200831195 Λ 胃‘ 九、發明說明： 【發明所屬之技術領域】 發明領域 本發明係有關於一種將塗布液吐出至液晶面板、電漿 5顯示器面板等基板，而形成塗膜之模具塗布機(die coater) 之缝模(slit die)及墊隙片（shim)。特別是有關於一種使塗膜 、 之膜厚分布均一之缝模及墊隙片。 發明背景 10 習知，在模具塗布機之狹縫，於第1唇與第2唇(lip)夾 入平面墊隙片（flat shim) ’形成狹縫。通常因供給之塗布液 壓力造成之狹縫間隙擴大或狹缝之長向（以下稱為幅度方 向）之塗布液之吐出分布不同等，形成於基板上之塗膜之膜 厚分布呈狹缝之中央部厚，兩端部薄之山形，其精確度為土 15 5%左右，實用上沒問題。 φ 而隨著近年之液晶面板或電漿顯示器面板之大型化， 對基板之塗布液之塗覆幅度擴大，同時膜厚分布亦要求高 精確度。 — 改善膜厚分布有使縫模之供給口從1點至幅度方向多 2〇點化，而使吐出分布佳之方法。然而，因塗布液不同，從 多點供給口供給而在缝模内部交會時不混合，而於塗膜產 生紋路，對品質造成不良影響。 於專利文獻1 ie出以墊隙片形成之歧管（manif〇ld)内部 寬度往唇前端面逐漸減少之構造。 5 200831195 於專利文獻2提出為防土塗膜端部之厚膜化，使狹缝 之吐出口之幅度較内部擴大而減少流至吐出口端部之塗布 液之構造。 然而，在該等構造，有不易以邏輯計算狹缝吐出口之 5形狀，而必須以試誤法決定，且僅可控制端部附近之膜厚 ’ 之問題。 . 於專利文獻3提出於其中一唇設置複數螺絲，以調整狹 缝間隔之構造° 9' 於專利文獻4提出將其中之一唇以2個塊構成，使該等 10塊相對移動，以調整狹缝間隔之構造。 然而，該等有模之構造複雜化’於保養後，需再度調 整而繁雜之問題。 【專利文獻1】曰本專利公開公報平9-253555號 【專利文獻2】日本專利公開公報2000-153199號 15 【專利文獻3】日本專利公開公報平9-131561號 【專利文獻4】日本專利公開公報2004-283820號 C号务明内容]1 發明概要 本發明即是鑑於前述習知問題點而發明者，其課題係 20提供可獲得高精確度之膜厚分布，構造簡單，保養後之再 調整亦不需要之缝模及墊隙片。 為解決前述課題，本發明之缝模係於係於第1唇及第2 唇之相對面形成有歧管，於前述第1唇與第2唇間夾入固疋 有墊隙片，且形成有連通於前述分歧管，以下端開口作為 6 200831195 之狹縫者，其中^前述塾隙片設有厚度 向中央部改變之錐形體。 邛朝 前述錐形體於使賴端部之流量增加，巾 — 5BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a die coater (die for discharging a coating liquid onto a substrate such as a liquid crystal panel or a plasma 5 display panel to form a coating film. Coater) A slit die and a shim. In particular, there is a slit die and a spacer sheet which are uniform in film thickness distribution. Background of the Invention It is known that a slit is formed in a slit of a die coater by sandwiching a flat shim between a first lip and a second lip. Generally, the discharge gap of the coating liquid formed on the substrate is different by the difference in the discharge distribution of the coating liquid due to the pressure of the coating liquid supplied or the longitudinal direction of the slit (hereinafter referred to as the amplitude direction). The central part is thick and the mountain ends are thin. The accuracy is about 15% of the soil. There is no problem in practical use. φ With the increase in the size of the liquid crystal panel or the plasma display panel in recent years, the coating range of the coating liquid of the substrate is enlarged, and the film thickness distribution also requires high precision. — The method of improving the film thickness distribution is to make the discharge port of the slit die more than 2 points from 1 point to the width direction, and to have a good discharge distribution. However, depending on the coating liquid, it is not mixed when it is supplied from a multi-point supply port and intersects inside the slit die, and the coating film is textured to adversely affect the quality. Patent Document 1 discloses a configuration in which a width of a manifold formed by a spacer sheet gradually decreases toward a front end surface of a lip. 5 Patent Literature 2 proposes a structure in which the thickness of the end portion of the anti-soil coating film is increased, and the width of the discharge port of the slit is increased from the inside to reduce the flow of the coating liquid to the end portion of the discharge port. However, in these configurations, it is difficult to logically calculate the shape of the slit discharge port, and it is necessary to determine the film thickness in the vicinity of the end portion by the trial and error method. Patent Document 3 proposes a configuration in which a plurality of screws are provided on one lip to adjust the slit spacing. In Patent Document 4, one of the lips is composed of two blocks, and the ten blocks are relatively moved to adjust. The construction of the slit spacing. However, these modal constructions are complicated to be re-adjusted and complicated after maintenance. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and the subject 20 provides a film thickness distribution with high accuracy, a simple structure, and maintenance. The slits and spacers are also not required for adjustment. In order to solve the above problems, the slit die of the present invention has a manifold formed on a surface opposite to the first lip and the second lip, and a gasket is formed between the first lip and the second lip. There is a branch pipe connected to the aforesaid branch pipe, and the lower end opening is a slit of 6 200831195, wherein the crevice sheet is provided with a tapered body whose thickness changes toward the center portion. The above-mentioned cone is used to increase the flow rate at the end of the shovel,
減少時，厚度可從前述墊隙片之兩端部朝向中量 反之，使狹縫端部之流量減少，中央部 前述錐形體之厚度從_求片兩端往中央部二—， 第2=塾隙片亦可在中央部於長向分割成^隙片及 10前 此時，較佳地，前述第1墊隙片及第2墊隙片之端 述墊隙片之中央部相互卡合。 ^面在 本發明:塾隙片係夹入fl唇與第2唇間，形成狹缝 亚且叹有厚度從前述塾隙片之兩端部往中央部改變之 錐形體。 欠之 根據本發明，由於僅以將錐形體墊隙片夾人以辰 2旦唇間而固定之簡單構造，即可對中央部增減狹縫端部^流 故可獲得高精確度之m厚分布，保養時之再調整亦不 而要。由於不需狹缝間隔之調整機構，故缝模之構造簡單。 Γ 方包方式】 較佳實施例之詳細說明 以下，依所附圖式，說明本發明之實施形態。 第1圖係本發明缝模1之截面圖。此缝模1係於第1唇2 2第2唇3間夾人錐形墊㈣4，以連結螺栓加以固定，而於 第1唇2.與第2唇3間形成狹縫6者。 如第2圖所示，第1唇2由不鏽鋼製之長尺塊體構成，於 7 200831195 暴 •’ 與帛2们之《面形私長肖延狀雜歧管7 。於歧管7 之中央形成其上壁至第之供給口8之塗布液供給 路徑9。 第2唇3與第1唇2同樣地，由不鏽鋼製之長尺塊體構 5成，與第1唇2之縱橫尺寸相同，厚度形成較第1#2薄。 _ 第1唇2與第2唇3之下端面以傾斜面11、12形成，俾使 - 狹縫6之下端開口吐出口 1〇突出。 錐形墊隙片4由不鏽鋼板構成，縱橫尺寸與前述第丨唇2 馨及第2唇3大致相同，於前述第_之歧管7及對應於其下方 1〇之部份設置切口 13，全體形成門形。從錐形墊隙片4之上端 面至切π 13之上緣之⑥度與從前述第之上端面至歧管 7之上壁緣之高度相同。錐形塾隙片仏切川之兩端緣間 之間隔與前述第1唇2之歧管7之長向長度相同。 、錐形墊隙片4在其中央部於狹缝6之長向分割成第鸿 15隙片4 a及第2塾隙片4 b。於第i塾隙片4 &之端緣形成矩形凹 _ °卩14於第2墊隙片扑之端緣形成與前述凹部14卡合之矩形 凸部15。此第！墊隙片4a及第2塾隙片扑之卡合構造不限於 此可為半圓形之凹部及凸部，亦可為切成L字形者。於第 • 1塾隙片&及第2墊隙片4b之與第2唇3相對之面形成厚度分 20別從端部往中央部變薄之錐形體。此錐形體以精密加工形 — 成當中央部之厚度為丨時，端部之厚度為^。 於前述第1唇2、第2唇3、錐形墊隙片4在長向以-定間 隔形成3列插通連結螺栓5之多數⑽。於第⑻與第2们 間爽入錐形墊隙片4，藉使連結螺栓5通過各孔16而鎖固， 8 200831195 而於第1唇2與第2唇3間形成相當於錐形墊隙片4厚度之間 隙的狹缝6。由於第1墊隙片4a與第2墊隙片仆以凹部14及凸 部15卡合，故不致移位，且相互密合，而不致產生塗布液 之外漏。狹縫6之下端開口形成吐出口 1〇，此吐出口 1〇藉由 5狹缝6、7、塗布液供給路徑9，連通於供給口 8。 接者，就由述結構構成之缝模1之作用作說明。When reducing, the thickness may be from the opposite end portions of the spacer sheet toward the middle amount, and vice versa, so that the flow rate at the end portion of the slit is reduced, and the thickness of the tapered portion at the center portion is from the both ends of the sheet to the central portion of the sheet two, the second = The crevice sheet may also be in the central portion before being divided into the slits and 10 in the longitudinal direction. Preferably, the central portion of the first spacer and the second spacer are engaged with each other. . In the present invention, the crevice sheet is sandwiched between the lip of the fl and the second lip, and a slit is formed, and a tapered body having a thickness varying from the both end portions of the crevice sheet toward the central portion is formed. According to the present invention, since only a simple structure in which the tapered spacer sheet is sandwiched between the two lips is used, the end portion of the slit can be increased or decreased in the central portion, so that high precision can be obtained. Thick distribution, no adjustment during maintenance. Since the adjustment mechanism of the slit spacing is not required, the structure of the slit die is simple. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 is a cross-sectional view of a slit die 1 of the present invention. This slit die 1 is formed by sandwiching a tapered pad (4) 4 between the first lip 2 2 and the second lip 3, and is fixed by a bolt, and a slit 6 is formed between the first lip 2. and the second lip 3. As shown in Fig. 2, the first lip 2 is made of a long-length block made of stainless steel, and is used in the 7th and 31st, 2011. A coating liquid supply path 9 from the upper wall to the first supply port 8 is formed in the center of the manifold 7. Similarly to the first lip 2, the second lip 3 is made of a long-length block made of stainless steel, and has the same thickness as the first lip 2, and has a thickness thinner than that of the first #2. The lower end faces of the first lip 2 and the second lip 3 are formed by the inclined faces 11 and 12, and the lower end of the slit 6 is opened and the discharge port 1 〇 is protruded. The tapered spacer 4 is made of a stainless steel plate, and has a longitudinal and lateral dimension substantially the same as that of the second lip 2 and the second lip 3, and a slit 13 is provided in the manifold 7 and a portion corresponding to the lower side thereof. All form a door shape. The height from the upper end surface of the tapered spacer 4 to the upper edge of the slit π 13 is the same as the height from the aforementioned upper end surface to the upper edge of the manifold 7. The interval between the end edges of the tapered nip sheet is the same as the length of the longitudinal direction of the manifold 7 of the first lip 2. The tapered spacer 4 is divided at its central portion into the first slit sheet 4a and the second slit sheet 4b in the longitudinal direction of the slit 6. A rectangular recess _ 卩 14 is formed on the end edge of the i-th slit sheet 4 & 14 to form a rectangular convex portion 15 that engages with the concave portion 14 at the end edge of the second spacer sheet. This first! The engaging structure of the spacer sheet 4a and the second crease sheet flap is not limited to the concave portion and the convex portion which may be semicircular, and may be cut into an L shape. A tapered body having a thickness portion 20 which is thinner from the end portion toward the center portion is formed on the surface of the first crease sheet & and the second spacer sheet 4b which is opposite to the second lip 3. The cone is precisely machined—when the thickness of the central portion is 丨, the thickness of the end portion is ^. In the first lip 2, the second lip 3, and the tapered spacer 4, a plurality of (10) insertion plugs 5 are formed in three rows in the longitudinal direction. Between the (8) and the second, the conical spacer 4 is cooled, and the connecting bolt 5 is locked by the holes 16 to form a conical pad between the first lip 2 and the second lip 3 in 200831195. A slit 6 having a gap between the thicknesses of the slits 4. Since the first spacer 4a and the second spacer are engaged by the concave portion 14 and the convex portion 15, they are not displaced and are in close contact with each other without causing leakage of the coating liquid. The lower end of the slit 6 is opened to form a discharge port 1 , and the discharge port 1 is connected to the supply port 8 via the slits 6 and 7 and the coating liquid supply path 9. The function of the slit die 1 composed of the structure will be described.
當從圖中未示之塗布液槽將塗布液供給至供給口8 時，塗布液通過塗布液供給路徑9，導入至歧管7，從歧管7 之中央部向兩端部擴展，藉由狹缝6，從吐出口 1〇吐出。當 10使位於縫模1或缝模i下方之工作台17於與狹縫6之長向形 成直角之方向相對移動時，從狹縫6之吐出口 1〇吐出之塗布 液可塗布於载置在工作台17之基板18上。 15 20 由於於錐形墊隙片4如前述設置中央部變薄之錐形 體’故如第3圖所示，狹縫6之中央部之間隙較端部之間隔 狹窄。因此，從狹縫6之中央部吐出之塗布液之流量較從端 部吐出之流量少。如第3圖中之兩點鏈線所示，狹縫6之中 央部之間隙因塗布液之吐纽力而擴大，但擴大較習知之 平面墊隙片少。結果，如第4⑷圖所示，呈在狹縫6之中央 部厚’兩端部薄之山形之基板18上的膜厚分布如第4(b)圖所 不’均-地調整㈣縣坦之麟分布。 第5圖係顯示第2圖之錐形體整隙片4之變形例之 =塾隙片4 °當臈厚分布在狹缝6之中央部薄，兩端部厚 時，使用設置有此種厚度從兩端部往中央部增厚之錐形: 之錐形墊㈣4’取代第2圖所示之錐形塾隙片4。錐形體以 9 200831195 精密加工形成當中央部之厚度為崎，端部之厚度為〇9。 此錐形墊隙片4,亦與前述錐形塾隙片4 _地在^中央部 於狹缝6之長向分割成第1墊隙片4a，及第2墊隙片仙'，。於、第^ 墊隙片4a之端緣形成凹部14，於第2塾隙片扑，之端緣形成 與前述凹部14卡合之凸部15。 ’ ❿When the coating liquid is supplied from the coating liquid tank (not shown) to the supply port 8, the coating liquid is introduced into the manifold 7 through the coating liquid supply path 9, and is expanded from the central portion of the manifold 7 to both end portions. The slit 6 is discharged from the discharge port 1〇. When the table 17 located under the slit die 1 or the slit die i is relatively moved in a direction perpendicular to the longitudinal direction of the slit 6, the coating liquid discharged from the discharge port 1 of the slit 6 can be applied to the mounting. On the substrate 18 of the table 17. 15 20 Since the tapered spacer 4 is provided with a tapered body whose central portion is thinned as described above, as shown in Fig. 3, the gap between the central portions of the slits 6 is narrower than the interval between the ends. Therefore, the flow rate of the coating liquid discharged from the central portion of the slit 6 is smaller than the flow rate discharged from the end portion. As shown by the two-dot chain line in Fig. 3, the gap between the central portions of the slits 6 is enlarged by the throwing force of the coating liquid, but the expansion is smaller than that of the conventional flat spacer sheets. As a result, as shown in Fig. 4(4), the film thickness distribution on the substrate 18 having a thin mountain portion at the center portion of the slit 6 is thinner as shown in Fig. 4(b). The distribution of the Lin. Fig. 5 is a view showing a modification of the tapered plate 4 of Fig. 2 = crevice 4 ° When the thickness of the ridge is thin in the central portion of the slit 6, and the thickness is thick at both ends, the thickness is set. The taper is thickened from the both end portions to the central portion: the tapered pad (4) 4' replaces the tapered crevice sheet 4 shown in Fig. 2. The cone is precisely machined in 9 200831195 to form a thickness at the center portion and a thickness of 〇9 at the end. The tapered spacer 4 is also divided into the first spacer 4a and the second spacer by the longitudinal direction of the slit 6 in the central portion of the tapered crevice sheet 4. A concave portion 14 is formed at an end edge of the second spacer sheet 4a, and a convex portion 15 that engages with the concave portion 14 is formed at an end edge of the second crevice sheet piece. ’ ❿
如此，當使用設有中央部増厚之錐形體之錐形塾隙片 4’時，狹縫6之中央部之間隙較端部之間隙狹窄。因此，如 第6圖所示’從狹縫6之中央部吐出之塗布液之流量較從端 部吐出之流量大。狹缝6之中央部之間隙因塗布液之吐出壓 10力而更擴大，但擴大較習知之平墊隙片少。結果，如第7(a) 圖所示，在狹縫6之中央部薄，兩端部厚之山形之基板18上 之膜厚分布如第7(b)圖所示，均一地調整而形成平坦之膜厚 分布。 在前述縫模1中，只要於第1唇2與第2唇3間夾入錐體墊 15隙片4 ' 4’，即可調整狹缝6之間隙。因此，分解第丨唇2及 第2唇3而保養時，同樣地只要組裝，即可調整間隙，故不 需再調整。由於亦不需要習知使用調整螺栓之狹縫間隔調 整機構，故缝模1之構造簡單。 實施例係以習知無錐形體之墊隙片（厚度0.8nim)及本 20發明錐形墊隙片（兩端部厚度0.84mm、中央部厚度0.8mm)， 進行塗布之結果，如第8圖所示，習知膜厚分布為±5%，本 發明為±2%。 Γ圖式簡言兒明3 第1圖係本發明缝模之截面圖。 10 200831195 ' 第2圖係第1圖之缝模之分解立體圖。 第3圖係使用第2圖之錐形墊隙片之第1圖之I-Ι線截面 圖。 第4(a)圖係使用習知之平面墊隙片時之塗膜之截面圖， 5 第4(b)圖係使用第2圖之錐形墊隙片時之塗膜之截面圖。 • 第5圖係顯示錐形墊隙片之變形例之立體圖。 • 第6圖係使用第5圖之錐形墊隙片之第1圖之Ι·Ι線截面 圖。 • 第7(a)圖係使用習知之平面墊隙片時之塗膜之截面 10 圖，第7(b)圖係使用第2圖之錐形墊隙片時之塗膜之截面圖。 第8圖係顯示使用習知墊隙片與本發明錐形墊隙片時 之膜厚之圖表。 【主要元件符號說明】 1...縫模 8...供給口 2...第1唇 9...塗布液供給路徑 3...第2唇 10...吐出口 4...錐形墊隙片 11...傾斜面 4’...錐形墊隙片 12…傾斜面 4a...第1墊隙片 13···切口 4a’…第1墊隙片 14···凹部 4b...第2墊隙片 15…凸部 4b’...第2墊隙片 16…孔 5...連結螺栓 17...工作台 6...狹缝 18...基板 7...歧管 11Thus, when the tapered crevice sheet 4' having the tapered portion having the central portion is used, the gap at the central portion of the slit 6 is narrower than the gap at the end portion. Therefore, as shown in Fig. 6, the flow rate of the coating liquid discharged from the central portion of the slit 6 is larger than the flow rate of the discharge liquid from the end portion. The gap between the central portions of the slits 6 is further enlarged by the discharge pressure of the coating liquid, but the expansion is smaller than that of the conventional flat washers. As a result, as shown in Fig. 7(a), the film thickness distribution on the mountain-shaped substrate 18 which is thin at the center portion of the slit 6 and which is thick at both ends is uniformly adjusted as shown in Fig. 7(b). Flat film thickness distribution. In the slit die 1, the gap between the slits 6 can be adjusted by sandwiching the slit pad 4'4' between the first lip 2 and the second lip 3. Therefore, when the second lip 2 and the second lip 3 are disassembled and the maintenance is performed, the gap can be adjusted as long as it is assembled, so that it is not necessary to adjust. Since the slit spacing adjustment mechanism for adjusting the bolt is not required, the construction of the slit die 1 is simple. In the embodiment, a conventional non-conical spacer sheet (thickness: 0.8 nm) and a tapered spacer sheet of the present invention (thickness at both ends of 0.84 mm, central portion thickness: 0.8 mm) were applied as shown in the eighth example. As shown, the conventional film thickness distribution is ±5%, and the present invention is ±2%. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a slit die of the present invention. 10 200831195 ' Fig. 2 is an exploded perspective view of the slit mold of Fig. 1. Fig. 3 is a cross-sectional view taken along the line I-Ι of Fig. 1 of the tapered spacer of Fig. 2. Fig. 4(a) is a cross-sectional view of a coating film when a conventional flat spacer sheet is used, and Fig. 4(b) is a cross-sectional view of the coating film when the tapered spacer sheet of Fig. 2 is used. • Fig. 5 is a perspective view showing a modification of the tapered spacer. • Figure 6 is a cross-sectional view of the Ι·Ι line of Figure 1 using the tapered spacer of Figure 5. • Figure 7(a) shows the cross-section of the coating film when using a conventional flat spacer sheet. Figure 10(b) shows a cross-sectional view of the coating film when the tapered spacer sheet of Figure 2 is used. Fig. 8 is a graph showing the film thickness when a conventional spacer sheet and a tapered spacer sheet of the present invention are used. [Description of main component symbols] 1...slot die 8...supply port 2...first lip 9...coating liquid supply path 3...second lip 10...discharge port 4... Conical spacer 11...inclined surface 4'...conical spacer 12...inclined surface 4a...first spacer 13···cut 4a'...first spacer 14·· The recessed portion 4b...the second spacer sheet 15...the convex portion 4b'...the second spacer sheet 16...the hole 5...the bolt 17...the table 6...the slit 18... Substrate 7...manifold 11