200841987 九、發明說明： 【發明所屬之技術領域】 、本發明關於-種平板研磨裝置，其用於研磨或清洗例如 液晶顯不器的玻璃基板或印刷基板等平坦的平板表面。 【先前技術】 、習知：該種平板研磨裝置’有如下構造的裝置：例如將 進订連續或間歇性移動的研磨台按a在平板表面，使平板 轉動而對平板表面進行研磨戎糸 _ 或為了去除附著在平板表面 的異物及污垢而加以清洗。 (專利文獻1) (專利文獻2) •【發明内容】 曰本專利特開平8-47847號公報 日本專利特開平11-19859號公報 ，（發明所欲解決之問題） 然而二上述習知構造是一種研磨加工平板一側表面的社 ::題通$具有在研磨或清洗速度的提升會受到一定限制的。 (解決問題之手段） ^鑑於上述課題，本發明的主要目 研磨裴置，本發明中，由往種千板 明專利範圍第1項之發明特徽扁 於，具有··平板搬運機構 、 下一對的研磨機構，以平柘為 及上 府泄+丄 十板為界’利用上下配置的一斟观 該平板之兩面·而上f: 兩面，同時研磨或清洗 向與平板的搬運方向交叉# t + #、、， 卞唧逛f朝 又又的方向傳送的帶傳送機構、以及 312XP/發明說明書(補件)/96-09/96119676 5 200841987 用於將該研磨帶的傳送路徑途巾㈣於該平板的帶按壓 ，構所構成；該-對的各研磨機構+的該帶傳送機構和該 帶按壓機構形成為互相分別獨立的構造，並設置有異: .後作動機構，其使該一對的上下各帶按屢機構在該研磨帶 •的傳送方向上、即與上述平板的搬運方向交叉的方向上作 相互逆向的水平往復運動。 另外’申請專利範圍帛2項之發明特徵在於，上述的異 鲁向往復作動機構由曲柄機構構成，又申請專利範圍第3項 之發明特徵在於’設置有防鬆機構，其用於消除上述各帶 傳送機構和上述帶按壓機構間所產生的上述研磨帶的鬆 弛’又申請專利範圍第4項之發明特徵在於，上述各帶按 壓，構由可將上述研磨帶按壓至上述平板的襯整構件以 及氣缸機構構成，又申請專利範圍第5項之發明特徵在 於，上述帶傳送機構由可間斷或連續地傳送上述研磨 構造所構成。 _ (發明效果） 本發明如上所述，在申請專利範圍第丨項之發明中，透 過平板搬運機構連續搬運平板，並以平板為界，利用上下 配置的上下一對研磨機構之一對研磨帶來夾持平板的表 面和背面之兩面，可同時研磨和清洗該平板的兩面，該一 .對的各研磨機構由可將研磨帶朝向與平板的搬運方向i 叉的方向傳送的帶傳送機構、以及用於將研磨帶的傳送路 徑途中按壓於平板的帶按壓機構所構成，該一對的各研磨 機構中的帶傳送機構和帶按壓機構形成為互相分別獨立“ 312XP/發明說明書(補件)/96_〇9/96119676 6 200841987 的結構，並設置有異向往復作動機構，其使一對的上下各 帶按壓機構在研磨帶的傳送方向上、即與上述平板的搬運 方向父叉的方向上做相互逆向的水平往復運動，由此，在 •透過f按壓機構在平板的表面和背面之兩面均按壓有研 _磨，的炀況下，帶按壓機構透過異向往復作動機構在與上 述平板的搬運方向交又的方向上作相互逆向的水平往復 運動，因此，可透過由朝向平板的搬運方向的連續搬運、 _研磨帶的按壓、以及在與平板的搬運方向交叉之方向的研 磨帶的水平往復運動所合成的複合運動，利用上下研磨帶 可同時研磨和清洗平板的表面和背面，此時，由於一對的 各研磨機構中的帶傳送機構和帶按壓機構形成為互相分 別獨立的構造，與帶傳送機構和帶按壓機構構成一體的構 造相比，可減弱作為帶按壓機構的往復運動部分的慣性 力，可使帶按壓機構的水平往復運動的往復運動速度更加 同速化，由此，可較好地進行平板的研磨或清洗。 • 另外，在申請專利範圍第2項之發明中，由於上述的異 向往復作動機構由曲柄機構構成，因而可實現結構的簡單 化以及使帶按壓機構之往復運動速度更進一步提高；此 外，在申請專利範圍第3項之發明中，由於設置有防鬆機 •構，用於消除上述各帶傳送機構和上述帶按壓機構間所產 •生的上述研磨帶的鬆弛，因而可以使帶傳送機構和帶按壓 2構形成為互相分別獨立的構造、以及在帶傳送機構為固 定狀態時消除帶按壓機構被異向往復作動機構作相互逆 向的水平往復運動而產生的帶傳送機構和帶按壓機構間 312ΧΡ/發明說明書(補件)/96-09/96119676 η 200841987 =研磨帶的鬆弛’可以順利地進行研磨帶的傳送，又，在 =專利範圍第4項之發明中，由於上述各帶按壓機構由 播^返研磨帶按麗至上述平板的襯墊構件以及氣紅機 ^構成’因此可使帶按壓機構構造簡單化，同時也可較 ΓηΪ行絲力的㈣，此外，在申請專利範圍第5項之 研麻· &於上述f傳送機構由可間斷或連續地傳送上述 、、主、先ΙΓ籌造所構成，因此不僅可以將該研磨帶在研磨或 η Π連續地向傳送方向傳送，也可以在研磨或清 既定Hi t止傳送’在研磨或清洗達到既定次數或經過 卜守曰’後傳送研磨帶，可提高研磨帶的經濟性。 【實施方式】 符的實施形態例’其構成為:元件 個搬運穿轴3 該情況下，在機台2橫向設置多 ί ·’同時在搬運方向Η的入口侧及出口側 it 二的對設滚軸4、4,透過該等多個搬運 為、夜曰顧-和對设滾轴4、4的轉動，可以連續地搬運作 為液日日頌不器的玻璃基板之平板f。 板5是上下一對的研磨機構’其構造為以平 平板ί表面和：上下配置的一對研磨帶T、T來夾持上述 H表面和，面之兩面Wi、fi’同時研磨平板¥的兩面 對的各研磨機構5'5由可將上述研磨帶 朝向，、平板W的搬運方向η六受沾士人 地傳送的帶fi 間歇或連續 ^機構6、6、以及用於將該研磨帶τ、τ的200841987 IX. Description of the Invention: [Technical Field] The present invention relates to a flat plate polishing apparatus for polishing or cleaning a flat plate surface such as a glass substrate or a printed substrate of a liquid crystal display. [Prior Art] Conventionally, the flat-plate grinding apparatus 'has a device having the following configuration: for example, a grinding table that continuously or intermittently moves a sheet is pressed on the surface of the flat plate, and the flat plate is rotated to grind the surface of the flat plate. Or to remove foreign matter and dirt adhering to the surface of the flat plate. (Patent Document 1) (Patent Document 2) [Patent Document 2] Japanese Patent Laid-Open No. Hei 11-19859 (Patent No. 11-19859) A kind of grinding surface of one side of a flat plate: There is a limit to the increase in the speed of grinding or cleaning. (Means for Solving the Problem) In view of the above-mentioned problems, the main purpose of the present invention is the polishing apparatus according to the first aspect of the invention. A pair of grinding mechanisms, with the flat 柘 及 上 上 泄 丄 丄 丄 ' ' ' ' 利用 利用 利用 利用 利用 利用 利用 利用 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 上下 上下 上下#t + #,,, The belt transport mechanism that transmits the direction of the f, and the 312XP/invention manual (supplement)/96-09/96119676 5 200841987 (4) constituting the belt of the flat plate; the belt conveying mechanism of the pair of grinding mechanisms + and the belt pressing mechanism are formed separately from each other, and are provided with different: a rear operating mechanism The upper and lower belts of the pair are horizontally reciprocated in a direction opposite to each other in the conveying direction of the polishing belt, that is, in a direction intersecting the conveying direction of the flat plate. In addition, the invention of the invention patent scope is characterized in that the above-mentioned hetero-reciprocating reciprocating mechanism is constituted by a crank mechanism, and the invention of claim 3 is characterized in that 'the anti-loose mechanism is provided, which is used for eliminating the above-mentioned The invention of the fourth aspect of the invention is characterized in that the belt is pressed, and the belt is pressed to the lining member capable of pressing the polishing belt to the flat plate. And a cylinder mechanism configuration according to claim 5, wherein the belt conveying mechanism is configured to intermittently or continuously convey the polishing structure. (Effect of the Invention) As described above, in the invention of the third aspect of the invention, the flat plate is continuously conveyed by the flat plate transporting mechanism, and the one of the upper and lower pair of grinding mechanisms arranged one above the other is used as the boundary plate. To clamp both sides of the surface and the back surface of the flat plate, both sides of the flat plate can be simultaneously polished and cleaned, and the respective grinding mechanism of the pair is conveyed by a belt conveying mechanism capable of conveying the polishing belt toward the conveying direction i of the flat plate. And a belt pressing mechanism for pressing the conveying path of the polishing belt to the flat plate in the middle, wherein the belt conveying mechanism and the belt pressing mechanism in each of the pair of polishing mechanisms are formed independently of each other 312XP/Invention Manual (Supplement) /96_〇9/96119676 6 200841987 The structure is provided with an opposite-direction reciprocating mechanism for causing a pair of upper and lower belt pressing mechanisms to be in the conveying direction of the polishing belt, that is, the direction of the parent to the fork in the conveying direction of the flat plate The horizontal reciprocating motion is reversed in the opposite direction, whereby, under the condition that the grinding and pressing mechanism is pressed on both the surface and the back surface of the flat plate by the f pressing mechanism, The belt pressing mechanism transmits the reverse reciprocating motion in a direction opposite to the conveyance direction of the flat plate through the counter-reciprocating reciprocating mechanism, so that it can be continuously conveyed by the conveyance direction toward the flat plate, the pressing of the polishing tape, and The composite movement synthesized by the horizontal reciprocating movement of the polishing belt in the direction intersecting the conveying direction of the flat plate can simultaneously grind and clean the surface and the back surface of the flat plate by the upper and lower grinding belts, at this time, due to the pair of the respective polishing mechanisms The conveying mechanism and the belt pressing mechanism are formed separately from each other, and the inertial force of the reciprocating portion as the belt pressing mechanism can be weakened as compared with the configuration in which the belt conveying mechanism and the belt pressing mechanism are integrated, and the level of the belt pressing mechanism can be made. The reciprocating speed of the reciprocating motion is more speeded, whereby the flat plate can be polished or cleaned better. • In addition, in the invention of claim 2, since the above-described counter-reciprocating actuating mechanism is composed of a crank mechanism The structure is simplified, and the reciprocating speed of the belt pressing mechanism is further improved. Further, in the invention of claim 3, the anti-loosening mechanism is provided to eliminate the slack of the polishing tape produced between the belt conveying mechanism and the belt pressing mechanism. Therefore, the belt conveying mechanism and the belt pressing 2 can be configured to be independent of each other, and when the belt conveying mechanism is in a fixed state, the belt conveying mechanism can be eliminated by the reciprocating motion of the counter-reciprocating mechanism in the opposite direction. 312ΧΡ/invention specification (supplement)/96-09/96119676 η 200841987=relaxation of the abrasive belt can smoothly carry out the transfer of the abrasive belt, and in the invention of the fourth aspect of the patent scope, Since each of the above-mentioned belt pressing mechanisms is formed by the backing abrasive belt to the cushion member of the flat plate and the air red machine, the structure of the belt pressing mechanism can be simplified, and at the same time, the yarn force can be further reduced (4). In the fifth paragraph of the patent application scope, the research and development of the above-mentioned f-transfer mechanism consists of intermittently or continuously transmitting the above-mentioned, main, and first-handed products, so Only the polishing belt can be continuously conveyed in the conveying direction during grinding or η ,, or the polishing belt can be conveyed after grinding or clearing the predetermined Hit transmission 'after grinding or cleaning to a predetermined number of times or after passing through the 曰 曰 ' The economics of the abrasive belt. [Embodiment] An embodiment of the present invention is characterized in that: the component is conveyed through the shaft 3, and in the case where the machine 2 is disposed laterally in the lateral direction, the inlet side and the outlet side of the machine direction are disposed at the same time. The rollers 4 and 4 can continuously convey the flat plate f of the glass substrate which is the liquid day and the day by the plurality of conveyances, and the rotation of the rollers 4 and 4. The plate 5 is a pair of upper and lower grinding mechanisms' configured to sandwich the H surface with a flat plate ί surface and a pair of polishing tapes T and T arranged up and down, and both sides of the surface Wi, fi' simultaneously grind the flat plate Each of the two facing grinding mechanisms 5'5 is provided with a belt intermittent or continuous mechanism 6, 6 for directing the polishing belt toward the conveyance direction η of the flat plate W, and for the grinding With τ, τ
3l2^/mmmmmm/9e^〇9/96n9676 Q Ο 200841987 傳廷路偟途中按壓於平板w的帶按壓 且該一對的各研磨機構5、5 , 7所構成， 機槿… 的帶傳送機構6和帶按壓 =形成互相分別獨立的結構，並設置有異 機構8，其使一對的卜丁夂册 作動 τ…古：按壓機構7、7在研磨帶T、 專U向K上、即與上述平板w的搬運方向Μ 方向上進行相互逆向的水平往復運動。 、 於此ί月况下’在上述機台2的上下位置 構6+在機台2安裝有安裝台9,在安裝 各帶傳送機構的6、6的研磨帶 '_、用於將 於平板w的帶按壓機構7、7 、$路徑途中按壓 枝構7 7與帶傳送機構6、6 4系分別獨 立配置。 上述各帶傳送機構6之構成為：在機台2的上下位 置安裝有安裝構件6a、6a，在安裝構件6a、6&上安穿有 ==和纏繞捲轴其中’繞出_安裝有 二二Λ _捲軸6e用於捲起從安裝於繞出捲 軸6b的反捲所繞出的研磨帶τ，而繞出捲轴处透過後拉 力用馬達6d繞出轉動，纏繞捲軸6e透過纏繞用馬達“ 纏繞轉動，並透過多個導引轉軸6g將研磨帶τ、τ間歇或 連續地朝向與平板W的搬運方向Η交叉的方向傳送。 此：’上述帶按壓機構7、7和上述異向往復作動機構 8之構造為m兄下，在上述安裝台9，形成平板w 可通過的開π通路部9a，以㈣口通路部“為界，在安 裝台9的上下位置分別獨立配置水平往復台8a、8a，該 等透過直線軸承部8b、8b可自由水平往復運動，而在該 312XP/發明說明書(補件)/96-09/96119676 9 200841987 自由上過導引軸制°軸承部7(^配置有可 平板塾構件？a、7a，在概塾構件心〜的 按壓面？d、7d I對研磨帶了的傳送路徑途中進行按壓的 的橡膠等彈性材料，將概熱播17復有可自由更換 按壓於平板^♦面^塾構件7a、？W按壓面？d、7d 構7e的才曰7f ^月面之兩面Wl、Wl，或連接氣缸機 、、、達8c，同時橫向設置上下一 m往復動作用馬達8。和驅動軸如，之動轴 ==環狀帶的帶傳動機構8e，在驅動轴心： 的：句^ Μ : Μ ’亚在曲柄盤8f、8f的適當偏心位置 尸广和1述水平往復台8&、之間分別樞設有連接 杯8g、8g，且曲柄盤^8!的半徑上和連接桿8g、8g 之間的樞接位置形成180度的相位差連接，然後， 述異向往復作動機構8，其透過水平往復台化、連接桿 ^及曲柄㈣形成曲柄機構R、R。透過由該曲柄機構 所構成的異向往復作動機構8,使一對的上下各 愿機構7、7朝向研磨帶τ的傳送方向κ即與上述平板讲 的搬運方向Η交叉的方向逆向作水平往復運動Q、㈧ m 元件符號10是防鬆機構，其設於帶傳送機構6和帶 屋機構7之間，並在研磨帶τ的傳送路徑的繞出侧和缠繞 側分別設置-對共計4組，在上述安裝構件&上透過支凡 軸10a樞接有可自由搖動的控制桿1〇b，在控制桿⑽ 端部安裝有P方鬆滾轴l〇c’ Θ時在控制桿m和安裝構 312XP/發明說明書(補件)/%-09/96119676 ]〇 200841987 之間裝設彈簧1Gd，這樣，即構成帶傳送機構化 機構7各自獨立的構造；當帶傳送機構6處於固定 狀^ ’帶按壓機構7、7透過異向往復作動機構8進行 =的水平往復運動Q、Q，藉此產生㈣傳送機構6和 構7之間的研磨帶τ的鬆弛’則透過彈簧刚的 弹黃力和研磨帶T的張力所控制的控制桿⑽的搖動而消 〇 ❿另外，上述研磨帶T，可以在具有柔軟性的聚合物薄膜、 紙、、布、金屬膜、硫化纖維、不織基材、以及由該等組合 構成的基材的表面，具有將溶融氧化銘、熱處理氧化銘口、 陶瓷氧化銘、碳化石夕、鍅銘砂（aluminazirconia)、石榴 孟剛石、立方氮化硼矽等所組成的砂粒透過酚樹脂、 胺基塑膠樹脂、胺基甲酸乙醋樹脂、環氧樹脂、丙婦酸酉旨 樹脂、丙烯酸酯化異三聚氰酸酯樹脂、尿素_甲醛樹脂、 異三聚氰酸酯樹脂、丙烯酸酯化胺基曱酸乙酯樹脂、丙烯 ❿酸酯化環氧樹脂等的結合劑結合的結構，並從該等中選擇 適用於研磨或清洗的加工方法的材料來使用。 、，該實施形態例為上述構成，由平板搬運機構i連續搬運 平板W，當未圖示的感測器檢測出平板w之進入後，以平 板W為界，利用上下配置的上下一對研磨機構5、5 一 ，對研磨帶T、T來夾持平板W表面和背面之兩面，可同時 研磨或清洗平板W的兩面，當未圖示的感測器檢測出平板 w退出後，上下一對的研磨機構5、5的一對研磨帶τ、τ 之夾持被解除。該一對各研磨機構5、5由帶傳送機構6、 312Χρ/發明說明書(補件)/96-09/96119676 11 200841987 6和帶按壓機構7、7椹+ ,,, 研磨帶冓成，其中，帶傳送機構6、6可將 研磨▼ T、T朝向與平板^ 』將 帶按壓機構7、7用於將研磨帶^^乂又的方向傳送， 平板f。該一對的夂 的傳迗路徑途中按壓 和帶按懲機構7、7V::f5、5中的帶傳送機構6、6 往復作動 研磨帶T、T的傳送、㈣上下各帶按壓修 向Η交叉的方你。 即與上述平板¥的搬運方 互逆向的水平往復勒。透過帶按 W 7將研磨贡τ、τ按壓於 :面的狀態下，帶按壓機構7表里面向、:： 相逆向水平往ϋ/ί ^交叉的方向作互 …主设運動。因此，如圖5所示，可透過由朝& 的搬運方向Η的連續搬運、研磨帶τ、τ的按壓向 :主板W的搬運方向η交叉方向的研磨帶τ的水平 设，動Q、Q所合成的複合運動，利用上下研磨帶τ、τ 可同時研磨或清洗平板w的表面和背面，此時，由於 的各研磨機構5、5中的帶傳送機構6、6和帶按壓機構7、 =成互相分別獨立的構造’所以與帶傳送機構6、6和 ^按[機構7、7構成一體的構造相比，可減弱作為帶按 塾機構7、7的往復運動部分的慣性力，可使帶按壓機構 7的水平往復運動q、q的往復運動速度更加高速化， 由此可杈好地進行平板w的研磨或清洗。 由於上述異向往復作動機構8由曲柄機構R、R構成， 因而可實現結構的簡單化以及使帶按塵機構7、7之往復 312XP/發明說明書(補件)/9649/96119676 \2 200841987 運動速度更進一步提高，此外，於該情況時，由於設置有 防fc機構1G，其用於消除上述各帶傳送機構6上述 =機構W間所產生的上述研磨帶T、TW，因 贡傳迗機構6和帶按壓機構7可形成互相分別獨立的結 構夭以及4除▼傳送機構6為固定狀態時帶按麼機構7、 7透過異向往復作動機才冓8作相互逆向的水平往復運動 Q、？而產生的帶傳送機構6和帶按壓機構7間的研磨帶τ 的鬆弛’亦可以順利地進行研磨帶τ、τ的傳送，此外， 由於上述各帶按壓機構7、7由可將上述研磨帶τ、τ按壓 至上述平板w的襯塾構件7a以及氣缸機構7e所組成，因 此:使帶按壓機構7、7結構簡單化，同時也可較容易進 行按壓力的調節，此外’由於上述帶傳送機構6、6由可 間斷地或連續地傳送上述研磨帶τ、τ的構造所構成，因 此不僅可以將該研磨帶？在研磨或清洗的過程中連續地 向傳送方向K傳送’亦可以在研磨或清洗的過程中停止傳 辽在研磨或清洗到達既定次數或經過既定時間後傳送研 磨帶T ’可提高研磨帶τ的經濟性。 另外，本發明不侷限於上述實施例，例如可適當的改變 平板搬運機構1、帶傳送機構6、帶按壓機構7、以及異 向往復作動機構8的構造等。 ' 此外，在上述實施形態例中，是所謂的乾式的研磨或清 洗，但亦可在研磨或清洗的領域中採用 濕式結構可供給水、聚體狀沙粒劑、錦心； 使用浸潤液體的研磨帶τ。 312XP/發明說明書(補件)/96-09/96119676 13 200841987 由上，可充分地實現所期望的目的。 【圖式簡單說明】 圖1是本發明實施形態例的前視圖。 圖2是本發明實施形態例的侧剖視圖。 圖3是本發明實施形態例的俯視圖。 圖4是本發明實施形態例的放大前視圖。 圖5是本發明實施形態例的說明俯視圖。3l2^/mmmmmm/9e^〇9/96n9676 Q Ο 200841987 The belt conveying mechanism 6 is composed of the pair of polishing mechanisms 5, 5, 7 pressed against the flat plate w and pressed by the belt w. And the belt pressing = forming a separate structure from each other, and is provided with a different mechanism 8, which makes the pair of buddings actuate τ... ancient: the pressing mechanisms 7, 7 are on the polishing belt T, the special U to K, that is, The horizontally reciprocating movement of the flat plate w in the direction of conveyance Μ is reversed. In this case, 'the upper and lower positions of the above-mentioned machine 2 are 6+, and the mounting table 9 is mounted on the machine table 2, and the grinding belts of the 6 and 6 belts of the respective belt conveying mechanisms are installed. The belt pressing mechanisms 7 and 7 of the w, the path in the middle of the pressing mechanism 7 7 and the belt conveying mechanisms 6 and 64 are disposed independently of each other. Each of the above-described belt transporting mechanisms 6 is configured such that the mounting members 6a and 6a are attached to the upper and lower positions of the machine table 2, and the mounting members 6a, 6& are mounted with == and the winding reel; The second _ reel 6e is used for winding up the grinding belt τ which is wound from the rewinding wound on the winding reel 6b, and is circulated by the pulling force motor 6d around the reel, and the winding reel 6e is passed through the winding motor. The winding is rotated, and the polishing belts τ and τ are intermittently or continuously conveyed in a direction intersecting with the conveying direction 平板 of the flat plate W through the plurality of guiding shafts 6g. This: 'The above-mentioned belt pressing mechanisms 7, 7 and the above-mentioned opposite direction reciprocating The structure of the actuating mechanism 8 is m, and the opening π passage portion 9a through which the flat plate w can pass is formed on the mounting table 9, and the horizontal reciprocating table is independently disposed at the upper and lower positions of the mounting table 9 by the (four) port passage portion. 8a, 8a, which can be freely horizontally reciprocated through the linear bearing portions 8b, 8b, and the guide shaft portion bearing portion 7 is freely passed in the 312XP/invention specification (supplement)/96-09/96119676 9 200841987 ( ^ Configured with a flat panel member? a, 7a, in the outline of the component The pressing surfaces ?d and 7d I are elastic materials such as rubber which are pressed in the middle of the transport path of the polishing belt, and the heat-suppressing material 17 is detachable and can be freely replaced and pressed against the flat surface of the flat surface member 7a and the pressing surface 7a. ?d, 7d structure 7e 曰 7f ^ two sides of the lunar surface Wl, Wl, or connected cylinder machine,, up to 8c, while horizontally set up the next m reciprocating motor 8. And the drive shaft, such as the moving axis = = belt drive mechanism 8e of the endless belt, in the drive shaft:: 句^ Μ : Μ 'Asia at the appropriate eccentric position of the crank disc 8f, 8f corpse and a horizontal reciprocating table 8 & There is a connecting cup 8g, 8g, and the pivotal position between the radius of the crank disk ^8! and the connecting rods 8g, 8g forms a phase difference connection of 180 degrees, and then, the reciprocating reciprocating mechanism 8 is transmitted through the horizontal reciprocating The table, the connecting rod ^ and the crank (4) form a crank mechanism R, R. Through the counter-reciprocating mechanism 8 formed by the crank mechanism, the pair of upper and lower respective moving mechanisms 7, 7 are directed toward the conveying direction τ of the grinding belt τ. That is, the horizontal reciprocating motion Q is reversed in the direction intersecting with the conveying direction 平板 of the above-mentioned flat plate. The m component symbol 10 is a lock mechanism provided between the tape transport mechanism 6 and the tape house mechanism 7, and is disposed on the winding side and the winding side of the transport path of the polishing tape τ, respectively, in a total of four groups. The mounting member & is pivotally connected to the freely rotatable lever 1b through the shaft 10a, and the P-spindle roller l〇c' 安装 is mounted on the end of the lever (10) at the lever m and the mounting mechanism 312XP /Inventive manual (supplement)/%-09/96119676] 〇200841987 The spring 1Gd is installed, so that the belt transport mechanism 7 is configured independently; when the belt transport mechanism 6 is in a fixed position The mechanisms 7, 7 perform horizontal reciprocating motions Q, Q through the counter-reciprocating reciprocating mechanism 8, thereby generating (4) slack in the grinding belt τ between the conveying mechanism 6 and the structure 7, and then the spring force and grinding of the spring. The control belt (10) controlled by the tension of T is swayed, and the above-mentioned polishing tape T can be made of a flexible polymer film, paper, cloth, metal film, vulcanized fiber, non-woven substrate, and The surface of the substrate composed of these combinations has a melting and melting , heat treatment oxidation mouth, ceramic oxide Ming, carbonized stone eve, aluminazirconia, pomegranate Meng Gangshi, cubic boron nitride bismuth, etc. composed of phenol resin, amine-based plastic resin, urethane Resin, epoxy resin, propyl acrylate resin, acrylated isocyanurate resin, urea-formaldehyde resin, isomeric cyanurate resin, acrylated amino phthalate resin, propylene oxime A structure in which a binder such as an esterified epoxy resin is bonded, and a material suitable for a processing method for polishing or cleaning is selected from these. In the above-described configuration, the flat plate transporting mechanism i continuously transports the flat plate W. When the sensor (not shown) detects the entry of the flat plate w, the upper and lower pair of the upper and lower surfaces are arranged by the flat plate W. The mechanism 5, 5, the two sides of the surface and the back surface of the flat plate W are held by the polishing tapes T and T, and both sides of the flat plate W can be ground or cleaned at the same time. When the sensor (not shown) detects the exit of the flat plate w, the upper and lower sides The clamping of the pair of polishing belts τ, τ of the pair of polishing mechanisms 5, 5 is released. The pair of grinding mechanisms 5, 5 are formed by a belt conveying mechanism 6, a 312 Χ ρ / invention manual (supplement) / 96-09/96119676 11 200841987 6 and a belt pressing mechanism 7, 7 椹 +, The belt transporting mechanisms 6, 6 can use the belts, the T, and the T, and the belt pressing mechanisms 7, 7 to transmit the belts in the direction of the belts, the plate f. The pair of 夂 迗 迗 途 和 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Cross the side of you. That is, it is horizontally reciprocated in the opposite direction to the transporter of the above-mentioned flatbed ¥. By pressing W 7 to press the grinds τ and τ to the surface, the belt pressing mechanism 7 is in the direction of the back:: reverse direction horizontally toward the ϋ / ί ^ intersecting direction. Therefore, as shown in FIG. 5, the horizontal movement of the polishing tape τ in the direction in which the conveyance direction η of the main plate W intersects can be transmitted through the continuous conveyance in the conveyance direction Η and the pressing of the polishing tapes τ and τ. The composite motion synthesized by Q can simultaneously grind or clean the surface and the back surface of the flat plate w by using the upper and lower grinding belts τ, τ, at this time, due to the belt conveying mechanisms 6, 6 and the belt pressing mechanism 7 in each of the grinding mechanisms 5, 5. = = in a separate structure from each other', so that the inertial force as the reciprocating portion of the belt pressing mechanism 7, 7 can be weakened compared to the configuration in which the belt conveying mechanisms 6, 6 and ^ are integrated by the mechanisms 7, 7. The reciprocating speed of the horizontal reciprocating motions q, q of the belt pressing mechanism 7 can be further increased, whereby the grinding or cleaning of the flat plate w can be performed satisfactorily. Since the above-described counter-reciprocating mechanism 8 is constituted by the crank mechanisms R and R, the simplification of the structure and the reciprocating 312XP/invention specification (supplement)/9649/96119676 \2 200841987 movement of the belt dust-removing mechanism 7 and 7 can be realized. Further, in this case, since the anti-fc mechanism 1G is provided, it is used to eliminate the above-mentioned polishing tapes T and TW generated between the above-mentioned respective belt conveying mechanisms 6 and the mechanism W, and the tributary mechanism 6 and the belt pressing mechanism 7 can form mutually independent structures 夭 and 4, except when the conveying mechanism 6 is in a fixed state, the belts 7 and 7 are driven by the counterclockwise reciprocating motion to perform the horizontal reciprocating motion Q opposite to each other. ? The resulting slack of the polishing tape τ between the tape transport mechanism 6 and the tape pressing mechanism 7 can smoothly transfer the polishing tapes τ and τ, and the above-described tape pressing mechanisms 7 and 7 can be used for the above-mentioned polishing tape. τ and τ are pressed to the lining member 7a of the flat plate w and the cylinder mechanism 7e. Therefore, the structure of the belt pressing mechanism 7 and 7 is simplified, and the pressing force can be easily adjusted. The mechanisms 6 and 6 are constituted by a structure in which the above-described polishing tapes τ and τ are intermittently or continuously conveyed, so that the polishing tape can be used not only. Continuously transporting in the conveying direction K during grinding or cleaning. 'It is also possible to stop the transfer during the grinding or cleaning process. After the grinding or cleaning reaches a predetermined number of times or after a predetermined time, the grinding belt T' can be raised to increase the grinding belt τ. Economic. Further, the present invention is not limited to the above embodiment, and for example, the configuration of the flat plate transport mechanism 1, the belt transport mechanism 6, the belt pressing mechanism 7, and the counter reciprocating mechanism 8 can be appropriately changed. Further, in the above-described embodiment, the so-called dry grinding or cleaning is used, but in the field of grinding or cleaning, a wet structure can be used to supply water, a polymer-like sand granule, and a brocade; Grinding belt τ. 312XP/Invention Manual (supplement)/96-09/96119676 13 200841987 From the above, the desired purpose can be fully achieved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing an embodiment of the present invention. Fig. 2 is a side cross-sectional view showing an embodiment of the present invention. Fig. 3 is a plan view showing an embodiment of the present invention. Fig. 4 is an enlarged front elevational view showing an embodiment of the present invention. Fig. 5 is a plan view showing an embodiment of the present invention.
【主要元件符號說明】 1 平板搬運機構 2 機台 3 搬運滾轴 4 對設滚軸 5 研磨機構 6 帶傳送機構 6a 安裝構件 6b 繞出捲轴 6c 纏繞捲軸 6d 後拉力用馬達 6e 纏繞用馬達 6g 導引轉軸 7 帶按壓機構 7a 襯墊構件 7b 導引轴 7c 轴承部 312XP/發明說明書(補件)/96-09/96119676[Main component symbol description] 1 Flat plate transport mechanism 2 Machine table 3 Transport roller 4 Counter roller 5 Grinding mechanism 6 Belt transport mechanism 6a Mounting member 6b Winding reel 6c Winding reel 6d Pulling motor 6e Winding motor 6g Guide shaft 7 with pressing mechanism 7a pad member 7b guide shaft 7c bearing portion 312XP / invention manual (supplement) / 96-09/96119676
200841987 7d 7e 7f 8 8a * 8b 8c 8d ⑩8e 8f 8g 9 9a 10 10a φ 10b 10c lOd H200841987 7d 7e 7f 8 8a * 8b 8c 8d 108e 8f 8g 9 9a 10 10a φ 10b 10c lOd H
R T W 按壓面 氣缸機構 桿 異向往復作動機構 水平往復台 直線軸承部 往復動作用馬達 驅動軸 帶傳動機構 曲柄盤 連接桿 安裝台 開口通路部 防鬆機構 支軸 控制桿 防鬆滾軸 彈簧 搬運方向 傳送方向 水平往復運動 曲柄機構 研磨帶 平板 312XP/發明說明書(補件)/96-09/96119676 15 200841987RTW pressing surface cylinder mechanism rod reciprocating reciprocating mechanism horizontal reciprocating table linear bearing reciprocating motor drive shaft drive mechanism crank plate connecting rod mounting table opening passage portion anti-loose mechanism support shaft control rod anti-loose roller spring conveying direction transmission Directional horizontal reciprocating crank mechanism grinding belt plate 312XP / invention manual (supplement) / 96-09/96119676 15 200841987
Wl 面Wl face
312XP/發明說明書(補件)/96-09/96119676 16312XP/Invention Manual (supplement)/96-09/96119676 16