TW200850073A - Antistatic film and article comprising the same - Google Patents

Abstract

An antistatic film and an article comprising the same are provided. The film comprising: a base film; a conductive layer disposed on one surface of the base film; a protective layer disposed on the surface of the conductive layer opposite to the base film to protect the conductive layer, wherein the protective layer contains particles used for inhibiting the decrease of surface conductivity of the film and a film-forming polymer, wherein at least a portion of the particles has a particle diameter larger than the thickness of the protective layer.

Description

200850073 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an antistatic film, and more particularly to a transparent, low-pollution antistatic film for use in a component package cover. The invention is also directed to a system comprising the film, such as a cover tape and a system comprising a carrier tape, the tape and optionally a package. [Prior Art] In the field of TL device packaging, components are usually developed and manufactured by the manufacturer, and sub-delivered to another manufacturer or user for further processing. For example, after manufacturing a semiconductor wafer from a Wei or "clean room" device, it is packaged and exported to another manufacturer or user, such as a computer manufacturer, so that the manufacturer can install it on the printing. On a circuit board or similar device. Components mainly include 'but not limited to memory chips, transistors, connectors, mps, capacitors, etc. In recent years, wafer-based electronic components such as 1C chips or capacitors have been mounted on the tape. The form in the carrier tape is provided for surface mounting on a circuit board or the like. The carrier tape has a recess for accommodating components. When the component is housed in the recess: the cover tape seals the corresponding recess to form a package body When in use, the cover tape with the package is peeled off. The element H is taken out and mounted on the circuit board. 0 20 The tape must be easily peeled off from the carrier tape, and the peeling force must have a certain amount of stability. When the peeling force (peel strength, heat seal strength, or "peel strength") is too low, the cover tape is liable to fall off. If the peeling force is too strong or the peeling force fluctuation range is too large, the peeling operation is not easily performed stably when the cover tape is peeled off by the mounter. In addition, static electricity can affect the assembly process or the device itself, so the cover tape is required to have stable antistatic properties. Moreover, in order to inspect the components, the cover tape is required to have good transparency. In addition, the surface of the cover tape does not contaminate the components. 10 15 Cover tapes are usually available in two types, pressure sensitive and thermal. For the sensitized cover tape, electrical conductivity can be obtained by adding a conductive agent to the surface of the heat-sensitive adhesive or the surface of the adhesive layer. The conductive agent is an inorganic conductive filler, and the conductive property in the γ direction is added by the addition of 导 (the conductivity in the γ direction refers to the conductivity parallel to the surface of the film, the same applies hereinafter). Due to the limitations of the percolation theory, a large amount of conductive filler (usually having a weight percentage of more than 30%) is required in order to achieve the lamp = conductivity. This will greatly reduce the light transmittance of the film ^ (4) reveals this method; the other is to add the conductivity of the organic salt in the direction of 2'. The disadvantage of this method is that the antistatic property is >.., And it is easy to cause contamination of components, and such a method is disclosed in US Pat. No. 5,064,064. ~ For pressure-sensitive cover tapes, the use of conductive polymers or the addition of anti-electrical agents to obtain the antistatic effect of the coating, commonly used conductive polymers include, polyaniline, etc., commonly used antistatic agents include the season Money salt, aliphatic = threshold energy is easy to exist for component contamination, the environment is wet 4 4 74 ° Another method is through the metal layer on the base film to 'normal metal bond layer can be plated by evaporation贱 =: Manufacture, U.S. Patent No. 6,278, 2 discloses this method. The metal layer and the base film _ the nature is usually poor 'if there is no domain coating, the gods and free metal particles will cause component contamination problems: s, s, US5441809A reveals a kind of transparent static dissipation. Type 20 200850073 The cover (four) biaxially stretched base film layer, vacuum metal forged film conductive layer:: ', ' sealant layer composition, the heat sealant layer is added with anti-(four) balls and conductive 埴:. The invention better solves the problem that the film is sensitive to humidity, and the gold is protected, the cover tape of the invention is poor in transparency, and it is difficult to observe components through it, and σ, 亚和/, The thermosensitive adhesive layer may cause the components to be contaminated. f 10 15 20 SUMMARY OF THE INVENTION The first sadness of the present invention is to provide an antistatic film, which is particularly suitable for use in a cover tape, the film comprising: a base film; = layer 'which is located in the base film Providing electrical conductivity on the surface; two layers/layers, which are located on the surface of the conductive layer opposite to the base film to protect the base; the distal protective layer comprises particles of reduced conductivity of the polymer adult, wherein the core layer is inhibited The thickness of the thick b J knife puller is larger than that of the guarantee! The invention provides an article comprising the above two "antistatic film. The article includes, but is not limited to, a cover tape, a bag π #载▼, and optionally a system with a package, etc. - It is not intended to describe the per-personal solution disclosed in the present invention. Embodiments of the present invention will be described below with reference to the accompanying drawings and detailed description. /, - also cattle [Embodiment] In the present invention, unless otherwise specified The term "particles used to suppress the decrease in the surface conductivity of the film 25 200850073, the surface conductivity of the county buckle is reduced: sound: the antistatic film caused by the low protective layer, conductive or non-conductive: =:, the particle can be Inorganic or organic ♦ private, metallic or non-metallic. 5 15 The fog is supplied with an antistatic film. The film can be a transparent, low-electric or static-dissipative film that can be used to prepare several electrostatic bags and other antistatic products. The film of the moon comprises a base film, a conductive layer and a protective layer. Material i:,: Use any material that is relatively transparent and has good mechanical properties. The materials used include, but are not limited to, polyacrylate, cellophane, nylon, and poly Dengcheng. The cover tape shown in Figure 2 is preferably: °, ★ propylene (B〇p) and other easily tearable plastic film. The thickness of the base film is not particularly limited and is used, and the soil is transparent. The base film which is used for the preparation of 盍π is preferably such that the electric layer is located on one surface of the base film (the other side of the base film is optionally = shape) ") is a kind of material that provides conductivity f, which may be a metal or a metal oxide layer. Commonly used metals include nickel, yttrium, and yttrium; commonly used metal oxides include oxidized alkaloids, and tin oxides are replaced. , magnesium oxide, etc., the layer can be passed through the evaporation clock or magnetron reduction or other methods. The conductive polymer (such as Bayer's B. η») is oxidized with carbon black, carbon nanotubes, metal powder, metal. a conductive material filled with conductive particles, such a conductive layer can be formed by coating these materials on a base film. The surface resistivity of the conductive layer should not be higher than χ 欧姆 。 ohm ohm ohm ohm ohm ohm ohm ohm ohm In ohms/square, the best is not higher than ΐχΐ〇5 ohms M/square 0 20 200850073 The protective layer is located on the conductive layer and the opposite side of the wire to provide mechanical protection for the easy conductive layer. The protective layer does not reduce the conductivity of the cover tape too much to ensure that the entire structure remains The antistatic property required. Therefore, the protective layer contains particles 5 for suppressing a decrease in conductivity of the surface of the film (sometimes referred to simply as ''particles in the present invention). The thickness of the protective layer is preferably not More than 12 micrometers is more preferably not more than the working rice, more preferably not more than $ U meters, still more preferably not more than 2 micrometers, most preferably 〇·2_ι micrometers. The above is used to suppress the decrease in conductivity of the membrane surface. The shape and structure of the particles are not particularly limited and may be finely knives, flakes, dendrites, filaments, preferably in the form of particles. 1) The particles for suppressing the decrease in conductivity of the surface of the film are preferably electrically conductive or Semi-conductive % particles, including · metal particles, carbon black, carbon nanotubes, conductive or semi-conductive polymer particles, polymer particles coated with conductive or semi-conductive materials, metal oxides (eg, titanium dioxide, oxidized, etc.) particles And it a combination of various mixtures, and at least a portion of the particles have a particle size greater than the thickness of the layer 15 to facilitate formation of a conductive path from the metal layer to the x-axis direction of the coating surface (ie, perpendicular to the surface of the cover tape), At the same time, it can also act as a substitute for increasing the anti-adhesive particles (as shown in Fig. 3.) The protective layer further comprises a polymer film-forming polymer. There is no particular limitation on the kind and content of the polymer, such as polyurethane or epoxy. a polymer, an acrylic polymer, or a mixture thereof, etc. The average particle diameter of the particles added to the protective layer for suppressing the decrease in conductivity of the surface of the film is preferably 50 μm or less, more preferably 15 μm or less, and most preferably 10 microns or less. The particles for suppressing the decrease in conductivity of the surface of the film account for 30% or less by weight of the protective layer, more preferably 01 to 5%, most preferably 200850073, 0.3 in the case of a lower addition amount. To 2%. This is because the film maintains transparency and the film with lower haze b1 is better than K, and the particles in which the additive inhibits the electrocardiographic degradation of the film are more than one millionth - the particle size of the particles is larger than the film f'. More than one hundred thousandth of the particles have a particle size larger than the thickness to ensure the electrical conductivity of the direction, so that the antistatic film has static dissipative or conductive particles for suppressing the decrease of the surface conductivity of the film in the protective layer and optionally The mixed form of the polymer is not particularly limited, but it must be ensured to provide electrical conductivity in the Z direction. 'The antistatic film is provided with static electricity dissipation or conduction. 表面 Surface resistance of the transparent low-pollution antistatic film for the cover tape of the present invention The rate is preferably ohms/square. # When the conductivity requirement is high, the surface resistivity of the month is preferably less than 1χ1〇7 ohm/square. In addition to the conductive particles, a protective layer is added to the protective layer. The anti-allergic particles and the conductive filler may be one type of particles or different particles. It can be used as anti-drying particles including cerium dioxide, titanium dioxide, carbon black, metal powder and polymer microspheres. The average particle diameter of the anti-drilling particles is 0-15 microns, which accounts for the weight percentage of the protective layer. It is 〇_1〇%. Specific embodiments of the present invention are further described below with reference to the accompanying drawings. 20 Test methods: 1) Abrasion test··Testing instrument·· Taber Abraser 513〇 (Abrasion resistance testing machine), heart] manufactured by Industries. Using the CS-5 grinding wheel, the surface of the sample after a certain number of revolutions is measured. The ratio of the surface of the sample is higher than ΐχΐ〇13 ohm/square. If the surface resistivity is higher than ΐχΐ〇13 ohm/square, the sample π is considered to have failed at this number of revolutions. 2) Surface resistivity test: Test instrument: Trek 1 52 Φ iin t », 152 resistivity tester, manufactured by TREK, INC. 5 Test conforms to ESD Sll 1U Fan Huai, Nikki VII, Earth. ^ • ii铋 quasi-test method, measured under normal temperature and thirst conditions: ” Adjust the switch to the desired voltage position (10 volts or 100 volts) With the 152P-CR_CE_EX measuring probe continuously pressed on the surface of the film to be tested, at this time [(3) screen will show the measured surface resistivity. The surface resistivity unit is Euro 10 square. 3) Film thickness control: Coating thickness through weight gain Method measurement: cut a certain size of the film (area S), weigh (w〇), apply the coating and then weigh (W1), after the lack of pass

Overweight gain UW=Wl-W〇), sample area (s) and coating flat = density = 15 (D) Calculate coating thickness (T): Mountain X T = _〇A/rW0)

D*S 4) Aging test: 2〇 Put all the samples to be tested into the 95% humidity aging box, and set the surface resistivity of the test samples after one week, two weeks, three weeks and four weeks. The sample was placed in an oven at 60 ° C, and the surface resistivity of the test sample was measured after one week, β, two weeks, two weeks, and four weeks. 11 200850073 / Main · Unless otherwise specified, the concentrations used in the present invention are all percentage by weight. The particle size of cerium oxide is D50 particle size (D5 〇 is also called median particle size or median particle ^D50 is commonly used to indicate the average particle size of the powder), and the data is provided by the supplier. The particle size of 5 g of titanium oxide and niobium is the average particle size, and the data is measured by a scraper fineness meter. Ingredients: Two-component polyurethane (Bayer MaterialScience Trading (Shanghai) Co., Ltd., Shanghai, China) 10 Carbon Black (Nippon Paint (China) Co., Ltd., Shanghai, China) Titanium Dioxide (PPG Coating (Tianjin) Co., Ltd., Tianjin, China) Yttrium Oxide (Degussa (China) Investment Co., Ltd., Shanghai, China) Preparation Example: 15 50 μm thick BOPP film is metallized, the light transmittance is about 70%, and the surface electric conductivity is 1χ1〇3 ohm/ Between square and 1 ohm/square, the metallized side is coated with a polyurethane coating with a thickness between 0 and 3 microns. The polyurethane coating contains 3% to 3% of particles for suppressing the decrease in conductivity of the surface of the film. ^ 20 Embodiment 1: Fig. 1 is a schematic cross-sectional view showing a transparent low-pollution antistatic film 1 according to an embodiment of the present invention. The base film 2 is a biaxially stretched Β0 ΡΡ film (which may also be polypropylene, polyethylene, polycarbonate, cellophane, nylon, polyester 25, etc.), and has a conductive layer 3 on one side of the base film 2, which The conductive layer 3 is gold 12 200850073, and 卞w s3 is layer-protected with respect to the other side of the base film to the pure conductive layer 3, and the layer contains particles 5 'particle 5 with reduced conductivity on the surface of 卩 (4). Used to provide z: upward electrical conductivity. The film has good transparency, low stain and long-term antistatic properties. Embodiment 2: 10 15 20 Fig. 2 shows a cross-sectional schematic view of a cover tape 6 according to an embodiment of the present invention. The cover tape 6 comprises a base film 2, a conductive layer 3, a protective layer 4, a release agent layer 7, and a stripe = glue layer 8. The base film 2 is B〇pp_ which is biaxially stretched, and has a thickness of 2. On one side of the base film 2, there is a conductive layer 3, the conductive layer 3 is a metal: the conductive layer 3 has a protective layer 4 on the other side of the base film, and the protective layer 4 is used to protect the conductive layer. In the third layer, the protective layer is a coating of a polyammide containing particles 5 for suppressing the decrease in conductivity of the surface of the film, and the particles 5 are mainly used for providing electrical conductivity in the Z direction. The protective layer 4 also contains an anti-dry filler 9'. The anti-dry filler 9 and the particle 5 may be the same substance f (see Fig. 2 or different substances (see Fig. 2). A strip of adhesive layer 8 is applied on the outer surface of the conductive layer 3. The adhesive may be a pressure sensitive adhesive or a heat sensitive adhesive. The base film 2 is coated on the other side of the conductive layer 3. Shape agent 7. The tearing groove is in the direction of the strip of adhesive, and when the component is taken out, the cover tape can be torn along the tearing groove to take the component. 13 25 200850073 Example 3 ··· The cover tape 6 of the present invention can be used for a carrier tape/cover tape system 丨 bell for the element package. Figure 4 shows a perspective view of the carrier tape/cover tape system including the carrier tape 15 and the cover tape 6. 15 has a pair of long sides 16, one or more recesses Η. The element 5 member 18 can be placed in the recess 17. After the component 18 is placed in the carrier tape recess π, the cover tape 6 is passed through the long side of the carrier tape 16 With the load (4) and thus covering the recess Π. Λ 4 can load the component μ between the carrier tape 15 and the cover tape 6. In order to open the current 6, transfer 7 〇 件, 盍Will eventually be stripped from the carrier tape/cover tape system 14. As shown in Figure 4, the intermediate portion 13 of the cover tape 6 (between the two tear 10 slits 12) is peeled off, and the extension of the cover tape 6 is 19 After the intermediate portion 13 is peeled off, it continues to remain adhered to the carrier tape 15. After the intermediate portion of the cover tape is peeled off, it is wound into a roll of 2 turns and then discarded or reusable. Example 4: 15...50〇 The bismuth concentration of the two-component polyurethane solution is doped with 〇% by weight of titanium dioxide having an average particle diameter of 5 μm, and this uniform suspension is applied to the surface of the evaporating aluminum-plated biaxially oriented polypropylene film. The surface resistivity of the aluminized surface of the biaxially oriented polypropylene film of Forging is 1><1〇6 ohm/square. The coated film is placed in an oven at 100 ° C for 15 minutes so that the polyurethane is fully crosslinked. The baked polyurethane coating has a thickness between 0. 9 and 1.0 microns and a surface resistivity between ixiO^UxU and 8 ohms/square. This film is placed in 52. The aging chamber of 〇95% relative humidity is aged for one month, and the surface resistivity is attenuated to 丨χ1〇9 to 1Χ1012 ohm/square. This protective coating can be tested for wear resistance by 3 turns. 25 Example 5: 14 200850073 ... 50% concentration of two-component polyurethane s solution containing 03% by weight of carbon black with an average particle size of 5 microns and 〇6~% of 1)5〇 particle size 6 micron of silica dioxide, after stirring evenly, the suspension was applied to the mineral inscription of the biaxially oriented polypropylene film of the evaporated ore. This evaporating fine biaxially stretched polypropylene film 5, the surface resistivity of the difficult surface is 1 χ 1 () 6 ohm / square. The coated film passes through a 6-meter-long 1 〇 oven at a speed of ίο m (the rc oven is used to make the polyurethane a full parent. The thickness of the polyurethane coating after baking is between 1 〇 and 12 μm, and the surface resistivity is 1×107. Between 1 χ 109 ohms/square. This film is placed in a aging oven with a 95% relative humidity of aging. The surface resistivity is attenuated to ίο 1x107 to 1 χΐ〇 10 ohms/square. This protective coating can pass 300 rpm. Abrasion test. Example 6: ~ 50% concentration of two-component polyurethane solution was mixed with wt6wt% 〇5〇 granules with a diameter of 6 microns of cerium oxide. After stirring, the suspension was applied to evaporation. The surface of the biaxially oriented polypropylene film of Qian Shao. The surface resistivity of the aluminized surface of the biaxially oriented polypropylene film of this evaporation mine is 1><1〇6 ohm/square. At a speed of 1 metre per minute, it passes through a box of 6 meters long and is used for the purpose of fully cross-linking the polyurethane. The baked polyurethane coating # degrees between 1 〇 20 and 1, 2 μm, The surface resistivity is between 1X107 and lxio10 ohms/square. This ruthenium film is placed into an aging of 52 c 95% relative humidity. After aging for one month, the surface resistivity is attenuated to lx107 to lxl〇u ohms/square. This protective coating can pass the 300 rpm abrasion test. 25 Example 7 ·· 15 200850073 Micro-:: Concentrated / Polyurethane Solution The average particle size of the 〇wt% is 10', and the uniform suspension is applied to the biaxial stretching of the evaporating mineral = the rib surface of the olefin film. The surface resistivity of the thin, and = mineral inscription is lxlG6 ohms/square. The coated film is passed through a 6-meter-long i (9) C. oven in a 6-meter-long i (9) C oven for the polyurethane coating. The thickness is between 2.2 μm and the surface resistivity is between lxl〇, Jlxl〇9 ohm/square. The film is placed in an aging box with a 95% relative humidity for one month, and the surface resistivity is attenuated to 10 ixwmxu)1. Ohm/square. This protective coating can pass the 5 rpm abrasion test. Example 8: 50% concentration of two-component polyamine s solution in which a G.6wt_average particle size of 5 μm is impregnated and 2. 〇wt% of D5〇6 nm has a diameter of 6 μm. Shi Xi, after the sandalwood is evenly mixed, the suspension is applied to the mineral inscription of the biaxially oriented polypropylene film of Evaporation. The surface resistivity of the aluminized surface of the biaxially stretched polypropylene film of this evaporating mineral is 1 χ 1 〇 δ ohm/square. The coated film was passed at a speed of 10 meters per minute through a length of 6 meters (the rc box was used for the polyurethane to fully crosslink. The thickness of the baked polyurethane coating was between 0.9 and 1.2 microns, and the table = 20 resistance The ratio is between ιχ1〇7 and ΐχ1〇9 ohm/square. The film is aged in a aging tank of 52〇c 95% relative humidity for one month, and the surface resistivity is attenuated to ohm/square. This protective coating can pass 300 rpm. Abrasion resistance test. As described above, the antistatic film of the present invention and its articles, such as a cover tape, have many advantages of 16 200850073 2. For example, the cover tape of the present invention does not have a decrease in low humidity performance. Therefore, it can be conductive: the conductive path formed by the conductive particles is in the protective layer = the layer is on both sides, the middle part of the cover tape has no adhesive layer, and there is no small two.

: The electrostatic agent' is therefore not easy to cause contamination of the components, regardless of whether the 4 adhesive layer or the fluorene phosphine from this _, ρ i sensitive I 〃, 彡 as the (four) layer ' does not affect the peeling stability of the present invention The conductive protective layer can be made very thin, and ==, small and low in content, so that the film can maintain a good permeability of more than 4%, usually more than 5%, and the haze can be less than 30%, usually low. At 15%). Therefore, the cover tape made of the film of the present invention has excellent comprehensive performance, which not only meets optical and electrical performance requirements, but also has insensitivity to twist, peeling force, cleanness, no pollution, and easy quality control. The present invention has been described in certain embodiments and examples. It will be understood by those skilled in the art that the present invention extends from the specifically disclosed κ addition scheme to other alternative embodiments and/or The use of the invention and the improvements that are readily apparent and equivalent within $. In addition, the present invention is not limited by the specific disclosure of the preferred embodiments herein. Rather, the Applicant intends that the scope of the present invention is limited only by the scope of the appended claims, and that variations of the methods and materials disclosed herein will be apparent to those skilled in the art. The above-described embodiments are merely examples for the convenience of the description, and the scope of the claims is intended to be limited to the above-described embodiments. 17 200850073

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view of an antistatic film of the present invention. Figure 2 is intended as a product of the present invention. Cross-section of an embodiment of the entrainment of the entrainment of the embodiment of the invention. Fig. 3 is another schematic view of the article of the present invention. Main component symbol description strip adhesive layer 8 carrier tape 15 anti-adhesive filler 9 long side 16 tear groove 1 〇 recess 17 tear groove 11 component 18 tear groove 12 extension 19 intermediate portion 13 roll 20 Carrier/cover tape system 14

Antistatic film 1 Base film 2 Conductive layer 3 Protective layer 4 Particle 5 Cover tape 6 Release agent layer 7 18

Claims (1)

200850073 X. Applying for a patent anti-static film, including 15 layers of J layer 'on a surface of the base to provide conductivity, · and Mo Yuzhan 4 # located in the conductive layer and the base The surface of the pair is protected by a protective layer comprising a polymer film-forming polymer and a particle for suppressing the film surface. The particle diameter of at least part of the particle is larger than the thickness of the layer itself. 2. The antistatic film resistivity as described in item bis of the patent application is lxlO4 to 1χ10" ohms/square. ^3· The thickness of the antistatic film protective layer as described in the scope of the patent application is not more than 12 μm. A 4. The thickness of the antistatic film protective layer as described in claim 3 is not more than 5 μm. 5. The thickness of the antistatic film protective layer as described in claim 4 is not more than 2 μm. 6. The thickness of the antistatic film protective layer as described in claim 5 is 2-1·2-1 μm. 7. The surface of the antistatic film according to claim 1, wherein the surface of the antistatic film has a particle size greater than a film thickness, wherein the number of the particles is greater than the total thickness of the particles. More than one point. 8. The antistatic film according to claim 7, wherein the number of particles having a particle diameter larger than a film thickness accounts for more than one part per 100,000 based on the total number of the particles. The antistatic film of claim 1, wherein the particles are selected from the group consisting of metal particles, carbon black, carbon nanotubes, conductive or semiconductive polymer particles, coated with a conductive or semiconductive material. A combination of polymer particles, metal oxide particles, and various mixtures thereof. The antistatic film according to claim 1, wherein the content of the particles for suppressing the decrease in conductivity of the surface of the film is 30 wt% or less based on the total weight of the protective layer. The antistatic film according to claim 1, wherein the content of the particles for suppressing the decrease in conductivity of the surface of the film is 0.1 to 5 wt% based on the total weight of the protective layer. The antistatic film according to the invention of claim 5, wherein the content of the particles for suppressing the decrease in conductivity of the surface of the film is from 0.3 to 2 wt% based on the total weight of the edge layer. . The antistatic film of claim 1, wherein the use of the anti-static film comprises particles which increase the anti-secret property, and the anti-(four) particles and the particles whose surface conductivity is decreased are Particles can also lick different particles. The antistatic film of the first aspect of the invention, wherein the conductive layer is a conductive layer: the antistatic film according to item 1, wherein the towel is described in the article Antistatic film, wherein the 20 200850073 and U:: select "black, carbon nanotubes, metal powder, metal oxide, 聚合物 粒子 5 粒子 聚合物 聚合物 聚合物 聚合物 is is is is is is is is is is is is is 如 如 如 如The antistatic film, wherein the surface resistivity of the electricity source 3 is not higher than 1 x 1 〇 1 G ohm / square. The antistatic film of the above-mentioned Item No. 18, wherein the conductive layer The surface resistivity is not higher than 1 < 1 〇 7 ohms/square. The antistatic film of claim 19, wherein the conductive layer has a surface resistivity of not more than 1 < 1 〇 5 ohm/square. The antistatic film of claim 2, wherein the film-forming polymer is selected from the group consisting of polyurethanes, epoxy resins, acrylic polymers, and mixtures thereof. The antistatic film according to claim 2, wherein the particles for suppressing the decrease in conductivity of the surface of the film have an average particle diameter of 5 μm or less. The antistatic film according to claim 22, wherein the particles for suppressing the decrease in conductivity of the surface of the film have an average particle diameter of 15 μm or less. The antistatic film according to claim 23, wherein the particles for suppressing the decrease in conductivity of the surface of the film have an average particle diameter of 1 μm or less. An article comprising an antistatic film according to any one of claims 1 to 24. 26. The article of claim 25, wherein the article is a cover tape. 21 200850073 includes: 27. The article of claim 26, wherein the structure further comprises an adhesive layer, which is respectively disposed on a portion adjacent to the opposite long side opposite to the conductive layer; a slit groove' which is disposed along the side of the protective layer which is directly disposed in the direction of the long side of the anti-static amine "smell and material"; and a release agent layer which is disposed on the conductive layer The surface of the base film is opposite. The layer as described in claim 27 is a pressure-sensitive adhesive layer. The product, wherein the adhesive is further applicable to any of the patent scopes 26 to 28. The article 29, comprising the carrier tape. The package body as claimed in claim 29, further comprising a tape