TW200846300A - Dielectric ceramic composition and electronic device - Google Patents
Dielectric ceramic composition and electronic device Download PDFInfo
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- TW200846300A TW200846300A TW097104176A TW97104176A TW200846300A TW 200846300 A TW200846300 A TW 200846300A TW 097104176 A TW097104176 A TW 097104176A TW 97104176 A TW97104176 A TW 97104176A TW 200846300 A TW200846300 A TW 200846300A
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- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
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Abstract
Description
200846300 、 九、發明說明: 【發明所屬之技術領域】 本發明係有關於具有耐還原性之介電體陶曼器組合 物、及介電體層内具有此介電體陶瓷器組合物之電子元 件,且特別有關適用於定額電壓高(例如,l〇〇v以上)之中 高壓用途的介電體陶瓷器組合物及電子元件。 【先前技術】 作為電子7L件之-例之積層陶究電容器例如係在由預 定之介電體m組合物形成之陶竟生胚薄板印刷預定圖 案之内部電極,且其複數枚交互重疊,之後將—體化而得 之生胚晶片同時燒成而制皮。盔 奸 ^ ^ 為了猎由燒成而與陶瓷介電 體一體化,因此積層陶窨雷交 岡尤冤谷裔之内部電極層必須選擇不 會與陶瓷介電體反應之鉍4立。 材料 口此’以構成内部電極層之 材料而言,在習知技術中 甲义/頁使用白金或鈀等高價貴金屬。 疋近年來可以使用鎳或銅等便宜之卑金屬的介 電體陶瓷器組合物不斷n +斷開發,而可以大幅降低成本。 —面另外,近年,隨著電子回路之高密度化而 :::子7〇件之小型化的要求也跟著提高,因此積層陶瓷電 谷器之小型化、大容量叁 少 化心速進展。皈之而來的是積層陶 免電谷器之介電層進一 Jfe. ^ a /μ m ^ 步薄層化,因此,業界尋求一種即 使薄層化也能維持積層六 、尽陶是電谷益之#賴性的介電體陶麥 器組合物。尤J:是, ^ 、疋以在咼疋額電壓(例如,100V以上)下 使用之中高壓用電容考 ^ θ °之小歪·大谷罝化而言,對於構成 6 2030-9390-PF;F〇rever769 200846300 , 介電體層之介電體陶瓷器組合物則是要求非常高的信賴 性。 相對地,例如,在特許第3567759號公報中,揭露一 種於高頻率·高電壓交流下使用之電容器用的介電體陶瓷 器組合物其中,此介電體陶甍器組合物含有燒結助材; 相對於由組成式:AB〇3+aR+bM(其中,AB〇3鈦酸鋇系固溶體、 β係Le等金屬元素之氧化物、係等金屬元素之氧化物) 表示之主成分而言,此燒結助材係作為副成分,且含有Β 鲁元素及Si元素中至少1種。 而且,如上述特許第3567759號公報中所載,相對於 1莫耳以主成分中之ABCh表示之鈦酸鋇固溶體而言,在 0.35莫耳以下之範圍内添加XZrCh(其中,χ係選自以、化、 及Ca中至少1種之金屬元素)以作為主成分中之添加成分。 但疋’在此特許3567759號公報中,耐壓(破壞電壓) 低、壽命特性(絕緣電阻之加速壽命)不充分,因此,有信 • 賴性劣化的問題。尤其是,由於此問題在將積層陶瓷電容 器小型化、大容量化之情況下變得顯著的緣故,因此,為 了達成小型化、大容量化,而謀求耐壓及壽命特性(絕緣電 阻之加速壽命)之提升。 【發明内容】 有鑑於上述問題,本發明之目的乃是提供一種可以在 還原性環境中燒成、於電壓施加時電致伸縮 (electrostrictive)量低、良好地保持比介電體率及容量 7 2030-9390-PF;Forever7 69 200846300 溫度特性、且可以提升耐屋(破壞電壓)及絕緣電阻之加速 壽命的介電體陶曼器組合物’及具有此介電體陶竟器組合 物並將其作為介電體層的電子元件。 為了達成上述目的,本發明之第1觀點係提供一種介 電體陶m合物,其包括:介電體m組合物。此介 電體陶究器組合物包括:Ba為“其中,m係〇 99_ 1.01) ; BanZr〇2+n(其中,n 係 〇.99“各1〇1);心之氧化 物;R之氧化物(其中,R係選自Sc、Y、u、Ce、pr、Nd、200846300, IX. Description of the Invention: [Technical Field] The present invention relates to a dielectric ceramic composition having resistance to reduction and an electronic component having the dielectric ceramic composition in a dielectric layer In particular, it relates to a dielectric ceramic composition and an electronic component suitable for use in high voltage applications with a high rated voltage (for example, l〇〇v or more). [Prior Art] As an example of an electron 7L piece, a laminated ceramic capacitor is, for example, an internal electrode printed on a predetermined pattern of a ceramic sheet formed by a predetermined dielectric composition of m, and a plurality of which overlap each other, and then - The raw embryonic wafer is simultaneously fired and skinned. Helmets ^ ^ In order to be integrated with ceramic dielectrics by firing, the internal electrode layers of the terracotta terracotta terracotta must be chosen to not react with the ceramic dielectric. In terms of the material constituting the internal electrode layer, a high-priced noble metal such as platinum or palladium is used in the prior art in the prior art. In recent years, it has been possible to use a low-cost metal-based dielectric ceramic composition such as nickel or copper to continuously develop n9, which can greatly reduce the cost. In addition, in recent years, as the density of electronic circuits has increased, the demand for miniaturization of :::7 has been increasing. Therefore, the miniaturization and large-capacity of laminated ceramic cells have been reduced. What comes up is that the dielectric layer of the laminated ceramics is not a thin layer. Therefore, the industry is looking for a layer that can maintain a layer even if it is thinned.益之# The dielectric ceramic ware composition.尤J: Yes, ^, 疋 咼疋 咼疋 咼疋 咼疋 咼疋 ( ( ( ( ( ( ( ( ( ( ( 之中 之中 之中 之中 之中 之中 之中 之中 之中 之中 之中 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大 大F〇rever769 200846300, dielectric insulator ceramic composition of the dielectric layer is required to have very high reliability. In contrast, for example, Japanese Patent No. 3567759 discloses a dielectric ceramic composition for a capacitor used under high frequency and high voltage alternating current, wherein the dielectric ceramic composition contains a sintering aid. a principal component expressed by a composition formula: AB〇3+aR+bM (in which an AB〇3 barium titanate solid solution, an oxide such as a metal element such as β-Le, or an oxide of a metal element) In this case, the sintered auxiliary material is an auxiliary component and contains at least one of a ruthenium element and a Si element. Further, as disclosed in the above-mentioned Japanese Patent No. 3567759, XZrCh is added in a range of 0.35 m or less with respect to a barium titanate solid solution represented by ABCh in a main component (wherein the lanthanoid system) A metal element selected from the group consisting of hydride, and at least one of Ca is used as an additive component in the main component. However, in the Japanese Patent Publication No. 3567759, the withstand voltage (destruction voltage) is low and the life characteristics (acceleration life of the insulation resistance) are insufficient, so that there is a problem that the reliability is deteriorated. In particular, this problem is remarkable when the multilayer ceramic capacitor is reduced in size and capacity. Therefore, in order to achieve miniaturization and large capacity, pressure resistance and life characteristics (acceleration life of insulation resistance) are sought. ) the improvement. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an electrostrictive amount that can be fired in a reducing environment, has a low electrostrictive amount when applied, and maintains a specific dielectric ratio and capacity. 2030-9390-PF;Forever7 69 200846300 Dielectric body ceramic composition with temperature characteristics and improved durability of the house (destruction voltage) and insulation resistance' and the dielectric ceramic composition with this dielectric It serves as an electronic component of the dielectric layer. In order to achieve the above object, a first aspect of the present invention provides a dielectric ceramic composition comprising: a dielectric m composition. The dielectric body composition includes: Ba is "where m system 〇 99_ 1.01"; BanZr 〇 2+n (where n system 〇.99 "1 〇 1 each); heart oxide; R An oxide (wherein R is selected from the group consisting of Sc, Y, u, Ce, pr, Nd,
Pm、Sm、Eu、Gd、Tb、Dy、H〇、Er、Tm、Yt^ Lu 所組成 之群組中至少^);選自^々,及“所組成之群組 中至少1種元素的氧化物;.以及選自Si、u、Ai、GeH 所組成之群組中至少1種元素的氧化物。其中,相對於· 莫耳前述—a而言,以各成分之氧化物或是複合氧化 物換算的比率如下,Ba氣:35,莫耳;心氧化物: 4〜12莫耳;R之氧化物:4〜15莫耳;如、c〇及卜之 氧化物:〇.5 〜3 莫耳;Si、Li、A1、GQB_n9 莫耳。 r 在本發明中,相對於100莫耳前述BamTi〇〜之前述At least ^) of the group consisting of Pm, Sm, Eu, Gd, Tb, Dy, H〇, Er, Tm, Yt^ Lu; selected from ^々, and "at least one element of the group formed" An oxide of at least one element selected from the group consisting of Si, u, Ai, and GeH, wherein the oxide or compound of each component is relative to the above-mentioned The ratio of oxide conversion is as follows, Ba gas: 35, Mohr; heart oxide: 4 to 12 m; R oxide: 4 to 15 m; for example, c〇 and b. oxide: 〇.5 〜 3 Mohr; Si, Li, A1, GQB_n9 Mohr. r In the present invention, the aforementioned BamTi〇~ with respect to 100 mol
BanZr〇2+n的比率係40〜55莫耳。 本發明之第2觀點的介電體陶瓷器紐合物係一種具有 以(BaaRb)e(TicZrdMge)〇3之一般式表示之第i成分的=電 體陶究器組合物’纟中’上述一般式之,為鹼土族元素, 且在上述一般式中, 〇· 8$ as 〇· 96 ; 2030-9390-PF;Forever769 200846300 , 〇. 〇4^ 〇. 2 ; 〇. 55^ 〇. 7 ; 〇. 24$ 〇. 39 ; 〇· 02$ 〇· 〇9 ;及 1 ^ a ^ 1. 15 ; "中4目對於iG〇莫耳前述第i成分所含之B^Ti(h+m(其 中,而言,介電體陶瓷器組合物更具= φ 〇·5〜3·0莫耳選自Mn、Cr、C〇及Fe所組成之群組中至少i 種元素的氧化物、以及3〜9莫耳選自Si、Li、Al、Ge及B 所組成之群組中至少1種元素的氧化物。 根據本發明的話,可以提供具有介電體層與内部電極 層之電子元件,而此電子元件係由前述介電體層所構成, 其中,前述介電體層係上述第!觀點或是第2觀點之介電 體陶竟Is組合物。 以本發明之電子元件而言,並不特別限定,例如可以 #是積層陶究電容器、壓電元件、晶片誘導器、晶片變阻器、 晶片熱阻體、晶片電阻、其它表面實裝(smd)晶片型電子元 件。 由於本發明之介電體陶竟器組合物具有上述特定組成 之故,因此,可以在還原性環境中燒成’且於電壓施加時 電致伸縮(616。1;1*031:1^(:1;1¥6)量低,另抓—M . 7里另外,可以良好地保 持比介電體率及容量溫度特性,且可 1 4 Μ徒升耐壓(破壞電壓) 及絕緣電阻之加速壽命。尤1 | 户 凡八疋,在本發明中,藉由將The ratio of BanZr 〇 2+n is 40 to 55 m. The dielectric ceramic core of the second aspect of the present invention is an electroceramic composition having the ith component represented by the general formula of (BaaRb)e(TicZrdMge)〇3. The general formula is an alkaline earth element, and in the above general formula, 〇·8$ as 〇·96; 2030-9390-PF; Forever769 200846300, 〇. 〇4^ 〇. 2 ; 〇. 55^ 〇. 7 ; 〇. 24$ 〇. 39 ; 〇· 02$ 〇· 〇9 ; and 1 ^ a ^ 1. 15 ; "中目4 B^Ti(h+) for the i-th component of iG〇莫耳m (wherein, the dielectric ceramic composition is more = φ 〇 · 5 〜 3 · 0 摩尔 is selected from the group consisting of Mn, Cr, C 〇 and Fe in at least one of the elements of the oxide And an oxide of at least one element selected from the group consisting of Si, Li, Al, Ge, and B. According to the present invention, an electronic component having a dielectric layer and an internal electrode layer can be provided. The electronic component is composed of the dielectric layer, wherein the dielectric layer is the dielectric composition of the above-mentioned first aspect or the second aspect. In terms of the electronic component of the present invention It is not particularly limited, and for example, it may be a laminated ceramic capacitor, a piezoelectric element, a wafer inducer, a wafer varistor, a wafer thermal resistor, a wafer resistor, and other surface-mounted (smd) wafer type electronic components. The electric ceramic composition has the above specific composition, and therefore can be fired in a reducing environment and electrostrictively applied at the time of voltage application (616. 1; 1*031:1^(:1; 1¥) 6) The amount is low, and the other is -M. 7 in addition, it can maintain the specific dielectric rate and capacity temperature characteristics well, and can withstand the voltage (destruction voltage) and the accelerated life of the insulation resistance of 1 4 。. | 凡凡八疋, in the present invention, by
BanZr〇2+n相對於⑽料BafflTi〇2+„之比率控制在35,莫 2030-9390-PF;Forever769 9 200846300 耳或是40〜55莫耳左士* _ ^ / 、 w 1提供容量溫度特性及耐壓辦 加之介電體陶瓷器組合物。 曰 因此,藉由在積層陶莞電容器等電子元件之介電體声 内使甩上述本發明之介電體 曰 "电體陶£态組合物,例如, 介電體層薄化至20//1B力士并田从—〜The ratio of BanZr〇2+n to (10) material BafflTi〇2+„ is controlled at 35, Mo 2030-9390-PF; Forever769 9 200846300 ear or 40~55 Moerzo* _ ^ / , w 1 provides capacity temperature The dielectric ceramic composition of the present invention is characterized by the characteristics and the withstand voltage. Therefore, the dielectric body of the present invention is made by the dielectric body of the electronic component such as a multilayer ceramic capacitor. The composition, for example, the dielectric layer is thinned to 20//1B.
、 左右並用於定額電壓高(例如,100V =上丄尤其是25GV以上)之中高星用途的情況下,也可以 貫現高信賴性。也就是說,因應小型化、大容量化,而也 可以提供具有高信賴性之中高壓用途的電子元件。 上述本發明之電子元件例如可以適用於各種自動車相 關用途(燃料喷射裝置、HID燈等)或數位相機用途等。 以下,根據圖面所示之實施例說明本發明。 ί實施方式】 (第1實施例) 積層陶瓷電容器1High-reliability can also be achieved in the case of high-altitude applications with high rated voltage (for example, 100V = upper 丄, especially above 25GV). In other words, it is also possible to provide an electronic component having high reliability and high-voltage use in response to miniaturization and large capacity. The electronic component of the present invention described above can be applied to various automatic vehicle related applications (fuel injection devices, HID lamps, etc.) or digital camera applications, for example. Hereinafter, the present invention will be described based on the embodiments shown in the drawings.实施 Embodiments (First Embodiment) Multilayer Ceramic Capacitor 1
如第1圖所示,本發明之一實施例之積層陶究電容号 1係具有由介電體層2與内部電極層3交互疊積而構成二 元件本體1〇。在此電容器元件本體1〇之兩端部形成分別 與在元件本體10之内部交互配置之内部電極層3導通的一 對外部電極4。電容器元件本體1〇之形狀並不特別限定, 通常’可以作成長方體狀。另外’其尺寸亦不特別限定, 可以因應用途而作成適當尺寸。 内部電極層3係藉著各端面在電容器元件本體〗〇之相 對2端部之表面交互露出的方式而疊積。另外,一對外部 2030-9390-PF;Forever769 10 200846300 電極4係形成在電各器元件本體1 〇之兩端部,並與交互配 置之内部電極層3之露出端面連接,而構成電容器迴路。 介電體層2 介電體層2係含有本發明之介電體陶瓷器組合物。 本發明之介電體陶瓷器組合物包括:As shown in Fig. 1, a laminated ceramic capacitor 1 according to an embodiment of the present invention has a dielectric layer 2 and an internal electrode layer 3 interposed to form a two-element body 1 . A pair of external electrodes 4 respectively electrically connected to the internal electrode layers 3 disposed alternately inside the element body 10 are formed at both end portions of the capacitor element body 1''. The shape of the capacitor element body 1A is not particularly limited, and it is usually 'in a rectangular shape. Further, the size thereof is not particularly limited, and it can be appropriately sized according to the use. The internal electrode layer 3 is laminated by exposing the respective end faces to the surfaces of the opposite end portions of the capacitor element body. Further, a pair of outer 2030-9390-PF; Forever 769 10 200846300 electrodes 4 are formed at both ends of the electric device element body 1 and are connected to the exposed end faces of the interposed internal electrode layers 3 to constitute a capacitor circuit. Dielectric Layer 2 The dielectric layer 2 contains the dielectric ceramic composition of the present invention. The dielectric ceramic composition of the present invention comprises:
BamTl〇2+ffi(其中,m 係 0· 99g mg 1· 〇1);BamTl〇2+ffi (where m is 0·99g mg 1·〇1);
BanZr〇2+n(其中,η係 0·99$η$1·〇ι);BanZr〇2+n (where η is 0·99$η$1·〇ι);
Mg之氧化物; R之氧化物(其中,R係選自Sc、Y、La、Ce、Pr、Nd、An oxide of Mg; an oxide of R (wherein R is selected from the group consisting of Sc, Y, La, Ce, Pr, Nd,
Pm、Sm、Eu、Gd、Th、ϊ)ν、Η。、 i d Dy Ho、Er、Tm、Yb 及 Lu 所組成 之群組中至少1種); 選自Μη、Cr、Co及Fe所組成之群組中至少i種元素 的氧化物;以及 k自Si Li、Al、Ge及B所組成之群組中至少1種元 素的氧化物。 在Ba»Ti〇2+ffl中,„!之範圍為〇.99smg1〇i。此時,氧 (〇)含量也可以偏離上式之化學計量若干—係主要 作為母材而含於介電體陶瓷器組合物中。Pm, Sm, Eu, Gd, Th, ϊ) ν, Η. , at least one of the group consisting of id Dy Ho, Er, Tm, Yb, and Lu); an oxide of at least one element selected from the group consisting of Μη, Cr, Co, and Fe; and k from Si An oxide of at least one element of the group consisting of Li, Al, Ge, and B. In Ba»Ti〇2+ffl, the range of „! is 〇.99smg1〇i. At this time, the oxygen (〇) content can also deviate from the stoichiometry of the above formula—mainly as a base material and contained in the dielectric body. In a ceramic composition.
BanZr〇2+ni含有量相對於1〇〇莫耳Baji〇2+n而言,可 以是3545莫耳、40〜55莫耳、或是4〇~5〇莫耳。另外, 在BanZr〇2+n中,n係0.99$η$1〇1。此時,氧(〇)含量也 可以偏離上式之化學計量若干。藉由在上述範圍内添加 Ba„Zr〇2+n ’可以提升容量溫度特性及耐壓。一纟池“ 之添加量過少的話,不但容量溫度特性及耐壓降低,且壽 2030-9390-PF;Forever769 11 200846300 命特性也會有惡化的傾向。 另一方面,一旦過多的爷,目 比介電率有降低的傾向。 ϋ 則 以二換之氧化物之含有量相對於1 〇〇莫耳—-而言’ =鼻之的話,是恤 莫耳。Mg之氧化物具有抑 之強介電性的效果。 一旦Mg之氧化物之含有 果 L ^ ^ k /的話,不但容量溫度特性或 耐壓降低,且電壓施加時 ^ ^ 電致伸縮量有變大的傾向。另 一方面,一旦過多的話 刀 不但比介電率降低,且壽命特性 及耐壓有惡化的傾向。 ^ f R之氧化物之含有量相對於 以㈣換算的話,可以是4]=撼…, 苴且η ^ . 冥耳、6〜12莫耳、或是7〜11 莫耳。R之氧化物主要具有 果。—R ^ “、f aBTiG2+m之強介電性的效 一 R之乳化物之含有晋 w m ^ -h r± 。夕的話,則會有耐壓降低、 … 伸縮里變大的傾向。另-方面,一旦過 氧化物的以素而言,係選自由\而;,:構成…之 之群組中至少以、几及Lu所組成 〆1種其中,以Gd較佳。The BanZr 〇 2+ni content may be 3545 m, 40 to 55 m, or 4 〇 to 5 〇 mu relative to 1 mol Baji 〇 2+n. In addition, in BanZr〇2+n, n is 0.99$η$1〇1. At this time, the oxygen (〇) content may also deviate from the stoichiometric amount of the above formula. By adding Ba„Zr〇2+n′ in the above range, the capacity temperature characteristics and withstand voltage can be improved. If the amount of addition of the battery is too small, not only the capacity temperature characteristics and the withstand voltage are lowered, but also the life 2030-9390-PF ; Forever769 11 200846300 The life characteristics will also have a tendency to deteriorate. On the other hand, once there is too much loyalty, the dielectric ratio tends to decrease. ϋ If the content of the oxide replaced by two is relative to 1 〇〇 Mo---= nose, it is a moth. The oxide of Mg has an effect of suppressing strong dielectric properties. When the oxide content of Mg is L ^ ^ k /, the capacity temperature characteristics or withstand voltage are lowered, and the amount of electrostriction tends to increase as the voltage is applied. On the other hand, if there are too many knives, the dielectric ratio is lowered, and the life characteristics and withstand voltage tend to deteriorate. The content of the oxide of ^ f R relative to (4) can be 4] = 撼..., η and η ^ . 耳, 6 to 12 moles, or 7 to 11 moles. The oxide of R has a major effect. -R ^ ", the strong dielectric property of f aBTiG2+m, the inclusion of the emulsion of the R, is wm ^ -hr±. On the eve, there is a tendency for the withstand voltage to decrease and the expansion and contraction to become larger. On the other hand, once the peroxide is selected from the group consisting of at least a few and a group of Lu, it is preferably Gd.
Mn、Cr、Co及?6之氧化物Mn, Cr, Co and? 6 oxide
Ba ΤίΠ ^ - 3有里相對於100莫耳 仙mu〇2+ln 而言,以 Mn0、Cr2〇3 吁 Τ α ^ π r q ^ ^ 3〇4或是FhOs換算的話, 一曰μ、+… 異耳、或是1·〇〜2.0莫耳。 傾向。s古; ,旳話,哥命特性會有惡化的 頂向。另一方面,一旦過多的話, 容I、、w _ # # u A + 除了比介電率降低之外, 谷里,皿度特性也會有惡化的傾向 12 2030-9390-.pF;F〇rever769 200846300Ba ΤίΠ ^ - 3 has a relative 100 莫 〇 Τ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Different ears, or 1·〇~2.0 moules. tendency. s ancient;, swear words, the characteristics of the life will have a deteriorating top. On the other hand, once too much, the capacity I, w _ # # u A + In addition to the lower dielectric ratio, the grain characteristics will also deteriorate in the valley 12 2030-9390-.pF; F〇 Rever769 200846300
Si Li A卜Ge及B之氧化物的含有量相對於刚莫 耳 Ba„Ti〇…而言’以 Si〇2、Li2〇3、Al2〇3、⑽或是 _ 換算的話,可以是3〜9莫耳、4〜8莫耳、或是“莫耳。 -旦上述氧化物之含有量過少的話’則除了比介電率降低 之外壽命特性也會有惡化的傾向。另—方面,一旦過多 的話,容量溫度特性會有惡化的傾向。而且,在上述各氧 化物中,以使用Si之氧化物者較佳,因為其具有特性之改 善效果大的優點。 在本實施例中,藉由含有上述預定量之上述各成分, 可以在還原性環境中燒成介電體陶兗器組合物,降低電髮 施加時之電致伸縮量,並改善容量溫度特性、比介電率、 ::及絕緣電阻之加速壽命。尤其是,因為含有作為母封 Ba»Tl〇m緣故’而可以有效緩和對於施加電遷之容旦 依存性、或是電壓施加時之電致伸縮現象。而1 : :例中’由於Ba氣之含有量較多的緣故,因此,可二 (好地保持上述各特性’並提升容量溫度特性及耐壓。 而且’在本說明書中,雖然以化學計 =氧化物,但是,各氧化物:: 中,各成態亦可由化學計量以外之方式表示。其 成刀之上述比率係由構成各成分之氧化物或是複合 乳化物所含有之金屬量換算並求出上 或是複合氧化物。 …里之氧化物 介電體層2之厚度並不特別限定 陶 曼電容器丨之用途而適宜決定。 乂口應積層陶 13 030 9390-pp.Forever769 200846300 内部電極層3 雖然内部電極層3所含右+ 之V電材並不特別限曰 是,由於介電體層£之構虚铋 疋仁 μ ^ ^ 成材料具有耐還原性的緣故,因 此,可以使用比較便宜的皁冬 金屬。以作為導電材使用之卑 金屬而s,可以是Ni或是Ni合金。以Ni合金而言,可以 是從心士七及⑴斤組成之群組中選…種以上之 凡素與Νι的合金,而合金中 土于之I含有量在95重量%以 者較佳。而且,在Ni戋熹μ·人 * Ah合金中,也可以含有〇 左右以下之細等各微量成分。另外,内部電極層3 也可以使用市販之電極用膠而形成。㈣電極層3 也可以因應用途等而適宜地決定。 又 外部電極4 雖然外部電極4所合古+措^ , t 所3有之導電材並不特別限定,但 是,在本發明中亦可使用便宜的L或上述元素之: 金。外部電極4之厚度亦可因應用途等而適宜地決定。 積層陶瓷電容器1之製造方法 本實施例之積層陶究電容器i係與習知之積層陶 容器同樣地藉由使韓之印刷法或薄板(s h e e t)法而製 作’並在將其燒成之後,藉由印刷或轉寫外部電極且燒成 的方式而製造。以下’具體說明製造方法。 〜 頁先,準備誘電體層用膠(paste)内含之介電體原料 c介電體組合物粉末),並使其塗料化,而調製Μ 體層用膠。介電體層用膠可以是將介電體原料與有機展色 劑(vehicle)混練而成之有機系之塗料、也可以是水系之塗 2030-9390-PF;F〇rever769 14 200846300 - 料。 蚵聆介%體原料而言,雖可以使用上述各成份之氧化 物或或其混合物、複合氧化物,但是也可以從其它藉由= 成而形成上述氧化物或複合氧化物的各種化合4勿中適宜: 選擇並混合而使用,其中上述化合物例如是碳酸鹽、草駿 (Oxalic acid)鹽、硝酸鹽、氫氧化物(Hydr〇xide)、有= 金屬化合物等。介電體原料中之各化合物之含有量係可以 根據在燒成後所欲之上述介電體陶瓷器組合物之組成而決 定。在塗料化之前的狀態下,介電體原料之粒徑通常是 〇 · 1〜1 # m左右。 另外,上述各成份之原料中,關於BamTi〇h以外之原 料中至少—部份,係可以直接使用各氧化物或是複合氧化 物、或是藉由燒成而變成各氧化物或是複合氧化物的化合 物,或者,亦可以使用經過預先假燒之焙燒粉。另外,關 於BanZr〇2+n以外之原料之一部份,亦可以與mi —起 假k但疋,一旦將BajiOh與BaAO…假燒的話,則由 於難以得到本發明之效果的緣故,因此以上述之組合進行 假燒者較佳。 而且’就BaffiTiG2+m之原料而言,以使用平均粒子捏介 =〇·2〜之間者較佳。另外,至於以肫^印〜為始之其 匕成刀的原料,係以使用平均粒子徑介於〇· 2〜i #册之間者 車乂仫而且,在將上述原料假燒而作成焙燒粉之情況下, 其平均粒子徑亦可以控制在上述範圍内。 有機液体指的是將接著劑溶解於有機溶劑中的混合 2030—9390-PF;F〇rever769 15 200846300 物。使用於有機液体中的接著劑並不特別限定,亦 烯纖維素、聚乙料縮了料料之各種接著财適^地 選擇。另外,使用之有機溶劑也不特別限^,係可以因應 印刷法 ' 或薄板法等利用之方&,而從松脂醇 (⑽咖⑷、T基卡必醇(butylearbitQi)、㈣、甲苯 等各種有機溶劑中適宜地選擇。 另外,在使用水系塗料作為介電體層用膠的時候,也The content of the oxide of Si Li Ab Ge and B may be 3~ in terms of Si 〇 2, Li 2 〇 3, Al 2 〇 3, (10) or _ in terms of 莫 耳 Ba 〇 Ti 〇 9 moles, 4 to 8 moles, or "mole. When the content of the above oxide is too small, the life characteristics tend to deteriorate in addition to the decrease in the dielectric constant. On the other hand, if there are too many, the capacity temperature characteristics tend to deteriorate. Further, among the above-mentioned oxides, it is preferable to use an oxide of Si because of the advantage that the improvement effect of characteristics is large. In the present embodiment, by containing the above-mentioned predetermined amounts of the above respective components, the dielectric ceramic device composition can be fired in a reducing atmosphere, the amount of electrostriction at the time of applying the electric hair can be reduced, and the capacity temperature characteristics can be improved. , specific dielectric ratio, :: and the accelerated life of the insulation resistance. In particular, it is possible to effectively alleviate the dependence on the application of electromigration or the electrostriction when voltage is applied because it contains the parent seal Ba»Tl〇m. In the case of 1: : "Because of the high content of Ba gas, it is possible to maintain the above characteristics and improve the capacity temperature characteristics and withstand voltage. Moreover, in this specification, although in terms of chemistry = oxide, however, in each oxide::, each state can also be expressed by a stoichiometry. The ratio of the knives is determined by the amount of metal contained in the oxide or composite emulsion constituting each component. The thickness of the oxide dielectric layer 2 in the upper or composite oxide is not particularly limited as long as the use of the Taman capacitor is suitable. The mouth should be laminated 13 030 9390-pp. Forever769 200846300 Internal electrode Layer 3 Although the internal electrode layer 3 contains the right + V material is not particularly limited, since the dielectric layer of the structure of the virtual layer is resistant to reduction, it can be used relatively cheaply. Soapy winter metal. It can be Ni or Ni alloy as the base metal used as the conductive material. For Ni alloy, it can be selected from the group consisting of Xinshiqi and (1) kg. Prime and Νι In the case of the alloy, the content of I in the alloy is preferably 95% by weight. Further, in the Ni戋熹μ·human* Ah alloy, various fine components such as fine or smaller yttrium may be contained. The electrode layer 3 may be formed using a commercially available electrode paste. (4) The electrode layer 3 may be appropriately determined depending on the application, etc. Further, the external electrode 4 is made of an external electrode 4; In the present invention, it is also possible to use inexpensive L or the above-mentioned element: gold. The thickness of the external electrode 4 can be appropriately determined depending on the application, etc. Method of manufacturing the laminated ceramic capacitor 1 The laminated ceramic capacitor i is produced by the Korean printing method or sheet method in the same manner as the conventional laminated ceramic container, and after being fired, by printing or transcribing the external electrode and firing it. In the following, the manufacturing method is specifically described. The first step is to prepare a dielectric material c dielectric composition powder contained in a paste for the electric conductor layer, and to coat it, and to prepare the ruthenium layer. gum. The dielectric layer adhesive may be an organic coating which is obtained by kneading a dielectric material and an organic vehicle, or may be a water-based coating 2030-9390-PF; F〇rever769 14 200846300-. In the case of the % raw material, it is possible to use the oxides of the above components or a mixture thereof or a composite oxide, but it is also possible to form various compounds of the above oxides or composite oxides by other formations. Suitable: It is selected and mixed, and the above compound is, for example, a carbonate, an Oxalic acid salt, a nitrate, a hydroxide (Hydrazine), a metal compound, or the like. The content of each compound in the dielectric material can be determined depending on the composition of the above-mentioned dielectric ceramic composition after firing. In the state before coating, the particle size of the dielectric material is usually about 〜 1 to 1 # m. Further, among the raw materials of the above components, at least a part of the raw materials other than BamTi〇h may be directly used as each oxide or composite oxide, or may be converted into respective oxides by firing or composite oxidation. The compound of the substance, or a calcined powder which has been previously calcined may also be used. In addition, as for the part of the raw material other than BanZr〇2+n, it is also possible to take a false k from the mi, but once BajiOh and BaAO are burned, it is difficult to obtain the effect of the present invention, so It is preferred that the combination of the above is performed on a fake burner. Further, in terms of the raw material of BaffiTiG2+m, it is preferable to use the average particle pinch-wise = 〇·2~. In addition, as for the raw materials of the knives which are used for the knives, the granules with the average particle diameter between 〇·2~i# are used, and the raw materials are sintered and calcined. In the case of powder, the average particle diameter can also be controlled within the above range. The organic liquid refers to a mixture of 2030-9390-PF; F〇rever769 15 200846300 which dissolves the adhesive in an organic solvent. The adhesive used in the organic liquid is not particularly limited, and various types of olefin cellulose and polyethylene-based material are selected. In addition, the organic solvent to be used is not particularly limited, and may be used in response to a printing method or a thin plate method, etc., from rosin ((10) coffee (4), T-carbamate (butyl), (tetra), toluene, etc. It is suitably selected among various organic solvents. In addition, when a water-based paint is used as a gel for a dielectric layer,
可將水溶性之接著劑或分散劑溶解於水之水系液体、、盘絕 緣體原料混練1於水系液体之水溶性接㈣並不特別限 疋例如也可使用聚乙烯醇、纖維素、水溶性壓克力樹脂。 内部電極層用膠係將由上述各種導電性金屬或合金所 組成之導電材、或是於燒成後形成上料電材料種氧化 物、有機金屬化合物、樹脂酸鹽(Resirmte)等、與上述有 機液体混練而調製。 外4電極用膠也可以如同上述内部電極層用膠一樣地 ❿ 調製。 一述各膠中之有機液体之含有量並不特別限制,通常 之含有量例如可以是接著劑介於卜5重量%左右、溶劑介於 10〜50重篁%左右。另外,在各膠中,因應需要,也可含有 k自各種刀政劑、可塑劑、介電體、絕緣體等的添加物。 上述之總含有量係以10重量%以下較好。 使用印刷法時’將介電體層用膠及内部電極層用膠疊 積印刷於PET等之基板上,並切成預定形狀後,由基板剝 離而作成。 2030-9390-PF;F〇rever769 16 200846300 另外’使用薄板法的時候,使用介電體層用膠並形成 綠色薄板,接著在其上印刷内部電極層用#,之後將其疊 積而作成綠色晶片。 在燒成前’對生胚晶片實施脫接著劑處理。就脫接著 劑之條件而言,昇溫速度以介於時之間較佳; 保持溫度以介A 之間較佳;溫度保持時間以介 於0·5〜24小時之間較佳。另外’燒成環境可以是空氣或還 原性環境。 晶片燒成時之環境雖然可因應内部電極層用膠中之導 電材之種類而適宜地決定,但是,使用Ni或Ni合金等賤 金屬作為導電材的時候,燒成環境中之氧氣分壓以介於1〇 〜10 1DMPa之間較佳。一旦氧氣分壓未達前述範圍時,内 部電極層之導電材會產生異常燒結,而中途燒斷。另外, 一旦氧氣分壓超過前述範圍時,内部電極層有氧化之傾向。 另外,燒成時之保持溫度係以介於1 〇 〇 〇〜1 4 〇 〇 °c之間 較佳、介於110(M36(TC之間更佳。一旦保持溫度未達前 述範圍時,則緻密化變得不夠充分;一旦超過前述範圍時, 容易發生因内部電極層之異常燒結所引起之電極中途燒 斷、或因内部電極層構成材料之擴散所引起之容量溫度特 性之惡化,而使得介電體陶瓷器組合物易於產生還原的現 象。 以其它的燒成條件而言,昇溫速度介於5〇〜5〇(rc/小 時之間較佳、介於200〜30(TC/小時之間更佳;溫度保持時 間w於0 · 5〜8小時之間較佳、介於1〜3小時之間較佳。冷 2030-9390^PF;FOrever769 17 200846300 卻速度以介於50〜5{)Qt: 小時之間更佳。另外,… 介於2〇o〜3〇(rc/ # ^, 粍成%境以逛原性環境較佳,其中, 以遇原性裱境中環境 ^ …、… 列是將N2及耵之混合 軋體加濕而使用者較佳。 在避原性環境中換 ,.,^ ^ A 70成之情形下,較佳者係對電容器元 件本體貫轭退火處理。 火處理係為了使介電體層再氧化 之處理,因為藉由退火處 .TD ^ . N T u者地延長高溫加速壽命 (IR寄甲),所以信賴性得以提升。 ▲退火處理環境中之氧氣分壓以介^ nmPa之間 者較么。-旦氧氣分麗未達前述範 化會有,-旦超過前述_,内部電= :::: 的傾向。The water-soluble liquid or the dispersing agent can be dissolved in the water-based liquid, and the disk insulator raw material is kneaded. The water-soluble liquid in the aqueous liquid is not particularly limited. For example, polyvinyl alcohol, cellulose, water-soluble pressure can also be used. Cree resin. The internal electrode layer is made of a conductive material composed of the above various conductive metals or alloys, or an oxide of an electrical material, an organometallic compound, a resinate, or the like after firing. The liquid is mixed and modulated. The outer 4-electrode adhesive can also be prepared in the same manner as the above-mentioned internal electrode layer. The content of the organic liquid in each of the gels is not particularly limited, and the usual content may be, for example, about 5 wt% of the adhesive and about 10 to 50 wt% of the solvent. Further, in each of the glues, an additive such as k from various knife chemicals, a plasticizer, a dielectric body, or an insulator may be contained as needed. The above total content is preferably 10% by weight or less. When the printing method is used, the dielectric layer adhesive and the internal electrode layer are laminated on a substrate such as PET, and cut into a predetermined shape, and then peeled off from the substrate to be formed. 2030-9390-PF; F〇rever769 16 200846300 In addition, when using the thin plate method, a dielectric thin layer is used to form a green thin plate, and then an internal electrode layer is printed thereon with #, and then laminated to form a green wafer. . The greening wafer was subjected to a release agent treatment before firing. In terms of the conditions of the release agent, the temperature increase rate is preferably between time; the temperature is preferably maintained between A and A; and the temperature retention time is preferably between 0.5 and 24 hours. In addition, the firing environment can be air or a reducing environment. The environment in which the wafer is fired can be appropriately determined depending on the type of the conductive material in the internal electrode layer, but when a base metal such as Ni or a Ni alloy is used as the conductive material, the partial pressure of oxygen in the firing environment is It is preferably between 1 〇 and 10 1 DMPa. When the oxygen partial pressure is less than the above range, the conductive material of the inner electrode layer is abnormally sintered, and is blown in the middle. Further, when the oxygen partial pressure exceeds the above range, the internal electrode layer tends to oxidize. Further, the temperature at the time of firing is preferably between 1 〇〇〇 and 14 〇〇 ° C, and is preferably between 110 (M36 (TC). Once the temperature is maintained below the above range, Densification becomes insufficient; when it exceeds the above range, it is easy to cause deterioration of the capacity temperature characteristics caused by abnormal sintering of the internal electrode layer, or deterioration of capacity temperature characteristics due to diffusion of the internal electrode layer constituent material. The dielectric ceramic composition is prone to reduction. In other firing conditions, the heating rate is between 5 〇 and 5 〇 (between rc/hour, preferably between 200 and 30 (TC/hour). More preferably; the temperature retention time w is preferably between 0 and 5 to 8 hours, preferably between 1 and 3 hours. Cold 2030-9390^PF; FOrever769 17 200846300 but the speed is between 50 and 5 { ) Qt: Better between hours. In addition, ... between 2〇o~3〇(rc/ #^, 粍成%境 to better the original environment, which, in the context of the original environment ... The column is to humidify the mixed rolled body of N2 and bismuth, and the user is better. In the evasive environment, ., ^ ^ A 70 In the case of the capacitor element body, the yoke is annealed. The fire treatment is to re-oxidize the dielectric layer, because the annealing temperature is extended by the TD ^ . NT u (IR sending) A), so the reliability can be improved. ▲The oxygen partial pressure in the annealing environment is better than that between the nm and the nano-Pa.--Oxygen is not up to the above-mentioned normalization, and the above-mentioned _, internal electricity = :::: Propensity.
層會與絕緣體半成品(素地)反應 惡化、IR降低、IR壽命降低的現象 僅由幵/皿過私及降溫過程構成。纟就是說,溫度保持時間 也可為零。此種情形下,保持溫度係與最高溫度同義。 以其它退火處理條件而言,溫度保持時間介於〇〜2〇小 退火處理時之保持溫度係 於5 0 0 C〜11 〇 〇之間者更佳 由於介電體層之氧化會不充分 速壽命容易縮短。另一方面, 時,不但内部電極層會氧化、 以1100°c以下者較佳、以介 。保持溫度未達前述範圍時, ’ IR會降低,另外,高溫加 一旦保持溫度超過前述範圍 容量會降低,而且内部電極 易於發生容量溫度特性 而且,退火處理也可 %之間較佳、介於2〜1 〇小時之間更佳;冷卻速度介於 50〜500°C /小時之間較佳、介於1〇〇〜3〇〇〇c人小時之間更佳。 2030-9390-PF;Porever769 18 200846300 另外’以退火處理之%境氣體而t ’較佳者係例如使用加 濕之n2氣體等。 在上述之脫接著劑處理、燒成及退火處理中,於加濕 N2氣體或混合氣體等之步驟時,例如可以使用滲透满濕流 平劑(wetter)等。此種情形下,水溫以介於5~75。€左右較 佳。另外,脫接著劑處理、燒成及退火處理可以連續進行; 也可以獨立進行。 如上所述,在所得之電容器元件本體上實施滾輪 (barrel)研磨或噴砂(sandblast)研磨,進行端面研磨,並 將外部電極用膠印刷或轉寫且燒成,而形成外部電極4。 接著’因應需要’可在外部電極4表面上藉由鑛金等方式 形成被覆層。 如此-來,所製造之本發明之積層陶曼電容器係可藉 由添附支援器(hander)等,實裝於印刷基板上等,而使用 於各種電子機器等。 (第2實施例) 、關於本發明之第2實施例之積層陶曼電容器及其製无 :法,介電體陶瓷器組合物之組成及其製造方法與第" 鉍例之介電體陶瓷器組合物之組成及其製造方法有以下月 不之相異處,其餘則相同,因此,省略重複部分之說明。 此第2實施例之介電體陶究器組合物 之-般式所表示的第q分、^自 物Γΐ、Cr、0〇及Fe所組成之群組中至少1種元素之氧化 物構成的第2成分、由選自由Si、Li、A1、Gem_ 3〇 9390~PF^F〇rever769 19 200846300 之群組中至少1種元素之氧化物構成的… 一般式中,R是盥第丨者 、 成分。在上i 疋一弟i Λ施例相同之鹼 在上述—般式中, 土知70素,例如Gd 〇.8^a^0·96、較佳為 0.83 客 93、 ^ 〇. 91 ; 〇· 0· 2、較隹為 〇. 〇8 _0.13; -b=°.15、更佳為 〇.55“$〇.7、較佳為 〇.62gd^、 ^ 〇. 68 ; 更佳為0. 8 6 0. 09 更佳為0. 64 〇. 31 ; 〇- 24$dS 0.39、較佳為 〇. 26ScU〇.36、更佳為 〇·27 〇.〇2$eSO.〇9、較隹兔 n 為 0· 04 平乂 1土為 0· 03$ 〇· 〇8、更 $β〇·07 ;及 更佳為1. 03 α $1.15、較佳為 1〇2$ α $112、 ^ α ^ 1· 1〇 〇The phenomenon that the layer reacts with the insulator semi-finished product (prime) is deteriorated, the IR is lowered, and the IR life is reduced. It consists only of the 过/ dish over-private and cooling process. That is to say, the temperature holding time can also be zero. In this case, the temperature is kept synonymous with the highest temperature. In other annealing treatment conditions, the temperature retention time is between 〇2 and 2, and the temperature is maintained at a temperature between 500 ° C and 11 〇〇, which is better because the oxidation of the dielectric layer may not be sufficient. Easy to shorten. On the other hand, not only the internal electrode layer is oxidized, but also preferably 1100 ° C or less. When the temperature is not within the above range, 'IR will decrease. In addition, the temperature will decrease as the temperature remains above the above range, and the internal electrode is prone to the capacity temperature characteristics. The annealing treatment can also be better between 2%. Between 1 and 1 hour is better; the cooling rate is preferably between 50 and 500 ° C / hour, preferably between 1 and 3 ° c. 2030-9390-PF; Porever 769 18 200846300 Further, it is preferable to use, for example, a humidified n2 gas or the like. In the above-mentioned decarburizing agent treatment, firing and annealing treatment, for the step of humidifying the N2 gas or the mixed gas, for example, a wetter or the like may be used. In this case, the water temperature is between 5 and 75. € is better. Further, the release agent treatment, the firing and the annealing treatment may be carried out continuously or separately. As described above, barrel polishing or sandblast polishing is performed on the obtained capacitor element body, end surface grinding is performed, and the external electrode is printed or transferred by a paste and fired to form the external electrode 4. Then, the coating layer can be formed on the surface of the external electrode 4 by means of gold or the like as needed. In this way, the laminated Taman capacitor of the present invention produced by the present invention can be used in various electronic devices or the like by being mounted on a printed circuit board or the like by means of a hand-held holder or the like. (Second Embodiment) A laminated Tauman capacitor according to a second embodiment of the present invention and a method for producing the same, a composition of the dielectric ceramic composition, a method for producing the same, and a dielectric of the first embodiment The composition of the ceramic composition and the manufacturing method thereof are different in the following months, and the rest are the same, and therefore, the description of the overlapping portions is omitted. The oxide composition of at least one of the group consisting of the qth point, the 自, Cr, Cr, 〇 and Fe represented by the general formula of the dielectric body composition of the second embodiment The second component is composed of an oxide selected from at least one element selected from the group consisting of Si, Li, A1, Gem_3〇9390~PF^F〇rever769 19 200846300. In the general formula, R is the first one. , ingredients. In the above-mentioned general formula, the same base is used in the above-mentioned formula, such as Gd 〇.8^a^0·96, preferably 0.83 客93, ^ 〇. 91; 〇 · 0·2, 隹 隹 〇 〇 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 55 0. 8 6 0. 09 more preferably 0. 64 〇. 31 ; 〇 - 24$dS 0.39, preferably 〇. 26ScU 〇.36, more preferably 〇·27 〇.〇2$eSO.〇9 It is 0. 04 乂 乂 1 soil is 0· 03$ 〇· 〇8, more $β〇·07; and more preferably 1. 03 α $1.15, preferably 1〇2$ α $112, ^ α ^ 1· 1〇〇
相對於100莫耳f 1成分所含之B^Ti〇2+ffi(其中, :· 99“$ i· 01)而言,此介電體陶瓷器組合物具有〇· $〜3· 〇 莫耳刖述第2成分(以氧化物換算)、3〜9莫耳前述第3成 分(以氧化物換算)。 在本實施例之介電體陶瓷器組合物中,於燒成後之狀 恶下,第1成分所含之“^⑺…係充分地固溶於鈣鈦礦 (perovslute structure lattice)型結晶構造内,其中, 其A部位(Site)置入鹼土族R,而其B部位則置入訏及 在上述之一般式中,一旦a過小的話,則比介電率有 203 〇-93 90-PF;Forever769 20 200846300 降低的傾向;—曰a讲I & θ,- a過大的話’則溫度特性、高溫加速壽 "、破壞電壓及電致伸縮量會有惡化的傾向。另外,—旦 b過大的話’則比介電率有降低的傾向;—…小的二 則/皿度特性、高溫加速壽命、破壞電壓及電致伸縮量會 惡化的傾向。 曰 述之般式中,一旦c過大的話 比 降低的傾向;一旦C過小的 1羊有 — 古幻,風度特性、高溫加速壽 命、破壞電壓及電致伸縮量會有惡化的傾向。另外,_旦 d過大的話’則比介電率有降低的傾向;一旦㈣小的話: 則溫度特性、高溫加速壽命、及電致伸縮量會有惡化的傾 向。 、 在上述之一般式中,一旦e過大的話,則溫度特性有 :二傾向卜旦e過小的話,則高溫加速壽命會有惡化 、、…而且,-旦α過小的話’則溫度特性有惡化的傾 向;一旦α過大的話’則信賴性會有惡化的傾向。 、 另外,在此實施例中,-旦第2成分之添加量過 話,則溫度特性、高溫加速壽命、破壞電壓及電致伸縮旦 2惡化的傾向;一旦過多的話’則比介電率會有降低: 傾向m第3成分之添加利用過少的話,則^ 加速哥命、破壞電壓及電致伸縮量會有惡化的傾向;一: 過多的話,則比介電率會有降低的傾向。 — 以製造本實施例之介電體陶瓷器組合物而言,可以扩 用與前述第i實施例之介電體陶:光器組合物之製造方法: 同的方法’例如’上述各成份之原料中,關於BamTi024 2030-9390-PF;Forever7 6 9 200846300 外之原料中至少-部份,係可以將各氧化物或是複 物、或是藉由燒成而變成各氧化物或是複合氧化物二匕人 物預先假燒而作為焙燒粉使用。 ° 本實施例之其它構成及作用效果係與第i實施例相 同0 雖热以本發明之實施例作為 ,α 疋,冬發The dielectric ceramic composition has 〇·$~3· 〇 Mo relative to B^Ti〇2+ffi (where: 99·$ i· 01) contained in the 100 mA f 1 component The second component (in terms of oxide) and the third component (in terms of oxide) of 3 to 9 moles are described in the ear. In the dielectric ceramic composition of the present embodiment, after firing, Next, the "^(7)... contained in the first component is sufficiently solid-dissolved in a perovslute structure lattice type crystal structure in which the A site (Site) is placed in the alkaline earth group R, and the B portion thereof is Inserted 訏 and in the above general formula, once a is too small, the specific dielectric ratio is 203 〇-93 90-PF; Forever 769 20 200846300 lowers the tendency; 曰a speaks I & θ, - a is too large 'The temperature characteristics, high temperature acceleration life', the breakdown voltage and the amount of electrostriction tend to deteriorate. Further, if b is too large, the dielectric constant tends to decrease; the small two-degree property, the high-temperature accelerated life, the breakdown voltage, and the amount of electrostriction tend to deteriorate. In the general formula, once C is too large, the tendency to decrease is small; once C is too small, 1 sheep has an ancient fantasy, and the characteristics of the wind, the acceleration of the high temperature, the breakdown voltage, and the amount of electrostriction tend to deteriorate. Further, if the thickness is too large, the dielectric constant tends to decrease. When (4) is small, the temperature characteristics, the high-temperature accelerated life, and the amount of electrostriction tend to deteriorate. In the above general formula, if e is too large, the temperature characteristics are: if the two tendencies are too small, the accelerated life of the high temperature will deteriorate, and... if the α is too small, the temperature characteristics deteriorate. The tendency is that if α is too large, the reliability tends to deteriorate. Further, in this embodiment, when the amount of the second component added is too large, the temperature characteristics, the high-temperature accelerated life, the breakdown voltage, and the electrostriction denier 2 tend to deteriorate; if too much, the specific dielectric ratio will be Reduction: When the amount of addition of the third component is too small, the acceleration of the life, the breakdown voltage, and the amount of electrostriction tend to deteriorate. One: If the amount is too large, the dielectric constant tends to decrease. - In the manufacture of the dielectric ceramic composition of the present embodiment, the method of manufacturing the dielectric ceramic: photoreceptor composition of the above-mentioned i-th embodiment can be extended: the same method 'for example, the above components In the raw materials, at least part of the raw materials of BamTi024 2030-9390-PF; Forever7 6 9 200846300, can be oxides or complexes, or can be converted into oxides or composite oxidation by firing. The second person is pre-sintered and used as a baking powder. ° Other configurations and effects of the present embodiment are the same as those of the i-th embodiment. Although the heat is used as an embodiment of the present invention, α 疋, winter hair
明並不限定於上述實施例,σ I 卜 1八要在不脫離本發明之精神的It is not limited to the above embodiment, and σ I 卜1 is to be without departing from the spirit of the present invention.
範圍内,當可進行種種變更。 ' 例如,在上述實施例中,雖然以積層肖究電容器作為 本發明之電子元件’但是,以本發明之電子元件而言,並 不限定於積層陶瓷電容器,只要是# 一女疋具有上述構成之介電體 層皆可。 以下,雖然·以更詳細之實施例說明本發明,但是,本 發明並不限定於該些實施例。 實施例1 首先,準備平均粒子徑為0.5㈣之Ba„Ti〇2+m、Within the scope, various changes are possible. For example, in the above-described embodiment, the laminated electronic capacitor is used as the electronic component of the present invention. However, the electronic component of the present invention is not limited to the laminated ceramic capacitor, and the present invention has the above-described configuration. The dielectric layer can be used. Hereinafter, the present invention will be described in more detail, but the present invention is not limited to the examples. Example 1 First, Ba„Ti〇2+m having an average particle diameter of 0.5 (d) was prepared.
BanZr〇2+n、MgC〇3、Gd2〇3、MnO 及 Si〇2’ 藉由粉碎機將上述 材料混合’在12〇(TC下對所得之混合粉進行假燒,而調製 平均粒子徑為0.6/zm之假燒粉。接著,以粉碎機對所得之 假燒粉進行15小時之濕式粉碎,然後乾燥而得到介電體材 料。而且,MgC〇3係於燒成之後含在介電體陶瓷器組合物中 而作為 Mg〇。另外,一旦 BanZr〇2+n、MgC〇3、他〇3、_ 及 Si〇2 固溶於 BaeTi〇2+n 内部、或是 MgC〇3、Gdz〇3、Mn〇 及 擴散於BaiJi〇2+B表面、或是MgC〇3粒子、Gd2〇3粒子、Mn〇 2030-9390-PF;Forever769 22 200846300 則不會受限於 體A 〇 粒子及si〇2粒子固著於BaaTi〇2+ffi表面的話, 其粉末之狀態。將此製法所得之粉體作成粉 合珉物之添加量如表 所示,分別調製添加量相異之介電體材料(試料碼1 1〜35)。在表1中,相對於1〇〇莫耳BamTi〇〜而言,各^广 之添加量係以複合氧化物或是各氧化物換算的添加量。另刀BanZr〇2+n, MgC〇3, Gd2〇3, MnO and Si〇2' were mixed by the pulverizer's at 12 〇 (the obtained mixed powder was sintered under TC, and the average particle diameter was adjusted. 0.6/zm of the smoldering powder. Then, the obtained sintered powder was wet-pulverized by a pulverizer for 15 hours, and then dried to obtain a dielectric material. Moreover, the MgC〇3 was contained in the dielectric after firing. In the bulk ceramic composition, it is used as Mg〇. In addition, once BanZr〇2+n, MgC〇3, other〇3, _ and Si〇2 are dissolved in BaeTi〇2+n, or MgC〇3, Gdz 〇3, Mn〇 and diffusion on the surface of BaiJi〇2+B, or MgC〇3 particles, Gd2〇3 particles, Mn〇2030-9390-PF; Forever769 22 200846300 is not limited to bulk A 〇 particles and si When the 〇2 particles are fixed on the surface of BaaTi〇2+ffi, the state of the powder. The powder obtained by the method is added as a powdery mash. As shown in the table, the dielectric materials of different amounts are prepared separately. (Sample code 1 1 to 35). In Table 1, with respect to 1 〇〇 耳 B BamTi〇~, each addition amount is compound oxide or oxidation Add the amount of conversion. Another knife
外,在本實施例中,分別使用ffi=1肩丨 <材料作為 Ba»TiO心、或是n==1.〇〇()之材料作為BanZr〇h。 接著,以粉碎機將所得之介電體材料:1〇〇重量部 聚乙烯縮丁搭(Polyvinyl Butyral)樹脂:1〇重量作 為可塑劑之鄰苯二甲酸二辛酯(D〇p) : 5重量部、作為溶媒 之醇:100重量部混合並膠化,而得到介電體層用膠。冷、Further, in the present embodiment, a material of ffi = 1 shoulder 丨 < material as Ba»TiO core or n = = 1. 〇〇 () is used as BanZr〇h, respectively. Next, the obtained dielectric material: a weight of a polyvinyl butyral resin: 1 〇 by weight as a plasticizer of dioctyl phthalate (D〇p): 5 The weight portion, the alcohol as a solvent, and 100 parts by weight were mixed and gelled to obtain a gel for a dielectric layer. cold,
另外,以3支滾輪(r〇Uer),將Ni粒子44·6重量部、 松脂醇52重量部、乙烯纖維素3重量部、苯並三销 (Benzotriaz〇le)〇. 4重量部混練、衆化,而得内部電極声 用膠。 曰 而且,使用上述所製作之介電體層用膠,在PM膜上 形成乾燥後之厚度為3〇"m的生胚薄板。接著,於其上使 用内部電極層用膠,以預定圖案印刷電極層後,從PM膜 將薄板剝離’ 製作具有電極層之生胚薄板。接著,疊積 稷數枚具有電極層之生胚薄板,並藉由加壓接著而作成生 胚積層體,之後’藉由將此生胚積層體切斷成預定尺寸而 得到生胚晶片。 接著’關力所得之生⑯晶片,則|據下述條件進行脫 2030-9390-PF;Forever769 23 200846300 膠處理k成及退火,而得到積層陶竟燒成體。 脫接者劑處理條件係昇溫速度肌/小時、保持溫度: 2航、溫度保持時間:8小時、環境:空氣中。 燒成條件為昇溫@ · 0 Λ Λ。 幵,服迷度· 2〇0 t /小時、保持溫度: 1220 1380 C、溫度保持時間:2小時、冷卻速度:綱。c / J才%境氣體·加濕之心诎2混合氣體(氧分壓 退火條件為昇溫速度:2〇rc/小時、保持溫度: 1 000〜U〇〇°C、溫度保持時間:2小時、冷卻速度:2〇〇口 小時、環境氣體:加濕之化氣體(氧分壓:i〇-7Pa)。而且, 燒成及退火之際之環境氣體的加濕係使用料㈣流平劑 (wetter) ° 接著接著,以喷砂法對所得之積層陶究燒成體之端 面進行研磨後’塗佈1卜Ga作為外部電極,而得第丄圖所 不之積層_容器之試料。在本實施例中,如表i所示, 製作複數個電容器試料(試料號碼卜35),其中,上述複數 個電容器試料(試料號碼卜35)係從組成相異之複數個介電 體陶瓷器組合物構成介電體層。所得之電容器試料之尺寸 為3.2_Uminx3.2mm;介電體層之厚度為2()^;内部電 極層之厚度為1·5/ζπι;内邱雪士匕4· a 円邛電極層所夾之介電體層的數量 為10 〇 關於所得之各電容器試料,係可以藉由下述所示之方 法測定比介電率us)、容量溫度特性(TC)、高溫加速壽命 (mT)、破壞電麗(耐壓)、及電麼施加所引起之電致伸縮 量0 2030-9390-PF/Forever769 24 200846300In addition, three weights (r〇Uer) were used to knead the weight of the Ni particles 44·6, the weight of the rosinol 52, the weight of the vinyl cellulose, the weight of the benzotriax, and the weight of the Benzotriax. The publicization, and the internal electrode sound with glue.曰 Further, a green sheet having a thickness of 3 Å " m after drying was formed on the PM film by using the above-mentioned dielectric layer adhesive. Next, the internal electrode layer paste was used thereon, and the electrode layer was printed in a predetermined pattern, and then the thin plate was peeled off from the PM film. A green sheet having an electrode layer was produced. Next, a plurality of green sheets having electrode layers are stacked, and a green layer is formed by pressurization, and then the green sheets are obtained by cutting the green sheets into a predetermined size. Then, the resulting 16 wafers were obtained, and the resultant was subjected to the removal of 2030-9390-PF according to the following conditions; Forever 769 23 200846300 was subjected to gel treatment and annealing to obtain a laminated ceramic body. Disconnector treatment conditions are heating rate muscle / hour, maintaining temperature: 2 navigation, temperature retention time: 8 hours, environment: air. The firing conditions are heating up @ · 0 Λ Λ.幵, clothing fan · 2 〇 0 t / hour, maintaining temperature: 1220 1380 C, temperature retention time: 2 hours, cooling rate: Gang. c / J is only a gas and humidified heart 诎 2 mixed gas (oxygen partial pressure annealing conditions are heating rate: 2 〇 rc / hour, holding temperature: 1 000 ~ U 〇〇 ° C, temperature holding time: 2 hours Cooling rate: 2 hours, ambient gas: humidified gas (oxygen partial pressure: i〇-7Pa). Moreover, the humidification system of the ambient gas during firing and annealing (4) leveling agent (wetter) ° Next, the end face of the obtained laminated ceramics was ground by a sandblasting method, and then the coating of 1 Ga was used as an external electrode, and the sample of the laminate of the first layer was obtained. In the present embodiment, as shown in Table i, a plurality of capacitor samples (sample number 35) are prepared, wherein the plurality of capacitor samples (sample number 35) are composed of a plurality of dielectric ceramic combinations different in composition. The material constitutes a dielectric layer. The size of the obtained capacitor sample is 3.2_Uminx3.2mm; the thickness of the dielectric layer is 2()^; the thickness of the internal electrode layer is 1·5/ζπι; and the inner Qiu Xueshi匕4· a 円The number of dielectric layers sandwiched by the ruthenium electrode layer is 10 〇 for each of the obtained capacitor samples, The amount of electrostriction caused by the specific dielectric constant us), the capacity temperature characteristic (TC), the high temperature accelerated life (mT), the breakdown of the voltage (withstand voltage), and the application of electricity can be measured by the method described below. 0 2030-9390-PF/Forever769 24 200846300
• 比介電率ε S 針對電容器試料,於基準溫度25〇c下,以數位LCR計 (YHP 4284A),輸入周波數1kHz、輸入信號水準(測定電 壓MVrms之信號’測定靜電容量c。接著,根據介電體層 之厚度、有效電極面積、測定之靜電容量算出比絕緣率ε s(無單位)。介電專較高者較佳,在本實施例中,以上 較佳、250以上更佳。結果如表1所示。 0 容量溫度特性(TC) 針對電容器試料,在125X:下以數位LCR計(YHP製 4284A)於周波數lkHz、輸入信號水準(測定電壓)iVrras之 條件下測定靜電容量,並算出與基準溫度25。〇之靜電容量 對應的變化率。在本實施例中,以士15%以内者為良好。結 果如表1所示。 冋}皿加速哥命(H A L T) 猎由在200°C、40V//zm之電場下保持直流電壓之施加 _狀態並測定壽命時間,而評價電容器試料之高溫加速壽命 (T)在本灵施例中,將從施加開始至絕緣電阻降一個 數夏級之時間定義為壽命。另外,此高溫加速壽命係針對 10個電各試料進行。在本實施例中,以i Q小時以上、 或20小時以上為良好。結果如表1所示。 破壞電壓(耐壓) 針對電容器試料,藉由在溫度25°C下,以昇壓速度 1 入oov/sec·施加直流電壓,以相對於i〇mA之電流流動時之 介電體層厚度得電壓值(單位:v/"m)為破壞電壓,並測定 2030-9390^PF;F〇rever769 25 200846300 破壞電壓而評價電容器試料之耐壓。在本實施例中,以破 壞電壓SOV/μ m以上為良好。結果如表1所示。 電壓施加電致伸縮量 首先,藉由銲料使電容器試料附著在印(刷)有預定圖 案之電極的玻璃環氧樹脂基板而固定。接著,針對固定於 基板之電容器試料’在AC : mnns///m、頻率數之 條件下施加電壓’並測定電壓施加時之電容器試料表面的 振動幅度’而以此為電致伸縮量。而1,以電容器試料表 面之振動幅度的測定而言’係使用雷射都普勒振動計。另 外,在本實施例中,使用1G個電容器試料,並㈣定值之 平均值為電致伸縮量。電致伸縮量係以低者較佳,在本實 施例中,以未滿1。卿者為良好。結果如表i所示。只• Specific dielectric ratio ε S For the capacitor sample, the electrostatic capacitance c is measured at a reference temperature of 25 〇 c, using a digital LCR meter (YHP 4284A), inputting a cycle number of 1 kHz, and input signal level (signal of the measurement voltage MVrms). The specific insulating ratio ε s (no unit) is calculated from the thickness of the dielectric layer, the effective electrode area, and the measured electrostatic capacitance. The dielectric specificity is preferably higher, and in the present embodiment, the above is preferable, and 250 or more is more preferable. The results are shown in Table 1. 0 Capacity temperature characteristics (TC) For the capacitor sample, the electrostatic capacity was measured under a condition of 125×: digital LCR (4284A by YHP) at a frequency of 1 kHz and an input signal level (measured voltage) iVrras. And calculate the rate of change corresponding to the electrostatic capacity of the reference temperature of 25. In the present embodiment, it is good if the temperature is within 15%. The results are shown in Table 1. 冋}Accelerated life (HALT) Hunting The application of the DC voltage is maintained at an electric field of 200 ° C and 40 V / / zm and the life time is measured, and the high temperature accelerated life (T) of the capacitor sample is evaluated from the application to the insulation resistance drop in the present embodiment. a number The time of the stage is defined as the life. The high-temperature accelerated life is performed for each of the 10 electric samples. In the present embodiment, it is good for i Q hours or more, or 20 hours or more. The results are shown in Table 1. (withstand voltage) For the capacitor sample, a voltage value is obtained by applying a DC voltage at a boosting speed of 1 to oov/sec at a temperature of 25 ° C to a thickness of the dielectric layer when flowing with respect to a current of i 〇 mA ( The unit: v/"m) is the breakdown voltage, and measures the breakdown voltage of 2030-9390^PF; F〇rever769 25 200846300 to evaluate the withstand voltage of the capacitor sample. In the present embodiment, the breakdown voltage is SOV/μm or more. The results are shown in Table 1. The voltage application electrostriction amount is first fixed by attaching a capacitor sample to a glass epoxy substrate printed with an electrode of a predetermined pattern by soldering, and then fixing to the substrate. The capacitor sample 'applies a voltage under the condition of AC: mnns///m, the number of frequencies' and measures the vibration amplitude of the surface of the capacitor sample when the voltage is applied', and this is the amount of electrostriction. In the measurement of the vibration amplitude, a laser Doppler vibrometer is used. In addition, in the present embodiment, 1 G capacitor samples are used, and (4) the average value of the constant value is the amount of electrostriction. The lower one is preferable, and in the present embodiment, it is less than 1. The result is as shown in Table i.
2030-9390-PF;Forever769 26 2008463002030-9390-PF; Forever769 26 200846300
之含有量係刚莫耳 才示記冰」之試料係本發明之範圍外的試料。The sample containing the amount of "Momo" is a sample outside the scope of the present invention.
由表1可知,藉由將介電體陶究器組合物組成控制在 發明之職範圍内,★了可以良好地保持比介電率(ε 小,容量溫度特性⑽、及電致伸縮量,亦可以提升破壞 電壓(耐壓)及高溫加速壽命(HALT)。 相對地,一旦介電體陶瓷器組合物組成落在本發明之 範圍外的話,則各特性會劣化。 實施例2 使用將BamTiOw及BaDZr〇2+n預先假燒而得之 6&(了1,21')〇3取代以1^1〇2+111及以11化〇2+11,且不將添加物成分 假k而奶合,除此之外皆與實施例丨之試料號碼9相同, 製作電容器試料並與實施例〗同樣地進行評價。而且,在 本貫施例中’添加於介電體陶瓷器組合物中之Ba(Ti,Zr)〇3 的量係與實施例i之試料號碼9中之BamTi〇2+m及BanZr〇2+n 之添加量的總和相同。另外,以Ba(Ti,Zr)〇3而言,係使 用Tl/Zr比與實施例1之試料號碼9中之Ba/riOm及 27 2030-9390-PF;Forever769 200846300As can be seen from Table 1, by controlling the dielectric composition of the dielectric composition within the scope of the invention, it is possible to maintain a good dielectric constant (ε, capacity temperature characteristic (10), and electrostriction amount, It is also possible to increase the breakdown voltage (withstand voltage) and the high temperature accelerated life (HALT). In contrast, once the composition of the dielectric ceramic composition falls outside the scope of the present invention, the characteristics may deteriorate. Example 2 Using BamTiOw And BaDZr〇2+n pre-sintered 6&(1,21')〇3 is replaced by 1^1〇2+111 and 11〇2+11, and the additive component is not false k In the same manner as in the Example, the capacitor sample was prepared in the same manner as in the sample No. 9 of the example, and was added to the dielectric ceramic composition in the present embodiment. The amount of Ba(Ti,Zr)〇3 is the same as the sum of the amounts of BamTi〇2+m and BanZr〇2+n added in sample No. 9 of Example i. In addition, Ba(Ti,Zr)〇 3, using Tl/Zr ratio and Ba/riOm and 27 2030-9390-PF in sample number 9 of Example 1; Forever769 200846300
BanZr〇2+n之比為相同比率的材料(也就是說,使用Ti/zr約 為100/41之材料)。結果如表2所示。 [表2: 試料 號碼 鈦酸鋇、锆酸鋇之 添加狀態 ε s TC (125〇C) [% ] 南溫加速 壽命 [hour] 破壞電壓 [Υ/βΜ] 電致伸縮量 [ppm] 9 BSmT i 〇2+πι ~f· B&nZr〇2+n 326 -15 25 57 7 木36 Ba(Ti, Zr)〇3 1209 - 65 11 30 52 •各成分之含有量係相對於1〇〇莫耳BaJi〇2+ni的量 •標記「*」之試料係本發明之範圍外的試料。 由表2可知,在使用Ba(Ti,Zr)(h取代BamTi〇2+ni& BanZr〇2+n的情況下,容量溫度特性或電壓施加所引起之電 致伸縮量、信賴性會變差。而且,雖然其原因未明,但是, 可能是因為添加了鈦酸鋇及鍅酸鋇而導致之擴散相異 的緣故。也就是說,在本發明之介電體陶瓷器組合物中, 由於分別添加Ba«〇Ti〇2+m及BanZr〇2+n,因此Gd容易向 BaJiOh粒子擴散,而成為Gd在粒子内一樣地分布的構 造。故’關於在還原環境之燒成中所發生之氧缺陷獲得改 善而信賴性變好的現象,可能是在使用Ba(Ti,Zr)〇3的情 況下未變成上述結構的緣故。 實施例3 使用與實施例1同樣的粉體A,並以下述所示之方法 (其餘與實施例1相同)作成電容器試料,而與實施例1同 樣地進行評價。 與表1相異的是在表3及表4中係以下述方式表示燒 成後之介電體陶瓷器組合物之組成。 2030 939〇-pp.F〇rever769 28 200846300 也洗是說,此實施例之介電體陶£器組合物係具有: 、以(BaeRb)a(TicZrdMge)〇3之—般式所表示的第!成 ^選自^士士及卜所組成之群組中至少^元 乳化物所構成的第2成分、以及選自由Si、Li、A1、 斤、且成之群組中至少i種元素之氧化物所構成的第 3成分。 在表3及表4中,第2成分(Mn)及第3成分(s。之莫 耳比係以100莫耳第1成分所含之Ba氣為基準並以氧 化物換算而得之莫耳比。 早^ 由表3及表4所示之結果可知,藉由將介電體陶瓷器 組合物組成控制在本發明之預定範圍内,除了可以良好I 保持比介電率(ε s)、容量溫度特性(TC)、及電致伸縮量, 亦可以提升破壞電壓(耐壓)及高溫加速壽命(HALT)。 相對地,一旦將介電體陶瓷器組合物組成控制在本發 明之範圍外的話,則各特性會變壞。 實施例4 首先’準備平均粒子徑為〇· 5# m之BamTi〇2+m(其中,m =1· 〇〇1)、BanZr〇2+n(其中,n= L _)、MgC〇3、Gd2〇3、Mn〇 及Si〇2 ’並以粉碎機混合而得到混合粉。以此製法所得之 粉體作為粉體B。 除了使用粉體B取代粉體a之外,其餘與實施例3相 同’而作成電容器試料,並與實施例3同樣地進行評價。 粉體B中各成份之添加量及評價結果如表5所示。 相較於表3及表4而言,從表5所示之結果可知,雖 2030-9390-PF;Forever769 29 200846300 * 然在使用粉體B之情況下也可以得到與使用粉體A之情況 相同的結果,但是,在比較同樣組成的情況下,使用粉體 A之情況下的高溫加速壽命及破壞電壓較優。 實施例5 準備 BaC〇3、Zr〇2、MgCOs、GdUOs、MnO、Si〇2 及 Ti〇2, 以粉碎機進行15小時之濕式粉碎、乾燥而得到介電體材 料。以此製法所得之粉體作為粉體C。 ⑩ 除了使用粉體C取代粉體A之外,其餘與實施例3相 同,而作成電容器試料,並與實施例3同樣地進行評價。 各成份之添加量及評價結果如表5所示。如表5所示,即 使在使用粉體C之情況下,也可以得到與使用粉體A之情 況相同的結果。 實施例6 準備在100(TC下對MgC〇3、Gd2〇3、MnO及Si〇2預先進 行假燒的材料,並以粉碎機對其與平均粒子徑為〇 之 _ BaC〇3、Zr〇2、Tl02粉末進行15小時之濕式粉碎、乾燥,而 得到介電體材料4此製法所得之粉體作為粉體卜 除了使用粉體D取代粉體A之外,其餘與實施例3相 同’而作成電容器試料,並與實施例3同樣地進行評價。 各成份之添加量及評價結果如表5所示。如表5所示,即 使在使用粉體])之情況下,也可以得到與使用粉體A之情 況相同的結果。 2030-9390-PF;Forever769 30 200846300 旁The ratio of BanZr 〇 2+n is the same ratio of materials (that is, a material having a Ti/zr of about 100/41 is used). The results are shown in Table 2. [Table 2: Sample number of barium titanate, barium zirconate addition state ε s TC (125〇C) [%] South temperature accelerated life [hour] Destruction voltage [Υ/βΜ] Electrostriction amount [ppm] 9 BSmT i 〇2+πι ~f· B&nZr〇2+n 326 -15 25 57 7 Wood 36 Ba(Ti, Zr)〇3 1209 - 65 11 30 52 • The content of each component is relative to 1〇〇 The amount of the ear BaJi 〇 2+ni • The sample marked with "*" is a sample outside the scope of the present invention. It can be seen from Table 2 that when Ba(Ti,Zr) is used (h is substituted for BamTi〇2+ni& BanZr〇2+n, the amount of electrostriction caused by capacity temperature characteristics or voltage application, reliability is deteriorated. Moreover, although the reason is not clear, it may be due to the difference in diffusion caused by the addition of barium titanate and strontium ruthenate. That is, in the dielectric ceramic composition of the present invention, Since Ba«〇Ti〇2+m and BanZr〇2+n are added, Gd easily diffuses into the BaJiOh particles, and becomes a structure in which Gd is uniformly distributed in the particles. Therefore, 'the oxygen generated in the firing in the reducing environment When the defect is improved and the reliability is improved, the structure may not be obtained when Ba(Ti, Zr) 〇 3 is used. Example 3 The same powder A as in Example 1 was used, and the following The method shown in the above (the same as in the first embodiment) was made into a capacitor sample, and was evaluated in the same manner as in Example 1. The difference from Table 1 is that in Tables 3 and 4, the post-baking is shown in the following manner. Composition of an electric ceramic composition 2030 939〇-pp.F〇rever769 28 200846300 Also, it is said that the dielectric ceramic composition of this embodiment has: the first representation represented by the general formula of (BaeRb)a (TicZrdMge) 〇3! a second component composed of at least an emulsifier in the group and a third component selected from the group consisting of oxides of at least i of the group consisting of Si, Li, A1, and jin. In Tables 3 and 4, the molar ratio of the second component (Mn) and the third component (s. molar ratio) based on Ba gas contained in 100 mol of the first component and calculated in terms of oxide As is clear from the results shown in Tables 3 and 4, by controlling the composition of the dielectric ceramic composition within the predetermined range of the present invention, in addition to maintaining a specific dielectric constant (ε s), capacity The temperature characteristic (TC) and the amount of electrostriction can also increase the breakdown voltage (withstand voltage) and the high temperature accelerated life (HALT). In contrast, once the composition of the dielectric ceramic composition is controlled outside the scope of the present invention, Then, the characteristics will deteriorate. Example 4 First, prepare BamTi〇2+m with an average particle diameter of 〇·5# m (where m =1· 〇 〇1), BanZr〇2+n (where n=L _), MgC〇3, Gd2〇3, Mn〇 and Si〇2′ are mixed by a pulverizer to obtain a mixed powder. Powder B was prepared in the same manner as in Example 3 except that powder B was used instead of powder a, and was evaluated in the same manner as in Example 3. The amount and evaluation of each component in Powder B The results are shown in Table 5. Compared with Tables 3 and 4, it can be seen from the results shown in Table 5 that although 2030-9390-PF; Forever 769 29 200846300 * can be obtained even in the case of using powder B. The same results as in the case of using the powder A. However, in the case of comparing the same composition, the high-temperature accelerated life and the breakdown voltage in the case of using the powder A are superior. Example 5 BaC〇3, Zr〇2, MgCOs, GdUOs, MnO, Si〇2 and Ti〇2 were prepared, and wet-pulverized and dried by a pulverizer for 15 hours to obtain a dielectric material. The powder obtained by this method was used as the powder C. In the same manner as in Example 3 except that the powder C was used instead of the powder A, a capacitor sample was prepared and evaluated in the same manner as in Example 3. The amount of each component added and the evaluation results are shown in Table 5. As shown in Table 5, even when the powder C was used, the same results as in the case of using the powder A were obtained. Example 6 A material which was previously subjected to pseudo-sintering of MgC〇3, Gd2〇3, MnO and Si〇2 at 100 (TC) was prepared, and the average particle diameter was 以 by the pulverizer _ BaC〇3, Zr〇 2. The Tl02 powder was wet-pulverized and dried for 15 hours to obtain a dielectric material. The powder obtained by the method of the present invention was used as the powder. The powder was the same as in Example 3 except that the powder D was used instead of the powder A. The capacitor sample was prepared and evaluated in the same manner as in Example 3. The amount of each component added and the evaluation result are shown in Table 5. As shown in Table 5, even when the powder was used]), The same result as in the case of using powder A. 2030-9390-PF; Forever769 30 200846300
[表3] 試料 Ba Gd Ti Zr Mg Mn 粉 TC 高溫加速; 破壞電壓 電致伸縮量 號碼 a b c d e Si 體 as (125〇C) [% ] 朞命 [hour丄 [V/"m] [ppm] *40 0,79 0.21 0 . 67 0. 28 0.05 1.7 4.2 A 木242 -12 29 55 7 41 0. 80 ϋ J 0. b8 0.38 0.04 1.9 4.5 A 267 -13 57 6 42 0.86 0.14 U.BO 0. 35 0.05 1.5 4.4 A 288 -14 21 Ji 58 5 43 0.89 0.11 U. B7 0.29 0.04 1.6 4.8 A 305 -14 27 56 7 44 0.92 0. 08 0.62 0; 30 0.08 1.5 4.5 A 327 -14 26 58 6 45 0.96 0. 04 0.60 0.36 0.04 1.6 4.2 A 358 -15 25 52 5 蝴 0. 99 ϋ.ϋΐ U. 64 0.32 0.04 1.9 4.6 A 425 *-18 *17 *39 木10 木47 0. 86 0.14 0.73 0.24 _〇."〇3 1.4 4.9 A 木248 -12 29 57 5 48 0. 8& 0.11 0.70 0.27 0.03 1.5 4.4 A 266 -14 31 58 6 49 U.91 (J.U9 U.BB 0.30 0. 04 1.3 4.2 A 276 -13 29 56 5 50 0. 93 0. 07 0.63 0.32 0.05 1.9 4.3 A 304 -14 28 57 7 51 0.84 0.16 0.60 "〇6 0. 04 1.6 4.6 A 336 -15 26 58 7 52 0.87 0.13 0.55 0.39 0.06 1.8 4.8 A 364 -15 25 53 8 ^53 0. 90 0.10 0.53 0. 39 ^08 ΙΛ 4.2 A 459 *-17 *18 一 木38 *11 *54 0.93 0.07 0.70 0.23 0?07 1.5 4 2 A 42T ^-18 木17 58 木11 55 0.88 0.12 0. 69 0. 24 I 07 1.3 4.5 A 367 -15 26 59 8 56 0.91 0. 09 0.67 0.29 0.04 1.4 4.6 A 312 -14 28 56 6 57 0,92 0.08 0.61 〇.~32 0.07 1.5 4.3 A 299 -15 29 59 8 58 0.95 0. 05 0.60 0.36 0.04 1· 6 4.8 A 287 -14 30 58 7 59 0.91 0.09 0.58 0. 39 0.03 1.6 4.7 A 266 -14 30 57 8 木60 0.87 0.13 0.56 0.41 0.03 1·9 4.6 A 卜234 -13 29 58 6 *61 0.87 0.13 0.62 0.29 0J9 一· , 1.8 4.8 T 306 *-17 28 54 6 62 0.88 0.12 0.58 0.35 07 1.7 4.8 A 309 -15 31 55 6 63 0.94 0.06 0.61 0· 32 〇T〇7 1.4 4.0 A 311 -15 31 58 7 64 0.94 0. 06 0.65 0.30 0.05 1.3 4.5 A 302 _14 29 56 7 65 0· 85 0.15 0.66 0730 0. 04 1.5 4.3 A 299 -13 27 57 8 66 0.88 0.12 0. 68 0. 30 0.02 1.6 4.7 A 315 -13 26 53 6 *67 0.90 0.10 0.70 0.29 0.01 1.5 4.6 A 308 -12 氺18 51 7 在本實施例中,α= 1.060 係與(BaaGdb) σ (TieZrdMge)〇3之一般式相對應 •標記「氺」之試料係本發明之範圍外的試料 [表4] 試料 號碼 Ba Gd Ti Zr Mg Mn Si 1 粉 體 a s TC (125〇C) [% ] 南温加速 壽命 [hour] 破壞電壓 電致伸縮量 [ppm] a b c d e 木68 0.91 0.09 0.65 0. 30 0.05 0.3 4.6 A 412 木-18 *18 *39 *10 69 0.89 0.11 0. 65 0.31 0.04 0.5 15 A 367 -15 27 Π 57 5 70 0.87 0.13 0. 62 0.33 0.05 1.0 4.5 A 324 -14 28 j 58 6 71 0. 91 0.09 0. 64 0. 32 0.04 1.5 13 A 305 -15 28 1 56 5 72 0,92 0. 08 0. 68 0.28 0.04 2.0 Τητ 290 -13 27 57 7 73 0.89 0.11 0.64 0. 30 0.07 3.0 4.0 A 283 -14 29 1 58 7 *74 0.89 0.11 0. 60 0.34 0.06 — _ 4.0 Ba ti *233 -13 Π 28 53 8 2030-9390-PF;Forever769 31 200846300 ~^75 Γ7Λ 02 T〇8 ΈΈ 0.31 0.07 1.4 2.0 A *240 -15""" 木19 氺38 木10 76 rjry 0. 93 υ. 07 0. 64 0. 32 0.04 1·6 3.0 A 277 -14 26 58 5 77 78 7Π 0. 90 0.89 A 〇〇 —〇·10 0. 58 0. 37 0.05 1.9 3.5 A 287 -15 25 57 6 0.11 0. 64 0.31 0.05 1.8 4.5 A 305 -13 30 55 5 iy on U. 88 n or? 0.12 0. 65 0. 29 0. 06 1.5 6.0 A 319 -14 29 58 1 7 〇U ψ〇 -I U. 87 0.13 0. 65 〇. 28 0.07 1.6 9.0 A 355 -15 28 56 7 氺81 0. 91 0.09 4ο JU、 0.61 Όί 0.05 1.5 10.0 A 394 -14 27 ^ 57 1 8 if ΐa、b、c、d、e 係與(BaaGdb、(TieZrdMge)03 之一般式相對應。 f 施例中,α =ΐ·〇6〇。 標記「氺」之試料係本發明之範圍外的試料。 [表5. 試料 Ba Gd Ti Zr Mg 粉 I TC 高溫加速 破壞電壓 電致伸縮量 號碼 〇〇 a b c d e Mn Si 體 £ S (125°C) [% ] 壽命 [hour] [V/"m] [ppm] 〇Z 0. 88 0.12 0. 63 0.32 0.05 1.4 4.3 B 308 -14 23 53 6 83 〇 A 0. 89 0.11 0.65 0.31 0. 04 1.9 4.7 B 302 -15 21 54 6 84 0. 89 0.11 0.64 0.30 0. 06 1·8 4.6 B 298 -14 22 52 7 85 0. 91 0.09 0. 68 0.28 0. 04 1.7 4 3 B 310 -13 23 51 7 86 0. 90 0.10 0. 68 0. 27 0. 05 1.4 4.8 B 289 -14 24 54 8 87 0. 91 0. 09 0.65 0.29 0. 06 1.5 4.9 B 295 -15 22 52 6 88 0.88 0.12 0.61 0. 34 0. 05 1.8 4.2 C 301 -13 22 57 7 89 0. 88 0.12 0.63 0.32 0. 05 1.4 4.3 D 306 -14 22 53 7 U艺之組成a、b、c、d、e係與CBaaGdbMTicZrdMgOOs之一般式相對應。 •在本貫施例中,α =1.〇6〇。 •標記「氺」之試料係本發明之範圍外的試料。 實施例7[Table 3] Sample Ba Gd Ti Zr Mg Mn powder TC high temperature acceleration; breakdown voltage electrostriction number abcde Si body as (125〇C) [% ] Lifetime [hour丄[V/"m] [ppm] *40 0,79 0.21 0 . 67 0. 28 0.05 1.7 4.2 A Wood 242 -12 29 55 7 41 0. 80 ϋ J 0. b8 0.38 0.04 1.9 4.5 A 267 -13 57 6 42 0.86 0.14 U.BO 0. 35 0.05 1.5 4.4 A 288 -14 21 Ji 58 5 43 0.89 0.11 U. B7 0.29 0.04 1.6 4.8 A 305 -14 27 56 7 44 0.92 0. 08 0.62 0; 30 0.08 1.5 4.5 A 327 -14 26 58 6 45 0.96 0. 04 0.60 0.36 0.04 1.6 4.2 A 358 -15 25 52 5 Butterfly 0. 99 ϋ.ϋΐ U. 64 0.32 0.04 1.9 4.6 A 425 *-18 *17 *39 Wood 10 Wood 47 0. 86 0.14 0.73 0.24 _〇 ."〇3 1.4 4.9 A Wood 248 -12 29 57 5 48 0. 8& 0.11 0.70 0.27 0.03 1.5 4.4 A 266 -14 31 58 6 49 U.91 (J.U9 U.BB 0.30 0. 04 1.3 4.2 A 276 -13 29 56 5 50 0. 93 0. 07 0.63 0.32 0.05 1.9 4.3 A 304 -14 28 57 7 51 0.84 0.16 0.60 "〇6 0. 04 1.6 4.6 A 336 -15 26 58 7 52 0.87 0.13 0.55 0.39 0.06 1.8 4.8 A 364 -15 25 53 8 ^53 0. 90 0.10 0.53 0. 39 ^08 ΙΛ 4.2 A 459 *-17 *18 Wood 38 *11 *54 0.93 0.07 0.70 0.23 0?07 1.5 4 2 A 42T ^-18 Wood 17 58 Wood 11 55 0.88 0.12 0. 69 0. 24 I 07 1.3 4.5 A 367 -15 26 59 8 56 0.91 0. 09 0.67 0.29 0.04 1.4 4.6 A 312 -14 28 56 6 57 0,92 0.08 0.61 〇.~32 0.07 1.5 4.3 A 299 -15 29 59 8 58 0.95 0. 05 0.60 0.36 0.04 1· 6 4.8 A 287 -14 30 58 7 59 0.91 0.09 0.58 0. 39 0.03 1.6 4.7 A 266 -14 30 57 8 Wood 60 0.87 0.13 0.56 0.41 0.03 1·9 4.6 A Bu 234 -13 29 58 6 *61 0.87 0.13 0.62 0.29 0J9 A · , 1.8 4.8 T 306 *-17 28 54 6 62 0.88 0.12 0.58 0.35 07 1.7 4.8 A 309 -15 31 55 6 63 0.94 0.06 0.61 0· 32 〇T〇7 1.4 4.0 A 311 -15 31 58 7 64 0.94 0. 06 0.65 0.30 0.05 1.3 4.5 A 302 _14 29 56 7 65 0· 85 0.15 0.66 0730 0. 04 1.5 4.3 A 299 -13 27 57 8 66 0.88 0.12 0. 68 0. 30 0.02 1.6 4.7 A 315 -13 26 53 6 *67 0.90 0.10 0.70 0.29 0.01 1.5 4.6 A 308 -12 氺18 51 7 In the present embodiment, α = 1.060 corresponds to the general formula of (BaaGdb) σ (TieZrdMge) 〇 3 • The sample labeled "氺" is the present invention. Samples outside the scope [Table 4] Sample number Ba Gd Ti Zr Mg Mn Si 1 powder as TC (125〇C) [%] South temperature accelerated life [hour] Destruction voltage electrostriction [ppm] abcde wood 68 0.91 0.09 0.65 0. 30 0.05 0.3 4.6 A 412 Wood-18 *18 *39 *10 69 0.89 0.11 0. 65 0.31 0.04 0.5 15 A 367 -15 27 Π 57 5 70 0.87 0.13 0. 62 0.33 0.05 1.0 4.5 A 324 -14 28 j 58 6 71 0. 91 0.09 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 14 29 1 58 7 *74 0.89 0.11 0. 60 0.34 0.06 — _ 4.0 Ba ti *233 -13 Π 28 53 8 2030-9390-PF; Forever769 31 200846300 ~^75 Γ7Λ 02 T〇8 ΈΈ 0.31 0.07 1.4 2.0 A *240 -15""" Wood 19 氺38 Wood 10 76 rjry 0. 93 υ. 07 0. 64 0. 32 0.04 1·6 3.0 A 277 -14 26 58 5 77 78 7Π 0. 90 0.89 A 〇 〇—〇·10 0. 58 0. 37 0.05 1.9 3.5 A 287 -15 25 57 6 0.11 0. 64 0.31 0.05 1.8 4.5 A 305 -13 30 55 5 iy on U. 88 n or? 0.12 0. 65 0. 29 0. 06 1.5 6.0 A 319 -14 29 58 1 7 〇U ψ〇-I U. 87 0.13 0. 65 〇. 28 0.07 1.6 9 .0 A 355 -15 28 56 7 氺81 0. 91 0.09 4ο JU, 0.61 Όί 0.05 1.5 10.0 A 394 -14 27 ^ 57 1 8 if ΐa, b, c, d, e and (BaaGdb, (TieZrdMge) The general form of 03 corresponds. f In the example, α = ΐ · 〇 6 〇. The sample labeled "氺" is a sample outside the scope of the present invention. [Table 5. Sample Ba Gd Ti Zr Mg powder I TC High temperature accelerated breakdown voltage Electrostriction number 〇〇abcde Mn Si body £ S (125 ° C) [% ] Life [hour] [V/"m] [ Ppm] 〇Z 0. 88 0.12 0. 63 0.32 0.05 1.4 4.3 B 308 -14 23 53 6 83 〇A 0. 89 0.11 0.65 0.31 0. 04 1.9 4.7 B 302 -15 21 54 6 84 0. 89 0.11 0.64 0.30 0. 06 1·8 4.6 B 298 -14 22 52 7 85 0. 91 0.09 0. 68 0.28 0. 04 1.7 4 3 B 310 -13 23 51 7 86 0. 90 0.10 0. 68 0. 27 0. 05 1.4 4.8 B 289 -14 24 54 8 87 0. 91 0. 09 0.65 0.29 0. 06 1.5 4.9 B 295 -15 22 52 6 88 0.88 0.12 0.61 0. 34 0. 05 1.8 4.2 C 301 -13 22 57 7 89 0. 88 0.12 0.63 0.32 0. 05 1.4 4.3 D 306 -14 22 53 7 The composition of U art a, b, c, d, e corresponds to the general formula of CBaaGdbMTicZrdMgOOs. • In the present example, α = 1. 〇 6 〇. • The sample labeled "氺" is a sample outside the scope of the present invention. Example 7
除了使用Cr2〇3、C〇3〇4或是Fe2〇3作為ΜηΟ之代替物, 並使用Li2〇3、Al2〇3、Ge2〇2或是Β2〇3作為Si〇2之代替物外, 其餘與實施例3相同,而製作電容器試料,並與實施例3 同樣地進行評價。各成份之添加量及評價結果如表6所示。 如表6所示,可以確認即便在使用Cr2〇3、C〇3〇4或是 Fe2〇3作為ΜηΟ之代替物,並使用Li2〇3、ΑΙ2Ο3、Ge2〇2或是 B2〇3作為Si 〇2之代替物的情況下,也可以得到同樣的特性。 2030-9390-PF;Forever769 32 200846300 [表6] 試料 Ba Gd Ti Zr Mg 第2成分 第3成分1 H TC 兩溫加速 破壞電壓 電致伸縮量 號嗎 a b c d e 種 量 種 量 體 ε s [% ] 哥命 [hour] [V/^m] [ppm] 90 0.95 0.05 0.67 0.30 0.03 Μη 1.9 Si 4.5 A 267 -13 28 57 6 91 0.89 0.11 0.58 0.35 〇e or Cr 1.5 Si 4.4 A 288 -14 27 58 5 92 0.91 0.09 0.67 0.29 0.04 "Co 1.6 Si 4. 8 A 305 -14 27 1 56 -7. 93 0. 93 0. 07 0.62 0.32 0. 06 Fe 1.5 Si 4.5 A 327 -14 26 58叫 6 94 0.82 0.18 0.60 0.36 0.04 Μη 1.6 Li 4.2 A 358 -15 25 52 5 95 0.86 0.14 0.69 0.27 0. 04 Μη 1.5 A1 4.4 A 266 -14 31 58 6 96 0.89 0.11 0.66 0. 29 0.05 Μη 1.3 Ge 4.2 A 276 -13 29 56 5 97 0.92 0.08 0.63 0.30 0.07 Μη 1.9 B 4.3 A 304 -14 28 57 7 •各成分之組成a、b、c、d、e係與(BaaGdb)“TieZrdMge)〇3之一般式相對應。 •在本實施例中,α =1. 060。 •標記「*」之試料係本發明之範圍外的試料。In addition to using Cr2〇3, C〇3〇4 or Fe2〇3 as a substitute for ΜηΟ, and using Li2〇3, Al2〇3, Ge2〇2 or Β2〇3 as a substitute for Si〇2, the rest A capacitor sample was prepared in the same manner as in Example 3, and evaluated in the same manner as in Example 3. The amount of each component added and the evaluation results are shown in Table 6. As shown in Table 6, it can be confirmed that even if Cr2〇3, C〇3〇4 or Fe2〇3 is used as a substitute for ΜηΟ, Li2〇3, ΑΙ2Ο3, Ge2〇2 or B2〇3 is used as Si 〇. In the case of a substitute of 2, the same characteristics can be obtained. 2030-9390-PF; Forever769 32 200846300 [Table 6] Sample Ba Gd Ti Zr Mg 2nd component 3rd component 1 H TC Two-temperature accelerated destruction voltage electrostrictive amount number abcde Seed quantity ε s [% ] Brother [hour] [V/^m] [ppm] 90 0.95 0.05 0.67 0.30 0.03 Μη 1.9 Si 4.5 A 267 -13 28 57 6 91 0.89 0.11 0.58 0.35 〇e or Cr 1.5 Si 4.4 A 288 -14 27 58 5 92 0.91 0.09 0.67 0.29 0.04 "Co 1.6 Si 4. 8 A 305 -14 27 1 56 -7. 93 0. 93 0. 07 0.62 0.32 0. 06 Fe 1.5 Si 4.5 A 327 -14 26 58 called 6 94 0.82 0.18 0.60 0.36 0.04 Μη 1.6 Li 4.2 A 358 -15 25 52 5 95 0.86 0.14 0.69 0.27 0. 04 Μη 1.5 A1 4.4 A 266 -14 31 58 6 96 0.89 0.11 0.66 0. 29 0.05 Μη 1.3 Ge 4.2 A 276 -13 29 56 5 97 0.92 0.08 0.63 0.30 0.07 Μη 1.9 B 4.3 A 304 -14 28 57 7 • The composition a, b, c, d, and e of each component corresponds to the general formula of (BaaGdb) “TieZrdMge” 〇3. • In the present embodiment, α = 1.060. • The sample marked with "*" is a sample outside the scope of the present invention.
實施例8 在實施例 3之粉體Α之製法中,在(BaaGdb) α (TicZrdMge)〇3之α值介於〇·〇8〜1·2〇之範圍内分別調整不 同之粉體,與實施例3同樣地作成電容器試料,並與實施 例3同樣地進行評價。各成份之添加量及評價結果如表7 所示。 如表7所示,可以確認在1· 00$ α $丨.15之情況下能 得到良好的特性。 [表7 試料 號碼 Ψ〇〇Λ Del a ba b —Ti Zr Mg a Mn ε s TC (125〇C) [% ] 高溫加速 壽命 [hour] 破壞電壓 [V/^m] 電致伸縮量 [ppm] c d e Si 粉 體 QQU 0.89 Π oo 0.11 0.63 0.29 0.08 0.08 1.7 4.5 A 310 -15 木8 *42 6 y〇D QQ U· 88 Π λα 0.12 0.65 0.28 0.07 1.00 1.8 4.3 A 321 -14 26 58 5 yy 1 nn U· 90 Π oo 0.10 0. 59 0.33 0. 08 1.02 1.9 4.7 —A 305 -15 25 56 6 1UU U. ob 0.14 0.63 0. 30 0.07 1.04 1.6 4.4 A 312 -13 27 57 6 101 1 no 0.89 0.11 0.67 0.25 0.08 1.06 1.7 4.6 A 310 -13 26 58 7 102 1 no 0·93 0.07 0.60 0. 34 0.07 1.08 1.7 4.5 A 323 -14 28 59 5 lUo 1 A il * 0.87 0.13 0. 60 0. 33 0. 07 1.10 1.8 4.6 A 309 -15 25 56 6 104a )k1 f\AU 0.88 Π Q7 r〇2" 0. 62 0.31 0.07 1.15 1.8 4.5 A 306 -15 26 57 7 UflU U. 〇 f 0.13 B Jr* r% 0. 64 0.28 0.08 1.20 1.7 Γδί A 287 -17 氺9 氺45 6 標記「氺 之試料係本發明之範圍外的試料 實施例9 2030-9390-pp;p〇rever769 200846300 參 , 除了使用Sm、Ειι、Td或是Dy之氧化物作為Gd2〇3之代 替物以外,其餘與實施例3相同,而製作電容器試料,並 與實施例3同樣地進行評價。各成分之添加量及評價結果 如表8所示。 的特性。 [表8][Embodiment 8] In the method for producing a powder crucible of the third embodiment, the powders of (BaaGdb) α (TicZrdMge) 〇3 are respectively adjusted to have different powders within the range of 〇·〇8 to 1·2〇, and In the same manner as in the third embodiment, a capacitor sample was prepared and evaluated in the same manner as in the third embodiment. The amount of each component added and the evaluation results are shown in Table 7. As shown in Table 7, it can be confirmed that good characteristics can be obtained in the case of 1·00$ α $丨.15. [Table 7 sample number Ψ〇〇Λ Del a ba b —Ti Zr Mg a Mn ε s TC (125〇C) [% ] High temperature accelerated life [hour] Destruction voltage [V/^m] Electrostriction amount [ppm ] cde Si powder QQU 0.89 Π oo 0.11 0.63 0.29 0.08 0.08 1.7 4.5 A 310 -15 wood 8 * 42 6 y〇D QQ U· 88 Π λα 0.12 0.65 0.28 0.07 1.00 1.8 4.3 A 321 -14 26 58 5 yy 1 Nn U· 90 Π oo 0.10 0. 59 0.33 0. 08 1.02 1.9 4.7 —A 305 -15 25 56 6 1UU U. ob 0.14 0.63 0. 30 0.07 1.04 1.6 4.4 A 312 -13 27 57 6 101 1 no 0.89 0.11 0.67 0.25 0.08 1.06 1.7 4.6 A 310 -13 26 58 7 102 1 no 0·93 0.07 0.60 0. 34 0.07 1.08 1.7 4.5 A 323 -14 28 59 5 lUo 1 A il * 0.87 0.13 0. 60 0. 33 0. 07 1.10 1.8 4.6 A 309 -15 25 56 6 104a )k1 f\AU 0.88 Π Q7 r〇2" 0. 62 0.31 0.07 1.15 1.8 4.5 A 306 -15 26 57 7 UflU U. 〇f 0.13 B Jr* r% 0. 64 0.28 0.08 1.20 1.7 Γδί A 287 -17 氺9 氺45 6 Marking "The sample of 氺 is outside the scope of the present invention Example 9 2030-9390-pp; p〇rever769 200846300 参, except using Sm, Ειι , Td or Dy oxide as The capacitor samples were prepared in the same manner as in Example 3 except for the substitution of Gd2〇3, and evaluated in the same manner as in Example 3. The amounts of the respective components and the evaluation results are shown in Table 8. [Table 8] ]
如表8所示’可以確認即便在使用Sm、Eu、Td或是 Dy之氧化物作為Gd2〇3之代替物的情況下,也能得到同樣 首先,準備 BanZr〇2+n、MgC〇3、Gd2〇3、MnO 及 Si〇2,並 以粉碎機將上述材料混合,並在1〇〇〇〇c下對所得到之混合 粉預先進行假燒,而得到平均粒子徑為〇.2#m之焙燒粉。 接著,以粉碎機對所得之焙燒粉、與平均粒子徑為Q 6#m 之63„1^〇2+„1粉末進行15小時之濕式粉碎、乾燥,而得到介 電體材料。以此製法所得之粉體作為粉體E。 除了使用粉體E取代粉體A之外,其餘與實施例1相 同而作成電谷器試料,並與實施例1同樣地進行評價。 各成份之添加量及評價結果如表9所示。 2030-9390-pp;F〇rever769 34 200846300As shown in Table 8, it can be confirmed that even when an oxide of Sm, Eu, Td or Dy is used as a substitute for Gd2〇3, the same can be obtained first, and BanZr〇2+n, MgC〇3, Gd2〇3, MnO and Si〇2, and the above materials are mixed by a pulverizer, and the obtained mixed powder is pre-fired at 1 〇〇〇〇c to obtain an average particle diameter of 〇.2#m. Calcined powder. Then, the obtained calcined powder and the 63 Å 1 〇 2+ 1 powder having an average particle diameter of Q 6 #m were wet-pulverized and dried for 15 hours to obtain a dielectric material. The powder obtained by this method was used as the powder E. The electric grid sample was prepared in the same manner as in Example 1 except that the powder E was used instead of the powder A, and evaluated in the same manner as in the example 1. The amount of each component added and the evaluation results are shown in Table 9. 2030-9390-pp;F〇rever769 34 200846300
[表9·[Table 9·
•卞之含有量係相對於1〇〇莫耳BaJi〇2+〇的量 •標記*」之試料係本發明之範圍外的試料。• The content of hydrazine is relative to the amount of BaJi 〇 〇 • • • • • • • • • • • • 。 」 」 。 。 。 。 。 。 。 。 。 。 。
由表9可知,藉由將介電體陶瓷器組合物組成控制在 本發明之預定範圍内,除了可以良好地保持比 电罕(ε S)、容量溫度特性(TC)、及電致伸縮量,亦可以提升破广 電壓(耐壓)及高温加速壽命(HALT)。 【圖式簡單說明】 第1圖係本發明之實施例之積層陶瓷電容考 W啊刮面 圖。 2030-9390-PF;Forever769 35 200846300 . 【主要元件符號說明】 1〜積層陶瓷電容器; 2〜介電體層; 3〜内部電極層; 4〜外部電極; 10〜元件本體。 2030-9390-PF;Forever? 69 36As can be seen from Table 9, by controlling the composition of the dielectric ceramic composition within the predetermined range of the present invention, in addition to maintaining the specific electric (ε S), the capacity temperature characteristic (TC), and the amount of electrostriction It can also improve the wide voltage (withstand voltage) and high temperature accelerated life (HALT). BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a laminated ceramic capacitor according to an embodiment of the present invention. 2030-9390-PF; Forever769 35 200846300 . [Main component symbol description] 1 ~ multilayer ceramic capacitor; 2 ~ dielectric layer; 3 ~ internal electrode layer; 4 ~ external electrode; 10 ~ element body. 2030-9390-PF; Forever? 69 36
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