TW200831295A - Method for manufacturing roller mold - Google Patents

Abstract

A method for manufacturing a roller mold is described. In the method, a body is provided, wherein the body is a cylinder. An imprinted material layer is formed to completely cover the cambered surface of the body. The body is horizontally mounted on an imprinting stage. A plane mold is deposed on the body, wherein the plane mold has a first surface and a second surface on opposite sides, a pattern structure is set in the first surface of the plane mold, and the first surface of the plane mold is pressed on the imprinted material layer. Then, an imprinting roller is provided to press on the second surface of the plane mold, so as to make the plane mold set between the imprinting roller and the body. A heating step is performed on the imprinted material layer to transfer the pattern structure of the plane mold onto the pressed portion of the imprinted material layer. Subsequently, the imprinted material layer on the body roller mold is separated from the plane mold.

Description

200831295

• , r you szt ~ *·**·* , * c , h \ iron hair climbing _ smuggling to Jianfan: shallow success ^ salt) fiber scale attack: each::, sound economy description [invention belongs to the technical field The invention relates to the manufacture of an imprinting mold for a micro-nano imprinting process, and in particular to a roller-type imprinting process (Roller Mold Fabrication by Roller-Based Nanoimprinting) ° Technology] Nanoimprinting Technology has been invented for about ten years, but its importance and development potential have been widely recognized, and it is considered as the most likely to surpass and replace the existing nano-process technology in the future. One of the methods. Currently developed nanoimprinting processes can be roughly divided into Hot Embossing, UV Cured, Self-assembly and Laser Assisted nanoimprinting. technology. The nanoimprinting machine of the commercial nano imprinting technology can imprint the wafer size of about 6-8 吋, but the required embossing time is quite long, so the output per unit time of the commodity is relatively Small, mass production capacity is not good. In view of this, roller type nano imprint technology has been developed in order to obtain high volume production capacity. Because the roller nano imprint technology can be used as one of the solutions for high throughput per unit time, the world's major nano imprint research teams have done the most in-depth research and development on the roll imprint technology, so that it can make the wheel as soon as possible. Nano-imprint technology can achieve mass production applications for a variety of products. However, the key breakthrough technology for roller-type nanoimprinting is the production of roller molds. The reason why the drum mold is difficult to fabricate is how to define a sub-micron or even nano-scale pattern on the curved surface of the drum. The current status of the development of roller molds in international or domestic journals that have been published can be easily divided into the following categories. 5 200831295 _丨Machining tools are precisely engraved on the cylindrical surface of the drum, which is the most popular in China. Take a new processing technology, the minimum line width can reach up to the younger one, for the recording of the metal book, the white nickel metal film, and then use the \ \ / / tube surface method to provide a characteristic pattern. Then, the surface of the cylinder is defined on the surface of the == Γ metal film, and the metal film after the completion of the roll 2 is attached to the roll to attach the metal film. However, the second method is a steam surface. Buheshi is attached to the curved surface of the drum, so in the method: the surface seam of the film is discontinuous. In addition, it makes all the film sheets: the difficulty lies in whether the technology of metal film attachment can be combined. This is because Φ recognizes that the curvature of the other roll is the same as the curvature of the surface. :: The production of this roller mold is a great challenge. On the surface of the planar mold, the characteristic lines on the cylinder are then used to make the ink required for a process. Then, the surface of the flat mold is coated on the surface of the self-assembled embossing, and the dream is to roll the same on the barrier layer of the pattern to be transferred on the planar mold core: the process of casting, electroplating, etc. The anti-surname is defined as follows; it is moved onto the surface of the drum, and the ink is grown on the surface of the drum to make the ink. The second step is to complete the production of the drum 1 and the self-assembled ink will be rolled in the drum. When the flat mold is rolled, the magic tube phenomenon, and the process of producing a capillary plating such as water produced on the paper surface, the pattern size of Jing: is incomplete. Furthermore, 'through the electricity industry.贞 缓慢 , 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 The method of modulo ^. SUMMARY OF THE INVENTION It is an object of the present invention to provide a novel method of making an impression cylinder which can smoothly define a design pattern on the curved surface of the drum. Another object of the present invention is to provide a method for manufacturing a roller mold, which can use a pseudo-molecular laser as a heating source. Since the excimer laser has a fast heating characteristic, the manufacturing speed of the roller mold can be greatly improved. , 'Another purpose of the month is to provide a manufacturer of the roller mold core =, suitable for roller type nano imprinting, can quickly make the roller mold core, so it can be quickly brought by the roller type nano imprinting And the advantages of large area imprinting.

A further object of the present invention is to provide a drum mold core manufacturing method, and to produce an integrally formed roller mold core, and to simplify the multi-pass process of the technical system of the cylinder mold, so not only It can improve process reliability and yield, and improve the precision of the roller mold. Further, another object of the present invention is to provide a roller mold core which is excellent in abrasion resistance by providing a method for manufacturing a roller mold core, which can effectively reduce damage on the surface of the mold cylinder of the imprint process cylinder, thereby greatly extending the use of the roller mold core. Life, therefore, can greatly reduce the cost of the nanoimprint process. According to the above object of the present invention, a method for manufacturing a roller mold core is provided, which comprises: providing a main body structure, wherein the main body structure is cylindrical, and the layer of the hard P material is completely covered on one of the arc surfaces of the main structure. The main body is tied to the flat wood β on the imprinting stage; a flat mold is placed on the main structure 200831295, wherein the planar mold core has the opposite -m: and the second surface, and the planar mold 1 is the first There is no picture on the surface of the relatives, γ, 1 wood structure, the first surface of the planar mold is pressed on the second surface of a part of the mineral mold in a region of the embossed material layer, so that the plane is wide: one embossing Roller pressing is performed on the plane to perform a heating step to transfer the plane mold to the nip portion of the pressed region of the embossed material layer; and separating the embossing material layer and the planar mold brist of the main structure . Heat source = invention of a preferred embodiment of the above-mentioned heating step used in addition, 3⁄4 another preferred sinus green of the present invention | μ, +, eight noon uf 1 soil target example, the above heating step is used a quasi-knife laser, and the material of the impression cylinder and the flat mold core comprises a light-transmissive material in the excimer laser band, preferably a material such as a stone structure is excimer laser light, and The main material, preferably can be recorded, for example, or the first line of copper can be heated and smelted metal material = the use of the British impression cylinder, the embossed material of the cylinder mold to be embossed, the two-shot type The phenomenon of local stress concentration, the matching projection and the curved surface of the quartz riding roller can make the excimer laser in the arc surface and (4) surface of the main structure of the same mold core, and can smoothly complete the main structure directly on the same mold core. Embossing on the layer of embossed material on the curved surface. In addition, the rotation characteristic of the main structure of the two cylinders of the cylinder can continuously imprint the layer of imprint material on the surface of the cylinder until the definition of the pattern is completed. [Embodiment] The invention discloses a method for forming a roller mold, and defining a characteristic pattern on the surface of the roller mold. The speed and accuracy of the mold can be continuously performed by rotating the roller mold, 200831295. Embossing' thus enables the concept of roller-type nanoimprint technology to be realized. In order to make the description of the present invention more detailed and complete, reference is made to the following description in conjunction with the drawings of FIG. 2 and FIG. . FIG. 1 is a schematic view showing a device for manufacturing a cylinder mold according to a preferred embodiment of the present invention. When the process of the exemplary embodiment is performed, a cylindrical main structure 1 首先 is first provided, wherein the material of the main structure 1 可 can be selected according to the heating source used, and the material of the main structure 1 可 can be, for example, a semiconductor. Materials, electrical materials, glass materials, Tauman materials, metals or conductive materials. For example, in the preferred embodiment of the present invention, an excimer laser is selected as the heating source, and thus the main structure of the present invention! (10) A material that can be heated by the laser beam of the quasi-knife/knife can be heated, and the preferred example == is a cylinder: a copper-copper metal cylinder. In one embodiment, the main body is formed to provide a recording or copper metal round rod with good heat absorption, and the surface of the whole:::, the surface is mirror-polished, and the main structure is finished. By f, the pattern definition can be performed using, for example, the orphan 106 of the stamp 100. (4) The main structure In the present exemplary embodiment, when the main structure 100 is defined, the main structural trace is first erected on top of ^^=102. In the exemplary embodiment, the second: the port carrier 'and the automatic (four) carrier is preferably a package 4::= 昼 printing force, that is, the X-axis direction, the y-axis direction and the 2-axis side:: self/degree The movement can include the movement ability of a white life direction. The better the movement degree of a degree of freedom, including the more "Z-axis direction and the direction of the rotation axis, such as the It axis, the y-axis, the table 102 can be a feeding service. Motor drive stage, _ jin not. House-printed mobile stage, super-conducting moving lane J ... to drive the stage, magnetic float (four) (four) stage, magnetic floating type 200831295 moving stage, superconducting rotating stage or air pressure Rotate the stage. Next, use, for example, thermal evaporation (Thermal Evap〇rati〇n), Chemical Vapor Deposition (CVD), Low Pressure Neutral/Gas (Low) Pres sure-Chemical Vapor

Deposition ' LPCVD), R0tary Spindle, Printing, or Chemical (10), forming a pressure to be pressed

The imprinted material layer U8 is overlaid on the entire curved surface 1〇6 of the main structure 100. The material of the imprint material layer i i 8 may be, for example, a semiconductor material, a piezoelectric material, a glass material, a ceramic material, a metal or a conductive material. In one embodiment, the imprinting material layer 118 may be, for example, a metal film layer or a polymer material layer such as a photoresist. In a preferred embodiment, the material of the imprint material layer 118 and the body structure are both nickel metal. At this time, the imprinting material layer 118 is wrapped outside the arc surface 106 of the main body structure 100, and is carried by the imprinting stage 1〇2. At the same time, a planar mold core 1 is provided, wherein the planar mold core has an opposite surface 122 and surface 124. The surface of the planar mold core 1 122 4 has a pattern structure 1 〇 8 to be transferred, wherein the pattern structure 1 〇 8 may be a concave-convex structure having a characteristic pattern of a cake size or a nanometer size. Then, the planar mold 7104 is placed on the main structure 1〇〇, and the planar mold is pre-compressed so that the pattern structure on the surface 122 of the planar mold core 104 is 1〇8舆the curved surface of the main body phase 100〇1〇 The layer of imprint material 118 on 6 is in close contact. In one implementation, the material of the planar mold core 104 may be selected from materials having good light transmittance, such as quartz. In addition, the melting point of the material of 'Plane 1{) 4 must be higher than the melting point of the layer 118 of the imprinting material on the main body loss (10), in order to smoothly smooth the planar mold... The structure of the upper convex structure 1 () 8 The pattern is transferred onto the layer of imprint material ι 8 . After the pattern structure H)8 is protruded from the surface 122 of the planar mold core 1〇4, the non-stick material which can be smoothly separated according to 200831295 m, for example, chlorine/yarn (called a·). Next, an impression cylinder 116 is provided, wherein the impression cylinder 116 is preferably a cylinder having good light transmission, and the material of the impression cylinder 116 is selectively selected to apply a release agent to the planar mold core according to requirements. On the surface 122 of 1〇4, the role of the release agent is to keep the flat mold core 1〇4 and the imprint material layer 118 from being adhered when the mold is released for printing, so as to ensure the integrity of the pattern transfer. Sex. Therefore, the release agent is generally used to assist the half-faced mold 1〇4 and the imprinting material layer.

Between the imprinting material layers U8 on the main structure 1 . By adjusting the distance between the impression cylinder 116 and the embossing material layer 118, the embossing roll 胄6, the planar dies 104 and the embossing material 厣1]X - | + yang, the tip f river layer 118 Extrusion between each other to provide the applied pressure required for imprinting. Depending on the heating source used. In a preferred embodiment, excimer bombing is used as the heating source, so that the impression cylinder 16 can be selected from a highly transmissive quartz material. The job is to erect the impression cylinder 116 on the flat mold core 104, and the impression cylinder 116 is closely attached to the surface 124 of the plane mold 1 〇 4, at this time, the plane mold 1 〇 4 clip Provided on the impression cylinder i 16 and subsequently, a heat source 110 is provided above the impression cylinder 116. In the exemplary embodiment, the pattern of the pattern structure 1 〇 8 of the planar mold core 1 〇 4 is transferred to the embossed material (4) 118 on the main structure _ the micro/Nan embossing technology can be laser assisted hot pressing Printing technology, resistive hot stamping technology, or UV imprinting technology. Therefore, the heat source 11G can be, for example, a light energy type heating electric resistance source, an eddy current type heat source, or an electromagnetic heat source. Although the heating source 1U) is disposed above the impression cylinder 116 in the above embodiment, and the imprint material layer is twisted through the impression cylinder 116 and the planar mold core 104, in other embodiments, the heating source 110 is also The imprinting material layer 118 can be directly heated without passing through the impression cylinder; 6 11 200831295 with the planar mold core 104. Generally, for a 2 light energy heating source, it is preferred that the heated light beam 126 penetrates the embossing roll 116 to cause the light beam 126 to have a focusing effect, and the focused light beam us is then passed through the planar mold core 104. The embossed material layer 118 is heated. Because of this, the heating method can be adjusted according to the requirements of the process and the type of heating source. Referring to FIG. 2, in a preferred embodiment of the present invention, the heating source 110 uses a light energy heating source, such as a laser, and the wavelength of the light beam 126 emitted by the heating source 11 is substantially from 1 nm to Between 1 〇〇μηι, and a set of optical mirrors 112 can be selectively disposed between the heating source 110 and the planar mold core 104 (only one of the reflective lenses 12 〇 and a focusing lens are represented as representative) For illustrative purposes, the beam 126 is projected and focused by the optical lens assembly 112, and is finally focused by the impression cylinder 116 to penetrate the planar mold core 1〇4, and below the planar mold core 104 and with the planar mold core 1〇 4 The embossed area of the enamel energy distribution is formed on the surface of the embossed material layer 118, so that the surface temperature of the embossed area of the embossed material layer 118 can be instantaneously raised above the melting point. The optical mirror group 112 can include a plurality of mirrors and lenses, and the composition of the optical mirror group U2 and the number of optical mirrors can be adjusted according to actual needs. Since the planar mold core 1〇4 has been pre-stressed on the imprinting material layer 187 to cause local stress concentration, after heating by the heating source 100, the convex pattern structure on the planar mold core i 〇4 can be formed. It is smoothly transferred onto the imprint material layer 118. In an exemplary embodiment, • heating source 110 is preferably an excimer pulsed laser. In other embodiments, the heating source 110 can employ a laser wavelength of cesium fluoride-248 nm (KrF_248 nm), argon fluoride-193 nm (ArF-193 nm), cesium chloride-308 nm (XeCl-308 nm), or cesium fluoride. An excimer pulsed laser of -351 nm (XeF-351 nm) can also be used with a continuous laser such as carbon dioxide laser, yttrium aluminum garnet (Nd-YAG) Ray 12 200831295. At this time, if the preparation of the roller mold core 114 required for the material layer 118 is completed, the embossed roller mold: 114: the imprinting stage 102 can be removed. Alternatively, if the required pressure has not been completed = the automatic movement work of the loading stage can be performed according to the actual process requirements, and the printing of the different portions of the imprinting material layer 118 on the main structure is continued. . In the preferred embodiment, a device (not shown) can be used to control the movement of the imprinting port A and the heating source 110 to heat the grind: material layer 118 to enable the two Synchronous operation. In the process of performing the roller mold core 114 in the shell target, the flat mold core 104 and the heat source 11 are first embossed on the first portion of the first region of the imprint material layer ι 8 . The stage 1〇2 is rotated by a unit angle distance. At this time, due to the friction between the impression cylinder 116 and the planar mold core 1〇4: pressure: the material layer 118 due to the previously applied pre-pressure. The rotation of the main structure 1GG drives the planar mold core 104 to move in the y direction and moves to the next positioning point, so that the first portion of the first portion of the first region of the planar mold layer 2 imprint material layer 118 faces the first direction In the meantime, the heating source 1U) is activated again, for example, by firing a excimer laser to heat the surface of the imprinting material layer 118 in contact with the planar mold core 104, thereby patterning the planar mold core 104. The knot 冓 10 8 is smoothly transferred onto the second portion of the first region of the surface of the embossed material layer 118. The embossing stage 1 〇 2 is repeatedly rotated to rotate the main structure 100 (four) direction by a unit distance and the heating source 110 is activated. <Steps, to complete the main body knot # H)〇 The embossed material layer 压 8 is embossed in the 0 direction of the first region. After that, the planar mold core 104 can be manipulated to make a distance of one unit toward the X direction of the first region of the embossed material layer jj 8 13 200831295. The planar mold core 1〇4 is moved to the second region of the imprinting material layer 118, and the heating source 11〇 is activated to smoothly transfer the pattern structure 108 of the planar mold core 104 to the plane of the imprinting material layer. The first portion of the second region of the surface in contact with the core 104. Next, repeating the rotation of the body structure just in the direction of (iv) rotation - the distance of the unit and the step of starting the heating source U0, to complete the pressure on the main structure 1 The second region of the printed material layer 118 is embossed in the θ direction. Then, according to the actual process requirements, the planar mold core 1重复4 is repeatedly moved to make a unit distance in the X direction, and the planar mold core 104 is moved to the main body. Structure H) the lower region of the second region of the imprinting material layer 118, and the direct embossing of a region below the imprinting material layer 118 is performed according to the same procedure as described above. The above steps are repeated in this order. Finishing the entire surface of the main structure 丨 (10) 1〇6 The figure is printed, and then the main structure 1G0 is removed, so that the main structure 100 and the planar mold core 104 are completely separated, that is, the embossing is completed, and the continuous roller embossing roller mold core 114 can be produced. The red mold "I is composed of a main structure 1 〇〇 and an embossed embossed material layer u 8 attached to the curved surface of the main structure 1 。. One of the above preferred embodiments of the present invention is known. One of the advantages of the embodiment of the present invention is that the drum mold core is manufactured by using a thousand-faced mold with a characteristic pattern structure on the surface, and can be combined with an automatic imprinting stage, thereby achieving fast, large, and automated. The production of a nano-structure or pattern on the drum mold core is advantageous for mass production of the drum mold. It can be seen from the above preferred embodiment of the present invention that another advantage of the embodiment of the present invention is that the roller-imprinted roller mold can be fabricated by using an excimer, which is used as a heating source, and is rapidly heated by a quasi-molecular laser. Features, available: 14 200831295 Increased embossing speed. It can be seen from the above preferred embodiments of the present invention that the embodiment of the present invention is based on the fact that the roller type direct printing technology is used to manufacture the roller mold core, and the two-barrel mold core is formed into a body-molding mold in the process of direct imprinting. Reduce the drum making and program, and finish the smooth surface of the roller mold without any discontinuous joints, and improve the precision of the pattern on the cylinder mold. According to the preferred embodiment of the present invention described above, the embodiment of the present invention is further characterized in that it can be used as a material for making a two-cylinder mold by using a wear-resistant material such as nickel metal, thereby improving the durability of the roller mold. Sex. ~ It can be seen from the above preferred embodiment of the present invention that the re-stop point of the embodiment of the present invention is that the roller type direct imprinting roller mold process can be combined with the second automatic imprinting stage, thereby improving the production of the roller mold core. Precision and convenience

Sex. Although the present invention has been disclosed in a preferred embodiment as described above, it is not intended to limit the invention, and any one of ordinary skill in the art can make various kinds without departing from the spirit and scope of the invention. The scope of protection of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a device for manufacturing a roller without according to a preferred embodiment of the present invention. ^ Fig. 2 is a schematic view showing the erection of an optical system for making a roller cylinder according to a preferred embodiment of the present invention. [Major component symbol description] 15 200831295 100: Main structure 104: planar mold core 108: pattern structure. Π2: optical lens group 116: impression cylinder 120: reflective lens 124: surface 128: focusing lens 102: 106: 110: 114 : 118 : 122 : 126 Imprinting stage 5 melon heating source roller mold embossed material layer surface beam

16

Claims (1)

200831295 The invention relates to a method for manufacturing a roller mold core, comprising at least: providing a main body structure, wherein the main body structure is cylindrical; forming an embossing material layer completely covering one of the arc surfaces of the main body structure; The main structure is horizontally mounted on an imprinting stage; a planar mold is disposed on the main body structure, wherein the planar mold core has a first surface and a second surface, and the planar mold core a surface is provided with a pattern structure, the first surface of the planar mold core is pressed on a portion of a region of the embossed material layer; and an embossing cylinder is pressed on the second surface of the planar mold core so that The planar mold is interposed between the impression cylinder and the main structure; a heating step is performed on the imprint material layer to transfer the pattern structure of the planar mold to the region of the imprint material layer And a portion of the imprinting material separating the body structure from the planar mold. 2. The method of manufacturing a roller mold core according to claim 1, wherein the material of the main structure is selected from the group consisting of materials which are heatable by light in the excimer laser band. 3. The method of manufacturing a roller mold core according to claim 1, wherein the material of the main structure is a semiconductor material, a piezoelectric material, a glass material, a ceramic material, a metal or a conductive material. 4. The method of manufacturing a roller mold according to claim 1, wherein the material of the main structure is nickel metal or steel metal. 5. The method of manufacturing a roller mold core according to claim 1, wherein the step of forming the imprint material layer is by thermal evaporation, chemical vapor deposition (CVD), low pressure chemical gas. Phase deposition method (LPCVD), spin coating method (Rotary Spindle), printing method (printi (8) or chemical > Chemical Deposition. 6. The method for manufacturing a roller mold core according to the scope of the patent application of the invention The material of the embossing material layer is a semiconductor material, a piezoelectric material, a glass material, a ceramic material, a metal or a conductive material. 7. The method of manufacturing a roller mold according to claim 1, wherein the embossing material ; A ^ ^ The side of the clothing (four) layer is - metal film layer or - polymer material layer. 8 · As claimed in the scope of the 1 & method, the embossed material screen 丄,, L '々 with the nucleolus The manufacturing layer is a photoresist layer. 9·For example, the application of the embossing material of the embossing material of the reed 衩 之 如 凊 凊 凊 凊 凊 凊 凊 凊 凊 凊 9 9 9 The material is nickel metal. Applying for the patent 笳 method, in which the flat mold mold is made into a group - 。 Ά 由 由 18 18 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 18 18 18 18 18 18 18 18 18 18 18 如 如The material of the flat mold core is quartz. The drum molding method according to the invention, wherein the material of the planar mold core has a melting point higher than: the melting point of the square. The step of δ placing the planar mold is on the first surface of the planar mold. The coating is coated with a release agent in the method. 14. The material of the release agent is 13 The manufacturing of the mold core is Chlorosilane. 15 · The method of the patent scope method, wherein the size of the cylinder mold of the pattern structure of the pattern structure is a micrometer size or a nanometer size. 16. The method of claim 1, wherein the impression cylinder is selected from the group consisting of. The manufacture of the roller mold core described in the section is a group of the light-transmissive material of the square. The method of the invention is as follows: The material of the impression cylinder is made of the cylinder mold of the cylinder. The manufacturer of the roller mold core described in claim 1 of the patent application No. 1 200831295 [Method] One of the heating sources used in the heating step is a laser. The method of manufacturing a roller mold core according to claim 18, wherein the wavelength of the laser is between substantially 1 nm and substantially 1 Å. 20. The method of manufacturing the 潦 敬 敬 敬 棋 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬 敬The method for manufacturing a roller mold core according to the invention, wherein the laser wavelength of the excimer laser is 248 nm (KrF-248 nm) 〇 22. As claimed in the second aspect of the patent application. The manufacturing method of the roller mold core, wherein the laser wavelength of the excimer laser is 193 nm (ArF, 193 nm). 23. The method of manufacturing a roller mold core according to claim 2, wherein the laser wavelength of the excimer laser is cesium chloride-308 nm (XeCl-308 nm) 〇24. The method for manufacturing a roller mold core according to the invention, wherein the laser wavelength of the excimer laser is lanthanum fluoride-35 lnm (XeF-35 lnm) 〇25. The roller mold core according to claim 18 of the patent application scope Manufacturer 20 200831295 The law is a carbon dioxide laser, 26. The method of the roller mold as described in claim 18, wherein the laser is a Nd_YAG laser. Mu, such as the manufacturer of the roller mold described in the first paragraph of the patent scope:: One of the heating sources used in the heating step comprises a light energy heating source, and a heating source, an eddy current heating source or an electromagnetic type Heating source. And the method of manufacturing the drum mold core according to the first aspect of the invention, wherein the heating step is further applied to the stamping material layer on the stamping material layer and the planar mold core as claimed in the patent application. The method for manufacturing a drum mold according to the first aspect, wherein the heating step is performed directly on the embossing material; 1 without passing through the embossing cylinder and the flat mold layer. The method of item i, wherein the imprinting station is an automatic imprinting stage. The method of claim 3, wherein the automatic imprinting stage includes a movement capability of X-direction and three-axis degrees of freedom. σ /, z to the 32. For example, in the middle of the material range 3G item (4) the manufacturer of the mold core 21 200831295 method, which from: pressure: the stage contains six degrees of freedom of the movement ability line movement y#, z The direction of the axis and the direction of the ei" axis of rotation. 3 3 ·If you apply for the patent model, you can use the 模 士 , , 30 30 30 30 30 30 30 30 , , , , , , , , , , , , The motor is driven by a stage or a brushless type. 4. The rolling method described in the third paragraph of the patent application, wherein the automatic imprinting stage is a magnetic floating type mobile stage: Dynamic carrier or one-pressure mobile carrier. Zhao V-type shift 35·If the scope of patent application is 5%... The automatic imprinting stage: “° magnetic item is a moving stage or a pneumatic rotating stage. 11蜍Turning 36. The rolling method described in the third paragraph of the patent application 'at least includes the use of a controller to control the automatic imprinting: the step of rotating and heating the layer of imprinting material. 37. The method described in the third paragraph of the patent application 'transfers the pattern structure of the planar mold After the portion of the manufacturer of the pressure, at least: the area of the Χ Ρ material layer (a) the distance from the automatic embossing stage to the zero side and the swaying of the early position; (b) the pressure The printing material layer is subjected to another step of transferring the embossing pattern of the planar mold 22 200831295 to another portion of the region of the imprinting material layer. 38. The manufacturing method of the roller mold core further comprises at least (c) repeating the step & step and the step until the completion of the stamping in the direction of the region of the imprint material layer. 39. The method for manufacturing a roller mold core according to Item 38, further comprising: (d) stepping the automatic imprinting stage in a direction of one unit in a direction of the crucible; (e) performing another heating step on the layer of imprinting material Transferring the pattern structure of the planar mold to a portion of another region of the imprint material layer; (f) repeating the step (〇); and (g) repeating the step (d) in sequence , step (e), and the step (〇, until the entire embossing is completed . Imprinted layers 40. - A method of fabricating a mold core of the drum, at least comprising: (a) providing a main structure horizontally erected on an automatic embossing stage, wherein the main structure is cylindrical, and one of the main structures is covered with a layer of embossing material, and the automatic embossing stage comprises six The movement of the χ axis, the y-axis, the z-axis direction and the rotation of the linear motion of a degree of freedom includes the θ′ φ, γ-axis direction; a w-hole Ding 琢 planar die, having a relative-first surface and a second The surface 'and the first surface of the planar mold core is provided with a pattern structure, the first surface of the planar mold core is pressed against a portion of a region of the imprint material layer; 〇 (C) provides an impression cylinder pressure Provided on the second surface 23 200831295 of the planar mold to sandwich the planar mold between the impression cylinder and the main body structure; (d) performing a heating step on the imprint material layer to Transferring the pattern structure of the planar mold to the portion of the region of the embossed material layer; ^ (e) rotating the automatic embossing stage in a direction of 0 by a unit; (f) embossing the stamp The material layer is subjected to another heating step to apply the planar mold V Transferring the printed pattern to another portion of the region of the imprinting material layer j (g) sequentially repeating the step (4) and the step (1) until the pressure in the direction of the region of the imprinting material layer is completed. (8) the automatic imprinting stage is moved into the unit by a distance of one unit; ω is further heated to the layer of imprinting material to transfer the pattern structure of the planar mold to the layer of imprinting material The step (g) is repeated on a portion of the other region; (k), the step (8), the step (1), and the step (1) are sequentially repeated until the total pressure of the layer of the imprint material is completed. And (1) separating the layer of imprint material of the body structure from the planar mold. The method of manufacturing a roller mold core according to claim 40, wherein the material of the main structure is selected from the group consisting of a quasi-divided "wire heatable material. 42. The method of claim 40, wherein the material of the main structure is a semiconductor material, a material of a material, a material, a metal or a conductive material. 1Electrical material, glass 43. The manufacturer of the roller mold core as described in the scope of claim 4, 200831295 Nickel metal or steel metal method 'where the material of the main structure is 44. In the manufacture of the roller molds described by the 苴 来 & 兮 P u u u u u u u 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Red coating method, printing method, or chemistry 45. If the scope of the patent application is stipulated, the material of the roller layer of the film is the semiconductor material and the piezoelectric material. Glass materials, ceramic materials, metals or conductive materials.埒 = as described in the scope of claim 4, wherein the embossed material layer is a gilt, "square pigeon enamel film layer or a polymer material layer. 47. Where the (four) printed material layer is a photoresist layer. / 衮 极 之 之 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 Square nickel metal 49. For example, the method described in claim 40, in which the sorcerer; / / ^ ^ exhibition with the 杈 之 抨 ” ” ” ” 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 甲 之一 之一. The method of manufacturing a roller mold according to claim 40, wherein the material of the mold core composed of the flat wire permeable material is selected from the group consisting of the method of the invention. In the excimer laser band group. Light 51 · If applying for the patent method, the manufacturer of the roller mold core described in the Lizhong plane ^ 0 item, and the material of the Ning ° Hai Qian panel is quartz. Method: Medium:: The second special rotten item 40: The material of the material core (4) is higher than the material release agent of the embossing material layer in the 53. For example, please refer to the drum of the item (4) The method of setting the mold core includes at least the step of coating the first surface of the planar mold. 54. A method of producing a roller mold according to the 53rd patent application, wherein the material of the release agent is chloranil methane. 55. The method of manufacturing a roller mold according to claim 4, wherein the pattern of the pattern structure has a size of a micron size or a nanometer size. 56. The method of manufacturing a roller mold core according to the fourth aspect of the invention, wherein the impression cylinder is selected from the group consisting of high-permeability materials. 57. The manufacture of the roller mold core 26 200831295 The method in which the material of the impression cylinder is selected from a group consisting of a material permeable to the line. Knife (4) Light in the band of the band 58. If the scope of the patent application is 4#, the material of the impression cylinder is the side of the quartz u祀国弟4〇炤〇炤,七法' where the heating step is used, where it is used; the cylinder is used for the mold - the heating source is - laser, 5 9 · If you apply for the special 60 · If you apply for the patent scope 'The wavelength of the laser is between 1 nm and substantially ΙΟΟμπι of the manufacturing side of the roller mold described in the item. 01. The manufacturing method of the drum mold >f- returned by the patent application scope and the soil # ^ ^ member, wherein the laser system is a pseudo-molecular laser. U supply - private 62. The method of claiming patent scope, wherein the excimer Ray-248nm (KrF-248nm) 〇61 of the roller mold core is manufactured by a laser beam having a wavelength of fluorine 彳b gas 63. 'The excimer + j field - 193 nm (ArF-193nm) 〇 61 of the drum molds produced by the laser beam of the wavelength of the fluorine 彳 argon method 64 · as claimed in the scope of the patent, the excimer mine The laser beam of the manufacturing method of the roller mold core described in the 61 item is chloranil 27 200831295 -308 nm (XeCl_308 nm). 65. The method of manufacturing a roller mold core according to claim 61, wherein the laser wavelength of the excimer laser is lanthanum fluoride-35 lnm (XeF-35 lnm) 〇66. The method of manufacturing a roller mold core according to item 59, wherein the laser is a carbon dioxide laser. 67. The method of manufacturing a roller mold core according to claim 59, wherein the laser is a Syrian aluminum garnet (Nd_YAG) laser. 68. The method of manufacturing a roller mold according to claim 4, wherein one of the heating sources used in the heating step comprises a light energy source, a resistance heat source, an eddy current heat source or an electromagnetic source. Add the source. 69. The method of claim 4, wherein the heating step is performed on the layer of imprint material via the impression cylinder and the planar mold. II = Manufacture of Roller Moulds as described in Section 4G of the patent scope 4 The thermal step is carried out directly on the layer of I-print material without passing through the impression cylinder and the planar mold. The method of claim 7, wherein the automatic imprinting stage is a motor-driven stage. Servo motor drive stage or a brushless type 72. For example, the patented rib θA method, wherein the automatic embossing plant, the drum mold core, or the m moving mobile stage, superconducting type 73. For example, the method of claim 4, wherein the automatic imprinting plant A, the manufacturer of the drum mold core, the superconducting rotating stage or the pneumatic rotary magnetic floating type rotating table, a 74. The fourth method of the patent scope further includes at least the step of controlling the rotation and heating of the layer of the imprinting material by using the manufacturing method of the roller mold core of the crucible. Dynamic pressure P carrier movement, 29