms the lens 107 according to the first support force F1 17 200901280 of each first actuator 107.3 according to each (4) image deviation signal (4). In particular, it can be clearly seen from Fig. 2 that any change in the first supporting force F1 of each of the first clamping members 1 〇 91 causes the second supporting force F2 of each of the second clamping members 109.2 to change to recover and act on the lens. 1〇7 gravity 5 〇 force balance. Since the second clamping member 109.2 is constituted by a simple passive spring member 109_4 (the length varies with an external force), the position of the lens 107 is also changed. The change in position of the lens 107 generally causes the imaging DCT of the optical projection unit 1〇3 to decrease. In order to compensate for this effect, the second support structure 11 1 is designed 10 to adjust the position of the first support ring 110 so that the position of the first support structure 109 and the lens clamped by the first support structure 109 can be adjusted. 7 position. For this purpose, the second support structure ill comprises a plurality of third clamping elements 11u supported on an interface structure (in the form of a second support ring 111.2). The third clamping elements lii.i all support the first support ring 110. The second support ring 15丨11·1 forms an interface between the second support structure 111 and the module housing 106.1 of the lens module 106. The second holding members 111.1 each include a second actuator 111.3 designed to adjust the length of each of the third holding members 111.1. It will be appreciated that the second actuator 111.3 can be of any suitable design and can be operated, for example, in accordance with electronic, electrical, pneumatic, or hydraulic operating principles or any combination thereof. For example, the second actuator 111.3 can be a piezoelectric actuator, a voice coil motor, or the like. It can be seen from Figures 2 and 3 that the three pairs of clamping elements (1)* mounted are each composed of two third surface elements m.丨 arranged as a bipod. The second support structure 111 supports the first support ring ιι〇 in a static manner of a hexapod 18 200901280 (statlcaiiy determinate way). It should be understood that the bipod U1.4 illustrated in Figures 2 and 3 in a highly simplified manner can be used to generate the movement of the first support ring 110 so that the first support ring can be actively positioned.

And through it, the first support structure 1〇9 and the lens 1〇7 have 6 degrees of freedom 5 (DOF) 〇X. However, it should be understood that any other suitable second support structure may be provided to support the first support structure and Lens, rather than bipod HU α In addition, it will be appreciated that in other embodiments of the invention, position adjustments of less than 6 degrees of freedom (DOF) may be provided. For example, depending on the image deviation to be achieved, the correction or correction 'provides parallel to the main extension plane of the optical element (ie, 2 D〇F) and/or along the optical axis of the optical element (ie, 3 The translational position adjustment of the DOF or 1 DOF) is sufficient. 15 20 can be seen from Fig. 3, the three pairs of clamping members 11M are evenly distributed on the outer circumference of the first support ring 110, that is, the optical axis 1 () 73 is the center of rotation, and the angle α between them has 12G. . Thereby they can be distributed equiangularly on the outer circumference of the first support ring (10). However, it should be understood that in other embodiments of the invention, the angle of rotation between pairs of missing components can be selected from any other suitable angle. In order to control the position adjustment operation of the second branch structure U1, the position pick-up device 1 is provided to take the position value of the relative position of the 7-phase hiding reference. The reference can be scaled to any of the appropriate real or virtual components (e.g., optical planes, etc.). The position capture device 114 provides a position signal pure device 113 indicating the value of the position. The money control sets the root_position signal to control the brother's unanimous movement 111.3 to properly position the lens 107 via the first branch ring 110 and the -19th 200901280 support structure at 1.9. It should be understood that the location capture device can provide any desired location information.

The length of the signal, therefore, m m..." is done in the position of the bare pick-up device 1 丄 4 each indicating that the first and third clamping elements can provide information about the position of the lens 1 〇 7 relative to the interface structure lu. However, it should be understood that, in other embodiments of the present invention, according to the image deviation signal provided by the image deviation capturing device 112, the lens 1 〇 7 can be controlled via the control device 10 and the second actuator 111_3. position. In addition, in addition to the image deviation signal, the position signal as described above can be used. The advantage of kinematically arranging the first support structure 1〇9 and the second support structure hi in series is that the change in the position of the lens 1〇7 can be obtained via the second support structure U1 without affecting the first support structure 1〇. 9 to provide the 15 mirror 107 deformation. For example, it is possible to compensate for the movement of the lens 1〇7 in relation to thermal expansion without affecting the lens distortion provided by the first support structure 1〇9. On the other hand, the deformation control of the lens 107 and the position control of the lens 107 can be independently but simultaneously provided, whereby, for example, during the exposure process, changes in boundary conditions within the exposure apparatus can be quickly reacted' The specified deformation and/or positional change is given to the lens 107. It should be understood that in other embodiments of the present invention, the first support structure and/or the second support structure may be selected from a hanging arrangement instead of the first support structure shown in FIG. A stancjing arrangement with the second support structure 111. If 20 200901280 selects the first month policy, one of the selected structures is a suspended configuration, which can be seen by the dashed outline 丨丨5 of the hanging configuration of the table factory and the selected structure in Fig. 2 Compact design. Further, it should be understood that in other embodiments of the present invention, the optical elements described above as above may be fixed to the respective optical element modules. For example, the international patent application filed by World Patent No. WO鸠/116773 A1 (Kugler et al.) is not disclosed. (:17£1}2〇〇5/〇〇56〇〇 (the entire contents of which are incorporated herein by reference), and the permutation arrangement of the second support structure 10 Compact configuration. As described below with reference to Figures 1 to 4, a preferred embodiment of the optical imaging method of the present invention comprising the method of supporting an optical component of the present invention can be accomplished using the optical exposure apparatus 101 of Figure 1 In step 116.1, an assembly of the optical exposure apparatus 101 is provided, comprising a 15 pattern mask 104.1, a substrate 105.1, and an optical projection unit 1〇3 (which is adapted to transfer an image of the pattern in the mask 104.1 to the substrate 105.1 and An optical component module 106), and a lighting unit 102 designed to illuminate the pattern of the mask 104.1. In step 116.2, the components of the optical exposure device 101 are placed in a spatial 20 relationship to provide a first to the first 3 The configuration described in Figure 3. At step 116.3, as described above, the lens 107 is actively deformed and/or positioned via the first building structure 1〇9 and the second sub-structure in. In step 116.4, The illumination system 102 is used to illuminate the pattern of the mask 1〇41 so that the optical projection unit 1〇3 can transfer the image 21 200901280 of the pattern of the mask 104.1 onto the substrate 105.1 as described above. It should be understood that during the exposure system, Steps 1ΐ6·3 are provided to the transmissive active k^/skilled control to periodically supplement (4) events to drive. Therefore, 'in step, μ is ^ stop the wrong way. If it is no, 'if it is money, another - (d), the method jumps back to step 116.3. For example, in the case of step and shoot Keguang (4), "Yes," is performed between subsequent scan processes by step ΐ 63. Otherwise, the process is terminated at step 116.6. It should be understood that in other embodiments of the present invention, the first cool junction structure and the second thread structure may exchange the position of the light optical element and the specified deformation may introduce the optical element (four) Wei. For example, the inter-arm structure The modification of the second clamping structure can be designed in the manner described above for the first-disarmed structure (10), and the (four) first-saki structure can be designed in the manner of the second cooling structure ill. 15 & Word 'for example' to change the second loss The structure transforms the specified deformation y into the intermediate structure, and then the intermediate structure transfers the deformation to the optical element via the modification of the first clamping structure. For this purpose, the modified first lost structure is controlled in a statically overdeterminate manner. Optical elements on the intermediate structure are preferred (e.g., by introducing one or more other bipods that are similar to a bipod) so that the desired intermediate structure deformation can be easily transferred to the optical elements. f. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Another preferred embodiment of the optical imaging configuration of the present invention will be described below using FIG. 1 and FIG. 22 200901280 Fig. 5 is a cross-sectional view of the other parent-child optical element module 2〇6 of the present invention in which the lens 207 is clamped, not to scale. The optical element module 206 can replace the optical element module 1〇6 of the exposure apparatus 101 of Fig. 1. As can be seen from Fig. 5, the lens 2〇7 of the optical element module 2〇6 has a mirror body 207., which is substantially symmetrical about 5 turns, and its spherical surface 2〇72 defines a rotational symmetry axis 2〇7·3 (in Herein is the optical axis 207.3) called lens 207. The mirror body 207.1 defines a radial rule and a main extension face that are substantially perpendicular to the optical axis 207.3. The lens 207 is supported by a support structure 208, and then the support structure 2〇8 is coupled to other optical component modules of the optical projection unit 1〇3. The support structure 2〇8 10 includes a first clamping structure 209 in contact with the lens 207, an intermediate structure in the form of a first support ring 21〇 (having substantial rigidity is preferred) and supporting the first clamping structure 2〇9 And then - a second clamping structure 211 that supports the intermediate structure 21A. Therefore, that is, the first clamping structure 2〇9 and the second clamping structure 211 are kinematically arranged in series such that, for example, the first inflammatory holding structure 15 is illusory, that is, along The change in the size of the optical axis 2〇7 3 does not affect the height of the second clamping structure 211, and vice versa. The first clamping structure 209 includes a plurality of first clamping members 2〇91 and a plurality of second clamping members 209.2 (for simplicity, only two of the two components are illustrated in Figures 2 and 3). The first clamping member 209 '丨 has a contact member 209.5 (e.g., rigid clamp lens 2〇7) that is in rigid contact with the lens 20 2〇7 on the outer circumference, and a bipod 209.6 that supports the contact member 209.5. The second clamping element 209.2 is in contact with the lower surface 207.4 of the lens 2A. Both the first clamping element 209.1 and the second clamping element 2〇92 are evenly distributed over the outer circumference of the lens 207. However, it should be appreciated that other embodiments of the invention using reflective elements 23 200901280 (eg, 'mirrors') may not necessarily be limited to the outer circumference but may be uniformly distributed throughout the surface of the optical element (eg, the entire back of the mirror) . The first clamping elements 2〇9.1 each apply a first branch force F1 to the lens 2〇7 to counteract the gravitational force G acting on the lens 207 (in the illustrated embodiment, which is parallel to the optical axis 207.3). Similarly, the second clamping members 2 〇 9 2 each apply a first supporting force F2 to the lens 207 to counteract the gravitational force G acting on the lens 2〇7. In order to support the lens 207 with the determined second supporting force F2, the second clamping jaws 209.2 each include a 10-rebound element 209_4 (eg, a spring, which applies the second supporting force F2 to the lens 2〇7). and many more). It will be appreciated that the passive second support force F2 can be adjusted by providing a suitable adjustment member (e.g., an adjustment screw or the like) such that the pretension of the resilient element can be adjusted. According to the material properties of the lens 207, the first and second supporting forces FI, F2 and the gravity G act on the lens 2〇7 at different positions, so that the lens 2〇7 has a certain 15 deformation (that is, slightly deviated from the lens 207). Nominal geometry). As will be described in more detail below, by adjusting the deformation of the lens 2〇7, at least partial compensation or correction (as detailed below) of image deviations of some of the optical projection units 2〇3 (eg, wavefront aberrations, etc.) ). In order to be able to actively adjust the deformation of the lens 2〇7, the first clamping elements 20 209·1 each comprise a deformation adjustment device supported on the first support ring 210 in the form of two active actuators 209.3. The first actuator 2〇9 3 is connected to the first end of the first lever 209.7, and the second end of the first lever 2〇9·7 is rigidly coupled to the contact member 209.5. The main extension direction of one of the first levers 2〇9 7 is substantially parallel to the radial direction of the lens 207, and the main extension direction of the other of the first levers 2〇9 724 200901280 is opposite to the circumference of the lens 207. cut. Each of the first actuators 209.3 adjustably produces respective first support forces F1 and momentum applied via respective contact elements 209.5 on the lens 207 via the associated first levers 2〇9_7. It will be appreciated that the first actuator 209.3 can be any suitable design and can be operated, for example, according to electronic, electrical, pneumatic, or hydraulic operating principles or any combination thereof. For example, the first actuator 209.3 can be a piezoelectric actuator, a voice coil motor, or the like. It will also be appreciated that the length and elasticity of each first lever 209.7 is selected such that the first lever 209.7 can impart a defined excursion between the first end and the second end 10 via elastic deformation. Therefore, the contact elements 2〇95 can be extremely precisely adjusted via the first actuators 209_3. The resulting deformation of lens 207 is primarily dependent on the number and distribution of first clamping elements 209.1 and the number and distribution of second clamping elements 2〇92. The total number of any of the first and second 15 clamping members 209.1, 209.2 greater than 3 can be selected depending on the type of deformation desired. It is preferred to provide at least three first clamping elements 209.1 and at least three second clamping elements 209.2 for proper and substantially uniform support of the lens 2〇7. Further, it is preferable that the number of the second holding members 2 〇 9.2 is equal to or larger than the number of the first holding members 209.2. Thus, for example, along the circumference 20 of the lens 2〇7, one of the n holding members (η > 1) may be the first holding member 209.1. With $, the number of first clamping elements 209.2 is a function of the type of deformation desired for lens 2〇7 and thus a function of the type of image deviation to be corrected. For example, 'Usually, the number of first clamping elements 胤2 corresponds to the maximum order at which the lens is desired to be deformed. However, it should be understood that other embodiments of the present invention may include a plurality of specialized active dislodging elements that adjustably generate supporting forces to provide the desired deformation of the optical elements. In the specific embodiment, the image deviation capture device 112 is also used to manipulate one or more images of the optical component system in the optical projection unit 1 〇 3 as described above in describing the first embodiment. of. The shirt image pickup unit U 2 also provides an image deviation signal indicating the deviation of each of the shirt images captured by the control unit. At this time, the control device 113 is mainly connected to the first actuator 207.3 of the first clamping member 207·1. The respective first support forces F1 are controlled according to the respective shirt image deviation signals 'control device 113 to apply the momentum to the lens 207 by the respective first actuators 207.3 to provide deformation of the lens 2G7 which at least partially compensates for the image deviation. . The change in the orientation of each of the contact elements 209·5 and the change in the momentum of the first support force F1 and each of the first clamps 70 胤1 may cause the second shear force F2 of the second clamp element 2〇9·2 to change. The force balance with the weight 5 force G of the lens 207 is restored. Since the second lost component 2 is composed of a simple passive spring member 209.4 (the length varies with external force), it also causes a change in the position of the lens 207. The change in position of the lens 207 typically causes the imaging mussels of the optical projection unit 2〇3 to decrease. In order to compensate for this effect, the second support structure can be adjusted to adjust the position of the first support ring 210, so that the position of the first support structure 2〇9 can be adjusted and the position of the first support structure 209 can be adjusted. The location of the lion 7. For this purpose, the second support structure 211 comprises a plurality of third clamping elements 2ι" supported on an interface structure (in the form of a second support ring 211.2). The third clamping jaws 211.1 support the first support ring. The second support ring is called "shape 26 200901280" into the interface between the second support structure 211 and the module housing 2〇61 of the lens module 206. The second clamping members 211.1 each include a connecting member 211.5 connecting the first supporting ring 21〇 with a first supporting ring 211.2, and two second actuators 211.3 supported on the second supporting ring 5 211·2. And two second levers 211.6 each connecting the second actuator 211.3 and the connecting member 211.5. Each of the second actuators 211.3 is coupled to the first end of the second lever 2U.6 (its second end is rigidly coupled to the central block 211.7 of the connector 211.5). The main 10 extending direction of one of the second levers 211.6 is substantially parallel to the radial direction R of the lens 207 and the other extending direction of the other of the second levers 21U is tangent to the circumference of the lens 2〇7. The respective second actuators 2'.3 adjust the direction and position of the central block 211.7 via the associated second levers 211_6. Since the center block 2Π7 is hinged to the leaf spring element 211_8 of the connector 211.5, the movement of the center block 211.7 causes the first support ring 210 to move, so that the position of the lens 207 can be adjusted, as originally mentioned in the international patent. Application No. PCT/EP2〇06/〇〇4337 is not disclosed. It will be appreciated that the second actuator 211.3 can be of any suitable design and can be operated, for example, in accordance with electronic, electrical, pneumatic, or hydraulic operating principles or any combination thereof. For example, the second actuator 211.3 can be a piezoelectric actuator, a voice coil motor, or the like. It will also be appreciated that the length and elasticity of each of the second levers 211.6 are selected such that the second lever 211.6 is capable of transmitting a specified offset between the first end and the second end via elastic deformation. Therefore, the connecting member 211.5 can be extremely precisely adjusted via the second actuators 211.3, 27 200901280, so that the lens 2〇7 can be adjusted extremely precisely. The second support structure 211 includes three third clamping members 211.1 that support the first support ring 210 in a static manner. It should be understood that the third clamping elements 2ιιι can be used to generate the movement of the first support ring 210 so that the first 5 support ring 210 can be actively positioned and passed through, the first support structure 2〇9 and the lens 2〇 7 has 6 degrees of freedom (DOF). 10 15 20 However, it should be understood that any other suitable second alternative structure may be provided to support the first support structure and the lens, and W is the third clamping element 2 ιι". Moreover, it should be understood that in other embodiments of the invention, position adjustments of less than 6 degrees of freedom may be provided. For example, depending on the image aberration correction or compensation to be achieved, it is provided parallel to the main extension surface of the optical element (ie, 2 DOF) and/or along the optical axis of the optical element (ie, 3 ^ or 丄The translational position adjustment of the DOF) is sufficient. The three third clamping members 2111 are evenly distributed on the outer circumference of the first support ring, i.e., with the optical axis 2 〇 7.3 as the center of rotation, and their angles α (10) 〇. By this, they can be equally distributed in the outer circumference of the first branch. However, it should be understood that in other embodiments of the invention, the angle of rotation between the third clamping members may be any other suitable angle. In order to control the position adjustment operation of the second support structure 211, a bit manipulation device 114 is provided for capturing the position value indicating the position of the lens 2 () 7 with respect to a given beauty. The reference may be any suitable component or virtual component of the exposure device (eg, optical plane, etc., 'position operation device 114 provides a position indicating the position value to control device U3. Control slot 213 Next, according to the pure sign (4) 28 200901280, the second actuator 211.3 is configured to appropriately position the lens 207 via the first support ring 21 and the first support structure at 2〇9. It should be understood that the position capturing device 114 can Any suitable design that provides a desired position signal. For example, in some embodiments of the present invention, the fifth actuator 209·3 and the second actuator 21丨3 may form a position picking device. One of the portions ll4 is used to provide signals each representing the actual length of the first and third missing components, thus providing information on the position of the lens 2〇7 relative to the interface structure 2ii2. 'However, it should be understood that In another embodiment of the present invention, the position of the lens 2〇7 can be controlled according to the image deviation signal provided by the 10 image deviation capturing device m via the control insertion 113 and the second actuator 211.3. -image In addition to the difference signal, a position signal as described above can be used. The kinematically arranging the first support structure 2〇9 and the second support structure 211 in series is advantageous in that the lens 2〇7 can be obtained via the second support structure 211. 5 positional changes without affecting the deformation of the lens 2〇7 provided via the first support structure period. For example, it is possible to compensate for the movement of the lens 207 in relation to thermal expansion without glare; the lens deformation provided by the first-cut structure survey On the other hand, the deformation control of the lens 207 and the position control of the 2〇 lens 2〇7 can be independently but simultaneously provided, whereby the change of the boundary condition in the exposure apparatus can be quickly reacted, for example, during the exposure process. And can provide the desired specified deformation and/or positional change to the lens 2〇7. ~ It should be understood that in other embodiments of the invention, the first-ply structure and/or the second branch structure are optional (4) Hanging configuration, and from the vertical support 29 200901280 of the first support structure 2〇9 and the second support structure 211 shown in Fig. 5. If one of the first and second support structures is selected as the hanging configuration , Such as As described in the description of the first embodiment, an extremely compact design can be achieved. Furthermore, it should be understood that in other embodiments of the invention, as described above, more than one optical component can be fixed to each optical component module. International Patent Application No. pct/EP2〇〇5/0〇5600, issued toKugler et al., the entire disclosure of which is incorporated herein by reference. The interpenetrating configuration can achieve an extremely compact configuration if the second support structure is selected as an interpenetrating configuration. It should be understood that the optical exposure 10 device of Fig. 1 with the optical component module 206 of Fig. 5 can be completed as above. The optical imaging method described in the description of Fig. 4 is described. Therefore, the above explanation is given in the context of the first embodiment. Third Specific Embodiment 15 20 Another preferred embodiment of the optical imaging configuration of the present invention will be described below with reference to Figs. 1 and 6. Figure 6 is a schematic representation of the other preferred optical element die (10) 6 of the present invention sandwiching the lens 307 in a disproportionate manner. The optical element module can be replaced by the optical element module 106 of the 181th exposure device 1G1. It can be seen from Fig. 6 that the lens of the optical element module 3〇6 has a substantially rotationally symmetric mirror body 307”, and its spherical surface 3〇7.2 defines a rotating 'symmetric sleeve. This is an optical axis 3G7 called lens 3G7. 3). Mirror detail.1 defines the radial direction R and the main extension plane which are substantially perpendicular to the optical axis 3G7·3. Lens 3 squats and supports the structure of the support. #_切斑 The other optical component modules of the optical projection single (4) 3 are connected. The cut structure 30 30 200901280 includes a first clamping structure 3〇9, preferably a first support ring 310 in contact with the lens 307 and supports the intermediate, =, and - supporting intermediate structures of the first central holding structure 309 3 〇 second clamping structure 3 Π. Therefore, that is, the first clamping structure (10) and the second clamping structure are arranged in series such that the change of the first clamping structure does not affect the dimensional change of the second clamping structure 311, and vice versa. Also. The first clamping structure 309 comprises a plurality of first clamping elements and a plurality of second clamping elements 胤2 (for the sake of «, the two elements are each shown in Figures 2 and 3 10 = one). The first clamping element and the second clamping element 都2 are both in contact with the lower surface 3〇7·4 of the lens 307. Both the first clamping element emblem 1 and the second clamping element 309-2 are hooked on the outer circumference of the lens 307. However, it should be understood that other embodiments of the invention that use reflective elements (e.g., 'mirrors') may not necessarily be limited to the outer circumference and may be selectively distributed evenly across the entire surface of the optical element (e.g., the entire back side of the mirror). The first holding jaws 309.1 each apply a first supporting force F1 on the lens 3〇7 to counteract the action on the lens 3_gravity G (in the illustrated embodiment, the beans are parallel to the optical axis 307.3). Similarly, the second missing component emblem 2 applies a second supporting force F2 to the lens 3G7 to cancel the gravity acting on the lens. In order to support the lens 3〇7 with the determined second supporting force F2, the second holding Each of the readings 309.2 includes a form of a sheet and applies the second supporting force to the passive rebound element chest on the mirror 307. It will be appreciated that the passive second support force F2 can be adjusted by providing a suitable adjustment member (e.g., 'adjustment screw or the like) such that the pretension of the resilient element can be adjusted. 31 200901280 According to the material properties of the lens 307, the first and second supporting forces F1, π and the gravity G act on the lens 3〇7 at different positions, so that the lens has a certain deformation (that is, the nominal deviation from the lens 307) geometric). As will be described in more detail below, by adjusting the deformation of the lens 3〇7, at least a portion of the optical projection unit 3〇3 can be compensated or corrected (as detailed below) for image deviations (eg, 'wavefront aberrations, etc. Wait). In order to be able to actively adjust the deformation of the lens 307, the first clamping elements 309.1 each comprise a deformation adjustment device in the form of an active first actuator 3〇93, which is supported on the first support ring 310 and via the first lever 3〇95 acts on the leaf spring 309.6 of the supporting lens 307. The first actuator 3〇9.3 adjusts the first support force F applied by each of the first clamping members 3() 71 on the lens 3G7, and the first actuator paper is any suitable. The design and, for example, can be based on electronic, electrical, pneumatic, or hydraulic operating principles or any combination of them. For example, the first actuator 3〇93 can be a pressure 15 electric actuator, a voice coil motor, or the like. The resulting deformation of lens 307 is primarily dependent on the number and distribution of first clamping elements 3〇9.1 and the number and distribution of second holding elements 3〇9 2 . Any number of first and second (1) holding elements greater than 3, 309·2, may be selected depending on the type of deformation desired. It is preferred to provide at least three first clamping members .1 and to ν 3 first clamping members 3 () 9 2 for proper and sufficient uniform support of the lens. It is preferred to provide a plurality of second clamping members 309.2 to provide uniform nominal support for lens 307 as much as possible. Further, it is preferable that the number of the second holding members 309.2 is equal to or larger than the number of the first holding members 309.2. Thus, for example, along the lens circle 32 200901280 weeks, one of the n clamping elements (η > 1) may be the first clamping element 309.1. Typically, the number of first clamping elements 3 〇 9 2 is a function of the type of deformation desired for lens 3 〇 7 and thus a function of the type of image deviation to be corrected. For example, in general, the number of first clamping members 3〇92 corresponds to the maximum order in which the lens is desired to be deformed. However, it should be understood that in other embodiments of the invention, the first support structure can include a plurality of specialized active clamping elements that adjustably generate a supporting force to provide the desired deformation of the optical element. In the particular embodiment, the image deviation capture device 112 is also used to capture - or more image 10 deviations of the optical component system in the optical projection unit 103, as described above in describing the first embodiment. of. The image deviation capturing means 12 also provides an image deviation signal indicating the deviation of each image captured by the control means 113. At this time, the control device η] is mainly the first actuator s 3〇7·3 connected to the first clamping member 3〇7丨. Based on the respective image deviation signals, the control device i 13 controls the respective first control forces Η 15 and the momentum applied to the lens 307 by the respective first actuators 307.3 to provide a lens 307 that at least partially compensates for the image deviation. Deformation. Any change in the first support force F1 of each of the first clamping members 309.1 results in a change in the second supporting force F2 of each of the second clamping members 309.2 to restore the force balance with the force G acting on the lens 307. Since the second clamping elements 2 〇 3 〇 9·2 are formed by a simple passive spring member 309.4 (the shape changes with external force), the position of the lens 307 is also changed. The change in position of the lens 307 generally causes the image quality of the optical projection unit 303 to decrease. In order to compensate for this effect, the second undulation structure 311 is designed to adjust the position of the first selection ring 31 , so that the first support structure 33 can be adjusted. 200901280 For this purpose: T clamped lens for this purpose, red The support structure 311 includes a third clamping element 3 on the second selection ring 311.2). The second holding member 311.1 holds the first support ring 31〇. The "5 10 2 = the outer layer of the thin object group 3Q6: the interface forms the first - the clamping τ ο 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 - the second actuator 3113 on the branch foot 2. and the second lever 3u. 6 connecting the second and the connector 311.5. The kg:: the actuator 311.3 is connected to the second rod The first end of the third rod 311.6 is rigidly connected to the connecting member. The second stud 311.6 is angled and has a main portion of the radial fat line with the lens 3〇7. - Lever 311·6, each of the second actuators 3 ιι 3 can adjust the direction and position of the connection 15 pieces 311.5. Since the connecting piece 311_5 is hinged to the first support ring 310 and the first-cut ring 311·2 'the money piece 311 The movement of 5 causes the first-building ring 31G to move, and therefore, the position of the adjustable lens tear is as disclosed in the originally mentioned International Patent Application No. PCT/EP2006/004337. It is to be understood that the second actuator 311.3 Can be any suitable design and example 20 such as can be based on electronic, electrical, pneumatic, or hydraulic working principles or any of their groups Working together. For example, the second actuator 311.3 can be a piezoelectric actuator, a voice coil motor, etc. It should also be understood that the length and elasticity of each second lever 311.6 are selected as the second lever 311.6 via The elastic deformation can be transmitted between the first end and the second end 34 200901280 - the specified offset. Therefore, the second actuator 3 ΐ 3 can extremely accurately touch the member 311·5, so that the precision can be extremely precise The can lens 3〇7. The second support structure 311 includes three third inflammatory members 3111 that support the first support ring 310 in a static manner. It should be understood that the third inflammatory element can be used to generate the first The movement of the support ring, so that the first support ring 3 can be actively positioned to pass through it, the first support structure and the lens 307 have 6 degrees of freedom (DOF). 'It should be understood that any other suitable (four) two support can be provided The first support structure and the lens are supported instead of the third clamping element. However, it should be understood that in other embodiments of the invention, a positional adjustment of six degrees of freedom can be provided. For example, depending on the w image deviation correction or compensation to be achieved' It is sufficient to adjust the translational position of the main extension of the optical element, ie, F) and/or along the optical axis of the optical element (ie, 3 coffees or | D0F). 15 20 'η. 1疋 is not located on the outer circumference of the first support ring 31〇, that is, the light (10) 7.3 is the center of rotation, and the difference between them is 20. Thus, they can be equiangularly distributed in the first ring. 3_ outer circumference. However, it should be understood that in other embodiments of the present invention, the angle of the clamping element may be selected as the other - in order to control the position adjustment of the second supporting structure 311. To find the position value indicating the position of the lens 位 and the position of the pair. The reference may provide a positional signal indicating the position value of the exposure component, the virtual component, or the like, or the virtual component (for example, the optical plane, etc.).

One of the injuries, each used to provide each of the first and second

The mouth 311.3 can be formed to position the position lb I to indicate that the first and third clamping elements can provide the lens 307 relative to the interface structure 3. However, it should be understood that in other embodiments of the invention, the image deviation is captured. The image deviation signal provided by the device 112 controls the position of the lens 3〇7 via the control unit 113 and the second actuator 311.3. In addition, in addition to the image deviation signal, the position signal as described above can be used. The advantage of kinematically arranging the first support structure 3〇9 and the second support structure 311 in series is that the lens 3〇"7: position change can be obtained via the second support structure 311 without affecting the via __ The lens 307 provided by the support structure 3() 9 is deformed. For example, it is possible to compensate for the motion of the lens 3〇7 in relation to thermal expansion without affecting the lens distortion provided by the first support structure 309. On the other hand, the deformation control of the lens 3〇7 and the position control of the mirror 307 can be independently but simultaneously provided, whereby, for example, during the exposure process, changes in boundary conditions within the exposure apparatus can be quickly reacted, and The desired specified deformation and/or positional change is provided to the lens 3〇7. It should be understood that comparing other embodiments with the upright or suspended configuration of the first support structure 309 and the support structure 311, there is substantially coplanar 36 200901280. The configuration of the sixth and second structures can be provided at The lens 3〇7 has a very compact design in the direction of the optical axis 胤3. It should be understood that the optical imaging method as described above in the explanation of the figure * can be completed by the first optical exposure device 101 with the optical element module 3〇6 of Fig. 6. The explanation on the second is in the first Given in the context of specific embodiments.

10 15

The present invention is described in detail in the specific embodiment in which the optical axis of the optical element to be supported is substantially parallel to the direction in which the gravity acts on the A light dry element. However, it should be understood that in other embodiments of the invention, optical axes having other orientations may be defined for optical elements and gravity'. In the early days, the invention was made in the context of a pure refractive system (especially, including a spherical lens). It should be understood, however, that in the practice of the present invention, the present invention contemplates only an optical system that reflects or refracts and an optical system that includes any combination of reflective elements 'refractive and/or vibrating elements. In addition, any optical reading of the design can be used. For example, the money spherical surface, the _ surface solution called the surface of the optical components. 2, the invention is described in the following with a specific embodiment having the following structure, the towel line structure_the second domain structure towel provides a position adjustment of the first learning element while the first-loss structure and the second loss Holding the company 2 another - making the butterfly tree financial deformation. Μ, as mentioned above, it should be understood that in other embodiments of the invention, the specified deformation of the member is the same as that of the silk component inspection mask == via the (four)-clamping structure, the second clamping structure And the intermediate structure is for extremely beneficial support. For example, in the above-described embodiments, the simple Gang 37 200901280 sexual support is provided via one of the lost structures or the same function is provided via both the first clamping structure and the second clamping structure ( That is, position adjustment or specified deformation) is achieved. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a preferred embodiment of an optical imaging configuration of the present invention, which comprises an optical component module of the present invention and which can be used to perform the preferred embodiment of the method of the present invention. Figure 2 is a schematic cross-sectional view of one of the optical component modules in the optical imaging configuration of Figure 1 (drawn along line II-II of Figure 3); Figure 3 is an optical component module of Figure 2. Figure 15 is a block diagram of a preferred embodiment of the optical imaging method of the present invention, comprising a method of supporting an optical component that can be accomplished using the optical imaging configuration of Figure 1. FIG. 5 is a schematic cross-sectional view showing another preferred embodiment of the optical element module of the present invention which can be used in the optical imaging configuration of FIG. 1. The schematic cross-sectional view of FIG. 6 is applicable to Another preferred embodiment of the optical component module of the present invention in the optical imaging configuration of Figure 1 is shown. [Description of main component symbols] 101····················································································· Group 106.1··· Module housing 107...Lens 107.1...Mirror body 107.2...Spherical surface 107.3... Optical axis 107.4···Surface 38 200901280 108...Support structure 207...Lens 109...First clamping structure 207.1...Mirror body 109.1·· First clamping element 207.2...spherical surface 109.2...second clamping element 207.3···optical axis. 109.3...first actuator 208...support structure 109.4...passive resilient element 209...first clamping structure 110... a ring 209.l···the first clamping element 111...the second clamping structure 209.2...the second clamping element 111.1·.the third clamping element 209.3...the first actuator 111.2...the first Two support rings 209.4... passive resilience elements 111.3...second actuator 209.5...contact elements 111.4...clamping element pairs, bipod 209.6...bipocket 112...image deviation capture device 209.7...first lever 113...control Device 210...first support ring 114... bit Picking device 211...second clamping structure 115...dashed contour 211.1...third clamping element (116.1...step 211.2...second support ring 116.2···step 211.3...second actuator 116.3...step 211.5...connector 116.4...Step 211.6...Second lever 116.5...Step 211.7...Center block 116.6...Step 211.8... Leaf spring element 206... Optical element module 306... Optical element module 206.1... Module housing 306.1···Module housing 39 200901280 307···· lens 307.1...mirror body 307.2···spherical surface 307.3···optical axis 308···support structure 309.··first clamping structure 309.b.·first clamping element 309.2... Two clamping elements 309.3 "first actuator 309.4···passive resilient element 309.5···first lever 309.6... leaf spring 310···first support ring 311...second clamping structure 311.1.· ·The third clamping element 311.2···the second support ring 311.3...the second actuator 311.5...the connection piece 311.6···the second lever F1...the first support force F2...the second support force G...the gravity R...the diameter To 40

Claims (1)

200901280 X. Patent Application Range: 1. An optical component module comprising: - an optical component 'and a support structure supporting the optical component; - the support structure comprises a first clamping structure, an intermediate structure And a second clamping structure; the first clamping structure is in contact with the optical element and adapted to adjustably introduce a specified deformation into the optical element; - the intermediate structure supports the first clamping structure; A second clamping structure supports the intermediate structure and is adapted to adjust the position of the intermediate structure. 2. The optical element module of claim 1, wherein - the optical element has an outer circumference, and - the first clamping structure comprises a plurality of first clamping elements; - the first clamping elements are Distributed on the outer circumference of the optical element and in contact with the optical element; - the first clamping element is adapted to adjustably introduce a specified deformation force into the optical element. 3. The optical component module of claim 2, wherein the first clamping elements are evenly distributed over the outer circumference of the optical component. 4. The optical element module of claim 2, wherein - the first clamping structure comprises a plurality of second clamping elements; - the second clamping elements are distributed over the outer circumference of the optical element Also in contact with the optical element; 41 200901280 - the second clamping elements are adapted to support the optical element. 5. The optical component module of claim 2, wherein the first clamping component is substantially rigidly coupled to the optical component. 6. The optical component module of claim 2, wherein - at least one of the first clamping elements comprises a deformation adjustment device; - the deformation adjustment device is adapted to adjustably pass the first clamp The component is held to produce at least one of a deformation force and a deformation momentum that can be introduced into the optical component. 7. The optical element module of claim 6, wherein at least one of the first clamping elements comprises a contact element in contact with the optical element; - the deformation adjusting device comprises a force generating device and a lever arm; - the lever arm has a first end and a second end; - the first end is connected to the contact element, and the second end is connected to the force generating means. 8. The optical component module of claim 7, wherein - the lever arm is elastic and the length from the first end to the second end; - the elasticity and at least one of the lengths are selected : via the elastic deformation of the lever arm, the lever arm can transmit a specified offset between the first end and the second end. 9. The optical component module of claim 7, wherein the force generating device is supported on the intermediate structure. 42. The optical component module of claim 1, wherein the application structure has an outer circumference, and - the second clamping structure comprises a plurality of third clamping elements; = the third (four) element is distributed over the outer a circumference of the (four) structure and in contact with the intermediate structure; the n=3= clamping element is adapted to adjust the position of the intermediate structure. The optical component module of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A pair of clamping elements, that is to say the clamping elements, are formed by arranging the third clamping elements two as a bipod. For example, the optical component module of claim 12, wherein the _ is provided with the clamping member, 14 is cut in the manner of the component (4). The optical component module of claim 10, wherein at least one of the third raking members comprises an actuator device for providing a position adjustment operation of the intermediate structure. 15. The optical component module of claim 1, wherein the second support structure comprises an interface structure, and - at least one of the third clamping elements comprises: an actuator device; Connecting the intermediate structure to the interface structure; - the actuator device is adapted to move the connector, thereby providing a position adjustment action of the 43 200901280 intermediate structure. 16. The optical component module of claim 15, wherein the actuator device comprises an action generating device and a lever arm; - the lever arm has a first end and a second end; - the first The end is connected to the connector and the second end is connected to the action generating device. 17. The optical component module of claim 16, wherein - the lever arm is elastic and the length from the first end to the second end; - the elasticity and at least one of the lengths are selected : via the elastic deformation of the lever arm, the lever arm can transmit a specified offset between the first end and the second end. 18. The optical component module of claim 16, wherein the motion generating device is supported on the interface structure. 19. The optical component module of claim 1, wherein the intermediate structure comprises a support ring supporting the first clamping structure. 20. The optical component module of claim 1, wherein - a position picking device and a position control device are provided; - the position picking device picks a position indicating the relative position of the optical component to a given reference The position value and the value of the position are provided to the position control device; - the position control device controls the position adjustment of the intermediate structure via the second clamping structure based on the position value. 21. An optical imaging device comprising: 44 200901280 - a mask unit adapted to receive a pattern, - a substrate unit adapted to receive a substrate; - a image adapted to transfer the image to An optical projection unit on the substrate; the optical projection unit comprises at least one optical component and a support structure supporting the at least one optical component; the support structure comprises a first clamping structure, an intermediate structure, and a second a clamping structure; the first clamping structure is in contact with the optical element and adapted to adjustably introduce a specified deformation into the optical element; - the intermediate structure supports the first clamping structure; - the second clamping structure The intermediate structure is supported and adapted to adjust the position of the intermediate structure. 22. The optical imaging device of claim 21, wherein - an image deviation capturing device and a position control device are provided; - the image deviation capturing device captures an image indicating an image deviation of the optical projection unit Deviating the value and providing the image deviation value to the position control device; - the position control device controls the position adjustment of the intermediate structure via the second clamping structure according to the image deviation value. 23. The optical imaging device of claim 22, wherein - a position picking device is provided; - the position picking device takes a position value indicating the relative position of the optical element to a given reference and provides The position value is given to 45 200901280. The position control device controls the position adjustment of the intermediate structure via the second clamping structure based on the position value. 24. An optical component module, comprising: - an optical component, and - a support structure supporting the optical component; - the support structure comprises a first clamping structure and a second clamping structure; a first clamping structure in contact with the optical element and adapted to adjustably introduce a specified deformation into the optical element; - the second clamping structure is adapted to adjust a position of the optical element; - the first clamping structure and The second clamping structure is arranged in a kinematic sequence, the second clamping structure supporting the first clamping structure. 25. The optical component module of claim 24, wherein - the optical component has an outer circumference, and - the first clamping structure comprises a plurality of first clamping elements; - the first clamping elements are Distributed on the outer circumference of the optical element and in contact with the optical element; - the first clamping element is adapted to adjustably introduce a specified deformation force into the optical element. 26. The optical component module of claim 25, wherein - the first clamping structure comprises a plurality of second clamping elements; - the second clamping elements are distributed over the outer circumference of the optical component Also in contact with the optical element; 46 200901280 - the second clamping elements are adapted to support the optical element. 27. The optical component module of claim 25, wherein - at least one of the first clamping elements comprises a deformation adjustment device; - the deformation adjustment device is adapted to adjustably pass the first clamp The component is held to produce at least one of a deformation force and a deformation momentum that can be introduced into the optical component. 28. The optical component module of claim 24, wherein - the first support structure has an outer circumference, and - the second clamping structure comprises a plurality of third clamping elements; - the third clamping An element is distributed over the outer circumference of the first support structure and in contact with the first support structure; - the third clamping elements are adapted to adjust the position of the first support structure. 29. The optical component module of claim 24, wherein - a position picking device and a position control device are provided; - the position picking device picks a position indicating the relative position of the optical component to a given reference The position value and the value of the position are provided to the position control device; - the position control device controls the position adjustment of the intermediate structure via the second clamping structure based on the position value. 30. An optical imaging arrangement comprising: - a mask unit adapted to receive a pattern, - a substrate unit adapted to receive a substrate; 47 200901280 - one adapted to transfer an image of the pattern to An optical projection unit on the substrate; the optical projection unit comprises at least one optical component and a support structure supporting the at least one optical component; the support structure comprises a first clamping structure and a second clamping structure; The first clamping structure is in contact with the optical element and adapted to adjustably introduce a specified deformation into the optical element; - the second clamping structure is adapted to adjust a position of the optical element; - the first clamping structure And the second clamping structure is arranged in a kinematic sequence, the second clamping structure supporting the first clamping structure. 31. The optical imaging configuration of claim 30, wherein: an image deviation capturing device and a position control device are provided; - the image deviation capturing device captures an image indicating an image deviation of the optical projection unit Deviating the value and providing the image deviation value to the position control device; - the position control device controls the position adjustment of the intermediate structure via the second clamping structure according to the image deviation value. 32. A method of supporting an optical component, comprising: - providing an optical component and a support structure supporting the optical component, the support structure comprising a first clamping structure in contact with the optical component, an intermediate structure And a second clamping structure; - introducing a specified deformation into the optical element via the first clamping structure; - supporting the first clamping structure via the intermediate structure; 48 200901280 - via the second clamping structure Adjusting the method of claim 32, wherein the optical element has an outer circumference, and the first clamping structure comprises a plurality of first element elements, the m holding element being distributed in the optical series Outer® and in contact with the optical element; and-adjustably introducing the specified deformation force to the optical element. 34. The method of claim 33, wherein the plurality of second clamping elements having the first support structure are used to support the optical element, the second clamping elements being distributed outside the optical element circumference. 5. The method of claim 33, wherein at least one of a - deformation force and a deformation momentum is generated and introduced via the first clamping element to the optical element. 36. The method of claim 32, wherein A plurality of third clamping members having the second clamping structure are used to complete the position of the intermediate structure; " two clamping members are distributed over the outer circumference of the inter-toile structure. 7. The method of claim 32, wherein the deriving - indicates a position value of the relative position of the optical element with respect to a given reference, and a value of the rotation or position via which the intermediate structure is adjusted position. 38. The method of claim 32, wherein - modifying - introducing a deformation of the optical component 49 200901280 via the first clamping structure, - extracting a motion value indicating that the optical component is deformed The movement that occurs with the modification, and - based on the value of the movement, adjusts the position of the intermediate structure via the second clamping structure to compensate for the movement of the optical element. 39. An optical imaging method, comprising: - providing a pattern, a substrate, and an optical projection unit adapted to transfer an image of the pattern onto the substrate, the optical projection unit comprising at least one optical component And a support structure supporting the at least one optical component, the support structure comprising a first clamping structure in contact with the optical component, an intermediate structure supporting the first clamping structure, and a second refreshing structure, Obtaining an image deviation value indicating an image deviation of the optical projection unit, as a function of the image deviation value, at least partially compensating the image deviation by at least one of: - via the first clamping structure Introducing a specified deformation into the optical element and - adjusting the position of the intermediate structure via the second clamping structure; - transferring an image of the pattern onto the substrate using the optical projection unit. 40. The optical imaging method of claim 39, wherein - a position value indicating a relative position of the optical element with respect to a given reference, and 50 200901280 - adjusting the intermediate structure according to the position value position. 41. A method of supporting an optical component, comprising: - providing an optical component and a support structure supporting the optical component, the support structure comprising a first clamping structure and a second clamping structure - via The first clamping structure introduces a specified deformation into the optical element, and - in a manner that is kinematically independent of the step of introducing the specified deformation into the optical element via the first clamping structure, via the second A clamping structure is used to adjust the position of the optical element. 42. An optical imaging method, comprising: - providing a pattern, a substrate, and an optical projection unit adapted to transfer an image of the pattern onto the substrate, the optical projection unit comprising at least one optical component The optical projection unit includes at least one optical component and a support structure supporting the at least one optical component; the support structure includes a first clamping structure and a second clamping structure; - capturing an optical projection unit Image deviation value of the image deviation; - as a function of the image deviation value, at least partially compensating for the image deviation by at least one of: - introducing a specified deformation into the optical element via the first clamping structure, and Adjusting the position of the optical element via the second clamping structure in a manner that is kinematically independent of the step of introducing the specified deformation into the optical element via the first clamping structure; 51 200901280 - used The optical projection unit transfers the image of the pattern onto the substrate. 43. An optical component module, comprising: - an optical component, and - a support structure supporting the optical component; - the support structure comprises a first clamping structure, an intermediate structure, and a second clamping Holding the structure; - the first clamping structure is in contact with the optical element; - the intermediate structure supporting the first clamping structure; - the second clamping structure supporting the intermediate structure - the first clamping structure and the second One of the clamping structures is adapted to adjustably introduce a specified deformation into the optical element, and the other of the first clamping structure and the second clamping structure is adapted to adjust the position of the optical element. 44. The optical component module of claim 43, wherein - the first clamping structure is adapted to adjust a position of the optical component, and - the second clamping structure is adapted to adjustably introduce a specified deformation The optical component. 45. The optical component module of claim 44, wherein the first clamping structure decouples the optical component on the intermediate structure in a statically indeterminate manner. 46. A method of supporting an optical component, comprising: - providing an optical component and a support structure 52 200901280 supporting the optical component, the support structure comprising a first clamping structure in contact with the optical component, An intermediate structure and a second clamping structure; - supporting the first clamping structure via the intermediate structure, and supporting the intermediate structure via the second clamping structure; - via the first clamping structure and the One of the second clamping structures introduces a specified deformation into the optical element, and adjusts the position of the optical element via the other of the first clamping structure and the second clamping structure. 47. An optical component module, comprising: - an optical component, and - a support structure supporting the optical component; - the support structure comprises a first clamping structure, an intermediate structure, and a second clamping Holding the structure; - the first clamping structure is in contact with the optical element; - the intermediate structure supporting the first clamping structure; - the second clamping structure supporting the intermediate structure - the first clamping structure and the second At least one of the clamping structures is adapted to perform a function selected from the group consisting of: adjustably introducing a specified deformation into the optical element, and adjusting the position of the optical element. 48. A method of supporting an optical component, comprising: - providing an optical component and a support structure supporting the optical component, the support structure comprising a first clamping structure in contact with the optical component, an intermediate a structure, and a second clamping structure; 53 200901280 - supporting the first clamping structure via the intermediate structure, and supporting the intermediate structure via the second clamping structure; - via the first clamping structure and the At least one of the second clamping structures performs at least one function selected from the group consisting of: adjustably introducing a specified deformation into the optical element, and adjusting the position of the optical element . 54