200832599 九、發明說明 【發明所屬之技術領域】 本發明是關於利用以懸臂式支撐在支撐部的手臂往水 平方向移動對工件把持裝置所把持的工件進行搬運的工件 ， 搬運裝置，特別是關於能夠對該手臂撓曲造成偏離的控制 。 點位置加以修正的工件搬運裝置。 Φ 【先前技術】 液晶用玻璃基板或半導體晶圓等基板加工處理用的半 導體製造系統中，於每個處理步驟配置有處理部，透過依 序對該等處理部搬運基板以對基板施以一連貫性的處理。 - 第7圖爲表示工件搬運裝置的構成。於此，圖示著複 - 數軸構成的機器人102對暫時保管一連貫性處理後之複數 基板的基板收容匣100插入玻璃基板107時的插入動作狀 態。機器人1 02是透過纜線1 03從控制裝置1 04供應馬達 φ 驅動電力以執行動作。控制裝置1 04是透過纜線1 〇5連接 於示教手段106。示教手段106具有複數按鈕，按下各按 鈕就能夠透過纜線1 05對控制裝置1 04輸出指示。控制裝 置104是根據上述指示，透過纜線103對機器人102輸出 • 馬達驅動電力。示教手段1 06例如是泛用的電腦或有時是 個人電腦。基板收容匣1〇〇具備有玻璃基板107保持或支 撐用的支撐用插銷101。 第8圖爲表示機器人102的構成。第1手臂連桿1〇8 是透過第1手臂軸1 1 4支撐在旋繞部1 29。於第1手臂連 -4 - 200832599 桿108內部具備手臂軸馬達115，形成和手臂軸減速機 1 1 6連結著。手臂軸馬達1 1 5的旋轉會讓連結於手臂軸減 速機116的第1手臂軸114旋轉，但因第1手臂軸114是 支撐在旋繞部129，所以第1手臂連桿108就會以第1手 臂軸1 1 4爲中心進行旋繞。 於第1手臂連桿1〇8內部具備有第1連桿皮帶117, 可從手臂軸減速機116將動力傳達至第2手臂軸118所連 結的第2手臂軸減速機119。第2手臂軸減速機119具有 可朝手臂軸減速機1 1反方向旋轉的特性。即，手臂軸馬 達1 1 5的旋轉是會驅動第1連桿皮帶1 1 7，第2手臂軸減 速機119會旋轉，其所連結的第2手臂軸118會旋轉，使 第2手臂連桿109以第2手臂軸118爲中心往第1手臂軸 114相反方向旋繞。於第2手臂連桿109內部具備有第2 連桿皮帶，可從第2手臂軸減速機119將動力傳達至凸緣 減速機1 2 1。凸緣減速機12 1具有可朝第2手臂軸減速機 1 1 9反方向旋轉的特性。此外，各減速機（手臂軸減速機 16、第2手臂軸減速機119、凸緣減速機121)的減速比 是設定成第1手臂軸1 1 4的旋轉角度和凸緣U 2的旋轉角 度相等。另外，第1手臂軸1 14旋繞中心至第2手臂軸 1 1 8旋繞中心的距離，和第2手臂軸1 1 8旋繞中心至凸緣 1 22旋繞中心的距離是設定成相等。 基於以上的機構，手臂軸馬達1 1 5的旋轉會讓和手臂 軸減速機1 1 6連結的第1手臂軸1 1 4旋轉的同時，還會從 手臂軸減速機116透過第1連桿皮帶117傳達動力使第2 -5- 200832599 手臂軸減速機119旋轉。第2手臂軸減速機119的旋轉， 會讓其所連結的第2手臂軸118朝第1手臂軸114相反方 向旋轉的同時，還會從第2手臂軸減速機119透過第2連 桿皮帶1 20傳達動力使凸緣減速機！ 2 1旋轉。凸緣減速機 121的旋轉，會讓其所連結的凸緣〗22朝第2手臂軸118 相反方向即朝第1手臂軸1 1 4相同方向旋轉。此外，因第 1手臂軸1 1 4旋轉角度和凸緣1 22旋轉角度相等，第1手 臂軸1 1 4旋繞中心至第2手臂軸1 1 8旋繞中心的距離，和 第2手臂軸1 1 8旋繞中心至凸緣1 22旋繞中心的距離相等 ’所以工件把持裝置1 1 0、工件把持裝置1 1 0所把持或載 置的玻璃基板107及經由控制裝置1〇4動作機器人102時 成爲動作控制對象的假想點即控制點1 2 3就會朝X軸方向 形成直線動作。 機器人102的手臂（第1手臂連桿及第2手臂連桿） 伸縮狀態是圖示在第9圖及第1〇圖。第9圖及第10圖是 從Z軸正方向看第8圖機器人時手臂伸縮狀態圖。圖中’ 圖號a是表示第1手臂軸U 4旋繞中心至第2手臂軸1 1 8 旋繞中心的距離。基於圖號a等於第2手臂軸1 1 8旋繞中 心至凸緣1 22旋繞中心的距離，所以第1手臂軸1 1 4旋繞 中心和第2手臂軸1 1 8旋繞中心和凸緣1 22旋繞中心的連 接線形成的三角形就成爲圖中所示的等腰三角形。上述等 腰三角形的底邊r 1、r 2是第1手臂軸1 1 4旋繞中心至凸緣 122旋繞中心的距離（手臂的伸縮長）。例如第丨手臂軸 114旋轉αΐ角度時，從第1手臂軸114連接第2手臂軸 -6- 200832599 1 1 8的連接線和從第i手臂軸〗！ 4連接凸緣〗22的連接線 所形成的角度會成爲01，但凸緣122基於上述機構的緣 故會朝第2手臂軸1 1 8相反方向只旋繞和第1手臂軸1 1 4 相同的角度，因此工件把持裝置110的朝向是成爲從第2 手臂軸118至凸緣122的延長線上朝逆時針方向成角度冷 1的方向（參照第9圖）。此外，例如第1手臂軸114旋 繞成α2角度時，上述角度就成爲02(參照第10圖）。 因此’在進行手臂伸縮動作時，就能夠將工件把持裝置 1 1 〇的朝向維持成一定。手臂的伸縮長I*是根據第（1 )式 算出。 r = 2asin(a )...... ( 1 ) 第8圖中，昇降軸馬達124是和未圖示的減速機連結 著，利用下部昇降連桿1 1 2內部所具備的未圖示皮帶使驅 動傳達至與昇降裝配部125連結的未圖示減速機。再加上 ，昇降軸馬達124所連結的未圖示減速機和昇降支撐部 1 26所連結的未圖示減速機是由上部昇降連桿1 1 1內部所 具備的未圖示皮帶傳達驅動。昇降裝配部125所連結的未 圖示減速機和昇降支撐部1 26所連結的未圖示減速機，具 有可朝昇降軸馬達124所連結的未圖示減速機相反方向旋 轉的特性。另外，設定成昇降裝配部1 2 5旋繞中心至昇降 軸馬達1 2 4所連結的未圖示減速機旋繞中心的距離’和昇 降軸馬達124旋繞中心至昇降支撐部126所連結的未圖示 減速機旋繞中心的距離爲相等。 200832599 基於以上的構成，昇降軸馬達1 24的旋轉，會讓和昇 降軸馬達1 24連結的未圖示減速機旋轉，驅動下部昇降連 桿112內部和上部昇降連桿ni內部各具備的未圖示皮帶 ，使昇降軸馬達124所連結的未圖示減速機，和昇降支撐 部126所連結的未圖示減速機朝昇降軸馬達124所連結的 未圖示減速機相反方向旋轉，隨著昇降支撐部126的動作 ’工件把持裝置1 1 0、其所把持的玻璃基板1 0 7及控制點 123動作朝Z軸直線方向。針對機器人102的昇降，於第 1 1圖中有更詳細的圖示。圖中，圖號b是表示昇降軸馬達 1 24旋轉中心至昇降支撐部1 26所連結的未圖示減速機旋 繞中心的距離。圖號b，因是等於昇降裝配部1 2 5旋轉中 心至昇降軸馬達1 24所連結的未圖示減速機旋轉中心的距 離，所以昇降支撐部1 2 6旋轉中心和昇降軸馬達1 2 4旋轉 中心和昇降裝配部1 25旋轉中心的連接線所形成的三角形 爲等腰三角形。上述等腰三角形的底邊z是昇降裝配部 125旋轉中心至昇降支撐部126旋轉中心的距離。例如昇 降軸馬達1 24旋轉2 7時，下部昇降連桿1 1 2和Z軸零基 準127形成的角度，和從Z軸形成在上部昇降連桿111延 長線上的角度是r，保持相對於本體手臂支撐部113其Z 軸的方向。昇降量z是根據第（2)式算出。 z = 2bsin( γ )...... ( 2 ) 第12圖是圖示著從Z軸正方向看第8圖機器人102時 的狀態。旋繞軸1 3 0是和未圖示的減速機連結著。該減速 -8- 200832599 機是和第8圖所示的旋繞軸馬達1 28連結著。旋繞軸1 3 〇 是和旋繞部129連結著，旋繞部129是和本體手臂支撐部 1 1 3連結著。旋繞軸馬達1 2 8的旋轉，會讓其所連結的未 圖示減速機旋轉，使旋繞軸1 3 0旋轉。旋繞軸1 3 0的旋轉 ，會讓其所連結的旋繞部1 2 9朝旋繞正方向1 3 1或朝旋繞 負方向1 3 2旋繞。 利用以上所述的機器人執行一連貫基板搬運的流程是 使用第13圖及第14圖進行說明。第13圖是表示從Ζ軸正 方向看，將工件把持裝置110插入基板收容匣100時的機 器人狀態。將工件把持裝置11 0往基板收容匣1 00插入時 ，旋轉第1手臂軸114，朝基板收容匣100使手臂動作往 X軸正方向。一般支撐用插銷1 〇 1是於事先以工件把持裝 置1 1 〇梳狀前端部可通過的充分間隔形成配備，所以就能 夠將工件把持裝置11 〇插入在支撐用插銷1 01的間隔。當 對具備有和支撐用插銷101相同的複數支撐用插銷134的 基板收容匣1 3 3插入工件把持裝置1 1 0時，必須使工件把 持裝置1 1 〇動作成能夠朝基板收容匣1 33插入的狀態。以 工件把持裝置1 1 〇插入至基板收容匣1 3 3的狀態使旋繞部 旋繞時，基板收容匣1 3 3和工件把持裝置1 1 0會彼此干涉 ，所以首先是旋轉第1手臂軸1 1 4，直到基板收容匣1 3 3 和工件把持裝置11 〇不會彼此干涉的狀態爲止將手臂朝X 軸負方向動作。其次，對旋繞軸馬達1 28進行旋轉使旋繞 軸1 3 0旋轉，使旋繞部1 2 9旋繞。第1手臂軸1 1 4因是支 撐在旋繞部129，所以從第1手臂軸114至工件把持裝置 -9- 200832599 110’其所連結的各部都會一起旋轉。 第14圖是圖示著以上述操作收縮手臂，使旋繞部 129旋繞，將工件把持裝置11〇朝向基板收容匣133方向 。於此，只要旋轉第1手臂軸114,使工件把持裝置11〇 朝旋繞負方向132旋繞，朝基板收容匣133將手臂動作往 Y軸負方向時，就能夠將工件把持裝置110插入至基板收 容匣133 。 第15圖至第16圖是表示機器人102搬運玻璃基板 107插入至複數重疊的基板收容匣1〇〇當中任意的基板收 容匣100時的狀態。大多數的狀況，是在有限的面積內收 容多數的玻璃基板107，所以基板收容匣1〇〇都是複數重 疊。形成重疊的基板收容匣1 00，從下方開始以1段、2 段…η段…來計算時，則較第η段基板收容匣1 3 5上方的基 板收容匣例如第2段的基板收容匣就成爲第η + 2段基板收 容匣136。第15圖中，機器人102是形成以伸長手臂的 動作就能夠將工件把持裝置1 1 0插入至基板收容匣1 3 5的 狀態。如此一來，當工件把持裝置1 1 0插入至第η + 2段基 板收容匣136時，旋轉昇降軸馬達124，使昇降裝配部 125和昇降支撐部126旋轉，持續動作直到工件把持裝置 110成爲可插入第η + 2段基板收容匣136的Ζ軸方向位置（ 參照第1 6圖）。Ζ軸正方向動作後，旋轉第1手臂軸1 14 使手臂伸長將工件把持裝置110插入第η + 2段基板收容匣 1 3 6。第1 6圖是表示機器人從第1 5圖的狀態針對複數重 疊的基板收容匣將基板搬運插入至第η + 2段基板收容匣後 -10- 200832599 的狀態。 上述構成的機器人102是以手臂（第1手臂連桿108 、第2手臂109)懸臂支撐在本體手臂支撐部113，所以 手臂自重以及工件把裝置110及玻璃基板107重量的影響 - ，會造成手臂朝重力方向撓曲。近年來隨著玻璃基板的大 - 型化，以致玻璃基板的重量及對應該玻璃基板的工件把持 裝置及手臂大型化，因此上述撓曲增大，爲了將機器人的 φ 工件把持裝置正確並且迅速插入在基板收容匣內收納的玻 璃基板之間，及爲了在伸縮手臂時避免工件把持裝置把持 的玻璃基板干涉到其他基板，已開發有可對應手臂伸縮量 (水平移動量），朝撓曲方向相反的垂直方向執行修正的 技術（參照專利文獻1 )。 如上述，習知的工件把持裝置是對玻璃基板以及手臂 及工件把持裝置重力造成撓曲進行修正。 [專利文獻1]日本特開2000- 1 83 128號公報 【發明內容】 [發明欲解決之課題] 專利文獻1記載的習知工件把持裝置是對基板及手臂 ' 重力造成的靜態撓曲進行修正。但是，多數的機器人因爲 手臂伸縮動作時所承受的慣性矩關係，以致產生比靜態撓 曲還大的撓曲。 接著，使用第1 7圖及第1 8圖對手臂伸縮動作時慣性 矩產生的狀態進行說明。第1 7圖是表示機器人將基板把 -11 - 200832599 持在工件把持裝置時的重心狀態。圖號]VI是表示包括工件 把持裝置1 1 〇和玻璃基板1 0 7時的重心，重量是以圖號m (kg)表示。圖號Xg是表示手臂軸馬達115至重心Μ爲止 的X軸方向距離，圖號Zg是表示手臂軸馬達1 15至重心Μ 爲止的Ζ軸方向距離。第1 8圖是表示從第1 7圖所示手臂 軸馬達1 1 5單純式樣重心Μ的關係。手臂軸馬達1 1 5的旋 轉，以致手臂朝X軸正方向以加速度a [m/s2]伸展動作時 ，會產生並進力F1[N]。F1是根據第（3)式算出。 F 1 = m · α ..... ( 3) F 2是表示F 1造成重心承接反作用所導致的並進力。 F 1和F2的關係如第（4 )式所示。 F 1 =F2...... ( 4 ) 手臂軸馬達軸中心位置137是表示手臂軸馬達115的 中心位置，圖號N是表示由F2造成產生在手臂軸馬達軸中 心位置137周圍的慣性矩N[Nm]，其是根據第（5 )式算 出。 N = F 2 · Z g...... (5) 機器人的手臂各部及工件把持裝置是以接近完全剛體 爲理想，但多數的狀況，爲了減輕負荷及降低成本，以致 構件強度降低’雖具備剛性但接近完全剛體的狀況較少。 除了接近完全剛體的狀況以外，上述慣性矩N會造成手臂 -12- 200832599 各部及工件把持裝置產生撓曲。 第19圖是表示手臂往X軸正方向伸展動作時手臂各 部和工件把持裝置的撓曲。如使用第丨8圖進行的說明， 慣性矩是以第1手臂軸1 1 4爲中心往圖中逆時針方向施加 。第1手臂連桿108會因慣性矩而往圖中逆時針方向撓曲 。以致第2手臂軸1 1 8是從其完全剛體時的位置以第〗手 臂軸114爲中心朝圖中逆時針方向偏離。第2手臂連桿 1 0 9會因慣性矩而以第2手臂軸1 1 8爲中心朝圖中的逆時 針方向撓曲。以致凸緣1 22從其完全剛體時的位置以第2 手臂軸118爲中心朝圖中逆時針方向偏離。工件把持裝置 U 0會因慣性矩而以凸緣1 22爲中心往圖中逆時針方向撓 曲。理想的控制點1 3 9是表示手臂爲完全剛體時的控制點 位置，但以上慣性矩的影響，導致重心位置撓曲，其結果 控制點也偏離成爲控制點1 3 8所示的位置，以致z軸方向 的偏離量爲△ Z 1。 第20圖是表示從第17圖所示的手臂軸馬達115單純 式樣重心Μ的關係，以加速度a [m/s2]朝X軸負方向進行收 縮動作時，並進力F3[N]產生的狀態。並進力F3是根據和 第（3)式相同的第（6)式算出。 F3 = m· a ...... ( 6 ) 圖號F4是表示F3造成重心承接反作用所導致的並進 力。F 3和F 4的關係如第（7 )式所示。 P3 = F4...... ( 7 ) -13- 200832599 手臂軸馬達軸中心位置137是表示手臂軸馬達115的 中心位置，圖號N是表示由F4造成產生在手臂軸馬達軸中 心位置137周圍的慣性矩N[Nm]，其是根據第（8)式算 出。 N= F4.Zg ……（8) 第21圖是表示手臂往X軸負方向收縮動作時的手臂 各部和工件把持裝置的撓曲。如使用第20圖進行的說明 ，慣性矩是以第1手臂軸1 1 4爲中心往圖中順時針方向施 加。第1手臂連桿1 08會因慣性矩而往圖中順時針方向撓 曲。以致第2手臂軸1 1 8從其完全剛體時的位置以第1手 臂軸1 1 4爲中心朝圖中順時針方向偏離。第2手臂連桿 1 09會因慣性矩而以第2手臂軸1 1 8爲中心朝圖中順時針 方向撓曲。以致凸緣1 22從其完全剛體時的位置以第2手 臂軸1 1 8爲中心朝圖中順時針方向偏離。工件把持裝置 1 1 0會因慣性矩而以凸緣1 22爲中心往圖中順時針方向撓 曲。理想的控制點1 3 9是表示手臂爲完全剛體時的控制點 位置，但以上慣性矩的影響，導致重心位置撓曲，其結果 控制點也偏離成爲控制點1 40所示的位置，以致Z軸方向 的偏離量爲△ Z2。 第22圖是表示機器人將手臂朝X軸正方向動作時手 臂軸馬達的速度及控制點位置的撓曲量和時間的關係。橫 軸t是表示時間，縱軸v是表示速度，縱軸是表示控制點位 -14- 200832599 置的Z軸方向撓曲量。機器人將手臂朝X軸正方向動作時 ，手臂軸馬達會形成爲手臂軸馬達速度143所示的波形速 度。當手臂朝X軸正方向加速時，手臂軸馬達115是如手 臂軸馬達速度1 43所示進行加速，如以上所述產生慣性矩 ，導致控制點往Z軸正方向偏離。此時偏離量的時間性推 移是以加速時控制點位置的撓曲量1 44表示。手臂朝X軸 正方向從平常速度進行減速動作時，手臂軸馬達1 1 5是如 手臂軸馬達速度1 43所示從平常速度進行減速，如以上所 述產生慣性矩，導致控制點往Z軸負方向偏離。此時偏離 量的時間性推移是以加速時控制點位置的撓曲量1 45表示 〇 基於上述理由產生的手臂伸縮時的撓曲，會導致機器 人的工件把持裝置在出入於基板收容匣內收納的基板之間 時及工件把持裝置所把持的基板出入時，以及出入於基板 處理部時於各部產生干涉，恐怕會造成基板破損。其對策 是可考慮加寬基板收容匣的收容基板間隔或爲了讓慣性矩 變小而降低手臂伸縮動作的加減速度，但如此一來就會分 別產生基板收容匣收容片數減少或基板搬運時間加長等不 利狀況。此外，也可考慮於事先製作可細腻控制機器人動 作的動作程式以使手臂伸縮時的撓曲不致於干涉到基板收 容匣或基板處理部，但手臂伸縮時的撓曲會因工件把持裝 置或其所把持的玻璃基板的重量、重心而異，所以當工件 把持裝置或其把持的玻璃基板有所變更時先前已製成的動 作程式則必須全部重新製作。近年來，基於玻璃基板有更 -15 - 200832599 加大型化，液晶或電漿顯示器的需求變高趨勢的背景，生 產速度要求更快，以致上述撓曲有增大的傾向。 本發明是有鑑於上述問題點而爲的發明，其目的是提 供一種不降低手臂伸縮動作加減速度就能夠使玻璃基板出 * 入於基板收容匣以及基板處理部時不會有其他干涉的機器 - 人裝置。 [用以解決課題之手段] 爲解決上述問題，本發明是構成如下述。 申請專利範圍第1項的發明是一種工件搬運裝置，其 具備有：機器人，該機器人具備有前端裝備著工件把持或 載置用工件把持裝置的手臂，和可使上述手臂朝水平方向 伸縮的手臂軸馬達，和上述手臂昇降用的昇降軸馬達；及 可對上述機器人的上述手臂軸馬達及上述昇降軸馬達進行 驅動控制的控制裝置，其特徵爲，具備有修正手段，該修 正手段是根據上述手臂軸馬達驅動使上述手臂伸縮時的上 述手臂和上述工件把持裝置或上述手臂和工件把持裝置和 上述工件的水平方向移動加減速度算出慣性矩造成的上述 機器人控制點位置垂直方向的撓曲量，以該撓曲量驅動昇 降軸朝垂直方向修正控制點位置。 申請專利範圍第2項的發明是於申請專利範圍第1項 的工件搬運裝置中，其特徵爲，上述控制裝置具備存儲手 段，於事先登錄有：上述機器人的機器人資訊；上述工件 把持裝置的工件把持裝置資訊；上述工件的工件資訊；及 -16- 200832599 其他的諸參數，其是根據上述諸參數算出上述撓曲量。 申請專利範圍第3項的發明是於申請專利範圍第1項 或第2項的工件搬運裝置中，其特徵爲，針對數目的上述 工件把持裝置，分配出各把持裝置識別件對該把持裝置識 ' 別件加以關聯使上述工件把持裝置資訊形成登錄，在算出 • 上述撓曲量時根據上述把持裝置識別件所檢索的上述工件 把持裝置資訊算出上述撓曲量。 φ 申請專利範圍第4項的發明是於申請專利範圍第1項 或第2項的工件搬運裝置中，其特徵爲，針對複數的上述 工件’分配出各工件識別件對該工件識別件加以關聯使上 述工件資訊形成登錄，在算出上述撓曲量時根據工件識別 件所檢索的上述工件資訊算出上述撓曲量。 申請專利範圍第5項的發明是於申請專利範圍第i項 的工件搬運裝置中，其特徵爲，上述機器人是液晶玻璃基 板搬運用水平多關節機器人。 [發明效果] 根據以上構成時，本發明的控制裝置，在讓具有手臂 和昇降軸的機器人手臂動作時，計算出慣性矩造成的手臂 撓曲，以該撓曲形成的控制點位置偏離量使昇降軸朝Z軸 方向動作修正控制點位置，藉此就能夠將控制點的垂直方 向軌跡保持成一定。 【實施方式】 -17- 200832599 [發明之最佳實施形態] 以下，參照圖面對本發明的實施形態進行說明。 (第1實施形態） 本發明是以具備有第7圖及第8圖所示構成，應用在 已配備有垂直昇降軸的水平多關節機器人的工件搬運裝置 進行說明。 於控制裝置1 0 4所配備的未圖示存儲手段，事先輸入 機器人1 02的參數。於上述存儲手段登錄機器人資訊：第 8圖所示第1手臂軸1 14至第2手臂軸1 1 8的距離[m]; 第2手臂軸118至凸緣122的距離[m];手臂軸馬達115 至凸緣122的Z軸方向距離[m];昇降裝配部125至昇降軸 馬達124的距離[m];及昇降軸馬達124至昇降支撐部 126的距離[m]，和登錄工件把持裝置資訊：工件把持裝 置的重量[kg];工件把持裝置的凸緣122至工件重心Μ的 X軸方向距離[m];工件把持裝置的凸緣122至工件重心Μ 的Ζ軸方向距離[m];工件把持裝置的凸緣122至控制點的 X軸方向距離[m];工件把持裝置的凸緣122至控制點的Y 軸方向距離[m];及工件把持裝置的凸緣122至控制點的Z 軸方向距離[m]，和登錄工件資訊：所要把持的工件重量 [kg];所要把持的工件控制點的凸緣122至工件重心Μ的 X軸方向距離[m];及所要把持的工件控制點的凸緣122至 工件重心Μ的Z軸方向距離[m]，和登錄工件和工件把持裝 置上的剛性値K[Nm/irad]，以及登錄控制裝置將動作指令 -18- 200832599 輸出至各馬達時的控制週期的指令週期時間[S]的諸參數 〇 工件把持裝置或工件爲複數種存在時，對其各別分配 出固有的編號等識別件（把持裝置識別件、工件識別件） ' ’針對各識別件登錄上述的參數。該等的參數是於動作時 • 做爲計算使用，但其是由識別件進行檢索。 諸參數是按下示教手段106所具備的按鈕進行輸入， Φ 但其是利用未圖示的外部記憶手段透過通訊手段等存儲在 控制裝置1 04的存儲手段。另，爲了讓工件搬運裝置達到 所期望的動作及控制還需要其他的參數，但與本發明無關 所以省略該等參數的說明。 機器人102是根據事先存儲在存儲手段的動作程式， 或是按下已具備有示教手段106的複數按鈕將動作指令透 過纜線1 05輸入至控制裝置1 04，然後透過纜線1 〇3傳至 各馬達以執行動作。 φ 應用本發明以複數軸構成的機器人的動作是使用第1 圖的流程圖進行說明。 於動作程式記載著動作時所需的工件把持裝置的編號 (識別件）和其所把持的工件編號（識別件）。首先，爲 了讓指定的動作程式執行動作選擇該作業程式，使包括在 作業程式內的識別件所參照的參數經檢索讀取。 另一方面，於示教手段操作執行機器人1 〇 2動作的示 教方式’在按下具備有示教手段1 0 6的按鈕將動作指令透 過纜線1 0 5輸入至控制裝置1 〇 4時，傳達所具備的工件把 -19- 200832599 持裝置的編號（識別件）和動作時其所把持的工件編號（ 識別件）。 凸緣122至工件重心μ的X軸方向距離[m]和Z軸方向 距離[m] ’是可使用動作時所需的工件把持裝置的凸緣 1 2 2至重心Μ的X軸方向距離[m ]，和動作時所需的工件把 持裝置的凸緣122至重心μ的Z軸方向距離[m]，和動作時 把持工件的凸緣122至重心μ的X軸方向距離，和動作 時把持工件的凸緣122至重心μ的Z軸方向距離[m]算出。 從控制裝置對各馬達輸出指定的控制週期1週期量的 動作指令後的第1手臂軸1 1 4至凸緣1 22的X軸方向距離 是使用事先存儲在存儲手段的第1手臂軸114至第2手臂 軸118的距離[m]，和第2手臂軸118至凸緣122的距離 [m]以幾何學算出。例如於具備有第8圖、第9圖及第j 〇 所示機構的手臂狀況，第1手臂軸1 14至凸緣122的X軸 方向距離是根據上述說明的第（1 )式就能夠算出。此外 ’第1手臂軸114和手臂軸馬達115因是於X軸方向配置 在同一位置，所以第1手臂軸114至凸緣122的X軸方向 距離[m]是等於手臂軸馬達1 15至凸緣122的X軸方向距離 [m] 〇 (步驟1)對凸緣122至工件重心Μ的X軸方向距離 [m]和手臂軸馬達115至凸緣122的X軸方向距離[m]進行 加算，接著對從控制裝置對各馬達輸出1週期量的動作指 令後的手臂軸馬達1 1 5至工件重心Μ的X軸方向距離[m]， 和凸緣122至工件重心Μ的Z軸方向距離和事先存儲在 -20- 200832599 存儲手段的手臂軸馬達115至工件重心“的2軸方向距離 [m]進行加算’藉此算出從控制裝置對各馬達輸出1週期 量的動作指令後的手臂軸馬達1 1 5至工件重心μ的Z軸方 向距離[m]。 • (步驟2 )從控制裝置對各馬達輸出1週期份量的動 • 作指令前的第1手臂軸至凸緣122的X軸方向距離是 使用事先存儲在存儲手段的第1手臂軸114至第2手臂軸 φ 118的距離[m]，和第2手臂軸118至凸緣122的距離[m] 以幾何學就能夠算出。例如於具備有第8圖、第9圖及第 1 〇所示機構的手臂狀況，第1手臂軸1 1 4至凸緣1 2 2的X 軸方向距離是根據上述說明的第（1 )式就能夠算出。 根據以上，對凸緣122至工件重心Μ的X軸方向距離 [m]和手臂軸馬達115至凸緣122的X軸方向距離[m]進行 加算，就能夠算出從控制裝置對各馬達輸出1週期量的動 作指令前的手臂軸馬達1 1 5至工件重心Μ的X軸方向距離 φ [m]。 (步驟3 )對步驟1和步驟2所算出的手臂軸馬達 1 15至工件重心Μ的X軸方向距離[m]差値進行計算。即， ' 算出工件重心Μ的X軸方向移動距離。 _ (步驟4 )將步驟3所算出的重心的X軸方向移動距 離除以事先存儲在存儲手段的控制裝置對各馬達輸出動作 指令時的週期時間[s]二次方藉此計算出加減速度a [m/s2] ο (步驟5 )對登錄在上述控制裝置的動作時所需工件 -21 - 200832599 把持裝置的重量[kg]和動作時所把持的工件的重量[kg]進 行加算，算出較凸緣1 22爲前端部的總重量’根據步驟4 所算出的加減速度a [m/s2]，利用第（9 )式算出並進力 F[N]。 F = m· a ...... (9) (步驟6 )使用步驟1所算出的從控制裝置對各馬達 輸出1週期量的動作指令後的手臂軸馬達1 1 5至重心Μ的 Ζ軸方向距離[m]，和步驟5所算出的並進力F[N]的反作用 力（値是和並進力F相等），根據第（10 )式算出慣性矩 N[Nm]。 N = F *Zg...... (10) (步驟7)使用動作時形成把持狀態的工件把持裝置 上的剛性値K[Nm/rad]，和步驟6所算出的慣性矩N [Nm] ，根據第（11)式算出撓曲角度φ [rad]。 φ = N / K...... (11) 於此所算出的撓曲角度φ是圖示在第2圖及第3圖。 第2圖爲表示手臂朝X軸正方向動作時的撓曲角度φι。 第3圖爲表示手臂朝X軸負方向動作時的撓曲角度φ2。 第1手臂軸1 1 4的旋繞中心，和手臂的各部及工件把持裝 置1 1 0爲完全剛性體時通過其控制點平行於工件把持裝置 1 1 〇的直線的交點爲P點時，撓曲角度分別是下述兩直線 -22- 200832599 形成的角度，即通過p點和控制點的直線，和手臂各部和j 工件把持裝置110的撓曲造成偏離的控制點138和p點的 連接直線所形成的角度。 撓曲角度Φ，在第1手臂軸1 14的旋繞中心，和手臂 的各部及工件把持裝置1 1 0爲完全剛性體時通過其重心位 置平行於工件把持裝置110的直線的交點爲p點時，又等 於下述兩直線形成的角度，即通過P點和重心位置1 4 1的 直線’和手臂各部及工件把持裝置1 1 〇的撓曲造成偏離的 重心位置1 42和P點的連接直線所形成的角度。 (步驟8)使用事先存儲在存儲手段的第1手臂軸 114至弟2手臂軸118的距離[m]，和第2手臂軸118至 凸緣122的距離[m]，和手臂軸馬達1 15的角度，以幾何 學算出從控制裝置對各馬達輸出1週期量的動作指令後的 第1手臂軸114至凸緣122的X軸方向距離（手臂伸縮長 )。例如於具備有第8圖、第9圖及第1 〇圖所示機構的 手臂狀況’第1手臂軸114至凸緣122的X軸方向距離是 根據上述說明的第（1 )式就能夠算出。 (步驟9)對步驟8所算出的手臂伸縮長，和工件把 持裝置的凸緣122至控制點的X軸方向距離[m]進行加算， 算出桌1手臂軸144至控制點的距離化^]，使用步驟7所 算出的撓曲角度Φ [rad]算出撓曲量△ z[m]。撓曲量△ Z[m]是根據第（12)式算出。 Δ Z [m] = Rsin( φ )...... ( 12) -23 - 200832599 (步驟ίο)將手臂的各部視爲完全剛體，以幾何學 算出從控制裝置對各馬達輸出1週期量的動作指令後昇降 軸的昇降量[m]，對工件把持裝置的凸緣122至控制點的Z 軸方向距離[m]和上述昇降量[m]進行加算，計算出從控制 裝置對各馬達輸出1週期量的動作指令後的控制點Z軸方 向位置[m]，減去步驟9所算出的撓曲量[m]，將藉此算出 的値視爲已經修正的目標控制點Z軸方向位置Zc[m]。 (步驟1 1 )從控制裝置對各馬達輸出1週期量的動 作指令後，使用事先存儲在存儲手段的昇降裝配部1 25至 昇降軸馬達124的距離[m]，和昇降軸馬達124至昇降支 撐部1 26的距離[m]，以幾何學算出在只以昇降軸朝步驟 10所算出之已修正的目標控制點Z軸方向位置Zc[m]動作 時昇降軸的各馬達角度。例如於具備由第1 1圖所示機構 的昇降軸狀況，事先存儲在存儲手段的昇降裝配部丨25至 昇降軸馬達124的距離[m]’和昇降軸馬達124至昇降支 撐邰1 2 6的距離[m ]相等，將該値爲b時，朝已修正的目汽 控制點Z軸方向位置Zc[m]動作的昇降軸的昇降軸馬達角度 r是根據第（2)式變形式的第（13)式算出。 7 = asin ( Zc/2b ) ······ ( 13) (步驟12 )將步驟1 1所算出的昇降軸馬達角度γ相 當的動作指令視爲新的昇降軸馬達動作指令，透過續，線 103輸出至機器人的各軸馬達。 按照以上的處理經過使輸出至各馬達的動作指令成爲 -24- 200832599 經過修正的動作指令，結果，讓目標控制點位置獲得修正 。第4圖是表示第22圖所示機器人將手臂朝X軸正方向 動作時的手臂軸馬達的速度1 4 3，和控制點的位置和時間 的關係，和修正量。橫軸t是表示時間，縱軸v是表示速度 ’縱軸Z是表示控制點位置的Z軸方向撓曲量144、145。 修正量是等於步驟9所算出的撓曲量ΔΖ圖號其反轉後的 圖號，手臂朝X軸正方向加速時的修正量是加速時的修正 1 3，手臂朝X軸正方向減速時的修正量是減速時的修正：ι 4 第5圖爲表示手臂朝X軸正方向加速動作時，撓曲量 △ Z的修正狀態。由於撓曲量△ Z和修正量的加算値是成 爲零，因此已修正的控制點1 5和理想的控制點1 3 8的Z軸 方向位置相等，使控制點的Z軸方向位置保持成一定。此 外，第6圖爲表示手臂朝X軸負方向加速動作時，撓曲量 △ Z的修正狀態。由於撓曲量△ Z和修正量的加算値是成 爲零，因此已修正的控制點1 6和理想的控制點1 3 9的Z軸 方向位置相等，使控制點的Z軸方向位置保持成一定。 藉由對控制裝置的動作指令的輸出週期執行該一連貫 的處理流程，能夠經常對垂直方向修正慣性矩造成的撓曲 。此外，該撓曲的修正因是不使用如實施形態所示般複雜 的運算，所以利用執行機器人控制的控制裝置所具備的微 電腦是能夠更加縮短運算時間，因此不會影響到機器人的 動作控制處理。 另外，於複數的基板收容匣混在有重量不同的複數玻 -25- 200832599 璃基板時，準備好要把持的工件識別件（編號）的不同動 作程式，配合要把持的玻璃基板執行動作程式就能夠不產 生慣性矩造成的撓曲進行玻璃基板的搬運。 以上是本發明實施用的一個例子，手臂，例如也可以 是馬達和齒軌&小齒輪或滾珠螺桿構成的直動軸，或也可 以是以電磁閥控制的空氣壓或油壓爲動力的直動軸，或也 可以構成爲第1手臂軸114和第2手臂軸118和凸緣122 分別具備有馬達藉此形成個別旋繞，可朝X軸方向內插動 作，並且可朝Y軸方向及Z軸方向動作。此時，手臂只要 具備有可朝X軸方向直線內插動作的機構即可。 此外，昇降軸例如可以是齒軌&小齒輪或滾珠螺桿構 成的直動軸，或也可以是以電磁閥控制的空氣壓或油壓爲 動力的直動軸，或也可以構成爲除了昇降軸馬達124以外 還於昇降裝配部125和昇降支撐部126具備馬達藉此形成 個別旋繞，可朝Z軸方向內插動作，並且可朝X軸方向及Y 軸方向動作。此時，昇降軸只要具備有可朝Z軸方向直線 內插動作的機構即可。第7圖及第8圖及第12圖及第1 3 圖是圖示著一般裝置的例子，但不一定要具備有旋繞軸 130 〇 另外，第7圖記載的示教手段1 06具備有未圖示的外 部記憶裝置，但示教手段1 06例如也可以是具備有外部記 憶裝置的泛用電腦或個人電腦。此外，於存儲手段若事先 存儲有動作程式時，可不具備示教手段1〇6。第7圖中記 載的纜線1 05是表示形成電連接的有線傳達，但其也可構 -26- 200832599 成爲例如是使用電波的無線手段。 本發明，由於是可應用在水平方向和垂直方向具備自 由度的機器人，因此還可應用在例如大多數的產業用機器 人所使用的垂直6軸多關節機器人。例如於壓製間抓取用 途，對持續動作的壓製機是必須高速並且正確搬運工件。 壓製機的工件搬入口因是形成爲工件搬入時最低極限的尺 寸，所以高速搬運時的慣性矩造成的撓曲，可以說是會導 致工件和壓製機彼此干涉。但是，應用本發明時，藉由對 工件搬運時產生的撓曲量進行計算，針對從各部爲完全剛 體時的位置因撓曲而朝向偏離的方向，是將上述所算出的 撓曲量利用6自由度進行直線內插動作就能夠消除直線性 的撓曲量。 [產業上之可利用性] 本發明是可應用在爲了以高速度執行長行程動作，以 致動性撓曲產生的搬運用途，特別是可應用在對一端進行 動作以另一端搬運工件之用途。 【圖式簡單說明】 第1圖爲本發明流程圖。 第2圖爲手臂朝X軸正方向動作時的撓曲角度φΐ形 成圖。 第3圖爲手臂朝X軸負方向動作時的撓曲角度φ2形[Technical Field] The present invention relates to a workpiece that is conveyed by a workpiece held by a workpiece holding device by a cantilever-supporting arm that is supported in a support portion in a horizontal direction, Control of deviation from the deflection of the arm. A workpiece handling device that corrects the point position. Φ [Prior Art] In a semiconductor manufacturing system for substrate processing such as a glass substrate for liquid crystal or a semiconductor wafer, a processing unit is disposed in each processing step, and the substrate is transported to the processing unit in order to apply a substrate to the substrate. Coherent processing. - Fig. 7 is a view showing the configuration of the workpiece conveying device. Here, the robot 102 in which the complex-numbered axis is configured is inserted into the glass substrate 107 when the substrate housing 100 of the plurality of substrates after the continuity processing is temporarily stored. The robot 102 supplies the motor φ drive power from the control device 104 via the cable 103 to perform an action. The control device 104 is connected to the teaching means 106 via the cable 1 〇 5. The teaching means 106 has a plurality of buttons which can be output to the control unit 104 via the cable 105 by pressing each button. The control device 104 outputs the motor drive power to the robot 102 via the cable 103 in accordance with the above instruction. The teaching means 1 06 is, for example, a general-purpose computer or sometimes a personal computer. The substrate housing cassette 1 is provided with a support plug 101 for holding or supporting the glass substrate 107. Fig. 8 is a view showing the configuration of the robot 102. The first arm link 1〇8 is supported by the winding portion 1 29 via the first arm shaft 1 1 4 . In the first arm link -4 - 200832599, the arm 108 is provided inside the rod 108, and is connected to the arm shaft reducer 1 16 . The rotation of the arm shaft motor 1 15 rotates the first arm shaft 114 coupled to the arm shaft reducer 116. However, since the first arm shaft 114 is supported by the winding portion 129, the first arm link 108 is 1 The arm shaft 1 1 4 is centered for winding. The first link belt 117 is provided inside the first arm link 1〇8, and the power is transmitted from the arm shaft reducer 116 to the second arm shaft reducer 119 to which the second arm shaft 118 is coupled. The second arm shaft reducer 119 has a characteristic that it can rotate in the opposite direction to the arm shaft reducer 1 1. That is, the rotation of the arm shaft motor 1 15 5 drives the first link belt 1 1 7 , the second arm shaft reducer 119 rotates, and the second arm shaft 118 connected thereto rotates to make the second arm link 109 is wound in the opposite direction to the first arm shaft 114 around the second arm shaft 118. A second link belt is provided inside the second arm link 109, and power can be transmitted from the second arm shaft reducer 119 to the flange reducer 1 21. The flange reducer 12 1 has a characteristic of being rotatable in the opposite direction to the second arm shaft reducer 1 1 9 . Further, the reduction ratio of each of the reduction gears (the arm shaft reducer 16, the second arm shaft reducer 119, and the flange reducer 121) is set to the rotation angle of the first arm shaft 1 14 and the rotation angle of the flange U 2 . equal. Further, the distance from the center of the first arm shaft 1 14 to the center of the second arm shaft 1 1 8 is set to be equal to the distance from the center of the second arm shaft 1 1 8 to the center of the flange 1 22 . Based on the above mechanism, the rotation of the arm shaft motor 1 15 5 causes the first arm shaft 1 14 connected to the arm shaft reducer 1 16 to rotate, and also passes through the first link belt from the arm shaft reducer 116. 117 transmits power to rotate the 2 -5-200832599 arm shaft reducer 119. The rotation of the second arm shaft reducer 119 causes the second arm shaft 118 connected thereto to rotate in the opposite direction of the first arm shaft 114, and also transmits the second link belt 1 from the second arm shaft reducer 119. 20 conveys power to the flange reducer! 2 1 rotation. The rotation of the flange reducer 121 causes the flange 22 connected thereto to rotate in the opposite direction of the first arm shaft 118 toward the first arm shaft 1 1 4 in the opposite direction. Further, since the rotation angle of the first arm shaft 1 1 4 and the rotation angle of the flange 1 22 are equal, the distance from the center of the first arm shaft 1 1 4 to the center of the second arm shaft 1 1 8 and the second arm shaft 1 1 8: The distance from the center of the winding to the flange 1 22 is equal to the center of the flange. The workpiece holding device 1 10, the glass substrate 107 held or placed by the workpiece holding device 1 10, and the robot 102 are operated by the control device 1〇4. The imaginary point of the control object, that is, the control point 1 2 3, forms a linear motion in the X-axis direction. The arm (the first arm link and the second arm link) of the robot 102 are shown in Fig. 9 and Fig. 1 in a telescopic state. Fig. 9 and Fig. 10 are diagrams showing the state of the arm extension when the robot of Fig. 8 is viewed from the positive direction of the Z axis. In the figure, the figure a is the distance from the center of the first arm axis U 4 to the center of the second arm shaft 1 1 8 . Based on the figure number a being equal to the distance from the center of the second arm shaft 1 1 8 to the center of the flange 1 22, the first arm shaft 1 1 4 is wound around the center and the second arm shaft 1 1 8 is wound around the center and the flange 1 22 is wound. The triangle formed by the central connecting line becomes the isosceles triangle shown in the figure. The bottom edges r 1 and r 2 of the above-described isosceles triangle are the distance from the center of the first arm shaft 1 1 4 to the center of the flange 122 (the length of expansion and contraction of the arm). For example, when the third arm shaft 114 is rotated by the angle α, the second arm shaft is connected from the first arm shaft 114 to the connection line of the second arm shaft -6-200832599 1 1 8 and from the i-th arm shaft! 4 The angle formed by the connecting line of the connecting flange 22 becomes 01, but the flange 122 is only rotated at the same angle as the first arm shaft 1 1 4 in the opposite direction of the second arm shaft 1 1 8 based on the above mechanism. Therefore, the orientation of the workpiece holding device 110 is a direction that is angled one by one from the second arm shaft 118 to the extension line of the flange 122 in the counterclockwise direction (see FIG. 9). Further, for example, when the first arm shaft 114 is rotated at an angle of α2, the angle is 02 (see Fig. 10). Therefore, the orientation of the workpiece holding device 1 1 〇 can be maintained constant during the arm stretching operation. The telescopic length I* of the arm is calculated according to the formula (1). r = 2asin(a ). . . . . . (1) In the eighth drawing, the lift shaft motor 124 is coupled to a speed reducer (not shown), and the drive is transmitted to the lift attachment unit 125 by a belt (not shown) provided in the lower lift link 1 1 2 . The gear unit is not shown. Further, a speed reducer (not shown) to which the speed reducer motor (not shown) and the lift support portion 126 are connected is connected and driven by a belt (not shown) provided in the upper lift link 1 1 1 . The speed reducer (not shown) to which the speed reducer and the elevation support unit 126 are connected to the lift attachment unit 125 has a characteristic that the speed reducer that is connected to the lift shaft motor 124 is rotated in the opposite direction. In addition, the distance "the distance from the center of the winding attachment center 1 2 5 to the winding center of the unillustrated speed reducer connected to the lift shaft motor 1 24" and the winding center of the lift shaft motor 124 to the lift support portion 126 are not shown. The distance between the reducer and the center of the reducer is equal. According to the above configuration, the rotation of the lift shaft motor 14 is rotated by a speed reducer (not shown) connected to the lift shaft motor 146, and the inside of the lower lift link 112 and the upper lift link ni are driven. The display belt rotates a speed reducer (not shown) connected to the lift shaft motor 124 and a speed reducer (not shown) connected to the lift support unit 126 in a direction opposite to a speed reducer (not shown) connected to the lift shaft motor 124. The operation of the support portion 126 "the workpiece holding device 1 10 0, the glass substrate 107 and the control point 123 held by it are oriented in the Z-axis linear direction. The lifting of the robot 102 is illustrated in more detail in Figure 11. In the figure, the figure b is a distance indicating the center of rotation of the lift shaft motor 1 24 to the center of the unillustrated speed reducer to which the lift support portion 126 is coupled. The reference number b is equal to the distance from the center of rotation of the lifting assembly portion 1 2 5 to the rotation center of the unillustrated speed reducer connected to the lifting shaft motor 1 24, so the lifting support portion 1 2 6 rotation center and the lifting shaft motor 1 2 4 The triangle formed by the connecting line of the center of rotation of the center of rotation and the center of rotation of the lifting assembly portion is an isosceles triangle. The bottom edge z of the above-described isosceles triangle is the distance from the center of rotation of the lifting assembly portion 125 to the center of rotation of the lifting support portion 126. For example, when the lift shaft motor 1 24 rotates 2 7 , the angle formed by the lower lift link 1 1 2 and the Z-axis zero reference 127, and the angle formed from the Z-axis on the extension line of the upper lift link 111 is r, which is maintained relative to the body. The arm support portion 113 has its Z-axis direction. The amount of lift z is calculated according to the formula (2). z = 2bsin( γ ). . . . . . (2) Fig. 12 is a view showing a state in which the robot 102 of Fig. 8 is viewed from the positive Z direction. The winding shaft 1 30 is coupled to a speed reducer (not shown). The deceleration -8-200832599 is coupled to the revolving shaft motor 1 28 shown in Fig. 8. The winding shaft 1 3 〇 is coupled to the winding portion 129, and the winding portion 129 is coupled to the body arm supporting portion 1 1 3 . The rotation of the winding shaft motor 1 2 8 causes the unillustrated speed reducer to be rotated to rotate the winding shaft 1 130. The rotation of the winding shaft 130 will cause the connected winding portion 1 2 9 to be wound in the positive direction of the winding 1 3 1 or the winding in the negative direction 1 3 2 . The flow of performing a continuous substrate conveyance by the above-described robot will be described using Figs. 13 and 14. Fig. 13 is a view showing the state of the robot when the workpiece holding device 110 is inserted into the substrate housing 100 as seen from the positive direction of the x-axis. When the workpiece holding device 110 is inserted into the substrate housing 100, the first arm shaft 114 is rotated, and the arm 100 is placed toward the substrate to move the arm in the positive X-axis direction. In general, the support pin 1 〇 1 is provided at a sufficient interval so that the front end portion of the workpiece holding device 1 1 can pass, so that the workpiece holding device 11 〇 can be inserted into the interval of the support pin 101. When the substrate holding device 1 1 3 having the same plurality of supporting pins 134 as the supporting pins 101 is inserted into the workpiece holding device 1 1 0, the workpiece holding device 1 1 must be operated to be inserted into the substrate housing 1 33. status. When the workpiece holding device 1 1 〇 is inserted into the substrate housing 匣 1 3 3 and the winding portion is wound, the substrate housing 匣 13 3 and the workpiece holding device 1 10 0 interfere with each other, so that the first arm shaft 1 1 is first rotated. 4. The arm is moved in the negative X direction until the substrate receiving cassette 13 3 and the workpiece holding device 11 do not interfere with each other. Next, the winding shaft motor 1 28 is rotated to rotate the winding shaft 1 130, and the winding portion 1 2 9 is wound. Since the first arm shaft 1 1 4 is supported by the winding portion 129, the respective portions connected from the first arm shaft 114 to the workpiece holding device -9-200832599 110' rotate together. Fig. 14 is a view showing the contraction of the arm by the above operation, and the winding portion 129 is wound to guide the workpiece holding device 11 toward the substrate housing 133. Here, when the first arm shaft 114 is rotated, the workpiece holding device 11 is wound in the winding negative direction 132, and the arm holding device 133 is moved in the negative direction of the Y-axis, the workpiece holding device 110 can be inserted into the substrate.匣133. Fig. 15 to Fig. 16 show a state in which the robot 102 transports the glass substrate 107 to any of the plurality of substrate housings 100 that are stacked in a plurality of stacked substrates. In most cases, a large number of glass substrates 107 are accommodated in a limited area, so the substrate housing 匣1〇〇 is a complex overlap. When the stacked substrate accommodating 匣100 is formed from the lower side, the first substrate is accommodated in the first stage, the second stage, the η segment, and the substrate is placed on the substrate above the first n-stage substrate accommodating 匣1 3 5, for example, the second stage substrate accommodating 匣It becomes the η + 2 stage substrate housing cassette 136. In Fig. 15, the robot 102 is in a state in which the workpiece holding device 1 10 0 can be inserted into the substrate housing cassette 1 3 5 by the action of extending the arm. As a result, when the workpiece holding device 110 is inserted into the η + 2 stage substrate housing 136, the lifting shaft motor 124 is rotated to rotate the lifting assembly 125 and the lifting support portion 126, and the operation is continued until the workpiece holding device 110 becomes The position of the η + 2 stage substrate housing cassette 136 in the x-axis direction can be inserted (see Fig. 16). After the x-axis is moving in the positive direction, the first arm shaft 1 14 is rotated to extend the arm, and the workpiece holding device 110 is inserted into the η + 2 stage substrate housing 匣 1 3 6 . Fig. 16 is a view showing a state in which the robot inserts the substrate into the η + 2nd stage substrate 匣 -10- 200832599 from the state of Fig. 5 for the substrate stacking of the plurality of overlapping substrates. The robot 102 having the above configuration is supported by the arm (the first arm link 108 and the second arm 109) by the arm support portion 113, so that the weight of the arm and the weight of the workpiece handling device 110 and the glass substrate 107 may cause an arm. Flexing in the direction of gravity. In recent years, as the size of the glass substrate has increased, the weight of the glass substrate and the workpiece holding device and the arm corresponding to the glass substrate have increased in size, so that the above-described deflection is increased, and the robot's φ workpiece holding device is inserted correctly and quickly. The glass substrate accommodated in the substrate housing cassette and the glass substrate held by the workpiece holding device are prevented from interfering with other substrates when the arm is stretched, and the amount of expansion and contraction of the arm (horizontal movement amount) is developed, and the direction of deflection is reversed. The technique of performing correction in the vertical direction (refer to Patent Document 1). As described above, the conventional workpiece holding device corrects the deflection of the glass substrate and the gravity of the arm and the workpiece holding device. [Problem to be Solved by the Invention] The conventional workpiece holding device described in Patent Document 1 corrects the static deflection caused by the gravity of the substrate and the arm. . However, most robots have a moment of inertia that is subjected to the telescopic movement of the arm, resulting in a deflection greater than the static deflection. Next, the state in which the moment of inertia occurs during the arm expansion and contraction operation will be described using Figs. 7 and 18. Fig. 17 is a view showing the state of gravity of the robot when the substrate is held by the workpiece holding device -11 - 200832599. The figure VI is the center of gravity when the workpiece holding device 1 1 〇 and the glass substrate 1 0 7 are included, and the weight is represented by the figure number m (kg). The reference numeral Xg is the distance in the X-axis direction from the arm shaft motor 115 to the center of gravity ,, and the reference numeral Zg is the distance in the x-axis direction from the arm shaft motor 1 15 to the center of gravity Μ. Fig. 18 is a view showing the relationship between the simple center of gravity of the arm shaft motor 1 1 5 shown in Fig. 7 . When the arm shaft motor 1 1 5 is rotated so that the arm is extended in the positive direction of the X-axis with the acceleration a [m/s2], a force F1 [N] is generated. F1 is calculated according to the formula (3). F 1 = m · α . . . . . (3) F 2 is the force of the force caused by F 1 causing the center of gravity to take over the reaction. The relationship between F 1 and F 2 is as shown in the formula (4). F 1 =F2. . . . . . (4) The arm shaft motor shaft center position 137 is the center position of the arm shaft motor 115, and the figure N is the moment of inertia N[Nm] generated by the F2 around the arm shaft motor shaft center position 137, which is according to the (5) Formula is calculated. N = F 2 · Z g. . . . . . (5) It is preferable that each arm of the robot and the workpiece holding device are close to a completely rigid body. However, in many cases, in order to reduce the load and reduce the cost, the strength of the member is lowered, and the rigidity is close to a completely rigid body. In addition to the condition of approaching a completely rigid body, the above moment of inertia N causes deflection of the arm -12-200832599 parts and the workpiece holding device. Fig. 19 is a view showing the deflection of each arm portion and the workpiece holding device when the arm is extended in the positive X-axis direction. As explained using Fig. 8, the moment of inertia is applied counterclockwise in the figure centering on the first arm shaft 1 1 4 . The first arm link 108 is deflected counterclockwise in the drawing due to the moment of inertia. Therefore, the second arm shaft 1 18 is offset from the position of the fully rigid body in the counterclockwise direction about the arm shaft 114 in the figure. The second arm link 1 0 9 is deflected in the counterclockwise direction in the drawing centering on the second arm shaft 1 1 8 due to the moment of inertia. The flange 1 22 is offset counterclockwise from the center of the second arm shaft 118 from the position when it is completely rigid. The workpiece holding device U 0 is deflected counterclockwise from the center of the flange 12 by the moment of inertia. The ideal control point 1 3 9 is the position of the control point when the arm is completely rigid, but the influence of the above moment of inertia causes the position of the center of gravity to flex, and as a result, the control point also deviates from the position shown as the control point 138. The amount of deviation in the z-axis direction is Δ Z 1 . Fig. 20 is a view showing a state in which the force F3 [N] is generated when the acceleration a [m/s2] is contracted in the negative X-axis direction from the simple center of gravity of the arm shaft motor 115 shown in Fig. 17 . . The parallel force F3 is calculated based on the same equation (6) as the equation (3). F3 = m· a . . . . . . (6) Figure F4 is the force that results from the reaction of the center of gravity caused by F3. The relationship between F 3 and F 4 is as shown in the formula (7). P3 = F4. . . . . . (7) -13- 200832599 The arm shaft motor shaft center position 137 is the center position of the arm shaft motor 115, and the figure N is the moment of inertia N[Nm] generated by the F4 around the arm shaft motor shaft center position 137, It is calculated according to the formula (8). N= F4. Zg (8) Fig. 21 is a view showing the deflection of each arm portion and the workpiece holding device when the arm is contracted in the negative direction of the X-axis. As explained using Fig. 20, the moment of inertia is applied clockwise in the figure centering on the first arm shaft 1 1 4 . The first arm link 108 will flex clockwise in the drawing due to the moment of inertia. Therefore, the position of the second arm shaft 1 1 8 is shifted clockwise from the position of the first arm shaft 1 1 4 in the clockwise direction. The second arm link 1 09 is deflected clockwise in the figure centering on the second arm shaft 1 1 8 due to the moment of inertia. The flange 1 22 is offset clockwise from the position of the second rigid shaft 1 1 8 from the position when it is completely rigid. The workpiece holding device 1 10 0 is bent clockwise in the drawing centering on the flange 1 22 due to the moment of inertia. The ideal control point 1 3 9 is the position of the control point when the arm is completely rigid, but the influence of the above moment of inertia causes the position of the center of gravity to deflect, and as a result, the control point also deviates from the position shown as the control point 140, so that Z The amount of deviation in the axial direction is ΔZ2. Figure 22 is a graph showing the relationship between the speed of the arm shaft motor and the amount of deflection of the control point and the time when the robot moves the arm in the positive X-axis direction. The horizontal axis t is the time, the vertical axis v is the speed, and the vertical axis is the Z-axis deflection amount indicated by the control point -14-200832599. When the robot moves the arm in the positive direction of the X-axis, the arm-axis motor forms a waveform speed as indicated by the arm-axis motor speed 143. When the arm is accelerated in the positive direction of the X-axis, the arm shaft motor 115 is accelerated as indicated by the arm-axis motor speed 143, and the moment of inertia is generated as described above, causing the control point to deviate in the positive direction of the Z-axis. The temporal shift of the amount of deviation at this time is expressed by the amount of deflection 1 44 of the position of the control point at the time of acceleration. When the arm is decelerating from the normal speed in the positive direction of the X axis, the arm shaft motor 1 15 is decelerated from the normal speed as indicated by the arm shaft motor speed 143, and the moment of inertia is generated as described above, resulting in the control point going to the Z axis. The negative direction deviates. At this time, the temporal transition of the amount of deviation is expressed by the amount of deflection of the control point position at the time of acceleration 1 45, and the deflection of the arm during expansion and contraction due to the above-described reason causes the workpiece holding device of the robot to be housed in the substrate housing cassette. When the substrates are held between the substrates and when the substrate held by the workpiece holding device enters and exits, and when the substrate processing unit enters or exits the substrate processing portion, interference occurs in each portion, which may cause damage to the substrate. In this case, it is conceivable to widen the interval between the substrate in which the substrate is accommodated, or to reduce the acceleration and deceleration of the arm expansion and contraction in order to reduce the moment of inertia. However, the number of substrates to be accommodated is reduced, and the substrate carrying time is lengthened. Unfavorable conditions. In addition, it is also conceivable to prepare an operation program that can finely control the movement of the robot in advance so that the deflection when the arm is stretched and contracted does not interfere with the substrate housing or the substrate processing portion, but the deflection when the arm is stretched and contracted may be caused by the workpiece holding device or Since the weight and center of gravity of the glass substrate to be held vary, the previously prepared operation program must be completely remade when the workpiece holding device or the glass substrate to be held is changed. In recent years, based on the fact that glass substrates have been increased in size, and the demand for liquid crystal or plasma displays has become higher, the production speed is required to be faster, so that the above-mentioned deflection tends to increase. The present invention has been made in view of the above problems, and an object of the invention is to provide a machine capable of causing a glass substrate to be placed in a substrate storage cassette and a substrate processing unit without any other interference without reducing the acceleration/deceleration of the arm expansion/contraction operation- Human device. [Means for Solving the Problem] In order to solve the above problems, the present invention is constituted as follows. According to a first aspect of the invention, there is provided a workpiece transporting apparatus comprising: a robot having an arm having a tip holding a workpiece gripping device for holding or placing the workpiece, and an arm for allowing the arm to expand and contract in a horizontal direction a shaft motor and a lifting shaft motor for lifting the arm; and a control device capable of driving and controlling the arm shaft motor and the lifting shaft motor of the robot, wherein the correction means is provided according to the above The arm shaft motor drives the arm and the workpiece gripping device or the arm and the workpiece gripping device and the workpiece in the horizontal direction in the horizontal direction, and calculates the amount of deflection in the vertical direction of the robot control point position caused by the moment of inertia. The lifting shaft is driven by the amount of deflection to correct the position of the control point in the vertical direction. The invention of claim 2, wherein the control device includes a storage means for registering robot information of the robot and a workpiece of the workpiece holding device Holding device information; workpiece information of the above workpiece; and -16 - 200832599 other parameters, which are calculated based on the above parameters. The invention of claim 3, wherein the workpiece handling device of the first or second aspect of the patent application is characterized in that, for the number of the workpiece holding devices, each of the gripping device identification members is assigned to the gripping device The individual workpiece holding device information is registered in association with each other, and the deflection amount is calculated based on the workpiece gripping device information searched by the gripping device identifier when calculating the deflection amount. The invention of claim 4 is the workpiece handling device according to the first or second aspect of the patent application, characterized in that the workpiece identification member is assigned to the plurality of workpieces to associate the workpiece identification member The workpiece information is registered, and when the amount of deflection is calculated, the amount of deflection is calculated based on the workpiece information retrieved by the workpiece identifier. According to a fifth aspect of the invention, in the workpiece transfer device of the invention of claim 1, the robot is a horizontal articulated robot for transporting a liquid crystal glass substrate. [Effect of the Invention] According to the above configuration, the control device of the present invention calculates the arm deflection caused by the moment of inertia when the robot arm having the arm and the lifting shaft is operated, and the positional deviation of the control point formed by the deflection is made. The elevation axis moves in the Z-axis direction to correct the position of the control point, whereby the vertical trajectory of the control point can be kept constant. [Embodiment] -17- 200832599 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. (First Embodiment) The present invention will be described with respect to a workpiece transporting apparatus including a horizontal articulated robot equipped with a vertical lifting shaft, having the configuration shown in Figs. 7 and 8. The parameters of the robot 102 are input in advance to the storage means (not shown) provided in the control device 104. The robot information is registered in the above storage means: the distance [m] of the first arm shaft 1 14 to the second arm shaft 1 18 shown in Fig. 8; the distance [m] of the second arm shaft 118 to the flange 122; the arm shaft The distance from the motor 115 to the flange 122 in the Z-axis direction [m]; the distance from the lifting assembly portion 125 to the lifting shaft motor 124 [m]; and the distance [m] from the lifting shaft motor 124 to the lifting support portion 126, and the registration of the workpiece holder Device information: the weight of the workpiece holding device [kg]; the distance from the flange 122 of the workpiece holding device to the X-axis direction of the center of gravity of the workpiece [m]; the distance from the flange 122 of the workpiece holding device to the center of gravity of the workpiece [ [m The distance from the flange 122 of the workpiece holding device to the X-axis direction of the control point [m]; the distance from the flange 122 of the workpiece holding device to the Y-axis direction of the control point [m]; and the flange 122 of the workpiece holding device to the control The Z-axis direction distance [m] of the point, and the registered workpiece information: the weight of the workpiece to be gripped [kg]; the distance from the flange 122 of the workpiece control point to the X-axis direction of the workpiece center of gravity [m]; and the desired control The distance from the flange 122 of the workpiece control point to the Z-axis direction of the center of gravity of the workpiece [m], and the registered workpiece and the workpiece holding device The rigidity 値K[Nm/irad], and the parameters of the command cycle time [S] of the control cycle when the registration control device outputs the operation command -18-200832599 to each motor 〇 the workpiece holding device or the workpiece is plural At the time of the identification, the identification (such as the gripping device identifier and the workpiece identifier) of the unique number is assigned to each of the above-mentioned parameters. These parameters are used during the calculations • they are used for calculations, but they are retrieved by the identification. The parameters are input by pressing a button provided in the teaching means 106, and Φ is a storage means stored in the control device 104 by means of a communication means or the like by an external memory means (not shown). Further, other parameters are required in order to achieve the desired operation and control of the workpiece handling device, but are not related to the present invention, and the description of the parameters is omitted. The robot 102 inputs an operation command via the cable 105 to the control device 104 according to an operation program stored in advance in the storage means or by pressing a plurality of buttons having the teaching means 106, and then transmits the cable through the cable 1 〇 3 Go to each motor to perform the action. φ The operation of the robot having the plural axes to which the present invention is applied will be described using the flowchart of Fig. 1 . The operation program stores the number (identification) of the workpiece holding device required for the operation and the workpiece number (identification) held by the workpiece. First, in order to cause the specified action program to execute the action, the work program is selected, and the parameters referred to by the identifier included in the work program are retrieved and read. On the other hand, the teaching method of operating the robot 1 〇2 operation by the teaching means 'when the button having the teaching means 168 is pressed, the operation command is input to the control device 1 〇4 through the cable 1 0 5 , to convey the number (identification) of the workpiece holding device -19- 200832599 and the workpiece number (identification piece) held by the workpiece. The distance from the flange 122 to the center of gravity μ of the workpiece in the X-axis direction [m] and the distance in the Z-axis direction [m] 'is the distance from the flange of the workpiece holding device to the X-axis direction of the center of gravity 所需 required for the action [ m ], and the distance from the flange 122 of the workpiece holding device to the Z-axis direction of the center of gravity μ [m], and the distance from the flange 122 of the workpiece to the X-axis direction of the center of gravity μ during operation, and the control during operation The distance from the flange 122 of the workpiece to the center of gravity μ in the Z-axis direction [m] is calculated. The X-axis direction distance from the first arm shaft 1 1 4 to the flange 1 22 after the control unit outputs a predetermined control cycle for each motor for one cycle of the control period is to use the first arm shaft 114 stored in advance in the storage means. The distance [m] of the second arm shaft 118 and the distance [m] of the second arm shaft 118 to the flange 122 are geometrically calculated. For example, in the arm state including the mechanisms shown in FIGS. 8 , 9 , and j , the X-axis direction distance between the first arm shaft 1 14 and the flange 122 can be calculated according to the above formula (1 ). . Further, since the first arm shaft 114 and the arm shaft motor 115 are disposed at the same position in the X-axis direction, the X-axis direction distance [m] of the first arm shaft 114 to the flange 122 is equal to the arm shaft motor 1 15 to convex. The X-axis direction distance [m] 缘 of the edge 122 (Step 1) is added to the X-axis direction distance [m] of the flange 122 to the workpiece center of gravity 和 and the X-axis direction distance [m] of the arm shaft motor 115 to the flange 122 are added. Then, the X-axis direction distance [m] from the arm shaft motor 1 15 to the workpiece center of gravity 后 after the one-cycle operation command from the control device to each motor, and the Z-axis direction distance from the flange 122 to the workpiece center of gravity Μ The arm shaft is stored in the two-axis direction distance [m] of the center of gravity of the workpiece by the arm shaft motor 115 stored in the -20-200832599 storage means in advance, thereby calculating the arm axis after the operation command is output from the control device to each motor for one cycle. The distance from the motor 1 1 5 to the Z-axis direction of the workpiece center-of-gravity μ is [m]. • (Step 2) The first arm shaft before the command is output from the control unit to each motor for the first period to the X-axis of the flange 122. The directional distance is the first arm shaft 114 to the second arm shaft that are stored in advance in the storage means. The distance [m] of φ 118 and the distance [m] of the second arm shaft 118 to the flange 122 can be calculated geometrically. For example, an arm having a mechanism shown in Figs. 8, 9, and 1 is provided. In the case, the distance in the X-axis direction of the first arm shaft 1 14 4 to the flange 1 2 2 can be calculated according to the above formula (1). From the above, the distance from the flange 122 to the center of gravity of the workpiece X X-axis direction [m] and the distance from the arm shaft motor 115 to the flange 122 in the X-axis direction [m] are added, and it is possible to calculate the arm shaft motor 1 1 5 to the center of gravity of the workpiece before the operation command is output to the respective motors for one cycle. X X-axis direction distance φ [m] (Step 3) Calculate the difference [m] in the X-axis direction from the arm-axis motor 1 15 to the workpiece center-of-gravity 算出 calculated in steps 1 and 2. That is, 'calculate The movement distance of the workpiece center of gravity X in the X-axis direction _ (Step 4) The X-axis direction movement distance of the center of gravity calculated in Step 3 is divided by the cycle time when the control device stored in the storage means previously outputs an operation command to each motor [s The second party calculates the acceleration/deceleration rate a [m/s2] ο (step 5) to log in to the above control device. The required workpiece during operation - 21,328,599 The weight of the gripping device [kg] and the weight of the workpiece [kg] held during the operation are added to calculate the total weight of the front end portion of the flange 1 22 'calculated according to step 4 The acceleration/deceleration rate a [m/s2] is calculated by the formula (9) and the force F[N] is calculated. F = m· a . . . . . . (9) (Step 6) The distance from the arm axis motor 1 1 5 to the center-of-gravity direction of the center-of-gravity [ after the one-cycle operation command is output from the control device calculated in step 1 and the step 5 The calculated reaction force of the parallel force F[N] (値 is equal to the parallel force F), and the moment of inertia N[Nm] is calculated according to the formula (10). N = F *Zg. . . . . . (10) (Step 7) Using the rigidity 値K [Nm/rad] on the workpiece holding device in the holding state during the operation, and the moment of inertia N [Nm] calculated in the step 6, calculate the deflection according to the formula (11) Angle φ [rad]. φ = N / K. . . . . . (11) The deflection angle φ calculated here is shown in Figs. 2 and 3 . Fig. 2 is a view showing a deflection angle φι when the arm is moved in the positive direction of the X-axis. Fig. 3 is a view showing a deflection angle φ2 when the arm is moved in the negative direction of the X-axis. When the center of the first arm shaft 1 1 4 and the workpiece holding device 1 1 0 are completely rigid, when the intersection point of the straight line whose control point is parallel to the workpiece holding device 1 1 为 is P point, the deflection The angles are the angles formed by the two straight lines -22-200832599, that is, the straight lines passing through the p-point and the control point, and the connecting points of the control points 138 and p points deviating from the deflection of the arm portions and the j workpiece holding device 110 The angle of formation. The deflection angle Φ is at the p-center of the first arm shaft 14 when the intersection of the center of the arm and the workpiece holding device 110 is a completely rigid body, and the intersection of the line whose center of gravity is parallel to the workpiece holding device 110 is p point. And is equal to the angle formed by the two straight lines, that is, the straight line ' passing through the P point and the center of gravity position 1 4 1 and the deflection of the center of gravity of the arm portion 1 1 and the workpiece holding device 1 1 造成The angle formed. (Step 8) Using the distance [m] of the first arm shaft 114 to the arm shaft 118 stored in advance in the storage means, and the distance [m] from the second arm shaft 118 to the flange 122, and the arm shaft motor 1 15 In the angle, the X-axis direction distance (arm extension length) of the first arm shaft 114 to the flange 122 after the operation command is output from the control device to each motor for one cycle is calculated geometrically. For example, in the arm condition of the mechanism shown in FIG. 8 , FIG. 9 , and FIG. 1 , the distance from the first arm shaft 114 to the flange 122 in the X-axis direction can be calculated according to the above formula (1). . (Step 9) The length of the arm expansion and contraction calculated in the step 8 is added to the distance from the flange 122 of the workpiece holding device to the X-axis direction of the control point [m], and the distance between the arm shaft 144 of the table 1 and the control point is calculated. The deflection amount Δ z [m] is calculated using the deflection angle Φ [rad] calculated in the step S7. The amount of deflection ΔZ[m] is calculated according to the formula (12). Δ Z [m] = Rsin( φ ). . . . . . (12) -23 - 200832599 (Step ίο) The parts of the arm are regarded as completely rigid, and the lifting amount [m] of the lifting shaft after the output of one cycle of the operation command from the control device to each motor is calculated geometrically, and the workpiece is held. The distance from the flange 122 of the device to the Z-axis direction of the control point [m] and the above-described lifting amount [m] are added, and the position of the control point Z-axis direction after the operation command is output from the control device to each motor for one cycle is calculated. m], the amount of deflection [m] calculated in step 9 is subtracted, and the enthalpy calculated thereby is regarded as the corrected target control point Z-axis direction position Zc [m]. (Step 1 1) After the operation command is output from the control device to each motor for one cycle, the distance [m] of the lifting and lowering assembly unit 125 to the lifting shaft motor 124 stored in advance in the storage means is used, and the lifting shaft motor 124 is lifted and lowered. The distance [m] of the support portion 1 26 is geometrically calculated for each motor angle of the lift shaft when the lift target is operated only in the corrected target control point Z-axis direction position Zc [m] calculated in step 10. For example, in the case of the lift shaft provided with the mechanism shown in Fig. 1, the distance [m]' of the lift fitting portion 丨25 to the lift shaft motor 124 of the storage means and the lift shaft motor 124 to the lift support 邰1 2 6 are stored in advance. The distance [m] is equal, and when the 値 is b, the lifting shaft motor angle r of the lifting shaft that moves toward the corrected position Z-axis position Zc[m] of the steam control point is the deformation equation according to the formula (2) Calculated by the formula (13). 7 = asin ( Zc / 2b ) · (13) (Step 12) The operation command corresponding to the lift shaft motor angle γ calculated in step 1 1 is regarded as the new lift shaft motor operation command. Line 103 is output to each of the robot's shaft motors. According to the above processing, the operation command output to each motor is a corrected operation command of -24-200832599, and as a result, the target control point position is corrected. Fig. 4 is a view showing the relationship between the speed of the arm shaft motor 1 4 3 when the robot moves the arm in the positive direction of the X-axis, and the position and time of the control point, and the correction amount. The horizontal axis t is the time, and the vertical axis v is the speed. The vertical axis Z is the Z-axis direction deflection amounts 144 and 145 indicating the position of the control point. The correction amount is equal to the number of the deflection amount ΔΖ calculated in step 9. The correction amount when the arm is accelerated in the positive direction of the X-axis is the correction 1 3 during acceleration, and the arm is decelerated in the positive direction of the X-axis. The correction amount is the correction at the time of deceleration: ι 4 Fig. 5 is a correction state of the deflection amount ΔZ when the arm is accelerated in the positive direction of the X-axis. Since the amount of deflection Δ Z and the addition amount of the correction amount become zero, the corrected control point 15 is equal to the position of the ideal control point 138 in the Z-axis direction, so that the position of the control point in the Z-axis direction is kept constant. . Further, Fig. 6 is a view showing a state of correction of the amount of deflection ΔZ when the arm is accelerated in the negative direction of the X-axis. Since the amount of deflection Δ Z and the addition amount of the correction amount become zero, the corrected control point 16 is equal to the position of the ideal control point 139 in the Z-axis direction, so that the position of the control point in the Z-axis direction is kept constant. . By performing this continuous processing flow on the output cycle of the operation command of the control device, it is possible to often correct the deflection caused by the moment of inertia in the vertical direction. In addition, since the correction of the deflection is not complicated as in the embodiment, the microcomputer included in the control device that executes the robot control can shorten the calculation time, and thus does not affect the motion control processing of the robot. . In addition, when a plurality of substrates are housed and mixed with a plurality of glass-like substrates of different weights, the glass workpieces of the workpieces (numbers) to be held are prepared, and the operation program of the glass substrate to be held can be executed. The glass substrate is conveyed without causing deflection due to the moment of inertia. The above is an example of the implementation of the present invention. The arm may be, for example, a linear motion shaft composed of a motor and a rack & pinion or ball screw, or may be powered by a solenoid or air pressure controlled by a solenoid valve. The linear motion shaft may be configured such that the first arm shaft 114, the second arm shaft 118, and the flange 122 are respectively provided with motors to form individual windings, and can be inserted in the X-axis direction and can be oriented in the Y-axis direction. The Z axis direction moves. In this case, the arm may have a mechanism that can be linearly inserted into the X-axis direction. In addition, the lifting shaft may be, for example, a linear motion shaft composed of a rack gear and a pinion gear or a ball screw, or may be a linear motion shaft powered by a solenoid valve controlled air pressure or oil pressure, or may be configured to be lifted or lowered. In addition to the shaft motor 124, the lift attachment portion 125 and the elevation support portion 126 are provided with motors to form individual windings, and can be inserted in the Z-axis direction and can be operated in the X-axis direction and the Y-axis direction. In this case, the lifting shaft may have a mechanism that can linearly interpolate in the Z-axis direction. Figs. 7 and 8 and Figs. 12 and 13 show an example of a general device. However, it is not always necessary to have a winding axis 130. In addition, the teaching means 106 of the seventh drawing is provided with Although the external memory device is shown, the teaching means 106 may be, for example, a general-purpose computer or a personal computer including an external memory device. Further, when the operation means is stored in advance in the storage means, the teaching means 1 to 6 may not be provided. The cable 105 recorded in Fig. 7 is a wired communication indicating that an electrical connection is formed, but it can also be constructed as a wireless means using radio waves, for example. The present invention is also applicable to a vertical 6-axis articulated robot used by most industrial robots because it is a robot that can be applied with freedom in the horizontal direction and the vertical direction. For example, in the inter-pressing grabbing operation, it is necessary for the continuous action press to carry the workpiece at a high speed and correctly. Since the workpiece loading port of the press is formed to the minimum limit when the workpiece is loaded, the deflection caused by the moment of inertia at the time of high-speed conveyance can be said to cause the workpiece and the press to interfere with each other. However, when the present invention is applied, the amount of deflection generated during the conveyance of the workpiece is calculated, and the calculated deflection amount is utilized in the direction in which the position is completely deflected from the respective portions due to the deflection. The linear interpolation of the degree of freedom eliminates the amount of linear deflection. [Industrial Applicability] The present invention is applicable to transportation applications in which long-stroke operation is performed at a high speed and is caused by actuating deflection, and is particularly applicable to applications in which one end is operated and the other end is conveyed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart of the present invention. Fig. 2 is a diagram showing the deflection angle φΐ of the arm when it is moving in the positive direction of the X-axis. Figure 3 shows the deflection angle φ2 when the arm moves in the negative direction of the X-axis.
P 成圖。 -27- 200832599 第4圖爲手臂朝X軸正方向動作時的手臂軸馬達的速 度和控制點的位置和修正量和時間的關係圖。 第5圖爲手臂朝X軸正方向加速動作時的撓曲量ΔΖ 修正狀態。 第6圖爲手臂朝X軸負方向加速動作時的撓曲量ΔΖ 修正狀態。 第7圖爲工件搬運裝置構成圖。 第8圖爲機器人構成圖。 第9圖爲機器人手臂伸展狀態圖。 第1 0圖爲機器人手臂收縮狀態圖。 第1 1圖爲機器人昇降狀態圖。 第12圖爲從上面看機器人時的機器人構成圖。 第1 3圖爲朝X方向基板收容匣進行伸縮動作的機器 人與基板收容匣的位置關係圖。 第14圖爲朝Y方向基板收容匣進行伸縮動作的機器 人與基板收容匣的位置關係圖。 第1 5圖爲機器人針對複數基板收容匣的第n段將工件 把持裝置插入前的狀態圖。 第1 6圖爲機器人針對複數基板收容匣的第η段將工件 把持裝置插入後的狀態圖。 第1 7圖爲工件把持裝置把持著玻璃基板時的重心模 式圖。 第1 8圖爲手臂朝X軸正方向動作時的慣性矩式樣圖 -28- 200832599 第19圖爲手臂朝X軸正方向動作時的撓曲圖。 第20圖爲手臂朝X軸負方向動作時的慣性矩式樣圖 第21圖爲手臂朝X軸負方向動作時的撓曲圖。 第22圖爲手臂朝X軸正方向動作時的手臂軸馬達的 ‘ 速度及控制點位置撓曲量和時間的關係圖。 φ 【主要元件符號說明】 1 3 :手臂朝X軸正方向加速時的修正量時間性推移 14:手臂朝X軸正方向減速時的修正量時間性推移 1 5 :手臂朝X軸正方向加速時的修正後控制點 1 6 :手臂朝X軸正方向減速時的修正後控制點 100 :基板收容厘 1 0 1 :支撐用插銷 102 :機器人 _ 103 :纜線 104 :控制裝置 105 :纜線 1 0 6 :示教手段 107 :玻璃基板 108 :第1手臂連桿 109 :第2手臂連桿 1 1 0 :工件把持裝置 111 :上部昇降連桿 -29- 200832599 1 12 113 1 14 115 116 117 118P is a picture. -27- 200832599 Fig. 4 is a diagram showing the relationship between the speed of the arm shaft motor and the position of the control point, the correction amount, and the time when the arm is moving in the positive direction of the X-axis. Fig. 5 is a state of correction of the amount of deflection ΔΖ when the arm is accelerated in the positive direction of the X-axis. Fig. 6 is a state in which the deflection amount ΔΖ is corrected when the arm is accelerated in the negative direction of the X-axis. Fig. 7 is a view showing the configuration of a workpiece handling device. Figure 8 is a diagram of the robot composition. Figure 9 is a diagram showing the state of the robot arm extension. Figure 10 is a diagram of the contraction state of the robot arm. Figure 1 is a diagram of the robot's lifting state. Fig. 12 is a view showing the configuration of the robot when the robot is viewed from above. Fig. 1 is a view showing the positional relationship between the robot and the substrate housing cassette in the X-direction substrate housing cassette. Fig. 14 is a view showing the positional relationship between the robot and the substrate housing cassette in the Y-direction substrate housing/retracting operation. Fig. 15 is a view showing a state in which the robot inserts the workpiece holding device in the nth stage of the plurality of substrate housing cassettes. Fig. 16 is a view showing a state in which the robot inserts the workpiece holding device for the nth stage of the plurality of substrate housing cassettes. Fig. 17 is a view showing a center of gravity when the workpiece holding device holds the glass substrate. Figure 18 shows the moment of inertia when the arm moves in the positive direction of the X-axis. -28- 200832599 Figure 19 shows the deflection of the arm when it is moving in the positive direction of the X-axis. Fig. 20 is a diagram showing the moment of inertia when the arm is moved in the negative direction of the X-axis. Fig. 21 is a diagram showing the deflection of the arm when moving in the negative direction of the X-axis. Figure 22 is a graph showing the relationship between the speed and the deflection of the control point position and the time of the arm shaft motor when the arm is moving in the positive direction of the X-axis. φ [Explanation of main component symbols] 1 3 : Correction amount when the arm accelerates in the positive direction of the X-axis Time shift 14: Correction amount when the arm decelerates in the positive direction of the X-axis Time shift 1 5 : The arm accelerates in the positive direction of the X-axis Corrected control point at the time of time: 16: Corrected control point 100 when the arm is decelerating in the positive direction of the X-axis: Substrate housing PCT 1 0 1 : Supporting pin 102: Robot _ 103: Cable 104: Control device 105: Cable 1 0 6 : teaching means 107 : glass substrate 108 : first arm link 109 : second arm link 1 1 0 : workpiece holding device 111 : upper lifting link -29 - 200832599 1 12 113 1 14 115 116 117 118
120 121 122 123 124 125 126 Φ 127 128 129 130 13 1 132 133 134 135 下部昇降連桿 本體手臂支撐部 第1手臂軸 手臂軸馬達 手臂軸減速機 第1連桿皮帶 第2手臂軸 第2手臂軸減速機 第2連桿皮帶 凸緣減速機 凸緣 控制點 昇降軸馬達 昇降裝配部 昇降支撐部 Ζ軸零基準 旋繞軸馬達 旋繞部 旋繞軸 旋繞正方向 旋繞負方向 基板收容匣 支撐用插銷 第η段基板收容匣 -30- 200832599 136 :第n + 2段基板收容匣 1 3 7 :手臂軸馬達軸中心位置 1 3 8 :偏離的控制點（手臂朝X軸正方向加速時） 1 3 9 :理想的控制點 ’ 1 40 :偏離的控制點（手臂朝X軸負方向加速時） ' 1 4 1 :理想的控制點 142 :偏離的重心位置 _ 143 :手臂軸馬達速度 1 44 :加速時的控制點位置撓曲量 1 45 :減速時的控制點位置撓曲量120 121 122 123 124 125 126 Φ 127 128 129 130 13 1 132 133 134 135 Lower lift link body Arm support 1st arm shaft Arm shaft Motor arm shaft reducer 1st link belt 2nd arm shaft 2nd arm shaft Reducer 2nd link belt flange reducer flange control point lifting shaft motor lifting assembly lifting support section Ζ axis zero reference winding shaft motor winding part winding shaft winding positive direction winding negative direction substrate receiving 匣 support pin η segment Substrate housing 匣-30- 200832599 136 : n + 2 stage substrate housing 匣 1 3 7 : Arm shaft motor shaft center position 1 3 8 : Deviation control point (when the arm accelerates in the positive direction of the X axis) 1 3 9 : Ideal Control point ' 1 40 : Deviated control point (when the arm accelerates in the negative direction of the X axis) ' 1 4 1 : Ideal control point 142 : Offset center of gravity position _ 143 : Arm shaft motor speed 1 44 : Control during acceleration Point position deflection amount 1 45 : Control point position deflection amount during deceleration