TW200848707A - Prism spectrometer with moveable detector element and with collimated input light - Google Patents

Abstract

An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one embodiment the techniques can be used as a high throughput spectrometer to spatially disperse wavelengths in and around the VUV in such a manner as to generate a substantially flat field focal plane, suitable for use in combination with an array detector. Some embodiments utilize prism based spectrometers. Some embodiments utilize detector elements that may be movable and/or located within the spectrometer. In some embodiments, collimated light may be provided as an input to the spectrometer.

Description

200848707 IX. INSTRUCTIONS: [Technical Fields of the Invention] The techniques and systems disclosed herein relate to the field of spectral analysis. More specifically, high-efficiency components that can be utilized in mid-resolution spectral analysis performed in or below the region of the electromagnetic spectrum called vacuum ultraviolet (vuv). [Prior Art] Spectral analysis techniques have been used in the characterization of matter for more than a century. Some of the earliest spectral tools used dispersion 稜鏡 to separate the wavelengths of light, but most modern instruments use diffractive elements for this purpose. Grating-based systems generally have much higher resolution and their utilization has become commonplace due to the significant development of the manufacturing process and subsequent replication processes used to fabricate high quality grating elements. Most commonly used spectroscopy techniques are performed using wavelengths above ν υ ν (in deep ultraviolet, visible or infrared) or below (in the X-ray region). In their technology using νυν wavelengths, virtually all of them involve high resolution _ the meter is tight; the source is generally not available in this energy space, so many of these systems combine large-scale synchronization in national laboratories. The source of radiation is used. High efficiency spectroscopy instruments designed for operation in vuvs have proven to be difficult challenges to overcome. The standard reflective grating is decorated with an evaporation goblet coating to enhance its reflectivity. This method is applicable over a wide range of wavelengths from deep ultraviolet (DUV) to near infrared (NIR). However, for operation in the middle, it is necessary to protect the aluminum crucible with a MgF2 top coat (~250 A) to prevent oxidation, which can drastically reduce the reflectance of aluminum at wavelengths below nm. 129206.doc 200848707 Even with the addition of a protective coating, the normal incident reflectance of A1 (and most other metals) in νυν is significantly reduced. Therefore, νυν monochromatic mirror design has traditionally been used for efficiency reasons and has a concave grating to eliminate the reflective surface. Notable examples of such single-element instruments include those based on the Rowland circle and the Seya-Namoika mount (see Masato Koike, Normal-Incidence Monochromators and Spectrometers ? Vacuum Ultraviolet Spectroscopy (JAR Samson and DL Ederer), section n Volume, page uo. Academic Press, San Diego, 2000). One of the common shortcomings of these simple designs is the presence of political light that results in loss of intensity and spatial resolution parallel to the direction of the entrance slit. More importantly, although fine-grained gratings achieve high spectral resolution, their νυν efficiency profiles are generally quite low and conventionally exhibit complex wavelength dependence. In order to overcome the reduced normal incidence reflectivity of the metal in νυν, a spectral analysis system based on a grazing incidence grating mount has been used in some cases. Unfortunately, these systems are typically designed for use in large, high resolution, beamline experiments and therefore have optical components (gratings and mirrors) that are not suitable for incorporation into small footprint commercial instruments. For example, such systems can have very large angles of incidence with respect to the grating normal. This angle of incidence and very long focal length (approximately 100 cm) are not suitable for integration into a small footprint system. In the case of moderate resolution requirements, it would be advantageous to design compact ν ν spectroscopy instruments that overcome the above disadvantages by employing optical elements that separate, expand, or disperse light into spatially separated wavelengths in a compact spectrometer system. A number of VUV-based monochrome 129206.doc 200848707 light mirrors have been designed specifically for scientific research applications. See, for example, H.W. MOOS et al., αΡΡ1· Opt· 9, 601 (1970) and ρ·〇. M〇yssides et al, j M〇d 〇pt 47, i693 (2000). These instruments use a dispersion 安装 mounted on a rotating table, along with an exit slit and a single element detector to provide wavelength scanning capability. A select number of helium based instruments have been designed to operate in conjunction with a multi-element array detector to enable simultaneous collection of multiple wavelengths. The instrument, developed for the Naval Research Laboratory, is described by L. Rickard et al. in pr〇ceedings 〇f spiE 1937, 173 (1993). The second instrument developed for NASA is described by J.T. Rayner et al. in Publications thef the Astronomical Society of the Pacific 115, 262 (2003). Warren et al., U.S. Patent No. 5,127,728, also discloses a spectrometer that is designed to be used in conjunction with a multi-element array detector. An imaging spectrometer for use in general spectral applications where the wavelength dispersive element is 稜鏡 is disclosed in U.S. Patent No. 6,744,505. SUMMARY OF THE INVENTION The disclosure herein relates to the field of spectral analysis. In one embodiment, a high efficiency component that can be utilized in performing mid-resolution spectral analysis in vacuum ultraviolet (vuv) is described. In one embodiment, the techniques can be used as a high throughput spectrometer suitable for use with an array detector for wavelengths in and around the VUV to produce a substantially flat field focal plane. The way it is spatially dispersed. Some embodiments utilize a krypton-based spectrometer. Some embodiments utilize a detection element that is movable and/or can be located within the spectrometer. In some embodiments, collimated light can be provided as input to one of the spectrometers 129206.doc 200848707. The various embodiments disclosed herein can be used alone or in combination with other embodiments disclosed herein. In an embodiment, a spectrometer is provided. The spectrometer can include at least one turn that receives collimated light and disperses the collimated light into a plurality of spatially separated optical wavelengths, the at least one being used in a single pass configuration . The spectrometer may further include: a first optical device that receives collimated light from the crucible and focuses it onto a focal plane; and an array detector at the focal plane that simultaneously collects the plurality of spaces The wavelength of the separated light. In another embodiment, a reflectometer is disclosed for processing wavelengths of light comprising at least wavelengths below the deep UV wavelength. The reflectometer can include: a light source that produces a wavelength of light comprising at least a wavelength below a deep uv wavelength; and a spectrometer for receiving light generated from the source and reflected from the same. The spectrometer can include at least one turn that receives collimated light and disperses the collimated light into a plurality of spatially separated light wavelengths. The spectrometer of the reflectometer can further include: a first optical device from which the collimated light is received and focused onto a focal plane; and an array of detected artifacts at the focal plane The plurality of spatially separated light wavelengths are collected. A method of analyzing light via spectral analysis techniques is also disclosed. The method can include: providing light in a range of vacuum ultraviolet (vuv) wavelength or below in the ring control chamber; illuminating the light; and receiving the dispersion light in a detector array The wavelength of the spatial separation. In yet another embodiment, a spectrometer is disclosed that can include an entrance port 4 that is configured to receive light from a source external to the spectrometer 129206.doc 200848707 Lights that receive collimated light. The spectrometer can further include at least one optical component that receives light from the light source after it passes through the human ejection orifice, the light system received by the at least one optical component collimating the optical component The received quasi-I light is separated into light wavelengths of a plurality of spaces (four). Additionally, the spectrometer can include an array of detectors positioned to simultaneously collect the plurality of spatially separated wavelengths of light.

In another embodiment, a spectrometer is provided. The spectrometer can include a collimated light perforation that receives input collimated light provided to the spectrometer to provide light to one of the optical paths of the spectrometer, the input collimated light comprising wavelengths below the wavelength of the deep uv light . The spectrometer can further include: an optical component 'which emits light in the optical path; and a detector that receives the display; and another method for improving the spectrometer and providing input light to the spectrometer The alignment tolerance between the optical system and the system. The method can include: coupling a spectrometer to the optical system; and providing collimated light from the optical system as an edge meter input light to the spectrometer to provide greater alignment between the quasi-I-light path and the spectrometer Tolerance. 〃 I. In a further embodiment, a spectrometer is provided. The spectrometer can include at least one optical component that receives light and separates the light to spatially separate the different wavelengths of the whisk. The spectrometer can further include a

贞 H ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Adjusted to help the confrontation of the array relative to the focal plane. I 129206.doc 200848707 Yet another embodiment is also directed to a spectrometer. The spectrometer can include an optical path that includes at least one optical component; and an adjustable array predictor that is located at one of the focal planes of the optical path. The adjustable array detector can be located at a point in the optical path behind the at least one optical component, and the adjustable array detector detects light provided at the focal plane. The array detector can be adjusted to help the alignment of the array detector relative to the focal plane. The lighter can also include an enclosure within the spectrometer that completely surrounds the adjustable array detector. In another embodiment, a spectrometer is provided for processing wavelengths of light comprising wavelengths below the deep UV wavelength. The spectrometer can include at least one optical component that receives light comprising a wavelength below a deep uv wavelength that expands the light into a plurality of spatially separated light wavelengths. The light detector may further include an adjustable array detector that receives the plurality of spatially separated light wavelengths, the adjustable array detector being movable to enable the adjustable array detector It can be aligned with respect to a plurality of two separated wavelengths of light. In yet another method embodiment, a method of operating a spectrometer to align an array detector with respect to an optical path within the spectrometer is disclosed. The method can include providing an interior space within the spectrometer, the light path being at least partially within the interior space. The interior space can be sufficiently environmentally controlled to allow transmission and detection of light wavelengths at least partially including wavelengths below the deep UV wavelength. The method can further include adjusting a position of the array detector relative to the optical path, wherein the adjustment of the position of the optical path does not change a volume of the space. A further understanding of the nature of the advantages of the 129206.doc 200848707 of the present invention can be achieved upon review of the following description and associated drawings. [Embodiment] The following description of the drawings is made to obtain an indication of the present invention. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In order to enhance the sensitivity of optical metrology equipment to challenging applications, it is necessary to extend the wavelength range of the four measurements. In particular, it is advantageous to use a shorter wavelength (more similar) photonic system extending to and extending beyond the region of the electromagnetic spectrum called vacuum ultraviolet (v u v). The vacuum ultraviolet (vuv) wavelength is generally considered to be less than the wavelength of the deep ultraviolet (DUV) wavelength (i.e., less than about 190 nm). There is no universal cutoff at the bottom of the vuv range, but some in this field can be considered VUV terminated and the extreme ultraviolet (EUV) range begins (for example, some people can define wavelengths less than 100 nm as EUV). Although the principles described herein are applicable to wavelengths above 1 〇〇 nm, these principles are generally applicable to wavelengths below 1 〇〇 nm. Thus, as used herein, it will be recognized that the term VUV means indicating a wavelength generally less than about 19 〇 nm, however, VUV is not meant to exclude lower wavelengths. Thus, as used herein, "VUV" generally means wavelengths generally less than about 190 nm, without excluding low end wavelengths. In addition, low-end VUV can generally be viewed as wavelengths below about 14 〇 nm. In general, complex optical systems need to be avoided in vacuum UV because effective reflectors and suitable compound lenses (which can transmit VUV wavelengths) are usually 129206.doc 12 200848707

Not available. In addition, the optical surface tends to gradually form a thin contaminated layer characterized by a high ν ν absorbing cross section which may significantly degrade the performance of the optical surface at these wavelengths. As a result, the optical surface in the νυν instrument should be monitored (and cleaned if necessary) to ensure stable and reliable performance. A means for achieving this is disclosed in U.S. Patent Application Serial No. 1 1/600,414, the entire disclosure of which is incorporated herein by reference. Therefore, a simple optical design (with a minimum number of surfaces) may be required to maintain high optical flux when operating in this spectral region (as opposed to using a two-pass configuration). In addition, it would be beneficial to provide a simple 稜鏡-based VUV spectrometer suitable for use in conjunction with a multi-element detector that can be assisted by a reproducible-substantially flat field focal plane in one aspect. The manner of collecting at the same time as the wavelength separates the wavelength space. In sequential multispectral applications, the linewidth of the feature of interest remains within the spectral measurement range. Also, the resolution of the measurement is required as a function of wavelength to keep the quirks. Because of @, spectrometers are often designed to deliver a linear J-precursor that exhibits linear spatial dispersion properties (i.e., 1 Φ, the wavelength of the girth varies linearly with the position in the detector plane). Hundreds of first, grating-based instruments have largely achieved this. In the case of 稜鏡-based instruments (where spatial color persistence is often nonlinearly changed in the plane of the detector),

The faculty is a prismatic double-P lens (containing two 稜鏡 constructed of different materials) to improve linearity. However, for some of the requirements in νυν can be used as a function of wavelength for spectral applications, the resolution of the measurement. For example, the reflectance and/or transmittance spectra associated with the thin translucent film phase 129206.doc 200848707 can exhibit interference fringes in which the period decreases drastically with wavelength. This behavior is the result of an increase in the refractive index of the film at shorter wavelengths' resulting in a corresponding increase in the length of the optical path experienced by the photons across the film. Since the refractive indices of many common materials are known to behave in a similar manner, it is concluded that the design of an output spectrum exhibits a spatially dispersive property that is more compactly matched to the resolution requirements of the application than the spatial dispersion properties of conventional instruments. There are benefits in the spectrometer. A typical VUV grating spectrograph as known in the prior art is presented in FIG. This simple instrument based on the Rowland circle mount employs a concave grating 101. The grating is illuminated by a stop 2 from an entrance slit 丨〇5 which is diffracted and focused onto a curved focal plane to produce a spectrum 103. The incident slit and the diffraction spectrum are both located on the Roland circle 1〇4. When combined with an exit slit, a single element detector, and a grating rotating mechanism, the system achieves very high spectral resolution. However, due to the curved focal plane, this design is not suitable for applications that require multiple wavelengths to be collected simultaneously. Another disadvantage of prior art νυν filament spectrometers relates to their poor optical flux. The grating diffracts light into multiple orders, thereby reducing the intensity of light reaching the detector at any given wavelength. Configurable νυν gratings for normal human firing mounts typically exhibit very low optical efficiencies (less than 5% at 120 nm) that can vary significantly as a function of wavelength. A grazing incidence vuv spectrometer with a base = aberration corrected grating is conventionally used in beam line only. _ Many of these instruments are capable of producing a flat focal field to accommodate multi-channel detectors. Unfortunately, these instruments are almost exclusively designed with a long focal length, 129206.doc -14- 200848707, thus eliminating the need to integrate them into a compact measurement system design. In general, high efficiency, medium resolution diffraction gratings used in compact vuv spectrometers are generally not available. It follows that there will be benefits in designing a νυν spectrometer based on a dispersive element that provides higher efficiency in this spectral region or in lower wavelengths. The instrument will provide a flatter efficiency profile and will avoid the order selection problem associated with grating based systems. A typical dispersion chirped monochromator as known in the prior art is shown in FIG. In addition to providing a higher, more uniform photon efficiency than its grating-based counterpart, the instrument can present another advantage that avoids the spectral contamination problems inherently associated with the use of diffraction gratings. In operation, light 2 passes through an entrance slit 202 and is collimated by a first lens 2〇4. The collimated beam 206 then passes through a dispersion 稜鏡2〇8 which is used to separate the constituent wavelengths in the incident beam. The individual wavelengths exit 稜鏡 2〇8 at slightly different angles determined by the wavelength dependence of the refractive index of the material containing germanium. The light emitted from the pupil is collected by a second lens 21, which is used to focus the light emitted from the pupil onto a detector 212. Although not explicitly shown in the figure, the focal plane of the instrument is also curved, thereby limiting the usefulness of the system in applications where multiple wavelengths are to be recorded simultaneously. Another disadvantage of the system of Figure 2 is that it uses a lens to collimate the light transmitted to the dispersion pupil and focus on the light received by the dispersion. Single element lenses inherently introduce chromatic aberrations in the optical system, which may limit performance. At longer wavelengths, commercially available composite lens systems are widely available and can be used to minimize these effects. Unfortunately, such highly calibrated components cannot be used in VUV because they do not transmit short wavelength photons. Therefore, 129206.doc 15 200848707 is generally used based on the reflective optical design of the mirror rather than the lens. The optical design in νυν is further complicated by the thin contamination layer that is naturally formed on virtually all optical surfaces. These contaminants are absorbable at the end of the month b and may have a large effect on the optical flux. This phenomenon in νυν combined with the reduced efficiency exhibited by the radix reflexes necessitates system design with a minimum number of optical surfaces. As a result, composite optical configurations that are successfully used at longer wavelengths cannot be simply modified for use in νυν. Therefore, a helium spectrometer based on a two-way configuration is sometimes not suitable for use in νυν. As described in more detail below, a spectrometer utilizing a single pass configuration is provided in FIG. In this configuration, the light passes through the body of the crucible one-way, as opposed to the multi-pass configuration of the body of the lens twice or more. Therefore, as shown in Fig. 3, light is transmitted from one of the incident surfaces of the crucible to one of the exit surfaces of the crucible without passing through the crucible in multiple passes. The νυν shot is strongly absorbed by oxygen and moisture. It follows that the excitation of these objects must be maintained at a sufficiently low level to permit transmission of νυν or lower wavelengths in the νυν optical instrument. This can be achieved by using a vacuum, purification or backfilling method in combination with a hermetic housing that houses the optical components of the system. In the case of purification or backfilling techniques, gases such as nitrogen, argon or helium may be used with high purity which does not absorb (at least in the wavelength region of interest). A schematic representation of an efficient, compact spectrometer 300 that overcomes the shortcomings of prior art designs and is suitable for operation in VUV is presented in FIG. Figure 3 Light " The instrument uses an optical component that separates, unfolds, or disperses light into spatially separated wavelengths in a compact spectrometer system. As shown in Fig. 3, the optical element is a prism 3 1 0 which is separated by light, 129206.doc -16 - 200848707, or dispersed into a plurality of spatially separated wavelengths. Although the 稜鏡 dispersion effect is utilized in FIG. 3, it will be seen that with respect to other embodiments provided herein, it is also possible to achieve separation, expansion, or dispersion of light by utilizing the diffraction properties of a diffraction grating. Space separation wavelengths. As is apparent from Figure 3, most of the system components are housed in an environmental control chamber 302. Light is coupled into the instrument via an entrance aperture 304. The aperture 3〇4 can be recessed in the vacuum compatible assembly 306_, which helps to couple the spectrometer to another environmental control body in a gastight manner. Although in principle the gas can be exchanged via the entrance aperture, the chamber can also be equipped with a dedicated gas disposal interface to facilitate this activity. The gas treatment interface 3〇7 also provides an effective mechanism for evacuating and/or backfilling the controlled environment in a timely manner. If operation is required under continuous flow of non-absorbed purge gas, the chamber may also be equipped with an optional purge valve (not shown). Light entering the instrument is collected by a reflective optics 3 〇 8 and the light is collimated. Collimating optics 308 limits the f-number or optical velocity of the instrument and works in conjunction with focusing optics 312 to define the resolution of the tool. In one embodiment of the instrument, the collimating optics are off-axis parabolic reflectors with a MgF2/A1 overcoat that are optimized for operation in VUV. In a particularly useful embodiment of the invention, the collimating optics 3〇8 are designed such that the off-axis or steering angle is 9 〇. Fast (f/2) off-axis parabolic mirror. This configuration simplifies the coupling of the spectrometer to an external optical system because the physical spacing between the entrance aperture and the dispersion enthalpy increases with respect to the smaller angular configuration. This consideration may be important in the case of fast (also ~ low f-number) optical design. 129206.doc 200848707. Light from the collimating optics is incident on the front side of the dispersing prism 3 〇. The germanium material can be selected such that it transmits the vuv photons. A particularly suitable material is LiF because it exhibits one of the shortest transmission cutoff wavelengths = and is not birefringent. Alternative tantalum materials having longer transmission cutoff wavelengths may include MgF2, CaF2, ring, squirrel, -, push fluorine to dissolve sulphur dioxide, smelting cerium oxide, quartz or other materials. The light passing through the 稜鏡310 is deflected. The skew angle is a function of the wavelength and depends on the geometry of the ridge, the angle of incidence, and the refractive index of the bismuth material. In this way, light of different wavelengths is emitted at different angles. Despite the reflection and transmission losses associated with the use of dispersive enthalpy, such elements are often more light efficient in ν υ ν than diffraction gratings. In addition, the germanium has a significantly smaller surface area than the grating, so that the small scattering of the line and the lower stray light are particularly important at vacuum ultraviolet wavelengths where the scattering cross section is often significantly increased. The light exiting the pupil is collected by a focusing optics 312 and focused to a detection of 314. In one embodiment, the focusing optics is also an off-axis parabolic reflection with an MgFVAl overcoat that is optimized for operation in VUV. In one embodiment, the off-axis parabolic mirror can be designed to The shaft angle or steering angle is about 6 (Γ. Although the use of smaller off-axis angles can improve imaging performance), it can also complicate the integration of the detector because the physical separation between the detection element and the dispersion 得以 is In an embodiment, the focusing optics 312 are selected and configured such that the focal plane is outside the boundary of the spectrometer housing to facilitate the acquisition of the 129206.doc 200848707 bond. Simple integration of the system. The system (ie, detectors, array components, and control electronics) is typically connected to a computer (not shown) that receives the measured spectrum. Any number of vuv sensitive instruments can be used in conjunction with the instrument. Detectors, but νυν photons are available. (4) Array detectors that provide a wide dynamic range are also preferred. In this respect, back-thinned, back-illuminated CCD detectors are particularly suitable. A charge-and-light coupling device f (CCD) is used to illuminate the front side of the plate; however, the coating (to lower the conversion of higher energy photons that would normally be absorbed in the polysilicon gate region) reduces the efficiency of the device by at least two cents. Alternatively, it can be combined with a conventional longer wavelength detector to use a microchannel plate (MCP) 为" to help enable the operation in νυν, f must be (4) components in the absence of oxygen and water absorbing substances In the environment, this can be easily accomplished by installing a predator such that the active surface of the forming element or array 402 as shown in Figure 4 shares a common environment with the body of the νυν spectrometer. As illustrated, Detecting that the H3U forms a hermetic connection to the outer surface 406 of the spectrometer chamber via a sealing mechanism 4〇4. In this manner, at least the detector 7G or array 402 of the detector is retained inside the common body of the spectrometer and via a The vacuum feedthrough socket is connected to its associated control circuit (located outside the manifold). The concern for degassing and contamination generally prevents the control circuit from being mounted inside the controlled environment. Brother In an alternative embodiment, speculation It can be mounted in an independently controlled environment such that, as shown in Figure 5, the presumping element or array 402 interfaces with the spectrometer body via a protective VUV transmissive window 5〇2. Cooling with a predator 129206.doc - In the case of 19-200848707, additional windows provide protection against unintentional exposure. Unfortunately, “the ghosting effect of the detector's reflection on moisture. In some configurations, this weight is very significant because The longer μ image effect can grow stronger signal may be from the surface of the detector reverse = shot away from the back side of the window and at the position corresponding to the shorter wavelength, the corresponding intensity may be much lower) re-shoot detection The resulting error, as described above, is shown in Figures 3 through 5 as a prior art device that causes the detector 314 to be fixedly attached to the outer wall of the spectrometer. In the 4th, and the evil, the precise alignment of the detector 3 14 with the optical path may be required. In order to provide the detection of λ 诙扒 1 ,, the alignment of the state is more simple, and it is necessary to make the detection n movable relative to the optical path. In an exemplary embodiment, the pain sensing elements or arrays are movably mounted such that the detecting elements (such as the detector array) can be adjusted relative to the optical path. Embodiments for movably mounting a detection element can include movably mounting the detection element within the body of the spectrometer. It may be desirable to provide the installation in such a way that the detection component is separated from at least some of the other components of the device. For example, some of the detection components, such as electronic circuits and boards, may not be vacuumed. In addition, although the detection elements can be relatively small, other components that are commercially available and that discriminate σσ are often relatively large. Larger components can cause hard mating because they can block other parts of the light path when using smaller human angles. Figure 6 presents an exemplary configuration in which the sensing element 6〇2 is internally mounted within the ^i control chamber 302. As is apparent from the figure, the detecting element 6〇2 is physically separated from the associated scorpion state 606 via a vacuum compatible cable assembly 604 and an electrical feedthrough configuration (129206.doc -20-200848707) The phonetic %, the detecting component 602 and the control electronics 606 are not necessarily drawn to scale I and are relatively large by the detecting electronics than the detecting component. The detecting element 6〇2 is placed on the adjustment mechanism to facilitate accurate alignment with the focal plane of the focusing optics. Separating the detection element attachment opening from the side wall of the spectrometer housing away from the 'knife greatly simplifies instrument alignment over miiu--the benefit is that it allows the element to be positioned much closer to the dispersive prism' thereby reducing focusing optics The off-axis angle of the device. , the fruit can achieve much improved imaging properties. Thus, as shown in Figure 6, a position-adjustable debt measuring component is provided. In addition, the position adjustable sub-test element is separated from at least some other detecting elements. The components (4), the associated control electronics 6〇6 and the vacuum-compatible electricity (4) into a wide range of parts can be constructed from a wide range of parts. In the f-exemplary embodiment, the windowless backside thinned CCD area image sensor (model S7) from Ham_su, Japan can be used for the integration component 602. The detector has a size of 24 576 _(8) χ j 392 _(7) and has 1024 (H) X 58 (V) pixels. Ha_atsu manufactures a wide variety of other suitable detections. UK's E2V also manufactures similar detector products, and other (4) devices are available from other suppliers. For example, an image sensor can be inserted - a socket constructed of a vacuum compatible material such as polyetheretherketone. The socket can be held in a moving optics mounting table, and the moving optics can adjust the translation and tilt of the b. The pins on the socket can be connected to the vacuum compatible electrical assembly 604. The conductor in the electrical winding can be constructed, for example, from a silver ore copper wire. The insulating material can be a non-shrinking FEP extruded Teflon that is coated and heat treated to minimize trapped gas. The cable assembly 6〇4 is then connected to a vacuum I29206.doc 200848707 Compatible electrical feedthrough that provides external (ie, outside of the controlled enclosure) for each of the wires in the cable. connection. The connection wiring on the outside (via the shielded cable) to the electronics of the control electronics 6〇6. The components of the control electronics component 606 (sensor preamplifiers, front end electronics, interface electronics, etc.) are commercially available from a number of suppliers including, for example, tec5 AG, Germany. Suitable control electronics are also manufactured by UK2 Spectr〇nic Devi Js Ltd. and other suppliers. The imaging performance of the instrument can be further improved by replacing the off-axis focusing optics with a parallax-corrected custom ring optic. This can result in improved imaging performance in the vertical direction of the detector plane (i.e., along the height of the detector), thereby enabling the use of detectors having smaller heights without compromising signal collection efficiency. The π- and πυν grating spectrometers are designed to achieve the benefits associated with internal detector installation. As illustrated in Figure 7, an aberration corrected flat field imaging grating element 7G2 can be combined with a human perforation and internally mounted side elements to produce a compact VUV spectrometer. Similar to the figure, the detection element 602 is coupled to its associated control electronics 606 via a vacuum compatible cable assembly 604. This instrument is expected to be superior in performance to conventional grating spectrometers due to its improved imaging performance and ability to accurately align the sensing elements. It is not expected that the instrument will provide a throughput that can be achieved from its counterpart, and that it may be advantageous to operate at a wavelength below the lowest transmission wavelength achievable by the instrument. Note that with respect to Figure 7, a grating-based system having light that approximates the normal human angle of the light relative to the light normal can be utilized. For example, an angle of incidence of less than about 3 degrees and more preferably less than 20 degrees can be utilized. 129206.doc -22- 200848707 The use of the detector allows the detection component 602 to be placed within the spectrometer even when used at these approximate normal angles, since the smaller detection component 602 is not Engaged with the transmissive interface of light from aperture 304 to optical thumb 702. Thus, in one embodiment, an angle of incidence of about 10 degrees can be used in the apparatus of Figure 7. An example of a representative effect b that can be achieved in a system similar to the system depicted in Figure 6 is presented in Figure 8 where 10 discrete wavelengths are in the range from 12 〇 nm to 220 nm (corresponding to a curve 802 of 12 〇 nm, a curve 804 corresponding to 130 nm, a curve 806 corresponding to 140 nm, a curve 808 corresponding to 150 nm, a curve 8 对应 corresponding to 160 nm, a curve 812 corresponding to pi) nm, Corresponding to the curve 814 of 180 nm, the curve 816 corresponding to 丨(10) nm, the curve 818 corresponding to 200 nm, the curve 820 corresponding to 22〇), the integral irradiation as a function of the position along the width of the detector ^ The integration is performed as a function of the detected southness (i.e., in a direction perpendicular to the direction in which the wavelength space separates). As is apparent from the figure, the peaks associated with individual wavelengths are well resolved across the width of the detector. A square with a width of 4 〇 mm and a 67-degree threshold is used in conjunction with the square U-meter entrance hole to achieve the results in the figure. For those skilled in the art. It will be appreciated that alternative embodiments of the present invention can be configured to facilitate: integration with other detector geometries. For example, other embodiments may be priced with a width having a length in the range of white, w as small as 1 mm, and up to 1 cm. Other geometric shapes, as well as many suitable divisions, can be used as described in b' π. Readings can be purchased from the UK e2V and Japan Hamamatsu's public 129206.doc -23- 200848707 to help ensure accurate results 'may need to minimize the so-called "stray light" effect. In a general sense, stray light can The light of the impact detector that does not have the particular wavelength is at a particular location (ie, which is in turn associated with a particular wavelength). Typically, the light is multi-colored and produced by a scattering process. A conventional method is to insert a light baffle (i.e., a beam baffle) in a closed position within the instrument to prevent scattered light from reaching the detector. Although not explicitly shown in the schematic representation of this disclosure, it is assumed Suitable separators are incorporated into the examples. It is well known to those skilled in the art to assist in determining optimal beam baffle placement by using commercially available ray tracing kit software. Some embodiments provide a VUV spectrometer that is suitable for use in conjunction with a multi-element detector for collecting data simultaneously at multiple wavelengths to reproduce a flat field image plane, but is familiar with this The skilled artisan will recognize that 'this instrument can be advantageously used in other applications. For example, if the array detector is replaced with an exit slit and a suitable sealing mechanism, the apparatus described herein can also be used as an effective VUV front monochromator. Further, if the instrument is further modified so that the crucible is mounted on a rotating table and contains the exit slit, the sealing mechanism is equipped with a VUV sensitive unit detector (such as a photoelectric L tube) The instrument can advantageously be used as a scanning monochromator. An example of this alternative embodiment is provided in Figure 9. Thus, for example, as shown in Figure 9, a scanning monochromator 9〇〇 There is a structure somewhat similar to that described with respect to the spectrometer of Fig. 3. However, a stack 904 is mounted on a rotary table 902. In addition, a single element detector 9〇6 is provided in an exit slit 9〇. 8 〇 . . . 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱 光谱Slot 304 and collimating optics 308. In this way, the instrument will It is easy to integrate with existing optical systems, with the limitation that these systems present a collimated input beam to the instrument. An example of this configuration is presented in Figure 1. As shown in Figure ,, a configuration is provided. To receive a light entrance 1002 that collimates the input beam 1004. As shown, the collimated input beam 1 〇〇 4 is then provided to 稜鏡 310 〇 as depicted in the figure, the light is connected to the instrument via a gastight manner The vacuum fitting 1006 of an existing optical system enters the spectrometer 1. The collimated light 1004 entering the spectrometer is dispersed by the crucible 310 and collected by the focusing optics 312 and focused onto the array 314. Due to the input beam Straight property, the alignment of the spectrometer with the existing optical system is significantly wider than the alignment in the embodiment of Figure 3 or Figure 6. This is because the configuration of Figure 10 will result in negligible signal loss due to the small translational alignment error between the spectrometer and its input beam source, and the need to accurately align the poly-t beam into a small perforation. Significant signal loss can occur in the system of Figure 3 or Figure 6 above. Therefore, the alignment tolerance requirements between the spectrometer and the external source will be reduced. This allows the spectrometer to be more easily integrated with other components of an optical metrology tool. In yet another embodiment of providing ease of alignment with an existing optical system, the spectrometer of Figure 10 can also be equipped with a focusing optic and an entrance aperture. An example of this embodiment is depicted in FIG. This configuration provides greater resolution control and concentrating capabilities than the instrument provided in Figure 1. The instrument of Figure 10 defines these properties depending on the characteristics of the optical system to which the spectrometer is coupled. Further, 129206.doc -25- 200848707 The collimated light 1004 entering the apparatus 1100 of Figure 11 is similar to that shown in Figure 10 via a vacuum coupling 1006 that connects the spectrometer to an existing optical system. Light is focused by a first focusing optics 11 〇 2 onto an entrance aperture 194. In one embodiment of the apparatus 11, the first focusing optics is an off-axis parabolic reflector having an outer coating of MgFVA1 that is optimized for operation in VUV. Light passing through the entrance aperture 1 1 〇 4 is received by a collimating optic 308, collimated, and directed toward the dispersion 稜鏡 31〇. Dispersed by prism 31

The light is collected by a second focusing optics 3丨2 and focused on the surface of the detector 314 that detects it. The spectrometer of Figure 仍 still provides a more tolerant alignment tolerance between the spectrometer and the external source. Although the alignment of the first focusing optics 1102 with the entrance aperture 1104 is required, the alignment can be more easily controlled since these components are all formed within the spectrometer. Thus, Figure u illustrates the use of an entrance aperture where the alignment requirements between the spectrometer and the external source are still less critical. Where the first focusing optics 11 〇 2 and the collimating optics 3 〇 8 are off-axis parabolic mirrors, the relative orientation of the optical devices may be important. The rotationally symmetric configuration depicted in Figure n is preferred over an alternative line symmetry configuration in which the mirror is oriented such that it lies on the same parabolic surface, which is preferred due to the higher correlation associated with the former configuration. Collect efficiency. Note that the light-recognition instrument of the VUV aberration right as shown in Figure 7 and having the internal Qiu, /, and the detector of the inner 邛 women can also be the same as 1 1 # μ ^ as shown in Figure 11.额外 Extra focus optics configuration depicted by the instrument. The fine energy s — the group of evils is not shown in Figure 12. As shown in Fig. ι2, the grating-based spectrometer 12〇〇# is called 10早4, similar to the one shown in Figure 1〇, 129206.doc -26- 200848707. By: connecting the spectrometer to an existing optical system. The vacuum face piece 1006 enters the instrument. Similar to that shown in Fig. 11, the light of Fig. 12 is focused by a first focusing optics onto an entrance aperture 11〇4. The light passing through the entrance aperture _ then encounters an aberration corrected flat field imaging grating element addition. Light from the grating element 702' is directed toward an internally mounted measurement element 6〇2 to produce a compact VUV spectrometer 1200. Similar to Figures 6 and 7, detection element 602 is consuming to its associated control electronics 606 via the use of a vacuum compatible cable assembly 6〇4.

In addition to providing improved optical fluxes, the techniques described herein provide additional benefits of generating-data sets relative to traditional vuv spectrometer designs. The spectral content of the data set is better utilized in vacuum material spectroscopy. The response is often measured by an increase in the sample presentation. In the specific case of reflectance measurements, (iv) for data collected at longer wavelengths, shorter wavelength data in vuvs often provide sensitivity to subtle changes in material properties. This is a direct result of the fact that the optical mvuv wipes of many materials exhibit a significantly more structure at shorter wavelengths than at longer wavelengths. When collecting broadband reflectance data sets, it was concluded that accumulating more data at shorter wavelengths in the coastal area (iv) would have benefits in accumulating less data at longer wavelengths. In this way, the collected data set provides a subtle change sensitivity indication of the nature of the sample over a conventional data set characterized by linear dispersion. To better illustrate this effect, consider the luminescence reflectance spectrum of a 15-into Si(10) film deposited on a slate substrate. Once collected, the simplification of the measured data is generally performed by combining one or more models used to describe the optical properties of the material containing the sample 129206.doc -27- 200848707 (Fresnel equation) ) is implemented in one form. Typically, the measured data set is compared to a data set calculated using an expression determined by a set of parameters relating to the nature of the sample. The difference between the measured data set and the calculated data set is minimized by iteratively adjusting the values of the parameters until a sufficient time is reached. This difference is usually quantified by a "fitness goodness" (G〇F) parameter. Figure 13 compares the values of the G0F parameters of a data set collected using a grating spectrometer and a krypton-based spectrometer according to the techniques disclosed herein (as calculated for a range of thicknesses at and around the actual thickness of the film). Both spectrometers are equipped with a 1024-element linear detector array. Curve 13 〇 2 illustrates data for a grating based spectrometer and curve 1304 illustrates data for a prism based spectrometer. As is apparent from the figure, the value of the GOF parameter relative to the data set obtained with the grating instrument is significantly faster and faster with respect to the data set associated with the 稜鏡-based spectrometer as it moves away from the film, the true "thickness" This is because SiON absorbs more at shorter wavelengths and the 稜鏡 spectrometer produces a data set that is scattered over a larger number of debt-measuring elements at the shorter wavelength end of the measured spectrum than the grating spectrometer. Due to the slope of the G0F curve, the final Driving the simplification process to its final result, the data set from the 稜鏡 spectrometer will be able to produce more accurate results. Therefore, it can be considered that the set of guest materials provided by the krypton spectrometer is more sensitive than its optical thumb counterpart. Although the example of Figure 13 The spectral reflectance measurements performed on the film samples are provided, but the enhanced spectral information provided by the present invention can also be used in other spectral applications to provide improved metrology capabilities. Accordingly, the techniques described herein provide a variety of advantageous results. For example, 129206.doc -28 - 200848707 describes the compact, ancient joints that can be executed in vacuum ultraviolet. More specifically, it provides a special νυν spectral analysis system for inverse == for metrology applications. In addition, it can be used in a high-throughput Yizhong that is suitable for use with an array detector. The Atong ΐ稜鏡 spectrometer is used to spatially disperse the wavelength of νυν neutralized by a peak > a JU LX w to generate a substantially flat field focal plane. The spectral analysis system, the system, which produces - has spatial separation The wavelength knife wheel is designed with a beam m such that the spectral resolution of the output beam closely matches the spectral information contained within the multi-color input beam. / /, as provided herein, describes a number of advantageous concepts. 'Providing a prism-based spectrometer and a spectrometer based on a diffraction grating. Another (describes not (four) detector configuration. In addition, it provides different technologies for providing input light to light. The instrument will recognize that in these concepts Each of these concepts can be implemented individually or in combination with one or more of the other concepts. Therefore, it is not necessary to fully utilize the concepts and advantages described herein in order to utilize one or more of the concepts described herein. Moreover, while many of the techniques described herein have been described in relation to VUV wavelength applications, it will be appreciated that such techniques are not limited to such wavelengths. Accordingly, the concepts described herein can be used to include other regions that are less than or greater than the νυν region. In the wavelength region, in addition, many of the advantages described herein that are particularly applicable to the νυν region can be equally applied to wavelength regions less than the νυν region. The spectrometer techniques described herein can be used to benefit from the wide use of spectrometers. In the range of optical systems, one of the optical systems is a reflector. For example, a specific type of reflector that can utilize these techniques is a νυν reflection 129206.doc -29- 200848707 instrument. One is particularly suitable for this article. An example of a νυν optical metrology instrument used in the method described is disclosed in the following: Application for US application on September 23, 2009. Lunar Case No. 10/668,642, now U.S. Patent No. 7, 〇67, 818, U.S. Application No. 10/909,126, which was filed on July 3, 2010, and U.S. Patent No. 7,126,131; At the time of the (four) towel, please apply for the United States to apply for the month of the brothers 11/600 413. The disclosure of the case of the 4th 5th Temple of the Stem is explicitly introduced in this article. The measuring instrument can be a special A broadband reflector designed to operate over a wide range of wavelengths, including VUV. An example of the instrument 1400 is presented in Figure η. As is apparent, the source 1410 beam is in the group M20, optics (not shown And the spectrometer 1430 is contained in a chamber mm of a loop control device (or optics). The spectrometer ^30 can be configured as any of the spectrometer types described above. Figure 14 and Figure 15 The reflectometer is shown to have non-collimated input light, but the light that provides d f'j ' to the spectrometer can be first collimated prior to being supplied to the spectrometer such that the collimated input light technique described above can also be applied by means of a map 14 and the reflector of Figure 15. Sample 145 〇, additional optics 1460 The motorized stage/sample chuck 147〇 (with optional integrated desorber capability) and the reference sample 1455 are housed in a separate environmental control sample chamber 14〇4 to enable loading and unloading of the sample without contaminating the instrument chamber The quality of the environment. The instrument chamber and the sample chamber are connected via a controllable coupling mechanism 14〇6 that permits the transfer of photons and, if so required, the exchange of gases. Instrument chamber 1402 and sample chamber 14 The crucible 4 is coupled to a vacuum and purge subsystem 1475 (which includes a suitable vacuum connector 1476, valve, purge connector 1477, and pressure gauge 1478) such that 129206.doc -30- can be independently performed in each chamber. 200848707 Environmental Control. Processors (not shown) located outside of the controlled environment can be used to assist with automated monitoring methods and to analyze measured data. It is recognized that this process can provide suitable data processing and / or any of a wide variety of computing components for the collection of data collected. l Lu is not clearly shown in Figure 4, but note that the system can be equipped with a man and other associated mechanization Components to assist in the automated loading and unloading of samples, thereby further increasing the throughput. Additionally, as is known in the art, the loading chamber can be utilized in conjunction with the sample chamber to improve loop control and increase In order to exchange the sample system flux, the light from the source 14 1〇 is modified via the beam conditioning module 142 and is guided through the coupling mechanism 14〇6 via the transfer optics and into the sample chamber 1404. In the sample chamber 14〇4, light is focused by the focusing optics _ ♦ onto the sample 1450. Light reflected from the sample 145 收集 is collected by the focusing optics 1460 and redirected out via the coupling mechanism 14 〇 6 Dispersion by spectrometer 1430 and by - as described above, can be recorded in the spectrometer or in an array of spectrometers. The overall optical path of the device is maintained within a controlled environment that acts to remove the absorbing material and permit transmission of VUV photons. A more detailed schematic diagram of the optical aspect of the instrument is shown in Figure 15. The instrument is configured to collect broadband reflectance data for reference in the VUV and two additional spectral regions. In operation, light from these three spectral regions can be obtained in parallel or in a serial manner. When operating in a serial manner, the reflectance data from the complete reflectance is first obtained and referenced, after which the reflectance data from the second zone and the third zone are referenced. Once all three data sets have been recorded, 129206.doc -31- 200848707 sputum spliced at the beginning to form a single broadband spectrum. In parallel operation, the reflectance data from all three zones are collected, referenced, and recorded simultaneously prior to data splicing. The instrument is separated into two environmental control chambers (instrument chamber 1402 and sample chamber to 14〇4). The state chamber M02 accommodates most of the system optics and is often well exposed to the atmosphere. The sample chamber 14G4 houses the sample and the sample and reference optics and is constantly opened to help change the sample. For example, the instrument and the monthly work to 1402 may include mirrors m-ι, M-2, M-3, and M-4. The Flip-in mirrors FM_丨 and FM_3 can be used to selectively select which of the light sources 1501, 1502, and 1503 (each having a different spectral region). Inverted mirrors FM-2 and FM-4 can be used to selectively select one of the spectrometers 15〇4, i5i6 and 1514 (depending on the selected spectral region). As in the case of Figure μ, spectrometers 1504, 15 16 and 15 14 may utilize the techniques described above including collimating input light. The mirrors M_6, M_7, M_8 and M_9 can be used to help guide the beam as shown. The windows wq and W-2 couple the light between the instrument chamber 14〇2 and the sample chamber 1404. The windows W_3, w_4, w_5 & W-6 couple the light into the state chamber 1402 and out of the instrument chamber 14〇2. The beam splitter bs and the shutters S-1 and S-2 are used to selectively direct light to the same 1506 or a reference 1507 with the aid of the mirror M_2 & M-4 as shown (this reference is in an embodiment) It can be mirrored). The sample beam passes through the compensation plate cp. A compensator plate CP is included to eliminate light traveling through the beam splitter substrate between the sample and the McCaw path due to the operational properties attributed to the beam splitter, while the light traveling through the reference channel passes through The phase difference will occur with the fact that the beam splitter substrate is three times. Therefore, the compensation plate can be constructed of the same material as the beam splitter 129206.doc -32- 200848707 and has the same thickness as the beam splitter. This ensures that light traveling through the sample channel also passes through the beam splitter substrate material of the same total thickness. When operating in a serial manner, first by switching the flip-source mirror FM-1 in the second spectral region and the flip-source mirror fm-2 in the third spectral region to, out, in position to allow from VUV The light of the source is collected by the focusing mirror M-1, collimated and redirected towards the beam splitter element BS to obtain VUV data. The light striking the beam splitter is split into two components (sample beam 555 and reference beam 1565) using an approximately balanced Michelson interferometer configuration. The sample beam is reflected from the beam splitter bs and travels through the compensator plate cp, the sample shutter s-丨 and the sample window W-1 into the sample chamber 14〇4 'at the sample chamber 1404' the sample beam is passed through a focus The mirror M-2 is redirected and focused onto the sample 1506. The reference shutter S-2 is turned off during this time. Sample window W-1 is constructed of a material that is sufficiently transparent to the VUV wavelength to maintain high optical flux. Light reflected from the sample is collected by the sample mirror M-2, collimated and redirected back through the sample window, in which case light passes through the sample shutter and compensator plate. The light is then prevented from proceeding without being obstructed by the flip detector mirror FM-2 in the first spectral region and the flip detector mirror FM-4 (switching to the π out position) in the second optical region. Next, the light is redirected by the focusing mirror Μ-3 and focused onto the entrance slit of the νυν spectrometer 15 14. At this point, the light from the sample beam is dissipated by the VUV spectrometer and recorded by its associated detector. After the beam, the reference beam is measured. This is achieved by closing the sample shutter S-1 and opening the reference shutter S-2. This enables the reference beam to pass through the 129206.doc -33-200848707 beam splitter BS, reference light The gate s_2 and the reference window w_2 travel into the sample chamber 1404 where the light is redirected by the mirror M_4 and focused onto the planar reference mirror 15() 7 serving as a reference. The reference window is also The VUV wavelength is sufficiently transparent to maintain high optical flux material construction. The light reflected from the surface of the plane reference mirror 1 507 travels back toward the focus reference mirror M-4, where the light is collected, _ straight and worn. Over the reference window w_2 and the reference shutter s_2 The beam splitter bs is redirected. The light is then reflected by the beam splitter towards the focusing mirror M_3, at the focusing mirror M-3, the light is redirected and focused to the entrance slit of the spectrometer i5i4. Each of the environmental control chambers The path length of the reference beam 1565 can be specifically designed to match the path length of the sample beam 丨 555.

C. After measuring the data set, the second light 1 region data set is obtained in a similar manner. During the collection of the second region spectral data, the second spectral region source inversion mirror and the second spectral region inversion mirror FM-2 are switched to the "in" position. The result 'blocks light from the VUV source 1501 and allows light from the second spectral region source 1503 to pass through the window W·3 after it has been contracted, collimated, and redirected by its focusing mirror m_6. Similarly, the second photo-detector inverting mirror 2 is switched to the &quot;person&quot; position from the sample beam (when the sample shutter is opened and the reference shutter is closed) and the reference beam 四 (4) and the sample light is turned off The gate is guided through the associated window W-6 and directed to the mirror Μ-9 on the incident slit of the spectrometer (10) of the second spectral region (10), at the second spectral region spectrometer 1516, the light is It is said to be the dispersion of the detector and to collect the ticket. In a similar way, by using the flute-stop 4 from the second 瑨 瑨 瑨 source inverting mirror FM-3 and the 129206.doc -34- 200848707 three spectral region detector The mirror 1?]^-4 turns "in" and simultaneously dumps the second spectral region source inversion mirror FM-1 and the second spectral region detector inversion mirror to collect data from the third spectral region. Once the samples and reference measurements for each of the spectral regions have been performed, a processor (not shown) can be used to calculate the reflectance spectra for each of the three regions. Finally, these individual reflectance spectra are combined to produce a single reflectance spectrum covering the three spectral regions. When operating in parallel mode, the source inverting mirror and the detector inverting mirror are replaced with appropriate beam splitters to simultaneously record data from all three spectral regions. The system of Figures 14 and 15 can be used as a stand-alone tool or can be integrated with another processing tool. In one embodiment, the systems of Figures 14 and 15 can be attached to the process J1 only with a mechanism that allows the sample to be transferred between a processing tool and the metering tool sample chamber. In a further alternative embodiment, the sample chambers can be constructed in a manner that they can be shared within the processing tool to allow the metering tool and processing tool to be more compactly integrated. For example, the meter/optical device chamber can be in communication with a sample chamber formed with a processing tool via a window, gate valve, or other coupling mechanism. In this manner, the sample does not have to leave the processing tool environment; instead, the sample can be contained within an area of the processing tool (such as a processing chamber, a transfer area, or other area within the processing tool). Other modifications and alternative embodiments of the invention will be apparent to those skilled in the <RTIgt; Accordingly, the description is to be regarded as illustrative only and illustrative of the embodiments of the invention. It should be understood that the form of the invention as shown and described herein should be considered as a preferred embodiment of the present invention 129206.doc-35-200848707. As will be apparent to those skilled in the art after having the benefit of the description of the present invention, equivalent elements may be substituted for the elements illustrated and described herein, and certain features of the invention may be utilized independently of the use of other features. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 - (Prior Art) - Schematic representation of a Roland circular spectrograph. Figure 2 - (Prior Art) - Schematic representation of a helium spectrometer. Figure 3 - Schematic representation of the VUV helium spectrometer. Figure 4 - Detector configured to share a controlled environment with the spectrometer chamber. Figure 5 - Detector configured in an independently controlled environment. Figure 6 - Schematic representation of a VUV helium spectrometer with a detector separate from the associated control electronics. Figure 7 - Schematic representation of a VUV aberration corrected grating spectrometer with an internally mounted detector. Figure 8 - Detector for 10 discrete wavelengths corresponding to 12〇nm (left), 130 nm, 140 nm, 150 nm, 160 nm, 170 nm, 180 nm, 190 nm, 200 nm, and 220 nm (right) The integrated irradiance received. Figure 9 _ νυν single-color light mirror with rotating table, exit slit and single element detector. Figure 10 - Schematic representation of a VUV spectrometer without an entrance aperture. Figure 11 - Schematic representation of a νυν spectrometer with a collimated light entrance. Figure 12 - A schematic representation of a grating-based νυν spectrometer with a collimated light entrance. Figure 13 - Comparison of GOF versus thickness for a reflectance data set designed with a ruthenium based spectrometer and a grating based spectrometer 129206.doc -36- 200848707. The results were obtained using a 1〇24 element detector for the I5 A SiON film deposited on Si. Figure 14 - Unintentional representation of the reflectometer. Figure 1 5 - Detailed schematic representation of the reflector [Main component symbol description] 101 concave grating 102 light 103 spectrum 104 Roland circle 105 incident slit 200 light 202 incident slit 204 first lens 206 collimated beam 208 dispersion 稜鏡 210 Two lenses 212 detector 300 spectrometer 302 environmental control chamber 304 entrance aperture 306 vacuum compatible assembly 307 gas treatment interface 308 reflective optics / collimation optics 310 稜鏡 129206.doc .37. 200848707 312 focusing optics 314 Detector 402 Detecting Element or Array 404 Sealing Mechanism 406 Outer Surface 502 Protective VUV Transmissive Window 602 Detecting Element 604 Vacuum Compatible Cable Assembly 606 Control Electronics 700 Compact νυν Spectrometer 702 Aberration Corrected Flat Field Imaging Grating Element 802 Curve 804 Curve 806 Curve 808 Curve 810 Curve 812 Curve 814 Curve 816 Curve 818 Curve 820 Curve 900 Scan Monochrome 902 Rotary Table 904 稜鏡 129206.doc -38- 200848707 906 Single Component Detector 908 Exit Slit 1000 Spectrometer 1002 light entrance 1004 collimated input light 1006 Vacuum Accessories/Vacuum Couplings 1100 Instrument 1102 First Focusing Optics 1104 Incident 孑L 1200 Spectrometer 1302 Curve 1304 Curve 1400 Instrument 1402 Environmental Control Instrument (or Optics) Chamber 1404 Environmental Control Sample Chamber 1406 Controllable Coupling Mechanism 1410 Source 1420 Beam Conditioning Module 1430 Spectrometer 1450 Sample 1455 Cang Sample 1460 Additional Optics / Focusing Optics 1470 Motorized Table / Sample Chuck 1475 Vacuum and Purification Subsystem 129206.doc -39- 200848707 1476 Vacuum Connector 1477 Purification Connector 1478 Pressure Gauge 1501 Light Source 1502 Light Source 1503 Light Source 1504 Spectrometer 1506 Sample 1507 Reference / Plane Reference Mirror 1514 Spectrometer 1516 Spectrometer 1555 Sample Beam 1565 Reference Beam BS Beam Splitter CP Compensation Plate FM-1 Inverted Mirror FM-2 Flip mirror FM-3 flip mirror FM-4 flip mirror Ml focusing mirror M-2 focusing sample mirror M-3 focusing mirror M-4 focusing reference mirror M-6 focusing mirror 129206.doc -40- 200848707 M -7 Mirror M-8 Mirror M-9 Mirror Sl This optical shutter S-2 W-l shutter reference sample window reference window W-2 W-3 W-4 window windows W-5 W-6 windows the window 129206.doc

Claims (1)

200848707 X. Patent Application Range: 1 · A spectrometer comprising: at least one turn that receives collimated light and disperses the collimated light into a plurality of spatially separated wavelengths of light, the at least one being used for a single pass In the configuration; • a first optical device that receives the collimated light from the chirp and focuses it onto a focal plane; and an array detector that is located at the focal plane, the array detector The plurality of spatially separated light wavelengths are simultaneously collected. f 2 . The spectrometer of claim 1 wherein the lanthanide is contained in an environmental control chamber. 3. The spectrometer of claim 2, wherein the environmental control chamber is sufficiently controlled to permit transmission of wavelengths below the deep UV wavelength. 4. The spectrometer of claim 2, wherein the collimated light received by the crucible comprises a wavelength below a wavelength of deep UV light. 5. The spectrometer of claim 4, wherein the first optical device is a reflective optical device. 6. The spectrometer of claim 1, wherein the first optical device is a reflective optical device. 7. The spectrometer of claim 1, further comprising: a first aperture through which the incident light is focused; and an optical device that receives S incident light and collimates the incident light to form the alignment Straight light. 8. The spectrometer of claim 7, wherein the first aperture receives an entrance aperture for input incident light to the spectrometer. The spectrometer of claim 7, wherein the collimated light received by the crucible comprises a wavelength below a wavelength of deep UV light. 10. The spectrometer of claim 9, wherein at least one of the first optical device and the second optical device is a reflective optical device. 11. The spectrometer of claim 7, wherein at least one of the first optical device and the second optical device is a reflective optical device. The spectrometer of claim 7, wherein the first optical device and the second optical device are reflective optics. 13. The spectrometer of claim 7, further comprising: a collimated light entrance aperture that receives input collimated light provided to the spectrometer, and a third optical device that receives the input collimated light and inputs the input The collimated light is focused onto the first aperture. 14. The spectrometer of claim 13 wherein the collimated light received by the crucible comprises a wavelength below a wavelength of deep UV light. 15. The spectrometer of claim 14, wherein at least one of the first optical device, the second optical device, and the third optical device is a reflective optical device. 16. The spectrometer of claim 13, wherein the plurality of the first optical device, the second optical device, and the third optical device are reflective optics. 17. The spectrometer of claim 13, wherein the first optical device, the second optical device, and the third optical device are all reflective optics. 18. The spectrometer of claim 13, wherein the first hole and the third optical device and the port method are located in the spectrometer and the input collimated light is used 129206.doc 200848707 m Large alignment tolerance between external sources of direct light. 19. The spectrometer of claim 1, 1 φ 兮 Huai Gu, 卜 β, 曰 具 具 忒 忒 忒 忒 忒 忒 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 20. The spectrometer of claim 1 is straight φ 兮 兮 & , 么 么 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 21. A spectrometer as claimed, wherein the array detector is moveable. 22. A reflectometer for processing a wavelength of light comprising at least a wavelength of > 1 wavelength below the wavelength, the reflectometer comprising: a light source that produces a wavelength of light comprising at least a wavelength below a deep uv wavelength; and an edge meter 'It is for receiving the light generated from the light source and reflected from the same light, the spectrometer comprising: at least one turn that receives the collimated light and disperses the collimated light into a plurality of spatially separated light wavelengths; An optical device that receives the collimated light from the chirp and focuses the collimated light onto a focal plane; and an array detector located at the focal plane, the array detector simultaneously collecting the plurality of The spatially separated wavelength of light. The reflectometer of claim 22, wherein the spectrometer further comprises: a first aperture through which the incident light is focused; and a second optical device that receives the incident light and causes the incident light to Straight to form the collimated light. 24. The reflectometer of claim 23, wherein the first optical device and the second optical device are reflective optics. The reflector of claim 23, further comprising: a collimated light entrance aperture that receives input collimated light provided to the spectrometer; and a third optical device that receives the input collimated light and The wheeled collimated light is focused onto the first hole. 26. The reflectometer of claim 25, wherein the first optical device, the second optical device, and the third optical device are reflective optics. 27. The reflectometer of claim 22, wherein the collimated light is collimated within the spectrometer from the non-collimated input light provided to the optical detector. 28. The reflectometer of claim 22, wherein the collimated light is collimated outside the spectrometer and provided as collimated input light to the spectrometer. 29. The reflectometer of claim 22, wherein the at least one tether is used in a one-way configuration. 30. A method for analyzing light via a spectral analysis technique, comprising: providing light in a range of vacuum ultraviolet (VUV) wavelength range or below in an environmental control chamber; dispersing the light at a time; and The detector array receives a plurality of spatially separated wavelengths of the dispersive light. The method of claim 30, wherein the light is collimated in a spectrometer containing the crucible. 32. The method of claim 30, wherein the light system is collimated outside of a spectrometer containing the crucible. The method of claim 30, wherein the light is directed from the prism to the detector array via a first retroreflective optics. 34. The method of claim 33, wherein the light system is directed toward the crucible via a second reflective optic. 35. The method of claim 30, wherein the light system is oriented toward the crucible via a first reflective optic guide. 36. The method of claim 30, wherein the detector array is moveable. 37. A spectrometer comprising: to an optical component that receives light and separates the light such that different wavelengths of the light are spatially separated; and an array detector located in a controlled environment and located The array detector is adjustable to facilitate the array of the debt detector relative to the focal plane, such that the different doorknife is at a focal plane away from the wavelength of the light to detect the wavelength of the light from the different spaces. alignment. 38. The spectrometer of claim 37, wherein the array detector is contained within a chamber of the optical Q spectrometer. 39. The spectrometer of claim 37, wherein the adjustment of the position of the array detector does not change one of the volumes of the controlled environment. 4. The spectrometer of claim 39, wherein the array detector is lightly coupled to the detection electronics located outside of the forked environment. 41. The spectrometer of claim 39, wherein the environment of the spectrometer is sufficiently controlled to permit transmission and detection of wavelengths below the deep UV wavelength. The spectrometer of the invention 37, wherein the optical component is a glimpse. 43. The spectrometer of Shiming 37, wherein the optical element is a diffraction grating. 129206.doc 200848707 44. The spectrometer of claim 37, wherein the light received by the optical element comprises a wavelength below a wavelength of deep UV light. 45. The spectrometer of claim 37, wherein the light system received by the optical element is collimated. 46. The spectrometer of claim 45, wherein the collimated light received by the optical element comprises a wavelength below a wavelength of deep UV light. 47. The spectrometer of claim 37, wherein the p-trainer is transferred to detection electronics located outside of the controlled environment. 48. A spectrometer comprising: an optical path comprising at least one optical component; an adjustable array detector located at a focal plane of the optical path, the adjustable array detector being located in the optical path At an point after the at least one optical component, the adjustable array detector detects light provided at the focal plane, the array detector being adjustable to facilitate the array detector relative to The alignment of the focal plane; and an enclosure within the spectrometer that completely surrounds the adjustable array detector. 49. The spectrometer of claim 48, wherein the adjustable array detector is coupled to detection electronics located outside the enclosure of the spectrometer. 5 The optical error meter of claim 49, wherein the enclosure of the spectrometer is sufficiently controlled to allow transmission and detection of wavelengths below the deep UV wavelength. The spectrometer of claim 48, wherein the enclosure of the spectrometer is sufficiently controlled to permit transmission and detection of wavelengths below the deep UV wavelength. 52. The spectrometer of claim 51, wherein the light received by the optical element is 129206.doc 200848707 straight. 53. The spectrometer of claim 52, wherein the optical component is a prism. 54. The spectrometer of claim 52, wherein the optical component is a diffraction grating. 55. The spectrometer of claim 48, wherein the light received by the optical element comprises a wavelength below a wavelength of deep UV light. 56. The spectrometer of claim 48, wherein the light received by the optical element is collimated. A spectrometer of claim 56, wherein the collimated light system is collimated within the spectrometer. A spectrometer according to claim 56, wherein the collimated light system is collimated outside the spectrometer. A spectrometer for processing a wavelength of light comprising a wavelength below a deep (four) wavelength, the spectrometer comprising: at least an optical element that receives light comprising a wavelength below a wavelength, the optical element expanding the light into a plurality of spatially separated a wavelength of light; and an adjustable array of detectors that receive the plurality of spatially separated wavelengths of light, the adjustable array detector being movable such that the array of detectors is configurable relative to the plurality of The wavelength of the spatially separated light is aligned. 60. The spectrometer of claim 59, wherein the adjustable array detector is contained within an enclosed chamber of the spectrometer and wherein adjustment of the position of the adjustable array does not change a volume of the enclosed chamber. The light of claim 60 (four)' wherein the adjustable array detector is switched to the detection electronics located outside the closed cavity of the spectrometer. The spectrometer of claim 59, wherein the optical component is a second mirror. 58 59. 61 62 129206.doc 200848707 63. A spectrometer other than the one in which the optical element is a diffraction grating. 64. The spectrometer of claim 59, wherein the light system is collimated by the optical element, such as a spectrometer of claim ,, wherein the spectrometer is configured to receive light collimated externally of the spectrometer. A method of operating a spectrometer such that an array detector is alignable with respect to an optical path within the spectrometer, comprising: providing an internal space within the spectrometer, the optical path being at least partially within the interior of the interior The internal space is sufficiently environmentally controlled to allow transmission and detection of light wavelengths at least partially including wavelengths below the deep UV wavelength; and &quot;Zhou Zheng δ ray array detector relative to the position of the optical path, 八中&quot; The adjustment of the position of the Haiguang Road does not change the volume of one of the spaces. 67. The method of claim 66, further comprising: coupling the array of detected objects to the detection electronics, the detected electronic components being located outside of the interior space. 68. The method of claim 67, wherein one of the defects is located within the optical path. 69. The method of claim 68, wherein the light received by the raft is collimated. 70. The method of claim 67, wherein a diffraction grating is located within the optical path. The method of claim 70, wherein the spectrometer is configured to receive light that is collimated outside of the spectrometer. 72. A spectrometer comprising: an entrance port configured to receive light from a source external to the spectrometer 'the entrance port receives collimated light; 129206.doc 200848707 73. f. to: an optical component, The light is collimated from the light source from the light source to the first optical element, and the photon 70 is such that the δ receives the collimated light into a plurality of spatially separated light wavelengths; And the 歹i detection benefit is positioned to simultaneously collect the plurality of spatially separated light wavelengths. The collimator of the method 72, wherein the collimated light received at the entrance is received at the at least - optical element without being focused. The spectrometer of claim 72, further comprising: - a first optical device that receives the collimated light received at the entrance and focuses the collimated light onto a hole; and 75. A second optical device that receives light provided through the aperture and collimates the light to form the collimated light received by the at least one optical component. A spectrometer according to claim 74, wherein the optical element is a unit. 76. The spectrometer of claim 74, wherein the optical component is a diffraction grating. The ??. 78. The spectrometer of claim 72, wherein the optical element is a unit. A spectrometer of claim 72, wherein the optical component is a diffracted light. 79. The spectrometer of claim 72, wherein the collimated light received at the entrance comprises a wavelength below a wavelength of deep UV light. ^ 80. The spectrometer of claim 72, wherein the entrance port is a vacuum compatible port for coupling to a controlled environment. 81. The spectrometer of claim 72, wherein the array detector is moveable. 82. The spectrometer of claim 72, wherein the collimated light system received at the entrance is provided by a reflectometer. 129206.doc 200848707 83. The spectrometer of claim 8 wherein the collimated light received at the entrance comprises a wavelength below a wavelength of deep UV light. 84. A spectrometer comprising: a collimated light entrance aperture 'receiving an input collimated light supplied to the spectrometer to provide light to an optical path within the spectrometer, the input collimated light comprising a wavelength below a wavelength of deep UV light An optical component that emits light within the optical path; and a detector that receives the developed light. 85. The spectrometer of claim 8 wherein the debt detector is an array of debt detectors. 86. The spectrometer of claim 85, wherein the detector is a movable array detector. ^ 87. The spectrometer of claim 84, wherein the detector is moveable. 88. The spectrometer of claim 84, wherein the optical component is a unit. 89. The female operator is called the spectrometer of the item 8', wherein the detector is a movable array debt detector. </ RTI> 91. The spectrometer of claim 84, wherein the optical element is a diffraction grating. The spectrometer of claim 89, wherein the detector is a movable array detector. The spectrum of the '84.'s monthly finding 84, wherein the input collimated light received at the collimation &amp; man perforation is received at the at least one optical element without being focused. 93. The spectrometer of claim 84, further comprising: a second optical device that receives the collimated light received at the collimated light perforation and focuses the input collimated light to a second And 129206.doc -10- 200848707 Upper: a second optical device that receives light provided through the second aperture and collimates the light to form the collimated light received by the at least one optical component. 94. The spectrometer of claim 93, wherein the optical element is a unit. 95. The spectrometer of claim 94, wherein the detector is a movable array detector. 96. The spectrometer of claim 93, wherein the optical component is a diffraction grating. 97. If the spectrometer is a % of the spectrometer, wherein the detector is a movable array detector. The spectrometer of the π π 项 μ, wherein the collimated light received at the collimated light entrance aperture is provided by a reflectometer. 99. The spectrometer of claim 98, wherein the optical component is a unit. 1〇〇·如晴99 The spectrometer of the item 99, wherein the detector is a movable array debt detector. The spectrometer of claim 98, wherein the optical component is a diffractive optical thumb. 1. The spectrometer of claim 101, wherein the predator is a movable array of detectives. 103. A method for improving the alignment tolerance between an optical system of the spectrometer, comprising: coupling the spectrometer to the optical system; and; using collimated light as Spectrometer input light is supplied from the optical system to the light meter to provide a greater alignment tolerance between the optical path of the collimated light and the spectrometer. 104. The method of claim 103 wherein the spectrometer and the optical system are coupled by a vacuum compatible coupling. The method of claim 1 to 3, wherein the collimated light from the optical system comprises a wavelength below the wavelength of the deep UV light, and the method of claim 105, wherein the method The optical system is a reflectometer. The method of claim 103, wherein the optical system is a reflectometer. The method of claim 107, wherein the spectrometer comprises an optical element that separates light into a plurality of spatially separated wavelengths of light. The method of claim 1, wherein the optical component is one. The method of claim 109, wherein the detector is a movable array detector. The method of claim 108 is as in the method of claim 111. Removable array detection 129206.doc -12-