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TW200847845A - Method and device for manufacturing organic electroluminescence element - Google Patents

Method and device for manufacturing organic electroluminescence element Download PDF

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Publication number
TW200847845A
TW200847845A TW097115930A TW97115930A TW200847845A TW 200847845 A TW200847845 A TW 200847845A TW 097115930 A TW097115930 A TW 097115930A TW 97115930 A TW97115930 A TW 97115930A TW 200847845 A TW200847845 A TW 200847845A
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Taiwan
Prior art keywords
substrate
organic
forming process
layer
organic electroluminescence
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TW097115930A
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Chinese (zh)
Inventor
Yoshikazu Takahashi
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So Ken Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A manufacturing method is provided for fabricating an organic electroluminescence element (10) which comprises a substrate (12), a laminated structure formed on the substrate (12), and a sealing film (26). The laminated structure is constituted of an anode (14), a hole transport layer (16), an organic electroluminescence layer (18), an electron transport layer (20), and a cathode (24). The method includes an organic electroluminescence layer formation process for forming the organic electroluminescence layer (18) by discharging a vaporizing material to the substrate from a nozzle arranged in a position where the distance to the substrate is 15 mm or less. By the way, the life of the organic electroluminescence element can be prolonged and also the reduction in manufacturing cost can be attained as compared with conventional cost.

Description

200847845 九、發明說明： 【發明所屬之技術領域】 本發明是關於有機電致發光元件（organic electroluminescent device)的製造方法及有機電致發光 元件的製造裝置。 【先前技術】 有機電致發光元件疋具有以陰極與陽極至少夾住有機 發光層的構成，藉由在有機發光層注入電子及電洞（h〇 1 e ) 並使其再結合（recombine)以產生激子（excit〇n)，利用該 激子鈍化（deactivate)時的光的放射（螢光、磷光）使其發 光的元件。 有機電致發光元件的特徵為在丨〇V以下的低電壓下， 100〜100000 cd/m2左右的高亮度的面發光為可能，且可藉由 選擇螢光物質的種類使由藍色到紅色的發光為可能。因此， 有機電致發光元件被期待廣泛使用於顯示器（displa幻或照 明裝置。 . 在有機電致發光兀件中具有低分子系的有機電致發光 元件與高分子系的有機電致發光元件，由於低分子系的有機 電致發光元件可藉由真空蒸鍍法（vacuum evap〇rati〇n -關製造，故在製造過程中無須如高分子系的有機電致 ^光兀件的情形般使用溶劑，與高分子系的有機電致發光元 件的情：比較，具有高亮度、高效率、長壽命之特徵。 疋在利用真二条鍍法製造低分子系的有機電致發 5 200847845 光元件的情形下，即使在真空蒸鍍中僅存在微量的水分也合 目 使有機電致發光元件的壽命大幅地縮短，因此，為了謀求有 機電致發光元件的長壽命化，需儘量減少存在於真空蒸鍍中 的水分。 於是’藉由極度提高真空蒸鍍裝置内的真空度（例如 ΙΟ — 8〜lO^Torr(約10_6〜1〇-8pa),可徹底地減少存在於真空 蒸鑛中的水分的量之有機電致發光元件的製造方法被提出 (例如参照非專利文獻丨）。而且，藉由使真空蒸鍍裝置的 内土極為平坦’或者由外部以加熱器（hea^er)加熱真空蒸鍍 裝置内，去除附著於真空蒸鍍裝置的内壁之水分，可徹底地 減少存在於真空蒸鍍中的水分的量之有機電致發光元件的 製造方法被提出（例如參照非專利文獻2 )。 [非專利文獻1 ]:村田英幸（Hideyuki Murata)，其他 5名，「在超高真空條件下製造的有機發光元件中的穩定性 提间（Enhanced Stability of organic light-emitting devices fabricated under ultra-high vacuum condition)」’化學物理通訊（chemical Physics Letters)、 200 6年6月7日、第426卷、美國、U1 — 114頁。 [非專利文獻2 ] :「北陸先端大學與北野精機，有機EL， 壽命5倍，徹底去除内壁的水分」，日經產業新聞、2〇〇7 年4月19日，早報頭版。 但是，在非專利文獻1所記載的有機電致發光元件的製 造方法中，因需要使用超高真空的真空蒸鍍裝置，故有製造 成本高的問題。而且’在非專敎獻2所記載的有機電致發 6 200847845 光兀件的製造方法中，因在使用高真空的直咖 需要使真空蒸鍍裝置的内壁極為平坦，或者裝置上， 加熱真空蒸鍍裝置内，去除附著於真空蒸鍍艘夕部以加熱器 分，故仍有製造成本高的問題。 、内壁之水 【發明内容】 於疋’本發明是為了解決這種問題而進 目的為提供一種可謀求有機電致發光元件的長壽& - 可使製造成本比以往還便宜之有機電致發光元件的：且 法。而且’其目的為提供一種可實施這種有機電致發：： 的製造方法之有機電致發光元件的製造裝置。 (1 )、本發明的有機電致發光元件的製造方法包含： 基板；形成於前述基板上，至少具有陽極、有機發光：及:· 極之璺層結構體，其特徵為：包含在真空環境下，藉由由配 置於至前述基板的距離為15mra以下的位置之噴嘴（nozzle) 朝雨述基板排出由有機發光材料構成的汽化材料，形成前述 有機發光層之有機發光層形成製程。 因此’依照本發明的有機電致發光元件的製造方法， 因由配置於至基板的距離為15mm以下的位置之噴嘴朝基板 排出由有機發光材料構成的汽化材料，故由喷嘴排出的該汽 化材料在高密度狀態下到達基板，其結果可使在製造過程中 被有機發光層取入的水分量達到極少的水準，可謀求有機電 致發光元件的長壽命化。 而且，依照本發明的有機電致發光元件的製造方法， 7 200847845 因無須使用高真空的真空蒸鍍裝置，或者使真空蒸鍍裝置的 内壁極為平坦，或者由外部以加熱器加熱真空蒸鍍裝置内， 去除附著於真空蒸鍍裝置的内壁之水分，故可使製造成本比 以往還便宜。 而且，依照本發明的有機電致發光元件的製造方法， 因由配置於至基板的距離為！ 5mm以下的位置之喷嘴朝基板 排出由有機發光材料構成的汽化材料，故可由比以往還少量 的有機發光材料以高產率（yield)形成有機發光層，由此點 也可以說可使製造成本比以往還便宜。 因此，本發明的有機電致發光元件的製造方法成為可 謀=有機電致發光元件的長壽命化，並且可使製造成本比以 往還便宜之有機電致發光元件的製造方法。 此外，在本發明的有機電致發光元件的製造方法中， -己置於至基板的距離為i 〇 mm以下的位置之噴嘴朝基板排 出汽化材料較佳，由配置於至基板的距離為5mm以下的位置 之噴嘴朝基板排出汽化材料更佳。 (2)、在本發明的有機電致發光元件的製造方法中， 在xlO Pa〜1x10 pa的真空環境下，進行前述有機發光層 形成製程較佳。 如上述’在本發明的有機電致發光元件中，因藉由由 =置於至基板的距離為！ 5mm以下的位置之喷嘴朝基板排出 ^化材料，可使被有機發光層取入的水分量達到極少的水 準，故，須使用高真空的真空蒸鍍裝置（例如5xl〇_8Pa以 的超回真空的真空蒸鍍裝置或者例如以上的高 8 200847845 真空的真空蒸鍍裝置），在例如lxl〇-3Pa〜ixl0-5Pa之較低 真空的條件下可充分地形成長壽命的有機發光層。 (3 )、在本發明的有機電致發光元件的製造方法中， 在將則述噴嘴加熱至汽化材料不會再附著於前述噴嘴的溫 度的條件下，進行前述有機發光層形成製程較佳。 因藉由以這種方法消除了在喷嘴的尖端部分汽化材料 再附著的情形，故由喷嘴排出的汽化材料在高密度狀態下到 達基板。其結果可使在製造過程中被有機發光層取入的水分 里達到極少的水準，可謀求有機電致發光元件的長壽命化。 而且，因可消除喷嘴的喷孔堵塞，故有機電致發光元件的製 造裝置中的維修保養（maintenance)變得容易。 此外’由同樣的觀點，針對由使有機發光材料汽化的 a化源至噴嘴之間的連通部，也是加熱至汽化材料不會再附 者的溫度較佳。 此外’汽化材料不會再附著的溫度是依照有機發光材 料的種類而不同，大致在150QC〜400°C的範圍内。 (4 )、在本發明的有機電致發光元件的製造方法中， 一邊使則述基板移動’一邊進行前述有機發光層形成製程較 佳。 因藉由以這種方法可縮短基板承受來由噴嘴的輻射熱 的時間’故可抑制起因於基板的溫度上升之基板的劣化。 此外’基板的移動速度依照喷嘴的溫度、由喷嘴到基 板的距離、基板的材料、有機發光層的膜厚及有機發光層的 开y成速度專而不同，在〇 lm/s〜i〇m/s的範圍較佳，在 9 邊進行前述有機發光層形成 200847845 0· 3m/s〜3m/s的範圍更佳。 (5)在本發明的有機電致發光元件的製造方 一邊冷卻前述基板， 佳0 、二由X這種方法可抑制起因於基板的溫度上升 的劣化。 乂、+、^ 在本發明的有機電致發光元件的製造；$ 月丨J述登層結構體是# ^ ^ 更匕3有機發光層以外的其他的 之豐層結構體，更包 15mm 文匕各糟由由配置於至前述基板的 材料以外置之其他的嘴嘴朝前述基板排出由有 層之…：構成的汽化材料’形成前述其他 層之其他的有機層形成製程較佳。 因精由以#絲士·、+ 以下的位：；：藉由由配置於至基板的 可使在製造過程中被朝基板排出該汽化材 的水準，…“機：層取入的水分量達 化。 Τ4求有機電致發光元件之更進一步的 八他的有機層較佳為 輸層、電洞注入層等。舉例6兄明電洞傳輸層、 匕外，其他的有機層可為一 而且’進行有機發光層形成f程及可以為複 順序是依存於其他…s及其他的有機層形成 電則專輸層及電子傳輸層的情形下，依=其他的有 耘（電洞傳輪層形 I、他的有機層 成⑷、有機發光層形成製程、 法中， 製程較 之基板 '法中， 有機層 距離為 機發光 >的有機 距離為 料，也 到極彡 長壽命 電子傳 數層。 製程的 機層為 形成製 其他的 200847845 有機層形成製程（電子傳輸層形成製程）的順序進行。 _ β(7)、在本發明的有機電致發光元件的製造方法中， 前述疊層結構體是更包含無機層之疊層結構體，更包含.藉 由利用真空蒸鍍法使由無機材料構成的汽化材料附著心 述基板，形成前述無機層之無機層形成製程；藉由利用真空 蒸鍍法使由構成陰極的材料構成的汽化材料附著於前述基 板二成前述陰極之陰極形成製程，在同一個真空裝置之； ，行：述有機發光層形成製程、前述其他的有機層形成製 程、前述無機層形成製程及前述陰極形成製程較佳。 因此，依照本發明的有機電致發光元件的製造方法， 因予以在同一個真空裝置之中進行有機發光層形成製程、其 他的有機層形成製程、無機層形成製程及陰極形成製程 可使在製造過程中被疊層結構體取入的水分量達到極少的 水準，可謀求有機電致發光元件的長壽命化。 無機層較佳為可舉例說明電洞注入層、電子注入層等。 (8)、在本發明的有機電致發光元件的製造方法中， 前述有機電致發光元件是更包含在前述基板上覆蓋前述疊 層結構體而形成的密封層之有機電致發光元件，更包含藉由 polymerization 利用蒸鍍聚合法（vap〇r dep〇siti〇n method)使原料單體（m〇n〇mer )在前述基板上聚合，形成前述 密封層之密封層形成製程’在同—個真空裝置之中進行前述 有機發光層形成製程、前述其他的有機層形成製程、前述叙 機層形成製程、前述陰極形成製程及前述密封層形成製程較 200847845 因此，依照本發明的有機電致發光元件的製造方法， 因可错由利用蒸鍍聚合法形成的密封性能良好的密封層覆 盖疊層結構體’故可使在有機電致發光元件的製造後浸I聶 ==水分量達到極少的水準，可謀求有機電致發二 件的長命命化。 而且，依照本發明的有機電致發光元件的製造方法， 因予以在同一個真空裝置之中進行有機發光層形成製程、其 他的有機層形成製程、無機層形成製程、陰極形成製程及密 于曰幵y成製耘，故可使在製造過程中被有機電致發光元件取 :的水分量達到極少的水準，可謀求有機電致發光元件的長 哥命化。 )、在本發明的有機電致發光元件的製造方法中， 月J述基板使用撓性基板（f lexible substrate)，一邊使前述 基板在疑轉滾筒上沿著旋轉方向移動，一邊進行前述有機發 光層形成製程、前述其他的有機層形成製程、前述無機層形 成製耘、則述陰極形成製程及前述密封層形成製程較佳。 因此’依照本發明的有機電致發光元件的製造方法， 可在撓性基板上以高的生產性製造有機電致發光元件。 (1 〇 )、本發明的有機電致發光元件的製造裝置是用 以製造具備如下構件之有機電致發光元件：基板；形成於前 L 土反上’至少具有陽極、有機發光層及陰極之疊層結構 /、特徵包含·真空室（vacuum chamber);配置於前述真 二至中’運送前述基板之基板運送機構；前述真空室中的具 有在至前述基板的距離為1 5mm以下的位置朝前述基板排出 200847845 由有機發光材料構成的汽化材料的功能之喷嘴。 因此’依照本發明的有機電致發光元件的製造裝置， 因由配置於至基板的距離為i 5mm以下的位置之喷嘴朝基板 排出由有機發光材料構成的汽化材料為可能，故由噴嘴排出 的該汽化材料在高密度狀態下到達基板，其結果可使在製造 過程中被有機發光層取入的水分量達到極少的水準，可謀求 有機電致發光元件的長壽命化。 而且’依照本發明的有機電致發光元件的製造裝置， 因除了無須那種程度的高真空（例如lxl〇-3pa〜ixl〇-5Pa左 右的較低真空就足夠）外，也無須配設使真空蒸鍍裝置的内 壁極為平坦’或者由外部以加熱器加熱真空蒸鍍裝置内，去 除附著於真空瘵鍍裝置的内壁之水分的機構，故可使製造成 本比以往還便宜。 而且’依照本發明的有機電致發光元件的製造裝置， 因由配置於至基板的距離為1 5min以下的位置之喷嘴朝基板 排出由有機發光材料構成的汽化材料為可能，故可由比以往 還少量的有機發光材料以高產率形成有機發光層，由此點也 可以說可使製造成本比以往還便宜。 因此’本發明的有機電致發光元件的製造裝置是可謀 求有機電致發光元件的長壽命化，並且可使製造成本比以往 還便宜之有機電致發光元件的製造裝置。 而且’依照本發明的有機電致發光元件的製造裝置， 因具備基板運送機構，故可一邊使基板移動，一邊進行有機 發光層形成製程。因此，可縮短基板承受來自喷嘴的輻射熱 13 200847845 的時間’因而可抑制起因於基板的溫度上升之基板的劣化。 (11)、在本發明的有機電致發光元件的製造裝置中， 更包含將前述喷嘴加熱至汽化材料不會再附著於前述喷嘴 的溫度之噴嘴加熱機構較佳。 因藉由如此地構成，消除了在喷嘴的尖端部分汽化材 料再附著的情形，故由噴嘴排出的汽化材料在高密度狀態下 =基m果可使在製造過程中被有㈣光層取入的水 分量達到極少的水準，τ謀求有機電致發光元件的長壽命 化而且，因可消除喷嘴的噴孔堵塞，故有機電致發光元件 的製造裝置中的維修保養變得容易。 卜此外由同樣的觀點，針對由使有機發光材料汽化的 仏化源至喷嘴之間的連通部，也是更具備加熱至汽化材料不 會再附著的溫度之加熱機構較佳。 _ (12 )、在本發明的有機電致發光元件的製造裝置中， 刚述登層結構體是更包含有機發光層以外的其他的有機層 之疊層結構體，更包含：前述真空室中的具有在至前述基板 的距離為1 5mm以下的位置朝前述基板排出由有機發光材科 以外的有機材料構成的汽化材料的功能之其他的喷嘴較佳。 因藉由如此地構成，藉由由配置於至基板的距離為 1 5mm以下的位置之其他的噴嘴朝基板排出該汽化材料，可 使在製造過程中被其他的有機層取入的水分量達到極少的 水準，故可謀求有機電致發光元件之更進一步的長壽命化。 (1 3 )、在本發明的有機電致發光元件的製造裝置中， 月’J述疊層結構體是更包含無機層之疊層結構體，更包含： 200847845 置於前述直〇 认M ^ 中，猎由利用真空蒸鍍法使由益機# m 付者於月，j迷基板，形成前述無機層之直^ 構；配置於前述直介$ + 〜二4鍍機 極的材料構成的：=:精由利用浏 其他的真空蒸鍍機構較佳。 成^陰極之 因此’依照本發明的有機電致發光元件的 因可在同一個直处 裂乂裝置， >、二扁置之中進行有機發光層形 的有機層形成製程、無機層形成製程及陰極、：他 :在製造過程中被疊層結構體取入的水分量達二:= 準’可謀求有機電致發光元件之更進一步的長壽命：。的水 —(14)、在本發明的有機電致發光元件的製$裝置中， 月,J述有機電致發光元件是更句人义 居，士“ 件疋更包含在别述基板上覆蓋前述疊 曰、，構體而形成的密封層之有機電致發光元件，更包 空室中’藉由利用蒸鍍聚合法使原料單體在前述基 反上聚合，形成前述密封層之蒸鍍聚合機構較佳。 因此，依照本發明的有機電致發光元件的製造裝置， 因可藉由利用蒸鍍聚合法形成的密封性能良好的密封層覆 蓋疊層結構體’故可使在有機電致發光元件的製造後浸二疊 層結構體的水分量達到極少的水準，可謀求有機電致發光元 件之更進一步的長壽命化。 而且，依照本發明的有機電致發光元件的製造裝置， 因可在同一個真空裝置之中進行有機發光層形成製程、其他 的有機層形成製程、無機層形成製程、陰極形成製程及密封 層形成製程，故可使在製造過程中被有機電致發光元件取入 200847845 的水分量達到極少的水準，可謀求有機電致發光元件之更進 一步的長壽命化。 (15)、在本發明的有機電致發光元件的製造装置中， 前述基板是撓性基板，前述基板運送機構更包含：送出前述 基板的送出滾子；捲取前述基板的捲取滾子；配置於前述基 板的運送路徑中’隨著前述基板被運送而旋轉的旋轉滾筒， 刚述喷嘴是朝在前述旋轉滾筒的表面上被運送的前述基板 排出汽化材料而構成較佳。 依…、本發明的有機電致發光元件的製造裝置， 可在挽〖生基板上以高的生產性製造有機電致發光元件。 义（1 6 )、在本發明的有機電致發光元件的製造裝置中， 在前述旋轉滾筒的内凡 、a # α又置有冷部別述旋轉滚筒的表面之 冷卻機構。 精由如此地構成，It 、， 成 T抑制起因於在旋轉滾筒的表面上 被運运的基板的溫度上升之基板的劣化。[Technical Field] The present invention relates to a method for producing an organic electroluminescent device and a device for producing an organic electroluminescence device. [Prior Art] The organic electroluminescent device has a configuration in which at least an organic light-emitting layer is sandwiched between a cathode and an anode, and electrons and holes (h〇1 e ) are injected into the organic light-emitting layer to recombine them. An exciton is generated, and an element that emits light by emitting (fluorescence, phosphorescence) of light when the exciton is deactivated is used. The organic electroluminescence device is characterized in that high-luminance surface light emission of about 100 to 100,000 cd/m 2 is possible at a low voltage of 丨〇V or less, and can be made from blue to red by selecting a kind of fluorescent substance. The luminescence is possible. Therefore, an organic electroluminescence device is expected to be widely used in displays (displa illusion or illumination devices. Among organic electroluminescence devices, there are low-molecular organic electroluminescence elements and polymer-based organic electroluminescence elements, Since the low-molecular organic electroluminescence device can be manufactured by vacuum evaporation (vacuum evap〇rati〇n-off, it is not necessary to use a polymer-based organic electro-optical element in the manufacturing process). The solvent is characterized by high brightness, high efficiency, and long life compared with the polymer organic electroluminescent device. 疋The use of true two-plate plating to produce low-molecular organic electroluminescence 5 200847845 Optical components In this case, even if only a small amount of water is present in the vacuum deposition, the life of the organic electroluminescence device is greatly shortened. Therefore, in order to increase the life of the organic electroluminescence device, it is necessary to minimize the existence of vacuum evaporation. Moisture in the plating. So by extremely increasing the degree of vacuum in the vacuum evaporation apparatus (for example, ΙΟ 8~lO^Torr (about 10_6~1〇-8pa), it can be completely reduced A method of producing an organic electroluminescence element in an amount of moisture in vacuum distillation is proposed (for example, refer to Non-Patent Document 丨). Moreover, by making the inner soil of the vacuum evaporation apparatus extremely flat or by external heater (hea^er) A method of manufacturing an organic electroluminescence device in which a portion of a vacuum vapor deposition device is heated and the moisture adhering to the inner wall of the vacuum vapor deposition device is removed, and the amount of moisture present in the vacuum deposition is completely reduced ( For example, refer to Non-Patent Document 2). [Non-Patent Document 1]: Hideyuki Murata, 5 others, "Enhanced Stability of Organic Light in Organic Light-Emitting Elements Manufactured under Ultra-High Vacuum Conditions" -emitting devices fabricated under ultra-high vacuum condition)" Chemical Physics Letters, June 7, 2006, Vol. 426, USA, U1 - 114. [Non-Patent Document 2]: "Northland The University of the Apex and the Kitano Seiki, organic EL, life expectancy of 5 times, completely remove the moisture inside the wall", Nikkei Industry News, April 19, 2007, the front page of the Morning Post. In the method for producing an organic electroluminescence device described in Non-Patent Document 1, since it is necessary to use an ultra-high vacuum vacuum vapor deposition device, there is a problem in that the manufacturing cost is high. Organic electroluminescence 6 200847845 In the manufacturing method of optical components, it is necessary to make the inner wall of the vacuum evaporation apparatus extremely flat, or to heat the vacuum evaporation apparatus, and to remove the adhesion to vacuum evaporation. The eve is divided by a heater, so there is still a problem of high manufacturing cost. Water of the inner wall [Invention] The present invention has been made to solve the above problems, and an object of the present invention is to provide an organic electroluminescence capable of realizing the longevity of an organic electroluminescence device. Component: and method. Further, it is an object of the invention to provide an apparatus for producing an organic electroluminescence device which can carry out the production method of such an organic electroluminescence. (1) The method for producing an organic electroluminescence device according to the present invention, comprising: a substrate; and a substrate having at least an anode, an organic luminescence, and a ruthenium layer structure formed on the substrate, characterized in that it is contained in a vacuum environment Then, an organic light-emitting layer forming process of the organic light-emitting layer is formed by discharging a vaporized material made of an organic light-emitting material toward a shower substrate by a nozzle disposed at a position of a distance of 15 mra or less from the substrate. Therefore, in the method of manufacturing an organic electroluminescence device according to the present invention, since the vaporized material composed of the organic light-emitting material is discharged toward the substrate by a nozzle disposed at a position of a distance of 15 mm or less from the substrate, the vaporized material discharged from the nozzle is When the substrate is reached in a high-density state, as a result, the amount of water taken in by the organic light-emitting layer during the manufacturing process can be made extremely small, and the life of the organic electroluminescent device can be extended. Further, according to the method for producing an organic electroluminescence device of the present invention, 7 200847845, the vacuum evaporation device is not required to be used, or the inner wall of the vacuum evaporation device is extremely flat, or the vacuum evaporation device is heated by a heater externally. Since the moisture adhering to the inner wall of the vacuum vapor deposition apparatus is removed, the manufacturing cost can be made lower than in the past. Further, according to the method of manufacturing an organic electroluminescence device of the present invention, the distance to the substrate is set to be! The nozzle of the position of 5 mm or less discharges the vaporized material composed of the organic light-emitting material toward the substrate, so that the organic light-emitting layer can be formed with a high yield by a small amount of the organic light-emitting material, which can also be said to make the manufacturing cost ratio. It used to be cheap. Therefore, the method for producing an organic electroluminescence device of the present invention is a method for producing an organic electroluminescence device which is advantageous in that the organic electroluminescence device can be extended in life and the production cost can be made lower than usual. Further, in the method for producing an organic electroluminescence device of the present invention, it is preferable that the nozzle which has been placed at a position of a distance of i 〇 mm or less from the substrate is discharged toward the substrate, and the distance from the substrate to the substrate is 5 mm. The nozzles in the following positions are better for discharging the vaporized material toward the substrate. (2) In the method for producing an organic electroluminescence device of the present invention, it is preferred that the organic light-emitting layer formation process be carried out in a vacuum environment of xlO Pa to 1 x 10 Pa. As described above, in the organic electroluminescence device of the present invention, the distance from the substrate is set by =! The nozzles at positions below 5 mm discharge the chemical material to the substrate, so that the amount of water taken in by the organic light-emitting layer can be minimized. Therefore, a vacuum evaporation device with a high vacuum (for example, a super-return of 5xl 〇 _8Pa) must be used. A vacuum vacuum evaporation apparatus or a vacuum evaporation apparatus such as the above-mentioned high 8 200847845 vacuum can sufficiently develop a lifetime organic light-emitting layer under a low vacuum of, for example, lxl -3 Pa to ixl 0 -5 Pa. (3) In the method for producing an organic electroluminescence device of the present invention, the organic light-emitting layer forming process is preferably carried out under the condition that the nozzle is heated to a temperature at which the vaporized material does not adhere to the nozzle. Since the vaporized material is reattached at the tip end portion of the nozzle by this method, the vaporized material discharged from the nozzle reaches the substrate in a high density state. As a result, the amount of moisture taken in by the organic light-emitting layer during the production process can be made extremely small, and the life of the organic electroluminescence device can be extended. Further, since the nozzle clogging of the nozzle can be eliminated, the maintenance in the manufacturing apparatus of the organic electroluminescence element becomes easy. Further, from the same viewpoint, it is preferable that the temperature at which the vaporization material is not reattached to the communication portion from the source of vaporization of the organic light-emitting material to the nozzle is also heated. Further, the temperature at which the vaporized material does not adhere is different depending on the type of the organic light-emitting material, and is approximately in the range of 150 QC to 400 °C. (4) In the method for producing an organic electroluminescence device of the present invention, the organic light-emitting layer forming process is preferably performed while moving the substrate. By shortening the time during which the substrate receives the radiant heat from the nozzle by this method, deterioration of the substrate due to the temperature rise of the substrate can be suppressed. Further, the moving speed of the substrate differs depending on the temperature of the nozzle, the distance from the nozzle to the substrate, the material of the substrate, the thickness of the organic light-emitting layer, and the opening speed of the organic light-emitting layer, in 〇lm/s~i〇m The range of /s is preferably in the range of the above-mentioned organic light-emitting layer formation of 200847845 0·3 m/s to 3 m/s on the 9 side. (5) In the production of the organic electroluminescence device of the present invention, the substrate is cooled, and the deterioration of the temperature due to the substrate can be suppressed by the method of X and 2.乂, +, ^ In the manufacture of the organic electroluminescent device of the present invention; $月丨J described as a layered structure is a ^ ^ ^ more than 3 organic light-emitting layer other layer structure, more 15mm It is preferable that the other organic layer forming the other layer is formed by the other nozzles disposed outside the material disposed on the substrate, and the vaporized material constituting the layer is formed. Because of the level of #丝士·,+:: by the level of the vaporized material that can be discharged to the substrate during the manufacturing process by the substrate, ... "machine: the amount of water taken in by the layer达达. Further, the organic layer of the organic electroluminescent element is preferably a transport layer, a hole injection layer, etc. For example, the 6 brothers and holes transport layer, the outer layer, and other organic layers may be one. Moreover, in the case where the organic light-emitting layer is formed into a f-passage and the complex order is dependent on other ...s and other organic layers to form an electrical dedicated transmission layer and an electron transport layer, the other is flawed (the hole transmission wheel) The layer I, the organic layer (4), the organic light-emitting layer forming process, the process, the process is larger than the substrate 'method, the organic layer distance is the organic light distance of the machine light, and the long-life electron transfer The machine layer of the process is formed in the order of forming another 200847845 organic layer forming process (electron transport layer forming process). _β(7), in the method of manufacturing the organic electroluminescence device of the present invention, the foregoing stack Layer structure is more included The laminated structure of the machine layer further comprises: forming a process for forming an inorganic layer of the inorganic layer by attaching a vaporized material made of an inorganic material to a substrate by vacuum evaporation; by using a vacuum evaporation method a vaporization material composed of a material constituting the cathode is attached to the cathode forming process of the cathode, and is formed in the same vacuum device. The organic light emitting layer forming process, the other organic layer forming process, and the inorganic layer forming are performed. The process and the foregoing cathode forming process are preferred. Therefore, the method for fabricating an organic electroluminescence device according to the present invention is to perform an organic light-emitting layer forming process, another organic layer forming process, and an inorganic layer formation in the same vacuum apparatus. The process and the cathode forming process can reduce the amount of water taken in by the laminated structure during the manufacturing process to a minimum level, and can extend the life of the organic electroluminescent device. The inorganic layer is preferably exemplified by a hole injection layer. An electron injecting layer or the like. (8) In the method for producing an organic electroluminescence device of the present invention, the aforementioned The electroluminescent device is an organic electroluminescence device further comprising a sealing layer formed by covering the laminated structure on the substrate, and further comprising an evaporation polymerization method by a polymerization method (vap〇r dep〇siti〇n method) The raw material monomer (m〇n〇mer) is polymerized on the substrate to form a sealing layer forming process of the sealing layer. The organic light emitting layer forming process is performed in the same vacuum device, and the other organic layer forming process is performed. The method for forming the aforementioned layer, the method for forming the cathode, and the method for forming the sealing layer are the same as 200847845. Therefore, the method for manufacturing an organic electroluminescence device according to the present invention has a good sealing performance by the vapor deposition polymerization method. Since the sealing layer covers the laminated structure, it is possible to achieve a very low level of water content after the manufacture of the organic electroluminescent element, and it is possible to achieve long life of the organic electroluminescence. Further, according to the method for producing an organic electroluminescence device of the present invention, the organic light-emitting layer formation process, the other organic layer formation process, the inorganic layer formation process, the cathode formation process, and the adhesion are performed in the same vacuum apparatus. Since the 幵y is formed into a crucible, the amount of water taken by the organic electroluminescent element during the manufacturing process can be made extremely small, and the longevity of the organic electroluminescent element can be achieved. In the method of manufacturing an organic electroluminescence device of the present invention, the substrate is formed by using a flexible substrate, and the substrate is moved in the rotation direction on the suspect roller in the substrate. The layer forming process, the other organic layer forming process, the inorganic layer forming process, the cathode forming process, and the sealing layer forming process are preferred. Therefore, according to the method for producing an organic electroluminescence device of the present invention, the organic electroluminescence device can be produced with high productivity on a flexible substrate. (1) The apparatus for producing an organic electroluminescence device of the present invention is for manufacturing an organic electroluminescence device having a member: a substrate formed on the front surface of the front L, having at least an anode, an organic light-emitting layer, and a cathode a laminated structure, a feature including a vacuum chamber, a substrate transport mechanism disposed in the second to the middle of the substrate, and a vacuum chamber having a distance of at least 15 mm from the substrate The aforementioned substrate discharges a nozzle of the function of a vaporized material composed of an organic light-emitting material of 200847845. Therefore, in the apparatus for manufacturing an organic electroluminescence device according to the present invention, it is possible to discharge a vaporized material composed of an organic light-emitting material toward a substrate by a nozzle disposed at a position of a distance of i 5 mm or less from the substrate, so that the discharge is performed by the nozzle. The vaporized material reaches the substrate in a high-density state, and as a result, the amount of water taken in by the organic light-emitting layer during the manufacturing process can be made extremely small, and the life of the organic electroluminescent device can be extended. Further, the apparatus for manufacturing an organic electroluminescence element according to the present invention does not need to be provided in addition to the high vacuum (for example, a low vacuum of about lxl 〇 -3 Pa to ix 〇 -5 Pa). The inner wall of the vacuum vapor deposition apparatus is extremely flat, or the inside of the vacuum vapor deposition apparatus is heated by a heater to remove the moisture adhering to the inner wall of the vacuum crucible plating apparatus, so that the manufacturing cost can be made lower than in the past. Further, in the apparatus for manufacturing an organic electroluminescence device according to the present invention, it is possible to discharge a vaporized material made of an organic light-emitting material toward a substrate by a nozzle disposed at a position of a distance of 15 mm or less from the substrate, and thus it is possible to use a smaller amount than in the past. The organic light-emitting material forms the organic light-emitting layer in a high yield, and it can be said that the manufacturing cost can be made cheaper than in the past. Therefore, the apparatus for producing an organic electroluminescence device of the present invention is an apparatus for manufacturing an organic electroluminescence device which is capable of extending the life of the organic electroluminescence device and which is cheaper to manufacture than conventional ones. Further, since the apparatus for manufacturing an organic electroluminescence device according to the present invention includes the substrate transfer mechanism, the organic light-emitting layer forming process can be performed while moving the substrate. Therefore, the time during which the substrate receives the radiant heat 13 200847845 from the nozzle can be shortened, and thus deterioration of the substrate due to the temperature rise of the substrate can be suppressed. (11) In the apparatus for manufacturing an organic electroluminescence device of the present invention, it is preferable to further include a nozzle heating mechanism for heating the nozzle to a temperature at which the vaporized material does not adhere to the nozzle. By thus constituting, the situation in which the vaporized material is reattached at the tip end portion of the nozzle is eliminated, so that the vaporized material discharged from the nozzle can be taken in by the (four) light layer in the high density state in the manufacturing process. The amount of water is extremely small, and τ seeks to extend the life of the organic electroluminescence device. Further, since the nozzle clogging of the nozzle can be eliminated, maintenance in the manufacturing apparatus of the organic electroluminescence device is facilitated. Further, from the same viewpoint, it is preferable that the heating portion that is heated to a temperature at which the vaporized material does not adhere to the communication portion from the deuteration source that vaporizes the organic light-emitting material to the nozzle is preferable. (12) In the apparatus for manufacturing an organic electroluminescence device of the present invention, the layered structure is a laminated structure including an organic layer other than the organic light-emitting layer, and further includes: in the vacuum chamber It is preferable that the other nozzle having a function of discharging a vaporized material made of an organic material other than the organic light-emitting material toward the substrate at a position at a distance of 15 mm or less from the substrate is preferable. With such a configuration, by discharging the vaporized material toward the substrate by other nozzles disposed at a distance of 15 mm or less from the substrate, the amount of water taken in by other organic layers during the manufacturing process can be achieved. Since the level is extremely small, it is possible to further extend the life of the organic electroluminescence device. (1 3) In the apparatus for manufacturing an organic electroluminescence device of the present invention, the laminated structure described in the above is a laminated structure further including an inorganic layer, and further includes: 200847845 placed in the above-mentioned direct 〇M ^ In the middle, the hunting is carried out by means of a vacuum evaporation method, which is made up of a material of the above-mentioned inorganic layer, and is formed by the material of the above-mentioned direct mediator: =: Fine is better by using other vacuum evaporation mechanisms. Therefore, the organic electroluminescent device according to the present invention can be formed into an organic light-emitting layer-forming organic layer forming process and an inorganic layer forming process in the same straight cracking device, > And cathode, he: In the manufacturing process, the amount of water taken in by the laminated structure is up to two: = quasi-there is a further long life of the organic electroluminescent element: Water—(14) In the device for manufacturing an organic electroluminescence device of the present invention, the organic electroluminescent device of J is a more sentence-like person, and the article “covers the substrate”. The organic electroluminescent device of the sealing layer formed by the stacking and the above-mentioned structure, in the empty chamber, is formed by the vapor deposition polymerization method, and the raw material monomer is polymerized on the base layer to form an evaporation layer of the sealing layer. Therefore, the apparatus for producing an organic electroluminescence device according to the present invention can be made to be organically electroconductive by covering the laminated structure by a sealing layer having a good sealing property by an evaporation polymerization method. After the production of the light-emitting element, the moisture content of the immersed two-layered structure is extremely small, and the organic electroluminescent element can be further extended in life. Moreover, the apparatus for manufacturing an organic electroluminescence element according to the present invention is The organic light emitting layer forming process, the other organic layer forming process, the inorganic layer forming process, the cathode forming process, and the sealing layer forming process can be performed in the same vacuum device, so that the manufacturing process can be performed In the process, the amount of water absorbed by the organic electroluminescence device into 200847845 is extremely small, and the organic electroluminescence device can be further extended in life. (15) The apparatus for manufacturing an organic electroluminescence device of the present invention The substrate is a flexible substrate, and the substrate transport mechanism further includes: a feed roller that feeds the substrate; a take-up roller that winds the substrate; and a transport path that is disposed in the transport path of the substrate; In the rotating rotating drum, it is preferable that the nozzle discharges the vaporized material toward the substrate conveyed on the surface of the rotating drum. The apparatus for manufacturing the organic electroluminescence element of the present invention can be used for the production. An organic electroluminescence device is produced on a substrate with high productivity. In the apparatus for manufacturing an organic electroluminescence device of the present invention, in the rotating drum, a #α is further provided with a cold portion. The cooling mechanism of the surface of the rotating drum is described. The fine structure is such that it suppresses the temperature of the substrate which is transported on the surface of the rotating drum. Degradation of the substrate liter.

^在本發明的有機電致發光元件的製造裝置中， 更包含使前述喷嘴的& T ^ m ^ ^ 、近、刖述其他的噴嘴的附近、前述真 工瘵艘機構的附近、前 蒸鍍聚合機構的附近的各、：的真空蒸鍍機構的附近及前述 氣機構較佳。 、 成為規定的真空環境之差動排 藉由如此地構成，可 = 光層形成製程、盆他的:最佳的真空環境下進行有機發 層）形成製程、益機M, b(例如電洞傳輸層、電子傳輸 形成製程及密封層形 电于注入層）形成製程、陰極 ”我製程之各個製程。 16 200847845 【實施方式】 以下，根據圖示的實施的形態，針對本發明的有機電致 發光元件的製造方法及有機電致發光元件的製造步番 二、 、 衣置來說 明。 [實施形態一] 圖1是顯示有機電致發光元件之剖面圖。圖2是顯 示與實施形態一有關的有機電致發光元件的製造裝置100 之剖面圖。圖3是顯示與實施形態一有關的有機電致發光元 件的製造方法的流程圖。 與實施形態一有關的有機電致發光元件的製造方法是 用以製造圖1所示的有機電致發光元件10的製造方法。 1、有機電致發光元件1 0 有機電致發光元件1 0如圖1所示是具備如下構件之照 明裝置用的有機電致發光元件1 0 :基板1 2 ;形成於基板i 2 上，具有陽極14、電洞傳輸層（其他的有機層）16、有機 發光層18、電子傳輸層（其他的有機層）20、電子注入層 (無機層）22及陰極24之疊層結構體；覆蓋疊層結構體之 密封層2 6。 基板12是由厚度100μιη、寬度2mm、長度數十m的石 英玻璃膜構成。陽極14是由膜厚200 nm的I TO (氧化錮錫） 構成。電洞傳輸層1 6是由膜厚1 〇nm的CuPC(酞菁銅（copper phthalocyanine))構成。有機發光層18是由膜厚50nm的 a -NPD (雙[N-(bl-萘基）-N-苯基]聯苯胺）構成。電子傳輸 200847845 層20是由膜厚65nm的Alq3( 8-羥基喹啉鋁錯合物）構成。 電子注入層22是由膜厚〇.5nm的LiF (氟化鋰）構成。陰 極24是由膜厚80nm的A1 (鋁）構成。密封層26是由膜厚 lOOOnm 的 PU (聚脲（polyurea))構成。 在與實施形態一有關的有機電致發光元件的製造方去 中，使用圖2所示之與實施形態一有關的有機電致發光元件 的製造裝置1〇〇，在預先於基板12形成有陽極 乃位1 4的撓性基 板W上依次形成電洞傳輸層1 6、有機發光岸〗β ^ u曰U、電子傳輸 層20、電子注入層22、陰極24及密封層， 友造有機電 致發光元件1 〇。 2、與實施形態一有關的有機電致發光元件的努造^置i 與實施形態一有關的有機電致發光开# 儿疋件的製造装置 100如圖2所示具備：真空室110;配置於直办 、一二室110中的 基板運送機構；配置於第一真空蒸鍍室1 24的楚 ^ 的苐一真空蒸鍍In the apparatus for manufacturing an organic electroluminescence device of the present invention, the nozzle is further included in the vicinity of the nozzle, and the vicinity of the other nozzle, and the steaming in the vicinity of the nozzle. It is preferable that the vicinity of each of the vacuum vapor deposition mechanisms in the vicinity of the plating polymerization mechanism and the gas mechanism are the same. The differential row that becomes the prescribed vacuum environment can be configured in such a way that the light layer forming process, the potting: the organic layer in the optimal vacuum environment, the forming process, the benefit machine M, b (for example, the hole) The transport layer, the electron transport forming process, and the sealing layer shape are electrically formed on the injection layer to form a process, a cathode, and each process of the process. 16 200847845 [Embodiment] Hereinafter, according to the embodiment of the embodiment, the organic electrochemistry of the present invention is The manufacturing method of the light-emitting element and the manufacturing method of the organic electroluminescent element are described in the following. [First Embodiment] Fig. 1 is a cross-sectional view showing an organic electroluminescence device. Fig. 2 is a view showing the first embodiment. FIG. 3 is a flow chart showing a method of manufacturing an organic electroluminescence device according to the first embodiment. The method for manufacturing an organic electroluminescence device according to the first embodiment It is a manufacturing method for manufacturing the organic electroluminescent element 10 shown in Fig. 1. 1. Organic electroluminescent element 10 The organic electroluminescent element 10 is shown in Fig. 1. An organic electroluminescence device 10 for an illumination device having the following components: a substrate 1 2; formed on the substrate i 2 , having an anode 14 , a hole transport layer (other organic layer) 16 , an organic light-emitting layer 18 , and electron transport a layer (other organic layer) 20, a laminated structure of an electron injecting layer (inorganic layer) 22 and a cathode 24, and a sealing layer 26 covering the laminated structure. The substrate 12 is composed of a thickness of 100 μm, a width of 2 mm, and a length of several The quartz glass film is composed of m. The anode 14 is composed of I TO (tantalum tin oxide) having a film thickness of 200 nm. The hole transport layer 16 is composed of CuPC (copper phthalocyanine) having a film thickness of 1 〇 nm. The organic light-emitting layer 18 is composed of a-NPD (bis[N-(bl-naphthyl)-N-phenyl]benzidine) having a film thickness of 50 nm. The electron transport 200847845 layer 20 is composed of Alq3 (8 nm) having a film thickness of 65 nm. -Oxyquinoline aluminum complex). The electron injecting layer 22 is composed of LiF (lithium fluoride) having a film thickness of 5 nm. The cathode 24 is composed of A1 (aluminum) having a film thickness of 80 nm. The sealing layer 26 is composed of PU (polyurea) having a film thickness of 100 nm. Manufacturing of an organic electroluminescence device according to the first embodiment In the manufacturing apparatus 1 of the organic electroluminescence device according to the first embodiment shown in FIG. 2, the hole transport is sequentially formed on the flexible substrate W on which the anode is formed on the substrate 12 in advance. Layer 16. Organic light-emitting shore β ^ u曰U, electron transport layer 20, electron injection layer 22, cathode 24 and sealing layer, and organic electroluminescent element 1 〇 2. Organic electricity related to the first embodiment The manufacturing apparatus 100 of the organic electroluminescence device according to the first embodiment includes a vacuum chamber 110 and is disposed in the direct office and the first and second chambers 110. a substrate transport mechanism; a vacuum evaporation method disposed in the first vacuum evaporation chamber 1 24

機構140;第二真空蒸鍍機構150及第三直办v A 一二蒸鍍機構160; 配置於弟一真空蒸鑛室126之第四真空蒸錢機 、峨賤構1 7 0及第五 真空蒸鍍機構172 ;配置於蒸鍍聚合室128夕甘 之蒸鍍聚合機構 真空至110具備：基板送出/捲取室Ι2ρ· ^ ,第一真空蒗 鍍室124 ;第二真空蒸鍍室126 ;蒸鍍聚合室 “、、 王丄^ ;間隔壁 112、114、116 ;差動排氣機構 118、12〇。 基板移動機構具備：配置於基板送出/捲取室ι22的关 出滚子130、滾子132、136及捲取滾子138; 一^分露出= 基板送出/捲取室122的旋轉滾筒134 ;用以士、、， ' 田被送出的撓 18 200847845 性基板W剝離保護膜之剝離滚 1 3 4的内部設置有冷卻旋轉滚筒 圖示）。 子（未圖示）。在旋轉滾筒 134的表面之冷卻機構（未 第一真空蒸鍍機構1 40是用丨、；p ^ ^ ^ , p 用M形成電洞傳輸層1 6的真 空蒸鍍機構，具有汽化部1 42、揸、s ^ ^ , 連通部144及喷嘴146。第 二真空蒸鍍機構150是用以形忐女⑽ n _ ^ 〜成有機發光層1 8的真空蒸鍍 機構，具有汽化部152、連通 外 ^ 、4 154及喷嘴156。第三真空 蒸鐘機構1 6 0是用以形成電子彳查μ θ ❿电于傳輪層20的真空蒸鍍機構， 具有汽化部162、連通部164及噴嘴166。 喷嘴umm是接近旋轉滚筒134而設置。喷 嘴1 46 1 56 1 66疋，又置於噴嘴的尖端部與旋轉滾筒134 的間隔為3mm的位置。 賀嘴146、156、166具備具有沿著撓性基板w的移動 方向的長度為l〇mm，且沿著與撓性基板w的移動方向正交 的方向的寬度為2mm的矩形狀的開口之噴，、 。 喷嘴是朝在旋轉滚筒嘴二 方向被運送的撓性基板W排出汽化材料而構成。 第一真空蒸鍍機構14〇具有將連通部144及喷嘴146 加熱至汽化材料不會再附著的溫度之噴嘴等加熱功能。而 且，第一真空蒸鍍機構150具有將連通部154及喷嘴156 加熱=汽化材料不會再附著的溫度之噴嘴等加熱功能。而 且，第三真空蒸鍍機構16〇具有將連通部164及喷嘴166 加熱至汽化材料不會再附著的溫度之喷嘴等加熱功能。 而且，第一真空蒸鍍機構140、第二真空蒸鍍機構15〇 19 200847845 弟“、、錢機構160具有進行各汽化部142、152、162 中的汽化材料的加敎、、w 刀口熱/JHL度進而A化材枓的汽化量的調整之 功俾電洞傳輪層、有機發光層及電子傳輸層的膜厚進入 規定的範圍内之功能。 芦第四真空蒸鍍機構170是用以形成電子注入層（無機 層）22之真空蒸鍍機構。第五真空蒸鍍機構172是用以形 * ”二？泰鍍機構。在第四真空蒸鑛機構170與第 五真空蒸鑛機構172之間設置有間隔壁114,俾電子注入層 22與陰極24順序佳地形成而構成。 9 ‘矣鑛聚σ機帛1 74具有脂肪族二胺單體汽化部1 76及脂 肪族異氰酸酿單體汽化部m，使此等脂肪族二胺單體及脂 肪族異氰酸i旨單體在撓性基板w±聚合，在撓性基板w上形 成由PU (聚脲）構成的密封層26。 在基板送出/捲取室122與第一真空蒸鍍室124之間設 置有間隔，112,在基板送出/捲取室122與蒸鍍聚合室128 *間《又置有間隔壁116。在第一真空蒸鍍室與第二真空 蒸鑛室126之間設置有第—差動排氣部ιΐ8，在第二真空: ，室12:與蒸鍍聚合室128之間設置有第二差動排氣部 0。進打控制，俾基板送出/捲取室i 22與第一真空蒸鍍室 124與第二真空蒸鍍室126與蒸鍍聚合室128各自成為最佳 的真空環境。 3、與實施形態一有關的有機電致發光元件的製造方法 實施形態一有關的有機電致發光元件的製造方法如圖 3所示包含：撓性基板準備製程；電洞傳輸層形成製程^ 20 200847845 他=機層形成製程）；有機發光層形成製程；電子傳輸層 形成製程（其他的有機層形成製程）；電子注入層形成製程 (無機層形成製程）；陰極形成製程；密封層形成製程。 在與實施形態一有關的有機電致發光元件的製造方法 开中二圖2所示’在第一真空蒸鑛室124中進行電洞傳輸層 :一 、有機發光層形成製程及電子傳輸層形成製程，在 ::真空療鍍室126中’進行電子注入層形成製程及陰極形 成製程’在蒸鍍聚合室128中進行密封層形成製程。 在電洞傳輸層形成製程中，藉由由配置於至撓性基板 的距離為3_的位置之喷嘴146朝撓性基板w排出由構成電 同傳輸層1 6的有機材料構成的汽化材料，形成電洞傳輸層 1 6 ° 在有機&光層形成製程中，藉由由配置於至撓性基板W 的離為的位置之喷嘴1 56朝撓性基板w排出由有機發 光材料構成的汽化材料，形成有機發光層18。 、在電子傳輸層形成製程中，藉由由配置於至撓性基板w 的距離為3mm的位置之喷嘴166朝撓性基板w排出由構成電 子傳輸層20的有機材料構成的汽化材料，形成電子傳輸層 、在電子注入層形成製程中，藉由利用真空蒸鍍法使由 電子/主入層22的無機材料構成的汽化材料附著於撓性 基板w ’形成電子注入層22。 ^ 在陰極形成製程中，藉由利用真空蒸鍍法使由構成陰 亟24的材料構成的汽化材料附著於撓性基板^，形成陰極 200847845 在松封層形成製程中，藉 精由利用瘵鍍聚合法使原料單 體在撓性基板w上聚合，形成密封層26。 電洞傳輸層形成掣兹、亡德々 、 广 有機毛光層形成製程及電子傳 輸層形成製程分別在1χ1 〇-3ρ ixl 0 Pa的真空環境下進 行。 電洞傳輸層形成製程、有機發光層形成製程及電子傳 輸層形成，程分別在將噴嘴146、156、166加熱至汽化材料 不會再附著的溫度之條件下進行。 電洞傳輸層形成製程、有機發光層形成製程、電子傳 輸層形成製程、電子注入層形成製程、陰極形成製程及密封 層形成製程是各自一邊使撓性基板w在旋轉滾筒134上沿旋 轉方向移動，一邊進行。 電洞傳輸層形成製程、有機發光層形成製程、電子傳 輸層形成製程、電子注人層形成製程'陰極形成製程及密封 層形成製程是各自一邊冷卻撓性基板w，一邊進行。 在與實施形態一有關的有機電致發光元件的製造方法 中，有機電致發光元件的製造裝置1〇〇具有如下的功能藉 由控制來自第-真空蒸鍍機構140、第二真空蒸鍍機請 及第三真空蒸鍍機構1 60的各個的汽化材料的排出速度（例 如控制汽化部142中的汽化分子的加熱溫度、汽化部152 中的汽化分子的加熱溫度及汽化部162中的汽化分子的加 熱溫度。）’並且藉由控制撓性基板W的運送速度，將電洞 傳輸層16、有機發光層18及電子傳輸層2〇的膜厚控制在 22 200847845 適當的範圍内。 4、與實施形態一有關的有機電致發光元件的製造方法的功 效 依照與實施形態一有關的有機電致發光元件的製造方 法，因予以由配置於至撓性基板w的距離為3mm的位置之喷 嘴146、156、166朝撓性基板w排出汽化材料，故由喷嘴 146、156、166排出的汽化材料在高密度狀態下到達撓性基 板W，其結果可使在製造過程中被電洞傳輸層丨6、有機發光 層1 8及電子傳輸層2 0取入的水分量達到極少的水準，可謀 求有機電致發光元件的長壽命化。 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因無須使用高真空的真空蒸鍍裝置，或者使真空 蒸鑛裝置的内壁極為平坦，或者由外部以加熱器加熱真空蒸 錢裝置内，去除附著於真空蒸鍍裝置的内壁之水分，故可使 製造成本比以往還便宜。 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以由配置於至撓性基板W的距離為3mm的位 置之噴嘴1 4 6、1 5 6、1 6 6朝撓性基板W排出汽化材料，故可 由比以往還少量的材料（電洞傳輸層的材料、有機發光材料 及電子傳輸層的材料）以高產率形成電洞傳輸層1 6、有機 發光層1 8及電子傳輸層2 0，由此點也可以說可使製造成本 比以往還便宜。 因此，與實施形態一有關的有機電致發光元件的製造 方法成為可謀求有機電致發光元件的長壽命化，並且可使製 23 200847845 造成本比以往還便宜之有機電致發光元件的製造方法。 而且’依照與實施形態一有關的有機電致發光元件的 製造方法，在例如lxl〇_3Pa〜lxl〇-5Pa之較低真空的條件下 可充分地形成長壽命的有機發光層。 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以在將喷嘴146、156、166加熱至汽化材料 不會再附著於噴嘴146、156、丨66的溫度的條件下進行電洞 傳輸層形成製程、有機發光層形成製程及電子傳輸層形成製 程’故消除了在喷嘴146、156、166的尖端部分汽化材料再 附著的情形，由喷嘴146、156、166排出的汽化材料在高密 度狀悲下到達撓性基板W。其結果可使在製造過程中被電洞 傳輸層16、有機發光層18及電子傳輸層2〇取入的水分量 達到極少的水準，可謀求有機電致發光元件之更進一步的長 壽命化。而且，因消除了喷嘴146、156、166的噴孔堵塞， 故有機電致發光元件的製造裝置中的維修保養變得容易。 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以一邊使撓性基板w移動，一邊進行電洞傳 輸層形成製程、有機發光層形成製程及電子傳輸層形成製 程，故可縮短撓性基板W承受來自喷嘴146、156、166的輕 射熱的時間，可抑制起因於撓性基板W的溫度上升之挽性基 板W的劣化。 & 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以一邊冷卻基板，一邊進行電洞傳輸層形成 製程、有機發光層形成製程、電子傳輸層形成製程、電子注 200847845 入層形成製程、陰極形成铲 — 成*裊知及费封層形成製程，故據此也 可抑制起因於撓性基板w的溫度上升之撓性基板$的劣化。 而且’依照與實施形態-有關的有機電致發光元件的製 造方法’因可藉由利用蒸錢聚合法形成的密封性能良好的密 封層26覆蓋疊層結構體’故可使在有機電致發光元件的製 造後浸入疊層結構體的水分量達到極少的水準，可謀求有機 電致發光元件的長壽命化。 ^而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以在同一個真空裝置（真空室ιι〇)之中進 仃有機發光層形成製程、其他的有機層形成製程、無機層形 成製程、陰極形成製程及密封層形成製程，故可使在製造過 程中被有機電致發光元件取入的水分量達到極少的水準，可 謀求有機電致發光元件的長壽命化。 而且，依照與實施形態一有關的有機電致發光元件的 製造方法，因予以一邊使撓性基板W在旋轉滾筒丨34上沿著 旋轉方向移動，一邊進行電洞傳輸層形成製程、有機發光層 形成製程、電子傳輸層形成製程、無機層形成製程、陰極形 成製程及密封層形成製程，故可在撓性基板W上以高的生產 性製造有機電致發光元件。 5、與實施形態一有關的有機電致發光元件的製造裝置1 〇〇 的功效 依照與實施形態一有關的有機電致發光元件的製造裝 置100，因由配置於至撓性基板W的距離為3mm的位置之噴 嘴146、156、166朝撓性基板W排出汽化材料為可能，故由 25 200847845 噴嘴146、1 56、1 66排出的汽化材料在高密度狀態下到達撓 性基板W ’其結果可使在製造過程中被電洞傳輸層1 6、有機 發光層1 8及電子傳輸層2 0取入的水分量達到極少的水準， 可謀求有機電致發光元件的長壽命化。 而且’依照與實施形態一有關的有機電致發光元件的 製造裝置100’因除了無須那種程度的高真空（例如Ιχΐ 〇-3pa 〜1 X1 0 P a左右的較低真空就足夠）外，也無須配設使真空 蒸鍍裝置的内壁極為平坦，或者由外部以加熱器加熱真空蒸 鑛裝置内，去除附著於真空蒸鍍裝置的内壁之水分的機構， 故可使製造成本比以往還便宜。 而且，依照與實施形態一有關的有機電致發光元件的製 造裝置100，因由配置於至撓性基板w的距離為3mm的位置 之喷嘴146、156、166朝撓性基板…排出汽化材料為可能， 故T由比以在還少篁的材料（電洞傳輸層的材料、有機發光 材料及電子傳輸層的材料）以高產率形成電洞傳輸層丨6、 有機發光層18及電子傳輸層20,由此點也可以說可使製造 成本比以往還便宜。 因此與實施形態一有關的有機電致發光元件的製造裝 置 成為可5某求有機電致發光元件的長壽命化，並且可使 製造成本比以往還便宜之有機電致發光元件的製造裝置。 ,而且，依照與實施形態一有關的有機電致發光元件的 製le展置1〇〇，因具備基板運送機構，故可一邊使撓性基板 W,動，—邊進行電洞傳輸層形成製程、有機發光層形：製 私及電子傳輸層形成製程。因此，可縮短撓性基板w承受來 26 200847845 自喷嘴146、156、166的輻射熱的時間，故可抑制起因於撓 性基板W的溫度上升之撓性基板ψ的劣化。 而且，依照與實施形態一有關的有機電致發光元件的製 造裝置100，因更具備將噴嘴146、156、166加熱至汽化材 料不會再附著的溫度之喷嘴加熱功能，故消除了在噴嘴 146、156、166的尖端部分汽化材料再附著的情形，由喷嘴 1 4 6、1 5 6、1 6 6排出的汽化材料在高密度狀態下到達撓性基 板W。其結果可使在製造過程中被電洞傳輸層丨6、有機發光 層1 8及電子傳輸層2 0取入的水分量達到極少的水準，可謀 求有機電致發光元件的長壽命化。而且，因消除了喷嘴 146、156、166的喷孔堵塞，故有機電致發光元件的製造裝 置中的維修保養變得容易。 而且，依照與實施形態一有關的有機電致發光元件的 製造裝置100，因更具備利用蒸鍍聚合法在撓性基板w上形 成密封層26的蒸鍍聚合機構174,故可藉由利用蒸鍍聚合 法形成的密封性能良好的密封層26覆蓋疊層結構體。= 此，可使在有機電致發光元件的製造後浸入疊層結構體的水 分ϊ達到極少的水準，可謀求有機電致發光元件的長壽菸 化。 、汗 ,而且，依照與實施形態一有關的有機電致發光元件的 製造裝置100,因可在同一個真空裝置（真空室11〇)之中 進行電洞傳輸層形成製程、有機發光層形成M程、電子傳輪 層形成製程、電子注入層形成製程、陰極形成製程及密封層 形成製程，故可使在製造過程中被疊層結構體或有機電致ς 27 200847845 光元件取入的水分量達到極 元件的長壽命化。 少的水準，可謀求有機電致發光The mechanism 140; the second vacuum evaporation mechanism 150 and the third direct v A two vapor deposition mechanism 160; the fourth vacuum steamer disposed in the first vacuum distillation chamber 126, the structure 1 70 and the fifth The vacuum evaporation mechanism 172 is disposed in the vapor deposition polymerization chamber 128. The vapor deposition polymerization mechanism vacuum to 110 includes: a substrate feeding/winding chamber ρ2ρ·^, a first vacuum 蒗 plating chamber 124; and a second vacuum evaporation chamber 126. ; vapor deposition polymerization chamber ",, Wang Yu ^; partition walls 112, 114, 116; differential exhaust mechanisms 118, 12 。. The substrate moving mechanism includes: a shut-off roller 130 disposed in the substrate feeding/winding chamber ι 22 Roller 132, 136 and take-up roller 138; one roll out = rotating drum 134 of the substrate feeding/winding chamber 122; for the squirrel, ', the field is sent out of the flexible 18 200847845 substrate W peeling protective film The inside of the peeling roll 1 3 4 is provided with a cooling rotary drum.) Sub (not shown). Cooling mechanism on the surface of the rotating drum 134 (the first vacuum evaporation mechanism 1 40 is used for 丨, ; p ^ ^ ^ , p The vacuum evaporation mechanism for forming the hole transport layer 16 with M has a vaporization portion 1 42 , 揸, s ^ ^ , and a communication portion 144 Nozzle 146. The second vacuum evaporation mechanism 150 is a vacuum evaporation mechanism for forming a female (10) n _ ^ 〜 into the organic light-emitting layer 18, and has a vaporization portion 152, a communication outer portion, a 4 154, and a nozzle 156. The vacuum steaming mechanism 160 is a vacuum vapor deposition mechanism for forming an electron check μ θ ❿ on the transfer layer 20, and has a vaporization unit 162, a communication portion 164, and a nozzle 166. The nozzle umm is disposed close to the rotary drum 134. The nozzle 1 46 1 56 1 66 疋 is placed at a position where the distance between the tip end portion of the nozzle and the rotary drum 134 is 3 mm. The nozzles 146, 156, and 166 have a length l along the moving direction of the flexible substrate w. 〇mm, and a rectangular opening having a width of 2 mm in a direction orthogonal to the moving direction of the flexible substrate w, the nozzle is discharged to the flexible substrate W that is transported in the direction of the rotating drum nozzle The first vacuum vapor deposition mechanism 14A has a heating function such as a nozzle that heats the communication portion 144 and the nozzle 146 to a temperature at which the vaporized material does not adhere again. Further, the first vacuum evaporation mechanism 150 has a communication portion 154. And nozzle 156 heating = vaporized material is not The third vacuum evaporation mechanism 16A has a heating function such as a nozzle that heats the communication portion 164 and the nozzle 166 to a temperature at which the vaporized material does not adhere again. The vapor deposition mechanism 140 and the second vacuum vapor deposition mechanism 15〇19 200847845, the money mechanism 160 has the heating of the vaporization material in each vaporization unit 142, 152, 162, the w edge heat/JHL degree, and the A The adjustment of the vaporization amount of the material is a function of the film thickness of the hole transport layer, the organic light-emitting layer and the electron transport layer entering a predetermined range. The fourth vacuum evaporation mechanism 170 is a vacuum evaporation mechanism for forming an electron injection layer (inorganic layer) 22. The fifth vacuum evaporation mechanism 172 is configured to form a "two" Thai plating mechanism. A partition wall 114 is disposed between the fourth vacuum distillation mechanism 170 and the fifth vacuum distillation mechanism 172, and the electron injection layer 22 and the cathode are provided. The order of 24 is well formed. 9 '矣矣聚聚机帛1 74 has an aliphatic diamine monomer vaporization unit 1 76 and an aliphatic isocyanate monomer vaporization unit m to make these aliphatic diamines The body and the aliphatic isocyanate monomer are polymerized on the flexible substrate, and a sealing layer 26 made of PU (polyurea) is formed on the flexible substrate w. The substrate is fed/winded chamber 122 and the first vacuum A gap is formed between the vapor deposition chambers 124, and between the substrate feeding/winding chamber 122 and the vapor deposition polymerization chamber 128*, a partition wall 116 is further disposed. In the first vacuum evaporation chamber and the second vacuum evaporation chamber A first differential exhaust portion ι 8 is provided between the 126, and a second differential exhaust portion 0 is provided between the second vacuum:, the chamber 12: and the vapor deposition polymerization chamber 128. The control is performed, and the substrate is sent out/ The take-up chamber i 22 and the first vacuum vapor deposition chamber 124 and the second vacuum vapor deposition chamber 126 and the vapor deposition polymerization chamber 128 each have an optimum vacuum environment. Embodiment 1 relates to a method for producing an organic electroluminescence device. A method for manufacturing an organic electroluminescence device according to the first embodiment includes a flexible substrate preparation process and a hole transport layer formation process. Machine layer forming process); organic light emitting layer forming process; electron transport layer forming process (other organic layer forming process); electron injection layer forming process (inorganic layer forming process); cathode forming process; sealing layer forming process Form 1 related to the manufacturing method of the organic electroluminescent device, as shown in FIG. 2, 'the hole transport layer is formed in the first vacuum distillation chamber 124: 1. The organic light-emitting layer forming process and the electron transport layer forming process are In the vacuum plating chamber 126, 'the electron injecting layer forming process and the cathode forming process' are performed in the vapor deposition polymerization chamber 128. In the hole transport layer forming process, by being disposed to be flexible The nozzle 146 at a position where the distance of the substrate is 3_ discharges the vaporized material composed of the organic material constituting the electroconducting layer 16 toward the flexible substrate w, and is formed. Hole transport layer 1 6 ° In the organic & optical layer forming process, the vaporized material composed of the organic light-emitting material is discharged toward the flexible substrate w by the nozzles 156 disposed at the off position to the flexible substrate W, The organic light-emitting layer 18 is formed by discharging the organic material constituting the electron transport layer 20 toward the flexible substrate w by the nozzle 166 disposed at a position of 3 mm from the flexible substrate w in the electron transport layer forming process. The vaporized material forms an electron transport layer, and in the electron injecting layer forming process, the vaporized material composed of the inorganic material of the electron/main layer 22 is attached to the flexible substrate w' by using a vacuum evaporation method to form an electron injecting layer. twenty two. ^ In the cathode forming process, the vaporized material composed of the material constituting the cathode 24 is attached to the flexible substrate by vacuum evaporation to form the cathode 200847845 in the process of forming the loose seal layer, and by using the tantalum plating The polymerization method polymerizes the raw material monomers on the flexible substrate w to form the sealing layer 26. The formation of the hole transport layer, the formation process of the organic light layer, and the formation process of the electron transport layer were carried out in a vacuum environment of 1χ1 〇-3ρ ixl 0 Pa, respectively. The hole transport layer forming process, the organic light emitting layer forming process, and the electron transport layer are formed by heating the nozzles 146, 156, and 166 to a temperature at which the vaporized material does not adhere again. The hole transport layer forming process, the organic light emitting layer forming process, the electron transport layer forming process, the electron injecting layer forming process, the cathode forming process, and the sealing layer forming process are each moving the flexible substrate w in the rotating direction on the rotating drum 134 , while doing. The hole transport layer forming process, the organic light emitting layer forming process, the electron transport layer forming process, and the electron injecting layer forming process 'the cathode forming process and the sealing layer forming process are performed while cooling the flexible substrate w. In the method of manufacturing an organic electroluminescence device according to the first embodiment, the apparatus for manufacturing an organic electroluminescence device has the following functions by controlling the first vacuum evaporation mechanism 140 and the second vacuum vapor deposition machine. The discharge speed of each vaporized material of the third vacuum evaporation mechanism 1 60 (for example, the heating temperature of the vaporized molecules in the vaporization portion 142, the heating temperature of the vaporized molecules in the vaporization portion 152, and the vaporization molecules in the vaporization portion 162) The heating temperature of the flexible substrate W is controlled by controlling the transport speed of the flexible substrate W, and the film thickness of the hole transport layer 16, the organic light-emitting layer 18, and the electron transport layer 2 is controlled within an appropriate range of 22 200847845. 4. The method of manufacturing an organic electroluminescence device according to the first embodiment is a method of manufacturing an organic electroluminescence device according to the first embodiment, and is disposed at a distance of 3 mm from the flexible substrate w. The nozzles 146, 156, and 166 discharge the vaporized material toward the flexible substrate w, so that the vaporized material discharged from the nozzles 146, 156, and 166 reaches the flexible substrate W in a high density state, and as a result, the hole can be formed in the manufacturing process. The amount of water taken in by the transport layer 丨6, the organic light-emitting layer 18, and the electron transport layer 20 is extremely small, and the life of the organic electroluminescence device can be extended. Further, according to the method for producing an organic electroluminescence device according to the first embodiment, the vacuum vapor deposition apparatus of the high vacuum is not required, or the inner wall of the vacuum distillation apparatus is extremely flat, or the vacuum is heated by the heater by the outside. In the apparatus, moisture adhering to the inner wall of the vacuum vapor deposition apparatus is removed, so that the manufacturing cost can be made lower than in the past. Further, according to the method of manufacturing an organic electroluminescence device according to the first embodiment, the nozzles 1 4 6 , 1 5 6 , and 16 6 disposed at a position of 3 mm from the flexible substrate W are made flexible. Since the substrate W discharges the vaporized material, the hole transport layer 16 , the organic light-emitting layer 18 and the electrons can be formed in a high yield by a small amount of material (material of the hole transport layer, material of the organic light-emitting material, and electron transport layer). The transmission layer 20, by this point, can also be said to make the manufacturing cost cheaper than in the past. Therefore, the method for producing an organic electroluminescence device according to the first embodiment can achieve a long life of the organic electroluminescence device, and the method for producing an organic electroluminescence device which is cheaper than the conventional one can be made. . Further, according to the method for producing an organic electroluminescence device according to the first embodiment, the organic light-emitting layer having a long life can be sufficiently formed under a condition of a low vacuum of, for example, lxl 〇 3 Pa to 1 x 10 Å to 5 Pa. Further, according to the method of manufacturing an organic electroluminescence device according to the first embodiment, the nozzles 146, 156, and 166 are heated so that the vaporized material does not adhere to the temperatures of the nozzles 146, 156 and 丨66. The hole transport layer forming process, the organic light emitting layer forming process, and the electron transport layer forming process are eliminated, so that the vaporized material discharged from the nozzles 146, 156, and 166 is eliminated in the case where the vaporized material is reattached at the tip end portions of the nozzles 146, 156, and 166. The flexible substrate W is reached under high density. As a result, the amount of water taken in by the hole transport layer 16, the organic light-emitting layer 18, and the electron transport layer 2 during the manufacturing process can be made extremely small, and the organic electroluminescence device can be further extended in life. Further, since the nozzle holes of the nozzles 146, 156, and 166 are eliminated, maintenance in the manufacturing apparatus of the organic electroluminescence element is facilitated. Further, according to the method of manufacturing an organic electroluminescence device according to the first embodiment, the hole transport layer forming process, the organic light emitting layer forming process, and the electron transport layer forming process are performed while moving the flexible substrate w. The time during which the flexible substrate W receives the light-radiating heat from the nozzles 146, 156, and 166 can be shortened, and deterioration of the conductive substrate W due to the temperature rise of the flexible substrate W can be suppressed. Further, according to the method for producing an organic electroluminescence device according to the first embodiment, the hole transport layer forming process, the organic light emitting layer forming process, the electron transport layer forming process, and the electron injection 200847845 are performed while cooling the substrate. Since the in-layer formation process, the cathode formation process, and the charge sealing layer formation process are performed, the deterioration of the flexible substrate $ due to the temperature rise of the flexible substrate w can be suppressed. Further, 'the method for producing an organic electroluminescence device according to the embodiment' can cover the laminated structure by the sealing layer 26 which is formed by the vapor deposition polymerization method, so that the organic electroluminescence can be obtained. After the element is manufactured, the amount of water immersed in the laminated structure reaches an extremely small level, and the life of the organic electroluminescent element can be extended. Further, according to the method for producing an organic electroluminescence device according to the first embodiment, the organic light-emitting layer forming process, the other organic layer forming process, and the inorganic layer are carried out in the same vacuum device (vacuum chamber). Since the layer forming process, the cathode forming process, and the sealing layer forming process are performed, the amount of water taken in by the organic electroluminescent element during the manufacturing process can be made extremely small, and the life of the organic electroluminescent element can be extended. Further, according to the method of manufacturing an organic electroluminescence device according to the first embodiment, the flexible substrate W is moved in the rotational direction on the rotary drum 34, and the hole transport layer forming process and the organic light-emitting layer are performed. The process, the electron transport layer forming process, the inorganic layer forming process, the cathode forming process, and the sealing layer forming process are formed, so that the organic electroluminescent element can be manufactured on the flexible substrate W with high productivity. 5. The apparatus 1 for manufacturing an organic electroluminescence device according to the first embodiment, according to the manufacturing apparatus 100 for an organic electroluminescence device according to the first embodiment, the distance to the flexible substrate W is 3 mm. At the position of the nozzles 146, 156, 166, it is possible to discharge the vaporized material toward the flexible substrate W, so that the vaporized material discharged from the nozzles 146, 156, 1 66 of 25 200847845 reaches the flexible substrate W in a high density state. The amount of water taken in by the hole transport layer 16 and the organic light-emitting layer 18 and the electron transport layer 20 during the manufacturing process is extremely small, and the life of the organic electroluminescence device can be extended. Further, 'the manufacturing apparatus 100' of the organic electroluminescence element according to the first embodiment is not limited by the high vacuum (for example, a lower vacuum of about 〇-3pa ～1 X1 0 P a). There is no need to provide a mechanism for making the inner wall of the vacuum vapor deposition apparatus extremely flat, or heating the vacuum evaporation apparatus from the outside by a heater, and removing the moisture adhering to the inner wall of the vacuum evaporation apparatus, so that the manufacturing cost can be made cheaper than before. . Further, according to the apparatus 100 for manufacturing an organic electroluminescence device according to the first embodiment, it is possible to discharge the vaporized material toward the flexible substrate by the nozzles 146, 156, and 166 disposed at a position of 3 mm from the flexible substrate w. Therefore, the hole transport layer 丨6, the organic light-emitting layer 18, and the electron transport layer 20 are formed in a high yield by a material which is less than 篁 (material of the hole transport layer, material of the organic light-emitting material, and electron transport layer). From this point, it can be said that the manufacturing cost can be made cheaper than in the past. Therefore, the apparatus for manufacturing an organic electroluminescence device according to the first embodiment is an apparatus for manufacturing an organic electroluminescence device which can extend the life of the organic electroluminescence device and can be manufactured at a lower cost than conventional ones. Further, according to the first embodiment of the organic electroluminescence device according to the first embodiment, since the substrate transfer mechanism is provided, the flexible substrate W can be moved and formed into a hole transport layer forming process. , organic light-emitting layer shape: manufacturing and electronic transport layer formation process. Therefore, the time during which the flexible substrate w receives the radiant heat from the nozzles 146, 156, and 166 can be shortened, so that the deterioration of the flexible substrate 起 due to the temperature rise of the flexible substrate W can be suppressed. Further, according to the apparatus 100 for manufacturing an organic electroluminescence device according to the first embodiment, since the nozzle heating function for heating the nozzles 146, 156, and 166 to a temperature at which the vaporized material does not adhere is further provided, the nozzle 146 is eliminated. When the tip portion of the 156, 166 is reattached to the vaporized material, the vaporized material discharged from the nozzles 146, 156, and 166 reaches the flexible substrate W in a high density state. As a result, the amount of water taken in by the hole transport layer 丨6, the organic light-emitting layer 18, and the electron transport layer 20 during the manufacturing process can be made extremely small, and the life of the organic electroluminescence device can be extended. Further, since the nozzle holes of the nozzles 146, 156, and 166 are eliminated, maintenance in the manufacturing apparatus of the organic electroluminescence device is facilitated. Further, according to the apparatus 100 for manufacturing an organic electroluminescence device according to the first embodiment, the vapor deposition polymerization mechanism 174 for forming the sealing layer 26 on the flexible substrate w by the vapor deposition polymerization method is further provided, so that it can be used by steaming. The sealing layer 26 having a good sealing property by a plating polymerization method covers the laminated structure. This makes it possible to achieve a minimum level of water immersion in the laminated structure after the production of the organic electroluminescent element, and to achieve longevity of the organic electroluminescent element. In addition, according to the apparatus 100 for manufacturing an organic electroluminescence device according to the first embodiment, the hole transport layer forming process and the organic light-emitting layer formation M can be performed in the same vacuum apparatus (vacuum chamber 11A). Process, electron transfer layer formation process, electron injection layer formation process, cathode formation process and sealing layer formation process, so that the moisture content of the laminated component or the organic component can be taken in the manufacturing process. The long life of the pole element is achieved. Less organic level, organic electroluminescence

生產性製造有機電致發光元件。 ^而且，依照與實施形態一有關的有機電致發光元件的 製仏裝置100 ’因在旋轉滾筒134的内部設置有冷卻旋轉滾 同1 34的表面之冷卻機構，故可抑制起因於在旋轉滾筒1 的表面上被運送的撓性基板w的溫度上升之撓性基板w的劣 而且’依照與實施形態一有關的有機電致發光元件的 製造裝置100’因更具備使第一真空蒸鍍室124、第二真空 蒸鍍室126及蒸鍍聚合室128的各個成為規定的真空環境之 差動排氣機構11 8、1 2 0，故可在最佳的真空環境中進行電 洞傳輪層形成製程、有機發光層形成製程、電子傳輸層形成 製程、電子注入層形成製程、陰極形成製程及密封層形成製 程之各個製程。 此外，當採用與實施形態一有關的有機電致發光元件 的製造方法及與實施形態一有關的有機電致發光元件的製 造裝置1 0 0的構成時，參考了以下的模擬實驗例一及二的結 28 200847845 果。 [模擬實驗例一] 模擬實驗例一是顯干g；日/士 ·、、、’、p使疋使用較低真空的真空蒸鍍 裝置（真空度：1χ1〇~4ρ )Production of organic electroluminescent elements. Further, according to the tamping apparatus 100' of the organic electroluminescence element according to the first embodiment, since the cooling mechanism for cooling the surface of the rotary slewing 134 is provided inside the rotary drum 134, it is possible to suppress the cause of the rotation of the drum The manufacturing apparatus 100 of the organic electroluminescent element according to the first embodiment is more inferior to the flexible substrate w on which the temperature of the flexible substrate w to be transported on the surface of the first substrate is increased. 124. Each of the second vacuum vapor deposition chamber 126 and the vapor deposition polymerization chamber 128 is a differential exhaust mechanism 11 8 and 1 2 0 in a predetermined vacuum environment, so that the hole transfer layer can be performed in an optimum vacuum environment. Each process of forming a process, an organic light-emitting layer forming process, an electron transport layer forming process, an electron injection layer forming process, a cathode forming process, and a sealing layer forming process is formed. Further, when the method of manufacturing an organic electroluminescence device according to the first embodiment and the configuration of the apparatus for manufacturing an organic electroluminescence device according to the first embodiment, the following simulation examples 1 and 2 are referred to. The knot 28 200847845 fruit. [Simulation experiment example 1] The simulation experiment example 1 shows the dryness; the day/shi ·, ,, ', p make the 疋 use a vacuum vacuum evaporation device (vacuum degree: 1χ1〇~4ρ)

Pa )的6形’也可藉由以由汽化源至 基板的距離r小的條株彳如Λ 。、 幻條件（例如5_)進行真空蒸鍍，謀求有 機電致發光兀件的長壽命化之實驗例。 圖4疋用以況明真空蒸鍍法中的由汽化源到基板的距 離r與汽化分子對基板的碰撞頻率Zm〇n⑽”的關係而顯示 之圖。圖4 ( a)疋顯示汽化源與基板的位置關係之圖，圖4 (b)疋顯示由 化源到基板的距離r與汽化分子對基板的 碰撞頻率Zmonomer的關係之圖。 首先’假設汽化源與基板是處於圖4 ( a )所示的位置 關係。此時，汽化分子對基板的碰撞頻率Zmonomer是由以 下的公式（1)表示： 2The 6-shape of Pa) can also be obtained by a strain such as a small distance r from the vaporization source to the substrate. The phantom condition (for example, 5_) is vacuum-deposited, and an experimental example in which the electro-luminous element is extended in life is sought. 4 is a diagram showing the relationship between the distance r from the vaporization source to the substrate in the vacuum evaporation method and the collision frequency Zm〇n(10) of the vaporization molecules to the substrate. FIG. 4(a) shows the vaporization source and Figure 4 (b) shows the relationship between the distance r from the source to the substrate and the collision frequency Zmonomer of the vaporized molecules to the substrate. First, let's assume that the vaporization source and substrate are in Figure 4 (a). The positional relationship shown. At this time, the collision frequency of the vaporized molecules to the substrate Zmonomer is represented by the following formula (1): 2

Zmonomer = S · Μν/4 7Γ r … (1 ) 此處，S是表示汽化源中的汽化面積[m2 ]，Mv是表示汽 化速度[mo 1 ecu 1 es/m2s ] ’ r是表示由汽化源到基板的距離 [m]。 圖4 ( b )是顯示在公式（1 )中，令汽化源中的汽化面 積S為l[Cm2]，令汽化速度Mv為 由汽化源到基板的距離r與汽化分子對基板的碰撞頻率 Zmonomer的關係之圖。由圖4 ( b )顯然得知，由汽化源到 基板的距離r越小，汽化分子對基板的碰撞頻率Zmonomer 越大。 29 200847845 另一方面，水分子對基板的碰撞頻率Zh2。 以 式（2)表示： 卜的公Zmonomer = S · Μν/4 7Γ r (1) where S is the vaporization area [m2 ] in the vaporization source, and Mv is the vaporization rate [mo 1 ecu 1 es/m2s ] ' r is the source of vaporization The distance to the substrate [m]. Figure 4 (b) is shown in equation (1), so that the vaporization area S in the vaporization source is l [Cm2], so that the vaporization velocity Mv is the distance r from the vaporization source to the substrate and the collision frequency of the vaporized molecules to the substrate. Diagram of the relationship. It is apparent from Fig. 4(b) that the smaller the distance r from the vaporization source to the substrate, the larger the collision frequency Zmonomer of the vaporized molecules to the substrate. 29 200847845 On the other hand, the collision frequency of water molecules on the substrate Zh2. Expressed by equation (2):

Zh2〇 = 2. 6x 1 0 24Ph2〇/ ( MT ) 1/2 … （2) 此處，Phw是表示水的分壓[Pa]，M是表示汽化分子、 分子量，T是表示絕對溫度[κ ]。 的 由公式（2 )顯然得知，水的分壓ρΗ2。（或者真空声） 越低’水分子對基板的碰撞頻率Ζη2。越小， 万面’即使 縮小由况化源到基板的距離r，Zhw也不會變化。 4因此，若合併公式（丨）及公式（2)考慮的話得知， 因若予以在縮小由汽化源到基板的距離Γ的條件下進行真 空蒸鍍，則可不改變水分子對基板的碰撞頻率，僅加大 /又化刀子對基板的碰撞頻率（Zm〇n〇mer )，故即使不使用超 间真玉的真空蒸鍍裝置進行真空蒸鍍，也可降低被取入的水 分子的比率。 圖5是用以說明由汽化源到基板的距離r與水分子對 基板的碰撞頻率ZH2。對汽化分子對基板的碰撞頻率 Zmonomer之比率的關係而顯示之圖。圖5 ( & )是顯示使由 ^ 原到基板的距離r在橫軸上取0匪至6 0 0 m m的情形的該 關係之圖，圖5 ( b )是顯示使由汽化源到基板的距離r取 Omm至60mm的情形的該關係之圖。 由圖5(a)及圖5(b)顯然得知，在使用超高真空的 真空蒸鍍裝置（真空度：lxl〇-8pa)，並且在由汽化源到基 板的距離Γ為50〇mm的條件下進行真空蒸鍍的情形（圖5( a) 中，參照箭頭A )，與使用較低真空的真空蒸鍍裝置（真空 30 200847845 度：lxl(T4Pa)，並且在由汽化源到基板的距離r為5mm的 條件下進行真空蒸鍍的情形（圖5 ( a)及圖5 ( b )中，參 照前頭A!)下’水分子對基板的碰撞頻率Zh2。對汽化分子對 基板的碰撞頻率Zmonomer之比率相同（1 〇_2)。 因此’即使是使用較低真空的真空蒸鍍裝置（真空度： 1 xl 〇 Pa )的情形，若予以在由汽化源到基板的距離广小（例 如5mm)的條件下進行真空蒸鍍，則可減小水分子對基板的 碰撞頻率z«2。對汽化分子對基板的碰撞頻率Zm〇n〇mer之比 率，進而可謀求有機電致發光元件的長壽命化。 ^此外，纟目5 ( b )暴員然若使用真空度猶高的真空蒸鍍 \ (真二度· 1X10 5pa)進行真空蒸鍍，則即使是在由汽 化源到基板的距離r為15mm的條件下進行真空蒸鍍，也可 期待得到相同的效果（圖5⑴中，參照箭頭A2)。另一 方面」即使是使用真空度稍低的真 乂進行真空蒸錢，若在由汽化源到基板的距^為 5 (b) V 1進仃真空蒸鍍，也可期待得到相同的效果（圖 5 (b)中，參照箭頭Μ 。 、口 [模擬實驗例二] 模擬實驗例二是g 控制至基板上的以汽化源中的汽化溫度 j瘵鍍速度之實驗例。 一囷6疋用以說明汽化源的溫度蛊、士备M 示之圖。在圖6中，釙斜雷、Ή值私’速度的關係而顯 發光材料之α —Νρη β 曰的材料之CuPC '有機 叶之α npd及電子傳輸層的材 横軸表示各材料的、+ 、之A 1 q3的情形，在 的"化温度，在縱轴表示各材料中的汽化分 200847845 子的汽化速度。 由圖6也得知，在CuPC、α -NPD及Alq3之任意一種 材料中’藉由控制汽化源的溫度可控制汽化速度。因此，得 知藉由控制CuPC、a -NPD及Alq3中的各汽化溫度，可控制 CuPC、α -NPD及Alq3之至基板上的蒸鍍速度（進而控制電 洞傳輸層、有機發光層及電子傳輸層的膜厚）。 [實施形態二] 圖7是用以說明與實施形態二有關的有機電致發光元 件的製造裝置200而顯示之圖。此外，在圖7中，符號290 是表示乾式洗淨機構（dry cleaning mechanism)，符號292 是表不UV臭氧（UV O-zone :紫外線臭氧）照射機構，符號294 疋表示局部乾式触刻機構（parfiai dry etching mechanism)。 與實施形態二有關的有機電致發光元件的製造裝置 2 0 0基本上具有與實施形態一有關的有機電致發光元件的 製造裝置100相同的構成，惟第一真空蒸鍍機構24〇、第二 真空蒸鍵機構2 5 0及第三真空蒸鍍機構2 6 〇分別具備4個喷 嘴（喷嘴 246a〜246d、256a〜256d、266a〜266d)此點， 與具備用以形成密封層的兩個蒸鍍聚合機構274、278 (分 別形成由PU (聚脲）構成的有機密封層）及兩個第六真空 蒸鑛機構276、280 (分別形成由siN (氮化矽）構成的無機 密封層）此點不同。 但是’與實施形態二有關的有機電致發光元件的製造 裝置2 0 0是和與實施形態一有關的有機電致發光元件的製 200847845 造裝置1〇〇的情形一樣，成為因可由配置於至撓性基板w 的距離為3mm的位置之噴嘴（噴嘴246a〜 246d、 256d、266a〜266d)朝撓性基板w排出汽化材料，故可謀求 有機電致發光元件的長壽命化’並且可使製造成本比以往還 便宜之有機電致發光元件的製造震置。 而且’依照與實施形態二有關的有機電致發光元件的 製造裝置200,因第一真空蒸鍍機構24〇、第二真空蒸鍍機 構2 50及第三真空蒸鍍機構260分別具備4個喷嘴（喷嘴 246a〜246d、256a〜256d、266a〜266d)，故可比實施形態 一的情形還高速地形成電洞傳輸層16、有機發光層18及電 子傳輸層20。 而且，依照與實施形態二有關的有機電致發光元件的 製造裝置200,藉由使用12個噴嘴之中適當的數目的喷嘴 進行電洞傳輸層形成製程、有機發光層形成製程及電子傳輸 層形成製帛’可容易地調整此等電洞傳輸層$成製程、有機 發光層形成製程及電子傳輸層形成製程中的作業時間（t a c七 time)0 而且，依照與實施形態二有關的有機電致發光元件的 製造裝置20 0,目可形成層疊有自pu構成的有機密封層、 由SM構成的無機密封層、由⑼構成的有機密封層及由siN 構成的無機密封層的4層之疊層密封層，故可製造比實施形 態一的情形還長壽命的有機電致發光元件。 [實施形態三] 圖8是用以說明與實施形態三有關的有機電致發光元 33 200847845 件的製造裝置300而顯示之圖。此外，在圖8中，符號39〇 是表示乾式洗淨機構，符號392是表示㈣臭氧照射機構， 符號394是表示局部乾式蝕刻機構。 與實施形態三有關的有機電致發光元件的製造裝置 300基本上*有與實施形態一有p的有冑電致I光元件的 製造裝置100相同的構成，惟第_真空蒸鍍機構34〇、第二 真空蒸鑛機構350及第X真空蒸錢機構36〇排列在直線上此 點，與具備用以形成密封層的兩個蒸鑛聚合機構374、378 (刀別形成由pu (聚脲）構成的有機密封層）及兩個第六 真空蒸鑛機構3 7 6、3 8 0 Γ公κ丨丨其彡I / 啊傅WD 刀別形成由SiN (氮化矽）構成的 無機密封層）此點不同。 但是，與實施$態三有關的有㈣致發光元件的製造 =置_是和與實施形態—有關的有機電致發光元件的製 以置100的情形一樣，成為因可由配置於至挽性基板W 的距離為3ram的位置之喷嘴346、356、366庠月撓性基板w 排出π化材料，故可謀求有機電致發光元件的長壽命化，並 且可使製造成本比以往還便宜之有機電致發光元件的製造 裝置。 J止#且，依照與實施形態三有關的有機電致發光元件ί =置_，因可形成層疊“ ρυ構成的有機密封層 接、1構成的無機密封層、由⑽成的有機密封層及由Si 態一的情…層之疊層密封層，故可製造比實施， /還長奇命的有機電致發光元件。 以上，根據上述的各實施形態說明了本發明的有機^ 34 200847845 致發光元件的製造方法及有機電致發光 θ 知尤疋件的製造裝置，但 ，本發明並不限定於此，可在不脫離其要旨的範圍内實施， 例如以下的變形也可能： (1 )、在上述各實施形態中，雖缺县# 1 1〇 了朴丄 躍然疋以基板12具備 石央玻璃膜之有機電致發光元件的製造方法為例來說明本 發明，但是本發明並不限定於此。也能適用本發明於例如基 板12具備膜以外的各種基板（例如剛性基板）、石英玻璃 膜以外的玻璃膜（例如棚石夕酸玻璃的膜）、樹脂膜（、例如 PET膜、PES膜、ρ通膜、pc膜等）或者玻璃、樹脂的疊層 膜（例如石英玻璃膜、PET膜的疊層膜）之有機電致發光元 件的製造方法。而且，也能適用本發明於基板12具備任意 的形狀、大小的基板（例如寬度3Gmm的膜、寬度_關的 膜等）之有機電致發光元件的製造方法。 (2 )、在上述各實施形態中，雖然是以使用具有沿著 撓性基板w的移動方向的長度為10_，且沿與撓性基板w 的移動方向正父的方向的寬度為2mm的矩形狀的開口之喷 觜，製造有機電致發光元件的情形為例說明了本發明，但是 本發明並不限定於此。例如在挽性基板w使用寬度3〇_的 膜或寬度300_的寬度寬的膜的情形下，也能使用寬度更寬 的喷鳴（例如具有寬度為3〇mm或3〇〇mffl的矩形狀的開口之 喷嘴）製造有機電致發光元件。而且，也能使用具有沿著撓 性基板W的移動方向呈平滑曲線形狀的噴嘴尖端部的喷嘴 製k有機電致發光70件，俾旋轉滾筒與喷嘴的間隔沿著撓性 基板W的移動方向也成為大致一定。 35 200847845 (3 )、在上述各實施形態中，雖然是以陽極1 4具備 由IT0構成的透明電極之有機電致發光元件的製造方法為 • 例說明了本發明，但是本發明並不限定於此。也能適用本發 • 明於例如陽極14具備由IT0以外的透明電極材料（例如 ZnO)構成的陽極之有機電致發光元件的製造方法。 (4 )、在上述各實施形態中，雖然是以電洞傳輸層i 6 具備由CuPC構成的電洞傳輸層之有機電致發光元件的製造 方法為例說明了本發明，但是本發明並不限定於此。也能適 用本發明於例如電洞傳輸層1 6具備由CuPC以外的有機材料 (例如TPAC、TPD)構成的電洞傳輸層之有機電致發光元件 的製造方法。 (5 )、在上述各實施形態中，雖然是以有機發光層工8 具備由α-NPD構成的有機發光層之有機電致發光元件的製 造方法為例說明了本發明，但是本發明並不限定於此。也能 適用本發明於例如有機發光層18具備由α -NPD以外的有機 發光材料（例如添加有二甲基喹吖啶酮（dimethyi quinacridone)的 Alq3、ZnPB0、D〇FL—5)構成的有機發光 層之有機電致發光元件的製造方法。 (6 )、在上述各實施形態中，雖然是以電子傳輸層2〇 ' 具備由A1Q3構成的電子傳輸層之有機電致發光元件的製造 . 方法為例說明了本發明，但是本發明並不限定於此。也能適 用本發明於例如電子傳輸層20具備由Alq3以外的有機材料 (例如BND、PBD )構成的電子傳輸層之有機電致發光元件 的製造方法。 36 200847845 (7 )、在上述各實施形態中，雖然是以電子注入層2 2 具備由LiF構成的電子注入層之有機電致發光元件的製造 方法為例說明了本發明，但是本發明並不限定於此。也能適 用本發明於例如電子注入層22具備由LiF以外的材料（例 如BaF2、SrF2、CaF2、MgF2)構成的電子注入層之有機電致 發光元件的製造方法。 (8 )、在上述各實施形態中，雖然是以陰極2 4具備 由A1構成的陰極之有機電致發光元件的製造方法為例說明 了本發明，但是本發明並不限定於此。也能適用本發明於例 如陰極24具備由A1以外的材料（例如jjg與Ag的混合金屬） 構成的陰極之有機電致發光元件的製造方法。 (9 )、在上述實施形態二及三中，雖然是以具備層疊 有由pu (聚腺）構成的密封層及由SiN (氮化矽）構成^ 封層的疊層密封層之有機電致發光元件的製造方法為例說 明了本發明，但是本發明並不限定於此。也能適用本發明於 例如取代由SlN (氮化矽）構成的密封膜，具備由αι2〇3構 成的密封膜、由Zr〇2構成的密封膜、由MgF2構成的密封膜、 由1 T0構成的密封膜等的無機密封膜之有機電致發 的製造方法。 千 (10)、在上述各實施形態中，雖然是以具備由陽極 14、電洞傳輸層16、有機發光層18、電子傳輸層2〇、電子 注22及陰極24構成的疊層結構體之有機電致發光元件 的=知·方法為例說明了本發明，但是本發明並不限定於此。 k用本發明於例如不具備電洞傳輸層、電子傳輸層、電 37 200847845 子注入層之中的至少一個之有機 法，並且也能適用本發明於更具 致/光元件的製造方 TPA-6)及其他層之有機電 ^庄入層（例如TPDA、 ,M L 九疋件的製造方法。 ()、在上述各實施形態中，雖铁θ 、 輸層形成製程、有機發光層形成製：：，含電洞傳 之有機電致發光元件的製造方 :層形成製程 發明並不限定於此。也能適用本發 了本：明，但是本 層形成製程及電子傳輸層形成了如不包含電洞傳輪 電致發光元件的製造方法’並且也能適用本發明於更包二機 成電洞注入層及其他層的製程之有機電致發光元件的势： 方法。 k (1 2 )、在上述各實施形態中，雖然是以照明裝置用 有機電致發光元件的製造方法為例說明了本發明，但是本發 明並不限定於此。也能適用本發明於例如顯示器用的有機電 致發光元件的製造方法。 【圖式簡單說明】 圖1是顯示有機電致發光元件10之剖面圖。 圖2是顯示與實施形態一有關的有機電致發光元件的 製造裝置1 0 0之剖面圖。 圖3是顯示與實施形態一有關的有機電致發光元件的 製造方法之流程圖。 圖4 ( a )、（ b )是用以說明真空蒸鍍法中的由汽化源 到基板的距離r與汽化分子對基板的碰撞頻率Zmonomer的 38 200847845 關係而顯示之圖。 板的距離r 基板的碰撞 的汽化速度 電致發光元 電致發光元 圖5 ( a ) 、 （ b )是用以說明由汽化源到基 與水分子對基板的碰撞頻率Zh2。對汽化分子對 頻率Zmonomer之比率的關係而顯示之圖。 ' 圖6是用以說明汽化源的溫度與汽化分子 的關係而顯示之圖。 圖7是用以說明與實施形態二有關的有機 件的製造裝置200而顯示之圖。 圖8是用以說明與實施形態三有關的有機 件的製造裝置300而顯示之圖。 【主要元件符號說明】 10: 有機電致發光元件 12: 基板 14: 陽極 16: 電洞傳輸層 18: 有機發光層 20: 電子傳輸層 22: 電子注入層 24: 陰極 26: 密封層 裝置 100、200、300:有機電致發光元件的製造 11 0 :真空室 11 2、11 4、11 6 :間隔壁 39 200847845 118、120:差動排氣機構 122 :基板送出/捲取室 124、224、324:第一真空蒸鍍室 126:第二真空蒸鍍室 128:蒸鍍聚合室 130、230、330:送出滾子 132、136、232、2 33、236、332、333、336:滾子 134:旋轉滾筒 138、238、338:捲取滚子 140、240、340:第一真空蒸鍍機構 142、152、162、342、352、362:汽化部 144、154、164、254、344、364:連通部 146、156、166、246a、24 6b、246c、246d、25 6a、256b、 256c、256d、266a、266b、266c、266d、346、356、366:喷 嘴 150、250、350:第二真空蒸鍍機構 160、260、360··第三真空蒸鍍機構 170、270、370:第四真空蒸鍍機構 172、272、372:第五真空蒸鍍機構 174、2 74、2 78、3 74、3 78:蒸鍍聚合機構 222、322:基板送出室 226、326:第四真空蒸鍍室 228、328:基板捲取室 276、280、376、380:第六真空蒸鍍機構 40 200847845 290、39(h 乾式洗淨機構 292、392: UV臭氧照射機構 294、394·.局部乾式蝕刻機構 W:撓性基板 41Zh2〇= 2. 6x 1 0 24Ph2〇/ ( MT ) 1/2 (2) Here, Phw is the partial pressure of water [Pa], M is the vaporization molecule, molecular weight, and T is the absolute temperature [κ] ]. It is apparent from the formula (2) that the partial pressure of water is ρΗ2. (or vacuum sound) The lower the 'water molecule' collision frequency with the substrate Ζη2. The smaller the size, the more the Zhw does not change even if the distance r from the source to the substrate is reduced. 4 Therefore, if the combination formula (丨) and formula (2) are considered, it is known that if the vacuum evaporation is performed under the condition that the distance from the vaporization source to the substrate is reduced, the collision frequency of the water molecules on the substrate can be eliminated. Since only the collision frequency (Zm〇n〇mer) of the knives to the substrate is increased/reinvented, the ratio of the water molecules taken in can be reduced even if vacuum evaporation is performed without using the vacuum vapor deposition apparatus of the super-real jade. Fig. 5 is a view for explaining the distance r from the vaporization source to the substrate and the collision frequency ZH2 of the water molecules to the substrate. A graph showing the relationship of the ratio of vaporization molecules to the collision frequency of the substrate, Zmonomer. Figure 5 ( & ) is a diagram showing the relationship of the distance r from the original to the substrate on the horizontal axis from 0 匪 to 600 mm, and Figure 5 (b) shows the source from the vaporization source to the substrate. The relationship between the distance r is from 0 mm to 60 mm. It is apparent from Fig. 5 (a) and Fig. 5 (b) that a vacuum evaporation apparatus (vacuum degree: lxl 〇 - 8 Pa) using an ultra-high vacuum, and a distance Γ from a vaporization source to a substrate is 50 〇 mm. Under the condition of vacuum evaporation (refer to arrow A in Fig. 5 (a)), and vacuum evaporation device using vacuum (vacuum 30 200847845 degrees: lxl (T4Pa), and from the vaporization source to the substrate When the distance r is 5 mm, vacuum evaporation is performed (Fig. 5 (a) and Fig. 5 (b), refer to the front A!) under the collision frequency Zh2 of the water molecule to the substrate. The ratio of the collision frequency Zmonomer is the same (1 〇_2). Therefore, even in the case of a vacuum evaporation apparatus (vacuum degree: 1 xl 〇Pa) using a lower vacuum, the distance from the vaporization source to the substrate is small. Vacuum evaporation under conditions of (for example, 5 mm) can reduce the collision frequency z«2 of water molecules on the substrate. The ratio of the collision frequency of vaporization molecules to the substrate Zm〇n〇mer can further realize organic electroluminescence. The long life of the component. ^ In addition, the eye of the 5 (b) violence is still high When vacuum evaporation is performed by vacuum evaporation \ (true second degree 1X10 5pa), even if vacuum deposition is performed under the condition that the distance r from the vaporization source to the substrate is 15 mm, the same effect can be expected (Fig. 5 (1) , refer to the arrow A2). On the other hand, even if vacuum is used for vacuum evaporation using a vacuum with a slightly lower vacuum, if the distance from the vaporization source to the substrate is 5 (b) V 1 , vacuum evaporation is possible. It is expected that the same effect can be obtained (in Fig. 5(b), reference arrow 。., port [simulation experiment example 2] simulation experiment example 2 is an experimental example in which the vaporization temperature j瘵 plating rate in the vaporization source is controlled to the substrate. A 囷6疋 is used to explain the temperature of the vaporization source, and the diagram of the syllabus M. In Figure 6, the relationship between the slanting ray and the Ή 私 private 'speed and the luminescent material α Ν ρη β 曰CuPC 'the α npd of the organic leaf and the horizontal axis of the electron transport layer indicate the case of +, A 1 q3 of each material, and the vaporization of the vaporization point 200847845 in each material on the vertical axis. Speed. It is also known from Fig. 6 that in any of CuPC, α-NPD and Alq3 The vaporization rate can be controlled by controlling the temperature of the vaporization source. Therefore, it is known that by controlling the vaporization temperatures in CuPC, a-NPD, and Alq3, the vapor deposition rate of CuPC, α-NPD, and Alq3 onto the substrate can be controlled ( Further, the film thickness of the hole transport layer, the organic light-emitting layer, and the electron transport layer is controlled. [Embodiment 2] FIG. 7 is a view for explaining the manufacturing apparatus 200 of the organic electroluminescence device according to the second embodiment. Further, in Fig. 7, reference numeral 290 denotes a dry cleaning mechanism, reference numeral 292 denotes a UV ozone (UV O-zone) irradiation mechanism, and reference numeral 294 denotes a partial dry contact mechanism ( Parfiai dry etching mechanism). The apparatus for manufacturing an organic electroluminescence device according to the second embodiment basically has the same configuration as the apparatus 100 for manufacturing an organic electroluminescence device according to the first embodiment, but the first vacuum vapor deposition mechanism 24, The two vacuum evaporation mechanism 250 and the third vacuum evaporation mechanism 2 6 具备 respectively have four nozzles (nozzles 246a to 246d, 256a to 256d, 266a to 266d), and two for forming a sealing layer. The vapor deposition polymerization mechanisms 274, 278 (each forming an organic sealing layer composed of PU (polyurea)) and the two sixth vacuum distillation mechanisms 276, 280 (forming an inorganic sealing layer composed of siN (tantalum nitride), respectively) This is different. However, the manufacturing apparatus 200 of the organic electroluminescence device according to the second embodiment is the same as the case of the manufacturing device of the 200847845 manufacturing apparatus of the organic electroluminescence device according to the first embodiment. The nozzles (the nozzles 246a to 246d, 256d, 266a to 266d) at a position where the distance of the flexible substrate w is 3 mm discharges the vaporized material toward the flexible substrate w, so that the life of the organic electroluminescence device can be extended and manufacturing can be achieved. The manufacture of organic electroluminescent elements, which are cheaper than in the past, is shaken. Further, according to the apparatus 2 for manufacturing an organic electroluminescence device according to the second embodiment, the first vacuum vapor deposition mechanism 24, the second vacuum vapor deposition mechanism 205, and the third vacuum vapor deposition mechanism 260 each have four nozzles. (Nozzles 246a to 246d, 256a to 256d, 266a to 266d), the hole transport layer 16, the organic light-emitting layer 18, and the electron transport layer 20 can be formed at a higher speed than in the first embodiment. Further, according to the apparatus 2 for manufacturing an organic electroluminescence device according to the second embodiment, the hole transport layer forming process, the organic light emitting layer forming process, and the electron transport layer formation are performed by using an appropriate number of nozzles among the twelve nozzles. The manufacturing process can be easily adjusted, the organic light-emitting layer forming process and the working time in the electron-transport layer forming process (tac seven time) 0 and in accordance with the organic electrochemistry related to the second embodiment In the light-emitting device manufacturing apparatus 20, it is possible to form a laminate of four layers of an organic sealing layer composed of pu, an inorganic sealing layer made of SM, an organic sealing layer composed of (9), and an inorganic sealing layer made of siN. Since the sealing layer is formed, an organic electroluminescence device having a longer life than the case of the first embodiment can be produced. [Embodiment 3] Fig. 8 is a view for explaining a manufacturing apparatus 300 of an organic electroluminescent element 33 200847845 according to the third embodiment. Further, in Fig. 8, reference numeral 39A denotes a dry cleaning mechanism, reference numeral 392 denotes a (four) ozone irradiation mechanism, and reference numeral 394 denotes a partial dry etching mechanism. The apparatus 300 for manufacturing an organic electroluminescence device according to the third embodiment has basically the same configuration as the manufacturing apparatus 100 of the electroconductive I-light element having the p-first embodiment, but the first vacuum evaporation mechanism 34〇 The second vacuum distillation mechanism 350 and the X-th vacuum evaporation mechanism 36 are arranged on the straight line at this point, and are provided with two distillation polymerization mechanisms 374, 378 for forming a sealing layer (the knife is formed by pu (polyurea) ) The organic sealing layer formed and the two sixth vacuum distillation mechanisms 3 7 6 , 3 8 0 Γ 丨丨 丨丨 丨丨 I / 傅 Fu WD knife to form an inorganic sealing layer composed of SiN (tantalum nitride) ) This is different. However, the manufacturing of the (fourth) electroluminescent element associated with the implementation of the third embodiment is the same as the case of the organic electroluminescent element according to the embodiment, which can be disposed on the towable substrate. In the nozzles 346, 356, and 366, where the distance W of the distance is W, the π-thick material is discharged from the flexible substrate w, so that the organic electroluminescence device can be extended in life, and the organic cost can be reduced. A device for manufacturing a light-emitting element. In addition, according to the organic electroluminescence device of the third embodiment, the organic sealing layer of the laminated structure, the inorganic sealing layer of one structure, the organic sealing layer of (10), and Since the laminated sealing layer of the layer of the Si state is used, it is possible to manufacture an organic electroluminescent device which is more than the implementation and/or has a long life. The organic compound of the present invention has been described above based on the above embodiments. The manufacturing method of the light-emitting element and the apparatus for manufacturing the organic electroluminescence θ are not limited thereto, and may be implemented without departing from the gist thereof. For example, the following modifications are also possible: (1) In each of the above-described embodiments, the present invention has been described with reference to a method for producing an organic electroluminescence device having a shiyang glass film on a substrate 12, but the present invention is not limited thereto. In addition, the present invention can be applied to, for example, a substrate (including a rigid substrate) other than a film, a glass film other than a quartz glass film (for example, a film of shed glass), and a resin film (for example, PET). a method for producing an organic electroluminescence device of a laminated film of a glass or a resin (for example, a laminated film of a quartz glass film or a PET film), or a method for producing an organic electroluminescence device. The substrate 12 is provided with a method of manufacturing an organic electroluminescence device having a substrate having an arbitrary shape and size (for example, a film having a width of 3 Gmm and a film having a width of _off). (2) In the above embodiments, the use is performed. A case where the organic electroluminescent element is manufactured by a sneezing having a length of 10 mm along the moving direction of the flexible substrate w and a rectangular opening having a width of 2 mm in the direction perpendicular to the moving direction of the flexible substrate w The present invention has been described by way of example, but the present invention is not limited thereto. For example, in the case where a film having a width of 3 〇 _ or a film having a width of 300 Å is used in the lead substrate w, a wider width spray can be used. An organic electroluminescence element is produced by, for example, a nozzle having a rectangular opening having a width of 3 〇 mm or 3 〇〇 mffl. Further, a nozzle having a smooth curved shape along the moving direction of the flexible substrate W can also be used. Tip There are 70 organic electroluminescence in the nozzle, and the interval between the rotary drum and the nozzle is also substantially constant along the moving direction of the flexible substrate W. 35 200847845 (3) In the above embodiments, the anode is used. The present invention has been described with respect to a method of manufacturing an organic electroluminescence device having a transparent electrode composed of IT0. However, the present invention is not limited thereto. The present invention is also applicable to, for example, the anode 14 having transparency other than IT0. A method for producing an organic electroluminescence device comprising an anode made of an electrode material (for example, ZnO). (4) In the above embodiments, the hole transport layer i 6 is provided with a hole transport layer made of CuPC. The present invention has been described by way of a method of manufacturing an electroluminescence device, but the present invention is not limited thereto. The present invention can also be applied to a method of manufacturing an organic electroluminescence device having a hole transport layer made of an organic material other than CuPC (e.g., TPAC, TPD), for example, the hole transport layer 16. (5) In the above embodiments, the present invention has been described by taking an organic light-emitting device having an organic light-emitting layer composed of α-NPD as an example, but the present invention does not. Limited to this. The present invention can also be applied to, for example, an organic light-emitting layer 18 having an organic light-emitting material other than α-NPD (for example, Alq3, ZnPB0, D〇FL-5 added with dimethyi quinacridone). A method of producing an organic electroluminescent device of a light-emitting layer. (6) In the above embodiments, the present invention has been described with respect to the manufacture of an organic electroluminescence device having an electron transport layer composed of A1Q3. The method is described as an example, but the present invention is not Limited to this. The method for producing an organic electroluminescence device comprising, for example, an electron transport layer made of an organic material other than Alq3 (for example, BND or PBD) in the electron transport layer 20 can be applied. 36 200847845 (7) In the above embodiments, the present invention has been described by taking a method of manufacturing an organic electroluminescence device having an electron injection layer made of LiF as an electron injection layer 2 2, but the present invention does not. Limited to this. In the present invention, for example, a method of manufacturing an organic electroluminescence device having an electron injecting layer made of a material other than LiF (e.g., BaF2, SrF2, CaF2, MgF2) in the electron injecting layer 22 can be applied. (8) In the above embodiments, the present invention has been described by taking a method of manufacturing an organic electroluminescence device having a cathode composed of A1 as a cathode, but the present invention is not limited thereto. The present invention can also be applied to a method of manufacturing an organic electroluminescence device having a cathode composed of a material other than A1 (for example, a mixed metal of jjg and Ag). (9) In the above-described second and third embodiments, the organic electrolysis is provided with a laminated sealing layer in which a sealing layer composed of pu (poly gland) and a sealing layer composed of SiN (tantalum nitride) are laminated. The present invention has been described by way of a method of manufacturing a light-emitting element, but the present invention is not limited thereto. The present invention can also be applied to, for example, a sealing film made of S1N (tantalum nitride), a sealing film made of αι2〇3, a sealing film made of Zr〇2, a sealing film made of MgF2, and a T00. A method for producing an organic electroluminescence of an inorganic sealing film such as a sealing film. In the above embodiments, the multilayer structure including the anode 14, the hole transport layer 16, the organic light-emitting layer 18, the electron transport layer 2, the electron beam 22, and the cathode 24 is provided. The present invention has been described by way of an example of an organic electroluminescence device, but the present invention is not limited thereto. k uses the present invention for, for example, an organic method which does not have at least one of a hole transport layer, an electron transport layer, and an electric wave 37 200847845 sub-injection layer, and can also be applied to a manufacturer of a more optical/optical component TPA- 6) and other layers of organic electro-mechanical layers (for example, TPDA, ML niobium manufacturing method. (), in the above embodiments, the iron θ, the formation process of the transport layer, the formation of the organic light-emitting layer: : The manufacturer of the organic electroluminescent device containing the hole: the layer forming process is not limited thereto. The present invention can also be applied to the present invention, but the layer forming process and the electron transport layer are formed, if not included. The method for manufacturing a hole-transmitting electroluminescent device' can also be applied to the potential of the organic electroluminescent device of the invention which is further processed into a hole injection layer and other layers: method k (1 2 ), In the above embodiments, the present invention has been described by taking a method of manufacturing an organic electroluminescence device for an illumination device as an example. However, the present invention is not limited thereto. The present invention can also be applied to, for example, an organic electrochemistry for a display. Illuminate BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an organic electroluminescence device 10. Fig. 2 is a cross-sectional view showing a manufacturing apparatus 100 of an organic electroluminescence device according to a first embodiment. Fig. 3 is a flow chart showing a method of manufacturing an organic electroluminescence device according to the first embodiment. Fig. 4 (a) and (b) are for explaining a distance r from a vaporization source to a substrate in a vacuum evaporation method. The vaporization molecule vs. substrate collision frequency Zmonomer's 38 200847845 relationship is shown in the graph. The distance of the plate r The collision velocity of the substrate The electroluminescence element of the electroluminescence element Figure 5 (a), (b) is used to illustrate the vaporization The collision frequency Zh2 of the source-to-base and water molecules to the substrate is shown in relation to the ratio of the vaporization molecules to the frequency Zmonomer. Figure 6 is a diagram showing the relationship between the temperature of the vaporization source and the vaporization molecules. 7 is a view for explaining the manufacturing apparatus 200 for an organic member according to the second embodiment. Fig. 8 is a view for explaining the manufacturing apparatus 300 for an organic member according to the third embodiment. DESCRIPTION OF SYMBOLS 10: Organic electroluminescent element 12: Substrate 14: Anode 16: Hole transport layer 18: Organic light-emitting layer 20: Electron transport layer 22: Electron injection layer 24: Cathode 26: Seal layer device 100, 200, 300: manufacture of organic electroluminescence element 11 0 : vacuum chamber 11 2, 11 4, 11 6 : partition wall 39 200847845 118, 120: differential exhaust mechanism 122: substrate feeding/winding chamber 124, 224, 324: First vacuum evaporation chamber 126: second vacuum evaporation chamber 128: evaporation polymerization chambers 130, 230, 330: delivery rollers 132, 136, 232, 2 33, 236, 332, 333, 336: roller 134: Rotating drums 138, 238, 338: winding rollers 140, 240, 340: first vacuum evaporation mechanisms 142, 152, 162, 342, 352, 362: vaporization sections 144, 154, 164, 254, 344, 364: Connecting portions 146, 156, 166, 246a, 24 6b, 246c, 246d, 25 6a, 256b, 256c, 256d, 266a, 266b, 266c, 266d, 346, 356, 366: nozzles 150, 250, 350: second vacuum The vapor deposition mechanisms 160, 260, 360, the third vacuum evaporation mechanism 170, 270, 370: the fourth vacuum evaporation mechanism 172, 272, 372: the fifth vacuum evaporation mechanism 17 4, 2 74, 2 78, 3 74, 3 78: vapor deposition polymerization mechanisms 222, 322: substrate delivery chambers 226, 326: fourth vacuum evaporation chambers 228, 328: substrate winding chambers 276, 280, 376, 380 : sixth vacuum vapor deposition mechanism 40 200847845 290, 39 (h dry cleaning mechanism 292, 392: UV ozone irradiation mechanism 294, 394 · partial dry etching mechanism W: flexible substrate 41

Claims (1)

200847845 十、申請專利範圍： 1 種有機電致發光元件的製造方法，包含： 基板；以及 豐層結構體，形成於該基板上，至少具有陽極、有機發 光層及陰極， 其特徵為：包含在真空環境下，藉由由配置於至該基板 的距離為1 5mm以下的位置之喷嘴朝該基板排出由有機發光 材料構成的汽化材料，形成該有機發光層之有機發光層形成 製程。 如申請專利範圍第1項之有機電致發光元件的製造 方法，复φ 八甲在lxl〇 3pa〜lxl0-5pa的真空環境下，進行該有 機發光層形成製程。 3 申睛專利範圍第1項或第2項之有機電致發光元 件的製造方法，甘a 〃中在將該喷嘴加熱至汽化材料不會再附著 於該噴嘴的、;四疮μ ^ , ^度的條件下，進行該有機發光層形成製程。 如申請專利範圍第1項或第2項之有機電致發光元 件的製造方法，t 士 八中一邊像該基板移動，一邊進行該有機發 光層形成製程。 从」*申請專利範圍帛1項或第2項之有機電致發光元 件的製造方、本 y /、中一邊冷卻該基板，一邊進行該有機發光 杜的1、广申請專利範圍帛1項或第2項之有機電致發光元 仵的製造方法，1^ /、 5亥疊層結構體是更包含有機發光層以外 的兵他的有機展 成增之噓層結構體， 42 200847845 更包含：藉由由配置於至該基板的距離為15mm以下的 位置之其他的喷嘴朝該基板排出由有機發光材料以外的 機材料構成的汽化材#，形成該其他的有機層之其他的 層形成製程。 機1 卜如申請專利範圍“項之有機電致發光元件的製造 方法，其中該疊層結構體是更包含無機層之疊層結構體， 更包含： 藉由利用真空蒸鍍法使由無機材料構成的汽化材料附 著於該基板’形成該無機層之無機層形成製程；以及 藉由利用真空蒸鍍法使由構成陰極的材料構成的汽化 材料附著於該基板，形成該陰極之陰極形成製程， 在同一個真空裝置之中進行該有機發光層形成製程、該 其他的有機層形成製程、該無機層形成製程及該陰極形成製 程。 8、 如申請專利範圍第7項之有機電致發光元件的製造 方法，其中該有機電致發光元件是更包含在該基板上覆蓋該 疊層結構體而形成的密封層之有機電致發光元件， 更包含：藉由利用蒸鍍聚合法使原料單體在該基板上聚 合，形成該密封層之密封層形成製程， 在同一個真空裝置之中進行該有機發光層形成製程、該 其他的有機層形成製程、該無機層形成製程、該陰極形成製 程及該密封層形成製程。 9、 如申請專利範圍第8項之有機電致發光元件的製造 方法，其中該基板使用撓性基板， 43 200847845 …旋轉滾筒上沿著旋轉方向移動，-邊進 订機1光層形成製程、該其他的有機層形成製程、該益 機層形成製程、該陰極形成製程及該密封層形成製程。“、 1〇、—種有冑電致發光元件的製造裝置，λ用以製造 具備如Τ構件之有機電致發光元件:基板；形成於該基板 上，至少具有陽極、有機發光層及陰極之疊層結構體， 其特徵包含·· 真空室； 基板運运機構，配置於該真空室中，運送該基板丨以及 喷嘴’該真空室中的具有在至該基板的距離為15_以 下的位置朝該基板排出由有機發光材料構成的汽化材料的 功能。 11、如申請專利範圍第丨0項之有機電致發光元件的製 造裝置，其中更包含：將該喷嘴加熱至汽化材料不會再附著 於該喷嘴的溫度之喷嘴加熱機構。 1 2、如申請專利範圍第丨〇項或第丨丨項之有機電致發 光兀件的製造裝置，其中該疊層結構體是更包含有機發光層 以外的其他的有機層之疊層結構體， 更包含··該真空室中的具有在至該基板的距離為i 5_ 以下的位置朝該基板排出由有機發光材料以外的有機材料 構成的Ά化材料的功能之其他的喷嘴。 1 3、如申請專利範圍第1 2項之有機電致發光元件的製 造裝置’其中該疊層結構體是更包含無機層之疊層結構體， 更包含： 44 200847845 真空蒸鍍機構， 法使由無機材料構成 層；以及 配置於該真空室中，藉由利用真空蒸鍍 的汽化材料附著於該基板，形成該無機 空基贫：：真空蒸鍍機構’配置於該真空室中，藉由利用真 并:由構成陰極的材料構成的汽料附著於該基 板，形成該陰極。 、生壯 如申明專利範圍第13項之有機電致發光元件的製 上田置/、中°亥有機電致發光元件是更包含在該基板上覆蓋 4 ®層結構體而形成的密封層之有機電致發光元件， 、'一更包含：配置於該真空室中，藉由利用蒸鍍聚合法使原 料單體在該基板上聚合，形成該密封層之蒸鑛聚合機構。 1 5、如申請專利範圍第i 〇項或第11項之有機電致發 光π件的製造裝置，其中該基板是撓性基板， 該基板運送機構更包含：送出該基板的送出滾子；捲取 η亥基板的捲取滾子；配置於該基板的運送路徑中，隨著該基 板被運送而旋轉的旋轉滾筒， 遠喷嘴是朝在該旋轉滾筒的表面上被運送的該基板排 出汽化材料而構成。 1 6、如申請專利範圍第1 5項之有機電致發光元件的製 造裝置，其中在該旋轉滾筒的内部設置有冷卻該旋轉滚筒的 表面之冷卻機構。 17、如申請專利範圍第14項之有機電致發光元件的製 造裝置’其中更包含：使該喷嘴的附近、該其他的噴嘴的附 近、該真空蒸鍍機構的附近、該其他的真空蒸鍍機構的附近 45 200847845 及該蒸鍍聚合機構的附近的各個成為規定的真空環境之差 動排氣機構。 46200847845 X. Patent application scope: A method for manufacturing an organic electroluminescence device, comprising: a substrate; and a layered structure formed on the substrate, having at least an anode, an organic light-emitting layer and a cathode, characterized in that: In a vacuum environment, an organic light-emitting layer forming process of the organic light-emitting layer is formed by discharging a vaporized material made of an organic light-emitting material toward the substrate by a nozzle disposed at a position of a distance of 15 mm or less from the substrate. For example, in the method for producing an organic electroluminescence device according to the first aspect of the patent application, the organic luminescent layer forming process is carried out in a vacuum environment of lxl 〇 3pa to lxl0-5pa. (3) The method for producing an organic electroluminescence device according to item 1 or 2 of the patent application scope, wherein the nozzle is heated to a vaporized material which does not adhere to the nozzle; the four sores μ ^ , ^ The organic light-emitting layer forming process is performed under conditions of a degree. According to the method for producing an organic electroluminescence device according to the first or second aspect of the patent application, the organic light-emitting layer forming process is performed while moving the substrate as in the case of the substrate. From the "manufacturer of the organic electroluminescent device of the first application or the second item", the y / and the middle of the substrate are cooled, and the organic light-emitting genre 1 is widely applied. The manufacturing method of the organic electroluminescent element of the second item, the 1^ /, 5 hai laminated structure is an organic layered structure further including an organic luminescent layer, 42 200847845 further includes: The other layer forming process of the other organic layer is formed by discharging the vaporized material # composed of a material other than the organic light-emitting material to the substrate by another nozzle disposed at a position of 15 mm or less from the substrate. The manufacturing method of the organic electroluminescence device of the above-mentioned patent application, wherein the laminated structure is a laminated structure further comprising an inorganic layer, further comprising: using an inorganic material by using a vacuum evaporation method a vaporization material is formed on the substrate to form an inorganic layer forming process of the inorganic layer; and a vapor forming material composed of a material constituting the cathode is attached to the substrate by vacuum evaporation to form a cathode forming process of the cathode. The organic light-emitting layer forming process, the other organic layer forming process, the inorganic layer forming process, and the cathode forming process are performed in the same vacuum apparatus. 8. The organic electroluminescent element according to claim 7 a manufacturing method, wherein the organic electroluminescence device is an organic electroluminescence device further comprising a sealing layer formed on the substrate to cover the laminated structure, and further comprising: using a raw material monomer by evaporation polymerization Polymerizing on the substrate to form a sealing layer forming process of the sealing layer, and performing the organic light emitting layer in the same vacuum device a manufacturing process, the other organic layer forming process, the inorganic layer forming process, the cathode forming process, and the sealing layer forming process. 9. The method of manufacturing the organic electroluminescent device according to claim 8, wherein the substrate Using a flexible substrate, 43 200847845 ... moving on the rotating drum in the direction of rotation, the edge binding machine 1 optical layer forming process, the other organic layer forming process, the beneficial layer forming process, the cathode forming process and the sealing a layer forming process. "1", a manufacturing device for a luminescent electroluminescent device, λ for fabricating an organic electroluminescent device having a member such as a germanium: a substrate; formed on the substrate, having at least an anode, organic light a laminated structure of a layer and a cathode, characterized by: a vacuum chamber; a substrate transport mechanism disposed in the vacuum chamber, transporting the substrate and a nozzle having a distance of 15 in the vacuum chamber The lower position discharges the function of the vaporized material composed of the organic light-emitting material toward the substrate. 11. The apparatus for manufacturing an organic electroluminescence device according to claim 0, further comprising: a nozzle heating mechanism for heating the nozzle to a temperature at which the vaporized material does not adhere to the nozzle. The apparatus for manufacturing an organic electroluminescence element according to the invention of claim 2, wherein the laminated structure is a laminated structure further comprising an organic layer other than the organic light-emitting layer Further, in the vacuum chamber, another nozzle having a function of discharging a deuterated material made of an organic material other than the organic light-emitting material toward the substrate at a distance of i 5 Å or less from the substrate is included. 1 . The apparatus for manufacturing an organic electroluminescence device according to claim 12, wherein the laminated structure is a laminated structure further comprising an inorganic layer, further comprising: 44 200847845 vacuum evaporation mechanism, method Forming a layer from an inorganic material; and disposing in the vacuum chamber, the vaporization material by vacuum evaporation is attached to the substrate to form the inorganic void-deficient: vacuum evaporation mechanism is disposed in the vacuum chamber by The true sum: a vapor composed of a material constituting the cathode is attached to the substrate to form the cathode. The organic electroluminescent device of the organic electroluminescent device according to claim 13 of the patent patent scope is a sealing layer formed by further covering the substrate with a layer of 4® layer. The electroluminescent device, </ RTI> further comprises: a vaporization polymerization mechanism which is disposed in the vacuum chamber and polymerizes a raw material monomer on the substrate by a vapor deposition polymerization method to form the sealing layer. The apparatus for manufacturing an organic electroluminescence π element according to the invention of claim 1 or 11, wherein the substrate is a flexible substrate, the substrate transporting mechanism further comprising: a feeding roller for feeding the substrate; Taking the winding roller of the substrate; the rotating roller disposed in the transport path of the substrate as the substrate is transported to rotate, the far nozzle discharging the vaporized material toward the substrate transported on the surface of the rotating drum And constitute. A manufacturing apparatus of an organic electroluminescence element according to claim 15 wherein a cooling mechanism for cooling a surface of the rotary drum is provided inside the rotary drum. 17. The apparatus for manufacturing an organic electroluminescence device according to claim 14, further comprising: bringing the vicinity of the nozzle, the vicinity of the other nozzle, the vicinity of the vacuum evaporation mechanism, and the other vacuum evaporation. In the vicinity of the mechanism 45 200847845 and each of the vicinity of the vapor deposition polymerization mechanism, a differential exhaust mechanism that is a predetermined vacuum environment. 46
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